JP2009004607A - Insulation vacuum equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To maintain lubrication between respective members which slide according to operation and to improve durability by preventing damage etc., caused by a lubricant while taking into account heat generation resulting from influences of a high-frequency power circuit to which vacuum insulation equipment is applied and large power. <P>SOLUTION: Slide surfaces of a movable conductor support member 12 and a bearing part 13 are coated with perfluoropolyether. Perfluoropolyether has thermal resistance, is thermally and chemically stable, and not decomposed to vaporize even at high temperature as heat generated by the vacuum insulation equipment is conducted to the slide surfaces, thereby preventing corrosion by chemical reaction on other members. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an insulating vacuum device, which is an insulating vacuum device in which a lubricant used for a sliding surface between a movable conductor and a bearing portion is improved.

  A vacuum capacitor or a vacuum valve is a cylindrical insulating member (for example, a member made of an insulating material such as ceramic; hereinafter referred to as an insulating tube), and a conductive member (for example, a member made of a metal such as copper). Insulating vacuum equipment provided with a vacuum vessel closed by the above is used, and in recent years, it has been applied to various high-frequency equipment and high-power equipment. For example, a vacuum capacitor is applied to impedance adjustment in a high-frequency device such as a high-frequency power supply of a semiconductor facility and a high-power oscillation circuit, and a vacuum valve is applied to shut-off and on-off (open / close) of the high-power device (for example, Patent Documents) 1, 2).

  The outline of the structure of a general vacuum capacitor will be described. A cylindrical electrode member having a different diameter is provided on one conductive member (hereinafter referred to as a fixed-side conductive member) side in the vacuum container as described above. A plurality of fixed electrodes, which are concentrically arranged at regular intervals, are attached. Further, the other conductive member (hereinafter referred to as the movable conductive member) is inserted into and removed from the gap between the electrode members of the fixed electrode in a non-contact state (for example, inserted in the axial direction of the vacuum vessel). A movable electrode (an electrode movable so as to be inserted into and removed from the fixed electrode) is attached so that a plurality of cylindrical electrode members having different diameters are concentrically spaced apart from each other. The attachment of the movable electrode is performed, for example, via a support member (hereinafter referred to as a movable electrode support conductor) that is movable in the axial direction of the vacuum vessel. A bellows is attached between the movable electrode supporting conductor and the movable conductive member, and a vacuum chamber is formed by a space surrounded by the bellows, the fixed electrode, and the movable electrode.

  In the movable electrode support conductor, for example, a columnar member is used, the movable electrode is attached to one end side thereof as described above, and the other end side is movable by a bearing portion provided on the movable side conductive member. Supported. As an example of the support structure in the movable electrode support conductor, there is a configuration in which the other end side of the movable electrode support conductor is screwed to the member rotatably supported by the bearing portion. As a specific example, the movable electrode support conductor is connected to the female screw portion of a nut member (a member for adjusting the position of the movable electrode; hereinafter referred to as an adjustment nut) supported rotatably by the bearing portion. A configuration in which a male screw portion formed on the other end side is screwed is mentioned.

  In the vacuum capacitor configured as described above, the movable electrode supporting conductor is moved in the axial direction (in the case of the specific example, the adjusting nut is rotated by a driving means such as a motor and moved), with respect to the fixed electrode. By inserting / removing the movable electrode (inserting / removing so that the respective electrode members cross each other), the crossing area (area between the counter electrodes) of the fixed electrode and the movable electrode changes. As a result, when voltages having different polarities are applied to the fixed electrode and the movable electrode, the value of the capacitance generated between the fixed electrode and the movable electrode is continuously adjusted according to the change in the crossing area. Therefore, impedance adjustment is performed.

  One of the characteristics required for such a vacuum capacitor is to smooth the sliding between the members during the adjustment operation of the capacitance as described above and to extend the life. For example, in the case of the above-described specific example, the female screw part of the adjustment nut and the male screw part of the movable electrode support conductor slide in accordance with the capacitance adjustment operation, and the adjustment nut and the movable electrode support conductor are It is said that it is easy to damage (for example, wear). In particular, in the case of a vacuum capacitor used in a high-frequency power supply circuit such as a semiconductor manufacturing apparatus, the capacitance value is often changed frequently. For this reason, the adjustment nut and the like (for example, the screw portion of the bearing portion, the screw portion of the movable electrode support conductor, etc.) are severely damaged, leading to a decrease in durability thereof.

  Also in the vacuum valve, since each member slides with the shut-off and closing operation, each member is easily damaged like the vacuum capacitor, resulting in a decrease in durability.

  As described above, as a countermeasure against damage to each member due to the operation of the insulating vacuum equipment (capacitance increasing / decreasing operation, shutting off, or closing operation), for example, a lubricant is applied to the sliding portion of each member (for example, sliding) Mineral oil + soap type grease lubricant is applied to the moving surface).

  However, with the increase in the size of insulating vacuum equipment (for example, the increase in current of the vacuum capacitor), heat generation is likely to occur particularly in the current path (such as bellows), and the lubricant may change (solidify, etc.) due to the heat generation. is there. When the lubricant changes in this way, the original performance (such as antifriction) of the lubricant cannot be exhibited, and sliding between the members is hindered.

Therefore, in recent years, many fluorine-based greases containing a sulfur component or the like are applied as a lubricant having high heat resistance.
Japanese Patent Application No. 2005-363068 JP 11-97293 A

  However, in an insulating vacuum device such as a vacuum capacitor applied to a high-frequency device or a vacuum valve applied to a high-power device, it is electrically operated during the operation (capacitance increase / decrease operation or shut-off / turn-on operation). Heat generation is transmitted to, for example, the sliding surface via each member (movable electrode support conductor, bellows, etc.), and the lubricant is heated to a high temperature due to the transmitted heat generation. As described above, in the case of a lubricant such as fluorine-based grease that is applied to general insulating vacuum equipment (a lubricant that takes into account only the antifriction action), the original performance of the lubricant can be maintained. In addition, unintended gas (for example, gas due to a sulfur component) or the like is generated due to decomposition and vaporization, which may cause a chemical reaction with other members (for example, a bellows of a stainless steel member).

  For example, in the case of a bellows, when a chemical reaction with the generated gas or the like occurs, discoloration (change to black or the like) or erosion (thinning of the wall thickness or the like) occurs. In particular, the bellows is a member that repeatedly expands and contracts in accordance with the operation of the insulating vacuum device. If the erosion or the like occurs as described above, the bellows may be damaged, and the life is shortened.

  The present invention has been made in view of such problems, and the object of the present invention is to provide an insulating vacuum such as a vacuum capacitor used in a high-frequency power supply circuit or a vacuum valve used for turning on and off high power. Insulating vacuum equipment that can maintain the slidability between the members that slide during the operation of the device, and that can prevent damage to each member due to the lubricant and improve durability (longer life) Is to provide.

  The present invention has been devised in view of the above-described conventional problems, and the invention according to claim 1 is configured such that both ends of a cylindrical insulating member are closed by a fixed conductive member and a movable conductive member, respectively. Formed on the fixed conductive member side in the vacuum container, a movable electrode disposed on the movable conductive member side in the vacuum container, and one end side supporting the movable electrode The movable electrode supporting conductor having the other end extending outward from the vacuum vessel, and the stationary electrode and the vacuum chamber on the movable electrode side are separated from the atmospheric chamber on the movable conductor side, which is a part of the conduction path in the vacuum vessel. An insulating vacuum device comprising: a bellows that is movable; and a bearing portion that supports the movable electrode support conductor movably in the axial direction by the movable conductive member, wherein the movable electrode support conductor and the bearing portion are provided. For each sliding surface And wherein the coated lubricant consisting of ether.

  According to a second aspect of the present invention, in the first aspect of the present invention, the movable electrode supporting conductor is screwed into a shaft rotatable member provided in the bearing portion, and the shaft rotatable member is arranged. By rotating the shaft, the movable electrode support conductor is movable in the axial direction.

According to a third aspect of the present invention, in the second aspect of the present invention, the shaft rotatable member is an adjusting nut. The fourth aspect of the present invention is the first to third aspects of the present invention. The electrostatic capacity can be changed by moving the movable electrode and changing the position of the movable electrode with respect to the fixed electrode.

  According to a fifth aspect of the present invention, in the first to third aspects of the invention, the movable electrode is electrically moved between the movable electrode and the fixed electrode by moving the movable electrode and changing the position of the movable electrode with respect to the fixed electrode. It can be opened and closed.

  According to the configuration of the first to fifth aspects of the invention, the perfluoropolyether in which the sliding surfaces of the movable electrode supporting conductor and the bearing portion are coated as a lubricant is, for example, fluorine containing a sulfur component or the like. Compared with system grease and the like, it is thermally and chemically stable, so it does not decompose and vaporize even when the temperature rises due to electrical heat generation, and does not generate, for example, gas due to sulfur components.

  As apparent from the above description, according to the inventions of claims 1 to 5, in consideration of heat generated during operation of a high-frequency device to which a vacuum capacitor is applied and a high-power device to which a vacuum valve is applied, It is possible to maintain the slipperiness between the members that slide along with the operation, and to prevent the damage caused by the lubricant and improve the durability.

  Hereinafter, an insulating vacuum device according to an embodiment of the present invention will be described in detail based on Examples 1 and 2 and the like.

  The insulating vacuum device according to the present embodiment includes a sliding surface of each member that slides during operation (for example, a movable electrode support conductor for supporting the movable electrode (for example, a screw portion of the movable electrode support conductor), Lubricating each of the bearing portions (for example, the sliding portions of the screw portions (the screw portions of the adjusting nut, etc.) formed on the bearing portions) that support the movable electrode support conductor so as to be rotatable and movable in the axial direction. The above-mentioned lubricant has heat resistance and contains a relatively large amount of fluorine component (for example, a large amount compared to fluorine-based grease applied to general insulating vacuum equipment). Apply a lubricant consisting of perfluoropolyether).

  The movable electrode support conductor is screwed into, for example, an axially rotatable member (for example, an adjusting nut 16 described later) provided in the bearing portion, and the axially rotatable member is axially rotated. A structure in which the movable electrode support conductor is movable in the axial direction can be mentioned.

[Example 1]
FIG. 1 (overall cross-sectional view), FIG. 2 (enlarged cross-sectional view around the bearing), and FIG. 3 (explanatory view of the adjusting nut and the movable electrode support conductor) are schematic views of the vacuum capacitor by the insulating vacuum device according to the first embodiment. It is explanatory drawing.

  In FIG. 1, a fixed-side conductive member 1a and a movable-side conductive member 1b (for example, on one end side and the other end side of an insulating cylinder (insulating member; a cylindrical member made of an insulating material such as a ceramic material) 1 are used. The main component is a vacuum vessel 5 provided with a member made of a metal such as copper. In the fixed-side conductive member 1a and the movable-side conductive member 1b, cylindrical tubes 2a and 2b provided on one end side and the other end side of the insulating tube 1, and the insulating tube 1 and the metal tubes 2a and 2b, respectively. It is comprised by the fixed side end plate 3 and the movable side end plate 4 which were provided so that it might block | close, and also served as the external terminal.

In the vacuum vessel 5, a fixed electrode 6 formed by concentrically separating a plurality of cylindrical electrode members F (F ₁ , F ₂ ,..., F _N ) having different inner diameters at a fixed interval is provided on the fixed side end plate 3. (Inside the vacuum vessel 5). In addition, a plurality of cylindrical electrode members M (M ₁ , M ₂ ,..., M _N ) having different inner diameters are inserted so as to be inserted into and removed from the gaps between the electrode members F of the fixed electrode 6 in a non-contact state. A movable electrode 8 configured concentrically at regular intervals (configured via a disk-like member 7 in the drawing) is provided via a movable electrode support conductor 20. The fixed electrode 6 and the movable electrode 8 constitute a capacitor part of an insulating vacuum device. It should be noted that the movable electrode 8 only needs to have a configuration in which a capacitance can be formed and varied with the fixed electrode 6.

  The movable electrode 8 is inserted into and removed from the fixed electrode 6 in a non-contact state, for example, as shown in the figure, an annular ring that is fixed to the disk-like member through the center of the disk-like member 7. The member 9 and the annular member 9 are fixedly supported so as to extend in the axial direction from the end portion 9b on the movable side end plate 4 side (in the drawing, the end portion 12b on the connecting portion 12a side of the movable rod 12 is an annular member) 9 is applied to a movable rod 12 that is fixedly supported by being inserted inside one end 9b of the rod 9, and a columnar guide member 11 that is erected at the center of the fixed side end plate 3 is applied. Is inserted into the guide portion (other end portion) 9 a of the annular member 9.

  One end of a bellows 10 is welded (brazed) to the annular member 9, and the other end of the bellows 10 is welded to the movable side end plate 4. The bellows 10 enables the annular member 9 to move in the vertical direction in the figure, and a vacuum chamber is formed between the bellows 10 and the fixed electrode 6 and the movable electrode 8.

  In the movable electrode support conductor 20 (movable rod 12), a screw portion (male screw portion; hereinafter referred to as a movable screw portion) 12c is formed (threaded) on the outer peripheral surface of the end opposite to the movable electrode 8. Etc.) and is supported by a bearing portion 13 formed on the movable side end plate 4 so as to be rotatable and movable in the axial direction of the vacuum vessel 5.

  In the bearing portion 13, a cylindrical screw receiving portion 14 a erected from the center of the movable side end plate 4 in the vacuum vessel 5 and having a loose fitting hole 14 c for the movable electrode support conductor 20, and its screw receiving portion. A thrust bearing 17 fixed on one end side of the portion 14a (in the drawing, fixed on a support portion (flange) 14b formed so as to be bent in the axial direction from one end side of the screw receiving portion 14a), and this support And an adjustment nut 16 provided via a thrust bearing 17 on the outside of the portion 14b (outside of the vacuum vessel 5). A screw portion (female screw portion; in the drawing, an inner diameter smaller than that of the other end side of the adjustment nut 16 is formed on an inner wall portion on one end side of the adjustment nut 16. Thus, a screwing hole) 16c communicating with the loose fitting hole 14c of the support portion 14b is formed. Reference numeral 18 denotes an adjustment screw having an outer diameter of the head seat surface larger than the inner diameter of the screw portion 16c, and is screwed into the tip of the movable electrode support conductor 20 (the tip screwed into the screwing hole of the adjustment nut 16). Is.

  In order to adjust the electrostatic capacity in the vacuum capacitor configured as described above, the movable electrode 8 can be moved in the vertical direction in the figure by rotating the adjusting nut 16 (for example, the movable rod 12 is moved in the right direction). (Move downward in the figure, and move upward in the figure when rotating left) By adjusting the vertical movement of the movable electrode 8, the capacitance area can be arbitrarily set by varying the area facing the fixed electrode 6. As means for adjusting the capacitance, for example, electric means for rotating the adjusting nut 16 (not shown) can be applied.

  As a specific example of adjusting the maximum capacitance, first, before the adjustment screw 18 is screwed and fixed, the adjustment nut 16 is turned to the right (slightly right) (in the case of a right screw), and the columnar guide member 11 is turned on. The movable rod 12 is moved slightly downward in the figure from the position of the maximum capacitance at which the tip of the rod contacts the end surface 12b of the movable rod 12, and is adjusted so as to have a desired maximum capacitance value. This slight adjustment amount is determined by the degree of variation in the capacitance of the vacuum capacitor. Next, in this state, the adjusting screw 18 is screwed into the screw hole 12d until the seating surface of the head abuts against the stepped portion 19, and the adjusting screw 18 is attached to the movable rod 12 at the contact. The movable rod 12 is lifted upward in the figure (not bonded to the adjusting nut 16). Note that, by fixing the adjustment screw 18 as described above, for example, even if the adjustment nut 16 is turned counterclockwise to further increase the maximum capacitance value, the adjustment screw 18 comes into contact with the step portion 19 to adjust the adjustment nut 16. Is prevented from rotating further (because it does not turn further to the left), it also has a stopper function to prevent the adjustment nut 16 from coming off the movable rod 12.

  By restricting the movement (upward position) of the movable rod 12 in this way, the maximum capacitance value of each vacuum capacitor can be adjusted even if the maximum capacitance of each mass produced vacuum capacitor varies. As a result, a vacuum capacitor having characteristics matched to a desired maximum capacitance can be obtained.

  In the first embodiment, in the vacuum capacitor configured as described above, a sliding surface between the movable electrode support conductor 20 and the bearing portion 13 (sliding surface between the movable side screw portion 12c and the screw portion 16c, etc.) (Screw surface, etc.) is coated with a lubricant (perfluoropolyether grease) made of perfluoropolyether having heat resistance and containing a relatively large amount of fluorine component, for example, by a technique such as coating. This perfluoropolyether has a relatively high thermal stability (heat resistance), chemical stability, and the like, as shown in the chemical structural formula of FIG. Further, unlike a lubricant such as a fluorine-based grease applied to general insulating vacuum equipment, it does not contain a sulfur component or the like.

  For example, although there is a possibility that electric heat is generated between the fixed electrode 6 and the movable electrode 8 in the vacuum vessel 5 and the lubricant is heated via the movable electrode support conductor 20 and the like due to the heat generation. In addition, no gas due to a sulfur component or the like is generated from the lubricant. That is, in the vacuum capacitor according to the first embodiment, no gas or the like that can corrode each member (such as the bellows 10) is generated even when used for a long period of time. Accordingly, it has been found that each member caused by the lubricant can be prevented from being damaged and the durability can be improved (long life).

[Example 2]
FIG. 5 is a schematic explanatory diagram of a vacuum valve by an insulating vacuum device according to the second embodiment. In addition, about the thing similar to Example 1, the same code | symbol etc. are used suitably and the detailed description is abbreviate | omitted.

  In FIG. 5, reference numeral 40 denotes a vacuum valve, which is fixed to one end side and the other end side of an insulating cylinder (insulating member: cylindrical member made of an insulating material such as a ceramic material) 1 as in the first embodiment. A vacuum container 5 having a side conductive member 1a and a movable side conductive member 1b (for example, a member made of metal such as copper) is mainly configured.

  In the second embodiment, a pair of fixed electrode 6 and movable electrode 8 are arranged in the vacuum vessel 5, and a movable electrode support conductor 41 and a fixed conductor 42 extend from the back of each electrode to the outside of the vacuum vessel 5 ( The bellows 10 is provided between the movable electrode support conductor 41 and the movable side end plate 4. A bearing portion (for example, a bearing portion configured as shown in Embodiment 1) 13 is formed on the movable side end plate 4 so that the movable conductor 41 can be rotated and movable with respect to the axial direction of the vacuum vessel 5. To support.

  Further, as in the first embodiment, the heat resistance of the sliding surface of the movable electrode support conductor 41 and the bearing portion 13 (such as the screwed surface in the case of having a screwed structure as in the first embodiment) is high. There is a lubricant (perfluoropolyether grease) made of perfluoropolyether containing a relatively large amount of fluorine component.

  In the vacuum valve configured as in the second embodiment, for example, when the movable electrode support conductor 41 is moved to bring the movable electrode 8 into and out of contact with the fixed electrode 6 and power is turned on and off, In particular, the contact area between the fixed electrode 6 and the movable electrode 8 becomes very small, and an electric current flows in a very small area to cause electrical heat generation. The heat generation causes the lubricant to pass through the movable electrode support conductor 41 and the like. Although there is a possibility of heating, no gas due to sulfur components or the like is generated from the lubricant. That is, in the vacuum valve of the second embodiment, no gas or the like that can corrode each member (such as the bellows 10) is generated even if it is used for a long time. Accordingly, it has been found that each member caused by the lubricant can be prevented from being damaged and the durability can be improved (long life).

  Although the present invention has been described in detail only for the specific examples described above, it is obvious to those skilled in the art that various changes and modifications are possible within the scope of the technical idea of the present invention. Such variations and modifications are naturally within the scope of the claims.

  If the sliding surface between the movable electrode support conductor and the bearing portion is coated with a lubricant made of perfluoropolyether, the fixed electrode, the movable electrode, the movable electrode support conductor, and the bellows (attaching the bellows) It is clear that the same effects as those of the first and second embodiments can be obtained even if various shapes such as position) are applied or omitted as appropriate.

BRIEF DESCRIPTION OF THE DRAWINGS Schematic explanatory drawing which shows an example of the vacuum capacitor in Example 1 of this invention. The expanded sectional view of the bearing part in Example 1 of this invention. The exploded view of the adjustment nut and movable conductor in Example 1 of the present invention. The block diagram of the perfluoropolyether used for Example 1 and Example 2 of this invention. Schematic explanatory drawing which shows an example of the vacuum valve in Example 2 of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Insulating cylinder 2a, 2b ... Metal cylinder 3 ... Fixed side end plate 4 ... Movable side end plate 5 ... Vacuum container 6 ... Fixed electrode 7 ... Disk-shaped member 8 ... Movable electrode 9 ... Ring member 9a ... Guide part 9b ... One end Part 10 ... Bellows 11 ... Guide column 12 ... Movable rod 12a ... Connection part 12b ... Terminal part 12c ... Screw part 12d ... Screw hole 13 ... Bearing part 14a ... Screw receiving part 14b ... Support part 14c ... Free fitting hole 16 ... Adjustment Nut 16c ... Screw part 17 ... Thrust bearing 18 ... Adjustment screw 19 ... Step part 20, 41 ... Movable conductor support member 40 ... Vacuum valve 42 ... Fixed conductor

Claims (5)

A vacuum vessel formed by closing both ends of a cylindrical insulating member with a fixed-side conductive member and a movable-side conductive member,
A fixed electrode disposed on the fixed conductive member side in the vacuum vessel;
A movable electrode disposed on the movable conductive member side in the vacuum vessel;
A movable electrode supporting conductor having one end side supporting the movable electrode and the other end extending outward from the vacuum vessel;
A bellows that is a part of a current-carrying path in the vacuum vessel and separates the vacuum chamber on the fixed electrode and movable electrode side and the atmospheric chamber on the movable conductor side;
A bearing part that supports the movable electrode support conductor movably in the axial direction by the movable conductive member, and an insulating vacuum device comprising:
Insulating vacuum equipment characterized in that a lubricant composed of perfluoropolyether is coated on the sliding surfaces of the movable electrode supporting conductor and the bearing portion. The movable electrode support conductor is screwed to a shaft rotatable member provided in the bearing portion,
The insulating vacuum apparatus according to claim 1, wherein the movable electrode supporting conductor is movable in the axial direction by rotating the axially rotatable member.   The insulating vacuum device according to claim 2, wherein the shaft rotatable member is an adjustment nut.   The insulating vacuum device according to any one of claims 1 to 3, wherein the capacitance can be changed by moving the movable electrode and changing the position of the movable electrode with respect to the fixed electrode. .   The movable electrode can be electrically opened and closed between the movable electrode and the fixed electrode by moving the movable electrode and changing the position of the movable electrode with respect to the fixed electrode. Insulating vacuum equipment.

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