JP2008304404A - Measuring device - Google Patents

Abstract

An order is set on the basis of a configuration relationship and a causal relationship between modules / units, and calibration and diagnosis are efficiently performed.
A controller 110 of a measuring apparatus 100 sets an optimal order in consideration of matters (causal relationship) that are prerequisites for calibration / diagnostic items between modules / units. Further, among modules / units, modules / units that do not affect each other even if calibration / diagnosis processing is performed at the same time are set so that calibration / diagnosis is performed in parallel. The calibration / diagnosis processing is performed sequentially and in parallel according to this optimal order, thereby improving the efficiency of the calibration / diagnosis processing.
[Selection] Figure 1

Description

  The present invention relates to a measuring apparatus including a plurality of modules and units, and more particularly to a configuration for performing calibration or diagnosis on each module or unit.

  As this type of measuring apparatus, for example, there is a semiconductor testing apparatus provided with a plurality of modules and units for testing an object to be tested (hereinafter referred to as a DUT) such as a semiconductor device. A conventional semiconductor test apparatus is provided with a self-diagnosis function for performing calibration / diagnosis for each module or unit. This self-diagnosis function is executed by a controller in the apparatus, and the controller outputs a calibration / diagnosis signal to each module or unit in the apparatus, and an output output from each module or unit in response to this signal. The signal is compared with expected value data or the like. Calibration is performed by adjusting the error of the voltage value of the output signal based on the result of the comparison, and a diagnosis of whether or not it is normal is performed.

  In the self-diagnosis device in the semiconductor test apparatus described in Patent Document 1 below, information on the diagnostic programs “A” to “WA” possessed by each of the test apparatuses A to Z is stored in the diagnostic program chart, and all tests are performed. The latest operating rate table for each test device and the cumulative failure rate table for each diagnostic program are stored in the device operating rate / failure rate cumulative registration database. The host computer creates the target diagnostic program register by changing the diagnostic program chart based on the latest operating rate for each test device and the cumulative failure rate for each diagnostic program. Then, based on the target diagnostic program register and the data of the target free time for each test apparatus, the diagnostic candidate list is created by selecting from the diagnostic programs in descending order of priority. Each diagnosis program is executed in the order according to the diagnosis candidate list (for example, see Patent Document 1).

  Further, in the conventional measuring apparatus, calibration / diagnosis is performed for each module or unit in the apparatus as follows. FIG. 10 is an explanatory diagram showing a configuration of a conventional semiconductor test apparatus 200 which is an example of a measurement apparatus. The semiconductor test apparatus 200 includes a controller 210, an execution processing storage device 220, and a database 230. Among these, the controller 210 performs calibration and diagnosis of each module or unit in the apparatus. The execution processing storage device 220 stores information related to modules and units for which processing such as calibration / diagnosis has already been executed. The database 230 stores data of the order in which calibration / diagnosis is performed for each preset module or unit.

  FIG. 11 is a flowchart of the calibration / diagnosis process. In this process, first, calibration processes “CAL A” and “CAL B” for calibrating items A and B such as temperature characteristics and environmental characteristics are executed on the module / unit P1, and the calibration result display process “ The CAL A RESULT / DISP "and" CAL B RESULT / DISP "display the calibration results to the user on a display or the like.

  Further, the calibration process “CAL C” for calibrating the item C is executed for the module / unit P2, and the calibration result display process “CAL C RESULT / DISP” displays the calibration result to the user on a display or the like. . Thereafter, the calibration of the item D is also executed for the module / unit P3 by the calibration process “CAL D” and the calibration result display process “CAL D RESULT / DISP” in the same order.

Next, a diagnosis process “DIAG A / B” for diagnosing items A and B such as test patterns and input signals is executed on the module / unit P1, and the diagnosis result display process “DIAG A / B RESULT” is executed. / DISP "displays the result of diagnosis to the user on a display or the like. Further, the diagnosis of the item C is executed for the module / unit P2 by the diagnosis process “DIAG C” and the diagnosis result display process “DIAG C RESULT / DISP” in the same order. The diagnosis of items D and E is also executed for module / unit P3 in the same order of diagnosis process "DIAG D, DIAG E", diagnosis result display process "DIAG D RESULT / DISP", "DIAG E RESULT / DISP" To do.
JP-A-10-135299

  However, in such a prior art, each module / unit is calibrated and diagnosed in a predetermined order, and this order takes into account the causal relationship between functions and processing items between modules / units. It was n’t. For this reason, in the actual calibration / diagnosis process, all the processing items are performed one by one in order, and it cannot be said that calibration / diagnosis is performed in the optimal order for each module / unit. However, there is a problem that the time required for the entire calibration and diagnosis becomes long.

  Therefore, an object of the present invention is to provide a measuring apparatus that can set the order based on the configuration relationship and the causal relationship between modules / units and can perform calibration and diagnosis efficiently.

  In order to achieve the above-described problems, a measuring apparatus according to the present invention stores a plurality of modules or units to be calibrated or diagnosed and information related to calibration or diagnosis of the plurality of modules or units. A controller for setting an order of calibration or diagnosis for the plurality of modules or units based on information stored in the information database, and the plurality of modules or units according to the order set by the controller And an execution means for performing calibration or diagnosis.

  With such a configuration, it is possible to set an optimal order in consideration of, for example, a configuration relationship or a causal relationship between a plurality of modules or units based on information on calibration or diagnosis of the plurality of modules or units. Then, calibration or diagnosis can be efficiently performed on a plurality of modules or units according to the set order.

  In addition, another measurement apparatus according to the present invention includes a plurality of modules or units to be calibrated or diagnosed, a configuration database that stores configuration information regarding the configuration of the plurality of modules or units, and the plurality of modules or units. A restriction database for storing restriction information on restrictions on calibration or diagnostics for the above, a reference database for storing evaluation parameters defining criteria for calibration or diagnosis order of the plurality of modules or units, the configuration information, the restriction information, and A controller that sets an order in which calibration or diagnosis is performed on the plurality of modules or units based on at least one of the evaluation parameters, and the plurality of modules or units according to the order set by the controller Characterized by comprising an execution means for performing calibration or diagnosis.

  For example, in order to execute calibration / diagnosis items of a certain module or unit, if there is a constraint that the calibration / diagnostic items of another module or unit must be completed as a prerequisite, such a restriction is causal. The order of calibration / diagnostic items is optimally set according to the causal relationship. In addition, when an evaluation parameter indicating that a certain item is given priority among a plurality of calibration / diagnosis items is determined, the order is set so that calibration / diagnosis is performed in order from the item with the highest priority. This makes it necessary for self-diagnosis as a whole by optimally setting the order of calibration and diagnosis in consideration of the mutual cause and effect of multiple items, or by setting the optimal order of calibration and diagnosis from the evaluation parameters. Time can be shortened.

  In the above-described measurement device, the controller may perform calibration or diagnosis in parallel with each other among the plurality of modules or units with reference to the configuration information or the restriction information. There may be provided detection means for detecting a module or unit that does not become an obstruction condition, and parallel setting means for setting the order so that calibration or diagnosis for the module or unit detected by the detection means is performed in parallel.

  In the measurement device, for example, when the two modules or units are not in a relationship of exchanging signals (for example, test signals) with each other, there is a case where both calibration and diagnosis can be executed in parallel. That is, it is considered that the causal relationship of calibration / diagnosis is not established between two modules or units for which calibration or diagnosis in parallel with each other does not hinder the operation of each module or unit. In the present invention, the time required for calibration / diagnosis as a whole can be shortened by executing calibration / diagnosis items having no causal relationship in parallel.

  In the measurement apparatus described above, the evaluation parameters stored in the evaluation database include a parameter indicating an evaluation of a calibration or diagnosis execution time for each of the plurality of modules or units, and a calibration for each of the plurality of modules or units. Alternatively, a parameter indicating an evaluation of accuracy achievable by diagnosis and a parameter indicating an evaluation of the priority of calibration or diagnosis for each of the plurality of modules or units may be included.

  In this case, the user of the measuring device can decide the evaluation parameter with an emphasis on shortening the execution time of calibration / diagnosis, or decide the evaluation parameter with an emphasis on the accuracy of calibration / diagnosis. You can also. Alternatively, the evaluation parameter can be determined so as to give priority to calibration / diagnosis of a specific module or unit. In any case, in the present invention, the order of the calibration / diagnosis items can be set based on the determination criteria determined by the evaluation parameter, so that the calibration / diagnosis can be executed while reflecting the user's intention.

  In the measurement apparatus described above, a priority order for setting the order of calibration or diagnosis may be added to the evaluation parameter for each parameter of the execution time, accuracy, and priority.

  In this case, it is possible to determine the order of calibration / diagnosis in consideration of judgment criteria (execution time, accuracy, priority for a specific module or unit) having a high priority among evaluation parameters.

  According to the present invention, it is possible to obtain an effect that it is possible to set the order based on the configuration relationship and the causal relationship between modules / units and to perform calibration and diagnosis efficiently.

[First Embodiment]
FIG. 1 is an explanatory diagram illustrating the configuration of the measurement apparatus 100. The measuring apparatus 100 includes a plurality of modules or units (module / unit group 140) as its constituent elements. The module / unit group 140 includes, for example, a power supply unit of the measuring apparatus 100, a measurement signal input unit, a signal transmission unit, a signal storage unit, and the like (block elements P1, P2, P3... In the figure). .

  The self-diagnosis function of the measuring device 100 is executed by the controller 110. The controller 110 has a control function for operating the module / unit group 140 described above. The controller 110 outputs command information to the module / unit group 140, and performs calibration / diagnosis for each module / unit included in the module / unit group 140 in an optimal order. In the calibration process, for example, a calibration / diagnosis signal is applied to the target module / unit, the signal output in response to this signal is compared with a reference value, and errors such as voltage values between them are adjusted. Execute normal or abnormal judgment. For this reason, the controller 110 has a function as an execution means.

  The measurement apparatus 100 is provided with an execution processing storage device 120. The execution processing storage device 120 includes information (calibration / diagnosis completion information) related to the module / unit group 140 for which calibration / diagnosis processing has already been executed, and information on the calibration / diagnosis processing currently being executed. Alternatively, information (calibration / diagnosis progress information) related to what has not been executed yet is stored. The calibration / diagnosis completion information and the calibration / diagnosis progress information are sequentially updated by the controller 110.

  The measuring apparatus 100 is provided with a database 130 as a configuration relating to the self-diagnosis function. The database 130 stores configuration information related to the configuration of the module / unit group 140, restriction information related to restrictions on calibration / diagnosis, premise information related to preconditions for performing calibration / diagnosis, evaluation parameters related to calibration / diagnosis, and the like. . Among these, the configuration information includes information on the configuration of the module / unit group 140 such as a connection relationship and a positional relationship. The restriction information includes, for example, the order of calibration / diagnosis items that cannot be set, and information on calibration / diagnosis items that cannot be executed simultaneously. The premise information includes information on preconditions (causality) at the time of calibration / diagnosis. The evaluation parameters include parameters input by the user such as calibration / diagnosis execution time, accuracy, and priority.

  FIG. 4A shows an example in which evaluation parameters are set for each calibration / diagnosis item. The evaluation parameters are “execution time”, “accuracy”, “priority”, “simple / detailed test” for each item (CAL A, CAL B... DIAG A, DIAG B... Can be set. Of these, “execution time” is the length of time for actually executing calibration / diagnosis processing, and “accuracy” is a scale that defines how strict calibration / diagnosis should be performed, "Priority" defines the importance of each calibration / diagnostic item. “Separate / simple test” defines whether the processing of each calibration / diagnostic item is executed simply or in detail.

  FIG. 4B shows the meaning of numerical values set as evaluation parameters. The evaluation parameter is set in advance by the user, for example, and among these parameters, the “execution time” parameter corresponds to “short” to “long” according to the numerical values “1” to “5”. The accuracy parameter corresponds to “low” to “high” according to the numerical values “1” to “5”, and the priority parameter corresponds to the numerical values “1” to “5” and “0”. Corresponds to “high” to “low” and “not implemented”.

  Next, the setting of the order of calibration / diagnosis items performed by the controller 110 will be described with reference to the flowchart shown in FIG.

  Step S201: The controller 110 accesses the database 130 and acquires various types of information. Here, for example, the above-described configuration information, restriction information, premise information, and evaluation parameters are acquired.

  Step S202: The controller 110 refers to the configuration information and the restriction information acquired from the database 130, and grasps the connection relationship and the positional relationship between each module / unit (P1, P2, P3...). The controller 110 detects modules / units that do not interfere with each other even if calibration / diagnosis processing is performed at the same time. For this reason, the controller 110 has a function as a detection means.

  For example, the modules / units P2 and P3 included in the module / unit group 140 calibrate or diagnose each other in parallel does not become an obstacle to the operation of each module or unit. It is assumed that there is no influence on each other even if they go. In this case, the modules / units P2 and P3 are detected as being capable of executing calibration / diagnosis processing in parallel.

  Step S203: The controller 110 sets the order of calibration / diagnosis processing for each module / unit so as to satisfy the restrictions and assumptions included in the restriction information and the assumption information. For example, if the restriction information includes a restriction prohibiting a plurality of calibration / diagnosis processes for the same module / unit, a plurality of calibration / diagnostics for the same module / unit are satisfied so as to satisfy this restriction. Change the order so that the processes are not executed in parallel. For this reason, the controller 110 has a function as a parallel setting means.

  For example, let us consider a case where there are the following assumptions (restrictions). FIG. 3 is a flowchart when the order is set so as to satisfy the following assumptions (1) to (7).

(1) “Calibration of item B of module / unit P1 is based on completion of calibration of item A of module / unit P1”
(2) “Calibration of item C of module / unit P2 is based on completion of calibration of items A and B of module / unit P1”
(3) “Calibration of item D of module / unit P3 is based on completion of calibration of item C of module / unit P2”
(4) “Diagnosis of items A and B of module / unit P1 is based on completion of calibration of items A and B of module / unit P1”
(5) “Diagnosis of item C of module / unit P2 is based on completion of calibration of item C of module / unit P2”
(6) “Diagnosis of item D of module / unit P3 is based on completion of calibration of item C of module / unit P2 and item D of module / unit P3”
(7) “Diagnosis of item E of module / unit P3 is based on completion of calibration of item D of module / unit P3”

  Further, for example, when the controller 110 detects the modules / units P2 and P3 as modules / units capable of executing the calibration / diagnosis processing in parallel in step S202, the controller 110 shows the flow of the calibration / diagnosis process in FIG. In addition, the order is set so that the calibration / diagnosis processing for these modules / units P2 and P3 is executed in parallel.

  Step S204: The controller 110 performs calibration / diagnosis processing on each module / unit in accordance with the optimal order set in step S203.

  For example, as shown in FIG. 3, the controller 110 executes a calibration process “CAL A” for calibrating the item A such as the temperature characteristic and the environmental characteristic for the module / unit P1, and then the item In parallel with the calibration process “CAL B” for calibrating B, a calibration result display process “CAL A RESULT / DISP” is executed, and the calibration result is displayed to the user by a display or the like.

  In addition, the calibration result display process “CAL B RESULT / DISP” is executed in parallel with the calibration process “CAL C” for calibrating the item C for the module / unit P2, and the calibration result is displayed on the user's display or the like. To display. After that, for the module / unit P1, the calibration result display process “CAL C RESULT / DISP” is executed in parallel with the diagnosis process “DIAG A / B” for diagnosing the items A and B, and the result of the calibration is displayed. Etc. to the user.

  Next, the controller 110 executes a diagnosis result display process “DIAG A / B RESULT / DISP”, displays the diagnosis result to the user by a display or the like, and performs the calibration / diagnosis processing on the modules / units P2 and P3 in parallel. And run.

  At this time, since the controller 110 sets the order so that the calibration / diagnosis processing of the modules / units P2 and P3 is executed in parallel, the diagnosis process “ In parallel with “DIAG C”, a calibration process “CAL D” for calibrating the item D is performed on the module / unit P3.

  Then, the controller 110 executes a diagnosis result display process “DIAG C RESULT / DISP”, and displays the diagnosis result to the user by a display or the like. Thereafter, the controller 110 executes the calibration result display process “CAL D RESULT / DISP” in parallel with the diagnosis process “DIAG D” for diagnosing the item D for the module / unit P3, and displays the calibration result. Etc. to the user.

  Next, the controller 110 executes the diagnosis result display process “DIAG D RESULT / DISP” in parallel with the diagnosis process “DIAG E” for diagnosing the item E for the module / unit P3, and displays the diagnosis result. Etc. to the user. Thereafter, the diagnosis result display process “DIAG E RESULT / DISP” is executed, and the diagnosis result is displayed to the user by a display or the like. In this way, as shown in the flow of the calibration / diagnosis process in FIG. 3, the calibration / diagnosis process is performed on each module / unit according to the optimum order.

  The controller 110 may refer to the evaluation parameter in the above step S203. In this case, the order of calibration / diagnosis processing for each module / unit can be set according to the numerical value of each evaluation parameter. For example, as shown in the flow of the calibration / diagnosis process in FIG. 3, when the priority of “CAL A”, “CAL B”, etc. is “1”, these processes are executed with priority. The order can be set as follows.

  Alternatively, if the evaluation parameter for determining the order is “execution time”, the controller 110 performs sequential processing and parallel processing so that the execution time is optimal (shortest) together with various information in the database 130 and the execution processing storage device 120. Set the order. Such evaluation parameters can be arbitrarily set by the user, and the set contents are stored in the database 130.

  Next, FIG. 5 is an explanatory diagram showing priorities added to each evaluation parameter. As shown in FIG. 5, when priorities are added to the parameters, the controller 110 can grasp the numerical values of these priorities and set the order according to the numerical values of the parameters.

FIG. 6 is an explanatory diagram showing weighting values added to the respective evaluation parameters. As shown in FIG. 6, when a weighting value is added to each parameter, the controller 110 uses the formula of the evaluation function F shown below, and sets each parameter according to the numerical value of the evaluation function. Change the order of priority.

F (calibration / diagnosis processing) = Σ (weighting value x parameter)

Substituting the numerical values of the respective parameters into this equation yields F (CAL A) = 10, F (CAL B) = 6, etc., and grasping the numerical values of these evaluation functions, according to the numerical values of the respective parameters. The order can be set.

  As described above, in the self-diagnosis of the measuring apparatus 100, calibration / diagnosis processing is executed in parallel on modules / units that do not affect each other even if processing is performed simultaneously. In addition, while the module / unit is being calibrated / diagnosed, other calibration / diagnosis results are displayed to the user on a display or the like, thereby taking into account the configuration and causality between the modules / units. Since the processes are executed in an optimal order, calibration / diagnosis can be performed more efficiently than in the case where the processes are executed in a fixed order set in advance by a user or the like. In particular, since calibration / diagnosis processing for modules / units that do not affect each other is executed in parallel, the number of calibration / diagnosis items and modules / units can be increased. Become.

  In this regard, in the prior art, as shown in the flow of the calibration / diagnosis process in FIG. 11, the calibration / diagnosis processing time for the modules / units P1, P2, P3 is as long as 36 minutes. On the other hand, in the measurement apparatus 100 of the first embodiment, as shown in the flow of the calibration / diagnosis process in FIG. 3, the processing time is shortened to, for example, 26 minutes, and calibration / diagnosis can be performed efficiently. It is.

[Second Embodiment]
FIG. 7 is an explanatory diagram showing a configuration when the present invention is applied to the semiconductor test apparatus 150. The semiconductor test apparatus 150 includes a module / unit group 154 instead of the module / unit group 140 of the measurement apparatus 100 in the first embodiment. The module / unit group 154 includes PMU (DC application / measurement unit) 1... PMUm, PE (pin electronics unit) 1... PEn, PG (pattern generation unit), FM (fail memory) as each module / unit. Part) etc. are included.

  When applied to the semiconductor test apparatus 150, the controller 151 and the execution processing storage device 152 are provided, for example, in a tester control unit in the apparatus. The database 153 can be constructed in a workstation connected to the semiconductor test apparatus 150. Note that the controller 151, the execution processing storage device 152, and the database 153 are basically the same as the controller 110, the execution processing storage device 120, and the database 130 in the first embodiment, and thus redundant description is omitted here.

  Also in the semiconductor test apparatus 150, the user can set numerical values of evaluation parameters such as execution time, accuracy, priority, etc. by operating a keyboard, a mouse, and the like, and store them in the database 153. The controller 151 refers to the configuration information and the restriction information, and detects modules / units that do not affect each other even if processing is performed simultaneously from among the PMU1, PE1, PG, FM, etc. included in the module / unit group 154. To do.

  Then, the controller 151 sets an optimal order for performing calibration / diagnosis for each module / unit (PMU1, PE1, PG, FM, etc.) based on the configuration information, the restriction information, the prerequisite information, and the evaluation parameters. At this time, the controller 151 sets the order so that calibration / diagnosis of modules / units whose calibration / diagnostic items have no causal relationship with each other is executed in parallel.

  For example, it is assumed that modules / units such as PE1, PG, PMU2... Can execute calibration / diagnosis in parallel. In this case, as shown in the flow of the calibration / diagnosis process in FIG. 8, the controller 151 performs an order so that the calibration / diagnosis processing for modules / units such as PE1, PG, PMU2,. Set. In addition, the order can be set with reference to the evaluation parameters as in the first embodiment. The controller 151 finally performs a process “DIAG ALL RESULT / DISP.” For displaying calibration / diagnosis results of all modules / units (PMU1,... PMUm, PE1,... PEn, PG, FM, etc.). Execute to end the calibration / diagnosis process.

[Other Embodiments]
In the above-described embodiment, as shown in FIG. 9, in addition to the databases 130 and 153, the execution time in the past calibration / diagnosis processing, the history of execution results, the calibration / diagnosis processing, and each module / unit A database 160 storing correlation information may be added. In this case, in addition to the configuration information, restriction information, prerequisite information, and evaluation parameters, the execution time, history of execution results, calibration / diagnosis processes, and modules / units in the past calibration / diagnosis processes Based on the correlation information, an optimal order for calibration / diagnosis is set for each module / unit. With such a configuration, it is possible to accumulate information such as calibration / diagnosis execution time and execution result history for each number of processings, and set a more optimal order.

It is explanatory drawing which shows the structure of a measuring device. It is a flowchart which shows the procedure which sets the order of a calibration / diagnosis item. It is explanatory drawing which shows the flow of a calibration / diagnostic process. It is explanatory drawing which shows the example of an evaluation parameter. It is explanatory drawing which shows the example which added the priority to the evaluation parameter. It is explanatory drawing which shows the example which added the weighting value to the evaluation parameter. It is explanatory drawing which shows the structure of a semiconductor test apparatus. It is explanatory drawing which shows the flow of a calibration / diagnostic process. It is explanatory drawing which shows the structure of the database of the measuring device or semiconductor testing apparatus of other embodiment. It is explanatory drawing which shows the structure of a prior art. It is explanatory drawing which shows the flow of the calibration / diagnosis process of a prior art.

Explanation of symbols

100 Measurement Device 150 Semiconductor Test Device 110, 151, 210 Controller 120, 152, 220 Execution Processing Storage Device 130, 153, 160, 230 Database 140, 154, 240 Module / Unit Group

Claims (5)

Multiple modules or units to be calibrated or diagnosed, and
An information database for storing information relating to calibration or diagnosis of the plurality of modules or units;
A controller that sets the order of calibration or diagnosis for the plurality of modules or units based on information stored in the information database;
A measuring apparatus comprising: execution means for performing calibration or diagnosis on the plurality of modules or units according to an order set by the controller. Multiple modules or units to be calibrated or diagnosed, and
A configuration database for storing configuration information regarding the configuration of the plurality of modules or units;
A restriction database that stores restriction information regarding calibration or diagnostic restrictions for the plurality of modules or units;
A reference database that stores evaluation parameters defining criteria for calibration or diagnosis sequence of the plurality of modules or units;
A controller that sets an order in which calibration or diagnosis is performed on the plurality of modules or units based on at least one of the configuration information, the restriction information, and the evaluation parameter;
A measuring apparatus comprising: execution means for performing calibration or diagnosis on the plurality of modules or units according to an order set by the controller. The measuring device according to claim 2,
The controller is
Detecting a module or unit that refers to the configuration information or the restriction information and detects a module or unit that does not interfere with the operation of each module or unit by performing calibration or diagnosis in parallel among the plurality of modules or units. Means,
A measurement apparatus comprising: parallel setting means for setting an order so that calibration or diagnosis for modules or units detected by the detection means is performed in parallel. In the measuring device according to claim 2 or 3,
The evaluation parameters stored in the evaluation database include
A parameter indicating an evaluation of a calibration or diagnostic run time for each of the plurality of modules or units;
A parameter indicating an assessment of accuracy achievable with calibration or diagnosis for each of the plurality of modules or units;
And a parameter indicating an evaluation of priority of calibration or diagnosis for each of the plurality of modules or units. The measuring device according to claim 4,
The evaluation apparatus is characterized in that a priority order for setting the order of calibration or diagnosis is added to each parameter of the execution time, accuracy, and priority.

Images