JP2009097042A - Sheet processing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sheet treatment device capable of rapidly performing the surface treatment of a sheet body by predetermined treatment gas with excellent working efficiency, and preventing any leakage of the treatment gas around the outside of a device body. <P>SOLUTION: A carry-in side support chamber 6 and a carry-out side support chamber 7 are provided, which cover a carry-in port 4 and the carry-out port 5 of a treatment chamber 2 of the device body A, respectively. A sheet body 3 is successively carried in the treatment chamber 2 by a conveying means through the carry-in side support chamber 6, and successively carried out from the treatment chamber 2 through the carry-out side support chamber 7, so that the sheet body 3 is continuously conveyed and passed through into the device body A. In the treatment chamber 2, there are provided an ejection nozzle part 9 having an ejecting area in the width direction of the sheet body 3 at least on one surface side of the sheet body 3 conveyed and passed through the treatment chamber 2 to eject the predetermined treatment gas toward the sheet body 3, and an intake port 10 at the position in the vicinity of the front side or the rear side in the conveying direction of the sheet body 3 with respect to the ejection nozzle part 9. Each exhaust part 8 is provided to the carry-in side support chamber 6 and the carry-out side support chamber 7. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a sheet processing apparatus that, for example, surface-treats a sheet body that is continuously conveyed and passed by a predetermined processing gas within the apparatus main body.

  Conventionally, for example, a hydrophobic treatment has been performed for the purpose of improving the adhesion of a predetermined processing surface. As a typical technique, a predetermined processing gas containing HMDS (hexamethyldisilazaza) is applied to the processing surface. A method of hydrophobizing the surface to be processed by reacting with the processing gas (HMDS gas) by spraying is performed.

  However, for example, HMDS gas itself has high flammability and generates ammonia after reacting with the surface to be processed, which causes problems of corrosion and bad odor. Hereinafter, the term “processing gas” includes not only the processing gas before reacting with the processing surface but also the processing gas after the processing surface and HMDS have reacted with each other). It is extremely important to prevent leakage.

  Therefore, when such a processing gas is used, the processing is generally performed in a sealed processing chamber (sealed chamber) (for example, Patent Documents 1 and 2).

  However, when processing is performed in such a sealed processing chamber, the processing chamber is opened and a work is carried in, the processing chamber is sealed, and processing gas is ejected to the workpiece in the processing chamber. I do. After the processing, the gas atmosphere containing the processing gas in the processing chamber is exhausted by the exhaust means provided in the processing chamber while maintaining the sealed state, and the processing chamber is opened after the processing gas is completely exhausted. It is opened to carry out workpieces or carry in the next workpiece as appropriate.

  Accordingly, for example, a sheet body that is sequentially carried into and out of the processing chamber and continuously conveyed and passed through the processing chamber, such as a sheet body that is wound and conveyed while being held in a tension state by a plurality of rolls. When it is desired to carry out such a process, the process chamber cannot be sealed with a shutter or the like even during the process, as long as the sheet member is continuously conveyed and passed through the process chamber.

  For this reason, the HMDS treatment (hydrophobization treatment) has not been carried out on long sheets so far.

  Although there is a method for obtaining a sheet body excellent in hydrophobicity by performing HMDS treatment on the constituent material itself of the sheet body at the time of forming the sheet body, the surface of the existing sheet body cannot be subjected to HMDS treatment, In the past, there has been no proposal to solve the above problem.

JP 2000-150368 A JP-A 63-94627

  In view of the present situation as described above, the present invention performs surface treatment of a sheet body by ejecting and contacting a processing gas to the sheet body within the apparatus body while continuously conveying and passing the sheet body into the apparatus body. Provided is an epoch-making sheet processing apparatus that is excellent in workability and safety, such that it can be performed quickly and satisfactorily, and the processing gas can be surely prevented from leaking outside the apparatus main body. This is the issue.

  The gist of the present invention will be described with reference to the accompanying drawings.

  In the sheet processing apparatus for processing the sheet body 3 in the apparatus main body A while continuously transporting and passing the sheet body 3 into the apparatus main body A by a predetermined conveying means, the apparatus main body A is the sheet body. 3 is provided with a processing chamber 2 in which a processing gas is brought into contact with the processing gas, and a carry-in side auxiliary chamber 6 and a carry-out side auxiliary chamber 7 that respectively cover the carry-in port 4 and the carry-out port 5 of the treatment chamber 2. The sheet body 3 passes through the carry-in side auxiliary chamber 6 and is sequentially carried into the processing chamber 2, and is sequentially carried out from the processing chamber 2 through the carry-out side auxiliary chamber 7 and into the apparatus main body A. The sheet body 3 can be continuously conveyed and passed, and the processing chamber 2 includes a conveying direction of the sheet body 3 on at least one side of the sheet body 3 that is conveyed and passed through the processing chamber 2. The sheet having an ejection area in the orthogonal width direction 3 is provided, and a jet nozzle portion 9 for jetting a predetermined processing gas toward the nozzle 3 is provided, and at a position near the jet nozzle portion 9, at least not at a position facing the jet nozzle portion 9 via the sheet body 3. A suction port 10 is provided in the vicinity of the ejection nozzle portion 9 in the vicinity of the front side or the rear side of the sheet body 3 in the conveying direction, and the carry-in side auxiliary chamber 6 and the carry-out side auxiliary chamber 7 are exhausted respectively. A portion 8 is provided, and at the time of processing, processing gas is ejected from the ejection nozzle portion 9 toward the sheet body 3, and a gas atmosphere in the processing chamber 2 containing the processing gas is generated from the suction port 10. The processing gas leaked from the processing chamber 2 into the loading-side auxiliary chamber 6 or the unloading-side auxiliary chamber 7 through the loading port 4 or the unloading port 5 without being completely sucked by the suction port 10. Including The atmosphere is exhausted from the exhaust unit 8, and the sheet body 3 is continuously conveyed and passed through the apparatus main body A while preventing the gas atmosphere in the processing chamber 2 from leaking around the apparatus main body A. The present invention relates to a sheet processing apparatus characterized by being configured to be able to be configured.

  Further, as the processing gas ejected from the ejection nozzle unit 9, a processing gas containing HMDS is adopted, and the processing gas containing HMDS is brought into contact with the sheet body 3 in the processing chamber 2 to perform a hydrophobic treatment. 2. The sheet processing apparatus according to claim 1, wherein the apparatus main body A is configured as described above.

  The ejection nozzle portion 9 is formed in a slit nozzle shape that is long in the width direction orthogonal to the conveyance direction of the sheet body 3 that is conveyed and passed through the processing chamber 2, or along the width direction of the sheet body 3. 3. The structure according to claim 1, wherein a plurality of nozzle openings are juxtaposed to have the ejection region having a width dimension substantially equal to at least the width dimension of the sheet body 3. The present invention relates to a sheet processing apparatus.

  The suction port 10 is formed in a slit nozzle shape that is long in the width direction orthogonal to the transport direction of the sheet body 3 that is transported and passed through the processing chamber 2, or along the width direction of the sheet body 3. 4. The sheet processing apparatus according to claim 3, wherein a plurality of nozzle openings are arranged side by side and have a width direction along the ejection region of the ejection nozzle section.

  In addition, the suction port 10 is positioned on both the front side and the rear side in the conveying direction of the sheet body 3 with respect to the jet nozzle unit 9, and the process gas jetted from the jet nozzle unit 9 is sucked into the suction port 10. 5. The sheet processing apparatus according to claim 1, wherein the sheet processing apparatus is provided in the vicinity of the ejection nozzle portion 9 so as to be guided and sucked into the mouth 10.

  Further, the sheet body 3 and the ejection port 10 are provided between the ejection nozzle section 9 and the suction port 10 provided in the vicinity of the ejection nozzle section 9 on the front side or the rear side in the conveying direction of the sheet body 3. A sheet proximity surface portion 11 close to the state is provided, and at the time of processing, the processing gas ejected from the ejection nozzle portion 9 passes through the gap between the sheet proximity surface portion 11 and the surface of the sheet body 3 by the suction input of the suction port 10. The sheet processing apparatus according to claim 1, wherein the sheet processing apparatus is configured to be guided and sucked into the suction port 10.

  Further, in a state of extending from the mouth edge portion of the ejection nozzle portion 9 toward the suction port 10 provided in the vicinity of the ejection nozzle portion 9 on the front side or the rear side in the conveyance direction of the sheet body 3. The sheet processing apparatus according to claim 6, wherein the sheet proximity surface portion is formed.

  Further, an auxiliary carry-in port 14 is provided in the carry-in side auxiliary chamber 6 that covers the carry-in port 4 of the processing chamber 2, and an auxiliary carry-out port 15 is provided in the carry-out side auxiliary chamber 7 that covers the carry-out port 5. 3 is sequentially passed through the carry-in auxiliary carry-in port 14 and the carry-in port 4 and sequentially carried into the process chamber 2, while the carry-out port 5 and the auxiliary carry-out port 15 are sequentially passed through the process chamber 2 and sequentially carried out. The sheet processing apparatus according to claim 1, wherein the sheet body 3 can be continuously conveyed and passed through the apparatus main body A. .

  Further, by the exhaust from each exhaust section 8 provided in each of the carry-in side auxiliary chamber 6 and the carry-out side auxiliary chamber 7, the auxiliary carry-in port 14 provided in the carry-in side auxiliary chamber 6 and the carry-out side auxiliary chamber 7 are provided. An exhaust suction input of the exhaust unit 8 is set so that outside air is sucked from the auxiliary carry-out port 15, and the inside of the processing chamber 2 is moved from the auxiliary carry-in port 14 and the auxiliary carry-out port 15 to the outside of the apparatus main body A. 9. The sheet processing apparatus according to claim 8, wherein the exhaust suction force of the exhaust unit is set so that a gas atmosphere does not leak.

  Further, the carry-in side auxiliary chamber 6 and the carry-out side auxiliary chamber 7 have both one side and the other side through the sheet body 3 that is conveyed and passed through the carry-in side auxiliary chamber 6 and the carry-out side auxiliary chamber 7. The sheet processing apparatus according to claim 1, wherein the exhaust unit 8 is provided at each side position.

  Since the present invention is configured as described above, the surface treatment is performed by ejecting and contacting the processing gas to the sheet body in the processing chamber of the apparatus body while continuously conveying the sheet body through the apparatus body. Therefore, a predetermined surface treatment can be performed on the sheet body quickly and satisfactorily while continuously conveying the sheet body.

  In addition, the present apparatus has a structure in which the sheet body is continuously conveyed and passed, that is, a structure in which processing is performed while the sheet body is continuously opened to continuously convey and pass the sheet body without being sealed during processing. However, the gas atmosphere in the processing chamber of the apparatus main body leaks out to the outside of the apparatus main body because the suction port provided in the vicinity of the ejection nozzle portion and the exhaust provided in the carry-in side auxiliary chamber and the carry-out side auxiliary chamber respectively. This can be reliably prevented by both of the parts.

  Therefore, the present invention reliably prevents the processing gas from leaking to the outside of the main body of the apparatus despite the fact that it does not have a hermetically sealed structure, and allows the sheet body to be subjected to predetermined processing with high work efficiency while continuously passing the sheet body. It is possible to perform surface treatment with gas, and it becomes an epoch-making sheet processing apparatus that is extremely excellent in workability and safety.

  Further, in the invention of claim 2, the existing sheet body can be hydrophobized extremely quickly and satisfactorily, and there is no risk of leaking the processing gas containing HMDS from the apparatus main body. It is possible to provide an epoch-making sheet processing apparatus that is extremely suitable for hydrophobizing the surface of the sheet.

  In the third and fourth aspects of the invention, a structure capable of performing the surface treatment by bringing the processing gas into contact with the entire surface of the sheet body evenly and reliably can be realized with a simple configuration. In particular, in the invention of claim 4, the processing gas ejected from the ejection nozzle portion having the ejection region long in the width direction of the sheet body can be more efficiently sucked by the suction port that is also long in the width direction of the sheet body, It is possible to more reliably prevent the processing gas from leaking.

  In the inventions according to claims 5 to 7, the processing gas ejected from the ejection nozzle portion can be guided and sucked into the suction port more reliably and satisfactorily, and the leakage of the processing gas can be more reliably prevented. Particularly, in the inventions according to claims 6 and 7, since the processing gas ejected from the ejection nozzle portion is guided and sucked into the suction portion through a narrow gap between the sheet proximity surface portion and the sheet body, the narrowness is achieved. The processing gas can be reliably brought into contact with the sheet body while passing the processing gas through the gap, so that the surface treatment can be reliably achieved. Furthermore, the processing gas ejected from the ejection nozzle portion can be prevented from being scattered in a wide range in the processing chamber by the sheet proximity surface portion, and the processing gas can be efficiently guided and sucked into the suction port. Therefore, depending on the design, even if the separation distance between the ejection nozzle portion and the suction port is set to be somewhat long, the suction action of the suction port can be sufficiently exerted. The sheet proximity surface portion between the portion and the suction port can be set in a long range, and the sheet body and the processing gas can be brought into better contact with each other.

  Moreover, in invention of Claims 8-10, the gas atmosphere in the said process chamber leaked into the carrying-in side auxiliary chamber and the carrying-out side auxiliary chamber from the processing chamber via the loading / unloading port, the loading-side auxiliary chamber, It becomes the structure which can exhibit the said outstanding effect of this invention reliably, such as being able to prevent reliably that it exhausts by the exhaust part of a carrying-out side auxiliary chamber, and leaks to the external periphery of an apparatus main body.

  Embodiments of the present invention that are considered suitable (how to carry out the invention) will be briefly described with reference to the drawings, illustrating the operation of the present invention.

  A case where the sheet body 3 is subjected to a hydrophobic treatment by bringing the sheet body 3 into contact with a processing gas containing HMDS gas will be described as an example.

  The sheet body 3 is hydrophobized in the apparatus main body A while the sheet body 3 is continuously conveyed and passed through the apparatus main body A by a predetermined conveying apparatus 1.

  Specifically, the apparatus main body A includes a processing chamber 2 that processes a predetermined processing gas on the sheet body 3, a loading-side auxiliary chamber 6 that covers a loading port 4 and a loading port 5 of the processing chamber 2, and A carrying-out side auxiliary chamber 7 is provided, and at the time of processing, the sheet 3 is passed through the carrying-in side auxiliary chamber 6 and sequentially into the processing chamber 2 by the conveying means, and the carrying-out is carried out from the processing chamber 2. The sheet body 3 is sequentially carried out through the side auxiliary chamber 7, and the sheet body 3 is continuously conveyed and passed through the apparatus main body A.

  Further, in the processing chamber 2, the sheet body 3 has an ejection region in a width direction orthogonal to the transport direction of the sheet body 3 on at least one surface side of the sheet body 3 transported and passed through the processing chamber 2. An ejection nozzle portion 9 for ejecting a processing gas containing the HMDS is provided.

  Therefore, at the time of processing, the ejection nozzle is provided while continuously moving the sheet body 3 in the transport direction relative to the ejection nozzle portion 9 having an ejection area in the width direction of the sheet body 3 and ejecting the processing gas. The surface of the sheet body 3 is subjected to a hydrophobizing process successively one after another by the processing gas ejected from the portion 9.

  At this time, the inside of the processing chamber 2 becomes a gas atmosphere containing various processing gases such as HMDS having high flammability and ammonia generated by the reaction between the HMDS and the sheet body 3. If the gas atmosphere leaks to the outside of the apparatus main body A, various problems such as HMDS ignition, malodor due to ammonia, and corrosion occur.

  However, in the present invention, the suction port 10 is provided in the vicinity of the ejection nozzle portion 9 at the time of processing, and at the time of processing, the processing gas is ejected from the ejection nozzle portion 9 and at the same time the suction provided at the position near the ejection nozzle portion 9. By inhaling the processing gas from the port 10, the processing gas ejected from the ejection nozzle portion 9 is efficiently sucked from the suction port 10 immediately after coming into contact with the sheet body 3, and efficiently from the inside of the processing chamber 2. It is possible to exhaust.

  Further, in this apparatus, the sheet body 3 that is long and continuous in the conveying direction is a processing target, and the gas atmosphere in the apparatus main body A is obstructed by the sheet body 3 so that one side and the other side of the sheet body 3 Therefore, the gas atmosphere is not easily circulated. However, in the present invention, the suction port 10 is not simply provided in the vicinity of the ejection nozzle portion 9, but at least at the ejection nozzle portion 9, not at the position facing the ejection nozzle portion 9 via the sheet body 3. In contrast, since the sheet body 3 is provided at a position near the front side or the rear side in the conveyance direction, the processing gas from the ejection nozzle portion 9 is efficiently sucked from the suction port 10 without being obstructed by the sheet body 3. It will be possible to exhaust.

  Further, if the suction chamber 10 cannot be completely inhaled, the gas atmosphere in the processing chamber 2 is transferred from the processing chamber 2 to the loading side auxiliary chamber 6 or the unloading side auxiliary chamber 7 via the loading port 4 or the unloading port 5. Can be exhausted from the exhaust section 8 provided in the carry-in side auxiliary chamber 6 and the carry-out side auxiliary chamber 7 respectively, and the gas atmosphere in the processing chamber 2 containing the processing gas from the apparatus main body A is Leakage to the outside of the main body A can be reliably prevented by two-stage intake / exhaust of the intake port 10 and the exhaust part 8.

  Therefore, when processing is performed while the sheet body 3 is continuously conveyed and passed through the processing chamber 2 so far, the inside of the processing chamber 2 cannot be sealed, so that the gas atmosphere in the processing chamber 2 is moved to the outside of the apparatus. Therefore, it is not easy from the viewpoint of safety to adopt a processing gas that causes danger when it leaks in large quantities. However, in the present invention, the sheet body 3 is disposed in the processing chamber 2. It is possible to prevent the gas atmosphere in the processing chamber 2 from leaking from the apparatus main body A to the outside while continuously transporting and processing.

  Therefore, according to the present apparatus, the processing gas ejected to the sheet body 3 in the processing chamber 2 can be safely and satisfactorily used even if the processing gas is dangerous if it leaks in large quantities such as processing gas containing HMDS. For example, the surface treatment of the sheet member 3 can be performed with various process gases according to the purpose, such as a process gas containing HMDS.

  From the viewpoint of preventing leakage of the gas atmosphere in the processing chamber 2 containing the processing gas, this apparatus can suck the processing gas ejected from the ejection nozzle portion 9 from the suction port 10 more efficiently. Further, it is desirable that the suction port 10 be provided at both the front side and the rear side in the conveying direction of the sheet body 3 with respect to the jet nozzle unit 9, and the processing gas jetted from the jet nozzle unit 9 is the It is desirable to provide the suction port 10 as close as possible to the ejection nozzle portion 9 so that the suction suction can be efficiently conducted to the suction port 10.

  On the other hand, in order to reliably achieve the surface treatment of the sheet body 3, the processing gas ejected from the ejection nozzle portion 9 is not immediately sucked into the suction port 10, but the processing gas is surely applied to the surface of the sheet body 3. It is desirable to have a structure that can be guided and sucked into the suction port 10 after being brought into contact with.

  Therefore, in an embodiment described later, the sheet is disposed between the ejection nozzle portion 9 and the suction port 10 provided at a position near the ejection nozzle portion 9 on the front side or the rear side in the conveyance direction of the sheet body 3. A sheet proximity surface portion 11 is provided that is close to the body 3 and the installed state. At the time of processing, the processing gas ejected from the ejection nozzle portion 9 is absorbed into the sheet proximity surface portion 11 and the sheet body 3 by the suction input of the suction port 10. It is configured to be guided and sucked into the suction port 10 through a gap with the surface.

  With this configuration, the processing gas ejected from the ejection nozzle unit 9 is not scattered unnecessarily over a wide area in the processing chamber 2, while passing through a narrow gap between the sheet proximity surface unit 11 and the sheet body 3. The sheet body 3 can be reliably brought into contact.

  Furthermore, if the processing gas ejected from the ejection nozzle portion 9 is scattered over a wide area in the processing chamber 2, it is difficult to guide and suck them into the suction port 11, but as described above, the processing gas is Scattering into the processing chamber 2 is prevented by the sheet proximity surface portion 11, and the structure allows the induction suction to be efficiently performed to the suction port 10 while passing the processing gas through the gap between the sheet proximity surface portion 11 and the sheet body 3. In this case, depending on the design, even if the distance between the ejection nozzle portion 9 and the suction port 10 is somewhat increased, the processing gas ejected from the ejection nozzle portion 9 can be satisfactorily guided and sucked into the suction port 10.

  That is, by providing the sheet proximity surface portion 11, the separation distance between the ejection nozzle portion 9 and the suction port 10 that exhibits a sufficient suction action can be set longer, and the sheet proximity surface portion 11 can be set to a longer range. It is also possible to easily design and implement a structure that allows the processing gas to pass through the long gap between the sheet proximity surface portion 11 and the sheet body 3 so that the processing gas can contact the sheet body more reliably and satisfactorily. Yes, this point will be even more practical.

  Specific embodiments of the present invention will be described with reference to the drawings.

  In this embodiment, in the sheet processing apparatus for processing the sheet body 3 in the apparatus main body A while continuously conveying and passing the sheet body 3 into the apparatus main body A by a predetermined conveying means, the apparatus main body A Is provided with a processing chamber 2 for performing a surface treatment by bringing a processing gas into contact with the sheet body 3, and a carry-in side auxiliary chamber 6 and a carry-out side auxiliary chamber 7 covering the carry-in port 4 and the carry-out port 5 of the process chamber 2, respectively. The sheet means 3 passes through the carry-in side auxiliary chamber 6 and is sequentially carried into the processing chamber 2 by the conveying means, and is sequentially carried out from the inside of the processing chamber 2 through the carry-out side auxiliary chamber 7. The sheet body 3 can be continuously conveyed and passed through the apparatus main body A, and the sheet chamber 3 is provided in the processing chamber 2 at least on one side of the sheet body 3 that is conveyed and passed through the processing chamber 2. 3 has an ejection area in the width direction perpendicular to the transport direction. A jet nozzle portion 9 for jetting a predetermined processing gas toward the sheet body 3 is provided, and at a position near the jet nozzle portion 9, at least a position facing the jet nozzle portion 9 via the sheet body 3 Instead, a suction port 10 is provided in the vicinity of the ejection nozzle portion 9 on the front side or the rear side in the conveyance direction of the sheet body 3, and the inlet side auxiliary chamber 6 and the outlet side auxiliary chamber 7 are provided with the suction port 10. Are each provided with an exhaust portion 8, and at the time of processing, processing gas is ejected from the ejection nozzle portion 9 toward the sheet body 3, and the processing chamber 2 containing the processing gas is contained from the suction port 10. The gas atmosphere is sucked and exhausted, and is not completely sucked by the suction port 10 and leaks from the processing chamber 2 into the carry-in side auxiliary chamber 6 or the carry-out side auxiliary chamber 7 through the carry-in port 4 or the carry-out port 5. processing A gas atmosphere containing gas is exhausted from the exhaust unit 8 to prevent the gas atmosphere in the processing chamber 2 from leaking around the apparatus body A, and the sheet body 3 is continuously provided in the apparatus body A. It is the sheet processing apparatus comprised so that it could convey and pass through.

  Further, in this embodiment, a processing gas containing HMDS is adopted as the processing gas ejected from the ejection nozzle section 9, and the processing gas containing HMDS is brought into contact with the sheet body 3 in the processing chamber 2. The surface of the sheet body 3 is subjected to a hydrophobic treatment.

  Further, although not shown, the conveying means winds and conveys the sheet body 3 by a plurality of conveying rollers, and the sheet body 3 is wound and conveyed from the conveying roller of the conveying means to the conveying roller. The sheet body 3 is fed into the apparatus main body A.

  Hereinafter, each configuration of the sheet processing apparatus of the present embodiment will be specifically described.

  As shown in FIG. 1, the apparatus main body A is configured such that a carry-in side auxiliary chamber 6 that covers the carry-in port 4 of the processing chamber 2 and a carry-out side auxiliary chamber 7 that covers the carry-out port 5 are left and right of the process chamber 2. It is provided in a continuous state along the conveyance direction of the body 3. The carry-in side auxiliary chamber 6 is provided with an auxiliary carry-in port 14, and the carry-out side auxiliary chamber 7 is provided with an auxiliary carry-out port 15.

  Therefore, as shown in FIG. 1, the sheet body 3 conveyed by the conveying means sequentially passes through the auxiliary carry-in port 14 of the carry-in side auxiliary chamber 6 and the carry-in port 4 of the processing chamber 2 to process chamber 2. While being sequentially carried in, it sequentially passes through the carry-out port 5 of the process chamber 5 and the auxiliary carry-out port 15 of the carry-out side auxiliary chamber 7 and is sequentially carried out of the process chamber 2 to continuously pass through the apparatus main body A. It is configured to be transported and passed through.

  Further, in the processing chamber 2, support rollers 16 that support the sheet body 3 that is transported and passed through the processing chamber 2 are provided in several locations in parallel in the transport direction.

  In addition, the carry-in side auxiliary chamber 6 and the carry-out side auxiliary chamber 7 are respectively provided on one side (upper surface side) and the other side through the sheet body 3 that passes through the carry-in side auxiliary chamber 6 and the carry-out side auxiliary chamber 7. The exhaust portions 8 are provided at positions on both sides (upper and lower sides) on the surface side (lower surface side).

  Since the carry-in side auxiliary chamber 6 and the carry-out side auxiliary chamber 7 are partitioned in the vertical direction with the sheet body 3 transporting and passing through each of the auxiliary chambers 6 and 7, for example, on either one of the upper and lower sides of the sheet body 3. When only the exhaust part 8 is provided, there is a concern that the exhaust part 8 cannot sufficiently exhibit the exhaust action on the side where the other exhaust part 8 is not provided. Since the exhaust portions 8 are provided at the positions on both the upper and lower surfaces, such a problem cannot occur.

  Also, the auxiliary inlet 14 provided in the carry-in side auxiliary chamber 6 and the carry-out side auxiliary chamber 7 are provided by exhaust from the respective exhaust portions 8 provided in the carry-in side auxiliary chamber 6 and the carry-out side auxiliary chamber 7 respectively. The exhaust suction input of the exhaust unit 8 is set so that outside air (outside ambient air outside the apparatus main body A) is sucked from the auxiliary carry-out port 15.

  That is, since the outside air is sucked from the auxiliary carry-in port 14 into the carry-in side auxiliary chamber 6 and from the auxiliary carry-out port 15 toward the carry-out side auxiliary chamber 7, a so-called air curtain is formed. The gas atmosphere in the auxiliary chamber 2 leaked from the chamber 2 into the carry-in side auxiliary chamber 6 and the carry-out side auxiliary chamber 7 passes through the auxiliary carry-in port 14 and the auxiliary carry-out port 15 from each auxiliary chamber 6. It is set as the structure which can prevent leaking to the external periphery of A reliably.

  A plurality of ejection nozzle portions 9 are provided in the processing chamber 2 of the apparatus main body A. Specifically, a plurality of nozzle units U including the ejection nozzle portion 9 and the suction port 10 as shown in FIG. 2 are arranged in the processing chamber 2 along the conveying direction of the sheet body 3 at a predetermined interval. It is arranged side by side.

  As shown in FIG. 2, each ejection nozzle portion 9 is formed in a slit nozzle shape that is long in the width direction orthogonal to the conveyance direction of the sheet body 3 that is conveyed and passed through the processing chamber 2, and at least the sheet body 3 is configured to have the ejection region having a width dimension substantially equal to the width dimension of 3.

  Therefore, the surface treatment can be performed by ejecting and contacting the processing gas uniformly in the width direction of the sheet body 3 by transporting and moving the sheet body 3 relative to the ejection nozzle portion 9.

  In addition, as shown in FIG. 2, the suction port 10 is formed in the shape of a slit nozzle that is long in the width direction perpendicular to the transport direction of the sheet body 3 that transports and passes through the processing chamber 2, and the ejection nozzle It is set as the structure which has the width direction along the ejection area | region of the part 9. FIG.

  Accordingly, since the suction port 10 is similarly set long in the width direction of the sheet body 3 with respect to the ejection nozzle section 9 having a long ejection region in the width direction of the sheet body 3, the processing gas ejected from the ejection nozzle section 9 The suction port 10 can uniformly guide and inhale in the width direction of the sheet body 3, and can inhale more efficiently.

  In addition, as for this ejection nozzle part 9 and the suction inlet 10, the width direction of the sheet | seat body 3 is provided by arranging a plurality of nozzle openings along the width direction of the said sheet | seat body 3 like another example illustrated in FIG. It is good also as a very long structure.

  Note that the suction port 10 is provided in the vicinity of the ejection nozzle portion 9. Specifically, as described above, the suction port 10 is positioned at the front side or the rear side in the conveyance direction of the sheet body 3 with respect to the ejection nozzle portion 9. .

  Accordingly, the processing gas ejected from the ejection nozzle portion 9 without being obstructed by the sheet body 3 can be sucked (exhausted) from the suction port 10.

  In the present embodiment, as shown in FIG. 1, the suction ports 10 are provided on both the front side and the rear side in the conveying direction of the sheet body 3 with respect to the ejection nozzle portion 9, but for example, FIG. As in another example illustrated in FIG. 5, the suction port 10 may be provided only on either the front side or the rear side in the transport direction. In this case, as illustrated in FIG. 5, the ejection direction of the ejection nozzle unit 9 is slightly directed (tilted) toward the front side or the rear side where the suction port 10 is provided, so that the ejection nozzle unit 9 The processing gas can be guided and sucked into the suction port 10 more efficiently. However, as shown in FIG. 1, in the case where the suction ports 10 are provided on both the front side and the rear side in the conveying direction of the sheet body 3 with respect to the ejection nozzle portion 9, the front and rear suction ports 10 further increase the level. The processing gas can be sucked from the ejection nozzle portion 9 reliably and efficiently.

  Here, it is desirable that the suction port 10 be provided in the vicinity of the ejection nozzle unit 9 so that the processing gas ejected from the ejection nozzle unit 9 can be guided and sucked into the suction port 10. That is, at least the suction force of the suction port 10 (suction action for guiding and sucking into the suction port 10) acts on the processing gas ejected from the ejection nozzle unit 9 so that the suction port 10 is brought close to the ejection nozzle unit 9. Provide.

  However, the surface treatment (hydrophobization treatment) of the sheet body 3 is not achieved if the processing gas ejected from the ejection nozzle portion 9 is immediately sucked and exhausted from the suction port 10 without contacting the sheet body 3.

  Therefore, in the present embodiment, the ejection nozzle portion 9 is provided at a position close to the sheet body 3, and the processing gas from the ejection nozzle portion 9 is configured to reliably contact the sheet body 3.

  Further, as illustrated in FIG. 1, between the ejection nozzle portion 9 and the suction port 10 provided at a position near the ejection nozzle portion 9 on the front side or the rear side in the conveyance direction of the sheet body 3. The sheet body 3 and the sheet proximity surface portion 11 close to the installed state are provided.

  Specifically, as illustrated in FIG. 1 and FIG. 2, the vicinity of the front side and the rear side of the sheet body 3 with respect to the jet nozzle unit 9 from the mouth edge of the jet nozzle unit 9. The sheet proximate surface portion 11 is formed so as to extend toward the suction port 10 provided in the air intake port 10. Therefore, the sheet proximate surface portion 11 has a width substantially equal to at least the width dimension of the sheet body 3 in the same manner as the ejection nozzle portion 9. It is formed on a surface having dimensions.

  At the time of processing, the processing gas ejected from the ejection nozzle portion 9 is guided and sucked into the suction port 10 through the gap between the sheet proximity surface portion 11 and the surface of the sheet body 3 by the suction input of the suction port 10. Therefore, the processing gas ejected from the ejection nozzle unit 9 comes into contact with the sheet body 3 for a longer time and in a long range, and the surface treatment of the sheet body 3 can be achieved more reliably and better.

  The sheet proximity surface 11, the ejection nozzle 9, and the suction port 10 are all provided in the proximity of the sheet body 3. If they come into contact with the surface of the sheet body 3, the surface is damaged. Since trouble occurs, the gap is set so that the surface of the sheet body 3 does not come into contact with the surface of the sheet body 3 in consideration of the fine movement of the surface of the sheet body 3 due to the transport movement. In the present embodiment, this gap is set to about 10 mm to 15 mm, which can sufficiently cope with the fine movement of the sheet body 3 and the gap between the sheet proximity surface portion 11 and the sheet body 3 is set to the sheet body 3 and the processing gas. The gap is set to a sufficiently small gap so that the contact with each other is good.

  Further, since the processing gas ejected from the ejection nozzle portion 9 is guided and sucked into the suction portion 10 through the narrow gap between the sheet proximity surface portion 11 and the sheet body 3 as described above, the ejection gas is ejected from the ejection nozzle portion 9. The processed gas is prevented from being scattered over a wide area in the processing chamber 2 by the sheet proximity surface portion 11 and the processing gas can be efficiently guided and sucked into the suction port 11 as much.

  Accordingly, even if the separation distance between the ejection nozzle portion 9 and the suction portion 10 is set to be slightly longer, the suction effect of the processing gas by the suction portion 10 can be sufficiently exhibited. If the distance between the ejection nozzle portion 9 and the suction portion 10 is set to be long in this way, the sheet proximity surface portion 11 can be formed in a longer range.

  The length dimension of the sheet proximity surface portion 11 (that is, the separation distance between the ejection nozzle portion 9 and the suction portion 10) is set in consideration of the feeding speed of the sheet body 3 (the suction action of the suction portion 10 is increased). Set within the allowable range that can be fully demonstrated.)

  That is, if the feeding speed of the sheet body 3 is high, the sheet body 3 passes through the ejection region of the ejection nozzle portion 9 in a short time and cannot contact the processing gas for a long time. In this embodiment, at least the length of the sheet proximity surface portion 11 is set longer than the distance that the sheet body 3 travels in one second, and at least the predetermined surface of each sheet proximity surface portion 11 and the sheet body 3 is set. Are opposed to each other for at least one second, and the sheet body 3 and the processing gas are in good contact with each other and processed (reacted) therebetween.

  In the case where the sheet proximity surface portion 11 is not provided as in another example illustrated in FIG. 4, the ejection nozzle portion 9 and the suction port 10 are closer to each other than when the sheet proximity surface portion 11 is provided. If the position is set, the processing gas can be guided and sucked into the suction port 10 satisfactorily. However, as shown in FIG. 1, when the sheet proximity surface portion 11 is provided, the distance between the ejection nozzle portion 9 and the suction port 10 can be set slightly longer, and the sheet proximity surface portion 11 and the sheet body 3 can be set. The processing gas can be passed through the narrow gap between the sheet body 3 and the processing gas can be reliably brought into contact with the sheet member 3 in a longer range.

  In the present embodiment, as described above, the processing gas can be efficiently sucked from the suction port 10 provided in the vicinity of the ejection nozzle portion 9 of the processing chamber 2, and the carry-in side auxiliary chamber 6 and the discharge side are provided from the processing chamber 2. Even if the gas atmosphere in the processing chamber 2 leaks into the auxiliary chamber 7, it can be exhausted by the exhaust unit 8 and reliably prevented from leaking to the outside of the apparatus main body A. Therefore, the HMDS concentration from the ejection nozzle unit 9 is increased accordingly. Even if a very dense processing gas is ejected, the processing operation can be carried out safely and satisfactorily without fear of HMDS leakage. Therefore, it is possible to safely and efficiently carry out the hydrophobization treatment of the sheet body 3 with a treatment gas having a high HMDS concentration.

  In the figure, reference numeral 12 denotes a heating unit 12 having a heat source 12A for heating the sheet body 3 that is conveyed and passed through the processing chamber 2. Further, the heating unit 12 includes a pressurizing unit that pressurizes the heating unit 12 in which the heat source 12A is disposed and maintains a positive pressure state from the outside of the heating unit 12, and includes the processing gas. The explosion-proof structure prevents the gas atmosphere (particularly highly flammable HMDS) in the processing chamber 2 from entering the space where the heat source 12A of the heating unit 12 is disposed.

  Further, in the figure, reference numeral 18 denotes a nozzle portion for injecting gas (air, nitrogen, etc.) toward the sheet body 3 from the vicinity of the carry-in port 4 and the carry-out port 5 in the process chamber 2 in the process chamber 2. 18 so that the gas ejected from the nozzle portion 18 and touching the surface of the sheet body 3 rebounds and the gas flows toward the exhaust portion 8 of the carry-in side auxiliary chamber 6 or the carry-out side auxiliary chamber 7. The gas ejection direction of the nozzle portion 18 is set, and the exhaust flow from each auxiliary chamber 6, 7 to each exhaust portion 8 is made more efficient by the gas flow to the exhaust portion 8. is there.

  FIG. 6 is a diagram showing another example of the sheet processing apparatus according to the present embodiment. In the present embodiment shown in FIG. 1, a plurality of sheets are disposed in the processing chamber 2 along the conveying direction of the sheet body 3. Although the nozzle units U are arranged side by side at a predetermined interval, in another example illustrated in FIG. 6, a surface adjacent to the sheet body 3 between the nozzle units U adjacent to each other in the conveyance direction of the sheet body 3. It is set as the structure arranged continuously by. That is, not only the sheet proximity surface portion 11 between the ejection nozzle portion 9 and the suction portion 10 of each nozzle unit U, but also the surface adjacent to the sheet body 3 is provided between adjacent nozzle units U, so to speak, the processing chamber 2. The entire surface of the ceiling (upper surface) of the sheet is close to the sheet body 3.

  In such a configuration, the processing gas ejected from the ejection nozzle portion 9 does not scatter in the processing chamber 2 over a wide area (because the space area of the processing chamber 2 itself is narrow), and the processing gas is more efficiently sucked into the suction port 10. It becomes a structure that can be inhaled by induction. Further, since the entire surface of the ceiling (upper surface) of the processing chamber 2 is close to the sheet body 3, the processing gas and the sheet body 3 can be contacted with each other better.

  Note that the present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate.

It is an explanatory front sectional view of the sheet processing apparatus of the present embodiment. It is explanatory perspective view which looked at the ejection nozzle part 9 and the suction inlet 10 of the sheet processing apparatus of a present Example from the lower side. It is the explanatory perspective view which looked at the other example of the ejection nozzle part 9 and the suction inlet 10 of the sheet processing apparatus of a present Example from the lower side. FIG. 6 is a schematic front sectional view of another example of the ejection nozzle portion 9 and the suction port 10 of the sheet processing apparatus of the present embodiment. FIG. 6 is a schematic front sectional view of another example of the ejection nozzle portion 9 and the suction port 10 of the sheet processing apparatus of the present embodiment. It is a general | schematic explanatory front sectional view which shows another example of the sheet processing apparatus of a present Example.

Explanation of symbols

2 processing chamber 3 sheet body 4 carrying-in port 5 carrying-out port 6 carrying-in side auxiliary chamber 7 carrying-out side auxiliary chamber 8 exhaust unit 9 ejection nozzle unit
10 Suction port
11 Seat proximity surface
14 Auxiliary entrance
15 Auxiliary exit A Main unit

Claims (10)

  In a sheet processing apparatus for processing the sheet body in the apparatus body while continuously conveying the sheet body into the apparatus body by a predetermined conveying means, the apparatus body contacts the processing gas with the sheet body. And a carry-in side auxiliary chamber and a carry-out side auxiliary chamber that respectively cover the carry-in port and the carry-out port of the treatment chamber, and the sheet is passed through the carry-in side auxiliary chamber by the carrying means. The processing chamber is configured so that the sheet body can be successively conveyed out of the processing chamber through the unloading-side auxiliary chamber and continuously conveyed and passed through the apparatus body. An ejection nozzle portion that has an ejection region in a width direction orthogonal to the conveying direction of the sheet body on at least one surface side of the sheet body that is conveyed and passed through the processing chamber, and ejects a predetermined processing gas toward the sheet body And at the position near the ejection nozzle portion, at least not near the ejection nozzle portion via the sheet body but near the front or rear side in the transport direction of the sheet body with respect to the ejection nozzle portion A suction port is provided at a position, and an exhaust part is provided in each of the carry-in side auxiliary chamber and the carry-out side auxiliary chamber, and at the time of processing, processing gas is supplied from the jet nozzle part toward the sheet body. A gas atmosphere in the processing chamber containing the processing gas is sucked and exhausted from the suction port, and is not completely sucked by the suction port, and the loading side auxiliary chamber is passed from the processing chamber through the loading port or the unloading port. Alternatively, the gas atmosphere containing the processing gas leaked into the carry-out side auxiliary chamber is exhausted from the exhaust section, and the gas atmosphere in the processing chamber leaks around the apparatus main body. Sheet processing apparatus characterized by being configured so as to being capable continuously conveyed through said sheet within the apparatus main body prevents.   A processing gas containing HMDS is adopted as the processing gas ejected from the ejection nozzle part, and the apparatus main body is subjected to a hydrophobic treatment by bringing the processing gas containing the HMDS into contact with the sheet body in the processing chamber. The sheet processing apparatus according to claim 1, wherein the sheet processing apparatus is configured.   The ejection nozzle section is formed in a slit nozzle shape that is long in the width direction orthogonal to the conveyance direction of the sheet body that is conveyed and passed through the processing chamber, or a plurality of nozzle ports are arranged in parallel along the width direction of the sheet body The sheet processing apparatus according to claim 1, wherein at least the ejection region having a width dimension substantially equal to the width dimension of the sheet body is provided.   The suction port is formed in the shape of a slit nozzle that is long in the width direction perpendicular to the transport direction of the sheet member that is transported and passed through the processing chamber, or a plurality of nozzle ports are provided in parallel along the width direction of the sheet member. The sheet processing apparatus according to claim 3, wherein the sheet processing apparatus has a width direction along an ejection region of the ejection nozzle portion.   The suction port is positioned on both the front side and the rear side in the conveyance direction of the sheet body with respect to the ejection nozzle unit, and the processing gas ejected from the ejection nozzle unit is guided and sucked into the suction port. The sheet processing apparatus according to any one of claims 1 to 4, wherein the sheet processing apparatus is provided in the immediate vicinity of the ejection nozzle portion.   A sheet proximity surface portion close to the sheet body and a juxtaposed state between the ejection nozzle portion and the suction port provided at a position near the front or rear side in the conveyance direction of the sheet body with respect to the ejection nozzle portion In the processing, the processing gas ejected from the ejection nozzle portion is guided and sucked into the suction port through the gap between the sheet proximity surface portion and the surface of the sheet body by the suction input of the suction port. The sheet processing apparatus according to claim 1, wherein the sheet processing apparatus is a sheet processing apparatus.   The sheet proximity surface portion is formed so as to extend from the mouth edge portion of the ejection nozzle portion toward the suction port provided in the vicinity of the ejection nozzle portion at the front side or the rear side in the conveyance direction of the sheet body. The sheet processing apparatus according to claim 6, wherein the sheet processing apparatus is configured.   An auxiliary carry-in port is provided in the carry-in side auxiliary chamber that covers the carry-in port of the processing chamber, an auxiliary carry-out port is provided in the carry-out side auxiliary chamber that covers the carry-out port, and the sheet body is moved into the carry-in auxiliary carry-in port and the carry-in by the carrying means. While sequentially passing through the mouth and sequentially carrying it into the processing chamber, it is possible to sequentially carry out the carry-out port and the auxiliary carry-out port from the processing chamber and sequentially carry out the sheet body into the apparatus body. The sheet processing apparatus according to claim 1, wherein the sheet processing apparatus is configured as described above.   Outside air is sucked in from the auxiliary carry-in port provided in the carry-in side auxiliary chamber and the auxiliary carry-out port provided in the carry-out side auxiliary chamber by the exhaust from each exhaust part provided in the carry-in side auxiliary chamber and the carry-out side auxiliary chamber, respectively. The exhaust suction force of the exhaust unit is set so that the gas atmosphere in the processing chamber does not leak from the auxiliary carry-in port and the auxiliary carry-out port to the outside of the apparatus main body. The sheet processing apparatus according to claim 8, wherein: is set.   The exhaust-side auxiliary chamber and the unload-side auxiliary chamber respectively have the exhaust section at both the one-side surface side and the other-surface side position via the sheet body that passes through the carry-in side auxiliary chamber and the unload-side auxiliary chamber. The sheet processing apparatus according to any one of claims 1 to 9, wherein the sheet processing apparatus is provided with a configuration.

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