JP2008175296A - Hydrostatic sliding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a hydrostatic sliding device improving the consuming efficiency of compressed fluid while keeping satisfactory sliding motion. <P>SOLUTION: The hydrostatic sliding device comprises a sliding guide 2 having a plurality of throttle openings along the sliding direction, a compressed fluid supply source 8 for supplying compressed fluid to each of the plurality of throttle openings, a slider 3 provided movably along the sliding guide 2, and a flow path selecting part 6 for selecting the throttle opening to which the compressed fluid is supplied from the compressed fluid supply source 8, out of the plurality of throttle openings, depending on the moving position of the slider 3. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a hydrostatic slide device using a compressed fluid. For example, the present invention relates to a hydrostatic slide device suitable for a hydrostatic fluid bearing or the like.

Conventionally, as a static pressure slide device, a static pressure generating portion provided on the surface of the shaft portion, and a cylindrical fluid that is externally fitted to the shaft portion by supplying a compressed fluid from a flow path inside the shaft portion to the static pressure generating portion. One that supports the slider in a non-contact manner is known.
For example, in Patent Document 1, as such a static pressure slide device, a shaft portion which is a static pressure generating portion is configured by a cylindrical porous body, and a shaft portion is formed by a throttle gas ejected from the entire outer periphery of the shaft portion. A hydrostatic slider that supports a slider provided with a slight gap on the outer peripheral side thereof in a non-contact manner and a shaft unit for the hydrostatic slider are described.
JP 2003-314551 A

However, the conventional hydrostatic slide device as described above has the following problems.
In the technique described in Patent Document 1, since the squeezed gas is ejected from the entire outer periphery of the porous body forming the shaft portion, the slider can be supported in a non-contact manner at any position on the shaft portion, but the slider is disposed. The throttle gas is also ejected from the shaft portion that is not. Therefore, for example, when the moving stroke of the slider is long, there is a problem that a large amount of throttle gas is released to the atmosphere and the throttle gas is consumed inefficiently.
Although it is conceivable that the throttle gas is ejected only at the slider position by providing the throttle gas outlet on the slider side, for example, in order to supply the throttle gas to the slider, piping is performed with a tube or the like. There is a need. When such a pipe is present, there is a possibility that the slider movement stroke cannot be made too large, the slider movement speed cannot be increased, or the slider movement cannot be precisely positioned.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a static pressure slide device that can improve the consumption efficiency of the compressed fluid while keeping the operation of the slider favorable.

In order to solve the above-described problem, in the invention according to claim 1, in the static pressure slide device, a slide guide having a plurality of static pressure generating portions for injecting the compressed fluid along the slide direction;
A compressed fluid supply section capable of supplying a compressed fluid to each of the plurality of static pressure generating sections; a slider provided movably along the slide guide; and supplying the compressed fluid from the compressed fluid supply section The static pressure generating unit is configured to include a static pressure generating position selecting unit that selects from the plurality of static pressure generating units according to the moving position of the slider.
According to the present invention, the static pressure generation position selection section can change the static pressure generation section that supplies the compressed fluid from the compressed fluid supply section in accordance with the movement position of the slider. The compressed fluid can be supplied only from the pressure generating unit, and the slider can be held in non-contact with the slide guide. As a result, it is possible to reduce the consumption of the compressed fluid as compared with the case where the compressed fluid is supplied from all the static pressure generating portions of the slide guide.

According to a second aspect of the present invention, in the static pressure slide device according to the first aspect, the compressed fluid supply section includes a compressed fluid flow path that is independently connected to the plurality of static pressure generating sections, The static pressure generation position selection unit is configured to selectively switch the compressed fluid flow path through which the compressed fluid flows from the compressed fluid supply unit.
According to the present invention, the compressed fluid can be supplied only to the static pressure generator connected to the selected compressed fluid flow path by selectively switching the compressed fluid flow path by the static pressure generation position selector. .

According to a third aspect of the present invention, in the static pressure slide device according to the first or second aspect of the present invention, the static pressure slide device further includes a position detection sensor that detects a movement position of the slider, and the static pressure generation position selection unit includes the position detection sensor. The static pressure generating section that supplies the compressed fluid is changed according to the output of
According to the present invention, the position detection sensor detects the moving position of the slider, and the static pressure generation position selection unit can change the static pressure generation unit that supplies the compressed fluid by the output of the position detection sensor. Even if the compressed fluid is supplied only to a static pressure generating portion in a narrow range only in the vicinity of the moving position of the slider, the slider can be reliably supported in a non-contact manner.

  According to the static pressure slide device of the present invention, the compressed fluid can be supplied only from the static pressure generating portion near the position of the slider provided in the slide guide. There is an effect that consumption efficiency can be improved.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. In all the drawings, even if the embodiments are different, the same or corresponding members are denoted by the same reference numerals, and common description is omitted.

[First Embodiment]
A hydrostatic slide device according to a first embodiment of the present invention will be described.
FIG. 1 is a schematic front view showing a schematic configuration of a hydrostatic slide device according to a first embodiment of the present invention. FIG. 2 is a side view of FIG. FIG. 3 is a cross-sectional view taken along lines Bb, Cc, and Dd in FIG. FIG. 4 is a configuration block diagram of the flow path switching unit of the hydrostatic slide device according to the first embodiment of the present invention.

As shown in FIGS. 1 to 3, the schematic configuration of the hydrostatic slide device 1 according to the present embodiment includes a slide guide 2, a slider 3, a compressed fluid supply source 8 (compressed fluid supply unit), and a flow path switching unit 6 (statically). Pressure generation position selection unit).
The hydrostatic slide device 1 of the present embodiment constitutes a non-contact bearing mechanism that can move in one axial direction, and various mechanisms can be constructed by using it together with other members and devices.

The slide guide 2 is a shaft-shaped guide member that supports the slider 3 in a non-contact manner on the outer peripheral side and guides the movement of the slider 3 in one axial direction. As long as the slide guide 2 can be slidably fitted to the slider 3, an appropriate cross-sectional shape, for example, a rectangular shape, a polygonal shape, an elliptical shape or the like can be adopted. In the present embodiment, an example in which a circular cross section is provided and the outer shape is a substantially cylindrical shape will be described.
On the cylindrical guide surface 2a that forms the outer peripheral surface of the slide guide 2, aperture openings 2b and 2c in which a plurality of aperture openings are arranged at a substantially constant pitch L in the axial direction at positions that divide the circumferential direction into three equal parts. 2d are formed.

1-3, the eight aperture openings 2b ₁ , 2b ₁ , 2b _{2 are formed on the} upper guide surface 2a of the slide guide 2 in FIGS. 1 to 3 from one end side in the axial direction (left side in FIG. 3). 2b ₂ , 2b ₃ , 2b ₃ , 2b ₄ , 2b ₄ are arranged (see FIGS. 2 and 3).
The diaphragm opening 2c has the same configuration as that shown in FIG. 2 in which the diaphragm opening 2b is rotated by 120 ° counterclockwise with respect to the central axis of the slide guide 2, and eight apertures are formed from one end in the axial direction. The aperture openings 2c ₁ , 2c ₁ , 2c ₂ , 2c ₂ , 2c ₃ , 2c ₃ , 2c ₄ , 2c ₄ are arranged (see FIGS. 2 and 3).
The aperture opening 2d has the same configuration as that shown in FIG. 2 in which the aperture opening 2b is rotated by 240 ° counterclockwise with respect to the central axis of the slide guide 2, and eight apertures are formed from one end in the axial direction. aperture _{2d 1, 2d 1, 2d 2} , 2d 2, 2d 3, 2d 3, 2d 4, 2d 4 are arrayed (see Figure 1-3).
As shown in FIG. 3, each of these aperture openings constitute a pipe line extending in the radial direction inside the slide guide 2.

On the other hand, in the slide guide 2, compressed fluid flow paths P ₁ , P ₂ , P ₃ , and P ₄ having different lengths in the axial direction correspond to the throttle openings 2b (2c, 2d). Are arranged substantially in parallel along a plane passing through the central axis of the slide guide 2. Two pipe lines extending in the radial direction of the slide guide 2 from each throttle opening are connected to each other at the end portion on the other axial end side (right side in the drawing) of these compressed fluid flow paths.
In the present embodiment, when the subscript i (i = 1, 2, 3, 4) is used, the throttle openings 2b _i , 2b _i (2c _i , 2c _i , 2d) are provided at the ends of the compressed fluid flow paths P _{i. i} , 2d _i ) are connected to each other. Hereinafter, for the sake of simplicity, each of four arbitrary codes X ₁ , X ₂ , X ₃ , and X ₄ whose subscripts change from 1 to 4 will be expressed as X _i .
In the present embodiment, the slide guide 2 uses a solid metal or a synthetic resin that does not allow the compressed fluid to permeate. Each of the compressed fluid flow paths and the pipes extending inward from the respective throttle openings are defined as slide guides. 2 is configured as a hole dug.

The one end of each compression fluid passages P _i, pipe 7 for supplying compressed fluid independently are respectively connected via a joint 7a. That is, in this embodiment, twelve pipes 7 are provided.

Further, a position detection scale 5 for referring to the position of the slide guide 2 in the axial direction is provided on the outer peripheral portion of the slide guide 2 on the inner side of the guide surface 2a.
As the position detection scale 5, a scale or a linear encoder capable of detecting the position in a non-contact state can be adopted according to the type of the position detection sensor 4 described later. For example, an optical scale composed of black and white line patterns with appropriate pitches, a magnetic scale with magnetic poles alternating at appropriate pitches, a mechanical scale with repeated irregularities at appropriate pitches, and the like can be employed.

The slider 3 is a member that is fitted around the slide guide 2 and moves along the axial direction. In the present embodiment, a cylindrical portion having a width W and a hole portion having an inner diameter slightly larger than the diameter of the guide surface 2 a is provided in the central portion of the block member having a rectangular shape in side view, and is substantially along the outer peripheral surface of the slide guide 2. The inner peripheral surface 3a is formed.
The width W and the arrangement pitch L of the aperture openings can be appropriately set so that the slider 3 can be smoothly moved in the axial direction while being held in a non-contact manner. In the present embodiment, the dimension is set such that at least two aperture openings face different positions in the axial direction within the width W of the inner circumferential surface 3a of the slider 3 regardless of the position of the slider 3 in the axial direction. ing.

In addition, a position detection sensor 4 for detecting the movement position or movement amount of the slider 3 from the position detection scale 5 is provided in the vicinity of the slider inner peripheral surface 3 a at a position facing the position detection scale 5. The detection output of the position detection sensor 4 is sent to the flow path switching unit 6 in this embodiment.
As the position detection sensor 4, for example, an appropriate non-contact type sensor such as a reflection type optical sensor, a magnetic sensor, or a capacitance sensor can be adopted.

In addition, the shape of the outer peripheral part of the slider 3 is an example, Comprising: According to the use of the static pressure slide apparatus 1, various shapes can be provided. Further, an appropriate separate member that moves in the axial direction of the slide guide 2 together with the slider 3 may be fixed. Moreover, in order to attach such another member to the outer peripheral part of the slider 3, for example, an appropriate attachment part such as a screw hole may be formed.
In this embodiment, since the guide surface 2a and the slider inner peripheral surface 3a are cylindrical surfaces, the position detection sensor 4 always faces the position detection scale 5 when the slider 3 moves, and the axis of the slide guide 2 when moving. It is assumed that the slider 3 is used so as not to rotate around the direction.
For example, the slider 3 or another member attached to the slider 3 is used so as to be prevented from rotating about the axial direction by an external mechanism (not shown).
Further, for example, the position detection sensor 4 and the position detection scale are maintained by decentering the center of gravity of the slider 3 or another member attached to the slider from the center axis of the slide guide 2 and keeping the posture of the slider 3 constant by the action of gravity. 5 may be opposed to each other.
When such usage is difficult, the shapes of the slider inner peripheral surface 3a and the guide surface 2a are orthogonal to each other as a shape that does not rotate around the central axis other than the circular shape, for example, a rectangle, a polygon, an ellipse. What is necessary is just to employ | adopt shapes, such as a substantially circular shape provided with the shape or the uneven | corrugated | grooved part etc. which mutually fit on a circumference.

  The compressed fluid supply source 8 supplies a constant-pressure compressed fluid to the flow path switching unit 6 through the pipe 8a in order to form a static pressure for supporting the slider 3 on the guide surface 2a in a non-contact manner. It is. As the compressed fluid, compressed air, appropriate compressed gas, or the like can be employed.

  The flow path switching unit 6 switches the flow path of the compressed fluid supplied from the compressed fluid supply source 8 through the pipe 8 a to the preset pipe 7 according to the movement position of the slider 3 and selects the compressed fluid. As shown in FIG. 4, a flow path branching section 62, a static pressure generation position calculating section 60, and a flow path branching the pipe 8 a into a plurality of (in this embodiment, 12) pipes 7. It consists of a selector 61.

The static pressure generation position calculation unit 60 calculates a position for generating static pressure based on a position detection signal 200 including position information of the slider 3 in the axial direction of the slide guide 2 input from the outside, and generates a static pressure. A flow path selection signal 201 for selecting a compressed fluid flow path leading to the aperture opening corresponding to the position to be transmitted is sent to the flow path selection unit 61.
That is, the static pressure generation position calculation unit 60 obtains the range in which the slider inner peripheral surface 3a of the slider 3 is located from the position information of the slider 3, specifies the aperture opening facing the slider inner peripheral surface 3a, and determines the slider inner periphery. The distance from the end of the surface 3a in the axial direction to the closest aperture opening is calculated.
Then, determine the aperture stop facing the slider inner peripheral surface 3a at the time, the pipe 7 connected to a compressed fluid flow path P _i and it leads to an aperture stop located within a predetermined distance range from the slider 3. This predetermined distance takes into consideration the pressure propagation speed of the compressed fluid when the valve 63 is opened, the moving speed of the slider 3, etc., and supports the slider 3 in a non-contact manner by the time when the slider 3 is expected to move within that range. The distance is set such that a sufficient static pressure can be formed.
And the flow-path selection signal 201 corresponding to the piping 7 corresponding to each is generated.

  The flow path selection unit 61 selects the pipe 7 that supplies the compressed fluid according to the flow path selection signal 201. The flow path is selected by opening and closing the valves 63 provided in the pipes 7 branched by the flow path branching section 62 independently by electromagnetic open / close means or open / close means using hydraulic pressure, air pressure, or the like. Done.

Next, the operation of the static pressure slide device 1 of the present embodiment will be described.
In this embodiment, each _{P i} each aperture _2b to i, 2b _i, aperture _2c i, 2c _i, aperture _2d i, is 2d _i provided in the throttle opening 2b, 2c, 2d. In the flow channel selector 61, the compressed fluid can be supplied independently to all the compressed fluid channels. Then, the static pressure acting on the slider inner peripheral surface 3a becomes uniform in the radial direction, and the slider 3 can be held in a non-contact manner by making the central axis of the slider inner peripheral surface 3a of the slider 3 coincide with the central axis of the slide guide 2. as such, the iris opening 2b, 2c, each compressed fluid channels P _i and 2d is designed so as to collectively selected for each index i.
Therefore, in the following, the aperture openings 2b _i , 2b _i , 2c _i , 2c _i , 2d _i , and 2d _i are respectively set to a first static pressure generating unit 71 and a second static pressure generating unit 72 according to the value of i. The third static pressure generator 73 and the fourth static pressure generator 74 will be referred to.

As shown in FIG. 3, assuming that the slider 3 is in the third static pressure generating unit 73, the position of the slider 3 is monitored by the position detection sensor 4, and the position information of the slider 3 is the position detection signal 200. It is transmitted to the static pressure generation position calculation unit 60.
The static pressure generation position calculation unit 60 detects from the position detection signal 200 that the slider inner peripheral surface 3a is in a position that covers all the throttle apertures of the third static pressure generation unit 73. For example, the fourth static pressure generation unit It is detected that the diaphragm apertures 2b ₄ , 2c ₄ , 2d ₄ on the left side of 74 are within a predetermined distance.
In this case, a flow path selection signal 201 is generated to open the valves 63 connected to the compressed fluid flow paths P ₃ and P ₄ and to close the other valves 63 so as to supply the compressed fluid to the compressed fluid flow paths P ₃ and P ₄ .
The flow path selection unit 61 receives the flow path selection signal 201 and performs control to open the valves 63 corresponding to the pipes 7 connected to the compressed fluid flow paths P ₃ and P ₄ and close the other valves 63. Do. As a result, the compressed fluid is supplied to the third static pressure generator 73 and the fourth static pressure generator 74, and the non-contact support of the slider 3 is maintained.

  As a result of continuing the above control, in the present embodiment, the compressed fluid is supplied to one or both of the static pressure generating portion at a position facing the slider inner peripheral surface 3a and the static pressure generating portion adjacent to the slider 3, The supply of the compressed fluid is stopped to the other static pressure generating portions. Here, the compressed fluid is supplied to the static pressure generating portion located within a predetermined distance from the slider 3 so that, when the slider 3 moves to that position, a static pressure for holding the slider 3 in a non-contact manner is generated. This is to stabilize the non-contact holding force of the slider 3 and make the slider 3 move smoothly.

  As described above, in the present embodiment, the compressed fluid is supplied only to one or both of the static pressure generating unit for directly holding the slider 3 in a non-contact manner and the static pressure generating unit adjacent to the slider 3. . Therefore, it is possible to efficiently supply the compressed fluid and reduce wasteful consumption.

Next, a first modification of the present embodiment will be described.
FIG. 5 is a cross-sectional view corresponding to the cross sections BB, CC, and DD of FIG. 2 in the static pressure slide device according to the first modification of the first embodiment of the present invention.

The static pressure slide device 100 according to the present embodiment is replaced with the slide guide 2, the compressed fluid flow paths P _i , the throttle openings 2 b _i , 2 c _i , and 2 d _i of the static pressure slide device 1 according to the first embodiment. , Each includes a slide guide 20, each compressed fluid flow path Q _i , and each opening 20b _i , 20c _i , 20d _i . Hereinafter, a description will be given centering on differences from the first embodiment.

The slide guide 20 has a substantially cylindrical outer shape similar to that of the slide guide 2, but is formed of a porous body, and a guide surface 20a corresponding to the guide surface 2a has a diaphragm opening. The difference is that no opening is formed.
The porous body used for the slide guide 20 may be any porous body as long as the porous body has continuous pores that allow the compressed fluid to pass therethrough and obtain an appropriate throttling effect. In this embodiment, a sintered metal is employed as an example. Other examples include porous ceramics and porous synthetic resins.

The openings 20b _i (20c _i , 20d _i ) are provided at substantially the same positions as the aperture openings 2b _i (2c _i , 2d _i ) of the first embodiment in the axial and circumferential positions of the slide guide 20. The position of the slide guide 20 in the axial diameter direction is an opening provided at a distance h from the guide surface 20a. In the example of FIG. 5, the openings 20b ₁ (20c ₁ , 20d ₁ ) are provided directly on the side surface of the compressed fluid flow path Q ₁ , and the openings 20b _i (20c _i , 20d _i ) (i = 2, 3, 4). The pipe member that does not transmit the compressed fluid is arranged toward the inner side of the slide guide 20, and a pipe line extending in the axial radial direction of the slide guide 20 is formed.

Each compressed fluid channel Q _i is provided in the slide guide 20 with the same length and positional relationship as the compressed fluid channel P _i of the first embodiment, and is formed by a tube member that does not transmit the compressed fluid. This is a pipeline. One end side (the left side in the figure) of the slide guide 20 is connected to the pipe 7 by a joint 7a. Further, a pipe extending in the radial direction from the opening 20b _i (20c _i , 20d _i ) (i = 2, 3, 4) is provided on the other end side (the right side in the drawing) of the compressed fluid channels Q ₂ , Q ₃ , Q _4. The paths are connected to form an L-shaped pipe line from the joint 7a to each opening.

According to this modification, when compressed fluid is supplied through the compressed fluid channel Q _i , the compressed fluid is conveyed and supplied at a constant pressure without leaking into the slide guide 20, and the openings 20 b _i , 20c _i , 20d _i is reached and sprayed from the guide surface 20a in a state of being squeezed by the holes in the slide guide 20.
That is, a plurality of static pressure generating portions are configured along the axial direction of the slide guide 20 by each opening and the layer of the slide guide 20 covering each opening. In the present modification, a first static pressure generating unit 71, a second static pressure generating unit 72, a third static pressure generating unit 73, and a fourth static pressure generating unit 74 similar to those of the first embodiment are formed.
Then, the flow path switching unit 6 switches the compressed fluid flow path Q _i that supplies the compressed fluid according to the position of the slider 3 in the axial direction, thereby compressing from the guide surface 20a to the position of the slider 3 and the vicinity thereof. The fluid is ejected, the slider 3 is held in a non-contact manner with respect to the slide guide 2, and can be smoothly moved in the axial direction.
Here, the positions of the openings 20b _i , 20c _i , and 20d _i in the axial direction and the circumferential direction of the slide guide 20 are the same as those of the aperture openings 2b _i , 2c _i , and 2d _i , so that the compression is performed as in the first embodiment. Fluid can be supplied efficiently and wasteful consumption can be reduced.

  In this modification, since the aperture is formed by the pores of the porous body that forms the slide guide 20, when the static pressure generating portion is provided in a wide range in the axial direction, the size of each opening is reduced, so that A static pressure generating part can be formed by a pipe line. Therefore, manufacture of the slide guide 20 becomes easy.

Next, a second modification of the present embodiment will be described.
FIG. 6 is a schematic partial sectional view in a front view showing a schematic configuration of a static pressure slide device according to a second modification of the first embodiment of the present invention. FIG. 7 is a side view as seen from C in FIG. FIG. 8 is a cross-sectional view taken along line EE in FIG.

As shown in FIGS. 6 and 7, the static pressure slide device 110 according to the present modification includes the slide guide 2, the slider 3, each compressed fluid flow path P _i , the throttle openings 2 b _i , 2 c _i , 2d _i , instead of the position detection sensor 4, a slide guide 30, a slider 32, compressed fluid flow paths R _i , throttle openings 30b _i , 30c _i , 30d _i , and position detection sensors 31A and 31B are provided. Hereinafter, a description will be given centering on differences from the first embodiment.

Since the slide guide 30 does not include the position detection scale 5, the slide guide 30 is a substantially cylindrical member including a guide surface 30 a having no groove shape for attaching the position detection scale 5 such as the guide surface 2 a. Further, the positional relationships of the compressed fluid flow paths R _i and the throttle openings 30b _i , 30c _i and 30d _i corresponding to the compressed fluid flow paths P _i and the throttle openings 2b _i , 2c _i and 2d _i are different as described later. ing.
The slider 32 is obtained by deleting the position detection sensor 4 from the slide guide 2.

The compressed fluid channel R _i has the same length as the compressed fluid channel P _i , but as shown in FIG. 7, the compressed fluid channel R _i is illustrated on the same circumference in the vicinity of the guide surface 30 a of the slide guide 30. Twelve of compressed fluid flow paths R _{1 to} R ₄ , R _{1 to} R ₄ , and R _{1 to} R ₄ are arranged at an equiangular pitch in the clockwise direction. The first region 30b shown horizontally compressed fluid channel R ₁ to R ₄ which are arranged in the counterclockwise from the compressed fluid channel R ₁ arranged on the right side, which was divided into three equal parts in the circumferential direction of the guide surface 30a , A compressed fluid is supplied to form the first static pressure generating portion 71, the second static pressure generating portion 72, the third static pressure generating portion 73, and the fourth static pressure generating portion 74 in the axial direction of the slide guide 30. It is a channel group. Similarly, the compressed fluid flow paths R _{1 to} R ₄ are also applied to the second region 30c, the first region 30b, and the third region 30d sandwiched between the second regions 30c adjacent to the first region 30b in the counterclockwise direction, respectively. Are arranged so that compressed fluid can be supplied to each of the four static pressure generators.

The throttle apertures 30b _i , 30c _i , 30d _i are the ends on the other end side in the axial direction of the compressed fluid flow paths R _i from the guide surfaces 30a of the first region 30b, the second region 30c, and the third region 30d, respectively. Two pieces are connected to the part at a pitch L. These aperture openings are adjacent to each other with a pitch L in the axial direction of the slide guide 30. For this reason, as shown in FIG. 6, for example, the aperture openings 30b _i are arranged at an adjacent pitch L in the axial direction of the slide guide 30 and two at a 30 ° pitch in the circumferential direction of the slide guide 30. They are shifted and arranged in a spiral. The apertures 30b _i , 30c _i , and 30d _i arranged on the same cross section perpendicular to the axis are arranged at positions that equally divide the circumferential direction into three equal parts.

The position detection sensors 31 </ b> A and 31 </ b> B are non-contact sensors that detect the distance to the object to be detected. In this modification, the position detection sensors 31 </ b> A and 31 </ b> B are provided substantially oppositely on the outer peripheral surfaces of both ends of the slide guide 30. The distance to the surface 32a on one end side and the surface 32b on the other end side of the slider 32 can be measured. The detection outputs of the position detection sensors 31 </ b> A and 31 </ b> B are respectively sent to the flow path switching unit 6 and converted into necessary position information of the slider 32 by the static pressure generation position calculation unit 60.
As the position detection sensors 31A and 31B, for example, optical distance measuring sensors or the like can be employed.

  In this modification, the positions of the surfaces 32a and 32b on one end side and the other end side of the slider 32 are detected, respectively, but one of the position detection sensors 31A and 31B is deleted, and only the surface 32a is detected. Alternatively, the position of only the surface 32b may be detected.

Thus, in this modification, in a state of being positioned equidistant in a radial direction each compression fluid passages R _i from the guide surface 30a, as in the first embodiment, the axial direction of the slide guide 30 The four static pressure generators can be configured along the line.
For this reason, as in the first embodiment, the position detection sensors 31A and 31B detect the position of the slide guide 30 in the axial direction, and selectively select the static pressure generator according to the position of the slide guide 30. By supplying the compressed fluid, the compressed fluid can be efficiently supplied and wasteful consumption can be reduced.

In particular, in the present modification, each compressed fluid channel R _i is disposed in a circumferential direction at a certain depth from the guide surface 30a of the slide guide 30, and therefore, from the compressed fluid channel R _i to each throttle opening. The lengths of the pipes in the radial direction are equal. As a result, there is an advantage that the pressure loss at each aperture opening becomes constant.
Further, according to the present modification, the position detection sensors 31A and 31B are provided on the slide guide 30, so that the influence on the movement of the slider 32 can be further reduced.

[Second Embodiment]
A static pressure slide device according to a second embodiment of the present invention will be described.
FIG. 9 is a schematic partial cross-sectional view in front view showing a schematic configuration of a hydrostatic slide device according to the second embodiment of the present invention. FIG. 10 is a side view of FIG.

  As shown in FIGS. 9 and 10, the static pressure slide device 120 of the present embodiment is a slide instead of the slide guide 2, the slider 3, and the flow path switching unit 6 of the static pressure slide device 1 of the first embodiment. A guide 40, a slider 42, and a flow rate controller 80 are provided, and a jet slider 41 is further added.

  The slide guide 40 is a cylindrical member made of a non-magnetic material having the same diameter and the same length as the slide guide 2, and is provided with a plurality of openings 40b penetrating in the thickness direction. In the present embodiment, a total of 64 openings (= 8 × 8) are provided with a pitch L in the axial direction and a 45 ° pitch in the circumferential direction. The material of the slide guide 40 is made of nonmagnetic metal, ceramics, synthetic resin, or the like that does not allow the compressed fluid to pass therethrough.

  The slider 42 is made of a magnetic body having the same shape as the slider 32 of the second modification of the first embodiment, and the slider inner peripheral surface 3a is movably fitted to the guide surface 40a of the slider 42. ing.

The ejection slider 41 is a hollow cylindrical member having a slightly smaller diameter than the inner peripheral surface 40 c of the slide guide 40. The bottom surface of the cylinder of the ejection slider 41 is made of walls 41b and 41b made of metal or synthetic resin that does not allow the compressed fluid to pass through. The cylindrical portion is made of a porous body similar to the slide guide 20, and has a width w (however, , W> W). By setting the size of the width w to an appropriate size, the compressed fluid is ejected from the adjacent opening 40b prior to the movement of the slider 42, and the movement of the slider 42 is made smooth as in the first embodiment. be able to.
In the present embodiment, at least one of the wall body 41b and the throttle part 41a is magnetized, and magnetically attracts the slider 42, which is a magnetic body.
A chamber 41c, which is an empty room for allowing the compressed fluid to flow in, is formed inside the walls 41b and 41b and the constricted portion 41a. A joint 7 a connected to the pipe 81 is provided at the center of the wall body 41 b on one end side (the left side in the drawing) of the slide guide 40.

The pipe 81 is provided with a flexible pressure-resistant resin pipe wound in a spiral shape that can be expanded and contracted in the axial direction on the joint 7 a side, whereby the pipe 81 is injected within the range of the length of the slide guide 40. It has a length that can follow the movement of the slider 41, and can be expanded and contracted according to the movement of the ejection slider 41.
For this reason, the compressed fluid that has flowed into the chamber 41 c from the joint 7 a is ejected from the throttle portion 41 a to the radially outer side of the ejection slider 41 with a predetermined pressure, and the ejection slider 41 is not in contact with the inner peripheral surface 40 c of the slide guide 40. It is held in contact and is movable in the axial direction of the slide guide 40.

  The flow rate control unit 80 adjusts the flow rate of the compressed fluid supplied from the compressed fluid supply source 8 and guides the compressed fluid to the ejection slider 41 via the pipe 81, whereby the compressed fluid ejected from the throttle unit 41a. The pressure can be kept constant.

According to the static pressure slide device 120 of the present embodiment, the slider 42 and the ejection slider 41 are opposed to each other via the slide guide 40 by a magnetic force. When compressed fluid is supplied from the compressed fluid supply source 8, the compressed fluid is ejected from the chamber 41 c of the ejection slider 41 to the outside in the radial direction through the throttle portion 41 a at a constant pressure.
For this reason, the ejection slider 41 is held in non-contact with the inner peripheral surface 40c of the slide guide 40, and the compressed fluid is further ejected radially outward from the opening 40b facing the throttle portion 41a. That is, the compressed fluid is ejected from the opening 40b facing the slider inner peripheral surface 3a of the slider 42, and the slider 42 is held in a non-contact manner with respect to the guide surface 40a.
When the slider 42 moves in the axial direction, the ejection slider 41 is magnetically attracted to the slider 42 and moves so as to follow the slider 42. For this reason, the compressed fluid continues to be ejected to the slider 42 and its front and rear ranges by changing the ejection opening 40b.

As described above, in the present embodiment, when the ejecting slider 41 is moved by being magnetically attracted to the slider 42, the opening 40b that is a static pressure generating portion that supplies the compressed fluid is selected. That is, the ejection slider 41 constitutes a static pressure generation position selection unit.
Thereby, since the compressed fluid is supplied only within the range of the width w facing the slider 42 and the slider 42 is held in a non-contact manner, the compressed fluid can be efficiently supplied and wasteful consumption can be reduced.
In the present embodiment, since the static pressure generation position selection unit moves following the slider and selects the static pressure generation position, the position detection sensor can be omitted.

  In the description of the first embodiment, the example in which the static pressure generating unit is configured by a pair of openings having a pitch L adjacent in the axial direction of the slide guide is described as an example. Three compressed fluid channels may be provided with three or more openings, and if a required number of compressed fluid channels can be provided, only one opening may be provided in one compressed fluid channel. Good.

  In the description of the first embodiment, the example in which the static pressure generating units are set in advance in the axial direction at four locations and the static pressure generating unit is selected from them is described, but this is only an example. Any number of static pressure generators may be provided in the axial direction.

In the description of the first embodiment, the position of the slider is detected by the position detection sensor, and the static pressure generator that supplies the compressed fluid is selected. However, the position detection corresponding to the position of the slider is performed. If the signal or information corresponding thereto can be obtained by other means, the position detection sensor may be omitted.
For example, the position detection signal may be acquired by detecting the position of another member provided on the slider. Further, when the slider is fixed to, for example, a linear motor or a uniaxial drive mechanism, the corresponding position information may be acquired from the drive signals of these linear motor or uniaxial drive mechanism.
In addition, when the movement of another member to which the slider is fixed is known as a time function, such as being limited to a predetermined periodic movement, a static pressure generator that supplies the compressed fluid according to the time function is provided. You may perform control to change.

In the above description of the second embodiment, the ejection slider 41 is magnetically attracted to the slider 42 so that the static pressure generation position moves together with the ejection slider 41. By providing a moving mechanism for moving the ejecting slider 41 in the axial direction according to the axial position, the moving mechanism and the ejecting slider 41 may constitute a static pressure generation position selecting unit.
In this case, the movement accuracy of the ejection slider 41 can be reduced more than the movement accuracy of the slider 42 by setting the width w of the throttle portion 41 a of the ejection slider 41 to an appropriate size. Therefore, even if the piping 81 is connected and the movement accuracy is lowered, the slider 42 can be reliably held in a non-contact manner.

In addition, the constituent elements described in the above embodiments and modifications can be implemented in appropriate combination within the scope of the technical idea of the present invention, if technically possible.
For example, you may apply the structure using the slide guide by the porous body of the 1st modification of the said 1st Embodiment to a 2nd modification. For example, the position detection sensor of the second modification may be applied to the first embodiment, the first modification, the second embodiment, and the like.

It is a typical front view showing a schematic structure of a hydrostatic slide device concerning a 1st embodiment of the present invention. It is a side view of A view in FIG. It is sectional drawing which follows the BB, CC, and DD line in FIG. It is a block diagram of the flow path switching unit of the hydrostatic slide device according to the first embodiment of the present invention. It is sectional drawing equivalent to the BB, CC, DD cross section of FIG. 2 in the static pressure slide apparatus which concerns on the 1st modification of the 1st Embodiment of this invention. It is a fragmentary sectional view of the typical front view which shows schematic structure of the static pressure slide apparatus which concerns on the 2nd modification of the 1st Embodiment of this invention. It is a side view of the C view in FIG. It is sectional drawing which follows the EE line in FIG. It is a typical fragmentary sectional view of the front view which shows schematic structure of the static pressure slide apparatus which concerns on the 2nd Embodiment of this invention. It is a side view of F view in FIG.

Explanation of symbols

1,100,110,120 hydrostatic slide device 2,20,30,40 slide guides 2a, 20a, 30a, 40a guide surface _{2b 1, 2b 2, 2b 3} , 2b 4, 2c 1, 2c 2, 2c 3, 2c ₄ , 2d ₁ , 2d ₂ , 2d ₃ , 2d ₄ Aperture opening 3 Slider 4 Position detection sensor 5 Position detection scale 6 Channel switching unit 7, 81 Pipe 8 Compressed fluid supply source 40 b Opening (static pressure generating unit)
41 Injection slider (static pressure generation position selection unit)
41a Restriction part 41c Chamber 60 Static pressure generation position calculation part 61 Flow path selection part 62 Flow path branch part 71 First static pressure generation part 72 Second static pressure generation part 73 Third static pressure generation part 74 Fourth static pressure generation part 80 Flow Control Unit 200 Position Detection Signal 201 Channel Selection Signal P ₁ , P ₂ , P ₃ , P ₄ , Q ₁ , Q ₂ , Q ₃ , Q ₄ , R ₁ , R ₂ , R ₃ , R ₄ Compressed Fluid Flow path

Claims (3)

A slide guide having a plurality of static pressure generating portions for injecting the compressed fluid along the slide direction;
A compressed fluid supply section for supplying a compressed fluid to each of the plurality of static pressure generating sections;
A slider provided movably along the slide guide;
A static pressure slide device comprising: a static pressure generation position selection unit that selects a static pressure generation unit that supplies the compressed fluid from the compressed fluid supply unit from the plurality of static pressure generation units according to a movement position of the slider. The compressed fluid supply unit includes compressed fluid flow paths that are independently connected to the plurality of static pressure generating units,
The static pressure slide device according to claim 1, wherein the static pressure generation position selection unit selectively switches the compressed fluid flow path through which the compressed fluid flows from the compressed fluid supply unit. A position detection sensor for detecting the moving position of the slider;
The static pressure slide device according to claim 1, wherein the static pressure generation position selection unit changes a static pressure generation unit that supplies the compressed fluid according to an output of the position detection sensor.

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