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JP2008297184A - Photocatalytic titanium oxide film and method for producing the same - Google Patents

Photocatalytic titanium oxide film and method for producing the same Download PDF

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JP2008297184A
JP2008297184A JP2007147634A JP2007147634A JP2008297184A JP 2008297184 A JP2008297184 A JP 2008297184A JP 2007147634 A JP2007147634 A JP 2007147634A JP 2007147634 A JP2007147634 A JP 2007147634A JP 2008297184 A JP2008297184 A JP 2008297184A
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titanium oxide
film
titanium dioxide
anatase
oxide film
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JP5273700B2 (en
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Masahiro Fukumoto
昌宏 福本
Motohiro Yamada
基宏 山田
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Toyohashi University of Technology NUC
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Abstract

【課題】 二酸化チタン光触媒皮膜の形成において、有機バインダ等の結合剤を用いずに、大面積の基材に厚い膜を形成することにより、二酸化チタンの光触媒作用による、有機バインダの劣化が無く、長期間安定な光触媒皮膜を形成する。
【解決手段】 凝集した形態のアナターゼ型二酸化チタンを原料粉末とし、比較的低いガス圧力及び、アナターゼ型二酸化チタンの結晶変態温度以下の温度にて、原料粉末を加熱・加速し、基材上に衝突させることにより、基材上にアナターゼ型ニ酸化チタン光触媒皮膜を形成する。
【選択図】 図1
PROBLEM TO BE SOLVED: To form a titanium dioxide photocatalyst film without forming a thick film on a large-area substrate without using a binder such as an organic binder, so that there is no deterioration of the organic binder due to the photocatalytic action of titanium dioxide. Forms a long-term stable photocatalytic film.
An aggregated form of anatase-type titanium dioxide is used as a raw material powder, and the raw material powder is heated and accelerated at a relatively low gas pressure and at a temperature lower than the crystal transformation temperature of anatase-type titanium dioxide to form on the substrate. By making it collide, an anatase type titanium dioxide photocatalyst film is formed on a substrate.
[Selection] Figure 1

Description

本発明は自動車の排気ガス等に含まれる有害物質である窒素酸化物の分解や防汚、防食特性が要求される高速道路の防音壁、建築物外壁および橋梁などの被覆に好適な光触媒酸化チタン膜、それを被覆した部材及びそれらの製造方法にかかわるものである。
The present invention is a photocatalytic titanium oxide suitable for coating of a noise barrier, an outer wall of a building, a bridge, etc., which requires decomposition, antifouling, and anticorrosion properties of nitrogen oxides which are harmful substances contained in automobile exhaust gas and the like. The present invention relates to a film, a member coated with the film, and a method for producing the same.

光触媒酸化チタンはその有害物質除去、防汚、殺菌、防食に優れる物性を持つため、従来から建造物の外壁などへの表面塗布に用いられている。光触媒酸化チタンはこのように優れた物性を有する材料であることから、より幅広く利用するために、安価で大面積への厚膜形成技術の確立が要求されている。 Photocatalytic titanium oxide has been used for surface coating on the outer walls of buildings and the like because it has excellent physical properties for removing harmful substances, antifouling, sterilization, and anticorrosion. Since photocatalytic titanium oxide is a material having such excellent physical properties, it is required to establish a technique for forming a thick film over a large area at a low cost in order to use it more widely.

これまでに報告されている光触媒酸化チタン膜作製技術としては、化学的手法としてチタンのアルコキシドを溶媒中に溶解させ、酸化雰囲気中で焼成する方法(例えば特許文献1参照)や二酸化チタン粉末のゾルから成膜する方法(例えば特許文献2参照)があり、建築物の外壁への塗布などで利用されている。 As a photocatalytic titanium oxide film production technique that has been reported so far, as a chemical method, a titanium alkoxide is dissolved in a solvent and calcined in an oxidizing atmosphere (for example, see Patent Document 1) or a titanium dioxide powder sol. There is a method of forming a film (see, for example, Patent Document 2), which is used for application to the outer wall of a building.

物理的手法としてスパッタリングによる皮膜形成(例えば特許文献3参照)、溶射法による成膜(例えば特許文献4、非特許文献1参照)、エアロゾルデポジション法による成膜(例えば特許文献5参照)があるが実用的にはほとんど用いられていない。コールドスプレー法による成膜の報告(例えば非特許文献2参照)もあるが実用的な膜を得るには至っていない。 Examples of physical methods include film formation by sputtering (for example, see Patent Document 3), film formation by thermal spraying (for example, see Patent Document 4 and Non-Patent Document 1), and film formation by an aerosol deposition method (for example, see Patent Document 5). Is practically not used. Although there is a report of film formation by the cold spray method (see, for example, Non-Patent Document 2), a practical film has not been obtained.

特許2849177Patent 2849177 特許2900307Patent 2930347 特許2995250Patent 2995250 特許公開公報 特開平11−47609Patent Publication JP-A-11-47609 特許公開公報 特開2006−130703Patent publication gazette JP, 2006-130703, A 福本、鄭、鈴木、熱田、安井、溶接学会論文集、第22巻、第1号、 47−52、(2004)Fukumoto, Kaoru, Suzuki, Atsuta, Yasui, Welding Society Proceedings, Vol. 22, No. 1, 47-52, (2004) C.−J. Li, G.−J. Yang, X.−C. Huang, W.−Y. Li and A. Ohmori: Formation of TiO2 photocatalyst through cold spraying, Proceedings of International Thermal Spray Conference 2004, CDC. -J. Li, G. -J. Yang, X. et al. -C. Huang, W.H. -Y. Li and A.L. Ohmori: Formation of TiO2 photocatalyst through cold spraying, Processes of International Thermal Spray Conference 2004, CD

溶媒を用いる方法やゾルを用いる方法では廃液が出ることから環境負荷が大きい、結合剤の種類によっては経年劣化するという問題がある。スパッタリングは制御雰囲気で成膜するため、対象物の寸法が制限されることや薄膜しかできないという問題がある。溶射法では大面積に厚膜の作製が可能であるが、熱影響によってアナターゼ型二酸化チタンからより光触媒特性の低いルチル型二酸化チタンに相変態するという問題がある。エアロゾルデポジション法は非加熱であるが減圧チャンバー内での成膜になるため、対象物の寸法が制限されるという問題がある。コールドスプレー法は軟質金属粒子を塑性変形させて付着させる技術であるため、硬脆材料である酸化チタンの成膜では厚膜の作製は従来困難であった。 In the method using a solvent or the method using a sol, there is a problem that a waste liquid is generated, so that an environmental load is large, and depending on the type of the binder, it deteriorates with time. Since sputtering is performed in a controlled atmosphere, there are problems that the size of an object is limited and that only a thin film can be formed. Although a thick film can be produced in a large area by the thermal spraying method, there is a problem that phase transformation from anatase-type titanium dioxide to rutile-type titanium dioxide having lower photocatalytic properties occurs due to thermal effects. The aerosol deposition method is non-heated but has a problem that the size of the object is limited because the film is formed in a vacuum chamber. Since the cold spray method is a technique in which soft metal particles are plastically deformed and adhered, it has heretofore been difficult to produce a thick film by using titanium oxide, which is a hard and brittle material.

本発明の目的は、光触媒酸化チタン膜作製において新規な方法を提案することにより、アナターゼ型二酸化チタンのみからなる厚膜及び厚膜を被覆した部材を提供することと同時に、その簡便な製造方法を提供することにある。
The object of the present invention is to provide a thick film composed only of anatase-type titanium dioxide and a member coated with the thick film by proposing a novel method in the production of a photocatalytic titanium oxide film, and at the same time, a simple manufacturing method thereof. It is to provide.

本発明者らは、上述のような現状に鑑み、鋭意検討を行った結果、従来法に対して比較的低圧力域である0.3〜1.0MPaのガスを高圧ガス発生部より発生させ、ガス加熱ヒーターにより200℃〜800℃程度にガスを過熱し、ガス加速部において加速したガス流に原料粉末を投入し、原料粉末を衝突、成膜するコールドスプレー法において、その原料粉末として、一次粒径が0.1nm〜1μmのアナターゼ型二酸化チタンを凝集させた粒径1μm〜100μmの二次粒子を用いることによってアナターゼ型二酸化チタンのみからなる皮膜が得られることを見出した。さらに本発明で得られたアナターゼ型二酸化チタンを基材上に被覆した部材は、空気中の窒素酸化物分解能力に優れ、極めて高特性な光触媒酸化チタン膜であることを見出し、本発明を完成するに至ったものである。 As a result of intensive investigations in view of the above-described present situation, the present inventors have generated a gas having a relatively low pressure range of 0.3 to 1.0 MPa from the high-pressure gas generation unit as compared with the conventional method. In the cold spray method in which the gas is heated to about 200 ° C. to 800 ° C. with a gas heater, the raw material powder is introduced into the gas flow accelerated in the gas accelerating unit, and the raw material powder collides and forms a film, It has been found that a film composed only of anatase titanium dioxide can be obtained by using secondary particles having a particle diameter of 1 μm to 100 μm obtained by agglomerating anatase titanium dioxide having a primary particle diameter of 0.1 nm to 1 μm. Furthermore, the member obtained by coating the base material with the anatase-type titanium dioxide obtained in the present invention is found to be an extremely high-performance photocatalytic titanium oxide film having excellent ability to decompose nitrogen oxides in the air, and the present invention has been completed. It has come to be.

本発明の光触媒酸化チタン膜はコールドスプレー法によって成膜してなる厚膜であり、従来のスパッタ法やCVD法で得られる薄膜とは異なるものである。その膜厚は1μm以上3mm以下が好ましく、さらに、100μm以上1mm以下であることが好ましい。1μmより薄い膜では摩耗等による耐久性に問題があり、一方3mmを超えてつけることは、本発明の膜を用いる技術領域では一般的に要求されない上に、経済的でない。 The photocatalytic titanium oxide film of the present invention is a thick film formed by a cold spray method, and is different from a thin film obtained by a conventional sputtering method or CVD method. The film thickness is preferably 1 μm or more and 3 mm or less, and more preferably 100 μm or more and 1 mm or less. When the film is thinner than 1 μm, there is a problem in durability due to wear or the like. On the other hand, a thickness exceeding 3 mm is not generally required in the technical field using the film of the present invention and is not economical.

本発明の光触媒酸化チタン膜はアナターゼ型二酸化チタンのみからなる膜であり、他の成分は含有しない。ただし、これらの原料中に不純物が存在し、その不純物に起因して本発明の光触媒酸化チタン皮膜と同等の性能を有するものは、本発明から除外されるものではない。 The photocatalytic titanium oxide film of the present invention is a film composed only of anatase-type titanium dioxide and does not contain other components. However, those having impurities in these raw materials and having the same performance as the photocatalytic titanium oxide film of the present invention due to the impurities are not excluded from the present invention.

本発明の光触媒酸化チタン膜は、アナターゼ型二酸化チタンのみからなる膜であるため、高い光触媒特性を有し、部材に被覆した場合、高い窒素酸化物分解特性を発揮できる。
本発明の光触媒酸化チタン膜の製造方法は、コールドスプレー法だけでアナターゼ型二酸化チタンのみからなる膜が製造可能であるため、製造工程が簡便である。
Since the photocatalytic titanium oxide film of the present invention is a film composed only of anatase-type titanium dioxide, it has high photocatalytic properties and can exhibit high nitrogen oxide decomposition properties when coated on a member.
The production method of the photocatalytic titanium oxide film of the present invention is simple because the film made of only anatase-type titanium dioxide can be produced only by the cold spray method.

本発明の光触媒酸化チタン膜の組織構造は特に限定されず、緻密な膜から多孔質の膜まであらゆるモルホロジーをとり得る。 The structure of the photocatalytic titanium oxide film of the present invention is not particularly limited, and can take any morphology from a dense film to a porous film.

さらに本発明は、上述の光触媒酸化チタン膜を基材の上に形成した部材を提供するものである。部材は特に限定されず、金属、セラミックス、プラスチック等が利用できる。
Furthermore, this invention provides the member which formed the above-mentioned photocatalytic titanium oxide film on the base material. A member is not specifically limited, A metal, ceramics, a plastics, etc. can be utilized.

図1に示す装置の一例により本発明のアナターゼ型二酸化チタンのみからなる光触媒酸化チタン膜の製造方法を説明する。 A method for producing a photocatalytic titanium oxide film comprising only anatase-type titanium dioxide according to the present invention will be described using an example of the apparatus shown in FIG.

本発明の方法は、高温・高圧ガスを発生させる部位、ガス加速部位、基材を保持する部位を有する装置に基材を装着して成膜する。 In the method of the present invention, a film is formed by mounting a base material on an apparatus having a part for generating a high-temperature and high-pressure gas, a gas acceleration part, and a part for holding the base material.

本発明の成膜条件の高温・高圧ガス発生部におけるガス温度としては200℃以上、800℃以下であることを特徴とする。これより温度が低い場合は粒子が基材に付着せず、温度が高い場合はアナターゼ型二酸化チタンからより光触媒特性の低いルチル型二酸化チタンに相変態する上に、経済的でない。 The gas temperature in the high temperature / high pressure gas generating part under the film forming conditions of the present invention is 200 ° C. or higher and 800 ° C. or lower. When the temperature is lower than this, the particles do not adhere to the base material, and when the temperature is higher, the anatase-type titanium dioxide undergoes phase transformation to rutile-type titanium dioxide having lower photocatalytic properties, and is not economical.

本発明の成膜条件の高温・高圧ガス発生部におけるガス圧力としては0.3MPa〜1.0MPaであることを特徴とする。これより圧力が低い場合は粒子が十分に加速されず、基材に付着せず、圧力が高い場合は基材表面近傍で発生する衝撃波によって粒子が基材に衝突しない。 The gas pressure in the high temperature / high pressure gas generating part under the film forming conditions of the present invention is 0.3 MPa to 1.0 MPa. When the pressure is lower than this, the particles are not sufficiently accelerated and do not adhere to the substrate, and when the pressure is high, the particles do not collide with the substrate due to a shock wave generated near the substrate surface.

本発明で用いるガス加速部位には加速ノズルを用いるが、その形状や構造は特に限定されるものではない。 Although the acceleration nozzle is used for the gas acceleration site used in the present invention, its shape and structure are not particularly limited.

本発明で用いる光触媒酸化チタン膜を形成する基材は特に限定しないが、例えばステンレスや炭素鋼等の金属基材、グラファイト、石英、セラミックス、プラスチック等を図1の基材108として用いることができる。用いる基材は光触媒酸化チタン膜との密着性を向上するために、表面をブラスト法等により粗くした後、基材ホルダー109に装着することが好ましい。 The substrate for forming the photocatalytic titanium oxide film used in the present invention is not particularly limited. For example, a metal substrate such as stainless steel or carbon steel, graphite, quartz, ceramics, plastic, or the like can be used as the substrate 108 in FIG. . In order to improve the adhesion with the photocatalytic titanium oxide film, the substrate used is preferably mounted on the substrate holder 109 after the surface is roughened by a blast method or the like.

本発明のコールドスプレー法は高温ガスを利用するものである。高温ガスの発生方法は特に指定しないが、高周波、電気炉等によって生成することが可能である。 The cold spray method of the present invention uses a hot gas. Although the generation method of the high temperature gas is not particularly specified, it can be generated by a high frequency, electric furnace or the like.

本発明のコールドスプレー法は高圧ガスを利用するものである。高圧ガスの発生方法は特に指定しないが、コンプレッサー、高圧ガスボンベ等によって生成することが可能である。 The cold spray method of the present invention utilizes high pressure gas. The generation method of the high-pressure gas is not particularly specified, but it can be generated by a compressor, a high-pressure gas cylinder or the like.

本発明の溶射における基材の位置は、高温・高圧ガス流に曝される位置、すなわち光触媒酸化チタン膜を形成する部分が高温・高圧ガス流に接触する位置であれば良い。基材は固定されていても良いが、基材108を上下左右に移動させて、基材全体に高温・高圧ガス流に曝し、均一成膜することが好ましい。この基材の移動は、成膜部位に高温・高圧ガス流が接触する条件であれば良く、例えば図1の成膜距離106で5〜100mmが維持できる範囲として例示できる。 The position of the substrate in the thermal spraying of the present invention may be a position where it is exposed to a high temperature / high pressure gas flow, that is, a position where a portion where the photocatalytic titanium oxide film is formed contacts the high temperature / high pressure gas flow. Although the base material may be fixed, it is preferable to move the base material 108 up and down, left and right to expose the entire base material to a high-temperature and high-pressure gas flow to form a uniform film. The movement of the base material may be performed under the condition that the high-temperature and high-pressure gas flow is in contact with the film formation site, and can be exemplified as a range in which 5 to 100 mm can be maintained at the film formation distance 106 in FIG.

本発明で用いるガス種は特に限定しないが、例えば圧縮空気、窒素、ヘリウム等を用いることができる。特にヘリウムを用いるとガス流がより高速となるため、好ましい。 The gas species used in the present invention is not particularly limited, and for example, compressed air, nitrogen, helium, or the like can be used. In particular, helium is preferable because the gas flow becomes faster.

本発明の方法は、高温・高圧ガス流中にアナターゼ型二酸化チタン粉末を投入することによって光触媒酸化チタン膜を形成する。投入するアナターゼ型二酸化チタン粉末としては、一次粒径が0.1nm〜1μmのアナターゼ型二酸化チタン粒子を凝集させた粒径1μm〜100μmの二次粒子を用いることを特徴とする。光触媒酸化チタン粉末の平均粒径の測定方法は、一般的な粒度測定装置、例えば光透過型の粒度分布測定装置等で測定することができる。 The method of the present invention forms a photocatalytic titanium oxide film by introducing anatase-type titanium dioxide powder into a high-temperature, high-pressure gas stream. As the anatase-type titanium dioxide powder to be introduced, secondary particles having a particle size of 1 μm to 100 μm obtained by agglomerating anatase-type titanium dioxide particles having a primary particle size of 0.1 nm to 1 μm are used. The measuring method of the average particle diameter of the photocatalytic titanium oxide powder can be measured by a general particle size measuring device, for example, a light transmission type particle size distribution measuring device.

本発明では粉末の投入部は特に限定しない。図1は、アナターゼ型二酸化チタン粉末を加速ノズル部分に供給する方法を例示している。粉末供給器109にキャリアガス110を導入し、アナターゼ型二酸化チタン粉末を供給し、高温・高圧ガス流中に投入するが、この時のアナターゼ型二酸化チタンの供給速度は均一であることが好ましい。
In the present invention, the powder charging part is not particularly limited. FIG. 1 illustrates a method of supplying anatase-type titanium dioxide powder to the acceleration nozzle portion. The carrier gas 110 is introduced into the powder feeder 109, the anatase-type titanium dioxide powder is fed into the high-temperature, high-pressure gas stream, and the supply rate of the anatase-type titanium dioxide at this time is preferably uniform.

図1に示す装置を用い、鉄鋼(SS400)基材上に光触媒酸化チタン膜を成膜した。ブラスト処理し表面を粗面化した100×50×2mmのSS400基材108を、基材ホルダー109に装着した。成膜距離106は10mmに予め調整した。高圧ガス発生部101としてガスボンベを使用し、ガス種としてHeを使用した。ガス圧力は0.6MPaに調整し、ヒーター102による加熱を行わず、室温で行った。ガス加速部位105には先細末広円筒形状の加速ノズルを使用した。SS400基材108は20mm/秒の速度で上下左右に動かし、基材101に均一に溶射膜を堆積させた。 A photocatalytic titanium oxide film was formed on a steel (SS400) substrate using the apparatus shown in FIG. A 100 × 50 × 2 mm SS400 base material 108 having a roughened surface by blasting was mounted on the base material holder 109. The film formation distance 106 was previously adjusted to 10 mm. A gas cylinder was used as the high-pressure gas generator 101, and He was used as the gas species. The gas pressure was adjusted to 0.6 MPa, and heating was performed at room temperature without heating by the heater 102. A tapered nozzle having a tapered wide cylindrical shape was used for the gas acceleration portion 105. The SS400 base material 108 was moved up and down and left and right at a speed of 20 mm / second to deposit the sprayed film uniformly on the base material 101.

次に、粉末供給器110にテクノサーブ社製微粉末供給器を用い、圧縮空気を1L/分の流量でキャリアガス111として導入し、平均粒径20μmのアナターゼ型二酸化チタン凝集粉末を約10g/分で高温・高圧ガス流中に供給した。上記条件で基材を移動させながら成膜を繰り返し、2層の成膜層を堆積させた。 Next, a fine powder feeder manufactured by Technoserve is used as the powder feeder 110, compressed air is introduced as a carrier gas 111 at a flow rate of 1 L / min, and anatase-type titanium dioxide aggregated powder having an average particle size of 20 μm is about 10 g / Was fed into the hot and high pressure gas stream in minutes. The film formation was repeated while moving the substrate under the above conditions, and two film formation layers were deposited.

得られた皮膜は厚み約30μmで、供給粉末の堆積率は約10%であった。エックス線回折により結晶構造を分析したところアナターゼ型二酸化チタンのピークのみが観察された。 The obtained film had a thickness of about 30 μm and the deposition rate of the supplied powder was about 10%. When the crystal structure was analyzed by X-ray diffraction, only the peak of anatase-type titanium dioxide was observed.

得られた皮膜を切断し、断面を研磨して電子顕微鏡で観察した像を図2に示す。緻密な膜組織が形成されている様子がわかる。
FIG. 2 shows an image obtained by cutting the obtained film, polishing the cross section and observing it with an electron microscope. It can be seen that a dense film structure is formed.

ガス温度を400℃とした以外は、実施例1と同様の方法で皮膜を作製した。 A film was prepared in the same manner as in Example 1 except that the gas temperature was 400 ° C.

得られた皮膜は厚み約200μmで、供給粉末の堆積率は約25%であった。エックス線回折により結晶構造を分析したところアナターゼ型二酸化チタンのピークのみが観察された。また、皮膜の断面観察を行った結果、実施例1と同様に緻密な膜となっていた。
The obtained film had a thickness of about 200 μm and the deposition rate of the supplied powder was about 25%. When the crystal structure was analyzed by X-ray diffraction, only the peak of anatase-type titanium dioxide was observed. Further, as a result of cross-sectional observation of the film, it was a dense film as in Example 1.

(比較例)
原料粉末として凝集させていない粒径180nmのアナターゼ型二酸化チタン粉末を用いた以外は実施例1と同様の方法で皮膜を作製した。
(Comparative example)
A film was prepared in the same manner as in Example 1 except that an anatase-type titanium dioxide powder having a particle size of 180 nm that was not aggregated was used as the raw material powder.

若干の粒子付着はみられたが、皮膜形成には至らなかった。
Some particle adhesion was observed, but no film formation was achieved.

実施例1、2で作製した皮膜の光触媒特性を窒素酸化物ガスの除去率で測定した。測定器にはボンベから供給される100ppmのNOガスを空気と混合した1ppmの模擬汚染空気を3〜4L/分の流量で連続的に流入させ、同時に測定器の上部より内部の皮膜表面へブラックライトによる紫外線を照射し、光触媒反応を発現させ、反応後の窒素酸化物濃度を測定した。除去率は実施例1の皮膜で約90%、実施例2の皮膜で約80%であった。アナターゼ型二酸化チタンのみからなる本発明の実施例では高い窒素酸化物ガス除去特性が得られた。
The photocatalytic properties of the films prepared in Examples 1 and 2 were measured by the nitrogen oxide gas removal rate. 1ppm simulated polluted air mixed with air of 100ppm NO gas supplied from a cylinder is continuously flowed into the measuring device at a flow rate of 3-4L / min. The photocatalytic reaction was developed by irradiating with UV light with light, and the nitrogen oxide concentration after the reaction was measured. The removal rate was about 90% for the film of Example 1 and about 80% for the film of Example 2. In the embodiment of the present invention consisting of only anatase type titanium dioxide, high nitrogen oxide gas removal characteristics were obtained.

本発明は屋内ならびに屋外の構造物等への光触媒酸化チタン皮膜形成手法としての利用が可能である。
The present invention can be used as a method for forming a photocatalytic titanium oxide film on indoor and outdoor structures.

本発明における光触媒膜を製造するためのコールドスプレー装置の一例を示す図である。It is a figure which shows an example of the cold spray apparatus for manufacturing the photocatalyst film | membrane in this invention. 本発明の手法で作製した皮膜断面の電子顕微鏡写真。The electron micrograph of the film | membrane cross section produced with the method of this invention.

符号の説明Explanation of symbols

101: 高圧ガス発生部
102: ガス加熱用ヒーター
103: ガス温度センサー
104: ガス圧力センサー
105: ガス加速部位
106: 成膜距離
107: 皮膜
108: 基材
109: 基材保持部
110: 粉末供給器
111: キャリアガス
DESCRIPTION OF SYMBOLS 101: High pressure gas generation part 102: Gas heating heater 103: Gas temperature sensor 104: Gas pressure sensor 105: Gas acceleration part 106: Film formation distance 107: Film | membrane 108: Base material 109: Base material holding part 110: Powder feeder 111: Carrier gas

Claims (6)

有機バインダ等の結合剤を含まず、且つ凝集体から成るアナターゼ型ニ酸化チタン粒子を高温・高圧で吹きつけることにより成膜する光触媒酸化チタン膜の製造方法。 A method for producing a photocatalytic titanium oxide film, which is formed by spraying anatase-type titanium dioxide particles that do not contain a binder such as an organic binder and are composed of aggregates at a high temperature and a high pressure. 基材に請求項1の光触媒酸化チタン膜を被覆した部材。 A member obtained by coating the substrate with the photocatalytic titanium oxide film of claim 1. 原料粉末を高温・高圧ガス発生部、ガス加速部および基材保持部を有する装置において、該高温・高速ガス流に酸化チタン原料粉末を投入することにより光触媒酸化チタン皮膜を形成する方法であって、該原料粉末を固体のまま堆積させるため、該原料粉末の溶融および相変態を伴わないことを特徴とする光触媒酸化チタン膜の製造方法。 A method of forming a photocatalytic titanium oxide film by introducing a titanium oxide raw material powder into the high temperature / high speed gas flow in an apparatus having a high temperature / high pressure gas generating part, a gas accelerating part and a base material holding part. A method for producing a photocatalytic titanium oxide film, characterized in that the raw material powder is deposited in a solid state without melting and phase transformation of the raw material powder. 請求項3の酸化チタン原料粉末として一次粒径が0.1nm〜1μmのアナターゼ型二酸化チタンを凝集させた粒径1μm〜100μmの二次粒子を用いることを特徴とする請求項3の製造方法。 The production method according to claim 3, wherein secondary particles having a particle size of 1 to 100 µm obtained by aggregating anatase-type titanium dioxide having a primary particle size of 0.1 to 1 µm are used as the titanium oxide raw material powder of claim 3. 請求項3の高温・高圧ガス発生部からの供給ガス圧力が0.3MPa〜1.0MPaであることを特徴とする請求項3の製造方法。 The manufacturing method according to claim 3, wherein the supply gas pressure from the high-temperature / high-pressure gas generating section according to claim 3 is 0.3 MPa to 1.0 MPa. 請求項3の高温・高圧ガス発生部からの供給ガスの温度が200℃以上800℃以下のからなる、請求項3の製造方法。














The manufacturing method of Claim 3 which consists of 200 to 800 degreeC of the temperature of the supply gas from the high temperature / high pressure gas generation | occurrence | production part of Claim 3.














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JP2013012300A (en) * 2011-05-27 2013-01-17 Toyota Motor Corp Manufacturing method of electrode body for lithium secondary battery
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JP2016069263A (en) * 2014-10-01 2016-05-09 株式会社東芝 Ceramic powder and its film
JP2017141877A (en) * 2016-02-09 2017-08-17 国立大学法人東北大学 High pressure hydrogen gas accumulator and method for producing the same

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011088037A (en) * 2009-10-20 2011-05-06 Fujico Co Ltd Method for producing thermal spray material and method for producing thermally-sprayed coating film
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JP2015512765A (en) * 2012-01-24 2015-04-30 リンデ アクチエンゲゼルシャフトLinde Aktiengesellschaft Cold gas spray method
JP2013229208A (en) * 2012-04-26 2013-11-07 Nippon Steel & Sumikin Engineering Co Ltd Porous semiconductor electrode, method of manufacturing the same, and manufacturing apparatus
JP2016069263A (en) * 2014-10-01 2016-05-09 株式会社東芝 Ceramic powder and its film
JP2017141877A (en) * 2016-02-09 2017-08-17 国立大学法人東北大学 High pressure hydrogen gas accumulator and method for producing the same

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