JP2008218587A - Optical semiconductor device test socket - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a 5-pin or 6-pin socket for testing an optical semiconductor element, having 5 holes or 6 holes. It is necessary to hold the optical element between fingers and insert the lead pin into the socket hole and conduct an energization test. Inserting all of the lead pins into the holes is difficult and time consuming. Some people can't plug it in at all, and the socket needs to be improved to make it more efficient.
SOLUTION: The upper stage of the socket is divided into two stages, three stages, four stages, or five stages, and holes are distributed to stages having different heights. Since the lead pin can be inserted from the higher hole and the pin can be inserted into the hole at different timings, the insertion work becomes easier. If you are an expert, the time required for insertion will be shortened. Even people who could not insert until now can do so.
[Selection] Figure 1

Description

  The present invention relates to a test socket for an optical semiconductor device having 5 pins or 6 pins.

  The optical semiconductor element means a light emitting element such as an LED (light emitting diode) or LD (semiconductor laser) and a light receiving element such as a PD (photodiode) or an APD (avalanche photodiode). In either case, a light emitting element chip and a light receiving element chip are placed on a circular stem with a lead pin of about 5 mmφ and covered with a cap with a window. Since it is an optical element, it is necessary to transmit light, and there is always a window. The window is closed with flat glass or a lens. A plurality of lead pins protrude downward from the bottom surface of the stem.

  The length of the lead pin is about 10 mm to 13 mm and is sufficiently long. One is a case pin. Since the light receiving element and the light emitting element are diodes, an anode pin and a cathode pin are required. There may be other pins. After mounting a PD chip, LD chip, etc. on the stem, attaching a cap and sealing it, it is necessary to test to see if it has a predetermined performance. Since the lead pins cannot be soldered for testing, use a test socket. Insert the lead pin into the test socket temporarily and energize to test the light emission performance and light reception performance. When the test is completed, the element is removed from the socket. In the case of a light receiving element, the photocurrent is measured by applying light of a predetermined wavelength to obtain the sensitivity, or the photocurrent is measured by applying light of various wavelengths to check the wavelength characteristics. In the case of a light emitting element, a current is passed to examine the emission intensity and spectrum of a certain wavelength. The present invention addresses a test socket for use therewith. Since it is a test socket, it must be easy to insert and remove.

The test socket is made of plastic and has a cylindrical shape with a circular top surface. On the circular surface, the same number of holes as the lead pins are perforated. A thin sheath-like conductor is inserted into the pin hole. The pin hole may have a conical (roof type) chamfer so that the lead pin can easily enter. This chamfering is called counterbore. In the case of a laser diode (LD), two pins are also possible. In that case, there are two pins, an anode pin and a cathode pin. The socket has two holes. There is no difficulty in attaching and detaching. Some LDs have 3 pins. An anode pin, a cathode pin, and a case pin. The 3-pin test socket has three pin holes drilled on a 2 mmφ PCD so as to form 90 °, 90 °, and 180 ° central angles. There are three pin holes at the apex position of the isosceles right triangle with a hypotenuse of 2 mm. Even in the case of three pins, there is no difficulty in inserting and removing the lead pins into the test socket. Since LD, LED, and PD are diodes, an anode pin and a cathode pin are essential, but other pins may be provided. There may be case pins. There may also be carapins. Also, two optical elements may be housed in one package, in which case the number of pins increases. Depending on the optical element, the number of lead pins may be 4 or 5. The number and arrangement of pin holes are determined accordingly for the test socket.
Since IC and LSI pins are hard and short, there is no problem in attaching and detaching sockets even if there are tens to hundreds of pins. However, in the case of an optical element, since the lead pins are soft and long, even if there are three, four or five, there is a problem in mounting and removing from the socket.

The distance between lead pins varies depending on the number of lead pins. For example, in the case of 3 pins or 4 pins, the PCD (pitch circle diameter) is 2 mm and the pin holes are arranged. Do this for 3 or 4 minutes. In the case of three pins, there are pins at positions corresponding to three corners of a square having a side of 1.41 mm. In the case of 4 pins, the pins are located at the four corners of a square with a side of 1.41 mm.
Similarly, three test socket holes (in the case of 3 pins) and 4 (in the case of 4 pins) are provided at the corners of a square having a side of 1.41 mm. In some cases, counterbore is provided for easy insertion. Counterbore is the conical surface around the hole.

  The work of inserting the lead pin of the optical element into the test socket is performed manually. This is not possible with a machine. The lead pin attached to the stem originally extended straight, but when the cap is resistance welded to the stem, the back surface of the stem is strongly held by the electrode, so the lead pin is often bent inward. It may be deformed during transportation. Since it does not extend straight, it must be inserted into the four holes while tending to open the four lead pins. A trick is necessary for that.

  In the case of 4 pins, even if skillful, any worker can insert the lead pin into the test socket. First, the element is inclined and the two leads are inserted into the adjacent two holes a little, and the element is stood up and the remaining leads are inserted into the front two holes. This must be done promptly. 3 pins and 4 pins are sufficient when one element is mounted. In the case of the light receiving element, one photodiode is mounted, and in the case of the light emitting element, one LED or one LD is mounted. Only case pins, anodes and cathode pins are required. That's it for 3 pins. In the case of 4 pins, the remaining one becomes a carapin.

Even in the case of the light receiving element, a preamplifier (AMP) may be mounted beside the photodiode (PD). In this case, the optical signal of the photodiode is pre-amplified inside the package to prevent noise and the like from entering.
In the case of a PD with an AMP (preamplifier), one pin is applied to each of the AMP power supply, the PD cathode, the AMP ground, the AMP output, and the like to obtain 4 pins. So even PD with AMP may have 4 pins. In that case, a 4-pin test socket can be used. In the case of a laser element (LD + MPD) having a monitor photodiode MPD, a 2-pin optical element can be provided by giving 2 pins to the laser and 2 pins to the MPD.

  Some AMP-equipped PDs have 5 pins. FIG. 15 shows a plan view of such a 5-pin stem. A submount 42 and a PD wiring pattern 43 are provided near the upper center of the disk-shaped stem 40 having a diameter of 5 to 6 mm. Die caps (parallel plate capacitors) 44 and 45 are fixed to both sides thereof. A PD chip 46 is bonded on the wiring pattern 43. A preamplifier (AMP) IC 47 is mounted in the immediate vicinity of the submount. The stem 40 has four holes and four pins are inserted and fixed. An OUTB pin 48, an OUT pin 49, a Vpd pin 50, and a Vcc pin 52. These 4 pins are on a PCD (eg 2.54 mm). There is a case pin in the center just below the submount 43. There are 5 pins in total. Vpd is connected from the PD wiring 43 to the cathode of the PD 46 by a wire 57. The anode of the PD 46 is connected to the input terminal of the preamplifier 47 with a wire 58. The power supply terminal of the preamplifier 47 is connected to the Vcc pin 52 through wires 59 and 60. One output of the preamplifier 47 is connected to the OUT pin 49 by a wire 62. The other output is connected to OUTB pin 48 by wire 63. The ground terminal of the preamplifier 47 is connected to the die cap 45 by a wire 64. This is connected to the case pin. This PD with AMP has 5 pins and the output is 2 pins. Even when no voltage is applied to the preamplifier 47, the output of the PD is output to OUTB. Therefore, it is possible to align the PD / optical fiber without applying a voltage to the preamplifier 47. For this reason, a 5-pin PD + AMP element is also used.

  In the case of a light emitting element, a semiconductor laser LD and a monitor photodiode MPD for monitoring the output thereof may be mounted on the same stem. In that case, two LD pins and two MPD pins are required. It can be a 4-pin element. There is also a pin with 5 pins added. As such, the number of 5-pin optical elements has also increased.

Patent Document 1 proposes a test socket that is temporarily held in order to test the operation of a high-frequency semiconductor device (TO package transistor, DIP IC). Corresponding to a large number of parallel leads of the semiconductor element, socket holes in which vertical holes are drilled and annular contact conductors are inserted are arranged in parallel. Wiring is made from the conductor of the socket hole through the substrate. Since it is for transmitting a high frequency signal, the wiring of the socket substrate is a slip line, and the high frequency signal is transmitted from the signal source to the semiconductor element without distortion through the slip line, and the signal converted by the element is transmitted. It is sent to the measuring machine without distortion through the slip line. The socket holes are arranged in a flat plane. There is no idea about the shape and height of the hole.

Patent Document 2 proposes a socket for an aging test of a power transistor. Since it is a power transistor, the collector is packaged and has no pins. There are thick emitter pins and base pins. Two collector contact pins corresponding to the holes of the package in the flat socket are provided upward. There is a vertical hole into which the base pin and the emitter pin are inserted, and below this, a Be double ring emitter contact pin and a base contact pin are provided. The drive current is passed for a long time to check the deterioration of the operation characteristics. Since this is a power transistor, there are only two pins, and the pins have a large diameter and can be easily attached and detached. So there is no ingenuity in the pin hole. No patent literature relating to optical device test sockets could be found.

Japanese Utility Model Publication No. 63-185575 “Socket for measuring semiconductor elements” Japanese Utility Model Laid-Open No. 02-066751 “Semiconductor Device Socket for Aging Test”

  In the case of a 5-pin optical element, there are cases where there are 5 pins on the periphery, and there are one in the center and 4 on the periphery. Even when there are 5 pins on the circumference, there are cases where 5 pins are arranged at a central angle of 72 degrees on the same circumference and that 3 pins and 2 pins are arranged in 2 rows. Since these are simple arrangements, they are not shown. A case where five pins are provided with one pin at the center and four pins on the circumference will be described with reference to the drawings. FIG. 2 shows a plan view of an example of such a 5-pin socket. 3 is a cross-sectional view taken along line 3-3 of FIG. Four lead pin insertion holes H1, H2, H3, and H4 are arranged on the circumference. There is a center pin hole H5 in the center. A counterbore 7 is provided at the upper end of the pin hole 6 and has a funnel-like spread. This facilitates the insertion of the lead pin 4. A metal pipe 8 is inserted into the pin hole 6 from the middle. It is integrated with the socket 5 by insert molding. This is a pipe that is in contact with the lead pin 4 so that an electric current can be communicated to the test machine. The metal pipe 8 is made of aluminum (Al), copper (Cu) or the like. The legs of the metal pipe 8 are soldered to the test circuit board 9.

  The PCD passing through the four pin holes H1, H2, H3, H4 on the circumference has a diameter of 2.54 mm. The pitch of the pins in the horizontal direction is 1.80 mm, and the interval between the three pins arranged in the diameter direction is 1.27 mm. FIG. 3 shows a cross-sectional view of the three holes H3, H5, and H1, and this pitch is 1.27 mm. The radius of the counterbore 7 is 0.63 mm at the maximum. In the case of 5 pins, the counterbore 7 is narrower than in the case of 4 pins.

  When the number of pins is five, the pin interval is narrower than that of the four pins. Narrow pin spacing makes it harder to work. It is impossible to insert with a machine. The operator manually inserts the lead pin into the hole. As shown in FIG. 1, the lead pin 4 extending downward from the stem 3 of the optical element 2 is not necessarily straight. As described above, when the cap is attached by resistance welding, the electrode pushes the lead pin 4 inward, so that the lead pin 4 may be bent inward. The pins may be bent during transportation. Since it is a long (10 mm to 16 mm; for example, 13 mm) thin lead pin, the tip may be bent and twisted. In that case, it is necessary for the operator to correct the bending by extending the lead pin.

  The operator holds the head of the optical element 2 at an angle as shown in FIG. 4 and inserts the five lead pins 4 of the optical element into the five insertion holes 6 with counterbore like the dice of the test socket 5. Plug in. The socket 5 is fixed to the board 9 of the test machine and cannot be moved by hand. The lead pin 4 of the optical element 2 is bent slightly and gradually, and the hole 6 and the tip of the lead pin 4 are not in the same position. For convenience of explanation, the lead pins are numbered counterclockwise and are designated as P1, P2, P3, P4, and P5. Correspondingly, the insertion holes of the test socket 5 are also numbered counterclockwise to be H1, H2, H3, H4, and H5. The optical element 2 is tilted, and the front two pins P1 and P2 are first inserted into the front two holes H1 and H2. This is relatively simple. Next, the center pin P5 is put into the center hole H5. This is quite difficult. At this time, the two outer pins P3 and P4 do not enter the holes H3 and H4, but contact the other side of the test socket 5. P3 and P4 must be attracted and inserted into sockets H3 and H4. Therefore, it is necessary to pull up the optical element 2. However, when the optical element 2 is pulled up, the bent pins P1, P2, and P5 may come out of the hole.

  Then it is redone. It is a very difficult task to pull up the optical element 2 so that the already inserted pin does not come out of the hole and to insert the pins P3 and P4 into the holes H3 and H4. It is a highly skilled worker who can put five pins into the five holes.

  A skilled worker can insert the socket into the socket in 1 to 2 seconds in the case of 4 pins. However, in the case of 5 pins, it is difficult to adjust the position of the lead tip, so it takes a long time of 15 to 20 seconds. This level of time is also required for a thin, fingertip worker who is precise and proficient at work.

  A clumsy worker with thick fingers cannot put five pins into the five holes of the socket in the first place. If it is dexterous, it will be learned soon, but if it is clumsy, it will not be able to learn even if it passes, and an operator will be selected naturally. It seems that anyone can insert a 5 pin into a 5 hole, but not so long. You can't insert it no matter how much time it takes by bending the tip of the pin. It's a simple but difficult task and skill. This is inefficient because the process for manufacturing an inexpensive optical element involves a difficult operation.

  The test socket of the present invention for a 5-pin and 6-pin optical element with pins arranged on the center and the circumference or on the circumference has the upper surface in two steps, three steps, four steps or five steps. The height of the opening of the hole to be inserted is set to 2, 3, 4, or 5 stages, and 5 or 6 pin holes are provided. The step may be 0.2 mm or more. Even if the lead pin is inserted into the first-stage pin hole, since the lead pin is not yet inserted into the second-stage pin hole, the pins can be inserted in order, and the pin insertion work is simplified. In the case of three stages, at least one hole is provided in each of the lower stage K, the middle stage L, and the upper stage M. In the case of 5 holes in 3 stages, one combination is 2 lower holes, 1 middle hole, and 2 upper holes. Alternatively, one hole is arranged in the lower stage, three holes in the middle stage, and one hole in the upper stage. In the case of 6 holes in 3 stages, the holes are arranged so that 2 holes are in the lower stage, 2 holes are in the middle stage, and 2 holes are in the upper stage. In the case of 5 holes in 2 stages, 2 holes in the lower stage and 3 holes in the upper stage, or 3 holes in the lower stage and 2 holes in the upper stage. In the case of 6 holes in 2 stages, 2 holes in the lower stage, 2 holes in the middle stage, and 2 holes in the upper stage. In the case of 6 holes in 4 stages, the uppermost stage has no holes, and can be a lower 1 hole, a middle 3 holes, and an upper 2 holes. Alternatively, in four stages, the uppermost stage may be a non-hole, the lower stage 2 holes, the middle stage 3 holes, and the upper stage 1 hole. In the case of 5 stages, there are 5 spiral stages, and one hole is arranged in each stage.

  For example, in the case of a 5-pin element in three stages, the holes H1, H2, H3, H4, and H5, which are sequentially numbered as described above, are H3, H4 in the upper stage M, H5 in the middle stage L, H2, H1 is arranged in the lower stage. Alternatively, H1 is allocated to the lower K, H2, H4, and H5 to the middle L, and H3 to the upper M. Since the socket is stepped, pins can be inserted in sequence.

  A wall surface can be made by making it stepped.ザ It is possible to make the counterbore wider so that it hangs on the wall surface. The counterbore with a three-dimensional expanse can guide the pin tip into the hole more skillfully. This further facilitates the insertion of the pin into the test socket.

The present invention can be applied not only to a 5-pin optical device but also to a 6-pin optical device. In the case of a special light receiving element for burst reception, it becomes 6 pins. This has one pin at the center, and five pins are arranged in a circle so as to form a central angle of 72 degrees. In this case, a four-stage hole arrangement structure may be used.
A counterbore is provided in the hole to facilitate insertion of the pin. The depth of the counterbore cone is 0.1 mm to 1 mm. The counterbore width is about 0.1 mm to 0.4 mm. The counterbore width is the counterbore radius minus the hole radius. If it is at the corner of a 1.41 mm square as described above, the counterbore radius can be increased to a maximum of 0.7 mm.

  On the upper surface of the socket, the height of the upper end of the hole is changed to 2, 3, 4, or 5 so that the timing of inserting the pin into the hole is different. For example, in the case of 3 stages and 5 pins, 2 pins are first inserted into the upper two holes. Next, one pin is inserted into one hole in the middle stage. Further, 2 pins are inserted into the lower 2 holes. It is not necessary to insert five pins at a time. Put two, one and two into the hole. Although the length of the pin is constant, the timing of inserting the pin into the hole can be separated because the upper surface of the socket is stepped. Therefore, even a somewhat clumsy worker can insert the 5 pin into the test socket. Since the contact length between the metal pipe and the lead pin in the hole hardly changes, the contact resistance does not increase or the contact resistance differs depending on the pin / hole combination.

  In the case of a skilled worker with excellent skill, the time required for inserting a 5-pin optical element into the test socket of the present invention may be about 5 to 12 seconds. This is effective in reducing the inspection cost of the optical element. Above all, a worker who was clumsy and could not insert 5 pins into a conventional flat socket (FIGS. 2 and 3) could now insert 5 pins in the case of the socket of the present invention. This is also a remarkable effect.

[Example 1 (5-hole socket: flat counterbore: FIGS. 5, 6, and 7)]
FIG. 5 shows a plan view of the 5-hole socket of the first embodiment. 6 is a 6-6 longitudinal sectional view of the socket of FIG. 5, and FIG. 7 is a perspective view. The upper surface of the test socket 5 has three stages. A socket having an upper stage M, a middle stage L, and a lower stage K on the upper surface. Two holes H1 and H2 are provided in the heel direction in a portion with the lower stage K. A central hole H5 is provided in the heel direction at a portion where the middle stage L is present. Two holes H3 and H4 are provided in a portion of the upper stage M. At the upper end opening of the hole, there is a counterbore 7 spreading in a conical shape. Thanks to counterbore 7, it becomes easier to insert the tip of the pin into the hole. The counterbore has a width of 0.1 mm to 0.4 mm and a depth of 0.1 mm to 1 mm. A metal pipe 8 is provided from the middle of the hole 6. This is made of Al, Cu, phosphor bronze or the like. The socket body is made of resin. Glass-containing heat-resistant resin is used. This is the same as the conventional example.

  When the perspective view of FIG. 7 is seen, the step-like structure is easy to understand. The middle stage L has only a central hole H5. When the PCD of the four holes is 2.54 mm, the horizontal distance between the centers of H1H4 is 1.796 mm. The height of one stage (stage KL, stage LM) is 0.2 mm.

  FIG. 8 shows how the pins P1 to P5 of the optical element 2 are inserted into the holes H1 to H5 of the socket. The operator holds the optical element 2 in the bag and inserts the pins P4 and P3 into the upper holes H4 and H3. At that time, the other pins have not reached the hole. The pin P5 is expanded and the pin P5 is slightly inserted into the hole H5. The state at that time is shown in FIG. Since the tips of P4, P3, and P5 are in the holes, the optical element 2 is moved to the positions where the pins P2 and P1 enter the counterbore 7 of the holes H2 and H1, and are lowered as they are. As a result, all 5 pins are inserted into the socket holes.

  Since the length of the pin is the same, if the socket is stepped, the timing at which the pin approaches the hole can be made different. Two or one pin can be inserted into the hole. Because of the time difference, pin insertion becomes easier.

  Although the case where a pin is inserted into a conventional socket without a step has been described with reference to FIG. 4, even in that case, the expert does not insert 5 pins into the hole at the same time. The pin on the side inclined with the element 2 inclined is first put into the hole, then the center pin is inserted into the hole, and finally the outer two are led to the hole. At this time, the pin is easily bent or broken.

  In the case of the present invention, since there is a step in the socket, the optical element 2 does not need to be inclined so much. Try to put the pins in order while spreading the pins. The upper stage M is in contact with the stem 3 with the pin inserted into the socket and fully inserted. A gap remains between the middle L, the lower K, and the stem. However, it does not interfere with the current test.

[Example 2 (5-hole socket: stepped counterbore FIGS. 9, 10, and 11)]
Since the step portion is formed, the counterbore 7 can be further widened backward using the step of the wall. Example 2 is an enlargement of the counterbore. FIG. 9 shows a perspective view of the socket of the second embodiment. 10 is a plan view of the socket according to the second embodiment, and FIG. 11 is a longitudinal sectional view taken along the line 11-11 in FIG. The test socket 5 of Example 2 also has three levels on the upper surface. A socket having an upper stage M, a middle stage L, and a lower stage K on the upper surface. Two holes H1 and H2 are provided in the heel direction in a portion with the lower stage K. A central hole H5 is provided in the heel direction at a portion where the middle stage L is present. Two holes H3 and H4 are provided in a portion of the upper stage M. At the upper end opening of the hole, there is a counterbore 7 spreading in a conical shape. The process up to that point is the same as in the first embodiment.

  In Example 2, as shown in FIG. 10, the boundaries of the stepped portions of the holes H <b> 1, H <b> 2, H <b> 5 are extended forward so as to cover the circumference of the counterbore 7. Therefore, the counterbore 7 extends to the upper stage and becomes wider accordingly. This is called stepped counterbore. The depth of the counterbore from the hole is 0.1 mm to 1 mm, and the width is 0.1 mm to 0.4 mm. The back counterbore adds a step, and the height becomes 0.2 mm to 1.5 mm, and the total depth becomes 0.3 mm to 2.5 mm. Thanks to the wide counterbore 7, it is easier to insert the tip of the pin into the hole. The situation can be clearly understood from FIGS. 11 and 9. The counterbore 7 is higher and wider because the counterbore of the holes K2 and H1 of the lower stage K is applied to the middle stage L. Counterbore 7 in the middle hole H5 extends to the upper stage M. Therefore, the counterbore is higher and wider. It is difficult to insert the pins into the holes H5, H2 and H1 in the middle L and the lower K. It is more advantageous because the counterbore is widened for such highly difficult holes.

[Example 3 (enlarged step counterbore; FIGS. 12, 13, and 14)]
In Example 3, the counterbore is further enlarged as compared with Example 2. Counterbores are expanding in H4 and H5. FIG. 12 is a plan view of the socket according to the third embodiment. 13 is a 13-13 longitudinal sectional view of FIG. 12, and FIG. 14 is a perspective view of the third embodiment. The upper surface of the test socket of Example 3 has four levels. A socket having a lower stage K, a middle stage L, an upper stage M, and an uppermost stage N on the upper surface. Two holes H1 and H2 are provided in the heel direction in a portion with the lower stage K. A central hole H5 is provided in the heel direction at a portion where the middle stage L is present. Two holes H3 and H4 are provided in a portion of the upper stage M. The counterbore in the holes H2, H1, and H5 extends to the upper step. Therefore, the counterbores of these holes H2, H1, and H5 are high and wide at the rear. It is the same as in Example 2. In Example 3, the uppermost stage N is further provided, and the counterbore of the holes H4 and H3 at the rear is extended to the uppermost stage N, whereby the counterbore is made high and wide. By adopting a four-stage structure, all the holes H1, H2, H3, H4, and H5 have a wide and counterbore 7 extending backward. This is called an enlarged step counterbore. This can be clearly understood from FIGS. Thanks to the counterbore 7 of all the holes extending straight up and high and wide, all five pins are more easily inserted, which is very advantageous.

[Example 4 (5-hole socket: step in diagonal direction: FIG. 16)]
It is also possible to align the longitudinal direction of the step with the square direction of the pin hole and arrange three holes in the middle step. FIG. 16 is a plan view of such a 5-hole socket according to the fifth embodiment. The upper surface of the test socket 5 has three stages. A socket having an upper stage M, a middle stage L, and a lower stage K on the upper surface. In this, three holes are arranged in the middle stage L. One hole H1 is provided in the center direction of the lower stage K in the heel direction. In the middle stage L, H2 and H4 and a center hole H5 are provided in the heel direction at the ends. One hole H3 is provided in the central portion of the upper stage M. Each hole has a counterbore spreading in a conical shape. The depth is about 0.1 mm to 1 mm, and the width is about 0.1 mm to 0.4 mm. Counterbores of the holes H2, H4, and H5 of the middle stage L are hung on the upper stage. Therefore, the total height of the counterbore is expanded to 0.3 mm to 2.5 mm. Thanks to counterbore 7, it becomes easier to insert the tip of the pin into the hole. The cross-sectional structure is almost the same as that shown in FIGS. A metal pipe is provided from the middle of the hole. This is made of Al, Cu, phosphor bronze or the like. The socket body is made of resin. Glass-containing heat-resistant resin is used. Compared with those of Examples 1 to 3, the difference is that a step is provided in the diagonal direction of the hole.

[Example 5 (5-hole socket: diagonal step: FIG. 17, FIG. 18)]
Steps are provided in the diagonal direction, but those without enlarged counterbore are also possible. FIG. 17 is a plan view of such a 5-hole socket according to the fifth embodiment. FIG. 18 is a perspective view. The upper surface of the test socket 5 has three stages of an upper stage M, a middle stage L, and a lower stage K. The step is 0.2 mm. Three holes H2, H4, and H5 are arranged in the middle stage L. The lower stage K is provided with a hole H1, and the upper stage M is provided with a hole H3. At the upper end opening of the hole, there is a counterbore 7 spreading in a conical shape. Since the middle stage is wide, the counterbore of H2, H5, and H4 does not hit the upper stage. It is an independent hole. Thanks to counterbore 7, it becomes easier to insert the tip of the pin into the hole.

[Example 6 (6-hole socket: FIG. 19)]
FIG. 19 is a plan view of a 6-hole socket according to the sixth embodiment. There is a hole H6 in the center. The other holes H1, H2, H3, H4, and H5 are arranged at an angle of 72 degrees on the PCD. The upper surface of the test socket 5 has three stages. A socket having an upper stage M, a middle stage L, and a lower stage K on the upper surface. In the lower stage K, two holes H1 and H2 are drilled in the heel direction. In the middle L, H3 and H5 at the end and H6 at the center are perforated in the heel direction. The upper stage M is provided with a hole H4. The distribution is 2: 3: 1 in order from the bottom. At the upper end opening of the hole, there is a counterbore 7 spreading in a conical shape. Thanks to counterbore 7, it becomes easier to insert the tip of the pin into the hole. The holes H1, H2, H3, and H5 have an enlarged counterbore. The cross-sectional structure is the same as that shown in FIGS. A metal pipe is provided from the middle of the hole. This is made of Al, Cu, phosphor bronze or the like. The socket body is made of resin. Glass-containing heat-resistant resin is used. The two holes H1 and H2 are in the lower stage K but a little on the middle stage L, and H5 and H3 are in the middle stage L but slightly on the upper stage M.

[Example 7 (6-hole socket: FIG. 20)]
FIG. 20 is a plan view of a 6-hole socket according to the seventh embodiment. The difference from Example 6 is that the holes are arranged in the order of 1: 3: 2 from the bottom. There is a hole H6 in the center. The other holes H1, H2, H3, H4, and H5 are arranged at an angle of 72 degrees on the PCD. The upper surface of the test socket 5 has three stages of an upper stage M, a middle stage L, and a lower stage K. The lower stage K is provided with holes H1, the middle stage L is provided with H2, H5 and H6, and the upper stage M is provided with holes H3 and H4. At the opening of the hole, there is a counterbore 7 spreading conically. Thanks to counterbore 7, it becomes easier to insert the tip of the pin into the hole. Since part of the step is hung, the holes H2, H3, H4, and H5 have a reduced counterbore lacking a part of the arc.

[Example 8 (5-hole socket: no center pin: FIGS. 21, 22, and 23)]
21 to 23 show the structure of the 5-hole socket according to the eighth embodiment. 21 is a perspective view, FIG. 22 is a plan view, and FIG. 23 is a sectional view taken along line 23-23 in FIG. Unlike the previous embodiments, there is no central pin hole. The absence of the center pin hole means that there is no center pin in the lead pin attached to the back surface of the device package to be tested. The hole arrangement corresponds to the lead pin arrangement. The PCD is 2 mm to 3 mm, for example, 2.54 mm. The upper surface is not three steps but two steps. The upper surface of the socket has a lower stage K and an upper stage M cut into a bow shape. Two holes H1 and H2 are formed in the lower stage K. In the upper stage M, three holes H3, H4, and H5 are provided side by side.
At the opening of the hole, there is a counterbore 7 spreading conically. Thanks to counterbore 7, it becomes easier to insert the tip of the pin into the hole. Contrary to this arrangement, three holes H1, H2, H3 may be arranged in the lower stage K, and two holes H4, H5 may be arranged in the upper stage M.

[Example 9 (5-hole socket: no center pin: FIGS. 24, 25, 26)]
24 to 26 show the structure of the 5-hole socket according to the ninth embodiment. 24 is a perspective view, FIG. 25 is a plan view, and FIG. 26 is a cross-sectional view taken along the line 26-26 in FIG. This also has no central pin hole. Two or three pins are arranged in two rows. The fact that there is no center pin hole and the pins are arranged in two rows means that the lead pins protruding from the back surface of the device package to be tested are such an arrangement. The hole arrangement corresponds to the lead pin arrangement. PCD cannot be defined because there are no pin holes on the circumference. The upper surface of the socket has three stages, a lower stage K, a middle stage L, and an upper stage M. Two holes H1 and H2 are formed in the lower stage K. A hole H3 is drilled at a biased position in the middle stage L. The upper stage M is provided with two holes H4 and H5 side by side.
At the opening of the hole, there is a counterbore 7 spreading conically. Thanks to counterbore 7, it becomes easier to insert the tip of the pin into the hole. Although the hole of the middle stage L is biased to the right in FIG. 24, it may be biased to the left side. This depends on the pin arrangement of the target optical element. Moreover, it is possible to allocate holes H1, H2 in the lower stage K, holes H3, H6 in the middle stage L, and holes H4, H5 in the upper stage M, with 6 holes in 3 stages. Since it is easy to infer from FIGS. 24-26, illustration was abbreviate | omitted.

[Example 10 (6-hole socket: no center pin: FIGS. 27, 28, 29)]
27 to 29 show the structure of the 6-hole socket according to the tenth embodiment. 27 is a perspective view, FIG. 28 is a plan view, and FIG. 29 is a 29-29 cross-sectional view of FIG. This also has no central pin hole. Six pin holes are arranged on the same circumference. The fact that there is no center pin hole and the pin holes are arranged concentrically means that the lead pins coming out from the back of the device package to be tested are such an arrangement. The hole arrangement corresponds to the lead pin arrangement. The lead pins are arranged on the circumference. The PCD is 2 mm to 3 mm, for example, 2.54 mm. The hole arrangement is a projection of it on the socket surface. The upper surface of the socket has two stages, a lower stage K and an upper stage M. Three holes H1, H2, and H3 are formed in the lower stage K along a semicircular arc. The upper stage M is provided with three holes H4, H5, H6 along a semicircular arc.
At the opening of the hole, there is a counterbore 7 spreading conically. Thanks to counterbore 7, it becomes easier to insert the tip of the pin into the hole.

[Example 11 (5-hole socket: no center pin: FIGS. 30, 31, and 32)]
30 to 32 show the structure of a 5-hole socket according to Example 11. FIG. 30 is a perspective view, FIG. 31 is a plan view, and FIG. 32 is a cross-sectional view taken along line 32-32 in FIG. This also has no central pin hole. Five pin holes are arranged on the same circumference. The fact that there is no center pin hole and the pin holes are arranged on the same circumference means that the lead pins coming out from the back surface of the device package to be tested are such an arrangement. The lead pins of the element are arranged on the circumference. The PCD is 2 mm to 3 mm, for example, 2.54 mm. The upper surface of the socket has two stages, a lower stage K and an upper stage M. Two holes H1 and H2 are formed in the lower stage K. The upper stage M is provided with three holes H3, H4, and H5 along an arc.
At the opening of the hole, there is a counterbore 7 spreading conically. Thanks to counterbore 7, it becomes easier to insert the tip of the pin into the hole. Contrary to this example, the lower stage K may be provided with three holes H1, H2, and H3, and the upper stage M may be provided with two holes H4 and H5.

[Example 12 (5-hole socket: no center pin: FIGS. 33, 34, 35)]
33 to 35 show the structure of the 5-hole socket according to the twelfth embodiment. 33 is a perspective view, FIG. 34 is a plan view, and FIG. 35 is a front view. The socket surface has 5 levels. This also has no central pin hole. In the plan view, five pin holes are arranged on a circle. The fact that there is no center pin hole and the pin holes are arranged on a circle means that the lead pins coming out from the back surface of the device package to be tested are such an arrangement. The lead pins of the element are arranged on the circumference. The PCD is 2 mm to 3 mm, for example, 2.54 mm. The upper surface of the socket has five levels, the lowest level K, the lower level I, the middle level L, the upper level J, and the uppermost level M. It is a complex structure whose height changes spirally. Hole H1 is drilled in the lowermost stage K, hole H2 in the lower stage I, hole H3 in the middle stage L, hole H4 in the upper stage J, and H5 in the uppermost stage M. At the opening of the hole, there is a counterbore 7 spreading conically. Thanks to counterbore 7, it becomes easier to insert the tip of the pin into the hole.

Although the embodiments and examples of the present invention have been described above, the embodiments and examples of the present invention disclosed above are merely examples, and the scope of the present invention is the implementation of these inventions. It is not limited to the form. The scope of the present invention is indicated by the description of the scope of claims, and further includes meanings equivalent to the description of the scope of claims and all modifications within the scope.

The front view of the optical element for demonstrating that five lead pins extended below from the stem of an optical element may be bent and twisted rather than straight in the optical element which has 5 pins.

The top view of the socket for a test corresponding to a 5-pin optical element concerning a prior art example.

3-3 sectional drawing in FIG. 2 of the socket for a test concerning a prior art example.

The perspective view of the socket for a test concerning an optical element and a prior art example.

The top view of the socket for a test concerning Example 1 of the present invention.

6-6 sectional drawing in FIG. 5 of the test socket concerning Example 1 of this invention.

The perspective view of the socket for a test concerning Example 1 of the present invention.

The perspective view which shows the state which put P4 and P3 in the upper pinholes H4 and H3, and then has put the center pin P5 in the middle hole H5.

The perspective view of the socket for a test concerning Example 2 of the present invention.

The top view of the socket for a test concerning Example 2 of the present invention.

11-11 sectional drawing in FIG. 10 of the socket for a test concerning Example 2 of this invention.

The top view of the socket for a test concerning Example 3 of the present invention.

13-13 sectional drawing in FIG. 12 of the socket for a test concerning Example 3 of this invention.

The perspective view of the socket for a test concerning Example 3 of the present invention.

The top view which shows the internal structure of the 5-pin light receiving element containing a photodiode and a preamplifier.

FIG. 6 is a plan view of a test socket according to a fourth embodiment.

FIG. 10 is a plan view of a test socket according to a fifth embodiment.

FIG. 10 is a perspective view of a test socket according to a fifth embodiment.

The top view of the socket for 6 pin tests which has 2 holes in the lower stage, 3 holes in the middle stage, and 1 hole in the upper stage.

The top view of the socket for 6 pin tests which has 1 hole in a lower stage, 3 holes in a middle stage, and 2 holes in an upper stage.

The perspective view of the socket for 5 hole tests of Example 8. FIG.

The top view of the socket for 5 hole tests of Example 8. FIG.

23-23 sectional drawing in FIG.

The perspective view of the socket for 5 hole tests of Example 9. FIG.

The top view of the socket for 5 hole tests of Example 9. FIG.

26-26 sectional drawing in FIG.

The perspective view of the socket for 6-hole tests of Example 10. FIG.

The top view of the socket for 6-hole tests of Example 10. FIG.

29-29 sectional drawing in FIG.

The perspective view of the socket for 5 hole tests of Example 11. FIG.

The top view of the socket for 5 hole tests of Example 11. FIG.

32-32 sectional drawing in FIG.

The perspective view of the socket for 5 hole tests of Example 12. FIG.

The top view of the socket for 5 hole tests of Example 12. FIG.

The front view of the socket for 5 hole tests of Example 12. FIG.

Explanation of symbols

2 Optical Semiconductor Element 3 Stem 4 Lead Pin 5 Socket 6 Hole 7 Counterbore 8 Metal Pipe H1-H5 Hole P1-P5 Lead Pin

Claims (14)

This is a test socket for a 5-pin or 6-pin optical element having one center at the center and four or five pins on the circumference, and the upper surface is 3 steps K, L, M or 4 steps K, L, A socket for testing an optical semiconductor device, wherein the socket is divided into M and N, and five or six holes through which pins of the optical device are to be passed are allocated to the lower K, the middle L, and the upper M one by one. The optical element has 5 pins, and two adjacent holes H1 and H2 on the circumference are in the lower stage K, the center hole H5 is in the middle stage L, and the other two adjacent holes H3 and H4 on the circumference are in the middle. The optical semiconductor device test socket according to claim 1, wherein the optical semiconductor device test socket is provided in an upper stage M. The optical element has 5 pins, the hole H1 is provided in the lower stage K, the holes H2 and H4 following the hole H1 and the central hole H5 are provided in the middle stage L, and the hole H3 adjacent to the holes H2 and H4 is provided in the upper stage M. The optical semiconductor element test socket according to claim 1. The optical element has 6 pins, the adjacent holes H1 and H2 are provided in the lower stage K, the holes H3 and H5 following the holes H1 and H2 and the central hole H6 are provided in the middle stage L, and the hole H4 is provided in the upper stage M. The optical semiconductor element test socket according to claim 1. The optical element has 6 pins, the hole H1 is provided in the lower stage K, the holes H2 and H5 following the hole H1 and the central hole H6 are provided in the middle stage L, and the holes H4 and H3 adjacent to the holes H2 and H5 are provided in the upper stage M. The optical semiconductor device test socket according to claim 1, wherein the optical semiconductor device test socket is provided. This is a test socket for an optical element having no central pin and having 5 or 6 pins. The upper surface should be divided into three stages K, L, M or two stages K, M, and the optical element pins should be passed An optical semiconductor device test socket characterized in that one or six holes are allocated to the lower K, middle L, upper M or lower K, upper M. The optical element has 5 pins, the upper surface has two stages K and M, and two holes H1 and H2 are provided in the lower stage K, and the other three holes H3, H4 and H5 are provided in the upper stage M. The socket for an optical semiconductor element test according to claim 6. The optical element has 5 pins, and the upper surface has three stages. The holes H1 and H2 are in the lower stage K, the holes H3 following the holes H1 and H2 are in the middle stage L, and the holes H4 and H5 adjacent to the hole H3 are formed. The optical semiconductor element test socket according to claim 6, wherein the optical semiconductor element test socket is provided in an upper stage M. The optical element has 6 pins, the upper surface has two stages K and M, and adjacent holes H1, H2, and H3 are provided in the lower stage K, and holes H4, H5, and H6 are provided in the upper stage M. The socket for an optical semiconductor element test according to claim 6. This is a test socket for an optical element having five pins without a central pin, and the upper surface is spirally formed into five stages K, I, L, J, M, and holes H1, H2, H3, A socket for testing an optical semiconductor element, comprising H4 and H5. The counterbore having a depth of 0.1 mm to 1 mm and a width of 0.1 mm to 0.4 mm is provided so as to extend conically from the hole. Socket for optical semiconductor device test. The socket for an optical semiconductor element test according to any one of claims 1 to 11, wherein a counterbore extending in a conical shape from the hole extends to one step and the counterbore is expanded upward. The optical semiconductor element test socket according to any one of claims 1 to 12, wherein a step of each step is 0.2 mm or more. 14. The optical semiconductor element test socket according to claim 1, wherein the diameter of a circle having holes on the same circumference and connecting the centers is 2 mm to 3 mm.

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