JP2008304215A - Sensor head and displacement measuring instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a displacement measuring instrument with wiring saving, power saving, and small footprint. <P>SOLUTION: Each of a plurality of sensor heads 2 integrally includes in one main unit a light irradiating section 11 for obliquely irradiating an object under measurement with light, a light receiving section 14 for receiving reflected light from the object under measurement associated with the light irradiation, a converting section 15 for converting an optical signal of the light receiving section 14 into a digital signal, a correction data storage section 16 for storing correction data for correction processing, a processing section 17 having a displacement data calculating section 17a for calculating displacement data on the basis of the converted digital signal and a displacement data correcting section 17b for performing correction processing on the displacement data using the correction data, and a displacement data output section 18 for outputting the displacement data after the correction processing and is electrically wired to one control section 3. Each sensor head 2 adds identification information which individually identifies the sensor head 2 itself to the displacement data after the correction processing and outputs it to the control section 3. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  The present invention irradiates the measurement surface of the object to be measured with a predetermined inclination angle, receives reflected light (including scattered light) from the measurement surface of the object to be measured accompanying the irradiation of the light, The present invention relates to a sensor head and a displacement measuring instrument for measuring the amount of displacement of a measurement surface of an object to be measured based on this light receiving state.

  2. Description of the Related Art Conventionally, a displacement measuring instrument is known as an apparatus for measuring the amount of displacement of a measurement surface of an object to be measured based on the principle of triangulation. This displacement measuring device irradiates the measurement surface of the object to be measured with light, and based on the light receiving position of the reflected light detected on the light receiving surface of the position sensor (light receiving element) accompanying this light irradiation, It measures the displacement of the measurement surface.

  As this type of displacement measuring device, for example, one disclosed in Patent Document 1 below is known. FIG. 7 is a block configuration diagram showing an example of a displacement measuring instrument disclosed in Patent Document 1. In FIG. The displacement measuring device 51 shown in FIG. 7 is configured by electrically connecting a sensor head 52 and a processing means 53 to each other. The sensor head 52 includes a light source 55 driven by a light source driving circuit 54, a light projecting lens 56 that irradiates the measurement surface Wa of the object W with the light from the light source 55, and the object W to be measured accompanying the light irradiation. A light receiving lens 57 that condenses the reflected light from the measurement surface Wa, a light receiving element 58 that receives the light condensed by the light receiving lens 57, and a pair that amplifies the light received by the light receiving element 58 by converting it into an electrical signal. Amplifiers 59 and 60. The processing means 53 is a pair of amplifiers 61 and 62 for amplifying signals from the amplifiers 59 and 60 of the sensor head 52, and processes the signals from the amplifiers 61 and 62 to displace the measurement surface Wa of the workpiece W. And an arithmetic means 63 for measuring the quantity.

  In the displacement measuring device 51, when the light from the light source 55 driven by the light source driving circuit 54 is narrowed down by the light projection lens 56 and the light is irradiated from the sensor head 52 to the measurement surface Wa of the object W, the measurement surface Wa. A light spot is formed on the surface. Light reflected from the light spot (including scattered light) is collected by the light receiving lens 57 of the sensor head 52, and an image of the light spot is formed on the position sensor as the light receiving element 58. This image moves on the position sensor when the workpiece W is displaced. As a result, a current corresponding to the position and brightness of the image is output from the position sensor. This output current is output to the processing means 53 after voltage conversion. In the processing means 53, the analog voltage signal from the sensor head 52 is amplified by the amplifiers 61 and 62 and converted into a digital signal, and then input to the arithmetic means 63. The arithmetic means 63 generates a sum and difference signal to divide. Then, the amount of displacement of the measurement surface Wa of the workpiece W is measured by performing a correction process on the divided result.

  Applications of this type of displacement measuring instrument include measuring the warpage and undulation of the measurement object, measuring the distance between the moving mechanism and the measurement object, and controlling the movement amount based on the measured value. However, when there are many places and areas to be measured as well as when it is necessary to measure multiple places at the same time, in order to reduce the time required for measurement, multiple displacement measuring instruments are installed and Often shared. This can be said to be a remarkable tendency when the measurement object is larger or when the displacement measuring device is used in an apparatus having a plurality of moving mechanisms.

  For example, when this type of displacement measuring device 51 is employed in a liquid crystal display panel manufacturing apparatus, a sensor head 52 is attached to each of a plurality of nozzles for injecting an adhesive for bonding a glass substrate. The processing means 53 is electrically connected by a cable for every 52, and each processing means 53 is electrically connected by a cable to a terminal device (such as a personal computer) serving as an external host. In manufacturing a liquid crystal display panel, an adhesive is sprayed and applied from one nozzle to one outer peripheral portion of two glass plates cut to a predetermined size. The distance between the two glass plates is kept constant, and the outer peripheral portions thereof are bonded together with an adhesive, and then the liquid crystal is injected into the space portion between the two glass plates.

Here, in order to measure the displacement amount of the distance from each nozzle to the glass plate surface, the sensor head 52 provided for each nozzle projects light onto the glass plate as the object W to be measured. Reflected light (including scattered light) from the surface of the glass plate due to this light projection is collected by the light receiving lens 57 to form an image of a light spot on the position sensor, and the position and brightness of the image from the position sensor. The current corresponding to the voltage is converted into a voltage and output to the corresponding processing means 53. Each processing means 53 amplifies the voltage signal from the corresponding sensor head 52 and converts it into a digital signal, then creates and divides the sum and difference signals, and performs a correction process on the result for each nozzle. The height between the glass plate is measured, and the measurement result is sent to the terminal device. And the application quantity of the adhesive agent was managed by controlling the distance of each nozzle and a glass substrate according to the measurement result sent to the terminal device.
JP 11-237208 A

  However, in the conventional displacement measuring instrument 51 disclosed in Patent Document 1, a plurality of sensor heads 52 are individually connected to the processing means 53 in a one-to-one correspondence, and each processing means 53 is connected via a parallel I / O. Therefore, the number of wires is increased by the number of sensor heads 52, and the connection between the sensor head 52 and the processing means 53 is troublesome.

  Further, in the conventional displacement measuring instrument 51, it is necessary to configure the sensor head 52 and the processing means 53 as a pair, and the displacement data cannot be obtained by the sensor head 52 alone. Further, since the sensor head 52 and the processing unit 53 are paired, the same number of processing units 53 as the sensor heads 52 are required, and there is a problem that power consumption by the processing unit 53 increases. Moreover, in order to install the same number of processing means 53 as the sensor heads 52, it is necessary to secure a sufficient installation space, and there is a problem that the occupied space of the apparatus becomes large.

  Further, when the sensor heads 52 are added, it is necessary to connect the processing means 53 to the terminal device after connecting the sensor heads 52 and the processing means 53 corresponding to the number to be added in a one-to-one correspondence. It was.

  Therefore, the present invention has been made in view of the above problems, and provides a sensor head capable of obtaining displacement data in a single configuration, and when using a plurality of the sensor heads, wiring saving, power saving, It aims at providing the displacement measuring device which can aim at space saving.

In order to achieve the above object, a sensor head according to claim 1 of the present invention includes a light irradiation unit 11 that irradiates light to the measurement surface Wa of the workpiece W with a predetermined inclination angle;
A light receiving unit 14 that receives reflected light from the measurement surface of the object to be measured accompanying light irradiation of the light irradiation unit;
A conversion unit 15 that converts an optical signal from the light receiving unit into a digital electric signal;
A correction data storage unit 16 for storing correction data used in the correction process;
A displacement data calculation unit 17a that calculates displacement data based on a digital electrical signal from the conversion unit, and a displacement data correction unit 17b that performs correction processing on the displacement data using correction data stored in the correction data storage unit. A processing unit 17 having,
A displacement data output unit 18 for outputting the displacement data after the correction processing is provided integrally with the main body.

A displacement measuring device according to claim 2 comprises a plurality of sensor heads 2 according to claim 1,
The displacement measuring device 1 in which the plurality of sensor heads are electrically connected to one control unit 3,
Each of the plurality of sensor heads adds identification information for identifying the sensor head of the plurality of sensor heads to the displacement data after the correction process, and outputs the information to the control unit.

The displacement measuring device according to claim 3 is the displacement measuring device according to claim 2,
The control unit 3 includes a data holding unit 3a that holds displacement data after correction processing to which the identification information from the plurality of sensor heads 2 is added,
And a data transmission unit 3b for transmitting data held in the data holding unit in accordance with a request from the external host 4.

The displacement measuring device according to claim 4 is the displacement measuring device according to claim 2 or 3,
The control unit 3 includes a display unit 3e that performs display related to displacement measurement by the plurality of sensor heads 2.

  According to the present invention, it is possible to provide a sensor head that does not require wiring connection with a conventional processing means, and to obtain displacement data in a single configuration. In addition, according to the displacement measuring instrument of the present invention, a plurality of sensor heads can be controlled simultaneously by a single control unit, and space saving, wiring saving, and power saving can be achieved as compared with the prior art.

  Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings. 1 is a block diagram of a displacement measuring instrument including a sensor head according to the present invention, FIG. 2 is a block diagram of a sensor head according to the present invention, FIG. 3 is an external view of the sensor head according to the present invention, and FIG. FIG. 5 is an external front view showing an example of a control unit of a displacement measuring instrument according to the present invention, and FIG. 6 is an external rear view of the control unit of FIG.

As shown in FIG. 1, in the displacement measuring instrument 1 of this example, a plurality of sensor heads 2 (2 ₋₁ , 2 ₋₂ ,..., 2 _−n ) are electrically connected to one control unit 3. It is the structure which was made. The control unit 3 of the displacement measuring instrument 1 is connected to a terminal device 4 as an external host so as to communicate with each other.

As shown in FIG. 3, each of the plurality of sensor heads 2 (2 ₋₁ , 2 ₋₂ ,..., 2 _−n ) has a cable 2b drawn out from the end of the head body 2a that is made into a small unit. The cable 2b is detachably wired to the control unit 3 via the connector 2c at the tip of the cable 2b.

Each sensor head 2 (2 ₋₁ , 2 ₋₂ ,..., 2 _−n ) is arranged in accordance with the measurement location of the workpiece W, and as shown in FIG. A lens 12, an imaging lens 13, a light receiving unit 14, a conversion unit (O / E, A / D) 15, a correction data storage unit 16, a processing unit 17, and a displacement data output unit 18 are provided.

  As shown in FIG. 3, the light irradiation unit 11 emits a light beam (projection beam) with a predetermined inclination angle θ with respect to the measurement surface Wa of the workpiece W. As shown in FIG. 4, the light beam (projection beam) emitted from the light irradiation unit 11 is narrowed by the projection lens 12 and the surface of the object W to be measured at a predetermined distance L0 from the front end surface 2aa of the head body 2a. Irradiation with respect to Wa is performed at a predetermined inclination angle, and an irradiation point is formed at the reference position P.

  The light receiving unit 14 includes a light detection element called a position sensor, and the reflected light (from the measurement surface Wa of the object W to be measured accompanying the irradiation of the light beam from the light irradiation unit 11 to the measurement surface Wa of the object W to be measured ( (Including scattered light) is received through the imaging lens 13.

  More specifically, as shown in FIG. 4, the light receiving unit 14 is a light beam (reflected beam) reflected (including scattered) from an irradiation point associated with the irradiation of the light beam from the light irradiation unit 11 through the projection lens 12. ) Is condensed by the imaging lens 13, and an image of the irradiation point is formed at a position on the light detection element. When the object to be measured W moves up and down, this image moves on the light detection element and outputs an optical signal corresponding to the amount of movement. That is, as shown in FIG. 4, when the light beam irradiation point position is at a position Q higher by ΔL than the reference position P, the light receiving unit 14 outputs an optical signal corresponding to the displacement distance + ΔL. On the other hand, when the irradiation point position of the light beam is at a position R lower than the reference position P by ΔL, an optical signal corresponding to the displacement distance −ΔL is output.

  The conversion unit 15 is an optical / electrical conversion unit (O / E) that converts an optical signal corresponding to the displacement distance from the light receiving unit 14 into an analog electrical signal, and an analog electrical signal converted by the optical / electrical conversion unit. An A / D converter that converts the signal into a digital electrical signal, and the digital electrical signal is input to the processing unit 17.

  The correction data storage unit 16 stores various correction data used in correction processing, such as linearity correction data.

  The linearity correction data is difference data from the true value, and is added to the displacement data to obtain an accurate measurement value. The true value mentioned here is a value of a length measuring instrument with higher accuracy than the displacement measuring instrument 1 of this example, such as a laser interferometer, and the differential data is measured in advance with a dedicated jig. It is stored in the correction data storage unit 16.

  In this example, the displacement data after the correction processing is data after statistical processing such as simple average processing and moving average processing is performed.

  The processing unit 17 includes a displacement data calculation unit 17a and a displacement data correction unit 17b. The displacement data calculation unit 17a calculates displacement data from the digital electrical signal converted by the conversion unit 15 by a known method disclosed in Patent Document 1 described above.

  The displacement data correction unit 17 b corrects the displacement data calculated by the displacement data calculation unit 17 a based on the correction data stored in the correction data storage unit 16.

  The displacement data output unit 18 adds specific identification information to the displacement data after the correction processing corrected by the displacement data correction unit 17b of the processing unit 17. This identification information is header information for specifying which sensor head 2 the displacement data relates to. For example, data obtained by binarizing the head number of each sensor head 2 (for example, head number 1 = 0000, head number 2). = 0001, head number 3 = 0010, etc.). The displacement data after correction processing to which the identification information is added as header information is sent to the control unit 3 by serial communication synchronized with a clock signal given from the control unit 3 at a predetermined cycle.

  Next, the control unit 3 includes a housing 21 as shown in FIGS. 5 and 6 as a main body. As shown in FIG. 6, a sensor head connecting portion 22 for electrically connecting a plurality of sensor heads 2 to one control portion 3 is provided on the rear surface 21 a of the housing 21.

  More specifically, in the example of FIG. 6, a total of nine sensor head connecting portions 22 are provided side by side with four in the upper stage of the back surface 21 a of the casing 21 and five in the lower stage. Connection is possible. In addition, on the rear surface 21a of the housing 21, an external device connection unit 23 made of, for example, a USB terminal is provided for electrical wiring connection between the control unit 3 and the terminal device 4 as an external host. Further, a power terminal 25 is provided on the rear surface 21a of the housing 21 to receive power for supplying driving power to each unit of the control unit 3 when the power switch 24 provided on the front surface 21b of the housing 21 is turned on. Is provided.

  As shown in FIG. 1, the control unit 3 having the casing 21 as a main body includes a data holding unit 3a, a data transmission unit 3b, a reception unit 3c, a display control unit 3d, a display unit 3e, and a sensor head selection unit 3f. ing.

  The data holding unit 3a holds data acquired from each sensor head 2 (displacement data after correction processing with identification information added). More specifically, the data holding unit 3a is equipped with, for example, an FPGA (Field Programmable Gate Array), and simultaneously gives a clock signal to each sensor head 2 in a predetermined cycle, and serially outputs displacement data of each sensor head 2 in synchronization with this. The numerical data of the parallel image is held in a register by communication, and the displacement data from each sensor head 2 is serial / parallel converted and latched.

  When the transmission request command is input from the terminal device 4 as an external host, the data transmission unit 3b holds the displacement data of the sensor head 2 based on the selection signal from the sensor head selection unit 3f in the data holding unit 3a. The data is read from the register and transmitted to the terminal device 4. The data size of the displacement data transmitted to the terminal device 4 is constant, and the displacement data of the unused channel is rewritten to 0 and transmitted to the terminal device 4.

  The receiving unit 3c receives various commands (such as a transmission request command and commands for various conditions described later) from the terminal device 4 as an external host.

  The display control unit 3d performs various display controls on the display unit 3e in accordance with the displacement measurement result of each sensor head 2 (data content held in the data holding unit 3a).

  The display unit 3e is provided on the front surface 21b of the housing 21 and is configured by arranging light emitting elements such as LEDs at predetermined intervals. The display unit 3e performs various displays related to displacement measurement by the sensor head 2, such as a displacement amount, a light reception amount, an alarm, and a selected channel. More specifically, the display unit 3e in the example of FIG. 5 has four display areas: a displacement amount display area 31, a received light amount display area 32, an alarm display area 33, and a selected channel display area.

  In the displacement amount display area 31, as shown in FIG. 5, nine light emitting elements are arranged at equal intervals. On the outside of the two light emitting elements arranged at both ends of these nine light emitting elements, there is a “FAR” alarm indicating that the full scale on the negative side of the measurement range has been exceeded, and a full scale on the positive side of the measurement range. An index character for the “NEAR” alarm indicating that it has been exceeded is provided. In this displacement amount display area 31, with respect to the sensor head 2 of one channel selected by the sensor head selection unit 3f, an index of the “FAR” alarm when the displacement data value exceeds the full scale on the minus side of the measurement range. When the light emitting element adjacent to the character (the light emitting element at the left end in FIG. 5) is turned on and the displacement data value exceeds the full scale on the plus side of the measurement range, the light emitting element adjacent to the index character of the “NEAR” alarm ( When the displacement data value is within the measurement range, the light emitting element at the position corresponding to the case where the measurement range is divided into seven by the remaining seven light emitting elements in the center is turned on. Yes.

  When all the sensor heads 2 are selected, the light emitting elements are turned on in accordance with the preset displacement amount of the representative channel (for example, CH1), thereby reducing the displacement amount of the representative channel. it's shown.

  As shown in FIG. 5, nine light emitting elements are arranged at equal intervals in the received light amount display region 32 in parallel with the displacement amount display region 31. On the outside of the two light emitting elements arranged at both ends of the nine light emitting elements, a “DARK” alarm indicating that the amount of received light obtained from the measurement target is small and below a preset threshold, and the measurement target Is provided with an “OVER” alarm indicator character indicating that the amount of received light obtained from the above is large and exceeds the input level allowed by the converter 15. In the received light amount display area 32, the sensor head 2 of one channel selected by the sensor head selection unit 3f is adjacent to the index character of the “DARK” alarm when the received light amount is small and is equal to or less than a preset threshold value. When the light emitting element (the leftmost light emitting element in FIG. 5) is lit, the received light amount is large, and the input level allowed by the conversion unit 15 is exceeded, the light emitting element adjacent to the “OVER” alarm indicator character (the rightmost light emitting in FIG. 5) When the light receiving amount is larger than the threshold value and smaller than the input level allowed by the conversion unit 15, the remaining seven light emitting elements in the center are lighted in a bar graph according to the light receiving amount.

  In the alarm display area 33, as shown in FIG. 5, the light emitting elements correspond to the channel displays “CH1”, “CH2”,..., “CH9” on the right side of the index character “ALARM” indicating the alarm. Nine are arranged in the position. In this alarm display area 33, the light emitting element corresponding to the channel where the abnormality has occurred is displayed in a lit state.

  In the selected channel display area 34, as shown in FIG. 5, the light emitting elements are displayed on the right side of the index character “SELECT” indicating the selected channel in parallel with the alarm display area 33, and the respective channel displays “CH1”, “CH2”. ,..., 9 are arranged at positions corresponding to “CH9”. In the selected channel display area 34, the light emitting element corresponding to the channel (corresponding to the head number) of the sensor head 2 selected by a request from the sensor head selection unit 3f or the terminal device 4 as an external host is lit up. .

  In the example of FIG. 5, each display area is configured by arranging light emitting elements at equal intervals. However, the display is configured such that the amount of displacement, the amount of received light, the channel in which the alarm is generated, and the selected channel are individually displayed as numerical values. You may do it. At that time, the amount of displacement and the amount of received light of all the selected channels can be displayed numerically.

  The sensor head selection unit 3f selects a desired sensor head from the plurality of sensor heads 2, and outputs a selection signal indicating the sensor head 2 to be selected to the data transmission unit 3b. In the example of FIG. 5, the sensor head selection unit 3 f is configured by a rotary switch disposed at a substantially central lower portion of the front surface 21 b of the housing 21. In the sensor head selection unit 3f by the rotary switch, the sensor head 2 is selected by matching the arrow of the operation unit with either the symbol F or the numbers 1-9. For example, when the arrow of the operation unit is set to the number “3”, a selection signal is output to the data transmission unit 3b so as to select the sensor head 2 connected to “CH3”. Further, when the arrow of the operation unit is set to the symbol “F”, a selection signal is output to the data transmission unit 3b so as to select all the sensor heads 2 connected to “CH1” to “CH9”. . The sensor head selection unit 3f is not limited to the rotary switch shown in FIG.

  Next, the terminal device 4 as an external host is configured by a personal computer or the like, for example, and is connected to the external device connection unit 23 of the control unit 3 by wiring to enable high-speed serial communication with the control unit 3. When the terminal device 4 acquires the displacement data from the control unit 3, the terminal device 4 outputs a displacement data transmission request command to the control unit 3, and the displacement data transmitted from the control unit 3 in response to the transmission request command is output. Have acquired. The acquired displacement data for each sensor head 2 is collectively managed. Further, the terminal device 4 sends various conditions (for example, channel selection of the sensor head 2 to be used, average number of displacement data processing, alarm output conditions, selection of representative channels, displacement data display) to each sensor head 2 and the control unit 3. Send command in command format as necessary.

  Next, a series of operations when measuring the amount of displacement of the workpiece W using the displacement measuring instrument 1 having the above configuration will be described. When a light beam (projection beam) is emitted from the light irradiation unit 11 of the sensor head 2 to the measurement surface Wa of the measurement object W through the projection lens 12, the measurement object W is emitted along with the emission of the light beam. Reflected light (including scattered light) from the measurement surface Wa is received by the light receiving unit 14 through the imaging lens 13. The light received by the light receiving unit 14 is converted into an analog electrical signal corresponding to the amount of received light by the conversion unit (O / E, A / D) 15, and this analog electrical signal is further converted into a digital electrical signal. To the processing unit 17.

  In the processing unit 17, the displacement data calculation unit 17 a calculates displacement data (displacement amount) from the digital electric signal converted by the conversion unit 15. The displacement data correction unit 17b corrects the calculated displacement data based on the correction data stored in the correction data storage unit 16. The above processing is performed for each sensor head 2.

  Thereafter, the displacement data after correction processing in each sensor head 2 is a displacement data output unit in synchronization with a clock signal given at a predetermined cycle from the control unit 3 as fixed-length data to which identification information (head number) is given. 18 and held in the data holding unit 3a of the control unit 3. Then, when the receiving unit 3c receives the transmission request command from the terminal device 4 which is an external host, the control unit 3 receives the corrected displacement data held in the data holding unit 3a from the data sending unit 3b via the high-speed serial number. It transmits to the terminal device 4 by communication.

  In addition, various displays based on the displacement measurement results of the sensor heads 2 described above are made in the display areas 31, 32, 33, and 34 of the display unit 3e of the control unit 3. That is, in the displacement amount display area 31, the light emitting element is turned on according to the displacement amount of the sensor head 2 of one selected channel or representative channel, and the displacement amount is displayed in a bar graph. In the received light amount display area 32, the light emitting element is turned on according to the saturation level of the selected one channel or the sensor head 2 of the selected channel according to the saturation level, and the received light amount is displayed in a bar graph. In the alarm display area 33, the light emitting element corresponding to the channel where the abnormality has occurred is turned on and an alarm is displayed. In the selected channel display area 34, the light emitting element corresponding to the selected channel is turned on, and the selected channel is displayed.

  And when the displacement measuring instrument 1 of this example is employ | adopted for the manufacturing system of the liquid crystal display panel mentioned above, based on the displacement data of the several sensor head 2 which the terminal device 4 acquired from the control part 3, one by one The ejection amount of the adhesive can be controlled for each nozzle to which the sensor head 2 is attached.

  Thus, according to this example, it is possible to provide a sensor head that does not require wiring connection with a conventional processing means. In addition, the displacement data can be obtained by measuring the displacement of the object to be measured with the single sensor head configuration.

  According to the displacement measuring instrument of this example, in addition to the above effects, a plurality of sensor heads can be simultaneously controlled by a single control unit, and space saving, wiring saving, and power saving can be achieved compared to the conventional case. it can. In addition, when adding sensor heads, in the conventional configuration, it is necessary to wire-connect each processing means to the terminal device after connecting the number of sensor heads and processing means to be added in a one-to-one correspondence. However, according to the configuration of this example, the sensor heads can be added by simply connecting the number of sensor heads to be added to one control unit by cable connection.

  In addition, the displacement measuring instrument of this example displays various amounts of displacement, received light, alarm, and selected channel based on the displacement measurement results of each sensor head, so the status of each sensor head can be checked visually with these displays. can do.

  By the way, the displacement measuring instrument 1 of this example is not limited to the height measurement from each of the plurality of nozzles to the glass plate in the above-described liquid crystal display panel manufacturing system, and for example, the sensor head 2 is used as an object to be measured (for example, semiconductor silicon wafer). It is arranged on the surface of the object to measure the flatness of the surface of the object to be measured, the sensor head 2 is disposed so as to be sandwiched from the front and back surfaces of the object to be measured, and the thickness of the object to be measured is measured. It can be applied to various measurement fields such as measurement of the distance that the contact of the contactor moves up and down.

It is a block block diagram of the displacement measuring device containing the sensor head which concerns on this invention. It is a block block diagram of the sensor head concerning this invention. It is an external view of the sensor head concerning the present invention. It is explanatory drawing of the displacement detection principle of the sensor head concerning this invention. It is an external appearance front view which shows an example of the control part of the displacement measuring device which concerns on this invention. It is an external appearance rear view of the control part of FIG. It is a block block diagram which shows an example of the conventional displacement measuring device disclosed by patent document 1. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Displacement measuring device 2 (2 _{< -1>} , 2 _<-2> , ..., 2- _n ) Sensor head 3 Control part 3a Data holding part 3b Data transmission part 3c Reception part 3d Display control part 3e Display part 3f Sensor head selection part 4 Terminal device (external host)
DESCRIPTION OF SYMBOLS 11 Light irradiation part 12 Projection lens 13 Imaging lens 14 Light-receiving part 15 Conversion part (O / E, A / D)
16 Correction Data Storage Unit 17 Processing Unit 17a Displacement Data Calculation Unit 17b Displacement Data Correction Unit 18 Displacement Data Output Unit 31 Displacement Amount Display Area 32 Received Amount Display Area 33 Alarm Display Area 34 Selected Channel Display Area

Claims (4)

A light irradiation section (11) for irradiating light onto a measurement surface (Wa) of an object to be measured (W) having a predetermined inclination angle;
A light receiving unit (14) for receiving reflected light from the measurement surface of the object to be measured accompanying light irradiation of the light irradiation unit;
A converter (15) for converting an optical signal from the light receiving unit into a digital electric signal;
A correction data storage unit (16) for storing correction data used in the correction process;
A displacement data calculation unit (17a) that calculates displacement data based on a digital electrical signal from the conversion unit, and a displacement data correction unit that corrects the displacement data using correction data stored in the correction data storage unit ( 17b), a processing unit (17),
A sensor head, comprising a displacement data output unit (18) for outputting displacement data after the correction processing, integrally with the main body. A plurality of sensor heads (2) according to claim 1,
A displacement measuring device (1) in which the plurality of sensor heads are electrically connected to one control unit (3),
The plurality of sensor heads add identification information for individually identifying their own sensor heads to the displacement data after the correction processing and output the displacement data to the control unit. The control unit (3) includes a data holding unit (3a) that holds displacement data after correction processing to which the identification information from the plurality of sensor heads (2) is added,
The displacement measuring device according to claim 2, further comprising a data transmission unit (3b) for transmitting data held in the data holding unit in accordance with a request from an external host (4). The displacement measuring device according to claim 2 or 3, wherein the control unit (3) includes a display unit (3e) for performing display related to displacement measurement by the plurality of sensor heads (2).

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