JP2009002795A - X-ray fluorescence analyzer - Google Patents

Abstract

Fluorescence X enables the primary X-ray irradiation range to be set to an optimum size according to the analysis target region, and allows the user to appropriately grasp the primary X-ray irradiation range. A line analyzer is provided.
In a fluorescent X-ray analyzer that irradiates a sample 40 with primary X-rays generated by an X-ray source 12 and receives and analyzes the fluorescent X-rays emitted from the sample 40 in response to the X-ray detector 13. A collimator 30 provided on the X-ray optical path between the X-ray source 12 and the sample 40 and capable of continuously changing the size of the aperture; and input means 22 for the user to specify the aperture size of the collimator 30; An imaging unit 14 that images the surface to be analyzed of the sample 40 and a marker indicating a primary X-ray irradiation range corresponding to the aperture size of the currently designated collimator 30 are superimposed on the sample image captured by the imaging unit 14. Display means 19 and 20 are provided.
[Selection] Figure 1

Description

  The present invention relates to a fluorescent X-ray analyzer.

  An X-ray fluorescence analyzer is included in a sample by irradiating a solid sample, a powder sample, or a liquid sample with primary X-rays and detecting the X-rays emitted by being excited by the primary X-rays. Qualitative or quantitative analysis of elements is performed.

  Some X-ray fluorescence analyzers as described above include a collimator for focusing the primary X-ray beam between the X-ray source emitting primary X-rays and the sample mounting position. According to such a fluorescent X-ray analyzer, when analyzing a minute sample or analyzing a minute region on the sample, the generation of the fluorescent X-ray from other than the target region is suppressed and a high S / N ratio is obtained. Can be achieved. The collimator is composed of, for example, a flat plate having a plurality of openings having different diameters, and by selecting an opening having an appropriate diameter and positioning it on the optical axis of the X-ray, the irradiation range of the primary X-ray is set. It can be limited to a predetermined size according to the sample size.

  Conventionally, there has been known a fluorescent X-ray analyzer equipped with an observation mechanism for observing a sample set in a sample chamber (see, for example, Patent Document 1). The observation mechanism includes, for example, a CCD camera provided at a position facing a surface to be analyzed of a sample, and a monitor that displays a sample image acquired by the CCD camera. Further, the sample image includes a primary image. A cross-shaped marker indicating the X-ray irradiation center is superimposed and displayed. According to such a configuration, it is possible to ensure that the sample is irradiated with primary X-rays by the user positioning the sample while referring to the sample image and marker displayed on the monitor. it can.

JP 2000-46763 A ([0011]-[0013])

  In order to obtain high analysis accuracy in fluorescent X-ray analysis, it is desirable to irradiate the primary X-rays over as wide a region as possible without departing from the analysis target region on the sample. However, in the conventional X-ray fluorescence analyzer equipped with the collimator, only a few types of aperture diameters can be selected, and therefore the irradiation range of the primary X-rays cannot be set finely according to the size of the analysis target region. When the sample is aligned using the observation mechanism as described above, the user can confirm the center position of the primary X-ray irradiation, but the primary X-ray irradiation defined by the aperture diameter of the collimator. Since the range could not be grasped, it could not be confirmed whether or not the irradiation range of the primary X-ray was within the analysis target region.

  Therefore, the problem to be solved by the present invention is that the primary X-ray irradiation range can be set to an optimum size according to the analysis target region, and the user can determine the primary X-ray irradiation range. It is to provide a fluorescent X-ray analyzer that can be properly grasped.

  An X-ray fluorescence analyzer according to the present invention made to solve the above problems irradiates a sample with primary X-rays generated by an X-ray source, and X-rays X-rays emitted from the sample accordingly. In a fluorescent X-ray analyzer for receiving and analyzing with a detector, a) a collimator provided on the X-ray optical path between the X-ray source and the sample and capable of continuously changing the size of the aperture; b) the collimator An input means for the user to specify the aperture size of the sample; c) an imaging means for imaging the surface to be analyzed of the sample; and d) a primary X-ray irradiation range corresponding to the currently specified aperture size of the collimator. And display means for displaying a marker to be superimposed on the sample image picked up by the image pickup means.

  Further, in the fluorescent X-ray analysis apparatus according to the present invention, the collimator includes two flat plates each provided with a notch and driving means for moving each flat plate in a plane perpendicular to the optical axis of the primary X-ray. The two flat plates are arranged in such a manner that the cutouts face each other so as to partially overlap each other, thereby forming an opening surrounded by the edges of the cutouts. It is desirable to continuously change the size of the opening by moving the.

  According to the fluorescent X-ray analyzer of the present invention having the above-described configuration, the size of the analysis target region can be set because the aperture size of the collimator can be set to an arbitrary size between a predetermined minimum value and a maximum value. The irradiation range of the primary X-ray can be finely set according to the above. Further, by referring to the sample image and the marker displayed on the display means, the user can appropriately grasp the primary X-ray irradiation range corresponding to the currently designated collimator aperture size.

  The collimator may be of any type as long as the aperture size can be continuously changed. For example, the aperture size is changed by driving a large number of aperture plates such as the aperture of a photographing lens of a camera. However, if two flat plates having notches as described above are used, the number of parts can be reduced and the driving mechanism can be simplified, so that the cost can be reduced. Can be realized.

  Hereinafter, an X-ray fluorescence analyzer according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic configuration diagram illustrating a main configuration of an energy dispersive X-ray fluorescence spectrometer according to the present embodiment.

  The X-ray fluorescence analyzer according to the present embodiment is of a lower surface irradiation type in which X-ray irradiation is performed from the lower surface side of the sample 40. An X-ray tube is disposed below the base plate 11 on which the sample 40 is placed. 12 and a detector 13 capable of capturing X-rays in all wavelength bands are installed obliquely upward. A collimator 30 is disposed between the X-ray tube 12 and the sample position, and the primary X-ray emitted from the X-ray tube 12 is focused to a predetermined diameter by the collimator 30 and then irradiated onto the sample 40. . The detector 13 is a semiconductor detector, for example, and the fluorescent X-rays emitted from the sample 40 by the primary X-ray irradiation are detected by the detector 13. The detection signal is separated and processed for each energy (that is, for each wavelength) by the signal processing unit 16 to generate a fluorescent X-ray spectrum. The fluorescent X-ray spectrum is displayed on the monitor 20 via the display processing unit 19. Is done. In addition, the target element is quantitatively analyzed from the intensity of the spectral line at the energy position of interest in the fluorescent X-ray spectrum. Note that a sample observation camera 14 is provided directly below the sample position, and the surface to be analyzed of the sample 40 can be observed using the sample observation camera 14 (details will be described later).

  The collimator 30 includes two flat plates 31 and 32 arranged with the optical axis of the primary X-ray interposed therebetween, and driving means (not shown) for moving the flat plates 31 and 32 so as to face each other in a plane orthogonal to the optical axis. ). As shown in FIG. 2, notches 31a and 32a are provided on one side of each flat plate 31 and 32, and a part of each flat plate 31 and 32 overlaps with the cutouts 31a and 32a facing each other. By arranging the two in this manner, an opening 33 surrounded by the edges of the notches 31a and 32a is formed. In this state, the opening size can be continuously changed by moving the flat plates 31 and 32 closer to or away from each other by the driving means, and accordingly, the irradiation range of the primary X-ray on the surface to be analyzed is also continuously increased. It changes (Fig. 3 (a), (b)). The operation of the drive means is controlled by the drive control unit 15 under the general instruction of the central control unit 21, and the opening size of the collimator 30 is minimized by the user giving a predetermined instruction at the input unit 22. It can be set to any size between the value and the maximum value.

  The image generation unit 17 generates image data of the surface to be analyzed of the sample 40 based on the output signal of the sample observation camera 14, and the graphic unit 18 corresponds to the opening size of the collimator 30 based on an instruction from the central control unit 21. Graphic data of a marker representing the irradiation range of the primary X-ray (hereinafter referred to as “irradiation range marker”) is created. These image data and graphic data are synthesized by the display processing unit 19 and then sent to the monitor 20, and finally an irradiation range marker superimposed on the image of the analysis surface of the sample 40 is displayed on the screen of the monitor 20. Is displayed.

  In the present embodiment, the central control unit 21, the signal processing unit 16, the image generation unit 17, the graphic unit 18, and the display processing unit 19 are embodied by a well-known personal computer or the like. By executing the process according to the program, the various controls and processes as described above are achieved.

  When analyzing a minute region on a sample using the fluorescent X-ray analyzer according to the present embodiment, first, the user places the sample 40 on the base plate 11 and performs a predetermined operation with the input unit 22. To start imaging by the sample observation camera 14. As a result, the sample image is displayed on the monitor 20, and the user adjusts the position of the sample 40 so that the analysis target region on the sample 40 comes to the center of the screen while viewing the image displayed on the monitor 20. .

  Next, the user performs a predetermined operation with the input unit 22 to set the opening size of the collimator 30. As a method for setting the opening size, for example, a setting window 50 including a slide volume 51 and a numerical value input field 52 for designating the opening size of the collimator 30 as shown in FIG. 4 is displayed on the screen of the monitor 20. The slider 51a of the slide volume 51 can be moved using a mouse or the like provided in the input unit 22, or the numerical value of the opening size (for example, the diagonal length of the opening) can be directly input to the numerical value input field 52. .

  The central control unit 21 instructs the drive control unit 15 to drive the collimator 30 based on the opening size designated by the user, and simultaneously instructs the graphic unit 18 to generate graphic data of the irradiation range marker. Thereby, the two flat plates 31 and 32 constituting the collimator 30 are driven by the driving means to form an opening 33 having a specified size, and an irradiation range marker 60 having a size corresponding to the opening size. It is superimposed on the sample image and displayed on the screen of the monitor 20. FIG. 5 is a diagram showing a screen display of the monitor 20 at this time, and an irradiation range marker 60 is superimposed on the image of the sample 40 taken through the irradiation window of the base plate 11.

  As described above, the size of the irradiation range marker 60 corresponds to the opening size of the collimator 30. When the user instructs the change of the opening size of the collimator 30 from the input unit 22, the sample image is interlocked with this. The size of the upper irradiation range marker 60 changes (FIGS. 5A and 5B). Accordingly, the sample image on which the irradiation range marker 60 is superimposed and the setting window 50 as described above are simultaneously displayed on the screen of the monitor 20, and the setting can be changed while checking the change of the X-ray irradiation range due to the change of the aperture size in real time. It would be more desirable to be able to do so.

  As described above, according to the X-ray fluorescence analysis apparatus according to the present embodiment, the opening size of the collimator 30 can be finely set according to the size of the analysis target region on the sample and displayed on the monitor 20. By referring to the sample image to be performed and the irradiation range marker 60, the user can appropriately grasp the irradiation range of the primary X-ray in the currently set aperture size of the collimator 30. Therefore, the user can refer to the monitor 20 and adjust the sample position and the opening size of the collimator 30 so that the irradiation range of the primary X-ray does not deviate from the target area on the sample 40. Can be obtained.

  The best mode for carrying out the present invention has been described above using the embodiments. However, the present invention is not limited to the above embodiments, and various modifications are allowed within the scope of the present invention. Is. For example, in the above embodiment, the description has been made by taking the energy dispersive and bottom irradiation type X-ray fluorescence analyzer as an example. However, the top surface irradiation type or the wavelength dispersive type that irradiates the primary X-ray from the upper surface of the sample. The present invention can be similarly applied to a fluorescent X-ray analyzer.

The schematic block diagram which shows the principal part structure of the fluorescent X-ray-analysis apparatus which concerns on one Example of this invention. The top view which shows two flat plates which comprise the collimator of the fluorescent X-ray-analysis apparatus based on the Example. It is a schematic diagram which shows operation | movement of the collimator of the fluorescent X-ray-analysis apparatus based on the Example, (a) shows the state which made opening size small, (b) shows the state which made opening size large. The figure which shows an example of the setting window of the collimator opening size in the fluorescent X-ray-analysis apparatus based on the Example. It is a figure showing the state where the irradiation range marker is superimposed and displayed on the sample image in the X-ray fluorescence analyzer according to the same embodiment, (a) is a state where the aperture size of the collimator is reduced, (b) is the aperture size The enlarged state is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 ... Base plate 12 ... X-ray tube 13 ... Detector 14 ... Sample observation camera 15 ... Drive control part 16 ... Signal processing part 17 ... Image generation part 18 ... Graphic part 19 ... Display processing part 20 ... Monitor 21 ... Central control part 22 ... Input unit 30 ... Collimator 31, 32 ... Flat plate 31a, 32a ... Notch 40 ... Sample 50 ... Setting window 60 ... Irradiation range marker

Claims (2)

In a fluorescent X-ray analyzer that irradiates a sample with primary X-rays generated by an X-ray source, and receives and analyzes the fluorescent X-rays emitted from the sample in response to an X-ray detector,
a) a collimator provided on the X-ray optical path between the X-ray source and the sample and capable of continuously changing the size of the aperture;
b) input means for the user to specify the aperture size of the collimator;
c) imaging means for imaging the surface to be analyzed of the sample;
d) display means for displaying a marker indicating a primary X-ray irradiation range corresponding to the aperture size of the currently designated collimator on the sample image captured by the imaging means;
A fluorescent X-ray analyzer characterized by comprising:   The collimator includes two flat plates provided with notches and driving means for moving each flat plate in a plane perpendicular to the optical axis of the primary X-ray, and the two flat plates are opposed to each other. In this state, an opening surrounded by the edge of the notch is formed by arranging the parts so as to overlap each other, and the size of the opening is continuously adjusted by moving both flat plates by the driving means. 2. The fluorescent X-ray analyzer according to claim 1, wherein the fluorescent X-ray analyzer is changed.

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