JP2008026012A - Temperature sensor and its manufacturing method - Google Patents
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Abstract
Description
本発明は、一対の電極線に接続された温度検出素子を有底円筒状の金属製カバー内に収納した温度センサに関するものであり、特にディーゼルエンジン自動車排ガス等の被測定流体が流通する流路内に設けられ、車両の振動に晒される環境下で、被測定流体の温度を検出する温度センサに好適なものである。 The present invention relates to a temperature sensor in which a temperature detection element connected to a pair of electrode wires is housed in a bottomed cylindrical metal cover, and in particular, a flow path through which a fluid to be measured such as diesel engine automobile exhaust gas flows. This is suitable for a temperature sensor that detects the temperature of a fluid to be measured in an environment that is provided inside and exposed to vibrations of a vehicle.
従来、自動車用排ガス浄化装置の温度制御等を図るために排ガス流路内に設けられる温度センサとして、例えば特許文献1に記載されるような、サーミスタ素子の電極線と接続される金属芯線をシースパイプ内に絶縁保持してなるシース部材を、有底筒状でシース部材の外径よりも小さい内径の小径部と該小径部の後端側に該小径部の外径よりも大径の大径部を備えた金属製チューブ内に挿入しつつ、サーミスタ素子を金属製チューブの先端側内部に配置させ、サーミスタ素子の先端と金属製チューブの内壁先端との間にセメントが充填された温度センサが知られている。
また、特許文献2には例えばY(Cr、Mn)O3等を主成分とする遷移金属酸化物を用いた1000℃以上の高温の測定に好適なサーミスタ素子が開示されている。
2. Description of the Related Art Conventionally, as a temperature sensor provided in an exhaust gas flow path for controlling temperature of an exhaust gas purification apparatus for automobiles, a metal core wire connected to an electrode wire of a thermistor element as described in Patent Document 1, for example, is sheathed. A sheath member that is insulated and held in a pipe has a bottomed cylindrical shape with a small diameter portion having an inner diameter smaller than the outer diameter of the sheath member and a large diameter larger than the outer diameter of the small diameter portion on the rear end side of the small diameter portion. A temperature sensor in which the thermistor element is placed inside the tip of the metal tube while being inserted into a metal tube having a diameter, and cement is filled between the tip of the thermistor element and the tip of the inner wall of the metal tube. It has been known.
Patent Document 2 discloses a thermistor element suitable for measurement at a high temperature of 1000 ° C. or more using a transition metal oxide mainly composed of Y (Cr, Mn) O 3 or the like.
しかしながら、このような温度センサであって、図7(a)に示す温度センサ1bにおいては、感温部10bの小径部の内径は極めて小さくなっている。このような場合、図7(b)に示す充填剤103は上記金属カバー104b内にスラリー状態で注入され、その後、温度検出素子101の一対の電極線102と接続された一対の信号線121が絶縁部材122を介して絶縁支持された金属製保護管123が上記金属製カバー104b内に挿入固定される。
この時、スラリー状態の上記充填剤103の表面張力や粘性等の影響により、上記充填剤中に空気が巻き込まれ、図7(b)に示すような気泡2が上記金属製カバー104bの先端内側に発生してしまうことがある。
このような気泡が存在すると金属製カバー104bから温度検出素子101への熱の伝導が妨げられてしまい、温度応答性の低下を招くことになる。
However, in such a temperature sensor, in the temperature sensor 1b shown in FIG. 7A, the inner diameter of the small diameter portion of the temperature sensing portion 10b is extremely small. In such a case, the filler 103 shown in FIG. 7B is injected into the metal cover 104b in a slurry state, and thereafter, a pair of signal lines 121 connected to the pair of electrode wires 102 of the temperature detection element 101 are provided. A metal protective tube 123 insulated and supported through an insulating member 122 is inserted and fixed in the metal cover 104b.
At this time, air is entrained in the filler due to the influence of the surface tension, viscosity, etc. of the filler 103 in a slurry state, and bubbles 2 as shown in FIG. 7B are formed inside the tip of the metal cover 104b. May occur.
If such bubbles exist, heat conduction from the metal cover 104b to the temperature detecting element 101 is hindered, resulting in a decrease in temperature responsiveness.
また、該気泡2の存在により上記充填剤103の充填が不完全となってしまう場合には、上記温度検出素子101を上記金属製カバー104b内に拘持する上記充填剤103の保持力が低下する。したがって、このような温度センサ1bが車両の振動に晒され、外部から振動を受けると、温度検出素子101の電極線102に局所的な応力集中が起こり、該電極線102の断線に至る場合がある。 Further, when the filling of the filler 103 becomes incomplete due to the presence of the bubbles 2, the holding power of the filler 103 holding the temperature detecting element 101 in the metal cover 104b is reduced. To do. Therefore, when such a temperature sensor 1b is exposed to vehicle vibration and is subjected to vibration from the outside, local stress concentration occurs on the electrode wire 102 of the temperature detection element 101, and the electrode wire 102 may be disconnected. is there.
さらに、このような気泡は不定形であるため、該気泡による応答性の低下にはバラツキがあり、このようなバラツキを電気的処理等により定量的に補正することが困難である。また、金属カバー内に発生する欠陥であるためX線撮影等の手段によらなければ該気泡の有無の発見が困難である。したがって、このような温度センサの信頼性を向上するためには製造工程において該気泡を確実に排除することが望まれる。 Further, since such bubbles are indefinite, there is a variation in the response reduction due to the bubbles, and it is difficult to quantitatively correct such variations by electrical processing or the like. In addition, since it is a defect generated in the metal cover, it is difficult to find the presence or absence of the bubble unless using means such as X-ray imaging. Therefore, in order to improve the reliability of such a temperature sensor, it is desired to reliably eliminate the bubbles in the manufacturing process.
そこで、本発明は、係る実情に鑑み、更なる応答性の向上と耐震性の向上とを同時に実現し、かつ信頼性に優れた温度センサを提供することを目的とする。 Therefore, in view of the actual situation, an object of the present invention is to provide a temperature sensor that realizes further improvement of responsiveness and improvement of earthquake resistance and is excellent in reliability.
請求項1の発明では、一端が閉塞し他端が開放する有底円筒状の金属製カバーとこの金属製カバーの閉塞端内側に収納され、一対の電極線が接続された温度検出素子からなる感温部と、上記金属製カバーの開放端に挿嵌される円筒状の金属製保護管と該金属製保護管の内側に設けられ上記電極線と電気的に接続されて外部に信号を取り出す一対の信号線とこれらを絶縁する絶縁部材とからなる保護管部と、上記保護管部を保持するとともに上記感温部を被測定流体内の所定位置に取付固定するためのネジ部を有するハウジング部とを備えた温度センサであって、上記金属製カバーと上記温度検出素子との間隙を埋める充填剤によって上記温度検出素子が上記金属製カバー内で拘持されるとともに、上記金属製カバーの閉塞端底部に気泡排出用貫通孔を有し、該気泡排出用貫通孔によって上記金属製カバーの閉塞端内に取り込まれた気泡が排出されたことを特徴とする。 According to the first aspect of the present invention, there is provided a bottomed cylindrical metal cover whose one end is closed and the other end is opened, and a temperature detecting element which is housed inside the closed end of the metal cover and connected to a pair of electrode wires. A temperature sensing part, a cylindrical metal protective tube inserted into the open end of the metal cover, and an electrode connected to the electrode wire provided inside the metal protective tube to extract a signal to the outside A housing having a protective tube portion composed of a pair of signal lines and an insulating member for insulating them, and a screw portion for holding the protective tube portion and fixing the temperature sensing portion at a predetermined position in the fluid to be measured A temperature sensor provided with a portion, wherein the temperature detection element is held in the metal cover by a filler that fills a gap between the metal cover and the temperature detection element, and the metal cover For discharging air bubbles at the bottom of the closed end Has a through hole, bubbles taken into the closed end of the metallic cover is characterized in that it is discharged by the bubble discharge through hole.
上記金属製カバー内に上記充填剤を注入する際に上記充填剤中に巻き込まれた気泡を上記気泡排出用貫通孔から排出することによって、上記充填剤中の欠陥を少なくすることができる。したがって、上記温度検出素子は上記金属製カバー内で安定した状態で拘持されるので、外部からの振動等による上記電極線の断線を防止できる。 Defects in the filler can be reduced by discharging bubbles entrained in the filler from the through hole for discharging bubbles when the filler is injected into the metal cover. Therefore, since the temperature detection element is held in a stable state in the metal cover, it is possible to prevent disconnection of the electrode wire due to external vibration or the like.
また、上記温度検出素子と上記金属製カバーとの間隙に上記充填剤が均一に充填されることによって、上記温度検出素子への熱伝導が均一化される。したがって、温度センサとしての応答性が安定する。 Further, the filler is uniformly filled in the gap between the temperature detection element and the metal cover, so that the heat conduction to the temperature detection element is made uniform. Therefore, the responsiveness as a temperature sensor is stabilized.
請求項2の発明では、上記気泡排出用貫通孔を封止する封止手段を設けた。 In the invention of claim 2, a sealing means for sealing the bubble discharge through hole is provided.
上記封止手段によって上記気泡排出用貫通孔が密封されているので、上記温度検出素子が非測定流体によって酸化、還元等の影響を受けない。したがって、温度センサとしての信頼性が確保される。 Since the bubble discharging through hole is sealed by the sealing means, the temperature detecting element is not affected by oxidation, reduction, etc. by the non-measuring fluid. Therefore, reliability as a temperature sensor is ensured.
請求項3の発明では、上記気泡排出用貫通孔は直径50μmから直径300μmの範囲の貫通孔である。 According to a third aspect of the present invention, the bubble discharge through hole is a through hole having a diameter of 50 μm to 300 μm.
上記気泡排出用貫通孔が直径50μmより小さいと該気泡の排出が困難となり、上記気泡排出用貫通孔が直径300μmより大きいと充填後の封止が困難となる。 When the bubble discharge through hole is smaller than 50 μm in diameter, it is difficult to discharge the bubble, and when the bubble discharge through hole is larger than 300 μm in diameter, sealing after filling becomes difficult.
請求項4の発明では、上記気泡排出用貫通孔を複数個設けた。 In the invention of claim 4, a plurality of the bubble discharge through holes are provided.
上記気泡は不定形であるため、複数の上記気泡排出用貫通孔を設けると、上記気泡の排出確率は高くなり、より確実に該気泡を排除できる。したがって、温度センサとしての信頼性が向上される。 Since the bubbles are indefinite, if a plurality of the bubble discharge through holes are provided, the discharge probability of the bubbles is increased, and the bubbles can be more reliably excluded. Therefore, the reliability as a temperature sensor is improved.
請求項5の発明では、上記封止手段はレーザ溶接によって形成した溶接ビード(溶接痕)である。 In the invention of claim 5, the sealing means is a weld bead (weld mark) formed by laser welding.
上記溶接ビード(溶接痕)は上記金属製カバー底部と完全に一体となり、上記気泡排出貫通孔を密封することができる。したがって、上記温度検出素子が被測定流体から化学的な変化をもたらすような影響を受けない。 The weld bead (weld mark) is completely integrated with the bottom portion of the metal cover, and the bubble discharge through hole can be sealed. Therefore, the temperature detecting element is not affected by causing a chemical change from the fluid to be measured.
請求項6の発明では、上記金属製カバーの内径は3mm以下である。 In the invention of claim 6, the inner diameter of the metal cover is 3 mm or less.
本発明は特に内径3mm以下の極細径の金属製カバーに温度検出素子を収納する温度センサに好適であり、上記温度検出素子と上記金属製カバーとの距離が極めて短いので応答性に優れている。 The present invention is particularly suitable for a temperature sensor in which a temperature detection element is housed in an extremely thin metal cover having an inner diameter of 3 mm or less, and the distance between the temperature detection element and the metal cover is extremely short, so that the response is excellent. .
請求項7の発明では、上記充填剤は無機バインダーを含みアルミナを主成分とするセメントである。 In the invention of claim 7, the filler is a cement containing an inorganic binder and mainly composed of alumina.
上記アルミナセメントは低温での加熱乾燥によって固化し、1000℃以上の環境下での使用によっても変化しない化学的に安定でかつ良好な電気絶縁性と良好な熱伝導性を備えた充填剤となる。したがって温度センサとしての応答性が更に向上する。
また、上記アルミナセメントは機械的強度に優れ、上記温度検出素子、上記一対の電極線および上記一対の信号線を一体的にかつ強固に支持固定するので、外部からの振動に対する耐震性が向上する。
The above-mentioned alumina cement is solidified by heat drying at a low temperature, and becomes a filler having a chemically stable and good electrical insulation and good thermal conductivity that does not change even when used in an environment of 1000 ° C. or higher. . Therefore, the responsiveness as a temperature sensor is further improved.
The alumina cement is excellent in mechanical strength, and the temperature detecting element, the pair of electrode wires and the pair of signal wires are integrally and firmly supported and fixed, so that the earthquake resistance against external vibration is improved. .
請求項8の発明では、上記金属製カバーは、上記閉塞端側を径小とし、上記開放端側を径大とする段付き有底円筒状である。 According to an eighth aspect of the present invention, the metal cover has a stepped bottomed cylindrical shape in which the closed end side has a small diameter and the open end side has a large diameter.
このような形状とすることで上記金属製カバー内壁と上記温度検出素子との距離を極めて短くすることができ、温度センサの応答性が向上する、 By adopting such a shape, the distance between the inner wall of the metal cover and the temperature detection element can be extremely shortened, and the responsiveness of the temperature sensor is improved.
請求項9の発明では、上記温度検出素子は遷移金属酸化物焼結体からなるNTCサーミスタである。 In a ninth aspect of the invention, the temperature detecting element is an NTC thermistor made of a transition metal oxide sintered body.
上記遷移金属酸化物系NTCサーミスタ素子は1000℃以上1300℃以下の高温において良好な温度検出が可能であるので、自動車の排ガス温度の測定等に好適である。 Since the transition metal oxide NTC thermistor element can detect a good temperature at a high temperature of 1000 ° C. or higher and 1300 ° C. or lower, it is suitable for measuring an exhaust gas temperature of an automobile.
請求項10の発明では一端が閉塞し他端が開放する有底円筒状の金属製カバーとこの金属製カバーの閉塞端内側に収納され、一対の電極線が接続された温度検出素子からなる感温部と、上記金属製カバーの開放端に挿嵌される円筒状の金属製保護管と、該金属製保護管の内側に設けられ上記電極線と電気的に接続されて外部に信号を取り出す一対の信号線と、これらを絶縁する絶縁部材とからなる保護管部と、上記保護管部を保持するとともに上記感温部を被測定流体内の所定位置に取付固定するためのネジ部を有するハウジング部とを備えた温度センサの製造方法において、上記金属製カバーの閉塞端底部に気泡排出用の貫通孔を設け、上記金属製カバーと上記温度検出素子との間隙を埋め上記温度検出素子を絶縁保持する充填剤を上記金属製カバー内にスラリー状態で注入し、上記金属製カバーの先端に取り込まれた気泡を上記貫通孔から排出することを特徴とする。 A tenth aspect of the present invention includes a bottomed cylindrical metal cover whose one end is closed and the other end is open, and a temperature detection element housed inside the closed end of the metal cover and connected to a pair of electrode wires. A warm part, a cylindrical metal protective tube inserted into the open end of the metal cover, and a signal provided outside by being electrically connected to the electrode wire provided inside the metal protective tube A protective tube portion including a pair of signal lines and an insulating member for insulating them; and a screw portion for holding the protective tube portion and attaching and fixing the temperature sensing portion at a predetermined position in the fluid to be measured. In the manufacturing method of the temperature sensor provided with the housing part, a through hole for discharging air bubbles is provided at the bottom of the closed end of the metal cover, and the temperature detection element is filled with a gap between the metal cover and the temperature detection element. Insulating holding filler Was injected in a slurry state in a manufacturing cover, the bubbles captured at the tip of the metallic cover, characterized in that discharged from the through hole.
上記充填剤はスラリー状態で上記貫通孔から気泡を排出しながら上記金属製カバー内に注入されるので、上記金属製カバー底部に気泡が残留することなく均一に充填することができる。このような製造工程に従えば、確実に充填剤内への気泡の巻き込みが防止され、充填工程の安定化を図ることができる。したがって、製造工程管理の簡素化が可能となるとともに温度センサの信頼性が向上する。 Since the filler is injected into the metal cover while discharging the bubbles from the through-holes in a slurry state, the filler can be uniformly filled without leaving bubbles at the bottom of the metal cover. If such a manufacturing process is followed, entrainment of bubbles in the filler can be reliably prevented, and the filling process can be stabilized. Therefore, the manufacturing process management can be simplified and the reliability of the temperature sensor is improved.
請求項11の発明では上記金属製カバーの閉塞端に直径50μmから直径300μmの範囲の貫通孔を穿設する。 According to an eleventh aspect of the present invention, a through hole having a diameter of 50 μm to 300 μm is formed in the closed end of the metal cover.
上記範囲の貫通孔であれば加工が容易な上に、上記温度検出素子挿入後の封止も容易である。 If it is the through-hole of the said range, besides being easy to process, the sealing after the said temperature detection element insertion is also easy.
請求項12の発明では、複数の貫通孔から上記充填剤に巻き込まれた気泡を排出する。 In the twelfth aspect of the present invention, bubbles entrained in the filler are discharged from a plurality of through holes.
複数の貫通孔から上記気泡がより効果的に排出される。 The bubbles are more effectively discharged from the plurality of through holes.
請求項13の発明では、上記温度検出素子を上記スラリー状態の充填剤中に挿入した後、加熱乾燥により上記充填剤を固化することによって上記温度検出素子を固定する。 According to a thirteenth aspect of the present invention, the temperature detection element is fixed by solidifying the filler by heat drying after the temperature detection element is inserted into the filler in the slurry state.
スラリー状態の上記充填材中に上記温度検出素子が挿入されるので、上記温度検出素子、上記一対の信号線および上記一対の電極線が上記充填剤に完全に覆われる。また、加熱乾燥時に上記貫通孔からも上記充填剤中の分散媒が蒸発するので乾燥がスムーズに行える。 Since the temperature detection element is inserted into the filler in the slurry state, the temperature detection element, the pair of signal lines, and the pair of electrode lines are completely covered with the filler. In addition, since the dispersion medium in the filler evaporates from the through holes during drying by heating, the drying can be performed smoothly.
請求項14の発明では、上記貫通孔を封止手段によって封止する。 In the invention of claim 14, the through hole is sealed by a sealing means.
上記貫通孔を封止することによって上記金属製カバー内に収納された上記温度検出素子を密封状態におくことができる。 By sealing the through hole, the temperature detecting element housed in the metal cover can be kept in a sealed state.
請求項15の発明では、上記貫通孔にレーザ照射して溶接、封止する。 According to a fifteenth aspect of the invention, the through hole is welded and sealed by laser irradiation.
上記気泡排出用貫通孔はレーザ照射によって容易に溶接封止することができる。 The bubble discharge through hole can be easily welded and sealed by laser irradiation.
請求項16の発明では、上記金属製カバーの上記閉塞端側を径小とし、上記開放端側を径大とする段付き有底円筒状に絞り加工する。 In the invention of claim 16, the metal cover is drawn into a stepped bottomed cylindrical shape in which the closed end side has a small diameter and the open end side has a large diameter.
上記段付き有底円筒状に絞り加工によって容易に形成できる。 The stepped bottomed cylindrical shape can be easily formed by drawing.
請求項17の発明では、上記金属製カバーの上記小径部の内径は3mm以下に加工する。 In the invention of claim 17, the inner diameter of the small diameter portion of the metal cover is processed to 3 mm or less.
上記温度検出素子と上記金属カバー内壁との距離を極めて短くすることができ、温度センサとしての応答性に優れている。 The distance between the temperature detection element and the inner wall of the metal cover can be made extremely short, and the responsiveness as a temperature sensor is excellent.
請求項18の発明では、無機バインダーを含みアルミナを主成分とするセメント用いて上記金属製カバーと上記温度検出素子との間隙を充填する。 In the eighteenth aspect of the invention, the gap between the metal cover and the temperature detecting element is filled with cement containing an inorganic binder and containing alumina as a main component.
無機バインダーを使用すると低温乾燥だけで硬化し、1000℃以上の高温環境下に耐え得る化学的安定性、機械的強度、高絶縁性にすぐれた充填層が得られる。 When an inorganic binder is used, it can be cured only by low-temperature drying, and a packed layer excellent in chemical stability, mechanical strength, and high insulation that can withstand a high temperature environment of 1000 ° C. or higher can be obtained.
請求項19の発明では、上記温度検出素子は複数の遷移金属酸化物を含むセラミック原料粉末を用いて成形体を形成し、該成形体に一対の白金線を挿通し、酸化雰囲気にて一体的に焼成し、NTCサーミスタとする。 According to a nineteenth aspect of the present invention, the temperature detecting element is formed of a ceramic raw material powder containing a plurality of transition metal oxides, and a pair of platinum wires is inserted into the formed body, and is integrated in an oxidizing atmosphere. To obtain an NTC thermistor.
電極線に白金線を用いることで上記遷移金属酸化物と同時に酸化雰囲気下で焼成でき、上記遷移金属酸化物成形体と一対の白金線とが一体的に焼結され、温度の上昇により抵抗が減少するNTC(負温度係数)特性を持ったNTCサーミスタが得られる。 By using a platinum wire as the electrode wire, it can be fired in an oxidizing atmosphere simultaneously with the transition metal oxide, and the transition metal oxide molded body and the pair of platinum wires are integrally sintered, and the resistance increases due to an increase in temperature. An NTC thermistor having a decreasing NTC (negative temperature coefficient) characteristic is obtained.
本発明によれば、感温部を保持する充填剤中に気泡の発生を防止し、応答性および耐震性に優れた温度センサを提供できる。 ADVANTAGE OF THE INVENTION According to this invention, generation | occurrence | production of a bubble can be prevented in the filler which hold | maintains a temperature sensing part, and the temperature sensor excellent in responsiveness and earthquake resistance can be provided.
図1を参照して本発明の実施の形態を説明する。図1(a)は本発明の実施される温度センサ1の全体構成を示し、温度センサ1は感温部10と保護管部12とハウジング部13とによって構成されている。
ハウジング部13は、SUS等の金属からなり、上記保護管部12を拘持するリブ131と取付け位置固定のためのネジ部132とネジ締めの為の六角部133とが設けられている。
An embodiment of the present invention will be described with reference to FIG. FIG. 1A shows the overall configuration of a temperature sensor 1 in which the present invention is implemented. The temperature sensor 1 is composed of a temperature sensing portion 10, a protective tube portion 12, and a housing portion 13.
The housing portion 13 is made of a metal such as SUS, and is provided with a rib 131 that holds the protective tube portion 12, a screw portion 132 for fixing the mounting position, and a hexagonal portion 133 for screw tightening.
図1(b)は本発明の実施形態の要部である上記感温部10の断面詳細図を示し、以下に、上記感温部10の構成について図1(b)を参照して説明する。 FIG.1 (b) shows the cross-sectional detailed drawing of the said temperature sensing part 10 which is the principal part of embodiment of this invention, and demonstrates the structure of the said temperature sensing part 10 with reference to FIG.1 (b) below. .
温度検出素子101は例えば特許文献2にあるようなY(Cr、Mn)O3を主成分とする遷移金属酸化物系NTCサーミスタからなり上記温度検出素子101には一対の白金製の電極線102が一体的に接続されている。
上記移金属酸化物系NTCサーミスタは複数の遷移金属酸化物を含むセラミック原料粉末を用いて、電極線を挿入する一対の挿入孔を有した円柱状の成形体を形成し、上記挿入孔に一対の白金線を挿通し、例えば1600℃の高温で酸化焼成することによって該成形体と該白金線とが一体となった焼結体が得られる。
The temperature detection element 101 is made of a transition metal oxide NTC thermistor having Y (Cr, Mn) O 3 as a main component as disclosed in Patent Document 2, for example. The temperature detection element 101 includes a pair of platinum electrode wires 102. Are connected together.
The transfer metal oxide-based NTC thermistor uses a ceramic raw material powder containing a plurality of transition metal oxides to form a cylindrical shaped body having a pair of insertion holes for inserting electrode wires, A sintered body in which the formed body and the platinum wire are integrated is obtained by inserting the platinum wire and oxidizing and firing at a high temperature of 1600 ° C., for example.
上記電極線102には上記温度検出素子101によって測定された被測定流体の温度に応じた電気信号を外部に取り出す一対の信号線121が、例えばレーザ溶接等によって抵抗接続されている。上記信号線121には例えばSUS、白金−Rh等の耐熱性、良電導性の金属が使用される。
上記信号線121は絶縁部材122を介して例えばSUS等からなる円筒状の金属製保護管123内に絶縁支持されている。
A pair of signal lines 121 for taking out an electrical signal corresponding to the temperature of the fluid to be measured measured by the temperature detecting element 101 is connected to the electrode line 102 by, for example, laser welding. For the signal line 121, for example, a heat-resistant and highly conductive metal such as SUS or platinum-Rh is used.
The signal line 121 is insulated and supported in a cylindrical metal protective tube 123 made of SUS or the like via an insulating member 122.
金属製カバー104は例えばSUS等の金属からなり、先端閉塞他端開放の有底円筒状をしており、閉塞端側の底部には上記金属製カバー内に上記充填剤を注入する際に上記充填剤中に巻き込まれた気泡を排出する例えば直径100μmの気泡排出用貫通孔111が穿設されている。
また、上記金属製カバー104の開放端側は上記金属製保護管123が挿嵌されるので大径部1041となっており、閉塞端側は内径1.88mm外径2.48の小径部1043となっており、上記大径部1041と上記小径部1043との間は内径2.37mm外径2.97mmの中径部1042として段階的に絞り加工されている。
The metal cover 104 is made of a metal such as SUS and has a bottomed cylindrical shape with the other end closed and the other end opened. When the filler is injected into the metal cover at the bottom on the closed end side, the metal cover 104 is formed. For example, a bubble discharge through hole 111 having a diameter of 100 μm is formed to discharge bubbles entrained in the filler.
The open end side of the metal cover 104 is a large diameter portion 1041 because the metal protective tube 123 is inserted, and the closed end side is a small diameter portion 1043 having an inner diameter of 1.88 mm and an outer diameter of 2.48. The large-diameter portion 1041 and the small-diameter portion 1043 are drawn in stages as an intermediate-diameter portion 1042 having an inner diameter of 2.37 mm and an outer diameter of 2.97 mm.
上記気泡排出用貫通孔111は例えばレーザ溶接等の封止手段により溶接封止されており、溶接部には溶接ビード112が形成されている。 The bubble discharge through hole 111 is welded and sealed by a sealing means such as laser welding, and a weld bead 112 is formed at the welded portion.
上記金属製カバー104と上記温度検出素子101、上記電極線102および上記信号線121との間隙は例えばシリカゾル、アルミナゾル等の無機バインダーを含むアルミナを主成分としたアルミナセメント等の充填剤103によって埋められている。 The gaps between the metal cover 104 and the temperature detecting element 101, the electrode wire 102, and the signal wire 121 are filled with a filler 103 such as alumina cement mainly composed of alumina containing an inorganic binder such as silica sol or alumina sol. It has been.
上記金属製カバー104と上記金属製保護管123とは例えばレーザ溶接等により、溶接部105で全周に渡り溶接固定されている。 The metal cover 104 and the metal protective tube 123 are welded and fixed over the entire circumference at the welded portion 105 by, for example, laser welding.
上記金属製保護管123の上記温度検出素子101側先端部123bの外径は上記金属製カバー104の上記径中部1042の内径とほぼ同一に設けられており、上記保護管先端部123bと上記金属製カバー104の内壁との間には間隙106が形成され、上記感温部10と上記保護管部12との断熱性を確保している。
上記金属製カバー104の小径部1043の内径は直径1.5mmから直径3.0mmまでの範囲で適宜設定することができる。
The outer diameter of the temperature detection element 101 side distal end portion 123b of the metal protective tube 123 is substantially the same as the inner diameter of the diameter middle portion 1042 of the metal cover 104, and the protective tube distal end portion 123b and the metal A gap 106 is formed between the inner wall of the cover 104 and the thermal insulation between the temperature sensing part 10 and the protective tube part 12 is ensured.
The inner diameter of the small-diameter portion 1043 of the metal cover 104 can be appropriately set within a range from a diameter of 1.5 mm to a diameter of 3.0 mm.
ここで、図8(a)〜(f)を参照して、従来の温度センサの構造において推定される気泡の発生メカニズムについて、また、図2(a)〜(g)を参照して本発明の効果について説明する。 Here, referring to FIGS. 8A to 8F, the bubble generation mechanism estimated in the structure of the conventional temperature sensor will be described, and the present invention will be described with reference to FIGS. 2A to 2G. The effect of will be described.
図8(a)に示すように充填ノズル3を上記金属製カバー104bに挿入し、上記充填ノズル3を用いて、スラリー状の上記充填剤103を金属製カバー104bの底部にできるだけ近い位置から上記充填ノズル3を引き上げながら注入する。
上記金属製カバー104bの底壁により近い位置から注入するためには、上記充填ノズル3の外径はできるだけ細い方が好ましいが、上記充填剤103として、上記アルミナセメントを用いた場合、該スラリーの粘度が比較的高粘度であるので、上記充填ノズル3の内径が直径0.9mmより細いと上記充填剤103を上記充填ノズル3から押し出すことが困難となってしまい、必然的に上記充填剤ノズル3の内径、外径が制限される。
As shown in FIG. 8 (a), the filling nozzle 3 is inserted into the metal cover 104b, and the filler 103 in the slurry state is inserted from the position as close as possible to the bottom of the metal cover 104b using the filling nozzle 3. Injection is performed while pulling up the filling nozzle 3.
In order to inject from a position closer to the bottom wall of the metal cover 104b, the outer diameter of the filling nozzle 3 is preferably as thin as possible. However, when the alumina cement is used as the filler 103, the slurry Since the viscosity is relatively high, if the inner diameter of the filling nozzle 3 is smaller than 0.9 mm in diameter, it becomes difficult to push out the filler 103 from the filling nozzle 3 inevitably. 3 is limited in inner diameter and outer diameter.
このため、図8(a)中A部を拡大した図8(b)に示すように、上記充填剤103が上記充填ノズル3から押し出されると、表面張力によって楕円球状にふくらみ、更に押し出されると図8(c)に示すように上記金属製カバー104bの底壁に到達するより先に上記金属製カバー104bの側壁に接触する。 For this reason, when the filler 103 is pushed out from the filling nozzle 3 as shown in FIG. 8B in which the portion A in FIG. 8A is enlarged, it is expanded into an elliptical shape by the surface tension and further pushed out. As shown in FIG. 8C, the metal cover 104b comes into contact with the side wall before reaching the bottom wall of the metal cover 104b.
この時、上記充填剤103によって、上記金属製カバー104bの側壁と充填ノズル3との間隙が埋められ、上記充填剤103の下方に取り残された空気の抜け道が閉ざされる。
また、上記充填剤103のスラリーは比較的高粘度の擬塑性流体であるため、一旦取り込まれた空気は上記充填剤103を通過することができず図8(d)に示すような気泡2として取り残され、さらに充填剤103の注入を続けると図8(e)に示すように上記金属製カバー104bの閉塞端内に気泡2が残存し、該気泡2を上記充填剤103から取り除くことはできなくなる。
At this time, the filler 103 fills the gap between the side wall of the metal cover 104 b and the filling nozzle 3, and the air passage left below the filler 103 is closed.
In addition, since the slurry of the filler 103 is a pseudoplastic fluid having a relatively high viscosity, the air once taken in cannot pass through the filler 103 and form bubbles 2 as shown in FIG. If the filler 103 is left behind and the injection of the filler 103 is continued, bubbles 2 remain in the closed end of the metal cover 104b as shown in FIG. 8 (e), and the bubbles 2 cannot be removed from the filler 103. Disappear.
この状態で、図8(f)に示すように、金属製保護管123内に絶縁部材122によって絶縁保持された一対の信号線121と接続された一対の電極線102に接続された温度検出素子101をスラリー状の上記充填剤103の中に挿入し、上記充填剤103を加熱乾燥した後、上記金属製カバー104bと上記金属製保護管123とを溶接固定すると、図7(b)に示すように上記温度検出素子101の前方で上記金属製カバー104bの底部に、気泡2が取り残された状態で、上記温度検出素子101が拘持されることになる。 In this state, as shown in FIG. 8F, the temperature detection element connected to the pair of electrode wires 102 connected to the pair of signal lines 121 insulated and held in the metal protective tube 123 by the insulating member 122. When 101 is inserted into the slurry-like filler 103 and the filler 103 is heated and dried, the metal cover 104b and the metal protective tube 123 are fixed by welding, as shown in FIG. As described above, the temperature detecting element 101 is held in a state where the bubble 2 is left behind at the bottom of the metal cover 104b in front of the temperature detecting element 101.
一方、本発明の第1の実施形態では、図2(a)に示すように金属製カバー104の閉塞端の底部に気泡排出用貫通孔111が設けてある。
図2(a)に示すように、上記金属製カバー104に充填剤ノズル3を挿入し、上記充填ノズル3を用いて、スラリー状の上記充填剤103を金属製カバー104の底部にできるだけ近い位置から上記充填ノズル3を引き上げながら注入する。
On the other hand, in the first embodiment of the present invention, as shown in FIG. 2A, a bubble discharge through hole 111 is provided at the bottom of the closed end of the metal cover 104.
As shown in FIG. 2A, the filler nozzle 3 is inserted into the metal cover 104, and the slurry-like filler 103 is positioned as close as possible to the bottom of the metal cover 104 using the filler nozzle 3. Then, the filling nozzle 3 is poured while being pulled up.
スラリー状の充填剤103は図2(a)中A部を拡大した図2(b)に示すように、表面張力によって上記充填ノズル3の先端から楕円球状に膨らんで押し出され、図2(c)に示すように上記金属製カバー104の底部に到達するよりも先に上記金属製カバー104の側壁部に接触し、上記充填剤103の下方に気泡2が閉じこめられる。
ここまでは従来と同様であるが、更に上記充填剤103の注入を続けると、図2(d)に示すように、上記金属製カバー104に設けた貫通孔111から上記気泡2が押し出され、上記気泡2は徐々に小さくなり、消滅する。
この時、超音波などの振動を加えると上記気泡の排出がより効果的となる。
As shown in FIG. 2B in which the portion A in FIG. 2A is enlarged, the slurry-like filler 103 is swelled and pushed out from the tip of the filling nozzle 3 by the surface tension, and is pushed out as shown in FIG. As shown in FIG. 2, the air bubbles 2 are confined below the filler 103 by contacting the side wall of the metal cover 104 before reaching the bottom of the metal cover 104.
Up to this point, it is the same as in the prior art, but if the filler 103 is further injected, the bubbles 2 are pushed out from the through holes 111 provided in the metal cover 104 as shown in FIG. The bubbles 2 are gradually reduced and disappear.
At this time, if vibrations such as ultrasonic waves are applied, the bubbles are more effectively discharged.
図2(e)に示すように所定量の上記充填剤103を注入した後、上記充填ノズル3を引き上げ、図2(f)に示すように金属製保護管123内に絶縁部材122によって絶縁保持された一対の信号線121と接続された一対の電極線102に接続された温度検出素子101をスラリー状の上記充填剤103の中に挿入し、上記充填剤103を加熱乾燥した後、上記金属製カバー104と上記金属製保護管123とを溶接固定すると図2(g)に示すように、上記温度検出素子101と上記金属製カバー104との間の気泡2が除去された状態で、上記温度検出素子101が拘持される。 After injecting a predetermined amount of the filler 103 as shown in FIG. 2 (e), the filling nozzle 3 is pulled up, and as shown in FIG. 2 (f), the metal protective tube 123 is insulated and held by the insulating member 122. The temperature detecting element 101 connected to the pair of electrode wires 102 connected to the pair of signal lines 121 is inserted into the slurry-like filler 103, the filler 103 is heated and dried, and then the metal When the cover 104 and the metal protective tube 123 are fixed by welding, as shown in FIG. 2G, the air bubble 2 between the temperature detection element 101 and the metal cover 104 is removed, and the above-mentioned The temperature detection element 101 is held.
上記充填剤103は高粘度スラリーであるので上記金属製カバー104に設けられた貫通孔111から漏れ出ることは少ない。 Since the filler 103 is a high-viscosity slurry, it rarely leaks from the through hole 111 provided in the metal cover 104.
上記貫通孔111を直径50μm〜170μmの範囲で設けた貫通孔111aとした場合、図3左図(溶接前)に示すように上記充填剤103は上記貫通孔111aから漏れ出すことはない。また、図3中央図に示すように上記貫通孔111aは溶接棒無しでも、例えばレーザ溶接等により直接溶接封止できる。図3右図(溶接後)に示すように、溶接後には上記金属製カバー104の底部に溶接ビード112aが形成され、上記貫通孔111aは完全に密封された状態となる。レーザ溶接の条件としては例えば2.1J〜2.5J、10ms〜14msで行う。 When the through hole 111 is a through hole 111a having a diameter in the range of 50 μm to 170 μm, the filler 103 does not leak from the through hole 111a as shown in the left diagram of FIG. 3 (before welding). Further, as shown in the central view of FIG. 3, the through hole 111a can be directly sealed by, for example, laser welding without using a welding rod. As shown in the right side of FIG. 3 (after welding), after welding, a weld bead 112a is formed at the bottom of the metal cover 104, and the through hole 111a is completely sealed. Laser welding conditions are, for example, 2.1 J to 2.5 J, 10 ms to 14 ms.
上記貫通孔111を直径200μm〜300μmの範囲で設けた貫通孔111bとした場合、図4(a)左図(溶接前)に示すように上記充填剤103は上記貫通孔111bから漏れ出すことはない。また、図4(a)中央図に示すように上記貫通孔111bは溶接棒無しで例えばレーザ溶接等により直接溶接封止をすると、図4(a)右図(溶接後)に示すように、溶接後には上記金属製カバー104の底部に溶接ビード112bが形成され、上記貫通孔111bは溶接封止可能であるが、該ビード112bの中心にはピンホール状のブローホールが形成されたり、滴状の溶接ダレ113bが形成されたりすることもある。 When the through hole 111 is a through hole 111b having a diameter in the range of 200 μm to 300 μm, the filler 103 leaks from the through hole 111b as shown in the left figure of FIG. 4A (before welding). Absent. Further, as shown in the center view of FIG. 4A, when the through hole 111b is directly welded and sealed by, for example, laser welding without a welding rod, as shown in the right view of FIG. 4A (after welding), After welding, a weld bead 112b is formed at the bottom of the metal cover 104, and the through hole 111b can be welded and sealed, but a pinhole-shaped blowhole is formed at the center of the bead 112b, A welding sag 113b may be formed.
このような場合、より好ましくは、図4(b)中央図に示すように上記貫通孔111cは上記金属製カバー104と同材質の例えば直径0.27mmの溶接棒を用いて、レーザ溶接等により溶接すると、図4(b)右図(溶接後)に示すように、溶接後には上記金属製カバー104の底部に略半球状の溶接ビード112cが形成され、上記貫通孔111cは完全に封止できる。 In such a case, more preferably, as shown in the central view of FIG. 4B, the through hole 111c is formed by laser welding or the like using a welding rod of the same material as the metal cover 104, for example, 0.27 mm in diameter. When welded, as shown in the right figure of FIG. 4B (after welding), after welding, a substantially hemispherical weld bead 112c is formed at the bottom of the metal cover 104, and the through hole 111c is completely sealed. it can.
上記貫通孔111を直径500μm以上で設けた貫通孔111dとした場合、図5(a)左図(溶接前)に示すように上記充填剤103は上記貫通孔111dから充填剤103dとして示すように漏れ出すことがある。漏れした該充填剤103dを除去した後、図5(a)中央図に示すように上記貫通孔111dは溶接棒無しで例えばレーザ溶接等により直接溶接封止しようとすると、図5(a)右図(溶接後)に示すように、上記貫通孔111dの内周縁に沿って溶接ビード112dが形成されるものの、上記貫通孔111dの封止することはできない。 When the through hole 111 is a through hole 111d provided with a diameter of 500 μm or more, the filler 103 is shown as the filler 103d from the through hole 111d as shown in the left figure of FIG. 5A (before welding). May leak. After removing the leaked filler 103d, as shown in the central view of FIG. 5 (a), if the through hole 111d is directly welded and sealed by, for example, laser welding without a welding rod, the right side of FIG. As shown in the figure (after welding), although the weld bead 112d is formed along the inner periphery of the through hole 111d, the through hole 111d cannot be sealed.
このような場合、図5(b)中央図に示すように上記貫通孔111dは上記金属製カバー104と同材質の溶接棒を用いて、例えばレーザ溶接等により溶接すると、図5(b)右図(溶接後)に示すように、溶接後には上記金属製カバー104の底部に不定形の溶接ビード112eが形成され、上記貫通孔111dは完全に封止できるものの外観的には好ましくない。 In such a case, as shown in the central view of FIG. 5B, the through hole 111d is welded by, for example, laser welding using a welding rod made of the same material as that of the metal cover 104. As shown in the figure (after welding), after welding, an irregular weld bead 112e is formed at the bottom of the metal cover 104, and the through hole 111d can be completely sealed, but it is not preferable in terms of appearance.
また、上記気泡排出用貫通孔111を直径50μm以下で設けた場合、上記気泡2が十分排出されず、上記充填剤103内に残留することがある。
したがって、上記気泡排出用貫通孔111は直径50μmから300μmの範囲で設けるのがよい。より好ましくは直径70μmから170μmの範囲で設ければ、溶接棒無しで直接溶接封止が可能でかつ仕上がりも良好である。
When the bubble discharge through-hole 111 is provided with a diameter of 50 μm or less, the bubble 2 may not be sufficiently discharged and may remain in the filler 103.
Therefore, the bubble discharge through-hole 111 is preferably provided in a diameter range of 50 μm to 300 μm. More preferably, if the diameter is in the range of 70 μm to 170 μm, direct welding sealing is possible without a welding rod and the finish is also good.
本発明の第1の実施形態においては図6(a)に示すように、上記金属製カバー104の閉塞端底部中央に上記気泡排出用貫通孔111を1個設けたが、図6(b)に示すように上記金属製カバー104の閉塞端底部に上記気泡排出用貫通孔111を複数個設けた構造としてもよい。また、図6(c)に示すように、上記金属製カバー104の閉塞端底部のみならず上記金属製カバー104の側壁に複数個設けても良い。このような構造とすれば、上記気泡が排出される確率が高くなり、上記金属製カバー内の充填率が更に向上する。 In the first embodiment of the present invention, as shown in FIG. 6A, one of the bubble discharge through holes 111 is provided in the center of the closed end bottom of the metal cover 104. As shown in the figure, a plurality of the bubble discharge through holes 111 may be provided in the closed end bottom portion of the metal cover 104. Further, as shown in FIG. 6C, a plurality of them may be provided not only on the closed end bottom portion of the metal cover 104 but also on the side wall of the metal cover 104. With such a structure, the probability that the bubbles are discharged increases, and the filling rate in the metal cover is further improved.
当然のことながら、本発明は上記実施形態に限定されず、本発明の要旨を逸脱しない範囲で各種変更が可能であることは言うまでもない。例えば、本発明の実施形態においてはレーザ溶接による封止手段について説明したが、MIG溶接、TIG溶接、アーク溶接、プラズマ溶接等の直接溶接によるものでも良いし、ロー付け、リベット打ち込み、溶射等の肉盛り溶接でも良い。 Needless to say, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention. For example, in the embodiment of the present invention, the sealing means by laser welding has been described, but it may be by direct welding such as MIG welding, TIG welding, arc welding, plasma welding, brazing, riveting, spraying, etc. Overlay welding may be used.
また、本発明の実施形態においては、温度検出素子は円柱状に形成してあるが、平板状であっても、多角柱状であっても良い。
本実施形態においては、上記金属カバーは絞り加工によって形成したが、切削加工によるものでも良い。
本実施形態においては、充填剤に含まれる無機バインダーは加熱乾燥によってアルミナセメントを固化する物を用いたが、自己硬化型の無機バインダーを用いても良い。
さらに、被測定流体として排気ガスに限らず、水、油等の液体であっても良い。
In the embodiment of the present invention, the temperature detection element is formed in a columnar shape, but may be a flat plate shape or a polygonal column shape.
In the present embodiment, the metal cover is formed by drawing, but may be formed by cutting.
In this embodiment, the inorganic binder contained in the filler is a material that solidifies alumina cement by heat drying, but a self-curing inorganic binder may be used.
Further, the fluid to be measured is not limited to the exhaust gas, but may be a liquid such as water or oil.
1 温度センサ
10 感温部
101 サーミスタ素子
102 電極線(白金)
103 充填剤(無機バインダー含有アルミナセメント)
104 金属製カバー(SUS)
105 溶接部
106 断熱部
111 気泡排出貫通孔
112 溶接ビード
12 保護管部
121 信号線(SUS)
122 絶縁部材
123 金属製保護管(SUS)
1231 径大部
1232 径中部
1233 径小部
13 ハウジング部
131 保護管部拘持用リブ(SUS)
132 固定用ネジ部
133 締付用六角部
DESCRIPTION OF SYMBOLS 1 Temperature sensor 10 Temperature sensing part 101 Thermistor element 102 Electrode wire (platinum)
103 Filler (Inorganic binder-containing alumina cement)
104 Metal cover (SUS)
105 welded portion 106 heat insulating portion 111 bubble discharge through hole 112 weld bead 12 protective tube portion 121 signal line (SUS)
122 Insulating member 123 Metal protective tube (SUS)
1231 Large diameter portion 1232 Medium diameter portion 1233 Small diameter portion 13 Housing portion 131 Protective tube portion holding rib (SUS)
132 Fixing screw part 133 Tightening hexagon part
Claims (19)
上記金属製カバーの開放端に挿嵌される円筒状の金属製保護管と該金属製保護管の内側に設けられ上記電極線と電気的に接続されて外部に信号を取り出す一対の信号線とこれらを絶縁する絶縁部材とからなる保護管部と、
上記保護管部を保持するとともに上記感温部を被測定流体内の所定位置に取付固定するためのネジ部を有するハウジング部とを備えた温度センサであって、
上記金属製カバーと上記温度検出素子との間隙を埋める充填剤によって上記温度検出素子が上記金属製カバー内で拘持されるとともに、
上記金属製カバーの閉塞端底部に気泡排出用貫通孔を有し、該気泡排出用貫通孔によって上記金属製カバーの閉塞端内に取り込まれた気泡が排出されたことを特徴とする温度センサ。 A temperature-sensing portion comprising a bottomed cylindrical metal cover having one end closed and the other end open, and a temperature detection element housed inside the closed end of the metal cover and connected to a pair of electrode wires;
A cylindrical metal protective tube inserted into the open end of the metal cover, and a pair of signal lines provided inside the metal protective tube and electrically connected to the electrode wire to extract a signal to the outside A protective tube made of an insulating member for insulating them;
A temperature sensor including a housing portion having a screw portion for holding and protecting the temperature sensing portion at a predetermined position in the fluid to be measured while holding the protection tube portion;
The temperature detection element is held in the metal cover by a filler that fills a gap between the metal cover and the temperature detection element, and
A temperature sensor having a bubble discharge through hole in a closed end bottom portion of the metal cover, and bubbles taken into the closed end of the metal cover are discharged by the bubble discharge through hole.
上記金属製カバーの開放端に挿嵌される円筒状の金属製保護管と、該金属製保護管の内側に設けられ上記電極線と電気的に接続されて外部に信号を取り出す一対の信号線と、これらを絶縁する絶縁部材とからなる保護管部と、
上記保護管部を保持するとともに上記感温部を被測定流体内の所定位置に取付固定するためのネジ部を有するハウジング部とを備えた温度センサの製造方法において、
上記金属製カバーの閉塞端底部に気泡排出用の貫通孔を設け、上記金属製カバーと上記温度検出素子との間隙を埋め上記温度検出素子を絶縁保持する充填剤を上記金属製カバー内にスラリー状態で注入し、上記金属製カバーの先端に取り込まれた気泡を上記貫通孔から排出することを特徴とする温度センサ製造方法。 A temperature-sensing portion comprising a bottomed cylindrical metal cover having one end closed and the other end open, and a temperature detection element housed inside the closed end of the metal cover and connected to a pair of electrode wires;
A cylindrical metal protective tube that is inserted into the open end of the metal cover, and a pair of signal wires that are provided inside the metal protective tube and are electrically connected to the electrode wires to extract signals to the outside And a protective tube portion made of an insulating member for insulating them,
In a method of manufacturing a temperature sensor comprising: a housing having a screw part for holding and fixing the temperature sensing part at a predetermined position in a fluid to be measured while holding the protective tube part;
A through hole for discharging air bubbles is provided at the bottom of the closed end of the metal cover, and a filler filling the gap between the metal cover and the temperature detection element and insulatingly holding the temperature detection element is slurried in the metal cover. A temperature sensor manufacturing method characterized by injecting air bubbles in a state and discharging air bubbles taken into the tip of the metal cover from the through hole.
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| JP2008286786A (en) * | 2007-04-18 | 2008-11-27 | Denso Corp | Temperature sensor and its manufacturing method |
| JP2010032493A (en) * | 2008-06-25 | 2010-02-12 | Ngk Spark Plug Co Ltd | Temperature sensor |
| JP2011002354A (en) * | 2009-06-19 | 2011-01-06 | Denso Corp | Temperature sensor and manufacturing method of the same |
| KR200455873Y1 (en) | 2010-05-20 | 2011-09-29 | 주식회사 우진 | Nuclear Power Plant Type Thermostat |
| KR101225096B1 (en) * | 2010-03-05 | 2013-01-22 | 주식회사 지흥 | Temperature sensor and manufacturing method |
| KR101523669B1 (en) * | 2013-10-14 | 2015-05-28 | 세종공업 주식회사 | Temperature sensor for automobile |
| CN105865644A (en) * | 2016-05-26 | 2016-08-17 | 句容市博远电子有限公司 | Casing for packaging electronic element and temperature sensor |
| JP2019020251A (en) * | 2017-07-18 | 2019-02-07 | アルプス電気株式会社 | Sensor unit |
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| JP6510405B2 (en) | 2013-10-24 | 2019-05-08 | 日本特殊陶業株式会社 | Temperature sensor |
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