JP2008159784A - Stage apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To increase a workpiece transportation accuracy and a workpiece transportation efficiency in a stage apparatus. <P>SOLUTION: The stage apparatus 10 comprises a horizontally movable moving object 20, a rest 30 for supporting a platen 22 along which the moving object 20 is moved, a suction table 50 for sucking a workpiece 40, and a transportation unit 60 for feeding in or out the workiece 40. The transportation unit 60, which has a base 61 integrally fixed to the rest 30, has a transportation function of feeding in or out the workpiece 40 and a position adjustment function of adjusting the position of the workpiece 40 relative to a suction surface 52 by rotating the workpiece 40 in a horizontal direction (θz direction). The transportation unit 60 has an upper stage unit 62 located in upper and lower 2 stages and a lower stage unit 64 for feeding out of the workpiece. The transportation unit 60 further feeds in or out the workpiece 40 relative to the suction table 50 by lifting or lowering the upper stage unit 62 and a lower stage unit 64 at both sides in an X direction. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a stage apparatus, and more particularly to a stage apparatus configured to convey a thin plate workpiece to a suction table and position it with high accuracy.

  For example, in a process of processing and inspecting a workpiece formed in a thin plate shape such as a glass substrate, a stage device that moves the workpiece with high accuracy while holding the workpiece in a horizontal state is used. In this type of stage apparatus, when placing a work on the suction table or picking up the work placed on the suction table, the robot moves the work by operating the work transfer arm.

  Furthermore, the suction table of the stage device has a plurality of lift pins penetrating therethrough so that the workpiece can be separated from the upper surface of the suction table by raising the lift pins (see, for example, Patent Document 1). . Then, the robot conveys the workpiece by inserting the workpiece conveyance arm into the gap between the workpiece and the upper surface of the suction table by raising the lift pin.

  Accordingly, when placing the work on the suction table, first, the lift pins are raised on the suction table. Next, the work conveyed by the robot arm is placed on the lift pin. When the robot arm is lowered and pulled out sideways, the lift pin is lowered and the work is placed on the suction table. Thereafter, the workpiece placed on the suction table is aligned.

  Further, in the case of a work that is easily bent, such as a glass substrate, the work is slowly lowered onto the suction table so that no air is trapped between the upper surface of the suction table and the work.

Further, in the workpiece return step of returning the workpiece on the suction table, the lift pin is raised to raise the workpiece onto the suction table. Next, after the robot arm is inserted into the gap between the suction table and the workpiece, the robot arm is raised to separate the workpiece from the lift pin.
JP 2005-26290 A

  However, in the conventional stage apparatus, a process of raising and lowering the lift pins is necessary when placing the work on the suction table and taking out the work on the suction table, and the robot arm is reciprocated and placed on the suction table. Since the placed workpiece is aligned, it is difficult to shorten the tact time, and it is difficult to further improve the work efficiency of the process using the stage device.

  Furthermore, conventionally, since it becomes a configuration in which a plurality of lift pins are passed through the suction table and an actuator for raising and lowering the lift pins is arranged below the suction table, the upper surface height of the suction table cannot be further reduced, For example, when the gantry supporting the stage is tilted due to external vibration, the displacement (error) of the work attracted to the suction table is further increased, and the accuracy of the stage device can be reduced. There was a problem that it was difficult.

  Therefore, in view of the above circumstances, an object of the present invention is to provide a stage apparatus that solves the above problems.

  In order to solve the above problems, the present invention has the following means.

  The present invention provides a moving body that horizontally moves, a suction table that is fixed on the moving body and has a suction surface that sucks a thin plate-like work that has been transported, transports the work to the suction table, and The above-mentioned problem is solved by providing a conveyance unit that adjusts the position of the workpiece with respect to the above.

  In the present invention, the transfer unit moves a workpiece support portion that supports the workpiece in a horizontal state and a pair of grip portions that are disposed so as to grip both sides of the workpiece to position the workpiece with respect to the suction surface. The above-described problem is solved by having an alignment unit that performs alignment.

  The present invention detects a position of the workpiece when the workpiece is transported to the suction surface by movement of the pair of gripping portions, and adjusts a stop position of the pair of gripping portions according to the detected position. By providing the position adjustment control means, the above problem is solved.

  This invention solves the said subject because the said workpiece | work support part has a roller unit for conveying the said workpiece | work.

  This invention solves the said subject by having the air floating unit for the said workpiece | work support part to carry out the said workpiece | work levitation | floating and to convey the said workpiece | work.

  The present invention solves the above-mentioned problem by having the gripping unit lifting / lowering driving means for lifting and lowering the gripping unit with respect to the upper surface of the work support unit.

  The present invention solves the above-mentioned problems by controlling the moving direction and the stop position independently with the pair of gripping portions gripping both sides of the workpiece.

  This invention solves the said subject by having the said conveyance unit have the conveyance unit for carrying in the said workpiece | work to the said adsorption | suction table, and the conveyance unit for carrying out the said workpiece | work from the said adsorption | suction table. is there.

  According to the present invention, the transport unit moves up and down so that the upper surface of the transport unit for loading or the transport unit for unloading coincides with the upper surface height of the suction table in accordance with the loading or unloading of the workpiece. Having the mechanism solves the above problem.

  According to the present invention, since the work unit is transported to the suction surface of the suction table and the position of the work with respect to the suction surface is adjusted, the work can be transported to the suction surface of the suction table with high accuracy. At the same time, it is not necessary to provide lift pins on the suction table so that the lift pins can be raised and lowered, and the work transfer operation by the robot can be omitted, and the tact time can be shortened accordingly.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  FIG. 1 is a side view showing a first embodiment of a stage apparatus according to the present invention. FIG. 2 is a plan view of the stage apparatus. In FIG. 1, only a part of the stage apparatus is shown, and already known parts are not shown.

  As shown in FIGS. 1 and 2, the stage apparatus 10 has a rectangular plane composed of a moving body 20 that moves horizontally, a pedestal 30 that supports a surface plate 22 on which the moving body 20 moves, a glass substrate, and the like. A suction table 50 for sucking the workpiece 40 and a transport unit 60 for carrying the workpiece 40 in and out. The base 61 that supports the transport unit 60 is fixed integrally with the gantry 30 that supports the surface plate 22, and the center line of the transport unit 60 in the work transport direction is coaxial with the center line of the suction table 50. So that they are aligned. Further, the transfer unit 60 is controlled by the control device 110 as will be described later, and carries in the work into the suction table 50, adjusts the work stop position with respect to the suction table 50, and carries out the work after processing. The control device 110 executes a control process (see FIG. 5) to be described later by reading various control programs stored in the memory 112. Therefore, in the memory 112 of the control device 110, a workpiece loading control means 112a for loading a workpiece 40 supplied from the outside, a workpiece stop position adjustment control means 112b for controlling the workpiece moving direction and the workpiece stopping position, and the processed workpiece 40. The workpiece unloading control means 112c for unloading, the transport unit lifting / lowering control means 112d for lifting and lowering the transport unit 60, the gripper control means 112e for gripping and releasing the grippers 90a and 90b, and the grip for lifting and lowering the grippers 90a and 90b Various control programs that function as the unit elevation control means 112f and the like are stored.

  The suction table 50 has a suction surface 52 that is fixed on the moving body 20 and sucks the conveyed thin plate-like workpiece 40. The suction surface 52 is provided with a plurality of small holes 54 for sucking or discharging air at predetermined intervals. The plurality of small holes 54 blows compressed air (air) onto the work 40 when the work is transported to float the work 40 from the suction surface 52, and sucks air by supplying a negative pressure when processing the work so that the work 40 is sucked into the suction surface 52. Adsorb to.

  As shown in FIG. 3A, below the adsorption table 50, an air compressor (not shown) for supplying compressed air (air) and a vacuum pump (not shown) for generating negative pressure for sucking air. ) Is connected to the air intake / exhaust passage 56. The air intake / exhaust passage 56 includes a cylinder 57 that distributes the compressed air supplied from the air pipe 55 to the plurality of small holes 54, and a spool 58 that moves in the Y direction by the air pressure supplied into the cylinder 57. The spool 58 moves so as to be interlocked with the conveying operation of the tip portion of the work 40, thereby controlling the air supply range so that air is blown out from the small hole 54 in the region facing the work 40. Therefore, air is blown out from the small hole 54 facing the work 40 in the process of transporting the work 40, so that the work 40 can be floated on the air, and air consumption can be saved. In the suction table 50, when sucking the workpiece 40 conveyed to the suction surface 52, negative pressure is supplied from the air suction / discharge passage 56 to the plurality of small holes 54 to suck air between the workpiece 40. The workpiece 40 is adsorbed.

  In addition, the air supply to each small hole 54 in the suction table 50 is not limited to that shown in FIG. 3A, and for example, as shown in FIG. 3B, a plurality of variable throttles (or solenoid valves) 59 are provided in the air pipe 55. The air flow rate is adjusted by the variable throttle 59, and the air can be supplied to or sucked from the small holes 54 in accordance with the transport position of the workpiece 40.

  Further, since the transport unit 60 transports the workpiece 40 in a horizontal state, the lift table used for inserting a robot transport arm between the workpiece 40 and the suction table 50 as in the prior art. There is no lifting mechanism for lifting the lift pins. Therefore, the height position of the suction table 50 from the surface plate 22 becomes lower, and the height position of the suction surface 52 that sucks the workpiece 40 can be lowered to a position lower than the conventional one. As a result, the displacement (error) of the workpiece 40 on the suction table 50 is reduced when a lateral vibration (sway) is propagated to the moving body 20, and positioning by moving the moving body 20 can be performed with higher accuracy. Become.

  As shown in FIG. 1, the moving body 20 includes an X guide shaft 24 that guides movement in the X direction, and an X slider 26 that moves in the X direction along the X guide shaft 24. Y sliders (not shown) at both ends of the X guide shaft 24 are driven by a Y direction linear motor (not shown) to move in the Y direction. Further, the X slider 26 is driven by a linear motor (not shown) in the X direction to move the suction table 50 in the X direction. Further, the X slider 26 moves by air levitation with respect to the upper surface of the surface plate 22 by the static pressure pad 28. Therefore, the suction table 50 can be moved in the X and Y directions by moving the X slider 26 in the X and Y directions.

  Further, a processing head for processing the surface of the workpiece 40 or an inspection unit (both not shown) for inspecting is supported above the surface plate 22.

  Therefore, in the stage apparatus 10, when the work 40 carried by the transport unit 60 is attracted to the suction surface 52 of the suction table 50, the moving body 20 moves in the X direction and the Y direction, so that the entire surface of the work 40 is obtained. Is subjected to predetermined processing or inspection after processing.

  In the transport unit 60, the base 61 is integrally connected to the gantry 30, and a transport function for loading and unloading the work 40 and the work 40 with respect to the suction surface 52 by rotating the work 40 in the horizontal direction (θz direction). And a position adjustment function for adjusting the position of the workpiece. The upper unit (loading transport unit) 62 for loading workpieces and the lower unit (loading transport unit) for loading workpieces are arranged in two upper and lower stages. 64. A space 63 is formed between the upper unit 62 and the lower unit 64. Further, the transport unit 60 includes a pair of transport unit lifting mechanisms 66 that lift and lower the upper unit 62 and the lower unit 64 on both sides in the X direction.

  The upper unit 62 and the lower unit 64 are supported on both sides by a frame 65 standing on the base 61 of the transport unit 60. Further, since the carry-in unit 62 and the carry-out unit 64 are connected by the support column 68, they can be moved up and down integrally.

  The transport unit elevating mechanism 66 is screwed into the elevating motor 66a fixed to the side surface of the base 61, a ball screw 66b rotated by the elevating motor 66a, a guide 66c arranged in parallel with the ball screw 66b, and the ball screw 66b. And a nut 66d. The nut 66d is coupled so as to protrude from both sides of the lower unit 64, and adjusts the height positions of the upper unit 62 and the lower unit 64 by moving up and down according to the rotation direction and rotation angle of the ball screw 66b.

  In the transport unit elevating mechanism 66, the elevating position of the upper unit 62 and the lower unit 64 is raised or lowered based on position detection data detected by a linear scale in the Z direction or a sensor (both not shown) provided at a stop position. The rotation direction and rotation amount (angle) of the motor 66a are controlled. Accordingly, the upper unit 62 and the lower unit 64 are arranged such that the upper surface of the upper unit 62 or the lower unit 64 matches the height of the upper surface (suction surface 52) of the suction table 50 in accordance with the loading or unloading of the workpiece 40. It moves up and down.

  The upper unit 62 for loading a workpiece includes a lifting base 70, a workpiece support 80 that is supported on the lifting base 70 and supports the workpiece 40 in a horizontal state, and rotates the workpiece 40 in the horizontal direction to work against the suction surface 52. And an alignment unit 100 that performs alignment in the Y direction and the θz direction of 40. The alignment unit 100 has a pair of gripping portions 90a and 90b that are arranged to grip both sides of the workpiece 40 and move toward the suction table 50, and moves the pair of gripping portions 90a and 90b in the same direction. Thus, the position in the Y direction of the work 40 is adjusted, and the position in the θz direction is adjusted by independently moving the pair of gripping portions 90a and 90b.

  Further, the lower unit 64 for carrying out the workpiece has the same configuration as that of the upper unit 62, and the pair of gripping portions 90a and 90b are configured to collect the workpiece.

  The work support unit 80 includes an air floating unit 84 in which static pressure air pads 82 having a plurality of air blowing holes are arranged in parallel, and a conveyor unit 88 having rollers 86. The air levitation unit 84 and the conveyor unit 88 each extend in the Y direction and are alternately arranged in the X direction. Further, the conveyor unit 88 includes a roller driving motor 89, and carries in and out the workpiece 40 by rotating the roller 86.

  The roller 86 is disposed slightly higher than the air levitation unit 84. When the air levitation unit 84 stops air, the workpiece 40 is supported by the roller 86, and when the air levitation unit 84 blows out air, The work 40 is held away from the roller 86 and floated to a predetermined height position.

  A pair of gripping portions 90a and 90b are provided on both sides of the work support portion 80 so as to be movable in the Y direction. Therefore, the workpiece 40 conveyed to the workpiece support unit 80 is held in a horizontal state where the workpiece 40 is levitated by the air blown from the upper surface of the workpiece support unit 80 with both sides held by the pair of holding units 90a and 90b. Then, the workpiece 40 is conveyed toward the suction table 50 in a horizontal state by moving the pair of gripping portions 90a and 90b in the Ya direction.

  The gripping portions 90a and 90b of the alignment unit 100 serve as a transport unit that loads and unloads the workpiece 40 with respect to the suction table 50 and a position adjustment unit that aligns the workpiece 40 transported to the suction table 50. A function corresponding to the movement of the workpiece 40 in the transport unit 60 is performed. The gripping portions 90a and 90b are supported by a mover 91 of a workpiece conveying linear motor that moves along a guide 92 extending in the Y direction. The mover 91 includes a gripping unit lifting / lowering driving unit (gripping unit lifting / lowering driving means) 94 formed of an actuator such as an air cylinder or a solenoid that lifts and lowers the gripping units 90a and 90b. Further, the gripping portions 90 a and 90 b have a work clamp mechanism 96 that grips the work 40. On both sides of the workpiece support 80, a workpiece conveying linear motor stator 97 for driving the workpiece conveying linear motor movable element 91 in the Y direction is provided.

  The work clamp mechanism 96 is configured to clamp the edge of the work 40 from above and below by the driving force of an actuator such as an air cylinder or solenoid, and the upper clamp part 96b is in contrast to the lower clamp part 96a that contacts the work lower surface. The workpiece 40 is gripped or released by approaching or separating.

  Further, on the surface plate 22, there are a gate-type camera support portion 102 erected upward and a pair of alignment cameras 104 a and 104 b provided at predetermined positions facing the suction surface 52 of the suction table 50. Is provided. The alignment cameras 104a and 104b include an image sensor that images the alignment marks provided on both side edges of the workpiece 40 from the vertical direction, and the like. It is attached to the horizontal part. Then, the gripping portions 90a and 90b of the alignment unit 100 align the workpiece 40 so that the alignment marks detected by the alignment cameras 104a and 104b enter the specified position.

  The alignment mark 106 of the workpiece 40 imaged by the pair of alignment cameras 104a and 104b so that the alignment completion state shown in FIG. 4B is changed from the state before alignment shown in FIG. The Y-direction positions of the pair of gripping portions 90a and 90b are adjusted so as to coincide with the center reference mark 108. That is, the workpiece 40 in the horizontal state is adjusted in the Y-direction and θz-direction rotation positions by adjusting the stop positions in the Y direction of the pair of gripping portions 90 a and 90 b, so The position in the direction and the rotational position in the θz direction are accurately positioned. For example, when the alignment mark 106 of the workpiece 40 imaged by the alignment cameras 104a and 104b is shifted in the θz direction with respect to the reference mark 108, the pair of gripping portions 90a and 90b are moved in the opposite directions, respectively. The stop position is adjusted so that the alignment mark 106 coincides with the position of the reference mark 108 in the Y direction. The alignment in the X direction is corrected by the X direction operation on the moving body 20 side based on the positional deviation information obtained from the alignment cameras 104a and 104b. Thereby, the stop position of the workpiece 40 is adjusted so that the alignment mark 106 of the workpiece 40 imaged by the pair of alignment cameras 104a and 104b matches the reference mark 108 at the center of the image.

  In this embodiment, the pair of gripping portions 90a and 90b are moved in the same direction when the workpiece is transported, and after the workpiece 40 reaches the predetermined stop position of the suction table 50, the pair of gripping portions 90a and 90b are independently moved. By moving the workpiece 40, the stop position (suction position) of the workpiece 40 with respect to the suction table 50 is adjusted so that the alignment mark 106 of the workpiece 40 imaged by the alignment cameras 104a and 104b matches the reference mark 108.

  As this position adjustment method, the workpiece 40 is aligned in the Y direction and θz direction by a combination of the following three patterns. In the first position adjustment method, for example, when it is detected that only one (left side) alignment mark 106 of the workpiece 40 is displaced in the Y direction, only one (left side) gripping portion 90a is moved to Y. (In this case, the other (right side) gripping portion 90b is stopped).

  In the second position adjustment method, for example, when it is detected that only the other (right side) alignment mark 106 of the workpiece 40 is displaced in the Y direction, only the other (right side) gripping part 90b is moved to Y. (In this case, one (left side) gripping portion 90a is stopped).

  In the third position adjustment method, for example, one (left side) alignment mark 106 of the workpiece 40 is displaced in the Ya direction or Yb direction, and the left alignment mark 106 of the workpiece 40 is shifted in the Yb direction or Ya direction. When it is detected that the position is displaced, the workpiece 40 is displaced in the θz direction, so that one (left side) gripping portion 90a is moved in the Yb direction or Ya direction, and the other (right side) gripping portion 90b is moved. Is moved in the Ya direction or the Yb direction.

  In this way, the stop position (suction position) of the work 40 with respect to the suction table 50 can be adjusted by independently moving the pair of gripping portions 90a and 90b, so the stop position of the work 40 is accurately adjusted. It becomes possible.

  The stage device 10 is controlled by the control device 110, and a control program for controlling the moving body 20 and the transport unit 60 is stored in the storage unit of the control device 110. As will be described later, the transport unit 60 performs the loading / unloading operation of the workpiece 40 in conjunction with the machining operation on the workpiece 40 due to the movement of the moving body 20. In addition, roller conveyors 120 a and 120 b that carry in and out the workpiece 40 are installed on the side of the transport unit 60. The transfer unit 60 disposed between the moving body 20 and the roller conveyors 120a and 120b is configured so that either the upper unit 62 or the lower unit 64 has the suction surface of the suction table 50 in accordance with the transfer operation of the workpiece 40. It moves up and down so that the height position of 52 or the other matches the height position of the roller conveyors 120a and 120b.

  Here, the control process of the control apparatus 110 is demonstrated. FIG. 5 is a flowchart showing a control procedure executed by the control device 110.

  In S11, the control device 110 drives the raising / lowering motor 66a of the transport unit raising / lowering mechanism 66 to lower the upper unit 62 and the lower unit 64 in the Zb direction, and the work support portion 80 of the upper unit 62 as shown in FIG. Is adjusted to the height position of the roller conveyor 120a for loading. In the next S12, when the unprocessed work 40 conveyed by the carry-in roller conveyor 120a is carried into the work support section 80 of the upper unit 62 (indicated by a one-dot chain line in FIG. 1), the process proceeds to S13, and the gripping section The pair of gripping portions 90a, 90b are raised to the upper surface height position of the work support portion 80 by the driving force of the lifting drive portion 94 (gripping portion lifting control means), and the peripheral edges on both sides of the workpiece 40 are paired with the pair of gripping portions 90a, 90b. The workpiece is clamped by the workpiece clamping mechanism 96 (gripping unit control means). In other words, the work clamp mechanism 96 of the gripping portions 90a and 90b grips both side edges of the work 40 when the upper clamp portion 96b comes close to the lower clamp portion 96a.

  In S <b> 14, air is blown from the static pressure air pad 82 of the work support unit 80 to float the work 40. At the same time, the gripping portions 90a and 90b are driven in the Ya direction by the mover 91 of the workpiece transport linear motor moving along the guide 92 to transport the workpiece 40 onto the suction surface 52 of the suction table 50 (work loading control). means). In the process in which the workpiece 40 is carried into the workpiece support portion 80 from the roller conveyor 120a, the pair of gripping portions 90a and 90b are positioned lower than the passage position of the workpiece 40, so that the loading of the workpiece 40 is not hindered. It is configured. Further, while carrying out the above S11 to S14, the work carry-out process (work carry-out control means) of S11a to S13a is also carried out simultaneously. That is, in S11 to S14, the unprocessed workpiece 40 is loaded from the upper carry-on roller conveyor 120a to the upper unit 62, and in S11a, the processed workpiece already recovered from the suction table 50 as shown in FIG. The workpiece 40 (the workpiece collected in the previous collecting step S19) is moved to the unloading roller conveyor 120b and carried out. Further, in S12a, when the processed workpiece 40 has been unloaded to the roller conveyor 120b for unloading, the process proceeds to S13a where the roller driving motor 89 of the conveyor unit 88 is stopped and unloading by the lower unit 64 is stopped.

  In the next S15, the raising / lowering motor 66a of the transport unit raising / lowering mechanism 66 is driven to raise the upper unit 62 and the lower unit 64 in the Za direction, and the upper surface of the work support portion 80 of the lower unit 64 as shown in FIG. The height position is adjusted to the height position of the suction surface 52 of the suction table 50 (conveyance unit lift control means).

  Subsequently, in S16, when the processing of the work 40 sucked to the suction table 50 by the movement of the moving body 20 is completed, the work 40 is blown from the suction surface 52 by blowing air to the work 40, and the process proceeds to S17. The pair of gripping portions 90a and 90b of the unit 64 are simultaneously moved to the suction table 50 side, and the peripheral edge portions on both sides of the processed workpiece 40 sucked to the suction table 50 by the work clamping mechanism 96 of the pair of gripping portions 90a and 90b are moved. Hold it.

  Further, in S <b> 18, air is blown out from the static pressure air pad 82 of the work support portion 80 of the lower unit 64. Subsequently, the process proceeds to S19, and as shown in FIG. 7, the pair of gripping portions 90a, 90b of the lower unit 64 is moved in the Yb direction to form the processed workpiece 40 between the upper unit 62 and the lower unit 64. When the workpiece 40 that has been processed in S19a is collected, the air blowing of the lower unit 64 is stopped.

  In the next S20, the raising / lowering motor 66a of the transport unit raising / lowering mechanism 66 is driven to lower the upper unit 62 and the lower unit 64 in the Zb direction, and the upper surface of the work support portion 80 of the upper unit 62 as shown in FIG. The height position is adjusted to the height position of the suction surface 52 of the suction table 50 (conveyance unit lift control means). In S21, the pair of gripping portions 90a and 90b of the upper unit 62 are moved to the suction table 50 side, and the unprocessed workpiece 40 that is air-lifted is conveyed to the suction surface 52 of the suction table 50.

  In S22, since the spool 58 is moved in the Ya direction by the air pressure in the cylinder 57 described above, air is blown out from the small hole 54 of the suction surface 52 in conjunction with the conveying operation of the workpiece 40. Thereby, the work 40 carried in from the upper unit 62 is held in a state where the air floats on the suction surface 52. In S23, the air from the static pressure air pad 82 of the upper unit 62 is stopped.

  Furthermore, in S24, the workpiece 40 is aligned on the suction table 50. That is, an image captured by a pair of alignment cameras 104a and 104b provided on the camera support unit 102 is acquired, and the relative position (error) between the alignment mark 106 of the workpiece 40 and the reference mark 108 at the center of the image is obtained. Detect and calculate the position error of the workpiece 40. Subsequently, the process proceeds to S25, where the alignment mark 106 of the workpiece 40 and the reference mark 108 at the center of the image coincide with each other as shown in FIG. 4 (B) from the state before alignment shown in FIG. 4 (A). Thus, the stop positions of the pair of gripping portions 90a and 90b are adjusted. In this embodiment, the processes of S24 and S25 function as stop position adjusting means. Further, even when the position of the alignment mark 106 and the reference mark 108 of the workpiece 40 is slightly shifted and an error in the X and Y directions remains, the position of the moving body 20 is set to X, X based on the error information. By adjusting in the Y direction, the alignment mark 106 and the reference mark 108 can be matched.

  Accordingly, the workpiece 40 is positioned from the state before alignment indicated by the broken line in FIG. 9 to the alignment completed state indicated by the solid line in FIG. 9, and is positioned with high accuracy with respect to the suction surface 52 of the suction table 50.

  In the next S26, when the alignment mark 106 of the workpiece 40 and the reference mark 108 at the center of the image do not match, the processes of S24 to S26 are repeated. In the next S26, when the alignment mark 106 of the workpiece 40 and the reference mark 108 at the center of the image coincide with each other (see FIG. 4B), the process proceeds to S27 and air is passed through the small hole 54 of the suction surface 52. To suck the workpiece 40 before processing onto the suction surface 52 of the suction table 50.

  At the same time, the workpiece gripping by the pair of gripping portions 90a, 90b of the upper unit 62 is released in S28 (gripping portion control means). That is, the workpiece clamping mechanism 96 of the gripping portions 90a and 90b releases the gripping of the workpiece 40 by separating the upper clamp portion 96b from the lower clamp portion 96a. Thereafter, the pair of gripping portions 90a and 90b are lowered downward from the upper surface of the work support portion 80 by the driving force of the gripping portion lifting / lowering driving portion 94 (gripping portion lifting / lowering control means).

  Subsequently, in S29, the moving body 20 is started to move in the Ya direction, and the workpiece 40 is processed.

  Thereafter, the process returns to S11 again, and the processes of S11 to S29 are repeated. As described above, in the stage apparatus 10, after the processed workpiece 40 adsorbed on the adsorption surface 52 of the adsorption table 50 is carried out by the workpiece carrying-in / out operation by the conveyance unit 60, the unprocessed workpiece 40 is removed from the adsorption table 50. Since it is carried into the suction surface 52, it is not necessary to provide a lift pin on the suction table 50 so that it can be raised and lowered in accordance with the arm operation of the robot as in the prior art, and the work transfer operation by the robot can be omitted, thereby reducing the tact time accordingly. It becomes possible to plan.

  FIG. 11 is a side view showing the configuration of the second embodiment. In FIG. 11, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  As shown in FIG. 11, in the stage apparatus 200 according to the second embodiment, the upper unit 62 and the lower unit 64 are supported by a plurality of lift cylinders 210 so as to be movable up and down. In the second embodiment, the conveying unit 60 is moved up and down by the conveying unit lifting mechanism 66 and the upper unit 62 and the lower unit 64 are individually moved up and down by the lift cylinder 210, whereby the upper unit 62 and the lower unit 64 are moved to the roller conveyor 120a. , 120b can be moved to a height position.

  Therefore, when the workpiece 40 is transferred between the transport unit 60 and the roller conveyors 120a and 120b, the height positions of the upper unit 62 and the lower unit 64 are adjusted in a short time by the transport unit lifting mechanism 66 and the lift cylinder 210. It becomes possible. Moreover, the workpiece 40 can be delivered smoothly by matching the workpiece conveyance height position by the upper unit 62 and the lower unit 64 with the workpiece conveyance height of the roller conveyors 120a and 120b.

  Here, with reference to FIG. 12 thru | or FIG. 14, the process of conveying the workpiece | work of the adsorption | suction table 50 to the roller conveyor 120b for carrying out is demonstrated. As shown in FIG. 12, when recovering the processed workpiece 40 from the suction surface 52 of the suction table 50, the upper unit 62 and the lower unit 64 are moved to Za by driving the lifting motor 66a of the transport unit lifting mechanism 66. The height position of the work support portion 80 of the lower unit 64 is adjusted to the height position of the suction surface 52 of the suction table 50.

  Then, the pair of gripping portions 90a and 90b of the lower unit 64 are simultaneously moved to the suction table 50 side (Ya direction), and the processed gripped to the suction table 50 by the work clamp mechanism 96 of the pair of gripping portions 90a and 90b. Grip the peripheral edges on both sides of the workpiece 40. Further, the pair of gripping portions 90a and 90b of the lower unit 64 is moved in the Yb direction to collect the processed workpiece 40 on the workpiece support portion 80 of the lower unit 64, and the workpiece 40 by the pair of gripping portions 90a and 90b is collected. Release the grip.

  As shown in FIG. 13, when the workpiece 40 before processing is transported to the suction table 50, the lifting motor 66a of the transport unit lifting mechanism 66 is driven to lower the upper unit 62 and the lower unit 64 in the Zb direction. The height position of the work support portion 80 of the upper unit 62 is matched with the height position of the suction surface 52 of the suction table 50. Then, the pair of gripping portions 90 a and 90 b of the upper unit 62 are moved to the suction table 50 side (Ya direction), and the unprocessed workpiece 40 supported by the conveyor unit 88 is conveyed to the suction surface 52 of the suction table 50.

  Further, as in the first embodiment described above, an image captured by the pair of alignment cameras 104a and 104b is acquired, and the pair of alignment marks 106 on the workpiece 40 and the reference mark 108 at the center of the image coincide with each other. The workpieces 40 are aligned on the suction table 50 by adjusting the relative positions of the gripping portions 90a and 90b in the Y direction.

  As shown in FIG. 14, when the processed workpiece 40 is unloaded from the suction table 50, the lower unit 64 is lifted by the lift cylinder 210 and the height position of the workpiece 40 placed on the lower unit 64 is used for unloading. To the height of the roller conveyor 120b. Then, the gripping of the workpiece 40 by the pair of gripping portions 90a and 90b of the lower unit 64 is released, and the roller 86 of the conveyor unit 88 is driven to rotate by the roller driving motor 89, and the processed workpiece 40 is unloaded. It is carried out to the conveyor 120b side. When the processed workpiece 40 is completely transferred to the roller conveyor 120b for discharging, the roller driving motor 89 of the conveyor unit 88 is stopped and the discharging by the lower unit 64 is stopped.

  As described above, in the second embodiment, similarly to the first embodiment described above, it is unnecessary to provide lift pins on the suction table 50 so as to be able to move up and down in accordance with the robot arm operation as in the prior art. Therefore, the tact time can be shortened accordingly.

  In each of the embodiments described above, as the moving body 20, for example, an XY stage that combines a Y direction stage and an X direction stage, a gantry moving type stage that moves the gantry section in the Y direction, and any horizontal plane Of course, any type of stage such as a surface type stage moving in the direction may be used.

  Further, in the above-described embodiment, the configuration in which the carry-in transport unit and the carry-out transport unit are arranged in two upper and lower stages has been described as an example. Of course, it is good also as a structure arrange | positioned.

It is a side view which shows Example 1 of the stage apparatus by this invention. It is a top view of a stage apparatus. It is a side view which shows the air intake / exhaust path | route which sucks and discharges air to the suction table. It is a side view which shows another air intake / exhaust path | route which sucks and discharges air to the suction table. It is a figure which shows the example of an image imaged with the alignment cameras 104a and 104b. It is a flowchart which shows the control procedure which the control apparatus 110 performs. It is a side view which shows the operation state which raised the upper stage unit 62 and the lower stage unit 64 of Example 1. FIG. FIG. 6 is a side view illustrating an operation state in which the processed workpiece 40 according to the first embodiment is collected from the suction table 50 to the transport unit 60. FIG. 6 is a side view illustrating an operation state in which a workpiece 40 before processing according to the first embodiment is carried from a conveyance unit 60 to a suction table 50. It is a top view which shows the alignment operation | movement of the workpiece | work carried in to the suction table 50 of Example 1. FIG. It is a side view which shows the operation state which carries out the processed workpiece | work 40 of Example 1 from the conveyance unit 60 to the roller conveyor 120b for carrying out. 6 is a side view showing the configuration of Example 2. FIG. It is a side view which shows the operation state which collect | recovers the processed workpiece | work 40 from the suction surface 52 of the suction table 50 of Example 2. FIG. It is a side view which shows the operation state which conveys the workpiece | work 40 before the process of Example 2 to the adsorption | suction table 50. FIG. It is a side view which shows the operation state which carries out the processed workpiece | work 40 collect | recovered from the suction table 50 of Example 2. FIG.

Explanation of symbols

10,200 Stage device 20 Moving body 22 Surface plate 24 X-axis guide 26 X slider 28 Static pressure pad 30 Base 40 Work 50 Suction table 52 Suction surface 54 Air suction hole 56 Air suction / discharge path 60 Transport unit 61 Base 62 Upper unit 64 Lower stage Unit 66 Conveying unit elevating mechanism 70 Elevating base 80 Work support portion 82 Hydrostatic air pad 84 Air floating unit 86 Roller 88 Conveyor unit 89 Roller driving motors 90a and 90b Grip portion 94 Grip portion elevating drive portion 96 Work clamp mechanism 100 Alignment portion 102 Camera support portions 104a and 104b Positioning camera 106 Positioning mark 108 Reference mark 110 Control device 112 Memory 112a Workpiece loading control means 112b Workpiece stop position adjustment control means 112c Workpiece carrying out control hand Step 112d Transport unit lifting control means 112e Grasping part control means 112f Grasping part lifting control means 120a, 120b Roller conveyor 210 Lift cylinder

Claims (9)

A moving body that moves horizontally;
A suction table having a suction surface for sucking a thin plate-like workpiece fixed and transported on the movable body;
A transport unit that transports the work to the suction table and adjusts the position of the work with respect to the suction surface;
A stage apparatus comprising: The transport unit is
A workpiece support portion for supporting the workpiece in a horizontal state;
An alignment unit that moves a pair of gripping portions arranged to grip both sides of the workpiece and aligns the workpiece with respect to the suction surface;
The stage apparatus according to claim 1, further comprising:   Stop position adjustment control means for detecting the position of the workpiece and adjusting the stop position of the pair of grip portions according to the detected position when the workpiece is transported to the suction surface by the movement of the pair of grip portions. The stage apparatus according to claim 2, further comprising:   The stage apparatus according to claim 2, wherein the work support unit includes a roller unit for transporting the work.   4. The stage apparatus according to claim 2, wherein the work support unit includes an air levitation unit for levitation of the work to convey the work. 5.   The stage apparatus according to claim 2, wherein the transport unit includes a grip part lifting / lowering driving unit that lifts and lowers the grip part with respect to an upper surface of the work support part.   The stage device according to any one of claims 2 to 6, wherein the pair of gripping portions are independently controlled in a moving direction and a stop position while gripping both sides of the workpiece.   8. The transport unit according to claim 1, wherein the transport unit includes a transport unit for loading the work into the suction table, and a transport unit for unloading the work from the suction table. 9. The stage apparatus described in 1.   The transfer unit has an elevating mechanism that moves up and down so that the upper surface of the carry-in transfer unit or the carry-out transfer unit coincides with the upper surface height of the suction table in accordance with loading of the work or unloading of the work. The stage apparatus according to claim 8.

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