JP2008209540A - Anti-reflective article - Google Patents
Anti-reflective article Download PDFInfo
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- JP2008209540A JP2008209540A JP2007044970A JP2007044970A JP2008209540A JP 2008209540 A JP2008209540 A JP 2008209540A JP 2007044970 A JP2007044970 A JP 2007044970A JP 2007044970 A JP2007044970 A JP 2007044970A JP 2008209540 A JP2008209540 A JP 2008209540A
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- Prior art keywords
- stamper
- convex
- antireflection
- fine
- article
- Prior art date
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- 230000003667 anti-reflective effect Effects 0.000 title claims description 12
- 238000000034 method Methods 0.000 claims description 30
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 8
- 238000012546 transfer Methods 0.000 claims description 6
- 238000013461 design Methods 0.000 abstract description 15
- 230000005484 gravity Effects 0.000 abstract description 5
- 230000003405 preventing effect Effects 0.000 abstract 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 24
- 239000000203 mixture Substances 0.000 description 24
- 238000004519 manufacturing process Methods 0.000 description 14
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 12
- 238000011282 treatment Methods 0.000 description 9
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 8
- 239000003999 initiator Substances 0.000 description 8
- 235000006408 oxalic acid Nutrition 0.000 description 8
- 238000007743 anodising Methods 0.000 description 7
- -1 polypropylene Polymers 0.000 description 7
- 239000011148 porous material Substances 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 239000008151 electrolyte solution Substances 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000001723 curing Methods 0.000 description 5
- 239000003505 polymerization initiator Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 4
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 150000005846 sugar alcohols Polymers 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 238000002048 anodisation reaction Methods 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 238000001227 electron beam curing Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 3
- 238000012719 thermal polymerization Methods 0.000 description 3
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 2
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- PTJWCLYPVFJWMP-UHFFFAOYSA-N 2-[[3-hydroxy-2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)COCC(CO)(CO)CO PTJWCLYPVFJWMP-UHFFFAOYSA-N 0.000 description 2
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 2
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical class C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- JLTDJTHDQAWBAV-UHFFFAOYSA-N N,N-dimethylaniline Chemical compound CN(C)C1=CC=CC=C1 JLTDJTHDQAWBAV-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- DZBUGLKDJFMEHC-UHFFFAOYSA-N acridine Chemical compound C1=CC=CC2=CC3=CC=CC=C3N=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-N 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 150000008064 anhydrides Chemical class 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- VFHVQBAGLAREND-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 VFHVQBAGLAREND-UHFFFAOYSA-N 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 235000011187 glycerol Nutrition 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- YLHXLHGIAMFFBU-UHFFFAOYSA-N methyl phenylglyoxalate Chemical class COC(=O)C(=O)C1=CC=CC=C1 YLHXLHGIAMFFBU-UHFFFAOYSA-N 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000000016 photochemical curing Methods 0.000 description 2
- 229920013730 reactive polymer Polymers 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- CXMXRPHRNRROMY-UHFFFAOYSA-N sebacic acid Chemical compound OC(=O)CCCCCCCCC(O)=O CXMXRPHRNRROMY-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 2
- ZUEKXCXHTXJYAR-UHFFFAOYSA-N tetrapropan-2-yl silicate Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)OC(C)C ZUEKXCXHTXJYAR-UHFFFAOYSA-N 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 description 2
- QNODIIQQMGDSEF-UHFFFAOYSA-N (1-hydroxycyclohexyl)-phenylmethanone Chemical compound C=1C=CC=CC=1C(=O)C1(O)CCCCC1 QNODIIQQMGDSEF-UHFFFAOYSA-N 0.000 description 1
- SWFHGTMLYIBPPA-UHFFFAOYSA-N (4-methoxyphenyl)-phenylmethanone Chemical compound C1=CC(OC)=CC=C1C(=O)C1=CC=CC=C1 SWFHGTMLYIBPPA-UHFFFAOYSA-N 0.000 description 1
- ALVZNPYWJMLXKV-UHFFFAOYSA-N 1,9-Nonanediol Chemical compound OCCCCCCCCCO ALVZNPYWJMLXKV-UHFFFAOYSA-N 0.000 description 1
- VQIPSVLHHAYQJH-UHFFFAOYSA-N 1-(7-acridin-1-ylheptyl)acridine Chemical compound C1=CC=C2C=C3C(CCCCCCCC=4C5=CC6=CC=CC=C6N=C5C=CC=4)=CC=CC3=NC2=C1 VQIPSVLHHAYQJH-UHFFFAOYSA-N 0.000 description 1
- BVEIKFLZWBDLJG-UHFFFAOYSA-N 1-butylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2CCCC BVEIKFLZWBDLJG-UHFFFAOYSA-N 0.000 description 1
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 1
- RTBFRGCFXZNCOE-UHFFFAOYSA-N 1-methylsulfonylpiperidin-4-one Chemical compound CS(=O)(=O)N1CCC(=O)CC1 RTBFRGCFXZNCOE-UHFFFAOYSA-N 0.000 description 1
- VOBUAPTXJKMNCT-UHFFFAOYSA-N 1-prop-2-enoyloxyhexyl prop-2-enoate Chemical compound CCCCCC(OC(=O)C=C)OC(=O)C=C VOBUAPTXJKMNCT-UHFFFAOYSA-N 0.000 description 1
- YIKSHDNOAYSSPX-UHFFFAOYSA-N 1-propan-2-ylthioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C=CC=C2C(C)C YIKSHDNOAYSSPX-UHFFFAOYSA-N 0.000 description 1
- PIZHFBODNLEQBL-UHFFFAOYSA-N 2,2-diethoxy-1-phenylethanone Chemical compound CCOC(OCC)C(=O)C1=CC=CC=C1 PIZHFBODNLEQBL-UHFFFAOYSA-N 0.000 description 1
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical class C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 1
- UXCIJKOCUAQMKD-UHFFFAOYSA-N 2,4-dichlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC(Cl)=C3SC2=C1 UXCIJKOCUAQMKD-UHFFFAOYSA-N 0.000 description 1
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 1
- XMNIXWIUMCBBBL-UHFFFAOYSA-N 2-(2-phenylpropan-2-ylperoxy)propan-2-ylbenzene Chemical compound C=1C=CC=CC=1C(C)(C)OOC(C)(C)C1=CC=CC=C1 XMNIXWIUMCBBBL-UHFFFAOYSA-N 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- WFUGQJXVXHBTEM-UHFFFAOYSA-N 2-hydroperoxy-2-(2-hydroperoxybutan-2-ylperoxy)butane Chemical compound CCC(C)(OO)OOC(C)(CC)OO WFUGQJXVXHBTEM-UHFFFAOYSA-N 0.000 description 1
- NLGDWWCZQDIASO-UHFFFAOYSA-N 2-hydroxy-1-(7-oxabicyclo[4.1.0]hepta-1,3,5-trien-2-yl)-2-phenylethanone Chemical compound OC(C(=O)c1cccc2Oc12)c1ccccc1 NLGDWWCZQDIASO-UHFFFAOYSA-N 0.000 description 1
- XMLYCEVDHLAQEL-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-phenylpropan-1-one Chemical compound CC(C)(O)C(=O)C1=CC=CC=C1 XMLYCEVDHLAQEL-UHFFFAOYSA-N 0.000 description 1
- FRIBMENBGGCKPD-UHFFFAOYSA-N 3-(2,3-dimethoxyphenyl)prop-2-enal Chemical compound COC1=CC=CC(C=CC=O)=C1OC FRIBMENBGGCKPD-UHFFFAOYSA-N 0.000 description 1
- BUZICZZQJDLXJN-UHFFFAOYSA-N 3-azaniumyl-4-hydroxybutanoate Chemical compound OCC(N)CC(O)=O BUZICZZQJDLXJN-UHFFFAOYSA-N 0.000 description 1
- 125000004864 4-thiomethylphenyl group Chemical group 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
- UDFGCAKEVMRBJU-UHFFFAOYSA-N CC(C[PH2]=O)CC(C)(C)C Chemical compound CC(C[PH2]=O)CC(C)(C)C UDFGCAKEVMRBJU-UHFFFAOYSA-N 0.000 description 1
- 229920001747 Cellulose diacetate Polymers 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- YIVJZNGAASQVEM-UHFFFAOYSA-N Lauroyl peroxide Chemical compound CCCCCCCCCCCC(=O)OOC(=O)CCCCCCCCCCC YIVJZNGAASQVEM-UHFFFAOYSA-N 0.000 description 1
- NQSMEZJWJJVYOI-UHFFFAOYSA-N Methyl 2-benzoylbenzoate Chemical compound COC(=O)C1=CC=CC=C1C(=O)C1=CC=CC=C1 NQSMEZJWJJVYOI-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- GUCYFKSBFREPBC-UHFFFAOYSA-N [phenyl-(2,4,6-trimethylbenzoyl)phosphoryl]-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C(=O)C1=C(C)C=C(C)C=C1C GUCYFKSBFREPBC-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 1
- 150000001241 acetals Chemical class 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000001361 adipic acid Substances 0.000 description 1
- 235000011037 adipic acid Nutrition 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- JFCQEDHGNNZCLN-UHFFFAOYSA-N anhydrous glutaric acid Natural products OC(=O)CCCC(O)=O JFCQEDHGNNZCLN-UHFFFAOYSA-N 0.000 description 1
- XTKDAFGWCDAMPY-UHFFFAOYSA-N azaperone Chemical compound C1=CC(F)=CC=C1C(=O)CCCN1CCN(C=2N=CC=CC=2)CC1 XTKDAFGWCDAMPY-UHFFFAOYSA-N 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 1
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- YTJUXOIAXOQWBV-UHFFFAOYSA-N butoxy(trimethyl)silane Chemical compound CCCCO[Si](C)(C)C YTJUXOIAXOQWBV-UHFFFAOYSA-N 0.000 description 1
- UPIWXMRIPODGLE-UHFFFAOYSA-N butyl benzenecarboperoxoate Chemical compound CCCCOOC(=O)C1=CC=CC=C1 UPIWXMRIPODGLE-UHFFFAOYSA-N 0.000 description 1
- 238000004113 cell culture Methods 0.000 description 1
- 229920006217 cellulose acetate butyrate Polymers 0.000 description 1
- 239000012461 cellulose resin Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- MJUJXFBTEFXVKU-UHFFFAOYSA-N diethyl phosphonate Chemical compound CCOP(=O)OCC MJUJXFBTEFXVKU-UHFFFAOYSA-N 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- JJQZDUKDJDQPMQ-UHFFFAOYSA-N dimethoxy(dimethyl)silane Chemical compound CO[Si](C)(C)OC JJQZDUKDJDQPMQ-UHFFFAOYSA-N 0.000 description 1
- YYLGKUPAFFKGRQ-UHFFFAOYSA-N dimethyldiethoxysilane Chemical compound CCO[Si](C)(C)OCC YYLGKUPAFFKGRQ-UHFFFAOYSA-N 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- RSIHJDGMBDPTIM-UHFFFAOYSA-N ethoxy(trimethyl)silane Chemical compound CCO[Si](C)(C)C RSIHJDGMBDPTIM-UHFFFAOYSA-N 0.000 description 1
- QKLCQKPAECHXCQ-UHFFFAOYSA-N ethyl phenylglyoxylate Chemical class CCOC(=O)C(=O)C1=CC=CC=C1 QKLCQKPAECHXCQ-UHFFFAOYSA-N 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
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Abstract
Description
本発明は、反射防止物品に関する。 The present invention relates to an antireflection article.
各種ディスプレー、レンズ、ショーウィンドーなどの空気と接する界面(表面)では、太陽光や照明等が表面で反射することによる視認性の低下が問題点となっていた。反射を減らすための方法としては、フィルム表面での反射光と、フィルムと基材の界面での反射光とが干渉によって打ち消し合うように、屈折率の異なる数層のフィルムを積層する方法が知られている。これらのフィルムは、通常、スパッタリング、蒸着、コーティング等の方法で製造される。しかし、このような方法では、フィルムの積層数を増やしても反射率及び反射率の波長依存性の低下には限界があった。また、製造コスト削減のために積層数を減らすためには、より低屈折率の材料が求められていた。 At interfaces (surfaces) that come into contact with air, such as various displays, lenses, and show windows, there has been a problem of reduced visibility due to reflection of sunlight, illumination, and the like on the surface. As a method for reducing reflection, there is known a method in which several layers of films having different refractive indexes are laminated so that reflected light on the film surface and reflected light on the interface between the film and the substrate cancel each other due to interference. It has been. These films are usually produced by methods such as sputtering, vapor deposition, and coating. However, in such a method, even if the number of laminated films is increased, there is a limit to the decrease in the reflectance and the wavelength dependency of the reflectance. Further, in order to reduce the number of stacked layers in order to reduce the manufacturing cost, a material having a lower refractive index has been demanded.
材料の屈折率を下げるためには、何らかの方法で材料中に空気を導入することが有効であるが、その一つとして、例えばフィルムの表面に微細凹凸構造を形成する方法が知られている。この方法によれば、微細凹凸構造が形成された表面の層全体の屈折率が、空気と微細凹凸構造を形成する材料との体積比により決定されるため、大幅に屈折率を下げることが可能になり、積層数が少なくても反射率を低下させることができる。 In order to lower the refractive index of the material, it is effective to introduce air into the material by any method. As one of the methods, for example, a method of forming a fine concavo-convex structure on the surface of a film is known. According to this method, since the refractive index of the entire surface layer on which the fine concavo-convex structure is formed is determined by the volume ratio between air and the material forming the fine concavo-convex structure, the refractive index can be significantly reduced. Thus, the reflectance can be reduced even when the number of stacked layers is small.
また、ガラス基板上に形成された反射防止膜において、角錐状の凸部が膜全体に連続的に形成された反射防止膜が提案されている(例えば、特許文献1参照。)。特許文献1に記載のように、角錐状の凸部(微細凹凸構造)が形成された反射防止膜は、膜面方向に切断した時の断面積が連続的に変化し、空気の屈折率から基板の屈折率まで徐々に屈折率が増大していくため、有効な反射防止の手段となる。
ところで、上述したように基板表面に微細凹凸構造を形成する方法としては、電子ビームリソグラフィー法や、レーザー光干渉法などで作成した微細凹凸構造を有するスタンパを用いて、その微細凹凸構造を転写する方法が知られている。しかし、このような方法で形成された微細凹凸構造は、その規則性が高すぎるため、光干渉により干渉色が発生するという問題があった。
In addition, an antireflection film has been proposed in which pyramidal convex portions are continuously formed on the entire film in the antireflection film formed on the glass substrate (see, for example, Patent Document 1). As described in Patent Document 1, the antireflection film in which the pyramid-shaped convex portion (fine concavo-convex structure) is formed has a continuously changing cross-sectional area when cut in the film surface direction, and the refractive index of air Since the refractive index gradually increases up to the refractive index of the substrate, it is an effective antireflection means.
By the way, as described above, as a method for forming the fine concavo-convex structure on the substrate surface, the fine concavo-convex structure is transferred using a stamper having a fine concavo-convex structure created by an electron beam lithography method or a laser beam interference method. The method is known. However, the fine concavo-convex structure formed by such a method has a problem that interference color is generated due to light interference because the regularity thereof is too high.
そこで、適度な規則性の微細凹凸構造を形成する手段として、近年、陽極酸化アルミナが注目されている。例えば、アルミニウムを、シュウ酸、硫酸、リン酸などの電解液中で所定の電圧にて陽極酸化することにより形成されるアルミナの細孔構造を有する部材を、スタンパとして利用する方法が提案されている(例えば、特許文献2参照。)。
一方、微細凹凸構造を有する物品の製造方法としては、基材表面にケイ素酸化合物などの無機酸化物からなる親水性皮膜をスパッタリングにより形成する方法(例えば、特許文献3参照。)や、無機微粒子溶液をソーダガラスの表面にスピンコートした後、加熱・硬化する方法(例えば、特許文献4参照。)などが知られている。
On the other hand, as a method for producing an article having a fine concavo-convex structure, a method of forming a hydrophilic film made of an inorganic oxide such as a silicon acid compound on a substrate surface by sputtering (for example, see Patent Document 3), or inorganic fine particles. A method of heating and curing after spin-coating a solution on the surface of soda glass (for example, see Patent Document 4) is known.
しかしながら、特許文献2に記載の方法では、スタンパに高純度のアルミニウムを使用するため、長時間の陽極酸化によって結晶粒界が明確化し、スタンパの微細凹凸構造を転写する対象物などにスタンパ由来の模様が見られ、意匠性が低下するという問題があった。
また、特許文献3、4に記載の製造方法で得られる微細凹凸構造を有する物品は、隣り合う凸部の規則性を調節することが難しく、反射防止性が十分に得られないという問題があった。
However, in the method described in Patent Document 2, since high-purity aluminum is used for the stamper, the crystal grain boundary is clarified by long-term anodic oxidation, and the stamper-derived object is transferred to the fine uneven structure of the stamper. There existed a problem that a pattern was seen and the designability fell.
Further, an article having a fine concavo-convex structure obtained by the manufacturing methods described in Patent Documents 3 and 4 has a problem that it is difficult to adjust the regularity of adjacent convex portions and sufficient antireflection properties cannot be obtained. It was.
本発明は、上記事情を鑑みてなされたもので、反射防止性と意匠性に優れた反射防止物品の実現を目的とする。 The present invention has been made in view of the above circumstances, and an object thereof is to realize an antireflection article excellent in antireflection properties and design properties.
本発明の反射防止物品は、表面に微細凹凸構造を有する反射防止物品であって、前記微細凹凸構造の隣り合う凸部同士の距離が可視光の波長以下であり、かつ、任意の凸部と、該凸部に隣接する6個の凸部との各重心間距離の標準偏差が、4.0〜12.0であることを特徴とする。
ここで、前記微細凹凸構造が、陽極酸化アルミナをスタンパとして利用した転写法により形成されたことが好ましい。
The antireflective article of the present invention is an antireflective article having a fine concavo-convex structure on its surface, and the distance between adjacent convex parts of the fine concavo-convex structure is equal to or less than the wavelength of visible light, and any convex part The standard deviation of the distance between the centroids of the six convex portions adjacent to the convex portion is 4.0 to 12.0.
Here, it is preferable that the fine uneven structure is formed by a transfer method using anodized alumina as a stamper.
本発明によれば、反射防止性と意匠性に優れた反射防止物品が実現できる。 ADVANTAGE OF THE INVENTION According to this invention, the antireflection article excellent in antireflection property and design property is realizable.
以下本発明を詳細に説明する。
図1は、本発明の反射防止物品10の一例を示す縦断面図であって、該反射防止物品10は、後述する透明成形体11の上に活性エネルギー線硬化性組成物の硬化物12が形成されたものである。反射防止物品10は、その表面に微細凹凸構造が形成されている。
なお、反射防止物品10は、表面全体に微細凹凸構造が形成されていてもよく、表面の一部に微細凹凸構造が形成されていてもよい。特に、反射防止物品10が膜形状の場合は、一方の表面の全面に微細凹凸構造が形成されていてもよく、一方の表面の一部に微細凹凸構造が形成されていてもよい。また、他方の表面に微細凹凸構造が形成されていてもよく、形成されていなくてもよい。
The present invention will be described in detail below.
FIG. 1 is a longitudinal sectional view showing an example of the
The
前記微細凹凸構造は、該微細凹凸構造の隣り合う凸部同士の距離が可視光の波長以下である。これにより、反射防止性を発現できる。前記距離が可視光の波長より大きいと、微細凹凸構造が形成された表面上で可視光の散乱が起こるため、反射防止物品などの光学用途には適さない。
なお、本発明において「可視光の波長」とは400nmの波長を意味する。また、「隣り合う凸部同士の距離」とは、図1に示すように、微細凹凸構造の凸部13の中心からこれに隣接する凸部の中心までの距離w1のことである。
In the fine concavo-convex structure, the distance between adjacent convex portions of the fine concavo-convex structure is equal to or less than the wavelength of visible light. Thereby, antireflection property can be expressed. When the distance is larger than the wavelength of visible light, visible light is scattered on the surface on which the fine concavo-convex structure is formed, so that it is not suitable for optical use such as an antireflection article.
In the present invention, “visible light wavelength” means a wavelength of 400 nm. Further, “distance between adjacent convex portions” is a distance w1 from the center of the
前記凸部13の高さは60nm以上が好ましく、更には90nm以上であることがより好ましい。60nm未満だと最低反射率が上昇したり、特定波長の反射率が上昇したりして、反射防止性が不十分となる。
なお、本発明において「凸部の高さ」とは、図1に示すように、凸部13の先端13aから隣接する凹部14の底部14aまでの垂直距離d1のことである。
また、微細凹凸構造の凸部13の形状は特に限定されないが、連続的に屈折率を増大させて低反射率と低波長依存性を両立させた反射防止機能を得るためには、図1に示すような略円錐形状や角錐形状、図2に示すような釣鐘形状など、膜面で切断した時の断面積の占有率が連続的に増大するような構造が好ましい。また、より微細な凸部が複数合一して上記の微細凹凸構造を形成していてもよい。
The height of the
In the present invention, “the height of the convex portion” means a vertical distance d1 from the
Further, the shape of the
本発明の反射防止物品は、その表面に形成された微細凹凸構造の任意の凸部と、該凸部に隣接する6個の凸部との各重心間距離の標準偏差が、4.0〜12.0であり、4.0〜9.6が好ましい。標準偏差が4.0未満だと反射防止物品に、後述するスタンパに由来する模様が見られるようになり、意匠性が低下する。一方、標準偏差が12.0より大きいと、隣り合う凸部同士の間に平滑部位が生じ、該平滑部位での反射により反射防止性が低下する。なお、上述した標準偏差は、以下の方法により求められる。
まず、反射防止物品の表面を電子顕微鏡(5万倍)で観察し、得られた画像(写真)を、例えばImage−Pro PLUS(日本ローパー社製)などのソフトウエアで画像解析し、微細凹凸構造の凸部の重心座標を計算する。次いで、任意の凸部を選択し、その凸部に隣接する凸部のうち任意の6点を選択して、先の任意の凸部からの座標距離の標準偏差を求める。以上の操作を10回実施し、それらの平均を「微細凹凸構造の任意の凸部と、該凸部に隣接する6個の凸部との各重心間距離の標準偏差」とする。該標準偏差は、微細凹凸構造の規則性の指標となる。
In the antireflection article of the present invention, the standard deviation of the distance between the centers of gravity of any convex part of the fine concavo-convex structure formed on the surface and the six convex parts adjacent to the convex part is 4.0 to 4.0. 12.0, preferably 4.0 to 9.6. When the standard deviation is less than 4.0, a pattern derived from a stamper, which will be described later, can be seen in the antireflection article, and the design properties are lowered. On the other hand, when the standard deviation is larger than 12.0, a smooth portion is generated between adjacent convex portions, and the antireflection property is deteriorated due to reflection at the smooth portion. In addition, the standard deviation mentioned above is calculated | required with the following method.
First, the surface of the anti-reflective article is observed with an electron microscope (50,000 times), and the obtained image (photograph) is image-analyzed with software such as Image-Pro PLUS (manufactured by Nippon Roper). Calculate the barycentric coordinates of the convex part of the structure. Next, an arbitrary convex portion is selected, six arbitrary points are selected from the convex portions adjacent to the convex portion, and the standard deviation of the coordinate distance from the previous arbitrary convex portion is obtained. The above operation is carried out 10 times, and the average of them is defined as “standard deviation of the distance between the centers of gravity of an arbitrary convex portion of the fine concavo-convex structure and six convex portions adjacent to the convex portion”. The standard deviation is an index of the regularity of the fine uneven structure.
また、本発明の反射防止物品の反射率は、1.0%以下であることが好ましく、0.8%以下であることがより好ましい。反射率が1.0%より大きいと、十分に映り込みを低減できにくくなる。なお、反射率とは、入射角5°、波長380nm〜780nmの範囲で、微細凹凸構造が形成された反射防止物品の表面の相対反射率を測定したものである。 Further, the reflectance of the antireflection article of the present invention is preferably 1.0% or less, and more preferably 0.8% or less. If the reflectance is greater than 1.0%, it becomes difficult to reduce the reflection sufficiently. The reflectance is a value obtained by measuring the relative reflectance of the surface of the antireflection article on which the fine concavo-convex structure is formed within an incident angle of 5 ° and a wavelength range of 380 nm to 780 nm.
反射防止物品の表面に微細凹凸構造を形成する方法は特に限定されないが、スタンパを利用した転写法が好ましい。転写法としては、例えば、図3に示すような微細凹凸構造が形成されたスタンパ20を用いて、射出成形、プレス成形する方法、微細凹凸構造が形成されたスタンパと透明成形体の間に活性エネルギー線硬化性組成物を充填し、活性エネルギー線照射にて活性エネルギー線硬化性組成物を硬化してスタンパの凹凸形状を転写した後、離型する方法、微細凹凸構造が形成されたスタンパと透明成形体の間に活性エネルギー線硬化性組成物を充填し、活性エネルギー線硬化性組成物にスタンパの凹凸形状を転写した後離型し、その後に活性エネルギー線を照射して活性エネルギー線硬化性組成物を硬化させる方法が挙げられる。中でも、凹凸構造の転写性、表面組成の自由度を考慮すると、微細凹凸構造が形成されたスタンパと透明成形体の間に活性エネルギー線硬化性組成物を充填し、活性エネルギー線照射にて活性エネルギー線硬化性組成物を硬化してスタンパの凹凸形状を転写した後、離型する方法が本発明には適している。
A method for forming the fine uneven structure on the surface of the antireflection article is not particularly limited, but a transfer method using a stamper is preferable. As a transfer method, for example, a
前記透明成形体としては特に制限されないが、反射防止物品が光学用途に用いられる場合には、光を透過するものであればよい。例えば、メチルメタクリレート(共)重合体、ポリカーボネート、スチレン(共)重合体、メチルメタクリレート−スチレン共重合体、セルロースジアセテート、セルローストリアセテート、セルロースアセテートブチレート、ポリエステル、ポリアミド、ポリイミド、ポリエーテルスルフォン、ポリスルフォン、ポリプロピレン、ポリメチルペンテン、ポリ塩化ビニル、ポリビニルアセタール、ポリエーテルケトン、ポリウレタン、ガラスなどが挙げられる。透明成形体は射出成形、押し出し成形、キャスト成形のいずれの方法によって作成してもよい。
透明成形体の形状には特に制限はなく、製造する反射防止物品に応じて適宜選択できるが、例えば反射防止物品が反射防止膜などである場合には、シート状またはフィルム状が好ましい。また、活性エネルギー線硬化性組成物との密着性や、帯電防止性、耐擦傷性、耐候性等の改良のために、透明成形体の表面には例えば各種コーティングやコロナ放電処理が施されていてもよい。
Although it does not restrict | limit especially as said transparent molded object, When an antireflection article is used for an optical use, what is necessary is just to transmit light. For example, methyl methacrylate (co) polymer, polycarbonate, styrene (co) polymer, methyl methacrylate-styrene copolymer, cellulose diacetate, cellulose triacetate, cellulose acetate butyrate, polyester, polyamide, polyimide, polyethersulfone, poly Examples include sulfone, polypropylene, polymethylpentene, polyvinyl chloride, polyvinyl acetal, polyether ketone, polyurethane, and glass. The transparent molded body may be produced by any method of injection molding, extrusion molding, and cast molding.
There is no restriction | limiting in particular in the shape of a transparent molded object, Although it can select suitably according to the antireflection article to manufacture, For example, when an antireflection article is an antireflection film etc., a sheet form or a film form is preferable. In addition, the surface of the transparent molded body is subjected to, for example, various coatings and corona discharge treatments in order to improve adhesion to the active energy ray-curable composition, antistatic properties, scratch resistance, weather resistance, and the like. May be.
図3に示すような、微細凹凸構造を形成したスタンパ20を作成する方法は、微細凹凸構造の隣り合う凸部同士の距離が可視光以下の波長となり、かつ、任意の凸部と、該凸部に隣接する6個の凸部との各重心間距離の標準偏差が、4.0〜12.0となるような微細凹凸構造を転写できれば特に限定されないが、大面積化、ロール化が容易という点で、陽極酸化アルミナをスタンパとして利用することが好ましい。
例えば、アルミニウムを、シュウ酸、硫酸、リン酸等の電解液中で所定の電圧にて陽極酸化する方法によって、図3に示すように距離w2が20〜200nmの凹部(細孔)21が形成されるが、これをスタンパとして利用してもよい。この方法によれば、高純度アルミニウムを定電圧で長時間陽極酸化した後、一旦酸化皮膜を除去し、再び陽極酸化することで細孔が自己組織化的に形成できる。さらに、再陽極酸化する際に陽極酸化処理と孔径拡大処理を組み合わせることで、図3に示すような略円錐形状や角錐形状以外にも、凹部が逆釣鐘形状などの微細凹凸構造を形成することも可能である。また、図3に示すような、微細凹凸構造を有するものを原盤として、電鋳法等で複製型を作製し、これをスタンパとして使用してもよい。
このようにして作成されるスタンパによれば、微細凹凸構造の隣り合う凸部同士の距離が可視光以下の波長となり、かつ、任意の凸部と、該凸部に隣接する6個の凸部との各重心間距離の標準偏差が、4.0〜12.0となるような微細凹凸構造を転写できるので、反射防止性に優れた反射防止物品が得られる。また、高純度のアルミニウムを使用しても意匠性に優れた反射防止物品が得られる。
また、スタンパの形状は特に限定されず、平板状でもロール状でもよいが、ロール状にすることで連続的に微細凹凸構造を活性エネルギー線硬化性組成物に転写できるため、生産性をより高めることができ好ましい。
As shown in FIG. 3, the method of creating the
For example, a recess (pore) 21 having a distance w2 of 20 to 200 nm is formed as shown in FIG. 3 by a method of anodizing aluminum at a predetermined voltage in an electrolyte such as oxalic acid, sulfuric acid, and phosphoric acid. However, this may be used as a stamper. According to this method, after anodizing high-purity aluminum for a long time at a constant voltage, pores can be formed in a self-organized manner by once removing the oxide film and anodizing again. Furthermore, when re-anodizing is performed, a combination of anodizing treatment and pore size enlargement treatment forms a concave-convex structure such as a reverse bell shape in addition to a substantially conical shape or pyramid shape as shown in FIG. Is also possible. Further, as shown in FIG. 3, a replica having a fine concavo-convex structure may be used as a master, and a replication mold may be produced by electroforming or the like, and this may be used as a stamper.
According to the stamper thus created, the distance between adjacent convex portions of the fine concavo-convex structure has a wavelength of visible light or less, and an arbitrary convex portion and six convex portions adjacent to the convex portion. Since the fine concavo-convex structure in which the standard deviation of the distance between the centers of gravity is 4.0 to 12.0 can be transferred, an antireflection article having excellent antireflection properties can be obtained. Moreover, even if high-purity aluminum is used, an antireflection article excellent in design can be obtained.
Further, the shape of the stamper is not particularly limited, and may be a flat plate shape or a roll shape. However, since the fine uneven structure can be continuously transferred to the active energy ray-curable composition by forming the roll shape, the productivity is further increased. Can be preferable.
本発明に用いられる活性エネルギー線硬化性組成物は、必要に応じて光硬化性、熱硬化性、電子線硬化性等の硬化反応を引き起こし、反応を促進したり調節したりする成分や、他の成分を配合することにより調製され、主成分として重合性化合物と重合開始剤の混合物が含まれる。
重合性化合物としては、例えば、1モルの多価アルコールと、2モル以上の(メタ)アクリル酸またはその誘導体とから得られるエステル化物;多価アルコールと、多価カルボン酸またはその無水物と、(メタ)アクリル酸またはその誘導体とから得られるエステル化物などが挙げられる。具体的には、1,4−ブタンジオールジ(メタ)アクリレート、1,6−ヘキサンジオールジ(メタ)アクリレート、1,9−ノナンジオールジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、トリメチロールエタントリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、グリセリントリ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、トリペンタエリスリトールヘキサ(メタ)アクリレート、トリペンタエリスリトールヘプタ(メタ)アクリレート等の1モルの多価アルコールと、2モル以上の(メタ)アクリル酸またはその誘導体とから得られるエステル化物;トリメチロールエタン、トリメチロールプロパン、グリセリン、ペンタエリスリトール等の多価アルコールと、マロン酸、コハク酸、アジピン酸、グルタル酸、セバシン酸、フマル酸、イタコン酸、無水マレイン酸等の多価カルボン酸またはその無水物と、(メタ)アクリル酸またはその誘導体からそれぞれ任意に選択された組み合わせで得られるエステル化物などが挙げられる。これらは1種を単独で用いても、2種以上を併用してもよい。
The active energy ray curable composition used in the present invention causes a curing reaction such as photocuring property, thermosetting property, electron beam curable property, etc., if necessary, and other components that promote or adjust the reaction, etc. And a mixture of a polymerizable compound and a polymerization initiator is included as a main component.
Examples of the polymerizable compound include esterified products obtained from 1 mol of a polyhydric alcohol and 2 mol or more of (meth) acrylic acid or a derivative thereof; a polyhydric alcohol and a polyvalent carboxylic acid or an anhydride thereof; Examples include esterified products obtained from (meth) acrylic acid or its derivatives. Specifically, 1,4-butanediol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, 1,9-nonanediol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, Trimethylolethane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, glycerin tri (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, It is obtained from 1 mol of polyhydric alcohol such as tripentaerythritol hexa (meth) acrylate, tripentaerythritol hepta (meth) acrylate and 2 mol or more of (meth) acrylic acid or its derivatives. Esterified products: polyhydric alcohols such as trimethylolethane, trimethylolpropane, glycerin and pentaerythritol, and polyvalent alcohols such as malonic acid, succinic acid, adipic acid, glutaric acid, sebacic acid, fumaric acid, itaconic acid and maleic anhydride Examples thereof include esterified products obtained by a combination arbitrarily selected from carboxylic acid or its anhydride and (meth) acrylic acid or its derivative. These may be used alone or in combination of two or more.
光硬化反応を利用する場合、光重合開始剤としては、例えば、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル、ベンゾインイソブチルエーテル、ベンジル、ベンゾフェノン、p−メトキシベンゾフェノン、2,2−ジエトキシアセトフェノン、α,α−ジメトキシ−α−フェニルアセトフェノン、メチルフェニルグリオキシレート、エチルフェニルグリオキシレート、4,4’−ビス(ジメチルアミノ)ベンゾフェノン、2−ヒドロキシ−2−メチル−1−フェニルプロパン−1−オン等のカルボニル化合物;テトラメチルチウラムモノスルフィド、テトラメチルチウラムジスルフィド等の硫黄化合物;2,4,6−トリメチルベンゾイルジフェニルフォスフィンオキサイド、ベンゾイルジエトキシフォスフィンオキサイドなどが挙げられる。また、市販の光重合開始剤を使用してもよい。これらは1種を単独で用いても、2種以上を併用してもよい。 When utilizing a photocuring reaction, examples of the photopolymerization initiator include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, benzyl, benzophenone, p-methoxybenzophenone, 2,2-diethoxy. Acetophenone, α, α-dimethoxy-α-phenylacetophenone, methylphenylglyoxylate, ethylphenylglyoxylate, 4,4′-bis (dimethylamino) benzophenone, 2-hydroxy-2-methyl-1-phenylpropane- Carbonyl compounds such as 1-one; sulfur compounds such as tetramethylthiuram monosulfide and tetramethylthiuram disulfide; 2,4,6-trimethylbenzoyldiphenylphosphine oxide, benzoic acid Such as diethoxy phosphine oxide. Moreover, you may use a commercially available photoinitiator. These may be used alone or in combination of two or more.
熱硬化反応を利用する場合、熱重合開始剤としては例えば、メチルエチルケトンパーオキサイド、ベンゾイルパーオキサイド、ジクミルパーオキサイド、t−ブチルハイドロパーオキサイド、クメンハイドロパーオキサイド、t−ブチルパーオキシオクトエート、t−ブチルパーオキシベンゾエート、ラウロイルパーオキサイド等の有機過酸化物;アゾビスイソブチロニトリル等のアゾ系化合物;前記有機過酸化物にN,N−ジメチルアニリン、N,N−ジメチル−p−トルイジン等のアミンを組み合わせたレドックス重合開始剤等が挙げられる。また、市販の熱重合開始剤を使用してもよい。これらは、1種を単独で用いても、2種以上を併用してもよい。 When using a thermosetting reaction, examples of the thermal polymerization initiator include methyl ethyl ketone peroxide, benzoyl peroxide, dicumyl peroxide, t-butyl hydroperoxide, cumene hydroperoxide, t-butyl peroxy octoate, t Organic peroxides such as butyl peroxybenzoate and lauroyl peroxide; azo compounds such as azobisisobutyronitrile; N, N-dimethylaniline, N, N-dimethyl-p-toluidine And redox polymerization initiators combined with amines such as A commercially available thermal polymerization initiator may be used. These may be used alone or in combination of two or more.
電子線硬化反応を利用する場合、電子線硬化開始剤としては例えば、ベンゾフェノン、4,4−ビス(ジエチルアミノ)ベンゾフェノン、2,4,6−トリメチルベンゾフェノン、メチルオルソベンゾイルベンゾエート、4−フェニルベンゾフェノン、t−ブチルアントラキノン、2−エチルアントラキノン、2,4−ジエチルチオキサントン、イソプロピルチオキサントン、2,4−ジクロロチオキサントン等のチオキサントン;ジエトキシアセトフェノン、2−ヒドロキシ−2−メチル−1−フェニルプロパン−1−オン、ベンジルジメチルケタール、1−ヒドロキシシクロヘキシル−フェニルケトン、2−メチル−2−モルホリノ(4−チオメチルフェニル)プロパン−1−オン、2−ベンジル−2−ジメチルアミノ−1−(4−モルホリノフェニル)−ブタノン等のアセトフェノン;ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル、ベンゾインイソブチルエーテル等のベンゾインエーテル;2,4,6−トリメチルベンゾイルジフェニルホスフィンオキサイド、ビス(2,6−ジメトキシベンゾイル)−2,4,4−トリメチルペンチルホスフィンオキサイド、ビス(2,4,6−トリメチルベンゾイル)−フェニルホスフィンオキサイド等のアシルホスフィンオキサイド;メチルベンゾイルホルメート、1,7−ビスアクリジニルヘプタン、9−フェニルアクリジン等が挙げられる。また、市販の電子線硬化開始剤を使用してもよい。これらは、1種を単独で用いても、2種以上を併用してもよい。 When utilizing an electron beam curing reaction, examples of the electron beam curing initiator include benzophenone, 4,4-bis (diethylamino) benzophenone, 2,4,6-trimethylbenzophenone, methyl orthobenzoylbenzoate, 4-phenylbenzophenone, t Thioxanthone such as butylanthraquinone, 2-ethylanthraquinone, 2,4-diethylthioxanthone, isopropylthioxanthone, 2,4-dichlorothioxanthone; diethoxyacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, Benzyl dimethyl ketal, 1-hydroxycyclohexyl-phenyl ketone, 2-methyl-2-morpholino (4-thiomethylphenyl) propan-1-one, 2-benzyl-2-dimethylamino-1- (4-mol Acetophenone such as linophenyl) -butanone; benzoin ether such as benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether; 2,4,6-trimethylbenzoyldiphenylphosphine oxide, bis (2,6-dimethoxybenzoyl)- Acylphosphine oxides such as 2,4,4-trimethylpentylphosphine oxide and bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide; methylbenzoylformate, 1,7-bisacridinylheptane, 9-phenyl Examples include acridine. Moreover, you may use a commercially available electron beam hardening initiator. These may be used alone or in combination of two or more.
上述した光重合開始剤、熱重合開始剤、電子線硬化開始剤は、単独で用いても、所望の組み合わせで用いてもよい。
これら開始剤の含有量は、重合性化合物100質量部に対して0.01〜10質量部である。含有量が0.01質量部未満であると、十分に硬化しにくくなる。一方、含有量が10質量部より多くなると、得られる硬化物が着色したり、機械強度が低下したりする。
The photopolymerization initiator, thermal polymerization initiator, and electron beam curing initiator described above may be used alone or in any desired combination.
Content of these initiators is 0.01-10 mass parts with respect to 100 mass parts of polymeric compounds. When the content is less than 0.01 parts by mass, it becomes difficult to cure sufficiently. On the other hand, when the content is more than 10 parts by mass, the obtained cured product is colored or the mechanical strength is lowered.
また、活性エネルギー線硬化性組成物には、上述したもの以外に、非反応性のポリマーや活性エネルギー線ゾルゲル反応性組成物が配合されていてもよい。
非反応性のポリマーとしては、アクリル樹脂、スチレン系樹脂、ポリウレタン樹脂、セルロース樹脂、ポリビニルブチラール樹脂、ポリエステル樹脂、熱可塑性エラストマーなどが挙げられる。
Moreover, in addition to what was mentioned above, the non-reactive polymer and the active energy ray sol-gel reactive composition may be mix | blended with the active energy ray curable composition.
Examples of the non-reactive polymer include acrylic resins, styrene resins, polyurethane resins, cellulose resins, polyvinyl butyral resins, polyester resins, and thermoplastic elastomers.
活性エネルギー線ゾルゲル反応性組成物としては、特に限定されないが例えばアルコキシシラン化合物、アルキルシリケート化合物などが挙げられる。
アルコキシシラン化合物としては、RxSi(OR’)yで表せるものが使用でき、RおよびR’は炭素数1〜10のアルキル基を表し、xおよびyは、x+y=4の関係を満たす整数である。具体的には、テトラメトキシシラン、テトラ−iso−プロポキシシラン、テトラ−n−プロポキシシラン、テトラ−n−ブトキシシラン、テトラ−sec−ブトキシシラン、テトラ−tert−ブトキシシラン、メチルトリエトキシシラン、メチルトリプロポキシシラン、メチルトリブトキシシラン、ジメチルジメトキシシラン、ジメチルジエトキシシラン、トリメチルエトキシシラン、トリメチルメトキシシラン、トリメチルプロポキシシラン、トリメチルブトキシシランなどが挙げられる。
アルキルシリケート化合物としては、R1O[Si(OR3)(OR4)O]zR2で表せるものが使用でき、R1〜R4はそれぞれ炭素数1〜5のアルキル基を示し、zは3〜20の整数を示す。具体的にはメチルシリケート、エチルシリケート、イソプロピルシリケート、n−プロピルシリケート、n−ブチルシリケート、n−ペンチルシリケート、アセチルシリケートなどが挙げられる。
Although it does not specifically limit as an active energy ray sol-gel reactive composition, For example, an alkoxysilane compound, an alkyl silicate compound, etc. are mentioned.
As the alkoxysilane compound, those represented by R x Si (OR ′) y can be used, R and R ′ represent an alkyl group having 1 to 10 carbon atoms, and x and y are integers satisfying the relationship of x + y = 4 It is. Specifically, tetramethoxysilane, tetra-iso-propoxysilane, tetra-n-propoxysilane, tetra-n-butoxysilane, tetra-sec-butoxysilane, tetra-tert-butoxysilane, methyltriethoxysilane, methyl Examples include tripropoxysilane, methyltributoxysilane, dimethyldimethoxysilane, dimethyldiethoxysilane, trimethylethoxysilane, trimethylmethoxysilane, trimethylpropoxysilane, and trimethylbutoxysilane.
The alkyl silicate compounds, R 1 O [Si (OR 3) (OR 4) O] those expressed by z R 2 can be used, R 1 to R 4 each represents an alkyl group having 1 to 5 carbon atoms, z Represents an integer of 3 to 20. Specific examples include methyl silicate, ethyl silicate, isopropyl silicate, n-propyl silicate, n-butyl silicate, n-pentyl silicate, acetyl silicate and the like.
さらに、活性エネルギー線硬化性組成物には、必要に応じて、増粘剤、レベリング剤、紫外線吸収剤、光安定剤、熱安定剤、溶剤、無機フィラー等の各種添加剤などが添加されていてもよい。 Furthermore, various additives such as thickeners, leveling agents, ultraviolet absorbers, light stabilizers, heat stabilizers, solvents, inorganic fillers, and the like are added to the active energy ray-curable composition as necessary. May be.
活性エネルギー線硬化性組成物を硬化させる際に使用する活性エネルギー線としては、具体的には可視光線、紫外線、電子線、プラズマ、赤外線などの熱線などが挙げられる。
活性エネルギー線の光照射は、例えば高圧水銀ランプを用いて行われる。光照射エネルギー量は、樹脂組成物の硬化が進むエネルギー量であれば特に限定はされないが、例えば100〜5000mJ/cm2が好ましい。
Specific examples of the active energy ray used when the active energy ray-curable composition is cured include visible rays, ultraviolet rays, electron beams, plasma, infrared rays and the like.
The active energy ray is irradiated with light using, for example, a high-pressure mercury lamp. The light irradiation energy amount is not particularly limited as long as the curing of the resin composition proceeds. For example, 100 to 5000 mJ / cm 2 is preferable.
このようにして製造された反射防止物品は、その表面に図3に示すスタンパの微細凹凸構造が、鍵穴と鍵の関係で転写される。得られる反射防止物品は、意匠性や反射防止性に優れるため、特に反射防止膜(反射防止フィルムを含む)、立体形状の反射防止体として好適である。
反射防止物品が膜形状である場合には、例えば、液晶表示装置、プラズマディスプレイパネル、エレクトロルミネッセンスディスプレイ、陰極管表示装置のような画像表示装置、レンズ、ショーウィンドー、眼鏡レンズ、1/2波長板、ローパスフィルター等の対象物の表面に貼り付けて使用される。
反射防止物品が立体形状である場合には、予め用途に応じた形状の透明成形体を用いて反射防止物品を製造しておき、これを上記対象物の表面を構成する部材として使用することもできる。
また、対象物が画像表示装置である場合には、その表面に限らず、その前面板に対して反射防止物品を貼り付けてもよいし、前面板そのものを本発明の反射防止物品から構成することもできる。
In the antireflection article thus manufactured, the fine uneven structure of the stamper shown in FIG. 3 is transferred on the surface thereof in a relationship between the keyhole and the key. Since the obtained antireflection article is excellent in design and antireflection properties, it is particularly suitable as an antireflection film (including an antireflection film) and a three-dimensional antireflection body.
When the antireflective article has a film shape, for example, an image display device such as a liquid crystal display device, a plasma display panel, an electroluminescence display, a cathode ray tube display device, a lens, a show window, a spectacle lens, a half wavelength Used by sticking to the surface of objects such as plates and low-pass filters.
When the antireflective article has a three-dimensional shape, the antireflective article is manufactured in advance using a transparent molded body having a shape suitable for the application, and this can be used as a member constituting the surface of the object. it can.
Further, when the object is an image display device, the antireflection article may be attached to the front plate, not limited to the surface thereof, or the front plate itself is made of the antireflection article of the present invention. You can also.
なお、本発明によれば、上述したスタンパを用いることにより、例えば、光導波路、レリーフホログラム、レンズ、偏光分離素子、光取出し効率向上フィルム、1/2波長板、ローパスフィルター、水晶デバイスなどの光学物品、細胞培養シートなどを製造することもできる。 According to the present invention, by using the above-described stamper, for example, optical waveguides, relief holograms, lenses, polarization separation elements, light extraction efficiency improving films, half-wave plates, low-pass filters, crystal devices, etc. Articles, cell culture sheets and the like can also be produced.
このように本発明の反射防止物品は、表面に微細凹凸構造を有し、該微細凹凸構造の隣り合う凸部同士の距離が可視光以下の波長であるため、反射防止性に優れる。また、微細凹凸構造の任意の凸部と、該凸部に隣接する6個の凸部との各重心間距離の標準偏差が、4.0〜12.0であるため、意匠性にも優れる。さらに、凸部の高さが60nm以上であれば、反射防止性により優れる。また、反射率が1.0以下であれば、映り込みを十分に低減できる。 As described above, the antireflection article of the present invention has a fine concavo-convex structure on the surface, and the distance between adjacent convex portions of the fine concavo-convex structure is a wavelength of visible light or less, and thus has excellent antireflection properties. Moreover, since the standard deviation of each center-of-gravity distance between the arbitrary convex part of the fine concavo-convex structure and the six convex parts adjacent to the convex part is 4.0 to 12.0, the design is excellent. . Furthermore, if the height of the convex portion is 60 nm or more, the antireflection property is more excellent. Further, if the reflectance is 1.0 or less, the reflection can be sufficiently reduced.
以下、本発明を実施例により具体的に説明するが、本発明はこれらに限定されるものではない。 Hereinafter, the present invention will be specifically described by way of examples, but the present invention is not limited thereto.
<各種評価および測定方法>
(反射率の測定)
製造された反射防止物品の裏面(微細凹凸構造が形成されていない面)を黒色スプレーで塗り、これをサンプルとし、分光光度計(日立社製、「U‐4100」)を用いて入射角5°、波長380nm〜780nmの範囲で反射防止物品の表面(微細凹凸構造が形成された面)の相対反射率を測定した。
<Various evaluations and measurement methods>
(Measurement of reflectance)
The back surface of the manufactured antireflection article (the surface on which the fine uneven structure is not formed) is painted with black spray, and this is used as a sample, using a spectrophotometer (manufactured by Hitachi, “U-4100”) with an incident angle of 5 The relative reflectance of the surface of the antireflection article (the surface on which the fine concavo-convex structure was formed) was measured in the range of 380 nm to 780 nm.
(意匠性の判定)
各サンプルに、結晶粒界由来の模様があるかどうかを目視し、以下に示す基準にて評価した。
○:目視で模様は観察されない。
×:目視で模様が観察できる。
(Design determination)
Each sample was visually checked to see if it had a pattern derived from a grain boundary, and evaluated according to the following criteria.
○: No pattern is visually observed.
X: A pattern can be observed visually.
(電子顕微鏡によるサンプル表面の観察)
走査電子顕微鏡(日本電子社製、「JSM‐7400F」)を用いて、スタンパおよび反射防止物品の表面に形成された微細凹凸構造を観察した。得られた画像から、スタンパの場合は隣り合う凹部同士の距離と凹部の深さを測定し、反射防止物品の場合は隣り合う凸部同士の距離と凸部の高さを測定した。
なお、スタンパの表面に形成された微細凹凸構造の凹部同士の距離とは、図3に示すように、凹部21の中心からこれに隣接する凹部の中心までの距離w2のことである。また、凹部の深さとは、凹部21の底部から隣接する凸部の先端までの垂直距離d2のことである。
(Observation of sample surface with electron microscope)
Using a scanning electron microscope (“JSM-7400F” manufactured by JEOL Ltd.), the fine uneven structure formed on the surfaces of the stamper and the antireflection article was observed. In the case of a stamper, the distance between adjacent concave portions and the depth of the concave portion were measured from the obtained image, and in the case of an antireflection article, the distance between adjacent convex portions and the height of the convex portion were measured.
The distance between the concave portions of the fine concavo-convex structure formed on the surface of the stamper is a distance w2 from the center of the
(規則性の判定)
反射防止物品の表面を走査電子顕微鏡(5万倍)で観察し、得られた画像(写真)を、画像解析ソフト(日本ローパー社製、「Image−Pro PLUS」)で解析し、微細凹凸構造の凸部の重心座標を計算した。次いで、任意の凸部を選択し、その凸部に隣接する凸部のうち任意の6点を選択して、先の任意の凸部からの座標距離の標準偏差を求めた。以上の操作を10回実施し、それらの平均値を求め標準偏差とし、規則性の指標とした。
(Judgment of regularity)
The surface of the antireflective article is observed with a scanning electron microscope (50,000 times), and the obtained image (photograph) is analyzed with image analysis software (“Image-Pro PLUS” manufactured by Nippon Roper Co., Ltd.). The barycentric coordinates of the convex part of were calculated. Next, an arbitrary convex portion was selected, and arbitrary six points were selected from the convex portions adjacent to the convex portion, and the standard deviation of the coordinate distance from the previous arbitrary convex portion was obtained. The above operation was carried out 10 times, and the average value thereof was obtained as the standard deviation, which was used as an index of regularity.
<活性エネルギー線硬化組成物>
活性エネルギー線硬化組成物の原料とその配合量を以下に示す。
・重合性化合物:トリメチロールエタンアクリル酸・無水コハク酸縮合エステル(45質量部)。
・重合性化合物:ヘキサンジオールジアクリレート(45質量部)。
・重合性化合物:「x−22−1602」(信越化学工業社製、10質量部)。
・光重合開始剤:「イルガキュア184」(チバ・スペシャリティケミカルズ社製、3質量部)。
・光重合開始剤:「イルガキュア819」(チバ・スペシャリティケミカルズ社製、0.2質量部)。
<Active energy ray curable composition>
The raw material of the active energy ray-curable composition and the blending amount thereof are shown below.
Polymerizable compound: trimethylolethaneacrylic acid / succinic anhydride condensed ester (45 parts by mass).
Polymerizable compound: hexanediol diacrylate (45 parts by mass).
Polymerizable compound: “x-22-1602” (manufactured by Shin-Etsu Chemical Co., Ltd., 10 parts by mass).
Photopolymerization initiator: “Irgacure 184” (manufactured by Ciba Specialty Chemicals, 3 parts by mass).
Photopolymerization initiator: “Irgacure 819” (manufactured by Ciba Specialty Chemicals, 0.2 parts by mass).
<スタンパの製造例1>
純度99.99%のアルミニウム板を、4.5%シュウ酸水溶液の電解液中、化成電圧40V、16℃の条件にて5分間、陽極酸化を施した後、リン酸/クロム酸混液でアルミナ被膜を選択的に溶解除去した。さらに、2.7%シュウ酸水溶液の電解液中で、先と同一の条件で30秒間、陽極酸化を施し、5%リン酸水溶液で8分間孔径拡大処理を行い、ポーラスアルミナを得た。次いで、フルオロアルキルシラン(信越シリコーン社製、「KBM‐7803」)を固形分0.5%になるようにメタノールで希釈した溶液に、ポーラスアルミナを10分間ディッピングした後、風乾し、120℃で2時間減圧下、熱処理してスタンパ(A)を得た。
なお、得られたスタンパ(A)の表面を電子顕微鏡で観察したところ、図3に示すような、距離w2が100nm、深さd2が250nmの略円錐形状のテーパー状凹部(細孔)21からなる微細凹凸構造が形成されていた。
<Stamper Production Example 1>
An aluminum plate with a purity of 99.99% was anodized in an electrolyte solution of 4.5% oxalic acid aqueous solution for 5 minutes under conditions of a formation voltage of 40 V and 16 ° C., and then alumina with a phosphoric acid / chromic acid mixed solution. The film was selectively dissolved and removed. Further, anodization was performed for 30 seconds in an electrolyte solution of a 2.7% aqueous oxalic acid solution under the same conditions as described above, and a pore size expansion treatment was performed for 8 minutes with a 5% aqueous phosphoric acid solution to obtain porous alumina. Next, porous alumina was dipped for 10 minutes in a solution obtained by diluting fluoroalkylsilane (manufactured by Shin-Etsu Silicone Co., Ltd., “KBM-7803”) with methanol to a solid content of 0.5%, and then air-dried at 120 ° C. A stamper (A) was obtained by heat treatment under reduced pressure for 2 hours.
When the surface of the obtained stamper (A) was observed with an electron microscope, as shown in FIG. 3, from a substantially conical tapered recess (pore) 21 having a distance w2 of 100 nm and a depth d2 of 250 nm. A fine uneven structure was formed.
<スタンパの製造例2>
4.5%シュウ酸水溶液の電解液中での陽極酸化の処理時間を15分とした以外は、製造例1と同様の方法でスタンパ(B)を製造した。
<Stamper production example 2>
A stamper (B) was produced in the same manner as in Production Example 1 except that the anodic oxidation treatment time in the electrolytic solution of 4.5% oxalic acid aqueous solution was 15 minutes.
<スタンパの製造例3>
4.5%シュウ酸水溶液の電解液中での陽極酸化の処理時間を60分とした以外は、製造例1と同様の方法でスタンパ(C)を製造した。
<Stamper Production Example 3>
A stamper (C) was produced in the same manner as in Production Example 1 except that the treatment time for anodization in an electrolytic solution of 4.5% oxalic acid aqueous solution was 60 minutes.
<スタンパの製造例4>
4.5%シュウ酸水溶液の電解液中での陽極酸化の処理時間を1分とした以外は、製造例1と同様の方法でスタンパ(D)を製造した。
<Stamper Production Example 4>
A stamper (D) was produced in the same manner as in Production Example 1 except that the treatment time for anodic oxidation in an electrolytic solution of 4.5% oxalic acid aqueous solution was 1 minute.
<スタンパの製造例5>
4.5%シュウ酸水溶液の電解液中での陽極酸化の処理時間を360分とした以外は、製造例1と同様の方法でスタンパ(E)を製造した。
<Stamper Production Example 5>
A stamper (E) was produced in the same manner as in Production Example 1, except that the treatment time for anodization in an electrolytic solution of 4.5% oxalic acid aqueous solution was 360 minutes.
[実施例1]
<反射防止物品の製造>
活性エネルギー線硬化性組成物をスタンパ表面上に数滴垂らし、厚さ188μmのポリエチレンテレフタレートフィルム(東洋紡社製、「A−4300」)で押し広げながら被覆した後、フィルム側から1600mJ/cm2のエネルギーで紫外線を照射して活性エネルギー線硬化性組成物を光硬化させた。その後、フィルムとスタンパ(A)を剥離して反射防止物品(A)を得た。
得られた反射防止物品(A)の表面は、スタンパ(A)の微細凹凸構造が転写されており、図1に示すような、隣り合う凸部同士の距離w1が100nm、凸部の高さd1が220nmの微細凹凸構造が形成されていた。
[Example 1]
<Manufacture of antireflection articles>
After dropping several drops of the active energy ray-curable composition on the surface of the stamper and spreading with a polyethylene terephthalate film having a thickness of 188 μm (“A-4300” manufactured by Toyobo Co., Ltd.), 1600 mJ / cm 2 from the film side. The active energy ray-curable composition was photocured by irradiating ultraviolet rays with energy. Thereafter, the film and the stamper (A) were peeled off to obtain an antireflection article (A).
The surface of the obtained antireflection article (A) has the fine uneven structure of the stamper (A) transferred thereto, and the distance w1 between adjacent protrusions as shown in FIG. 1 is 100 nm, and the height of the protrusions. A fine concavo-convex structure with d1 of 220 nm was formed.
<評価>
得られた反射防止物品(A)の反射率、意匠性、規則性(標準偏差)の各評価を行った。結果を表1に示す。
<Evaluation>
Each evaluation of the reflectance, the designability, and the regularity (standard deviation) of the obtained antireflection article (A) was performed. The results are shown in Table 1.
[実施例2]
スタンパ(A)の代わりにスタンパ(B)を用いた以外は実施例1と同様にして、反射防止物品(B)を製造し、反射率、意匠性、規則性の各評価を行った。結果を表1に示す。
なお、得られた反射防止物品(B)の表面は、スタンパ(B)の微細凹凸構造が転写されており、図1に示すような、隣り合う凸部同士の距離w1が100nm、凸部の高さd1が220nmの微細凹凸構造が形成されていた。
[Example 2]
An antireflection article (B) was produced in the same manner as in Example 1 except that the stamper (B) was used in place of the stamper (A), and the reflectance, design properties, and regularity were evaluated. The results are shown in Table 1.
In addition, the surface of the obtained antireflection article (B) has the fine uneven structure of the stamper (B) transferred thereto, and the distance w1 between adjacent protrusions as shown in FIG. A fine relief structure having a height d1 of 220 nm was formed.
[実施例3]
スタンパ(A)の代わりにスタンパ(C)を用いた以外は実施例1と同様にして、反射防止物品(C)を製造し、反射率、意匠性、規則性の各評価を行った。結果を表1に示す。
なお、得られた反射防止物品(C)の表面は、スタンパ(C)の微細凹凸構造が転写されており、図1に示すような、隣り合う凸部同士の距離w1が100nm、凸部の高さd1が220nmの微細凹凸構造が形成されていた。
[Example 3]
An antireflection article (C) was produced in the same manner as in Example 1 except that the stamper (C) was used in place of the stamper (A), and the reflectance, design properties, and regularity were evaluated. The results are shown in Table 1.
The surface of the obtained antireflection article (C) has the fine uneven structure of the stamper (C) transferred thereto, and the distance w1 between adjacent protrusions as shown in FIG. A fine relief structure having a height d1 of 220 nm was formed.
[比較例1]
スタンパ(A)の代わりにスタンパ(D)を用いた以外は実施例1と同様にして、反射防止物品(D)を製造し、反射率、意匠性、規則性の各評価を行った。結果を表1に示す。
なお、得られた反射防止物品(D)の表面は、スタンパ(D)の微細凹凸構造が転写されており、図1に示すような、隣り合う凸部同士の距離w1が100nm、凸部の高さd1が220nmの微細凹凸構造が形成されていた。
[Comparative Example 1]
An antireflection article (D) was produced in the same manner as in Example 1 except that the stamper (D) was used instead of the stamper (A), and each of reflectance, design properties, and regularity was evaluated. The results are shown in Table 1.
In addition, the surface of the obtained antireflection article (D) has the fine uneven structure of the stamper (D) transferred thereto, and the distance w1 between adjacent protrusions as shown in FIG. A fine relief structure having a height d1 of 220 nm was formed.
[比較例2]
スタンパ(A)の代わりにスタンパ(E)を用いた以外は実施例1と同様にして、反射防止物品(E)を製造し、反射率、意匠性、規則性の各評価を行った。結果を表1に示す。
なお、得られた反射防止物品(E)の表面は、スタンパ(E)の微細凹凸構造が転写されており、図1に示すような、隣り合う凸部同士の距離w1が100nm、凸部の高さd1が220nmの微細凹凸構造が形成されていた。
[Comparative Example 2]
An antireflection article (E) was produced in the same manner as in Example 1 except that the stamper (E) was used in place of the stamper (A), and each of reflectance, design properties, and regularity was evaluated. The results are shown in Table 1.
The surface of the obtained antireflection article (E) has the fine uneven structure of the stamper (E) transferred thereto, and the distance w1 between adjacent protrusions as shown in FIG. A fine relief structure having a height d1 of 220 nm was formed.
表1からも明らかなように、実施例の反射防止物品(A)、(B)、(C)は、その表面に、標準偏差が各々、9.6、8.6、4.1の微細凹凸構造が形成され、いずれも規則性および意匠性に優れていた。また、反射率が1.0%以下であり、反射防止性も良好であった。
一方、比較例1の反射防止物品(D)は、その表面に、標準偏差が12.7の微細凹凸構造が形成され、意匠性は良好であったが、規則性が実施例に比べて劣り、反射率が1.0%を超え、反射防止性が実施例に比べて劣っていた。
また、比較例2の反射防止物品(E)は、陽極酸化の処理時間を長くしたため、その表面に、標準偏差が3.1の微細凹凸構造が形成され、規則性には優れていた。しかし、陽極酸化処理を長時間行ったため、意匠性が実施例に比べて劣っていた。なお、反射率は1.0%以下であり、実施例と同等の反射防止性が得られた。
As is clear from Table 1, the antireflection articles (A), (B), and (C) of the examples have fine surfaces with standard deviations of 9.6, 8.6, and 4.1, respectively, on the surface. An uneven structure was formed, and both were excellent in regularity and design. Moreover, the reflectance was 1.0% or less, and the antireflection property was also good.
On the other hand, the antireflective article (D) of Comparative Example 1 had a fine uneven structure with a standard deviation of 12.7 formed on the surface thereof, and the design was good, but the regularity was inferior to that of the Examples. The reflectance exceeded 1.0%, and the antireflection property was inferior to the examples.
In addition, since the antireflection article (E) of Comparative Example 2 had a long anodic oxidation treatment time, a fine concavo-convex structure with a standard deviation of 3.1 was formed on the surface, and the regularity was excellent. However, since the anodizing treatment was performed for a long time, the design properties were inferior to those of the examples. The reflectance was 1.0% or less, and the same antireflection property as that of the example was obtained.
10:反射防止物品
11:透明成形体
12:活性エネルギー線硬化性組成物の硬化物
13:凸部
14:凹部
20:スタンパ
21:凹部(細孔)
10: Antireflection article 11: Transparent molded body 12: Cured product of active energy ray-curable composition 13: Convex part 14: Concave part 20: Stamper 21: Concave part (pore)
Claims (2)
前記微細凹凸構造の隣り合う凸部同士の距離が可視光の波長以下であり、かつ、任意の凸部と、該凸部に隣接する6個の凸部との各重心間距離の標準偏差が、4.0〜12.0であることを特徴とする反射防止物品。 An antireflective article having a fine relief structure on the surface,
The distance between adjacent convex portions of the fine concavo-convex structure is equal to or less than the wavelength of visible light, and the standard deviation of the distance between the centroids of any convex portion and six convex portions adjacent to the convex portion is An antireflective article characterized by being 4.0 to 12.0.
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| JP2007044970A JP2008209540A (en) | 2007-02-26 | 2007-02-26 | Anti-reflective article |
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| JP2007044970A JP2008209540A (en) | 2007-02-26 | 2007-02-26 | Anti-reflective article |
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| WO2010032610A1 (en) * | 2008-09-17 | 2010-03-25 | シャープ株式会社 | Antireflection film and method for manufacturing same |
| JP2010222629A (en) * | 2009-03-23 | 2010-10-07 | Nippon Light Metal Co Ltd | Aluminum prototype for stamper, stamper, and manufacturing method thereof |
| JP2010275525A (en) * | 2009-04-28 | 2010-12-09 | Mitsubishi Rayon Co Ltd | Active energy ray-curable resin composition, nano uneven structure using the same, method for producing the same, and water-repellent article provided with nano uneven structure |
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