JP2008133838A - Manifold structure of fluid control equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manifold structure of a fluid control apparatus easy in assembling. <P>SOLUTION: This manifold structure 1 of the fluid control apparatus is provided by installing a plurality of fluid control apparatuses 2 in a manifold block 3, and provided with a first manifold block 4 in which a first communicating flow passage 23 communicating with the fluid control apparatuses 2 is opened on one side surface, a second manifold block 5 in which a plurality of second communicating flow passages 27 connected to the first communicating flow passage 23 are opened on the one side surface and forming a common flow passage 28 communicating with the second communicating flow passages 27, an intermediate plate 6 arranged between the first manifold block 4 and the second manifold block 5 and integrally provided with a female screw member 35, a first fastening member 38 inserted into the first manifold block 4 from the fluid control apparatuses 2 and fastened to one end opening of the female screw member 35, and a second fastening member 43 inserted into the second manifold block 5 and fastened to the other end opening of the female screw member 35. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a manifold structure of a fluid control device equipped with a plurality of fluid control devices.

  Conventionally, in slurry lines and various chemical liquid lines in the semiconductor industry, fluids such as chemical liquids containing slurry, acid chemical liquids, alkaline chemical liquids, and organic solvents are branched from the primary flow path and supplied to the secondary flow paths. In addition, input from the secondary side flow path and merging are performed. When connecting multiple chemical valves that control flow path switching with piping, there is a problem that the piping space becomes large. Therefore, a valve unit that attaches a fluid control device such as a chemical valve to the manifold block is provided at the branching / merging position of the flow path. It is done.

FIG. 8 is an external perspective view of a conventional valve unit 100. FIG. 9 is a plan view of the valve unit shown in FIG.
In the valve unit 100, the valve mechanisms 101A, 101B, and 101C are attached to the upper surface of the manifold block 111, and are attached to the semiconductor manufacturing apparatus via the attachment plate 117. In the manifold block 111, joints 112A, 112B, 112C, and 112D are integrally formed and provided in different directions.

10 is a cross-sectional view taken along the line CC of the valve unit 100 shown in FIG. 11 is a cross-sectional view of the valve unit shown in FIG. 12 is an EE cross-sectional view of the valve unit shown in FIG.
First, the manifold block 111 used by the valve unit 100 will be described. On the upper surface of the manifold block 111, valve chamber forming portions 113A, 113B, and 113C that form valve chambers with the diaphragm valve bodies 102A, 102B, and 102C of the valve mechanisms 101A, 101B, and 101C are formed. The valve chamber forming portions 113A, 113B, and 113C communicate with the joints 112A, 112B, and 112C, respectively. The manifold block 111 has communication channels 114A, 114B, and 114C formed coaxially with the valve chamber forming portions 113A, 113B, and 113C. Valve seats 115A, 115B, and 115C are provided on the bottom walls of the valve chamber forming portions 113A, 113B, and 113C outside the openings of the first communication channels 114A, 114B, and 114C. A joint 112 is provided on one side of the manifold block 111, and a common flow path 116 is formed in the horizontal direction from the joint 112D. The common channel 116 communicates with the communication channels 114A, 114B, and 114C, respectively.

Next, the valve mechanisms 101A, 101B, and 101C will be described. The valve mechanisms 101A, 101B, and 101C have the same structure. Therefore, here, the valve mechanism 101A will be described, and for the valve mechanisms 101B and 101C, reference numerals corresponding to the valve mechanism 101A are assigned to the drawings, and description thereof will be omitted.
The valve mechanism 101A is attached to the manifold block 111 such that the outer edge portion of the diaphragm valve body 102A is sandwiched between the cylinder 103A and the manifold block 111. A piston chamber 105A is formed between the cylinder 103A and the cover 104A. A piston 106A is slidably loaded in the piston chamber 105A. The piston 106A passes through the cylinder 103A and protrudes into the valve chamber forming portion 113A of the manifold block 111, and the diaphragm valve body 102A is connected to the lower end portion.

The piston chamber 105A is airtightly divided into an upper chamber and a lower chamber by a piston 106A, and pilot ports 107A and 108A communicate with the upper chamber and the lower chamber, respectively. Therefore, by adjusting the pressure balance between the upper chamber and the lower chamber of the piston chamber 105A, the piston 106A can be moved in the vertical direction so that the diaphragm valve body 102 can be brought into contact with or separated from the valve seat.
The valve mechanisms 101A, 101B, and 101C and the manifold block 111 are all made of resin in appearance and liquid contact portion in order to ensure corrosion resistance.

  In such a valve unit 100, as shown in FIG. 11, the manifold block 111 is installed on the mounting plates 117A, 117B, and 117C, and the valve mechanisms 101A, 101B, and 101C are installed on the upper surface of the manifold block 111. Bolts 118 penetrating through the valve mechanisms 101A, 101B, and 101C from above are inserted into the manifold block 111, and the tip portions are assembled to the mounting plates 117A, 117B, and 117C (for example, Patent Document 1, Patent Document) 2, Patent Document 3, Patent Document 4, and Patent Document 5).

JP 2003-4151 A JP 2003-21248 A JP 2003-172466 A JP 2003-185039 A JP 2004-316667 A

However, the conventional valve unit 100 has the following problems.
(1) For example, when a chemical solution containing slurry flows to the valve unit 100, the chemical solution may adhere to the valve seats 115A, 115B, 115C and the diaphragm valve bodies 102A, 102B, 102C and condense. In this case, there is a possibility that fluid leakage may occur from the condensing portion, so that the valve seats 115A, 115B, 115C and the diaphragm valve bodies 102A, 102B, 102C need to be replaced. In the conventional valve unit 100, since the valve seats 115A, 115B, and 115C are integrally provided in one manifold block 111, even if the chemical solution condenses only on the valve seat 115A, the entire manifold block 111 must be replaced. There was a maintenance cost.
(2) In addition, the flow path configuration of the semiconductor manufacturing apparatus varies from site to site depending on the installation status of peripheral devices. In the conventional valve unit 100, since the positions of the joints 112A, 112B, 112C, and 112D are uniquely determined with respect to the manifold block 111, it is not possible to adapt to various flow path configurations flexibly. For this reason, manifold blocks 111 having different orientations of the joints 112A, 112B, and 112C have to be stocked, and maintenance is expensive.

In order to solve this problem, the applicant has proposed a manifold block structure 200 as shown in the sectional view of FIG. 13 in Japanese Patent Application No. 2006-162886.
In the manifold block structure 200 shown in FIG. 13, the manifold 111 is divided into first manifold blocks 201A, 201B, 201C and a second manifold block 202. The first manifold blocks 201A, 201B, 201C are fixed to the second manifold block 202 with the same connection structure. Hereinafter, the connection structure will be described by taking the first manifold block 201C as an example.

14 is a cross-sectional view taken along line FF in FIG.
Four internal thread members 203 are arranged between the first manifold block 201C and the second manifold block 202. Each female screw member 203 is arranged in a state where both ends are inserted into the first manifold block 201C and the second manifold block 202. The first manifold block 201C and the second manifold block 202 are connected by passing through the fastening members 204 and 205 from above and below, respectively, and tightening the end portions of the fastening members 204 and 205 into the female screw members 203, respectively. ing.

  Therefore, when the fastening of the fastening member 205 and the female screw member 203 is released, the valve mechanism 101C and the first manifold block 201C can be detached from the second manifold block 202 together with the female screw member 203. Then, changing the direction of the joint 112C provided on one side surface, the first manifold block 201C is placed on the second manifold block 202 so that the lower end portion of the female screw member 203 is inserted into the hole of the second manifold block 202. If the fastening member 205 is fastened to the female screw member 203, the first manifold block 201C can be connected to the second manifold block 202 again.

  As described above, according to the manifold structure 200, the orientation of the first manifold blocks 201A, 201B, and 201C can be freely changed with respect to the second manifold block 202. Even when the chemical solution containing the slurry flows through the manifold block and the fluid condenses in the flow path of the first manifold block 201C, only the first manifold block 201C is replaced, and the other first manifold blocks 201A, 201B, The second manifold block 202 can be used as it is. Therefore, maintenance costs and maintenance costs are reduced.

  Although the manifold structure 200 has the above advantages, there is a problem that it is difficult to assemble. That is, the four female screw members 203 are provided separately from the first manifold blocks 201A, 201B, 201C and the second manifold block. Therefore, when assembling, it is necessary to insert the female screw member 203 into the first manifold blocks 201A, 201B, and 201C one by one, which takes time.

  The present invention has been made to solve the above problems, and an object thereof is to provide a manifold structure of a fluid control device that can be easily assembled.

The manifold structure of the fluid control device according to the present invention has the following configuration.
(1) In a manifold structure of a fluid control device in which a plurality of fluid control devices are mounted, a first manifold channel that communicates with the fluid control device is connected to the first manifold and a first manifold block that opens on one side surface. A plurality of second communication channels that are open on one side surface, and a common channel that is connected to the second communication channel is formed between the first manifold block and the second manifold block. An intermediate plate integrally provided with a plurality of female screw members, and a plurality of first fastening members that are inserted into the first manifold block from the fluid control device and fastened to one end opening of the female screw member, A plurality of second fastening members that are inserted through the second manifold block and fastened to the other end opening of the female screw member.

(2) In the invention described in (1), the material of the intermediate plate is resin, the material of the female screw member is metal, and the female screw member is insert-molded on the intermediate plate.

(3) In the invention described in (1) or (2), the intermediate plate has a plurality of convex portions, the female screw member is disposed in the convex portions, and the first manifold block includes: There are a plurality of mounting holes that fit into the convex portions.

(4) In the invention according to any one of (1) to (3), the female screw member has a flange.

(5) The invention according to any one of (1) to (3), further including a rotation stopping mechanism that stops rotation of the female screw member.

(6) In the invention according to any one of (1) to (3), the first manifold block has a connecting portion protruding outside the opening of the first communication channel, and the intermediate plate is And a fitting hole for fitting into the connecting portion.

(7) In the invention according to any one of (1) to (6), the first fastening member and the second fastening member are alternately mounted with a plurality of plain washers and a plurality of elastic bodies. Yes.

  In the manifold structure of the fluid control device according to the present invention, the intermediate plate integrally provided with the female screw member is disposed between the first manifold block and the second manifold block. The first manifold block and the second manifold block fasten a first fastening member inserted into the first manifold block from the fluid control device to one end opening of the female screw member, and a second fastening member inserted into the second manifold block. Are fastened to the other end opening of the female screw member. Therefore, according to the manifold structure of the fluid control device of the present invention, it is not necessary to insert a plurality of female screw members into the first manifold block at the time of assembly, and assembly is easy.

  In the manifold structure of the fluid control device according to the present invention, the female female screw member is insert-molded on the resin intermediate plate, and the outer peripheral surface of the female screw member is covered with the intermediate plate. Therefore, for example, even if the manifold structure of the fluid control device is used in a corrosive atmosphere, the female screw member and its screw portion are not easily exposed to the corrosive atmosphere. Therefore, according to the manifold structure of the fluid control device of the present invention, it is possible to avoid a problem that the fastening force between the female screw member and the first and second fastening members is reduced due to corrosion, and to prevent fluid leakage.

  In the manifold structure of the fluid control device according to the present invention, the first fastening member is fastened to the female screw member in a state where the convex portion of the intermediate plate is inserted into the mounting hole of the first manifold block. The female screw member is disposed in the convex portion and is not exposed to the outside. Therefore, according to the manifold structure of the fluid control device according to the present invention, when the fluid control device, the first manifold block, and the intermediate plate are handled as a set of assemblies, the female screw member does not protrude to the outside, and the handling property is improved. Is good.

  In the manifold structure of the fluid control device according to the present invention, the fastening force between the female screw member and the first fastening member and the fastening force between the female screw member and the second fastening member are the first through the intermediate plate through the intermediate plate. 1 and the second manifold block are distributed and transmitted. Therefore, in the first and second manifold blocks, the surface pressure associated with the fastening force between the female screw member and the first and second fastening members is small, and creep is unlikely to occur. Therefore, according to the manifold structure of the fluid control device according to the present invention, the sealing force between the first and second communication channels can be kept constant, and fluid leakage can be prevented.

  Moreover, the manifold structure of the fluid control device according to the present invention prevents the female screw member from rotating together when the first and second fastening members are fastened to the female screw member by the rotation prevention mechanism. Therefore, according to the manifold structure of the fluid control device according to the present invention, the fluid control device, the first manifold block, and the second manifold block are connected with a predetermined fastening force, and the connection portions of the first and second communication channels are connected. Can prevent fluid leakage.

  Moreover, the manifold structure of the fluid control device according to the present invention includes a first connecting block provided outside the opening of the first communication channel of the first manifold block and fitted in the fitting hole of the intermediate plate. The fastening member is fastened to the female screw member. Therefore, according to the manifold structure of the fluid control device, the intermediate plate can be disposed between the first and second manifold blocks without making the overall height extremely higher than that of the existing manifold block.

  In the manifold structure of the fluid control device according to the present invention, a plurality of plain washers and a plurality of elastic bodies are alternately arranged on the first and second fastening members. For example, when the first and second manifold blocks repeat expansion and contraction due to the fluid temperature, the elastic body elastically deforms between the plain washers, and the first and second manifolds accompanying the deformation of the first and second manifold blocks. The rotation of the fastening member is prevented. Therefore, according to the manifold structure of the fluid control device according to the present invention, fluid leakage can be prevented by keeping the fastening force of the first and second fastening members constant.

  Next, an embodiment of a manifold structure of a fluid control device according to the present invention will be described with reference to the drawings.

FIG. 1 is a side view of a valve unit 1 having a manifold structure of a fluid control device according to the present embodiment. Each valve mechanism 2 and the first manifold block 4 have the same structure. In FIG. 1, it is difficult to see the drawings when symbols are written on all the valve mechanisms 2 and the first manifold block 4. Therefore, some valve mechanisms 2 and the first manifold block 4 are denoted by symbols, and other valve mechanisms are used. 2 and the first manifold block 4 are omitted.
The valve unit 1 is incorporated in a semiconductor manufacturing apparatus or the like, as in the prior art. The valve unit 1 divides the chemical solution into a plurality of lines, or mixes the plurality of chemical solutions and outputs them to the secondary side.

<Overall configuration>
In the valve unit 1, a plurality of valve mechanisms 2, which are examples of “fluid control devices”, are mounted on the upper surface of the manifold block 3. The manifold block 3 is divided into a plurality (five in the present embodiment) of first manifold blocks 4 and one second manifold block 5. An intermediate plate 6 is disposed between the first manifold block 4 and the second manifold block 5. The valve unit 1 is attached to a semiconductor manufacturing apparatus or the like via an attachment plate 7 that is fixed to the lower surface of the second manifold block 5.

<Valve mechanism>
2 is a cross-sectional view taken along the line AA in FIG.
In the valve mechanism 2, a piston chamber 13 is formed between the cylinder 11 and the cap 12. A piston 14 is slidably loaded in the piston chamber 13. A spring 15 is contracted between the piston 14 and the cap 12, and a downward force is always applied to the piston 14 in the figure. A diaphragm 16 is fixed to the lower end portion of the piston 14. The diaphragm 16 is sandwiched between the cylinder 11 and the first manifold block 4 at the periphery. The piston 14 moves up and down according to the balance between the pressure of the operation air supplied from the operation port 17 and the elastic force of the spring 15, and applies a force in the vertical direction in the drawing to the diaphragm 16. In the valve mechanism 2, all parts except the metal spring 15 and the rubber seal member are made of resin from the viewpoint of corrosion resistance.

<First manifold block>
The first manifold block 4 is formed by molding a resin such as PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer), PPS (polyphenylene sulfide), or PTFE (tetrafluoroethylene) into a rectangular parallelepiped shape.

  On the upper surface of the first manifold block 4, a valve chamber forming portion 21 is formed in a cylindrical shape. The valve chamber forming section 21 forms the valve chamber 22 by hermetically closing the opening of the diaphragm 16. In the first manifold block 4, a first communication channel 23 is formed coaxially with the valve chamber forming portion 21. Therefore, the first communication channel 23 is opened on the lower surface of the first manifold block 4 in the figure.

  A valve seat 24 is provided on the bottom wall of the valve chamber forming portion 21 outside the opening where the first communication channel 23 opens. An input / output flow path 25 is opened on the side wall of the valve chamber forming portion 21. The input / output flow path 25 is formed so as to communicate with the valve chamber forming portion 21 from the side surface of the first manifold block 4. A joint 26 for connecting a pipe (not shown) is provided outside the opening of the input / output channel 25.

<Second manifold block>
As shown in FIGS. 1 and 2, the second manifold block 5 is formed by molding a resin such as PFA, PPS, or PTFE into a rectangular parallelepiped shape. As shown in FIG. 1, the entire length of the second manifold block 5 is longer than that of the first manifold block 4 so that a plurality of the first manifold blocks 4 can be attached.

  As shown in FIGS. 1 and 2, a plurality of second communication channels 27 are opened in the longitudinal direction on the upper surface of the second manifold block 5 in the drawing. Each of the second communication channels 27 is formed vertically from the upper surface of the second manifold block 5 to the vicinity of the center. In the second manifold block 5, a common channel 28 is formed in the longitudinal direction from the central portion of one side surface. The common channel 28 communicates with each second communication channel 27. A joint 29 for connecting a pipe (not shown) is provided outside the opening of the common channel 28.

<Seal structure>
As shown in FIG. 2, a seal member 30 is disposed at a connection portion outside the opening of the first communication channel 23 and the second communication channel 27, and the first communication channel 23 and the second communication channel are arranged. 27 connecting portions are sealed. The seal member 30 has an H-shaped cross section. The recesses formed on the upper and lower end surfaces of the seal member 30 are press-fitted into the outside of the opening of the first communication channel 23 of the first manifold block 4 and the outside of the opening of the second communication channel 27 of the second manifold block 5. A protruding line is formed.

<Intermediate plate>
On the outside of the seal member 30, the intermediate plate 6 is disposed in a state of being sandwiched between the first manifold block 4 and the second manifold block 5. In the first manifold block 4, a connection portion 31 is provided in a cylindrical shape outside the opening of the first communication channel 15. The intermediate plate 6 is fitted with the connecting portion 31 in a fitting hole 32 formed in the center, thereby preventing rattling.

FIG. 3 is a plan view of the intermediate plate 6.
The intermediate plate 6 is formed by molding a resin such as PFA, PPS, or PVDF (vinylidene fluoride) into a square plate shape in accordance with the shape of the lower surface of the first manifold block 4. In the intermediate plate 6, a plurality (four) of female screw members 35 are arranged around the fitting hole 32. Each female screw member 35 is provided integrally with the intermediate plate 6. The female screw member 35 has a center point of the fitting hole 32 so that the first and second manifold blocks 4 and 5 can be connected even if the direction of the first manifold block 4 to which the intermediate plate 6 is attached is changed. It is placed at the vertex position of the square as the midpoint.

4 is a cross-sectional view taken along line BB in FIG.
In the intermediate plate 6, a plurality of convex portions 34 are vertically provided on the plate portion 33. A metal female screw member 35 is disposed in the convex portion 34 by insert molding.

  The female screw member 35 has a cylindrical shape in which a female screw is formed on the inner peripheral surface. A flange portion 36 is formed on the outer peripheral surface of the female screw member 35. A knurled groove, which is an example of a “rotation stop mechanism”, is formed on the surface of the flange portion 36. The female screw member 35 is disposed on the plate 6 so that the flange portion 36 is disposed on the plate portion 33 and protrudes vertically from the plate portion 33, and the surface is covered with the convex portion 34. Therefore, the female screw member 35 is attached to the plate 6 in a state in which the flange portion 36 is engaged with the plate portion 33, and does not fall off from the plate 6.

<Valve assembly>
FIG. 5 is a partial cross-sectional view of the valve assembly 37 shown in FIG.
The valve assembly 37 is obtained by fixing the valve mechanism 2, the first manifold block 4, and the intermediate plate 6 with a first fastening member 38, and can be handled separately from the second manifold block 5.

  The valve mechanism 2 and the first manifold block 4 are respectively formed with four bolt holes 39 and 40 through which the first fastening member 38 is inserted. In the first manifold block 4, a mounting hole 41 for inserting the convex portion 34 of the intermediate plate 6 is formed in the lower end opening of each bolt hole 40 in the drawing. Therefore, when the convex portion 34 of the intermediate plate 6 is fitted into the mounting hole 41 of the first manifold block 4, the female screw member 35 and the bolt holes 39 and 40 are arranged coaxially.

  The first fastening member 38 fits the convex portion 34 of the intermediate plate 6 into the mounting hole 41 of the first manifold block 4, and the connection portion 31 (see FIG. 2) of the first manifold block 4 in the fitting hole 32 of the intermediate plate 6. And the valve mechanism 2 is placed on the upper surface of the first manifold block 4, and the bolt hole 39 is inserted into the bolt hole 40, and the tip is open at one end of the female screw member 35 (upper end in the figure). Fastened to the opening).

  The valve mechanism 2, the first manifold block 4, and the intermediate plate 6 are integrated by the fastening force between the female screw member 35 and the first fastening member 38 to constitute a valve assembly 37. Since the female screw member 35 is embedded in the plate 6, it does not protrude from the surface of the valve assembly 37.

  Note that the first metal fastening member 38 is provided with a corrosion-resistant coating on the surface, and the contact with the outside air is blocked by the sealing member 42 attached to the valve mechanism 2. Therefore, for example, even when the valve unit 1 is used in a corrosive atmosphere, the first fastening member 38 is not exposed to the corrosive atmosphere. Therefore, it is possible to prevent a problem that the first fastening member 38 reduces the fastening force due to corrosion.

<Assembly of valve unit>
As shown in FIG. 1, the valve unit 1 uses a second fastening member 43 to fix the valve assembly 37 to the second manifold block 5. The second manifold block 5 is formed with a bolt hole 44 through which the second fastening member 43 is inserted. The bolt holes 44 are formed at four locations around each second communication channel 27 so as to correspond to the female screw member 35.

  The second fastening member 43 places the valve assembly 37 on the upper surface of the second manifold block 5 in the drawing so that the female screw member 35 of the intermediate plate 6 is aligned with the bolt hole 44 of the second manifold block 5, and the manifold With the mounting plate 7 arranged on the lower surface of the block 2 in the figure, the mounting plate 7 is inserted into the second manifold block 5, and the tip is fastened to the other end opening (lower end opening) of the female screw member 35. The valve assembly 37 is fixed to the second manifold block 5 by the fastening force between the female screw member 35 and the second fastening member 43.

  In this case, the seal member 30 disposed between the first manifold block 4 and the second manifold block 5 includes four female screw members disposed outside the connecting portion of the first and second communication channels 23 and 27. The second fastening member 43 is fastened to 35 and is crushed almost uniformly in the circumferential direction to be sealed.

  The metal second fastening member 43 is provided with a corrosion-resistant coating on the surface, and is blocked from outside air by a sealing member 45 attached to the mounting plate 7. Therefore, for example, even when the valve unit 1 is used in a corrosive atmosphere, the second fastening member is not exposed to the corrosive atmosphere. Therefore, the malfunction that the 2nd fastening member 43 reduces fastening force by corrosion can be prevented beforehand.

<Loosening prevention structure>
FIG. 6 is a view showing the loosening prevention structures 48 and 49 shown in FIGS. 1 and 5. The locking structures 48 and 49 are the same structure. Therefore, here, the description will focus on the loosening prevention structure 48 of the first fastening member 38, and the loosening prevention structure 49 of the second fastening member 43 will be described only with reference numerals in parentheses in the drawing, and description thereof will be omitted. It shall be.
As shown in FIG. 6, the locking structure 48 is configured by alternately arranging a plurality of flat washers 46 and a plurality of spring washers 47 (an example of an “elastic body”) on the first fastening member 38. The spring washers 47 are elastically deformed between the flat washers 46 to constantly bias the valve assembly 37, in other words, the first manifold block 4 to the intermediate plate 6 side via the valve mechanism 2. The first fastening member 38 is less likely to rotate due to the urging force of the spring washer 47 and is less likely to loosen due to vibration or the like.

<Fluid control>
Next, fluid control of the valve unit 1 having the above configuration will be described.
When the chemical solution is divided, the chemical solution is supplied to the joint 29 of the second manifold block 5.
When all the valve mechanisms 2 are closed, the chemical solution flows from the common flow path 28 to the second communication flow paths 27 and the first communication flow paths 23 and is blocked by the valve seat 24. Therefore, the chemical liquid is not output from any joint 26.
On the other hand, when any one of the plurality of valve mechanisms 2 is in the valve open state, the fluid flowing from the common flow path 28 to the second communication flow path 27 and the first communication flow path 23 is the valve mechanism in the valve open state. After the flow rate is adjusted to 2, it is output from the joint 26 corresponding to the valve mechanism 2 in the valve open state.

On the other hand, when selecting and outputting the kind of chemical liquid, the chemical liquid is supplied to the joint 26 of each first manifold block 4.
When all the valve mechanisms 2 are in the closed state, each chemical solution flows from the input / output flow path 25 to the valve chamber 22 and is blocked by the valve seat 24. Therefore, the chemical liquid is not output from the joint 29.
On the other hand, when one of the valve mechanisms 2 is opened, a chemical liquid controlled by the valve mechanism 2 is output from the joint 29 via the second communication channel 27 and the common channel 28.
In the case of outputting the mixed liquid, the chemical liquid can be mixed in the common flow path 28 and output from the joint 29 if the valve mechanism 2 is opened in a plurality of valves.

<Effect>
Next, the function and effect of the valve unit 1 will be described.
In the valve unit 1, the intermediate plate 6 integrally provided with the female screw member 35 is disposed between the first manifold block 4 and the second manifold block 5. Since the intermediate plate 6 has four female screw members integrally arranged, when arranged between the first and second manifold blocks 4, 5, the four female screw members 35 are connected to the first manifold block 4. The bolt holes 40 and the second manifold block 5 are arranged together at positions corresponding to the bolt holes 44. The first manifold block 4 and the second manifold block 5 fasten the first fastening member 38 inserted into the bolt hole 40 of the first manifold block 4 from the bolt hole 39 of the valve mechanism 2 to the upper end opening of the female screw member 35, Further, the second fastening member 43 inserted into the bolt hole 44 of the second manifold block 5 from the mounting plate 7 is connected to the lower end opening of the female screw member 35 to be connected. Therefore, according to the valve unit 1 of the present embodiment, it is not necessary to attach each female screw member 35 to the first manifold block 4 at the time of assembly, and the assembly is easy.

  Further, in the valve unit 1, a metal female screw member 35 is insert-molded into a resin intermediate plate 6, and the outer peripheral surface of the female screw member 35 is covered with the intermediate plate 6 and its convex portion 34. Therefore, for example, even when the valve unit 1 is used in a corrosive atmosphere, the threaded portion 35 or the threaded portion where the female thread of the female threaded member 35 and the male thread of the first and second fastening members 38 and 41 are fastened. Difficult to be exposed to corrosive atmosphere. Therefore, according to the valve unit 1 of the present embodiment, it is possible to avoid a problem that the fastening force between the female screw member 35 and the first and second fastening members 38 and 41 is reduced by corrosion, and to prevent fluid leakage.

  Further, the valve unit 1 of the present embodiment fastens the first fastening member 38 to the female screw member 35 in a state where the convex portion 34 of the intermediate plate 6 is inserted into the mounting hole 41 of the first manifold block 4. The female screw member 35 is disposed in the convex portion 34 and is not exposed to the outside. Therefore, according to the valve unit 1 of the present embodiment, when the valve mechanism 2, the first manifold block 4 and the intermediate plate 6 are handled as a set of assemblies, the female screw member 35 does not protrude to the outside, so Is good. Further, since the intermediate plate 6 has the projections 34 inserted into the mounting holes 41, the intermediate plate 6 is not displaced in the horizontal direction even if it is not pressed by hand, and the first fastening member 38 is easily fastened.

  In the valve unit 1 of the present embodiment, the fastening force between the female screw member 35 and the first fastening member 38 and the fastening force between the female screw member 35 and the second fastening member 43 are generated from the flange portion 36 of the female screw member 35. It acts on the intermediate plate 6. The intermediate plate 6 has a plate shape and has a large area in contact with the first and second manifold blocks 4 and 5. Therefore, the fastening force acting on the intermediate plate 6 is widely dispersed and transmitted to the first and second manifold blocks 4 and 5. As a result, the first and second manifold blocks 4 and 5 have a smaller surface pressure due to the fastening force between the female screw member 35 and the first and second fastening members 38 and 41 and are less likely to undergo creep deformation. Therefore, according to the valve unit 1 of the present embodiment, the seal member 30 disposed between the first and second communication flow paths 23 and 27 is crushed with a constant force to maintain a predetermined sealing force, thereby preventing fluid leakage. Can be prevented.

  Further, the valve unit 1 according to the present embodiment has an intermediate portion between the surface of the flange portion 36 and the intermediate portion when the first and second fastening members 38 and 41 are fastened to the female screw member 35 by the knurled grooves formed on the surface of the flange portion 36. A frictional resistance is generated between the plate 6 and the plate 6. Due to this frictional resistance, the female screw member 35 does not rotate together. Therefore, according to the valve unit 1 of the present embodiment, the valve mechanism 2, the first manifold block 4 and the second manifold block 5 can be connected with a predetermined fastening force, and the seal member 30 can be crushed with a predetermined force. It is possible to prevent fluid leakage from connecting portions of the first and second communication channels 23 and 27.

  Further, in the valve unit 1 of the present embodiment, the connection portion 31 projecting in an annular shape outside the opening of the first communication flow path 23 of the first manifold block 4 is fitted into the fitting hole 32 of the intermediate plate 6 exactly. In this state, the first fastening member 38 is fastened to the female screw member 35. For this reason, the valve unit 1 of the present embodiment has the intermediate plate 6 connected to the first and second manifold blocks 4 and 5 without making the overall height extremely higher than the existing manifold block 111 (see FIGS. 8 and 13). Can be placed in between.

  In the valve unit 1 of the present embodiment, a plurality of flat washers 46 and a plurality of spring washers 47 are alternately arranged on the first and second fastening members 38 and 41. For example, when the resin first and second manifold blocks 4 and 5 are repeatedly expanded and contracted by the fluid temperature, the spring washer 47 is elastically deformed between the plain washers 46 and includes the first manifold block 4. The assembly 37 and the second manifold block 5 are continuously urged toward the intermediate plate 6 side. Therefore, the first and second fastening members 38 and 43 are prevented from rotating due to the deformation of the first and second manifold blocks 4 and 5, and the fastening with the female screw member 35 is difficult to loosen. Therefore, according to the valve unit 1 of the present embodiment, fluid leakage can be prevented by keeping the fastening force of the first and second fastening members 38 and 41 constant.

  In addition, this invention is not limited to the said embodiment, Various application is possible.

(1) For example, in the said embodiment, the knurled groove formed in the collar part 36 of the internal thread member 35 was made into the rotation stop mechanism. On the other hand, for example, the collar portion 36 may have a polygonal shape (such as a hexagon) to serve as a rotation stop mechanism. Further, the knurled groove may be formed on the entire outer peripheral surface of the female screw member 35, or the entire outer shape of the female screw member 35 may be polygonal to form a rotation stop mechanism.

(2) For example, in the above-described embodiment, the air operated valve mechanism 2 has been described as an example of the fluid control device. However, the first manifold block 4 has a solenoid valve mechanism, a regulator mechanism, a pressure detection mechanism, or the like as the fluid control device. You may attach to.

(3) For example, in the above embodiment, the spring washer 47 is used as an example of the elastic body, but a coil spring, an annular cushion rubber, or the like may be used as the elastic body.

(4) For example, in the above embodiment, one joint 29 is provided in the second manifold block 5. On the other hand, as shown in FIG. 7, a common flow path 28 </ b> A may be provided penetrating in the longitudinal direction, and a joint 29 may be provided at both end openings.

It is a side view of the valve unit which has the manifold structure of the fluid control apparatus which concerns on embodiment of this invention. It is AA sectional drawing of FIG. It is a top view of the intermediate | middle plate shown in FIG. It is BB sectional drawing of FIG. It is a fragmentary sectional view of the valve assembly shown in FIG. It is a figure which shows the locking structure shown in FIG. 1, FIG. It is a modification of the valve unit shown in FIG. It is an external appearance perspective view of the conventional valve unit. It is a top view of the valve unit shown in FIG. It is CC sectional drawing of the valve unit shown in FIG. It is DD sectional drawing of the valve unit shown in FIG. It is EE sectional drawing of the valve unit shown in FIG. It is an external perspective view of the manifold structure proposed in Japanese Patent Application No. 2006-162886. It is FF sectional drawing of FIG.

Explanation of symbols

1 Valve unit (manifold structure of fluid control equipment)
2 Valve mechanism (fluid control equipment)
3 Manifold block 4 1st manifold block 5 2nd manifold block 6 Intermediate plate 23 1st communication flow path 27 2nd communication flow path 28 Common flow path 31 Connection part 32 Fitting hole 34 Convex part 35 Female thread member 36 ridge part 38 1st 1 fastening member 41 mounting hole 43 2nd fastening member 46 flat washer 47 spring washer

Claims (7)

In the manifold structure of fluid control equipment equipped with multiple fluid control equipment,
A first manifold block in which a first communication channel communicating with the fluid control device is opened on one side surface;
A second manifold block in which a plurality of second communication channels connected to the first communication channel are opened on one side surface, and a common channel communicating with the second communication channel is formed;
An intermediate plate disposed between the first manifold block and the second manifold block and integrally provided with a plurality of female screw members;
A plurality of first fastening members inserted into the first manifold block from the fluid control device and fastened to one end opening of the female screw member;
A plurality of second fastening members that are inserted through the second manifold block and fastened to the other end opening of the female screw member;
A manifold structure for fluid control equipment. In the manifold structure of the fluid control device according to claim 1,
The material of the intermediate plate is resin,
The material of the female screw member is metal,
A manifold structure of a fluid control device, wherein the female screw member is insert-molded in the intermediate plate. In the manifold structure of the fluid control device according to claim 1 or 2,
The intermediate plate has a plurality of convex portions, and the female screw member is disposed in the convex portions;
The first manifold block has a plurality of mounting holes that fit into the convex portions, and is a manifold structure for a fluid control device. In the manifold structure of the fluid control device according to any one of claims 1 to 3,
A manifold structure for a fluid control device, wherein the female screw member has a flange. In the manifold structure of the fluid control device according to any one of claims 1 to 3,
A manifold structure for a fluid control device, comprising a rotation stopping mechanism for stopping rotation of the female screw member. In the manifold structure of the fluid control device according to any one of claims 1 to 3,
The first manifold block has a connecting portion protruding outside the opening of the first communication channel,
A manifold structure for a fluid control device, wherein the intermediate plate has a fitting hole that fits into the connecting portion. In the manifold structure of the fluid control device according to any one of claims 1 to 6,
A manifold structure for a fluid control device, wherein the first fastening member and the second fastening member are mounted with a plurality of plain washers and a plurality of elastic bodies alternately.

Images