JP2008263004A - Container delivery, detention, and supply equipment. - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that throughput of the whole plant is reduced because an overhead hoist transport waits for a processor to process in a process step for delivering containers from the overhead hoist transport equipped in the semiconductor manufacturing plant to the processor. <P>SOLUTION: The device 1 for delivery and receipt, keeping and feeding of containers temporarily receives the containers 3 from the overhead hoist transport 5, keeps them and selects and transfers one of the kept containers in order of importance to the processor 6 or the like. To this end, the device 1 is suspended from the ceiling below the overhead hoist transport 5 and above the processor 6. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an OHT (Overhead Hoist Transport) that holds a container containing semiconductor wafers and travels on rails installed on the ceiling of a semiconductor manufacturing factory, and a semiconductor wafer processing apparatus. The present invention relates to a container delivery, detention, and supply device provided in an intermediate area.

  In a semiconductor wafer manufacturing factory that requires a highly clean environment, a wafer is stored in a container and transferred to each processing apparatus. The container is transported between the processing apparatuses by an overhead traveling vehicle that travels along a traveling rail installed near the ceiling of the semiconductor manufacturing factory. In the container transportation by the overhead traveling vehicle, there is a problem that a delay occurs due to the processing time waiting of the processing device. Thus, in order to shorten the processing waiting time, Patent Document 1 proposes a ceiling traveling system in which a ceiling buffer for temporary storage is installed on the ceiling.

The overhead traveling vehicle system 47 including the storage buffer described in Patent Document 1 is suspended below the traveling rail 48 of the overhead traveling vehicle. The overhead traveling vehicle system 47 including the storage buffer includes an entry station 49 and an exit station 50, and performs the entry and exit of the overhead traveling vehicle 5 and the container 3. Further, a conveyor 51 capable of transporting a plurality of containers 3 is provided between the warehouse station 49 and the warehouse station 50, and the containers 3 placed on the warehouse station 49 are sequentially transported to the warehouse station 50.
JP-A-10-250835

  In recent years, there has been a demand for manufacturing a semiconductor wafer with a small lot and a short delivery time in a logic or custom LSI manufacturing factory. In such a case, about 2 to 3 sheets may be stored in a container (FOUP) that can store a maximum of 25 sheets, and may be transported between processing apparatuses. Then, it is necessary to increase the number of containers that circulate in the factory as compared with the conventional case. Further, the distribution is congested by the container waiting for the processing of the semiconductor wafer by the processing apparatus. For this reason, it is difficult to secure a production amount that exceeds the current level. As described above, in the overhead traveling vehicle system 47 provided with the storage buffer of the prior art document 1, the containers that have been previously stored in the overhead traveling vehicle are discharged in order, and the containers that need to be urgent cannot be discharged preferentially. There is a problem.

  The container delivery, detention, and supply device of the present invention includes a support plate member for placing the container delivered from the overhead traveling vehicle on a substrate provided above the position where the overhead traveling vehicle delivers the container to the processing device. An opening / closing means for moving the support member between a delivery position for delivering the container from the overhead traveling vehicle and a retracted position retracted from the delivery position for delivering the container from the overhead traveling vehicle to the processing device; and the support member and the substrate A transfer means for holding and transferring the container to and from the container mounting table.

The container delivery, detention, and supply device of the present invention are provided suspended from the ceiling or supported on a ground by a support column. Specifically, a container support member is provided above the position where the overhead traveling vehicle delivers the container to the processing device. An overhead traveling carriage places a container on the support member and delivers the container. When the overhead traveling vehicle directly delivers the container to the processing device, the support member is moved to the retracted position by the opening / closing means.

The support member includes a rotation mechanism or a link mechanism including a motor, a pulley, and a timing belt as opening / closing means for horizontal movement, and an air cylinder or a ball screw shaft. Further, in order to place the container on the upper part of the support member with high accuracy, the support member is provided with a positioning pin at a position where it can be fitted to the recess on the lower surface of the container.

The gripping means grips or lifts the collar or side surface provided on the top of the container, and the bottom surface. The gripping means includes a motor, an air cylinder, or the like as a drive source for gripping or lifting the container, and can drive a linear drive means using a link mechanism or a ball screw shaft. Here, gripping the container refers to holding the gripping means by inserting the two gripping members of the gripping means from the side of the collar at the top of the container and sandwiching them with pressure, or after inserting the gripping member. It means a method such as lifting and lifting by the transfer means.

The transfer means is for moving the container in the horizontal plane or in the height direction. In order to move in a horizontal plane, a ball screw shaft and a belt are provided. In order to move the container in the height direction, one end of the belt can be attached to the gripping means, and the container can be wound and unwound by a winding drum rotated by a motor attached to the transfer means.

In addition, the container delivery, detention, and supply device of the present invention includes a passage through which the transfer means for gripping the container transfers in the middle of the substrate, and a plurality of mounting tables along the passage. It is good also as it adjoins to the both sides.

  The overhead traveling vehicle can transport another container without waiting for processing by the processing device. Thereby, the throughput of the whole factory improves. Further, it is possible to preferentially select a container requiring urgentness among containers waiting for processing by the processing apparatus, and transport the container to the processing apparatus.

  The container delivery, detention and supply device 1 shown in FIG. 1 is provided with a substrate 2 suspended from the ceiling of a manufacturing plant. A plurality of mounting tables 4 on which the container 3 is mounted (detained) is provided on the substrate 2, and the eaves portion 3 a provided on the upper portion of the container 3 is gripped (or held) above the mounting table 4 so as to be in a horizontal plane and at a high level. A transfer means 8 for transferring (supplying) in the vertical direction is provided. Moreover, it is a position on the plane which the overhead traveling vehicle 5 delivers the container 3 to the processing apparatus 6, and is located between them in the height direction. The delivery, detention, and supply device 1 of the container 3 can receive or deliver the container 3 between the overhead traveling vehicle 5 and the support member 7, and between the transfer means 8 and the processing device 6. Container 3 can be received or delivered.

  A passage 9 for transferring the container 3 by the transfer means 8 of the container 3 is provided at the center of the upper surface of the substrate 2, and three placement tables 4 for the container 3 are provided on the left and right sides along the passage 9. A positioning pin having a convex shape is provided on the upper surface of the mounting table 4 at a position corresponding to the concave portion provided at the bottom of the container 3. Thus, after the container 3 gripped by the gripping means 15 is lifted upward (to the extent that the positioning pin and the container 3 do not contact), the container 3 can be transported to the support member 7 or the like through this passage 9. The effect of providing the passage 9 is that the height of the entire apparatus can be kept lower than when the passage 9 is not provided. Further, the container 3 on any mounting table 4 is provided facing the central passage 9, and the gripping means 15 can select any container 3 and transport it to the support member 7 or the like. . If it does so, the container 3 with high importance can be preferentially conveyed to the processing apparatus 6 grade | etc.,. Moreover, in order to increase the quantity of the mounting bases 4 in the delivery of the container of this invention, placement, and the supply apparatus 1, it carries out easily by changing the design of the board | substrate 2 to the longer thing along the center channel | path 9. FIG. be able to.

  The transfer means 8 includes a Y-axis direction driving means 17, an X-axis direction driving means 19, an elevating means (not shown) and a gripping means 15. Two Y-axis direction driving means 17 are provided on the substrate 2 along the row of the mounting tables 4 so as to be substantially parallel to the outside thereof. Further, the X-axis direction drive means 19 is provided on the upper part across two struts 26 that are linearly driven by the Y-axis direction drive means 17. The container 3 has a gripping means 15 that can be moved back and forth in the X-axis direction (shown as X in the figure) orthogonal to the Y-axis direction (shown as Y in the figure) by the X-axis direction driving means 19. Yes. Thereby, the container 3 can be transferred in a horizontal plane by the operation of the X-axis direction driving means 19 and the Y-axis direction driving means 17.

Four pulleys 22a to 22e are rotatably provided on the side of the Y-axis direction driving means 17, and a timing belt 23a is provided to the pulleys 22a to 22e. A pulley 22e is attached to the pulleys 22a to 22e so as to be concentric. The pulley 22e receives the power of the motor 24a via a motor 24a fixed on the substrate 2 and a timing belt 23b. It is configured to be communicated and linked. Further, one end of a bracket 25 that is sandwiched and fixed from above and below is attached to one portion of the timing belt 23a, and the other end of the bracket 25 is attached to a column 26. The X-axis direction driving means 19 has the same configuration.

  The support member 7 includes an opening / closing means 30. When the container 3 is transported directly from the overhead traveling vehicle 5 to the processing device 6, the opening / closing means 30 is operated to rotate the support member 7 to be vertical. (The opening 31a of the substrate 2 is opened). Moreover, when mounting on the supporting member 7, the supporting member 7 is rotated in a horizontal direction (the opening part 31b of the board | substrate 2 is made into the closed state).

The gripping means 15 of the container 3 shown in FIG. 2 can be moved up and down by lifting / lowering means (not shown) attached to the X-axis movable part of the X-axis direction driving means 19. The elevating means operates the motor provided in the movable part of the X-axis direction driving means 19 to rotate the take-up drum, whereby the belt 32 can be wound and unwound (lifted / lowered). The gripping means 15 includes a link mechanism that is operated by a motor 24b. The square flange 3a at the top of the container 3 can be gripped by the gripping member 33 at the tip of the link mechanism.

  FIG. 3 shows the opening / closing means 30 of the support member 7. The opening / closing means 30 of the support member 7 is provided at the position where the overhead traveling vehicle 5 delivers the container 3 to the processing device 6 at the delivery position, and the height direction is provided at a position between the overhead traveling vehicle 5 and the processing device 6. Thereby, in order to deliver the container 3 from the overhead traveling vehicle 5 to the container 1 of the present invention, detainment, and delivery of the container 3 to the supply device 1, the support member 7 is made horizontal (the state of the support member 7 shown in FIG. 4B). This is possible by placing the container 3 on the support member 7. In addition, the container 3 can be directly transferred from the overhead traveling vehicle 5 to the processing device 6 by setting the support member 7 upward (the state of the support member 7 shown in FIG. 4A).

The opening / closing means 30 is a link mechanism that operates on the substrate 2 by an air cylinder 35 as a drive source. The structure includes a connecting member 37 that is rotated about a fulcrum 36 by an air cylinder 35, two link members 39 that are mounted to be equidistant from the fulcrum 36 of the connecting member 37, and the tip of the link member 39. The support member 7 includes a rotation shaft 41 on the substrate 2.

It is a perspective view which shows the delivery of the container of this invention, a detainment, and a supply apparatus. It is a perspective view which shows the holding means of a container. It is a perspective view which shows a supporting member and the opening / closing means of a supporting member. It is a perspective view which shows the temporary buffer as described in a prior art document.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Container delivery, detainment, and supply apparatus 2 Board | substrate 3 Container 3a ridge part 4 Mounting stand 5 Overhead traveling vehicle 6 Processing apparatus 7 Support member 8 Transfer means 9 Passage means 15 Grasp means 17 Y-axis direction drive means 19 X-axis direction drive Means 22a-22e Pulleys 23a, 23b Timing belts 24a, 24b Motor 25 Bracket 26 Strut 30 Opening / closing means 31a, 31b Opening portion 32 Belt 33 Holding member 35 Air cylinder 36 Support point 37 Connecting member 39 Link member 41 Rotating shaft 47 Storage buffer Overhead traveling vehicle system 48 equipped with traveling rail 49 warehousing station 50 evacuation station 51 conveyor

Claims (2)

A support plate member for placing the container delivered from the overhead traveling vehicle on the substrate provided above the position where the overhead traveling vehicle delivers the container to the processing device;
Opening / closing means for moving the support member between a delivery position for delivering the container from the overhead traveling vehicle and a retracted position for retracting the container from the delivery position to the processing device from the overhead traveling vehicle;
A container delivery, detention, and supply device, comprising: a support member; a container mounting table provided on a substrate; and a transfer means for gripping and transferring the container to and from the processing apparatus. The container delivery according to claim 1, wherein a passage through which the transfer means for gripping the container transfers is provided in the middle of the substrate, and a plurality of mounting tables are provided on both sides along the passage. , Detention and supply equipment.