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JP2009007636A - 低屈折率膜及びその成膜方法、並びに反射防止膜 - Google Patents

低屈折率膜及びその成膜方法、並びに反射防止膜 Download PDF

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Publication number
JP2009007636A
JP2009007636A JP2007170584A JP2007170584A JP2009007636A JP 2009007636 A JP2009007636 A JP 2009007636A JP 2007170584 A JP2007170584 A JP 2007170584A JP 2007170584 A JP2007170584 A JP 2007170584A JP 2009007636 A JP2009007636 A JP 2009007636A
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JP
Japan
Prior art keywords
film
refractive index
low refractive
sio
mgf
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP2007170584A
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English (en)
Japanese (ja)
Inventor
Mikihiro Taketomo
幹裕 竹友
Toshitaka Kawashima
利孝 河嶋
Yoshihiro Oshima
宜浩 大島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2007170584A priority Critical patent/JP2009007636A/ja
Priority to US12/666,453 priority patent/US20100186630A1/en
Priority to CN2008800219990A priority patent/CN101688292B/zh
Priority to PCT/JP2008/059189 priority patent/WO2009001634A1/fr
Priority to EP08752985A priority patent/EP2159301A1/fr
Priority to KR1020097023555A priority patent/KR20100028535A/ko
Publication of JP2009007636A publication Critical patent/JP2009007636A/ja
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
JP2007170584A 2007-06-28 2007-06-28 低屈折率膜及びその成膜方法、並びに反射防止膜 Ceased JP2009007636A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2007170584A JP2009007636A (ja) 2007-06-28 2007-06-28 低屈折率膜及びその成膜方法、並びに反射防止膜
US12/666,453 US20100186630A1 (en) 2007-06-28 2008-05-20 Low-refractive-index film, method of depositing the same, and antireflection film
CN2008800219990A CN101688292B (zh) 2007-06-28 2008-05-20 低折射率膜、其沉积方法以及防反射膜
PCT/JP2008/059189 WO2009001634A1 (fr) 2007-06-28 2008-05-20 Film de faible indice de réfraction, procédé servant à former le film de faible indice de réfraction et film antireflet
EP08752985A EP2159301A1 (fr) 2007-06-28 2008-05-20 Film de faible indice de réfraction, procédé servant à former le film de faible indice de réfraction et film antireflet
KR1020097023555A KR20100028535A (ko) 2007-06-28 2008-05-20 저굴절률 막 및 그 성막 방법과 반사 방지막

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007170584A JP2009007636A (ja) 2007-06-28 2007-06-28 低屈折率膜及びその成膜方法、並びに反射防止膜

Publications (1)

Publication Number Publication Date
JP2009007636A true JP2009007636A (ja) 2009-01-15

Family

ID=40185457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007170584A Ceased JP2009007636A (ja) 2007-06-28 2007-06-28 低屈折率膜及びその成膜方法、並びに反射防止膜

Country Status (6)

Country Link
US (1) US20100186630A1 (fr)
EP (1) EP2159301A1 (fr)
JP (1) JP2009007636A (fr)
KR (1) KR20100028535A (fr)
CN (1) CN101688292B (fr)
WO (1) WO2009001634A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012206913A (ja) * 2011-03-30 2012-10-25 Ngk Insulators Ltd フッ化マグネシウム焼結体、その製法及び半導体製造装置用部材
JP2017516914A (ja) * 2014-04-11 2017-06-22 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 光波分離格子および光波分離格子を形成する方法
JP2022541663A (ja) * 2019-07-26 2022-09-26 アクセス・メディカル・システムズ，リミテッド 生化学試験用の干渉センサ

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101660300B1 (ko) 2014-12-30 2016-09-27 한국세라믹기술원 초음파 스프레이 코팅법을 이용한 저굴절 반사방지막의 제조방법
CN107219567B (zh) * 2017-06-21 2019-06-28 北京富兴凯永兴光电技术有限公司 一种成膜均匀的低折射率光学镀膜材料及制备方法
CN116840947A (zh) * 2023-03-01 2023-10-03 安徽立光电子材料股份有限公司 一种宽入射角的磁控溅射红外增透膜及其制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6064301A (ja) * 1983-09-20 1985-04-12 Olympus Optical Co Ltd 光学部品の反射防止膜とその形成方法
JPH04223401A (ja) * 1990-12-25 1992-08-13 Nikon Corp 光学部品用薄膜及びこれを有する光学部品及びその製造方法
JPH10195636A (ja) * 1996-12-26 1998-07-28 Oike Ind Co Ltd 耐久性に優れた反射防止材
JP2004151698A (ja) * 2002-10-07 2004-05-27 Tdk Corp ホログラム記録媒体

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US5744227A (en) * 1995-04-03 1998-04-28 Southwall Technologies Inc. Antireflective coatings comprising a lubricating layer having a specific surface energy
EP0822996B1 (fr) * 1995-04-25 2003-07-02 VON ARDENNE ANLAGENTECHNIK GmbH Systeme de pulverisation au moyen de magnetrons cylindriques rotatifs alimentes par courant alternatif
JP3808917B2 (ja) * 1995-07-20 2006-08-16 オリンパス株式会社 薄膜の製造方法及び薄膜
JPH09249968A (ja) * 1996-03-14 1997-09-22 Olympus Optical Co Ltd 光学薄膜の製造方法及び製造装置
DE19644752A1 (de) * 1996-10-28 1998-04-30 Leybold Systems Gmbh Interferenzschichtensystem
JP3190610B2 (ja) * 1996-12-04 2001-07-23 ティアールダブリュー インコーポレイテッド 実質的に平坦な膜を形成する方法
US6266193B1 (en) * 1997-07-24 2001-07-24 Cpfilms Inc. Anti-reflective composite
TW442672B (en) * 1999-11-25 2001-06-23 Nat Science Council The technique for deposition multilayer interference thin films by using only one coating material (pure silicon)
JPWO2002063064A1 (ja) * 2001-02-07 2004-06-10 旭硝子株式会社 スパッタ装置及びスパッタ成膜方法
JP4033286B2 (ja) * 2001-03-19 2008-01-16 日本板硝子株式会社 高屈折率誘電体膜とその製造方法
KR20030013428A (ko) * 2001-03-22 2003-02-14 소니 가부시끼 가이샤 반사형 표시 장치 및 도광판 및 도광판의 제조 방법
US20030201164A1 (en) * 2002-04-29 2003-10-30 Johnson Linda F. Method of making electrically conductive, IR transparent metal oxide films
JP4486838B2 (ja) * 2003-04-25 2010-06-23 旭硝子株式会社 酸化ケイ素膜の製造方法および光学多層膜の製造方法
JP2005048260A (ja) * 2003-07-31 2005-02-24 Canon Inc 反応性スパッタリング方法
US20080316628A1 (en) * 2007-06-25 2008-12-25 Nisca Corporation Density filter, method of forming the density filter and apparatus thereof
JP4492691B2 (ja) * 2007-12-14 2010-06-30 ソニー株式会社 透明光学膜の成膜方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6064301A (ja) * 1983-09-20 1985-04-12 Olympus Optical Co Ltd 光学部品の反射防止膜とその形成方法
JPH04223401A (ja) * 1990-12-25 1992-08-13 Nikon Corp 光学部品用薄膜及びこれを有する光学部品及びその製造方法
JPH10195636A (ja) * 1996-12-26 1998-07-28 Oike Ind Co Ltd 耐久性に優れた反射防止材
JP2004151698A (ja) * 2002-10-07 2004-05-27 Tdk Corp ホログラム記録媒体

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012206913A (ja) * 2011-03-30 2012-10-25 Ngk Insulators Ltd フッ化マグネシウム焼結体、その製法及び半導体製造装置用部材
JP2017516914A (ja) * 2014-04-11 2017-06-22 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 光波分離格子および光波分離格子を形成する方法
JP2022541663A (ja) * 2019-07-26 2022-09-26 アクセス・メディカル・システムズ，リミテッド 生化学試験用の干渉センサ
JP7512370B2 (ja) 2019-07-26 2024-07-08 アクセス・メディカル・システムズ，リミテッド 生化学試験用の干渉センサ
JP2024156218A (ja) * 2019-07-26 2024-11-01 アクセス・メディカル・システムズ，リミテッド 生化学試験用の干渉センサ

Also Published As

Publication number Publication date
US20100186630A1 (en) 2010-07-29
WO2009001634A1 (fr) 2008-12-31
CN101688292A (zh) 2010-03-31
EP2159301A1 (fr) 2010-03-03
KR20100028535A (ko) 2010-03-12
CN101688292B (zh) 2012-03-21

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