JP2009004818A - Solid-state laser light oscillator and solid-state laser light oscillator - Google Patents

Abstract

An object of the present invention is to accurately set a resonator length in an unstable resonator in which at least one of a reflecting surface and an output coupler has a flat surface or a very gentle curvature, and the reflecting surface is parallel to the output coupler. Solve the problem of degree.
A parallelism adjusting device for adjusting an optical parallelism between a reflecting surface and an output coupler is provided. The parallelism adjusting device includes a holding member 11 that holds an output coupler and a holding member 12 that holds a reflecting surface. The holding member 11 and the holding member 12 have a concave spherical surface and a convex shape having the same curvature. A first sliding surface 11A and a second sliding surface 11A that are in contact with each other are formed by either one of the spherical surfaces and the other, or one of the concave conical surface and the convex spherical surface, and the other; The resonator length is accurately set by adjusting the resonator length and the parallelism between the reflecting surface and the output coupler by adjusting the resonator length by sliding the two sliding surfaces in contact with each other.
[Selection] Figure 2

Description

  The present invention relates to a solid-state laser oscillator, and more particularly, to a solid-state laser oscillator and a solid-state laser oscillator, in which a laser medium that is excited by a pumping light source such as a semiconductor laser is disposed in a resonator.

A solid-state laser oscillator in which a laser medium that emits light by being excited by irradiation of excitation light from a semiconductor laser or the like is disposed in a resonator, and a reflecting surface and an output coupler surface that constitute the resonator are a concave spherical surface. In the laser oscillator having the so-called stable resonator configuration, the parallelism between the reflecting surface and the output coupler is set somewhat loosely with respect to the laser oscillation.
However, as described above, there is a problem in that the production of an optical resonator having an optically concave spherical surface in the reflecting surface or output coupler constituting the resonator itself increases the cost.

On the other hand, a laser oscillator with a so-called unstable resonator configuration in which at least one of the reflecting surface and the output coupler has a very gentle curvature, which is a plane or a plane, is mass-produced for the reflecting surface or the output coupler. Therefore, it can be easily manufactured (see Non-Patent Document 1).
However, in this case, the inclination of the reflecting surface and the output coupler is a major factor that determines the spot shape of the laser light. Therefore, in the case of such an unstable resonator configuration, at least one of the output coupler or the reflection mirror is used to keep the laser beam spot shape a perfect circle and perform efficient laser oscillation. It is necessary to provide an inclination adjustment mechanism.
For this reason, in general, in a laser oscillator having an unstable resonator, there is a problem not only in miniaturization but also in maintaining the setting stably over a long period of time.
In particular, in order to realize a laser oscillator having an extremely short resonator length of about 1 millimeter, it is necessary to fix the long-term stability under spatial constraints.

Journal of Optical Society of America, B / Vol.16, No.3 / March 1999, (Fig.8)

  The present invention relates to a resonance in a solid-state laser optical oscillator having an extremely short resonator length, in which at least one of a reflecting surface and an output coupler is constituted by an unstable resonator having a flat surface or a very gentle curvature. Corrects the length of the instrument, solves the problem of parallelism between the reflecting surface and the output coupler, and can reliably perform single longitudinal mode oscillation. A solid-state laser light oscillator and a solid-state laser light oscillator device are provided.

The solid-state laser optical oscillator according to the present invention is a solid-state laser optical oscillator in which a laser medium that emits light by optical excitation with a predetermined wavelength is disposed in a resonator having a reflecting surface and an output coupler facing the reflecting surface.
The resonator has an unstable resonator configuration in which at least one of the reflecting surface or the output coupler has a very gentle curvature close to a plane or a plane, and is provided between the reflecting surface and the output coupler. A parallelism adjusting device for adjusting the optical parallelism is provided.

The parallelism adjusting device includes a first holding member that holds the output coupler and a second holding member that holds the reflecting surface.
A concave spherical surface and a convex spherical surface having the same curvature in a state in which the first holding member and the second holding member are opposed to each other with the laser medium disposed between the output coupler and the reflecting surface. A first sliding surface and a second sliding surface that are abutted with each other and formed by either one of the two and the other are formed.
The first and second holding members are held by the first and second holding members by rotating the first and second holding members with the first and second sliding surfaces sliding against each other. The reflection surface and the output coupler are finely adjusted with respect to each other.

The solid-state laser beam oscillation device according to the present invention includes an excitation light source and a laser beam resonator.
The laser light resonator has a reflecting surface and an output coupler opposite to the reflecting surface, and a laser medium that emits and emits light by excitation light from an excitation light source is disposed in the resonator.
The resonator has an unstable resonator type configuration in which at least one of the reflecting surface and the output coupler has a flat surface or a gentle curvature close to the flat surface.
The resonator includes a parallelism adjusting device that adjusts an optical inclination between the reflecting surface and the output coupler.

The parallelism adjusting device includes a first holding member that holds the output coupler and a second holding member that holds the reflecting surface.
With the first holding member and the second holding member of the parallelism adjusting device in a state where the laser medium is disposed and opposed between the output coupler and the reflecting surface held by these, A first sliding surface and a second sliding surface that collide with each other by either one of the concave spherical surface and convex spherical surface having the same curvature and the other, or one of the concave conical surface and convex spherical surface and the other. A surface is formed.
An output coupler held on the first and second holding members by rotating the first and second holding members by sliding the first and second sliding surfaces together, and The configuration is such that the mutual inclination with the reflecting mirror is finely adjusted.

  As described above, in the solid-state laser optical oscillator according to the present invention, the output coupler and the reflecting surface constituting the resonator have the concave shape having the same curvature of the first and second holding members respectively holding them. Since the tilt adjustment is performed by sliding the spherical surface and the convex spherical surface or by sliding the concave conical surface and the convex spherical surface, the parallelism can be adjusted smoothly and accurately with high accuracy.

Also in the solid-state laser light oscillation device according to the present invention, the resonator in which the laser medium excited and emitted by the excitation light is arranged has a reflecting surface and an output coupler constituting the resonator, as described above. Since the tilt adjustment is performed by sliding the concave spherical surface and the convex spherical surface having the same curvature or by sliding the concave conical surface and the convex spherical surface, the adjustment can be performed smoothly and accurately.
Therefore, the parallelism adjustment between the reflecting surface and the output coupler can be performed with high accuracy.

As described above, according to the present invention, the output coupler 6 and the reflecting surface (reflecting mirror) 7 can slide and swing with each other, and the first and second holding members 11 and 12, the mutual adjustment of the inclination of the output coupler 6 and the reflecting surface (reflecting mirror) 7 can be performed smoothly and accurately with parallelism setting when the solid-state laser beam oscillator 9 is assembled and manufactured. Since it can be performed, high-efficiency oscillation, single transverse mode oscillation, and a perfect circle laser spot can be obtained.
And since the 1st and 2nd holding member 11 and 12 itself which performed such parallelism adjustment mutually adhere, parallelism can be maintained stably after adjustment.

Further, by forming the output coupler 6 on the front end face of the laser medium 8 on the incident side of the excitation light and integrating it, the parallelism of the output coupler 6 and the reflection mirror 7 including the laser medium 8 is adjusted. Therefore, light can be efficiently incident on the laser medium 8 and the oscillation efficiency can be increased.
At the same time, the overall size and the structure can be simplified, and not only the productivity can be improved, but also a solid laser light oscillator and a solid laser light oscillation device useful as a laser light source in a small device can be configured.

  Furthermore, by providing the resonator length adjusting device 13, a short resonator length can be set accurately and stably in combination with the highly accurate parallelism adjustment by the parallelism adjusting device 10. A solid-state laser beam oscillator and a solid-state laser beam oscillation device capable of longitudinal mode oscillation can be configured.

Embodiments of a solid-state laser light oscillator and a solid-state laser light oscillation apparatus according to the present invention will be described, but the present invention is not limited to these embodiments and examples.
FIG. 1 is a schematic configuration diagram of an example of a solid-state laser light oscillation apparatus to which the present invention is applied. In this configuration, for example, an excitation light source using a semiconductor laser with an oscillation wavelength of 810 nm, a cylindrical lens 2, a collimating lens 3, a dichroic mirror 4, and a solid-state laser light oscillator 9 are provided.

The solid-state laser light oscillator 9 has a required transmittance and includes a resonator composed of an output coupler 6 that emits laser light to the outside and a reflection mirror 7.
In this resonator, that is, between the output coupler 6 and the reflection mirror 7, there is a laser medium 8 that emits excitation light by excitation light from the excitation light source 1, for example, excitation light having a wavelength of 810 nm, for example, Nd: YVO4. It is arranged.

In this configuration, laser light from an excitation light source 1, for example, a semiconductor laser, is focused in one direction by a cylindrical lens 2, transmitted through a dichroic mirror 4 as parallel light by a collimating lens 3, and condensed by a condenser lens 5. Then, the light is transmitted through the output coupler 6 and is incident on the laser medium 8 as a condensed light.
The laser medium 8 is excited by the incidence of the excitation light, and luminescence is emitted. At this time, when only one of the resonance wavelengths determined by the distance between the output coupler 6 and the reflection mirror 7, that is, the resonator length L, is within the oscillation gain bandwidth of the laser medium 7, a single longitudinal mode is obtained. Oscillation occurs.

  The laser light oscillated in this way is used as a laser light source device that emits from the output coupler 6 and is reflected by the dichroic mirror 4 so that the output laser light is led out, for example. Alternatively, although not shown, this output laser light is introduced into an optical fiber, MOPA (Masterr Oscillator Power Amplifier System) and / or SHG (Secondary Harmonic Generator).

And the output coupler that constitutes the resonator, that is, when the parallelism between the laser beam emitting side mirror and the reflecting mirror is accurately set, the laser spot can obtain a single transverse mode perfect circle spot For this purpose, it is necessary that the output coupler 6 and the reflection mirror 7 face each other at a predetermined position with a high degree of parallelism with the laser medium 8 interposed therebetween.
Therefore, in the present invention, as shown in FIG. 2, for example, a schematic enlarged cross-sectional view of an example of the solid-state laser light oscillator 9 according to the present invention in the laser light source device shown in FIG. A parallelism adjusting device 10 is provided for adjusting the optical parallelism with the mirror 7 when the solid-state laser light oscillator 9 is assembled.

On the other hand, in order to obtain the above-described single longitudinal mode, the longitudinal mode interval (FSR: Free Spectrum Range) determined by the resonator length is approximately equal to the intrinsic oscillation gain bandwidth of the gain medium. By controlling the mode interval as described above, oscillation in the longitudinal multimode is suppressed.
For example, when the laser medium 8 is Nd: YVO4, a resonator length L (L = λ2 / FS) that selectively resonates at any wavelength of photoluminescence around 914 nm and around 1064 nm generated by optical excitation. R), but when oscillating at 914 nm, S. When oscillating at about R = 2 nm or 1064 nm, F.R. S. It is necessary to set R to about 1 nm.

These are F.I. S. At R = 2 nm, the resonator length L is about 209 μm, F.R. S. R = 1 nm corresponds to about 566 μm. Now, considering that the refractive index of Nd: YVO4 is about 2, the laser oscillator has an extremely short optical path length. In order to keep the oscillation wavelength and the oscillation power constant, it is necessary to manage the resonator length on the order of 10 nm.
Therefore, in order to set a single longitudinal mode, a resonator length adjusting device 13 is provided.

  The solid-state laser light oscillator has a resonator configuration in which at least one of the output coupler 6 and the reflection mirror 7 has a plane or a very gentle curvature close to the plane.

First, an example of the parallelism adjusting device 10 will be described. The parallelism adjusting device 10 includes a first holding member 11 that holds the output coupler 6 and a second holding member 12 that holds the reflecting surface, that is, the reflecting mirror 7.
The first holding member 11 and the second holding member 12 of the parallelism adjusting device 10 are provided with a laser medium 8 between the output coupler 6 held by them and the reflection mirror 7. For example, one of the concave spherical surface or convex spherical surface having the same curvature with a radius of curvature of 50 mm to 100 mm and the other, or one of the concave conical surface and convex spherical surface, and the other. The first sliding surface 11A and the second sliding surface 12A are formed so as to abut each other. In the example shown in FIG. 2, the first rubbing surface 11A is a concave spherical surface, and the second rubbing surface 12A is a convex spherical surface.

  The first and second holding members 11 and 12 are made of a low thermal expansion coefficient ceramic, for example, or an alloy material such as an invar material, and are held by the first and second holding members 11 and 12. It is desirable to avoid fluctuations due to heat in the distance between the output coupler 6 and the reflection mirror 7.

  The first holding member 11 has a cylindrical shape with a hollow portion 11H formed at the center, for example, a cylindrical shape, its front end surface 11B is a flat surface orthogonal to the axis, and its rear end surface has the shape described above, for example, The first spherical contact surface 11A is a concave spherical surface.

  The second holding member 12 includes a cylindrical part 121 in which a hollow part 12H is formed, and a closing plate 122 joined to the rear end face 11B. And the front end surface of the cylindrical part 121 is made into the 2nd sliding surface 12A of the convex spherical surface of the shape mentioned above, for example, and the back end surface 11B is made into the flat surface orthogonal to the axial center of the cylindrical part 121. The closing plate 122 is joined to the flat surface.

The cylindrical portion 121 of the first holding member 11 and the second holding member 12 can be configured with an optical concave lens and a convex lens having a through hole formed in the center portion.
In the illustrated example, the output coupler 6 held by the first holding member 11A is formed on the end face of the laser medium 8, that is, the front end face, and the laser medium 8 is held by the first holding member 11. This is the case.

As the laser medium 8, a crystal doped with rare earth such as Nd, Er, Yb, Sm, Pr, or glass can be used, and the thickness thereof is, for example, 50 μm to 300 μm.
Thus, the laser medium 8 generates heat because it is thin and is selected from those that absorb the excitation light well.
The heat generated in the laser medium 8 needs to be diffused efficiently, and as described above, the laser medium 8 is thin and mechanical strength cannot be sufficiently obtained. As shown in FIG. 2, a first base 31 is provided and placed in close contact therewith.

  The first base 31 may be composed of, for example, a sapphire substrate or a transmissive ceramic substrate that exhibits high transmittance with respect to the excitation light and oscillation light wavelengths and has heat dissipation, that is, high thermal conductivity. it can. However, an extremely local heat distribution is formed in the vicinity of the condensing position of the laser beam due to the heat generated in the piece or the laser medium 8, and refraction specific to the material constituting the laser medium 8, for example, Nd: YVO 4 specific By using the thermal coefficient gradient (dn / dt: refractive index of n laser medium 8, t is temperature), instability in an unstable resonator by a reflecting mirror or an output coupler, which is a plane or a plane close to a plane, that is, an optical path Try to compensate for the divergence somewhat.

On the other hand, a laser medium substrate 33 constituting the laser medium 8 is prepared. The laser medium substrate 33 is selected to be considerably thicker than, for example, 50 μm to 300 μm, which is the thickness of the target laser medium 8, and a laser medium substrate 33 having a mechanical strength sufficient for handling is prepared. Then, the smoothed main surface is used as an output coupler 6, and the output coupler 6 side is joined and integrated with the first base 31 as shown in a schematic sectional view in FIG. 3.
In this state, the laser medium substrate 33 bonded to the first base 31 is cut and polished from the side opposite to the bonding side to the first substrate 31 to the required thickness indicated by the broken line a in FIG. The medium 8 is configured.

  The first base 31 on which the output coupler 6 and the laser medium 8 are formed in this way is shown in FIG. 4 and the sectional view disclosed by disassembling the first and second holding members 11 and 12. As shown, for example, the first holding member 11 is joined via a ring-shaped spacer 34 as necessary.

  The output coupler 6 is based on the reflectance of the reflecting mirror 7, the thickness of the laser medium 8, for example, when the laser medium 8 is Nd: YVO4, the optical characteristics of the material such as the Nd doping amount, the resonator loss, etc. The transmittance is obtained, and a thin film coating having a transmittance of 0.5% to 99.5% is formed on the front end surface of the laser medium substrate 33 by, for example, vapor deposition of Ta2O5 or TiO2, for example, as described above. be able to.

On the other hand, the reflection mirror 7 is attached to the second holding member 12 via a resonator length adjusting device 13 that finely adjusts the resonator length.
In this case, the reflecting mirror 7 is provided on the second base 32, for example, a sapphire substrate, for the purpose of increasing the waste heat property and improving the matching of the thermal expansion coefficient with the resonator length adjusting device 13 as necessary. Bonded and bonded to the resonator length adjusting device 13, for example, a piezoelectric element using PZT (PbTiO 3 -PbZrO) via the second base 32.
The resonator length adjusting device 13 is attached to the closing plate 122 of the second holding member 12 in the illustrated example.
The resonator length adjusting device 13 can be constituted by an electromagnetic displacement means such as a so-called voice coil motor in addition to a piezoelectric element.
The blocking plate 122 is formed with a through hole 122 </ b> H for leading out the terminal wire of the resonator length adjusting device 13.

  The second base 32 is not limited to a sapphire substrate, and any material having a thermal expansion coefficient close to that of the base material of the reflection mirror 7 may be used. However, when the base material of the reflection mirror 7 has a thermal expansion coefficient close to that of the resonator length adjusting device 13, for example, PZT, the second base 32 need not be interposed.

In this manner, the closing plate 122 to which the reflection mirror 7 is attached via the resonator length adjusting device 13 is joined to the rear end surface 13B of the cylindrical portion 121.
At this time, the blocking plate 122 is joined to the cylindrical portion 121 such that the axis of the reflecting mirror 7 coincides with the cylindrical portion 121, that is, the axis of the second holding member 12.

  Then, the first holding member 11 and the second holding member 12 are brought into contact with the first and second sliding surfaces 11A and 12A on the same axis, and intersect with the axis. To make a temporary combination. In this case, for example, when the first and second holding members 11 and 12 are members such as glass lenses that transmit light, such as ultraviolet rays, at least one of the first and second sliding surfaces 11A and 12A. For example, an ultraviolet curable resin is applied to one surface, and after the mutual positional relationship between the first and second holding members 11 and 12 is adjusted and set, the resin is cured and fixed by performing ultraviolet irradiation. And integrate.

  This fixing method is not limited to a method using an ultraviolet curable adhesive, and may be an anaerobic adhesive, a high temperature curable adhesive, YAG welding, soldering, brazing, or the like. Moreover, it is not restricted to the method which requires the light transmittance for the 1st or 2nd holding member. However, this fixing is performed by a method that does not cause the measurement and adjustment to be out of the transverse single mode state by, for example, shrinkage or deformation during curing. Therefore, the first or second holding member 11 or 12 is not limited to being configured by a light-transmitting member, and a material suitable for the fixing method, production cost, and productivity is selected.

The interval between the output coupler 6 and the reflection mirror 7, that is, the resonator length, is the interval at which the specific wavelength excited and emitted from the laser medium 8 resonates as in the single longitudinal mode of the desired wavelength described above. Set the interval as close as possible.
For this reason, the thickness of the spacer 34 is selected by measuring the thickness of the laser medium 8 measured in advance, the distance between the reflecting mirror 7 and the abutting surfaces of the first and second holding members 11 and 12, and the like. And the above-described F.S. S. The distance is selected to be as close as possible to the resonator length determined from the longitudinal mode distance determined from R.

As described above, the parallelism between the output coupler 6 and the reflecting mirror 7 is adjusted by the first and second sliding of the first and second holding members 11 and 12 of the parallelism adjusting device 10. It is performed by swinging the spherical concave surface and convex surface having the same curvature on the surfaces 11A and 11B in a direction intersecting with the axis so as to be in sliding contact with each other.
The parallelism can be adjusted, for example, by performing mode measurement in the state where the excitation light source 1 is operated in the solid-state laser light oscillation device shown in FIG. However, this adjustment is not limited to the measurement in the excited state by the excitation light source 1 as described above. For example, the parallelism adjustment can be performed using an autocollimator having a light source wavelength equal to the oscillation wavelength. it can.
If the parallelism of the laser medium is relatively accurate, if the optical parallelism determined by the refractive index difference between the light source wavelength of the autocollimator and the oscillation wavelength can be ignored, the light source wavelength of the autocollimator will oscillate. The wavelength is not limited.

  On the other hand, for example, a piezoelectric element of the resonator length adjusting device 13 is applied with a resonator length control signal detected from an oscillation frequency, for example, so that the reflecting mirror 7 is moved forward and backward with respect to the output coupler 6 to thereby adjust the resonator length. Make control.

As described above, according to the configuration of the present invention, in the solid-state laser light oscillation device, the parallelism adjusting device 10 between the output coupler 6 and the reflection mirror 7 is provided in the solid-state laser light oscillator, thereby providing a single horizontal A solid-state laser beam oscillator that can perform laser oscillation of a mode, that is, a perfect spot, and thus a solid-state laser beam oscillation device can be configured.
Further, since the resonator length adjusting device 13 is provided, the resonator length can be always set accurately to a required length, so that a solid-state laser light oscillator capable of performing single longitudinal mode oscillation, and therefore A solid-state laser light oscillation device can be configured.

  Needless to say, the present invention is not limited to the above-described configuration. For example, a saturable absorber using, for example, a semiconductor quantum well is disposed between the output coupler 6 and the reflection mirror 7. By doing so, a Q-switched laser configuration can be obtained. However, in this case, the design is made in consideration of the saturable absorber.

Further, the first and second sliding surface alignments 11A and 12A of the first and second holding members 11 and 12 have one convex spherical surface and the other a concave conical surface having a smaller diameter toward the bottom. You can also.
However, in order to allow the first and second holding members 11 and 12 to slide stably, it is desirable to use a convex spherical surface and a concave spherical surface.

  According to the above-described configuration of the present invention, the output coupler 6 and the reflecting surface (reflecting mirror) 7 can be slid on each other and oscillated on the first and second holding members 11 and 12. Since it was made to hold | maintain, since the mutual adjustment of the inclination of the output coupler 6 and the reflective surface (reflective mirror) 7 can be smoothly performed with high precision at the time of assembly manufacture of the solid-state laser oscillator 9, it is high. Parallelism can be set.

  Further, by forming the output coupler 6 on the front end face of the laser medium 8 on the incident side of the excitation light and integrating it, the parallelism of the output coupler 6 and the reflection mirror 7 including the laser medium 8 is adjusted. Therefore, light can be efficiently incident on the laser medium 8 and the oscillation efficiency can be increased. At the same time, the overall size and structure can be simplified.

  Furthermore, by providing the resonator length adjusting device 13, the resonator length can be set accurately and stably in combination with the highly accurate parallelism adjustment by the parallelism adjusting device 10.

It is a schematic block diagram of an example of the solid-state laser light oscillation apparatus by this invention. It is a schematic sectional drawing of an example of the solid-state laser light oscillator by this invention. It is sectional drawing of 1 process of the manufacturing method of the laser medium of this invention apparatus. 1 is an exploded schematic sectional view of an example of a solid-state laser oscillator according to the present invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Excitation light source, 2 ... Cylindrical lens, 3 ... Collimate, 4 ... Dichroic mirror, 5 ... Condensing lens, 6 ... Output coupler, 7 ... Reflective surface ( (Reflecting surface), 8... Laser medium, 9... Solid laser light oscillator, 10... Parallelism adjusting device, 11... First holding member, 12. ... 1st sliding surface, 12A ... 2nd sliding surface, 11H ... Hollow part, 11B ... Front end surface, 12B ... Back end surface, 13 ... Resonator length adjustment Device 31 ... first substrate 32 ... second substrate 33 ... laser medium substrate 34 ... spacer 121 ... cylindrical portion 122 ... occlusion plate

Claims (12)

A laser medium that emits light by optical excitation with a predetermined wavelength is disposed in a laser optical resonator having a reflecting surface and an output coupler facing the reflective surface.
The laser beam resonator has an unstable resonator type configuration in which at least one of the reflection surface or the output coupler has a gentle curvature close to a plane or a plane,
A parallelism adjusting device for adjusting the optical parallelism between the reflecting surface and the output coupler;
The parallelism adjusting device includes a first holding member that holds the output coupler, and a second holding member that holds the reflective surface.
The first holding member and the second holding member have the same curvature in a state in which the laser medium is disposed and faced between the output coupler and the reflecting surface held by the first holding member and the second holding member. A first slidable surface and a second slidable surface that are in contact with each other and formed by either one of the concave spherical surface and the convex spherical surface and the other,
The output coupler held by the first and second holding members by rotating the first and second holding members while being slid by the first and second sliding surfaces. And a solid laser oscillator that is fixed in a state in which the parallelism is adjusted by finely adjusting the mutual inclination with the reflecting surface.   A hollow portion is formed at the center of the first and second holding members, and the output coupler and the reflecting surface are arranged to face each other with the laser medium interposed therebetween through the hollow portion. The solid-state laser light oscillator according to claim 1.   2. The solid-state laser oscillator according to claim 1, wherein a front end face of the laser medium on the incident side of the excitation light is the output coupler.   2. The solid-state laser light oscillator according to claim 1, wherein the laser medium is disposed in close contact with a substrate having high transmittance with respect to excitation light and oscillation light wavelength and heat dissipation.   A resonator length adjusting device for finely adjusting the resonator length is provided in the laser beam resonator constituted by the output coupler and the reflecting surface held by the first and second holding members. The solid-state laser beam oscillator according to claim 1, wherein   6. The solid-state laser oscillator according to claim 5, wherein the resonator length adjusting device is a piezoelectric element or a voice coil motor. An excitation light source and a laser beam resonator;
The laser beam resonator includes a reflecting surface and an output coupler facing the reflecting surface.
A laser medium that emits light by excitation light from the excitation light source is disposed in the laser light resonator.
The laser beam resonator has an unstable resonator type configuration in which at least one of the reflection surface or the output coupler has a gentle curvature near a plane or a plane,
Having a parallelism adjusting device for adjusting an optical inclination between the reflecting surface and the output coupler;
The parallelism adjusting device includes a first holding member that holds the output coupler, and a second holding member that holds the reflective surface.
In the parallelism adjusting device, the first holding member and the second holding member are opposed to each other by arranging the laser medium between the output coupler held by these and the reflecting surface. In the state, a first slidable surface and a second slidable surface that are abutted with each other and formed by either one of the concave spherical surface and the convex spherical surface having the same curvature and the other are formed.
The output coupler held by the first and second holding members by rotating the first and second holding members while being slid by the first and second sliding surfaces. And a solid-state laser light oscillation device fixedly fixed in a state where the parallelism is adjusted by finely adjusting the mutual inclination with the reflection mirror.   A hollow portion is formed in the center of the first and second holding members, and the output coupler and the reflecting surface are arranged to face each other with the laser medium interposed therebetween through the hollow portion. The solid-state laser light oscillation device according to claim 7.   8. The solid-state laser oscillator according to claim 7, wherein a front end face of the laser medium on the incident side of the excitation light is the output coupler.   8. The solid-state laser light oscillation device according to claim 7, wherein the laser medium is disposed in close contact with a substrate having high transmittance with respect to excitation light and oscillation light wavelengths and heat dissipation.   A resonator length adjusting device for finely adjusting the resonator length is provided in the laser beam resonator constituted by the output coupler and the reflecting surface held by the first and second holding members. 8. The solid-state laser light oscillation device according to claim 7,   The solid-state laser light oscillation device according to claim 11, wherein the resonator length adjusting device is a piezoelectric element or a voice coil motor.

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