JP2008021567A - Edge water-cooled low-pressure mercury lamp system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To effectively cool a lamp base while avoiding heat transfer to an adjacent lamp base in an end water-cooled low-pressure mercury lamp apparatus in which a plurality of straight pipe-type long low-pressure mercury lamps are arranged in parallel. The lamp base temperature is controlled within a predetermined range.
A water-cooling mechanism for water-cooling lamp bases at both ends of a straight tube-type long low-pressure mercury lamp includes a metal first cooling block formed by supporting the tip of the lamp base with an end surface recess, and the block. A metal second cooling block that is disposed in contact with the cooling water passage and has a columnar body that surrounds the outer periphery of the lamp base with an opening downward, and A metal lid that seals the opening of the lamp base cover.
[Selection] Figure 3

Description

The present invention relates to an end water-cooled long low-pressure mercury lamp apparatus used for ozone cleaning or the like.

In a light source device including a plurality of straight tube type long low-pressure mercury lamps arranged in parallel to each other, a configuration in which a holding member made of a heat conducting member comes into contact with the vicinity of the end portions of the lamps and holds them is already known. For example, it is disclosed in Patent Document 1. The purpose of this apparatus is to control the temperature in the vicinity of the lamp end by dissipating the heat in the vicinity of the lamp end through the holding member, thereby exhibiting the desired lamp characteristics.
JP 2005-276778 A

In this type of light source device, each end of the straight tube-type long lamp and various members that are in contact with each have basically a symmetrical structure with respect to the center of the lamp. Therefore, in this specification, unless otherwise specified, one end portion and a member in contact with the end portion will be described.

By the way, with the enlargement of the liquid crystal panel, a low-pressure mercury lamp used for ozone cleaning is required to be a long lamp having an effective light emission length exceeding 2 m. As this type of lamp, a straight tube type long arc low-pressure mercury lamp of about 800 W is used, and ozone cleaning is performed using, for example, an ultraviolet irradiation device in which about four lamps are arranged in parallel. This lamp has a structure in which both ends of a straight tube type arc tube are covered with a lamp base. The tip of the lamp base is processed into, for example, a hemispherical shape so that it can be easily attached to and detached from the apparatus.

In order to generate a desired ultraviolet illuminance, this type of lamp needs to be controlled to maintain the lamp base at a predetermined temperature during operation. Therefore, the temperature of the lamp base portion is controlled by bringing it into contact with a cooling block in which cooling water is circulated. The contact portion of the cooling block with the lamp base is processed into a bowl-shaped recess according to the shape of the tip of the lamp base, for example. As a result, the lamp is supported by the cooling block and the heat of the lamp base is transferred by surface contact with the recess of the cooling block. The positional relationship between the lamp base and the cooling block can be shown, for example, as in the schematic cross-sectional view of FIG. Here, 51 is a lamp base, 52 is an arc tube portion of the lamp, 53 is a cooling block, and 54 is a cooling water pipe provided inside 53.

However, in this method, heat exchange cannot be performed sufficiently, and particularly when the temperature of the cooling water passed through the cooling block is high, there is a problem that the lamp base portion becomes higher than the desired temperature and cannot be sufficiently cooled. For example, in the case of an effective light emission length of 2400 mm and an 800 W straight tube type long arc low-pressure mercury lamp, the lamp base surface temperature needs to be 30 to 40 ° C. in order to light up under the condition that the ultraviolet illuminance with a wavelength of 254 nm is maximized. Even when the cooling water temperature is 20 ° C. or higher, the surface temperature exceeds 40 ° C.

As another aspect, there is a problem of thermal interference between adjacent lamps arranged in parallel. That is, the distance between the tube wall and the adjacent lamp is only about 10 to 15 mm. However, in the conventional apparatus structure, the lamp base portion is mostly formed except for the tip portion fitted in the recess of the cooling block. Because it is exposed, it receives heat radiation from the adjacent lamp base. For this reason, heat tends to accumulate in the lamp base portion, which makes it difficult to maintain the desired temperature.

Furthermore, for aluminum which is often used as a material for a cooling member because of its good thermal conductivity, an aluminum cooling block member having a passage through which cooling water contacts and circulates contacts the stainless steel member. In this case, it is known that a phenomenon called “electro-corrosion” occurs in which aluminum melts from the portion in contact with the cooling water and the member is eroded. There is also a phenomenon that water cooling is inhibited. In view of this, devices that use aluminum members have also been required to devise ways to avoid this phenomenon.

The present invention has been made in view of the above points, and the lamp base temperature is set within a predetermined range so that a plurality of parallel pipe-type long low-pressure mercury lamps that are arranged in parallel give the maximum ultraviolet illumination. In order to maintain, an end water-cooled ultraviolet lamp having a structure that can efficiently conduct the heat of the lamp base to the cooling block while effectively avoiding heat transfer to the adjacent lamp base, and can be effectively water-cooled. An object is to provide an apparatus. It is another object of the present invention to provide an end water-cooled ultraviolet lamp apparatus having a water cooling mechanism that achieves both the avoidance of electric corrosion and good thermal conductivity.

In order to achieve the above object, in the end water-cooled low-pressure mercury lamp apparatus according to claim 1, the water-cooling mechanism for water-cooling the lamp bases at both ends of the straight tubular low-pressure mercury lamp has a tip portion of the lamp base. A metal first cooling block that is supported by an end surface recess, and is disposed in contact with the back of the first cooling block as viewed from the center of the low-pressure mercury lamp, and is in contact with the first cooling block. A metal second cooling block having coupling means for coupling and having a cooling water flow path therein; a metal lamp base cover surrounding the outer periphery of the lamp base with an opening; and an opening of the lamp base cover The lamp base cover is perforated to a size that allows the lamp base to be inserted along the axial direction from one end face. The slot is formed of a columnar body, the opening of the slot forms the opening of the lamp base cover, the slot is horizontally, and the slot opening is downward. And the other end face of the columnar body is brought into contact with the first cooling block and / or the second cooling block in a state where the lamp base is inserted into the slot. A coupling means is disposed and coupled to the cooling block at a contact surface with any one of the cooling blocks.

3. The end water-cooled low-pressure mercury lamp apparatus according to claim 2, wherein the first cooling block is made of copper or aluminum, the second cooling block is made of stainless steel, and the lamp base cover is made of copper or aluminum. And

The end water-cooling type low-pressure mercury lamp apparatus according to claim 1, wherein the end water-cooling mechanism includes first and second cooling blocks, a lamp base cover, and a lid. It is constituted by a metal columnar body having a slot formed so as to be sized so that the lamp base can be inserted along the axial direction from the end face, and the columnar body is formed by horizontally opening the slot and opening the slot. With the bottom of the slot facing upward and the other end face of the columnar body in contact with the first cooling block and / or the second cooling block in a state where the lamp base is inserted Therefore, it is possible to maintain the surface temperature of the lamp base within a desired range by water cooling.

In the end water-cooled low-pressure mercury lamp apparatus according to claim 2, the first cooling block is made of copper or aluminum, the second cooling block is made of stainless steel, and the lamp base cover is made of copper or aluminum. Since it is made of aluminum, the first cooling block ensures good thermal conductivity and is separated from the second cooling block through which the cooling water circulates, so there is no risk of electrolytic corrosion and contact with the cooling water Since the second cooling block is made of stainless steel, electric corrosion can be avoided, and the lamp base cover can quickly conduct its heat to the first and / or second cooling block and is efficiently cooled with water. effective.

The best mode for carrying out the present invention will be described below with reference to the drawings. FIG. 1 is a schematic perspective view showing only a low-pressure mercury lamp to be mounted and water-cooling portions at both ends of the end-water-cooled low-pressure mercury lamp device according to the present invention. In the figure, the lid provided at the lower surface opening of the lamp base cover is omitted. FIG. 2 is a schematic cross-sectional view in a plane perpendicular to the longitudinal direction of the apparatus including the lamp base cover, in the vicinity of the lamp end of the end water-cooled low-pressure mercury lamp apparatus according to the present invention. FIG. 3 is a schematic cross-sectional view in the longitudinal direction of the apparatus, showing the vicinity of one end of the lamp.

As shown in FIGS. 1 and 2, the ultraviolet irradiation unit 40, which is the main part of the end water-cooled low-pressure mercury lamp apparatus 50, has a tubular long low-pressure mercury lamp 20 disposed in parallel with each other. For example, four are provided. A reflector (not shown) is disposed above the light emitting portion of the low-pressure mercury lamp 20 along the longitudinal direction of the lamp, and the ultraviolet irradiation direction is controlled downward. The low-pressure mercury lamp 20 has a symmetrical shape with respect to its center in the tube axis direction, and has a lamp power of 700 W to 1 kW, a total length of 2500 to 3000 mm, an outer diameter of the arc tube central portion of 25 to 30 mm, and an effective light emission length of 2000 to 2500 mm. The tube wall temperature at the central portion of the arc tube is about 150 ° C., and has metal lamp bases 21 at both ends surrounding an electric energy supply terminal (not shown). The lamp base 21 has various shapes. In the illustrated example, the cylindrical body portion and the hemispherical tip portion are combined. The base material 70 (glass plate or the like) to be surface-treated is transported in the direction perpendicular to the longitudinal direction of the apparatus under the ultraviolet irradiation unit 40 and receives ultraviolet irradiation.

  The water cooling mechanism 3 that water-cools both ends of the lamp bases 21 and 21 includes a first cooling block 4 that includes side surfaces having recesses that are configured to be in contact with the tip of the lamp base 21 and support the low-pressure mercury lamp 20. The second cooling block 5 disposed behind the first cooling block 4 as viewed from the center of the low-pressure mercury lamp 20 and having the cooling water flow path 6 therein, and the coupling / separation of the first cooling block 4 and the second cooling block 5 Possible coupling means (not shown). The first cooling block 4 is made of a metal having good thermal conductivity, for example, copper or aluminum, and the second cooling block 5 is made of a metal that hardly causes an electrolytic corrosion phenomenon, for example, stainless steel. The coupling means for the first cooling block 4 and the second cooling block 5 is, for example, screw holes provided by drilling the first cooling block 4 and the second cooling block 5, respectively, and metal made to be fitted into these screw holes. What is necessary is just to comprise with a screw. A heat conduction grease may be used on the contact surface between the first cooling block 4 and the second cooling block 5 in order to increase the heat conductivity.

  Reference numeral 1 denotes a lamp base cover, which is a columnar structure disposed on the outer periphery of the lamp base 21, and a part of the side surface cut along the axial direction forms the opening 11. For example, aluminum is used as the material. Reference numeral 2 denotes a metal lid, for example, a stainless steel lid, that seals the opening 11 of the lamp base cover 1. A coupling means capable of coupling / separating between the lamp base cover 1 and the first cooling block 4 or the second cooling block 5 at the contact surface between the lamp base cover 1 and the first cooling block 4 or the second cooling block 5. For example, in the same manner as described above, a screw hole and a metal screw may be appropriately combined.

FIG. 4 is a schematic exploded view showing the positional (bonding) relationship of the constituent members in the vicinity of the lamp end. In the figure, a low-pressure mercury lamp 20 is disposed on the front side, and the lamp base cover 1, the first cooling block 4, and the second cooling block 5 are coupled in this order. For example, the coupling means capable of coupling / separating between the two constituent members may be arranged at a location indicated by a one-dot broken line in the drawing. On the back side of the figure, a support shaft 7 that supports the second cooling block 5 and a pressing spring 8 that presses the second cooling block 5 in the direction of the low-pressure mercury lamp 20 and holds it are shown. . A lid 2 that closes the opening 11 is disposed on the lower surface of the lamp base cover 1, and the coupling means that can couple / separate the two is, for example, an appropriate combination of screw holes and metal screws, as described above. What is necessary is just to arrange | position in the location shown with a dashed line in FIG.

The structure and function of the lamp base cover 1 will be described with reference to FIG. 5 (a) and 5 (c) are schematic perspective views showing only the lamp base cover 1 taken out. Of these, (a) is drawn upside down with respect to the original position for convenience of explanation. Yes. (B) and (D) are schematic cross-sectional views in a plane orthogonal to the longitudinal direction of the lamp base cover 1 for explaining the positional relationship, and the vertical relationship between the top and bottom corresponds to (A) and (C), respectively. is doing.

The lamp base cover 1 uses a metal square columnar member, for example, and has an opening formed on one side surface of the member, and a dimension and shape that allows the lamp base to be inserted along the axial direction from one end surface. Can be made by perforating. When the manufactured structure is drawn in a posture with the opening portion facing up, as shown in FIG. 5 (a), it has a form that can be regarded as a slot formed in a columnar body. . In the present invention, the “bottom part of the slot” refers to a range surrounded by the bottom surface 13 of the slot 12 and the side surface 14 of the column facing the opening 11 in the columnar body in which the slot 12 is formed. The thick portion is indicated by the slanted line in the range of b in FIG.

In the apparatus of the present invention, the lamp base cover 1 manufactured as described above takes a posture with the bottom of the slot facing up, as shown in FIG. 5C, and one end face of the slot. Is placed in contact with at least one of the first cooling block 4 and the second cooling block 5. Then, when the lamp base 21 is inserted from the slot opening of the other end face of the lamp base cover 1 along the slot until it hits the first cooling block 4, the position of the low-pressure mercury lamp 20 is fixed, and the pressing spring 8. The low pressure mercury lamp 20 is supported. Finally, the lid 2 is attached to the lower surface opening of the lamp base cover 1. Thus, when the lamp base 21 is viewed in a cross section perpendicular to the longitudinal direction, the lower surface is covered with the lid 2, and the other periphery is surrounded by the lamp base cover 1. There is a slight gap between the lamp base cover 1 and the lid 2. There is some play in the abutting position between the end of the lamp base 21 and the first cooling block 4, and the low-pressure mercury lamp 20 does not necessarily have a strictly horizontal posture when mounted on the device 50. 21 may be in a substantially horizontal posture without contacting the lamp base cover 1 and the lid 2 and having a slight gap between them. When replacing the lamp, the lid 2 is removed and the lamp 20 is removed.

The lamp base cover 1 conducts radiant heat received from the lamp base 21 to the cooling block side to promote cooling of the lamp base 21 and plays a role to block radiant heat from its own lamp base to the adjacent lamp base. Among these, the former role is mainly played by the bottom of the slot of the lamp base cover 1, and the latter role is played by the side wall of the slot located between the adjacent lamp bases. The role of the former depends on the size of the cross-sectional area of the surface perpendicular to the groove direction of the lamp base cover 1. Here, the “thickness” of the bottom of the slot is defined as the length of a perpendicular line that extends downward toward the columnar body side surface 14 at the bottom of the slot 12 and serves as an index of the size of the cross-sectional area. The thickness of the bottom of the slot is minimized by the length of the perpendicular drawn at the top of the bottom face 13 of the slot, and in the case of FIG. 5 (b) (and (d)), the length of the position indicated by d. However, the minimum thickness d of the bottom of the slot is preferably about half the outer diameter of the lamp base 21. If d is this size, not only can the surface temperature of the lamp base 21 be maintained in the range of 30 to 40 ° C. during lamp operation, even when the cooling water temperature is 20 ° C. or higher, and the apparatus dimensions are also moderately large. Can be Conversely, as d becomes smaller than half the outer diameter of the lamp base 21, the cross-sectional area of the lamp base cover 1 also decreases, and sufficient heat conduction from the lamp base cover 1 to the cooling block cannot be performed. On the other hand, if d is extremely larger than the outer diameter of the lamp base 21 (for example, twice or more), the cooling effect does not change, but only the apparatus dimensions are excessive, which is disadvantageous.

In the present invention, the size of the thickness s (see FIG. 5B) of the side wall of the slot is not particularly specified. However, if the thickness s is too large, the size of the device becomes excessive, which is disadvantageous. What is necessary is just to select suitably in the range of about 1-5 mm collectively. In addition, it is preferable that an air layer of 0.5 mm to 1.5 mm is secured between the side surface of the lamp base 21 and the groove bottom surface 13. When the thickness of this layer is less than 0.5 mm, the surface layer portion of the lamp base 21 is overcooled. Conversely, when it exceeds 1.5 mm, the lamp base 21 is not sufficiently cooled. It may be difficult to maintain in the range of 30 to 40 ° C.

The lid 2 provided so as to close the opening 11 of the lamp base cover 1 also contributes to conducting the radiant heat generated from the lamp base 21 to the cooling block side. In addition to receiving the radiant heat from the lamp base 21 directly, the lid 2 retains the heated air in the slot 12, so that the heat of the air is efficiently conducted to the lamp base cover 1 and the lid 2. Because it is done. When there is no cover 2, although it depends on the device design, the surface temperature of the lamp base 21 increases by about 1 to 2 ° C., and the cooling effect decreases.

The end water-cooled low-pressure mercury lamp apparatus according to the inventions according to claims 3 and 4 is a modification of the invention according to claims 1 and 2, and in this apparatus, as shown in FIG. The lamp base cover 1 and the first cooling block 4 in the apparatus according to the first and second aspects of the present invention are integrated with the lamp base holding function. In this case, the slot 12 of the lamp base cover 1 </ b> A is stopped in the middle of the perforation formation performed from one end surface, and the end contacts the tip of the lamp base 21 at that location to support the low-pressure mercury lamp 20. The lamp base cover 1A is made of a metal having good thermal conductivity, such as copper or aluminum. In order to avoid the electrolytic corrosion phenomenon, the lamp base cover 1A and the cooling block 5A through which the cooling water flows are separated from each other, which is the same as the apparatus according to the first and second aspects of the invention. The cooling effect of the end water cooling mechanism of the apparatus according to the third and fourth aspects is the same as that of the apparatus according to the first and second aspects of the present invention.

A long ozone cleaning apparatus equipped with four 800 W straight tube ozone cleaning lamps, which is a kind of low-pressure mercury lamp, will be described. The apparatus is composed of an ultraviolet irradiator, a power source and four lamps. FIG. 1 is a schematic perspective view of the apparatus, but shows only an approximate form of the apparatus, four lamps and water-cooling portions at both ends thereof, and illustration of other portions is omitted.

In FIG. 1, the low-pressure mercury lamp 20 is a QGL720-3 manufactured by Iwasaki Electric Co., Ltd., which has a lamp power of 720 W, a total length of 2740 mm, an outer diameter of the arc tube central portion of less than 30 mm, and an effective light emission length of 2400 mm. Both ends of the lamp 20 were configured to cover the lamp base 21 having an outer diameter of 32 mm, a length of 65 mm, and a tip processed into a spherical shape. On the outer surface of the lamp base 21, a power supply line (not shown) whose tip is connected to the power supply terminal at the end of the lamp 20 inside the lamp base 21 is insulated and extended. The external dimensions of the casing 10 of the ultraviolet irradiation unit 40 were 3280 mm long, 300 mm deep, and 165 mm high, excluding the protrusions. The power supply unit (not shown) supplies power of 50/60 Hz, 3 phase 200V, 30A, and functions such as lamp non-point detection and lamp end high temperature detection in addition to general functions such as lighting / extinguishing control. It was set as the structure provided. As the cooling water, water having a water temperature of 20 ± 5 ° C. and water quality equivalent to water supply was supplied to the apparatus at a flow rate of 9 to 12 L / min.

The lamp base cover 1 disposed so as to surround each end of each lamp 20 has an aluminum rectangular parallelepiped member having a length of 49 mm, a width of 42 mm, and a height of 52 mm as a base, and a width of 34 mm. A slot 12 having a depth of 36 mm and a radius of 17 mm on the side surface of the bottom cylindrical portion was formed by penetrating along the length direction, and in the apparatus 50, the opening portion 11 of the slot 12 was arranged in a horizontal position with the bottom surface being the bottom. The minimum thickness d of the bottom of the slot 12 was set to 16 mm corresponding to half the outer diameter of the lamp base 21. At this time, the distance between the side surface of the lamp base 21 and the bottom surface 13 of the groove is 1 mm. A stainless steel plate-shaped lid 2 having a length of 50 mm, a width of 42 mm, and a thickness of 1 mm is disposed in the opening 11 of the lamp base cover 1 and fixed to the lower end surface of the lamp base cover 1 with screws. The first cooling block 4 has a radius of 16 mm in accordance with the tip shape of the lamp base 21 on one side surface orthogonal to the length direction of the aluminum rectangular parallelepiped member having a length of 16 mm × width of 42 mm × height of 40 mm. A spherical recess having a depth of 13 mm was formed by perforation. The second cooling block 5 is formed of a stainless steel rectangular parallelepiped member having a length of 47 mm, a width of 42 mm, and a height of 52 mm. And formed. On the top side surface of the second cooling block 5, a protrusion or the like for connection with the device housing 10 can be provided. As described above, the lamp base cover 1, the first cooling block 4, and the second cooling block 5 are connected to each other in the positional relationship shown in FIG.

Table 1 shows the relationship between the lamp base cover arrangement condition and the lamp base cooling effect, and Table 2 shows the relationship between the cooling water temperature and the lamp base cooling effect. In Table 1, Condition C is the result when the lamp base cover has the same size, shape, and arrangement as the apparatus of the present invention, but without the lid. Condition D is a result of a stainless steel plate having a thickness of about 3 mm and having a U-shaped cross section with the opening facing downward.

As shown in Table 1, in the case of the arrangement condition A corresponding to the apparatus of the present invention, the lamp base temperature was 38.7 ° C., which was within the required temperature range. On the contrary, the lamp base temperature exceeded 40 ° C. when the lamp base was not covered with the cover (arrangement condition E) and when the lamp base was not covered with the cover (C and D). In addition, from the comparison of the results for the arrangement conditions C and D, the size of the cross-sectional area of the lamp base cover in the plane perpendicular to the longitudinal direction of the apparatus affects the cooling of the lamp base. It can be seen that the lamp base temperature is not much different from the case (E) when the cover is not provided only by covering. Further, when the same lamp base cover as that of the apparatus of the present invention was turned upside down and the lid side was disposed upward (B), the lamp base temperature exceeded 40 ° C. This is because the air heated by the heat radiation from the lamp base gathers above the lamp base, so that the heat conduction in the cooling block direction is sufficiently performed only by covering the position with a plate material (cover) of several millimeters in thickness. It is not possible. It is necessary to cover the lamp base with a member having a thickness greater than a predetermined size. In Example 1, this thickness was about 16 mm when expressed by the minimum thickness (d) of the bottom of the slot.

As shown in Table 2, in the case of the arrangement condition A, the lamp base temperature can be maintained at 30 to 40 ° C. within a relatively wide range of the cooling water temperature of 15 to 25 ° C.

As described above, according to the present invention, the heat of the lamp base can be efficiently conducted to the cooling block while avoiding the heat transfer to the adjacent lamp base, and the cooling water in which the cooling water flows is circulated. It is possible to provide an end water-cooled low-pressure mercury lamp apparatus having a structure that can efficiently cool water without causing the occurrence of electric corrosion in the block.

The apparatus of the present invention can be used for cleaning and modifying the surface of a substrate such as ozone cleaning.

In the edge part water-cooling type low-pressure mercury lamp apparatus of the Example of this invention, it is the schematic perspective view which only drawn and showed the low-pressure mercury lamp and the water-cooling mechanism part of the both ends. It is a schematic sectional drawing in the surface perpendicular | vertical to the apparatus longitudinal direction of the site | part containing a lamp base cover of the edge part water-cooling type low pressure mercury lamp apparatus of the Example of this invention. FIG. 3 is a schematic cross-sectional view in the longitudinal direction of the apparatus shown in the vicinity of one end of the lamp in the end water-cooled low-pressure mercury lamp apparatus of the embodiment of the present invention. It is a typical exploded view showing the position (combination) relationship of the constituent members in the vicinity of the lamp end in the end water-cooled low-pressure mercury lamp apparatus of the embodiment of the present invention. It is a figure for demonstrating the requirements of the dimension and shape of the lamp base cover in the edge part water cooling type low pressure mercury lamp apparatus of the Example of this invention. In the edge part water-cooled low pressure mercury lamp apparatus of the other Example of this invention, it is a schematic sectional drawing of the apparatus longitudinal direction shown about one edge part of a lamp | ramp. In the edge part water-cooling type low pressure mercury lamp apparatus of a prior art example, it is a schematic sectional drawing of the apparatus longitudinal direction shown about one edge part of a lamp | ramp.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Lamp base cover 1A ... Lamp base cover 2 ... Cover 3 ... Water cooling mechanism 4 ... 1st cooling block 5 ... 2nd cooling block 5A ... Cooling block 6 ... Cooling water flow path 7 ... Support shaft 8 ... Pressing spring 9 ... Support member DESCRIPTION OF SYMBOLS 10 ... Housing 11 ... Opening part 12 ... Slot 13 ... Slot bottom 14 ... Columnar side 20 ... Low pressure mercury lamp 21 ... Lamp base 22 ... Arc tube 40 ... Ultraviolet irradiation part 50 ... End part water cooling type low pressure mercury lamp apparatus 70 ... Substrate to be treated

Claims (4)

End-water-cooled low-pressure mercury comprising a straight tubular low-pressure mercury lamp that is symmetrical in the axial direction with respect to the center and has metal cylindrical lamp bases at both ends, and a water-cooling mechanism that water-cools both ends of the lamp base. In the lamp device,
The water cooling mechanism at each end is brought into contact with a metal first cooling block formed by supporting a tip end portion of the lamp base with an end surface recess, and behind the first cooling block as viewed from the center of the low-pressure mercury lamp. A metal second cooling block having a cooling water flow passage provided therein and having a coupling means for coupling to the first cooling block at a contact surface with the first cooling block; and an outer periphery of the lamp base having an opening. It is composed of a metal lamp base cover that surrounds and a metal lid that seals the opening of the lamp base cover,
The lamp base cover is constituted by a columnar body having a slot formed to have a size capable of inserting the lamp base along an axial direction from one end face, and an opening of the slot is formed in the lamp base. An opening of the cover is formed, the slot is horizontally arranged, the slot opening is downward, and the bottom of the slot is upward, and the lamp base is inserted into the slot. In this state, the other end face of the columnar body is disposed in contact with the first cooling block and / or the second cooling block, and is coupled to the cooling block at the contact surface with any one of the cooling blocks. An end water-cooled low-pressure mercury lamp apparatus characterized by comprising means. The end water-cooled low-pressure type according to claim 1, wherein the first cooling block is made of copper or aluminum, the second cooling block is made of stainless steel, and the lamp base cover is made of copper or aluminum. Mercury lamp equipment. End-water-cooled low-pressure mercury comprising a straight tubular low-pressure mercury lamp that is symmetrical in the axial direction with respect to the center and has metal cylindrical lamp bases at both ends, and a water-cooling mechanism that water-cools both ends of the lamp base. In the lamp device,
The water cooling mechanism at each end includes a metal lamp base cover that supports an end portion of the lamp base with an inner recess and surrounds an outer periphery of the lamp base with an opening, and an opening of the lamp base cover And a coupling means for connecting to the lamp base cover at a contact surface with the end surface of the lamp base cover, as viewed from the center of the low-pressure mercury lamp, and in contact with the back of the lamp base cover. And a metal cooling block having a cooling water flow path therein,
The lamp base cover includes a columnar body having a closed end surface and a slotted hole formed in a size that allows the lamp base to be inserted along the axial direction from an end surface facing the closed end surface. The opening forms the opening of the lamp base cover, the end surface of the slot on the closed end face side of the columnar body includes a recess that supports the tip of the lamp base, and the slot is horizontally The end water-cooled low-pressure mercury lamp apparatus is arranged in a posture in which the opening surface of the groove hole is directed downward and the bottom of the groove hole is directed upward. 4. The end water-cooled low-pressure mercury lamp apparatus according to claim 3, wherein the lamp base cover is made of copper or aluminum, and the cooling block is made of stainless steel.

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