JP2008209564A - Inspection apparatus and inspection method for electro-optical device - Google Patents

Abstract

The present invention prevents occurrence of residual charges during inspection and enables tact management.
An electro-optical device including a projection inspection unit that projects an inspection image displayed on an electro-optical device onto a projection surface, a signal generation unit that supplies an inspection signal to the electro-optical device, and a control unit. The projection inspection unit 12 includes a probe 30 that supplies the inspection signal to the electro-optical device, and an electrical connection between the probe and the electrode terminal of the electro-optical device by moving the probe. A probe operation mechanism unit 33 for controlling connection, and the control unit 11 controls the signal generation unit to generate the inspection signal, and controls the signal generation unit at the end of the inspection to reset the signal. And the reset signal is supplied to the electro-optical device, and then the probe operating mechanism is controlled to disconnect the electrical connection between the probe and the electrode terminal of the electro-optical device. It is characterized by making it.
[Selection] Figure 1

Description

  The present invention relates to an inspection apparatus and an inspection method for an electro-optical device suitable for inspection of a completed electro-optical device.

  Conventionally, display devices such as liquid crystal devices have been widely used in devices such as mobile phones and projectors. 2. Description of the Related Art A liquid crystal display device using a TFT (Thin Film Transistor) or the like is configured by bonding a TFT substrate and a counter substrate and enclosing liquid crystal between both substrates. Generally, an inspection of whether or not a manufactured liquid crystal device operates normally is performed on a finished product. For example, a predetermined image signal is input as display data to the liquid crystal device and projected, displayed, or the like to check whether the data is correctly displayed or whether there is a defective pixel.

  As an inspection apparatus for performing this type of inspection, for example, in Patent Document 1 by the present applicant, a liquid crystal panel is horizontally arranged, inspection light emitted from a lamp is guided vertically upward, and held horizontally. A technique is disclosed in which a liquid crystal panel is transmitted and projected onto a screen at the top of the housing.

  In the proposal of Patent Document 1, an inspection probe is brought into contact with an electrode pad of a liquid crystal display device carried into a housing, and a signal from an external inspection signal generator is supplied to the liquid crystal display device through the inspection probe. The liquid crystal display device is inspected.

That is, when the connection between the liquid crystal display device to be inspected and the inspection probe is completed, the operator operates the inspection signal generator to sequentially generate inspection signals. When all the inspections are completed, the operator stops the inspection signal generator, moves the inspection probe away from the electrode pads of the liquid crystal display device, and carries the liquid crystal display device out of the housing.
JP 2006-171065 A

  By the way, there are cases where defects such as a burn-in phenomenon occur in the liquid crystal display device due to the charge remaining on the electrode pads of the liquid crystal display device after completion of the inspection. Therefore, the inspection signal generator generates a reset signal for setting the electrode pad to 0 V potential immediately after the output of the final inspection signal in the series of inspections. The operator performs an operation for separating the inspection probe from the electrode pad after the reset signal is generated.

  However, depending on the operation timing of the operator to separate the inspection probe from the electrode pad and the operation of the inspection signal generator, the inspection probe is not connected to the electrode pad before the electrode pad is fixed to 0 V potential by the reset signal. There was a problem that it might be separated from the pad.

  In addition, there is a problem that it is not possible to perform tact management of designation of each step of a series of inspections and driving operation of the inspection probes.

  An object of the present invention is to provide an inspection apparatus and an inspection method for an electro-optical device capable of reliably setting the potential of an electrode pad to 0 V at the end of inspection and enabling tact management.

  An inspection apparatus for an electro-optical device according to the present invention includes a projection inspection unit that projects an inspection image displayed on the electro-optical device onto a projection surface, a signal generation unit that supplies an inspection signal to the electro-optical device, and a control unit. An inspection apparatus for an electro-optical device, the projection inspection unit comprising: a probe that supplies the inspection signal to the electro-optical device; and a probe that moves the probe and an electrode terminal of the electro-optical device A probe operation mechanism unit for controlling electrical connection, and the control unit controls the signal generation unit to generate the inspection signal, and also controls the signal generation unit at the end of the inspection to reset the signal generation unit. After generating a signal and supplying the reset signal to the electro-optical device, the probe operating mechanism is controlled to disconnect the electrical connection between the probe and the electrode terminal of the electro-optical device. And wherein the Rukoto.

  According to such a configuration, when the electro-optical device is arranged at the inspection position in the projection inspection unit, the probe is moved by the probe operation mechanism unit, and an inspection signal can be supplied from the probe to the electro-optical device. . The control unit controls the signal generation unit to generate an inspection signal. This inspection signal is supplied to the electro-optical device via the probe. In this way, an optical image corresponding to the inspection signal is emitted from the electro-optical device, projected onto the projection surface, and the electro-optical device is inspected. When the inspection is completed, the control unit controls the signal generation unit to generate a reset signal and supplies it to the electro-optical device via the probe. As a result, it is possible to prevent the electric charge from the inspection from remaining in the electro-optical device. After supplying the reset signal to the electro-optical device, the control unit controls the probe operation mechanism unit to disconnect the electrical connection between the probe and the electro-optical device. As a result, it is possible to reliably prevent the electric charge from remaining in the electro-optical device and to prevent the occurrence of problems such as image sticking of the electro-optical device. In addition, these series of steps are controlled by the control unit, and task management becomes possible.

  In addition, the probe operation mechanism unit outputs a state detection signal indicating that the electrode terminal of the electro-optical device and the probe are electrically connected to the control unit.

  According to such a configuration, the state of the electrical connection between the probe and the electro-optical device can be grasped by the state detection signal, and each process can be reliably controlled by the control unit.

  In the inspection apparatus for an electro-optical device according to one aspect of the present invention, the projection inspection unit further includes a stage operation mechanism unit that conveys the electro-optical device disposed on a stage, and the control unit includes: When the electro-optical device is transported to an inspection position by the stage operation mechanism unit, the probe operation mechanism unit is controlled to electrically connect the probe and the electrode terminal of the electro-optical device. .

  According to such a configuration, when the electro-optical device is transported to the inspection position in the projection inspection unit by the stage operation mechanism unit, electrical connection between the probe and the electro-optical device is performed. Task management in each process after the electro-optical device is carried in is possible.

  The inspection method of the electro-optical device according to the present invention includes a procedure for transporting the electro-optical device to an inspection position of a projection inspection unit that projects an inspection image displayed on the electro-optical device onto a projection surface, and a probe operation mechanism unit. For controlling the electrode terminal of the electro-optical device and the probe to be electrically connected and controlling the signal generator to generate an inspection signal, and the generated inspection signal is transmitted to the electro-optical device via the probe. A procedure for supplying to the electro-optical device after the inspection is completed by controlling the signal generating unit to generate a reset signal, and controlling the probe operating mechanism unit via the probe. And a procedure for disconnecting the electrical connection between the electrode terminal of the electro-optical device and the probe.

  According to such a configuration, when the electro-optical device is arranged at the inspection position in the projection inspection unit, the probe is moved to a position where the inspection signal can be supplied to the electro-optical device by the probe operation mechanism unit. Next, an inspection signal is generated by the signal generator, and the generated inspection signal is supplied to the electro-optical device via the probe. When the inspection of the electro-optical device is completed, a reset signal is generated by the signal generator and supplied to the electro-optical device via the probe. This prevents electric charges from remaining in the electro-optical device. After the electric charge is removed from the electro-optical device, the probe is moved by the probe operation mechanism unit, and the electrical connection between the probe and the electro-optical device is disconnected. In this way, it is possible to prevent the electro-optical device from being burned, and to manage tasks.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a block diagram of an inspection apparatus for an electro-optical device according to an embodiment of the present invention.

  The control unit 11 performs tact management of inspection for the electro-optical device. The projection inspection unit carries in the electro-optical device to be inspected and is controlled by the control unit 11 to perform display inspection of the electro-optical device. The inspection signal used for the display inspection of the projection inspection unit is generated by the signal generation unit 13. The signal generator 13 is controlled by the controller 11 and sequentially outputs inspection signals for each step of display inspection to the projection inspection unit 12.

  In this embodiment, as an electro-optical device, a modularized liquid crystal panel, that is, a flexible printed circuit board (hereinafter referred to as FPC) 100-1 is attached and accommodated in a case together with dustproof glass (not shown). An example of an inspection apparatus that inspects display defects (such as point defects, line defects, and spot unevenness defects) for the liquid crystal panel 100 will be described.

  FIG. 2 is a schematic configuration diagram showing a specific configuration of the projection inspection unit 12 in FIG.

  The projection inspection unit 12 transmits the inspection image in the vertical direction through the liquid crystal panel 100 and directly inspects the inspection optical system 5 that forms an inspection optical path for projecting the inspection image onto the screen 17 through an optical member such as the projection lens 18 in the vertical direction. A CCD camera 6 that is a photographing camera having a viewing angle for imaging the luminance distribution on the screen 17 when the 100 is driven with a predetermined inspection pattern, a stage 7 that holds the liquid crystal panel 100 horizontally on the inspection optical path, and A probe unit 8 for transmitting an inspection signal for displaying a predetermined inspection image on the liquid crystal panel 100 held on the inspection optical path, and a filter insertion / removal for selectively inserting and holding arbitrary filter means on the inspection optical path Temperature adjusting device for adjusting the temperature of the liquid crystal panel 100 by heating or cooling the mechanism unit 9 and the liquid crystal panel 100 held on the inspection optical path 10, a screen 17 that is a projection surface arranged on the upper portion of the housing 2 so that the position thereof can be adjusted up and down, an air blow 61 that blows off foreign matter adhering to the lens surface of the CCD camera 6 with air, and the air blow 61 The housing 2 includes a suction unit 62 that sucks foreign matter together with air, an air blow 81 that blows off foreign matter that adheres to the lens surface of the projection lens 18 with air, and a suction unit 82 that sucks the blown foreign matter together with air. The main part is configured. Further, the housing 2 may be provided with an ionizer (not shown) as static electricity removing means for removing static electricity from the lens surface of the CCD camera 6 and the lens surface of the projection lens 18.

  The inspection optical system 5 is an inspection having characteristics equivalent to those of an actual machine on which a lamp 15 that is a light source that emits inspection light such as white light upward in the vertical direction and a liquid crystal panel 100 to be inspected are mounted below the housing 2. The optical design unit 16 for generating light and the inspection light emitted from the lamp 15 through the optical design unit 16 pass through the liquid crystal panel 100 held horizontally on the stage 7 as it is in the vertical direction and pass through the liquid crystal panel 100 as it is. And a projection lens 18 as an optical member that is interposed on the vertical inspection optical path and adjusts the focal length of the inspection light so as to project onto the upper screen 17, and is emitted from the lamp 15. The inspection light is transmitted through the liquid crystal panel 100 in the vertical direction through the optical design unit 16, projected by the projection lens 18, and projected onto the screen 17 arranged on the upper portion of the housing 2 in the vertical direction without changing the direction. It has become.

  The optical design unit 16 is designed to correspond to an optical system for a projector, and includes a first multi-lens 50, an ND (neutral density) filter 51 as a light amount adjustment filter for adjusting the light amount of inspection light, and ultraviolet rays. Filter 52, second multi-lens 53, PBS (Polarized Beam Splitter) unit 54, condenser lens (condensing lens) 55, and color that transmits inspection light in a predetermined wavelength region such as green, red, and blue And a filter 56.

  The stage 7 is constituted by a rectangular plate-like member that is horizontally supported in the housing 2 via a stage operation mechanism unit 25 (described later), and the liquid crystal panel 100 to be inspected is mounted on the upper surface of the stage 7. A recess 20 is provided for placement.

  The liquid crystal panel 100 may have various sizes ranging from 0.5 to 1.4 inches, for example, and the screen 17 has a size of about 35 inches, for example.

  Further, the projection lens 18 can also be replaced, and the projection lens 18 having a different focal length can be used according to the size of the liquid crystal panel 100.

  In this case, the recess 20 has a shape that substantially conforms to the external shape of the liquid crystal panel 100, and further includes a positioning member such as a pin (not shown) in the main part, thereby positioning the placed liquid crystal panel 100 at a predetermined position. In such a state, it is held horizontally. The stage 7 can be used by exchanging the one having the concave portion 20 corresponding to the size of the liquid crystal panel 100, or placing various sizes of liquid crystal panels in the concave portion 20 of a predetermined size using an adapter. Also good.

  The stage 7 has an opening 21 for guiding inspection light to a display unit (not shown) of the liquid crystal panel 100 placed in the recess 20.

  Further, a flange portion 23 for detachably mounting the stage 7 to the stage operation mechanism portion 25 is provided at the base portion of the stage 7.

  The operation of the stage operation mechanism unit 25 is controlled by the drive control unit 22. The stage operation mechanism unit 25 includes an air cylinder 26 that is fixed horizontally in the housing 2. An air pressure control device (not shown) is connected to the air cylinder 26 so that the piston rod 27 of the air cylinder 26 can be expanded and contracted horizontally in the housing 2 by the operating air pressure supplied from the air pressure control device. It has become. A stage mounting portion 28 is fixed to the tip of the piston rod 27, and the stage 7 is detachably fastened to the stage mounting portion 28 via the flange portion 23.

  The drive control unit 22 controls the pneumatic control device based on the drive control signal from the control unit 11, and controls the expansion / contraction movement of the piston rod 27 of the stage operation mechanism unit 25. That is, the movement of the stage 7 in the horizontal direction is controlled by the drive control unit 22.

  2, the stage 7 is inserted between the optical design unit 16 and the projection lens 18 to hold the display unit of the liquid crystal panel 100 on the inspection optical path when the piston rod 27 is in the contracted position. On the other hand, as indicated by a two-dot chain line in FIG. 2, the specifications of each part are set so that the display part of the liquid crystal panel 100 is retracted from the inspection optical path when the piston rod 27 is in the extended position. As shown in the figure, when the piston rod 27 is extended before the start of inspection or after the end of inspection, the stage 7 pushes open the opening / closing window 29 provided in the housing 2, so that the liquid crystal panel 100 is mounted on the housing 2. It is exposed to the outside and can be replaced or removed.

  The probe unit 8 is supported in the housing 2 via a probe operation mechanism unit 33 (described later), and corresponds to each electrode terminal (not shown) arranged on the FPC 100-1 of the liquid crystal panel 100. Thus, a plurality of probes 30 that can be electrically connected are provided.

  The probe unit 8 transmits a predetermined inspection signal generated by the signal generator 13 to the liquid crystal panel 100 when each probe 30 is electrically connected to each electrode terminal on the FPC 100-1. It has become.

  A flat cable 39 for transmitting an inspection signal is attached to the signal generator 13, and a connector 38 at an end of the flat cable 39 can be connected to a connector receiver 37 provided in the housing 2. The connector receiver 37 is attached to the interface board 32, and the interface board 32 and the probe unit 8 are connected by a signal line 31. By connecting the connector 38 to the connector receiver 37, the inspection signal generated by the signal generator 13 can be supplied to each probe 30 of the probe unit 8.

  The operation of the probe operation mechanism unit 33 is controlled by the drive control unit 22. The probe operation mechanism unit 33 includes an air cylinder 34 that is vertically fixed in the housing 2. An air pressure control device (not shown) is connected to the air cylinder 34 so that the piston rod 35 of the air cylinder 34 expands and contracts vertically in the housing 2 by the operating air pressure supplied from the air pressure control device. It has become. Further, a probe unit mounting portion 36 is fixed to the tip of the piston rod 35, and the probe unit 8 is fastened and fixed to the probe unit mounting portion 36 so as to be detachable.

  The drive control unit 22 controls the pneumatic control device based on the drive control signal from the control unit 11, and controls the expansion / contraction movement of the piston rod 35 of the probe operation mechanism unit 33. That is, the vertical movement of the probe unit 8 is controlled by the drive control unit 22, and each probe 30 and each electrode terminal on the FPC 100-1 are brought into contact or non-contact state.

  The probe unit 8 is opposed to each electrode terminal on the FPC 100-1 of the liquid crystal panel 100 in which each probe 30 is held on the inspection optical path, and the piston rod 35 is in the extended position (lowering position). Each probe 30 is electrically connected to each electrode terminal on the FPC 100-1 (see FIG. 2), and each probe from each electrode terminal on the FPC 100-1 when the piston rod 35 is in the contracted position (upward position). Specifications of each part are set so that 30 is separated (not shown).

  In the present embodiment, as described above, the horizontal movement of the stage 7 and the vertical movement of each probe 30 are controlled by the drive control unit 22. Whether the drive control unit 22 has lowered the probe unit 8 until the probe 30 contacts each electrode terminal on the FPC 100-1, or has raised the probe unit 8 so as to be in a non-contact state. A state detection signal indicating the state can be output to the outside.

  The drive of the filter insertion / removal mechanism unit 9 is controlled by the drive control unit 22. The filter insertion / removal mechanism unit 9 is, for example, for selectively inserting and holding an arbitrary filter unit 40 on the inspection optical path that coincides with the vertical optical axis of the projection lens 18 and is parallel to the inspection optical path. And a plurality of (four in the present embodiment) trays 42 that are pivotally supported by the shaft 41 so as to be rotatable. .

  A recess 43 for placing and holding the filter unit 40 is provided on the upper surface of each tray 42, and further, inspection light is applied to the filter unit 40 mounted in each recess 43 at the bottom of each recess 43. An opening 44 for guiding is provided.

  The filter insertion / removal mechanism unit 9 normally holds each tray 42 at a retracted position from the inspection optical path, and a predetermined tray 42 is selected by an operator or the like and a predetermined rotation angle is set from the retracted position. Thus, the filter unit 40 held on the tray is exposed to the inspection optical path.

  In each tray 42, as a filter unit 40, for example, a viewing angle compensation filter as a contrast enhancement filter that enhances the contrast of inspection light after passing through the liquid crystal panel 100, green (G), blue (B), red (R A color filter that transmits inspection light in a predetermined wavelength region such as ND), an ND (Neutral Density) filter as a light amount adjustment filter, and the like are mounted. Here, it is desirable that each filter unit 40 has optical characteristics equivalent to various filters of a liquid crystal device in which the liquid crystal panel 100 to be inspected is actually mounted.

  The temperature adjusting device 10 adjusts the temperature of the liquid crystal panel 100 by blowing warm air or cold air to the liquid crystal panel 100 held on the inspection optical path. The blower device 45 and drive control of the blower device 45 are performed. It has a control unit (not shown) for performing and a temperature sensor (not shown) embedded in the stage 7 in the vicinity of the liquid crystal panel 100. The control unit (not shown) is provided with a control panel (not shown) for setting the temperature and the like, and the control unit determines the amount of hot or cold air blown from the blower device 45 based on the temperature detected from the temperature sensor and The liquid crystal panel 100 is controlled to a desired set temperature by feedback control of the temperature.

  As for the air blow 61 and the suction unit 62 for blowing and sucking foreign matter adhering to the lens surface of the CCD camera 6 with air, air is supplied from the factory air supply mechanism (not shown) to the inside of the housing 2 by a tube (not shown). A tube (not shown) introduced into the air blow 61 and connected to the suction part 62 is led to a factory air suction mechanism (not shown) outside the housing 2. Similarly, with respect to the air blow 81 and the suction unit 82 for blowing off and sucking foreign matter adhering to the lens surface of the projection lens 18, air is supplied from the factory air supply mechanism (not shown) to the inside of the housing 2 by a tube (not shown). The air blow 81 is led to a suction mechanism (not shown) outside the housing 2 by a tube (not shown) connected to the suction portion 82. As the cleaning air used, nitrogen N2 may be used in addition to air.

  The signal generator 13 has a plurality of memories (not shown) in which various inspection patterns are stored. The signal generation unit 13 is controlled by the control unit 11 to read the inspection pattern stored in each memory and output it as an inspection signal.

  The control unit 11 controls the projection inspection unit 12 and the signal generation unit 13. The control unit 11 has an input operation unit (not shown), and can control the projection inspection unit 12 and the signal generation unit 13 according to the operation of the input operation unit. The control unit 11 outputs a drive control signal to the drive control unit 22 of the projection inspection unit 12 to control the horizontal movement of the stage 7, and the stage 7 is accommodated in the housing 2, so that the liquid crystal panel 100 is inspected. When arranged at the position, the probe unit 8 is moved downward by the drive control signal to bring each probe 30 into contact with each electrode terminal on the FPC 100-1.

  Further, a state detection signal is supplied from the drive control unit 22 to the control unit 11. When the state detection signal indicates that the probe unit 8 has been moved downward so as to bring each probe 30 into contact with each electrode terminal on the FPC 100-1, the control unit 11 sends an inspection signal to the signal generation unit 13. generate. The control unit 11 instructs the signal generation unit 13 to perform each step of inspection, and causes the signal generation unit 13 to sequentially output inspection signals having inspection patterns corresponding to the respective steps of inspection.

  The control unit 11 generates a reset signal from the signal generation unit 13 when all the inspection steps are completed. The control unit 11 generates a reset signal in the signal generation unit 13 and then outputs a drive control signal to the drive control unit 22 of the projection inspection unit 12 to raise the probe unit 8 and to move each probe 30 to the FPC 100-1. It is made to separate from each upper electrode terminal.

  Here, a TFT active matrix driving type liquid crystal panel with a built-in driving circuit as an example of an electro-optical device will be described.

  FIG. 3 shows a liquid crystal panel, and is a plan view of the element substrate viewed from the counter substrate side together with the components formed thereon, and FIG. 4 is a cross-sectional view taken along line HH ′ of FIG. .

  3 and 4, in the liquid crystal panel according to the present embodiment, the element substrate 110 on which the TFT is formed and the counter substrate 120 are arranged to face each other.

  A liquid crystal layer 150 is sealed between the element substrate 110 and the counter substrate 120, and the element substrate 110 and the counter substrate 120 are mutually connected by a sealing material 152 provided in a seal region located around the image display region 110 a. It is glued to. The sealing material 152 is made of, for example, a thermosetting resin, heat and photo-curing resin, photo-curing resin, UV-curing resin, or the like for bonding the two substrates, and after being applied on the element substrate 110 in the manufacturing process, It is cured by heating, light irradiation, light irradiation, ultraviolet irradiation or the like.

  Vertical conduction members 106 are provided at the four corners of the counter substrate 120, and electrical conduction is established between the vertical conduction terminals provided on the element substrate 110 and the counter electrode 121 provided on the counter substrate 120. .

  3 and 4, a light-shielding frame 153 that defines the image display region 110a is provided on the counter substrate 120 side in parallel with the inside of the seal region where the sealant 152 is disposed. It goes without saying that the frame 153 may be provided on the element substrate 110 side. Of the peripheral area extending around the image display area 110a, the data line driving circuit 101 and the external circuit connection terminal 102 are provided along one side of the element substrate 110 in the outer portion of the seal area where the sealing material 152 is disposed. The scanning line driving circuit 104 is provided along two sides adjacent to the one side. Further, on the remaining side of the element substrate 110, a plurality of wirings 105 are provided for connecting between the scanning line driving circuits 104 provided on both sides of the image display region 110a.

  In FIG. 4, an alignment film is formed on the element substrate 110 on the pixel electrode 119 after the pixel switching TFT, the scanning line, the data line, and the like are formed. On the other hand, on the counter substrate 120, in addition to the counter electrode 121, an alignment film is formed in the uppermost layer portion. The liquid crystal layer 150 is made of, for example, a liquid crystal in which one or several types of nematic liquid crystals are mixed, and takes a predetermined alignment state between the pair of alignment films.

  A sampling circuit (not shown) is provided in a region on the element substrate 110 below the frame 153. The sampling circuit samples the image signal on the image signal line in accordance with the sampling circuit inspection signal supplied from the data line driving circuit 101 and supplies it to the data line of each pixel.

  Next, the operation of the embodiment configured as described above will be described with reference to the flowchart of FIG.

  First, the operator operates an input operation unit (not shown) of the control unit 11 to operate the air cylinder 26 of the projection inspection unit 12 to move the stage 7 to a retracted position from the inspection optical path. In this state, the liquid crystal panel 100 to be inspected is positioned and placed on the recess 20 of the stage 7.

  Next, the operator performs an operation for moving the stage 7 to the insertion position between the optical design unit 16 and the projection lens 18. When this operation is performed, the control unit 11 shifts the process from step S1 to step S2, outputs a drive control signal to the drive control unit 22 of the projection inspection unit 12, and moves the stage 7 to a predetermined insertion position. Let Thereby, the display unit of the liquid crystal panel 100 placed on the stage 7 is held at a predetermined position on the inspection optical path.

  When the control unit 11 moves the stage 7 to a predetermined insertion position, the control unit 11 then controls the drive control unit 22 to lower the probe unit 8. That is, the control unit 11 lowers the probe unit 8 by operating the air cylinder 34 via the air pressure control device, and the probes 30 of the probe unit 8 are arranged on the FPC 100-1 of the liquid crystal panel 100. It is electrically connected to the electrode terminal.

  When each probe 30 of the probe unit 8 is moved to a position where it is connected to each electrode terminal arranged on the FPC 100-1, the drive control unit 22 controls a state detection signal indicating that the lowering of the probe unit 8 is completed. To the unit 11. Thus, the control unit 11 determines that the probe 30 is connected to each electrode terminal arranged on the FPC 100-1 (step S5), and starts a display inspection.

  That is, the control unit 11 controls the signal generation unit 13 to output a predetermined inspection signal to the liquid crystal panel 100. The signal generation unit 13 is supplied with a signal from the control unit 11 for each step of the inspection, and outputs an inspection signal corresponding to each step. This inspection signal is supplied to each probe 30 of the probe unit 8 via the flat cable 39 and the signal line 31, and is applied to the liquid crystal panel 100 via each electrode terminal arranged on the FPC 100-1.

  The liquid crystal panel 100 is driven according to the inspection signal, converts incident light into image light, and emits it. This image light is projected on the screen 17 at the top of the housing 2, and a predetermined inspection image is projected on the screen 17.

  The CCD 6 images the luminance distribution on the screen 17 when the liquid crystal panel 100 is driven with a predetermined inspection pattern. Display defects (such as point defects, line defects, and spot unevenness defects) on the liquid crystal panel 100 can be automatically detected from the imaging result. This automatic detection technique is disclosed in Japanese Patent Application Laid-Open No. 11-174398, which is a prior art by the present applicant.

  Under the control of the control unit 11, the signal generation unit 13 sequentially outputs inspection signals corresponding to the inspection steps (step S7). When all the inspections are completed, the control unit 11 shifts the processing from step S8 to step S9, and causes the signal generation unit 13 to generate a reset signal.

  This reset signal is supplied to each probe 30 of the probe unit 8 via the flat cable 39 and the signal line 31, and is applied to the liquid crystal panel 100 via each electrode terminal arranged on the FPC 100-1. In this way, charge remaining in the liquid crystal panel 100 is prevented.

  When the control unit 11 causes the signal generation unit 13 to output a reset signal, the control unit 11 instructs the drive control unit 22 to raise the probe unit 8 in the next step S10. The drive controller 22 raises the probe unit 8 by operating the air cylinder 34 via the air pressure control device, and the electrodes 30 arranged on the FPC 100-1 of the liquid crystal panel 100 are connected to the probes 30 of the probe unit 8. Keep away from the terminal and keep it in a non-contact state.

  As described above, in this embodiment, the display inspection is managed by the control unit from the stage movement to the probe lowering, each inspection step, the generation of the reset signal, and the probe raising. Management becomes possible. Further, the control unit generates a reset signal after completion of each step of inspection, and then separates the probe from the electrode terminal. Accordingly, no charge remains on the liquid crystal panel after the inspection, and it is possible to reliably prevent problems such as image sticking.

  Note that the control unit 11 can be configured by a computer, and each operation of the control unit 11 shown in FIG. 5 can be realized by defining the operation of the computer by a program.

  Moreover, although this Embodiment demonstrated the example which employ | adopted the projection test | inspection part by which the optical system was arrange | positioned in the perpendicular direction, especially the arrangement | positioning of an optical system may be any direction. Further, in the present embodiment, an example in which the inspection is automatically performed using the CCD is shown, but the present invention can be similarly applied to the visual inspection. Further, although each inspection step has been described as automatically proceeding by the control unit, each inspection step may be configured to be temporarily stopped by an operator's operation.

  In the above embodiment, the case where the electro-optical device is applied to a liquid crystal device such as a liquid crystal panel has been described. However, the present invention is not limited to this, and the electroluminescent device, particularly an organic electroluminescent device, an inorganic device, Electroluminescent devices, plasma display devices, devices using electron-emitting devices (Field Emission Display and Surface-Conduction Electron-Emitter Display), LED (Light Emitting Diode) display devices, electrophoretic display devices, thin cathode ray tubes, liquid crystals The present invention can be applied to inspection apparatuses for various electro-optical devices such as a small television using a shutter or the like and a device using a digital micromirror device (DMD).

  For example, in the case of application to a reflective electro-optical panel such as LCOS, this embodiment can be applied by suitably arranging a lamp and an optical design unit between a stage and a screen together with a half mirror and the like. It is.

1 is a block diagram of an inspection apparatus for an electro-optical device according to an embodiment of the invention. The schematic block diagram which shows the specific structure of the projection test | inspection part 12 in FIG. The top view which showed the liquid crystal panel and looked at the element substrate from the opposite substrate side with each component formed on it. H-H 'sectional drawing of FIG. 6 is a flowchart for explaining the operation of the embodiment.

Explanation of symbols

    DESCRIPTION OF SYMBOLS 7 ... Stage, 8 ... Probe unit, 11 ... Control part, 12 ... Projection inspection part, 13 ... Signal generation part, 17 ... Screen, 22 ... Drive control part, 30 ... Probe, 33 ... Probe operation mechanism part, 100 ... Liquid crystal Panel, 100-1 ... FPC.

Claims (4)

An inspection apparatus for an electro-optical device, comprising: a projection inspection unit that projects an inspection image displayed on the electro-optical device onto a projection plane; a signal generation unit that supplies an inspection signal to the electro-optical device; and a control unit,
The projection inspection unit includes a probe that supplies the inspection signal to the electro-optical device, and a probe operation mechanism unit that controls the electrical connection between the probe and the electrode terminal of the electro-optical device by moving the probe. Have
The control unit controls the signal generation unit to generate the inspection signal, and controls the signal generation unit to generate a reset signal and supply the reset signal to the electro-optical device at the end of the inspection. An inspection apparatus for an electro-optical device, wherein the probe operating mechanism section is controlled to disconnect an electrical connection between the probe and an electrode terminal of the electro-optical device.   2. The electricity according to claim 1, wherein the probe operation mechanism unit outputs a state detection signal indicating that the electrode terminal of the electro-optical device and the probe are electrically connected to the control unit. Inspection device for optical devices. The projection inspection unit further includes a stage operation mechanism unit that conveys the electro-optical device disposed on the stage,
When the electro-optical device is transported to the inspection position by the stage operation mechanism unit, the control unit controls the probe operation mechanism unit to electrically connect the probe and the electrode terminal of the electro-optical device. The inspection apparatus for an electro-optical device according to claim 1 or 2. A procedure for transporting the electro-optical device to an inspection position of a projection inspection unit that projects an inspection image displayed on the electro-optical device onto a projection surface;
A procedure for controlling the probe operation mechanism unit to electrically connect the electrode terminal of the electro-optical device and the probe;
A procedure for controlling the signal generator to generate an inspection signal and supplying the generated inspection signal to the electro-optical device via the probe;
Means for controlling the signal generator to generate a reset signal after completion of the inspection, and supplying the reset signal to the electro-optical device via the probe;
A procedure for controlling the probe operating mechanism unit to disconnect the electrical connection between the electrode terminal of the electro-optical device and the probe;
An inspection method for an electro-optical device, comprising:

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