[go: up one dir, main page]

JP2008164858A - Color filter substrate, manufacturing method thereof, and display device - Google Patents

Color filter substrate, manufacturing method thereof, and display device Download PDF

Info

Publication number
JP2008164858A
JP2008164858A JP2006353345A JP2006353345A JP2008164858A JP 2008164858 A JP2008164858 A JP 2008164858A JP 2006353345 A JP2006353345 A JP 2006353345A JP 2006353345 A JP2006353345 A JP 2006353345A JP 2008164858 A JP2008164858 A JP 2008164858A
Authority
JP
Japan
Prior art keywords
spacer
layer
thickness
light shielding
shielding layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006353345A
Other languages
Japanese (ja)
Inventor
Daisuke Tejima
大介 手島
Tetsuya Kobayashi
哲也 小林
Masahiro Kubo
正浩 久保
Junji Usuki
順二 臼杵
Shoji Mima
祥司 美馬
Hiroshi Iwase
浩 岩瀬
Kenji Matsusei
健司 松政
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP2006353345A priority Critical patent/JP2008164858A/en
Publication of JP2008164858A publication Critical patent/JP2008164858A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Liquid Crystal (AREA)
  • Optical Filters (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

【課題】着色層や突起層の厚さを調整することなく所定のフォトスペーサの高さを保持することを可能とするカラーフィルタ基板、その製造方法及び表示装置。
【解決手段】透明基板上に、スペーサ形成領域を有する所定のパターンの遮光層を形成する工程、前記遮光層により区画された領域に二次元的に複数色の画素着色層を配置すると同時に、前記遮光層のスペーサ形成領域上に順次三次元的に複数色のスペーサ着色層を積層する工程、前記複数色の画素着色層及びスペーサ着色層上に透明導電性膜を形成する工程、及び、前記二次元的に配置された複数色の画素着色層上の透明導電性膜の上面から前記スペーサ突起層の上面までの高さYを有するフォトスペーサを形成する工程を具備し、前記フォトスペーサの高さYの所望な値を得るように、前記画素着色層の厚さに応じて、前記遮光層の厚さを制御することを特徴とする。
【選択図】図1
A color filter substrate, a method for manufacturing the color filter substrate, and a display device capable of maintaining a predetermined height of a photo spacer without adjusting the thickness of a colored layer or a protruding layer.
A step of forming a light-shielding layer having a predetermined pattern having a spacer formation region on a transparent substrate, and simultaneously disposing a plurality of pixel coloring layers in a two-dimensional manner in a region partitioned by the light-shielding layer, A step of sequentially stacking a plurality of color spacer coloring layers three-dimensionally on the spacer formation region of the light shielding layer, a step of forming a transparent conductive film on the pixel coloring layers and the spacer coloring layers of the plurality of colors, and the two Forming a photo spacer having a height Y from the upper surface of the transparent conductive film on the pixel coloring layers of a plurality of colors arranged in a dimension to the upper surface of the spacer protrusion layer, the height of the photo spacer The thickness of the light shielding layer is controlled in accordance with the thickness of the pixel coloring layer so as to obtain a desired value of Y.
[Selection] Figure 1

Description

本発明は、カラーフィルタ基板、その製造方法及び表示装置に係り、特に、マルチドメイン垂直配向(MVA)モード液晶表示装置用のカラーフィルタ基板、その製造方法及び液晶表示装置に関する。   The present invention relates to a color filter substrate, a manufacturing method thereof, and a display device, and more particularly, to a color filter substrate for a multi-domain vertical alignment (MVA) mode liquid crystal display device, a manufacturing method thereof, and a liquid crystal display device.

液晶表示装置は、小型、薄型、低消費電力及び軽量という特徴を有するため、様々な表示装置、例えば、パーソナルコンピューター、テレビジョン装置、携帯電話等に広範に使用されている。   A liquid crystal display device has features such as a small size, a thin shape, low power consumption, and light weight, and thus is widely used in various display devices such as personal computers, television devices, and mobile phones.

このような液晶表示装置では、カラーフィルタ基板と薄膜トランジスタ(TFT)基板の両基板間に液晶層の所定の厚みを保持するために、スペーサと呼ばれるガラス又は樹脂製の球状体粒子(ビーズ)あるいは棒状体をセル内部に散布していた。このスペーサは、液晶に対して異物として存在することから、スペーサ粒子近傍の液晶分子の配向が乱され、この部分で光漏れを生じ、液晶表示装置のコントラストが低下し、表示品質に悪影響を及ぼすといった問題を有している。   In such a liquid crystal display device, in order to maintain a predetermined thickness of the liquid crystal layer between both the color filter substrate and the thin film transistor (TFT) substrate, glass or resin spherical particles (beads) or rods called spacers are used. I was spraying my body inside the cell. Since this spacer exists as a foreign substance with respect to the liquid crystal, the alignment of the liquid crystal molecules in the vicinity of the spacer particles is disturbed, light leakage occurs in this portion, the contrast of the liquid crystal display device is lowered, and the display quality is adversely affected. Have the problem.

この問題を解決する技術として、例えば、感光性樹脂層をフォトリソグラフィー法によりパターニングすることにより、所望の位置、例えば、画素間の境界にある格子パターン状のブラックマトリクス上に、柱状の樹脂製スペーサを形成する方法が提案されている(例えば、特許文献1参照)。このようなスペーサを、以下、フォトスペーサと呼ぶ。   As a technique for solving this problem, for example, by patterning a photosensitive resin layer by a photolithography method, a columnar resin spacer is formed on a black matrix having a lattice pattern at a desired position, for example, at a boundary between pixels. Has been proposed (see, for example, Patent Document 1). Such a spacer is hereinafter referred to as a photo spacer.

このフォトスペーサは、画素を避けた位置に形成できるので、表示品質の向上を望むことができる。また、フォトスペーサは一般に、感光性樹脂組成物を基板表面に塗布し、乾燥した後に、所定の微細パターンを持つフォトマスクを通した光で露光し、現像し、ベークすることにより形成される。   Since the photo spacer can be formed at a position avoiding the pixels, improvement in display quality can be desired. Photo spacers are generally formed by applying a photosensitive resin composition to a substrate surface, drying, exposing to light through a photo mask having a predetermined fine pattern, developing, and baking.

このようなフォトスペーサを、複数の着色層を二次元的に形成する際に同時に遮光層上の所定の位置に三次元的に積層することにより形成する方法も提案されている(例えば、特許文献2参照)。この場合のフォトスペーサの高さは、最終の積層膜を形成する直前の高さを測定し、その値を基に最終積層膜の膜厚を調整することにより所定の値を維持していた。   There has also been proposed a method of forming such a photo spacer by three-dimensionally laminating a plurality of colored layers at a predetermined position on the light shielding layer at the same time as forming a plurality of colored layers (for example, Patent Documents). 2). The height of the photo spacer in this case was maintained at a predetermined value by measuring the height immediately before forming the final laminated film and adjusting the film thickness of the final laminated film based on the measured value.

しかし、このようなフォトスペーサの高さの調整方法では、マルチドメイン垂直配向(MVA)モード液晶表示装置用のカラーフィルタ基板の場合には、問題がある。即ち、MVAモード液晶表示装置用のカラーフィルタ基板では、複数の着色層からなるカラーフィルタを形成した後に、垂直配向用リブ(突起)を形成するが、その際に遮光層上の所定の位置に形成された複数の着色層の積層上に、上記リブを構成する材料からなる層も形成し、これが最終積層膜となる。従って、フォトスペーサの高さを調整するために最終積層膜となるリブの厚さを変更すると、リブの厚さが設計値に対してずれてしまい、視野角の悪化、コントラストの低下などの不具合が生じてしまう。そのため、フォトスペーサの高さを得るためには、遮光層及び着色層の厚さの複雑な調整が必要となる。
特開2001−91954公報 特開2006−292497公報
However, such a method for adjusting the height of the photo spacer has a problem in the case of a color filter substrate for a multi-domain vertical alignment (MVA) mode liquid crystal display device. That is, in a color filter substrate for an MVA mode liquid crystal display device, a vertical alignment rib (protrusion) is formed after forming a color filter composed of a plurality of colored layers. A layer made of the material constituting the rib is also formed on the plurality of formed colored layers, and this is the final laminated film. Therefore, if the thickness of the rib that will be the final laminated film is changed to adjust the height of the photo spacer, the thickness of the rib will deviate from the design value, resulting in problems such as a deterioration in viewing angle and a decrease in contrast. Will occur. Therefore, in order to obtain the height of the photo spacer, complicated adjustment of the thickness of the light shielding layer and the colored layer is required.
JP 2001-91954 A JP 2006-292497 A

本発明は、以上のような事情の下になされ、着色層や突起層の厚さを調整することなく所定のフォトスペーサの高さを保持することを可能とするカラーフィルタ基板、その製造方法及び表示装置を提供することを目的とする。   The present invention has been made under the circumstances as described above, and a color filter substrate capable of maintaining the height of a predetermined photo spacer without adjusting the thickness of a colored layer or a protruding layer, a manufacturing method thereof, and An object is to provide a display device.

上記課題を解決するために、本発明の第1の態様は、透明基板上に、スペーサ形成領域を有する所定のパターンの遮光層を形成する工程、前記遮光層により区画された領域に二次元的に複数色の画素着色層を配置すると同時に、前記遮光層のスペーサ形成領域上に順次三次元的に複数色のスペーサ着色層を積層する工程、前記複数色の画素着色層及びスペーサ着色層上に透明導電性膜を形成する工程、及び前記二次元的に配置された複数色の画素着色層上の透明導電性膜上に所定のパターンの突起層を形成すると同時に、前記三次元的に積層された複数色のスペーサ着色層上の透明導電性膜上にスペーサ突起層を被覆して、前記二次元的に配置された複数色の画素着色層上の透明導電性膜の上面から前記スペーサ突起層の上面までの高さYを有するフォトスペーサを形成する工程を具備し、前記フォトスペーサの高さYの所望な値を得るように、前記画素着色層の厚さに応じて、前記遮光層の厚さを制御することを特徴とするカラーフィルタ基板の製造方法を提供する。   In order to solve the above-mentioned problems, a first aspect of the present invention is a method of forming a light-shielding layer having a predetermined pattern having a spacer formation region on a transparent substrate, two-dimensionally in the region partitioned by the light-shielding layer. Simultaneously arranging a plurality of color coloring layers on the spacer formation region of the light shielding layer, and sequentially stacking a plurality of color coloring layers on the spacer formation region of the light shielding layer, Forming a transparent conductive film, and forming a projection layer of a predetermined pattern on the transparent conductive film on the two-dimensionally arranged pixel colored layers, and simultaneously stacking the three-dimensionally A spacer protrusion layer is coated on the transparent conductive film on the plurality of colored spacer coloring layers, and the spacer protrusion layer is formed from the upper surface of the transparent conductive film on the two-dimensionally arranged pixel coloring layers. Height Y to the top surface of Forming a photo spacer, and controlling the thickness of the light shielding layer in accordance with the thickness of the pixel coloring layer so as to obtain a desired value of the height Y of the photo spacer. A method for manufacturing a color filter substrate is provided.

本発明の第2の態様は、透明基板、この透明基板上に形成された、スペーサ形成領域を有する所定のパターンの遮光層、前記遮光層により区画された領域に二次元的に配置された複数色の画素着色層、前記遮光層のスペーサ形成領域上に三次元的に積層された複数色のスペーサ着色層、前記複数色の画素着色層及びスペーサ着色層上に形成された透明導電性膜、前記画素着色層上の透明導電性膜上に配置された所定のパターンの突起層、及び前記スペーサ着色層上の透明導電性膜上に配置されたスペーサ突起層とを具備し、前記スペーサ着色層、透明導電性膜及びスペーサ突起層により、前記画素着色層上の透明導電性膜の上面から前記スペーサ突起層の上面までの高さYを有するフォトスペーサが構成されるカラーフィルタ基板において、前記遮光層は、前記フォトスペーサの高さYの所望の値を得るように、前記画素着色層の厚さに応じて制御された厚さを有することを特徴とするカラーフィルタ基板を提供する。   According to a second aspect of the present invention, there is provided a transparent substrate, a light shielding layer having a predetermined pattern formed on the transparent substrate, having a spacer formation region, and a plurality of two-dimensionally arranged in regions partitioned by the light shielding layer. A colored pixel colored layer, a plurality of colored spacer colored layers three-dimensionally stacked on a spacer forming region of the light shielding layer, a transparent conductive film formed on the colored pixel colored layer and the spacer colored layer, A spacer projecting layer having a predetermined pattern disposed on the transparent conductive film on the pixel coloring layer, and a spacer projecting layer disposed on the transparent conductive film on the spacer coloring layer; In the color filter substrate, a photo spacer having a height Y from the upper surface of the transparent conductive film on the pixel coloring layer to the upper surface of the spacer protrusion layer is constituted by the transparent conductive film and the spacer protrusion layer. Serial shielding layer, so as to obtain a desired value of the height Y of the photo spacers, to provide a color filter substrate and having a thickness that is controlled according to the thickness of the pixel colored layer.

このようなカラーフィルタ基板及びその製造方法において、遮光層の厚さの制御は、画素着色層の厚さに応じて想定されるフォトスペーサの高さYの変化量を算定し、この変化量から遮光層の膜厚の変化量を算定し、この膜厚の変化量に基づき、フォトスペーサの高さYの変化量を相殺するように行うことができる。   In such a color filter substrate and the manufacturing method thereof, the thickness of the light shielding layer is controlled by calculating the amount of change in the height Y of the photo spacer that is assumed in accordance with the thickness of the pixel coloring layer. The amount of change in the thickness of the light shielding layer can be calculated, and the amount of change in the height Y of the photo spacer can be offset based on the amount of change in the thickness.

この場合、フォトスペーサの高さYの変化量ΔYの算定は、画素着色層の厚さXに基づき、下記の式(1)により行うことができる。   In this case, the amount of change ΔY in the height Y of the photo spacer can be calculated based on the thickness X of the pixel coloring layer by the following equation (1).

ΔY=1.0998X−1.5398 …(1)
また、遮光層の厚さの制御は、式(1)により算定したフォトスペーサの高さYの変化量ΔYから、下記の式(2)により遮光層の膜厚の変化量ΔZを算定することにより行うことができる。
ΔY = 1.0998X−1.5398 (1)
The thickness of the light shielding layer is controlled by calculating the amount of change ΔZ in the thickness of the light shielding layer from the following equation (2) from the amount of change ΔY in the height Y of the photospacer calculated by the equation (1). Can be performed.

ΔY=0.4996ΔZ+0.0008 …(2)
本発明の第3の態様は、上述したカラーフィルタ基板と、他の基板とを、フォトスペーサを介して所定の間隔で対向配置し、これら基板間に表示媒体を挟持してなることを特徴とする表示装置を提供する。
ΔY = 0.4996ΔZ + 0.0008 (2)
A third aspect of the present invention is characterized in that the above-described color filter substrate and another substrate are arranged to face each other at a predetermined interval via a photo spacer, and a display medium is sandwiched between these substrates. Provided is a display device.

本発明によると、画素着色層の厚さに応じて遮光層の厚さを制御することにより、着色層や突起層の厚さを調整することなく所定のフォトスペーサの高さを保持することを可能とするカラーフィルタ基板及びその製造方法が提供される。また、このようなカラーフィルタ基板を備える表示装置が提供される。   According to the present invention, by controlling the thickness of the light shielding layer according to the thickness of the pixel coloring layer, it is possible to maintain a predetermined height of the photo spacer without adjusting the thickness of the coloring layer or the protruding layer. A color filter substrate and a method for manufacturing the same are provided. In addition, a display device including such a color filter substrate is provided.

以下、本発明の実施形態について説明する。   Hereinafter, embodiments of the present invention will be described.

図1は、本発明の第1の実施形態に係るMVAモードの液晶表示装置用カラーフィルタ基板の一画素を示す断面図である。図1において、透明基板1上には所定のパターンの遮光層2が形成され、この遮光層2により区分された領域に赤色着色層3a、緑色着色層3b、及び青色着色層3cが二次元的に配置されている。これら各着色層3a,3b及び3cの上には透明導電性膜、例えばITO膜4が形成され、更にその上に所定のパターンの突起層5が形成されて、カラーフィルタ基板が構成されている。   FIG. 1 is a sectional view showing one pixel of a color filter substrate for an MVA mode liquid crystal display device according to the first embodiment of the present invention. In FIG. 1, a light shielding layer 2 having a predetermined pattern is formed on a transparent substrate 1, and a red colored layer 3a, a green colored layer 3b, and a blue colored layer 3c are two-dimensionally arranged in a region divided by the light shielding layer 2. Is arranged. A transparent conductive film, for example, an ITO film 4 is formed on each of the colored layers 3a, 3b, and 3c, and a projection layer 5 having a predetermined pattern is formed on the transparent conductive film, thereby forming a color filter substrate. .

このようなカラーフィルタ基板において、遮光層2は、それ以外の部分よりも面積の大きいスペーサ形成領域6を有しており、このスペーサ形成領域6上に、上記赤色着色層3a、緑色着色層3b、及び青色着色層3cを二次元的に形成する際に同時に、スペーサ赤色着色層7a,スペーサ緑色着色層7b及びスペーサ青色着色層7cが三次元的に順次積層されている。また、これらスペーサ着色層7a,7b及び7cの上に、突起層5の形成の際に同時に、ITO膜4を介してスペーサ突起層8が積層されている。   In such a color filter substrate, the light shielding layer 2 has a spacer forming region 6 having a larger area than the other portions, and the red colored layer 3a and the green colored layer 3b are formed on the spacer forming region 6. When the blue colored layer 3c is formed two-dimensionally, the spacer red colored layer 7a, the spacer green colored layer 7b, and the spacer blue colored layer 7c are sequentially stacked three-dimensionally. On the spacer colored layers 7 a, 7 b and 7 c, a spacer projection layer 8 is laminated via the ITO film 4 simultaneously with the formation of the projection layer 5.

なお、スペーサ突起層8は、スペーサ着色層の積層体上に形成されるため、薄い層となって着色層の積層体の上面及び側面を覆っている。   In addition, since the spacer protrusion layer 8 is formed on the laminated body of spacer colored layers, it is a thin layer and covers the upper surface and side surfaces of the laminated body of colored layers.

以上のように、遮光層2のスペーサ形成領域6、スペーサ着色層7a,7b及び7c、及びスペーサ突起層8によりフォトスペーサが構成される。   As described above, the spacer formation region 6 of the light shielding layer 2, the spacer coloring layers 7a, 7b and 7c, and the spacer protrusion layer 8 constitute a photo spacer.

フォトスペーサは、その機能を発揮するためには、所定の高さに保たれる必要があり、その高さYは、図1において、着色層3a上のITO膜4の表面からスペーサ突起層8の表面までの距離により表される。フォトスペーサの高さを所定の値に保持する方法として、最終の積層膜であるスペーサ突起層8の厚さを調整することが考えられるが、そうした場合には、突起層5の厚さが設計値に対してずれてしまい、視野角の悪化、コントラストの低下などの不具合が生じてしまう。   The photo spacer needs to be maintained at a predetermined height in order to perform its function, and the height Y is determined from the surface of the ITO film 4 on the colored layer 3a in FIG. It is represented by the distance to the surface. As a method of maintaining the height of the photo spacer at a predetermined value, it is conceivable to adjust the thickness of the spacer projection layer 8 which is the final laminated film. In such a case, the thickness of the projection layer 5 is designed. The value is deviated with respect to the value, resulting in problems such as a deterioration in viewing angle and a decrease in contrast.

本発明者らは、フォトスペーサの高さの変動が生ずる原因について検討を重ねた結果、色特性を調整するために画素着色層の厚さを変化させた場合にフォトスペーサの高さが変動することを見出した。そこで、本発明者らは、画素着色層3a,3b,3cの厚さを種々変化させ、そのときのフォトスペーサの高さの変化量を求める実験を行い、下記表1に示す結果を得た。

Figure 2008164858
As a result of repeated studies on the cause of the variation in the height of the photo spacer, the present inventors change the height of the photo spacer when the thickness of the pixel coloring layer is changed in order to adjust the color characteristics. I found out. Accordingly, the present inventors performed experiments for variously changing the thicknesses of the pixel coloring layers 3a, 3b, and 3c to obtain the amount of change in the height of the photo spacer, and obtained the results shown in Table 1 below. .
Figure 2008164858

上記表1の結果を、横軸に画素着色層3a,3b,3cの厚さをとり、縦軸にフォトスペーサの高さの変化量ΔYをとり、プロットしたところ、図2に示すような所定の直線が得られた。この直線は、下記の近似式(1)により表すことができる。   The results of Table 1 are plotted with the horizontal axis indicating the thickness of the pixel coloring layers 3a, 3b, and 3c and the vertical axis indicating the amount of change ΔY in the height of the photo spacer. A straight line was obtained. This straight line can be expressed by the following approximate expression (1).

ΔY=1.0998X−1.5398 …(1)
なお、プロット点と近似式との一致性を示す相関係数Rは、0.9956であった。
ΔY = 1.0998X−1.5398 (1)
The correlation coefficient R 2 indicating the coincidence between the plotted points and the approximate expression was 0.9956.

以上の結果から、画素着色層3a,3b,3cの厚さXを、例えば1.4μmから1.5μmに変更した場合、フォトスペーサの高さYは、0.11μm程度高くなってしまうことが想定される。   From the above results, when the thickness X of the pixel coloring layers 3a, 3b, and 3c is changed from 1.4 μm to 1.5 μm, for example, the height Y of the photo spacer may be increased by about 0.11 μm. is assumed.

これに対し、本発明者らは、上記画素着色層3a,3b,3cの厚さXの変動によるフォトスペーサの高さYの変化をあらかじめ考慮して、遮光層2の膜厚を調整することで、所望のフォトスペーサの高さYを所望の値に保持し得ることを見出した。   On the other hand, the inventors adjust the film thickness of the light shielding layer 2 in consideration of the change in the height Y of the photo spacer due to the variation in the thickness X of the pixel coloring layers 3a, 3b, 3c. The inventors have found that the desired photo spacer height Y can be maintained at a desired value.

即ち、本発明者らは、遮光層2の膜厚の変化量ΔZとフォトスペーサの高さの変化量ΔYとの関係を求めたところ、下記表2に示す結果を得た。

Figure 2008164858
That is, the present inventors obtained the results shown in Table 2 below when the relationship between the change amount ΔZ of the film thickness of the light shielding layer 2 and the change amount ΔY of the height of the photo spacer was obtained.
Figure 2008164858

上記表2の結果を、横軸に遮光層2の膜厚の変化量ΔZをとり、縦軸にフォトスペーサの高さの変化量ΔYをとり、プロットしたところ、図3に示すような所定の直線が得られた。この直線は、下記の近似式(2)により表すことができる。   The results shown in Table 2 are plotted with the amount of change ΔZ in the thickness of the light shielding layer 2 on the horizontal axis and the amount of change ΔY in the height of the photo spacer on the vertical axis. A straight line was obtained. This straight line can be expressed by the following approximate expression (2).

ΔY=0.4996ΔZ+0.0008 …(2)
なお、プロット点と近似式(2)との一致性を示す相関係数Rは、0.9992であった。
ΔY = 0.4996ΔZ + 0.0008 (2)
The correlation coefficient R 2 indicating the coincidence between the plotted points and the approximate expression (2) was 0.9992.

図3及び上記式(2)から、遮光層2の膜厚の変化量ΔZとフォトスペーサの高さの変化量ΔYとは、傾き0.5の線形の関係にあることがわかる。   From FIG. 3 and the above equation (2), it can be seen that the change amount ΔZ of the thickness of the light shielding layer 2 and the change amount ΔY of the height of the photo spacer have a linear relationship with an inclination of 0.5.

以上のことから、上記式(1)により画素着色層3a,3b,3cの厚さが変動してXとなったときのフォトスペーサの高さの変化量ΔYを求め、上記式(2)からΔYに対応する遮光層2の膜厚の変化量ΔZを求め、逆にそのΔZだけ遮光層2の膜厚を減少させれば、ΔYが相殺されて、厚さXが変動する前のフォトスペーサの高さを維持することができる。   From the above, the amount of change ΔY in the height of the photo spacer when the thickness of the pixel coloring layers 3a, 3b, 3c is changed to X by the above equation (1) is obtained, and from the above equation (2). If the amount of change ΔZ in the thickness of the light shielding layer 2 corresponding to ΔY is obtained, and conversely, if the thickness of the light shielding layer 2 is decreased by ΔZ, ΔY is canceled and the photo spacer before the thickness X fluctuates The height of can be maintained.

従って、上述したように、画素着色層3a,3b,3cの厚さXを1.4μmから1.5μmに変更した場合にフォトスペーサの高さYが0.11μm程度高くなってしまうことが想定されるが、これを厚さXの変更前のフォトスペーサの高さYに維持するには、ΔY(=0.11)/式(2)の直線の傾き(≒0.5)=0.22(μm)だけ遮光層2の膜厚を減少させればよい。   Therefore, as described above, when the thickness X of the pixel coloring layers 3a, 3b, and 3c is changed from 1.4 μm to 1.5 μm, it is assumed that the height Y of the photo spacer is increased by about 0.11 μm. However, in order to maintain this at the height Y of the photo spacer before the change of the thickness X, ΔY (= 0.11) / the slope of the straight line (≈0.5) = 0. The film thickness of the light shielding layer 2 may be reduced by 22 (μm).

このように、上記式(1)及び(2)により求めた遮光層2の膜厚の変化量から遮光層2の膜厚を設定することにより、所望のフォトスペーサの高さYを維持することが可能である。   Thus, the desired height Y of the photospacer is maintained by setting the film thickness of the light shielding layer 2 from the amount of change in the film thickness of the light shielding layer 2 obtained by the above formulas (1) and (2). Is possible.

本発明の一実施形態に係るカラーフィルタ基板の構成を示す断面図。FIG. 3 is a cross-sectional view illustrating a configuration of a color filter substrate according to an embodiment of the present invention. スペーサ形成領域の面積Xとフォトスペーサの高さの変化量ΔYとの関係を示す特性図。The characteristic view which shows the relationship between the area X of a spacer formation area, and the variation | change_quantity (DELTA) Y of the height of a photo spacer. 遮光層の膜厚の変化量ΔZとフォトスペーサの高さの変化量ΔYとの関係を示す特性図。The characteristic view which shows the relationship between the variation | change_quantity (DELTA) Z of the film thickness of a light shielding layer, and the variation | change_quantity (DELTA) Y of the height of a photo spacer.

符号の説明Explanation of symbols

1…透明基板、2…遮光層、3a…赤色着色層、3b…緑色着色層、3c…青色着色層、4…ITO膜、5…突起層、6…スペーサ形成領域、7a…スペーサ赤色着色層,7b…スペーサ緑色着色層、7c…青色着色層、8…スペーサ突起層。 DESCRIPTION OF SYMBOLS 1 ... Transparent substrate, 2 ... Light-shielding layer, 3a ... Red colored layer, 3b ... Green colored layer, 3c ... Blue colored layer, 4 ... ITO film, 5 ... Projection layer, 6 ... Spacer formation area, 7a ... Spacer red colored layer , 7b ... spacer green colored layer, 7c ... blue colored layer, 8 ... spacer projection layer.

Claims (9)

透明基板上に、スペーサ形成領域を有する所定のパターンの遮光層を形成する工程、
前記遮光層により区画された領域に二次元的に複数色の画素着色層を配置すると同時に、前記遮光層のスペーサ形成領域上に順次三次元的に複数色のスペーサ着色層を積層する工程、
前記複数色の画素着色層及びスペーサ着色層上に透明導電性膜を形成する工程、及び
前記二次元的に配置された複数色の画素着色層上の透明導電性膜上に所定のパターンの突起層を形成すると同時に、前記三次元的に積層された複数色のスペーサ着色層上の透明導電性膜上にスペーサ突起層を被覆して、前記二次元的に配置された複数色の画素着色層上の透明導電性膜の上面から前記スペーサ突起層の上面までの高さYを有するフォトスペーサを形成する工程
を具備し、前記フォトスペーサの高さYの所望な値を得るように、前記画素着色層の厚さに応じて、前記遮光層の厚さを制御することを特徴とするカラーフィルタ基板の製造方法。
Forming a light shielding layer of a predetermined pattern having a spacer formation region on the transparent substrate;
Arranging a plurality of color coloring layers in a two-dimensional manner in a region partitioned by the light shielding layer, and simultaneously laminating a plurality of color coloring layers in a three-dimensional manner on the spacer formation region of the light shielding layer;
Forming a transparent conductive film on the plurality of pixel coloring layers and the spacer coloring layer; and a predetermined pattern of protrusions on the transparent conductive film on the two-dimensionally arranged pixel coloring layers And simultaneously forming a layer, covering the transparent conductive film on the three-dimensionally laminated spacer colored layers with a spacer projection layer, and arranging the two-dimensionally arranged pixel colored layers Forming a photo spacer having a height Y from the upper surface of the upper transparent conductive film to the upper surface of the spacer protrusion layer, and obtaining the desired value of the height Y of the photo spacer. A method for producing a color filter substrate, wherein the thickness of the light shielding layer is controlled according to the thickness of the colored layer.
前記遮光層の厚さの制御は、前記画素着色層の厚さに応じて想定されるフォトスペーサの高さYの変化量を算定し、この変化量から前記遮光層の膜厚の変化量を算定し、この膜厚の変化量に基づき、前記フォトスペーサの高さYの変化量を相殺するように行うことを特徴とするカラーフィルタ基板の製造方法。   The thickness of the light shielding layer is controlled by calculating the amount of change in the height Y of the photo spacer that is assumed according to the thickness of the pixel coloring layer, and calculating the amount of change in the thickness of the light shielding layer from this amount of change. A method of manufacturing a color filter substrate, wherein the calculation is performed so as to cancel out the change amount of the height Y of the photo spacer based on the change amount of the film thickness. 前記フォトスペーサの高さYの変化量ΔYの算定は、前記画素着色層の厚さXに基づき、下記の式(1)により行うことを特徴とする請求項2に記載のカラーフィルタ基板の製造方法。
ΔY=1.0998X−1.5398 …(1)
3. The color filter substrate according to claim 2, wherein the amount of change ΔY in the height Y of the photo spacer is calculated by the following formula (1) based on the thickness X of the pixel coloring layer. Method.
ΔY = 1.0998X−1.5398 (1)
前記遮光層の厚さの制御は、前記式(1)により算定したフォトスペーサの高さYの変化量ΔYから、下記の式(2)により前記遮光層の膜厚の変化量ΔZを算定することにより行うことを特徴とする請求項3に記載のカラーフィルタ基板の製造方法。
ΔY=0.4996ΔZ+0.0008 …(2)
The thickness of the light shielding layer is controlled by calculating the amount of change ΔZ in the thickness of the light shielding layer according to the following equation (2) from the amount of change ΔY in the height Y of the photo spacer calculated by the equation (1). The method for producing a color filter substrate according to claim 3, wherein the method is performed.
ΔY = 0.4996ΔZ + 0.0008 (2)
透明基板、
この透明基板上に形成された、スペーサ形成領域を有する所定のパターンの遮光層、
前記遮光層により区画された領域に二次元的に配置された複数色の画素着色層、
前記遮光層のスペーサ形成領域上に三次元的に積層された複数色のスペーサ着色層、
前記複数色の画素着色層及びスペーサ着色層上に形成された透明導電性膜、
前記画素着色層上の透明導電性膜上に配置された所定のパターンの突起層、及び
前記スペーサ着色層上の透明導電性膜上に配置されたスペーサ突起層とを具備し、
前記スペーサ着色層、透明導電性膜及びスペーサ突起層により、前記画素着色層上の透明導電性膜の上面から前記スペーサ突起層の上面までの高さYを有するフォトスペーサが構成されるカラーフィルタ基板において、
前記遮光層は、前記フォトスペーサの高さYの所望の値を得るように、前記画素着色層の厚さに応じて制御された厚さを有することを特徴とするカラーフィルタ基板。
Transparent substrate,
A light shielding layer of a predetermined pattern having a spacer formation region formed on the transparent substrate,
A plurality of pixel coloring layers arranged two-dimensionally in a region partitioned by the light shielding layer;
A plurality of colored spacer layers layered three-dimensionally on the spacer formation region of the light shielding layer;
A transparent conductive film formed on the pixel coloring layer and the spacer coloring layer of the plurality of colors;
A protrusion layer having a predetermined pattern disposed on the transparent conductive film on the pixel coloring layer, and a spacer protrusion layer disposed on the transparent conductive film on the spacer coloring layer,
A color filter substrate in which a photo spacer having a height Y from the upper surface of the transparent conductive film on the pixel coloring layer to the upper surface of the spacer protrusion layer is constituted by the spacer coloring layer, the transparent conductive film and the spacer protrusion layer. In
The color filter substrate, wherein the light shielding layer has a thickness controlled according to a thickness of the pixel coloring layer so as to obtain a desired value of the height Y of the photo spacer.
前記遮光層は、前記画素着色層の厚さに応じて想定されるフォトスペーサの高さYの変化量を算定し、この変化量から前記遮光層の膜厚の変化量を算定し、この膜厚の変化量に基づき、前記フォトスペーサの高さYの変化量を相殺するように制御された厚さを有することを特徴とする請求項5に記載のカラーフィルタ基板。   The light shielding layer calculates a change amount of the height Y of the photo spacer that is assumed according to the thickness of the pixel coloring layer, and calculates a change amount of the film thickness of the light shielding layer from the change amount. 6. The color filter substrate according to claim 5, wherein the color filter substrate has a thickness controlled so as to cancel the amount of change in the height Y of the photo spacer based on the amount of change in thickness. 前記フォトスペーサの高さYの変化量ΔYの算定は、前記遮光層のスペーサ形成領域の面積Xに基づき、下記の式(1)により行われたことを特徴とする請求項6に記載のカラーフィルタ基板。
ΔY=3×10−9−2×10−5X+0.029 …(1)
The color according to claim 6, wherein the calculation of the change amount ΔY of the height Y of the photospacer is performed by the following formula (1) based on the area X of the spacer formation region of the light shielding layer. Filter substrate.
ΔY = 3 × 10 −9 X 2 −2 × 10 −5 X + 0.029 (1)
前記遮光層の厚さの制御は、前記式(1)により算定したフォトスペーサの高さYの変化量ΔYから、下記の式(2)により前記遮光層の膜厚の変化量ΔZを算定することにより行われたことを特徴とする請求項7に記載のカラーフィルタ基板。
ΔY=0.4996ΔZ+0.0008 …(2)
The thickness of the light shielding layer is controlled by calculating the amount of change ΔZ in the thickness of the light shielding layer according to the following equation (2) from the amount of change ΔY in the height Y of the photo spacer calculated by the equation (1). The color filter substrate according to claim 7, wherein the color filter substrate is formed by:
ΔY = 0.4996ΔZ + 0.0008 (2)
請求項5〜8のいずれかに記載のカラーフィルタ基板と、他の基板とを、前記フォトスペーサを介して所定の間隔で対向配置し、これら基板間に表示媒体を挟持してなることを特徴とする表示装置。   The color filter substrate according to any one of claims 5 to 8 and another substrate are arranged to face each other at a predetermined interval via the photo spacer, and a display medium is sandwiched between the substrates. Display device.
JP2006353345A 2006-12-27 2006-12-27 Color filter substrate, manufacturing method thereof, and display device Pending JP2008164858A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006353345A JP2008164858A (en) 2006-12-27 2006-12-27 Color filter substrate, manufacturing method thereof, and display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006353345A JP2008164858A (en) 2006-12-27 2006-12-27 Color filter substrate, manufacturing method thereof, and display device

Publications (1)

Publication Number Publication Date
JP2008164858A true JP2008164858A (en) 2008-07-17

Family

ID=39694465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006353345A Pending JP2008164858A (en) 2006-12-27 2006-12-27 Color filter substrate, manufacturing method thereof, and display device

Country Status (1)

Country Link
JP (1) JP2008164858A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011024513A1 (en) * 2009-08-28 2011-03-03 シャープ株式会社 Color filter substrate, liquid crystal display panel and liquid crystal display device
WO2011045952A1 (en) * 2009-10-15 2011-04-21 シャープ株式会社 Color filter substrate and liquid crystal display device
JP2011175002A (en) * 2010-02-23 2011-09-08 Dainippon Printing Co Ltd Color filter having resistive film type touch panel function, and display device having the same
JP2011242716A (en) * 2010-05-21 2011-12-01 Toppan Printing Co Ltd Color filter and liquid crystal display device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07318950A (en) * 1994-05-27 1995-12-08 Sony Corp Method for forming spacer of electro-optical display cell
JPH10221696A (en) * 1997-02-06 1998-08-21 Toppan Printing Co Ltd Color filter for liquid crystal display device, method of manufacturing the same, and liquid crystal display device
JP2001201750A (en) * 2000-01-14 2001-07-27 Fujitsu Ltd Liquid crystal display device and method of manufacturing the same
JP2006038951A (en) * 2004-07-22 2006-02-09 Sharp Corp Color filter substrate manufacturing method, color filter substrate, and liquid crystal display device
JP2006178038A (en) * 2004-12-21 2006-07-06 Toppan Printing Co Ltd Color filter for liquid crystal display device and manufacturing method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07318950A (en) * 1994-05-27 1995-12-08 Sony Corp Method for forming spacer of electro-optical display cell
JPH10221696A (en) * 1997-02-06 1998-08-21 Toppan Printing Co Ltd Color filter for liquid crystal display device, method of manufacturing the same, and liquid crystal display device
JP2001201750A (en) * 2000-01-14 2001-07-27 Fujitsu Ltd Liquid crystal display device and method of manufacturing the same
JP2006038951A (en) * 2004-07-22 2006-02-09 Sharp Corp Color filter substrate manufacturing method, color filter substrate, and liquid crystal display device
JP2006178038A (en) * 2004-12-21 2006-07-06 Toppan Printing Co Ltd Color filter for liquid crystal display device and manufacturing method thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011024513A1 (en) * 2009-08-28 2011-03-03 シャープ株式会社 Color filter substrate, liquid crystal display panel and liquid crystal display device
WO2011045952A1 (en) * 2009-10-15 2011-04-21 シャープ株式会社 Color filter substrate and liquid crystal display device
JP5237459B2 (en) * 2009-10-15 2013-07-17 シャープ株式会社 Color filter substrate and liquid crystal display device
US8558976B2 (en) 2009-10-15 2013-10-15 Sharp Kabushiki Kaisha Color filter substrate and liquid crystal display device
JP2011175002A (en) * 2010-02-23 2011-09-08 Dainippon Printing Co Ltd Color filter having resistive film type touch panel function, and display device having the same
JP2011242716A (en) * 2010-05-21 2011-12-01 Toppan Printing Co Ltd Color filter and liquid crystal display device

Similar Documents

Publication Publication Date Title
JP4712060B2 (en) Color filter substrate, manufacturing method thereof, and display device including the same
US10274778B2 (en) Color filter plate and fabrication method thereof
TWI613492B (en) Color filter substrate and display panel
CN103995380B (en) Display base plate, the mask for manufacturing it and the method for manufacturing the display base plate
US10948761B2 (en) Color filter substrate, fabricating method thereof, and display device
US7450212B2 (en) Liquid crystal display having a lower density of spacers at the periphery than at the center of the display area to provide increased compression at the center
US20070188690A1 (en) Liquid crystal display device
JP4134106B2 (en) Color filter substrate, manufacturing method thereof, and display device including the same
JP5032157B2 (en) Liquid crystal display
US20180113357A1 (en) Color filter substrate and manufacturing method thereof, and display device
JP2008176131A (en) Liquid crystal display device and manufacturing method thereof
CN101387716B (en) Color filter, display panel, optoelectronic device and manufacturing method thereof
CN107678204B (en) Liquid crystal display panel, display and manufacturing method of display panel
US20070200980A1 (en) Color display device
KR102647450B1 (en) Liquid crystal panel
JP2008164858A (en) Color filter substrate, manufacturing method thereof, and display device
CN111610671A (en) Display panel, method of making the same, and display device
JP4562021B2 (en) Color filter substrate, manufacturing method thereof, and display device
JP2005003854A (en) Color filter for liquid crystal display device and manufacturing method thereof
JP5082440B2 (en) Manufacturing method of color filter substrate
WO2020062419A1 (en) Color film substrate and manufacturing method therefor
US7554646B2 (en) Method of fabricating liquid crystal display device
JP2009237354A (en) Color filter substrate and method of manufacturing the same
JP2007101992A (en) Color filter for liquid crystal display device and manufacturing method thereof
TWI902479B (en) Display device

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20091124

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101122

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20111114

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111122

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120120

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20120515

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20120529