JP2008104974A - Acoustic surface wave atomizer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To stably atomize a large number of particulates with less power consumption while keeping the balance between an amount of fed liquid and an amount of atomization in an acoustic surface wave atomizer. <P>SOLUTION: An acoustic surface wave atomizer 1 is provided with a piezoelectric transducer 2 which includes a pair of interdigital electrodes 21 and generates acoustic surface waves by applying high-frequency voltage to the interdigital electrodes 21 and a liquid feeding means 3 which feeds a liquid to the surface S of the piezoelectric transducer 2, and atomizes the liquid fed to the surface S of the piezoelectric transducer 2 by the liquid feeding means 3 by the acoustic surface waves w formed on the surface S. The liquid feeding means 3 is provided with a liquid film forming member 30 forming a film forming gap G for distributing the fed liquid on the surface of the piezoelectric transducer 2 in a film form. The film forming gap G is shaped so that the length b in the direction of movement x of the acoustic surface waves w is shorter than the length a in a width direction y orthogonal to the direction of movement x of the acoustic surface waves w formed on the surface S of the piezoelectric transducer 2. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an atomization apparatus using surface acoustic waves.

  Conventionally, when a liquid is supplied to the surface of a substrate made of a piezoelectric material or the like through which surface acoustic waves are propagated, the liquid receives surface acoustic wave energy and flows or vibrates to fly as fine particles. The phenomenon is known. Various devices for atomizing a liquid using this phenomenon have been proposed. As a principle of atomization in such an apparatus, for example, a surface acoustic wave (Rayleigh wave) propagating on the surface of a substrate becomes a surface tension wave (capillary wave) that enters the liquid and propagates through the surface. As a result, it is explained that fog is generated from the surface of the liquid. Note that atomization due to a cavitation effect generated by ultrasonic vibration is also conceivable.

  In such a surface acoustic wave atomizer, in order to efficiently perform stable atomization with low power, it is necessary to extend the liquid thinly and maintain a good balance between the liquid supply amount and the spray amount. is there. Therefore, a cover that forms a gap between the vibration surface and a part of the vibration surface on which the surface acoustic wave propagates is provided so that the liquid supplied to the gap exits from the gap toward the vibration source of the surface acoustic wave. There is an atomizer. In this apparatus, the surface acoustic wave that reaches the cover generates capillary waves in the thinly spread liquid, and atomization is performed from the capillary waves (see, for example, Patent Document 1).

In addition, a porous thin plate having an infinite number of through-holes is arranged above the vibration surface where the surface acoustic wave propagates with a small gap between the vibration surface and within the minute gap formed by the vibration surface and the porous thin plate. There is an atomizer that supplies liquid. In this device, vibration due to surface acoustic waves is transmitted to the porous thin plate through the liquid in the micro gap, and a small amount of liquid that has penetrated the through-hole is atomized and sprayed by the vibration of the porous thin plate. (See, for example, Patent Document 2).
JP-A-7-232114 Japanese Patent No. 3341023

  However, in the surface acoustic wave atomization apparatus as shown in Patent Documents 1 and 2 described above, the liquid can be spread thinly, but a large amount of liquid that is not involved in the atomization still remains on the propagation surface of the surface acoustic wave. Therefore, there is a problem that the energy of the surface acoustic wave is wasted by these liquids and the efficiency of atomization is poor.

  The present invention solves the above-mentioned problems, and with a simple configuration, the surface acoustic wave mist can maintain a balance between the liquid supply amount and the atomization amount, and can stably spray a large amount of fine particles with less power consumption. An object of the present invention is to provide a device.

  In order to achieve the above object, the invention of claim 1 comprises a vibrator made of a piezoelectric material in which a pair of comb-shaped electrodes are formed, and a surface acoustic wave is generated by applying a high-frequency voltage to the comb-shaped electrodes; A surface acoustic wave that atomizes the liquid supplied to the surface of the vibrator by the surface acoustic wave generated on the surface. In the atomization apparatus, the liquid supply means is disposed opposite to the surface of the vibrator, and a liquid film forming member that forms a film formation gap for distributing the supply liquid in a film shape on the surface of the vibrator. And the shape of the film forming gap of the liquid film forming member is longer in the direction of travel of the surface acoustic wave than in the width direction perpendicular to the direction of travel of the surface acoustic wave generated on the surface of the vibrator. The short is also formed It is.

  According to a second aspect of the present invention, in the surface acoustic wave atomization device according to the first aspect, the liquid supply means supplies a liquid to the film formation gap from a localized supply point, and the liquid film formation member includes: The film forming gap is formed so as to be located downstream of the supply point in the traveling direction of the surface acoustic wave.

  According to a third aspect of the present invention, in the surface acoustic wave atomization device according to the first aspect, the liquid supply means supplies liquid to the film formation gap from a localized supply point, and the liquid film formation member includes: The film formation gap is formed so that the gap becomes narrower as the distance from the supply point increases.

  According to a fourth aspect of the present invention, in the surface acoustic wave atomization device according to any one of the first to third aspects, the liquid film forming member changes a relative position with the surface of the vibrator. Thus, the amount of atomization is adjusted by changing the shape of the film forming gap.

  According to a fifth aspect of the present invention, in the surface acoustic wave atomization device according to the first aspect, a plurality of the liquid film forming members are provided along a surface acoustic wave traveling direction, and the liquid supply means is a surface acoustic wave traveling The liquid is supplied to the liquid film forming member on the upstream side in the direction, and the liquid transported by the surface acoustic wave without being atomized in the upstream liquid film forming member portion is directed to the downstream film forming member. To be supplied.

  According to a sixth aspect of the present invention, in the surface acoustic wave atomization device according to any one of the first to fourth aspects, the vibrators are formed to be spaced apart from each other on a traveling direction line of the surface acoustic wave. The liquid film forming member is provided between the two pairs of comb electrodes, and the liquid supplied to the film forming gap is caused by surface acoustic waves from the comb electrodes on both sides. It will be atomized.

  A seventh aspect of the present invention is the surface acoustic wave atomization device according to the sixth aspect, wherein a plurality of the liquid film forming members are provided between two pairs of the comb-shaped electrodes, and the liquid supply means includes the plurality of liquids A liquid is supplied to a film forming gap formed by the film forming member.

  The invention according to claim 8 is the surface acoustic wave atomization device according to claim 7, wherein the plurality of liquid film forming members are integrally formed.

  According to a ninth aspect of the present invention, in the surface acoustic wave atomization device according to the eighth aspect, the vibrator includes a plurality of pairs of pairs of the comb-shaped electrodes with different surface acoustic wave traveling directions. It is.

  According to a tenth aspect of the present invention, in the surface acoustic wave atomization device according to the ninth aspect, the pair of comb-shaped electrodes forming a pair is shifted in the opposite direction along the width direction orthogonal to the traveling direction of the surface acoustic wave. Is formed.

  According to the first aspect of the present invention, the shape of the film forming gap formed by the liquid film forming member is longer than the length in the width direction perpendicular to the traveling direction of the surface acoustic wave. Since the liquid is distributed in the form of a film in this film formation gap and is held by surface tension, the surface wave of the surface acoustic wave is less than the distance that the surface acoustic wave passes through the distributed liquid. The interaction distance becomes longer, and therefore, it can be efficiently atomized over a large area. That is, the liquid film forming member that forms an elongated liquid distribution along the wavefront of the surface acoustic wave can maintain the balance between the liquid supply amount and the atomization amount, and can suppress the presence of the liquid not involved in the atomization. A large amount of fine particles can be stably sprayed with low power consumption.

  According to the second aspect of the present invention, the liquid supplied from the upstream side in the traveling direction of the surface acoustic wave is transported downstream along the film formation gap by the surface acoustic wave. This transportation is performed so that the liquid supply amount is automatically adjusted by the surface acoustic wave energy that was not used for atomization. Therefore, the balance between the liquid supply amount and the atomization amount is kept stable, and the liquid film has a thin range. A large amount of fine particles can be sprayed with less power consumption.

  According to the invention of claim 3, since the liquid at the supply point can be transported to the part away from the supply point by surface tension, a means for forcibly feeding the liquid film is not required, and the structure is compact. With this, the thin area of the liquid film can be widened and atomized efficiently in large quantities.

  According to the fourth aspect of the present invention, the atomization amount can be easily adjusted without changing the power supply voltage value for generating the surface acoustic wave.

  According to invention of Claim 5, it can atomize in large quantities with a compact structure, without providing the supply point of a new liquid. Further, since the surface acoustic wave that has not been consumed in the upstream liquid film forming member portion can be used in the downstream liquid film forming member portion, it can be atomized efficiently.

  According to invention of Claim 6, since it can atomize with the surface acoustic wave which propagates from the both sides of one liquid film formation member, compared with the case where it is only from one side, it can atomize more strongly and in large quantities.

  According to the seventh aspect of the present invention, the energy of the surface acoustic wave can be absorbed into the liquid and atomized in the plurality of liquid film forming member portions and the surface region between the members, so that energy and liquid are wasted. The liquid can be atomized stably and efficiently.

  According to the invention of claim 8, since the liquid film forming member, and hence the film forming gap, can be connected on the surface of the vibrator, the liquid can be efficiently spread along the liquid film forming member. And more atomization. In addition, the number of parts can be reduced.

  According to the ninth aspect of the present invention, surface acoustic waves can be sent from the surroundings to the liquid distributed in the form of a film, so that compact and powerful atomization is possible.

  According to the tenth aspect of the present invention, a surface acoustic wave is spirally sent from the surroundings to a liquid distributed in a film shape, so that the liquid is liquidated by the surface acoustic wave distributed in a spiral shape. Since it can be spread along the film forming member and further circulated, a larger amount of liquid can be atomized efficiently and stably.

  Hereinafter, a surface acoustic wave atomization apparatus according to an embodiment of the present invention will be described with reference to the drawings.

(First embodiment)
FIGS. 1A and 1B show a surface acoustic wave atomization apparatus according to the first embodiment, and FIG. The surface acoustic wave atomization apparatus 1 includes a vibrator 2 in which a pair of comb-shaped electrodes 21 are formed and a surface acoustic wave is generated by applying a high-frequency voltage to the comb-shaped electrodes 21. The liquid 4 supplied to the surface S of the vibrator 2 by the liquid supply means 3 is caused to fly as the fine particles 41 of the liquid 4 by the surface acoustic wave w generated on the surface S. It is an atomizing device. The surface acoustic wave atomizer 1 is used as, for example, a medical atomizer that is driven by a low-power dry battery. In this case, the atomized liquid 4 is water or a chemical solution in which a chemical is dissolved in water. Moreover, when driving the surface acoustic wave atomizer 1 with comparatively high electric power, it is used as a humidity adjusting device for preventing drying, for example.

  The liquid supply means 3 is disposed to face the surface S of the vibrator 2 and is supplied via the liquid lead-out member 32. And a liquid film forming member 30 that forms a film forming gap G for distributing the supplied liquid 4 in a film shape on the surface of the vibrator 2. The film forming gap G of the liquid film forming member 30 has a surface acoustic wave more than the length a in the width direction y perpendicular to the traveling direction x of the surface acoustic wave w generated on the surface S of the vibrator 2. The length b in the traveling direction x of w is shortened. Details will be described below.

  The piezoelectric material constituting the vibrator 2 is a substrate made of a piezoelectric body itself such as LiNbO3 (lithium niobate), for example. The piezoelectric material may be a piezoelectric thin film formed on the surface of a non-piezoelectric substrate, for example, a PZT thin film (lead, zirconium, titanium alloy thin film). A surface acoustic wave is excited in the surface portion of the piezoelectric thin film on the surface. Therefore, the piezoelectric material constituting the vibrator 2 may be a substrate provided with a piezoelectric portion on the surface where surface acoustic waves are excited.

  The pair of comb electrodes 21 are electrodes (IDT: inter digital transducer) formed by engaging two comb electrodes on the surface of the piezoelectric material. It has been found that the width of the comb electrode 21 in the y direction needs to be about 20 times the wavelength λ in order to generate a stable surface acoustic wave w, but it may be less than that. Comb teeth adjacent to each other of the comb-shaped electrode 21 belong to different electrodes, and are arranged at a pitch of half the wavelength λ of the surface acoustic wave w to be excited.

  By applying a high-frequency (for example, MHz band) voltage from the electric circuit 23 for applying a high-frequency voltage to the two comb-shaped electrodes 21, the electric energy is converted into wave mechanical energy by the comb-shaped electrode 21, and the vibrator 2. A surface acoustic wave w called Rayleigh wave is excited on the surface. The amplitude of the excited surface acoustic wave w is determined by the magnitude of the voltage applied to the comb electrode 21. The length of the wave packet of the excited surface acoustic wave w corresponds to the length of voltage application time.

  The surface acoustic wave w excited by the comb-shaped electrode 21 becomes a wave having a width corresponding to the width at which the teeth of the pair of comb-shaped electrodes 21 intersect, and propagates in the direction x perpendicular to the teeth of the comb (hereinafter also referred to as progression). ) Since the comb-shaped electrode 21 generates surface acoustic waves propagating on both sides thereof, a reflective comb-shaped electrode 22 is disposed on the left side of the comb-shaped electrode 21 as shown in FIG. The reflective comb electrode 22 constitutes a so-called reflector that totally reflects the surface acoustic wave. The comb-shaped electrode 21 is combined with the reflective comb-shaped electrode 22 to form a so-called unidirectional electrode that generates a surface acoustic wave w that propagates only in the x direction. The configuration of the unidirectional electrode is not limited to that shown in this embodiment.

  The shapes of the liquid film forming member 30 and the film forming gap G will be described. The liquid film forming member 30 is an elongated member, and is disposed close to the surface S with a surface facing the surface S of the vibrator 2 spaced apart from the surface S by a uniform distance g as shown in FIG. Has been. The opposing surfaces of the liquid film forming member 30 and the surface S and the space defined by the distance g form a film forming gap G. The liquid 4 is held in the film formation gap G by its surface tension, and is regulated to a thickness determined by the distance g, and is distributed in a film shape on the surface S. When the liquid held by the surface tension is consumed by atomization, the liquid is automatically replenished by the surface tension.

  By the way, the atomization by the surface acoustic wave w is performed by the droplets separating and flying from the surface of the liquid 4 by a so-called surface tension wave (capillary wave) propagating on the surface of the liquid 4. Therefore, if the film thickness of the liquid 4 is thick, the energy of the surface acoustic wave is attenuated before reaching the surface of the liquid 4 and cannot be atomized. Therefore, it is necessary to make the film thickness of the liquid as thin as possible. The film thickness can be optimized by adjusting the distance g described above.

  Moreover, since it does not atomize from the upper part of the film formation clearance gap G covered with the liquid film formation member 30, it can atomize efficiently and stably by reducing this part. This will be explained. The shape of the film forming gap G formed by the liquid film forming member 30 is such that the length a in the y direction is approximately the same as the width of the comb-shaped electrode 21 and the length b in the x direction is not more than 10 times the wavelength λ. Yes. That is, these lengths a and b satisfy the relationship b <a.

  By the film forming gap G having the shape as described above, the amount of the liquid 4 covered with the liquid film forming member 30 in the traveling direction x of the surface acoustic wave w is reduced, and the liquid 4 is effectively extended by thinly extending in the width direction y. Since the surface area can be increased, energy loss of the surface acoustic wave w can be suppressed, the supply amount of the liquid 4 can be reduced, and atomization into a large amount of fine particles can be efficiently performed.

  A means for supplying the liquid 4 to the film forming gap G will be described. Further, the liquid supply means 3 may be provided with a pump for sending a minute amount of the liquid 4 or may be a method utilizing a capillary phenomenon. When utilizing the capillary phenomenon, it is effective to make the liquid film forming member 30 a hydrophilic member or coat the surface of the liquid film forming member 30 with a hydrophilic thin film.

Moreover, the liquid derivation | leading-out member 32 shown to Fig.1 (a) (b) can be used as a very fine pipe.
The end portion of the liquid film forming member 30 is opened while facing the film forming gap G and the liquid 4 is supplied directly to the film forming gap G. The liquid 4 can be supplied to the film forming gap G through the gap. Further, when utilizing the capillary phenomenon, a fiber member or a porous member that guides the liquid 4 by the capillary phenomenon may be attached to a part of the liquid outlet member 32, particularly an end portion. It is effective for these members to be replaceable to maintain cleanliness.

  At least one or more points (liquid supply points) for supplying the liquid 4 to the film forming gap G are provided in a part of the film forming gap G formed by the liquid film forming member 30. The position may be the center or the end of the film forming gap G. If the length of the liquid film forming member 30 is made longer than the length a of the film forming gap G or the width of the comb-shaped electrode 21 and the liquid 4 is supplied from the end, the progress of the surface acoustic wave w is not hindered. , Do not disturb the atomization.

  According to the surface acoustic wave atomizing apparatus 1 including the liquid film forming member 30 that forms the film forming gap G as described above, the liquid 4 is distributed in the film forming gap G in a film shape and is held by the surface tension. Thus, the distance that the wavefront of the surface acoustic wave w interacts with the liquid 4 is longer than the distance that the surface acoustic wave w passes through the distributed liquid 4, and thus the atomization can be efficiently atomized over a wide area. it can. That is, the liquid film forming member 30 that forms a slender liquid distribution along the wavefront of the surface acoustic wave w can maintain the balance between the liquid supply amount and the atomization amount and suppress the presence of the liquid 4 that is not involved in the atomization. It is possible to stably spray a large amount of fine particles with less power consumption.

  Next, with reference to FIGS. 3A to 3G and FIGS. 4A and 4B, various types of liquid film forming members 30 used in the surface acoustic wave atomization device 1 of the first embodiment are described. A modification will be described. In the liquid film forming member 30 shown in these drawings, a film forming gap G is formed by the surface S of the vibrator 2 and the surface of the liquid film forming member 30 facing the surface S, and liquid is formed in the film forming gap G by surface tension. 4 is held. These liquid film forming members 30 are intended to widen the surface area from which the liquid 4 to be held is distributed thinly, and the surface area covered by the liquid film forming member 30 is suppressed, so that the droplets fly off. To do.

  Also, the liquid film forming member 30 shown in FIGS. 3A and 3B has a plurality of minute through holes 33 that open toward the surface S of the vibrator 2 as shown in FIGS. The hollow member is used to pass the liquid through the hollow portion and to supply the liquid from the minute through hole 33. With such a liquid film forming member 30, it is possible to supply the liquid easily and stably.

(Second Embodiment)
FIGS. 5A and 5B show a surface acoustic wave atomizer 1 according to the second embodiment, and FIGS. 6A and 6B show a modification of the surface acoustic wave atomizer 1. The surface acoustic wave atomization device 1 of the second embodiment is different from the surface acoustic wave atomization device 1 of the above-described embodiment in the planar structure with respect to the surface S of the liquid film forming member 30 and thus the film formation gap G. The other points are the same. That is, in the surface acoustic wave atomization apparatus 1, the liquid supply means 3 (see FIGS. 1A and 1B, the same applies hereinafter) supplies the liquid from the localized supply point P to the film formation gap G, and the liquid film The forming member 30 forms the film forming gap G so as to be located on the downstream side in the traveling direction of the surface acoustic wave w, that is, on the direction x side as the distance from the supply point P increases.

  The liquid film forming member 30 of the surface acoustic wave atomizing device 1 shown in FIGS. 5A and 5B has a linear shape in which a supply point P is disposed at an end, and is disposed obliquely with respect to the comb-shaped electrode 21. Has been. 6 (a) and 6 (b), the liquid film forming member 30 of the surface acoustic wave atomizing device 1 has a supply point P disposed at the center thereof and a shape bent upstream at the position of the supply point P. It has become. A film forming gap G is formed on the surface S of the vibrator 2 in accordance with the shape of the liquid film forming member 30.

  According to the surface acoustic wave atomization apparatus 1 as described above, the liquid supplied from the upstream side in the traveling direction of the surface acoustic wave w is transported downstream along the film formation gap G by the surface acoustic wave w. . This transportation is performed so that the liquid supply amount is automatically adjusted by the surface acoustic wave energy that was not used for atomization. Therefore, the balance between the liquid supply amount and the atomization amount is kept stable, and the liquid film has a thin range. A large amount of fine particles can be sprayed with less power consumption.

(Third embodiment)
FIGS. 7A, 7B, and 7C show the surface acoustic wave atomizer 1 according to the third embodiment, and FIGS. 8A, 8B, and 8C show the surface acoustic wave atomizer 1. FIG. A modification is shown. The surface acoustic wave atomization device 1 according to the third embodiment is different from the surface acoustic wave atomization device 1 according to the above-described embodiment in the three-dimensional structure of the liquid film forming member 30 and thus the film formation gap G with respect to the surface S. The other points are the same. That is, in the surface acoustic wave atomization apparatus 1, the liquid supply means 3 supplies liquid from the localized supply point P to the film forming gap G, and the liquid film forming member 30 narrows as the distance from the supply point P increases. The film formation gap G is formed so as to be.

  The liquid film forming member 30 of the surface acoustic wave atomizing device 1 shown in FIGS. 7A, 7B, and 7C has an outer shape in which the supply point P is arranged at the end, and has a linear shape. The gap is enlarged at the supply point P. Moreover, the liquid film formation member 30 of the surface acoustic wave atomization apparatus 1 shown to Fig.8 (a) (b) (c) is the liquid film formation member 30 shown to Fig.7 (a) (b) (c). Further, like the liquid film forming member 30 of the above-described second embodiment, the liquid film forming member 30 is disposed obliquely with respect to the comb-shaped electrode 21.

  According to the surface acoustic wave atomization apparatus 1 as described above, the liquid supplied to the supply point P can be transported to a part away from the supply point P by the surface tension and the capillary phenomenon. A means for forcibly feeding the supply becomes unnecessary, and the thin area of the liquid film can be widened with a compact structure to efficiently atomize a large amount.

(Fourth embodiment)
FIGS. 9A and 9B show a surface acoustic wave atomization apparatus 1 according to the fourth embodiment, and FIGS. 10A and 10B show the surface acoustic wave atomization. The modification of the apparatus 1 is shown. These surface acoustic wave atomization apparatuses 1 include gap changing means (not shown) that changes the relative position of the liquid film forming member 30 with the surface S of the vibrator 2 to change the spatial shape of the film forming gap G. This point is different from the surface acoustic wave atomizer 1 of the first embodiment described above, and the other points are the same.

  The gap changing means described above changes the spatial shape of the film forming gap G, that is, the arrangement with respect to the surface S and the volume of the film forming gap G, thereby changing the amount, thickness, surface area, etc. of the liquid held in the film forming gap G. Change the atomization amount by changing.

  The liquid film forming member 30 shown in FIGS. 9 (a) and 9 (b) has a different distance from the surface S, and the liquid shown in FIGS. 10 (a), 10 (b), 11 (a) and 11 (b). The film forming member 30 has a planar arrangement with respect to the surface S, and thus the degree of parallelism with the comb-shaped electrode 21 is changed.

  According to the surface acoustic wave atomization apparatus 1 as described above, the atomization amount can be easily adjusted without changing the power supply voltage value for generating the surface acoustic wave w. In general, there is a method for increasing the amplitude of a surface acoustic wave as a method for adjusting the atomization amount. The amplitude is adjusted by adjusting the voltage of the input power supply to the comb electrode. However, if the voltage is increased too much, heat may accumulate in the piezoelectric material and the vibrator 2 may break. In addition, it is difficult to finely adjust the atomization amount by adjusting the amplitude.

  In the surface acoustic wave atomization apparatus 1 of the present embodiment, by changing the position and orientation of the liquid film forming member 30, the liquid is spread thinly to increase the amount of atomization, or conversely, to decrease the amount finely. The amount can be adjusted. Further, by adjusting the position and posture of the liquid film forming member 30 during atomization, it is possible to change the heat generation location on the surface S, so that it is possible to avoid breaking the vibrator 2 due to heat localization. .

(Fifth embodiment)
12 (a) and 12 (b) show a surface acoustic wave atomizer 1 according to a fifth embodiment, FIG. 13 shows a main part of the surface acoustic wave atomizer 1, and FIG. 14 shows the surface acoustic wave fog. The modification of the chemical-ized apparatus 1 is shown. The surface acoustic wave atomization device 1 according to the fifth embodiment is the same as the surface acoustic wave atomization device 1 according to the first embodiment described above, but includes a plurality of liquid film forming members 30 and thus a plurality of film formation gaps G. There are other points. That is, in the surface acoustic wave atomization apparatus 1, two liquid film forming members 30 are provided along the surface acoustic wave traveling direction x. The liquid 4 is supplied to the upstream liquid film forming member 30 in the surface acoustic wave traveling direction x, and the liquid 4 transported by the surface acoustic wave without being atomized by the upstream liquid film forming member 30 is downstream. It is supplied to the liquid film forming member 30 on the side.

  In the surface acoustic wave atomization device 1 shown in FIG. 14, the gap g2 between the liquid film forming member 30 on the downstream side and the surface S is narrower than the gap g1 between the liquid film forming member 30 on the upstream side and the surface S. , G2 <g1. With such a configuration, the downstream liquid film forming member 30 can easily capture less liquid.

  According to the surface acoustic wave atomization apparatus 1 as described above, a large amount of atomization can be performed with a compact structure without providing a new liquid supply point. Further, since the surface acoustic wave w that has not been consumed in the upstream liquid film forming member 30 portion can be used in the downstream liquid film forming member 30 portion or in the course of transporting the liquid 4, atomization can be performed efficiently. Two or more liquid film forming members 30 can be provided.

(Sixth embodiment)
FIGS. 15A and 15B show a surface acoustic wave atomizer 1 according to the sixth embodiment, and FIG. 16 shows a main part of the surface acoustic wave atomizer 1. The surface acoustic wave atomization device 1 of the sixth embodiment is such that the comb-shaped electrodes 21 are provided on both sides of the liquid film forming member 30 in the surface acoustic wave atomization device 1 of the first embodiment described above. The other points are the same. That is, in the surface acoustic wave atomization apparatus 1, the vibrator 2 includes two comb-shaped electrodes 21 that are formed so as to be spaced apart from each other on the surface line of the surface acoustic wave (the x-axis direction in FIG. 15A). The liquid film forming member 30 is provided between the comb-shaped electrodes 21A and 21B, and the liquid 4 supplied to the film-forming gap G is supplied from the comb-shaped electrodes 21A and 21B on both sides (in the x1 and x2 directions). Atomized by surface acoustic waves w1, w2 (from).

  According to the surface acoustic wave atomization apparatus 1 as described above, the liquid 4 can be atomized by the surface acoustic waves propagating from both sides of one liquid film forming member 30, so that it is more powerful than the case from only one side. It can be atomized in large quantities.

(Seventh embodiment)
FIGS. 17A and 17B show a surface acoustic wave atomizer 1 according to the seventh embodiment, and FIG. 18 shows a main part of the surface acoustic wave atomizer 1. The surface acoustic wave atomization device 1 of the seventh embodiment is provided with a plurality of liquid film forming members 30 in the surface acoustic wave atomization device 1 of the sixth embodiment described above, and the other points are the same. It is. That is, in the surface acoustic wave atomization apparatus 1, two liquid film forming members 30 are provided between the comb-shaped electrodes 21 </ b> A and 21 </ b> B. Supply.

  According to the surface acoustic wave atomization device 1 as described above, the liquid 4 absorbs the energy of the surface acoustic waves w1 and w2 and atomizes the liquid film forming member 30 and the surface region between the members. Therefore, the liquid 4 can be atomized stably and efficiently without wasting energy and liquid.

  In FIG. 18, the surface acoustic wave w1 traveling in the x1 direction from the left atomizes the liquid 4 supplied to the liquid film forming member 30 on the left side. The surface acoustic wave w2 traveling in the x2 direction from the right atomizes the liquid 4 supplied to the liquid film forming member 30 on the right side. When the amount of the liquid 4 supplied to the left and right liquid film forming members 30 is excessive, the larger liquid 4 is separated and transported toward the smaller liquid film forming member 30. In this way, the liquid 4 automatically moves to balance the amount of liquid, and the separated liquid 4 is atomized during movement, so that it can be atomized stably and efficiently.

(Eighth embodiment)
FIGS. 19A and 19B show a surface acoustic wave atomizer 1 according to the eighth embodiment, and FIGS. 20A to 20G are liquid film forming members used in the surface acoustic wave atomizer 1. 30 modification examples are shown. The surface acoustic wave atomization device 1 according to the eighth embodiment is obtained by integrating the liquid film forming member 30 in the surface acoustic wave atomization device 1 according to the seventh embodiment described above. It is the same. Other examples of the integrated liquid film forming member 30 include those shown in FIGS.

  According to the surface acoustic wave atomization apparatus 1 as described above, the liquid film forming member 30, and thus the film forming gap G, can be connected on the surface S of the vibrator 2. The liquid can be spread and a larger amount of atomization can be achieved. Further, the number of parts of the liquid film forming member 30 can be reduced.

(Ninth embodiment)
FIG. 21 shows a surface acoustic wave atomizer 1 according to a ninth embodiment. The surface acoustic wave atomization device 1 of the ninth embodiment is provided with a plurality of comb-shaped electrodes 21 so as to surround the liquid film forming member 30, and the other points are the elastic surfaces of the above-described eighth embodiment. This is similar to the wave atomizer 1 and the like.

  The vibrator 2 in the surface acoustic wave atomization apparatus 1 shown in FIG. 21 includes two sets, that is, a pair of comb-shaped electrodes 21A and 21C and a pair of comb-shaped electrodes 21B and 21D, with different surface acoustic wave traveling directions. Yes. That is, the comb electrodes 21A, 21B, 21C, and 21D generate surface acoustic waves w1, w4, w2, and w3 that travel in the x1, y2, x2, and y1 directions, respectively. These surface acoustic waves w 1, w 4, w 2, and w 3 travel toward a film formation gap G (not shown) by the liquid film forming member 30 provided in the central portion of the vibrator 2.

  The liquid film forming member 30 has a spiral integrated shape, and the film forming gap G formed in the lower part thereof is also formed in the same shape. By providing a liquid supply point P (not shown) at a position facing each of the comb electrodes 21A to 21D in the liquid film forming member 30, the liquid is atomized at each liquid film forming member 30 portion. The liquid that has not been atomized at the outer peripheral portion of the liquid film forming member 30 is transported to the central portion side of the spiral liquid film forming member 30 and atomized by the surface acoustic waves w1 to w4.

  According to the surface acoustic wave atomization apparatus 1 as described above, since the surface acoustic waves w1 to w4 can be fed from the surroundings to the liquid 4 distributed in a film shape, compact and powerful atomization is possible. It becomes.

  FIG. 22 shows a modification of the surface acoustic wave atomizer 1 described above. This surface acoustic wave atomizing device 1 rotates the liquid film forming member 30 in the surface acoustic wave atomizing device 1 of FIG. 21, and obliquely arranges the liquid film forming member 30 portion facing each of the comb-shaped electrodes 21A to 21D. Thus, the liquid transport effect by the surface acoustic wave in the second embodiment shown in FIG. 5A is incorporated. According to this configuration, when the liquid supply point P is provided at the outermost end of the liquid film forming member 30 and the liquid is supplied from here, the liquid flows along the liquid film forming member 30 as indicated by an arrow R. Transported.

(Tenth embodiment)
FIG. 23 shows a surface acoustic wave atomizer 1 according to a tenth embodiment. In the surface acoustic wave atomization device 1 of the tenth embodiment, the comb-shaped electrodes 21A to 21D in the surface acoustic wave atomization device 1 of the ninth embodiment described above are connected to the central axis (liquid film formation) in the vibrator 2. The central axis of the member 30 is removed, the liquid film forming member 30 is substantially square, and the liquid supply point P is arranged at the corner of the liquid film forming member 30. This is the same as the surface acoustic wave atomization device 1 of the embodiment.

  This surface acoustic wave atomization apparatus 1 is configured by shifting comb electrodes 21A and 21C and comb electrodes 21B and 21D, which are opposed to each other, in opposite directions along the width direction orthogonal to the traveling direction of the surface acoustic waves. As a whole, a surface acoustic wave is spirally sent from the periphery to the liquid distributed in a film shape by the liquid film forming member 30 at the center. According to this configuration, the liquid supplied from one supply point P can be circulated around the liquid film forming member 30 and spread. That is, in this configuration, the surface acoustic wave atomization apparatus 1 shown in FIG. 22 circulates the liquid by the spiral liquid film forming member 30, but circulates by the surface acoustic waves distributed in a spiral shape. It is something to be made.

  The above-described circulation is performed as follows. For example, the surface acoustic wave traveling in the x1 direction from the comb-shaped electrode 21A atomizes the liquid held on the opposite side 3a of the liquid film forming member 30, and the liquid held on the side 3b along the side 3b. Transport in x1 direction. Further, the surface acoustic wave traveling in the y2 direction from the comb-shaped electrode 21B atomizes the liquid held on the opposite side 3b of the liquid film forming member 30, and the liquid held on the side 3c along the side 3c. Transport in y2 direction. Similarly, the liquid held in the liquid film forming member 30 circulates along the liquid film forming member 30 as indicated by an arrow R.

  According to the surface acoustic wave atomization apparatus 1 as described above, surface acoustic waves can be spirally sent from the surroundings to the liquid distributed in a film shape, and the liquid is moved along the liquid film forming member 30. In addition, the liquid can be atomized while being spilled, and the remaining liquid that is not atomized can be circulated and transported, and the liquid can be atomized during transport. Can be

  The present invention is not limited to the above-described configuration, and various modifications can be made. For example, since the vibrator 2 may be a substrate having a piezoelectric body portion on which a surface acoustic wave is excited on its surface, the surface shape may be a cylindrical surface or a more general curved surface in addition to a plane. It can be a shape. Further, since the liquid for atomization can be held in the film forming gap G by surface tension, it is not necessary to keep the film forming gap G horizontal, and liquid particles are desorbed and ejected from any shape surface to be atomized. be able to. Therefore, the surface acoustic wave atomizer 1 including the vibrator 2 that atomizes from the inner surface and the outer surface of the vertical cylinder may be used.

  Alternatively, the surface S of the vibrator 2 that spreads the liquid film may be subjected to a hydrophilic treatment to form a thinner liquid film to increase the atomization efficiency. Further, when a plurality of comb-shaped electrodes 21 are used, they may be operated at high power while avoiding concentration of heat load by operating or stopping them alternately or sequentially. Circulation may be performed efficiently. Further, in the case where the plurality of comb electrodes 21 described above are used, an example in which an electric circuit 23 for applying a high-frequency voltage is connected to each of the comb electrodes 21A, 21B, etc. is shown. can do.

(A) is a top view of the surface acoustic wave atomization apparatus which concerns on the 1st Embodiment of this invention, (b) is the same side view. The principal part sectional drawing containing the liquid film formation member of a surface acoustic wave atomization apparatus same as the above. (A)-(g) is principal part sectional drawing which shows the various modifications of the liquid film formation member in a surface acoustic wave atomization apparatus same as the above. (A) is a principal part longitudinal cross-sectional view which shows the other modification of the liquid film formation member in a surface acoustic wave atomization apparatus same as the above, (b) is the cross-sectional view. (A) is a top view of the surface acoustic wave atomization apparatus which concerns on 2nd Embodiment, (b) is the same side view. (A) is a top view which shows the modification of a surface acoustic wave atomizer same as the above, (b) is the side view. (A) is a top view of the surface acoustic wave atomization apparatus which concerns on 3rd Embodiment, (b) is the side view, (c) is the front view. (A) is a top view which shows the modification of a surface acoustic wave atomizer same as the above, (b) is the side view, (c) is the front view. (A) is a top view of the surface acoustic wave atomization apparatus which concerns on 4th Embodiment, (b) is the same side view. (A) is a top view which shows the modification of a surface acoustic wave atomizer same as the above, (b) is the side view. (A) is a top view which shows the other modification of a surface acoustic wave atomizer same as the above, (b) is the side view. (A) is a top view of the surface acoustic wave atomization apparatus which concerns on 5th Embodiment, (b) is the same side view. The principal part sectional drawing containing the liquid film formation member of a surface acoustic wave atomization apparatus same as the above. The side view which shows the modification of a surface acoustic wave atomization apparatus same as the above. (A) is a top view of the surface acoustic wave atomization apparatus which concerns on 6th Embodiment, (b) is the same side view. The principal part sectional drawing containing the liquid film formation member of a surface acoustic wave atomization apparatus same as the above. (A) is a top view of the surface acoustic wave atomization apparatus which concerns on 7th Embodiment, (b) is the same side view. The principal part sectional drawing containing the liquid film formation member of a surface acoustic wave atomization apparatus same as the above. (A) is a top view of the surface acoustic wave atomization apparatus which concerns on 8th Embodiment, (b) is the same side view. (A)-(g) is a top view which shows the various modifications of the liquid film formation member of a surface acoustic wave atomization apparatus same as the above. The top view of the surface acoustic wave atomization apparatus which concerns on 9th Embodiment. The top view which shows the modification of a surface acoustic wave atomizer same as the above. The top view of the surface acoustic wave atomization apparatus which concerns on 10th Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Surface acoustic wave atomizer 2 Vibrator 3 Liquid supply means 4 Liquid 21,21A-21D Comb-shaped electrode 30 Film formation member w, w1-w4 Surface acoustic wave G Film formation gap P Supply point S Surface

Claims (10)

A vibrator comprising a piezoelectric material having a pair of comb-shaped electrodes formed, and generating a surface acoustic wave by applying a high frequency voltage to the comb-shaped electrodes; and a liquid supply means for supplying a liquid to the surface of the vibrator; In the surface acoustic wave atomization device that atomizes the liquid supplied to the surface of the vibrator by the liquid supply means by the surface acoustic wave generated on the surface,
The liquid supply means includes a liquid film forming member that is disposed to face the surface of the vibrator and forms a film formation gap for distributing the supply liquid in a film shape on the surface of the vibrator.
The shape of the film forming gap of the liquid film forming member is shorter than the length in the width direction perpendicular to the direction of travel of the surface acoustic wave generated on the surface of the vibrator. A surface acoustic wave atomization device characterized by being formed.   The liquid supply means supplies liquid from the localized supply point to the film forming gap, and the liquid film forming member is positioned on the downstream side in the traveling direction of the surface acoustic wave as the distance from the supply point increases. The surface acoustic wave atomization device according to claim 1, wherein a formation gap is formed.   The liquid supply means supplies liquid to the film formation gap from a localized supply point, and the liquid film formation member forms the film formation gap so that the gap becomes narrower as the distance from the supply point increases. The surface acoustic wave atomizer according to claim 1.   The liquid film forming member adjusts an atomization amount by changing a shape of the film forming gap by changing a relative position with respect to a surface of the vibrator. The surface acoustic wave atomization apparatus as described in any one of Claims.   The liquid film forming member is provided in a plurality along the surface acoustic wave traveling direction, and the liquid supply means supplies the liquid to the liquid film forming member on the upstream side in the surface acoustic wave traveling direction. 2. The surface acoustic wave atomization device according to claim 1, wherein the liquid which is not atomized by the liquid film forming member and is conveyed by the surface acoustic wave is supplied to the downstream film forming member.   The vibrator includes two pairs of the comb-shaped electrodes that are formed to be spaced apart from each other on a traveling direction line of the surface acoustic wave, and the liquid film forming member is provided between the two pairs of the comb-shaped electrodes. 5. The surface acoustic wave atomizer according to claim 1, wherein the liquid supplied to the film forming gap is atomized by surface acoustic waves from comb electrodes on both sides. 6. .   The liquid film forming member is provided in plural between two pairs of the comb-shaped electrodes, and the liquid supply means supplies liquid to a film forming gap formed by the plurality of liquid film forming members. The surface acoustic wave atomization apparatus as described.   The surface acoustic wave atomization device according to claim 7, wherein the plurality of liquid film forming members are integrally formed.   9. The surface acoustic wave atomization device according to claim 8, wherein the vibrator includes a plurality of pairs each including two pairs of the comb-shaped electrodes with different surface acoustic wave traveling directions.   10. The surface acoustic wave atomization device according to claim 9, wherein the pair of comb-shaped electrodes forming a pair with each other is formed to be shifted in opposite directions along a width direction orthogonal to a traveling direction of the surface acoustic wave.

Images