JP2008127618A - Method for treating surface of copper foil through feeding alternating current - Google Patents
Method for treating surface of copper foil through feeding alternating current Download PDFInfo
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本発明は、プリント配線板等の配線に主に用いられる銅箔、特にはフレキシブルプリント配線板に好適な銅箔の表面処理方法に関するものである。 The present invention relates to a surface treatment method for a copper foil mainly used for wiring such as a printed wiring board, and particularly suitable for a flexible printed wiring board.
近年プリント配線板に用いられる銅箔は18μm以下の薄物が多用されており、特にリジット多層基板の最外層には12μm厚さの電解銅箔の使用も一般的になってきている。とりわけ通信機器とその端末機器の小型化に伴いフレキシブルプリント配線の使用も格段に増えてきている。特に携帯電話の普及に伴い携帯電話機器において、折りたたむデザインが採用されてからは、その折曲げ部のヒンジと呼ばれる配線回路は、フレキシブルプリント配線の採用無くしては成り立たない商品となっている。 In recent years, a thin copper foil of 18 μm or less is frequently used for a printed wiring board, and in particular, an electrolytic copper foil having a thickness of 12 μm is also commonly used for the outermost layer of a rigid multilayer board. In particular, with the miniaturization of communication devices and terminal devices, the use of flexible printed wiring has increased dramatically. In particular, since a folding design has been adopted in cellular phone devices with the spread of cellular phones, a wiring circuit called a hinge of the folded portion has become a product that cannot be realized without employing flexible printed wiring.
フレキシブルプリント配線用に用いられる銅箔は、前記携帯電話機器のヒンジ部に用いられる場合には、耐折曲げ性に優れた特性を有することが必要とされていたことから、一般的には折り曲げ特性や伸び特性に優れる圧延銅箔が採用されていた。しかし近年、電解銅箔においても著しい技術的改善が図られ、製箔工程の段階で、例えば結晶構造を微細化することにより電着面側を圧延箔並に平滑に、更には光沢が出るほどまでの表面とする製造技術が可能となっており、製箔後の形状は圧延銅箔に匹敵する外観を呈するばかりでなく、折り曲げ特性や伸び特性も同等もしくはそれ以上の特性を兼ね備えた電解銅箔が上市されてきている。 Copper foil used for flexible printed wiring, when used in the hinge part of the mobile phone device, is generally required to have a characteristic that is excellent in bending resistance. A rolled copper foil having excellent properties and elongation properties has been employed. However, in recent years, significant technical improvements have also been made in electrolytic copper foil, and at the stage of the foil production process, for example, by refining the crystal structure, the electrodeposited surface side can be smoothed as much as rolled foil, and further glossy. Electrolytic copper that has the same or better properties than the rolled copper foil, but also has the same or better bending and elongation properties. Foil has been on the market.
近年の銅箔の市場は、リジット板やフレキ板の分野で共に搭載される最終商品の軽薄短小化に伴い薄物銅箔に対する需要要求が高まっており、高機能を備える小型電子機器の配線パターンの高密度化のためには銅箔は不可欠な材料になっている。薄物銅箔の供給は圧延銅箔でも電解銅箔でも可能ではあるが、圧延銅箔が幾度もの圧延工程を介して薄物銅箔とするのに対して、電解銅箔の場合には製箔の過程で目的とする厚みを設定して製造できるメリットを有していることから製造コストの面で電解銅箔が優位となってきている。最近ではフレキ用途材料として厚みのバリエーションの豊富さばかりでなく、積層又は張り合わされる工業用プラスチックフィルムや熱硬化性樹脂をコーティングする場合での密着性を左右する該銅箔の界面部の粗化形状のバリエーションも豊富なことから電解銅箔が国内外で多用されてきている。 In recent years, the demand for thin copper foil has been increasing in the market for copper foil in the field of rigid boards and flexible boards. Copper foil is an indispensable material for increasing the density. Although the supply of thin copper foil is possible with either rolled copper foil or electrolytic copper foil, the rolled copper foil turns into a thin copper foil through many rolling processes, whereas in the case of electrolytic copper foil, Since it has the merit which can set and manufacture the target thickness in the process, the electrolytic copper foil has prevailed in terms of manufacturing cost. Recently, not only a wide variety of thickness as a flexible material, but also roughening of the interface part of the copper foil, which affects the adhesion when coating industrial plastic films and thermosetting resins that are laminated or bonded together. Electrolytic copper foil has been widely used at home and abroad because of its wide variety of shapes.
例えば、フレキシブルプリント配線用の銅張りフレキシブルフィルムを作製する場合には、工業用プラスチックフィルムと銅箔を加熱加圧しながら張り合わせるラミネート法や該銅箔の一方の面に熱硬化性の樹脂を塗布しながら加熱硬化させるキャスティング法等が一般的である。この双方の方法において、フレキシブルフィルムを作成するには銅箔と該フィルム、銅箔と樹脂との密着性がフレキシブルプリント配線を形成する上では重要になる。その密着性を向上させる手法の一つに、銅箔の表面を粗化処理する方法が用いられている。 For example, when producing a copper-clad flexible film for flexible printed wiring, a laminating method in which an industrial plastic film and a copper foil are laminated while being heated and pressed, or a thermosetting resin is applied to one surface of the copper foil For example, a casting method in which the resin is cured while heating is common. In both methods, the adhesiveness between the copper foil and the film and between the copper foil and the resin is important in forming a flexible printed wiring in order to produce a flexible film. As one of the techniques for improving the adhesion, a method of roughening the surface of the copper foil is used.
従来の表面粗化処理方法の一つに、金属銅のヤケメッキ法を用いて銅の微細粒子を銅箔表面に電着させ、かつ脱落しない様にその上に金属銅の平滑メッキをする方法が採用されている。この処理方法で得られる銅箔はその金属銅粒子のメッキ形状が有する投錨効果によりフィルムや樹脂との密着性が確実に向上する。しかし一方で、この処理方法は陰極電解処理に銅粒子をメッキ付着するため、銅箔の厚みが増加し、単位重量も増大させてしまう。この厚みや単位重量の増大は、高密度な回路形成を目的として薄物銅箔を採用使用する上で、細線回路パターン作成工程におけるエッチング時のエッチングレートを低下させるばかりでなく、場合によっては稀に銅粒子の残渣がマイグレーションや回路短絡の不具合を起こすことも懸念される。 One of the conventional surface roughening treatment methods is a method of electrodepositing fine copper particles on the surface of the copper foil using a metallic copper burn plating method and smooth plating of the metallic copper on the copper foil so as not to drop off. It has been adopted. The copper foil obtained by this processing method is reliably improved in adhesion with a film or resin due to the anchoring effect of the plated shape of the metal copper particles. However, on the other hand, since this treatment method deposits copper particles on the cathode electrolytic treatment, the thickness of the copper foil increases and the unit weight also increases. This increase in thickness and unit weight not only reduces the etching rate during etching in the thin wire circuit pattern creation process, but also rarely occurs in some cases when adopting thin copper foil for the purpose of forming high-density circuits. There is also a concern that the residue of copper particles may cause problems such as migration and short circuit.
また、前記陰極電解処理による銅箔の粗化処理は、銅粒子を形成させるヤケメッキ工程と、そのヤケメッキ工程で付着した銅粒子の脱落防止のために平滑カプセルメッキ工程との少なくても二つの電解処理工程が必要となる。この各々の処理工程おいては銅箔を陰極とするため、給電コンタクトロールを介して銅箔に給電するが、この給電は銅箔が薄物になる程、銅箔の発熱が顕著となり外観上伸びシワを発生させる等の不具合が発生することがあり、薄物銅箔の粗化処理工程での生産性を低下させる大きな原因の一つになっている。
そこで、薄物銅箔のハンドリング性を含めた画期的な粗化処理技術が求められていた。
In addition, the copper foil roughening treatment by the cathodic electrolysis treatment includes at least two electrolysis processes: a burn plating process for forming copper particles, and a smooth capsule plating process for preventing the copper particles attached in the burn plating process from falling off. A processing step is required. In each processing step, copper foil is used as a cathode, and power is supplied to the copper foil via a power supply contact roll. However, as the copper foil becomes thinner, heat generation of the copper foil becomes more noticeable and the appearance increases. Inconveniences such as generation of wrinkles may occur, which is one of the major causes of reducing the productivity in the roughening process of thin copper foil.
Therefore, an epoch-making roughening technology including handling of thin copper foil has been demanded.
上記の陰極電解処理法の他に、銅箔表面を粗化処理する先行技術として、交流電解処理法やパルス電解処理法等の電解処理方法や、薬剤による酸化還元処理、ケミカルエッチング処理が知られている。しかし、それらの表面処理対象の電解銅箔は、製造時における液面側の銅箔表面形状は、製箔条件により違いはあるものの、結晶構造が柱状に成長した柱状結晶構造を有し、その全てが既に凹凸形状を呈しており、その表面に更に効率よく粗化処理を施すことで投錨効果を向上させることを目的に開発が進められてきている。
一方、圧延銅箔にあっては、その表面が平滑な鏡面状態であるために、該表面にメッキにより凹凸形状を成型するにはその工程が煩雑であり、得られた粗化表面が脆いために十分な密着力を確保できず、メッキ処理による粗化処理は一般的には余り用いられることはなく、酸化還元処理やケミカルエッチング処理による手法が主に採用されてきている。しかし、該手法による粗化形状では十分な密着性が得られない懸念も発生している。また、薬剤を用いたケミカルエッチングにより粗面を得る方法は、例えば薄物銅箔の片側の面だけを粗化処理する場合等には処理設備が煩雑になるばかりか、薬剤の濃度管理にコストが掛かり、現在ではあまり採用されていない。
In addition to the above-described cathodic electrolytic treatment methods, as conventional techniques for roughening the copper foil surface, electrolytic treatment methods such as alternating current electrolytic treatment and pulse electrolytic treatment, oxidation-reduction treatment with chemicals, and chemical etching treatment are known. ing. However, the electrolytic copper foils to be surface-treated have a columnar crystal structure in which the crystal structure grows in a columnar shape, although the copper foil surface shape on the liquid surface side at the time of manufacture varies depending on the foil production conditions. All of them already have a concavo-convex shape, and development has been promoted for the purpose of improving the anchoring effect by more efficiently roughening the surface.
On the other hand, since the surface of the rolled copper foil is in a smooth mirror surface, the process is complicated to form an uneven shape on the surface by plating, and the resulting roughened surface is brittle. In general, a roughening process by plating is not often used, and a technique using an oxidation-reduction process or a chemical etching process has been mainly employed. However, there is a concern that a roughened shape obtained by this method cannot provide sufficient adhesion. In addition, the method of obtaining a rough surface by chemical etching using a chemical agent, for example, in the case of roughening only one surface of a thin copper foil, the processing equipment becomes complicated, and the concentration management of the chemical agent is costly. It is not widely adopted now.
近年のフレキシブルプリント配線用の需要増大と共に、該配線回路に対する品質と技術要求も高まっており、配線幅と該回路との間隔が30μm以下の設計もなされている。フレキシブルプリント配線の細線回路を形成するには、材料となる銅箔は耐屈曲性に優れた薄い(12μm〜9μm厚さの)銅箔であること、更に回路がシャープで直線的に切れること、これには銅箔のエッチングレートが大きいことが不可欠である。これらの要求を満たすには銅箔表面の結晶粒界が細かいこと、言い換えれば結晶構造が微細であることが要求されている。また適宜な密着強度を発生させるためのある程度の凸凹の粗化形状を有することが必須要件となり、これらの全ての要件を満足する銅箔材料が求められていた。 With the recent increase in demand for flexible printed wiring, the quality and technical requirements for the wiring circuit are also increasing, and the design is made such that the distance between the wiring width and the circuit is 30 μm or less. In order to form a fine printed circuit of flexible printed wiring, the copper foil used as a material is a thin copper foil (12 μm to 9 μm thick) with excellent bending resistance, and the circuit is sharp and cut linearly. For this, it is essential that the etching rate of the copper foil is large. In order to satisfy these requirements, the crystal grain boundary on the surface of the copper foil is required to be fine, in other words, the crystal structure is required to be fine. In addition, it is an essential requirement to have a rough surface with a certain degree of unevenness in order to generate an appropriate adhesion strength, and a copper foil material that satisfies all these requirements has been demanded.
フレキシブルプリント配線用の銅箔には、圧延銅箔の使用が一般的であった。これは圧延銅箔の伸び特性が良いことや耐屈曲性に優れることによるものであった。電解銅箔が過去にフレキシブルプリント配線板用途に採用されなかった理由の一つには、従来の電解銅箔は結晶構造が柱状結晶になっているために、実用上の折り曲げを繰り返す品質試験において、該結晶構造を有する電解銅箔においては、その厚さに関わらず結晶粒界に沿って破断することが確認されており、実際の使用条件下では破断する、との懸念が払拭できない点であった。 The use of rolled copper foil is common for copper foil for flexible printed wiring. This was due to the good elongation characteristics and excellent flex resistance of the rolled copper foil. One of the reasons why electrolytic copper foil has not been used for flexible printed circuit boards in the past is that conventional electrolytic copper foil has a columnar crystal in the quality test that repeats practical bending. In the electrolytic copper foil having the crystal structure, it has been confirmed that it breaks along the crystal grain boundary regardless of its thickness, and the concern that it breaks under actual use conditions cannot be wiped out. there were.
しかしながら近年になって、電解銅箔であってもその製箔方法の改良により微細な結晶構造を有した電解銅箔を製造することが可能になり、折り曲げによる粒界破断も著しく改善されてきている。例えば、圧延銅箔が130℃から160℃程度の加熱条件下の経時後に結晶組織が塑性変形し、幾分大きな結晶粒界を有する結晶構造に変化するが、前記電解銅箔は、該同一条件下で、更に300℃を超える熱条件下を経ても微細な結晶構造を著しく変えることなく保持する特性を有しているばかりでなく、伸び特性や耐屈曲性に至っては圧延銅箔に匹敵する特性を有しているものが上市されている。 However, in recent years, it has become possible to produce an electrolytic copper foil having a fine crystal structure by improving the foil production method even for an electrolytic copper foil, and the grain boundary fracture due to bending has been remarkably improved. Yes. For example, the rolled copper foil undergoes plastic deformation after aging under a heating condition of about 130 ° C. to 160 ° C., and changes to a crystal structure having a somewhat larger grain boundary. Under this condition, not only does it have a property of maintaining a fine crystal structure without significantly changing even under thermal conditions exceeding 300 ° C., but it is comparable to a rolled copper foil in terms of elongation properties and bending resistance. Those with characteristics are on the market.
また、近年フレキシブルプリント配線用の銅箔とし、技術的要求特性が高まる一方でコストダウンも要求されている。特には9μm厚さレベルの薄物銅箔を必要とするCOF用途を含め、圧延銅箔よりも製造コストが廉価である電解銅箔の出現が求められている。
本発明は、微細な結晶構造を有する電解銅箔と交流を用いた間接給電による電解処理を組み合わせることにより、薄物銅箔の固有の厚みを略維持しながら、少なくともその一方の表面を結晶粒界に沿った微細な凹凸を有する粗化形状を効率よく形成せしめ、その表面は工業用プラスチックフィルムまたは熱硬化性樹脂との密着性を得るに十分な形状が得られる表面処理方法を提供するものである。
In recent years, a copper foil for flexible printed wiring has been used, and technical requirements have been increased while cost reduction has been demanded. In particular, there is a demand for the appearance of an electrolytic copper foil whose manufacturing cost is lower than that of a rolled copper foil, including COF applications that require a thin copper foil with a thickness of 9 μm.
The present invention combines an electrolytic copper foil having a fine crystal structure with an electrolytic treatment by indirect power feeding using alternating current, thereby maintaining at least one surface of the grain boundary while substantially maintaining the inherent thickness of the thin copper foil. It provides a surface treatment method that efficiently forms a rough shape having fine irregularities along the surface, and that the surface has a sufficient shape to obtain adhesion to an industrial plastic film or a thermosetting resin. is there.
本発明の交流給電による銅箔の表面処理方法は、硫酸単浴または硫酸に重金属化合物を添加した電解浴を用い、粒状晶からなる銅箔の少なくとも一方の面に交流による電解処理を施し、該銅箔の表面を粗化処理することを特徴とする。 The surface treatment method for copper foil by AC power feeding of the present invention uses a sulfuric acid single bath or an electrolytic bath in which a heavy metal compound is added to sulfuric acid, and performs electrolytic treatment by alternating current on at least one surface of the copper foil made of granular crystals. The surface of the copper foil is roughened.
好ましくは前記銅箔が、微細な粒状晶からなる構造を有し、その一方の面の表面粗度が少なくともRz値で2.5μm以下であり、該銅箔の厚みが単位重量換算で160g/m2以下である。 Preferably, the copper foil has a structure composed of fine granular crystals, the surface roughness of one surface thereof is at least 2.5 μm or less in terms of Rz value, and the thickness of the copper foil is 160 g / unit in terms of unit weight. m 2 or less.
前記の硫酸に添加する重金属は、ニッケル、コバルト、モリブデン、タングステン、アンチモン、バナジュウム、銀からなる群れの少なくとも一種類以上を選択する。 The heavy metal added to the sulfuric acid is selected from at least one of the group consisting of nickel, cobalt, molybdenum, tungsten, antimony, vanadium, and silver.
好ましくは前記銅箔が、厚みが単位重量換算で45g/m2以下の銅箔であって、容易に剥がすことが可能で、厚みが単位重量換算で130g/m2以上の支持体金属箔の少なくとも一方の面にメッキで形成されたキャリアー付銅箔である。 Preferably, the copper foil is a copper foil having a thickness of 45 g / m 2 or less in terms of unit weight, which can be easily peeled off, and the thickness of the support metal foil having a thickness of 130 g / m 2 or more in terms of unit weight. It is a copper foil with a carrier formed by plating on at least one surface.
本発明の交流給電による銅箔の表面処理方法によれば、微細粒状晶からなる薄物銅箔の表面を交流電解粗化処理することにより、表面の粗化状態を均一かつ効率良く処理でき、生産性と品質を向上することができる。
また、従来の銅箔表面の特性では鏡面状態の光沢表面には得られない投錨効果を、微細な凹凸表面粗化形状として形成することができ、該箔と張り合わされる工業用プラスチックフィルムや該表面に直接キャスティングされる熱硬化性樹脂との密着性を向上させることができ、該銅箔と張り合わすフィルムやキャスティング樹脂の厚みを薄くすることができる。
更には化学的に密着結合力を高める単一または複数の重金属元素を電解浴に添加することにより、表面粗化と同時に重金属によるメッキ処理も達成できるので、該箔と張り合わされる工業用プラスチックフィルムや該表面に直接キャスティングされる熱硬化性樹脂との密着性を更に向上させることができ、該銅箔と張り合わすフィルムやキャスティング樹脂の厚みを薄くすることができる。
本発明の交流給電による銅箔の表面処理方法は、その表面処理工程が簡略化でき、廉価で、薄物銅箔の固有の厚みを略維持した電解銅箔を提供することができる。
According to the surface treatment method for copper foil by AC power feeding of the present invention, the surface of the thin copper foil made of fine granular crystals can be subjected to AC electrolytic roughening treatment, whereby the surface roughened state can be uniformly and efficiently treated and produced. The quality and quality can be improved.
In addition, it is possible to form a throwing effect that cannot be obtained on a glossy surface in a mirror surface state with the characteristics of a conventional copper foil surface, as a fine uneven surface roughened shape, and an industrial plastic film laminated with the foil or the Adhesion with the thermosetting resin cast directly on the surface can be improved, and the thickness of the film or casting resin to be bonded to the copper foil can be reduced.
Furthermore, by adding a single or a plurality of heavy metal elements that chemically increase the tight bonding strength to the electrolytic bath, surface roughening and simultaneous heavy metal plating can be achieved, so that the industrial plastic film to be bonded to the foil In addition, it is possible to further improve the adhesion to the thermosetting resin cast directly on the surface, and to reduce the thickness of the film and casting resin to be bonded to the copper foil.
The surface treatment method for copper foil by AC power feeding according to the present invention can simplify the surface treatment process, is inexpensive, and can provide an electrolytic copper foil that substantially maintains the inherent thickness of a thin copper foil.
以下本発明の一実施形態につき説明する。
本発明は、粒状晶からなる銅箔の少なくとも一方の面に、交流、例えば商用交流による直接または間接的な電解処理を施し、該銅箔の表面を粗化処理する方法であって、電解液として硫酸単浴または硫酸浴に溶解可能な重金属あるいは重金属化合物を添加した浴を用いる。
Hereinafter, an embodiment of the present invention will be described.
The present invention is a method of subjecting at least one surface of a copper foil made of granular crystals to direct or indirect electrolytic treatment by alternating current, for example, commercial alternating current, and roughening the surface of the copper foil, comprising an electrolytic solution A bath containing a heavy metal or a heavy metal compound that can be dissolved in a sulfuric acid single bath or a sulfuric acid bath is used.
表面処理する銅箔としては圧延銅箔、電解銅箔の何れをも問わないが、薄厚銅箔で粗化処理の効果を十分に引き出すためには、該銅箔が微細な粒状晶からなる結晶構造を有し、その表面粗度は、JIS−C−6515に規定される測定方法に準拠したRz値が、少なくとも一方の面で2.5μm以下であり、該銅箔の厚みが公称18μm以下、単位重量換算で160g/m2以下の銅箔を用いる。 The surface-treated copper foil may be either a rolled copper foil or an electrolytic copper foil, but in order to sufficiently bring out the effect of the roughening treatment with a thin copper foil, the copper foil is a crystal composed of fine granular crystals. It has a structure, and the surface roughness is such that the Rz value conforming to the measuring method specified in JIS-C-6515 is 2.5 μm or less on at least one surface, and the thickness of the copper foil is nominally 18 μm or less. A copper foil of 160 g / m 2 or less in terms of unit weight is used.
電解浴としては硫酸単浴または硫酸浴に溶解可能な重金属あるいは重金属化合物を添加した浴を用いる。
硫酸単浴添加する重金属、重金属化合物としての重金属元素は、硫酸に溶解するニッケル、コバルト、モリブデン、タングステン、アンチモン、バナジュム、銀の中から少なくとも一種類以上を選択することができる。添加する金属元素の濃度としては5.0g/l以下で溶解されていることが好ましい。なお、表面粗化と共に表面処理された銅箔に付着する金属量は、各々の単一金属元素として0.1mg/dm2以下にすることが好ましい。これ以上に付着させるとエッチング性を悪くするばかりでなく、エッチング残渣となり思わぬ不具合を発生させる懸念があるためである。
As the electrolytic bath, a sulfuric acid single bath or a bath to which a heavy metal or a heavy metal compound that can be dissolved in the sulfuric acid bath is added is used.
The heavy metal added to the sulfuric acid single bath and the heavy metal element as the heavy metal compound can be selected from at least one of nickel, cobalt, molybdenum, tungsten, antimony, vanadium, and silver dissolved in sulfuric acid. The concentration of the metal element to be added is preferably 5.0 g / l or less. In addition, it is preferable that the metal amount which adheres to the copper foil surface-treated with surface roughening shall be 0.1 mg / dm < 2 > or less as each single metal element. This is because if it adheres more than this, not only the etching property is deteriorated, but there is a concern that an unexpected defect may occur as an etching residue.
電解浴を安定させるための補助的な添加材として、ホウ酸、硫酸アンモニュウム、シュウ酸、次亜リン酸を適宜に添加しても良い。これら添加材を添加した浴を用いた場合には、粗化処理ばかりでなく表面処理効果が付加されることで表面処理工程を簡略化する効果がある。(電気メッキ製造業において製造および処理工程を少なく出来ることは、広義に地球環境への配慮として非常に好ましいことである。) As an auxiliary additive for stabilizing the electrolytic bath, boric acid, ammonium sulfate, oxalic acid, and hypophosphorous acid may be appropriately added. When a bath to which these additives are added is used, there is an effect of simplifying the surface treatment process by adding not only a roughening treatment but also a surface treatment effect. (The ability to reduce the number of manufacturing and processing steps in the electroplating manufacturing industry is very preferable as a consideration of the global environment in a broad sense.)
交流による表面処理後に該処理面に防錆処理を施すことが好ましい。
防錆処理としては表面処理した銅箔表面に、例えばベンゾトリアゾール化合物に代表される有機防錆剤を施す。防錆処理による防錆皮膜の厚さとしては、電気ニ重層容量を測定しその測定値の換算により求められる理論的な皮膜厚さとして500から1000nm範囲が好ましい。
またはクロム化合物が溶解された浴を用いたクロメート防錆処理を行う場合には、金属クロムとして分析される量としては0.015から0.050mg/dm2範囲が好ましい。
It is preferable to subject the treated surface to a rust prevention treatment after the surface treatment by alternating current.
As the antirust treatment, for example, an organic antirust agent typified by a benzotriazole compound is applied to the surface of the surface-treated copper foil. The thickness of the anticorrosive film by the antirust treatment is preferably in the range of 500 to 1000 nm as the theoretical film thickness obtained by measuring the electric double layer capacity and converting the measured value.
Or when performing a chromate rust prevention treatment using chromium compound is dissolved bath, a quantity to be analyzed as metallic chromium is preferably 0.050 mg / dm 2 ranges from 0.015.
更には主として該銅箔と張り合わされる工業用プラスチックフィルムや該銅箔表面に直接キャスティングされる熱硬化性樹脂との密着性を向上させる目的で、該銅箔の少なくとも一方の面に、アミノ系、エポキシ系、ビニル系、クリロキシ系から選ばれる一種類のシランカップリング剤を用いて表面処理を施すことが好ましい。この場合、その表面に付着するカップリング剤としては、珪素量として0.001から0.015mg/dm2の範囲で付着させることが好ましい。 Furthermore, for the purpose of improving the adhesiveness mainly with an industrial plastic film bonded to the copper foil or a thermosetting resin directly cast on the copper foil surface, at least one surface of the copper foil has an amino group. It is preferable to perform surface treatment using one kind of silane coupling agent selected from epoxy, vinyl, and chloroxy. In this case, the coupling agent attached to the surface is preferably attached in the range of 0.001 to 0.015 mg / dm 2 as the amount of silicon.
本発明は、銅箔の少なくとも一方の面に交流による電解処理を施し該銅箔の表面を粗化処理する方法であって、電解液として硫酸単浴または硫酸に重金属化合物を添加した浴を用いる。
交流電解処理によれば、銅箔の表面は瞬時にアノードとカソード形態を繰り返すことになり、銅箔表面がアノード時には銅箔の溶解作用がなされ、一方でカソード時には硫酸浴中に溶解された銅イオンが再び 銅箔表面に電着する作用がなされる。また一種類以上の重金属化合物を溶解している場合には、金属イオンとなった該重金属が銅イオンと共に共析電着する。交流電解処理によれば、電流条件を選択することにより銅箔表面において結晶粒界に沿ったアノード溶解であるエッチング作用が進行する反面、該表面には還元金属を極めて均一に付着させる作用が進行し、銅箔表面をその厚みをほとんど変えることなく均一に粗化することができる。
The present invention is a method of subjecting at least one surface of a copper foil to an electrolytic treatment by alternating current to roughen the surface of the copper foil, wherein a sulfuric acid single bath or a bath obtained by adding a heavy metal compound to sulfuric acid is used as an electrolytic solution. .
According to the AC electrolytic treatment, the surface of the copper foil instantaneously repeats the anode and cathode forms. When the copper foil surface is the anode, the copper foil is dissolved, while at the cathode, the copper dissolved in the sulfuric acid bath is dissolved. The ion is again electrodeposited on the copper foil surface. In addition, when one or more kinds of heavy metal compounds are dissolved, the heavy metals that have become metal ions are electrodeposited together with copper ions. According to the alternating current electrolysis treatment, the etching action, which is anodic dissolution along the grain boundary, proceeds on the copper foil surface by selecting the current condition, while the action of depositing the reduced metal on the surface very uniformly proceeds. In addition, the copper foil surface can be uniformly roughened with almost no change in thickness.
この交流電解処理の給電方法としては、銅箔自体を電極とし、対極にはカーボングラファイト等の不溶性電極を用いて直接給電による交流電解処理を行う方式と、バイポーラ現象を用いて銅箔を不溶性電極間を通過させ間接給電による交流電解処理を行う方式のどちらも採用し得るが、選択的に銅箔の一方の表面を処理する場合や銅箔にコンタクト給電ロールとの接触で稀に発生するスパークによる銅箔表面の損傷を回避できる効果を期待することから、生産品質向上にも寄与するバイポーラ現象を用いた間接給電法を採用することが好ましい。
また、電解処理に使用する電源としては商用交流電源を使用することができ、特殊な表面処理を除き、特別に電源設備を設ける必要はない。
As a power supply method for this AC electrolysis treatment, a copper foil itself is used as an electrode, and an AC electrolysis treatment by direct power supply using an insoluble electrode such as carbon graphite as a counter electrode, and a copper phenomenon is used by using a bipolar phenomenon. Either of the methods of passing through the gap and performing AC electrolytic treatment by indirect power feeding can be adopted, but when one surface of the copper foil is selectively treated or the copper foil is rarely generated by contact with the contact feeding roll It is preferable to adopt an indirect power supply method using a bipolar phenomenon that contributes to an improvement in production quality because an effect of avoiding damage to the copper foil surface due to the above is expected.
Moreover, a commercial alternating current power supply can be used as the power supply used for the electrolytic treatment, and it is not necessary to provide a special power supply facility except for a special surface treatment.
本発明において、被処理銅箔は圧延銅箔であっても電解銅箔であってもよいが、本発明の効果を最大とするには、結晶粒が微細な粒状晶からなる公称厚み18μm以下の電解銅箔が好ましい。近年になり電解銅箔の粒状晶構造を微細化する技術が構築され、従来の電解銅箔の結晶構造が例えば霜柱の様な粒界の大きな柱状結晶から、粒界の小さい微細粒状晶からなる電解銅箔が上市されている。 In the present invention, the copper foil to be treated may be a rolled copper foil or an electrolytic copper foil, but in order to maximize the effect of the present invention, the nominal thickness of the crystal grains consisting of fine granular crystals is 18 μm or less. The electrolytic copper foil is preferable. In recent years, a technology for refining the granular crystal structure of electrolytic copper foil has been established, and the conventional crystal structure of electrolytic copper foil is composed of columnar crystals with large grain boundaries, such as frost columns, and fine granular crystals with small grain boundaries. Electrolytic copper foil is on the market.
また、被処理銅箔としてキャリァー付極薄銅箔を採用することもできる。キャリァー付極薄銅箔は、厚さ9μm以下のハンドリング性が容易でない銅箔を一般的に厚み18μm以上のキャリァーと呼ばれる金属箔の少なくとも一方の面上に剥離層を介して、容易に分離できる状態で積層したものである。
被処理銅箔としてのキャリァー付極薄銅箔は、その極薄銅箔の製造工程で、電流密度が高い領域を用いた電解メッキ処理することで、初期電着の結晶粒が微細な粒状晶のまま液面側にまで達するので、粒状晶の極薄電解銅箔を製造することができる。このキャリァー付極薄銅箔の銅箔表面に本実施形態の商用交流による粗化処理手法を用いることで、例えば表面処理前の厚みが3μmの極薄銅箔を表面処理しても、単位重量厚みで27g/m2程度(3μm程度)の厚みを維持した状態で表面処理することができる。このため、品質上の厚み不具合を解決するばかりでなく、部分的な粗化バラツキも緩和でき、品質向上の効果をも達成できる。
前記キャリァー付極薄銅箔において、銅箔は厚みが単位重量換算で45g/m2以下であり、キャリァー箔(支持体金属箔)は厚みが単位重量換算で130g/m2以上であることが好ましい。
なお、従来の陰極電解処理による表面粗化処理方では、銅メッキによる金属銅付着量が元箔に対して10%から20%増え、その分厚みも増加するため、品質上の厚み不具合が生じる。
Moreover, an ultra-thin copper foil with a carrier can also be employed as the copper foil to be treated. With an ultrathin copper foil with a carrier, a copper foil with a thickness of 9 μm or less that is not easily handled can be easily separated via a release layer on at least one surface of a metal foil generally called a carrier with a thickness of 18 μm or more. It is laminated in a state.
The ultra-thin copper foil with a carrier as the copper foil to be treated is a granular crystal with fine grain of initial electrodeposition by electrolytic plating using a region with high current density in the manufacturing process of the ultra-thin copper foil. Since it reaches the liquid surface side as it is, it is possible to produce a granular crystal ultrathin electrolytic copper foil. By using the commercial alternating current roughening method of this embodiment on the copper foil surface of the carrier-attached ultrathin copper foil, for example, even if the ultrathin copper foil having a thickness of 3 μm before the surface treatment is surface treated, the unit weight Surface treatment can be performed while maintaining a thickness of about 27 g / m 2 (about 3 μm). For this reason, not only the thickness defect in quality can be solved, but also the partial roughness variation can be alleviated and the effect of quality improvement can be achieved.
In the ultrathin copper foil with a carrier, the copper foil has a thickness of 45 g / m 2 or less in terms of unit weight, and the carrier foil (support metal foil) has a thickness of 130 g / m 2 or more in terms of unit weight. preferable.
In the conventional surface roughening method by cathodic electrolysis, the amount of metal copper deposited by copper plating increases from 10% to 20% with respect to the original foil, and the thickness also increases accordingly, resulting in a quality thickness defect. .
本発明において、電解液として用いる硫酸単浴の好ましい硫酸濃度は
硫酸濃度 30〜200g/l
である。
硫酸に重金属元素を添加した浴を用いる場合には、
硫酸濃度 30〜200g/l
重金属元素の濃度:溶解金属濃度として 0.5〜5g/l
の範囲が好ましく、複数の重金属元素を溶解添加する場合には、溶解金属の濃度合計が0.5〜5g/lの範囲とすることが好ましく、複数の金属を添加する場合には該添加比率は必ずしも均等に処方する必要はない。
浴組成において硫酸濃度が30g/l以下では、直接及び間接給電法を用いても電着が著しく不均一となる傾向が見られ、電解液の液抵抗も大きくなり電圧上昇を招き効果的でない。硫酸濃度は200g/l以上でも本発明の目的は十分に達せられるが、経済的観点から、200g/l以上の硫酸濃度にする必要はない。
一方、重金属元素を添加した硫酸浴を用いる場合、一種類或いは複数の重金属の合計濃度の上限値を5g/lとするのは、5g/l以上で共析する電着物は平滑化したものとなり、アノード溶解により健全な結晶粒界に沿ったエッチング粗化が達成できるが、しかし、電着時に該表面を覆う処理効果が優先されてしまうことから、本来の目的とする微細で投錨効果に優れる表面形状が得られないことがある。また、下限域を0.5g/lとしたのは生産時における浴組成管理の簡便性を考慮し、該濃度以下では添加する重金属の限界電流密度を超える処理が懸念され、限界電流密度を超えると重金属が処理浴中に還元金属粉の状態で浮遊し、浮遊した重金属が銅箔表面に付着することが懸念され、品質上の不具合になる危険性があるためである。
In the present invention, the preferable sulfuric acid concentration of the sulfuric acid single bath used as the electrolytic solution is sulfuric acid concentration of 30 to 200 g / l.
It is.
When using a bath in which heavy metal elements are added to sulfuric acid,
Sulfuric acid concentration 30 ~ 200g / l
Heavy metal element concentration: 0.5-5 g / l as dissolved metal concentration
In the case where a plurality of heavy metal elements are dissolved and added, the total concentration of dissolved metals is preferably in the range of 0.5 to 5 g / l. When a plurality of metals are added, the addition ratio Need not be prescribed equally.
When the sulfuric acid concentration is 30 g / l or less in the bath composition, electrodeposition tends to be extremely non-uniform even when the direct and indirect power feeding methods are used, the liquid resistance of the electrolytic solution increases, and the voltage rises, which is not effective. Even if the sulfuric acid concentration is 200 g / l or more, the object of the present invention can be sufficiently achieved, but it is not necessary to make the sulfuric acid concentration 200 g / l or more from an economical viewpoint.
On the other hand, when using a sulfuric acid bath to which a heavy metal element is added, the upper limit of the total concentration of one or more heavy metals is set to 5 g / l because the electrodeposited eutectoid at 5 g / l or more is smoothed. Etching roughening along sound crystal grain boundaries can be achieved by anodic dissolution, but since the treatment effect covering the surface is given priority during electrodeposition, it is excellent in the original intended fine and anchoring effect The surface shape may not be obtained. In addition, the lower limit of 0.5 g / l is considered in consideration of the ease of managing the bath composition during production, and if the concentration is lower than this concentration, there is a concern about processing exceeding the limit current density of the heavy metal to be added, exceeding the limit current density. This is because the heavy metal floats in the state of reduced metal powder in the treatment bath, and there is a risk that the suspended heavy metal may adhere to the surface of the copper foil, resulting in a quality defect.
また、浴温は特に限定はしないが、硫酸単浴を用いた場合には、常温〜80℃の範囲が好ましい。一方、硫酸と重金属元素を添加した浴を用いた場合には、浴温は40〜60℃の範囲に設定することが好ましい。交流電解による表面粗化処理の電極材料には材料自身が溶解しないという点においてカーボングラファイトを用いることが好ましい。しかし、他に経済的に好ましい不溶解材料があればその材料を採用することもできる。 Moreover, although bath temperature is not specifically limited, When a sulfuric acid single bath is used, the range of normal temperature to 80 degreeC is preferable. On the other hand, when a bath to which sulfuric acid and heavy metal elements are added is used, the bath temperature is preferably set in the range of 40 to 60 ° C. It is preferable to use carbon graphite in that the material itself does not dissolve in the electrode material for surface roughening treatment by AC electrolysis. However, if there is another economically preferable insoluble material, the material can be adopted.
本発明における交流電解処理時の電流密度は、硫酸単浴でも重金属元素を溶解添加する場合であっても10〜50A/dm2程度の範囲が好ましく、また、処理時間は用いる電流密度により異なるものの双方の条件ともに15〜90秒の範囲が好ましい。しかし、浴温、添加金属の有無、処理時間、浴組成条件により適性電流条件及び処理時間は変化するので、この範囲を限定するものではない。 The current density during the alternating current electrolytic treatment in the present invention is preferably in the range of about 10 to 50 A / dm 2 even when a single bath of sulfuric acid or a heavy metal element is dissolved and added, and the treatment time varies depending on the current density used. A range of 15 to 90 seconds is preferable for both conditions. However, the appropriate current condition and the treatment time vary depending on the bath temperature, the presence / absence of an added metal, the treatment time, and the bath composition conditions, and therefore this range is not limited.
交流電解粗化処理を施された銅箔は、耐食性を付与するため更に有機系防錆剤による防錆処理又はクロメート防錆処理が施されるのが好ましい。例えばベンゾトリアゾール化合物に代表される有機防錆剤による防錆処理で防錆皮膜の程度としては、電気ニ重層容量を測定しその測定値の換算により求められる理論的な皮膜厚さとして500nmから1000nm範囲が好ましく、またはクロム化合物の溶解された浴を用いたクロメート防錆処理を行う場合には、金属クロムとして分析される量としては0.015から0.050mg/dm2範囲の付着量を有することが好ましい。 The copper foil that has been subjected to AC electrolytic roughening treatment is preferably further subjected to rust prevention treatment or chromate rust prevention treatment with an organic rust inhibitor to impart corrosion resistance. For example, the degree of the rust-preventing film in the rust-preventing treatment with an organic rust inhibitor represented by a benzotriazole compound is 500 nm to 1000 nm as a theoretical film thickness obtained by measuring the electric double layer capacity and converting the measured value. The range is preferable, or when performing chromate rust prevention treatment using a bath in which a chromium compound is dissolved, the amount analyzed as metallic chromium has an adhesion amount in the range of 0.015 to 0.050 mg / dm 2. It is preferable.
防錆処理の施された銅箔には更にケミカル的な密着性を付加する目的で、該銅箔の少なくとも一方の面に、市販のアミノ系、エポキシ系、ビニル系、クリロキシ系から選ばれる一種類のシランカップリング剤を用いて単一皮膜を形成する程度の処理を施し、その表面に付着している珪素量としては0.001から0.015mg/dm2で分析される範囲に付着させることが好ましい。 For the purpose of further adding chemical adhesion to the rust-prevented copper foil, at least one surface of the copper foil is selected from commercially available amino-based, epoxy-based, vinyl-based and chloroxy-based ones. A treatment to the extent that a single film is formed using various types of silane coupling agents is performed, and the amount of silicon adhering to the surface is adhered in the range of 0.001 to 0.015 mg / dm 2 . It is preferable.
以下、本発明を実施例で具体的に説明する。
<実施例1>
本実施例で採用する間接交流給電方式の一例を図1に示す。電解製造方法にて製箔された公称厚さ12μmの微細粒状晶粒界を有する電解銅箔(古河サーキットフォイル株式会社製WS銅箔)を図1に示す表面処理装置の巻き出し部(ボビン)1に準備して、カーボングラファイトアノード(対向電極)21を対向配置した粗化処理槽2に、対向電極21、21の間に遮蔽板22を配置し、電極21と遮蔽板22との間に銅箔を導き、下記の浴組成および間接交流電解条件で電解製箔時に液面側であった銅箔面に間接給電方式により表面粗化処理を施した。
Hereinafter, the present invention will be specifically described with reference to Examples.
<Example 1>
An example of the indirect AC power feeding method employed in this embodiment is shown in FIG. An electrolytic copper foil (WS copper foil manufactured by Furukawa Circuit Foil Co., Ltd.) having a fine grain boundary with a nominal thickness of 12 μm made by an electrolytic manufacturing method is unrolled (bobbin) of the surface treatment apparatus shown in FIG. 1, a shielding plate 22 is arranged between the counter electrodes 21, 21 in the roughening treatment tank 2 in which the carbon graphite anode (counter electrode) 21 is arranged so as to face the carbon graphite anode (counter electrode) 21. The copper foil was guided, and the surface roughening treatment was performed by an indirect power feeding method on the copper foil surface that was on the liquid surface side during electrolytic foil formation under the following bath composition and indirect AC electrolysis conditions.
浴組成(硫酸単浴)
硫酸 100g/l
電解条件
浴温 40±3℃
商用交流電解電流密度 25A/dm2
処理時間 15秒
Bath composition (single sulfuric acid bath)
Sulfuric acid 100g / l
Electrolysis conditions Bath temperature 40 ± 3 ℃
Commercial AC electrolytic current density 25A / dm 2
Processing time 15 seconds
続いて、表面粗化処理を施した銅箔を図1に示す水洗槽3に導き該銅箔表面を十分に洗浄した後、該銅箔を防錆処理槽4に導き、三酸化クロム:3.0g/lを含む常温の水溶液中を浸漬通過させて該銅箔表面にクロメート防錆処理を施した後、該銅箔を水洗槽5に導き該銅箔表面を十分に洗浄した後、該銅箔をシランカップリング処理槽6に導き、市販のアミノ系カップリング剤:0.5wt%を含む常温の水溶液が該表面処理された面と均一に接触するようにし、次いで該銅箔を乾燥装置7を通過せしめた後、巻取り部8にて該銅箔を連続的に巻き取った。
なお、図1において41は防錆処理槽4にセットしたSUSアノード、42は銅箔に給電する給電ロール、61はシランカップリング処理槽6に充填のシランカップリング液である。
得られた該銅箔を下記の項目について評価した。
Subsequently, after the surface-roughened copper foil was guided to the water rinsing tank 3 shown in FIG. 1 and the surface of the copper foil was sufficiently washed, the copper foil was guided to the rustproofing tank 4, and chromium trioxide: 3 After immersing and passing through a normal temperature aqueous solution containing 0.0 g / l and subjecting the copper foil surface to a chromate rust prevention treatment, the copper foil is guided to a water rinsing tank 5 and the copper foil surface is thoroughly washed. The copper foil is introduced into the silane coupling treatment tank 6 so that a commercially available amino-based coupling agent: 0.5 wt% aqueous solution at room temperature uniformly comes into contact with the surface-treated surface, and then the copper foil is dried. After passing through the device 7, the copper foil was continuously wound up by the winding unit 8.
In FIG. 1, reference numeral 41 denotes a SUS anode set in the rust prevention treatment tank 4, 42 denotes a power supply roll for feeding power to the copper foil, and 61 denotes a silane coupling liquid filled in the silane coupling treatment tank 6.
The obtained copper foil was evaluated for the following items.
<評価項目>
銅箔の厚みの増減;
銅箔厚みの増減変化を小数点以下0.1mgまで計測できる電子天秤にて10cm×10cmサイズに切断した銅箔の単位重量値を測定し、処理前の重量厚みを100として増減値を指数値に換算し、その結果を表1に示す。
<Evaluation items>
Increase or decrease of copper foil thickness;
The unit weight value of the copper foil cut into a size of 10 cm × 10 cm is measured with an electronic balance capable of measuring the increase / decrease change of the copper foil thickness to 0.1 mg below the decimal point. The results are shown in Table 1.
表面粗さ;
電解粗化処理された表面の粗さ程度を触針式の表面粗さ測定器を用いてJIS−C−6515に規定される測定方法に準拠し、Rz値を処理前と粗化処理後で測定した。その結果を表1に示す。
Surface roughness;
The roughness of the surface subjected to the electrolytic roughening treatment was determined in accordance with the measurement method defined in JIS-C-6515 using a stylus type surface roughness measuring device, and the Rz value was measured before and after the roughening treatment. It was measured. The results are shown in Table 1.
密着強度;
表面処理された銅箔粗面と市販のポリミド樹脂基材とを積層温度220℃、面圧25kg/cm2の加熱加圧条件で60分プレス後、その銅張り積層材をエッチング液に不溶の支持体に張り合わせた後に、10mm幅のパターンを形成させ、引き剥がし強度測定器により粗化面とポリミド樹脂との密着強度を測定した。その結果を表1に示す。
Adhesion strength;
After the surface-treated copper foil rough surface and a commercially available polyimide resin base material are pressed for 60 minutes under a heating and pressing condition of a lamination temperature of 220 ° C. and a surface pressure of 25 kg / cm 2 , the copper-clad laminate is insoluble in the etching solution. After bonding to the support, a 10 mm wide pattern was formed, and the adhesion strength between the roughened surface and the polyimide resin was measured with a peeling strength measuring instrument. The results are shown in Table 1.
<実施例2>
実施例1で使用した銅箔を下記条件で表面粗化処理した。
浴組成(硫酸単浴)
硫酸 150g/l
電解条件
浴温 25±3℃
商用交流電解電流密度 20A/dm2
処理時間 15秒
表面粗化処理条件以外は、実施例1と同じ条件で水洗、クロメート防錆処理、水洗、シランカップリング処理を施した。
表面処理した銅箔の特性を実施例1と同じ項目につき、実施例と同様の方法で測定し、その結果を表1に併記した。
<Example 2>
The copper foil used in Example 1 was surface roughened under the following conditions.
Bath composition (single sulfuric acid bath)
Sulfuric acid 150g / l
Electrolysis conditions Bath temperature 25 ± 3 ° C
Commercial AC electrolytic current density 20A / dm 2
Treatment time 15 seconds Except for the surface roughening treatment conditions, water washing, chromate rust prevention treatment, water washing and silane coupling treatment were performed under the same conditions as in Example 1.
The characteristics of the surface-treated copper foil were measured in the same manner as in Example 1 for the same items as in Example 1, and the results are also shown in Table 1.
<実施例3>
実施例1で使用した銅箔を下記条件で表面粗化処理した。
浴組成
硫酸 150g/l
モリブデン酸ナトリュウムのモリブデンとして 3g/l
電解条件
浴温 25±3℃
商用交流電解電流密度 20A/dm2
処理時間 15秒
表面粗化処理条件以外は、実施例1と同じ条件で水洗、クロメート防錆処理、水洗、シランカップリング処理を施した。
表面処理した銅箔の特性を実施例1と同じ項目につき、実施例1と同様の方法で測定し、その結果を表1に併記した。
<Example 3>
The copper foil used in Example 1 was surface roughened under the following conditions.
Bath composition Sulfuric acid 150g / l
3g / l as molybdenum in sodium molybdate
Electrolysis conditions Bath temperature 25 ± 3 ° C
Commercial AC electrolytic current density 20A / dm 2
Treatment time 15 seconds Except for the surface roughening treatment conditions, water washing, chromate rust prevention treatment, water washing and silane coupling treatment were performed under the same conditions as in Example 1.
The characteristics of the surface-treated copper foil were measured for the same items as in Example 1 by the same method as in Example 1. The results are also shown in Table 1.
<実施例4>
実施例1で使用した銅箔を下記条件で表面粗化処理した。
浴組成
硫酸 150g/l
硫酸ニッケルのニッケルとして 3g/l
電解条件
浴温 25±3℃
商用交流電解電流密度 20A/dm2
処理時間 15秒
表面粗化処理条件以外は、実施例1と同じ条件で水洗、クロメート防錆処理、水洗、シランカップリング処理を施した。
表面処理した銅箔の特性を実施例1と同じ項目につき、実施例1と同様の方法で測定し、その結果を表1に併記した。
<Example 4>
The copper foil used in Example 1 was surface roughened under the following conditions.
Bath composition Sulfuric acid 150g / l
3g / l as nickel sulfate nickel
Electrolysis conditions Bath temperature 25 ± 3 ° C
Commercial AC electrolytic current density 20A / dm 2
Treatment time 15 seconds Except for the surface roughening treatment conditions, water washing, chromate rust prevention treatment, water washing and silane coupling treatment were performed under the same conditions as in Example 1.
The characteristics of the surface-treated copper foil were measured for the same items as in Example 1 by the same method as in Example 1. The results are also shown in Table 1.
<実施例5>
実施例1で使用した銅箔を下記条件で表面粗化処理した。
浴組成
硫酸 150g/l
硫酸コバルトのコバルトとして 1.5g/l
タングステン酸ナトリュウムのタングステンとして 1.5g/l
電解条件
浴温 25±3℃
商用交流電解電流密度 20A/dm2
処理時間 15秒
表面粗化処理条件以外は、実施例1と同じ条件で水洗、クロメート防錆処理、水洗、シランカップリング処理を施した。
表面処理した銅箔の特性を実施例1と同じ項目につき、実施例1と同様の方法で測定し、その結果を表1に併記した。
<Example 5>
The copper foil used in Example 1 was surface roughened under the following conditions.
Bath composition Sulfuric acid 150g / l
1.5 g / l of cobalt sulfate
1.5 g / l as tungsten in sodium tungstate
Electrolysis conditions Bath temperature 25 ± 3 ° C
Commercial AC electrolytic current density 20A / dm 2
Treatment time 15 seconds Except for the surface roughening treatment conditions, water washing, chromate rust prevention treatment, water washing and silane coupling treatment were performed under the same conditions as in Example 1.
The characteristics of the surface-treated copper foil were measured for the same items as in Example 1 by the same method as in Example 1. The results are also shown in Table 1.
<実施例6>
実施例1で使用した銅箔を下記条件で表面粗化処理した。
浴組成(硫酸単浴)
硫酸 150g/l
硫酸ニッケルのニッケルとして 1.5g/l
モリブデン酸ナトリュウムのモリブデンとして 1.5g/l
電解条件
浴温 25±3℃
商用交流電解電流密度 20A/dm2
処理時間 15秒
表面粗化処理条件以外は、実施例1と同じ条件で水洗、クロメート防錆処理、水洗、シランカップリング処理を施した。
表面処理した銅箔の特性を実施例1と同じ項目につき、実施例1と同様の方法で測定し、その結果を表1に併記した。
<Example 6>
The copper foil used in Example 1 was surface roughened under the following conditions.
Bath composition (single sulfuric acid bath)
Sulfuric acid 150g / l
1.5g / l as nickel sulfate nickel
1.5g / l as molybdenum in sodium molybdate
Electrolysis conditions Bath temperature 25 ± 3 ° C
Commercial AC electrolytic current density 20A / dm 2
Treatment time 15 seconds Except for the surface roughening treatment conditions, water washing, chromate rust prevention treatment, water washing and silane coupling treatment were performed under the same conditions as in Example 1.
The characteristics of the surface-treated copper foil were measured for the same items as in Example 1 by the same method as in Example 1. The results are also shown in Table 1.
<比較例1>
図1に示す銅箔電解製造装置にて陰極電解製箔法により公称厚さ12μmの柱状構造の結晶粒界を有する電解銅箔(古河サーキットフォイル株式会社製MP銅箔、Rz:3.6μm)を用いて、製箔時の液面側(通称マット面)の表面を下記の直流電解処理条件を用いて表面粗化処理を施した。
浴組成(硫酸単浴)
硫酸 150g/l
電解条件
浴温 25±3℃
直流電解電流密度 20A/dm2
処理時間 15秒
元箔、表面粗化処理条件以外は、実施例1と同様、図1に示す水洗、クロメート防錆処理、水洗、シランカップリング処理を施した。
表面処理した銅箔の特性を実施例1と同じ項目につき、実施例1と同様の方法で測定し、その結果を表1に併記した。
<Comparative Example 1>
An electrolytic copper foil having a grain boundary with a columnar structure having a nominal thickness of 12 μm by a cathodic electrolytic foil method in the copper foil electrolytic manufacturing apparatus shown in FIG. 1 (MP copper foil manufactured by Furukawa Circuit Foil Co., Ltd., Rz: 3.6 μm) The surface on the liquid surface side (commonly referred to as the matte surface) during foil production was subjected to a surface roughening treatment using the following direct current electrolytic treatment conditions.
Bath composition (single sulfuric acid bath)
Sulfuric acid 150g / l
Electrolysis conditions Bath temperature 25 ± 3 ° C
DC electrolytic current density 20A / dm 2
Treatment time 15 seconds Except for the original foil and the surface roughening treatment conditions, the water washing, chromate rust prevention treatment, water washing and silane coupling treatment shown in FIG.
The characteristics of the surface-treated copper foil were measured for the same items as in Example 1 by the same method as in Example 1. The results are also shown in Table 1.
<比較例2>
比較例1と同じ銅箔を用いて、製箔時の液面側(通称マット面)の表面を下記の交流電解処理条件を用いて表面粗化処理を施した。
浴組成(硫酸単浴)
硫酸 150g/l
電解条件
浴温 25±3℃
商用交流電解電流密度 20A/dm2
処理時間 15秒
元箔、表面粗化処理条件以外は、実施例1と同様、クロメート防錆処理、水洗、シランカップリング処理を施した。
表面処理した銅箔の特性を実施例1と同じ項目につき、実施例1と同様の方法で測定し、その結果を表1に併記した。
<Comparative example 2>
Using the same copper foil as that in Comparative Example 1, the surface on the liquid surface side (commonly referred to as a matte surface) at the time of foil production was subjected to a surface roughening treatment using the following AC electrolytic treatment conditions.
Bath composition (single sulfuric acid bath)
Sulfuric acid 150g / l
Electrolysis conditions Bath temperature 25 ± 3 ° C
Commercial AC electrolytic current density 20A / dm 2
Treatment time 15 seconds Except for the original foil and surface roughening treatment conditions, the chromate rust prevention treatment, water washing and silane coupling treatment were performed in the same manner as in Example 1.
The characteristics of the surface-treated copper foil were measured for the same items as in Example 1 by the same method as in Example 1. The results are also shown in Table 1.
<比較例3>
図1に示す銅箔電解製造装置にて陰極電解製箔法により公称厚さ12μmの柱状構造の結晶粒界を有する電解銅箔(古河サーキットフォイル株式会社製MP銅箔、Rz:1.8μm)を用いて、実施例1で用いた銅箔を用いて、製箔時の液面側(通称マット面)の表面を下記の直流電解処理条件を用いて表面粗化処理を施した。
浴組成(硫酸単浴)
硫酸 150g/l
電解条件
浴温 25±3℃
直流電解電流密度 20A/dm2
処理時間 15秒
表面粗化処理条件以外は、実施例1と同様、図1に示す水洗、クロメート防錆処理、水洗、シランカップリング処理を施した。
表面処理した銅箔の特性を実施例1と同様の方法で測定し、その結果を表1に併記した。
<Comparative Example 3>
An electrolytic copper foil having a grain boundary with a columnar structure having a nominal thickness of 12 μm by a cathode electrolytic foil manufacturing method using the copper foil electrolytic manufacturing apparatus shown in FIG. 1 (MP copper foil manufactured by Furukawa Circuit Foil Co., Ltd., Rz: 1.8 μm) Using the copper foil used in Example 1, the surface on the liquid surface side (commonly referred to as the matte surface) during foil production was subjected to a surface roughening treatment using the following direct current electrolytic treatment conditions.
Bath composition (single sulfuric acid bath)
Sulfuric acid 150g / l
Electrolysis conditions Bath temperature 25 ± 3 ° C
DC electrolytic current density 20A / dm 2
Treatment time 15 seconds Except for the surface roughening treatment conditions, water washing, chromate rust prevention treatment, water washing and silane coupling treatment shown in FIG.
The characteristics of the surface-treated copper foil were measured by the same method as in Example 1, and the results are also shown in Table 1.
<比較例4>
比較例3で用いた銅箔を用いて、下記の粗化処理槽中を電解処理せずに(無電解処理で)通過させた。
浴組成(硫酸単浴)
硫酸 150g/l
処理条件
浴温 25±3℃
通過時間 15秒
表面粗化処理条件以外は、実施例1と同様、図1に示す水洗、クロメート防錆処理、水洗、シランカップリング処理を施した。
表面処理した銅箔の特性を実施例1と同じ項目につき、実施例1と同様の方法で測定し、その結果を表1に併記した。
以外は、実施例1と表面粗化処理を実施した
<Comparative Example 4>
The copper foil used in Comparative Example 3 was passed through the following roughening tank without electrolytic treatment (by electroless treatment).
Bath composition (single sulfuric acid bath)
Sulfuric acid 150g / l
Treatment conditions Bath temperature 25 ± 3 ℃
Passing time 15 seconds Except for the surface roughening treatment conditions, water washing, chromate rust prevention treatment, water washing and silane coupling treatment shown in FIG.
The characteristics of the surface-treated copper foil were measured for the same items as in Example 1 by the same method as in Example 1. The results are also shown in Table 1.
Except for Example 1, surface roughening treatment was carried out with Example 1.
上記実施例によれば、薄物銅箔の厚みを著しく変えることなく(実施例3が最大で約3%増)微細な粗化形状が容易に得られた。
また、粗化処理後の密着強度は、近年多用されているポリミド系樹脂に対しても充分な強度を有し、特に、特定な重金属を添加した浴処方を用いることで、更なる密着強度の向上が得られた。また顕著な凹凸形状を有さずに密着強度が得られる結果、FPC市場が求める最適な材料を提供できる。
本発明の交流給電による銅箔の表面処理方法によれば、ハンドリング性が容易でない微細粒状晶からなる薄物銅箔の表面処理を間接的に交流電解粗化処理することにより、表面の粗化状態を均一かつ効率良く処理ができ、生産性と品質が向上する。
また、表1には示していないが、重金属元素をてんかした浴での表面処理により得られた銅箔は耐熱特性効果が向上し、工業用プラスチックフィルムや熱硬化性樹脂との高温密着性の改善が顕著であった。
According to the above example, a fine roughened shape was easily obtained without significantly changing the thickness of the thin copper foil (Example 3 increased by about 3% at the maximum).
In addition, the adhesion strength after the roughening treatment has sufficient strength even for polymide-based resins that are frequently used in recent years, and in particular, by using a bath formulation to which a specific heavy metal is added, further adhesion strength can be obtained. An improvement was obtained. In addition, as a result of obtaining adhesion strength without having a noticeable uneven shape, it is possible to provide an optimum material required by the FPC market.
According to the surface treatment method of the copper foil by AC power feeding of the present invention, the surface roughening state is obtained by performing the AC electrolytic roughening treatment indirectly on the surface treatment of the thin copper foil made of fine granular crystals that are not easy to handle. Can be processed uniformly and efficiently, improving productivity and quality.
Moreover, although not shown in Table 1, the copper foil obtained by surface treatment in a bath in which heavy metal elements are tempered has improved heat resistance effect, and has high temperature adhesion to industrial plastic films and thermosetting resins. The improvement was remarkable.
上述したように本発明の表面処理方法は、鏡面状態の光沢表面に微細な凹凸表面粗化形状を呈することで投錨効果を向上せしめ、主として該銅箔と張り合わされる工業用プラスチックフィルムや該表面に直接キャスティングされる熱硬化性樹脂との密着性を向上させることができ、該銅箔と張り合わすフィルムやキャスティング樹脂の厚みを薄くすることができる。更には化学的に密着結合力を高める単一または複数の重金属元素を電解浴に添加することにより、表面粗化と同時に重金属によるメッキ処理も達成できるので、表面処理工程も簡略化でき、廉価で、薄物銅箔の固有の厚みを略維持した電解銅箔を提供することができる。 As described above, the surface treatment method of the present invention improves the anchoring effect by exhibiting a fine rough surface roughened shape on a mirror-like glossy surface, and is mainly used for an industrial plastic film bonded to the copper foil or the surface. Adhesion with the thermosetting resin cast directly on the film can be improved, and the thickness of the film or casting resin to be bonded to the copper foil can be reduced. In addition, by adding a single or multiple heavy metal elements that chemically enhance the tight bond strength to the electrolytic bath, surface treatment can be performed simultaneously with heavy metal plating, so the surface treatment process can be simplified and inexpensive. It is possible to provide an electrolytic copper foil that substantially maintains the inherent thickness of the thin copper foil.
1 巻き出し部
2 粗化処理槽
3 水洗槽
4 防錆処理槽
5 水洗槽
6 シランカップリング処理槽
7 乾燥装置
8 巻取り部
DESCRIPTION OF SYMBOLS 1 Unwinding part 2 Roughening processing tank 3 Flushing tank 4 Rust prevention processing tank 5 Flushing tank 6 Silane coupling processing tank 7 Drying device 8 Winding part
Claims (8)
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| JP2006313051A JP2008127618A (en) | 2006-11-20 | 2006-11-20 | Method for treating surface of copper foil through feeding alternating current |
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| JP2006313051A JP2008127618A (en) | 2006-11-20 | 2006-11-20 | Method for treating surface of copper foil through feeding alternating current |
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Cited By (8)
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| JP2011162860A (en) * | 2010-02-12 | 2011-08-25 | Furukawa Electric Co Ltd:The | Surface-roughened copper foil, method of producing the same and copper-clad laminate plate |
| WO2011108467A1 (en) | 2010-03-01 | 2011-09-09 | 古河電気工業株式会社 | Surface treatment method for copper foil, surface treated copper foil and copper foil for negative electrode collector of lithium ion secondary battery |
| CN102277605A (en) * | 2011-08-12 | 2011-12-14 | 合肥铜冠国轩铜材有限公司 | Process for manufacturing smooth surface roughened electrolytic copper foil |
| WO2013002273A1 (en) * | 2011-06-28 | 2013-01-03 | 古河電気工業株式会社 | Lithium ion secondary cell, current collector constituting negative electrode of secondary cell, and electrolytic copper foil constituting negative-electrode current collector |
| CN103088397A (en) * | 2013-02-07 | 2013-05-08 | 灵宝华鑫铜箔有限责任公司 | Method for eliminating rough surface and red line defects in copper foil surface treatment |
| JP2015012055A (en) * | 2013-06-27 | 2015-01-19 | 株式会社クラレ | Circuit board, and method for manufacturing the same |
| WO2016075828A1 (en) * | 2014-11-14 | 2016-05-19 | 合同会社ナポレ企画 | Surface electrolytic treatment method for clothing accessory components, clothing accessories, and production method therefor |
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| JP2011162860A (en) * | 2010-02-12 | 2011-08-25 | Furukawa Electric Co Ltd:The | Surface-roughened copper foil, method of producing the same and copper-clad laminate plate |
| WO2011108467A1 (en) | 2010-03-01 | 2011-09-09 | 古河電気工業株式会社 | Surface treatment method for copper foil, surface treated copper foil and copper foil for negative electrode collector of lithium ion secondary battery |
| WO2013002273A1 (en) * | 2011-06-28 | 2013-01-03 | 古河電気工業株式会社 | Lithium ion secondary cell, current collector constituting negative electrode of secondary cell, and electrolytic copper foil constituting negative-electrode current collector |
| JP5158918B2 (en) * | 2011-06-28 | 2013-03-06 | 古河電気工業株式会社 | Lithium ion secondary battery, current collector constituting the negative electrode of the secondary battery, and electrolytic copper foil constituting the negative electrode current collector |
| CN102277605A (en) * | 2011-08-12 | 2011-12-14 | 合肥铜冠国轩铜材有限公司 | Process for manufacturing smooth surface roughened electrolytic copper foil |
| CN103088397A (en) * | 2013-02-07 | 2013-05-08 | 灵宝华鑫铜箔有限责任公司 | Method for eliminating rough surface and red line defects in copper foil surface treatment |
| CN103088397B (en) * | 2013-02-07 | 2015-11-18 | 灵宝华鑫铜箔有限责任公司 | A kind of method removing hair side red-way defect in copper foil surface process |
| JP2015012055A (en) * | 2013-06-27 | 2015-01-19 | 株式会社クラレ | Circuit board, and method for manufacturing the same |
| WO2016075828A1 (en) * | 2014-11-14 | 2016-05-19 | 合同会社ナポレ企画 | Surface electrolytic treatment method for clothing accessory components, clothing accessories, and production method therefor |
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