JP2008227164A - Laser processing apparatus and laser processing method - Google Patents

Abstract

An object of the present invention is to obtain a good machined surface by suppressing the influence of vibration of a laser machining apparatus and so-called thermal lens effect.
A laser processing device includes a laser oscillator, a regulator, a monotonization device, a measuring device, a beam wedge, and a control device. The measuring device 310 measures the intensity of the laser light. The control device 312 calculates a plurality of types of values regarding the intensity of the laser beam in a plurality of portions of the region irradiated with the laser beam, and individually determines whether the plurality of types of values satisfy the requirements. The first control signal and the second control signal having contents corresponding to which value among the plurality of types of values satisfy the requirement are generated.
[Selection] Figure 1

Description

  The present invention relates to a laser processing apparatus and a laser processing method, and more particularly to a laser processing apparatus and a laser processing method capable of controlling the direction of laser light reaching from a light source.

  Patent Document 1 discloses a laser optical system including a diffractive optical element having a function of branching a laser beam into a plurality of beams within a certain range, and a condensing lens provided subsequent to the diffractive optical element. In the laser optical system disclosed in Patent Document 1, an image plane is set on a defocus surface out of the focus of a condenser lens, and beams split by a diffractive optical element are combined on the defocus surface to form a desired one. Get the intensity distribution.

  According to the invention disclosed in Patent Document 1, a laser beam having various cross-sectional shapes can be converted into a top hat type laser beam having a constant power density in a desired region.

  Non-Patent Document 1 sets the intensity distribution of an incident beam and DOE (Diffractive Optical Elements), that is, the surface shape of the diffractive optical element, predicts the distribution of the beam output from the diffractive optical element, and predicts the beam A method for designing the surface shape of a diffractive optical element is disclosed in which the intensity distribution of the incident beam and the surface shape of the diffractive optical element are changed based on the distribution of

According to the invention disclosed in Non-Patent Document 1, the surface shape of the diffractive optical element can be optimized in a short time.
JP 2003-114400 A Takayuki Hirai and three others, “Development of diffraction beam homogenizer”, SEI Technical Review, Sumitomo Electric Industries, Ltd., March 2005, No. 166, p. 14-18

  However, in the invention disclosed in Patent Document 1, when the position where the incident beam enters the diffractive optical element and the difference in the incident beam are not optimized, the distribution of the beam output from the diffractive optical element is the top. There is a problem that it does not become a hat type. On the other hand, the position where the incident beam is incident on the diffractive optical element and the difference between the incident beams (in the following description, “difference” refers to a region from one point on the outer periphery of the region where the laser beam is projected to the region of the region. The length of a straight line up to one point on the outer periphery facing each other across the center) frequently fluctuates due to vibration of the laser processing apparatus, the so-called thermal lens effect, and the like. This means that the distribution of the beam output from the diffractive optical element frequently fluctuates. The fact that the distribution of the beam output from the diffractive optical element fluctuates frequently means that a good processed surface may not be obtained when processing is performed with the beam output from the diffractive optical element. To do.

  Of the errors in the position where the incident beam enters the diffractive optical element, the error that affects the distribution of the beam output from the diffractive optical element is about 10 micrometers or more. This means that the influence of the vibration of the laser processing apparatus and the so-called thermal lens effect must be suppressed so that the error in the position where the incident beam enters the diffractive optical element is less than about 10 micrometers. To do.

  In Non-Patent Document 1, the distribution of the beam output from the diffractive optical element may not be a top-hat type when the position where the incident beam is incident on the diffractive optical element and the passing of the incident beam are not optimized. It has been pointed out. However, Non-Patent Document 1 does not disclose any measures for suppressing the influence of vibration of the laser processing apparatus and the so-called thermal lens effect. In the first place, Non-Patent Document 1 does not describe that the distribution of the beam output from the diffractive optical element fluctuates due to the vibration of the laser processing apparatus or the so-called thermal lens effect.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to obtain a good machined surface by suppressing the influence of vibration of the laser machining apparatus and the so-called thermal lens effect. Another object is to provide a laser processing apparatus and a laser processing method.

  In order to achieve the above object, according to an aspect of the present invention, a laser processing apparatus includes a light emitting means, an adjusting means, a monotonizing means, a measuring means, a guiding means, and a control means. The light emitting means emits laser light. The adjusting means adjusts the irradiation area of the laser beam. The monotonization means monotonizes the distribution of the intensity of the laser beam with respect to the distance from the optical axis using the diffractive optical element. The measuring means receives the irradiation of the laser light whose adjusting means adjusts the irradiation area and the monotonizing means monotonizes the intensity distribution, and determines the intensity of the laser light in each of the plurality of portions of the region irradiated with the laser light. taking measurement. The guiding means guides the laser beam to which the adjusting means adjusts the irradiation area and the monotonizing means monotonizes the intensity distribution to the workpiece. The control means controls the adjusting means and the monotonizing means based on the intensity of the laser beam measured by the measuring means. The control means includes input means, storage means, output means, and processing means. The input means inputs intensity information, which is information indicating the intensity of the laser light and the positions of the plurality of portions in the plurality of portions of the region irradiated with the laser light. The storage means stores intensity information. The output means outputs the first control signal and the second control signal to the adjustment means and the monotonization means. The first control signal is a control signal representing movement of the monotonizing means. The second control signal is a control signal representing a change in the irradiation area of the laser beam. The processing means processes the intensity information. The processing means includes correspondence value calculation means, individual determination means, and signal generation means. The corresponding value calculation means calculates a plurality of types of values related to the intensity of the laser beam in a plurality of portions of the region irradiated with the laser beam. The individual determination means individually determines whether or not a plurality of types of values satisfy the requirement. The signal generating means generates a first control signal and a second control signal having contents corresponding to which value among the plurality of types of values satisfies the requirement.

  Further, it is preferable that the above-described corresponding value calculation means includes a trend calculation means and a means for calculating a distribution value. The trend calculation means calculates a trend value. The tendency value represents a tendency of the intensity of the laser light in the plurality of portions of the region irradiated with the laser light with respect to the arrangement of the plurality of portions, and the magnitude corresponds to the influence of the arrangement on the intensity. The means for calculating the distribution value calculates the distribution value. The distribution value is a value representing the distribution of the intensity of the laser beam in a plurality of portions of the region irradiated with the laser beam. In addition, it is desirable that the individual determination unit includes a range determination unit and a determination unit. The range determination means determines whether or not the tendency value is out of the range from the first threshold value to the second threshold value which is a threshold value lower than the first threshold value. The means for determining determines whether or not the distribution value satisfies the requirement for the distribution value. In addition, it is desirable that the signal generation means includes a position signal generation means and a means for generating the second control signal. When the trend value is out of the range from the first threshold value to the second threshold value, the position signal generation means has a first content corresponding to the relationship between the trend value and the range from the first threshold value to the second threshold value. Control signal is generated. The means for generating the second control signal generates the second control signal when the distribution value satisfies the requirement for the distribution value.

  Alternatively, it is desirable that the above-described tendency calculation unit includes a midpoint calculation unit, a center of gravity calculation unit, and a coordinate calculation unit. The midpoint calculating means calculates the midpoint of any difference of the laser light received by the measuring means based on the intensity information. The center-of-gravity calculation means calculates the center of gravity of the laser beam intensity in the difference where the midpoint calculation means has calculated the midpoint based on the intensity information. The coordinate calculation means calculates a value corresponding to the relative coordinate of the center of gravity with respect to the midpoint as the tendency value.

  Further, it is desirable that the above-described corresponding value calculation means includes means for calculating a value representing a tendency of the intensity of the laser light and intensity calculation means. The means for calculating the value indicating the tendency of the intensity of the laser light calculates a value indicating the tendency of the intensity of the laser light with respect to the arrangement of a plurality of portions in the region irradiated with the laser light. The intensity calculating means is located inside the area where the measuring means is irradiated with the laser beam, and the sum of the laser beam intensities inside the boundary surrounding the center of the area and outside the boundary. And the total sum of the intensities of the laser beams in the portion at (2). In addition, it is desirable that the individual determination means includes a means for determining whether or not the requirement is satisfied and a requirement determination means. The means for determining whether or not the requirement is satisfied determines whether or not the value indicating the tendency of the intensity of the laser light satisfies the requirement regarding the value indicating the tendency of the intensity of the laser light. The requirement determining unit determines whether or not the two types of sums calculated by the strength calculating unit satisfy a size relationship requirement. In addition, it is desirable that the signal generating means includes means for generating the first control signal and distance signal generating means. The means for generating the first control signal includes a content corresponding to the tendency of the intensity of the laser beam when the value representing the tendency of the intensity of the laser beam satisfies the requirement for the value representing the tendency of the intensity of the laser beam. The first control signal is generated. The distance signal generating means generates a second control signal having contents corresponding to the magnitude relation requirement when the two types of sums satisfy the magnitude relation requirement.

  Alternatively, the requirement determining means described above has a positive intensity difference, which is a value obtained by subtracting the total sum of the laser beam intensities in the portion outside the boundary from the total sum of the laser beam intensities in the portion inward of the boundary. It is desirable to include means for determining whether or not the threshold value is a third threshold value that is a threshold value. In addition, it is desirable that the distance signal generating means includes means for generating a second control signal representing an enlargement of the irradiation area of the laser light when the intensity difference is equal to or greater than the third threshold value.

  Alternatively, the above-described requirement determining means has a negative intensity difference, which is a value obtained by subtracting the total sum of the intensity of the laser beams in the portion outside the boundary from the total sum of the intensity of the laser beams in the portion inside the boundary. It is desirable to include means for determining whether or not the threshold value is a fourth threshold value or less. In addition, it is desirable that the distance signal generating means includes means for generating a second control signal representing a reduction in the irradiation area of the laser light when the intensity difference is equal to or smaller than the fourth threshold value.

  Alternatively, it is desirable that the above-described intensity information includes information indicating the intensity of the laser beam and the positions of a plurality of portions in any part of the region that has been irradiated with the laser beam. In addition, it is desirable that the intensity calculating means includes a midpoint calculating means, a first sum calculating means, and a second sum calculating means. The midpoint calculation means calculates the midpoint of the passing based on the positions of the two portions where the distance is the maximum among the portions on the passing where the intensity of the laser light is equal to or greater than the fifth threshold. The first sum total calculating means calculates the sum of the intensities of the laser beams in a portion where the distance from the passing middle point is equal to or less than the sixth threshold value. The second sum total calculating means calculates the sum of the intensities of the laser beams in a portion where the distance from the passing midpoint exceeds the sixth threshold value.

  Alternatively, the intensity calculation means described above may include the sum of the laser beam intensities and the outer portion of the boundary at the inner side of the boundary during the period in which the generation of the first control signal is stopped. It is desirable to include means for calculating the sum of the intensities of the laser beams.

  The monotonization means described above preferably includes means for monotonizing the intensity distribution of the laser light whose adjustment area has been adjusted by the adjustment means.

  The monotonization means described above preferably includes a diffractive optical element, a moving means, and a means for controlling the moving means. The moving means moves the position of the diffractive optical element. The means for controlling the moving means controls the moving means according to the content of the first control signal.

  Moreover, it is desirable that the adjusting means described above includes two lenses, a changing means, and a means for controlling the changing means. The changing means changes the distance between the two lenses in a state of being opposed so that the optical axes are the same. The means for controlling the changing means controls the changing means according to the content of the second control signal.

  According to another aspect of the present invention, the laser processing method is a laser processing method using a laser processing apparatus. The laser processing apparatus includes a light emitting unit, an adjusting unit, a monotonizing unit, a measuring unit, a guiding unit, and a control unit. The light emitting means emits laser light. The adjusting means adjusts the irradiation area of the laser beam. The monotonization means monotonizes the distribution of the intensity of the laser beam with respect to the distance from the optical axis using the diffractive optical element. The measuring means receives the irradiation of the laser light whose adjusting means adjusts the irradiation area and the monotonizing means monotonizes the intensity distribution, and determines the intensity of the laser light in each of the plurality of portions of the region irradiated with the laser light. taking measurement. The guiding means guides the laser beam to which the adjusting means adjusts the irradiation area and the monotonizing means monotonizes the intensity distribution to the workpiece. The control means controls the adjusting means and the monotonizing means based on the intensity of the laser beam measured by the measuring means. The control means includes input means, storage means, output means, and processing means. In the input means, the measurement means inputs the intensity information. The intensity information is information representing the intensity of the laser beam and the position of the plurality of portions in the plurality of portions of the region irradiated with the laser beam. The storage means stores intensity information. The output means outputs the first control signal and the second control signal to the adjustment means and the monotonization means. The first control signal is a control signal representing movement of the monotonizing means. The second control signal is a control signal representing a change in the irradiation area of the laser beam. The processing means processes the intensity information. The laser processing method includes a corresponding value calculation step, an individual determination step, and a signal generation step. In the corresponding value calculating step, the processing means calculates a plurality of types of values related to the intensity of the laser beam in a plurality of portions of the region irradiated with the laser beam. In the individual determination step, it is determined individually by the processing means whether or not a plurality of types of values satisfy the requirement. In the signal generation step, the processing means generates a first control signal and a second control signal having contents corresponding to which value among the plurality of types of values satisfies the requirement.

  The laser processing apparatus and the laser processing method according to the present invention can obtain a good processed surface by suppressing the influence of vibration of the laser processing apparatus and the so-called thermal lens effect.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the same parts are denoted by the same reference numerals. Their names and functions are also the same. Therefore, detailed description thereof will not be repeated.

  FIG. 1 is a diagram illustrating a configuration of a laser processing apparatus 30 according to the present embodiment. Referring to FIG. 1, the laser processing apparatus 30 includes a laser oscillator 302, an adjuster 304, a monotonization device 306, a beam wedge 308, a measuring device 310, a control device 312, and a table 314. The laser oscillator 302 emits laser light. The adjuster 304 adjusts the irradiation area of the laser light emitted from the laser oscillator 302. The monotonization device 306 monotonizes the intensity distribution of the laser light emitted from the laser oscillator 302 and adjusted by the adjuster 304 with respect to the distance from the optical axis, using a diffractive optical element. The beam wedge 308 guides a laser beam whose adjusting area is adjusted by the adjuster 304 and whose intensity distribution is monotonized by the monotonizing device 306 to a workpiece (not shown). The measuring device 310 receives the irradiation of the laser light transmitted through the beam wedge 308, and measures the intensity of the laser light in each of a plurality of portions in the region irradiated with the laser light. The control device 312 controls the adjuster 304 and the monotonization device 306 based on the intensity of the laser light measured by the measuring device 310. The table 314 is a device that places a workpiece (not shown) and adjusts the position at which the workpiece is irradiated with laser light guided by the beam wedge 308.

  FIG. 2 is a conceptual diagram showing the configuration of adjuster 304. Referring to FIG. 2, adjuster 304 includes a beam expander including first lens 320 and second lens 322, change mechanism 324, and control circuit 326. The first lens 320 and the second lens 322 transmit the laser light emitted from the laser oscillator 302. When the laser light passes through these lenses, the irradiation area of the laser light changes. The change mechanism 324 is a mechanism that changes the distance between the first lens 320 and the second lens 322 that are opposed so that the optical axes are the same. When the changing mechanism 324 changes the distance between the lenses, the irradiation area of the laser light passing through the lenses changes.

  The beam expander constituted by the first lens 320 and the second lens may be a Kepler type or a Galileo type. In general, when the irradiation area is adjusted by a beam expander, the divergent condensing angle of laser light changes. Although not described in detail in this embodiment, when the monotonization device 306 is easily affected by the change in the divergent light collection angle of the incident laser light, the adjuster 304 includes an optical system, an adjustment mechanism, It is assumed that a control device for controlling the adjustment mechanism (not shown) is provided. The optical system corrects the divergence and converging angle of the laser light emitted from the beam expander configured by the first lens 320 and the second lens 322.

  The control circuit 326 is a circuit that controls the changing mechanism 324 in accordance with the content of the control signal output from the control device 312.

  Referring to FIG. 3, control device 312 includes a keyboard 330, a memory 332, a display 334, a CPU (Central Processing Unit) 338, and an I / O (Input / Output) 336. The keyboard 330 is a device for inputting information by an operator of the laser processing device 30. The memory 332 is a device that stores intensity information. In the present embodiment, the intensity information is information indicating the intensity of the laser beam and the positions of the plurality of portions in a plurality of portions of the irradiated region when the measuring device 310 is irradiated with the laser beam. It is. Details of the intensity information will be described later. The memory 332 is also a device that stores information necessary for the CPU 338 to process the information in addition to the intensity information. The display 334 is a device that outputs information to the operator of the laser processing apparatus 30. The I / O is a device for inputting and outputting information. The I / O 336 is a collection of two devices described below. The first device is a device through which the measuring instrument 310 inputs the above-described intensity information. The second device is a device that outputs a first control signal and a second control signal to the adjuster 304 and the monotonization device 306. In the present embodiment, the first control signal is a control signal representing movement of monotonization device 306. The second control signal is a control signal representing a change in the irradiation area of the laser beam by the adjuster 304. The CPU 338 is a device that processes the above-described intensity information and generates a first control signal and a second control signal.

  FIG. 4 is a functional block diagram showing functions handled by the CPU 338. Referring to FIG. 4, the function that CPU 338 is in charge of is represented by correspondence value calculation unit 400, individual determination unit 402, and signal generation unit 404. The corresponding value calculation unit 400 is a unit that calculates a corresponding value. In the present embodiment, the corresponding value is a general term for a plurality of types of values relating to the intensity of the laser beam in a plurality of portions of the region of the measuring instrument 310 that has been irradiated with the laser beam. The individual determination unit 402 is a unit that individually determines whether or not the corresponding value satisfies the requirement. The signal generation unit 404 generates a first control signal and a second control signal. The contents of the first control signal and the contents of the second control signal correspond to which value among the corresponding values satisfies the requirement.

  The corresponding value calculation unit 400 includes a trend calculation unit 410 and an intensity calculation unit 412. The trend calculation unit 410 is a unit that calculates a trend value. In the present embodiment, the tendency value is a value representing the tendency of the intensity of the laser beam with respect to the arrangement of the plurality of portions. This “plurality of parts” means a plurality of parts of the region of the measuring instrument 310 that has been irradiated with laser light. In the case of the present embodiment, the magnitude of the tendency value corresponds to the influence of the arrangement on the strength. The intensity calculation unit 412 calculates the sum of the laser light intensities inside the boundary inside the region of the measuring instrument 310 that has been irradiated with the laser light and the sum of the laser light intensities outside the boundary. It is a part to calculate. These values represent the distribution of the intensity of the laser beam in the “plural portions” described above. In the case of the present embodiment, this boundary is assumed to be a distance where the distance from the midpoint calculated by the midpoint calculation unit 4100 described below is a constant.

  The trend calculation unit 410 includes a midpoint calculation unit 4100, a centroid calculation unit 4102, and a coordinate calculation unit 4104. The midpoint calculation unit 4100 calculates the midpoint of any difference between the laser beams received by the measuring device 310 based on the intensity information. The center-of-gravity calculation unit 4102 calculates the center of gravity of the laser light intensity in the difference that the midpoint calculation unit 4100 has calculated the midpoint based on the intensity information. The meaning of “center of gravity” in the present embodiment will be described later. The coordinate calculation unit 4104 is a unit that calculates a value representing a relative coordinate (relative coordinate with respect to the midpoint) of the center of gravity of the intensity of the laser light as a tendency value.

  The intensity calculation unit 412 includes a first calculation unit 4120 and a second calculation unit 4122. The first calculation unit 4120 is a unit that calculates the sum of the intensities of the laser beams at the above-described boundary and a portion inside the boundary. In the present embodiment, this value is referred to as an “internal region pseudo-integral value”. The second calculation unit 4122 is a unit that calculates the sum of the intensities of the laser beams in the portion outside the boundary described above. In the present embodiment, this value is referred to as “pseudo-integral value of the outer region”.

  The individual determination unit 402 includes a range determination unit 414 and a requirement determination unit 416. The range determination unit 414 determines whether or not the tendency value is out of the range from the first threshold value to the second threshold value. The first threshold value and the second threshold value are threshold values arbitrarily set by the operator of the laser processing apparatus 30. However, it is assumed that the second threshold is lower than the first threshold. The requirement determination unit 416 is a unit that determines whether or not the two types of sums calculated by the strength calculation unit 412 satisfy the requirements of magnitude relation. This also means determining whether or not the distribution value described above satisfies the requirements for the distribution value.

  Range determination unit 414 includes a first determination unit 4140 and a second determination unit 4142. The first determination unit 4140 determines whether the tendency value is equal to or greater than a first threshold value. The second determination unit 4142 determines whether the tendency value is equal to or less than the second threshold value.

  The requirement determining unit 416 includes a third determining unit 4160 and a fourth determining unit 4162. The third determination unit 4160 is a unit that determines whether or not an intensity difference described below is greater than or equal to a third threshold value. In the present embodiment, the third threshold is a threshold representing a positive value. A specific value of the third threshold value is input by the operator of the laser processing apparatus 30 via the keyboard. The intensity difference described here is a value obtained by subtracting the pseudo-integral value of the outer region from the pseudo-integral value of the inner region. The fourth determination unit 4162 is a unit that determines whether or not an intensity difference described below is equal to or less than a fourth threshold value. The intensity difference is a value obtained by subtracting the pseudo-integral value of the outer region from the pseudo-integral value of the inner region. In the present embodiment, the fourth threshold is a threshold representing a negative value. A specific value of the fourth threshold value is set by the operator of the laser processing apparatus 30 via the keyboard 330.

  In the present embodiment, the inner region and the outer region are set such that the difference between the pseudo-integral value in the inner region and the pseudo-integral value in the outer region is a value in a certain range close to “0” in an optimal hat-shaped beam profile. The boundary with the area was set. However, the boundary between the inner area and the outer area is not necessarily set in this way. Depending on the boundary position between the inner area and the outer area, the third threshold value may represent “0” or a negative value, or the fourth threshold value may represent “0” or a positive value.

  The signal generation unit 404 includes a position signal generation unit 418 and a distance signal generation unit 420. The position signal generation unit 418 is a unit that generates a first control signal. The content of the first control signal generated by the position signal generator 418 corresponds to the relationship between the range from the first threshold value to the second threshold value and the tendency value in the following case. In this case, the tendency value is out of the range from the first threshold value to the second threshold value. The distance signal generation unit 420 is a unit that generates a second control signal. The content of the second control signal generated by the distance signal generation unit 420 corresponds to the size-related requirement determined by the requirement determination unit 416 in the following case. In this case, the total of the two types calculated by the intensity calculation unit 412 satisfies the requirements for the magnitude relationship.

  The position signal generation unit 418 includes a first generation unit 4180 and a second generation unit 4182. The first generation unit 4180 is a unit that generates a control signal for moving the monotonization device 306 in a direction in which the intensity of the laser light is increased in the portion of the measuring instrument 310 that is irradiated with the laser light. The second generation unit 4182 is a unit that generates a control signal for moving the monotonization device in the negative direction of the X axis shown in FIG.

  The distance signal generation unit 420 includes a third generation unit 4200 and a fourth generation unit 4202. When the intensity difference calculated by the third determination unit 4160 is equal to or greater than the third threshold, the third generation unit 4200 generates the second control signal so that the irradiation area of the laser beam irradiated to the measuring device 310 is increased. It is a part to do. The fourth generation unit 4202 generates the second control signal so that the irradiation area of the laser beam irradiated to the measuring device 310 is small when the intensity difference calculated by the fourth determination unit 4162 is equal to or smaller than the fourth threshold value. It is a part to do.

  FIG. 5 is a conceptual diagram showing the configuration of the monotonization device 306. Referring to FIG. 5, the monotonization device 306 includes a diffractive optical element 370, an X driving device 372, a Y driving device 374, and a control circuit 346. The diffractive optical element 370 is an element that monotonizes the intensity distribution of the laser light emitted from the laser oscillator 302. The X driving device 372 is a device that moves the diffractive optical element 370 in the X-axis direction shown in FIG. The Y driving device 374 is a device that moves the diffractive optical element 370 in the Y-axis direction shown in FIG. The control circuit 376 controls the X drive device 372 and the Y drive device 374 according to the first control signal output from the control device 312.

  FIG. 6 is a conceptual diagram showing the configuration of measuring instrument 310. Referring to FIG. 6, measuring instrument 310 includes 49 photodetectors 380, output circuit 382, and signal line 384. The photodetector 380 is an element arranged in a matrix in the region of the measuring instrument 310 that is irradiated with laser light. The photodetector 380 is an element that converts light into an electrical signal. The output circuit 382 is a circuit that creates intensity information based on the signal output from the photodetector 380 and outputs the created intensity information as a signal to the control device 312. The lead wire 384 is an electric wire that guides the signal output from the photodetector 380 to the output circuit 382.

  The intensity information will be described with reference to FIG. As described above, the intensity information is information representing the intensity of the laser beam and the positions of the plurality of portions in a plurality of portions of the irradiated region when the measuring device 310 is irradiated with the laser beam. . The intensity information in the present embodiment is represented by a code representing a value representing the coordinates of the photodetector 380 and a value representing the intensity output by the photodetector 380 in a predetermined order. In the case of the present embodiment, the coordinates of the photodetector 380 are coordinates having the center of the center of the photodetectors 380 shown in FIG. 6 as the origin. As a result, the control device 312 can specify what kind of information from which photodetector 380 the signal output from the output circuit 382 represents.

  Referring to FIGS. 7 and 8, the program executed by control device 12 performs the following control regarding the adjustment of the laser beam.

  In step S500, control device 312 controls laser oscillator 302 by the function of CPU 338 (not shown in FIG. 4). The laser oscillator 302 starts outputting laser light in accordance with the control of the control device 312.

  In step S <b> 502, I / O 336 accepts data representing intensity information from measuring instrument 310. In the present embodiment, this data is referred to as “profile data”. When the profile data is accepted, the memory 332 stores the profile data under the control of the CPU 338.

  In step S504, the midpoint calculation unit 410 calculates the midpoint of any difference between the laser beams received by the measuring device 310 based on the intensity information output by the output circuit 382 and stored in the memory 332. To do. The midpoint calculation unit 410 calculates the midpoint through the procedures from the first procedure to the fifth procedure described below. The first procedure is a procedure for searching for a photodetector 380 that has received a laser beam having an intensity equal to or greater than a certain threshold based on the intensity information. The second procedure is a procedure for searching for the photodetector 380 on the outer periphery among the photodetectors 380 searched in the first procedure based on the portion representing the coordinates in the intensity information. The third procedure is a procedure for identifying the photo detector 380 facing each other with the origin of the coordinates of the photo detector 380 for each of the photo detectors 380 searched in the second procedure. The fourth procedure is a procedure for selecting one pair of arbitrary pairs from the pair of the photodetectors 380 specified in the third procedure. The selection method is not particularly limited, but in the case of the present embodiment, the pair with the longest distance is selected. The fifth procedure is a procedure for calculating the midpoint of the line connecting the centers of the pairs of the photodetectors 380 selected in the fourth procedure. This midpoint is calculated from the coordinates of the photodetector 380 represented by the intensity information. When the midpoint is calculated, the center-of-gravity calculation unit 4102 calculates the center of gravity of the laser beam intensity at the time when the midpoint calculation unit 4100 calculates the midpoint based on the intensity information. In the present embodiment, the “centroid” means a point specified by coordinates calculated through the following procedure or coordinates that are mathematically identical to the coordinates calculated through the following procedure. The first procedure is a procedure for identifying the photodetectors 380 arranged on the line connecting the pairs of photodetectors 380 selected at the time of calculating the midpoint based on information representing the coordinates of the photodetectors 380 included in the intensity information. is there. The second procedure is a procedure for calculating the product of the laser light intensity and the X coordinate for each of the photodetectors 380 specified in the first procedure, and then calculating the sum of the products. It is necessary to calculate the sum of products for the X coordinate and the sum of products for the Y coordinate. For the photo detector 380 selected in the first procedure, the coordinates are (5, 5), the intensity is “10”, the coordinates are (−5, −5), the intensity is “8”, and the coordinates are (4, 4). ) And the intensity is “−3”, the coordinates are (−3, −3), and the intensity is “4”, the sum of the products for the X coordinate and the sum of the products for the Y coordinate is 5 × 10 + (− 5) × 8 + 4 × 5 + (− 3) × 4 = 18. The third procedure is a procedure for calculating the total intensity of the laser light of the photodetector 380 specified in the first procedure. In the example described above, the sum is 10 + 8 + 5 + 4 = 27. The fourth procedure is a procedure for dividing the sum calculated in the second procedure by the sum calculated in the third procedure. In the case of the example described above, the quotient is 18 ÷ 27 = 0.666. As a result, the coordinates of the center of gravity described above are (0.66, 0.66).

  In step S506, the coordinate calculation unit 4104 calculates the difference between the coordinates of the midpoint calculated by the midpoint calculation unit 4100 and the coordinates of the centroid calculated by the centroid calculation unit 4102. As a result, the coordinate calculation unit 4104 calculates the relative coordinates of the center of gravity with respect to the midpoint.

  In step S508, first determination unit 4140 determines whether the value calculated in step S506 is equal to or greater than a first threshold value. If it is determined that the value is equal to or greater than the first threshold value (YES in step S508), the process proceeds to step S510. If not (NO in step S508), the process proceeds to step S520.

  In step S510, first determination unit 4140 determines whether the sign of the value calculated in step S506 is positive (step S510). If it is determined that the sign is positive (YES in step S510), the process proceeds to step S512. If not (NO in step S510), the process proceeds to step S514.

  In step S512, first generation unit 4180 outputs a first control signal to monotonization device 306. An I / O 336 is used to output the first control signal. The first control signal output at this time is for moving the position of the monotonizing device 306 in the X-axis direction shown in FIG.

  In step S514, second generation unit 4182 outputs the first control signal to monotonization device 306. The control signal output at this time is for moving the monotonic device in the negative direction of the X axis in FIG.

  In step S520, I / O 336 accepts profile data from measuring instrument 310. When the profile data is accepted, the memory 332 stores the profile data under the control of the CPU 338. After the profile data is stored, the first generation unit 4180 and the second generation unit 4182 once stop generating the first control signal.

  In step S522, first calculation unit 4120 calculates a pseudo-integral value of the inner region. The second calculation unit 4122 calculates a pseudo-integral value of the outer region.

  In step S524, third determination unit 4160 and fourth determination unit 4162 calculate the difference between the pseudo-integral values.

  In step S526, third determination unit 4160 determines whether the difference between the pseudo-integral values is equal to or greater than a third threshold value. In addition, the fourth determination unit 4162 determines whether or not the difference between the pseudo integration values is equal to or less than the fourth threshold value. Based on these determinations, the requirement determining unit 416 determines whether or not the calculated pseudo-integral difference is equal to or greater than a threshold value. If it is determined that the threshold value is exceeded (YES in step S526), if not (NO in step S526), the process proceeds to step S530.

  In step S528, third determination unit 4160 determines whether the sign of the value calculated in step S524 is positive. If it is determined that the sign is positive (YES in step S528), the process proceeds to step S532. Otherwise (NO in step S528), the process proceeds to step S534.

  In step S530, CPU 338 determines whether or not processing on the workpiece has been completed. If it is determined that the processing has ended (YES in step S530), the process ends. If not (NO in step S530), the process proceeds to step S502.

  In step S532, the distance signal generation unit 420 outputs a first control signal to the adjuster 304 so that the irradiation area of the laser light is increased. In step S534, the distance signal generation unit 420 outputs the second control signal so that the diameter of the laser beam is reduced.

  The operation of the laser processing apparatus based on the above structure and flowchart will be described.

[When the center of the laser beam is shifted in the positive direction of the X axis with respect to the center of the diffractive optical element]
The CPU 338 causes the laser oscillator 302 to start outputting laser light (step S500). When output is started, the memory 332 stores profile data (step S502). When the profile data is stored, the tendency calculation unit 410 stores the midpoint and the center of gravity in the distribution of the intensity of the irradiated laser light in the memory 332 (step S504). When the value is stored, the trend calculation unit 410 calculates the difference between the midpoint and the center of gravity (step S506).

  When the difference is calculated, the range determination unit 414 determines whether or not the difference calculated in step S506 is greater than or equal to the first threshold (step S508).

  FIG. 9 is a diagram showing the intensity distribution of laser light. The lower half of FIG. 9 represents the intensity distribution of the laser beam with respect to the X axis shown in FIG. The horizontal axis of this portion represents the X axis shown in FIG. The vertical axis of this part represents the intensity of the laser beam. The upper half of FIG. 9 represents the intensity distribution of the laser beam by the interval between the lines. The intensity of the laser beam increases as the distance between the lines increases. The horizontal axis of this portion represents the X axis shown in FIG. The vertical axis of this portion represents the Y axis in FIG. When the distribution of the intensity of the laser light is as shown in FIG. 9, the optical axis of the laser light is shifted in the X-axis direction shown in FIG. 1 with respect to the center of the diffractive optical element. FIG. 10 is a conceptual diagram showing this. The horizontal axis in FIG. 10 represents the X axis shown in FIG. The vertical axis in FIG. 10 represents the Y axis shown in FIG. Of the two circles shown in FIG. 10, the inner circle represents the laser beam. The outside represents a diffractive optical element.

  In this case, if the calculated value is equal to or greater than the first threshold (YES in step 508), range determination unit 414 determines whether or not the sign of the calculated difference is positive (step S510). If the intensity distribution of the laser light is the distribution shown in FIG. 9, the sign is positive (YES in step S <b> 510), and therefore the first generation unit 4180 performs first control on the monotonization device 306. Output a signal. Thereby, the monotonization device 306 moves the diffractive optical element in the traveling direction of the X axis shown in FIG. 1 (step S512).

  When the position of the diffractive optical element is moved, through the processing from step S502 to step S506, the range determination unit 414 determines whether or not the difference calculated in step S506 is equal to or greater than a first threshold ( Step S508).

  FIG. 11 is a diagram showing the distribution of the intensity of the laser beam with respect to the X axis shown in FIG. The horizontal axis in FIG. 11 represents the X axis shown in FIG. The vertical axis in FIG. 11 represents the intensity of the laser beam. When the intensity distribution of the laser light is as shown in FIG. 11, the optical axis of the laser light coincides with the center of the diffractive optical element. FIG. 12 is a conceptual diagram showing this. The horizontal axis in FIG. 12 represents the X axis shown in FIG. The vertical axis in FIG. 12 represents the Y axis shown in FIG. Of the two circles shown in FIG. 12, the inner circle represents the laser beam. The outside represents a diffractive optical element.

  If the optical axis of the laser beam coincides with the center of the diffractive optical element by the process in step S512, the difference calculated in step S506 is below the first threshold value. This is because the midpoint and the center of gravity coincide as shown in the diagram of FIG. Since the difference calculated in step S506 is below the first threshold (NO in step S508), CPU 338 stores the profile data in memory 332 (step S520). When the profile data is stored, the intensity calculator 412 calculates the pseudo-integral value of the outer region and the pseudo-integral value of the inner region (step S522). When the pseudo-integral value of the outer region and the pseudo-integral value of the inner region are calculated, the requirement determining unit 416 calculates a difference between the pseudo-integral values (step S524). When the difference is calculated, the requirement determining unit 416 determines whether or not the calculated difference is greater than or equal to the third threshold value (step S526). When the calculated difference is equal to or greater than the third threshold value, a line representing the laser light intensity distribution with respect to the X axis shown in FIG. 1 draws a curve. If the calculated difference is below the third threshold, the line draws a straight line. Accordingly, in the case shown in FIG. 11, the calculated difference is less than the third threshold (NO in step S526), and thus CPU 338 determines whether or not the processing on the workpiece has been completed (step S526). S530). Since the processing has not been completed initially (NO in step S530), the processing from step S502 to step S530 is repeated. Thereafter, when the processing ends (YES in step S530), the process ends.

[When the center of the laser beam is shifted in the negative direction of the X axis with respect to the center of the diffractive optical element]
Through the processing from step S500 to step S506, the range determination unit 414 determines whether or not the difference calculated in step S506 is greater than or equal to the first threshold (step S508).

  FIG. 13 is a diagram showing the distribution of the intensity of the laser beam with respect to the X axis shown in FIG. The horizontal axis in FIG. 13 represents the X axis shown in FIG. The vertical axis in FIG. 13 represents the intensity of the laser beam. When the laser light intensity distribution is as shown in FIG. 13, the optical axis of the laser light is shifted in the direction opposite to the X-axis direction shown in FIG. 1 with respect to the center of the diffractive optical element. . FIG. 14 is a conceptual diagram showing this. The horizontal axis in FIG. 14 represents the X axis shown in FIG. The vertical axis in FIG. 14 represents the Y axis shown in FIG. Of the two circles shown in FIG. 14, the inner circle represents the laser beam. The outside represents a diffractive optical element.

  In this case, if the calculated value is equal to or greater than the first threshold (YES in step 508), range determination unit 414 determines whether or not the sign of the calculated difference is positive (step S510). If the intensity distribution of the laser light is the distribution shown in FIG. 13, the sign is negative (NO in step S <b> 510), so second generation unit 4182 provides the first control signal to monotonization device 306. Is output. As a result, the monotonizing device 306 moves the diffractive optical element in the direction opposite to the X axis traveling direction shown in FIG. 1 (step S514).

[When the laser beam diameter is too large compared to the appropriate value]
Through the processing from step S500 to step S506, the range determination unit 414 determines whether or not the difference calculated in step S506 is greater than or equal to the first threshold (step S508). In this case, if the difference calculated in step S506 is less than the first threshold value (NO in step S508), the requirement determining unit 416 performs the processing from step S520 to step S524. It is determined whether it is equal to or greater than a third threshold (step S526).

  FIG. 15 is a diagram showing the intensity distribution of laser light. The lower half of FIG. 15 represents the intensity distribution of the laser beam with respect to the X axis shown in FIG. The horizontal axis of this portion represents the X axis shown in FIG. The vertical axis of this part represents the intensity of the laser beam. The upper half part of FIG. 15 represents the intensity distribution of the laser beam by the interval between the lines. The intensity of the laser beam increases as the distance between the lines increases. The horizontal axis of this portion represents the X axis shown in FIG. The vertical axis of this portion represents the Y axis in FIG. The distribution of the intensity of the laser light as shown in FIG. 15 indicates that the cross section difference of the laser light, that is, the beam diameter is too large compared to the appropriate value. FIG. 16 is a conceptual diagram showing this. The horizontal axis in FIG. 16 represents the X axis shown in FIG. The vertical axis in FIG. 16 represents the Y axis shown in FIG. Of the two circles shown in FIG. 16, the inner circle represents the laser beam. The outside represents a diffractive optical element.

  When the distribution of the intensity of the laser light is the distribution shown in FIG. 15, the calculated difference is equal to or greater than the third threshold (YES in step S526). Therefore, the requirement determining unit 416 calculates the difference between the calculated differences. It is determined whether or not the sign is positive (step S528). In this case, if the sign is negative (NO in step S528), distance signal generation unit 420 outputs the second control signal so that the diameter of the laser beam is reduced. The adjuster 304 reduces the beam diameter by reducing the distance between the lenses (step S534).

[When the laser beam diameter is too small compared to the appropriate value]
Through the processing from step S500 to step S524, the requirement determining unit 416 determines whether or not the calculated difference is equal to or greater than a third threshold (step S526).

  FIG. 17 is a diagram showing the intensity distribution of the laser beam with respect to the X axis shown in FIG. The horizontal axis in FIG. 17 represents the X axis shown in FIG. The vertical axis in FIG. 17 represents the intensity of the laser beam. The distribution of the intensity of the laser beam shown in FIG. 17 indicates that the beam diameter of the laser beam is too small compared to the appropriate value. FIG. 18 is a conceptual diagram showing this. The horizontal axis in FIG. 18 represents the X axis shown in FIG. The vertical axis in FIG. 18 represents the Y axis shown in FIG. Of the two circles shown in FIG. 18, the inner circle represents the laser beam. The outside represents a diffractive optical element.

  If the intensity distribution of the laser light is the distribution shown in FIG. 17, the calculated difference is equal to or greater than the third threshold (YES in step S526), so the requirement determining unit 416 calculates the difference between the calculated differences. It is determined whether or not the sign is positive (step S528). In this case, if the sign is positive (YES in step S528), distance signal generator 420 outputs the second control signal to adjuster 304 so as to increase the beam diameter. The adjuster 304 increases the beam diameter by increasing the distance between the lenses (step S532).

  As described above, the laser processing apparatus according to the present embodiment determines whether the diameter of the laser beam and the position of the diffractive optical element are appropriate based on a plurality of values representing the intensity distribution of the laser beam. When the laser beam diameter and the position of the diffractive optical element are not appropriate, the laser processing apparatus according to the present embodiment performs control for optimizing them. Thereby, even when the laser beam is adversely affected by vibration of the laser processing apparatus or thermal lens phenomenon, the influence can be eliminated in a short time. As a result, it is possible to provide a laser processing apparatus capable of obtaining a good processed surface by suppressing the influence of vibration of the laser processing apparatus and the so-called thermal lens effect.

  In addition, the laser processing apparatus according to the present embodiment calculates a tendency relating to the distribution of the portion that has received the laser light with respect to the intensity of the laser light, and performs control based on the tendency. Thereby, it is possible to determine whether the diameter of the laser light and the position of the diffractive optical element are appropriate based on the property of the laser light that has passed through the diffractive optical element.

  Further, the laser processing apparatus according to the present embodiment is based on the midpoint of any difference of the laser light received by the measuring instrument 310 and the center of gravity of the intensity of the laser light in the difference. The relationship between the optical axis and the position of the diffractive optical element is optimized. The relationship between the midpoint of any difference of the laser light received by the measuring device 310 and the center of gravity of the laser light intensity in the difference corresponds well to the intensity distribution of the laser light. Further, the midpoint and the center of gravity are values that can be easily calculated. As a result, the control device 312 can easily and accurately determine the distribution of the intensity of the laser light. As a result, it is possible to provide a laser processing apparatus that can quickly and accurately suppress the influence of vibration of the laser processing apparatus and the so-called thermal lens effect.

  Further, the laser processing apparatus according to the present embodiment optimizes the length of the laser beam passing, that is, the diameter of the laser beam, based on the pseudo-integral value. The relationship between the pseudo-integral values corresponds well to the length of the laser beam passing. As a result, the control device 312 can accurately determine whether or not the laser beam passing distance is optimal, and if it is not optimal, it is too long or too short. As a result, it is possible to provide a laser processing apparatus capable of accurately suppressing the influence of vibration of the laser processing apparatus and the so-called thermal lens effect.

  Further, the laser processing apparatus according to the present embodiment optimizes the length of the laser beam passing, that is, the diameter of the laser beam, based on the relationship between the difference between the pseudo-integral values and the threshold value. The relationship between the difference between the pseudo-integral values and the threshold value is an easy relationship for the control device 312 to determine whether or not a certain requirement is satisfied. As a result, the control device 312 can accurately and quickly determine whether or not the laser beam passing distance is optimal, and if it is not optimal, it is too long or too short. As a result, it is possible to provide a laser processing apparatus that can accurately and quickly suppress the influence of vibration of the laser processing apparatus and the so-called thermal lens effect.

  In addition, the laser processing apparatus according to the present embodiment provides information indicating the intensity of the laser light and the positions of the plurality of portions on the difference in any portion of the region that has been irradiated with the laser light. Is used as intensity information. The midpoint and the center of gravity described above may be calculated based on information other than such information, but in the case of the present embodiment, such information is used as intensity information. The control device 312 can easily determine which part is irradiated with the laser beam.

  Further, the laser processing apparatus according to the present embodiment adjusts the position of the optical axis of the laser beam with respect to the position of the diffractive optical element by moving the position of the diffractive optical element. As a result, the position of the optical axis can be easily optimized rather than changing the direction of the laser light source. As a result, it is possible to provide a laser processing apparatus that can easily obtain a good processed surface by suppressing the influence of vibration of the laser processing apparatus and the so-called thermal lens effect.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

It is a figure showing the structure of the laser processing apparatus which concerns on embodiment of this invention. It is a figure showing the structure of the regulator which concerns on embodiment of this invention. It is a figure showing the structure of the control apparatus which concerns on embodiment of this invention. It is a functional block diagram showing the function in charge of CPU which concerns on embodiment of this invention. It is a conceptual diagram showing the structure of the monotonization apparatus which concerns on embodiment of this invention. It is a conceptual diagram showing the structure of the measuring device which concerns on embodiment of this invention. It is a 1st flowchart which shows the procedure of control of the adjustment process of the laser beam which concerns on embodiment of this invention. It is a 2nd flowchart which shows the procedure of control of the adjustment process of the laser beam which concerns on embodiment of this invention. It is a 1st figure showing intensity distribution of the laser beam concerning an embodiment of the invention. It is a 1st conceptual diagram showing the shift | offset | difference with respect to the center of a diffraction type optical element of the optical axis of the laser beam which concerns on embodiment of this invention. It is a 2nd figure showing intensity distribution of the laser beam concerning an embodiment of the invention. It is a conceptual diagram showing that the optical axis of the laser beam which concerns on embodiment of this invention has not shifted | deviated with respect to the center of a diffractive optical element. It is a 3rd figure showing the intensity distribution of the laser beam based on embodiment of this invention. It is a 2nd conceptual diagram showing the shift | offset | difference with respect to the center of a diffraction type optical element of the optical axis of the laser beam which concerns on embodiment of this invention. It is a 4th figure showing intensity distribution of the laser beam concerning an embodiment of the invention. It is a conceptual diagram showing that the cross-sectional difference of the laser beam which concerns on embodiment of this invention is too large compared with an optimal value. It is a 5th figure showing intensity distribution of the laser beam concerning an embodiment of the invention. It is a conceptual diagram showing that the cross-sectional difference of the laser beam which concerns on embodiment of this invention is too small compared with an optimal value.

Explanation of symbols

  30 laser processing device, 302 laser oscillator, 304 adjuster, 306 monotonization device, 308 beam wedge, 310 measuring device, 312 control device, 314 table, 320 first lens, 322 second lens, 324 changing mechanism, 326,376 Control circuit, 330 keyboard, 332 memory, 334 display, 336 I / O, 338 CPU, 370 diffractive optical element, 372 X drive, 374 Y drive, 380 photo detector, 382 output circuit, 384 wire, 400 402, individual determination unit, 404 signal generation unit, 410 trend calculation unit, 412 intensity calculation unit, 414 range determination unit, 416 requirement determination unit, 418 position signal generation unit, 420 distance signal generation unit, 4100 midpoint calculation unit, 4102 Center of gravity calculation unit, 4 04 Coordinate calculation unit, 4120 First calculation unit, 4122 Second calculation unit, 4140 First determination unit, 4142 Second determination unit, 4160 Third determination unit, 4162 Fourth determination unit, 4180 First generation unit, 4182 Second Generation unit, 4200 third generation unit, 4202 fourth generation unit.

Claims (12)

A light emitting means for emitting laser light;
Adjusting means for adjusting the irradiation area of the laser beam;
Monotonization means for monotonizing the intensity distribution of the laser beam with respect to the distance from the optical axis by means of a diffractive optical element;
The adjustment means adjusts the irradiation area, and the monotonization means receives the laser light that has monotonized the intensity distribution, and the laser light in each of a plurality of portions of the region irradiated with the laser light is received. A measuring means for measuring the strength;
Guidance means for guiding the laser beam, which the adjustment means adjusts the irradiation area and the monotonization means monotonizes the intensity distribution, to the workpiece;
Control means for controlling the adjustment means and the monotonization means based on the intensity of the laser beam measured by the measurement means,
The control means includes
Input means for inputting intensity information, which is information representing the intensity of the laser light and the position of the plurality of portions in a plurality of portions of the region irradiated with the laser light;
Storage means for storing the intensity information;
A first control signal, which is a control signal indicating movement of the monotonization means, and a second control signal, which is a control signal indicating change of the irradiation area of the laser beam, are output to the adjustment means and the monotonization means. Output means for
Processing means for processing the intensity information,
The processing means includes
Corresponding value calculation means for calculating a plurality of types of values relating to the intensity of the laser light in a plurality of portions of the region irradiated with the laser light;
Individual determination means for individually determining whether or not the plurality of types of values satisfy a requirement;
Laser processing including signal generation means for generating the first control signal and the second control signal, the content corresponding to which of the plurality of types of values satisfies the requirement apparatus. The corresponding value calculating means includes
A tendency value representing a tendency of the intensity of the laser light in the plurality of parts of the region irradiated with the laser light with respect to the arrangement of the plurality of parts, and a magnitude corresponding to the influence of the arrangement on the intensity A trend calculation means for calculating
Means for calculating a distribution value that is a value representing a distribution of the intensity of the laser light in a plurality of portions of the region irradiated with the laser light,
The individual determination means includes
Range determination means for determining whether the tendency value is out of a range from the first threshold value to a second threshold value which is a threshold value lower than the first threshold value;
Means for determining whether the distribution value satisfies the requirement for the distribution value;
The signal generating means includes
When the tendency value is outside the range from the first threshold value to the second threshold value, the first value of the content corresponding to the relationship between the tendency value and the range from the first threshold value to the second threshold value. Position signal generating means for generating one control signal;
The laser processing apparatus according to claim 1, further comprising: means for generating the second control signal when the distribution value satisfies the requirement for the distribution value. The trend calculating means includes
A midpoint calculating means for calculating a midpoint of any difference of the laser light received by the measuring means based on the intensity information;
Based on the intensity information, centroid calculating means for calculating the centroid of the intensity of the laser beam in the difference where the midpoint calculating means has calculated the midpoint;
The laser processing apparatus according to claim 2, further comprising: coordinate calculation means for calculating a value corresponding to a relative coordinate of the center of gravity with respect to the midpoint as the tendency value. The corresponding value calculating means includes
Means for calculating a value representing a tendency of the intensity of the laser beam with respect to the arrangement of a plurality of portions of the region irradiated with the laser beam;
The measuring means is inside the region irradiated with the laser light, and with respect to the boundary surrounding the center of the region, the sum of the intensities of the laser light of the portion inside, with respect to the boundary, Intensity calculating means for calculating the sum of the intensities of the laser beams of the portion on the outside,
The individual determination means includes
Means for determining whether a value representing a tendency of the intensity of the laser light satisfies the requirement for a value representing the tendency of the intensity of the laser light;
A requirement determining means for determining whether or not the two types of sums calculated by the intensity calculating means satisfy the requirements of magnitude relation;
The signal generating means includes
If the value representing the laser light intensity trend satisfies the requirement for the value representing the laser light intensity trend, the first control signal having the content corresponding to the laser light intensity trend is generated. Means for
2. The distance signal generating means for generating the second control signal having a content corresponding to the magnitude relation requirement when the two types of sums satisfy the magnitude relation requirement. Laser processing equipment. The requirement determining means has an intensity difference that is a value obtained by subtracting a sum of intensity of the laser light of the portion outside the boundary from a sum of intensity of the laser light of the portion inside the boundary. , Including means for determining whether or not a third threshold which is a threshold representing a positive value is greater than or equal to
The distance signal generating means includes means for generating the second control signal representing an enlargement of an irradiation area of the laser beam when the intensity difference is equal to or greater than the third threshold value. Laser processing equipment. The requirement determining means has an intensity difference which is a value obtained by subtracting a total sum of the intensity of the laser light of the portion outside the boundary from a total sum of the intensity of the laser light of the portion inside the boundary. , Including means for determining whether or not a threshold value representing a negative value is equal to or less than a fourth threshold value,
The distance signal generating means includes means for generating the second control signal representing a reduction in the irradiation area of the laser light when the intensity difference is equal to or smaller than the fourth threshold value. Laser processing equipment. The intensity information includes information representing the intensity of the laser beam and the positions of the plurality of portions in the portion on any span of the region irradiated with the laser beam,
The intensity calculating means includes
A midpoint calculating means for calculating a midpoint of the passing based on the positions of the two portions where the distance is maximum among the portions on the passing where the intensity of the laser beam is equal to or greater than a fifth threshold; ,
First sum total calculating means for calculating the sum of the intensities of the laser beams in the portion whose distance from the middle point of the passing is a sixth threshold or less;
5. The laser processing apparatus according to claim 4, further comprising: a second total sum calculating unit for calculating a total sum of the intensity of the laser light in the portion where the distance from the midpoint of the passing exceeds the sixth threshold value. .   The intensity calculation means is configured to output the sum of the intensities of the laser light of the portion inside the boundary and the outside of the boundary during a period in which the generation of the first control signal is stopped. The laser processing apparatus according to claim 4, comprising means for calculating a sum of the intensities of the laser beams of the certain part.   2. The laser processing apparatus according to claim 1, wherein the monotonization means includes means for monotonizing a distribution of intensity of the laser light whose adjustment area has adjusted the irradiation area. The monotonization means includes
A diffractive optical element;
Moving means for moving the position of the diffractive optical element;
The laser processing apparatus according to claim 1, further comprising: means for controlling the moving means according to a content of the first control signal. The adjusting means includes
Two lenses,
A changing means for changing the distance between the two lenses in a state in which the optical axes are opposed to each other;
The laser processing apparatus according to claim 1, further comprising means for controlling the changing means in accordance with a content of the second control signal. A light emitting means for emitting laser light;
Adjusting means for adjusting the irradiation area of the laser beam;
Monotonization means for monotonizing the intensity distribution of the laser beam with respect to the distance from the optical axis by means of a diffractive optical element;
The adjustment means adjusts the irradiation area, and the monotonization means receives the laser light that has monotonized the intensity distribution, and the laser light in each of a plurality of portions of the region irradiated with the laser light is received. A measuring means for measuring the strength;
Guidance means for guiding the laser beam, which the adjustment means adjusts the irradiation area and the monotonization means monotonizes the intensity distribution, to the workpiece;
Control means for controlling the adjustment means and the monotonization means based on the intensity of the laser beam measured by the measurement means,
The control means includes
Input means for inputting intensity information, which is information representing the intensity of the laser light and the position of the plurality of portions in a plurality of portions of the region irradiated with the laser light;
Storage means for storing the intensity information;
A first control signal, which is a control signal indicating movement of the monotonization means, and a second control signal, which is a control signal indicating change of the irradiation area of the laser beam, are output to the adjustment means and the monotonization means. Output means for
A laser processing method using a laser processing apparatus including processing means for processing the intensity information,
The laser processing method includes:
A corresponding value calculating step of calculating a plurality of types of values related to the intensity of the laser beam in a plurality of portions of the region irradiated with the laser beam;
An individual determination step of individually determining whether or not the plurality of types of values satisfy requirements;
Including a signal generation step of generating the first control signal and the second control signal by the processing means with a content corresponding to which value of the plurality of types of values satisfies the requirement, Laser processing method.

Images