JP2009044787A - Drive arrangement, and movable structure - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technology for reducing concentration of stress on a spring supporting a movable portion at the time of driving. <P>SOLUTION: The driver 1A includes a drive section 5 for imparting a drive displacement to a movable portion 6, a supporting portion 7 provided in the movable portion 6, a resilient portion 7a having one and the other ends and being connected with the supporting portion 7 at one end, and a portion 7b inserted between a fixed portion 8 and the other end of the resilient portion 7a and relaxing resilient deformation occurring at the resilient portion 7a depending on the drive displacement. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a drive device.

  In recent years, laser devices and optical devices (hereinafter also referred to as “optical devices and the like”) have been downsized. Accordingly, there is a strong demand for miniaturization of optical deflection elements, optical switch elements, and variable shape mirror elements (hereinafter also referred to as “optical deflection elements etc.”) used in small optical devices.

  Therefore, a technology has been proposed in which an optical deflection element or the like is configured using a MEMS (Micro Electro Mechanical System) element manufactured by making full use of a semiconductor microfabrication technique, and the optical deflection element or the like is miniaturized ( Patent Document 1). In a MEMS element (also referred to as an “optical MEMS element”) used for an optical deflection element or the like, a movable structure having a movable body (movable part) supported by a pair of springs is employed.

JP 2003-262803 A

  However, the optical MEMS element having the movable structure described in Patent Document 1 has a problem that stress concentration tends to occur in the spring portion that supports the movable portion.

  Therefore, an object of the present invention is to provide a technique capable of reducing stress concentration generated in a spring that supports a movable part during driving.

  In order to solve the above problems, the invention of claim 1 is a drive device that drives a movable part relative to a fixed part, and is provided in the movable part, a drive part that applies drive displacement to the movable part, and the movable part. A first elastic portion and a second elastic portion, each of which has one end and the other end, and is connected to each other at the one end in a state of being opposed to each other via the support member; A first relaxation means that is interposed between the first elastic portion and the other end of the first elastic portion to relieve elastic deformation that occurs in the first elastic portion according to the driving displacement, the fixing portion, and the second And a second relaxation means that is interposed between the other end of the elastic portion and relieves elastic deformation that occurs in the second elastic portion in accordance with the drive displacement.

  According to a second aspect of the present invention, in the drive device according to the first aspect of the invention, the first relaxation means has the other end of the first elastic portion in a direction to relieve the elastic deformation of the first elastic portion. And the second relaxation means displaces the position of the other end of the second elastic portion in a direction to relieve the elastic deformation of the second elastic portion.

  According to a third aspect of the present invention, in the drive device according to the first or second aspect of the present invention, the first relaxation means has a third elastic portion, and the position of the other end of the first elastic portion. Is displaced according to the elastic deformation of the third elastic portion, the second relaxation means has a fourth elastic portion, and the position of the other end of the second elastic portion is the position of the fourth elastic portion. It is characterized by displacement according to elastic deformation.

  According to a fourth aspect of the present invention, in the drive device according to any one of the first to third aspects, the first elastic portion and the second elastic portion are plate-like elastic bodies. And

  According to a fifth aspect of the present invention, in the drive device according to any one of the first to fourth aspects, the drive unit, the support member, the first elastic unit, the second elastic unit, and the first The relaxing means and the second relaxing means are manufactured from an SOI substrate.

  According to a sixth aspect of the present invention, in the drive device according to any one of the first to fifth aspects of the present invention, the movable portion has a reflective surface on an upper surface thereof, and the drive device is a light deflection element. It is characterized by functioning.

  The invention according to claim 7 is a movable structure that drives the movable part relative to the fixed part, and includes a drive part that applies drive displacement to the movable part, and a support member provided on the movable part, Also has a first elastic part and a second elastic part connected to the support member at the one end, respectively, in a state of having one end and the other end and facing each other via the support member, the fixing part and the first A first mitigating means interposed between the other end of the elastic portion and mitigating elastic deformation generated in the first elastic portion in response to the driving displacement; and the other of the fixing portion and the second elastic portion And a second relaxation means that is interposed between the first and second ends and relaxes the elastic deformation generated in the second elastic portion in accordance with the driving displacement.

  Further, the invention of claim 8 is a drive device for driving the movable part relative to the fixed part, both of a drive part that applies drive displacement to the movable part, and a support member provided on the movable part. A first elastic portion and a second elastic portion, which have one end and the other end, and are connected to each other at the one end with the support member facing each other, the fixing portion and the first elasticity A third elastic portion interposed between the other end of the portion and a fourth elastic portion interposed between the fixed portion and the other end of the second elastic portion, the first elasticity And the third elastic portion disperse and store energy given to the first elastic portion according to the driving displacement as elastic energy, and the second elastic portion and the fourth elastic portion are subjected to the driving displacement. In response to the energy given to the second elastic part And wherein the storing dispersed as energy.

  According to the first to eighth aspects of the present invention, the first relaxation means for relaxing the elastic deformation that occurs in the first elastic portion in response to the drive displacement is interposed between the fixed portion and the first elastic portion. Since the second relaxation means for relaxing the elastic deformation generated in the second elastic portion according to the drive displacement is interposed between the fixed portion and the second elastic portion, the movable portion is It becomes possible to reduce the stress concentration which arises in the 1st elastic part and 2nd elastic part to support.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<Embodiment>
<Configuration>
The configuration of the drive device 1A according to the present embodiment will be described. FIG. 1 is a functional block diagram of a driving apparatus 1A according to the present embodiment. In addition, the arrow (single arrow or double arrow) in FIG. 1 has shown typically energy transfer between each function.

  As shown in FIG. 1, the drive device 1 </ b> A includes a drive unit 5, a movable unit 6, a support unit 7, and a fixed unit 8, and has a movable unit 6 that can move with respect to the fixed unit 8. It is configured.

  Specifically, the drive unit 5 has a function of generating displacement (also referred to as “drive displacement”) and applying the displacement to the movable unit 6. In the present embodiment, an electrostatic actuator composed of a moving comb electrode and a fixed comb electrode is employed as the drive unit 5. The electrostatic actuator uses an electrostatic force (attractive force) generated by a voltage applied between the comb electrodes as a drive source, and moves the movable comb electrode relative to the fixed comb electrode to generate a displacement. Details of the electrostatic actuator will be described later.

  The movable part 6 is connected to the fixed part 8 via the support part 7 and moves according to the driving displacement.

  The support portion 7 is connected to the fixed portion 8 and has a function of supporting (holding) the movable portion 6. Moreover, the support part 7 has the elastic part 7a and the relaxation part 7b. The elastic part 7a is elastically deformed by the movement of the movable part 6 according to the drive displacement, and the relaxing part 7b has a function of relaxing the elastic deformation of the elastic part 7a.

  In the driving device 1 </ b> A having each functional unit as described above, the movable unit 6 is displaced by a force (driving force) applied from the driving unit 5, and causes elastic deformation in the elastic unit 7 a of the support unit 7. When the driving force disappears, the movable portion 6 returns to the original position by the restoring force of the elastic portion 7a that has been elastically deformed. In the driving device 1A, the elastic deformation of the elastic part 7a caused by the movement of the movable part 6 is alleviated by the relaxing part 7b. According to this, it becomes possible to reduce (reduce) the stress concentration generated inside the elastic portion 7a.

  Next, a specific configuration of the driving device 1A including the above functional units will be described. FIG. 2 is a top view of the driving apparatus 1A. FIG. 3 is a top perspective view of the movable portion 6. FIG. 4 is a side view of the driving apparatus 1A when viewed from the direction of the arrow K in FIG. In FIG. 2, an XYZ orthogonal coordinate system is shown, but the X-axis direction corresponds to the direction in which each tooth of the fixed comb electrodes 5Ka and 5Kb extends (also referred to as "comb extending direction"). The Y-axis direction is the direction along the interdental groove of the fixed comb electrodes 5Ka and 5Kb (also referred to as “thickness direction of the comb teeth” or “direction perpendicular to the extending direction of the comb teeth in the comb tooth surface)” The Z-axis direction corresponds to a direction in which the teeth of two opposing comb electrodes are alternately arranged (also referred to as “alternate arrangement direction” or “gap direction”).

  As shown in FIG. 2, the driving device 1 </ b> A includes a movable portion 6, a drive portion 5 that applies drive displacement to the movable portion 6, support members 11 a and 11 b that function as the support portion 7 and support the movable portion 6, Elastic members 12a, 12b, 12c, and 12d that function as the elastic portion 7a, relaxation members 13a, 13b, 13c, and 13d that function as the relaxing portion 7b, and fixing portions 8a, 8b, 8c, and 8d are provided.

  Specifically, the movable part 6 has a substantially rectangular plane defined by the vertical side part 6V and the horizontal side part 6H, and the upper surface of the movable part 6 is, for example, a reflection for reflecting light. A surface (reflection mirror) is disposed (installed).

  The drive unit 5 is installed on each of the two vertical side portions 6 </ b> V of the movable unit 6. Specifically, the drive unit 5 includes the movable comb electrodes 5Ea and 5Eb installed on the vertical sides 6V and the fixed comb electrodes 5Ka disposed to face the movable comb electrodes 5Ea and 5Eb, respectively. , 5 Kb.

  The fixed comb electrodes 5Ka and 5Kb are arranged so as to be shifted in the Y-axis direction with respect to the corresponding movable comb electrodes 5Ea and 5Eb. Accordingly, as shown in FIG. 3, the comb tooth surface of the fixed comb electrode 5Ka and the comb tooth surface of the movable comb electrode 5Ea have a relative displacement (positional displacement) in the Y-axis direction. Become. When an appropriate potential difference is applied between the comb electrodes in such a misalignment state (also referred to as “offset state”), the movable comb electrodes 5Ea and 5Eb generate a force in the Y-axis direction (also referred to as “offset direction”). The bearing rotates around the axis L1. Accordingly, the movable portion 6 connected to the movable comb electrodes 5Ea and 5Eb also rotates (rotates) around the axis L1.

  Each of the support members 11a and 11b is a plate-like member having one end RTa and RTb and the other end RHa and RHb, and the one ends RTa and RTb at substantially the center CPa and CPb of each lateral side portion 6H of the movable portion 6. Are respectively connected (coupled) to the movable part 6. Thus, the support members 11a and 11b sandwich (support) the movable portion 7 at positions facing each other.

  Here, since the driving device 1A has a symmetrical configuration in the upper half and the lower half with the symmetry line CC of the movable portion 6 as a boundary, hereinafter, the mechanism of the lower half ( The structure and function of SR1 (also referred to as “first mechanism”) will be described in detail.

  The first mechanism SR1 is fixed to the support member 11a, the elastic members 12a and 12b connected to the support member 11a in a state of being opposed to each other via the support member 11a, the fixing portions 8a and 8b, and the elastic members 12a and 12b. Relaxing members 13a and 13b inserted between the portions 8a and 8b, respectively. In the first mechanism SR1 having such elements, the elastic member 12a, the relaxation member 13a, and the fixing portion 8a, and the elastic member 12b, the relaxation member 13b, and the fixing portion 8b are arranged symmetrically with respect to the axis L1. .

  Specifically, the support member 11a in the first mechanism SR1 extends along the axis L1 starting from the approximate center CPa of the lateral side portion 6H.

  The elastic members 12a and 12b are rectangular thin plate-like elastic bodies, each having one main surface and the other main surface facing the opposite side. As shown in FIG. 4, the elastic members 12 a and 12 b are connected (coupled) to the support member 11 a in a posture in which one main surface is directed in the + Y direction and the other main surface is directed in the −Y direction. Specifically, the elastic member 12a is formed over the plate width of the elastic member 12a along the extending direction of the support member 11a (here, the -Z direction) with reference to the other end RHa of the support member 11a. The upper end portion (also referred to as “first connection portion”) Ga is connected. The elastic member 12b has another upper end (“second connection portion”) extending across the width of the elastic member 12b along the extending direction of the support member 11a with respect to the other end RHa of the support member 11a. Is also connected to Gb.

  As shown in FIG. 4, each of the relaxation members 13 a and 13 b has a plurality of rectangular plate materials P <b> 1 that extend in the YZ direction and are arranged in parallel at intervals in the X direction, and the same width as these plate materials P <b> 1. And have a structure in which side plate portions P2 for alternately connecting the plate materials P1 are integrally formed on one side and opposite sides of both sides of the Z end side of these plate materials P1. The relaxation members 13a and 13b having such a structure have a mechanical structure corresponding to a zigzag spring, and receive a force in a direction perpendicular to the plate surface of the plate material P1 (here, the X direction). In addition to expanding and contracting in the direction perpendicular to the surface (X direction), it can also be displaced in the Y and Z directions, or inclined in each direction (especially the direction in which the normal vector of the plate surface of the plate P1 is inclined in the XY plane). It functions as an absorbable elastic body. One ends of the relaxation members 13a and 13b are connected to the elastic members 12a and 12b. Specifically, as shown in FIG. 4, the first connecting portion Ga of the support member 11a and the upper end portion (also referred to as “third connecting portion”) Gc of the relaxation member 13a are thin plate-like elastic members. 12a is connected. In addition, the second connection portion Gb of the support member 11a and the upper end portion (also referred to as “fourth connection portion”) Gd of the relaxation member 13b are connected via a thin plate-like elastic member 12b. On the other hand, the other ends of the relaxation members 13a and 13b are connected to the fixing portions 8a and 8b, respectively. Since the relaxation members 13a and 13b have a three-dimensional shape, even if the relaxation members 13a and 13b are formed of the same material as the elastic members 12a and 12b, the relaxation members against an external force in the XY plane compared to the elastic members 12a and 12b. The elastic coefficients of 13a and 13b are large. Therefore, when considering a combination of these two types of elastic bodies, elastic deformation due to external force in the XY plane mainly occurs in the elastic members 12a and 12b, but the relaxation members 13a and 13b are part of the elastic deformation. This prevents the situation where the elastic deformation due to the external force is completely concentrated in the elastic members 12a and 12b.

  The upper half mechanism (also referred to as “second mechanism”) SR2 has the same configuration as the first mechanism SR1. In brief, the second mechanism SR2 includes a support member 11b, elastic members 12c and 12d connected to the support member 11b in a state of being opposed to each other via the support member 11b, fixing portions 8c and 8d, and an elastic member 12c. , 12d and relaxation portions 13c, 13d inserted between the fixing portions 8c, 8d, respectively.

<Production method>
A method for manufacturing the drive device 1A having the above-described configuration will be described. FIG. 5 is a view showing a cross section of an SOI (Silicon On Insulator) substrate 50. 6 and 7 are explanatory diagrams relating to the manufacturing method of the driving apparatus 1A.

  In the following, it is assumed that the cross section of the SOI substrate 50 shown in FIG. 5 is the cut surface CF of the first mechanism SR1 by the plane HL perpendicular to the axis L1 shown in FIG. A method of manufacturing the driving device 1A will be described by taking the change of the cut surface CF as an example.

The driving device 1A includes a relatively thick (eg, 200 μm) Si layer (also referred to as “formation layer”) SL1, a relatively thin (eg, 5 μm) Si layer (also referred to as “auxiliary layer”) SL2, and a formation layer SL1. And an SOI substrate 50 (see FIG. 5) having a relatively thin (for example, 2 μm) SiO ₂ layer (also referred to as “sacrificial layer”) GS sandwiched between the auxiliary layer SL2 and the auxiliary layer SL2.

  Specifically, the surface of the formation layer SL1 and the surface of the auxiliary layer SL2 are patterned using a mask. The formation layer SL1 and the auxiliary layer SL2 are unnecessary up to the surface of the sacrificial layer GS by dry etching (for example, ICP-RIE (Inductively Coupled Plasma-Reactive Ion Etching), etching using a fast atom beam). Each thin film (Si layer) is removed. For example, in the cut surface CF shown in FIG. 6, the formation layer SL1 corresponds to the portion B1 corresponding to the elastic members 12a and 12b and the portion B2 corresponding to the relaxation members 13a and 13b, and the auxiliary layer SL2 corresponds to the relaxation members 13a and 13b. The portion B3 to be removed is removed by dry etching.

Next, the sacrificial layer GS exposed by the dry etching is removed by wet etching using HF (hydrofluoric acid) that dissolves SiO ₂ . For example, at the cut surface CF shown in FIG. 7, the sacrificial layer GS of the portion B10 corresponding to the elastic members 12a and 12b and the portion B11 corresponding to the relaxing members 13a and 13b is removed by wet etching.

  As described above, the outer shape of the driving device 1A is produced from the SOI substrate 50 by dry etching and wet etching.

  Then, electrical wiring to the electrostatic actuator of the drive unit 5 is performed by wire bonding or the like. Further, for example, when the driving device 1A is used as an optical deflection element, a metal reflection surface is formed on the upper surface of the movable portion 6 by a sputtering method.

<Operation>
Next, the operation of the driving device 1A will be described. FIG. 8 is a side view of the driving device 1A in the driving state when viewed from the direction of the arrow K in FIG. FIG. 9 is a diagram illustrating changes in the support member 11a between the initial state of the driving apparatus 1A and the driving state MK1.

  In the initial state before driving (see FIG. 4), when an appropriate potential difference is applied between the comb electrodes of the driving unit 5, the movable unit 6 rotates around the axis L1, as shown in FIG. As the movable part 6 rotates, the support member 11a also rotates. Thereby, the thin plate-like elastic members 12a and 12b connected to the support member 11a are elastically deformed and bend. Specifically, by the rotation of the movable portion 6, one of the elastic members 12a and 12b, with the elastic member on the one side (in FIG. 8, the elastic member 12a) as a reference, is connected to the elastic member 12a and 12b. The member is curved so as to swell toward the other main surface side (lower side in FIG. 8), and the other elastic member (elastic member 12b in FIG. 8) is placed on one main surface side (upper side in FIG. 8) of the elastic member. Curves to swell.

  Specifically, for example, as shown in FIG. 9, in the driving state MK1 (see FIG. 8) in which the movable portion 6 is rotated clockwise about the axis L1, the first connecting portion in the support member 11a. Ga is displaced as indicated by an arrow AR1. This displacement has a displacement in the + X direction and a displacement in the -Y direction, and the elastic member 12a connected to the first connection portion Ga undergoes elastic deformation that curves toward the other main surface side. Further, the second connection portion Gb in the support member 11a is displaced as indicated by an arrow AR2. This displacement has a displacement in the + X direction and a displacement in the + Y direction, and the elastic member 12b connected to the second connecting portion Gb generates an elastic deformation that curves toward one main surface side.

  And the relaxation members 13a and 13b connected to the elastic members 12a and 12b relieve the elastic deformation of the elastic members 12a and 12b caused by the displacement of the first connection portion Ga and the second connection portion Gb, respectively. Elastically deforms. Specifically, the relaxation member connected to the elastic member swelled on the other main surface side receives a force in the compression direction from the elastic member to be contracted and deformed, and alleviates the elastic deformation swelled on the other main surface side of the elastic member. Let On the other hand, the relaxation member connected to the elastic member swelled on the one main surface side is stretched and deformed by receiving a force in the extending direction from the elastic member, and relaxes the elastic deformation of the elastic member.

  For example, in the driving state MK1 (FIG. 8), a force in the + X direction is applied to the third connecting portion Gc from the elastic member 12a under the influence of the first connecting portion Ga displaced in the + X direction. The relaxation member 13a contracts and deforms in the compression direction (here, + X direction) by the force in the + X direction, and displaces the third connecting portion Gc in the + X direction as indicated by an arrow ZR1. When the third connection part Gc is displaced in the + X direction, the distance between the first connection part Ga and the third connection part Gc, which is shortened by the displacement of the first connection part Ga in the + X direction, is increased. Therefore, the elastic deformation generated in the elastic member 12a can be reduced (relaxed). In this way, the relaxation member 13a displaces the third connection portion Gc in a direction that relaxes the elastic deformation of the elastic member 12a, and one of the displacements in the + X direction at the first connection portion Ga represented by the arrow AR1. Absorb the part. According to this, it becomes possible to relieve the elastic deformation of the elastic member 12a and reduce the stress concentration generated in the elastic member 12a.

  On the other hand, the force in the + X direction is applied to the fourth connecting portion Gd from the elastic member 12b under the influence of the second connecting portion Gb displaced in the + X direction. The relaxing member 13b extends and deforms in the extension direction (here, the + X direction) by the force in the + X direction, and displaces the fourth connecting portion Gd in the + X direction as indicated by an arrow ZR2. As a result, the distance between the second connection portion Gb and the fourth connection portion Gd can be kept substantially constant regardless of the drive state MK1. Thus, the relaxing member 13b displaces the fourth connecting portion Gd to absorb the displacement in the + X direction of the second connecting portion Gb represented by the arrow AR2. According to this, it becomes possible to reduce the stress concentration generated inside the elastic member 12b.

  In the driving state MK2 (not shown) in which the movable portion 6 is rotated counterclockwise about the axis L1, the fourth connecting portion Gd has a second connecting portion Gb displaced in the −X direction. -X direction force is applied from the elastic member 12b. The relaxation member 13b contracts and deforms in the compression direction by the force in the −X direction, and displaces the fourth connection portion Gd in the −X direction. In this way, the relaxation member 13b displaces the fourth connecting portion Gd in a direction that reduces the elastic deformation of the elastic member 12b, and absorbs a part of the −X direction displacement in the first connecting portion Gb. According to this, it becomes possible to relieve the elastic deformation of the elastic member 12b and reduce the stress concentration generated in the elastic member 12b.

  On the other hand, in the driving state MK2, a force in the −X direction is applied to the third connecting portion Gc from the elastic member 12a under the influence of the first connecting portion Ga displaced in the −X direction. The relaxation member 13a extends and deforms in the extension direction (here, + X direction) by the force in the -X direction, and displaces the third connection portion Gc in the -X direction. As described above, the relaxing member 13a displaces the third connecting portion Gc to absorb the displacement of the first connecting portion Ga in the −X direction. According to this, it is possible to reduce stress concentration generated in the elastic member 12a.

  In the above description, the case where the displacement in the X direction is absorbed by the relaxation members 13a and 13b has been described. However, the relaxation members 13a and 13b also absorb the displacement in the Y direction and the Z direction, or the inclination in each direction. Then, the stress concentration generated in the elastic members 12a and 12b is reduced.

  As described above, the driving device 1A moves the other end (opposite side) of the elastic members 12a and 12b according to the displacement given to one end (one side) of the elastic members 12a and 12b by the rotation of the movable portion 6 ( A mechanism for sliding) (also referred to as a “slide mechanism”). According to this, since the displacement given to one end of elastic members 12a and 12b can be absorbed, it becomes possible to reduce the stress concentration which arises inside elastic members 12a and 12b.

  The second mechanism SR2 also slides to move the other end (opposite side) of the elastic members 12c, 12d according to the displacement given to one end (one side) of the elastic members 12c, 12d by the rotation of the movable part 6. It has a mechanism, and it becomes possible to reduce the stress concentration generated inside the elastic members 12c and 12d by the rotation of the movable portion 6.

  In addition, since the drive device 1A has a slide mechanism that can reduce stress concentration in the elastic members 12a to 12d, the maximum movable portion 6 can be moved as compared with a case where such a slide mechanism is not provided. It is possible to increase the rotation range (maximum rotation angle). Specifically, in the driving device 1A, since elastic deformation that occurs in the elastic members 12a to 12d is relieved, the elastic members 12a to 12d with respect to the rotation angle given to the movable portion 6 are compared with the case where there is no slide mechanism. The amount of elastic deformation of is reduced. For this reason, in the drive device 1A, the maximum rotation angle with respect to the maximum elastic deformation amount of the elastic members 12a to 12d is increased, that is, the movable rotation range of the movable portion 6 is increased, compared with the case where the slide mechanism is not provided.

  In addition, when an impact is applied to the driving device 1A due to dropping or the like, rapid deformation that occurs in the elastic members 12a to 12d due to the displacement of the movable portion 6 can be mitigated by the mitigating members 13a to 13d. Thus, the drive device 1A has high impact durability by having a slide mechanism.

  As described above, the drive device 1A includes the drive unit 5 that applies drive displacement to the movable unit 6, and the support members 11a and 11b provided on the movable unit 6, both having one end and the other end. The elastic members 12a and 12b are respectively connected to the support member at one end and the fixing member 8a and the other end of the elastic member 12a. A relaxation member 13a that relaxes the elastic deformation that occurs in the elastic member 12b, and a relaxation member 13b that is interposed between the fixed portion 8b and the other end of the elastic member 12b and relaxes the elastic deformation that occurs in the elastic member 12b in response to drive displacement. I have. According to this, it is possible to reduce the stress concentration generated in the elastic members 12a and 12b that support the movable portion during driving.

  Also, from the viewpoint of energy transfer, the elastic member 12a and the relaxation member 13a distribute and store energy given to the elastic member 12a according to the drive displacement as elastic energy, respectively, and the elastic member 12b and the relaxation member 13b. Can also be expressed as the energy given to the elastic member 12b according to the drive displacement being distributed and stored as elastic energy. As described above, in the driving apparatus 1A, the elastic energy accumulated in the elastic members 12a and 12b can be reduced, so that it is possible to reduce the stress concentration generated in the elastic members 12a and 12b.

<Modification>
Although the embodiments of the present invention have been described above, the present invention is not limited to the contents described above.

  For example, the configuration of the relaxation members 13a to 13d is not limited to that shown in the above embodiment. FIG. 10 is a side view of a driving device 1B according to a modification.

  Specifically, leaf springs may be used as the relaxation members 13a to 13d. Specifically, as shown in FIG. 10, a support base 21a is connected to the fixed portion 8a, and the support base 21a and the rectangular plate so that the support base 21a and the rectangular plate spring 22a are perpendicular to each other. One side of the spring 22a is connected. Then, the opposing side of the leaf spring 22a is connected to the thin plate-like elastic member 12a. In the drive device 1B having the relaxation members 13a to 13d having such a configuration, the leaf springs 22a to 22d can be elastically deformed to move (slide) the other ends of the elastic members 12a to 12d. The displacement given to one end of 12a-12d can be absorbed, and it becomes possible to reduce the stress concentration which arises inside elastic members 12a-12d.

  Moreover, in the said embodiment, although the electrostatic actuator was employ | adopted as the drive part 5, it is not limited to this. Specifically, a piezoelectric element that deforms when a voltage is applied, a shape memory alloy that deforms according to heat generated by energization, or an organic actuator that is made of an organic material and contracts according to the applied voltage is provided in the drive unit 5. It may be adopted.

It is a functional block diagram of the drive device concerning this embodiment. It is a top view of a drive device. It is a top perspective view of a movable part. FIG. 3 is a side view of the drive device when viewed from the direction of arrow K in FIG. 2. It is a figure which shows the cross section of an SOI substrate. It is explanatory drawing regarding the manufacturing method of a drive device. It is explanatory drawing regarding the manufacturing method of a drive device. FIG. 3 is a side view of the drive device in a drive state when viewed from the direction of arrow K in FIG. 2. It is a figure which shows the change of the supporting member in the initial state and drive state of a drive device. It is a side view of the drive device concerning a modification.

Explanation of symbols

1A, 1B Drive device 6 Movable part 5Ea, 5Eb Moving comb electrode 5Ka, 5Kb Fixed comb electrode 11a, 11b Support member 12a, 12b, 12c, 12d Elastic member 13a, 13b, 13c, 13d Relaxing member 8, 8a, 8b , 8c, 8d fixed part

Claims (8)

A driving device for driving the movable part relative to the fixed part,
A drive unit that applies drive displacement to the movable unit;
A support member provided on the movable part;
Both have one end and the other end, and in a state of being opposed to each other via the support member, a first elastic part and a second elastic part respectively connected to the support member at the one end,
First relaxation means that is interposed between the fixed portion and the other end of the first elastic portion, and relaxes elastic deformation that occurs in the first elastic portion according to the drive displacement;
Second relaxation means that is interposed between the fixed portion and the other end of the second elastic portion, and relieves elastic deformation that occurs in the second elastic portion according to the drive displacement;
A drive device comprising: The drive device according to claim 1,
The first relaxation means displaces the position of the other end of the first elastic part in a direction to relax the elastic deformation of the first elastic part,
The drive device characterized in that the second relaxation means displaces the position of the other end of the second elastic portion in a direction in which the elastic deformation of the second elastic portion is relaxed. The drive device according to claim 1 or 2,
The first relaxation means has a third elastic part,
The position of the other end of the first elastic part is displaced according to the elastic deformation of the third elastic part,
The second relaxation means has a fourth elastic part,
The position of the said other end of a said 2nd elastic part is displaced according to the elastic deformation of a said 4th elastic part, The drive device characterized by the above-mentioned. The drive device according to any one of claims 1 to 3,
The drive device characterized in that the first elastic part and the second elastic part are plate-like elastic bodies. The drive device according to any one of claims 1 to 4,
The drive unit, the support member, the first elastic unit, the second elastic unit, the first relaxation unit, and the second relaxation unit are manufactured from an SOI substrate. The drive device according to any one of claims 1 to 5,
The movable part has a reflective surface on the upper surface thereof,
The driving device functions as an optical deflection element. A movable structure for driving the movable part relative to the fixed part,
A drive unit that applies drive displacement to the movable unit;
A support member provided on the movable part;
Both have one end and the other end, and in a state of being opposed to each other via the support member, a first elastic part and a second elastic part respectively connected to the support member at the one end,
First relaxation means that is interposed between the fixed portion and the other end of the first elastic portion, and relaxes elastic deformation that occurs in the first elastic portion according to the drive displacement;
Second relaxation means that is interposed between the fixed portion and the other end of the second elastic portion, and relieves elastic deformation that occurs in the second elastic portion according to the drive displacement;
A movable structure comprising: A driving device for driving the movable part relative to the fixed part,
A drive unit that applies drive displacement to the movable unit;
A support member provided on the movable part;
Both have one end and the other end, and in a state of being opposed to each other via the support member, a first elastic part and a second elastic part respectively connected to the support member at the one end,
A third elastic portion interposed between the fixed portion and the other end of the first elastic portion;
A fourth elastic portion interposed between the fixed portion and the other end of the second elastic portion;
With
The first elastic part and the third elastic part distribute and store energy given to the first elastic part according to the driving displacement as elastic energy,
The drive device according to claim 2, wherein the second elastic portion and the fourth elastic portion disperse and store energy given to the second elastic portion according to the drive displacement as elastic energy.

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