JP2009058287A - Reflection measuring device and reflection measuring method - Google Patents

Abstract

A reflection measuring apparatus and a reflection measuring method capable of measuring a sample regardless of the installation location and dimensions of the sample are provided.
An optical system including an apparatus main body 20 including a light source 1 and a detector 2 and having a light emitting part 11 for emitting measurement light L1 and a light receiving part 12 for receiving reflected light L2. A unit 10 is provided, the light source 1 and the light emitting part 11 are connected via a measuring light optical fiber cable C1, and the light receiving part 12 and the detector 2 are connected via a reflected light optical fiber cable C2. The system unit 10 is provided so as to be movable relative to the apparatus main body 20.
[Selection] Figure 1

Description

  The present invention relates to a reflection measuring device and a reflection measuring method.

Conventionally, Fourier transform infrared spectroscopy (FT-IR) is known as a method for measuring and evaluating a metal surface (see, for example, Patent Document 1). FT-IR is one of the techniques for measuring a film, organic matter, etc. formed on a metal surface in a non-destructive, non-contact and normal atmosphere.
FT-IR has methods such as transmission method, diffuse reflection method, total reflection measurement method (ATR method), etc., for measuring thin films deposited on the surface of materials that do not transmit infrared light, such as metal plates. The reflection method is used. Among the reflection methods, a highly sensitive reflection measurement method (RAS method: Reflection) in which infrared light is incident at an angle close to the horizontal with respect to the metal surface (a deep incident angle of about 70 ° to 85 ° with respect to the surface normal of the sample). Absorption Spectrometry) is particularly excellent in terms of measurement accuracy.
In the RAS method, it is generally necessary to place a sample on a measurement stage (optical system unit). As shown in Patent Document 1, the optical system unit is usually accommodated in the sample chamber.
JP 2005-249664 A

  However, the conventional reflection measuring apparatus has a problem in that since the optical system unit is accommodated in the sample chamber, a material that can be measured is limited to a size that can be accommodated in the sample chamber. For this reason, for example, when measuring a sample that cannot be moved from the site, such as an inner wall of a plant apparatus, or a sample that cannot be accommodated in the sample chamber, the sample must be cut to an appropriate size and accommodated in the sample chamber. there were.

  Therefore, the present invention provides a reflection measuring apparatus and a reflection measuring method capable of measuring a sample regardless of the installation location and dimensions of the sample.

In order to solve the above-described problems, a reflection measuring apparatus according to the present invention irradiates measurement light emitted from a light source onto a surface to be measured and detects the reflected light with a detector. And an optical system unit formed with a light emitting part for emitting the measurement light and a light receiving part for receiving the reflected light, the light source and the light An emission part is connected via a measurement light optical fiber cable, the light receiving part and the detector are connected via a reflected light optical fiber cable, and the optical system unit is relative to the apparatus main body. It is characterized by being provided so as to be movable.
With this configuration, the optical system unit is connected to the apparatus main body via a flexible optical fiber cable. Therefore, when measuring the surface to be measured, the optical system unit is moved relative to the apparatus main body with the apparatus main body arranged at a predetermined position, and the measurement is performed within the length of the optical fiber cable. It can be freely installed at the measurement position on the measurement surface. Then, the measurement light emitted from the light source of the apparatus main body can be transmitted to the light emission part of the optical system unit via the optical fiber cable for measurement light, and emitted from the light emission part to the surface to be measured. Further, the reflected light reflected by the surface to be measured can be received by the light receiving unit of the optical system unit and transmitted to the detector of the apparatus main body via the optical fiber cable.
Therefore, according to the reflection measurement apparatus of the present invention, even when the sample is larger than the optical system unit or the apparatus main body or when the sample cannot be moved, the optical system unit is moved to the surface to be measured. By installing, the sample can be measured regardless of the installation location and dimensions of the sample.

In the reflection measuring apparatus of the present invention, the optical system unit is formed with a close contact surface that is in close contact with the surface to be measured.
With such a configuration, the close contact surface of the optical system unit can be brought into close contact with the surface to be measured during measurement, the optical system unit can be stabilized with respect to the surface to be measured, and the measurement accuracy of the surface to be measured can be improved.

The reflection measuring apparatus of the present invention is characterized in that an adhesive material having adhesiveness is disposed on the contact surface.
By comprising in this way, the contact | adherence surface of an optical system unit can be stuck and fixed to a measurement surface, an optical system unit can be stabilized with respect to a to-be-measured surface, and the measurement precision of a to-be-measured surface can be improved. .

In the reflection measuring apparatus of the present invention, the contact surface is formed by an elastic member having elasticity.
With this configuration, the contact surface of the optical system unit is pressed against the surface to be measured, so that the contact surface is elastically deformed according to the shape of the surface to be measured, and the contact surface is in close contact with the surface to be measured. be able to. Thereby, even if the shape of the surface to be measured is not a smooth surface, the optical system unit can be stabilized with respect to the surface to be measured, and the measurement accuracy of the surface to be measured can be improved.

In the reflection measuring apparatus of the present invention, the optical system unit includes a magnetic member that generates magnetism.
With this configuration, when the measured surface is a surface of a magnetic material or a thin film formed on the magnetic material, the optical system unit is measured by the magnetic force acting between the magnetic member and the magnetic material. Can be fixed to the surface. Thereby, an optical system unit can be stabilized with respect to a to-be-measured surface, and the measurement precision of a to-be-measured surface can be improved.

In the reflection measuring apparatus of the present invention, the optical system unit includes a housing that houses the light emitting unit and the light receiving unit, and the housing is sealed except for an opening that exposes the surface to be measured. It has a structure.
By comprising in this way, the measurement site | part of a to-be-measured surface can be isolated from an external environment with the housing | casing of an optical system unit, and the disturbance at the time of a measurement can be suppressed. Thereby, the measurement accuracy of the surface to be measured can be improved.

In the reflection measuring apparatus of the present invention, the optical system unit includes a gas supply unit that supplies a purge gas to the inside of the housing and a discharge unit that discharges the fluid inside the housing. It is characterized by.
By configuring in this way, even when the environment around the surface to be measured is not suitable for measurement, the optical system unit is brought into close contact with the surface to be measured, and the inside of the housing of the optical system unit is purged. It is possible to measure the surface to be measured with the inside of the housing as an environment suitable for measurement.

In the reflection measuring apparatus of the present invention, the light emitting section is formed so as to emit the measuring light in a range of 70 degrees to 85 degrees with respect to a normal line of the surface to be measured. And
By comprising in this way, a to-be-measured surface can be measured by RAS method and a measurement precision can be improved.

In the reflection measuring apparatus of the present invention, the optical system unit includes an angle adjusting unit that adjusts an angle of the optical system unit with respect to the measurement target surface when the optical system unit is in close contact with the measurement target surface. .
By comprising in this way, the incident angle of the measurement light with respect to a measurement surface can be adjusted to an optimal angle, and a measurement precision can be improved.

Moreover, the reflection measuring apparatus of the present invention is characterized in that the light receiving section includes a condensing member that condenses the reflected light.
By comprising in this way, the condensing efficiency of reflected light can be improved and measurement accuracy can be improved.

The reflection measurement method of the present invention is an optical system to which an optical fiber cable is connected in a reflection measurement method in which measurement light emitted from a light source is irradiated onto a surface to be measured and the reflected light is detected by a detector. An optical system unit installation step for moving the unit to a measurement position on the surface to be measured and fixing the unit to the surface to be measured, and emitting the measurement light from the light emitting portion of the optical system unit to the surface to be measured A light emitting / receiving step of receiving the reflected light by the light receiving unit of the optical system unit, and in the light emitting / receiving step, the optical fiber cable from the light source to the light emitting unit. The reflected light is led out from the light receiving unit to the detector through the optical fiber.
By measuring in this way, the optical system unit is moved relative to the apparatus main body with the apparatus main body arranged at a predetermined position, and the measurement surface is measured within the range of the length of the optical fiber cable. Can be installed at any position. Then, the measurement light emitted from the light source of the apparatus main body can be transmitted to the light emission part of the optical system unit via the optical fiber cable for measurement light, and emitted from the light emission part to the surface to be measured. Further, the reflected light reflected by the surface to be measured can be received by the light receiving unit of the optical system unit and transmitted to the detector of the apparatus main body via the optical fiber cable.
Therefore, according to the reflection measurement method of the present invention, even when the sample is larger than the apparatus main body or when the sample cannot be moved, the optical system unit is moved and placed on the surface to be measured. The sample can be measured regardless of the installation location and dimensions of the sample.

Further, the reflection measurement method of the present invention supplies a purge gas to the inside of the housing of the optical system unit between the optical system unit installation step and the light emission / light reception step, and the inside of the housing. And an optical system unit purging step for discharging the fluid.
By measuring in this way, even if the environment around the surface to be measured is not suitable for measurement, the optical system unit is closely attached to the surface to be measured, and the inside of the housing of the optical system unit is purged. It is possible to measure the surface to be measured with the inside of the housing as an environment suitable for measurement.

In the reflection measurement method of the present invention, the relative angle between the optical system unit and the surface to be measured is adjusted between the optical system unit installation step and the light emission / light reception step, and both are parallel. And an optical system unit angle adjusting step.
By measuring in this way, the incident angle of the measurement light with respect to the measurement surface can be adjusted to an optimum angle, and the measurement accuracy can be improved.

<First embodiment>
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. In the following drawings, the scale is appropriately changed for each member so that each member has a size that can be recognized on the drawing.
FIG. 1 is a schematic configuration diagram of a reflection measuring apparatus 100 in the present embodiment. The reflection measuring apparatus 100 is an apparatus that irradiates the surface S to be measured with the measurement light L1 emitted from the light source unit 1 and detects and analyzes the reflected light L2 by the detector 2.

  As shown in FIG. 1, the reflection measuring apparatus 100 includes an optical system unit 10 that is used in close contact with the surface S to be measured. The optical system unit 10 includes a light emitting unit 11 that emits measurement light L1 to the measurement surface S and a light receiving unit 12 that receives the reflected light L2 reflected by the measurement surface S. The light emitting unit 11 and the light receiving unit 12 are housed and fixed inside the housing 13 of the optical system unit 10.

  The housing 13 is made of, for example, a metal material or a resin material. An elastic member 14 is fixed to a wall portion 13c of the housing 13 that faces the measured surface S, and is formed so as to be in close contact with the measured surface S at the close contact surface 14a of the elastic member 14. On the contact surface 14a side of the optical system unit 10, an opening 15 that exposes the surface S to be measured is formed. The fixing portions of the light emitting unit 11 and the light receiving unit 12 are sealed with a sealing material or the like, and the housing 13 has a sealed structure except for the opening 15.

The elastic member 14 is formed of, for example, an elastic resin material such as urethane rubber, and an adhesive material such as an adhesive is applied to the contact surface 14a. Moreover, you may use magnetic materials, such as magnetic rubber which mixed the magnetic material in the above-mentioned resin material as the elastic member 14. FIG.
The light emitting portion 11 is adjusted to emit the measuring light L1 at an angle θ in the range of 70 degrees to 85 degrees with respect to the normal line NL of the contact surface 14a, and is applied to the wall portion 13a on one side of the housing 13. It is fixed. The light receiving unit 12 is fixed to the wall 13 b on the other side of the housing 13. The light receiving unit 12 is fixed at a position where the measurement light L <b> 1 emitted by the light emitting unit 11 is reflected by the same plane as the contact surface 14 a assumed in the opening 15.

In addition, the reflection measuring apparatus 100 includes an apparatus main body 20 that houses the light source unit 1, the detector 2, and the like.
The light source unit 1 includes a light source, an interferometer, a polarizing plate, and the like, and is configured to emit measurement light L1 (p-polarized light) in the infrared region. The detector 2 includes a signal processing unit that analyzes the reflected light L2.
The light source unit 1 is connected to the light emitting unit 11 of the optical system unit 10 via the optical fiber cable C1 for the measuring light L1 connected to the apparatus main body 20, and the measuring light L1 emitted from the light source unit 1 is emitted. It is configured to be transmitted to the unit 11.

The detector 2 is connected to the light receiving unit 12 of the optical system unit 10 via the reflected light optical fiber cable C2 connected to the apparatus main body 20, and the reflected light L2 received by the light receiving unit 12 is used for the reflected light L2. It is comprised so that it may transmit to the detector 2 via the optical fiber cable C2.
Each of the optical fiber cables C1 and C2 has a length necessary for measuring a measurement location on the measurement surface S from the position of the apparatus main body 20. Thereby, the optical system unit 10 can be freely moved independently from the apparatus main body 20 within the range of the length of the optical fiber cables C1 and C2.

Next, the operation of this embodiment will be described.
As shown in FIG. 1, the optical system unit 10 is connected to the apparatus main body 20 via flexible optical fiber cables C1 and C2. Therefore, for example, the apparatus main body 20 can be disposed in the vicinity of the inner wall W of a plant apparatus or the like, and the optical system unit 10 can be moved to the measurement location on the measurement surface S independently of the apparatus main body 20. Therefore, the optical system unit 10 can be freely installed at the measurement location on the measurement surface S within the range of the length of the optical fiber cables C1 and C2.

At the time of measuring the surface to be measured S, the contact surface 14a of the optical system unit 10 can be brought into close contact with the surface to be measured S, and the optical system unit 10 can be stabilized with respect to the surface to be measured S. In addition, since the contact surface 14a is in close contact with the measurement surface S, the normal line NL _S of the measurement surface S and the normal line NL of the contact surface 14a substantially coincide. Accordingly, emitted measurement light L1 at the light exit portion 11 the angle of the normal line NL _S range below 85 degrees 70 degrees with respect to the measurement surface S theta of the optical system unit 10, the measurement surface S RAS It can be measured by the method. Therefore, a highly accurate measurement result by the RAS method can be obtained.

  Further, since the contact surface 14a is formed on the surface of the elastic member 14 having elasticity, the contact surface 14a is pressed against the surface to be measured S by pressing the contact surface 14a of the optical system unit 10 against the surface to be measured. Elastically deforms according to the shape of S. Thereby, even if the surface of the surface to be measured S is not a smooth surface, the shape of the surface to be measured S can be absorbed to some extent by the elastic member 14, and the contact surface 14a can be brought into close contact with the surface to be measured S. Thereby, the optical system unit 10 can be fixed to the surface S to be measured and stabilized.

Further, since an adhesive material such as an adhesive is applied to the close contact surface 14a, the close contact surface 14a is stuck to the measured surface S and fixed, and the optical system unit 10 is stable with respect to the measured surface S. Can be made. When the surface S to be measured is the surface of a magnetic material such as metal or the surface of a thin film formed on the magnetic material, the elastic member 14 can be made elastic by using the magnetic material such as magnetic rubber described above. The optical system unit 10 can be fixed to the measured surface S by the magnetic force acting between the member 14 and the measured surface S. Thereby, the optical system unit 10 can be fixed to the surface S to be measured and stabilized without using an adhesive or the like.
Thus, the measurement accuracy of the measurement surface S can be improved by setting the optical system unit 10 in a stable state with respect to the measurement surface S.

Moreover, since the housing | casing 13 has a sealing structure except the opening part 15, by isolating the measurement location of the to-be-measured surface S from an external environment by the housing | casing 13, and intercepting external light, dust, etc., Disturbances during measurement can be suppressed. Thereby, the measurement precision of the to-be-measured surface S can be improved.
Further, the measurement light L1 emitted from the light source unit 1 of the apparatus main body 20 is transmitted to the light emission unit 11 of the optical system unit 10 through the optical fiber cable C1, and the measurement surface S is transmitted from the light emission unit 11 to the measurement surface S. Can be injected. Further, the reflected light L2 reflected by the measurement surface S can be received by the light receiving unit 12 of the optical system unit 10 and transmitted to the detector 2 of the apparatus main body 20 via the optical fiber cable C2.

  Therefore, according to the reflection measuring apparatus 100 of this embodiment, even when the sample is larger than the optical system unit 10 or the apparatus main body 20 or when the sample cannot be moved, the optical system unit 10 is moved. By installing on the measurement surface S, the sample can be measured regardless of the installation location and dimensions of the sample.

(Reflection measurement method)
Next, a reflection measurement method using the reflection measurement apparatus 100 of the present embodiment will be described.
As shown in FIG. 1, for example, when measuring the surface of the inner wall W of a plant apparatus formed of a magnetic material such as metal as the measured surface S, first, the apparatus main body 20 can be installed in the vicinity of the inner wall W. Place it in a proper position. Next, the optical system unit 10 to which the optical fiber cables C1 and C2 are connected is moved to the measurement location on the measurement surface S, and the contact surface 14a of the optical system unit 10 is brought into close contact with the measurement surface S and fixed.

Next, measurement light L <b> 1 (p-polarized light) in the infrared region is emitted by the light source unit 1 of the apparatus body 20. The measurement light L1 emitted by the light source unit 1 is transmitted to the light emission unit 11 of the optical system unit 10 fixed to the measurement surface S through the optical fiber cable C1 connected to the light source unit 1. Measuring light L1 which has reached the light exit portion 11 is emitted at an angle θ in the range below 85 degrees 70 degrees with respect to the normal NL _S of the measurement surface S, it is incident on the measurement surface S. The measurement light L1 incident on the measurement surface S is reflected by the measurement surface S, and the reflected light L2 enters the light receiving unit 12.

The reflected light L2 received by the light receiving unit 12 is transmitted to the detector 2 of the apparatus main body 20 through the optical fiber cable C2 connected to the light receiving unit 12. The reflected light L2 transmitted to the detector 2 is processed by the detector 2, and an analysis result of the reflected light L2 is obtained.
Therefore, according to the reflection measurement method of this embodiment, even when the inner wall W is larger than the apparatus main body 20 or when the inner wall W cannot be moved, the optical system unit 10 is moved to measure the surface to be measured. By installing in S, the surface of the inner wall W can be measured regardless of the installation location and dimensions of the inner wall W.

<Second embodiment>
Next, a second embodiment of the present invention will be described with reference to FIG. This embodiment is different from the reflection measuring apparatus 100 described in the first embodiment described above in that a gas supply unit and a discharge unit are formed in the optical system unit 10. Since the other points are the same as in the first embodiment, the same parts are denoted by the same reference numerals and description thereof is omitted.

As shown in FIG. 2, the optical system unit 10 </ b> B of the present embodiment includes a gas supply unit 16 that supplies the purge gas PG into the housing 13 and a discharge unit 17 that discharges the fluid FL inside the housing 13. Is formed.
The gas supply unit 16 includes an opening 16a formed in the housing 13, a pipe 16b connected to the opening 16a, a flow rate adjusting valve (not shown), and the like. The pipe 16b is formed of a flexible resin material or the like, and is connected to a gas supply device (not shown) that supplies the purge gas PG.
The discharge unit 17 is also configured by an opening 17a formed in the housing 13, a pipe 17b connected to the opening 17a, a flow rate adjusting valve (not shown), and the like. The pipe 17b is formed of a flexible resin material or the like similarly to the pipe 16b, and is connected to a fluid discharge device (not shown) such as a pump or a compressor.

(Reflection measurement method)
Next, a reflection measurement method using the optical system unit 10B of the present embodiment will be described.
As shown in FIG. 2, when the surface to be measured S is, for example, the inner wall W of the water tank and the surface to be measured S is underwater, first, the apparatus main body 20 is disposed outside the water tank. Next, the apparatus main body 20 is not moved, the optical system unit 10B is submerged in water, and the optical system unit 10B is fixed to the measurement surface S.

Next, the purge gas PG is supplied to the gas supply unit 16 of the housing 13 by the gas supply device, and the fluid FL such as water and the purge gas PG inside the housing 13 is discharged from the discharge unit 17 of the housing 13 by the fluid discharge device. . At this time, the supply amount of the purge gas PG and the discharge amount of the fluid FL are adjusted by a valve, a gas supply device, a fluid discharge device or the like, and the pressure inside the housing 13 is made lower than the pressure outside the housing 13.
Thus, the housing 13 can be fixed to the surface to be measured S by adhering the housing 13 to the surface to be measured S by the opening 15 and the contact surface 14 a in close contact with the surface to be measured S.

Further, by continuing the supply of the purge gas PG and the discharge of the fluid FL inside the housing 13, the water inside the housing 13 is eventually discharged, and the measured surface S is dried as the purge gas PG circulates inside the housing 13. To do. In this state, by measuring the surface S to be measured in the same manner as the reflection measuring apparatus 100 of the first embodiment described above, the same effects as in the first embodiment can be obtained.
In addition, according to the optical system unit 10B of the present embodiment, the optical system unit 10B is in close contact with the measurement surface S even when the environment around the measurement surface S is not suitable for measurement, for example, in water. Then, by purging the inside of the housing 13 of the optical system unit 10B, the measured surface S can be measured in an environment suitable for measurement.

<Third embodiment>
Next, a third embodiment of the present invention will be described with reference to FIGS. 3 to 6 with reference to FIGS. This embodiment is different in that angle adjusting means is formed in the optical system units 10 and 10B described in the first and second embodiments. Since the other points are the same as those of the first and second embodiments, the same portions are denoted by the same reference numerals and the description thereof is omitted.

FIG. 3 is a plan view of the optical system unit 10 </ b> C according to the present embodiment as viewed from the side of the wall 13 d facing the wall 13 c where the opening 15 of the housing 13 is formed. 4 is a cross-sectional view taken along line AA in FIG.
The optical system unit 10 </ b> C includes a motor M and a shaft SH as angle adjustment means for adjusting the angle of the housing 13 of the optical system unit 10 </ b> C with respect to the measurement surface S when closely contacting the measurement surface S.

  The motor M is fixed to the four corners of the wall portion 13d facing the wall portion 13c in which the opening 15 of the housing 13 is formed. The shaft SH is supported by the rotation of the motor M so as to be movable in the axial direction (vertical direction in FIG. 4). As shown in FIG. 4, the shaft SH penetrates the housing 13 and is inserted into the hollow elastic member 14C fixed to the wall portion 13c on the opening 15 side of the housing 13, and the tip portion is It is in contact with the inner surface of the hollow elastic member 14C. The portion where the shaft SH penetrates the housing 13 is sealed with a sealing material or the like.

  With this configuration, the contact surface 14a of the optical system unit 10C is in close contact with the surface S to be measured, and after fixing the optical system unit 10C to the surface S to be measured, the motors M at the four corners of the housing 13 are individually set. By rotating and moving each shaft SH in the axial direction, the angle of the housing 13 with respect to the measured surface S can be adjusted. Therefore, the walls 13c and 13d of the housing 13 of the optical system unit 10D are made parallel to the surface S to be measured, and the incident angle of the measuring light L1 with respect to the surface S to be measured is the optimum angle θ (see FIGS. 1 and 2). ) To improve measurement accuracy.

FIG. 5 is a plan view of another optical system unit 10D of the present embodiment as viewed from the wall 13c side where the opening 15 of the housing 13 is formed, and FIG. 6 is taken along the line BB of FIG. It is sectional drawing which follows.
In the optical system unit 10D, a hollow elastic member 14D is fixed around the opening 15 of the wall 13c where the opening 15 is formed. As shown in FIG. 5, the elastic member 14 </ b> D is divided into four sections 14 </ b> D (a) to 14 </ b> D (d) along the four sides of the rectangular housing 13, and the sections 14 </ b> D (a) to 14 </ b> D (d) are divided. ) Is connected to an air supply / exhaust passage (not shown) for supplying air into the hollow elastic member 14D.

  With this configuration, after the contact surface 14a of the optical system unit 10D is brought into close contact with the measurement surface S and the optical system unit 10D is fixed to the measurement surface S, each section 14D (a) to 14D (a) of the elastic member 14D is fixed. By supplying and discharging air to and from 14D (d), the height h of the elastic member 14D in each of the sections 14D (a) to 14D (d) is adjusted as shown in FIG. The angle with respect to the surface S can be adjusted. Accordingly, the walls 13c and 13d of the housing 13 of the optical system unit 10D are made parallel to the surface S to be measured, and the incident angle of the measuring light L1 with respect to the surface S to be measured is adjusted to the optimum angle θ, thereby improving the measurement accuracy. Can be improved.

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention. For example, the light receiving unit of the optical unit described in the above embodiment may be provided with a condensing member such as a lens for condensing reflected light. By comprising in this way, the condensing efficiency of reflected light can be improved and measurement accuracy can be improved.

  Further, as shown in FIG. 7, a reflecting member R such as a mirror may be provided inside the optical system unit 10E, and the light emitting part 11 and the light receiving part 12 may be provided on the same wall part 13a side of the optical system unit 10E. . Alternatively, the light emitting unit 11 and the light receiving unit 12 may be integrated, and the optical fiber cable C1 for the measurement light L1 and the optical fiber cable C2 for the reflected light L2 may be shared by a single optical fiber cable C1.

  Moreover, as a magnetic member with which an optical system unit is equipped, the permanent magnet and the electromagnet fixed to the housing | casing other than the magnetic rubber demonstrated in the above-mentioned embodiment may be used. When an electromagnet is used, the magnetic force can be controlled by the current, so that it becomes easy to peel the optical system unit from the surface to be measured.

It is a schematic block diagram of the reflection measuring apparatus which concerns on 1st embodiment of this invention. It is sectional drawing which shows schematic structure of the optical system unit which concerns on 2nd embodiment of this invention. It is a top view which shows schematic structure of the optical system unit which concerns on 3rd embodiment of this invention. FIG. 4 is a cross-sectional view taken along line A-A ′ of FIG. 3. It is a top view which shows schematic structure of the other optical system unit which concerns on 3rd embodiment of this invention. It is sectional drawing which follows the B-B 'line of FIG. It is sectional drawing which shows schematic structure of the modification of the optical system unit which concerns on embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Light source part (light source), 2 Detector 10, 10B, 10C, 10D, 10E Optical system unit, 11 Light emission part, 12 Light-receiving part (condensing member), 13 Housing | casing, 14, 14C, 14D Elastic member ( Magnetic member), 14D (a), 14D (b), 14D (c), 14D (d) Partition (angle adjusting means), 14a Contact surface, 15 Opening portion, 16 Gas supply portion, 17 Discharge portion, 20 Device body , 100 Reflection measuring device, C1 optical fiber cable (optical fiber cable for measuring light), C2 optical fiber cable (optical fiber cable for reflected light), FL fluid, L1 measuring light, L2 reflected light, M motor (angle adjusting means) , NL _S normal, PG purge gas, S surface to be measured, SH shaft (angle adjustment means)

Claims (13)

In the reflection measurement device that irradiates the surface to be measured with the measurement light emitted from the light source and detects the reflected light by the detector,
An apparatus main body including the light source and the detector;
An optical system unit formed with a light emitting part for emitting the measurement light and a light receiving part for receiving the reflected light;
The light source and the light emitting part are connected via an optical fiber cable for measurement light,
The light receiving unit and the detector are connected via an optical fiber cable for reflected light,
The reflection measuring apparatus, wherein the optical system unit is provided so as to be movable relative to the apparatus main body.   The reflection measuring apparatus according to claim 1, wherein the optical system unit is formed with a contact surface that is in close contact with the surface to be measured.   The reflection measuring apparatus according to claim 2, wherein an adhesive material having adhesiveness is disposed on the adhesion surface.   The reflection measurement apparatus according to claim 2, wherein the contact surface is formed of an elastic member having elasticity.   The reflection measuring apparatus according to any one of claims 1 to 4, wherein the optical system unit includes a magnetic member that generates magnetism. The optical system unit includes a housing that houses the light emitting unit and the light receiving unit,
6. The reflection measuring apparatus according to claim 1, wherein the casing has a sealed structure except for an opening that exposes the surface to be measured.   7. The reflection according to claim 6, wherein the optical system unit includes a gas supply unit that supplies a purge gas into the housing and a discharge unit that discharges the fluid inside the housing. measuring device.   8. The light emitting portion according to claim 1, wherein the light emitting portion is formed so as to emit the measurement light in a range of 70 degrees to 85 degrees with respect to a normal line of the surface to be measured. The reflection measuring device according to any one of the above.   9. The reflection measuring apparatus according to claim 8, wherein the optical system unit includes an angle adjusting unit that adjusts an angle of the optical system unit with respect to the surface to be measured when closely contacting the surface to be measured.   The reflection measurement apparatus according to claim 1, wherein the light receiving unit includes a light collecting member that collects the reflected light. In a reflection measurement method in which measurement light emitted from a light source is irradiated onto a surface to be measured and the reflected light is detected by a detector.
An optical system unit installation step of moving an optical system unit connected to an optical fiber cable to a measurement position of the surface to be measured and fixing the unit to be closely attached to the surface to be measured;
A light emission / light reception step of emitting the measurement light from the light emission part of the optical system unit to the surface to be measured and receiving the reflected light by the light reception part of the optical system unit,
In the light emission / light reception step, the measurement light is introduced from the light source to the light emission part via the optical fiber cable, and the reflected light is led from the light reception part to the detector via the optical fiber. A reflection measurement method characterized by the above. Between the optical system unit installation step and the light emission / light reception step,
The reflection measurement method according to claim 11, further comprising an optical system unit purge step of supplying a purge gas into the housing of the optical system unit and discharging a fluid inside the housing. Between the optical system unit installation step and the light emission / light reception step,
The reflection measurement method according to claim 11, further comprising an optical system unit angle adjustment step of adjusting a relative angle between the optical system unit and the surface to be measured so that both are parallel to each other.

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