JP2008102487A - Optical scanning device and image forming apparatus having the same - Google Patents

Abstract

An optical scanning apparatus capable of forming a good quality image by adjusting the incident position of a light beam on a light deflecting surface in the main scanning direction to make the beam spot diameter uniform over the entire surface to be scanned. A forming apparatus is provided.
A laser writing unit includes a light source device and an imaging optical system. The light source device 31 includes an adjustment screw 56 and an adjustment screw hole 69 for adjusting the direction of the light beam 59 from the light source unit 48 as a light source unit, and the light beam 59 is deflected by a deflection surface 95 to be on the surface to be scanned. And a vibrating mirror 85 for reciprocating scanning in the main scanning direction X. The adjustment screw 56 and the adjustment screw hole 69 are provided in the light source unit 48, and the deflection surface 95 of the light beam 59 from the semiconductor laser 51 of the light source unit 48 is adjusted by adjusting the direction of the light source unit 48 in the main scanning direction X. The irradiation position can be adjusted in the main scanning direction X, and the light beam 59 can be irradiated to the center of the deflection surface 95.
[Selection] Figure 9

Description

  The present invention relates to an optical scanning device used in an image forming apparatus such as a digital copying machine, a facsimile machine, and a laser printer.

  In an image forming apparatus such as a digital copying machine, a facsimile, or a laser printer, various optical scanning devices are used to scan a light beam on a photosensitive member. In a conventionally used optical scanning device, a polygon mirror or a carbano mirror has been used as a deflector for deflecting a light beam from a light source. However, in order to form a higher resolution image in a short time, it is necessary to rotate these polygon mirrors and carbano mirrors at a higher speed. Due to the durability of the bearings that rotatably support the polygon mirror and the carbano mirror described above, heat generation and noise during rotation, there are limits to the rotation of the polygon mirror and the carbano mirror at a higher speed.

  For this reason, in recent years, deflectors using silicon micromachining (see, for example, Patent Documents 1 to 3) have been proposed as deflectors used in the above-described optical scanning device. This type of deflector is shown in FIG. As shown in FIG. 15, in this deflector 501, a vibrating mirror 502 whose surface forms a deflection surface 502 a and a torsion beam 503 that pivotally supports the vibrating mirror 502 are integrally formed. According to the deflector 501, the size of the oscillating mirror 502 can be reduced to reduce the size, and the oscillating mirror 502 is reciprocally oscillated using the resonance of the oscillating mirror 502. Despite being able to operate, there are advantages of low noise and low power consumption.

In addition, the housing that houses the optical scanning device can be thinned due to low vibration and little heat generation. Even if the housing is made of a low-cost resin molding material with a low glass fiber content, image quality can be improved. There is also an advantage that it is difficult to cause the influence of. In particular, Patent Document 3 discloses an example in which the deflector 501 described above is used instead of a polygon mirror. By using a vibrating mirror instead of a polygon mirror, it is possible to reduce noise and power consumption, and an image forming apparatus that is suitable for the office environment and the global environment has been proposed.
Japanese Patent No. 2924200 Japanese Patent No. 30111144 JP 2002-82303 A

  However, when the vibration mirror 502 described above is driven, dynamic surface deformation caused by the moment of inertia and the restoring force of the vibration mirror 502 occurs as described below.

  If the dimensions of the vibrating mirror 502 shown in FIG. 15 are vertical 2a, horizontal 2b, thickness d, the length of the torsion beam 503 is L, width c, and the density ρ of Si and the material constant G are vibrations The moment of inertia I of the mirror 502 is expressed by the following formula 1.

Moment of inertia I = (4abρd / 3) × a ² Formula 1

  As shown in Equation 1 above, the local moment of inertia I of the oscillating mirror 502 is a function of the distance from the rotation axis of the oscillating mirror 502, and the moment of inertia increases as the distance from the rotation axis increases. I understand. Further, since the thickness of the vibrating mirror 502 itself is as thin as several hundred μm, the position of the vibrating mirror 502 in the vicinity of the torsion beam 503 and the torsion are caused by the change in the rotational speed due to the reciprocating vibration and the inertial force applied to the vibrating mirror 502. A force acts in the opposite direction at the end away from the beam 503, and the oscillating mirror 502 undulates and deforms as shown in FIG. Accordingly, the wavefront aberration of the light beam reflected by the vibrating mirror 502 is increased, and the light beam is thickened.

FIG. 16 shows a deformed state of a simple plate-like vibrating mirror 502. In FIG. 16, simultaneously with the deterioration of the wavefront aberration of the light beam, the incident position shifts in the direction perpendicular to the torsion beam 503 (main scanning direction) as indicated by the broken line. In this case, since the apparent curvature is different, a shift (focus shift) occurs in the imaging position of the light beam. In particular, when the above-described light beam is converged on the edge of the oscillating mirror 502 as shown in FIG. 17 due to an assembly error such as a deflector or a light source, the light beam at the imaging position becomes thick (see FIG. 17 (b)), and a focus shift (see FIG. 17 (a)) occurs.

  Then, the light beam converged on the edge of the vibrating mirror 502 becomes a condensed light beam (see FIG. 17A) or a divergent light beam (see FIG. 17B) in the main scanning direction. The light beam cannot be uniformly condensed at the imaging position, and therefore a desired beam spot diameter cannot be obtained. Therefore, conventionally, the light beam cannot be collected over the entire surface to be scanned, and the beam spot diameter cannot be kept uniform, resulting in image degradation. there were.

  The present invention has been made in view of the above circumstances, and by adjusting the incident position of the light beam on the light deflection surface in the main scanning direction to make the beam spot diameter uniform over the entire surface to be scanned, An object of the present invention is to provide an optical scanning apparatus and an image forming apparatus capable of forming an image of good quality.

  In order to achieve the object, the invention described in claim 1 includes a light source unit that emits a light beam, and a line image formation that forms a line image by condensing the light beam from the light source unit only in one direction. A lens, a light deflector that deflects the light beam that has passed through the line image forming lens, and an imaging optical system that focuses the light beam deflected by the light deflector on the surface to be scanned in a spot shape And an adjusting means for adjusting a position at which the light beam from the light source unit is irradiated on the light deflecting unit.

  According to a second aspect of the present invention, in the invention according to the first aspect, the adjusting means adjusts the direction of the light beam from the light source unit in the main scanning direction of the light deflecting unit. It is characterized by being.

  According to a third aspect of the present invention, in the first aspect of the present invention, the adjustment unit determines an irradiation position of the light beam from the light source unit to the light deflection unit in a main scanning direction of the light deflection unit. It is the position adjustment means to adjust in 1. It is characterized by the above-mentioned.

  According to a fourth aspect of the present invention, in the first aspect of the invention, the adjustment unit is an optical deflection unit adjustment unit that adjusts a position and an inclination of the optical deflection unit in a main scanning direction of the optical deflection unit. It is characterized by being.

  According to a fifth aspect of the present invention, in the first aspect of the present invention, the adjustment unit is disposed between the light source unit and the light deflection unit, and the light beam from the light source unit The present invention is characterized in that it includes at least a diaphragm provided with an opening for restricting the beam width.

  According to a sixth aspect of the present invention, in the fifth aspect of the present invention, the diaphragm section includes a diaphragm section adjusting unit that adjusts the position and inclination of the diaphragm section in the main scanning direction of the light deflection section. It is characterized by that.

  According to a seventh aspect of the invention, in the invention of the fifth or sixth aspect, the diaphragm portion is arranged in the vicinity of the light deflection portion between the light source portion and the light deflection portion. It is characterized by being.

  According to an eighth aspect of the present invention, in the invention according to any one of the fifth to seventh aspects, the diaphragm portion is disposed between the line image forming lens and the light deflection portion. It is characterized by that.

  According to a ninth aspect of the present invention, in the invention according to any one of the fifth to eighth aspects, the opening is smaller than a width of the light deflection unit in a scanning direction of the light deflection unit. It is characterized by being formed large.

  According to a tenth aspect of the present invention, in the invention according to any one of the first to eighth aspects, the light deflection unit includes a frame body and a torsion in which one end is connected to an inner edge of the frame body. A vibrating mirror having a beam and a deflection surface that is connected to the other end of the torsion beam and is capable of deflecting the light beam from the light source unit and is rotatable about the torsion beam. To do.

  The invention described in claim 11 is a light source unit that emits a light beam, a coupling lens that converts the light beam from the light source unit into a predetermined convergence state, and the light beam that has passed through the coupling lens. In the optical scanning device, comprising: an oscillating mirror unit that deflects by sine oscillation; and an imaging optical unit that forms an image of the light beam deflected by the oscillating mirror unit in a spot shape on a surface to be scanned; Adjusting means for adjusting the position of the light beam from which the light beam is irradiated to the vibrating mirror portion, and the adjusting means causes the center of the light beam to be irradiated on a substantially rotation axis of the vibrating mirror portion. It is what.

  According to a twelfth aspect of the present invention, in the invention according to the eleventh aspect, the adjusting unit is an orientation adjusting unit that adjusts the direction of the light beam from the light source unit in the main scanning direction of the vibrating mirror unit. It is characterized by being.

  The invention described in claim 13 is the invention according to claim 12, wherein the orientation adjusting means is means for adjusting the orientation of the light source section.

  The invention described in claim 14 is characterized in that, in the invention described in claim 12, the orientation adjusting means is means for adjusting the orientation of the coupling lens.

  According to a fifteenth aspect of the invention, in the twelfth aspect of the invention, the orientation adjusting means is a means for adjusting the orientation of a light source unit in which the light source unit and the coupling lens are integrated. It is a feature.

  The invention described in claim 16 is the invention according to claim 12, further comprising: a light source unit in which the light source unit and the coupling lens are integrated, and the light source unit includes the light beam from the light source unit. And a diaphragm provided with an opening for restricting the luminous flux width of the light source, and the orientation adjusting means is means for adjusting the orientation of the light source unit.

  According to a seventeenth aspect of the present invention, in the invention of the sixteenth aspect, the opening is formed larger than the width of the oscillating mirror part in the main scanning direction of the oscillating mirror part. To do.

  The invention described in claim 18 is the invention described in claim 16, further comprising light guide means for guiding a light beam to the oscillating mirror portion, wherein the orientation adjusting means determines the orientation of the light guide means. It is a means for adjusting.

  According to a nineteenth aspect of the present invention, in the twelfth aspect of the invention, the orientation adjusting means is a means for adjusting the orientation of the vibrating mirror portion.

  According to a twentieth aspect of the present invention, in the invention according to the eleventh aspect, the adjustment unit is configured to change an irradiation position of the vibration mirror unit of the light beam from the light source unit in a main scanning direction of the vibration mirror unit. It is the position adjustment means to adjust, It is characterized by the above-mentioned.

  The invention described in claim 21 is the invention described in claim 20, wherein the position adjusting means is means for adjusting the position of the light source section in the main scanning direction of the vibrating mirror section. Is.

  The invention described in claim 22 is characterized in that, in the invention described in claim 20, the position adjusting means adjusts the position of the coupling lens in the main scanning direction of the oscillating mirror section. To do.

  According to a twenty-third aspect of the present invention, in the twentieth aspect of the invention, the position adjusting unit determines the position of the light source unit in which the light source unit and the coupling lens are integrated, as a main scan of the vibrating mirror unit. It is a means for adjusting in the direction.

  According to a twenty-fourth aspect of the present invention, in the invention of the twentieth aspect, the light source section and the oscillating mirror section are arranged, and a light beam width of the light beam from the light source section is regulated. It further comprises a diaphragm provided with an opening, and the position adjusting means is means for adjusting the position of the diaphragm in the main scanning direction of the vibrating mirror.

  The invention described in claim 25 is the invention described in claim 20, wherein the position adjusting means regulates a light beam width of the light beam from the light source unit, the coupling lens, and the light source unit. It is a means for adjusting the position of the light source unit integrated with the diaphragm provided with the opening in the main scanning direction of the vibrating mirror.

  According to a twenty-sixth aspect of the invention, in the invention of the twenty-fourth aspect, the opening is formed larger than the width of the oscillating mirror portion in the main scanning direction of the oscillating mirror portion. To do.

  According to a twenty-seventh aspect of the invention, in the invention according to the twentieth aspect, the adjusting means is a means for adjusting the position of the oscillating mirror portion in the main scanning direction of the oscillating mirror portion. Is.

  According to a twenty-eighth aspect of the present invention, there is provided an image forming apparatus including at least a photosensitive member, a charging device, a developing device, and an optical scanning device. The optical scanning device according to any one of the above items is provided.

  As described above, according to the first aspect of the present invention, the adjusting means for adjusting the position of the light beam irradiated to the light deflection unit is provided, so that the light beam from the light source unit is deflected. The light beam can be guided to the center of the light deflection unit even if the incident position of the light beam on the light deflection unit is shifted due to mounting tolerances or processing tolerances. Therefore, the light beam can be reliably deflected by the light deflecting unit, and the light beam at the imaging position can be prevented from becoming thicker or out of focus, so that scattered light such as flare light caused by vignetting of the light beam can be prevented. Occurrence can be suppressed, and a high-quality image without deterioration in image quality such as background stains can be formed.

  According to the second aspect of the present invention, the adjusting means is a direction adjusting means for adjusting the direction of the light beam from the light source unit in the main scanning direction of the light deflecting unit. The light beam can be directed to the center in the main scanning direction of the light deflection unit even if mounting tolerances or processing tolerances occur, and thus the light beam can be directed to the center in the scanning direction. By deflecting light reliably at the light deflection section and preventing the light beam at the imaging position from becoming thicker or out of focus, the generation of scattered light such as flare light due to vignetting of the light beam can be suppressed, and soil contamination It is possible to form a high-quality image without image quality degradation.

  According to the invention described in claim 3, since the adjusting means is a position adjusting means for adjusting the irradiation position of the light beam from the light source section onto the light deflecting section in the main scanning direction of the light deflecting section. The beam can be reliably radiated to the center of the light deflection unit in the main scanning direction, so that the light beam can be reliably irradiated to the center of the light deflection unit in the main scanning direction even if mounting tolerances or processing tolerances occur. Therefore, the light beam can be reliably deflected by the light deflecting unit, and the light beam at the imaging position can be prevented from becoming thicker or out of focus. Thus, it is possible to suppress the generation of scattered light and the like and form a high-quality image without deterioration in image quality such as background contamination.

  According to the invention described in claim 4, since the adjusting means is a light deflecting part adjusting means for adjusting the position and inclination of the light deflecting part in the main scanning direction of the light deflecting part, the light beam is changed to the light deflecting part. The center of the main scanning direction in the main scanning direction can be reliably irradiated, so even if mounting tolerances or processing tolerances occur, the light beam can be reliably guided to the center of the light deflection unit in the main scanning direction. Therefore, the light beam can be reliably deflected by the light deflecting unit, and the light beam at the imaging position can be prevented from becoming thicker or out of focus, so that scattered light such as flare light caused by vignetting of the light beam can be prevented. Occurrence can be suppressed, and a high-quality image without deterioration in image quality such as background stains can be formed.

  According to the invention described in claim 5, since the adjusting means includes at least a diaphragm portion provided with an opening for restricting the light beam width of the light beam between the light source portion and the light deflecting portion. The incident position of the light beam in the main scanning direction X of the light deflection unit can be adjusted without affecting the imaging optical system closer to the surface to be scanned than the deflection unit, and the light beam of the light deflection unit can be adjusted. The light beam can be directed to the center in the main scanning direction of the light deflecting unit even if there is a mounting tolerance or a processing tolerance. It is possible to reliably deflect the beam at the center of the light deflection unit.

  According to the sixth aspect of the present invention, the diaphragm unit has diaphragm unit adjusting means for adjusting the position and inclination of the diaphragm unit in the main scanning direction of the light deflection unit. Therefore, the light beam can be reliably guided to the center of the light deflection unit in the main scanning direction even if there is a mounting tolerance or processing tolerance. Therefore, the light beam can be more reliably deflected at the center of the light deflection unit.

  According to the seventh aspect of the present invention, since the diaphragm portion is disposed between the light source portion and the light deflection portion in the vicinity of the light deflection portion, the light deflection portion to the light deflection portion of the light beam. The deviation of the irradiation position in the main scanning direction can be reduced, so that the center of the light deflection unit in the main scanning direction can be surely irradiated, so that there is a mounting tolerance and a processing tolerance. In this case, the light beam can be reliably guided to the center of the light deflection unit in the main scanning direction, and the light beam can be reliably deflected at the center of the light deflection unit.

  According to the eighth aspect of the present invention, since the stop is disposed between the line image forming lens and the light deflection unit, the light deflection unit in the main scanning direction of the light deflection unit is directed to the light deflection unit. Displacement of the irradiation position can be reduced, so that the light beam can be reliably irradiated to the center in the main scanning direction of the light deflecting unit, so that even if mounting tolerance, processing tolerance, etc. occur, The light beam can be reliably guided to the center of the light deflection unit in the main scanning direction, and the light beam can be reliably deflected at the center of the light deflection unit.

  According to the ninth aspect of the invention, since the opening is formed larger than the width of the light deflection unit in the main scanning direction of the light deflection unit, the beam width of the light beam incident on the light deflection unit is reduced. The width of the light deflection unit in the scanning direction can be larger than the width of the light deflection unit. For this purpose, the light beam is irradiated on the entire main scanning direction of the light deflection unit, and the light beam is surely centered in the main scanning direction of the light deflection unit. Therefore, it is possible to reliably deflect the light beam at the center of the light deflection unit.

  According to the invention described in claim 10, the light changing surface includes a frame, a torsion beam having one end connected to the inner edge of the frame, and a light beam from the light source unit connected to the other end of the torsion beam. The oscillating mirror has a deflecting surface that can be deflected and is rotatable about the torsion beam. Therefore, the deflecting surface is rotated about the torsion beam so that the light beam from the light source unit is deflected by the deflecting surface. Therefore, it can be reciprocally scanned in the main scanning direction on the surface to be scanned, so that high speed operation is possible, noise and power consumption can be reduced, and it is suitable for the office environment and the earth. The optical scanning device can be adapted to the environment.

  According to the eleventh aspect of the invention, since the adjusting means for adjusting the position of the light beam irradiated on the vibrating mirror unit is provided, the center of the vibrating mirror unit is irradiated with the light beam from the light source unit. For this reason, even if there is a mounting tolerance, a processing tolerance, etc., and the incident position of the light beam on the oscillating mirror part is deviated, the light beam can be guided to the center of the oscillating mirror part. Stable vibration can be deflected by the oscillating mirror, and the generation of scattered light such as flare due to vignetting of the light beam can be suppressed by preventing the light beam at the imaging position from becoming thick or out of focus. In addition, it is possible to form a high-quality image without deterioration in image quality such as background stains.

  According to the twelfth aspect of the invention, the adjusting means is a direction adjusting means for adjusting the direction of the light beam from the light source section toward the vibrating mirror section in the main scanning direction of the vibrating mirror section. The center of the mirror in the main scanning direction can be reliably irradiated, so that the light beam can be reliably guided to the center of the oscillating mirror in the main scanning direction even if mounting tolerances or processing tolerances occur. Therefore, the light beam can be reliably deflected by the oscillating mirror unit, and the light beam at the imaging position can be prevented from becoming thicker or out of focus, so that it is possible to scatter flare light or the like due to vignetting of the light beam. Generation of light can be suppressed, and a high-quality image without deterioration in image quality such as background stains can be formed.

  According to the invention described in claim 13, since the direction adjusting means is means for adjusting the direction of the light source unit, the light beam of the light source unit is surely irradiated to the center of the vibrating mirror unit in the main scanning direction. Therefore, even if mounting tolerances or machining tolerances occur, the light beam can be reliably guided to the center of the vibrating mirror unit in the main scanning direction. By deflecting and preventing the light beam at the imaging position from becoming thicker or out of focus, the generation of scattered light such as flare light due to vignetting of the light beam is suppressed, and deterioration of image quality such as dirt is reduced. A high quality image can be formed.

  According to the fourteenth aspect of the invention, since the direction adjusting means is means for adjusting the direction of the coupling lens, the light beam passed through the coupling lens from the light source section is subjected to main scanning of the vibration mirror section. It is possible to reliably irradiate the center of the direction, so even if mounting tolerances or processing tolerances occur, the light beam can be reliably guided to the center of the vibration mirror unit in the main scanning direction, The light beam can be reliably deflected by the oscillating mirror, and the generation of scattered light such as flare due to vignetting of the light beam can be suppressed by preventing the light beam at the imaging position from becoming thick or out of focus. In addition, it is possible to form a high-quality image without deterioration in image quality such as background stains.

  According to the fifteenth aspect of the present invention, since the direction adjusting means is means for adjusting the direction of the light source unit in which the light source unit and the coupling lens are integrated, the light beam from the light source unit is transmitted to the vibrating mirror unit. The center of the main scanning direction can be reliably irradiated, so even if mounting tolerances or processing tolerances occur, the light beam can be reliably guided to the center of the vibrating mirror unit in the main scanning direction. Therefore, the light beam can be reliably deflected by the oscillating mirror, and the light beam at the imaging position can be prevented from becoming thicker or out of focus, thereby generating scattered light such as flare light due to vignetting of the light beam. And a high-quality image without deterioration of image quality such as background stains can be formed.

  According to the invention described in claim 16, the direction adjusting means is means for adjusting the direction of the light source unit, and the light source unit further includes an opening for regulating a light beam width of the light beam from the light source section. Since the provided stop is provided, the incident position of the light beam in the main scanning direction X of the vibrating mirror can be adjusted without affecting the imaging optical system closer to the scanning surface than the vibrating mirror. It is also possible to irradiate the center of the oscillating mirror unit with the light beam in the main scanning direction. Therefore, even if mounting tolerances or processing tolerances occur, the light beam is scanned in the main scanning direction of the oscillating mirror unit. Therefore, the light beam can be reliably deflected at the center of the vibrating mirror portion.

  According to the invention described in claim 17, since the opening is formed larger than the width of the vibrating mirror in the main scanning direction of the vibrating mirror, the light beam width of the light beam incident on the vibrating mirror is reduced. The width of the oscillating mirror can be made larger than the width of the oscillating mirror in the scanning direction. For this reason, the light beam is irradiated on the entire main scanning direction of the oscillating mirror so that the light beam is reliably centered in the main scanning direction of the oscillating mirror. Therefore, the light beam can be reliably deflected at the center of the vibrating mirror portion.

  According to the invention described in claim 18, since the direction adjusting means is a means for adjusting the direction of the light guiding means for guiding the light beam to the oscillating mirror portion, the light guiding means is passed from the light source portion. The light beam can be reliably irradiated to the center of the vibration mirror unit in the main scanning direction. Therefore, even if mounting tolerances or processing tolerances occur, the light beam is centered in the main scanning direction of the vibration mirror unit. Therefore, the light beam can be reliably deflected by the oscillating mirror, and the light beam at the imaging position can be prevented from becoming thicker or out of focus. Generation of scattered light such as light can be suppressed, and a high-quality image without deterioration in image quality such as background stains can be formed.

  According to the nineteenth aspect of the present invention, since the direction adjusting means is a means for adjusting the direction of the oscillating mirror unit, the light beam from the light source unit is reliably irradiated to the center in the main scanning direction of the oscillating mirror unit. For this reason, even if mounting tolerances or processing tolerances occur, the light beam can be reliably guided to the center in the main scanning direction of the oscillating mirror unit. By reliably deflecting and preventing the light beam at the imaging position from becoming thicker or out of focus, the generation of scattered light such as flare due to vignetting of the light beam is suppressed, and image quality such as scumming is reduced. A high-quality image without deterioration can be formed.

  According to the twentieth aspect of the invention, since the adjusting means is a position adjusting means for adjusting the irradiation position of the vibrating mirror portion of the light beam from the light source portion in the main scanning direction of the vibrating mirror portion. Can reliably irradiate the center of the oscillating mirror in the main scanning direction, so that the light beam can be reliably transmitted to the center of the oscillating mirror in the main scanning direction even if mounting tolerances or processing tolerances occur. Therefore, the light beam can be reliably deflected by the oscillating mirror, and the light beam at the imaging position can be prevented from becoming thicker or out of focus, thereby causing flare light due to vignetting of the light beam, etc. Generation of scattered light can be suppressed, and a high-quality image without deterioration of image quality such as background stains can be formed.

  According to the twenty-first aspect of the present invention, since the position adjusting unit is a unit that adjusts the position of the light source unit in the main scanning direction of the vibrating mirror unit, the light beam from the light source unit is subjected to the main scanning of the vibrating mirror unit. It is possible to reliably irradiate the center of the direction, so even if mounting tolerances or processing tolerances occur, the light beam can be reliably guided to the center of the vibration mirror unit in the main scanning direction, The light beam can be reliably deflected by the oscillating mirror, and the generation of scattered light such as flare due to vignetting of the light beam can be suppressed by preventing the light beam at the imaging position from becoming thick or out of focus. In addition, it is possible to form a high-quality image without deterioration in image quality such as background stains.

  According to the invention described in claim 22, since the position adjusting means is means for adjusting the position of the coupling lens in the main scanning direction of the oscillating mirror part, the light beam passed through the coupling lens from the light source part. Can reliably irradiate the center of the oscillating mirror in the main scanning direction, so that the light beam can be reliably transmitted to the center of the oscillating mirror in the main scanning direction even if mounting tolerances or processing tolerances occur. Therefore, the light beam can be reliably deflected by the oscillating mirror, and the light beam at the imaging position can be prevented from becoming thicker or out of focus, thereby causing flare light due to vignetting of the light beam, etc. Generation of scattered light can be suppressed, and a high-quality image without deterioration of image quality such as background stains can be formed.

  According to the invention described in claim 23, since the position adjusting means is means for adjusting the position of the light source unit in which the light source unit and the coupling lens are integrated in the main scanning direction of the vibrating mirror unit, The light beam can be reliably irradiated to the center of the vibration mirror unit in the main scanning direction. Therefore, even if mounting tolerances and processing tolerances occur, the light beam is centered in the main scanning direction of the vibration mirror unit. The light beam can be reliably deflected by the oscillating mirror, and the light beam at the imaging position can be prevented from becoming thicker or out of focus. Generation of scattered light such as flare light can be suppressed, and a high-quality image without deterioration in image quality such as background stains can be formed.

  According to a twenty-fourth aspect of the present invention, the apparatus further includes a diaphragm unit that is disposed between the light source unit and the vibrating mirror unit and that is provided with an opening that regulates a light beam width of the light beam from the light source unit. The position adjusting means is a means for adjusting the position of the diaphragm portion in the main scanning direction of the vibrating mirror portion, so that the vibration can be generated without affecting the imaging optical system closer to the scanning surface than the vibrating mirror portion. The incident position of the light beam in the main scanning direction X of the mirror part can be adjusted, and the light beam can be irradiated to the center of the vibrating mirror part in the main scanning direction, so that mounting tolerances and processing tolerances can be obtained. Even if such a situation occurs, the light beam can be guided to the center in the main scanning direction of the oscillating mirror portion, and thus the light beam can be reliably deflected at the center of the oscillating mirror portion.

  According to the invention described in claim 25, the position adjusting means is a means for adjusting the light source unit in which the light source unit, the coupling lens, and the diaphragm unit are integrated in the main scanning direction of the vibrating mirror unit. The incident position of the light beam in the main scanning direction X of the oscillating mirror can be adjusted without affecting the imaging optical system closer to the scanning surface than the oscillating mirror, and the light from the light source unit can be adjusted. The beam can be reliably radiated to the center of the oscillating mirror in the main scanning direction. Therefore, even if mounting tolerances or processing tolerances occur, the light beam can be reliably irradiated to the center of the oscillating mirror in the main scanning direction. Therefore, the light beam can be reliably deflected by the oscillating mirror, and the light beam at the imaging position can be prevented from becoming thicker or out of focus, thereby reducing the light beam. Suppressing the generation of the scattered light, such as flare light by the eclipse of over-time, it is possible to form a high-quality image with no deterioration of image quality such as stain.

  According to the twenty-sixth aspect of the invention, since the opening is formed larger than the width of the vibrating mirror in the main scanning direction of the vibrating mirror, the width of the light beam incident on the vibrating mirror is reduced. The width of the oscillating mirror can be made larger than the width of the oscillating mirror in the scanning direction. For this reason, the light beam is irradiated on the entire main scanning direction of the oscillating mirror so that the light beam is reliably centered in the main scanning direction of the oscillating mirror. Therefore, the light beam can be reliably deflected at the center of the vibrating mirror portion.

  According to the twenty-seventh aspect of the present invention, the adjusting means is a means for adjusting the position of the oscillating mirror portion in the main scanning direction of the oscillating mirror portion, so that the light beam is centered in the main scanning direction of the oscillating mirror portion. Therefore, even if mounting tolerances or processing tolerances occur, the light beam can be reliably guided to the center of the vibrating mirror unit in the main scanning direction. It can be reliably deflected by the oscillating mirror, and it can prevent the light beam at the imaging position from becoming thicker or out of focus, thereby suppressing the occurrence of scattered light such as flare light due to vignetting of the light beam. It is possible to form a high-quality image without image quality degradation.

  According to the 28th aspect of the invention, since the optical scanning device according to any one of the 1st to 27th aspects is provided, there is no deterioration of the image quality due to the vignetting of the light beam, and the high image quality. The image forming apparatus can be speeded up, adapted to the office environment, and adapted to the global environment.

  Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. 1 to 9. FIG. 1 is an explanatory diagram viewed from the front of the configuration of the image forming apparatus according to the first embodiment of the present invention. FIG. 2 is an explanatory diagram showing a main part such as a laser writing unit and a photosensitive member as an optical scanning device of the image forming apparatus shown in FIG. FIG. 3 is an exploded perspective view of the laser writing unit of the image forming apparatus shown in FIG. FIG. 4 is a perspective view showing the main parts of the laser writing unit and the photoconductor of the image forming apparatus shown in FIG. FIG. 5 is an exploded perspective view of the light source device of the laser writing unit shown in FIG. 6 is an exploded perspective view of the deflection unit of the light source device shown in FIG. (A) of FIG. 7 is a front view of the vibration mirror of the deflection unit shown in FIG. 6, and (b) is a rear view of the mirror part of the vibration mirror shown in FIG. (C) is sectional drawing which follows the VIC-VIC line | wire in FIG.7 (b). FIG. 8 is an exploded perspective view of the vibrating mirror shown in FIG. FIG. 9A is an exploded perspective view of the light source unit of the light source device shown in FIG. 5, and FIG. 9B is a perspective view of the light source unit shown in FIG. is there.

  The image forming apparatus 1 forms an image on a recording paper 7 (shown in FIG. 1) as a transfer material. As shown in FIG. 1, the image forming apparatus 1 includes an apparatus main body 2, a paper feed unit 3, a registration roller pair 10, a transfer unit 4, a fixing unit 5, and a laser writing unit 22 as an optical scanning device. The process cartridge 6 and the paper discharge unit 16 are provided at least.

  The apparatus main body 2 is formed in a box shape, for example, and is installed on a floor or the like. The apparatus main body 2 accommodates a paper feed unit 3, a registration roller pair 10, a transfer unit 4, a fixing unit 5, a laser writing unit 22, and a process cartridge 6.

  The paper feed unit 3 is provided at the lower part of the apparatus main body 2 and includes a plurality of paper feed cassettes 23 and 24 that can be inserted into and removed from the apparatus main body 2. The plurality of paper feed cassettes 23 and 24 accommodate the recording paper 7 as described above, and are provided with paper feed rollers 25 and 26 respectively. The paper feed rollers 25 and 26 are pressed against the uppermost recording paper 7 in each of the paper feed cassettes 23 and 24. The paper feed rollers 25 and 26 feed the uppermost recording paper 7 between the pair of rollers 10 a and 10 b of the registration roller pair 10.

  The registration roller pair 10 is provided in the conveyance path of the recording paper 7 conveyed from the paper supply unit 3 to the transfer unit 4 and includes a pair of rollers. The registration roller pair 10 sandwiches the recording paper 7 between the pair of rollers, and the timing at which the recording paper 7 can be superimposed on the toner image (recording start timing in the sub-scanning direction (vertical direction in FIG. 1)). At the same time, it is sent out between the transfer unit 4 and the process cartridge 6.

  The transfer unit 4 is provided above the paper feed unit 3. The transfer unit 4 includes a plurality of rollers 27 and a transfer belt 29. Each roller 27 is rotatably provided in the apparatus main body, and at least one of them is rotationally driven by a motor as a drive source. The transfer belt 29 is formed in an endless annular shape and is stretched over the plurality of rollers 27 described above. The transfer belt 29 is positioned below and in the vicinity of the process cartridge 6 by being stretched over the plurality of rollers 27 described above. The transfer belt 29 circulates (endlessly travels) around the plurality of rollers 27 described above when at least one roller 27 is rotationally driven by a motor or the like.

  The transfer unit 4 presses the recording paper 7 from which the transfer belt 29 is fed from the paper supply unit 3 against the outer surface of the photosensitive drum 8 of each process cartridge 6, and the toner image on the photosensitive drum 8 is applied to the recording paper 7. Transcript. The transfer unit 4 sends the recording paper 7 onto which the toner image has been transferred toward the fixing unit 5.

  The fixing unit 5 includes a pair of rollers 5a and 5b that sandwich the recording paper 7 therebetween. The fixing unit 5 presses and heats the recording paper 7 sent out from the transfer unit 4 between the pair of rollers 5a and 5b, whereby the toner image transferred from the photosensitive drum 8 onto the recording paper 7 is recorded on the recording paper 7. Fix to paper 7.

  The laser writing unit 22 is disposed above the apparatus main body 2, that is, above the paper feeding unit 3. The laser writing unit 22 irradiates the outer surface of the photosensitive drum 8 uniformly charged by a later-described charging charger 9 of the process cartridge 6 to form an electrostatic latent image. The laser writing unit 22 performs image recording every two lines on the outer surface of the photosensitive drum 8 (forms an electrostatic latent image) by one cycle reciprocating scanning of a vibrating mirror 85 described later. The detailed configuration of the laser writing unit 22 will be described later.

  The process cartridge 6 is provided between the transfer unit 4 and the laser writing unit 22 and is detachable from the apparatus main body 2. As shown in FIG. 2, the process cartridge 6 includes a cartridge case 11, a charging charger 9 as a charging device, a photosensitive drum 8 as a photosensitive member (also referred to as an image carrier), and a cleaning case 12 as a cleaning device. And a developing device 13. Therefore, the image forming apparatus 1 includes at least a charger 9, a photosensitive drum 8, a cleaning case 12, and a developing device 13.

  The cartridge case 11 is detachable from the apparatus main body 2 and accommodates a charging charger 9, a photosensitive drum 8, a cleaning case 12, and a developing device 13. The charging charger 9 uniformly charges the outer surface of the photosensitive drum 8. The photosensitive drum 8 is disposed with a gap from a later-described developing roller 15 of the developing device 13. The photosensitive drum 8 is formed in a columnar shape or a cylindrical shape that is rotatable about an axis.

  An electrostatic latent image is formed on the outer surface of the photosensitive drum 8 by the laser writing unit 22. The photosensitive drum 8 is developed by adsorbing toner onto an electrostatic latent image formed on and supported on the outer surface, and the toner image thus obtained is transferred to a recording paper 7 positioned between the transfer belt 29. To do. The outer surface of the photosensitive drum 8 forms a surface to be scanned described in the claims. The cleaning case 12 removes the transfer residual toner remaining on the outer surface of the photosensitive drum 8 after the toner image is transferred to the recording paper 7.

  The developing device 13 includes at least a toner cartridge 17 and a developing roller 15 as a developer carrier. The developing device 13 sufficiently agitates the toner in the toner cartridge 17 and adsorbs the agitated toner to the outer surface of the developing roller 15. In the developing device 13, the developing roller 15 rotates and the toner is attracted to the photosensitive drum 8. In this way, the developing device 13 carries the toner on the developing roller 15 and transports it to the developing region, and develops the electrostatic latent image on the photosensitive drum 8 to form a toner image.

  The developing roller 15 is disposed in parallel and close to the photosensitive drum 8. The space between the developing roller 15 and the photosensitive drum 8 forms a developing area in which toner is attracted to the photosensitive drum 8 and the electrostatic latent image is developed to obtain a toner image.

  The paper discharge unit 16 includes paper discharge trays 18 and 19 provided on the upper surface of the apparatus main body 2, and a pair of paper discharge rollers 20 and 21 provided on the paper discharge trays 18 and 19, respectively. The pair of paper discharge rollers 20 and 21 is supplied with the recording paper 7 sandwiched between the pair of rollers 5a and 5b of the fixing unit 5 and having the toner image fixed thereon. The pair of paper discharge rollers 20 and 21 discharge the recording paper 7 on which the toner image is fixed onto the paper discharge trays 18 and 19, respectively.

  The image forming apparatus 1 configured as described above forms an image on the recording paper 7 as described below. First, the image forming apparatus 1 rotates the photosensitive drum 8 and uniformly charges the outer surface of the photosensitive drum 8 by the charging charger 9. Laser light is irradiated on the outer surface of the photosensitive drum 8 to form an electrostatic latent image on the outer surface of the photosensitive drum 8. When the electrostatic latent image is positioned in the developing area, the toner adsorbed on the outer surface of the developing roller 15 of the developing device 13 is adsorbed on the outer surface of the photosensitive drum 8, and the electrostatic latent image is developed. An image is formed on the outer surface of the photosensitive drum 8.

  In the image forming apparatus 1, the recording sheet 7 conveyed by the sheet feeding rollers 25 and 26 of the sheet feeding unit 3 is interposed between the photosensitive drum 8 of the process cartridge 6 and the transfer belt 29 of the transfer unit 4. The toner image formed on the outer surface of the photosensitive drum 8 of the process cartridge 6 is transferred to the recording paper 7. The image forming apparatus 1 fixes the toner image on the recording paper 7 by the fixing unit 5 and discharges the recording paper 7 to one of the paper discharge trays 18 and 19 of the paper discharge unit 16. Thus, the image forming apparatus 1 forms an image on the recording paper 7.

  Details of the laser writing unit 22 (hereinafter simply referred to as a unit) will be described below. The unit 22 for scanning the photosensitive drum 8 is integrally formed as shown in FIG. 2, and moves relative to the photosensitive drum 8 along the moving direction K of the recording paper 7 (indicated by an arrow in FIG. 2). An electrostatic latent image is simultaneously formed by deflecting and guiding a light beam from a semiconductor laser 51, which will be described later, by a vibrating mirror 85. Hereinafter, in the drawings, a direction parallel to the axis of the photosensitive drum 8 is indicated by an arrow X, referred to as a main scanning direction, and a direction parallel to the optical axis of a light beam changed by a vibration mirror 85 described later is indicated by an arrow. The direction indicated by Y is referred to as the optical axis direction, and the direction orthogonal to both the main scanning direction X and the optical axis direction Y is indicated by arrow Z, and is referred to as the sub-scanning direction.

  As shown in FIGS. 3 to 4, the unit 22 includes a unit body 30, a light source device 31, and an imaging optical system 32. As shown in FIG. 3, the unit main body 30 includes three strip plate members 34. The plate member 34 is attached to the apparatus main body 2 in a state where both ends are fixed to each other and the planar shape is a U-shape.

  3 or 4, the light source device 31 includes an optical housing 35, a light source unit 48, a cylinder lens 38 as a line image forming lens, and a deflection unit 39 (shown in FIG. 5). Yes.

  The optical housing 35 includes a housing case 40 and a flat upper cover 41 each formed of a synthetic resin. The housing case 40 is integrally provided with a flat bottom plate 42, a plurality of side plates 43 erected from the outer edge of the bottom plate 42, and a partition plate 44. Each of the three side plates 43 connected to each other is provided with a fitting hole 45 for attaching a light source unit 48 to be described later and an emission window 46. The fitting hole 45 is formed in a round shape. The exit window 46 is formed in a flat quadrangular shape.

  The partition plate 44 partitions the space in the housing case 40, that is, the optical housing 35 into a space for storing the deflection unit 39 and a space for storing articles other than the deflection unit 39. The partition plate 44 is provided with a rectangular transmission window 47. The upper cover 41 closes the upper opening formed by the edge of the side plate 43 of the housing case 40 away from the bottom plate 42 and is attached to the housing case 40 to seal the optical housing 35.

  As shown in FIG. 9, the light source unit 48 includes a printed circuit board 50, a semiconductor laser 51, a holder member 53, a coupling lens 54, an adjustment screw 56 as an orientation adjustment unit, and an adjustment screw hole 69. I have. The printed circuit board 50 includes an insulating substrate and a wiring pattern formed on the outer surface of the substrate.

  The semiconductor laser 51 forms a light source unit described in the claims, and is mounted on the printed circuit board 50. That is, the light source unit 48 includes a semiconductor laser 51 as a light source unit of the process cartridge 6. The semiconductor laser 51 emits a light beam 59 toward the photosensitive drum 8.

  The holder member 53 includes a thick flat plate holder body 63, a pair of support columns 64, a laser positioning hole 65, a pair of protrusions 66, a pair of mounting seat surfaces 68, an adjustment screw hole 69, It has. The holder main body 63 is provided with a support shaft 70 protruding from both ends in the sub-scanning direction Z toward the sub-scanning direction Z.

  The pair of support columns 64 are provided on the outer edge of the holder main body 63 at positions facing each other across the center of the holder main body 63, and are erected from the holder main body 63 toward the printed circuit board 50. The support 64 is overlaid on the printed circuit board 50, and the holder member 53 is fixed to the printed circuit board 50 by screwing a screw passing through the printed circuit board 50.

  The laser positioning hole 65 passes through the holder main body 63 and is disposed at the center of the holder main body 63. The laser positioning hole 65 positions the semiconductor laser 51 when the semiconductor laser 51 enters inside.

  The pair of mounting seat surfaces 68 are formed in a flat plate shape and continue to the support shaft 70. The surface of the pair of mounting seat surfaces 68 is substantially flush with the outer surface of the holder body 63. The adjustment screw hole 69 is provided at one end of the holder main body 63 in the main scanning direction X and penetrates the holder main body 63. The adjusting screw hole 69 constitutes an orientation adjusting means described in the claims.

  The pair of protrusions 66 are formed so as to protrude from the holder body 63 away from the printed circuit board 50, that is, toward the deflection unit 39. The pair of protrusions 66 has a laser positioning hole 65 positioned between them. The outer edge of each protrusion 66 is formed along the inner edge of the fitting hole 45 described above. The pair of protrusions 66 are fitted in the fitting holes 45 to position the light source unit 48 with respect to the optical housing 35. Further, a groove 71 having a U-shaped cross section is formed on the inner surface of each protrusion 66 so as to be flush with the inner surface of the laser positioning hole 65.

  The position of the coupling lens 54 in the optical axis direction Y of the semiconductor laser 51 is adjusted so that the optical axis thereof coincides with the optical axis of the semiconductor laser 51 and the emitted light beam 59 becomes parallel light. A UV adhesive is filled between the inner surfaces of the grooves 71 of the protrusions 66 and fixed to the protrusions 66, that is, the holder body 63.

  The adjustment screw 56 is screwed into the adjustment screw hole 69. By adjusting the screwing amount of the adjusting screw 56 into the adjusting screw hole 69 as appropriate, the protruding amount from the holder body 63 to the optical housing 35 is appropriately changed. The adjusting screw 56 and the adjusting screw hole 69 constitute a direction adjusting means described in the claims.

  The light source unit 48 having the above-described configuration is press-fitted and fixed by positioning the rotation direction by inserting the protrusion 66 into the fitting hole 45 of the optical housing 35. The light source units 48 and 49 are fixed to the optical housing 35 by screwing screws through the side plate 43 of the optical housing 35 into the mounting seat surface 68.

  At this time, if the protruding amount of the adjusting screw 56 from the holder main body 63 is appropriately changed, the adjusting screw 56 comes into contact with the side plate 43 of the optical housing 35, and the holder member 53 moves the support shaft 70 according to the protruding amount. The inclination in the direction of the arrow (B direction) is adjusted by elastic deformation as the rotation axis. In this way, it is possible to change the irradiation position of the light beam 59 incident on the deflection surface 95 of the vibration mirror 85 (described later) of the deflection unit 39.

  Accordingly, the irradiation position of the light beam 59 in the main scanning direction X on the deflection surface 95 of the vibration mirror 85 (described later) of the deflection unit 39 can be adjusted so as to be on the rotation axis of the deflection surface 95. Even in the case of deforming into a wave shape, the wavefront aberration of the light beam 59 reflected by the deflecting surface 95 can be suppressed, and the shift of the imaging position (focus shift) of the spot-like light beam can be suppressed and formed. Degradation of image quality can be suppressed.

  The cylinder lens 38 is accommodated in the optical housing 35. The cylinder lens 38 is provided so as to be deflectable in the sub-scanning direction Z. The cylinder lens 38 receives the light beam 59 emitted from the light source unit 48 and emits the light beam 59 toward a deflection surface 95 of a vibration mirror 85 (described later) of the deflection unit 39. The cylinder lens 38 converges the light beam 59 in the sub scanning direction Z on the deflection surface 95 of the vibration mirror 85.

  As shown in FIG. 6, the deflection unit 39 includes a circuit board 83, a support member 84, a vibration mirror 85, and a drive circuit (not shown) mounted on the circuit board 83. In the present embodiment, an example of an electromagnetic drive method will be described as a method for generating the rotational torque of the vibrating mirror 85.

  The circuit board 83 includes an insulating substrate and a wiring pattern formed on the surface of the substrate. The circuit board 83 is mounted with a control IC and a crystal oscillator constituting a drive circuit for the oscillating mirror 85, a connector 86, and the like, and power and control signals from the power source are input / output via the connector 86. .

  The support member 84 is formed of a synthetic resin. The support member 84 is positioned at a predetermined position of the circuit board 83 and is erected from the circuit board 83. A vibration mirror 85 is attached to the support member 84. The support member 84 is configured so that the vibrating mirror 85 is inclined with a torsion beam 97 (to be described later) perpendicular to the main scanning direction X, and the deflection surface 95 is inclined at a predetermined angle with respect to the main scanning direction X, 22.5 degrees in the embodiment. A positioning portion 87 for positioning, a presser claw 88 locked to the outer edge of the mounting substrate 90 of the vibration mirror 85, and a wiring terminal 127 formed on one side of the mounting substrate 90 (to be described later) of the vibration mirror 85 are in contact with each other at the time of mounting. And an edge connector portion 89 in which metal terminal groups are arranged.

  As shown in FIG. 7A, the vibrating mirror 85 has a deflecting surface 95 pivotally supported by a torsion beam 97. As will be described later, the vibrating mirror 85 is formed by etching from a Si substrate by etching and mounted on a mounting substrate 90. Obtained by being attached to. In the present embodiment, a module is shown in which a pair of Si substrates are back-to-back and bonded together.

  In the vibration mirror 85 thus obtained, one side of the mounting substrate 90 is inserted into the edge connector portion 89 described above, and the outer edge is locked by the presser claws 88 so that both side surfaces of the mounting substrate 90 are aligned with the positioning portion 87. And supported by the support member 84. In this way, electrical wiring is made at the same time, and each oscillating mirror 85 can be individually replaced.

  As shown in FIGS. 7 and 8, the vibrating mirror 85 includes a mounting substrate 90 and a mirror unit 91. On the mounting substrate 90, a frame-shaped base 92 on which the mirror unit 91 is mounted and a yoke 93 formed so as to surround the mirror unit 91 are provided. A pair of permanent magnets 94 is attached to the yoke 93. In the pair of permanent magnets 94, the S pole and the N pole are opposed to each other along a direction orthogonal to the longitudinal direction of the torsion beam 97. The pair of permanent magnets 94 generates a magnetic field in a direction orthogonal to the longitudinal direction of the torsion beam 97.

  The mirror unit 91 includes a movable unit 96 that forms a transducer by forming a deflection surface 95 on the surface, and one end is connected to both ends of the movable unit 96 in the sub-scanning direction Z and from both ends of the sub-scanning direction Z to the sub-scanning direction. A torsion beam 97 that forms a rotation axis standing along Z, and a frame-like frame 98 (corresponding to a frame body) that forms a support portion whose inner edge is connected to the other end of the torsion beam 97, and includes at least one sheet The Si substrate is formed by etching. In the present embodiment, the mirror unit 91 is obtained using a wafer called an SOI substrate in which two substrates 105 and 106 having a thickness of 60 μm and 140 μm are bonded in advance with an oxide film interposed therebetween.

  The movable portion 96 is laminated on the diaphragm 100 on which the planar coil 99 (shown in FIG. 7B) is formed, the reinforcing beam 101 erected from both ends in the main scanning direction X of the diaphragm 100, and the diaphragm 100. And the movable mirror 102 on which the deflection surface 95 described above is formed. The torsion beam 97 is configured to be twisted, and the movable portion 96, that is, the deflection surface 95 can be rotated by being twisted. The frame 98 is configured by stacking a pair of frames 103 and 104.

  The above-described mirror unit 91 includes a vibrating plate 100 on which a torsion beam 97, a planar coil 99 are formed, and a movable unit 96 by a dry process using plasma etching from the surface side of a substrate (second substrate) 105 having a thickness of 140 μm. The remaining portions other than the reinforcing beam 101 and the frame 103 are made to penetrate to the oxide film. Next, the other part except the movable mirror 102 and the frame 104 is penetrated to the oxide film by anisotropic etching such as KOH from the surface side of the substrate (first substrate) 106 having a thickness of 60 μm. Then, the oxide film around the movable portion 96 is removed and separated to form the mirror portion 91.

  Here, the width of the torsion beam 97 and the reinforcing beam 101 was 40 to 60 μm. As described above, the moment of inertia I of the movable portion 96 is preferably small in order to increase the deflection angle of the movable portion 96, that is, the deflection surface 95. On the other hand, the deflection surface 95 is deformed by the inertial force. In the embodiment, the movable portion 96 is structured to be thinned.

  Furthermore, an aluminum thin film is vapor-deposited on the surface of the substrate 106 having a thickness of 60 μm including the surface of the movable mirror 102 to form a deflection surface 95, and a planar coil 99 is formed of a copper thin film on the surface of the substrate 105 having a thickness of 140 μm. A terminal 107 wired through the torsion beam 97 and a trimming patch 108 are formed. Naturally, a configuration in which a thin-film permanent magnet 94 is provided on the vibration plate 100 side and a planar coil 99 is formed on the frame 104 side may be employed.

  The mirror unit 91 is mounted on the pedestal 92 with the deflecting surface 95 facing the front. The mirror portion 91 causes a Lorentz force to be generated on each side parallel to the torsion beam 97 of the planar coil 99 by passing a current between the terminals 107, and twists the torsion beam 97 to rotate the movable portion 96, that is, the deflection surface 95. When a rotational torque is generated and the current is cut off, the movable portion 96 returns to a position flush with the frame 98 by the elastic restoring force of the torsion beam 97. Therefore, the movable mirror 102 can be reciprocally oscillated by alternately switching the direction of the current flowing through the planar coil 99.

  Further, in terms of diameter, a light beam 59 scanned by the deflecting surface 95 of the vibrating mirror 85 is detected at the synchronization detection sensor 115 disposed at the start end of the scanning region and at the time of forward scanning and the detection signal detected at the time of backward scanning. Detection is performed based on the time difference from the detection signal, and the deflection angle of the deflection surface is controlled to be constant. In the period from the detection of the light beam 59 in the backward scan to the detection of the light beam 59 in the forward scan, the light emission of the semiconductor laser 51 as the light emission source is prohibited.

  The aforementioned deflection unit 39 is accommodated in the optical housing 35, and the light beam 59 from the cylinder lens 38 is guided to the deflection surface 95. Then, the deflection unit 39 deflects the light beam 59 guided onto the deflection surface 95 and emits it toward an fθ lens 116 (to be described later) of the imaging optical system 32. At this time, the direction of the light beam 59 is adjusted so as to be incident on the central portion of the deflecting surface 95 of the deflecting mirror 85 by the adjusting screw, is deflected by the deflecting surface 95 of the deflecting mirror 85, and enters the fθ lens 116. The deflection unit 39 is accommodated in the optical housing 35 and is blocked from the outside air, so that a change in amplitude due to the convection of the outside air is prevented.

  The light source device 31 described above emits the light beam 59 from the semiconductor laser 51 of the light source unit 48 toward the fθ lens 116. The light source device 31 is fixed by a pair of plate members 34 and screws that are parallel to each other.

  As shown in FIG. 3 or FIG. 4, the imaging optical system 32 includes an fθ lens 116 as a scanning lens and a folding mirror 118. The fθ lens 116 is formed in a rod shape whose longitudinal direction is parallel to the longitudinal direction of the photosensitive drum 8, and is attached in the emission window 46 of the optical housing 35 described above, and is fixed by an adhesive. The fθ lens 116 is formed to be convex in the direction in which the central portion in the main scanning direction X is separated from the vibrating mirror 85. The fθ lens 116 has a convergence force in the sub-scanning direction Z while the light beam 59 passes through.

  The folding mirror 118 is formed in a band plate shape whose longitudinal direction is parallel to the longitudinal direction of the photosensitive drum 8. The folding mirror 118 is disposed at an appropriate position so as to guide the light beam 59 that has passed through the fθ lens 116 to the outer surface of the photosensitive drum 8.

  In the imaging optical system 32 configured as described above, the light beam 59 enters the fθ lens 116 from the deflection surface 95 of the vibrating mirror 85 of the light source device 31. The light beam 59 from the light source unit 48 that has passed through the fθ lens 116 is reflected by the folding mirror 118 and forms a spot image on the photosensitive drum 8 to form an electrostatic latent image based on the image information.

  As shown in FIG. 4, the unit 22 configured as described above includes a synchronization detection sensor 115 for driving the semiconductor laser 51 of the light source unit 48 in synchronization. The light beam 59 deflected by the deflecting surface 95 of the vibrating mirror 85 passes through the fθ lens 116 as a scanning lens and is focused and incident on the synchronization detection sensor 115 by the imaging lens 122. The synchronization detection sensor 115 detects the time difference between the detection signal detected during the backward scanning and the detection signal detected during the forward scanning, and controls the deflection surface to have a constant deflection angle based on the detection signal. Yes.

  According to the present embodiment, the light source unit 48 adjusts and adjusts the adjusting screw as the direction adjusting means for adjusting the irradiation position of the light beam 59 from the semiconductor laser 51 on the deflection surface 95 of the vibrating mirror 85 in the main scanning direction X. Since the screw hole is provided, the light beam 59 can be applied to the center of the deflection surface 95 of the vibrating mirror 85 in the main scanning direction X. Therefore, the light beam 59 can be guided to the center of the vibrating mirror 85 in the main scanning direction X even if mounting / processing tolerances occur.

  Therefore, even if the deflection surface 95 of the oscillating mirror 85 is deformed due to a wave, the amount of deformation at the center of the deflection surface 95 is small, so that the light beam 59 at the imaging position is thick without increasing the thickness of the oscillating mirror 85. It is possible to prevent the occurrence of blurring and out-of-focus, suppress the generation of scattered light such as flare light due to the vignetting of the light beam 59, and can form a high-quality image without deterioration of image quality such as dirt. By reducing the moment of inertia by reducing the diameter of the oscillating mirror, it is possible to achieve higher speed, wider angle and higher image quality.

  Since the image forming apparatus 1 includes the unit 22 described above, the image quality is not deteriorated due to the vignetting of the light beam 59, the vibration mirror 85 can be downsized, and high image quality, small size, and high speed can be achieved. Can be planned.

  In the embodiment described above, the direction of the light beam 59 can be changed in the main scanning direction X by screwing the adjusting screw 56 into the holder member 53 of the light source unit 48. However, in the present invention, means for changing the direction of the light beam 59 in the main scanning direction X may be provided in any of the optical elements of the optical system before entering the vibrating mirror 85.

  A configuration may be adopted in which the orientation of the light source or the coupling lens alone is adjusted, and the irradiation position on the vibrating mirror is adjusted in the main scanning direction. FIG. 18 shows a diagram for adjusting the orientation of a single light source. By adjusting the direction of the substrate 50 to which the light source is bonded relative to the holder 53 of the coupling lens 54, the direction of the light source alone can be adjusted, and the irradiation position on the vibrating mirror can be adjusted in the main scanning direction. it can.

  FIG. 19 is a diagram for adjusting the orientation of the coupling lens 54 alone. The coupling lens 54 is bonded and fixed between the groove and the inner surface by a UV adhesive. At this time, the beam from the light source is turned on, and the coupling is performed while checking the optical axis deviation between the light source and the coupling lens 54. The orientation of the lens 54 can be adjusted and fixed by adhesion. The adjustment may be performed so that the optical axis shifts in a desired direction while confirming the irradiation position on the vibrating mirror after being mounted on the writing housing. By bonding and fixing the coupling lens as described above, the orientation of the coupling lens alone can be adjusted, and the irradiation position on the vibrating mirror can be adjusted in the main scanning direction.

  Further, as shown in FIG. 20, the direction of the light source unit in which the aperture 130 (aperture part) is integrated may be adjustable. At this time, it is possible to adjust the irradiation position on the oscillating mirror in the main scanning direction by adjusting the direction by the protruding amount by an adjusting screw (not shown) brought into contact with the writing housing.

  In addition, as shown in FIG. 21, a light guide mirror that guides the beam from the light source to the vibrating mirror 85 may be further arranged to lay out the optical system. At this time, the irradiation position on the vibrating mirror 85 can be adjusted in the main scanning direction by providing the light guide mirror with the orientation adjusting means as described above.

  Further, in the above-described embodiment, the direction adjusting means for changing the direction of the light beam 59 from the semiconductor laser 51 in the main scanning direction X is provided. However, in the present invention, the light source unit 48 may be provided with position adjusting means for translating the light beam 59 from the semiconductor laser 51 in the main scanning direction X. In this way, the irradiation position of the light beam 59 on the deflection surface 95 of the vibration mirror can be adjusted in the main scanning direction X, and the irradiation position of the light beam 59 incident on the deflection surface 95 of the vibration mirror 85 of the deflection unit 39 can be adjusted. The light beam 59 can be reliably irradiated to the center of the deflection surface 95 of the vibrating mirror in the main scanning direction X. Therefore, even if an installation tolerance or a processing tolerance occurs, The light beam 59 can be reliably guided to the center of the deflection surface 95 of the vibrating mirror 85 in the main scanning direction X.

  FIG. 22 shows how the single light source is shifted and adjusted in the main scanning direction. By providing a mechanism capable of adjusting the position in the main scanning direction such as a micro (not shown) on the substrate to which the light source is bonded, the position of the light source alone in the main scanning direction can be adjusted.

  FIG. 23 is a diagram in which the coupling lens 54 alone can be shift-adjusted in the main scanning direction. As described above, the coupling lens 54 is fixed and bonded by filling the groove and the inner surface with a UV adhesive. Therefore, by adjusting the position of the holder 53 of the coupling lens 54 in the main scanning direction at the time of fixed bonding, The position of the coupling lens 54 alone in the main scanning direction can be adjusted, and the irradiation position on the vibrating mirror can be adjusted in the main scanning direction.

  Further, as shown in FIG. 24, the position adjustment in the main scanning direction may be similarly performed for the light source unit 48 in which the light source and the coupling lens are integrated.

  Further, as shown in FIG. 25, the position of the aperture (aperture part) 130 in the main scanning direction may be adjusted.

  Furthermore, as shown in FIG. 26, the aperture (aperture part) 130 may be integrated with the light source and the coupling lens, and the position of the light source unit 48 including the aperture part in the main scanning direction may be adjusted.

  Furthermore, in the present invention, the light source unit 48 is provided with adjusting means for adjusting the direction and position of the light beam 59 from the semiconductor laser 51 in the main scanning direction X. However, in the present invention, the incident position in the main scanning direction X of the light beam 59 on the deflection surface 95 of the vibrating mirror 85 may be adjusted by providing it in any optical element in the optical system before the deflection unit 39.

  Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 10 is a perspective view showing a deflection unit 39 'provided with a vibrating mirror 85 as an optical deflection unit of the laser writing unit of the image forming apparatus according to the second embodiment of the present invention. In FIG. 10, the same components as those in the first embodiment described above are denoted by the same reference numerals and description thereof is omitted.

  As shown in FIG. 10, the deflection unit 39 ′ having the vibrating mirror 85 as the light deflection unit of the present embodiment is provided between the circuit board 83 and the support member 84, and the orientation adjustment unit according to the claims. A rotating member 80 is provided. The rotary member 80 is formed in a flat plate shape, and the support member 84 is fixed on the surface with an adhesive or the like, and the support member 84 is attached. The rotating member 80 is superposed on the surface of the circuit board 83, the center of the rotating member 80 is fixed by an adjusting screw (not shown), and is attached to the circuit board 83 so as to be movable in the rotation direction (arrow C direction). .

  A support member 84 is attached to a rotating member 80 attached to the circuit board 83 so as to be movable in the rotational direction (arrow C direction). For this reason, the support member 84 to which the vibration mirror 85 as the light deflection unit is attached can be moved in the rotation direction (arrow C direction) on the circuit board 83, and the rotation direction of the vibration mirror (arrow C direction) is inclined. Can be adjusted.

  As shown in FIG. 27, the deflecting unit 39 ′ is provided with a micro (not shown) and the like, and the position can be adjusted in the main scanning direction, so that the beam from the light source is adjusted to irradiate the center on the vibrating mirror. can do.

  In this way, the irradiation position of the light beam 59 on the deflection surface 95 of the vibrating mirror 85 of the deflection unit 39 'can be changed. Accordingly, the irradiation position of the light beam 59 on the deflection surface 95 of the oscillating mirror 85 of the deflection unit 39 ′ can be adjusted such that the irradiation position in the main scanning direction X is on the rotation axis of the deflection surface 95. Even in the case of deformation, the wavefront aberration of the light beam 59 reflected by the deflecting surface 95 can be suppressed, and the shift of the imaging position (focus shift) of the spot-like light beam can be suppressed, and the image quality to be formed can be reduced. Deterioration can be suppressed.

  According to the present embodiment, the rotation unit 80 serving as a deflection unit adjustment unit in which the deflection unit 39 ′ adjusts the irradiation position of the light beam 59 from the semiconductor laser 51 on the deflection surface 95 of the vibrating mirror 85 in the main scanning direction X. Therefore, the light beam 59 can be applied to the center of the deflection surface 95 of the vibrating mirror 85 in the main scanning direction X. Therefore, the light beam 59 can be guided to the center of the vibration mirror 85 in the main scanning direction X even when mounting / processing tolerances occur or the vibration mirror 85 is downsized.

  Therefore, even if the deflection surface 95 of the oscillating mirror 85 is deformed due to a wave, the amount of deformation at the center of the deflection surface 95 is small, so that the light beam 59 at the imaging position is thick without increasing the thickness of the oscillating mirror 85. By preventing generation of scattered light such as flare caused by vignetting of the light beam 59 and preventing image quality deterioration such as background contamination, it is possible to prevent high quality images from being generated. High speed, wide angle, and high image quality can be realized.

  Subsequently, a third embodiment of the present invention will be described with reference to FIG. 11 or FIG. FIG. 11 is an explanatory diagram showing a vibrating mirror 85 and the like as an optical deflection unit of a laser writing unit of an image forming apparatus according to a third embodiment of the present invention. FIG. 12 is an explanatory diagram showing a vibrating mirror 85 and the like as an optical deflection unit of a laser writing unit as an optical scanning device of the image forming apparatus shown in FIG. 11 and 12, the same components as those in the first embodiment described above are denoted by the same reference numerals and description thereof is omitted.

  In the present embodiment, as shown in FIG. 11, an aperture 130 as a diaphragm portion is provided between the semiconductor laser 51 of the light source unit 48 as a light source portion and the vibrating mirror 85, and further in the optical housing 35. It is accommodated and disposed between the cylinder lens 38 and the vibration mirror 85. The aperture 130 includes a flat main body 131 and an opening 132 formed so as to penetrate the center of the main body 131. The opening 132 is formed in a rectangular shape whose main scanning direction X is the longitudinal direction.

  The aperture 130 passes the light beam 59 through the opening 132 of the aperture 130 when the light beam 59 from the semiconductor laser 51 of the light source unit 48 is incident on the deflecting surface 95 of the vibrating mirror 85, so that the light flux of the light beam 59 is increased. The width is restricted to a width corresponding to the deflection surface 95. Thus, the beam width of the light beam 59 can be regulated by the aperture 130 so that the irradiation position of the light beam 59 on the deflection surface 95 of the vibrating mirror 85 in the main scanning direction X is reliably incident on the deflection surface 95. .

  At this time, as shown in FIG. 12A, when the distance (arrow S) between the aperture 130 and the vibrating mirror 85 is increased, the incident position of the light beam 59 irradiated on the deflection surface 95 of the vibrating mirror 85 is changed. Deviation in the end portion causes deviation in the main scanning direction X of the irradiation position of the light beam 59 on the deflection surface 95.

  However, as shown in FIG. 12B, the incident position shift of the light beam 59 is reduced by reducing the distance S between the aperture 130 and the vibrating mirror 85. Therefore, the deviation in the main scanning direction of the irradiation position of the light beam 59 on the deflection surface 95 can be reduced, and the light beam 59 can be irradiated on the center of the deflection surface 95 of the vibrating mirror 85.

  Further, as shown in FIG. 12C, the opening 132 of the aperture 130 is formed to be larger than the width of the deflection surface 95 of the vibrating mirror 85 in the main scanning direction. For this reason, the width of the light beam 59 incident on the deflection surface 95 of the oscillating mirror 85 can be made larger than the width of the deflection surface 95 in the scanning direction. The light beam 59 can be reliably guided to the center of the deflecting surface 95 in the main scanning direction.

  According to the present embodiment, since the aperture 130 as the opening is provided between the light source unit 36 and the vibrating mirror 85, the imaging optical system closer to the scanning surface than the vibrating mirror 85 is affected. The incident position of the light beam 59 in the main scanning direction X on the deflection surface 95 of the oscillating mirror 85 can be adjusted without this. Therefore, the light beam 59 can be irradiated to the center of the deflection surface 95 of the vibrating mirror 85 in the main scanning direction.

  Further, in the present embodiment, the aperture 130 is disposed in the vicinity of the vibrating mirror 85 between the semiconductor laser 51 and the vibrating mirror 85 of the light source unit 48, so that the main scanning direction X on the deflection surface 95 of the vibrating mirror 85 is set. The incident position of the light beam 59 can be easily adjusted, and the light beam 59 can be reliably irradiated to the center of the deflection surface 95 of the vibrating mirror 85 in the main scanning direction. Therefore, the light beam 59 can be reliably deflected at the center of the deflection surface 95.

  Further, by arranging the aperture 130 between the cylinder lens 38 and the vibration mirror 85, the aperture 130 can be brought close to the vibration mirror 85, and the light beam 59 in the main scanning direction X on the deflection surface 95 of the vibration mirror 85 can be obtained. Can be adjusted more effectively, and the light beam 59 can be reliably irradiated to the center of the deflection surface 95 of the vibrating mirror 85 in the main scanning direction. Therefore, the light beam 59 can be reliably deflected at the center of the deflection surface 95.

  Further, by forming the opening 132 of the main body 131 of the aperture 130 larger than the deflecting surface 95 of the vibration mirror 85, the light beam width of the light beam 59 can be made larger than the width of the vibration mirror 85. By irradiating 59 on the entire deflection surface 95 in the main scanning direction, the light beam 59 can be reliably guided to the center of the deflection surface 95 in the main scanning direction. Therefore, the light beam can be reliably deflected at the center of the light deflection unit.

  Subsequently, a fourth embodiment of the present invention will be described with reference to FIG. FIG. 13 is an explanatory diagram showing a vibrating mirror 85 as an optical deflection unit and an aperture 130 as a diaphragm unit of a laser writing unit of an image forming apparatus according to a fourth embodiment of the present invention. In FIG. 13, the same components as those of the first embodiment described above are denoted by the same reference numerals and description thereof is omitted.

  In the present embodiment, as shown in FIG. 13, the aperture 130 serving as a diaphragm unit includes an adjusting unit 135 serving as a diaphragm unit adjusting unit that adjusts the position and inclination of the aperture 130. The adjustment unit 135 is overlaid on the bottom plate 42 of the housing case 40 of the optical housing 35 and is attached to the bottom plate 42 with screws or the like so that the position can be adjusted in a direction parallel to the main scanning direction X (arrow D). The aperture 130 is fixed with an adhesive or a screw so as to stand vertically on the adjustment unit 135.

  Thus, the aperture 130 is attached to the housing case 40 so that the position of the aperture 130 can be adjusted in the direction parallel to the main scanning direction X (arrow D) by the adjusting unit 135. Therefore, the aperture 130 can adjust the irradiation position of the light beam 59 to the deflection surface 95 of the vibrating mirror 85 in the main scanning direction X, and irradiates the light beam 59 to the center of the deflection surface 95 in the main scanning direction X. be able to.

  Further, the aperture 130 may be attached to the bottom plate 42 by a screw or the like so as to be movable in the rotational direction about the center of the adjustment unit 135 by the adjustment unit 135. In this way, the aperture 130 is attached to the housing case 40 so that the inclination of the aperture 130 can be adjusted by the adjusting unit 135, and the aperture 130 performs main scanning with respect to the deflecting surface 95 of the vibrating mirror 85 with respect to the beam width of the light beam 59. The adjustment can be made in the direction X, and the light beam 59 can be applied to the center of the deflection surface 95 in the main scanning direction X.

  According to the present embodiment, since the aperture 130 includes the adjustment unit 135, the position and the inclination can be adjusted in the main scanning direction X, so that the light beam 59 is changed in the main scanning direction of the deflection surface 95 of the vibrating mirror 85. X can be adjusted, and the light beam 59 can be applied to the center of the deflection surface 95 in the main scanning direction X. For this reason, the light beam 59 can be reliably guided to the center of the deflection surface 95 in the main scanning direction X even if mounting / processing tolerances occur. Therefore, the light beam 59 can be reliably deflected at the center of the deflection surface 95.

  In the above-described embodiment, as the optical scanning device of the image forming apparatus 1, the light beam 59 from the single light source unit 48 is scanned by the vibrating mirror 85 on the outer surface of one photosensitive drum 8. However, in the present invention, the optical scanning apparatus of the present invention can also be applied to a multicolor image forming apparatus having two or more colors or a full-color image forming apparatus as shown in FIG. FIG. 14 is an explanatory diagram showing a modification of the laser writing unit shown in FIG. In FIG. 14, the same components as those of the first embodiment described above are denoted by the same reference numerals and description thereof is omitted. In the case shown in FIG. 14, the four light beams 59, 60, 61, 62 from the plurality of light source units 48a, 48b of the laser writing unit 22 ′ as the optical scanning device of the image forming apparatus include a plurality of photosensitive drums. Light is guided to 8Y, 8M, 8C, and 8K.

  As shown in FIG. 14, the laser writing unit 22 ′ as an optical scanning device of the image forming apparatus includes a light source device 31 ′ and an imaging optical system 32 ′. The light source device 31 ′ includes an optical housing 35, a plurality of light source units 48 a and 48 b, an incident mirror 37, a cylinder lens 38 as a line image forming lens, and a deflection unit 39. The plurality of light source units 48a and 48b are each provided with a pair of semiconductor lasers (not shown), and light beams 59, 60, one-to-one corresponding to the plurality of photosensitive drums 8Y, 8M, 8C, and 8K. Issue 61,62. The light source units 48a and 48b are arranged so that the angles formed by the light beams 59, 60, 61 and 62 from the two semiconductor lasers are 2.5 degrees and intersect on the deflection surface 95 of the vibrating mirror 85. Two semiconductor lasers are arranged.

  The incident mirror 37 is accommodated in the optical housing 35, and the four light beams 59, 60, 61, 62 from the respective semiconductor lasers (not shown) of the respective light source units 48a, 48b are incident thereon. Two light beams 59, 60, 61, 62 are emitted. The incident mirror 37 has four light beams 59, 60, 61, 62 from the respective semiconductor lasers arranged in a vertical line (aligned along the sub-scanning direction Z) and spaced in the sub-scanning direction Z. Two light beams 59, 60, 61, 62 are emitted.

  The imaging optical system 32 ′ includes an fθ lens 116 as a scanning lens, a plurality of toroidal lenses 117 Y, 117 M, 117 C, and 117 K, and a plurality of folding mirrors 118. The longitudinal direction of the fθ lens 116 is arranged in parallel with the longitudinal direction of the photosensitive drums 8Y, 8M, 8C, and 8K. The plurality of toroidal lenses 117Y, 117M, 117C, and 117K are provided in one-to-one correspondence with the photosensitive drums 8Y, 8M, 8C, and 8K, and the longitudinal directions thereof are the photosensitive drums 8Y, 8M, 8C, and 8K. It is formed in the shape of a bar parallel to the longitudinal direction. The plurality of toroidal lenses 117Y, 117M, 117C, and 117K pass only one light beam 59, 60, 61, and 62 that scans the outer surface of the corresponding photosensitive drums 8Y, 8M, 8C, and 8K.

  The plurality of folding mirrors 118 are formed in a strip shape whose longitudinal direction is parallel to the longitudinal direction of the photosensitive drums 8Y, 8M, 8C, 8K, and the plurality of light beams 59, 60,. 61 and 62 are arranged at appropriate locations so as to guide the outer surfaces of the photosensitive drums 8Y, 8M, 8C, and 8K through the toroidal lenses 117Y, 117M, 117C, and 117K.

  The laser writing unit 22 ′ as an optical scanning device of the image forming apparatus having the above-described configuration uses the incident mirror 37 to cause the four light beams 59, 60, 61, 62 from the plurality of light source units 48 a, 48 b of the light source device 31 ′ to be incident. The light beams are emitted in a state of being arranged along the sub-scanning direction Z and spaced apart from each other, passed through the cylinder lens 38 and emitted as parallel light, and the light beam width of the plurality of light beams 59, 60, 61, 62 is reduced by the aperture 130. By being regulated and obliquely incident on the oscillating mirror 85 with a plurality of light beams 59, 60, 61, 62 from the light source units 48a, 48b at different incident angles in the sub-scanning direction Z, each light source unit 48a. , 48b, the plurality of light beams 59, 60, 61, 62 are collectively deflected and reflected, and the plurality of light beams 59, deflected and reflected by the deflecting surface 95, 0,61,62 enters the fθ lens 116 as a scanning lens.

  The plurality of light beams 59, 60, 61, and 62 that have passed through the fθ lens 116 are separated into the respective colors by the plurality of toroidal lenses 117Y, 117M, 117C, and 117K, and the photosensitive drums 8Y, 8M, 8C, and so on. The light is reflected by each of the folding mirrors 118 corresponding to 8K, and formed in a spot shape on the plurality of photosensitive drums 8Y, 8M, 8C, and 8K to form an electrostatic latent image based on the image information.

  In the above-described embodiment, the vibrating mirror 85 is provided as the light deflection unit. However, in the present invention, a polygon mirror generally used in a conventional optical scanning device may be used, and the optical deflection unit of the present invention is not limited to a vibrating mirror.

  In addition, embodiment mentioned above only showed the typical form of this invention, and this invention is not limited to embodiment. That is, various modifications can be made without departing from the scope of the present invention.

It is explanatory drawing which looked at the structure of the image forming apparatus concerning 1st Embodiment of this invention from the front. FIG. 2 is an explanatory diagram showing a main part such as a laser writing unit and a photoconductor as an optical scanning device of the image forming apparatus shown in FIG. FIG. 2 is an exploded perspective view of a laser writing unit of the image forming apparatus shown in FIG. 1. FIG. 2 is a perspective view illustrating a main part of a laser writing unit and a photoconductor of the image forming apparatus illustrated in FIG. 1. It is a disassembled perspective view of the light source device of the laser writing unit shown in FIG. It is a disassembled perspective view of the deflection | deviation unit of the light source device shown by FIG. (A) is a front view of the oscillating mirror of the deflection unit shown in FIG. 6, (b) is a rear view of the mirror part of the oscillating mirror shown in FIG. 6 (a), and (c) is a diagram. It is sectional drawing which follows the VIC-VIC line in 7 (b). FIG. 8 is an exploded perspective view of the vibrating mirror shown in FIG. (A) is the disassembled perspective view of the light source unit of the light source device shown in FIG. 5, (b) is the perspective view which looked at the light source unit shown in FIG. 9 (a) from the back side. It is a disassembled perspective view of the deflection | deviation unit of the light source device of the laser writing unit as an optical scanning device of the image forming apparatus concerning 2nd Example of this invention. It is a perspective view which shows principal parts, such as a laser writing unit and a photoconductor of the image forming apparatus concerning 3rd Example of this invention. FIG. 12 is an explanatory diagram illustrating a vibrating mirror or the like as an optical deflection unit of a laser writing unit as an optical scanning device of the image forming apparatus illustrated in FIG. 11. FIG. 10 is an explanatory diagram illustrating a vibrating mirror as an optical deflection unit and an aperture as a diaphragm unit of a laser writing unit as an optical scanning device of an image forming apparatus according to a fourth embodiment of the present invention, and FIG. (B) shows the aperture arranged close to the vibrating mirror, and (c) shows the size of the opening provided in the aperture. It is explanatory drawing. FIG. 5 is an explanatory diagram showing a modification of the laser writing unit shown in FIG. It is a perspective view which shows the conventional vibration mirror etc. FIG. 16 is a perspective view illustrating a state in which the vibrating mirror illustrated in FIG. (A) is explanatory drawing which shows the example of deflection | deviation of the light beam which injected into the concave edge part of the vibrating mirror of the waved state shown by FIG. FIG. 17B is an explanatory diagram illustrating a deflection example of the light beam incident on the convex end portion of the oscillating mirror in the undulated state illustrated in FIG. 16. It is a figure which shows the example of direction adjustment of the light source in an Example. It is a figure which shows the example of direction adjustment of the coupling lens in an Example. It is a figure which shows the example of direction adjustment of the light source unit including the aperture | diaphragm | squeeze part in an Example. It is a figure which shows the example of direction adjustment of the light guide means in an Example. It is a figure which shows the example of the position adjustment of the light source part in an Example. It is a figure which shows the example of the position adjustment of the coupling lens in an Example. It is a figure which shows the example of the position adjustment of the light source unit in an Example. It is a figure which shows the example of the position adjustment of the aperture | diaphragm | squeeze part in an Example. It is a figure which shows the example of the position adjustment of the light source unit including the aperture | diaphragm | squeeze part in an Example. It is a figure which shows the example of the position adjustment of the vibration mirror part in an Example.

Explanation of symbols

1 Image forming apparatus 8, 8Y, 8M, 8C, 8K Photosensitive drum (photosensitive member)
9 Charging charger (charging device)
13 Developing device 22, 22 'Laser writing unit (optical scanning device)
32, 32 'imaging optical system 38 cylinder lens (line image forming lens)
48, 48a, 48b Light source unit (light source unit)
56 Adjustment screw (Direction adjustment means, Adjustment means)
69 Screw holes for adjustment (direction adjustment means, adjustment means)
59, 60, 61, 62 Light beam 80 Rotating member (light deflection unit adjusting means, adjusting means)
85 Vibration mirror (light changing part)
95 Deflection surface 97 Torsion beam 98 Frame (frame)
130 Aperture (diaphragm)
132 opening 135 adjusting unit (aperture adjusting unit, adjusting unit)
X Main scan direction

Claims (28)

A light source that emits a light beam, a line image forming lens that collects the light beam from the light source in only one direction to form a line image, and deflects the light beam that has passed through the line image forming lens. In an optical scanning device comprising: an optical deflection unit; and an imaging optical system that forms an image of the light beam deflected by the optical deflection unit in a spot shape on a surface to be scanned.
An optical scanning apparatus comprising: an adjusting unit configured to adjust a position of the light beam from the light source unit irradiated on the light deflection unit.   The optical scanning apparatus according to claim 1, wherein the adjustment unit is a direction adjustment unit that adjusts a direction of the light beam from the light source unit in a main scanning direction of the light deflection unit.   2. The position adjusting unit according to claim 1, wherein the adjusting unit is a position adjusting unit that adjusts an irradiation position of the light beam from the light source unit to the light deflecting unit in a main scanning direction of the light deflecting unit. Optical scanning device.   The optical scanning device according to claim 1, wherein the adjustment unit is a light deflection unit adjustment unit that adjusts a position and an inclination of the light deflection unit in a main scanning direction of the light deflection unit.   The adjusting means includes at least a diaphragm portion provided between the light source portion and the light deflection portion and provided with an opening for restricting a light beam width of the light beam from the light source portion. The optical scanning device according to claim 1, wherein:   6. The optical scanning device according to claim 5, wherein the aperture section includes aperture section adjusting means for adjusting the position and inclination of the aperture section in the main scanning direction of the optical deflection section.   7. The optical scanning device according to claim 5, wherein the aperture section is disposed in the vicinity of the light deflection section between the light source section and the light deflection section.   8. The optical scanning device according to claim 5, wherein the aperture section is disposed between the line image forming lens and the light deflection section. 9.   9. The optical scanning according to claim 5, wherein the opening is formed larger than a width of the light deflection unit in a main scanning direction of the light deflection unit. apparatus.   The light deflection unit includes a frame, a torsion beam having one end connected to an inner edge of the frame, the other end of the torsion beam, and capable of deflecting the light beam from the light source unit and the torsion beam 10. The optical scanning device according to claim 1, wherein the optical scanning device is a oscillating mirror having a deflecting surface that is rotatable around the center. A light source unit that emits a light beam, a coupling lens that converts the light beam from the light source unit into a predetermined convergence state, and a vibrating mirror unit that deflects the light beam that has passed through the coupling lens by sinusoidal oscillation. An imaging optical unit that forms an image of the light beam deflected by the vibration mirror unit in a spot shape on a surface to be scanned;
An adjustment unit is provided for adjusting a position of the light beam from the light source unit irradiated on the vibration mirror unit, and the center of the light beam is irradiated on a substantially rotation axis of the vibration mirror unit by the adjustment unit. An optical scanning device.   The optical scanning device according to claim 11, wherein the adjusting unit is a direction adjusting unit that adjusts a direction of the light beam from the light source unit in a main scanning direction of the vibrating mirror unit.   The optical scanning apparatus according to claim 12, wherein the direction adjusting unit is a unit that adjusts the direction of the light source unit.   The optical scanning apparatus according to claim 12, wherein the direction adjusting unit is a unit that adjusts the direction of the coupling lens.   The optical scanning device according to claim 12, wherein the direction adjusting unit is a unit that adjusts a direction of a light source unit in which the light source unit and the coupling lens are integrated.   A light source unit in which the light source unit and the coupling lens are integrated, and the light source unit further includes a diaphragm unit provided with an opening for regulating a light beam width of the light beam from the light source unit; 13. The optical scanning device according to claim 12, wherein the direction adjusting means is means for adjusting the direction of the light source unit.   The optical scanning device according to claim 16, wherein the opening is formed to be larger than a width of the vibrating mirror portion in a main scanning direction of the vibrating mirror portion.   The optical scanning device according to claim 16, further comprising a light guide unit configured to guide a light beam to the vibration mirror unit, wherein the direction adjustment unit is a unit configured to adjust a direction of the light guide unit. .   The optical scanning device according to claim 12, wherein the direction adjusting unit is a unit that adjusts the direction of the vibrating mirror unit.   The light according to claim 11, wherein the adjustment unit is a position adjustment unit that adjusts an irradiation position of the vibration mirror unit of the light beam from the light source unit in a main scanning direction of the vibration mirror unit. Scanning device.   21. The optical scanning device according to claim 20, wherein the position adjusting unit is a unit that adjusts a position of the light source unit in a main scanning direction of the vibrating mirror unit.   21. The optical scanning device according to claim 20, wherein the position adjusting unit is a unit that adjusts a position of the coupling lens in a main scanning direction of the vibration mirror unit.   21. The light according to claim 20, wherein the position adjusting unit is a unit that adjusts a position of a light source unit in which the light source unit and the coupling lens are integrated in a main scanning direction of the vibrating mirror unit. Scanning device.   The position adjusting means further includes a diaphragm portion provided between the light source portion and the vibrating mirror portion and provided with an opening for restricting a light beam width of the light beam from the light source portion. 21. The optical scanning device according to claim 20, wherein the optical scanning device is a means for adjusting the position of the diaphragm in the main scanning direction of the vibrating mirror.   A position of a light source unit in which the position adjusting unit integrates the light source unit, the coupling lens, and a diaphragm unit provided with an aperture for regulating a light beam width of the light beam from the light source unit; 21. The optical scanning device according to claim 20, wherein the optical scanning device is a means for adjusting the vibration mirror unit in a main scanning direction.   25. The optical scanning device according to claim 24, wherein the opening is formed to be larger than a width of the vibration mirror unit in a main scanning direction of the vibration mirror unit.   21. The optical scanning device according to claim 20, wherein the adjusting unit is a unit that adjusts a position of the vibrating mirror unit in a main scanning direction of the vibrating mirror unit.   The optical scanning device according to any one of claims 1 to 27, wherein the optical scanning device is an image forming apparatus including at least a photosensitive member, a charging device, a developing device, and an optical scanning device. An image forming apparatus comprising:

Images