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JP2008088523A - Reaction accelerator for electroless copper plating bath - Google Patents

Reaction accelerator for electroless copper plating bath Download PDF

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Publication number
JP2008088523A
JP2008088523A JP2006272486A JP2006272486A JP2008088523A JP 2008088523 A JP2008088523 A JP 2008088523A JP 2006272486 A JP2006272486 A JP 2006272486A JP 2006272486 A JP2006272486 A JP 2006272486A JP 2008088523 A JP2008088523 A JP 2008088523A
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copper plating
electroless copper
plating bath
bath
reaction accelerator
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JP4621190B2 (en
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Yumiko Shimizu
由美子 清水
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JCU Corp
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Ebara Udylite Co Ltd
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Abstract

【課題】析出速度と浴安定性を兼ね備えた無電解銅めっき浴を簡便に提供することのできる無電解銅めっき浴用反応促進剤を提供すること。
【解決手段】 以下の式(I)、
【化1】

(式中、RおよびR’はそれぞれ独立して水素または炭素数1〜4のアルキル基を示し、Xは対アニオンを示す)
で表される構造単位を有するジアリルアミン系重合物を含有することを特徴とする無電解銅めっき浴用反応促進剤。
【選択図】図1
The present invention provides a reaction accelerator for an electroless copper plating bath that can easily provide an electroless copper plating bath having both a deposition rate and bath stability.
The following formula (I),
[Chemical 1]

(Wherein R and R ′ each independently represent hydrogen or an alkyl group having 1 to 4 carbon atoms, and X represents a counter anion)
A reaction accelerator for an electroless copper plating bath, comprising a diallylamine-based polymer having a structural unit represented by:
[Selection] Figure 1

Description

本発明は、無電解銅めっき浴の反応を促進することのできる無電解銅めっき浴用反応促進剤に関する。   The present invention relates to a reaction accelerator for an electroless copper plating bath that can accelerate the reaction of the electroless copper plating bath.

無電解銅めっき浴はかなり成熟した技術であり、各めっき薬品メーカーから、数多くの種類のめっき浴が販売されている。それらのうちには、例えば、応力がゼロで樹脂上の密着が良いもの、安定性を犠牲にして極端に厚付け高速を目指したものなど、特徴をもたせたものもある。しかし、最も多いタイプは室温付近の使用で、ほどほどの析出速度と浴安定性を兼ね備えた仕様の浴である。   Electroless copper plating baths are a fairly mature technology, and many types of plating baths are sold by various plating chemical manufacturers. Some of them have features such as, for example, those that have zero stress and good adhesion on the resin, and those that are extremely thick and aimed at high speed at the expense of stability. However, the most common type is a bath having a specification that has a moderate deposition rate and bath stability when used near room temperature.

無電解銅めっき浴の析出速度を向上させるためには、還元剤であるホルムアルデヒドの濃度を上げたり、安定剤濃度を下げたりすればよいが、これにより浴安定性が低下するという問題が生じる。また、浴安定性を向上させるためには、安定剤の量を増やしたり、イオウ系の抑制力の強い安定剤を使う等すればよいが、これにより析出速度が低下するという問題があった。   In order to improve the deposition rate of the electroless copper plating bath, the concentration of formaldehyde as a reducing agent may be increased or the concentration of the stabilizer may be decreased, but this causes a problem that the bath stability is lowered. Further, in order to improve the bath stability, it is sufficient to increase the amount of the stabilizer or use a stabilizer having a strong sulfur-based inhibitory force, but this causes a problem that the deposition rate is lowered.

上記のように、従来の常識では、析出速度と安定性は両立し得ないとされていたが、本発明はこのような常識に反する、高い析出速度と浴安定性を兼ね備えた無電解銅めっき浴を簡便に提供することのできる無電解銅めっき浴用反応促進剤を提供することを課題とした。   As described above, in the conventional common sense, it was said that the deposition rate and stability could not be compatible, but the present invention is contrary to such common sense, electroless copper plating having both high deposition rate and bath stability. It was made into the subject to provide the reaction promoter for electroless copper plating baths which can provide a bath simply.

本発明者らは上記課題を解決するために鋭意研究をした結果、特定のジアリルアミン系重合物を添加した無電解銅めっき浴は、高い析出速度と浴安定性を兼ね備えたものとなることを見出し、本発明を完成させた。   As a result of intensive studies to solve the above problems, the present inventors have found that an electroless copper plating bath to which a specific diallylamine-based polymer is added has a high deposition rate and bath stability. The present invention has been completed.

すなわち、本発明は以下の式(I)、
(式中、RおよびR’はそれぞれ独立して水素または炭素数1〜4のアルキル基を示し、Xは対アニオンを示す)
で表される構造単位を有するジアリルアミン系重合物を含有することを特徴とする無電解銅めっき浴用反応促進剤である。
That is, the present invention provides the following formula (I),
(Wherein R and R ′ each independently represent hydrogen or an alkyl group having 1 to 4 carbon atoms, and X represents a counter anion)
A reaction accelerator for an electroless copper plating bath, comprising a diallylamine-based polymer having a structural unit represented by:

また、本発明は上記ジアリルアミン系重合物、銅塩、キレート剤および還元剤を含有することを特徴とする無電解銅めっき浴である。   Moreover, this invention is an electroless copper plating bath characterized by containing the said diallylamine type polymer, copper salt, a chelating agent, and a reducing agent.

更に、本発明は上記無電解銅めっき浴に被めっき物を浸漬することを特徴とする無電解銅めっき方法である。   Furthermore, the present invention is an electroless copper plating method characterized by immersing an object to be plated in the electroless copper plating bath.

本発明の無電解銅めっき浴用反応促進剤は、これを無電解銅めっき浴に添加することにより高い析出速度と浴安定性を兼ね備えさせることのできる優れたものである。   The reaction accelerator for an electroless copper plating bath of the present invention is an excellent one that can have a high deposition rate and bath stability by adding it to the electroless copper plating bath.

従って、無電解銅めっき浴用反応促進剤を添加した無電解銅めっき浴を用いて被めっき物に無電解銅めっきを施す場合には、従来よりも短時間で安定に無電解銅めっきを施すことができる。   Therefore, when electroless copper plating is applied to an object to be plated using an electroless copper plating bath to which a reaction accelerator for electroless copper plating bath is added, electroless copper plating should be applied more stably in a shorter time than before. Can do.

本発明の無電解銅めっき浴用反応促進剤(以下、単に「本発明促進剤」という)は、以下の式(I)、
(式中、RおよびR’はそれぞれ独立して水素または炭素数1〜4のアルキル基を示し、Xは対アニオンを示す)
で表される構造単位を有するジアリルアミン系重合物を有効成分として含有するものである。このジアリルアミン系重合物を構成する構造単位(I)としては、RおよびR’の両方が水素またはメチル基のものが好ましく、特にRおよびR’の両方がメチル基のものが好ましく、また、対アニオン(X)が、フッ素イオン、塩素イオン、臭素イオン、ヨウ素イオン等のハロゲンイオンから選ばれるものが好ましく、特に塩素イオンのものが好ましい。さらに、ジアリルアミン系重合物の分子量は特に限定されないが、1,000〜100,000が好ましく、特に2,000〜10,000のものが好ましい。このようなジアリルアミン系重合物の市販品としては、PAS−A−1(分子量5,000)、PAS−A−5(分子量4,000)、PASA−120L(分子量100,000)、PAS−A−120S(分子量100,000)、PAS−92(分子量5,000)(いずれも日東紡株式会社製)が挙げられる。これらの市販品の中でもPAS−A−1が好ましい。
The reaction accelerator for an electroless copper plating bath of the present invention (hereinafter simply referred to as “the accelerator of the present invention”) has the following formula (I),
(Wherein R and R ′ each independently represent hydrogen or an alkyl group having 1 to 4 carbon atoms, and X represents a counter anion)
A diallylamine-based polymer having a structural unit represented by the formula: As the structural unit (I) constituting the diallylamine polymer, both R and R ′ are preferably hydrogen or a methyl group, particularly preferably both R and R ′ are a methyl group. The anion (X ) is preferably selected from halogen ions such as fluorine ion, chlorine ion, bromine ion and iodine ion, particularly preferably chloride ion. Further, the molecular weight of the diallylamine-based polymer is not particularly limited, but is preferably 1,000 to 100,000, and particularly preferably 2,000 to 10,000. Commercially available products of such diallylamine-based polymers include PAS-A-1 (molecular weight 5,000), PAS-A-5 (molecular weight 4,000), PASA-120L (molecular weight 100,000), PAS-A. -120S (molecular weight 100,000), PAS-92 (molecular weight 5,000) (all manufactured by Nittobo Co., Ltd.). Among these commercially available products, PAS-A-1 is preferable.

上記した本発明促進剤を、無電解銅めっき浴に添加する際の添加量は、無電解銅めっき浴中で5〜200mg/Lとなる量が好ましく、特に10〜100mg/Lとなる量が好ましい。また、本発明促進剤を無電解銅めっき浴に添加する方法は、特に制限されず、例えば、めっき前の無電解銅めっき浴に添加して混合・攪拌するだけでよい。   The amount of the above-described accelerator according to the present invention added to the electroless copper plating bath is preferably 5 to 200 mg / L, particularly 10 to 100 mg / L in the electroless copper plating bath. preferable. The method of adding the accelerator of the present invention to the electroless copper plating bath is not particularly limited. For example, the accelerator may be added to the electroless copper plating bath before plating, and mixed and stirred.

また、本発明促進剤が添加される無電解銅めっき浴の組成としては、特に制限がないが、例えば、銅塩、キレート剤および還元剤を含有するものが好ましい。この無電解銅めっき浴に含有される銅塩としては、塩化第2銅、硫酸銅等が挙げられ、これらの中でも塩化第2銅が好ましい。この銅塩の無電解銅めっき浴中の濃度は銅として1.5〜4g/Lが好ましく、特に2〜3g/Lが好ましい。また、キレート剤としては、ロッシェル塩またはエチレンジアミン四酢酸(EDTA)、EDTA・二ナトリウム塩、EDTA・四ナトリウム塩等のEDTAまたはその塩等が挙げられ、これらの中でもEDTAまたはその塩が好ましく、特にEDTAが好ましい。このキレート剤の無電解銅めっき浴中の濃度は5〜50g/Lが好ましく、特に10〜50g/Lが好ましい。更に、還元剤としては次亜リン酸塩、ホルムアルデヒド、ジメチルアミンボラン等が挙げられ、これらの中でもホルムアルデヒドが好ましい。この還元剤の無電解銅めっき浴中の濃度は3〜30g/Lが好ましく、特に3〜20g/Lが好ましい。また更に、前記無電解銅めっき浴には本発明の効果を妨げない限り、安定剤、pH調整剤等を添加しても良い。安定剤としては、例えば、シアン化ナトリウム等のシアン化合物、2−2’ジピリジル等の窒素化合物およびチオ尿素等のイオウ化合物から選ばれる安定剤の1種以上が挙げられ、これら安定剤の中でも2−2’ジピリジルを用いることが環境への配慮等の点から好ましい。これら安定剤の無電解銅めっき浴中の濃度は、例えば、シアン化合物であれば10〜100mg/L、窒素化合物であれば0.1〜100mg/Lおよびイオウ化合物であれば0.01〜10mg/Lである。また、pH調整剤としては、水酸化ナトリウム等が挙げられる。この水酸化ナトリウムの無電解銅めっき浴中の濃度は3〜20g/Lが好ましい。この濃度で水酸化ナトリウムを無電解銅めっき浴に添加すると、pHが10.5〜14程度となる。   Moreover, there is no restriction | limiting in particular as a composition of the electroless copper plating bath to which this invention promoter is added, For example, what contains a copper salt, a chelating agent, and a reducing agent is preferable. Examples of the copper salt contained in the electroless copper plating bath include cupric chloride and copper sulfate. Among these, cupric chloride is preferable. The concentration of the copper salt in the electroless copper plating bath is preferably 1.5 to 4 g / L, particularly preferably 2 to 3 g / L, as copper. Examples of the chelating agent include Rochelle salt or EDTA such as ethylenediaminetetraacetic acid (EDTA), EDTA disodium salt, EDTA tetrasodium salt, and the like. Among these, EDTA or a salt thereof is preferable. EDTA is preferred. The concentration of the chelating agent in the electroless copper plating bath is preferably 5 to 50 g / L, and particularly preferably 10 to 50 g / L. Furthermore, examples of the reducing agent include hypophosphite, formaldehyde, dimethylamine borane, etc. Among these, formaldehyde is preferable. The concentration of the reducing agent in the electroless copper plating bath is preferably 3 to 30 g / L, and particularly preferably 3 to 20 g / L. Furthermore, a stabilizer, a pH adjuster and the like may be added to the electroless copper plating bath as long as the effects of the present invention are not hindered. Examples of the stabilizer include one or more stabilizers selected from cyan compounds such as sodium cyanide, nitrogen compounds such as 2-2′dipyridyl, and sulfur compounds such as thiourea. Among these stabilizers, 2 It is preferable to use -2′dipyridyl from the viewpoint of environmental considerations. The concentration of these stabilizers in the electroless copper plating bath is, for example, 10 to 100 mg / L for a cyan compound, 0.1 to 100 mg / L for a nitrogen compound, and 0.01 to 10 mg for a sulfur compound. / L. Moreover, sodium hydroxide etc. are mentioned as a pH adjuster. The concentration of sodium hydroxide in the electroless copper plating bath is preferably 3 to 20 g / L. When sodium hydroxide is added to the electroless copper plating bath at this concentration, the pH becomes about 10.5 to 14.

本発明促進剤が添加される無電解銅めっき浴の好ましい態様を示せば次の通りである。
<無電解銅めっき浴組成>
塩化第2銅または硫酸銅:銅として2〜3g/L
EDTA:10〜50g/L
ホルムアルデヒド:3〜20g/L
2−2’ジピリジル:0.1〜100mg/L
水酸化ナトリウム:3〜20g/L
A preferred embodiment of the electroless copper plating bath to which the accelerator of the present invention is added is as follows.
<Electroless copper plating bath composition>
Cupric chloride or copper sulfate: 2-3 g / L as copper
EDTA: 10-50 g / L
Formaldehyde: 3-20g / L
2-2′dipyridyl: 0.1 to 100 mg / L
Sodium hydroxide: 3 to 20 g / L

上記のようにして本発明促進剤が添加された無電解銅めっき浴(以下、これを「本発明めっき浴」という)に、被めっき物を浸漬すれば無電解銅めっきを施すことができる。この無電解銅めっきの条件としては、特に限定されないが、例えば、20〜40℃、好ましくは25〜40℃とした本発明めっき浴に被めっき物を10〜20分間、好ましくは15〜20分間浸漬する条件が挙げられる。また、無電解銅めっきの際にはめっき浴1Lあたり0.1〜1Lの送気量でエアーバブリングすることが好ましい。   As described above, electroless copper plating can be performed by immersing an object to be plated in an electroless copper plating bath to which the promoter of the present invention is added (hereinafter referred to as “the present plating bath”). The electroless copper plating conditions are not particularly limited. For example, the plating object is placed on the plating bath of the present invention at 20 to 40 ° C., preferably 25 to 40 ° C. for 10 to 20 minutes, preferably 15 to 20 minutes. The conditions to immerse are mentioned. In electroless copper plating, air bubbling is preferably performed with an air supply amount of 0.1 to 1 L per 1 L of the plating bath.

本発明めっき浴で無電解銅めっきを施される被めっき物には、めっきを施す前に、脱脂、洗浄、エッチング、触媒付与、触媒の活性化等の前処理を行っておくことが好ましい。このような前処理としてはライザトロンシステム(荏原ユージライト株式会社製)等の無電解銅めっきシステムの一部を利用しても良い。   It is preferable that pre-treatment such as degreasing, washing, etching, applying a catalyst, and activating a catalyst is performed on an object to be plated with electroless copper plating in the plating bath of the present invention. As such pretreatment, a part of an electroless copper plating system such as a risertron system (manufactured by Ebara Eugene Corporation) may be used.

本発明めっき浴でめっきを施される被めっき物としてはプリント基板、エンジニアリングプラスチックが挙げられ、これらの中でもプリント基板が好ましい。   Examples of the object to be plated in the plating bath of the present invention include printed circuit boards and engineering plastics. Among these, printed circuit boards are preferable.

上記した本発明めっき浴を用いためっき方法によれば、本発明めっき浴の析出速度が高いためめっき時間を短縮することができる。   According to the plating method using the plating bath of the present invention described above, the plating time can be shortened because the deposition rate of the plating bath of the present invention is high.

以下、本発明を、実施例を挙げて説明するが、本発明は何らこれらに制限されるものではない。   EXAMPLES Hereinafter, although an Example is given and this invention is demonstrated, this invention is not restrict | limited to these at all.

実 施 例 1
無電解銅めっき浴の調製(1):
以下の組成の無電解銅めっき浴に、更に、以下の式(II)で示される構造単位を有する重合物であり、その分子量が5,000であるジアリルアミン系重合物(PAS−A−1;日東紡株式会社製)を10mg/L添加・混合して無電解銅めっき浴を調製した。
Example 1
Preparation of electroless copper plating bath (1):
A diallylamine polymer (PAS-A-1) having a molecular weight of 5,000, which is a polymer having a structural unit represented by the following formula (II) in an electroless copper plating bath having the following composition: Nittobo Co., Ltd.) was added and mixed at 10 mg / L to prepare an electroless copper plating bath.

<無電解銅めっき浴組成>
塩化第2銅:銅として2.5g/L
EDTA:20g/L
水酸化ナトリウム:10g/L
ホルムアルデヒド:6g/L
2−2’ジピリジル:30mg/L
<Electroless copper plating bath composition>
Cupric chloride: 2.5 g / L as copper
EDTA: 20g / L
Sodium hydroxide: 10 g / L
Formaldehyde: 6g / L
2-2′dipyridyl: 30 mg / L

実 施 例 2
無電解銅めっき浴の調製(2):
実施例1の分子量5,000のPAS−A−1に代えて、分子量4,000のジアリルアミン系重合物(PAS−A−5;日東紡株式会社製)を10mg/L添加・混合する以外は実施例1と同様に無電解銅めっき浴を調製した。
Example 2
Preparation of electroless copper plating bath (2):
Instead of adding PAS-A-1 having a molecular weight of 5,000 in Example 1 and adding and mixing 10 mg / L of a diallylamine polymer having a molecular weight of 4,000 (PAS-A-5; manufactured by Nittobo Co., Ltd.). An electroless copper plating bath was prepared in the same manner as in Example 1.

実 施 例 3
析出速度の検討(1):
実施例1または実施例2で調製した無電解銅めっき浴を35℃に調整した。この無電解めっき浴に、ライザトロンシステム(荏原ユージライト株式会社製)にて触媒の活性化(アクセラレーター)まで処理したエポキシ板(松下電工株式会社製)を浸漬した。各浸漬時間あたりの膜厚をエポキシ板の重さから算出した。また、比較として無電解銅めっき浴(PB−503F:荏原ユージライト株式会社製)を25℃にしたものについても同様の測定を行った。膜厚と浸漬時間との関係を図1に示した。
Example 3
Examination of deposition rate (1):
The electroless copper plating bath prepared in Example 1 or Example 2 was adjusted to 35 ° C. In this electroless plating bath, an epoxy plate (made by Matsushita Electric Works Co., Ltd.) treated with a risertron system (made by Ebara Eugleite Co., Ltd.) until catalyst activation (accelerator) was immersed. The film thickness per each immersion time was calculated from the weight of the epoxy plate. Moreover, the same measurement was performed also about what changed the electroless copper plating bath (PB-503F: EBARA Eugleite Co., Ltd.) to 25 degreeC as a comparison. The relationship between the film thickness and the immersion time is shown in FIG.

実施例1および実施例2の無電解銅めっき浴は、PB−503Fよりも短い浸漬時間で同じ膜厚を達成できた。   The electroless copper plating baths of Example 1 and Example 2 were able to achieve the same film thickness with a shorter immersion time than PB-503F.

実 施 例 4
スルーホール内被覆性の検討:
実施例1の無電解銅めっき浴を35℃に調整した。一方、1.0mmφ×1.6mmtのスルーホールを形成したプリント基板(FR−4:松下電工株式会社製)を、実施例3と同様にライザトロンシステムにて触媒の活性化(アクセラレーター)まで処理した後、前記無電解銅めっき浴に浸漬した。各浸漬時間におけるスルーホール内への銅めっき被覆性を以下のバックライト試験と基準により評価した。また、比較として無電解銅めっき浴(PB−503F:荏原ユージライト株式会社製)を25℃にしたものについても同様の測定を行った。
Example 4
Examination of through hole coverage:
The electroless copper plating bath of Example 1 was adjusted to 35 ° C. On the other hand, a printed circuit board (FR-4: manufactured by Matsushita Electric Works Co., Ltd.) having a through hole of 1.0 mmφ × 1.6 mmt was activated in the riser system as in Example 3 (accelerator). After the treatment, it was immersed in the electroless copper plating bath. The copper plating coverage in the through hole at each immersion time was evaluated by the following backlight test and criteria. Moreover, the same measurement was performed also about what changed the electroless copper plating bath (PB-503F: EBARA Eugleite Co., Ltd.) to 25 degreeC as a comparison.

<バックライト試験>
各浸漬時間後にスルーホールを切り開いてスルーホール内壁を露出させ、それに下方向からライトをあて、光の遮断具合を以下の評価基準で評価した。また、浸漬5分後、10分後および15分後のバックライト試験の結果の一例を図2に示した。
<Backlight test>
After each immersion time, the through hole was cut open to expose the inner wall of the through hole, and a light was applied to the through hole from below, and the light blocking condition was evaluated according to the following evaluation criteria. Moreover, an example of the result of the backlight test after 5 minutes, 10 minutes and 15 minutes after immersion is shown in FIG.

<評価基準>
(評価) (内容)
レイティングNo.0 :スルーホールが銅めっきにより全く被覆されていない状態
レイティングNo.10:スルーホールが完全に銅めっきで被覆され、遮光された状態
*レイティングNo.1〜9については自社基準に従った。
<Evaluation criteria>
(Evaluation) (Content)
Rating No. 0: The through hole is not covered with copper plating at all. Rating No. 10: The through hole is completely covered with copper plating and shielded from light. It was.

実施例1の無電解銅めっき浴は、PB−503Fよりも短時間でスルーホール内を完全に被覆できた。   The electroless copper plating bath of Example 1 could completely cover the through hole in a shorter time than PB-503F.

実 施 例 5
浴安定性の検討(1):
実施例1の無電解銅めっき浴を容量100mlのガラス瓶に入れ、フタをして密封した。次いで、これを50℃の温浴で加温して銅が析出し始めるまでの時間を測定した。また、比較として無電解銅めっき浴(PB−503F:荏原ユージライト株式会社製)についても同様の測定を行った。
Example 5
Examination of bath stability (1):
The electroless copper plating bath of Example 1 was placed in a glass bottle with a capacity of 100 ml, sealed with a lid. Subsequently, this was heated with a 50 degreeC warm bath, and the time until copper began to precipitate was measured. For comparison, the same measurement was performed for an electroless copper plating bath (PB-503F: manufactured by Sugawara Eugleite Co., Ltd.).

実施例1の無電解銅めっき浴は、PB−503Fよりも安定性が優れていた。   The electroless copper plating bath of Example 1 was more stable than PB-503F.

実 施 例 6
浴安定性の検討(2):
実施例1の無電解銅めっき浴を容量100mlのガラス瓶に入れ、フタをして密封した。次いで、これを室温(昼間、約25℃:夜間、約15℃)で放置して銅が析出し始めるまでの日数を測定した。また、比較として無電解銅めっき浴(PB−503F:荏原ユージライト株式会社製)についても同様の測定を行った。
Example 6
Examination of bath stability (2):
The electroless copper plating bath of Example 1 was placed in a glass bottle with a capacity of 100 ml, sealed with a lid. Next, this was allowed to stand at room temperature (daytime, about 25 ° C .: nighttime, about 15 ° C.), and the number of days until copper began to precipitate was measured. For comparison, the same measurement was performed for an electroless copper plating bath (PB-503F: manufactured by Sugawara Eugleite Co., Ltd.).

実施例1の無電解銅めっき浴は、PB−503Fと同程度の安定性を有し、実用上問題はなかった。   The electroless copper plating bath of Example 1 had the same degree of stability as PB-503F, and there was no practical problem.

実 施 例 7
浴安定性の検討(3):
1.0mmφ×1.6mmtのスルーホールを形成したプリント基板(FR−4:松下電工株式会社製)を、試験例1と同様にライザトロンシステムにてアクセラレーターまで処理し、これを35℃に調整した、実施例1の無電解銅めっき浴に浸漬した。浸漬後にプリント基板を取りだし、浴温を維持したまま放置して銅が析出し始めるまでの日数を測定した。また、比較として無電解銅めっき浴(PB−503F:荏原ユージライト株式会社製)を25℃にしたものについても同様の測定を行った。
Example 7
Examination of bath stability (3):
A printed circuit board (FR-4: manufactured by Matsushita Electric Works Co., Ltd.) on which a 1.0 mmφ × 1.6 mmt through hole was formed was processed up to an accelerator with a risertron system in the same manner as in Test Example 1, and this was maintained at 35 ° C. It was immersed in the adjusted electroless copper plating bath of Example 1. After dipping, the printed circuit board was taken out and allowed to stand with the bath temperature maintained, and the number of days until copper began to precipitate was measured. Moreover, the same measurement was performed also about what changed the electroless copper plating bath (PB-503F: EBARA Eugleite Co., Ltd.) to 25 degreeC as a comparison.

実施例1の無電解銅めっき浴は実稼働においてもPB−503Fより優れた安定性を有する。   The electroless copper plating bath of Example 1 has stability superior to PB-503F even in actual operation.

実 施 例 8
析出速度の検討(2):
実施例1の無電解銅めっき浴中のPAS−A−1の含有量を20mg/Lまたは30mg/Lに代えた無電解銅めっき浴を調製した。この無電解銅めっき浴に、樹脂基板(FR−4(松下電工株式会社製)から銅を剥がしたもの)を15分浸漬した場合の銅の析出速度を以下の方法により測定した。また、実施例2の無電解銅めっき浴中のPAS−A−5の含有量を20mg/Lまたは30mg/Lに代えた無電解銅めっき浴についても上記と同様に銅の析出速度を測定した。これらの結果を図3に示した。
Example 8
Examination of deposition rate (2):
An electroless copper plating bath in which the content of PAS-A-1 in the electroless copper plating bath of Example 1 was replaced with 20 mg / L or 30 mg / L was prepared. In this electroless copper plating bath, the copper deposition rate was measured by the following method when a resin substrate (FR-4 (manufactured by Matsushita Electric Works) was stripped of copper) was immersed for 15 minutes. In addition, the copper deposition rate was measured in the same manner as described above for the electroless copper plating bath in which the content of PAS-A-5 in the electroless copper plating bath of Example 2 was replaced with 20 mg / L or 30 mg / L. . These results are shown in FIG.

<析出速度の測定>
まず、樹脂基板の重量を測定した。次に、樹脂基板を試験例1と同様にライザトロンシステムにてアクセラレーターまで処理し、これを35℃に調整した無電解銅めっき浴に15分浸漬させた。その後、銅めっき後の樹脂基板の重量を測定し、重量の変化等から樹脂基板上に施された銅めっきの膜厚および析出速度を算出した。
<Measurement of deposition rate>
First, the weight of the resin substrate was measured. Next, the resin substrate was processed up to the accelerator with the risertron system in the same manner as in Test Example 1, and immersed in an electroless copper plating bath adjusted to 35 ° C. for 15 minutes. Thereafter, the weight of the resin substrate after copper plating was measured, and the film thickness and deposition rate of the copper plating applied on the resin substrate were calculated from the change in weight and the like.

本発明無電解銅めっき浴を使用した場合の銅の析出速度は、添加するPAS−A−1およびPAS−A−5の濃度に依存して高くなった。   When using the electroless copper plating bath of the present invention, the copper deposition rate increased depending on the concentrations of PAS-A-1 and PAS-A-5 to be added.

本発明の無電解銅めっき浴用反応促進剤は、従来の無電解銅めっき浴に添加するだけで、高い析出速度と浴安定性を兼ね備えさせることができる。   The reaction accelerator for an electroless copper plating bath of the present invention can have both a high deposition rate and bath stability only by adding it to a conventional electroless copper plating bath.

従って、この無電解銅めっき浴用反応促進剤は無電解銅めっきのプロセスの時間の短縮等に好適に用いることができる。   Therefore, the reaction accelerator for electroless copper plating bath can be suitably used for shortening the time of electroless copper plating process.

図1は、実施例1、実施例2およびPB−503Fの無電解銅めっき浴で無電解銅めっきを施した場合の膜厚と浸漬時間との関係を示す図面である。FIG. 1 is a drawing showing the relationship between film thickness and immersion time when electroless copper plating is applied in electroless copper plating baths of Example 1, Example 2 and PB-503F. 図2は、実施例1およびPB−503Fの無電解銅めっき浴で無電解銅めっきを施した場合のプリント基板のバックライト試験の結果の一例を示す図面である。FIG. 2 is a drawing showing an example of a result of a backlight test on a printed circuit board when electroless copper plating is performed in Example 1 and an electroless copper plating bath of PB-503F. 図3は、無電解銅めっき浴中のPAS−A−1およびPAS−A−5の各濃度における析出速度を示す図面である。FIG. 3 is a drawing showing deposition rates at various concentrations of PAS-A-1 and PAS-A-5 in an electroless copper plating bath.

Claims (5)

以下の式(I)、
(式中、RおよびR’はそれぞれ独立して水素または炭素数1〜4のアルキル基を示し、Xは対アニオンを示す)
で表される構造単位を有するジアリルアミン系重合物を含有することを特徴とする無電解銅めっき浴用反応促進剤。
The following formula (I),
(Wherein R and R ′ each independently represent hydrogen or an alkyl group having 1 to 4 carbon atoms, and X represents a counter anion)
A reaction accelerator for an electroless copper plating bath, comprising a diallylamine-based polymer having a structural unit represented by:
以下の式(I)、
(式中、RおよびR’はそれぞれ独立して水素または炭素数1〜4のアルキル基を示し、Xは対アニオンを示す)
で表される構造単位を有するジアリルアミン系重合物、銅塩、キレート剤および還元剤を含有することを特徴とする無電解銅めっき浴。
The following formula (I),
(Wherein R and R ′ each independently represent hydrogen or an alkyl group having 1 to 4 carbon atoms, and X represents a counter anion)
An electroless copper plating bath comprising a diallylamine-based polymer having a structural unit represented by the formula: a copper salt, a chelating agent and a reducing agent.
キレート剤が、EDTAまたはその塩である請求項2記載の無電解銅めっき浴。   The electroless copper plating bath according to claim 2, wherein the chelating agent is EDTA or a salt thereof. 請求項2または3記載の無電解銅めっき浴に被めっき物を浸漬することを特徴とする無電解銅めっき方法。   An electroless copper plating method comprising immersing an object to be plated in the electroless copper plating bath according to claim 2. 無電解銅めっき浴の温度が、20〜40℃である請求項4記載の無電解銅めっき方法。
The electroless copper plating method according to claim 4, wherein the temperature of the electroless copper plating bath is 20 to 40 ° C.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010185113A (en) * 2009-02-12 2010-08-26 Kansai Univ Electroless copper-plating solution, electroless copper-plating method and method for forming embedded wiring

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0539580A (en) * 1991-08-02 1993-02-19 Okuno Seiyaku Kogyo Kk Electroless palladium plating liquid
JPH05125593A (en) * 1991-11-06 1993-05-21 Nippon Steel Corp Method for producing high corrosion resistant Zn-based galvanized steel sheet
JPH05320923A (en) * 1992-05-22 1993-12-07 Nitto Boseki Co Ltd Electroless plating method and pretreating solution used for the same
JP2002004059A (en) * 2000-06-19 2002-01-09 Murata Mfg Co Ltd Electroless copper plating bath, electroless copper plating method and electronic part
JP2004277868A (en) * 2003-03-19 2004-10-07 Mitsubishi Paper Mills Ltd Method for producing conductive composition
JP2006169609A (en) * 2004-12-20 2006-06-29 Erugu:Kk Plating solution, method for preparing plating solution, surface treatment method and contact member

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0539580A (en) * 1991-08-02 1993-02-19 Okuno Seiyaku Kogyo Kk Electroless palladium plating liquid
JPH05125593A (en) * 1991-11-06 1993-05-21 Nippon Steel Corp Method for producing high corrosion resistant Zn-based galvanized steel sheet
JPH05320923A (en) * 1992-05-22 1993-12-07 Nitto Boseki Co Ltd Electroless plating method and pretreating solution used for the same
JP2002004059A (en) * 2000-06-19 2002-01-09 Murata Mfg Co Ltd Electroless copper plating bath, electroless copper plating method and electronic part
JP2004277868A (en) * 2003-03-19 2004-10-07 Mitsubishi Paper Mills Ltd Method for producing conductive composition
JP2006169609A (en) * 2004-12-20 2006-06-29 Erugu:Kk Plating solution, method for preparing plating solution, surface treatment method and contact member

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010185113A (en) * 2009-02-12 2010-08-26 Kansai Univ Electroless copper-plating solution, electroless copper-plating method and method for forming embedded wiring

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