[go: up one dir, main page]

JP2008241015A - Multirobe foil fluid bearing and its manufacturing method - Google Patents

Multirobe foil fluid bearing and its manufacturing method Download PDF

Info

Publication number
JP2008241015A
JP2008241015A JP2007086620A JP2007086620A JP2008241015A JP 2008241015 A JP2008241015 A JP 2008241015A JP 2007086620 A JP2007086620 A JP 2007086620A JP 2007086620 A JP2007086620 A JP 2007086620A JP 2008241015 A JP2008241015 A JP 2008241015A
Authority
JP
Japan
Prior art keywords
foil
bearing
journal
arc
holding member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007086620A
Other languages
Japanese (ja)
Inventor
Mari Nagata
真理 永田
Minoru Hanabashi
実 花橋
Kazuhiko Kawaike
和彦 川池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daido Metal Co Ltd
Original Assignee
Daido Metal Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daido Metal Co Ltd filed Critical Daido Metal Co Ltd
Priority to JP2007086620A priority Critical patent/JP2008241015A/en
Publication of JP2008241015A publication Critical patent/JP2008241015A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00Sliding-contact bearings for exclusively rotary movement
    • F16C17/02Sliding-contact bearings for exclusively rotary movement for radial load only
    • F16C17/024Sliding-contact bearings for exclusively rotary movement for radial load only with flexible leaves to create hydrodynamic wedge, e.g. radial foil bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F16C27/06Elastic or yielding bearings or bearing supports, for exclusively rotary movement by means of parts of rubber or like materials
    • F16C27/063Sliding contact bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C43/00Assembling bearings
    • F16C43/02Assembling sliding-contact bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00Sliding-contact bearings for exclusively rotary movement
    • F16C17/02Sliding-contact bearings for exclusively rotary movement for radial load only
    • F16C17/028Sliding-contact bearings for exclusively rotary movement for radial load only with fixed wedges to generate hydrodynamic pressure, e.g. multi-lobe bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Sliding-Contact Bearings (AREA)
  • Support Of The Bearing (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a multirobe foil fluid bearing capable of supporting a journal by an excellent fluid lubricating film causing neither the increase of friction and wear at the start nor the fall of load capacity. <P>SOLUTION: The entire length of a circular arc face part 45 formed by connecting adjacent vertex parts 44 is formed to bulge onto the bearing holding member 30 side. Consequently, since an inflection point is not formed as before at the circular arc face part 45 constituting the bearing sliding face of a foil 40, a part with which the journal 20 comes in strong contact at the start is eliminated to suppress the increase of friction and wear and the fall of load capacity of the fluid bearing. Further, since excellent wedge shape narrowed toward the end can be formed from the vertex part 44 forming a large clearance part 51 during rotation to a small clearance part 52, a fluid lubricating film is easily formed to enlarge the load capacity of the bearing. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、ジャーナルの外周を空隙を介して囲む軸受保持部材と、前記空隙に配置されて前記ジャーナルと対向する軸受摺動面を構成し且つ複数個の頂点部と該複数個の頂点部の隣り合う頂点部を連結することにより形成される複数個の円弧面部とを有する多円弧の閉ループ形状のフォイルと、該フォイルと対向する前記軸受保持部材との空隙に充填された粘弾性体又は弾性体又は粘弾性体と弾性体の複合体と、から構成され、前記ジャーナルと前記軸受摺動面との相対回転により形成される流体潤滑膜によってジャーナルを支持する多円弧フォイル流体軸受に関するものである。   The present invention comprises a bearing holding member that surrounds the outer periphery of a journal via a gap, a bearing sliding surface that is disposed in the gap and faces the journal, and a plurality of vertex portions and a plurality of vertex portions. A viscoelastic body or elasticity filled in a gap between a multi-arc closed-loop foil having a plurality of arc surface portions formed by connecting adjacent apex portions and the bearing holding member facing the foil. The present invention relates to a multi-arc foil fluid bearing comprising a body or a composite of a viscoelastic body and an elastic body and supporting the journal by a fluid lubricating film formed by relative rotation of the journal and the bearing sliding surface. .

上記のような構成に係る多円弧フォイル流体軸受としては、本出願人が先に提案した特開2005−299922号公報(特許文献1)に開示されている。   The multi-arc foil fluid bearing having the above-described configuration is disclosed in Japanese Patent Laid-Open No. 2005-299922 (Patent Document 1) previously proposed by the present applicant.

上記した特許文献1に記載される多円弧フォイル流体軸受の構造は、図5に示すようになっている。しかして、図5において、多円弧フォイル流体軸受1は、ジャーナル2の外周を空隙を介して囲む軸受保持部材3と、空隙に配置されてジャーナル2と対向する軸受摺動面を構成し且つ一個又は複数個の頂点部4aと該頂点部4aの個数に対応する個数の膨出状の円弧面部4bとを有する多円弧の閉ループ形状のフォイル4と、該フォイル4と軸受保持部材3との空隙に充填された粘弾性体6(又は弾性体又は粘弾性体と弾性体の複合体)と、から構成され、ジャーナル2と軸受摺動面との相対回転により形成される流体潤滑膜によってジャーナル2を支持する。なお、上記した円弧面部4bとは、ジャーナル2をフォイル4と同軸に配したときにジャーナル2の直径Dに対応するフォイル4の円弧部分をいうものである。また、頂点部4aと軸受保持部材3の内周面との間には、間隙C1が形成されている。   The structure of the multi-arc foil fluid bearing described in Patent Document 1 is as shown in FIG. 5, the multi-arc foil fluid bearing 1 constitutes a bearing holding member 3 that surrounds the outer periphery of the journal 2 via a gap, and a bearing sliding surface that is disposed in the gap and faces the journal 2. Alternatively, a multi-arc closed-loop foil 4 having a plurality of apex portions 4a and a number of bulging arcuate surface portions 4b corresponding to the number of the apex portions 4a, and a gap between the foil 4 and the bearing holding member 3 The viscoelastic body 6 (or an elastic body or a composite body of a viscoelastic body and an elastic body) filled with a fluid lubrication film formed by relative rotation of the journal 2 and the bearing sliding surface to the journal 2. Support. The arc surface portion 4b described above refers to an arc portion of the foil 4 corresponding to the diameter D of the journal 2 when the journal 2 is arranged coaxially with the foil 4. Further, a gap C <b> 1 is formed between the apex 4 a and the inner peripheral surface of the bearing holding member 3.

そして、上記の構造を有する多円弧フォイル流体軸受1の目的は、楔状流体潤滑膜が形成し易く軸受負荷能力が大きく且つ起動停止時にジャーナル2と軸受摺動面が接触することによって発生する摩耗粉が軸受摺動面から排出し易いというものである。また、製作時において軸受隙間の設定を容易に行うことができると共に製作および組立てが簡単であり、小径のジャーナル2を支持する場合にも好適であるところにある。
特開2005−299922号公報(図1)
The purpose of the multi-arc foil fluid bearing 1 having the above-described structure is to wear particles generated by contact between the journal 2 and the bearing sliding surface when starting and stopping because the wedge-like fluid lubricating film is easily formed and the bearing load capacity is large. Is easy to be discharged from the bearing sliding surface. In addition, the bearing clearance can be easily set at the time of manufacture, and the manufacture and assembly are simple, which is also suitable for supporting a small-diameter journal 2.
Japanese Patent Laying-Open No. 2005-299922 (FIG. 1)

このため、図5に示す構造を有する多円弧フォイル流体軸受1は、例えば、磁気ディスクドライブモータ又はポリゴンミラースキャナーモータ又はリアプロジェクションテレビのカラーホイールモータのジャーナル軸受として使用されるが、多円弧の閉ループ形状のフォイル4を構成する際に、複数のフォイル薄板の端辺を重ね合わせて溶接等で接着し、内部ループ空間をジャーナル軸受2を模した治具によって押し広げることで頂点部4aと膨出円弧面部4bとを構成するため、頂点部4aと円弧面部4bとの間に円弧面部4bの膨出方向と逆方向に膨出する変曲部4cが形成され、円弧面の一部がジャーナル軸受2に対して軸受保持部材3側へ凸形状となっている。このため、変曲部4cで流体膜の厚さが最も薄くなり、楔状流体膜が形成され難いので、起動時の摩擦・摩耗の増大や、流体軸受の負荷容量低下の原因になっている。   Therefore, the multi-arc foil fluid bearing 1 having the structure shown in FIG. 5 is used as, for example, a journal bearing of a magnetic disk drive motor, a polygon mirror scanner motor, or a color wheel motor of a rear projection television. When forming the foil 4 having a shape, the ends of a plurality of foil thin plates are overlapped and bonded together by welding or the like, and the inner loop space is expanded by a jig simulating the journal bearing 2 to bulge from the apex 4a. In order to form the arc surface portion 4b, a bend portion 4c that bulges in a direction opposite to the bulge direction of the arc surface portion 4b is formed between the apex portion 4a and the arc surface portion 4b, and a part of the arc surface is a journal bearing. 2 is convex toward the bearing holding member 3 side. For this reason, the thickness of the fluid film is the thinnest at the inflection portion 4c, and it is difficult to form a wedge-shaped fluid film.

本発明は、上記した事情に鑑みなされたもので、その目的とするところは、良好な流体潤滑膜を形成することによって負荷容量を大きくすることができる多円弧フォイル流体軸受及びその製造方法を提供することにある。   The present invention has been made in view of the above circumstances, and an object thereof is to provide a multi-arc foil fluid bearing capable of increasing the load capacity by forming a good fluid lubricating film and a method for manufacturing the same. There is to do.

請求項1に係る発明が採用した手段を、図面を参照して説明すると、図1に示すように、ジャーナル20の外周を空隙を介して囲む軸受保持部材30と、前記空隙に配置されて前記ジャーナル20と対向する軸受摺動面を構成し且つ複数個の頂点部44と該複数個の頂点部44の隣り合う頂点部44を連結することにより形成される複数個の円弧面部45とを有する多円弧の閉ループ形状のフォイル40と、該フォイル40と対向する前記軸受保持部材30との空隙に充填された粘弾性体60(又は弾性体又は粘弾性体と弾性体の複合体)と、から構成され、前記ジャーナル20と前記軸受摺動面との相対回転により形成される流体潤滑膜によってジャーナル20を支持する多円弧フォイル流体軸受10において、前記隣り合う頂点部44を連結することにより形成される円弧面部45の全長が前記軸受保持部材30側に膨出した形状となるようにしたことを特徴とする。   Means employed by the invention according to claim 1 will be described with reference to the drawings. As shown in FIG. 1, a bearing holding member 30 that surrounds the outer periphery of the journal 20 via a gap, and the gap is disposed in the gap. It has a bearing sliding surface facing the journal 20 and has a plurality of vertex portions 44 and a plurality of arcuate surface portions 45 formed by connecting adjacent vertex portions 44 of the plurality of vertex portions 44. A multi-arc closed-loop foil 40 and a viscoelastic body 60 (or an elastic body or a composite of a viscoelastic body and an elastic body) filled in a gap between the bearing holding member 30 facing the foil 40. In the multi-arc foil fluid bearing 10 that is configured and supports the journal 20 by a fluid lubricating film formed by relative rotation between the journal 20 and the bearing sliding surface, the adjacent apex portions 44 are The total length of the circular surface 45 formed by sintering is characterized in that as a shape that bulges to the bearing holding member 30 side.

また、請求項2に係る発明が採用した手段を、図面を参照して説明すると、図2に示すように、請求項1記載の多円弧フォイル流体軸受10において、前記頂点部44の連結構造は、一方の円弧面部を構成するフォイル用薄板41の一端部と、他方の円弧面部を構成するフォイル用薄板41の他端部とを係合により連結することで形成されることを特徴とする。ここで、係合とは、一方の薄板を他方の薄板に差し込むことにより連結することをいう。   The means employed by the invention according to claim 2 will be described with reference to the drawings. As shown in FIG. 2, in the multi-arc foil fluid bearing 10 according to claim 1, the connection structure of the apex portion 44 is as follows. , One end of the foil thin plate 41 constituting one arcuate surface portion and the other end of the foil thin plate 41 constituting the other arcuate surface portion are connected by engagement. Here, the engagement means that one thin plate is connected by being inserted into the other thin plate.

更に、請求項3に係る発明が採用した手段を、図面を参照して説明すると、図4に示すように、ジャーナル20の外周を空隙を介して囲む軸受保持部材30と、前記空隙に配置されて前記ジャーナル20と対向する軸受摺動面を構成し且つ複数個の頂点部44と該複数個の頂点部44の隣り合う頂点部44を連結することにより形成される複数個の円弧面部45とを有する多円弧の閉ループ形状のフォイル40と、該フォイル40と対向する前記軸受保持部材30との空隙に充填された粘弾性体60(又は弾性体又は粘弾性体と弾性体の複合体)と、から構成され、前記ジャーナル20と前記軸受摺動面との相対回転により形成される流体潤滑膜によってジャーナル20を支持する多円弧フォイル流体軸受10の製造方法において、複数個の平坦なフォイル薄板41の端辺を係合して形成される複数個の頂点部44と該複数個の頂点部44の隣り合う頂点部44を連結することにより形成される複数個の面とを有する閉ループの前記フォイル40を製作する第1工程と、前記軸受保持部材30の位置決め103が形成され且つベース盤101の中央に前記ジャーナル軸を模した軸柱102が立設される組立用治具100を用いて、前記第1工程によって製作された閉ループ状のフォイル40の内部ループ空間を前記軸柱102に貫通して前記面の全長が前記軸受保持部材30側に膨出した形状となるように膨出状円弧面部45を形成する第2工程と、前記組立用治具100のベース盤101の位置決め103に前記軸受保持部材30を嵌挿する第3工程と、前記フォイル40と前記軸受保持部材30との空隙に、粘弾性体60(又は弾性体又は粘弾性体と弾性体の複合体)を充填する第4工程と、前記組立用治具100から多円弧フォイル流体軸受10を取り外す第5工程と、からなることを特徴とする。   Further, the means employed by the invention according to claim 3 will be described with reference to the drawings. As shown in FIG. 4, the bearing holding member 30 that surrounds the outer periphery of the journal 20 via a gap is disposed in the gap. A plurality of arcuate surface portions 45 formed by connecting a plurality of apex portions 44 and adjacent apex portions 44 of the plurality of apex portions 44. And a viscoelastic body 60 (or an elastic body or a composite of a viscoelastic body and an elastic body) filled in a gap between the foil 40 and the bearing holding member 30 facing the foil 40. In the manufacturing method of the multi-arc foil fluid bearing 10 configured to support the journal 20 with a fluid lubricating film formed by relative rotation between the journal 20 and the bearing sliding surface, A plurality of apex portions 44 formed by engaging end edges of the flat foil thin plate 41 and a plurality of surfaces formed by connecting adjacent apex portions 44 of the plurality of apex portions 44. A first step of manufacturing the closed-loop foil 40 having an assembly jig in which a positioning 103 of the bearing holding member 30 is formed and a shaft column 102 imitating the journal shaft is erected in the center of the base board 101 100, the inner loop space of the closed-loop foil 40 manufactured in the first step passes through the shaft column 102 so that the entire length of the surface bulges toward the bearing holding member 30. A second step of forming the bulging arcuate surface portion 45 in the third step, a third step of fitting the bearing holding member 30 into the positioning 103 of the base board 101 of the assembly jig 100, the foil 40 and the The fourth step of filling the gap between the holding member 30 and the viscoelastic body 60 (or the elastic body or the composite body of the viscoelastic body and the elastic body) and the multi-arc foil fluid bearing 10 from the assembly jig 100. And a fifth step to be removed.

請求項1に係る発明においては、隣り合う頂点部44を連結することにより形成される円弧面部45の全長が軸受保持部材30側に膨出した形状となるようにしたので、フォイル40の軸受摺動面を構成する円弧面部45に従来のように変曲点が形成されないため、起動時にジャーナル20が強く接触する部分が解消されており、摩擦・摩耗の増大や流体軸受の負荷容量低下を抑制することができる。また、フォイル40とジャーナル20との間の軸受隙間50は、大きな隙間部51を構成する頂点部44から小さな隙間部52まで良好な末狭まりの楔形状を形成することができるので流体潤滑膜が形成され易く軸受の負荷容量を大きくすることができる。   In the invention according to claim 1, the entire length of the arcuate surface portion 45 formed by connecting the adjacent apex portions 44 is formed to bulge toward the bearing holding member 30 side. Since the inflection point is not formed in the circular arc surface portion 45 constituting the moving surface as in the prior art, the portion where the journal 20 is in strong contact at the time of startup is eliminated, and the increase in friction and wear and the decrease in the load capacity of the fluid bearing are suppressed. can do. Further, the bearing gap 50 between the foil 40 and the journal 20 can form a good narrowed wedge shape from the apex 44 constituting the large gap 51 to the small gap 52, so that the fluid lubricating film is formed. It is easy to form and the load capacity of the bearing can be increased.

また、請求項2に係る発明においては、頂点部44の一方の円弧面部を構成するフォイル用薄板41の一端部と他方の円弧面部を構成するフォイル用薄板41の他端部とを係合により連結させることにより、フォイル用薄板41の面を円弧面としたときに変曲点の存在しない全周面を膨出状とした円弧面部45を簡単に形成することができる。   Moreover, in the invention which concerns on Claim 2, one end part of the foil thin plate 41 which comprises one circular arc surface part of the vertex part 44, and the other end part of the foil thin plate 41 which comprises the other circular arc surface part are engaged by engagement. By connecting, when the surface of the foil thin plate 41 is an arc surface, it is possible to easily form the arc surface portion 45 in which the entire peripheral surface having no inflection point bulges out.

更に、請求項3に係る発明においては、複数個の平坦なフォイル薄板41の端辺を係合して形成される頂点部44と隣り合う頂点部44を連結することにより形成される複数個の面とを有する閉ループの前記フォイル40と軸受保持部材30とを組立用治具100に装着して、フォイル40と軸受保持部材30との空隙に粘弾性体60(又は弾性体又は粘弾性体と弾性体の複合体)を充填し、組立用治具100から多円弧フォイル流体軸受10を取り外すだけで、本発明に係る多円弧フォイル流体軸受10を製造することができ、フォイル40の製造と組立が簡単であることに加えて軸受隙間設定の容易な多円弧フォイル流体軸受10を製造でき、量産性に適した製造方法を提供することができる。   Further, in the invention according to claim 3, a plurality of flat portions formed by connecting the apex portions 44 formed by engaging the edges of the flat foil thin plates 41 and the adjacent apex portions 44 are formed. The closed loop foil 40 having a surface and the bearing holding member 30 are mounted on the assembly jig 100, and the viscoelastic body 60 (or the elastic body or the viscoelastic body is placed in the gap between the foil 40 and the bearing holding member 30. It is possible to manufacture the multi-arc foil fluid bearing 10 according to the present invention by simply filling the elastic composite) and removing the multi-arc foil fluid bearing 10 from the assembling jig 100, and manufacturing and assembling the foil 40. In addition to being simple, the multi-arc foil fluid bearing 10 in which the bearing clearance can be easily set can be manufactured, and a manufacturing method suitable for mass production can be provided.

以下、本発明の実施形態を、図面を参照して説明する。まず、図1、図2、及び図4を参照して本発明の第1実施形態について説明する。図1は、第1実施形態に係る多円弧フォイル流体軸受の断面図であり、図2は、第1実施形態に使用するフォイルの連結構造を示すフォイル用薄板の正面図(A)と組み立て斜視図(B)であり、図4は、第1実施形態に係る多円弧フォイル流体軸受の製造過程を説明するための説明図である。   Embodiments of the present invention will be described below with reference to the drawings. First, a first embodiment of the present invention will be described with reference to FIG. 1, FIG. 2, and FIG. FIG. 1 is a cross-sectional view of a multi-arc foil fluid bearing according to the first embodiment, and FIG. 2 is a front view (A) of a thin foil sheet and an assembled perspective view showing a connecting structure of foils used in the first embodiment. FIG. 4B is an explanatory diagram for explaining a manufacturing process of the multi-arc foil fluid bearing according to the first embodiment.

第1実施形態における多円弧フォイル流体軸受10は、ジャーナル20の外周を空隙を介して囲む軸受保持部材30と、空隙に配置されてジャーナル20と対向する軸受摺動面を構成し且つ3個の頂点部44と該3個の頂点部44の隣り合う頂点部44を連結することにより形成される3個の円弧面部45とを有する多円弧の閉ループ形状の多円弧フォイル40と、該多円弧フォイル40と対向する軸受保持部材30との空隙に充填された粘弾性体60(又は弾性体又は粘弾性体と弾性体の複合体)と、から構成されている。そして、ジャーナル20と軸受摺動面との相対回転により形成される流体潤滑膜によってジャーナル20を支持するものである。   The multi-arc foil fluid bearing 10 according to the first embodiment includes a bearing holding member 30 that surrounds the outer periphery of the journal 20 via a gap, a bearing sliding surface that is disposed in the gap and faces the journal 20, and includes three pieces. A multi-arc foil 40 having a multi-arc closed-loop shape having a vertex 44 and three arc-shaped surface portions 45 formed by connecting adjacent vertexes 44 of the three vertices 44, and the multi-arc foil 40 and a viscoelastic body 60 (or an elastic body or a composite of a viscoelastic body and an elastic body) filled in a gap between the bearing holding member 30 and the bearing holding member 30 facing each other. The journal 20 is supported by a fluid lubricating film formed by relative rotation between the journal 20 and the bearing sliding surface.

多円弧フォイル40は、図2(A)に示すように、一端部に係合切込み溝42が形成されると共に他端部に係合突片43が形成された平坦な方形状のフォイル用薄板41を3個用意し、その3個のフォイル用薄板41同士において、図2(B)に示すように、一のフォイル用薄板41の係合切込み溝42に隣り合うフォイル用薄板41の係合突片43を差し込んで係合することにより、三角形状の閉ループのフォイル40を構成する。また、係合切込み溝42と係合突片43との係合部分には、3枚のフォイル用薄板41同士の結合を強くすると共に粘弾性体60の充填時に軸受摺動面への流入を防止するために、接着剤を塗布しても良い。なお、フォイル40は、ステンレス、リン青銅、真鍮、銅、アルミニウム等の金属薄板又はPTFE(ポリテトラフルオロエチレン)等の樹脂薄板が使用され、その厚さは10〜500μmのものが使用される。   As shown in FIG. 2A, the multi-arc foil 40 is a flat foil thin plate having an engagement cut groove 42 formed at one end and an engagement protrusion 43 formed at the other end. As shown in FIG. 2B, the three foil thin plates 41 are engaged with each other, and the foil thin plates 41 adjacent to the engagement cut grooves 42 of one foil thin plate 41 are prepared. By inserting and engaging the projecting pieces 43, a triangular closed-loop foil 40 is formed. Further, at the engagement portion between the engagement cut groove 42 and the engagement protrusion 43, the coupling between the three foil thin plates 41 is strengthened and the flow into the bearing sliding surface is filled when the viscoelastic body 60 is filled. In order to prevent this, an adhesive may be applied. The foil 40 is made of a metal thin plate such as stainless steel, phosphor bronze, brass, copper, or aluminum, or a resin thin plate such as PTFE (polytetrafluoroethylene), and has a thickness of 10 to 500 μm.

そして、上記のように構成された閉ループのフォイル40を、図4(B)に示す組立用治具100によって軸受保持部材30に組み付けて多円弧フォイル流体軸受10を作製する。組付用治具100は、軸受保持部材30の外形寸法に合致する位置決め用の凹部103が形成されるベース盤101の中央にジャーナル20を模した軸柱102が立設されて構成されるものである。なお、軸受保持部材30と組立用治具100の位置決めは、上述の例のみではなく、軸受保持部材30の内径やノックピンを利用して組立用治具100に組み付ける方法等もある。   Then, the closed loop foil 40 configured as described above is assembled to the bearing holding member 30 by the assembly jig 100 shown in FIG. The assembling jig 100 is configured such that a shaft column 102 simulating a journal 20 is erected at the center of a base board 101 in which a positioning recess 103 that matches the outer dimensions of the bearing holding member 30 is formed. It is. The positioning of the bearing holding member 30 and the assembling jig 100 is not limited to the above-described example, and there is a method of assembling the assembling jig 100 using the inner diameter of the bearing holding member 30 or a knock pin.

次いで、図4(B),(C)に示すように、組立用治具100の軸柱102に閉ループの多円弧フォイル40の内部ループ空間を貫通させる。このジャーナル20を模した軸柱102の直径は、適用するジャーナル20の直径とほぼ同じであるが、所定の軸受隙間50が形成されるような径とすることが望ましい。その後、軸受保持部材30をベース盤101の凹部103に装着した後、ゴムバンド110を巻き付けたままの多円弧フォイル40と軸受保持部材30との空隙に粘弾性体60を適量充填して硬化させる。硬化後、組付用治具100から取り外すことにより、多円弧フォイル流体軸受10を完成することができる。なお、粘弾性体としては、シリコーン系やアクリル系等のゴム材料や高分子ゲルが使用される。また、粘弾性体に代えてばねや波状フォイルからなる弾性体を使用しても良く、さらに、上記の粘弾性体と弾性体を組み合わせた複合体を用いてもよい。   Next, as shown in FIGS. 4B and 4C, the inner loop space of the closed loop multi-arc foil 40 is passed through the shaft column 102 of the assembly jig 100. The diameter of the shaft column 102 simulating the journal 20 is substantially the same as the diameter of the journal 20 to be applied, but it is desirable that the diameter be such that a predetermined bearing gap 50 is formed. Thereafter, after the bearing holding member 30 is mounted in the recess 103 of the base board 101, an appropriate amount of the viscoelastic body 60 is filled in the gap between the multi-arc foil 40 and the bearing holding member 30 with the rubber band 110 wound around, and cured. . After curing, the multi-arc foil fluid bearing 10 can be completed by removing it from the assembling jig 100. As the viscoelastic body, a rubber material such as silicone or acrylic or a polymer gel is used. Moreover, it may replace with a viscoelastic body and may use the elastic body which consists of a spring and a wave-like foil, and also may use the composite_body | complex which combined said viscoelastic body and an elastic body.

上記のようにして製造された多円弧フォイル流体軸受10に、ジャーナル20を支持したときに、ジャーナル20と多円弧フォイル40の軸受摺動面との間には所定の軸受隙間50が設けられており、その軸受隙間50の分布は、頂点部44の近傍部分の大隙間部51が最も大きく、2つの頂点のほぼ中間部分での小隙間部52で最小となっている。また、軸受隙間50は、最も小さい部分での小隙間部52でジャーナル20の径の約3/1000以下に設計するのが一般であり、実際の軸受隙間50は、大きくても10μm以下である。また、ジャーナル20の回転振動を小さくするには、軸受隙間50を小さく設定するとよい。第1実施形態(後に詳述する他の実施形態も同じ。)における多円弧フォイル流体軸受10においては、静止時に軸受隙間50がほとんどない状態でも多円弧フォイル40とそれを支持する粘弾性体60の弾性効果により、ある回転数以上で流体潤滑膜を形成しジャーナル20を浮上させることができる。なお、図1において多円弧フォイル40の厚さ及び軸受隙間50は、理解し易いように誇張して図示してある。   When the journal 20 is supported on the multi-arc foil fluid bearing 10 manufactured as described above, a predetermined bearing gap 50 is provided between the journal 20 and the bearing sliding surface of the multi-arc foil 40. The distribution of the bearing gap 50 is the largest in the large gap portion 51 in the vicinity of the apex portion 44 and the smallest in the small gap portion 52 in the almost middle portion between the two apexes. Further, the bearing gap 50 is generally designed to be about 3/1000 or less of the diameter of the journal 20 with the small gap portion 52 at the smallest portion, and the actual bearing gap 50 is 10 μm or less at most. . In order to reduce the rotational vibration of the journal 20, the bearing gap 50 may be set small. In the multi-arc foil fluid bearing 10 in the first embodiment (the same applies to other embodiments described in detail later), the multi-arc foil 40 and the viscoelastic body 60 that supports the multi-arc foil 40 even when there is almost no bearing gap 50 when stationary. Due to this elastic effect, the fluid lubrication film can be formed and the journal 20 can be floated at a certain rotational speed or higher. In FIG. 1, the thickness of the multi-arc foil 40 and the bearing gap 50 are exaggerated for easy understanding.

しかして、上記のように構成される多円弧フォイル流体軸受10の作用について説明すると、ジャーナル20が回転すると、頂点部44付近の大隙間部51の近傍より流体が引き込まれ、隙間形状が末狭まりになっている小隙間部52に向かって流体潤滑膜が発生する。この流体潤滑膜と粘弾性体60の復元力と減衰力とにより、回転に伴う不釣合いな振動などを支持、減衰し、安定した高精度回転を実現することができる。この場合、多円弧フォイル40の軸受摺動面を構成する円弧面部45に従来のように変曲点が形成されないため、起動時にジャーナル20が強く接触する部分が解消されており、摩擦・摩耗の増大を抑制することができると共に、流体軸受としての負荷容量を大きくすることができる。なお、回転の起動時又は停止時にジャーナル20と軸受摺動面が直接接触することによって軸受摺動面で発生する摩耗粉を、頂点部44に近い大隙間部51から外部に排出されやすい構造であるため、長時間安定した軸受性能を維持できる。   Thus, the operation of the multi-arc foil fluid bearing 10 configured as described above will be described. When the journal 20 rotates, fluid is drawn from the vicinity of the large gap portion 51 near the apex portion 44, and the gap shape is narrowed. A fluid lubricating film is generated toward the small gap portion 52. The restoring force and damping force of the fluid lubricating film and the viscoelastic body 60 can support and damp unbalanced vibrations associated with the rotation, thereby realizing stable high-precision rotation. In this case, since the inflection point is not formed in the arc surface portion 45 constituting the bearing sliding surface of the multi-arc foil 40 as in the prior art, the portion where the journal 20 is in strong contact at the time of start-up is eliminated, and friction / wear is not generated. The increase can be suppressed, and the load capacity as a fluid bearing can be increased. The structure is such that the wear powder generated on the bearing sliding surface due to the direct contact between the journal 20 and the bearing sliding surface when starting or stopping the rotation is easily discharged to the outside from the large gap portion 51 near the apex portion 44. Therefore, stable bearing performance can be maintained for a long time.

また、上記した第1実施形態においては、多円弧フォイル40の円弧面部45を構成するための頂点部44における連結構造として、係合切込み溝42と係合突片43とで構成していたが、この連結構造以外の連結構造であっても良い。このような他の連結構造を採用した実施形態を図3を参照して説明する。図3は、第2実施形態に係る多円弧フォイル流体軸受の断面図(A)とフォイル用薄板の正面図(B)である。   In the first embodiment described above, the connecting structure in the apex portion 44 for configuring the arcuate surface portion 45 of the multi-arc foil 40 is configured by the engagement cut groove 42 and the engagement protrusion 43. A connecting structure other than this connecting structure may be used. An embodiment adopting such another connecting structure will be described with reference to FIG. FIG. 3: is sectional drawing (A) of the multi-arc foil fluid bearing which concerns on 2nd Embodiment, and the front view (B) of the foil thin plate.

まず、図3において、第2実施形態に係る多円弧フォイル流体軸受10は、軸受摺動面を構成する多円弧フォイル80の構成が第1実施形態に係る多円弧フォイル流体軸受10と相違するだけで他の構成は同じである。しかして、第2実施形態に係る多円弧フォイル80は、図3(B)に示されるように、一端部に端辺に沿って上から中程までスリット形成される上係合溝82と他端部に端辺に沿って下から中程までスリット形成される形成される下係合溝83が形成された平坦な方形状のフォイル用薄板81を5個用意し、その5個のフォイル用薄板81同士において、図3(A)に示すように、一のフォイル用薄板81の上係合溝82に隣り合うフォイル用薄板81の下係合溝83を差し込んで係合することにより、五角形状のフォイル80を構成する。また、上係合溝82と下係合溝83との係合部分には、5個のフォイル用薄板81同士の結合を強くすると共に粘弾性体60の充填時に軸受摺動面への流入を防止するために、接着剤を塗布しても良い。このように構成される第2実施形態に係る多円弧フォイル流体軸受10においても、5個の頂点部84と該5個の頂点部84とを連結する内周ループ面がその全長に亘って外側に向って膨出した円弧面部85となった多円弧フォイル80となっている。つまり、多円弧フォイル80の頂点部84における連結構造が、従来のように溶接等による接着構造ではなく、上係合溝82と下係合溝83との係合による係合頂点部となっているので、フォイル用薄板81の内周ループ面がその全長に亘って変曲点のない軸受保持部材30側に向って膨出した円弧面部85となるものである。なお、上係合溝82と下係合溝83との係合による係合頂点部を有する多円弧フォイルとして、2個以上のフォイル用薄板を使用したものでも良い。   First, in FIG. 3, the multi-arc foil fluid bearing 10 according to the second embodiment is different from the multi-arc foil fluid bearing 10 according to the first embodiment only in the configuration of the multi-arc foil 80 constituting the bearing sliding surface. The other configurations are the same. Therefore, as shown in FIG. 3B, the multi-arc foil 80 according to the second embodiment includes an upper engagement groove 82 and other portions which are slit at one end portion from the top to the middle along the end side. Five flat foil thin plates 81 having a bottom engaging groove 83 formed in a slit from the bottom to the middle along the edge are prepared at the end, and for the five foils. As shown in FIG. 3A, by inserting and engaging the lower engagement groove 83 of the foil thin plate 81 adjacent to the upper engagement groove 82 of one foil thin plate 81 between the thin plates 81, a pentagonal shape is obtained. A foil 80 having a shape is formed. Further, at the engaging portion between the upper engaging groove 82 and the lower engaging groove 83, the coupling between the five foil thin plates 81 is strengthened, and the flow into the bearing sliding surface is filled when the viscoelastic body 60 is filled. In order to prevent this, an adhesive may be applied. Also in the multi-arc foil fluid bearing 10 according to the second embodiment configured as described above, the five apex portions 84 and the inner peripheral loop surface connecting the five apex portions 84 are outside the entire length. The multi-arc foil 80 is a circular arc surface portion 85 that bulges toward the center. That is, the connection structure at the apex portion 84 of the multi-arc foil 80 is not an adhesion structure by welding or the like as in the prior art, but is an engagement apex portion due to the engagement between the upper engagement groove 82 and the lower engagement groove 83. Therefore, the inner peripheral loop surface of the foil thin plate 81 becomes an arcuate surface portion 85 that bulges toward the bearing holding member 30 side having no inflection point over its entire length. Note that two or more foil thin plates may be used as the multi-arc foil having the engagement apex portion formed by the engagement between the upper engagement groove 82 and the lower engagement groove 83.

以上、本発明における実施形態について詳述してきたが、本発明の趣旨を逸脱しない範囲で幾通りもの設計変更を行うことが可能である。例えば、フォイル41の頂点数は、2〜5個に限定されない。また、本発明に係る多円弧フォイル流体軸受10においては、起動時又は停止時又は低回転時にフォイル40,80とジャーナル20との間の摩擦と摩耗を低減させる必要がある。そのために、ジャーナル20の外周面とフォイル40,80の内周面の少なくともどちらか一方に摩擦特性の優れたクロムメッキやDLC(ダイヤモンドライクカーボン)の硬質皮膜やPTFE(ポリテトラフルオロエチレン)、MoS2(二硫化モリブデン)などの固体潤滑剤のコーティングを施すことが望ましい。   As mentioned above, although the embodiment in the present invention has been described in detail, various design changes can be made without departing from the spirit of the present invention. For example, the number of vertices of the foil 41 is not limited to 2-5. Further, in the multi-arc foil fluid bearing 10 according to the present invention, it is necessary to reduce friction and wear between the foils 40 and 80 and the journal 20 at the time of starting or stopping or at the time of low rotation. For this purpose, at least one of the outer peripheral surface of the journal 20 and the inner peripheral surface of the foils 40, 80 is made of chromium plating, DLC (diamond-like carbon) hard coating, PTFE (polytetrafluoroethylene), MoS2 having excellent friction characteristics. It is desirable to apply a solid lubricant coating such as (molybdenum disulfide).

また、本発明に係る多円弧フォイル流体軸受10においては、高速回転(10,000rpm以上)における高精度回転を、給気機構の必要ない気体潤滑で達成することができるので、ハードディスクドライブ用モータや、ポリゴンミラースキャナーモータ、あるいはリアプロジェクションテレビのカラーホイールモータの軸受として応用するのに好適である。なお、本発明に係る多円弧フォイル流体軸受において、潤滑流体は気体の他に水系や油系の液体の場合においても適用できる。   Further, in the multi-arc foil fluid bearing 10 according to the present invention, high-precision rotation at high speed (10,000 rpm or more) can be achieved with gas lubrication that does not require an air supply mechanism. It is suitable for application as a bearing of a polygon mirror scanner motor or a color wheel motor of a rear projection television. In addition, in the multi-arc foil fluid bearing according to the present invention, the lubricating fluid can be applied to the case of water-based or oil-based liquid in addition to gas.

なお、以上説明した実施形態では、ジャーナル20が回転し、軸受摺動面であるフォイル40,80、粘弾性体60及び軸受保持部材30が静止している場合について説明してきたが、本発明の多円弧フォイル流体軸受10では、ジャーナル20が静止し、フォイル40,80、粘弾性体60及び軸受保持部材30が回転する場合においても適応することができる。   In the embodiment described above, the case where the journal 20 is rotated and the foils 40 and 80, the viscoelastic body 60 and the bearing holding member 30 which are bearing sliding surfaces are stationary has been described. The multi-arc foil fluid bearing 10 can be applied even when the journal 20 is stationary and the foils 40 and 80, the viscoelastic body 60, and the bearing holding member 30 are rotated.

第1実施形態に係る多円弧フォイル流体軸受の断面図である。It is sectional drawing of the multi-arc foil fluid bearing which concerns on 1st Embodiment. 第1実施形態に使用するフォイルの連結構造を示すフォイル用薄板の正面図(A)と組み立て斜視図(B)である。It is the front view (A) and assembly perspective view (B) of the thin plate for foil which show the connection structure of the foil used for 1st Embodiment. 第2実施形態に係る多円弧フォイル流体軸受の断面図(A)とフォイル用薄板の正面図(B)である。It is sectional drawing (A) of the multi-arc foil fluid bearing which concerns on 2nd Embodiment, and the front view (B) of the foil thin plate. 第1実施形態に係る多円弧フォイル流体軸受の製造過程を説明するための説明図である。It is explanatory drawing for demonstrating the manufacturing process of the multi-arc foil fluid bearing which concerns on 1st Embodiment. 従来の多円弧フォイル流体軸受の断面図である。It is sectional drawing of the conventional multi-arc foil fluid bearing.

符号の説明Explanation of symbols

10 多円弧フォイル流体軸受
20 ジャーナル
30 軸受保持部材
40 多円弧フォイル
41 フォイル用薄板
42 係合切込み溝
43 係合突片
44 頂点部
45 円弧面部
50 軸受隙間
51 大隙間部
52 小隙間部
60 粘弾性体
80 多円弧フォイル
81 フォイル用薄板
82 上係合溝
83 下係合溝
84 頂点部
85 円弧面部
100 組立用治具
101 ベース盤
102 軸柱
103 凹部(位置決め)
DESCRIPTION OF SYMBOLS 10 Multiarc foil fluid bearing 20 Journal 30 Bearing holding member 40 Multiarc foil 41 Thin foil plate 42 Engagement groove 43 Engagement protrusion 44 Apex part 45 Arc surface part 50 Bearing gap 51 Large gap part 52 Small gap part 60 Viscoelasticity Body 80 Multi-arc foil 81 Thin foil plate 82 Upper engagement groove 83 Lower engagement groove 84 Vertex portion 85 Arc surface portion 100 Assembly jig 101 Base plate 102 Shaft column 103 Recess (Positioning)

Claims (3)

ジャーナルの外周を空隙を介して囲む軸受保持部材と、前記空隙に配置されて前記ジャーナルと対向する軸受摺動面を構成し且つ複数個の頂点部と該複数個の頂点部の隣り合う頂点部を連結することにより形成される複数個の円弧面部とを有する多円弧の閉ループ形状のフォイルと、該フォイルと対向する前記軸受保持部材との空隙に充填された粘弾性体又は弾性体又は粘弾性体と弾性体の複合体と、から構成され、前記ジャーナルと前記軸受摺動面との相対回転により形成される流体潤滑膜によってジャーナルを支持する多円弧フォイル流体軸受において、
前記隣り合う頂点部を連結することにより形成される円弧面部の全長が前記軸受保持部材側に膨出した形状となるようにしたことを特徴とする多円弧フォイル流体軸受。
A bearing holding member that surrounds the outer periphery of the journal via a gap, a bearing sliding surface that is disposed in the gap and faces the journal, and a plurality of vertex portions and adjacent vertex portions of the plurality of vertex portions A viscoelastic body, an elastic body, or a viscoelasticity filled in a gap between a multi-arc closed-loop foil having a plurality of circular arc surface portions formed by connecting together, and the bearing holding member facing the foil In a multi-arc foil fluid bearing comprising a composite body and an elastic body, and supporting the journal by a fluid lubricating film formed by relative rotation of the journal and the bearing sliding surface,
A multi-arc foil fluid bearing characterized in that an arcuate surface portion formed by connecting the adjacent apex portions has a shape bulging toward the bearing holding member.
前記複数個の頂点部は、一方の円弧面部を構成するフォイル用薄板の一端部と、他方の円弧面部を構成するフォイル用薄板とを係合により連結することで形成されることを特徴とする請求項1記載の多円弧フォイル流体軸受。   The plurality of apex portions are formed by engaging one end portion of a foil thin plate constituting one arcuate surface portion and a foil thin plate constituting the other arcuate surface portion by engagement. The multi-arc foil fluid bearing according to claim 1. ジャーナルの外周を空隙を介して囲む軸受保持部材と、前記空隙に配置されて前記ジャーナルと対向する軸受摺動面を構成し且つ複数個の頂点部と該複数個の頂点部の隣り合う頂点部を連結することにより形成される複数個の円弧面部とを有する多円弧の閉ループ形状のフォイルと、該フォイルと対向する前記軸受保持部材との空隙に充填された粘弾性体又は弾性体又は粘弾性体と弾性体の複合体と、から構成され、前記ジャーナルと前記軸受摺動面との相対回転により形成される流体潤滑膜によってジャーナルを支持する多円弧フォイル流体軸受の製造方法において、
複数個の平坦なフォイル薄板の端辺を係合して形成される複数個の頂点部と該複数個の頂点部の隣り合う頂点部を連結することにより形成される複数個の面とを有する閉ループの前記フォイルを製作する第1工程と、
前記軸受保持部材との位置決めが形成され且つベース盤の中央に前記ジャーナル軸を模した軸柱が立設される組立用治具を用いて、前記第1工程によって製作された閉ループ状のフォイルの内部ループ空間を前記軸柱に貫通して前記面の全長が前記軸受保持部材側に膨出した形状となるように膨出状円弧面部を形成する第2工程と、
前記組立用治具のベース盤の位置決めに前記軸受保持部材を嵌挿する第3工程と、
前記フォイルと前記軸受保持部材との空隙に、粘弾性体又は弾性体又は粘弾性体と弾性体の複合体を充填する第4工程と、
前記組立用治具から多円弧フォイル流体軸受を取り外す第5工程と、
からなることを特徴とする多円弧フォイル流体軸受の製造方法。
A bearing holding member that surrounds the outer periphery of the journal via a gap, a bearing sliding surface that is disposed in the gap and faces the journal, and a plurality of vertex portions and adjacent vertex portions of the plurality of vertex portions A viscoelastic body, an elastic body, or a viscoelasticity filled in a gap between a multi-arc closed-loop foil having a plurality of circular arc surface portions formed by connecting together, and the bearing holding member facing the foil In a method of manufacturing a multi-arc foil fluid bearing comprising a composite of a body and an elastic body, and supporting the journal by a fluid lubricating film formed by relative rotation between the journal and the bearing sliding surface,
A plurality of vertex portions formed by engaging edges of a plurality of flat foil thin plates and a plurality of surfaces formed by connecting adjacent vertex portions of the plurality of vertex portions; A first step of producing the foil in a closed loop;
The assembly of the closed-loop foil produced by the first step is performed using an assembly jig in which positioning with the bearing holding member is formed and a shaft column simulating the journal shaft is erected in the center of the base board. A second step of forming a bulging arcuate surface portion so that the entire length of the surface bulges toward the bearing holding member through an inner loop space through the shaft column;
A third step of inserting the bearing holding member into the positioning of the base board of the assembly jig;
A fourth step of filling a gap between the foil and the bearing holding member with a viscoelastic body or an elastic body or a composite of a viscoelastic body and an elastic body;
A fifth step of removing the multi-arc foil fluid bearing from the assembly jig;
A method of manufacturing a multi-arc foil fluid bearing, comprising:
JP2007086620A 2007-03-29 2007-03-29 Multirobe foil fluid bearing and its manufacturing method Pending JP2008241015A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007086620A JP2008241015A (en) 2007-03-29 2007-03-29 Multirobe foil fluid bearing and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007086620A JP2008241015A (en) 2007-03-29 2007-03-29 Multirobe foil fluid bearing and its manufacturing method

Publications (1)

Publication Number Publication Date
JP2008241015A true JP2008241015A (en) 2008-10-09

Family

ID=39912598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007086620A Pending JP2008241015A (en) 2007-03-29 2007-03-29 Multirobe foil fluid bearing and its manufacturing method

Country Status (1)

Country Link
JP (1) JP2008241015A (en)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011080520A (en) * 2009-10-06 2011-04-21 Mitsubishi Heavy Ind Ltd Thrust bearing
JP2013024344A (en) * 2011-07-22 2013-02-04 Ihi Corp Radial foil bearing
WO2013018605A1 (en) * 2011-08-01 2013-02-07 Ntn株式会社 Thrust foil bearing
JP2013047555A (en) * 2011-08-29 2013-03-07 Ntn Corp Foil bearing
JP2013061024A (en) * 2011-09-14 2013-04-04 Ntn Corp Thrust foil bearing
JP2014119095A (en) * 2012-12-19 2014-06-30 Ntn Corp Foil bearing
CN104196881A (en) * 2014-08-23 2014-12-10 武汉英康汇通电气有限公司 Elastic support element of air bearing and air bearing
WO2015074686A1 (en) * 2013-11-20 2015-05-28 Lux Powertrain S.A. Film, film arrangement having a number of at least three homogeneous films, radial air bearing, micro gas turbine and production method for a radial air bearing
WO2015087675A1 (en) * 2013-12-12 2015-06-18 Ntn株式会社 Foil bearing, and foil bearing unit and turbo machine each having same
JP2015113927A (en) * 2013-12-12 2015-06-22 Ntn株式会社 Foil bearing, foil bearing unit having the same, and turbomachine
JP2015113926A (en) * 2013-12-12 2015-06-22 Ntn株式会社 Foil bearing, foil bearing unit having the same, and turbomachine
JP2015143572A (en) * 2013-12-24 2015-08-06 Ntn株式会社 Foil, foil bearing, and method of assembling foil bearing
JP2017058019A (en) * 2016-12-09 2017-03-23 Ntn株式会社 Foil bearing
US9631556B2 (en) 2012-12-19 2017-04-25 Ntn Corporation Foil bearing
WO2017086190A1 (en) * 2015-11-19 2017-05-26 Ntn株式会社 Foil bearing
WO2018180388A1 (en) * 2017-03-28 2018-10-04 Ntn株式会社 Foil bearing
CN113195911A (en) * 2018-12-18 2021-07-30 达姆施塔特工业大学 Gas bearing and method for manufacturing the same

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011080520A (en) * 2009-10-06 2011-04-21 Mitsubishi Heavy Ind Ltd Thrust bearing
JP2013024344A (en) * 2011-07-22 2013-02-04 Ihi Corp Radial foil bearing
WO2013018605A1 (en) * 2011-08-01 2013-02-07 Ntn株式会社 Thrust foil bearing
CN103717926A (en) * 2011-08-01 2014-04-09 Ntn株式会社 Thrust foil bearing
CN103717926B (en) * 2011-08-01 2016-11-23 Ntn株式会社 thrust foil bearing
USRE48269E1 (en) 2011-08-01 2020-10-20 Ntn Corporation Thrust foil bearing
US9033579B2 (en) 2011-08-01 2015-05-19 Ntn Corporation Thrust foil bearing
JP2013047555A (en) * 2011-08-29 2013-03-07 Ntn Corp Foil bearing
JP2013061024A (en) * 2011-09-14 2013-04-04 Ntn Corp Thrust foil bearing
JP2014119095A (en) * 2012-12-19 2014-06-30 Ntn Corp Foil bearing
EP3428465A1 (en) * 2012-12-19 2019-01-16 NTN Corporation Radial foil bearing
US9784307B2 (en) 2012-12-19 2017-10-10 Ntn Corporation Foil bearing
US9631556B2 (en) 2012-12-19 2017-04-25 Ntn Corporation Foil bearing
WO2015074686A1 (en) * 2013-11-20 2015-05-28 Lux Powertrain S.A. Film, film arrangement having a number of at least three homogeneous films, radial air bearing, micro gas turbine and production method for a radial air bearing
JP2015113926A (en) * 2013-12-12 2015-06-22 Ntn株式会社 Foil bearing, foil bearing unit having the same, and turbomachine
CN105765245A (en) * 2013-12-12 2016-07-13 Ntn株式会社 Foil bearing, and foil bearing unit and turbo machine each having same
JP2015113927A (en) * 2013-12-12 2015-06-22 Ntn株式会社 Foil bearing, foil bearing unit having the same, and turbomachine
US10012109B2 (en) 2013-12-12 2018-07-03 Ntn Corporation Foil bearing, and foil bearing unit and turbo machine each having same
WO2015087675A1 (en) * 2013-12-12 2015-06-18 Ntn株式会社 Foil bearing, and foil bearing unit and turbo machine each having same
JP2015143572A (en) * 2013-12-24 2015-08-06 Ntn株式会社 Foil, foil bearing, and method of assembling foil bearing
CN104196881A (en) * 2014-08-23 2014-12-10 武汉英康汇通电气有限公司 Elastic support element of air bearing and air bearing
WO2017086190A1 (en) * 2015-11-19 2017-05-26 Ntn株式会社 Foil bearing
EP3379096A4 (en) * 2015-11-19 2019-07-10 NTN Corporation SHEET BEARING
JP2017058019A (en) * 2016-12-09 2017-03-23 Ntn株式会社 Foil bearing
WO2018180388A1 (en) * 2017-03-28 2018-10-04 Ntn株式会社 Foil bearing
CN113195911A (en) * 2018-12-18 2021-07-30 达姆施塔特工业大学 Gas bearing and method for manufacturing the same

Similar Documents

Publication Publication Date Title
JP2008241015A (en) Multirobe foil fluid bearing and its manufacturing method
JP6644855B2 (en) Air foil journal bearing
JP4046733B2 (en) Foil type hydrodynamic journal bearing and manufacturing method thereof.
US20070211970A1 (en) Multi-lobe foil gas bearing
JP6466105B2 (en) Fluid dynamic bearing device and bearing member and shaft member used therefor
JP2020197287A (en) Dynamic pressure air bearing
US20040013331A1 (en) Motors with oil dynamic pressure bearing, oil dynamic pressure bearing devices and method for manufacturing the same
JP5207657B2 (en) Method for manufacturing hydrodynamic bearing device
JP4628246B2 (en) Motor with sintered alloy dynamic pressure bearing
WO2017169936A1 (en) File bearing
JP4152707B2 (en) Hydrodynamic bearing device
JP2008261397A (en) Dynamic pressure bearing device
JP4579013B2 (en) Hydrodynamic bearing device
JP5143435B2 (en) Manufacturing method of shaft member for hydrodynamic bearing device, and shaft member manufactured by the method
JP2005273781A (en) Outer rotor type motor
JP4554324B2 (en) Hydrodynamic bearing device
JP6599572B2 (en) Fluid dynamic bearing device and bearing member and shaft member used therefor
JP2006329391A (en) Dynamic pressure bearing arrangement
WO2013038913A1 (en) Fluid dynamic bearing device and motor equipped with same
JP5172213B2 (en) Hydrodynamic bearing device and method for manufacturing shaft member thereof
JPH0220851B2 (en)
JP2013053692A (en) Fluid dynamic pressure bearing device and method of manufacturing the same
JP2004291016A (en) Caulking device
JP2009008110A (en) Fluid bearing device
JP2009243605A (en) Fluid bearing device