JP2008161867A - Method for cleaning object to be cleaned, and cleaning apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve cleaning efficiency and degree of cleaning in cleaning an object to be cleaned. <P>SOLUTION: In the method for cleaning an object to be cleaned, the object is submerged in a cleaning tank filled with a solvent for cleaning the object and is cleaned by microbubbles generated in the cleaning tank. The above microbubbles have the property of adsorbing microdust and have a diameter of several μm to several tens of μm. The microbubbles are generated below the object submerged in the cleaning tank. The microbubbles are generated at a location below the object disposed on a holder for holding the object which is submerged in the cleaning tank in such a manner that the object faces downward. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a cleaning method and a cleaning apparatus for cleaning a cleaning material such as an electronic component or a fine component.

  Electronic parts composed of semiconductor chips, small precision parts, and the like are required to have high cleanliness depending on their applications, and are washed after being manufactured and shipped as a product or incorporated into an apparatus. In particular, magnetic head sliders that are required to have a low flying height with respect to magnetic disks are required to have high cleanliness because they are incorporated in a magnetic disk device, and are required to have high positioning accuracy. Therefore, more reliable cleaning is required.

  An example of a method for cleaning such parts is disclosed in Patent Document 1. In this patent document 1, the magnetic head slider is immersed in a cleaning tank while being held by a cage, and ultrasonic cleaning is performed in such a state. The retainer includes a member having a mesh that forms a lattice-like through hole that houses the magnetic head slider and covers the lower end opening thereof, and a member that has a mesh that covers the upper end opening of the through hole. It is configured. As a result, the magnetic head slider is housed in the through hole, and surrounded by the wall surface of the through hole and the pair of nets covering the opening at both ends of the through hole, thereby preventing the cleaning object from jumping out. Furthermore, the opening size and thickness of the through hole are set to 1.1 to 2.5 times the vertical, horizontal size and thickness of the magnetic head slider, and the magnetic head slider can freely move in the through hole. Thus, ultrasonic cleaning is effectively performed in the cleaning tank.

JP-A-6-103511

  However, in the cleaning of parts using the cage in Patent Document 1, the following inconvenience occurs. First, since the net is provided so as to contact the element part and the ABS surface, which are the most important and high cleanliness of the magnetic head slider, such a net hinders cleaning and lowers the cleanliness. The problem arises. Further, since the cleaning object is surrounded by the wall surface, the solvent of the cleaning liquid is difficult to be removed from the cleaning object at the end of the cleaning, and there is a problem that spots are likely to remain particularly at the four corners (corners). In addition, since both surfaces of the cleaning object are held by the net, there is a problem that ESD destruction is likely to occur. Furthermore, since the holding is not stable due to the holding by the net, the cleaning object collides with the wall surface by moving during cleaning by ultrasonic vibration or the like, and the impact causes the cleaning object to be cracked or chipped. This can cause problems.

  For this reason, the present invention provides a cleaning method and a cleaning apparatus that improve the disadvantages of the above-described conventional example, and in particular, improve the cleaning efficiency of the cleaning object and improve the cleanliness by the cleaning. Objective.

  Accordingly, a cleaning method for cleaning a product according to one aspect of the present invention is a cleaning method for cleaning a product by immersing the cleaning product in a cleaning tank filled with a solvent for cleaning the cleaning product. In this configuration, microbubbles are generated and the cleaning object is washed with the microbubbles. And the said micro bubble is a micro bubble which has the property to adsorb | suck a micro dust and has a bubble diameter of several micrometers-dozens of micrometers.

  Moreover, in this invention, the structure that the said microbubble is generated under the washing | cleaning material immersed in the washing tank is taken. Further, in the present invention, a configuration is adopted in which the cleaning object holder in which the cleaning object is disposed is arranged so that the cleaning object faces downward and is immersed in the cleaning tank, and microbubbles are generated below the cleaning object. .

  Further, the present invention adopts a configuration in which at least at the time of cleaning, the cleaning object disposed in the cleaning object holder is sucked through a suction hole formed through the cleaning object holder at the cleaning object disposition location. And in this invention, the structure of circulating so that the solvent in the washing tank attracted | sucked from the suction hole may be returned in the said washing tank at the time of washing | cleaning is taken. Moreover, in this invention, the structure of purifying a solvent at the time of the said circulation is taken.

  The cleaning device according to another aspect of the present invention includes a cleaning object holder for arranging a cleaning object, a cleaning tank filled with a solvent for cleaning the cleaning object and dipping the cleaning object holder, and an inside of the cleaning tank. And a cleaning means for cleaning the object to be cleaned. The cleaning means is a microbubble cleaning device that generates microbubbles in the cleaning tank.

  According to the above invention, by generating microbubbles with the microbubble generator disposed below the cleaning object holder, the microbubbles slowly float in water and are the cleaning objects held downward. Touch the magnetic head slider. At this time, since the magnetic head slider is held by the above-described cleaning object holder, the exposed surface is wide and many microbubbles come into contact. Then, since the microbubbles are fine bubbles, the area in contact with the dirt adhering to the magnetic head slider is widened, and the dirt is adsorbed by the surface tension and floats on the water surface, thereby cleaning.

  Therefore, unlike ultrasonic cleaning, vibration does not occur, so that the cleaning object can be prevented from rubbing against a tray or the like, and unlike brush cleaning, the cleaning object and the tray at the time of brush contact or brushing can be prevented. Rubbing can be suppressed. Therefore, it is possible to perform cleaning while suppressing damage to the cleaning object, and it is possible to further improve the cleanliness.

  Further, since microbubbles are easily absorbed by the solvent, they have a property of shrinking and disappearing in the solvent. Therefore, since it is suppressed that it flows into a suction device and a purification device with a bubble, the bad influence to a device can be controlled.

  Note that ultrasonic cleaning may be used in combination with the microbubble cleaning. Alternatively, brush cleaning may be used in combination with the microbubble cleaning.

Moreover, the washing | cleaning material holder which is the other aspect of this invention is the following.
A cleaning object holder that holds at least one cleaning object and is immersed in a cleaning tank,
Equipped with a tray to place the items to be washed,
The tray is provided with a suction hole that penetrates the tray and sucks the cleaning object from the opposite side of the cleaning object disposition part.

  Further, the suction hole is formed at a position and a size that are covered with the cleaning object disposed on the tray.

  According to the above invention, the cleaning object is placed on the suction hole formed in the tray and sucked from the opposite side, whereby the cleaning object is attracted to the tray, and the cleaning object is held on the tray by the suction force. Thereby, since it can hold | maintain to a tray, without pressing down one surface of a washing | cleaning material by a holding member from upper direction, a holding member does not cover the surface of a washing | cleaning material at the time of washing | cleaning. Accordingly, the surface of the cleaning object can be widely exposed to the solvent, and the cleaning efficiency and the cleanliness can be improved. At this time, since the suction hole is covered with the cleaning object, the suction force between the cleaning object and the tray can be further increased, and the holding of the cleaning object during the cleaning can be stabilized.

  Further, the present invention is characterized in that an enclosure member standing on the periphery of the cleaning object is provided on the cleaning object arrangement surface of the tray. In addition, an opening for allowing the solvent in the cleaning tank to flow into and out of the cleaning object is formed in the enclosure member. At this time, when the cleaning object is a magnetic head slider having a magnetic head element portion, it is desirable to form the opening at a position adjacent to the magnetic head element portion of the magnetic head slider arranged on the tray.

  Thereby, since the periphery of the cleaning object is surrounded by the enclosing member, the movement of the cleaning object along the tray surface can be suppressed, and more stable in cooperation with the above-described suction force to the tray. Can be held. At this time, since an opening is formed in the enclosure member surrounding the periphery of the cleaning object, the solvent also flows in and out in the horizontal direction (XY direction) with respect to the cleaning object arrangement surface of the tray. Accordingly, the circulation of the solvent to the cleaning object surrounded by the enclosure member from the opening is promoted, the cleaning is performed efficiently, and the solvent can be quickly discharged from the tray even when taken out from the cleaning tank after the cleaning. . Accordingly, it is possible to suppress the residue of the solvent in the cleaned product after cleaning, to suppress the generation of spots and the like, and to improve the cleanliness. Furthermore, when the cleaning object is a magnetic head slider, there is no surrounding member at a position adjacent to the magnetic head element portion, so that the solvent is efficiently circulated, and the portion requiring high cleanliness is more effective. Can be washed. In particular, in the case of brush cleaning, it is possible to suppress the enclosure member from interfering with cleaning of the magnetic head element portion, thereby further improving the cleanliness.

  Further, in addition to the place where the cleaning object is placed on the tray, a through-hole penetrating the tray is provided. Thereby, since the solvent flows out from the through-hole to the back side of the tray at places other than the place where the cleaning object is disposed, the circulation of the solvent can be promoted and the residual solvent after the cleaning can be suppressed.

  In addition, a plurality of suction holes are formed in the tray, and a support member that supports the tray on a surface opposite to the cleaning object disposition surface is provided, and the support member is provided with respect to the plurality of suction holes formed in the tray. A suction port for biasing the suction force from the support member side is provided. At this time, the suction port is formed corresponding to the shape or size of the tray.

  Thereby, by performing suction from the suction port provided in the support member, the suction force can be collectively applied to the plurality of suction holes. The structure can be simplified. In particular, by forming the suction port according to the shape and size of the tray, a more uniform and appropriate suction force can be applied to each suction hole, and the holding of the cleaning object can be stabilized. be able to.

  Further, in addition to the above-described configuration, a detachment restricting member is provided that is provided when the cleaning object holder is immersed in the cleaning tank and restricts the cleaning object from being separated from the tray. Thereby, holding | maintenance of the washing | cleaning material with respect to a tray at the time of immersion can be stabilized, and the further stabilization of subsequent washing | cleaning can be aimed at.

Moreover, the washing | cleaning material holding | maintenance apparatus which is the other form of this invention,
The cleaning object holder described above and suction means for performing suction from a suction hole provided in a tray constituting the cleaning object holder are provided. Alternatively, the cleaning object holder is provided with suction means for performing suction from a suction port provided in a support member constituting the cleaning object holder.

  Further, the cleaning object holding device includes a circulation means for returning the solvent in the cleaning tank sucked by the suction means to the cleaning tank. At this time, it is desirable that the circulation means includes a purification means for purifying the solvent.

  Thereby, since the solvent sucked by the suction means is returned to the washing tank by the circulation means, circulation of the solvent for washing is promoted, and the washing efficiency can be improved. At this time, by purifying the circulating solvent with the purifying means, a solvent with a high cleanliness is always supplied, so that the cleaning efficiency can be further improved.

  The suction means includes a gas suction means for sucking a gas and a liquid suction means capable of sucking a liquid, and the gas suction means and the liquid suction means according to the immersion state of the cleaning object holder in the cleaning tank. It is characterized by comprising switching means for switching between use and. At this time, the switching means performs suction using the gas suction means when the cleaning object holder is not immersed in the cleaning tank, and using the liquid suction means when the cleaning object holder is immersed in the cleaning tank. It is characterized by switching.

  Thereby, before being immersed in the cleaning tank, the cleaning object can be held on the tray by air suction, and the cleaning object can be held by sucking the solvent by switching to the liquid suction means in the cleaning tank. Therefore, since the suction means can be switched according to the medium to be sucked, each of the suction means can be used appropriately and can be held with an appropriate suction force.

Moreover, the washing | cleaning material washing | cleaning method which is the other form of this invention is the following.
A cleaning method for cleaning a product by immersing a cleaning product holder in which the cleaning product is placed in a cleaning tank and cleaning the product.
At least at the time of cleaning, the cleaning object disposed in the cleaning object holder is sucked through a suction hole formed through the cleaning object holder at the cleaning object disposition location.

  And when a washing | cleaning material holder is immersed in a washing tank, it hold | suppresses so that a cleaning material may not detach | leave from a washing | cleaning material holder. Further, it is characterized in that the solvent in the cleaning tank sucked from the suction hole is circulated back to the cleaning tank at the time of cleaning. Further, the solvent is purified during circulation.

In addition, another type of cleaning method is
A cleaning object holding process for holding the cleaning object, an immersion process for immersing the held cleaning object in the solvent in the cleaning tank, a cleaning process for cleaning the cleaning object in the solvent, and a process for removing the solvent of the cleaning object. The cleaning object cleaning method provided is characterized in that the cleaning object holding device described above is used from the cleaning object holding process to the cleaning process. Further, the cleaning process is characterized by ultrasonic cleaning, microbubble cleaning or brush cleaning.

In addition, a cleaning apparatus according to another embodiment of the present invention is
A cleaning object holder having a tray on which the cleaning object is arranged, and a suction hole for sucking the cleaning object from the opposite side of the cleaning object arrangement part through the tray in the cleaning object arrangement part of the tray,
A suction means for performing suction from a suction hole provided in the tray;
A cleaning tank filled with a solvent for cleaning the cleaning object and dipping a cleaning object holder for holding at least one cleaning object by suction by a suction means;
A cleaning means for cleaning the cleaning object in the cleaning tank;
It is characterized by having.

  Further, the present invention is characterized by comprising a circulating means for returning the solvent in the cleaning tank sucked by the suction means to the cleaning tank. The circulation means includes a purification means for purifying the solvent.

  The suction means includes a gas suction means for sucking a gas and a liquid suction means capable of sucking a liquid, and the gas suction means and the liquid suction means according to the immersion state of the cleaning object holder in the cleaning tank. It is characterized by comprising switching means for switching the use of. The switching means performs suction using the gas suction means when the cleaning object holder is not immersed in the cleaning tank and using the liquid suction means when the cleaning object holder is immersed in the cleaning tank. It is characterized by switching.

Also, other forms of cleaning devices
The above-described cleaning object holding device that holds at least one cleaning object, a cleaning tank that is filled with a solvent for cleaning the cleaning object and that immerses a cleaning object holder that constitutes the cleaning object holding apparatus, and the cleaning object in this cleaning tank And a cleaning means for cleaning.

  Further, in the above cleaning apparatus, the cleaning means is an ultrasonic cleaning apparatus, a microbubble cleaning apparatus or a brush cleaning apparatus.

  As described above, the cleaning object cleaning method or the cleaning apparatus having the above-described configuration operates in the same manner as the above-described cleaning object holder or cleaning object holding apparatus, and thus the object of the present invention can be achieved. .

  Since this invention is comprised and functions as mentioned above, according to this, it can wash | clean while suppressing damage to a washing | cleaning thing, and can aim at the improvement of cleanliness more. In addition, since microbubbles are easily absorbed by the solvent, they have the property of shrinking and disappearing in the solvent, and it is possible to prevent the bubbles from flowing into the suction device or the purification device. It has an unprecedented excellent effect that it can suppress adverse effects on

  Hereinafter, a magnetic head slider mounted on a magnetic disk device will be taken as an example of the cleaning object, and a specific configuration and operation of the cleaning object cleaning holder, the cleaning object holding apparatus, and the cleaning apparatus will be described. However, the cleaning object in the present invention is not limited to the magnetic head slider, and may be other electronic components or other objects.

  A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 and FIG. 2 are diagrams showing an outline of the configuration of a cleaning apparatus for cleaning a cleaning object. 3 to 7 are diagrams showing the configuration of the cleaning object holder. 8 to 9 are diagrams illustrating the operation of the cleaning apparatus.

[Constitution]
<Washing device>
With reference to FIG. 1, the whole structure of the washing | cleaning apparatus which wash | cleans a washing | cleaning material is demonstrated. The cleaning device includes a cleaning tank 100 filled with a solvent 102 for cleaning the cleaning object 5, a cleaning object holding device (1, 2, etc.) for holding the magnetic head slider 5 as the cleaning object, and a circulation for circulating the solvent 102. The apparatus (3, 4 etc.) (circulation means) and the cleaning means 101 for cleaning the cleaning object 5 in the cleaning tank 100 are configured. First, after briefly explaining the configuration, each configuration will be described in detail. In addition, in FIG. 1, each structure is shown typically.

  The cleaning tank 100 is filled with a solvent 102 so as to form a depth enough to immerse the cleaning object holder 1 described later, and the ultrasonic vibrator 101 (cleaning means) (in the solvent 102). An ultrasonic cleaning device). The ultrasonic vibrator 101 generates ultrasonic vibrations in the solvent 102, and the ultrasonic vibration is generated by immersing the cleaning object holder 1 in which the cleaning object is held in the solvent 102. In addition, ultrasonic cleaning of the cleaning object can be realized. As illustrated, the ultrasonic transducer 101 is disposed in the cleaning tank 100 so as to be positioned above the cleaning object 5. For example, it is supported by a support mechanism (not shown) provided in the cleaning tank 100. Here, the cleaning means is not limited to the ultrasonic transducer 101 as will be described later, and may be a microbubble cleaning device or a brush cleaning device (see other embodiments).

  The solvent 102 filled in the cleaning tank 100 is made of, for example, pure water (DI), isopropyl alcohol (IPA), gray coal phthalate (wax), and neutral detergent (about 0.5%).

  Further, the cleaning object holding device biases the cleaning object holder 1 that actually holds the magnetic head slider 5 that is the cleaning object, and the attraction force for holding the magnetic head slider 5 by the cleaning object holder 1. And a suction device 2 for the purpose.

  Further, since the circulation device (3, 4 etc.) is for circulating the solvent 102 sucked by the suction device 2, the circulation operation is realized in cooperation with the suction device 2. Therefore, in the following description, the circulation device (3, 4 etc.) is included in the suction device 2. Hereinafter, each configuration will be described in detail.

<Suction device>
The suction device 2 is connected to a cleaning object holder 1 to be described later and biases the suction force. Specifically, the suction device 2 is provided on a suction pipe 3 that is a circulation device, and a suction pipe connecting member 31 formed at one end of the suction pipe 3 is connected to the cleaning object holder 1. By doing so, it is possible for the suction device 2 to urge the cleaning object holder 1 with a suction force. Although the suction pipe connecting member 31 is shown in FIG. 1 so as to be integrally connected to the lower surface side of the cleaning object holder 1, it is connected to a suction port 16b formed in the cleaning object holder 1 described later. It may be formed in a tubular shape (see FIG. 5B). Further, the other end of the suction pipe 3 is led into the cleaning tank 100 and is configured to circulate the solvent 102 in the cleaning tank 100 by the action of the suction device 2.

  Further, a filter that is a purifying device 4 (purifying means) for purifying the solvent 102 flowing through the suction pipe 3 is provided on the suction pipe 3. Thereby, the solvent 102 soiled by the cleaning can be purified, and the purified solvent 102 can be returned to the cleaning tank 100 again.

  Here, the suction device 2 will be further described in detail with reference to the block diagram of FIG. In this figure, each line represented by an arrow represents the suction line 3. As shown in this figure, the suction device 2 includes an air suction device 21 (gas suction means) for sucking air (gas) and a solvent suction device 22 (liquid suction means) having a performance of sucking a solvent 102 (liquid). And is constituted by. Both suction devices 21 and 22 are connected to the cleaning object holder 1, and are configured to be connected to any one of the suction devices 21 and 22 by a valve 32 disposed on the suction pipe 3. Specifically, as will be described later, the air suction device 21 is used according to the state in which the cleaning object holder 1 is immersed in the cleaning tank 100, that is, when the cleaning object holder 1 is not immersed in the cleaning tank 100. The valve 32 is switched so as to be sucked, and the valve 32 is switched so as to be sucked using the solvent suction device 22 when the cleaning object holder 1 is immersed in the cleaning tank 100. Therefore, the valve 32 functions as switching means for switching between the suction devices 21 and 22. Such switching may be performed manually, or may be performed by controlling the valve 32 with a controller (not shown) that manages the immersion state of the cleaning object holder 1.

  The suction devices 21 and 22 will be described in further detail. First, the air suction device 21 sucks air as described above, and attracts and holds the magnetic head slider 5 as the cleaning object on the tray 10 as the cleaning object holder 1 by the suction force. Therefore, it is effective to use it for holding before being immersed in the cleaning tank 100. In addition, since there exists a possibility that the air quantity for implement | achieving normal operation | movement cannot be suck | inhaled only by the suction | inhalation through the washing | cleaning material holder 1, it has the structure which attracts | sucks air separately (refer FIG. 2). Further, the solvent suction device 22 sucks the solvent 102 as described above, and sucks and holds the magnetic head slider 5 on the tray 10 by the suction force. Therefore, after being immersed in the cleaning tank 100, the solvent 102 is sucked and the magnetic head slider 5 is held. In this way, by using the suction devices 21 and 22 having appropriate suction performance according to the medium to be sucked, an appropriate suction force can be applied to the cleaning object holder 1, and the cleaning object 5 can be held. Stabilization can be achieved. The operation of holding the cleaning object 5 will be described later.

  The solvent suction device 22 is connected to a pump 22a and a tank 22b. This is because there is a possibility that the amount of liquid for realizing a normal operation cannot be sucked only by suction through the cleaning object holder 1, and therefore, the solvent 102 is separately drawn from the cleaning tank 100 to the tank 22b, and the tank 22b. The internal solvent 102 is also sucked and circulated (see FIG. 2, not shown in FIG. 1).

  Further, as described above, the filter 4 (purification device) for purifying the solvent 102 is provided on the suction pipe 3 connected to the solvent suction device 22. In FIG. 2, two filters 4 are provided, but the number is arbitrary. As a result, the dirty solvent 102 used for cleaning is circulated through the filter 4, so that the cleaning can always be performed with the clean solvent 102.

  Here, in the above description, the case where the two suction devices 21 and 22 are provided as the suction device 2 and are used by switching them is exemplified, but one suction device may be used. However, in such a case, it is necessary that the solvent 102 is sucked at least in a state where it is immersed in the cleaning tank 100 and can exert a suction force for adsorbing the cleaning object 5 to the tray 10 as described later.

<Washing object holder>
Next, the cleaning object holder 1 will be described in detail. The cleaning object holder 1 is a holder that holds the magnetic head slider 5 as a cleaning object and is immersed in the solvent 102 of the cleaning tank 100, and supports the tray 10 on which the magnetic head slider 5 is disposed. And a supporting member 15 (see FIG. 3).

  The suction pipe connecting member 31 is connected to the cleaning object holder 1 and is placed on the base 103 disposed on the bottom surface of the cleaning tank 100 as shown in FIG. Then, it is immersed in the cleaning tank 100. In addition, in FIG. 1, the to-be-cleaned object holder 1 is typically shown with sectional drawing. Further, a suction pipe connecting member 31 connected to the cleaning object holder 1 is also schematically shown in a sectional view. Hereinafter, the tray 10 and the support member 15 constituting the cleaning object holder 1 will be described in detail.

  First, the support member 15 will be described in detail with reference to FIGS. 3 is a view of the support member 15 as viewed from the front surface side (side where the tray 10 is disposed as described later), and FIG. 4 is a view as viewed from the back surface side. FIG. 5 is a cross-sectional view taken along the line AA shown in FIG.

  As shown in FIG. 3, the support member 15 includes a thick, substantially square main body portion 16, a cover portion 17 that covers the surface of the main body portion 16, and a grip portion 18 that grips the support member 15 itself. , Is configured.

  Further, four tray placement portions 16 a for placing the tray 10 are formed on the surface of the main body portion 16, and are configured by a substantially square-shaped recess corresponding to the shape of the tray 10. In addition, a circular suction port 16b penetrating to the back surface side is formed at substantially the center of the inner bottom surface of the tray arrangement portion 16a. In addition, although sectional drawing (AA sectional drawing) of this part is shown to Fig.5 (a), the diameter of the suction port 16b is gradually from the inner bottom face of the tray arrangement | positioning part 16a which is concave shape to the middle toward the back surface side. The shape is an inverted pyramid that becomes smaller and becomes a substantially cylindrical shape as it approaches the back surface, and further has a substantially rectangular shape near the end of the back surface (see FIG. 4).

  Further, a pair of side surfaces of the main body portion 16 is provided with a cover portion 17 that is supported so as to be openable and closable so as to cover the surface of the main body portion 16. The cover portion 17 is formed with a mesh portion 17a that covers the surface of the tray 10 arranged in the tray arrangement portion 16a when the cover portion 17 is closed. Many holes are formed in the mesh portion 17a. As will be described later, the cover portion 17 is covered only when immersed in the solvent 102. However, the cover portion 17 is covered by the buoyancy of the magnetic head slider 5 placed on the tray 10 by being covered. It acts as a detachment restricting member that suppresses detachment from the tray 10. During cleaning, the cover portion 17 is opened and does not cover the tray 10.

  Further, a pair of side surfaces of the main body portion 16 below the cover portion 17 is provided with gripping portions 18 that protrude from the side surfaces. This is utilized so that it is gripped when carrying the support member 15 or supported when placed in the cleaning tank 100.

  FIG. 3 shows a state in which the tray 10 is arranged in the tray arrangement unit 16a located at the lower left. On the other hand, in FIG. 5 (b), the state in which the tray 10 is arranged in any tray arrangement portion 16a and the suction pipe connection of the suction pipe line 3 to the suction port 16b in the AA cross section of FIG. The mode that the member 31 is connected is shown. In this figure, the suction pipe connecting member 31 is formed in a tubular shape so as to be directly fitted to the cylindrical upper portion of the suction port 16b, unlike the shape shown in FIG. .

  By constructing the cleaning object holder 1 in this way and connecting the suction pipe 3, suction is performed from the back side of the tray 10 where the magnetic head slider 5 is not disposed. Moreover, in this figure, although the state which covered the cover part 17 is shown in figure, this is only when immersed in the washing tank 100, and removes at the time of washing | cleaning.

  Here, although the case where the shape of the suction port 16b to which the suction pipe connecting member 31 is connected is circular is illustrated above, this is an example and the shape is not limited thereto. For example, the suction port 16b may be formed in a quadrangular shape corresponding to the shape and size of the tray 10. In such a case, the suction pipe connecting member 31 is also formed according to the shape of the suction port 16b. Furthermore, it is preferable to form the suction port 16b having the size of the tray 10 so that the entire surface of the tray 10 can be sucked. As a result, a uniform suction force can be applied to the entire surface of the tray 10, so that the efficiency of holding the cleaning object 5 can be improved.

  Next, the shape of the tray 10 will be described in detail with reference to FIGS. 6 is a diagram showing the overall shape of the tray, and FIG. 7 is a partially enlarged view showing the detailed shape of the tray.

  First, as shown in FIG. 6, the tray 10 is composed of a single plate-like member having a predetermined thickness, and has a substantially square shape. Further, the size thereof is substantially the same as that of the tray arrangement portion 16 a formed on the surface of the main body portion 16 of the support member 15 described above. A large number of protrusions 12 and 13 (enclosure members) and through-holes 11 are formed on one surface of the tray 10 to constitute a cleaning object arrangement surface on which the magnetic head slider 5 is arranged. The configuration of the cleaning object arrangement surface will be described with reference to FIG.

  FIG. 7A is an enlarged view of a part of the cleaning object arrangement surface of the tray 10. Moreover, FIG.7 (b) is sectional drawing of the BB part in Fig.7 (a). The configuration shown in FIG. 7A is substantially uniformly formed on the entire surface of the tray 10.

  More specifically, the through hole 11 formed in the tray 10 is a suction hole 11 for sucking the magnetic head slider 5 from the side opposite to the position where the magnetic head slider 5 is disposed. The suction hole 11 is formed in a position smaller than the arrangement area of the magnetic head slider 5 at a position where the magnetic head slider 5 is arranged. In other words, the suction hole 11 is formed in a size that is blocked by the magnetic head slider 5 at the approximate center of the region surrounded by the protrusions 12 and 13.

  Further, the protrusions 12 and 13 are of two types: a substantially rectangular protrusion 12 and a substantially elliptical protrusion 13. The substantially rectangular projections 12 form a row with a slight interval in the vertical direction of FIG. 7A, and the row has a substantially rectangular shape in the horizontal direction of FIG. 7A. The head slider 5 is provided in a plurality of rows at substantially the same interval as the long side of the head slider 5 (strictly speaking, an interval longer than the long side). Further, between the rows, substantially elliptical protrusions 13 are similarly provided in rows (vertical direction in FIG. 7A). The formation interval of the protrusions 13 on the same column in the vertical direction is substantially the same as the short side of the magnetic head slider 5 (actually longer than the short side), and the substantially rectangular field. It is formed with the same arrangement pattern as the protrusion 12. Further, the suction holes 11 are formed between the substantially elliptical protrusions 13 forming this row.

  Thus, as shown in FIG. 7A, the magnetic head slider 5, which is a cleaning object, can be disposed on the suction hole 11 between the protrusions 12 and 13. That is, both short sides including the square of the magnetic head slider 5 are surrounded by four substantially rectangular protrusions 12, and both long sides are respectively surrounded by substantially elliptical protrusions 13. Accordingly, the projections 12 and 13 suppress the movement of the magnetic head slider 5 along the tray surface.

  In FIG. 7B, the substantially rectangular protrusion 12 is illustrated as being formed higher than the thickness of the magnetic head slider 5, but the height is not limited thereto. Similarly, the height of the substantially elliptical protrusion 13 is not limited to that shown in FIG.

  At this time, since the projections 12 and 13 are arranged at a predetermined interval, an opening is formed on the peripheral side of the magnetic head slider 5 arranged on the tray 10. . That is, in the arrangement of the protrusions 12 and 13 on the tray 10 shown in FIG. 7A, the central part of the short side of the magnetic head slider 5 and the other parts excluding the central part of the long side are used as a solvent during cleaning. 102 is exposed. Therefore, as will be described later, since the solvent can flow in and out in the horizontal direction (XY direction) with respect to the cleaning object arrangement surface of the tray 10, the circulation of the solvent 102 with respect to the magnetic head slider 5 is promoted. Furthermore, since the side surface of the slider 5 is exposed when taken out from the cleaning tank 100, the solvent 102 can be quickly discharged from the tray 10.

  In addition, in the tray 10 shown in FIG. 7A, the suction holes 11 for holding the cleaning object, that is, the through holes are not formed other than the cleaning object arrangement place, but other through holes may be formed. Good. In the following description, the suction hole 11 where the magnetic head slider 5 is not disposed will be described as other through holes.

  Here, the tray 10 is formed of a mixed resin of Peak resin (polyarylene ether ketone resin) and carbon for coping with the ESD problem. However, such a material is an example, and is not limited thereto. For example, a thermoplastic plastic having ESD resistance and solvent resistance may be used.

[Holding operation]
Next, an operation of holding the magnetic head slider 5 that is a cleaning object at the time of cleaning by the above-described cleaning object holding device (1, 2, etc.) will be described with reference to FIG. In this figure, as shown in FIG. 7B, an example in which the magnetic head slider 5 is disposed at a predetermined position on the tray 10 is illustrated. In this figure, the support member 15 that supports the tray 10 and the suction device 2 are not shown, but are assumed to be equipped as shown in FIG. 1 and other figures. Further, the illustration of the protrusions 12 and 13 provided on the tray 10 is omitted, but of course provided. The state of holding the cleaning object 5 when the cleaning object holder 1 is immersed in the cleaning tank 100 will be described, but the holding operation in the air before the immersion is the same as the suction medium becomes air.

  As shown in this figure, the magnetic head slider 5 is disposed on the tray 10, and in this state, suction by the suction device 2 is started from the back side of the tray 10. Then, the solvent 102 located on the cleaning object arrangement surface side of the tray 10 flows through the suction hole 11 and flows to the back surface side. At this time, at the place where the magnetic head slider 5 is disposed, the solvent 102 passes through a slight gap between the magnetic head slider 5 and the tray 10 and is guided to the suction hole 11, and an attractive force is applied to the magnetic head slider 5. (See arrow Y1). When the magnetic head slider 5 is in close contact with the tray 10, the solvent 102 does not pass through the suction hole 11, but even in such a case, the magnetic head slider 5 is sucked from the back side of the suction hole 11. (Refer to arrow Y1), the suction force is urged and the tray 10 is attracted. Therefore, the magnetic head slider 5 does not need to hold down the surface (the surface opposite to the tray 10) with any holding member, and is held in the tray 10. As a result, the cleaning surface can be widely exposed to the solvent 102 during cleaning, and the cleaning efficiency and the cleanliness can be improved.

  At this time, as shown in FIG. 1 and FIG. 5, the suction pipe connecting member 31 is connected to the suction port 16b formed in the support member 15 that supports the tray 10, and suction is performed. Suction can be performed, and the plurality of cleaning objects 5 can be easily held. As shown on the left and right of FIG. 8, the suction force is also urged to the suction hole 11 where the magnetic head slider 5 is not disposed. Since the fluid flows from the front surface side to the back surface side, the circulation of the solvent 102 in the cleaning tank 100 can be promoted.

[Cleaning operation]
Next, an overall cleaning operation by the above-described cleaning apparatus will be described with reference to FIG. At this time, other figures are also referred to. In particular, the circulation state of the solvent 102 will be described with reference to FIGS.

  First, the operation of holding the cleaning object with the cleaning object holder 1 will be described (cleaning object holding step). As shown in FIG. 3, the tray 10 is placed on the tray placement portion 16a of the support member 15 (step S1), and the magnetic head slider 5 that is the cleaning object is placed on the tray 10 (see step S2 and FIG. 7). . Then, the suction pipe connecting member 31 is connected to the suction port 16 b of the support member 15, and the cleaning object holder 1 is connected to the circulation system using the suction device 2. Then, air suction is started using the air suction device 21 (step S3). As a result, a suction force is applied to each suction hole 11 of the tray 10, so that the magnetic head slider 5 is held by the tray 10 by suction as shown in FIG. 8.

  Subsequently, the cleaning object holder 1 on which the magnetic head slider 5 is disposed is immersed in the solvent 102 of the cleaning tank 100 (immersion process). At this time, the magnetic head slider 5 on the tray 10 is attracted by buoyancy or the like. In step S4, the cover portion 17 is put on the tray 10 so as not to be separated from the tray 10. In this state, it is immersed in the solvent 102 (step S5).

  In the solvent 102, the suction device 2 is switched to the solvent suction device 22 (step S6). That is, the valve 32 on the suction pipe 3 is opened and closed to switch from air suction to solvent suction. Then, since the solvent 102 is sucked from the suction port 16b of the cleaning object holder 1, the suction force is urged to the suction hole 11 of the tray 10 as shown in FIG. Holding by the suction of the head slider 5 is continued. At this time, as shown by an arrow in FIG. 1, the solvent flows from the cleaning object arrangement surface side to the back surface side of the cleaning object holder 1 so as to pass through the suction hole 11 and flows to the suction pipe 3.

  Thereafter, the cover 17 is opened and removed from the magnetic head slider 5 while continuing the solvent suction (step S7). In this state, the ultrasonic transducer 101 is disposed above the magnetic head slider 5 in the solvent 102 and ultrasonic cleaning is performed (step S8). At this time, the magnetic head slider 5 is held on the tray 10 because the suction force by the solvent suction is urged (see FIG. 8). Since there is no member covering the cleaning surface of the magnetic head slider 5 (the side opposite to the surface facing the tray 10) and the member is exposed to the solvent 102, cleaning with ultrasonic waves is effectively performed. It is possible to improve the cleanliness. In particular, it is possible to perform cleaning more effectively by disposing the air bearing surface on which the magnetic head element portion of the magnetic head slider 5 that requires high-precision cleaning is directed toward the side opposite to the tray 10.

  Further, during the cleaning, a small amount of the solvent 102 flows into the surface (contact surface) of the magnetic head slider 5 facing the tray 10, that is, the gap between the magnetic head slider 5 and the tray 10, although a small amount of solvent 102 flows from the surroundings. For this reason (see FIG. 8), the surface of the magnetic head slider 5 facing the tray 10 can also be cleaned. Furthermore, since the projections 12 and 13 erected around the magnetic head slider 5 are open, the solvent 102 can flow around the magnetic head slider 5 and the surrounding surface can be cleaned. Become. Since the suction force is also urged to the other suction holes 11 on the tray 10 where the magnetic head slider 5 is not disposed, the flow of the solvent 102 as described above is promoted (see FIG. 8). .

  Furthermore, at the time of the above-described cleaning, the solvent 102 sucked by the cleaning object holder 1 passes through the suction pipe 3 and the purification device 4 and is returned to the cleaning tank 100 (see the arrow in FIG. 1). Therefore, since the solvent 102 contaminated by the cleaning is purified and used again for cleaning, the cleaning efficiency can be further improved.

  Thereafter, when cleaning is completed, the cleaning object holder 1 is lifted from the cleaning tank 100 (step S9), and the solvent 102 is removed from the magnetic head slider 5. At this time, since the solvent 102 is discharged from the tray 10 through the suction hole 11 of the tray 10 and between the protrusions 12 and 13, the solvent 102 can be quickly removed. Accordingly, it is possible to suppress the residue of the solvent in the cleaned product after cleaning, to suppress the generation of spots and the like, and to improve the cleanliness.

  Next, a second embodiment of the present invention will be described with reference to FIGS. FIG. 10 is a schematic diagram showing the configuration of the cleaning apparatus in the present embodiment, and FIG. 11 is a diagram showing the configuration of the tray.

  The cleaning device in this embodiment uses a roll brush 104 (brush cleaning device) as a cleaning means, and the magnetic head slider 5 which is a cleaning object disposed on the tray 10 is brushed and cleaned by the roll brush 104. That's it. That is, it has the same configuration as the cleaning device disclosed in the first embodiment, and includes a roll brush 104 as a cleaning tool instead of the ultrasonic transducer 101.

  Specifically, as shown in FIG. 10 schematically showing the cleaning apparatus, the cleaning object in which the suction pipe connecting portion 31 of the suction pipe 3 is connected to the base 103 arranged in the cleaning tank 100. A holder 1 is arranged. The cleaning tank 100 is filled with a solvent 102 enough to soak the upper part of the magnetic head slider 5 held by the cleaning object holder 1. Further above that, a roll brush 104 for cleaning the cleaning object is provided. The roll brush 104 is also provided with driving means such as a motor for rotating the brush portion and movable means for moving the position of the roll brush 104, and the position where the tip of the brush contacts the surface of the cleaning object holder 1. Rotate and move with the brushing cleaning along one direction.

  Next, the tray 10 in the present embodiment will be described with reference to FIG. As shown in this figure, the shape of the tray 10 is almost the same as that of the first embodiment described above. In particular, the protrusions 12 and 13 are formed on the magnetic head element portion 51 of the magnetic head slider 5 arranged. Are arranged so as not to be adjacent to each other. In other words, as indicated by an arrow Y2, the roll brush 104 is set to pass between the substantially rectangular protrusions 12 during cleaning, but the magnetic head element portion 51 is positioned on the brushing path (Y2). The magnetic head slider 5 can be disposed.

  By doing in this way, it can control that existence of projections 12 and 13 becomes obstructive for brushing washing. Therefore, it can wash | clean effectively by arrange | positioning the part by which especially high cleanliness is requested | required in the passage location of a brush.

  Note that the brushing path is not limited to the illustrated path, and may be another path. And it is good to make it the shape which has arrange | positioned each protrusion 12 and 13 so that the magnetic head slider 5 can be arrange | positioned so that the magnetic head element part 51 may be located on this path | route.

  Next, a third embodiment of the present invention will be described with reference to FIG. FIG. 12 is a schematic diagram showing the configuration of the cleaning apparatus in the present embodiment.

[Constitution]
The cleaning apparatus in this embodiment uses a microbubble generator 105 (microbubble cleaning apparatus) as a cleaning means, and the cleaning object 5 is cleaned by the microbubbles 105a generated by the microbubble generator 105. It is. Hereinafter, the configuration of the cleaning apparatus of this embodiment will be described in detail.

  As shown in FIG. 12, in the cleaning apparatus in the present embodiment, the cleaning object holding devices 1 and 2, that is, the cleaning object holder 1, are immersed in the cleaning tank 100 in a direction opposite to the above-described direction. In other words, it arrange | positions so that the washing | cleaning thing 5 hold | maintained may face downward, and it supports in the washing tank 100 by the support mechanism which is not shown in figure. And the microbubble generator 105 is arrange | positioned under the washing | cleaning material holder 1 and the said microbubble 105a is generated. Note that the microbubble generator 105 may be disposed outside the cleaning tank 100, and the generated microbubble 105 a may be guided below the cleaning object 5 in the cleaning tank 100.

  Here, the configuration of the microbubble generator 105 is known. For example, the gas is sucked on the primary side of the cavitation pump, and the dispersion attached to the tip of the delivery pipe at a stable mixing ratio by a swirl accelerator attached to the pump discharge port. Microbubbles can be generated by the shearing force of the vessel. The microbubbles 105a generated thereby are fine bubbles having a bubble diameter of several μm to several tens of μm, and have the property of slowly floating in water and adsorbing minute dust to float on the water surface.

[Cleaning operation]
Next, the operation of the cleaning apparatus having the above configuration will be described. First, before the cleaning object holder 1 is immersed in the cleaning tank 100, suction is performed by the air suction device 21, and the cleaning object 5 is held so as to be adsorbed on the lower surface side of the tray 10 by such suction force. At this time, the above-described cover portion 17 may be covered to prevent the cleaning object 5 from falling from the tray 10.

  Then, the cleaning object holder 1 is immersed in the solvent 102 and simultaneously switched to suction by the solvent suction device 22, and the cleaning object 5 is adsorbed and held on the lower surface side of the tray 10 by the force of sucking the solvent (see FIG. 12). (See arrow shown). At the time of immersion in the solvent 102, the buoyancy applied to the cleaning object 5 works in a direction in which the cleaning object is further held in the tray 10, so that the cover part 17 does not have to hold it.

  Thereafter, the microbubbles 105a are generated by the microbubble generator 105 disposed below the cleaning object holder 1, so that the microbubbles 105a slowly floats in water and is a cleaning object held downward. It contacts a certain magnetic head slider 5. At this time, since the magnetic head slider 5 is held by the cleaning object holder 1 described above, the exposed surface is wide and many microbubbles 105a come into contact with each other. Then, since the microbubbles 105a are fine bubbles, the area in contact with the dirt adhering to the magnetic head slider 5 is widened, and the dirt is adsorbed by the surface tension and floats on the water surface, thereby cleaning.

  As described above, according to the present embodiment, unlike the ultrasonic cleaning described in the first embodiment, no vibration is generated, so that the cleaning object 5 can be prevented from rubbing against the tray 10 or the like. Unlike the brush cleaning, it is possible to prevent the cleaning object 5 and the tray 10 from rubbing at the time of brush contact or brushing. Therefore, it is possible to perform cleaning while suppressing damage to the cleaning object 5, and it is possible to further improve the cleanliness.

  Further, since the microbubbles 105 a are easily absorbed by the solvent 102, the microbubbles 105 a have a property of shrinking and disappearing in the solvent 102. Therefore, since it is suppressed that it flows into the suction apparatus 2 or the purification apparatus 4 with a bubble, the bad influence to an apparatus can be suppressed.

  Here, the ultrasonic vibrator 101 disclosed in the first embodiment may be arranged in the cleaning tank 100 of the cleaning apparatus using the microbubble 105a described above to generate ultrasonic vibration in the solvent 102. Good. Thus, the combined use of microbubble cleaning and ultrasonic cleaning can improve the cleaning efficiency.

  Note that the above-described cleaning using the microbubbles 105a can be used to clean any cleaning object 5. Further, the holder for holding the cleaning object 5 used at that time is not limited to the use of the cleaning object holder 1 that holds the cleaning object 5 by suction as described above, and a cleaning object holder having another structure is used. May be.

  In the above description, the magnetic head slider 5 has been described as an example of the cleaning object, but other electronic components and fine components may be used. At this time, it is preferable to arrange a portion or a surface, which requires higher precision cleaning, toward the opposite side without facing the tray 10. Further, as described in the second embodiment, it is preferable to use the tray 10 in which the protrusions 12 and 13 are arranged so that the protrusions 12 and 13 do not come into contact with a portion that requires particularly high-precision cleaning.

  INDUSTRIAL APPLICABILITY The present invention can be used for a cleaning apparatus that realizes cleaning with high cleanliness when cleaning an electronic component such as a magnetic head slider, and has industrial applicability.

1 is a schematic diagram illustrating a configuration of a cleaning device in Example 1. FIG. It is a block diagram which shows the structure of a washing | cleaning apparatus. It is a figure which shows the structure of a washing | cleaning material holder, and is the figure seen from upper direction. It is a figure which shows the structure of a washing | cleaning material holder, and is the figure seen from the downward direction. Fig.5 (a) is AA partial sectional drawing of the washing | cleaning material holder shown in FIG. 3, FIG.5 (b) is sectional drawing which shows a mode that the tray and the suction pipe connection member were equipped. It is a top view which shows the structure of a tray. FIG. 7A is an enlarged view of a part of the tray, and FIG. 7B is a partial cross-sectional view taken along the line B-B in FIG. It is explanatory drawing which shows the holding | maintenance operation | movement of a cleaning material. It is a flowchart which shows the whole operation | movement at the time of washing | cleaning. It is the schematic which shows the structure of the washing | cleaning apparatus in Example 2. FIG. 6 is an enlarged view showing a part of a tray in Embodiment 2. FIG. FIG. 6 is a schematic diagram illustrating a configuration of a cleaning device in Example 3.

Explanation of symbols

1 Cleaning object holder 2 Suction device (suction means)
3 suction line (circulation means)
4 Filter, purification device (purification means)
5 Magnetic head slider, cleaning object 10 Tray 11 Suction hole, through hole 12 Protrusion (enclosure member)
13 Protrusion (enclosure member)
15 Support member 16 Body portion 17 Cover portion (detachment restricting member)
18 Grasping part 21 Air suction device (gas suction means)
22 Solvent suction device (liquid suction means)
31 Suction pipe connecting member 32 Valve (switching means)
51 Magnetic Head Element Unit 100 Cleaning Tank 101 Ultrasonic Vibrator (Ultrasonic Cleaning Device)
102 Solvent 103 Base 104 Roll brush (Brush cleaning device)
105 Microbubble generator (microbubble cleaning device)
16a Tray arrangement part 16b Suction port 17a Mesh part 22a Pump 22b Tank 105a Micro bubble

Claims (14)

A cleaning method for cleaning a product by immersing the cleaning product in a cleaning tank filled with a solvent for cleaning the cleaning product, and performing cleaning.
Generate microbubbles in the washing tank, and wash the washing with the microbubbles.
What is claimed is: 1. A cleaning method for cleaning items. The microbubble is a fine bubble having a property of adsorbing minute dust.
The method for cleaning a washed product according to claim 1. The microbubble is a fine bubble having a bubble diameter of several μm to tens of μm,
The method for cleaning a washed product according to claim 1 or 2. The microbubbles are generated below the cleaning object immersed in the cleaning tank.
4. The method for cleaning a washed product according to claim 1, 2 or 3. The cleaning object holder in which the cleaning object is disposed is immersed in the cleaning tank so that the cleaning object faces downward, and the microbubbles are generated below the cleaning object.
5. The method for cleaning a washed product according to claim 1, 2, 3 or 4. At least at the time of cleaning, the cleaning object disposed in the cleaning object holder is sucked from a suction hole formed through the cleaning object holder in the cleaning object disposition location.
6. The method for cleaning a washed product according to claim 5, wherein: During the cleaning, the solvent in the cleaning tank sucked from the suction hole is circulated back to the cleaning tank.
The method for cleaning a washed product according to claim 6. Purifying the solvent during the circulation;
The method for cleaning a washed product according to claim 7. Generating the microbubbles and ultrasonic vibrations in the cleaning tank, and washing the cleaning object with the microbubbles and the ultrasonic vibrations;
9. The method for cleaning a washed product according to claim 1, 2, 3, 4, 5, 6, 7 or 8. In the cleaning tank, the cleaning object is cleaned with the macro bubble, and the cleaning object is cleaned with a brush.
9. The method for cleaning a washed product according to claim 1, 2, 3, 4, 5, 6, 7 or 8. The cleaning object is a magnetic head slider, and the magnetic head slider is cleaned.
11. The method for washing a washed product according to claim 1, 2, 3, 4, 5, 6, 7, 8, 9 or 10. A cleaning object holder for arranging the cleaning object;
A cleaning tank filled with a solvent for cleaning the cleaning object and dipping the cleaning object holder,
Cleaning means for cleaning the cleaning object in the cleaning tank,
The cleaning means is a microbubble generator that generates microbubbles in the cleaning tank.
A cleaning apparatus characterized by that. The cleaning means is the ultrasonic cleaning device that generates ultrasonic vibration in the microbubble generator and the cleaning tank,
The cleaning apparatus according to claim 12. The cleaning means is a brush cleaning device that brushes and cleans the cleaning object, and the microbubble generator,
The cleaning apparatus according to claim 12.

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