JP2009052890A - Apparatus and method for optical measurement, and reliability evaluation system with the apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce variations errors in luminance and chromaticity when samples are measured. <P>SOLUTION: An optical measuring apparatus for measuring the luminance and chromaticity of a light source emitted from a sample has a light source output part for making an optical fiber output a sample light source emitted by the application of a current for measurement to the sample; a filter part for acquiring a prescribed number of sample lights to luminance and chromaticity from the sample light source acquired from the light source output part through the use of a color matching function filter; and an imaging part for imaging the sample light acquired from the filter part to acquire images. The filter part divides input sample light into the prescribed number and passes divided light sources each through different filters. The imaging part simultaneously acquires a plurality of images of sample emissions by the imaging. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an optical measurement apparatus, an optical measurement method, and a reliability evaluation system including the apparatus, and in particular, an optical measurement apparatus, an optical measurement method, and the like for reducing variation errors in luminance and chromaticity in sample evaluation, And a reliability evaluation system including the apparatus.

  Conventionally, for example, organic electroluminescence (organic EL) is a phenomenon in which light is emitted by excitons generated by recombination of electrons and holes injected into an organic material. In particular, with respect to luminous efficiency, image quality, thinning, and power consumption, for example, display screen panels are expected to be used.

  In the manufacturing process of such a display screen panel using organic EL, the light emitting layer host in the organic layer, the light emission luminance including the color after mixing the guest material, the material judgment and the film thickness adjustment in each layer of the organic layer, etc. An evaluation process in the development of organic EL is required, and in such an evaluation process, an evaluation device that evaluates the change in driving voltage accompanying the light emission luminance and chromaticity in the organic EL element or the like or the change with time is used for mass production. Accompanying organic EL panels and the like are evaluated.

  In such an evaluation apparatus, for example, an organic EL panel is arranged on a stage, a constant current is applied to the organic EL panel, and measurement units attached to the organic EL panels (measurement means for detecting at least light emission luminance and chromaticity) are provided. Thus, the light emission luminance and chromaticity of the organic EL element are measured, and the characteristics of the organic EL element produced as a sample are measured. There is an evaluation apparatus for this purpose (see, for example, Patent Document 1).

  Further, a reliability evaluation apparatus such as an organic EL is a method for measuring light emission of a sample using a filter based on a color matching function (tristimulus value) when measuring the luminance and chromaticity of the sample (sample). (For the color matching function, see, for example, Non-Patent Document 1).

  Color matching function filters include organic EL, LCD (Liquid Crystal Display), PDP (Plasma Display Panel), FED (Field Emission Display), LED (Light Emitting Diode), and other light emitting characteristics such as lamps, light characteristics, etc. Are used for color measurement, luminance, chromaticity in-plane unevenness, and contrast evaluation.

  Here, the color matching function filter uses three filters for the color matching functions X, Y, and Z (X filter, Y filter, Z filter), and R, G, B Obtain numerical values for each color and perform evaluation. As shown in Non-Patent Document 1, since the X filter has two vertices, it can be divided into an X1 filter and an X2 filter depending on the wavelength. Therefore, in practice, an X (X1, X2) filter, a Y filter, and a Z filter that satisfy the CIE color matching function are used.

  By using a color matching function filter, it can be formed with any multi-layer film with different thicknesses of each layer, so subtle waveform corrections such as sensitivity correction of light receiving elements can be performed freely, and thin film design etc. are possible It becomes.

  When the color matching function filter described above is used, a preset filter is installed in the optical measurement device, and light emitted from the sample is allowed to pass through the filter to obtain a sample emission image. Here, FIG. 1 is a diagram illustrating a conventional example of obtaining an evaluation target image.

  The rotary filter unit 11 shown in FIG. 1A is provided with filters 12-1 to 12-4 for X1, X2, Y, and Z, respectively. Here, any one of the filters 12-1 to 12-4 is positioned at a position where the sample light passes, for example, by rotating the rotary filter unit 11, and the sample light is allowed to pass through. Then, the sample emission image photographed from the imaging unit is displayed on the image display monitor 13.

  Further, the above-described processing is sequentially performed on the remaining three filters, and sample emission images of the respective samples are acquired. That is, conventionally, the filters 12-1 to 12-4 are rotated by the rotary stage 11, and measurement is performed for each filter.

Further, the chromaticity x, y and the luminance L can be obtained as “chromaticity x = X / X + Y + Z”, “chromaticity y = Y / X + Y + Z”, and “luminance L = Y”, respectively. Thereby, it is possible to visually evaluate the luminance and chromaticity.
JP 2004-103484 A Tetsuo Sueda, “How to use optical components for optronics and points to be noted (supplement revised edition)”, published by Optronics Co., Ltd., revised edition 10th edition, October 10, 1997, p. 205 Figure-2.118 (Color matching function of CIE 1931 XYZ color system)

  By the way, in the evaluation apparatus described above, for example, when organic EL elements (samples) formed by the same conditions and the same material are arranged in a wide area or exist in a plurality of places, It is necessary to measure a measurement point (light emitting unit) for each point. In an evaluation apparatus using such a measurement method, a constant current is supplied to all measurement points, an organic EL element is placed on the stage, and each measurement point determined in advance by moving the stage or the like is set for each point. It was to measure sequentially.

  However, the organic EL element that tends to decrease the drive voltage and the emission luminance at high temperatures, for example, the time at which a constant current is applied differs between the first measurement point and the last measurement point. A temperature difference is caused by applying a current to the organic EL element at the point. Therefore, the measurement cannot be performed under the same conditions, and there is a problem that the measurement data in the evaluation process is not reliable.

  In addition, since the color matching function filters as described above require a total of four of X1, X2, Y, and Z, it takes time because measurements are performed one by one while rotating the filter. In unstable samples (specimens), variations and errors occurred in the measurement results.

  The present invention has been made in view of the above-described problems, and includes an optical measurement device, an optical measurement method, and a reliability evaluation system including the device for reducing variation errors in luminance and chromaticity in sample evaluation. The purpose is to provide.

  In order to achieve the above-mentioned object, the present invention provides a sample light source that emits light by applying a measurement current to the sample in an optical measuring device for measuring the luminance and chromaticity of the light source emitted from the sample. A light source output unit for outputting a sample light source from the optical fiber, a filter unit for obtaining a predetermined number of sample lights with respect to luminance and chromaticity using a color matching function filter as a sample light source obtained from the light source output unit, and the filter unit An imaging unit that captures the sample light obtained from the image and obtains an image, and the filter unit divides the input sample light into a predetermined number and passes different filters for each of the divided light sources. The image pickup unit picks up a plurality of sample light emission images at the same time. Thereby, the measurement time of brightness | luminance and chromaticity can be shortened. Therefore, it is possible to reduce variation errors in luminance and chromaticity when measuring a sample.

  Further, the filter unit includes a quadrangular pyramid prism, and the prism is provided with a different filter as the color matching function filter on a surface having a predetermined inclination with respect to the optical axis of the input sample light. preferable. Thereby, a plurality of different sample lights can be simultaneously acquired with an easy configuration. Therefore, it is possible to shorten the measurement time of luminance / chromaticity. In addition, there is no temperature difference with the passage of time, and variations in luminance and chromaticity can be reduced.

  Furthermore, it is preferable that the filter unit has a quadrangular pyramid prism, and the prism is provided with different filters as the color matching function filters on the bottom surface perpendicular to the optical axis of the input sample light. Thereby, a plurality of different sample lights can be simultaneously acquired with an easy configuration. Therefore, it is possible to shorten the measurement time of luminance / chromaticity. In addition, there is no temperature difference with the passage of time, and variations in luminance and chromaticity can be reduced.

  The present invention also relates to an optical measurement method for measuring the luminance and chromaticity of a light source emitted from a sample, and a light source output step of outputting a sample light source emitted by applying a measurement current to the sample from an optical fiber. A sample light source obtained from the light source output step, a filter step for obtaining a predetermined number of sample lights for luminance and chromaticity using a color matching function filter, and imaging the sample light obtained from the filter step An imaging step of acquiring an image, wherein the filtering step divides the input sample light into a predetermined number, and passes each of the divided light sources through different filters. A sample emission image is simultaneously captured. Thereby, the measurement time of brightness | luminance and chromaticity can be shortened. Therefore, it is possible to reduce variation errors in luminance and chromaticity when measuring a sample.

  Further, the filter step includes a quadrangular pyramid prism, and the prism is provided with a different filter as the color matching function filter on a surface having a predetermined inclination with respect to the optical axis of the input sample light. preferable. Thereby, a plurality of different sample lights can be simultaneously acquired with an easy configuration. Therefore, it is possible to shorten the measurement time of luminance / chromaticity. In addition, there is no temperature difference with the passage of time, and variations in luminance and chromaticity can be reduced.

  Furthermore, it is preferable that the filter step has a quadrangular pyramid prism, and the prism is provided with different filters as the color matching function filters on the bottom surface perpendicular to the optical axis of the input sample light. Thereby, a plurality of different sample lights can be simultaneously acquired with an easy configuration. Therefore, it is possible to shorten the measurement time of luminance / chromaticity. In addition, there is no temperature difference with the passage of time, and variations in luminance and chromaticity can be reduced.

  According to another aspect of the present invention, there is provided the optical measurement apparatus according to any one of the first to third aspects, and a sample light source is obtained from at least one sample in a reliability evaluation system for evaluating the reliability of the sample. A sample information acquisition unit; a power supply unit that supplies current to the sample; an evaluation control device for acquiring a reliability evaluation result from the sample emission image obtained by the optical measurement device; and a monitor that displays at least the evaluation result It is characterized by having. Thereby, the measurement time of the brightness | luminance and chromaticity of the sample which is evaluation object can be shortened. Therefore, it is possible to reduce a variation error in luminance and chromaticity at the time of measurement of the sample to be evaluated.

  According to the present invention, the measurement time of luminance and chromaticity can be shortened. Therefore, it is possible to reduce variation errors in luminance and chromaticity when measuring a sample.

<Outline of the present invention>
In the present invention, for example, in order to measure the luminance and chromaticity in the evaluation of a sample (sample) such as an organic EL element, the sample light source that emits light by supplying current to the sample is divided into a predetermined number and divided. The sample light is passed through color matching function filters each including an X1 filter, an X2 filter, a Y filter, and a Z filter, and sample emission images from the four filters are simultaneously acquired. Thereby, the measurement time of luminance / chromaticity can be shortened, and the variation error of luminance / chromaticity at the time of measuring the sample can be reduced. Therefore, for example, the luminance deterioration rate with respect to the luminance, chromaticity, voltage, current, or time of the sample can be measured with high accuracy.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments in which an optical measurement apparatus, an optical measurement method, and a reliability evaluation system including the apparatus according to the present invention having the above-described features are suitably implemented will be described in detail with reference to the drawings.

<Optical measuring device>
FIG. 2 is a diagram illustrating an example of an optical measurement apparatus according to the present invention. 2 is configured to include a light source output unit 21, a filter unit 22, a filter driving unit 23, an XYZ correction filter unit 24, an imaging unit 25, and a control unit 26. .

  The light source output unit 21 outputs sample light 30 for evaluating luminance and chromaticity. The light source output unit 21 can use, for example, a fiber bundle in which optical fibers are bundled. The filter unit 22 includes at least one filter 31 (for example, four in FIG. 2) such as an ND (Neutral Density) filter. Each of the filters 31-1 to 31-4 is a filter having an effect of reducing and adjusting a different amount of light, and dimmed so that a desired amount of sample light is input to the XYZ correction filter unit 24. Make adjustments. Moreover, the filter drive part 23 drives the filter unit 22, and positions it so that a sample light can pass through a predetermined filter among the filters 31-1 to 31-4 by rotation.

  In addition, the XYZ correction filter unit 24 divides the sample light 30 that has passed through the filter 31 provided in the filter unit 22 into a predetermined number (in this embodiment, four divisions), and at the same time, each sample light has the color matching function described above. Each filter is passed through one of different filters (X1 filter, X2 filter, Y filter, Z filter). Here, as the XYZ correction filter unit 24, for example, when dividing into four, a quadrangular pyramid prism can be used. FIG. 3 is a diagram illustrating a configuration example of the XYZ correction filter unit.

  In FIG. 3, a quadrangular pyramid prism is used as an example of the XYZ correction filter unit 24. The quadrangular pyramid prism divides the input sample light 30 into four parts. Further, the quadrangular pyramid prism is mounted once with color matching function filters 32-1 to 32-4 at predetermined positions so that the divided sample light passes through any one of the X1 filter, X2 filter, Y filter, and Z filter. A plurality of sample emission images are acquired.

  In addition, as a method of attaching the color matching function filters 32-1 to 32-4, for example, as shown in FIG. 3A, for example, a surface having a predetermined inclination with respect to the optical axis of the sample light (FIG. 3). Different filters as color matching function filters may be attached to the triangular surface in (a), and the color matching function filter on the bottom surface (rectangular surface in FIG. 3B) perpendicular to the optical axis. Alternatively, different filters may be attached at appropriate positions through which the divided lights pass.

  The color matching function filters 32-1 to 32-4 to be attached have a slightly larger shape in accordance with the shape of light when passing through a predetermined surface of the quadrangular pyramid prism.

  Further, the sample light 30 that has passed through the predetermined filter 31 provided in the filter unit 22 is irradiated so that the center (optical axis) of the light comes to the apex of the quadrangular pyramid prism, so that the sample light becomes four or the like. The sample light which can be divided | segmented and can pass through each color matching function filter 32-1-32-4 can be acquired.

  2 receives the four sample lights that have passed through the XYZ correction filter unit 24, and each filter sample emission image (X1 filter sample emission image, X2 filter sample emission image, Y filter sample emission image, Z filter sample emission image) is acquired. The imaging unit 25 includes a CCD (Charge Coupled Devices) camera or the like.

  The imaging unit 25 also includes an external image processing device that performs predetermined image processing such as format conversion and image analysis on the acquired image, a storage device that stores images, a monitor that displays measurement results of images, and the like. Or may be stored in a storage unit provided inside the imaging unit 25.

  Further, the control unit 26 in FIG. 2 controls the entire configuration of the optical measuring device 20. Specifically, the control unit 26 moves a predetermined filter 31 provided in the filter unit 22 to an appropriate position so that the sample light 30 passes by the filter driving unit 23, or the XYZ correction filter by the imaging unit 25. Processing such as acquiring four types of sample light that has passed through the unit 24 is performed. Further, the control unit 26 measures the chromaticity x, y and the luminance L from the measurement result. Specifically, as described above, “chromaticity x = X / X + Y + Z”, “chromaticity y = Y / X + Y + Z”, and “luminance L = Y” can be obtained. Thereby, it is possible to visually evaluate the luminance and chromaticity.

  Here, FIG. 4 is a diagram illustrating an example of obtaining the evaluation target image in the present embodiment. The XYZ correction filter unit 24 shown in FIG. 4A is provided with filters X3-1 to X32, X2, X2, Y, and Z. Here, the filters 32-1 to 32-4 are positioned at positions where the sample light passes, the sample light is allowed to pass, and the passed sample light is photographed by the imaging unit 25 such as a camera, and further photographed from the imaging unit 25. The sample emission image thus displayed is displayed on an image display monitor 33 as shown in FIG.

  Therefore, all the filters 32-1 to 32-4 are passed through the sample light source, and the sample emission image of the sample (sample) (X1 filter sample emission image, X2 filter sample emission image, Y filter sample emission image, Z filter) Sample emission image) is acquired. Therefore, all filters can be measured simultaneously.

  The layout of the sample emission image displayed on the monitor 33 and the number of sample emission images are not limited to this, and it is sufficient that at least two sample emission images are displayed.

  Thereby, each filter can be measured at the same time, and variations and errors due to the passage of time, temperature difference, environment and the like can be reduced. Moreover, the measurement time can be shortened by about 1/4.

  The above-described optical measurement device 20 can be applied to, for example, a reliability evaluation system.

<Reliability evaluation system with optical measuring device 20>
Next, a reliability evaluation system including the optical measuring device 20 will be described with reference to the drawings. FIG. 5 is a diagram illustrating a configuration example of the reliability evaluation system in the present embodiment. The reliability evaluation system 40 shown in FIG. 5 includes, for example, a panel in which organic EL elements are installed at predetermined positions, a drive circuit, and the like. The luminance and chromaticity at the time of light emission are measured using each organic EL element as a sample. Although an evaluation system will be described, an application example of an organic EL reliability evaluation system in the present invention is not limited to this.

  The reliability evaluation system 40 illustrated in FIG. 5 includes a monitor 41, an evaluation control device 42, a distributor 43, at least one sample information acquisition unit 44-1 to 44-n, a power supply unit 45, and the above-described configuration. The optical measuring device 20 is configured. The evaluation control device 42 is configured to include an image processing unit 51, a system control unit 52, a communication interface unit 53, and a storage unit 54. In the optical measuring device 20, since the above-described configuration of each part is used as it is, detailed description thereof is omitted here.

  The monitor 41 displays an evaluation result obtained from the evaluation control device 42 and an image actually acquired from the imaging unit 25. Further, the monitor 41 can display a start / end message at the time of evaluation processing in the reliability evaluation system 40 from the evaluation control device 42, a message when an error occurs, an optical measurement result, and the like. Further, the monitor 41 may have a voice output function such as a speaker, and the user can be notified of the start and end of the evaluation process, the occurrence of an error, and the like by voice.

  Further, the evaluation control device 42 controls the entire components in the reliability evaluation system 40. Specifically, the image processing unit 51 in the evaluation control device 42 generates an image to be displayed on the monitor 41 from the filter sample emission image obtained from the imaging unit 25 and outputs the image to the monitor 41. At this time, the image processing unit 51 may store the processed image in the storage unit 54, or may average the results measured for a plurality of times and output the result to the monitor 41 or the like. Further, based on the control information from the system control unit 52, the image processing unit 51 performs a process for displaying on the monitor 41 a message for starting and ending the evaluation process and a message when an error occurs. Output.

  Further, the system control unit 52 generates and outputs optical measurement control information in the optical measurement device 20 to the control unit 26, and performs predetermined image processing such as format conversion and image analysis on the image acquired from the imaging unit 25. At least whether to perform an evaluation of an organic EL display panel and a drive circuit that perform display by an organic EL element in which sample information acquisition unit among the plurality of sample information acquisition units 44-1 to 44-n. One is selected, and control such as power distribution in the power supply unit 45 by the selection is output to the distributor 43 by the communication network unit 53.

  In addition, the communication network unit 53 connects to other functional components to enable transmission and reception of data and control signals. The communication network unit 53 includes, for example, a USB (Universal Serial Bus) or a DVI (Digital Visual Interface). The storage unit 53 stores optical measurement results, images taken by the imaging unit 25, and the like.

  The distributor 43 causes only one or a plurality of sample information acquisition units selected from among a plurality of sample information acquisition units 44-1 to 44-n to perform processing based on control information from the evaluation control device 42. Control information is output.

  The sample information acquisition units 44-1 to 44-n, for example, apply an electric current to an organic EL element or the like to be evaluated to emit light, and the sample light emission is disposed at a corresponding position of the organic EL element to be evaluated. The light is received by 55 and output to the optical measuring device 20. Further, the power supply unit 45 supplies a predetermined current to at least one of the sample information acquisition units 44-1 to 44-n.

  In addition, when light is emitted by applying a constant voltage to the organic thin film of the organic EL element, the light emission luminance greatly varies depending on temperature change, change with time, etc. For example, when light is emitted by passing a constant current, light emission The variation in brightness is small. Therefore, for example, a constant current circuit is provided in the drive circuit of the organic EL display panel in the present embodiment, and a constant current is supplied to each organic EL element.

  With the configuration of the reliability evaluation system 40 described above, it is possible to shorten the measurement time of the luminance and chromaticity of the sample to be evaluated. Therefore, it is possible to reduce a variation error in luminance and chromaticity at the time of measurement of the sample to be evaluated.

<Example of measurement results>
Next, a comparative example of measurement results by simulation between the conventional method and the method of the present invention will be described with reference to the drawings. FIG. 6 is a diagram for explaining an example of measurement results of the conventional technique and the technique of the present invention.

  First, in the measurement time comparison shown in FIG. 6A, by applying this embodiment to the conventional measurement time of 12 seconds, the measurement time is 3 seconds and a time reduction of 1/4 is realized. . That is, in the measurement of the conventional method, since one measurement of the four kinds of color matching function filters is 3 seconds, the measurement time of 12 seconds is four. However, by applying the method of the present invention, it is possible to measure four types of color matching function filters at the same time, so the measurement time for one (point) measurement is shortened by 9 seconds.

  In the conventional measurement accuracy verification (simulation measurement) shown in FIG. 6B, a light source whose light amount decreases by 5% while moving from one color matching function filter to the next color matching function filter is used. Assuming measurement, the correct measurement value (theoretical value) of measurement chromaticity x is 0.2738, the measurement value when moving four filters is 0.2912, and the correct measurement value of measurement chromaticity y is In contrast to 0.2308, the measured value when moving four filters is 0.2333. Therefore, as shown in FIG. 6C, the measured chromaticity difference (absolute value display) from the correct measured value is the measured chromaticity difference of chromaticity x of 0.0174 and the measured chromaticity of chromaticity y. The difference is 0.0025.

  Here, the specification of the organic EL reliability evaluation apparatus does not satisfy the condition because the accuracy is within 0.005 or less. That is, at the time of measuring a light source in which the amount of light changes, the conventional method of measuring by rotating the color matching function filter may take a long measurement time, and the accuracy may not meet the specification.

  Therefore, according to the technique of the present invention, for example, by using a quadrangular pyramid prism to simultaneously measure four filters at a time, the measurement time can be shortened and the measurement chromaticity can be improved.

  As described above, according to the present invention, the measurement time of luminance and chromaticity can be shortened. Therefore, it is possible to reduce a variation error in luminance and chromaticity at the time of measuring the sample. For example, it is possible to measure the luminance deterioration rate with respect to the luminance and chromaticity, voltage, current, or time of the sample with high accuracy. The optical measuring apparatus according to the present invention includes, for example, color development characteristics of LCDs, PDPs, FEDs, and LEDs in addition to organic EL, light emission characteristics of lamps, and other aspects for colorimetry of optical devices, brightness, and chromaticity. It can be applied as a measuring device for internal unevenness and contrast evaluation.

  The preferred embodiments of the present invention have been described in detail above, but the present invention is not limited to such specific embodiments, and various modifications can be made within the scope of the gist of the present invention described in the claims. Can be changed.

It is a figure which shows the example of acquisition of the evaluation target image in the past. It is a figure which shows an example of the optical measuring apparatus in this invention. It is a figure which shows the example of 1 structure of an XYZ correction | amendment filter part. It is a figure which shows the example of acquisition of the evaluation object image in this embodiment. It is a figure which shows the example of 1 structure of the reliability evaluation system in this embodiment. It is a figure for demonstrating an example of the measurement result of a conventional method and this invention method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Rotation filter unit 12, 31 Filter 13, 33, 41 Monitor 20 Optical measuring device 21 Light source output part 22 Filter unit 23 Filter drive part 24 XYZ correction filter part 25 Imaging part 26 Control part 32 Color matching function filter 40 Reliability evaluation system 42 Evaluation Control Device 43 Distributor 44 Sample Information Acquisition Unit 45 Power Supply Unit 51 Image Processing Unit 52 System Control Unit 53 Communication Interface Unit 54 Storage Unit 55 Optical Fiber

Claims (7)

In an optical measurement device for measuring the luminance and chromaticity of a light source emitted from a sample,
A light source output unit for outputting a sample light source emitted by applying a measurement current to the sample from an optical fiber;
A sample light source obtained from the light source output unit, a filter unit for acquiring a predetermined number of sample lights for luminance and chromaticity using a color matching function filter;
An imaging unit that captures the sample light obtained from the filter unit and acquires an image;
The filter unit divides the input sample light into a predetermined number, passes each of the divided light sources through different filters, and the imaging unit captures a plurality of sample light emission images at the same time. Optical measuring device. The filter unit is
2. A quadrangular pyramid prism, wherein the prism is provided with a different filter as the color matching function filter on a surface having a predetermined inclination with respect to the optical axis of the input sample light. The optical measuring device described. The filter unit is
2. The optical according to claim 1, further comprising a quadrangular pyramid prism, wherein the prism is provided with a different filter as the color matching function filter on a bottom surface perpendicular to the optical axis of the input sample light. measuring device. In an optical measurement method for measuring the luminance and chromaticity of a light source emitted from a sample,
A light source output step for outputting a sample light source emitted by applying a current for measurement to the sample from an optical fiber;
A sample light source obtained from the light source output step, a filter step for acquiring a predetermined number of sample lights for luminance and chromaticity using a color matching function filter;
An imaging step of imaging the sample light obtained from the filter step and acquiring an image,
The filter step divides the input sample light into a predetermined number and passes the divided light sources through different filters, and the imaging step captures a plurality of sample light emission images simultaneously. Optical measurement method. The filtering step includes
5. The apparatus according to claim 4, further comprising a quadrangular pyramid prism, wherein the prism has different filters as the color matching function filters on a surface having a predetermined inclination with respect to an optical axis of the input sample light. The optical measurement method described. The filtering step includes
5. The optical system according to claim 4, further comprising a quadrangular pyramid prism, wherein the prism is provided with a different filter as the color matching function filter on a bottom surface perpendicular to the optical axis of the input sample light. Measuring method. A reliability evaluation system comprising the optical measurement apparatus according to any one of claims 1 to 3 and evaluating the reliability of a sample.
A sample information acquisition unit for acquiring a sample light source from at least one sample;
A power supply for supplying current to the sample;
An evaluation control device for obtaining a reliability evaluation result from the sample emission image obtained by the optical measurement device;
A reliability evaluation system comprising: a monitor that displays at least an evaluation result.

Images