JP2008122349A - Measuring instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a measuring instrument capable of measuring inexpensively and precisely an eccentricity value of a disk body in a disk substrate or the like. <P>SOLUTION: The disk body 140 to be measured provided with a circular hole 141 in its center is supported by grooves 115 formed on side faces of a driving roller 111 and driven rollers 112, 113. A driving motor part 114 rotates the disk body 140 to be measured, via the driving roller 111, when receiving an indication for starting an operation from a control part 130, and rotates the disk body 140 to be measured by one cycle (i.e. 360° of rotation). A dimension measuring instrument 120 measures sequentially radial distances between an inner circumferential edge and an outer circumferential edge of the disk body 140 to be measured, in a plurality of circumferential-directional portions of the disk body 140 to be measured (for example, in every prescribed angle of rotation), along with the rotation of the disk body 140 to be measured, and outputs a measured result to the control part 130. The control part 130 analyzes the measured result to find an eccentric amount of circular hole 141, when finishing the measurement about the whole circumference of the disk body 140 to be measured. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a measuring apparatus for measuring a disk body.

  A magnetic disk used in a hard disk device has a disk-like shape on a substrate made of aluminum or glass and has a disk shape, and a circular hole (circular hole) at the center thereof. Is provided. The magnetic disk having such a structure is mounted on a spindle motor of a hard disk device through a central circular hole, and rotates at a high speed around the circular hole. For this reason, if the center of the circular hole is deviated from the center of the magnetic disk (that is, decentered), vibration occurs during high-speed rotation. Therefore, in the manufacturing stage of a substrate constituting a magnetic disk (hereinafter referred to as a disk substrate), the amount of eccentricity of the disk substrate is measured in an inspection process or the like. For example, for those whose eccentricity exceeds a reference value Defective product.

  Conventionally, such an eccentricity measurement is performed by attaching a disk substrate to a spindle of a measuring device (inspection device) through a central circular hole, and placing a contact displacement meter at a predetermined position on the outer peripheral surface of the disk substrate. The disk substrate was rotated once in a state in which the measuring element was in contact, and the eccentric amount of the disk substrate was measured based on the displacement amount of the outer peripheral surface of the disk substrate measured by the displacement meter.

  However, in order to measure the eccentricity of the disk substrate with high accuracy by the above method, it is necessary to rotate the disk substrate with high accuracy. That is, a highly accurate rotation mechanism is required, and the measurement device (inspection device) is expensive accordingly.

Japanese Patent Laid-Open No. 57-128807 discloses roundness measurement in which a circular sample is rotated around its central axis, and the position of its outer peripheral edge is directly detected by an image sensor to electrically measure the outer peripheral shape. A method is disclosed.
JP-A-57-128807

  An object of the present invention is to provide a measurement apparatus that is more inexpensive and can accurately measure a disk substrate and other disk bodies.

  A first measuring device according to the present invention is a measuring device for measuring an eccentric amount of a circular hole provided in the center of a disk body, and supports the outer peripheral portion of the disk body, and the disk body A support rotation mechanism that rotates the disk body, a dimension measuring unit that measures a radial distance between the inner peripheral edge and the outer peripheral edge of the disk body, and the dimensions along with the rotation of the disk body by the support rotation mechanism. And a controller that calculates the amount of eccentricity based on the distances measured at a plurality of locations by the measuring unit.

  In this case, the control unit may calculate the eccentricity based on the maximum value and the minimum value of the distance.

  A second measuring apparatus according to the present invention is a measuring apparatus that performs measurement on a disk body having a circular hole in the center, and a mounting plate for mounting the disk body, A support rotation mechanism for supporting the outer peripheral portion of the mounting plate and rotating the mounting plate, a dimension measuring unit for measuring a distance about the disc body mounted on the mounting plate, and the supporting rotation Along with the rotation of the disk body through the mounting plate described above by the mechanism, the eccentric amount, the inner diameter dimension, the outer diameter dimension, and the outer diameter dimension of the disk body based on the distances of a plurality of locations measured by the dimension measuring unit. A control unit that calculates at least one of the roundness, the reference plate forming a perfect circle is formed on the mounting plate, and the dimension measuring unit includes the reference line and the disc body. The radial distance between the outer peripheral edge and the reference line and the inner peripheral edge of the disc body And measuring the distance in the radial direction.

  A third measuring device according to the present invention is a measuring device for measuring a disk body having a circular hole in the center, and a mounting plate for mounting the disk body, A support rotation mechanism for supporting the outer peripheral portion of the mounting plate and rotating the mounting plate, a dimension measuring unit for measuring a distance about the disc body mounted on the mounting plate, and the supporting rotation Along with the rotation of the disk body through the mounting plate described above by the mechanism, the eccentric amount, the inner diameter dimension, the outer diameter dimension, and the outer diameter dimension of the disk body based on the distances of a plurality of locations measured by the dimension measuring unit. A control unit that calculates at least one of the roundness, the outer peripheral edge of the mounting plate is formed to form a perfect circle, and the dimension measuring unit is an outer peripheral edge of the mounting plate And the radial distance between the outer peripheral edge of the disk body and the outer peripheral edge of the mounting plate and the inner periphery of the disk body And measuring the radial distance between the.

  A fourth measuring device according to the present invention is a measuring device for measuring a disk body, and supports a mounting plate for mounting the disk body and an outer peripheral portion of the mounting plate. A support rotating mechanism for rotating the mounting plate, a dimension measuring unit for measuring a distance about the disc body placed on the mounting plate, and a mounting plate by the supporting rotating mechanism. And a controller that calculates at least one of the outer diameter and roundness of the disc body based on the distances of the plurality of locations measured by the dimension measuring unit along with the rotation of the disc body. The mounting plate is provided with a reference line forming a perfect circle, and the dimension measuring unit measures a radial distance between the reference line and the outer peripheral edge of the disc body. Features.

  A fifth measuring device according to the present invention is a measuring device for measuring a disk body, and supports a mounting plate for mounting the disk body and an outer peripheral portion of the mounting plate. A support rotating mechanism for rotating the mounting plate, a dimension measuring unit for measuring a distance about the disc body placed on the mounting plate, and a mounting plate by the supporting rotating mechanism. And a controller that calculates at least one of the outer diameter and roundness of the disc body based on the distances of the plurality of locations measured by the dimension measuring unit along with the rotation of the disc body. The outer peripheral edge of the mounting plate is formed so as to form a perfect circle, and the dimension measuring unit is a radial distance between the outer peripheral edge of the mounting plate and the outer peripheral edge of the disk body. Is measured.

  In the above case, the placing plate may include means for restricting the movement of the disk body (for example, a member for restricting the movement of the disk body by friction of a rubber pad or the like).

  Further, in the first measuring apparatus, the dimension measuring unit includes a light projecting unit and a light receiving unit disposed so as to sandwich the disc body therebetween, and the light emitted by the light projecting unit is The inner peripheral edge and the outer peripheral edge of the disc body may be traversed in the radial direction.

  Further, in the second measuring apparatus, the dimension measuring unit includes a light projecting unit and a light receiving unit disposed so as to sandwich the disk body and the mounting plate, and the light projecting unit The emitted light may traverse the inner and outer edges of the disc body and the reference line in the radial direction.

  Further, in the third measuring apparatus, the dimension measuring unit includes a light projecting unit and a light receiving unit disposed so as to sandwich the disc body and the mounting plate, and the light projecting unit The emitted light may traverse the inner and outer peripheral edges of the disc body and the outer peripheral edge of the mounting plate in the radial direction.

  Further, in the fourth measuring apparatus, the dimension measuring unit includes a light projecting unit and a light receiving unit arranged so as to sandwich the disk body and the mounting plate, and the light projecting unit The emitted light may cross the outer peripheral edge of the disc body and the reference line in the radial direction.

  Further, in the fifth measuring apparatus, the dimension measuring unit includes a light projecting unit and a light receiving unit disposed so as to sandwich the disc body and the mounting plate, and the light projecting unit The emitted light may cross the outer peripheral edge of the disc body and the outer peripheral edge of the mounting plate in the radial direction.

  In the first measuring apparatus, the dimension measuring unit includes a contact displacement meter that measures the displacement of the inner peripheral surface of the disc body, and a contact type that measures the displacement of the outer peripheral surface of the disc body. A displacement meter, and each contact point of the contact displacement meter is arranged so as to be in contact with an inner peripheral surface and an outer peripheral surface of the disk body at a position aligned in a radial direction of the disk body. Also good.

  In the third measuring apparatus, the dimension measuring unit includes a contact displacement meter that measures the displacement of the inner peripheral surface of the disc body, and a contact type that measures the displacement of the outer peripheral surface of the disc body. A displacement meter and a contact displacement meter that measures the displacement of the outer peripheral surface of the mounting plate, and each contact point of the contact displacement meter is located at a position aligned in the radial direction of the mounting plate. You may make it arrange | position so that it may contact with the outer peripheral surface of this inner peripheral surface and outer peripheral surface, and the said mounting plate.

  In the fifth measuring apparatus, the dimension measuring unit includes a contact displacement meter that measures the displacement of the outer peripheral surface of the disc body, and a contact displacement that measures the displacement of the outer peripheral surface of the mounting plate. And each contact point of the contact displacement meter is arranged so as to contact the outer peripheral surface of the disc body and the outer peripheral surface of the mounting plate at a position aligned in the radial direction of the mounting plate. You may do it.

  In the above case, the support rotation mechanism may be configured by a plurality of rollers having grooves formed on the side surfaces. Further, the plurality of rollers are constituted by a driving roller for rotationally driving the disk body or the mounting plate, and a driven roller for guiding the movement of the disk body or the mounting plate. May be.

  According to the present invention, it is possible to provide a measurement apparatus that is more inexpensive and can accurately measure a disk substrate and other disk bodies.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<< first embodiment >>
FIG. 1 is a diagram showing an outline of a measuring apparatus according to the present invention. The figure (a) shows a top view and the figure (b) shows a side sectional view.

  As shown in the figure, a measuring apparatus 100 according to the present invention includes a support rotation mechanism 110, a dimension measuring instrument 120, and a control unit 130. The measuring device 100 measures an eccentric amount of a disk body (for example, a disk substrate) 140 having a circular hole 141 provided at the center.

  The support rotation mechanism 110 horizontally supports and rotates a disc body (hereinafter referred to as a disc to be measured) 140 to be measured, and a plurality of (three in the example in the figure) rollers 111. , 112, 113 and the drive motor unit 114.

  Each of the rollers 111, 112, and 113 constituting the support rotation mechanism 110 has a generally short columnar shape, and a groove for supporting the outer peripheral portion of the disc body 140 to be measured is formed on the side surface thereof. 115 is formed. In addition, the side surface of the groove 115 is formed in a tapered shape so as to become wider toward the outside so as not to touch the upper surface and the bottom surface of the disk body 140 to be measured. In addition, one of the plurality of rollers 111 constituting the support rotation mechanism 110 is fixed to a rotation shaft (output shaft) 116 of the drive motor unit 114 and rotates together with the rotation shaft 116 of the drive motor unit 114. Thus, it is a drive roller that rotationally drives the disk member 140 to be measured. On the other hand, the other rollers 112 and 113 are driven rollers (guide rollers) for guiding the measured disc body 140 rotated by the driving roller 111 so as to rotate in a horizontal plane, and the base portion 101 of the measuring apparatus 100. Are attached to rods 117 and 118 erected so as to extend in the vertical direction via bearings (not shown).

  The drive motor unit 114 that constitutes the support rotation mechanism 110 rotates and drives the disk 140 to be measured via a drive roller 111 fixed to a rotation shaft (output shaft) 116. The motor and its control It is configured by a circuit or the like. The drive motor unit 114 is mounted on the base unit 101 of the measurement apparatus 100 via an unillustrated advance / retreat mechanism. The drive motor unit 114 (and the drive roller 111) is configured to be movable back and forth (back and forth) with respect to the dimension measuring device 120 by the advance / retreat mechanism, and the disk member 140 to be measured is attached to and detached from the measurement apparatus 100. This is performed by moving the drive motor unit 114 (and the drive roller 111) back and forth.

  The dimension measuring device 120 calculates the distance (length) in the radial direction (of the disk to be measured 140) from the inner periphery to the outer periphery of the disk to be measured 140 supported by the support rotation mechanism 110. Measurement is performed at a predetermined location on the plate 140. The dimension measuring device 120 is arranged on one surface side (upper surface side in the example of the figure) of the disk body 140 to be measured, and the measurement light (on a predetermined region thereof) is measured with respect to the disk body 140 to be measured (a predetermined region). For example, the light projecting unit 121 that irradiates laser light) and the other surface side (bottom surface side in the example of the figure) of the disk to be measured 140 are arranged to receive the light emitted from the light projecting unit 121. And a controller (not shown) that calculates a radial distance from the inner peripheral edge to the outer peripheral edge of the disc body to be measured 140 based on an output signal from the light receiving section 122. Is provided.

  FIG. 2 is a diagram for explaining the measurement principle of the dimension measuring instrument 120.

  As shown in the figure, the thin linear parallel light beam 123 emitted from the light projecting unit 121 is perpendicular to the surface of the disk body 140 to be measured, and the inner and outer edges of the disk body 140 to be measured. Is irradiated so as to cross in the radial direction (of the measured disk body 140), and only the light 124 that is not blocked by the measured disk body 140 reaches the light receiving unit 122. Based on the signal output from the light receiving unit 122, the controller of the dimension measuring device 120 detects a shadow edge generated by the parallel light beam 123 irradiated by the light projecting unit 121 being blocked by the disk to be measured 140. And the distance from the inner periphery of the to-be-measured disc body 140 to an outer periphery in the location where the parallel light ray 123 is irradiated is measured by calculating the length of the said shadow suitably.

  The light projecting unit 121 includes, for example, a semiconductor laser (laser diode) as a light emitting light source and an optical system such as a polygon mirror and an fθ lens for converting the laser light emitted from the semiconductor laser into parallel light (scanning light). Consists of. The light receiving unit 122 includes, for example, a light receiving lens that condenses the laser light emitted from the light projecting unit 121, a light receiving element (for example, a photodiode) that converts the laser light collected by the light receiving lens into an electrical signal, and the like. Consists of.

  In this case, in the dimension measuring instrument 120, first, from the vicinity of the inner peripheral edge of the measured disk body 140 (slightly inside the inner peripheral edge) by the laser light irradiated from the light projecting unit 121 to the measured disk body 140. Scan to the vicinity of the outer periphery (slightly outside the outer periphery). And the laser beam irradiated to the to-be-measured disc body 140 is received by the light receiving unit 122 and converted into an electric signal. Then, the controller detects the edge of the shadow caused by the laser beam (scanning line) being interrupted by the measured disc body 140, and appropriately calculates the length of time during which the shadow is produced, The distance in the radial direction from the inner peripheral edge to the outer peripheral edge at a predetermined location on the measurement disc body 140 is measured.

  Here, the case where the dimension measuring device 120 measures the distance in the radial direction from the inner periphery to the outer periphery of the disc body 140 to be measured by the laser scanning method has been described. The distance may be measured by another method (for example, a CCD method using an LED for the light projecting unit 121 and a CCD image sensor for the light receiving unit 122).

  The control unit 130 controls the support rotation mechanism 110 and the dimension measuring device 120, and is configured by, for example, a normal personal computer or other computer, and via an appropriate interface (for example, an RS-232 serial interface). Are connected to the support rotating mechanism 110 (drive motor unit 141) and the dimension measuring device 120, respectively. Further, the control unit 130 calculates the amount of eccentricity of the measured disc body 140 based on the measurement value measured by the dimension measuring instrument 120. Furthermore, the control unit 130 determines whether or not the measured disc body 140 is a defective product based on the calculated eccentricity as necessary. For example, if the calculated amount of eccentricity is equal to or greater than a predetermined threshold, it is determined as a defective product, and if it is less than the predetermined threshold, it is determined as a non-defective product.

  Next, the operation of the measuring apparatus 100 having the above configuration will be described.

  First, in order to set the disk to be measured 140 in the measuring apparatus 100, the drive roller 111 and the drive motor unit 114 are appropriately retracted, and then the disk to be measured 140 is driven by the transport robot or the like. It is conveyed between the rollers 112 and 113. Then, after appropriate alignment, the drive roller 111 and the drive motor unit 114 are advanced, and the measured disk body 140 is supported (held) by the drive roller 111 and the driven rollers 112 and 113 (grooves formed on the side surfaces thereof). )

  As described above, when the set of the disk to be measured 140 is completed, the control unit 130 instructs the drive motor unit 114 to start the rotation, and also instructs the dimension measuring device 120 to measure the disk to be measured. Instruct to measure the distance in the radial direction between the inner and outer peripheral edges of 140 (hereinafter referred to as the radial distance). When receiving an instruction from the control unit 130, the drive motor unit 114 rotates the measured disk body 140 via the drive roller 111 and rotates the measured disk body 140 once (that is, 360 ° rotation). The dimension measuring device 120 sequentially measures the radial distance at a plurality of locations in the circumferential direction of the measured disk body 140 along with the rotation of the measured disk body 140, and outputs the measurement result to the control unit 130. To do. More specifically, the radial distance is measured every time the disk body to be measured 140 rotates by a predetermined angle (for example, 1 °). In addition, about the rotation of the to-be-measured disc body 140, you may make it rotate continuously according to the measurement time in the dimension measuring device 120, and other mounting conditions, or it may rotate intermittently (rotation at the time of measurement). (Stop).

When the measurement over the entire circumference of the disk body 140 to be measured is completed, the control unit 130 analyzes the measurement result and obtains the amount of eccentricity. That is, the measurement results for the entire circumference (every predetermined angle) are analyzed to obtain the maximum value (Lmax) and the minimum value (Lmin) of the radial distance, and the eccentricity d = (Lmax−Lmin) from these values. ) / 2 is calculated. As shown in FIG. 3, assuming that the disk to be measured 140 and the circular hole 141 provided in the disk to be measured 140 are both true circles, the center O _{1 of the} disk to be measured 140 and the circular hole Since the radial distance takes the maximum value (Lmax) and the minimum value (Lmin) on the straight line connecting the center O _{2 of} 141, the eccentricity d can be calculated by the above formula. In the figure, the eccentricity of the circular hole 141 is extremely increased for easy understanding.

  As described above, the amount of eccentricity of the disk body 140 to be measured is measured. Note that the control unit 130 further determines whether or not the measured disc body 140 is a defective product based on the calculated eccentricity as necessary.

  As described above, according to the above-described embodiment, since the amount of eccentricity is calculated based on the radial distance, a highly accurate rotation mechanism as in the conventional method is not necessarily required, and the cost can be reduced. A measuring apparatus can be configured.

<< Second Embodiment >>
Next, another embodiment of the present invention will be described.

  FIG. 4 is a diagram showing an outline of another measuring apparatus according to the present invention. In the figure, the same components as those shown in FIG. 1 are denoted by the same reference numerals.

  As shown in FIG. 4, another measuring apparatus 200 according to the present invention includes a support rotation mechanism 210, a dimension measuring device 120, and a control unit 130. The measuring apparatus 200 measures an eccentric amount, an outer diameter dimension, an inner diameter dimension, a roundness, and the like of a disc body 140 having a circular hole 141 provided at the center.

  The support rotation mechanism 210 horizontally supports and rotates the disc body 140 to be measured, and includes a plurality of (three in the example in the figure) rollers 111, 112, 113, and a mount The plate 211 and the drive motor unit 114 are configured.

  In the support rotation mechanism 110 of the measurement apparatus 100 described above, the disk to be measured 140 is directly supported by the plurality of rollers 111, 112, and 113. However, in the support rotation mechanism 210 of the measurement apparatus 200, the mounting plate 211 is supported. (The outer peripheral portion) is supported by a plurality of rollers 111, 112, and 113, and the measured disc body 140 is placed on the placement plate 211.

  The rollers 111, 112, and 113 and the drive motor unit 114 that constitute the support rotation mechanism 210 are the same as those of the measurement apparatus 100 described above, and thus detailed description thereof is omitted. In the measuring apparatus 200, the drive motor unit 114 (and the drive roller 111) does not need to be configured to be able to advance and retreat (back and forth) with respect to the dimension measuring device 120.

  The mounting plate 211 is a disk-shaped member on which the disk body 140 to be measured is mounted, and is horizontally supported by the rollers 111, 112, and 113 and rotated. In addition, a plurality of (three in the example in the figure) rubber pads 212 for mounting the measured disc body 140 are appropriately bonded to the upper surface of the mounting plate 211. The rubber pad 212 has a disk shape, and prevents the measured disk body 140 mounted on the mounting plate 211 from sliding and moving by friction when the mounting plate 211 rotates. It is a member to do.

  The mounting plate 211 is made of a material (for example, glass) that can transmit the measurement light irradiated by the light projecting unit 121 of the dimension measuring device 120. Further, a reference line 213 is formed on the mounting plate 211 with a material that does not transmit light for measurement. The reference line 213 is formed on the surface of the mounting plate 211 by, for example, chrome plating. The reference line 213 is formed so as to draw a perfect circle on the mounting plate 211, and further, the measured disk body 140 is arranged so that the measured disk body 140 is completely within the reference line 213 in plan view. It is formed to have a slightly larger diameter than the outer diameter. The reference line 213 serves as a reference when measuring the distance with respect to the measured disc body 140.

  The dimension measuring instrument 120 is the same as that of the measuring apparatus 100 described above, but the measurement object is different. That is, in the measuring apparatus 200, as shown in FIG. 5, the dimension measuring device 120 includes the reference line 213 (the inner periphery or the outer periphery thereof) on the mounting plate 211 and the outer periphery 501 of the disk body 140 to be measured. The distance L1 in the radial direction (of the placement plate 211) between the reference line 213 (inner or outer periphery thereof) and the inner periphery 502 of the disc body 140 to be measured (of the placement plate 211). ) The distance L2 in the radial direction is measured at a predetermined location on the measured disc body 140. In this case, the linear light emitted from the light projecting unit 121 is perpendicular to the surface of the measured disk body 140, on the inner peripheral edge 502 and the outer peripheral edge 501 of the measured disk body 140 and on the mounting plate 211. The reference line 213 is irradiated so as to cross the mounting plate 211 in the radial direction.

  The control unit 130 is also the same as that of the measuring apparatus 100 described above, but based on the measured value measured by the dimension measuring instrument 120, not only the eccentric amount of the disc body 140 to be measured but also the outer diameter dimension. And inner diameter dimensions, roundness, etc. are calculated. In the present embodiment, since the dimension measuring instrument 120 measures the distance from the reference line 213 that is a perfect circle in advance and whose diameter is known, the measurement target is analyzed by analyzing the measurement result. Not only the eccentric amount of the disc body 140 but also the outer diameter dimension, inner diameter dimension, roundness, etc. can be calculated.

  Next, the operation of the measuring apparatus 200 having the above configuration will be described.

  First, the disc body 140 to be measured is placed on the placement plate 211 of the support rotation mechanism 210 by a transport robot or the like. More specifically, the disk-to-be-measured body 140 is placed on a rubber pad 212 fixed to the surface of the mounting plate 211 so as to be within a reference line 213 formed on the mounting plate 211 in plan view. Place.

  When the set of the disk member to be measured 140 is completed, the control unit 130 instructs the drive motor unit 114 to rotate, and also measures the reference line 213 on the mounting plate 211 and the device under measurement to the dimension measuring device 120. A radial distance between the outer peripheral edges of the disc body 140 (hereinafter referred to as a first radial distance) L1 and a radial distance between the reference line 213 and the inner peripheral edge of the disc body 140 to be measured. Instruct to measure L2 (hereinafter referred to as the second radial distance). Upon receiving an instruction from the control unit 130, the drive motor unit 114 rotates the mounting plate 211 via the driving roller 111 and rotates the measured disk body 140 mounted on the mounting plate 211. . The dimension measuring instrument 120 sequentially measures the first radial distance L1 and the second radial distance L2 at a plurality of locations in the circumferential direction of the measured disc body 140 as the measured disc body 140 rotates. The result is output to the control unit 130. More specifically, the first radial direction distance L1 and the second radial direction distance L2 are measured every time the measured disc body 140 rotates by a predetermined angle (for example, 1 °).

  When the measurement over the entire circumference of the disc body 140 to be measured is completed, the control unit 130 analyzes the measurement result and obtains the amount of eccentricity, the outer diameter dimension, the inner diameter dimension, the roundness, and the like. Since the measuring apparatus 200 measures the distance from the reference line 213 that is a perfect circle and the diameter of which is known, not only the eccentric amount of the disc body 140 to be measured but also the outer diameter dimension and inner diameter dimension. Further, it is possible to measure roundness and the like.

  As described above, the amount of eccentricity of the disk to be measured 140 is measured. Furthermore, the control unit 130 determines whether or not the measured disc body 140 is a defective product based on the calculated amount of eccentricity or the like as necessary.

  The measuring apparatus 200 can also be used for measuring the outer diameter (that is, the diameter) and roundness of a disc body having no holes, such as a silicon wafer. In this case, the dimension measuring device 120 (the mounting plate 211 between the reference line 213 (the inner peripheral edge or the outer peripheral edge thereof) on the mounting plate 211 and the outer peripheral edge of the disc body to be measured without a hole. )) The distance in the radial direction is measured at a predetermined position of the disk body to be measured, and the control unit 130 determines the outer diameter dimension of the disk body to be measured based on the measurement value measured by the dimension measuring device 120. (Diameter) and roundness are calculated.

  As described above, according to the above embodiment, the amount of eccentricity is calculated based on the distance in the radial direction from the reference line 213 formed on the mounting plate 211 that rotates together with the measured disc body 140. Therefore, a highly accurate rotation mechanism as in the conventional method is not necessarily required, and the measurement apparatus can be configured at a lower cost. In addition, since the reference line 213 is a perfect circle and its diameter is known in advance, not only the eccentricity of the disc body 140 to be measured but also the outer diameter, inner diameter, roundness, etc. are measured. It becomes possible.

  As mentioned above, although embodiment of this invention was described, naturally, embodiment of this invention is not restricted to said thing. For example, in the above-described embodiment, the outer peripheral edge of the measured disc body 140 from the slightly inner side of the inner peripheral edge of the measured disc body 140 (in the case of the second embodiment, the reference line 213 of the mounting plate 211). The entire area up to the outside of the disk was irradiated (scanned) with measurement light. However, the area around the inner periphery of the disk-to-be-measured 140 (from slightly inside the inner edge to slightly outside) was measured. Irradiation (scanning) of the vicinity of the outer periphery of the disc body 140 (from slightly inside to slightly outside of the outer periphery (in the case of the second embodiment, to slightly outside of the reference line 213)) ). In other words, a light projecting unit and a light receiving unit for detecting the position (displacement) of the inner peripheral edge of the disc body 140 to be measured, and a light projecting for detecting the position (displacement) of the outer peripheral edge of the disc body 140 to be measured. And the light receiving unit may be provided separately.

  In the second embodiment described above, the radial distance is measured with reference to the reference line 213 formed on the mounting plate 211. However, the mounting plate 211 is not particularly formed without forming the reference line 213. It is also conceivable that the outer peripheral edge of the reference line 213 plays the role of the reference line 213. That is, since light cannot travel straight at the outer peripheral edge of the mounting plate 211, if the outer periphery of the mounting plate 211 is formed to be a perfect circle, the outer peripheral edge of the mounting plate 211 can be used as a reference line. It becomes possible. In this case, for example, the dimension measuring instrument 120 may be a distance in the radial direction (of the mounting plate 211) from the outer peripheral edge of the mounting plate 211 to the outer peripheral edge of the measured disc body 140, or the outer peripheral edge of the mounting plate 211. The distance in the radial direction (of the mounting plate 211) from the inner peripheral edge of the disc body 140 to be measured is measured.

  In the above-described embodiment, the distance in the radial direction is optically measured. However, it is also possible to measure mechanically. For example, in the case of the first embodiment, a contact-type displacement meter that measures the displacement of the inner peripheral surface of the measured disc body 140, and a contact-type displacement meter that measures the displacement of the outer peripheral surface of the measured disc body 140, Are prepared, and the measuring elements of both displacement meters are arranged so as to be in contact with the inner circumferential surface and the outer circumferential surface of the disk body 140 to be measured at positions aligned in the radial direction of the disk body 140 to be measured, respectively. It is conceivable to measure the radial distance with two displacement meters. In the case of the second embodiment, first, as described above, the outer periphery of the mounting plate 211 is formed so that it can be used as a reference line, and in addition to the two displacement gauges, A contact-type displacement meter that measures the displacement of the outer peripheral surface is prepared, and the measuring elements of these three displacement meters are arranged in the radial direction of the mounting plate 211 in a plan view, and the inner circumference of the disc body 140 to be measured. It is conceivable that the first radial direction distance and the second radial direction distance are measured by using these three displacement meters, which are arranged so as to contact the surface, the outer peripheral surface and the outer peripheral surface of the mounting plate 211, respectively. .

It is a figure which shows the outline | summary of the measuring apparatus 100 by this invention. It is a figure for demonstrating the measurement principle of the dimension measuring device. It is a figure for demonstrating the calculation method of eccentricity. It is a figure which shows the outline | summary of another measuring apparatus 200 by this invention. It is a figure for demonstrating the measuring object of the dimension measuring device.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Measuring apparatus 101 Base part 110 Support rotation mechanism 111 Drive roller 112,113 Followed roller (guide roller)
114 Drive motor unit 115 Groove 116 Rotating shaft 117, 118 Rod 120 Dimension measuring device 121 Light projecting unit 122 Light receiving unit 130 Control unit 140 Disk body to be measured 141 Circular hole 200 Measuring device 210 Support rotating mechanism 211 Mounting plate 212 Rubber pad 213 Reference line

Claims (16)

A measuring device for measuring the amount of eccentricity of a circular hole provided in the center of a disk body,
A support rotation mechanism for supporting the outer periphery of the disk body and rotating the disk body;
A dimension measuring unit for measuring a radial distance between an inner peripheral edge and an outer peripheral edge of the disc body;
A measuring apparatus comprising: a control unit that calculates the amount of eccentricity based on the distances of a plurality of locations measured by the dimension measuring unit as the disk body is rotated by the support rotating mechanism. . The measurement apparatus according to claim 1, wherein the control unit calculates the amount of eccentricity based on a maximum value and a minimum value of the distance. A measuring device for measuring a disc body provided with a circular hole in the center,
A mounting plate for mounting the disc body;
A support rotation mechanism for supporting the outer periphery of the mounting plate and rotating the mounting plate;
A dimension measuring unit for measuring a distance about the disc body placed on the placing plate;
Along with the rotation of the disk body through the mounting plate by the support rotation mechanism, the eccentric amount, the inner diameter dimension, the outer diameter of the disk body based on the distances of the plurality of locations measured by the dimension measurement unit A control unit that calculates at least one of the diameter and roundness,
A reference line forming a perfect circle is formed on the mounting plate described above,
The dimension measuring unit measures a radial distance between the reference line and the outer peripheral edge of the disc body, and a radial distance between the reference line and the inner peripheral edge of the disc body. A measuring device. A measuring device for measuring a disc body provided with a circular hole in the center,
A mounting plate for mounting the disc body;
A support rotation mechanism for supporting the outer periphery of the mounting plate and rotating the mounting plate;
A dimension measuring unit for measuring a distance about the disc body placed on the placing plate;
Along with the rotation of the disk body through the mounting plate by the support rotation mechanism, the eccentric amount, the inner diameter dimension, the outer diameter of the disk body based on the distances of the plurality of locations measured by the dimension measurement unit A control unit that calculates at least one of the diameter and roundness,
The outer peripheral edge of the mounting plate is formed to form a perfect circle,
The dimension measurement unit includes a radial distance between the outer peripheral edge of the mounting plate and the outer peripheral edge of the disk body, and a distance between the outer peripheral edge of the mounting plate and the inner peripheral edge of the disk body. Measuring device characterized by measuring distance in radial direction of. A measuring device for measuring a disk body,
A mounting plate for mounting the disc body;
A support rotation mechanism for supporting the outer periphery of the mounting plate and rotating the mounting plate;
A dimension measuring unit for measuring a distance about the disc body placed on the placing plate;
With the rotation of the disk body through the mounting plate by the support rotation mechanism, the outer diameter dimension and roundness of the disk body based on the distances measured at the dimension measuring unit. A control unit that calculates at least one of
A reference line forming a perfect circle is formed on the mounting plate described above,
The dimension measuring unit measures a radial distance between the reference line and an outer peripheral edge of the disc body. A measuring device for measuring a disk body,
A mounting plate for mounting the disc body;
A support rotation mechanism for supporting the outer periphery of the mounting plate and rotating the mounting plate;
A dimension measuring unit for measuring a distance about the disc body placed on the placing plate;
With the rotation of the disk body through the mounting plate by the support rotation mechanism, the outer diameter dimension and roundness of the disk body based on the distances measured at the dimension measuring unit. A control unit that calculates at least one of
The outer peripheral edge of the mounting plate is formed to form a perfect circle,
The said dimension measurement part measures the distance of the radial direction between the outer periphery of the said mounting plate, and the outer periphery of the said disc body, The measuring apparatus characterized by the above-mentioned. The measuring apparatus according to any one of claims 3 to 6, wherein the placing plate includes means for regulating movement of the disc body. The dimension measuring unit includes a light projecting unit and a light receiving unit arranged so as to sandwich the disk body therebetween,
The measuring apparatus according to claim 1, wherein the light emitted by the light projecting unit traverses the inner and outer peripheral edges of the disc body in a radial direction. The dimension measuring unit includes a light projecting unit and a light receiving unit disposed so as to sandwich the disk body and the mounting plate.
The measuring apparatus according to claim 3, wherein the light emitted by the light projecting unit traverses the inner and outer peripheral edges of the disc body and the reference line in the radial direction. The dimension measuring unit includes a light projecting unit and a light receiving unit disposed so as to sandwich the disk body and the mounting plate.
The measuring device according to claim 4, wherein the light emitted by the light projecting unit traverses the inner and outer peripheral edges of the disc body and the outer peripheral edge of the mounting plate in the radial direction. The dimension measuring unit includes a light projecting unit and a light receiving unit disposed so as to sandwich the disk body and the mounting plate.
The measuring apparatus according to claim 5, wherein the light emitted by the light projecting unit crosses the outer peripheral edge of the disc body and the reference line in the radial direction. The dimension measuring unit includes a light projecting unit and a light receiving unit disposed so as to sandwich the disk body and the mounting plate.
The measuring apparatus according to claim 6, wherein the light emitted by the light projecting unit crosses the outer peripheral edge of the disc body and the outer peripheral edge of the mounting plate in the radial direction. The dimension measuring unit includes a contact displacement meter that measures the displacement of the inner peripheral surface of the disc body, and a contact displacement meter that measures the displacement of the outer peripheral surface of the disc body,
The contact elements of the contact displacement meter are arranged so as to be in contact with the inner peripheral surface and the outer peripheral surface of the disk body at positions aligned in the radial direction of the disk body. 2. The measuring apparatus according to 2. The dimension measuring unit includes a contact displacement meter that measures the displacement of the inner peripheral surface of the disc body, a contact displacement meter that measures the displacement of the outer peripheral surface of the disc body, and the outer peripheral surface of the mounting plate. A contact displacement meter that measures the displacement of
Each contact point of the contact displacement meter is arranged so as to contact the inner and outer peripheral surfaces of the disc body and the outer peripheral surface of the mounting plate at positions aligned in the radial direction of the mounting plate. The measuring apparatus according to claim 4. The dimension measuring unit includes a contact displacement meter that measures the displacement of the outer peripheral surface of the disc body, and a contact displacement meter that measures the displacement of the outer peripheral surface of the mounting plate.
Each contact point of the contact displacement meter is disposed so as to be in contact with the outer peripheral surface of the disk body and the outer peripheral surface of the mounting plate at a position aligned in the radial direction of the mounting plate. The measuring apparatus according to claim 6. The measuring apparatus according to claim 1, wherein the support rotation mechanism includes a plurality of rollers having grooves formed on a side surface.

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