JP2009097564A - Fixing structure between blocks in the body - Google Patents

Abstract

An object of the present invention is to provide an inter-block fixing structure in a body main body that can firmly and stably fix each block and avoid deformation of the block due to a temperature change of a flowing fluid as much as possible.
A first fixing member 91 that fixes a first block 10 and an intermediate block 30, a second fixing member 92 that fixes a second block 20 and an intermediate block 30, a first fixing member, and a second fixing member pass therethrough. A first reinforcing member 70 provided with a through hole 71, a second reinforcing member 80 provided with a through hole 81 through which the first fixing member and the second fixing member pass, and the through hole of the first reinforcing member and the second reinforcing member And the first fixing member penetrates the through hole of the first reinforcing member and is fixed to the through hole of the second reinforcing member to connect the first block and the intermediate block. The fixing member passes through the through hole of the second reinforcing member, is fixed to the through hole of the first reinforcing member, connects the second block and the intermediate block, and constitutes the body main body 1A.
[Selection] Figure 2

Description

  The present invention relates to an inter-block fixing structure for a body main body, in which a plurality of blocks are stacked and formed, and each block is strongly fixed to each other.

  As shown in FIG. 18, the body main body 500 configured by stacking a plurality of blocks becomes a first block 501, an intermediate block 503, and a second block 502 in order from the top. Conventionally, when the body body is integrated, the connection bolt 511 is inserted from the first block side, penetrates the intermediate block 503, and engages with the nut 512 provided on the second block side. The blocks were inserted from the second block side, passed through the intermediate block 503 and engaged with the nut 512 provided on the first block side, and the blocks were connected and fixed. Such a fixing structure is common in structure products, and is widely adopted as a structure product having a body body. For example, a structural product such as a flow control valve (see Patent Document 1), a back pressure control valve (see Patent Document 2), a diaphragm pump (see the injector in Patent Document 3), or a constant flow valve (see Patent Document 4). is there.

  Structure products disclosed in each patent document are mainly used in the field of fluid supply in semiconductor manufacturing such as silicon wafer and substrate cleaning equipment, for example, supply of chemical liquids such as ultrapure water, hydrofluoric acid, and pressure feed lines. Connected to. For this reason, since each of the structural products described above requires extremely high cleanliness, a fluororesin material that is hardly affected by corrosion is frequently used.

  In the field of semiconductor manufacturing, there has been a greater demand than ever to improve wafer cleaning efficiency and adjust drug solubility to high-temperature, high-pressure fluid pumping such as high-temperature water and steam. For this reason, structural products must always assume harsh usage conditions that are exposed to both cold and hot fluids. However, soft fluororesins such as PTFE are suitable for cutting, but have a large linear expansion coefficient, and are easily deformed while being repeatedly heated and cooled. This is called “creep”, and it has been pointed out that it influences the cleanliness of the fluid to be distributed by promoting the distortion of the structure product and reducing the airtightness of the internal structure. Moreover, if the fluid component leaks from the structure product into the manufacturing facility, there is a concern about the influence on other equipment.

  As understood from the structure shown in FIG. 18 of the conventional example, the body main body 500 is fixed between the blocks by the connecting bolt 511 and the nut 512. Therefore, when the body main body is to be firmly fixed, the number of bolts is set. It was increased and the blocks were tightened. However, since the bolts and nuts are tightened one by one, the tightening strength is not always constant when all the bolts of the body main body are fastened, which is likely to cause looseness. In addition, depending on the shape of the structure product, there are many restrictions on the bolt mounting site, and there are cases where it cannot be dealt with simply by increasing the number of mounting bolts.

If the structure product itself is small, the deformation (creep) of the block due to temperature change is small and hardly causes a problem. However, with the recent increase in wafer surface area, if it is desired to increase the processing capacity per unit time, it is necessary to cope with an increase in the amount of fluid supplied by increasing the size of each structure itself. . Then, the block of the structure product itself is naturally large, and an increase in deformation due to a temperature change of the resin block is unavoidable. In addition to the above-described problems, it is pointed out that the fastening of a resin block is likely to cause cracks due to stress concentration due to the nut or bolt head biting into the block in addition to the above-described problems. Therefore, in order to cope with thermal deformation that occurs in the resin blocks, improvement of the structure for fixing the blocks to each other is eagerly desired.
Japanese Patent No. 2671183 Japanese Patent No. 3467438 Japanese Patent No. 3497831 JP 2003-248517 A

  The present invention has been made in view of the above points, and in a structure in which blocks are combined and integrated, instead of simply fixing blocks with bolts and nuts, the blocks are fixed firmly and stably. An object of the present invention is to provide an inter-block fixing structure in a body main body that makes it possible to avoid deformation of a block as much as possible due to a temperature change of flowing fluid.

  That is, the invention according to claim 1 is the first block (10), the second block (20) facing the first block, and the resin intermediate located between the first block and the second block. A body (1A) having a chamber portion (40) penetrating from the first block toward the second block, and fixing the first block and the intermediate block. A first fixing member (91), a second fixing member (92) for fixing the second block and the intermediate block, and a through hole (71) through which the first fixing member and the second fixing member pass. A first reinforcing member (70) provided, and a second reinforcing member (80) provided with a through hole (81) through which the first fixing member and the second fixing member pass, and the first reinforcing member Through hole and front The through holes of the second reinforcing member are aligned on the same straight line, and the first reinforcing member is disposed on the first contact surface (31) on the side contacting the first block in the intermediate block. In the block, the second reinforcing member is disposed on a second abutting surface (32) on the side in contact with the second block, and the first fixing member passes through the through hole of the first reinforcing member and the second reinforcing member The first block and the intermediate block are connected by being fixed to the through hole of the member, and at the same time, the second fixing member passes through the through hole of the second reinforcing member and is fixed to the through hole of the first reinforcing member. And connecting the second block and the intermediate block, and fixing the first block, the intermediate block, and the second block together to form the body main body. Applied between the fixed structure.

  According to a second aspect of the present invention, the first fixing member is attached to the first block via a first base member (101), and the second fixing member is attached to the second block via a second base member (102). The inter-block fixing structure in the body main body according to claim 1 attached to the block.

  According to a third aspect of the present invention, the first diaphragm portion (50) and the second diaphragm portion (60) are accommodated in the chamber portion of the intermediate block, and the first diaphragm portion and the second diaphragm portion are connected to each other (45). ), The connecting part is disposed in the chamber part so as to be able to advance and retreat, the first diaphragm part is sandwiched between the first block and the intermediate block, and the second diaphragm part is The inter-block fixing structure in the body body according to claim 1, which is sandwiched between two blocks and the intermediate block.

  According to a fourth aspect of the present invention, the first contact surface groove portion (33) for accommodating the first reinforcement member is formed on the first contact surface, and the second reinforcement member is formed on the second contact surface. 2. The inter-block fixing structure in the body body according to claim 1, wherein a second abutting surface groove portion (34) that accommodates the body is formed.

  According to a fifth aspect of the present invention, the first fixing member and the second fixing member are bolt bodies, the first fixing member and the second reinforcing member are fixed, and the second fixing member and the first reinforcing member are fixed. The inter-block fixing structure in the body main body according to claim 1, wherein the fixing to the member is performed via a nut.

  According to a sixth aspect of the present invention, the first fixing member and the second fixing member are bolt bodies, and the first reinforcing member and the second reinforcing member include the bolt body in addition to the through hole. Screw groove portions (72, 82) screwed with the first fixing member and the second fixing member are formed respectively, and the through hole of the one side reinforcing member and the screw groove portion of the other side reinforcing member are on the same straight line. The inter-block fixing structure in the body body according to claim 1, which is located at

  The invention according to claim 7 relates to the inter-block fixing structure in the body main body according to claim 1, wherein the first reinforcing member and the second reinforcing member have an arc shape.

  The invention according to claim 8 relates to the inter-block fixing structure in the body main body according to claim 1, wherein the resin intermediate block is made of polytetrafluoroethylene.

  A ninth aspect of the present invention relates to the inter-block fixing structure in the body main body according to the third aspect, wherein a seal member is pressure-bonded to at least one of the first diaphragm portion and the second diaphragm portion.

  The invention according to claim 10 relates to the inter-block fixing structure in the body main body according to claim 3, wherein the body main body is a pressure control valve.

  The invention according to claim 11 relates to the inter-block fixing structure in the body main body according to claim 3, wherein the body main body is a constant flow valve.

  The invention of claim 12 relates to the inter-block fixing structure in the body body according to claim 3, wherein the body body is a diaphragm pump.

  According to the inter-block fixing structure in the body body according to the first aspect of the invention, the first block, the second block facing the first block, and the resin made between the first block and the second block An intermediate block, wherein the intermediate block has a chamber portion that penetrates from the first block toward the second block, and a first fixing member that fixes the first block and the intermediate block; A second fixing member for fixing the second block and the intermediate block; a first reinforcing member provided with a through hole through which the first fixing member and the second fixing member pass; the first fixing member; A second reinforcing member provided with a through-hole through which the fixing member passes, and the through-hole of the first reinforcing member and the through-hole of the second reinforcing member are aligned on the same straight line. In the intermediate block, the first reinforcing member is disposed on a first abutting surface that is in contact with the first block, and the second reinforcing member is also in contact with the second block in the intermediate block. 2 arranged on the contact surface, the first fixing member passes through the through hole of the first reinforcing member, is fixed to the through hole of the second reinforcing member, and connects the first block and the intermediate block at the same time. The second fixing member passes through the through hole of the second reinforcing member, is fixed to the through hole of the first reinforcing member, connects the second block and the intermediate block, and the first block, Since the intermediate block and the second block are integrally fixed to form the body body, the block is simply fixed with only bolts and nuts in a structure in which the blocks are combined and integrated. Between the respective blocks firmly and stably fixed Te, the deformation of the blocks due to the temperature change of the fluid flowing through it can be as much as possible be avoided.

  According to the inter-block fixing structure in the body main body according to the invention of claim 2, in the invention of claim 1, the first fixing member is attached to the first block via the first base member, and the second fixing member Is attached to the second block via the second base member, so that the first block can be pressed to the intermediate block side with equal force by the entire reinforcing member and the entire base member. It can be pressed to the side, and the effect of suppressing the deformation of the block is enhanced.

  According to the inter-block fixing structure in the body body according to the invention of claim 3, in the invention of claim 1, the first diaphragm part and the second diaphragm part are accommodated in the chamber part in the intermediate block, and the first diaphragm part And the second diaphragm part is connected to each other by a connecting part, and the connecting part is disposed in the chamber part so as to be movable back and forth, and the first diaphragm part is sandwiched between the first block and the intermediate block, Since the second diaphragm portion is sandwiched between the second block and the intermediate block, it can be adapted to fix the blocks of the body main body used in the fluid supply field.

  According to the inter-block fixing structure in the body main body according to the fourth aspect of the present invention, in the first aspect of the present invention, the first abutting surface groove portion for accommodating the first reinforcing member is formed on the first abutting surface. In addition, since the second abutment surface groove portion for accommodating the second reinforcement member is formed in the second abutment surface, the first reinforcement member protrudes to the first block side, and the second block side extends to the second block side. Protrusion of the second reinforcing member can be suppressed.

  According to the inter-block fixing structure in the body main body according to the invention of claim 5, in the invention of claim 1, the first fixing member and the second fixing member are bolt bodies, and the first fixing member and the first fixing member 2 Since the fixing with the reinforcing member and the fixing between the second fixing member and the first reinforcing member are performed via nuts, the processing of the reinforcing member can be simplified, and the fixing member and the reinforcing member which are bolt bodies Can be fixed smoothly and easily.

  According to the inter-block fixing structure in the body body according to the invention of claim 6, in the invention of claim 1, the first fixing member and the second fixing member are bolt bodies, and the first reinforcing member and the first fixing member 2 The reinforcing member is formed with a thread groove portion that is screwed with the first fixing member and the second fixing member, each of which is made of the bolt body, in addition to the through hole. Since the screw groove portions of the reinforcing member on the other side are located on the same straight line, the number of parts required for the fixing structure can be reduced, and the fixing member and the reinforcing member which are bolt bodies can be fixed smoothly and easily.

  According to the inter-block fixing structure in the body main body according to the seventh aspect of the invention, in the first aspect of the invention, the first reinforcing member and the second reinforcing member have an arc shape. And structural strength can be maintained.

  According to the inter-block fixing structure in the body body according to the invention of claim 8, in the invention of claim 1, since the resin intermediate block is made of polytetrafluoroethylene, it has corrosion resistance, chemical resistance and high temperature resistance. At the same time, it is highly viscous and suitable for cutting. In particular, by using the inter-block fixing structure in the body body, the effect of creep distortion caused by the polytetrafluoroethylene intermediate block can be suppressed by being pressed from above and below as the surface via both reinforcing members. It becomes.

  According to the inter-block fixing structure in the body main body according to the invention of claim 9, in the invention of claim 3, since the seal member is pressure-bonded to at least one of the first diaphragm part or the second diaphragm part, Adhesiveness between the diaphragm and each block is increased, and airtightness in the chamber is improved.

  According to the inter-block fixing structure in the body main body according to the invention of claim 10, in the invention of claim 3, since the body main body is a pressure control valve, It is possible to avoid the deformation of the block accompanying the temperature change as much as possible.

  According to the inter-block fixing structure in the body main body according to the eleventh aspect of the invention, in the invention of the third aspect, since the body main body is a constant flow valve, the fluid flowing through the body main body for the purpose of stabilizing the supply flow rate is provided. It is possible to avoid the deformation of the block accompanying the temperature change as much as possible.

  According to the inter-block fixing structure in the body main body according to the twelfth aspect of the invention, in the invention of the third aspect, the body main body is a diaphragm pump. The accompanying block deformation can be avoided as much as possible.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
1 is a longitudinal sectional view of a body body according to a first embodiment of the present invention, FIG. 2 is a partial sectional view of the body body of the first embodiment, and FIG. 3 is a portion of the body body of the first embodiment. 4 is a front sectional view of the body body of the first embodiment, FIG. 5 is a partial perspective view showing the mounting state of the fixing member and the reinforcing member, and FIG. 6 is the mounting state of another fixing member and the reinforcing member. FIG. 7 is a partial sectional view of the body body according to the second embodiment in a side view, FIG. 8 is a partial sectional view of the body body according to the second embodiment in a front view, and FIG. FIG. 10 is a side perspective view of the body body according to the third embodiment, FIG. 11 is a side sectional view of the body body according to the third embodiment, and FIG. FIG. 13 is a longitudinal sectional view of a body body according to a fourth embodiment, and FIG. 13 shows a body body according to the fourth embodiment. 14 is a side sectional view of a body body according to the fifth embodiment, FIG. 15 is a side sectional view of the body body of the fifth embodiment, and FIG. 16 is a sectional view of the fifth embodiment. FIG. 17 is a partial front view of another example of the fifth embodiment.

  The body body of the present invention is used in the field of fluid supply, and is connected to a supply line of fluid such as ultrapure water and chemicals in a semiconductor manufacturing facility, and a pressure feed line (not shown). Therefore, it is used as a device that introduces various fluids into the body body to control the flow rate, stabilize the fluid pressure, and pump the fluid. The inter-block fixing structure incorporated in such a body main body is a body main body in which a plurality of blocks in which other blocks are further interposed between two blocks are used to fix each of these blocks. It is a structure for.

  The body main body 1A of the first embodiment shown in FIGS. 1 to 4 is an example in which an inter-block fixing structure is applied to a pressure control valve as defined in the invention of claim 10. The disclosed pressure control valve is a flow rate control valve that flattens out the pressure fluctuation on the outflow side (downstream side) corresponding to the pressure fluctuation on the inflow side (upstream side) and makes the flow rate constant. The structure for fixing the inter-block in the body body of the present invention will be described together with the structure of the pressure control valve.

  As can be understood from the longitudinal sectional view in side view of FIG. 1, in the body main body 1 </ b> A, the first block 10, the second block 20 facing the first block, and the space between the first block and the second block The intermediate block 30 is positioned so as to be sandwiched between the two. The intermediate block 30 is formed with a chamber portion 40 penetrating from the first block 10 toward the second block 20. FIG. 1 shows an arrangement of a first reinforcing member 70 and a second reinforcing member 80 which will be described later.

  Since the body main body 1A is intended to control the flow rate of fluid and stabilize the fluid pressure, the first diaphragm portion 50 and the second diaphragm portion 60 are formed in the intermediate block 30 as defined in the invention of claim 3. The chamber 40 is accommodated. The first diaphragm part 50 and the second diaphragm part 60 are connected to each other by a connecting part 45. The connecting portion 45 is disposed in the chamber portion 40 so as to be able to advance and retract in the connecting direction of the connecting portion. Further, the first diaphragm portion 50 is sandwiched between the first block 10 and the intermediate block 30, and the second diaphragm portion 60 is also sandwiched between the second block 20 and the intermediate block 30.

  More specifically, the first diaphragm portion 50 includes a thin movable portion 51 and an outer peripheral portion 52. The outer peripheral portion 52 of the first diaphragm portion 50 is sandwiched between the first block 10 and the intermediate block 30 and fixed to the body main body 1A. And accommodated in the chamber 40. In the chamber part 40, the space near the first block 10 with the first diaphragm part 50 interposed therebetween is partitioned as the first pressurizing chamber 11, and the space near the intermediate block is partitioned as the first chamber 40p.

  Similarly, the second diaphragm portion 60 includes a thin movable portion 61 and an outer peripheral portion 62. The outer peripheral portion 62 of the second diaphragm portion 60 is sandwiched between the second block 20 and the intermediate block 30 and fixed to the body main body 1A. The chamber 40 is accommodated. In the chamber section 40, a space formed by the second block 20 with the second diaphragm section 60 interposed therebetween is partitioned as a second pressurizing chamber 21, and a space formed by the intermediate block is partitioned as a second chamber 40q.

  According to the illustrated example, as defined in the invention of claim 9, the first seal member 19 is pressure-bonded between both blocks sandwiching the first diaphragm portion 50, and the second diaphragm portion 60 is sandwiched. A second seal member 29 is pressure-bonded between both blocks. The seal member is an O-ring or a square ring made of a chemical-resistant resin material such as fluororesin rubber or silicone rubber. By interposing the seal member, the adhesion between the diaphragm and each block is increased, and the airtightness in the chamber is improved.

  The connecting portion 45 that connects the first diaphragm portion 50 and the second diaphragm portion 60 is provided with a valve portion 46. The valve unit 46 opens and closes a valve seat 35 that narrows the chamber unit 40. Reference numeral 47 denotes a valve mechanism, which includes a first diaphragm portion 50, a second diaphragm portion 60, and a connecting portion 45.

  In the intermediate block 30, an inflow portion 41 that receives the fluid F is provided on the primary side (upstream side), and is connected to the second chamber 40q. Moreover, the outflow part 42 which sends out the fluid F is provided in the secondary side (downstream side), and the outflow part 42 is connected to the 1st chamber 40p. The fluid F flows into the second chamber 40q from the inflow portion 41, passes through the valve seat 35 that narrows the chamber portion 40, flows into the first chamber 40p, and flows out of the body main body from the outflow portion 42. Further, an inflow side connection portion 38 is provided on the inflow portion 41 side of the intermediate block 30, and an outflow side connection portion 39 is provided on the outflow portion 42 side, and is connected to a fluid supply and pressure feed line (not shown) by a pipe line.

  The body main body 1A, which is a pressure control valve, includes a pressurizing unit 2 in either or both of the first pressurizing chamber 11 and the second pressurizing chamber 21. The illustrated pressurizing means 2 is a pressure-regulating gas 3 controlled under an electropneumatic regulator, and is connected to the first pressurizing chamber 11. The first diaphragm portion 50 (valve mechanism body 47) is always pushed down toward the inside of the intermediate block 30 by the regulated gas 3. In the second pressurizing chamber 21, a spring 22 is provided as a pressurizing means. The second diaphragm portion 60 (valve mechanism body 47) is always pushed up by the spring 22 toward the inside of the intermediate block 30.

  Here, the operation of the body main body 1A as a pressure control valve will be briefly described. The pressure fluctuation in the inflow portion 41 on the primary side (upstream side) appears as a fluctuation in back pressure (outward pressure away from the intermediate block) with respect to the second diaphragm portion 60 and the first diaphragm portion 50. At this time, the valve mechanism 47 is set so as to maintain a balance between the set pressure of the inward direction (the direction of pushing into the intermediate block) by the spring 22 and the pressure adjusting gas 3 and the fluctuating pressure on the primary side. Move. The distance between the valve portion 46 and the valve seat 35 is changed by the advance / retreat operation of the valve mechanism 47 (connecting portion 45), the opening amount of the valve seat 35 is changed, and the flow rate of the fluid passing to the secondary side is controlled. .

  In the figure, reference numeral 12 denotes an air supply port for the pressure adjusting gas, 13 denotes an exhaust port for the pressure adjusting gas, and 23 denotes a breathing path through which the air in the second pressurizing chamber 21 flows in and out. As another example of the pressing means, a combination of a stepping motor and a ball screw, a solenoid structure (electromagnet), or the like can be used.

  The fluid flowing through the body main body is a highly corrosive fluid such as acidic or basic in addition to ultra pure water, and further includes these high-temperature fluids. Therefore, each member has excellent corrosion resistance and chemical resistance such as PTFE (polytetrafluoroethylene), PFA (perfluoroalkoxyalkane), FEP (perfluoroethylene propene copolymer), PVDF (polyvinylidene fluoride), and high temperature resistance. It is molded with a fluororesin. The body main body of each embodiment described below is also made of the same fluororesin.

  In particular, the resin intermediate block 30 incorporated in the body main body is formed of PTFE (polytetrafluoroethylene) as defined in the invention of claim 8. PTFE has the above-mentioned corrosion resistance, chemical resistance, and high temperature resistance, and has a high viscosity and is suitable for cutting. Therefore, processing of the chamber portion, the inflow portion, the outflow portion, and the like inside the intermediate block is easy. Especially suitable for high-mix low-volume production.

  However, as described in the background art, PTFE has a large linear expansion coefficient, and easily undergoes deformation called “creep” during repeated heating and cooling. Therefore, the first reinforcing member 70 and the second reinforcing member 80 are provided in the intermediate block 30 to assist in fixing the first block and the intermediate block and fixing the second block and the intermediate block.

In the side sectional view of FIG. 2, the portion A ^* indicates the side surface of the body main body 1 </ b ^> A, and the portion A ^# indicates the side section. The body main body 1A includes a first fixing member 91 and a second fixing member 91, which are inserted into a first recess 15 provided in the first block 10 to fix the first block 10 and the intermediate block as fixing members between the blocks. A second fixing member 92 is provided that is inserted into the second recess 25 provided in the block 20 and fixes the second block 20 and the intermediate block. The reinforcing member and the fixing member of the portion A ^* are represented by broken lines, and the reinforcing member and the fixing member of the portion A ^# are represented by two-dot chain lines. The fixing member is appropriate as long as it can be joined to the reinforcing member. For example, a rivet or the like can be used. In the embodiment, as will be described later, both the first and second fixing members are bolt bodies.

  The first reinforcing member 70 is provided with a through hole 71 through which the first fixing member 91 and the second fixing member 92 penetrate. Similarly, the first fixing member 91 and the second fixing member 92 are also provided in the second reinforcing member 80. A through-hole 81 through which is penetrated is provided. As can be seen from the illustrated inter-block fixing structure X1, the first fixing member 91 and the second fixing member 92 are inserted vertically into the through holes 71 and 81 of the first reinforcing member 70 and the second reinforcing member 80, respectively. Has been. That is, the through holes of both reinforcing members are arranged on the same straight line. This is because the through-holes of the mutual reinforcing members are the shortest distance, and it is easy to insert both the fixing members.

In the partial top view of FIG. 3 that follows, a portion A ′ is a top surface portion of the body main body 1A, and a portion A ″ is a top surface portion in which the first block 10 of the body main body 1A is cut off in half to expose the intermediate block 30. 4, a portion A ^** is a front view portion from the inflow portion 41 (inflow side connection portion 38) of the body main body 1A, and A ^## is a cross-sectional portion in the same direction. is there.

  As defined in the seventh aspect of the invention, the first reinforcing member 70 has an arc shape and is composed of 70α and 70β having the same shape (see FIG. 3). Incidentally, since the 2nd reinforcement member 80 is the same shape as the 1st reinforcement member 70, illustration and description are abbreviate | omitted. By adopting the circular arc shape, the disk-shaped diaphragm portion can be pressed from the outer periphery, and the compression between the diaphragm portion and the block and the tightening between the blocks can be strengthened. Further, when the inflow portion 41 and the outflow portion 42 occupy a relatively large diameter (diameter) in the thickness (height) of the intermediate block, the first reinforcing member 70, It becomes difficult to arrange the second reinforcing member 80. Therefore, in order to maintain the structural strength of the first reinforcing member and the second reinforcing member by avoiding the vicinity of the inflow portion 41 and the outflow portion 42 and taking into consideration the structure inside the body main body, this portion is cut from the ring shape to obtain an arc shape. Become.

  The first reinforcing members 70 (70α, 70β) are disposed on the first contact surface 31 that is on the side in contact with the first block 10 in the intermediate block 30. Further, in the body main body 1A of the embodiment, as defined in the invention of claim 4, the first contact surface groove portion 33 is provided in the first contact surface 31, and the first reinforcing member 70 (70α, 70β) is provided. The first contact surface groove 33 is housed inside. Providing the first contact surface groove portion prevents the first reinforcing member from protruding toward the first block 10 (see FIG. 4). In addition, the shape processing required for the first block is also reduced.

Of course, the second reinforcing member 80 (80α, 80β) is also disposed on the second abutment surface 32 on the side of the intermediate block 30 in contact with the second block 20, and the second abutment groove 32 is formed on the second abutment surface 32. 34 is further provided, and the second reinforcing member 80 (80α, 80β) is housed inside the second surface groove 34 (see FIG. 4). The operation of the second contact surface groove is the same as described above. In the drawing, reference numeral 33r denotes a bottom surface portion of the first contact surface groove portion, and 34r denotes a bottom surface portion of the second contact surface groove portion. In FIG. 3 part A ″, the first fixing member is indicated by a two-dot chain line. In part A ^** of FIG. 4, only the first reinforcing member 70α (70) and the second reinforcing member 80α (80) are attached by broken lines. The position to be displayed.

  The state of connection and fixing between the fixing member and the reinforcing member in the inter-block fixing structure X1 will be described with reference to FIG. FIG. 5 shows only the fixing member and the reinforcing member with each block removed for easy grasping. As defined in the invention of claim 6, the first fixing member 91 and the second fixing member 92 are both bolt bodies having the same shape. Reference numeral 93 is a bolt groove, 94 is a bolt head, and wa is a washer. By adopting the bolt body as the fixing member, the blocks can be easily fixed and removed, and the workability is improved.

  As can be seen from FIG. 5, in the first reinforcing member 70, in addition to the through-hole 71 through which the first fixing member 91 passes, a screw groove portion 72 (screw) that is screwed into the bolt groove 93 of the second fixing member 92. Yamabe) is formed. Even in the second reinforcing member 80, in addition to the through hole 81 through which the second fixing member 92 passes, a screw groove portion 82 (thread portion) that is screwed into the bolt groove 93 of the first fixing member 91 is formed. Has been. As illustrated in the positional relationship, the through holes 71 and 81 of the reinforcing member on one side and the screw groove portions 72 and 82 of the reinforcing member on the other side are arranged on the same straight line. Therefore, the fixing and screwing by the fixing member (bolt body) are smooth. In addition, the number of parts required for the fixing structure is reduced.

  The specific arrangement of the inter-block fixing structure X1 based on the fixing member and the reinforcing member described so far is shown in FIG. The illustrated inter-block fixing structure is a fixing between the second block 20 and the intermediate block 30. When the second fixing member 92 (bolt body) is inserted into the second concave portion 25 of the second block 20, the passage portion 36 formed in the intermediate block 30 passes through the through hole 81 of the second reinforcing member 80 as it is. Through the screw groove 72 of the first reinforcing member 70. The stronger the screw tightening at this time, the closer the first reinforcing member 70 (70β) is to the second fixing member 92. As a result, the intermediate block 30 and the second block 20 sandwiched between the first reinforcing member 70 and the second fixing member 92 (particularly, the bolt head 94) are in close contact with each other, and the blocks are firmly connected to each other. Fixed.

  As also referred to from the top view of FIG. 3, the first reinforcing member 70 (70α, 70β) is crimped to the bottom surface portion 33r of the first contact surface groove portion 33 as a surface. For this reason, the non-uniformity of the screw tightening strength by each of the second fixing members (bolt bodies) is eliminated, and the intermediate block is pressed against the second block side with a uniform force as the entire first reinforcing member. Of course, although not shown, the fixing relationship between the intermediate block and the first block by the second reinforcing member 80 and the first fixing member is exactly the same. Therefore, the influence of the distortion caused by the creep generated in the resin intermediate block due to the heat change of the circulating fluid can be reduced by being pressed as a surface from above and below through both reinforcing members.

  FIG. 6 shows an inter-block fixing structure X1 'as another example of attachment of the reinforcing member and the fixing member. As defined in the invention of claim 5, the first fixing member 91 and the second fixing member 92 are bolt bodies as described above. Therefore, both the first fixing member 91 and the second reinforcing member 80 and the second fixing member 92 and the first reinforcing member 70 are fixed through the nut 95. As understood from the drawing, since the screwing of the bolt groove 93 is entrusted to the nut 95, it is not necessary to provide the screw groove portion in the reinforcing member, and only the through hole may be used. Therefore, the processing of the reinforcing member becomes simple. If necessary, the nut can be welded to the reinforcing member.

The body main body 1B of the second embodiment shown in the side sectional view of FIG. 7 and the front sectional view of FIG. 8 is an example in which the inter-block fixing structure is applied to the pressure control valve similar to the first embodiment. is there. Since the mechanism and operation as the pressure control valve are as described in detail in the first embodiment, they are omitted. In FIG. 7, a part B ^* is a side surface of the body main body 1B, and a part B ^# is a cross-sectional view in a side view. The reinforcing member, base member, and fixing member of the portion B ^* are represented by broken lines, and the reinforcing member, base member, and fixing member of the portion B ^# are represented by two-dot chain lines. A portion B ^{** in} FIG. 8 is a front view portion from the inflow portion 41 (inflow side connection portion 38) of the body main body 1B, and a portion B ^## is a cross-sectional portion in the same direction. In addition, the same code | symbol was used for the common location in each member.

  In the inter-block fixing structure X2 in the body main body 1B of the second embodiment, the first fixing member 91 is attached to the first block 10 via the first base member 101 as defined in the invention of claim 2. The second fixing member 92 is attached to the second block 20 via the second base member 102. The first base member 101 is provided with a through hole 103 into which the first fixing member 91 is inserted. Similarly, the second base member 102 is also provided with a through hole 104, into which the second fixing member 92 is inserted.

The first and second base members 101 (101α, 101β), 102 (102α, 102β) have the same arc corresponding to the first and second reinforcing members 70 (70α, 70β), 80 (80α, 80β). Shape. As understood from FIG. 8, the first block 10 is provided with a first accommodation groove 111, and the first base member 101 (101 α, 101 β) is accommodated in the first accommodation groove 111. The second storage groove 112 is also provided in the second block 20, and the second base member 102 (102 α, 102 β) is stored in the second storage groove 112. The first reinforcing member 70α In part B ^** in FIG. 8 (70), the second reinforcing member 80Arufa (80), the first base member 101Arufa (101), a second base member 102Arufa (102) only the position to be mounted by a broken line Show.

  The state of connection and fixation of the inter-block fixing structure X2 based on the fixing member including the base member and the reinforcing member is shown in FIG. In FIG. 9, each block is removed for easy grasping. First, the first fixing member 91 is inserted into the through hole 103 of the first base member 101, and then passes through the through hole 71 of the first reinforcing member 70, and is screwed into the screw groove portion 82 of the second reinforcing member 80. The Similarly, the second fixing member 92 is also inserted into the through hole 104 of the second base member 102, passes through the through hole 81 of the second reinforcing member 80, and is screwed into the screw groove 72 of the first reinforcing member 70. . As is obvious, the through holes 103 and 71 and the thread groove portion 82, and the through holes 104 and 81 and the thread groove portion 72 are all arranged on the same straight line.

  Reference is made to FIG. 8 above for the effect of providing the base member. A second fixing member 92 that is a bolt body is screwed into the thread groove 72 of the first reinforcing member 70 (70β). By tightening the screws at this time, the close contact between the intermediate block 30 and the second block 20 sandwiched between the fixing member and the reinforcing member is also strengthened. Since the second base member 102 is interposed inside the bolt head portion 94 of the second fixing member 92, the second block 20 is pressed from a small area by the bolt head portion of the second fixing member 92. It becomes the press by the surface with a member. Therefore, when connecting the second block and the intermediate block, the non-uniformity of the screw tightening strength is further eliminated, and the intermediate block is pressed against the second block side with a uniform force by the entire first reinforcing member and the entire second base member. be able to. This action is exactly the same in the first base member 101, the second reinforcing member 80, and the first fixing member that fix the first block 10 and the intermediate block 30.

  According to the inter-block fixing structure X2 of the body body disclosed in the second embodiment, for example, when both the first block and the second block are made of PTFE in addition to the intermediate block, the heat of the fluid flowing through the resin body body Increases the effect of reducing creep that occurs in the body body made of resin with changes. In other words, by providing both reinforcing members and both base members, each block is forcibly pressed from above and below in a combination of the first block-intermediate block-second block, and is fixed integrally. is there.

  The materials of the first and second reinforcing members 70 and 80, the first and second fixing members 91 and 92, and the first and second base members 101 and 102 shown in the drawings are appropriately made of metal, for example, SS400, SUS304 or the like. In particular, as can be understood from FIGS. 4 and 8, these members do not come into contact with the fluid flowing through the chamber portion. Therefore, the reinforcing member and the fixing member are not corroded, and the possibility of lowering the cleanliness of the fluid due to the corrosion of the member hardly occurs.

  The body main body 1C of the third embodiment disclosed in FIGS. 10 and 11 is an example in which the inter-block fixing structure X1 is applied to another type of pressure control valve. The illustrated pressure control valve is a back pressure control valve that can control the fluid on the inflow side (upstream side) to a predetermined pressure state while avoiding the influence of the pressure fluctuation on the outflow side (downstream side) as much as possible. The structure will be briefly described. In FIG. 10, only the first reinforcing member 70 and the second reinforcing member 80 are shown for simplicity.

  In the body main body 1 </ b> C of the pressure control valve (back pressure control valve), the first block 10, the intermediate block 30, and the second block 20 are stacked in this order, and a chamber portion 40 is formed in the intermediate block 30. The first diaphragm 50c includes a thin movable portion 51c and an outer peripheral portion 52c, and the outer peripheral portion 52c is sandwiched and fixed between the first block 10 and the intermediate block 30. The second diaphragm 60c also includes a thin movable portion 61c and an outer peripheral portion 62c, and the outer peripheral portion 62c is sandwiched and fixed between the second block 20 and the intermediate block 30. The 1st diaphragm 50c and the 2nd diaphragm 60c are mutually connected by the connection part 45c. The valve mechanism 47c is constituted by these both diaphragms and the connecting portion, and is arranged so as to be able to advance and retract inside the chamber portion. Parts common to those in FIG.

  Next, the operation of the valve mechanism 47 will be described together with the fluid flow in the body main body 1C. The first diaphragm 50c is always pushed down toward the inside of the intermediate block 30 under the pressure of the pressure adjusting gas 3 (pressurizing means 2). Although not shown, the valve portion 46 c is seated on the valve seat 35. The second diaphragm 60c is also biased upward by the spring 22.

  When the upstream fluid flow rate increases and the pressure increases, the first diaphragm 50c receives the pressure of the fluid F flowing into the first chamber 40p via the inflow side connection portion 38 and the inflow portion 41, and the first diaphragm 50c Rise against the bias. Therefore, the connecting portion 45 (valve mechanism body 47c) also moves up together with the first diaphragm portion 50c. As shown in FIG. 10, the valve portion 46c is separated from the valve seat 35, and a flow path that passes from the first chamber 40p to the second chamber 40q is opened. Therefore, the fluid F flows out of the body body through the second chamber 40q, the outflow portion 42, and the outflow side connection portion 39. In addition, since the thin movable part 51c (diaphragm effective diameter) of the 1st diaphragm part 50c is larger than the thin movable part 61c (diaphragm effective diameter) of the 2nd diaphragm part 60c, the sensitivity with respect to the pressure fluctuation of an inflow side becomes good.

In the side sectional view of FIG. 11, the portion C ^* indicates the side surface of the body body 1 </ b ^> C of the pressure control valve, and the portion C ^# indicates the sectional view in the side view. The reinforcing member and the fixing member of the portion C ^* are represented by broken lines, and the reinforcing member and the fixing member of the portion C ^# are represented by two-dot chain lines. In this case as well, as described above, as a fixing member between the blocks, a first fixing member 91 inserted into the first recess 15 provided in the first block 10 to fix the first block 10 and the intermediate block, A second fixing member 92 is provided that is inserted into the second recess 25 provided in the second block 20 and fixes the second block 20 and the intermediate block. The first reinforcing member 70 is provided with a through hole 71 through which the first fixing member 91 and the second fixing member 92 penetrate. Similarly, the first fixing member 91 and the second fixing member 92 are also provided in the second reinforcing member 80. A through-hole 81 through which is penetrated is provided.

  Both the first and second fixing members 91 and 92 are bolt bodies. The first fixing member 91 passes through the through hole 71 of the first reinforcing member 70 and is screwed into a thread groove portion 82 formed in the through hole of the second reinforcing member 80. Similarly, the second fixing member 92 passes through the through hole 81 of the second reinforcing member 80 and is screwed into a thread groove portion 72 formed in the through hole of the first reinforcing member 70. Therefore, the fixing of the first block 10 and the intermediate block 30 and the fixing of the second block 20 and the intermediate block 30 are completed, and all the blocks are integrated.

  The body body 1D of the fourth embodiment disclosed in FIGS. 12 and 13 is a constant flow valve as defined in the invention of claim 11. This is an example in which the inter-block fixing structure X2 is applied to the body body. In the longitudinal sectional view of FIG. 12, only the first reinforcing member 70, the second reinforcing member 80, the first base member 101, and the second base member 102 are shown for simplification.

  In the body body 1D of the constant flow valve, four blocks are stacked in the order of the first block 10, the first intermediate block 30s, the second intermediate block 30t, and the second block 20. A chamber portion 40 is formed inside through the first and second intermediate blocks 30s and 30t. Note that the same reference numerals are used in FIG.

  This constant flow valve has a structure in which fluid flowing in from the inflow side (upstream side) is once sent to the throttle portion, returned to the constant flow valve again, and discharged from the outflow side (downstream side). Therefore, from the viewpoint of fluid inflow and outflow, in order to newly provide a third diaphragm portion and partition the chamber portion, the intermediate block is divided into two to be the first and second intermediate blocks 30s and 30t.

  The first diaphragm portion 50d includes a thin movable portion 51d and an outer peripheral portion 52d, and the outer peripheral portion 52d is sandwiched and fixed between the first block 10 and the first intermediate block 30s via a seal member 19d. The second diaphragm portion 60d includes a thin movable portion 61d and an outer peripheral portion 62d, and the outer peripheral portion 62d is sandwiched and fixed between the second block 20 and the second intermediate block 30t via a seal member 29d. In addition, the third diaphragm portion 55 includes a thin movable portion 57 and an outer peripheral portion 56, and the outer peripheral portion 56 has a substantially U shape in cross section, and a seal member 58 is embedded in the first intermediate block 30 s. It is sandwiched and fixed between the second intermediate blocks 30t.

  The first diaphragm portion 50d and the third diaphragm portion 55 are connected to each other by a connecting portion 45s, and the second diaphragm portion 60d and the third diaphragm portion 55 are connected to each other by a connecting portion 45t. The valve mechanism 47d is constituted by each diaphragm portion and the connecting portion, and is disposed so as to be able to advance and retreat inside the chamber portion. Since the three diaphragm portions are provided, the chamber portion 40 is partitioned into a first chamber 40s, a second chamber 40t, and a third chamber 40u in order from the top. The valve mechanism 47d is provided with a valve portion 46d, and a valve seat 35t is formed in the second intermediate block. Therefore, as the valve mechanism 47d advances and retreats, the interval between the valve portion and the valve seat changes, and the flow rate is controlled.

The first diaphragm portion 50d is controlled by receiving the urging force of the pressure member 5 with the winding spring 4 and the pressure adjusting gas 3 (pressurizing means 2) flowing into the first pressurizing chamber 11 from the first air supply port 14. Is done.
Further, the second diaphragm 60d is controlled in response to the urged pressure-adjusting gas 3 (pressurizing means 2) flowing into the second pressurizing chamber 21 from the second air supply port 24. Reference numeral 6 denotes a lock nut.

  The details of the path of the fluid F flowing into the body body 1D of the fourth embodiment which is a constant flow valve are as follows. The fluid F that has flowed into the third chamber 40u through the inflow side connection portion 38d and the inflow portion 41 passes through the valve seat 35t and flows into the second chamber 40t, and then the throttling portion side outflow portion 41o and the throttling portion side outflow connection portion. It flows out from 37o to the connecting pipe line 8 outside the body body. The fluid F flows into the first chamber 40s from the throttle portion side inflow connection portion 37i and the throttle portion side inflow portion 42i via the throttle portion 7 formed of a known variable orifice. And the fluid F is discharged | emitted from the outflow part 42 and the outflow side connection part 39d. During this time, the final flow rate of the fluid on the outflow side is controlled to a predetermined amount by the balance between the fluid pressure applied to each diaphragm, the regulated gas, and the throttle portion.

In the side sectional view in FIG. 13, a part D ^* indicates a side surface of the body body 1 </ b ^> D of the constant flow valve, and a part D ^# indicates a section in side view. The reinforcing member, base member, and fixing member of the portion D ^* are represented by broken lines, and the reinforcing member, base member, and fixing member of the portion D ^# are represented by two-dot chain lines. In the body body 1D of the fourth embodiment, as shown in FIG. 4, the first reinforcing member 70 is disposed on the first contact surface 31d of the first intermediate block 30s, and the first contact surface of the first contact surface 31d. It is accommodated inside the groove 33s. Similarly, the second reinforcing member 80 is also disposed on the second contact surface 32d of the second intermediate block 30t and is accommodated in the second contact surface groove 34t of the second contact surface 32d. Further, as shown in FIG. 8, the first block 10 is provided with a first accommodation groove 111 d for accommodating the first base member 101, and the second accommodation groove 112 d for accommodating the second base member 102 also in the second block 20. Are provided, and the first and second base members are housed in the respective housing grooves. Reference numeral 30v denotes a third contact surface formed by the first intermediate block and the second intermediate block.

  The first fixing member 91 is attached to the first block 10 via the first base member 101, and the second fixing member 92 is attached to the second block 20 via the second base member 102. The first base member 101 is provided with a through hole 103 into which the first fixing member 91 is inserted. Similarly, the second base member 102 is also provided with a through hole 104, into which the second fixing member 92 is inserted. Since both fixing members of this embodiment are also bolt bodies, screw groove portions 72 are provided in the through holes 71 of the first reinforcing member 70, and screw groove portions 82 are provided in the through holes 81 of the second reinforcing member 80, respectively. The first and second base members 101 and 102 have the same arc shape corresponding to the first and second reinforcing members 70 and 80.

  According to the body body 1D of the fourth embodiment shown as a constant flow valve, in addition to the first and second intermediate blocks 30s and 30t, the first and second blocks 10 and 20 require fine shape processing. Therefore, PTFE (polytetrafluoroethylene) is preferably used as a fluororesin that can be easily cut in any of the blocks. However, as is obvious from the drawing, the body main body 1D is a long structure in the vertical direction (block stacking direction). Therefore, it is necessary to firmly fix all four blocks, and to suppress the influence of the distortion caused by the creep generated in each resin block. Considering the above viewpoint, when the inter-block fixing structure X2 is adopted for the body main body 1D that is a constant flow valve, in addition to pressing as the surfaces of the first and second reinforcing members, the surfaces of the first and second reinforcing members are used. Pressure is also added. For this reason, the blocks are generally relatively uniformly pressed and fixed together.

  The body body 1E of the fifth embodiment disclosed in FIGS. 14 to 16 is a diaphragm pump as defined in the invention of claim 12. This is an example in which the inter-block fixing structure X1 is applied to the body body. In FIG. 14, only the first reinforcing member 70 and the second reinforcing member 80 are shown for simplicity. First, the structure of the body main body 1E which is a diaphragm pump will be described with reference to FIG.

  The body body 1E that is a diaphragm pump is stacked in the order of the first block 10, the intermediate block 30, and the second block 20. A chamber portion 40 is formed in an intermediate block sandwiched between the first and second blocks and penetrates the interior from the first block to the second block. The first diaphragm portion 50e includes a thin movable portion 51e and an outer peripheral portion 52e, and the outer peripheral portion 52e is sandwiched and fixed between the first block 10 and the intermediate block 30 via a seal member 19e. The second diaphragm portion 60e includes a thin movable portion 61e and an outer peripheral portion 62e, and the outer peripheral portion 62e is sandwiched and fixed between the second block 20 and the intermediate block 30 via a seal member 29e.

  The first diaphragm portion 50e and the second diaphragm portion 60e are connected to each other by the connecting portion 45. The pressurizing mechanism 48 is constituted by each diaphragm portion and the connecting portion, and is disposed so as to be reciprocally movable inside the chamber portion. As understood from the arrangement of the illustrated diaphragm portion, in the chamber portion 40, the space near the first block 10 across the first diaphragm portion 50e is the first pressure chamber 40m, and the space near the intermediate block is the first pressurization. Comparted as a chamber 11m. Similarly, the space near the second block 20 across the second diaphragm portion 60e is partitioned as the second chamber 40n, and the space near the intermediate block is partitioned as the second pressurizing chamber 21n.

  In the inside of the body 1E of the diaphragm pump, there are a first outer inflow portion 313, a second outer inflow portion 331, and a connection inflow portion that communicates the first outer inflow portion and the second outer inflow portion. A body inner inflow portion 310 provided with a 321; a first outer outflow portion 314 of a fluid F; a second outer outflow portion 332; and a connection outflow portion 322 communicating the first outer outflow portion and the second outer outflow portion. A body internal outflow portion 320 is provided. The first chamber 40m includes a first suction part 341 that communicates with the first outer inflow part, and a first discharge part 342 that communicates with the first outer outflow part. The second chamber 40n includes a second outer inflow part. A second suction part 351 communicating with the second discharge part 352 communicating with the second outer outflow part is formed.

  Further, a first suction check valve 361 and a first discharge part 342 that are interposed between the first outer inflow part 313 and the first suction part 341 and allow the fluid to be fed F to flow in the direction of the first suction part 341. First discharge check valve 366, a second outer inflow portion 331 and a second suction portion which are interposed between the first outer outflow portion 314 and allow the fluid F to flow under pressure in the direction of the first outer outflow portion 314. 351 is interposed between the second suction check valve 371, the second discharge part 352, and the second outer outflow part 332, which are interposed between the second suction parts 351 and allow the pressurized fluid F to flow in the direction of the second suction part 351. A second discharge check valve 376 that allows the fluid F to flow in the direction of the second outer outflow portion 332 is provided.

  The check valves 361, 366, 371, and 376 of the embodiment have a structure in which a cross-shaped groove is formed on one surface (upper surface portion) of the cylindrical body (not shown). The check valve provided in the diaphragm pump is not limited to the structure of the embodiment as long as the check valve can prevent the backflow of the fluid to be fed.

  A first inflow port 311 for allowing the fluid F to flow into the body main body is provided on one side of the first block 10 (lower side of the body main body), and is connected to the first outer inflow portion 313. A first outflow port 312 for allowing the fluid F to flow out of the body main body is provided on the other side (upper side of the body main body) in the first block 10, and is connected to the first outer outflow portion 314. A second inflow port 333 for allowing the fluid F to flow into the body main body is also provided on one side of the second block 20 (lower side of the body main body), and is connected to the second outer inflow portion 331. A second outflow port 334 for allowing the fluid F to flow out of the body main body is also provided on the other side of the second block 20 (upper side of the body main body), and is connected to the second outer outflow portion 332.

  A first working fluid inflow / outflow portion 391 and a second working fluid inflow / outflow portion 392 are formed in the intermediate block 30. The expansion of the first diaphragm portion 50e is controlled by the working fluid a flowing in and out of the first working fluid inflow / outflow portion 391. Similarly, the expansion of the second diaphragm portion 60e is controlled by the working fluid a flowing in and out of the second working fluid inflow and outflow portion 392.

  In this embodiment, the first diaphragm portion 50e and the second diaphragm portion 60e are connected by a connecting portion 45, and the behavior of the diaphragms is linked. Therefore, when the working fluid flows from behind one of the diaphragm parts, the diaphragm is urged to expand and discharge the fluid in the chamber that houses the diaphragm (the first diaphragm part 50e and the first chamber 40m in FIG. 14). reference). Further, the other diaphragm portion is drawn to one diaphragm through the connecting portion, and the working fluid urged from behind the diaphragm starts to flow out. As a result, inflow of the pressurized fluid starts into the chamber containing the other diaphragm (see the second diaphragm portion 60e and the second chamber 40n in FIG. 14).

  In the diaphragm pump of the body main body 1E of the fifth embodiment, the expansion and contraction of the first diaphragm portion 50e and the second diaphragm portion 60e are performed after the operation is stopped in order to suppress instability of pulsation at the start of the operation. The stress is balanced. Specifically, a first thin portion 410 is formed in the first block 10, and a first biasing block 411 that receives a biasing force of the first spring 412 is accommodated therein. Also in the second block 20, a second thin portion 420 is formed, and the second urging block 421 that receives the urging force of the second spring 422 is accommodated. In the figure, reference numeral 413 denotes a first breathing path through which air enters and exits for smooth movement of the first biasing block, 414 denotes a first lid, and 423 denotes smooth movement of the second biasing block. A second breathing path 424 through which air enters and exits is a second lid.

  After the operation is stopped, the first urging block 411 presses the first thin portion 410 toward the first chamber 40m, and the second urging block 421 pushes the second thin portion 420 toward the second chamber 40n with the same pressing force. , The first diaphragm portion 50e and the second diaphragm portion 60e receive the pressure from the thin portions equally. Thus, the expansion and contraction stresses of both diaphragms are equalized, and both diaphragms are in the same shape.

  When the operation of the diaphragm pump is stopped, the flow pressure of the fluid to be fed F is lowered and the pressure in both chambers becomes constant. Then, due to the elastic force of the resin itself that forms the diaphragm, the stresses of expansion and contraction of the first diaphragm and the second diaphragm are balanced and have the same shape. Accordingly, it is possible to omit means for balancing the position of the diaphragm such as the first urging block and the second urging block as in the illustrated embodiment.

  As described above, internal flow passages (body internal inflow portion 310, body internal outflow portion 320) that allow the fluid to be fed to flow are formed inside the diaphragm pump. According to the structure of the diaphragm pump, the fluid flowing from either the first outer inflow portion 313 or the second outer inflow portion 331 can flow into either the first chamber 40m or the second chamber 40n. Similarly, the fluid that flows out (discharges) from either the first chamber 40m or the second chamber 40n flows out of the diaphragm pump via either the first outer outlet 314 or the second outer outlet 332. It becomes possible. In the illustrated example, the first outlet 312 and the second inlet 333 are sealed, and the fluid flowing in from the first outer inlet 313 (first inlet 311) is the second outer outlet 332 (second outlet). 334) flows out of the body.

In the side sectional view of FIG. 15, a portion E ^* indicates a side surface of the body body 1 </ b ^> E of the diaphragm pump, and a portion E ^# indicates a sectional view in the side view. The reinforcing member and the fixing member of the portion E ^* are represented by broken lines, and the reinforcing member and the fixing member of the portion E ^# are represented by two-dot chain lines. In the partial side views of FIGS. 16 and 17 that follow, a portion E ′ is a left side portion viewed from the first block side of the body main body 1E, and a portion E ″ is the first block 10 of the body main body 1E in the same direction. Is a left side surface portion in which the intermediate block 30 is exposed by cutting it out in half. In the illustrated portion E ″, the first fixing member indicates the position of presence by a two-dot chain line.

  The first reinforcing member 70 (70α, 70β) is disposed on the first contact surface 31e on the intermediate block 30 on the side in contact with the first block 10, and the first contact surface groove 33e is formed on the first contact surface 31e. The first reinforcing member 70 (70α, 70β) is provided in the first contact surface groove portion 33e. Similarly, the second reinforcing member 80 is disposed on the second contact surface 32e on the intermediate block 30 that is in contact with the second block 20, and the second contact surface 32 is further provided with a second contact surface groove 34e. The second reinforcing member 80 is accommodated in the second contact surface groove 34e.

  The fixing members between the blocks are provided in the first fixing member 91 and the second block 20 which are inserted into the first recess 15 provided in the first block 10 and fix the first block 10 and the intermediate block. A second fixing member 92 is provided to be inserted into the second recess 25 and to fix the second block 20 and the intermediate block. The first reinforcing member 70 is provided with a through hole 71 through which the first fixing member 91 and the second fixing member 92 penetrate. Similarly, the first fixing member 91 and the second fixing member 92 are also provided in the second reinforcing member 80. A through-hole 81 through which is penetrated is provided.

  Both the first and second fixing members 91 and 92 are bolt bodies. The first fixing member 91 passes through the through hole 71 of the first reinforcing member 70 and is screwed into a thread groove portion 82 formed in the through hole of the second reinforcing member 80. Similarly, the second fixing member 92 passes through the through hole 81 of the second reinforcing member 80 and is screwed into a thread groove portion 72 formed in the through hole of the first reinforcing member 70. Therefore, the fixing of the first block 10 and the intermediate block 30 and the fixing of the second block 20 and the intermediate block 30 are completed, and all the blocks are integrated to form the body body.

  As can be seen from FIG. 16, also in the diaphragm pump of the body main body 1E of the embodiment, the first reinforcing member 70 has an arc shape and is composed of 70α and 70β having the same shape. Incidentally, since the 2nd reinforcement member 80 is the same shape as the 1st reinforcement member 70, illustration and description are abbreviate | omitted. By adopting the circular arc shape, the disk-shaped diaphragm portion in the diaphragm pump can be pressed from the outer periphery, and the compression between the diaphragm portion and the block and the tightening between the blocks can be strengthened.

  In particular, the disclosed diaphragm pump includes an internal flow path (body internal inflow portion 310, body internal outflow portion 320) for guiding fluid to each chamber. For this reason, when the size of the diaphragm pump itself is taken into consideration, it is not possible to dispose both reinforcing members while avoiding contact of the first reinforcing member 70 and the second reinforcing member 80 with the internal flow path. Have difficulty. Therefore, as a result of avoiding the body internal inflow portion 310 and the body internal outflow portion 320, a circular arc shape as illustrated is preferable.

  FIG. 17 that follows discloses another form of the reinforcing member in the diaphragm pump of the body main body 1E. The illustrated first reinforcing members 70γ and 70δ are both substantially U-shaped. Of course, the second reinforcing member has the same shape. According to the shape shown in the figure, the inner shape of the rectangular diaphragm pump in front view is matched, so that the blocks can be stably fixed.

  The inter-block fixing structure of the present invention described in detail above is not necessarily limited to the configuration disclosed as the above embodiment. Needless to say, various modifications can be made without departing from the scope of the invention. For example, the bolt body includes appropriate screws in addition to the illustrated bolts. It is also possible to further increase the close contact between the blocks by adding the first and second base members to the diaphragm pump. In addition to the arc shape and the U shape disclosed in the embodiments, the shape of the reinforcing member and the base member may be adapted to the shape of the body body, for example, a U shape, an L shape, a rectangular shape, or an annular shape. More appropriately selected.

It is a side view longitudinal cross-sectional view of the body main body which concerns on 1st Example of this invention. It is a side view fragmentary sectional view of the body main body of 1st Example. It is a partial top view of the body main body of 1st Example. It is a front view fragmentary sectional view of the body main body of 1st Example. It is a fragmentary perspective view which shows the attachment state of a fixing member and a reinforcement member. It is a fragmentary perspective view which shows the attachment state of another fixing member and a reinforcement member. It is a side view fragmentary sectional view of the body main body which concerns on 2nd Example. It is a front view fragmentary sectional view of the body main body of 2nd Example. It is a fragmentary perspective view which shows the attachment state of another fixing member and a reinforcement member. It is a side view longitudinal cross-sectional view of the body main body which concerns on 3rd Example. It is a side view fragmentary sectional view of the body main body of 3rd Example. It is a side view longitudinal cross-sectional view of the body main body which concerns on 4th Example. It is a side view fragmentary sectional view of the body main body of 4th Example. It is a side view longitudinal cross-sectional view of the body main body which concerns on 5th Example. It is a side view fragmentary sectional view of the body main body of 5th Example. It is a partial front view of the body main body of 5th Example. It is a partial front view of another example in the fifth embodiment. It is a notch side view which showed the fixing structure between the blocks in the conventional body main body.

Explanation of symbols

1A, 1B, 1C, 1D, 1E Body body 10 First block 15 First recess 19 First seal member 20 Second block 25 Second recess 29 Second seal member 30 Intermediate block 31 First contact surface 32 Second contact Contact surface 33 First contact surface groove portion 34 Second contact surface groove portion 40 Chamber portion 45 Connecting portion 50 First diaphragm portion 60 Second diaphragm portion 70 First reinforcing member 71 Through hole 72 Screw groove portion 80 Second reinforcing member 81 Through Hole 82 Screw groove portion 91 First fixing member 92 Second fixing member 101 First base member 102 Second base member 111 First receiving groove portion 112 Second receiving groove portion X1, X1 ', X2 Inter-block fixing structure

Claims (12)

A first block (10), a second block (20) facing the first block, and a resin intermediate block (30) positioned between the first block and the second block, In the body main body (1A), the intermediate block has a chamber portion (40) penetrating from the first block toward the second block.
A first fixing member (91) for fixing the first block and the intermediate block; a second fixing member (92) for fixing the second block and the intermediate block; the first fixing member and the second fixing; A first reinforcing member (70) provided with a through hole (71) through which the member passes, and a second reinforcing member (80) provided with a through hole (81) through which the first fixing member and the second fixing member pass. And
The first abutment surface which is the side where the through hole of the first reinforcing member and the through hole of the second reinforcing member are aligned on the same straight line and the first reinforcing member is in contact with the first block in the intermediate block (31), similarly, in the intermediate block, the second reinforcing member is disposed on the second contact surface (32) on the side in contact with the second block,
The first fixing member passes through the through hole of the first reinforcing member and is fixed to the through hole of the second reinforcing member to connect the first block and the intermediate block. At the same time, the second fixing member is Passing through the through hole of the second reinforcing member, fixing the through hole of the first reinforcing member, connecting the second block and the intermediate block,
The inter-block fixing structure in the body main body, wherein the first main block, the intermediate block, and the second block are integrally fixed to constitute the body main body.   The first fixing member is attached to the first block via a first base member (101), and the second fixing member is attached to the second block via a second base member (102). Item 4. The inter-block fixing structure in the body body according to Item 1. A first diaphragm part (50) and a second diaphragm part (60) are accommodated in the chamber part of the intermediate block, and the first diaphragm part and the second diaphragm part are connected to each other by a connection part (45), The connecting portion is disposed in the chamber portion so as to freely advance and retract,
2. The body body according to claim 1, wherein the first diaphragm portion is sandwiched between the first block and the intermediate block, and the second diaphragm portion is sandwiched between the second block and the intermediate block. Fixed structure between blocks.   A first contact surface groove (33) for accommodating the first reinforcement member is formed on the first contact surface, and a second contact for accommodating the second reinforcement member on the second contact surface. The inter-block fixing structure in the body main body according to claim 1, wherein the surface groove portion (34) is formed. The first fixing member and the second fixing member are bolt bodies,
The inter-block fixing structure in the body main body according to claim 1, wherein the fixing between the first fixing member and the second reinforcing member and the fixing between the second fixing member and the first reinforcing member are performed via nuts. The first fixing member and the second fixing member are bolt bodies,
The first reinforcing member and the second reinforcing member are respectively formed with screw groove portions (72, 82) which are screwed with the first fixing member and the second fixing member, which are the bolt bodies, in addition to the through holes. And
The inter-block fixing structure in the body main body according to claim 1, wherein the through hole of the one side reinforcing member and the thread groove portion of the other side reinforcing member are located on the same straight line.   The inter-block fixing structure in the body main body according to claim 1, wherein the first reinforcing member and the second reinforcing member have an arc shape.   The inter-block fixing structure in the body body according to claim 1, wherein the resin intermediate block is made of polytetrafluoroethylene.   The inter-block fixing structure in the body main body according to claim 3, wherein a seal member is pressure-bonded to at least one of the first diaphragm portion and the second diaphragm portion.   The inter-block fixing structure in the body main body according to claim 3, wherein the body main body is a pressure control valve.   The inter-block fixing structure in the body main body according to claim 3, wherein the body main body is a constant flow valve.   The inter-block fixing structure in the body main body according to claim 3, wherein the body main body is a diaphragm pump.

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