JP2009093589A - Data linkage system and data linkage method for semiconductor manufacturing system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To surely and easily attain data linkage between EES AND MES in which device data is bound to context data. <P>SOLUTION: A host communication system 4 comprises a processing means for MES event data 4A, which transfers, when an event occurs in a semiconductor manufacturing device 2, only event data requiring event report to a manufacturing host computer (MES) 1 to the MES; and a definition means and a processing means for ESS event data 4B, which transfers only event data requiring event report to a device engineering computer (EES) 3 to a device EES communication system 5. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a data linkage method and a data linkage method between a semiconductor manufacturing apparatus, an EES (device engineering computer), and a MES (production management host computer) in a semiconductor manufacturing system.

  FIG. 3 shows a configuration diagram of the semiconductor manufacturing system. The MES 1 performs production control monitoring control such as start and stop of production for the semiconductor manufacturing apparatus 2, and acquires information such as events (state changes) and alarm reports from the semiconductor manufacturing apparatus 2 in this monitoring control. The EES 3 collects device detailed data that is more detailed than the data collected by the MES 1, such as the operating state of the equipment of the semiconductor manufacturing device 2, and performs early abnormality detection by monitoring the state of the semiconductor manufacturing device 2 from the device detailed data. In the control of the semiconductor manufacturing apparatus 2, the MES 1 acquires data collected by the semiconductor manufacturing apparatus 2 through host communication.

  Details of information communication between the semiconductor manufacturing apparatus 2 and the MES 1 and EES 3 will be described.

  The MES 1 assigns a unique ID to a product (a cassette in which a wafer is stored, a combination of wafers stored in a cassette, a production recipe, etc.) for the apparatus 2, and indicates which product is a production instruction to the apparatus 2. Instruct. The device 2 reports an event to the MES 1 using the ID given from the MES 1 to determine the current state of the product. When these IDs are not given from the MES 1, the operator sets IDs for the apparatus 2. These IDs are generally called context data.

  In EES3, device detailed data such as various sensor data in device 2 is collected, and in MES1, the production yield is determined by matching the result of the product yield and the detailed data from EES3 when the target product is manufactured. Perform analysis.

  At present, the event to be reported from the device 2 to the MES1 is also reported to the EES3 at the same time, and the EES3 uses the context data included in the event of the MES1, and the device data (various data measured by the semiconductor manufacturing apparatus) Linking (data linkage) is performed.

As this type of data linkage method, work reference data and work result data of the device are prepared, work information consisting of maintenance work results or quality control data is written in the work result data, and the work information and work reference data are compared. There is something that makes it possible (see, for example, Patent Document 1).
Japanese Patent Laid-Open No. 7-50235

  In most cases, the semiconductor manufacturing apparatus 2 mounts the host communication system with the MES 1 and then mounts the apparatus EES communication system with the EES 3 as a retrofit, and reports to the MES 1 with the host communication system. It is common to monitor events and report them as EES data. This data linkage method has the following problems.

  (1) When the communication between the EES 3 and the device 2 is performed off-line, the context data is not notified to the EES 3, so that the device data cannot be associated with the context data.

  (2) Since the timing at which the device 2 reports the device data to the EES 3 and the timing at which the context data is reported are not synchronized, an error may occur in the association between the device data and the context data.

  (3) Since the host communication system between the device 2 and the MES 1 and the device EES communication system between the device 2 and the EES 3 are independent software, the existing host communication system should be used in the EES 3 installed later. Not considered. In this case, it is difficult to create association information between device data and context data.

  (4) Since the device data required by EES3 and the device data required by MES1 do not necessarily match, insufficient data may be generated when analyzing the device data.

  An object of the present invention is to provide a data cooperation method and a data cooperation method of a semiconductor manufacturing system that reliably and easily performs data cooperation in which device data and context data are linked between EES and MES.

  In order to solve the above problems, the present invention requires a host communication system for EES with an apparatus EES communication system in addition to a functional configuration for performing event data communication between an MES and a semiconductor manufacturing apparatus. A data linkage function for performing event data communication is provided, and is characterized by the following method and method.

(1) A semiconductor manufacturing apparatus, a production management host computer that controls production control of the semiconductor manufacturing apparatus, an apparatus engineering computer that collects detailed apparatus data of the semiconductor manufacturing apparatus, the semiconductor manufacturing apparatus, and the semiconductor manufacturing apparatus In a semiconductor manufacturing system comprising a host communication system that performs data communication with a production management host computer, and an apparatus EES communication system that performs data communication between the semiconductor manufacturing apparatus and the apparatus engineering computer,
The host communication system processes MES event data for transmitting only event data that needs to be reported to the production management host computer to the production management host computer when an event occurs in the semiconductor manufacturing apparatus. Means,
EES event data definition means and processing means for transmitting only event data that needs to be reported to the equipment engineering computer when an event occurs in the semiconductor manufacturing equipment, to the equipment EES communication system;
A data link system for semiconductor manufacturing systems, characterized by comprising:

(2) a semiconductor manufacturing apparatus, a production management host computer that controls production control of the semiconductor manufacturing apparatus, an apparatus engineering computer that collects detailed apparatus data of the semiconductor manufacturing apparatus, the semiconductor manufacturing apparatus, and the semiconductor manufacturing apparatus In a semiconductor manufacturing system comprising a host communication system that performs data communication with a production management host computer, and an apparatus EES communication system that performs data communication between the semiconductor manufacturing apparatus and the apparatus engineering computer,
The host communication system processes MES event data for transmitting only event data that needs to be reported to the production management host computer to the production management host computer when an event occurs in the semiconductor manufacturing apparatus. Procedure and
When an event occurs in the semiconductor manufacturing apparatus, an EES event data definition procedure and a processing procedure for transmitting only event data that needs to be reported to the apparatus engineering computer to the apparatus EES communication system,
A data link method for a semiconductor manufacturing system, comprising:

  As described above, according to the present invention, in the host communication system, in addition to the functional configuration for performing event data communication between the MES and the semiconductor manufacturing apparatus, event data required for EES with the apparatus EES communication system is included. Since the data linkage function for performing communication is provided, data linkage in which device data and context data are linked between the EES and the MES is surely and easily performed.

In particular,
(1) Context data required by EES can be acquired regardless of whether MES is required.

  (2) Context data required by EES can be acquired even when communication with MES is offline.

  (3) Since the timing of context data acquisition is performed without delay compared to capturing an event report to the MES, the correlation between device data and context data becomes more accurate.

  FIG. 1 is a configuration diagram of a semiconductor manufacturing system showing an embodiment of the present invention, and shows a data link portion between MES and EES.

  The host communication system 4 is provided with a data linkage function for communicating event data required for the EES 3 with the apparatus EES communication system 5 in addition to a function configuration for performing event data communication between the MES 1 and the semiconductor manufacturing apparatus 2. .

  In order to realize this data linkage function, the host communication system 4 adds EES event data 4B for reporting an event to the device EES communication system 5 in addition to the processing function of the MES event data 4A for reporting an event to the MES 1. The definition function and processing function are provided. The device EES communication system 5 has a processing function for directly receiving EES event data from the host communication system 4 and transmitting it to the EES 3. Data definition / management by the event data 4A and 4B is performed based on context data (ID) that the MES 1 uniquely assigns to the product for the apparatus 2.

  FIG. 2 shows an event data processing flow of the host communication system 4. When an event (state change) occurs in the operating state of the semiconductor manufacturing system (S1), it is determined whether or not it is necessary to report this event to the MES1 (S2). The data is saved as data based on the context data (ID), and the event is reported to MES1 (S3). Next, it is determined whether or not a report to the EES3 is necessary for the generated event (S4). When the report is necessary, the event is stored as EES event data based on the context data (ID) and the event to the EES3 A report is made (S5). This report can be stored in the device EES communication system 5 and transmitted as a part of device detailed data from the device EES system 5 to the EES 3 as necessary.

  Therefore, in addition to the definition / processing function of the MES event data 4A, the host communication system 4 is provided with an EES event data definition / processing function, and when an event occurs, it is reported as MES event data, and EES Event data that needs to be reported to can be reported to EES3.

  Note that the event data required by MES1 and the event data required by EES3 are not all the same data items, but the data required by MES1 and EES3 are allocated.

  According to the present embodiment, data linkage in which device data and context data are linked is surely and easily performed in the following system operation modes between the EES and the MES.

  (1) Even when communication between EES3 and device 2 is performed offline, device data based on the context data is reported to EES3, so that device data and context data are linked in EES3. be able to.

  (2) Since the timing at which the device 2 reports the device data to the EES 3 and the timing at which the context data is reported are synchronized, no error occurs in the association between the device data and the context data.

  (3) Even if the host communication system between the device 2 and the MES 1 and the device EES communication system between the device 2 and the EES 3 are independent software, it is not necessary to create the association information between the device data and the context data.

  (4) Since the device data required by the EES 3 and the device data required by the MES 1 are individually defined / managed, data acquisition necessary for analyzing the device data is ensured.

The data cooperation part between MES and EES which shows embodiment of this invention. Event data processing flow of the host communication system. Configuration diagram of semiconductor manufacturing system

Explanation of symbols

1 MES (Host computer for production management)
2 Semiconductor manufacturing equipment 3 EES (Computer for equipment engineering)
4 Host communication system 4A Event data for MES 4B Event data for EES 5 Device EES communication system

Claims (2)

A semiconductor manufacturing apparatus; a production management host computer for monitoring and controlling production management of the semiconductor manufacturing apparatus; an apparatus engineering computer for collecting apparatus detailed data of the semiconductor manufacturing apparatus; the semiconductor manufacturing apparatus and the production management In a semiconductor manufacturing system comprising a host communication system that performs data communication with a host computer, and an apparatus EES communication system that performs data communication between the semiconductor manufacturing apparatus and the apparatus engineering computer,
The host communication system processes MES event data for transmitting only event data that needs to be reported to the production management host computer to the production management host computer when an event occurs in the semiconductor manufacturing apparatus. Means,
EES event data definition means and processing means for transmitting only event data that needs to be reported to the equipment engineering computer when an event occurs in the semiconductor manufacturing equipment, to the equipment EES communication system;
A data link system for semiconductor manufacturing systems, characterized by comprising: A semiconductor manufacturing apparatus; a production management host computer for monitoring and controlling production management of the semiconductor manufacturing apparatus; an apparatus engineering computer for collecting apparatus detailed data of the semiconductor manufacturing apparatus; the semiconductor manufacturing apparatus and the production management In a semiconductor manufacturing system comprising a host communication system that performs data communication with a host computer, and an apparatus EES communication system that performs data communication between the semiconductor manufacturing apparatus and the apparatus engineering computer,
The host communication system processes MES event data for transmitting only event data that needs to be reported to the production management host computer to the production management host computer when an event occurs in the semiconductor manufacturing apparatus. Procedure and
When an event occurs in the semiconductor manufacturing apparatus, an EES event data definition procedure and a processing procedure for transmitting only event data that needs to be reported to the apparatus engineering computer to the apparatus EES communication system,
A data link method for a semiconductor manufacturing system, comprising:

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