JP2008080276A - Liquid supply method, device manufacturing method, wiring board manufacturing method, color filter manufacturing method, and organic EL device manufacturing method - Google Patents

Abstract

[PROBLEMS] To provide a liquid supply method capable of suppressing generation of useless production costs and reduction in production efficiency by promptly finding a mistake in installation of piping of a supply path and liquid material. A device manufacturing method, a wiring substrate manufacturing method, a color filter manufacturing method, and an organic EL device manufacturing method are provided.
A liquid material supply method according to the present invention includes a connection step of connecting a liquid supply pipe for supplying each of a plurality of types of liquid material from a liquid material storage tank to a usable position, and a storage tank. In the trial delivery step of sending the liquid material to the supply pipe and at least sending the liquid material to a detection position where the type of the liquid material can be detected, the detection step of detecting the type of the liquid material at the detection position, and the detection step Based on the detection result, a liquid material determination step for determining whether the delivered liquid material is a predetermined liquid material, and a book for sending the liquid material to an available position based on the determination result of the liquid material determination step And a feeding step.
[Selection] Figure 18

Description

  The present invention relates to a liquid material supply method for supplying a liquid material to a position where the liquid material can be used, a device manufacturing method, a wiring board manufacturing method, a color filter manufacturing method, and an organic EL device. It relates to a manufacturing method.

  Conventionally, as a technique for forming a functional film such as a light emitting film of an organic electroluminescence (organic EL) device or a color filter film of a color liquid crystal device, a liquid material containing a functional film material is applied and the liquid material is dried. A technique for forming a functional film is known. An ink jet method is used as a technique for accurately applying a predetermined amount of a liquid material to a predetermined position. Patent Document 1 discloses a filter manufacturing apparatus and a manufacturing method using an inkjet method. Patent Document 2 discloses an electrical circuit manufacturing apparatus and manufacturing method using an ink jet method.

  In order to display a color image, for example, red, green, and blue filters, which are the three primary colors of light, are formed for each pixel. A pixel in which red, green, and blue filters are formed is a pixel of that color. A picture is obtained by changing the intensity of red, green, and blue in a unit (hereinafter referred to as “picture element”) that includes one or more of each of the red, green, and blue pixels to form a color image. Creates a primary color. In order to expand the reproducible color gamut, multicolor filters in which filters of other colors are formed in addition to red, green, and blue filters are used. The multicolor filter includes a six-color filter provided with cyan (blue-green), magenta (purple red), and yellow (yellow), which are complementary colors of red, green, and blue in addition to red, green, and blue, and cyan. There are four-color complementary color filters in which green is added to three colors of (blue green), magenta (purple red), and yellow (yellow). Patent Document 3 discloses various multicolor filters and an electro-optical panel including the multicolor filters. An ink jet apparatus that forms such a multicolor filter includes a plurality of liquid droplet ejection heads, and efficiently forms a multicolor filter by ejecting many types of liquid materials substantially in parallel.

Japanese Patent Laid-Open No. 11-248925 Japanese Patent Laid-Open No. 11-274671 JP 2002-286927 A

  However, in order to supply the liquid material to the droplet discharge heads to which the liquid material is to be supplied among the plurality of droplet discharge heads, it is necessary to provide a liquid material supply path or to supply an appropriate liquid material to the pipe. In order to supply the liquid material, it has been very complicated to handle various kinds of liquid materials in a droplet discharge apparatus having a large number of droplet discharge heads. Due to the complicated work, there has been a problem that mistakes are likely to occur in the piping of the supply path and the installation of the liquid material. In addition, if an error occurs in the piping of the supply channel or the installation of liquid material, there is a problem that it is difficult to detect the error until it is confirmed by a filter created by actually forming a functional film. It was. Since a filter or the like produced by forming an inappropriate functional film is discarded, useless production costs are incurred. In order to perform an appropriate production, it is necessary to discharge the liquid material that has been erroneously filled up to the droplet discharge head and then to fill the liquid material with an appropriate amount, resulting in a reduction in production efficiency. In particular, in a droplet discharge device used for manufacturing various types of products, it is necessary to replace supply pipes and liquid materials according to the products to be manufactured, and the frequency of occurrence of the above-mentioned problems increases. It was.

  The present invention solves the above-mentioned problem, and can quickly detect the mistake of installation of the piping of the supply path and the liquid material, thereby suppressing generation of useless production costs and reduction in production efficiency. An object is to realize a liquid material supply method, a device manufacturing method, a wiring board manufacturing method, a color filter manufacturing method, and an organic EL device manufacturing method.

  A liquid material supply method according to the present invention is a liquid material supply method for supplying a plurality of types of liquid materials individually to a usable position, and each of the plurality of types of liquid materials is supplied to a liquid material storage tank. Connecting the liquid supply pipe for supplying the liquid supply pipe to the usable position, and sending the liquid material from the storage tank to the liquid supply pipe, and sending the liquid substance to at least a detection position where the type of the liquid substance can be detected. A trial delivery step, a detection step of detecting the type of the liquid material at the detection position, and a liquid material determination step of determining whether or not the delivered liquid material is a predetermined liquid material based on a detection result in the detection step And a main delivery step of delivering the liquid material to a usable position based on the determination result of the liquid material determination step.

  According to the liquid material supply method of the present invention, in the detection step, the type of the liquid material that has been delivered to the detection position in the trial delivery step is detected, and in the liquid material determination step, the detected liquid material is a predetermined amount. It is determined whether or not it is a liquid material, that is, a liquid material to be supplied via the detection position and an appropriate liquid material to be detected at the detection position. In this delivery step, the liquid material is delivered to a usable position based on the determination result of the liquid material determination step. Of course, the liquid material is delivered to the usable position only when it is determined that the detected liquid material is an appropriate liquid material to be detected at the detection position. Thereby, it can suppress that an inappropriate liquid body is supplied to a usable position. Suppressing the need to use an inappropriate liquid material or to discharge an inappropriate liquid material that has been supplied to a usable position, generating unnecessary production costs and reducing production efficiency Can be suppressed.

  A liquid material supply method according to the present invention is a liquid material supply method for supplying a plurality of types of liquid materials individually to a usable position, and each of the plurality of types of liquid materials is supplied to a usable position. To fill the storage tank for storing the liquid material, and to send the liquid material to the supply pipe for supplying the liquid material from the storage tank to the usable position, and at least detect the type of the liquid material A trial delivery process for delivering the liquid material to a possible detection position, a detection process for detecting the type of the liquid material at the detection position, and whether the delivered liquid material is a predetermined liquid material based on the detection result in the detection process. A liquid material determining step for determining whether or not, and a main sending step for sending the liquid material to a usable position based on the determination result of the liquid material determining step.

  According to the liquid material supply method of the present invention, in the detection step, the type of the liquid material sent from the storage tank to the detection position in the trial delivery step is detected, and the liquid material detected in the liquid material determination step is detected. Is a predetermined liquid material, that is, the liquid material filled in the storage tank is a liquid material to be supplied via the detection position, and is an appropriate liquid material to be detected at the detection position. It is determined whether or not there is. In this delivery step, the liquid material is delivered to a usable position based on the determination result of the liquid material determination step. Of course, the liquid material is delivered to the usable position only when it is determined that the detected liquid material is an appropriate liquid material to be detected at the detection position. Accordingly, it is possible to prevent the inappropriate liquid material from being supplied to the usable position by filling the storage tank with the inappropriate liquid material. Suppressing the generation of wasteful production costs and lowering of production efficiency by suppressing the use of inappropriate liquids or the need to discharge supplied inappropriate liquids Can do.

  In the present invention, in the liquid material supply method, the detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the storage tank of the liquid supply pipe. It is preferable.

  According to this liquid material supply method, in order to detect whether or not the liquid material is a predetermined liquid material in the vicinity of the storage tank, the distance for sending the liquid material is shortened for detection, and the liquid material to be delivered The amount can be reduced.

  In the present invention, the liquid supply method is such that the detection position is a transparent portion formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the usable position of the liquid supply pipe. Preferably it is.

  According to this liquid material supply method, since it is detected whether the liquid material is a predetermined liquid material in the vicinity of the usable position, there is almost no possibility of crossing of piping between the detection position and the usable position. Absent. Therefore, it is possible to reliably detect whether or not the liquid material supplied to the use position is a predetermined liquid material as compared with the case where the detection position and the usable position are separated from each other.

  In the present invention, the liquid supply method preferably detects the type of the liquid by detecting the transmittance of light transmitted through the liquid in the transparent portion.

  According to this liquid material supply method, by detecting the light transmittance of the temporarily delivered liquid material, the detected transmittance is compared with the appropriate liquid material, thereby comparing the liquid material with the liquid material. It is possible to determine whether or not is an appropriate liquid.

  In the present invention, the liquid supply method preferably detects the type of the liquid by detecting the wavelength dispersion of the light reflected from the liquid in the transparent portion.

  According to this liquid supply method, it is possible to identify the elements contained in the liquid by detecting the wavelength dispersion of the temporarily delivered liquid, so that the elements contained in the liquid are identified. By doing so, it can be determined whether or not the liquid is an appropriate liquid.

  A device manufacturing method according to the present invention is a device manufacturing method in which a functional liquid containing a material constituting a device is disposed on a substrate to form the device, and the functional liquid is stored on the substrate from a functional liquid storage tank. A connecting step of connecting a liquid supply pipe for supplying the functional liquid to the arrangement section to be arranged at the position, and sending the functional liquid from the storage tank to the liquid supply pipe, at least to a detection position where the type of the functional liquid can be detected Based on the test delivery process for delivering the functional liquid, the detection process for detecting the type of the functional liquid at the detection position, and the detection result in the detection process, it is determined whether the delivered functional liquid is a predetermined functional liquid. It has a functional liquid determination process, and the main delivery process which sends out a functional liquid to an arrangement | positioning part based on the determination result of a functional liquid determination process.

  According to the device manufacturing method of the present invention, in the detection process, the type of the functional liquid that has been sent to the detection position in the trial delivery process is detected, and the detected functional liquid has a predetermined function in the functional liquid determination process. It is determined whether or not the liquid is a functional liquid that is to be supplied via the detection position and is an appropriate functional liquid to be detected at the detection position. In the main delivery process, the functional liquid is delivered to the placement unit based on the determination result of the functional liquid determination process. Of course, the functional liquid is delivered to the placement unit only when it is determined that the detected functional liquid is an appropriate functional liquid to be detected at the detection position. Thereby, it can suppress that an inappropriate functional liquid is supplied to an arrangement | positioning part. Unnecessary production costs are suppressed by preventing inappropriate devices from being manufactured by using inappropriate functional fluids or discharging the inappropriate functional fluid supplied to the placement section. Generation and a decrease in production efficiency can be suppressed.

  A device manufacturing method according to the present invention is a device manufacturing method in which a functional liquid containing a material constituting a device is disposed on a substrate to form a device, and the device is disposed on the disposition portion where the functional liquid is disposed on the substrate. In order to supply the functional liquid to the storage tank for storing the functional liquid, a filling process for filling the functional liquid, and the functional liquid is sent from the storage tank to the liquid supply pipe for supplying the functional liquid to the arrangement unit, at least, A trial delivery process for delivering the functional liquid to a detection position where the type of the functional liquid can be detected, a detection process for detecting the type of the functional liquid at the detection position, and a functional liquid that has been delivered based on the detection result in the detection process A functional liquid determining step for determining whether or not the liquid is a predetermined functional liquid, and a main sending step for sending the functional liquid to the placement unit based on the determination result of the functional liquid determining step.

  According to the device manufacturing method of the present invention, in the detection process, the type of the functional liquid sent from the storage tank to the detection position in the trial delivery process is detected, and the detected functional liquid is detected in the functional liquid determination process. Whether the functional liquid is a predetermined functional liquid, that is, the functional liquid filled in the storage tank is a functional liquid to be supplied via the detection position, and is an appropriate functional liquid to be detected at the detection position. It is determined whether or not. In the main delivery process, the functional liquid is delivered to the placement unit based on the determination result of the functional liquid determination process. Of course, the functional liquid is delivered to the placement unit only when it is determined that the detected functional liquid is an appropriate functional liquid to be detected at the detection position. Thereby, it can suppress that an inappropriate functional liquid is supplied to an arrangement | positioning part by filling the storage tank with the inappropriate functional liquid. The use of improper functional fluid suppresses the production of inappropriate devices and the need to discharge the supplied improper functional fluid, resulting in unnecessary production costs. Therefore, it is possible to suppress a decrease in production efficiency.

  In the present invention, in the device manufacturing method, the detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the storage tank of the liquid supply pipe. Is preferred.

  According to this device manufacturing method, in order to detect whether or not the functional liquid is a predetermined functional liquid in the vicinity of the storage tank, the distance for sending the functional liquid for detection is shortened and the amount of the functional liquid to be sent out Can be reduced.

  In the present invention, the device manufacturing method is such that the detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the arrangement part of the liquid supply pipe. Is preferred.

  According to this device manufacturing method, since it is detected whether the functional liquid is a predetermined functional liquid in the vicinity of the arrangement portion, there is almost no possibility of crossing of piping between the detection position and the arrangement portion. Therefore, it can be detected more reliably whether or not the functional liquid supplied to the arrangement portion is a predetermined functional liquid as compared with the case where the detection position and the arrangement portion are separated from each other.

  In the present invention, it is preferable that the device manufacturing method detects the type of the functional liquid by detecting the transmittance of light transmitted through the functional liquid in the transparent portion.

  According to this device manufacturing method, by detecting the light transmittance of the temporarily delivered functional liquid, comparing the detected transmittance with the appropriate functional liquid transmittance, It can be determined whether or not the functional fluid is appropriate.

  In the present invention, the device manufacturing method preferably detects the type of the functional liquid by detecting the wavelength dispersion of the light reflected from the functional liquid in the transparent portion.

  According to this device manufacturing method, it is possible to identify the element contained in the functional liquid by detecting the wavelength dispersion of the temporarily delivered functional liquid, and thus identify the element contained in the functional liquid. Thus, it can be determined whether the functional liquid is an appropriate functional liquid.

  A method of manufacturing a wiring board according to the present invention is a method of manufacturing a wiring board in which a functional liquid containing a material constituting the wiring board is disposed on a base material to form the wiring board, and the functional liquid is stored from a functional liquid storage tank. Connecting the liquid supply pipe for supplying the functional liquid to the placement section where the liquid is placed on the base material, and sending the functional liquid from the storage tank to the liquid supply pipe, at least detecting the type of the functional liquid A trial delivery process for delivering the functional liquid to a proper detection position, a detection process for detecting the type of the functional liquid at the detection position, and whether the delivered functional liquid is a predetermined functional liquid based on the detection result in the detection process It is characterized by having a functional liquid determining step for determining whether or not and a main sending step for sending the functional liquid to the placement unit based on the determination result of the functional liquid determining step.

  According to the method for manufacturing a wiring board according to the present invention, in the detection step, the type of the functional liquid that has been delivered to the detection position in the trial delivery step is detected, and in the functional liquid determination step, the detected functional liquid is predetermined. It is determined whether or not it is a functional liquid, that is, a functional liquid that is to be supplied via the detection position and is an appropriate functional liquid that should be detected at the detection position. In the main delivery process, the functional liquid is delivered to the placement unit based on the determination result of the functional liquid determination process. Of course, the functional liquid is delivered to the placement unit only when it is determined that the detected functional liquid is an appropriate functional liquid to be detected at the detection position. Thereby, it can suppress that an inappropriate functional liquid is supplied to an arrangement | positioning part. Unnecessary production by preventing inappropriate circuit wiring from being formed by using inappropriate functional liquids or the need to discharge inappropriate functional liquid supplied to the placement section Costs and production efficiency can be prevented from decreasing.

  A method for manufacturing a wiring board according to the present invention is a method for manufacturing a wiring board in which a functional liquid containing a material constituting the wiring board is disposed on a base material to form the wiring board, and the functional liquid is disposed on the base material. The functional liquid is supplied to the storage tank for storing the functional liquid in order to supply the functional liquid to the arrangement section to be filled, and the liquid supply pipe for supplying the functional liquid from the storage tank to the arrangement section. And at least a trial delivery process for delivering the functional liquid to a detection position where the type of the functional liquid can be detected, a detection process for detecting the type of the functional liquid at the detection position, and a detection result in the detection process. A functional liquid determining step for determining whether the functional liquid is a predetermined functional liquid, and a main sending step for sending the functional liquid to the placement unit based on the determination result of the functional liquid determining step. And

  According to the method for manufacturing a wiring board according to the present invention, in the detection process, the type of the functional liquid sent from the storage tank to the detection position in the test delivery process is detected, and the functional liquid detected in the functional liquid determination process is detected. Is a predetermined functional liquid, that is, the functional liquid filled in the storage tank is a functional liquid to be supplied via the detection position, and is an appropriate functional liquid to be detected at the detection position. It is determined whether or not there is. In the main delivery process, the functional liquid is delivered to the placement unit based on the determination result of the functional liquid determination process. Of course, the functional liquid is delivered to the placement unit only when it is determined that the detected functional liquid is an appropriate functional liquid to be detected at the detection position. Thereby, it can suppress that an inappropriate functional liquid is supplied to an arrangement | positioning part by filling the storage tank with the inappropriate functional liquid. Inappropriate production fluid is generated by preventing inappropriate circuit wiring from being formed due to the use of inappropriate functional fluid, and the necessity of discharging the supplied inappropriate functional fluid. In addition, a decrease in production efficiency can be suppressed.

  In the present invention, in the method of manufacturing a wiring board, the detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the storage tank of the liquid supply pipe. It is preferable.

  According to this method of manufacturing a wiring board, in order to detect whether or not the functional liquid is a predetermined functional liquid in the vicinity of the storage tank, the distance for sending the functional liquid for detection is shortened, and the functional liquid to be sent The amount can be reduced.

  In the present invention, in the method for manufacturing a wiring board, the detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the arrangement part of the liquid supply pipe. It is preferable.

  According to this method of manufacturing a wiring board, since it is detected whether the functional liquid is a predetermined functional liquid in the vicinity of the arrangement portion, there is almost no possibility of crossing of piping between the detection position and the arrangement portion. Therefore, it can be detected more reliably whether or not the functional liquid supplied to the arrangement portion is a predetermined functional liquid as compared with the case where the detection position and the arrangement portion are separated from each other.

  In this invention, it is preferable that the manufacturing method of a wiring board detects the kind of functional liquid by detecting the transmittance | permeability of the light which permeate | transmits the functional liquid of a transparent part.

  According to this method for manufacturing a wiring board, by detecting the light transmittance of the temporarily delivered functional liquid, the detected liquid transmittance is compared with the appropriate functional liquid transmittance, thereby comparing the functional liquid. It can be determined whether or not is an appropriate functional liquid.

  In this invention, it is preferable that the manufacturing method of a wiring board detects the kind of functional liquid by detecting the wavelength dispersion of the light reflected from the functional liquid of the transparent part.

  According to this method of manufacturing a wiring board, it is possible to identify the elements contained in the functional liquid by detecting the wavelength dispersion of the temporarily delivered functional liquid. By doing so, it can be determined whether the functional liquid is an appropriate functional liquid.

  In the present invention, in the method for manufacturing a wiring board, the functional liquid is preferably a functional liquid containing a conductive material that forms wiring.

  According to this method for manufacturing a wiring board, it is possible to suppress an inappropriate functional liquid from being supplied to the placement unit as a functional liquid including a conductive material that forms wiring. Inappropriate production fluid is generated by preventing inappropriate circuit wiring from being formed due to the use of inappropriate functional fluid, and the necessity of discharging the supplied inappropriate functional fluid. In addition, a decrease in production efficiency can be suppressed.

  A color filter manufacturing method according to the present invention is a color filter manufacturing method in which a functional liquid containing a material constituting a color filter is disposed on a substrate to form a color filter, and the functional liquid is stored in a functional liquid storage tank. Connecting the liquid supply pipe for supplying the functional liquid to the placement section where the liquid is placed on the base material, and sending the functional liquid from the storage tank to the liquid supply pipe, at least detecting the type of the functional liquid A trial delivery process for delivering the functional liquid to a proper detection position, a detection process for detecting the type of the functional liquid at the detection position, and whether the delivered functional liquid is a predetermined functional liquid based on the detection result in the detection process It is characterized by having a functional liquid determining step for determining whether or not and a main sending step for sending the functional liquid to the placement unit based on the determination result of the functional liquid determining step.

  According to the color filter manufacturing method of the present invention, in the detection process, the type of the functional liquid that has been delivered to the detection position in the trial delivery process is detected, and in the functional liquid determination process, the detected functional liquid is It is determined whether or not it is a functional liquid, that is, a functional liquid that is to be supplied via the detection position and is an appropriate functional liquid that should be detected at the detection position. In the main delivery process, the functional liquid is delivered to the placement unit based on the determination result of the functional liquid determination process. Of course, the functional liquid is delivered to the placement unit only when it is determined that the detected functional liquid is an appropriate functional liquid to be detected at the detection position. Thereby, it can suppress that an inappropriate functional liquid is supplied to an arrangement | positioning part. Unnecessary production by suppressing the formation of an inappropriate filter film due to the use of an inappropriate functional liquid or the need to discharge the inappropriate functional liquid supplied to the placement section Costs and production efficiency can be prevented from decreasing.

  A color filter manufacturing method according to the present invention is a color filter manufacturing method in which a functional liquid containing a material constituting a color filter is disposed on a substrate to form a color filter, and the functional liquid is disposed on the substrate. The functional liquid is supplied to the storage tank for storing the functional liquid in order to supply the functional liquid to the arrangement section to be filled, and the liquid supply pipe for supplying the functional liquid from the storage tank to the arrangement section. And at least a trial delivery process for delivering the functional liquid to a detection position where the type of the functional liquid can be detected, a detection process for detecting the type of the functional liquid at the detection position, and a detection result in the detection process. A functional liquid determining step for determining whether the functional liquid is a predetermined functional liquid, and a main sending step for sending the functional liquid to the placement unit based on the determination result of the functional liquid determining step. To

  According to the color filter manufacturing method of the present invention, in the detection process, the type of the functional liquid sent from the storage tank to the detection position in the test delivery process is detected, and the detected functional liquid in the functional liquid determination process. Is a predetermined functional liquid, that is, the functional liquid filled in the storage tank is a functional liquid to be supplied via the detection position, and is an appropriate functional liquid to be detected at the detection position. It is determined whether or not there is. In the main delivery process, the functional liquid is delivered to the placement unit based on the determination result of the functional liquid determination process. Of course, the functional liquid is delivered to the placement unit only when it is determined that the detected functional liquid is an appropriate functional liquid to be detected at the detection position. Thereby, it can suppress that an inappropriate functional liquid is supplied to an arrangement | positioning part by filling the storage tank with the inappropriate functional liquid. Useless production costs are prevented by preventing inappropriate filter films from being formed by using inappropriate functional liquids and the need to discharge the supplied inappropriate functional liquids. In addition, a decrease in production efficiency can be suppressed.

  In the present invention, in the color filter manufacturing method, the detection position is a transparent portion formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the storage tank of the liquid supply pipe. It is preferable.

  According to this color filter manufacturing method, by detecting whether or not the functional liquid is a predetermined functional liquid in the vicinity of the storage tank, the distance for sending the functional liquid for detection is shortened, and the functional liquid to be sent is sent The amount of can be reduced.

  In the present invention, in the color filter manufacturing method, the detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the arrangement part of the liquid supply pipe. It is preferable.

  According to this color filter manufacturing method, it is detected whether or not the functional liquid is a predetermined functional liquid in the vicinity of the arrangement portion, so there is almost no possibility of crossing of piping between the detection position and the arrangement portion. Therefore, it can be detected more reliably whether or not the functional liquid supplied to the arrangement portion is a predetermined functional liquid as compared with the case where the detection position and the arrangement portion are separated from each other.

  In the present invention, the color filter manufacturing method preferably detects the type of the functional liquid by detecting the transmittance of light transmitted through the functional liquid in the transparent portion.

  According to this color filter manufacturing method, by detecting the light transmittance of the temporarily delivered functional liquid, and comparing whether the detected transmittance is equal to the appropriate functional liquid transmittance, It can be determined whether or not is an appropriate functional liquid.

  In this invention, it is preferable that the manufacturing method of a color filter detects the kind of functional liquid by detecting the wavelength dispersion of the light reflected from the functional liquid of the transparent part.

  According to this color filter manufacturing method, it is possible to identify the elements contained in the functional liquid by detecting the wavelength dispersion of the temporarily delivered functional liquid. By doing so, it can be determined whether the functional liquid is an appropriate functional liquid.

  In this invention, it is preferable that the manufacturing method of a color filter is a functional liquid in which a functional liquid contains the colored layer forming material which forms the colored layer of a color filter.

  According to this method for manufacturing a color filter, it is possible to suppress an inappropriate functional liquid from being supplied to the placement unit as a functional liquid including a colored layer forming material for forming a colored layer. Inappropriate colored layers are formed by using an inappropriate functional liquid, or it is necessary to discharge the supplied inappropriate functional liquid, resulting in unnecessary production costs. In addition, a decrease in production efficiency can be suppressed.

  The method for manufacturing an organic EL device (organic electroluminescence device) according to the present invention is a method for manufacturing an organic EL device in which an organic EL device is formed by disposing a functional liquid containing a material constituting the organic EL device on a substrate. In addition, a connection process for connecting a supply liquid pipe for supplying the functional liquid to the arrangement part for disposing the functional liquid on the base material from the storage tank for the functional liquid, and sending the functional liquid from the storage tank to the supply pipe And at least a trial delivery process for delivering the functional liquid to a detection position where the type of the functional liquid can be detected, a detection process for detecting the type of the functional liquid at the detection position, and a detection result in the detection process. A functional liquid determining step for determining whether the functional liquid is a predetermined functional liquid, and a main sending step for sending the functional liquid to the placement unit based on the determination result of the functional liquid determining step. And

  According to the manufacturing method of the organic EL device (organic electroluminescence device) according to the present invention, in the detection process, the type of the functional liquid that has been sent to the detection position in the trial delivery process is detected, and in the functional liquid determination process, Whether the detected functional liquid is a predetermined functional liquid, that is, whether the functional liquid is to be supplied via the detection position and is an appropriate functional liquid to be detected at the detection position. Determined. In the main delivery process, the functional liquid is delivered to the placement unit based on the determination result of the functional liquid determination process. Of course, the functional liquid is delivered to the placement unit only when it is determined that the detected functional liquid is an appropriate functional liquid to be detected at the detection position. Thereby, it can suppress that an inappropriate functional liquid is supplied to an arrangement | positioning part. Unnecessary production by suppressing the formation of an inappropriate functional film by using an inappropriate functional liquid or the need to discharge the inappropriate functional liquid supplied to the placement section Costs and production efficiency can be prevented from decreasing.

  A method for manufacturing an organic EL device according to the present invention is a method for manufacturing an organic EL device in which an organic EL device is formed by disposing a functional liquid containing a material constituting the organic EL device on a substrate. A filling step for filling the storage tank for storing the functional liquid in order to supply the functional liquid to the arrangement portion arranged on the material, and a liquid supply pipe for supplying the functional liquid from the storage tank to the arrangement portion. Based on the test delivery process of delivering the functional liquid to at least the detection position where the type of the functional liquid can be detected, the detection process for detecting the type of the functional liquid at the detection position, and the detection result in the detection process A functional liquid determination step for determining whether the delivered functional liquid is a predetermined functional liquid, and a main liquid supply step for sending the functional liquid to the placement unit based on the determination result of the functional liquid determination step. It is characterized by having.

  According to the method for manufacturing an organic EL device according to the present invention, in the detection process, the type of the functional liquid that has been sent from the storage tank to the detection position in the test delivery process is detected, and the function that has been detected in the functional liquid determination process. Whether or not the liquid is a predetermined functional liquid, that is, the functional liquid filled in the storage tank is a functional liquid to be supplied via the detection position, and an appropriate functional liquid to be detected at the detection position It is determined whether or not. In the main delivery process, the functional liquid is delivered to the placement unit based on the determination result of the functional liquid determination process. Of course, the functional liquid is delivered to the placement unit only when it is determined that the detected functional liquid is an appropriate functional liquid to be detected at the detection position. Thereby, it can suppress that an inappropriate functional liquid is supplied to an arrangement | positioning part by filling the storage tank with the inappropriate functional liquid. Inappropriate functional fluid is used to prevent the formation of an inappropriate functional film or the need to discharge the supplied inappropriate functional fluid, resulting in unnecessary production costs In addition, a decrease in production efficiency can be suppressed.

  In the present invention, the manufacturing method of the organic EL device is such that the detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the storage tank of the liquid supply pipe. Preferably it is.

  According to this method of manufacturing an organic EL device, in order to detect whether or not the functional liquid is a predetermined functional liquid in the vicinity of the storage tank, the functional liquid to be sent is shortened and the functional liquid is sent for detection. The amount of can be reduced.

  In the present invention, the manufacturing method of the organic EL device is such that the detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the arrangement part of the liquid supply pipe. Preferably it is.

  According to this method for manufacturing an organic EL device, since it is detected whether the functional liquid is a predetermined functional liquid in the vicinity of the arrangement portion, there is almost no possibility of crossing of piping between the detection position and the arrangement portion. . Therefore, it can be detected more reliably whether or not the functional liquid supplied to the arrangement portion is a predetermined functional liquid as compared with the case where the detection position and the arrangement portion are separated from each other.

  In this invention, it is preferable that the manufacturing method of an organic electroluminescent apparatus detects the kind of functional liquid by detecting the transmittance | permeability of the light which permeate | transmits the functional liquid of a transparent part.

  According to this method for manufacturing an organic EL device, by detecting the light transmittance of the temporarily delivered functional liquid, it is possible to compare the detected transmittance with the appropriate functional liquid. It can be determined whether or not the liquid is an appropriate functional liquid.

  In this invention, it is preferable that the manufacturing method of an organic electroluminescent apparatus detects the kind of functional liquid by detecting the wavelength dispersion of the light reflected from the functional liquid of the transparent part.

  According to this method of manufacturing an organic EL device, it is possible to identify the elements contained in the functional liquid by detecting the wavelength dispersion of the temporarily delivered functional liquid. By specifying, it can be determined whether the functional fluid is an appropriate functional fluid.

  In the present invention, the method for producing an organic EL device is a functional liquid in which the functional liquid includes a light emitting layer forming material for forming a light emitting layer of the organic EL apparatus or a hole transport layer forming material for forming a hole transport layer. It is preferable.

  According to this method for manufacturing an organic EL device, an inappropriate functional liquid includes a functional liquid that includes a light emitting layer forming material that forms a light emitting layer, or a functional liquid that includes a hole transport layer forming material that forms a hole transport layer. It is possible to suppress the supply to the placement unit. It is possible to prevent unnecessary light emitting layer or hole transport layer from being formed by using an inappropriate functional liquid, or to discharge the supplied inappropriate functional liquid. Generation costs and a decrease in production efficiency can be suppressed.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS An embodiment of a liquid supply method, a device manufacturing method, a wiring board manufacturing method, a color filter manufacturing method, and an organic EL device manufacturing method according to the present invention will be described below with reference to the drawings. Embodiments of the present invention include a step of manufacturing a wiring substrate that is an example of a device, a step of manufacturing a color filter substrate of a liquid crystal display panel that constitutes a liquid crystal display device that is an example of a device, and an organic EL that is an example of a device. A method for supplying a functional liquid, which is an example of a liquid material used for forming a functional film in the process of manufacturing a display device, will be described as an example. The functional liquid supply method is used, for example, as a supply method for supplying a functional liquid to a droplet discharge head in a droplet discharge device used for manufacturing a color filter substrate or an organic EL display device.

(First embodiment)
First, a first embodiment which is an embodiment of a liquid supply method, a device manufacturing method, and a color filter manufacturing method according to the present invention will be described. The present embodiment relates to a droplet discharge device used in a step of forming partition walls and color elements, which are examples of functional films, in the process of manufacturing a color filter of a liquid crystal display device, which is an example of a device, and the droplet discharge device An example of the functional liquid supply method will be described.

<Droplet ejection method>
First, a droplet discharge method used for forming a color filter or the like will be described. Examples of the discharge technique of the droplet discharge method include a charge control method, a pressure vibration method, an electromechanical conversion method, an electrothermal conversion method, and an electrostatic suction method. In the charge control method, a charge is applied to a material with a charging electrode, and the flight direction of the material is controlled with a deflection electrode to be discharged from a discharge nozzle. In addition, the pressure vibration method is a method in which an ultra-high pressure of about 30 kg / cm ² is applied to the material to discharge the material to the tip side of the discharge nozzle. When no control voltage is applied, the material moves straight and the discharge nozzle When a control voltage is applied, electrostatic repulsion occurs between the materials, and the materials are scattered and are not discharged from the discharge nozzle. The electromechanical conversion method utilizes the property that a piezoelectric element (piezoelectric element) is deformed by receiving a pulse-like electric signal. The piezoelectric element is deformed through a flexible substance in a space where material is stored. Pressure is applied, and the material is extruded from this space and discharged from the discharge nozzle.

  In the electrothermal conversion method, a material is rapidly vaporized by a heater provided in a space in which the material is stored to generate bubbles, and the material in the space is discharged by the pressure of the bubbles. In the electrostatic attraction method, a minute pressure is applied to a space in which a material is stored, a meniscus of material is formed on the discharge nozzle, and an electrostatic attractive force is applied in this state before the material is drawn out. In addition to this, techniques such as a system that uses a change in the viscosity of a fluid due to an electric field and a system that uses a discharge spark are also applicable. The droplet discharge method has an advantage that the use of the material is less wasteful and a desired amount of the material can be accurately disposed at a desired position. Among these, the piezo method has an advantage that it does not affect the composition of the material because it does not apply heat to the liquid material. In the present embodiment, the above piezo method is used from the viewpoint of the high degree of freedom in selecting the liquid material and the good controllability of the droplets.

<Droplet ejection device>
Next, a droplet discharge apparatus 1 that supplies a functional liquid to the droplet discharge head 20 (see FIG. 2) using the liquid supply method of the present invention will be described. First, the overall configuration of the droplet discharge device 1 will be described with reference to FIG. FIG. 1 is an external perspective view showing a schematic configuration of a droplet discharge device.

  As shown in FIG. 1, the droplet discharge device 1 includes a head mechanism unit 2 having a droplet discharge head 20 that discharges a liquid functional liquid 40 (see FIG. 4) as droplets, and a droplet discharge head 20. A work mechanism unit 3 having a work mounting table 31 on which a work 30 that is a discharge target of liquid droplets discharged from the apparatus is mounted; a functional liquid supply unit 4 that supplies the functional liquid 40 to the liquid droplet discharge head 20; And a maintenance device unit 5 that performs maintenance of the droplet discharge head 20. In addition, a discharge device control unit 6 is provided for comprehensively controlling these mechanism units.

  The droplet discharge device 1 further includes a plurality of support legs 8 installed on the floor and a surface plate 9 installed on the upper side of the support legs 8. On the upper side of the surface plate 9, the work mechanism unit 3 is disposed so as to extend in the longitudinal direction (X-axis direction) of the surface plate 9. Above the work mechanism unit 3, the head mechanism unit 2 supported by two support columns 26 fixed to the surface plate 9 extends in a direction perpendicular to the work mechanism unit 3 (Y-axis direction). Arranged. Further, a functional liquid tank 41 of the functional liquid supply unit 4 having a supply pipe 46 (461, 462, 463) communicating with the droplet discharge head 20 of the head mechanism unit 2 is disposed beside the surface plate 9. Yes. In the vicinity of one support column 26 of the head mechanism unit 2, the maintenance device unit 5 is arranged in the X-axis direction along with the work mechanism unit 3. Further, the discharge device controller 6 is accommodated below the surface plate 9.

  The head mechanism unit 2 includes a head unit 21 having a droplet discharge head 20 (see FIG. 3), a head carriage 22 that supports the head unit 21, and a Y-axis scanning mechanism 25 that moves the head carriage 22 in the Y-axis direction. It is equipped with. The head unit 21 is supported by a head carriage 22 so as to be rotatable in the θ direction of FIG. 1 by a head rotation mechanism 22a (see FIG. 5) (not shown). The Y-axis scanning mechanism 25 includes a Y-axis guide 23 that guides the movement of the head carriage 22 in the Y-axis direction, and a Y-axis linear motor 24 that is installed on the side of the Y-axis guide 23 in parallel with the Y-axis guide 23. It is equipped with. The head carriage 22 is movably attached to the Y-axis guide 23. A functional liquid supply unit 47 having a relay tank 43 is attached to the upper surface of the head carriage 22.

  With these configurations, the droplet discharge head 20 can freely move in the Y-axis direction. Although not shown in the drawings, a protrusion protruding from the head carriage 22 toward the Y-axis linear motor 24 engages with the Y-axis linear motor 24 and receives a driving force from the Y-axis linear motor 24. Is moved to an arbitrary position along the Y-axis guide 23. Moreover, it is held at the moved position.

  The workpiece mechanism unit 3 is located below the head mechanism unit 2 and moves the workpiece mounting table 31 on which the workpiece 30 is mounted, the slide table 31A that supports the workpiece mounting table 31, and the slide table 31A in the X-axis direction. An X-axis scanning mechanism 35. The workpiece mounting table 31 is fixed and supported on the slide table 31A so as to be rotatable in the θ direction of FIG. 1 by a workpiece rotation mechanism 31a (see FIG. 5) (not shown). The X-axis scanning mechanism 35 includes an X-axis guide 33 that guides the movement of the slide base 31 </ b> A in the X-axis direction, and an X-axis linear motor 34 that is installed on the side of the X-axis guide 33 in parallel with the X-axis guide 33. I have. The slide base 31 </ b> A is movably attached to the X-axis guide 33.

  With these configurations, the work 30 placed on the work placement table 31 can freely move in the X-axis direction. The protrusion protruding from the slide base 31 </ b> A toward the X-axis linear motor 34 engages with the X-axis linear motor 34 and receives a driving force from the X-axis linear motor 34, so that the slide base 31 </ b> A becomes the X-axis guide 33. It is moved to any position along. Moreover, it is held at the moved position.

  Thus, the droplet discharge head 20 moves to the discharge position in the Y-axis direction and stops, and discharges the functional liquid 40 as droplets in synchronization with the movement of the workpiece 30 below in the X-axis direction. It has become. By relatively controlling the workpiece 30 moving in the X-axis direction and the droplet discharge head 20 moving in the Y-axis direction, a desired drawing can be performed by landing droplets at an arbitrary position on the workpiece 30. Etc. can be performed.

  The maintenance device unit 5 includes a capping unit 56, a wiping unit 57, and a flushing unit 58, which are maintenance units. Furthermore, a maintenance carriage 51 on which these maintenance units are placed, a maintenance carriage guide 52 for guiding the movement of the maintenance carriage 51, a screwing portion 55 integral with the maintenance carriage 51, and a ball into which the screwing portion 55 is screwed. A screw 54 and a maintenance motor 53 that rotates the ball screw 54 are provided. Further, a waste liquid collection pipe 48 and a waste liquid tank 44, and a waste liquid collection pipe 49 and a waste liquid tank 45 are provided.

  When the maintenance motor 53 rotates forward and backward, the ball screw 54 rotates, and the maintenance carriage 51 moves in the X-axis direction via the screwing portion 55. When performing maintenance of the droplet discharge head 20, the maintenance carriage is moved so that the capping unit 56, the wiping unit 57, or the flushing unit 58 corresponding to the maintenance to be performed moves to a position that can face the droplet discharge head 20. 51 is moved. The head carriage 22 moves to the position directly above the maintenance unit along the Y-axis guide 23, and the droplet discharge head 20 is moved to a position facing the maintenance unit.

  The capping unit 56 includes twelve droplet discharge heads 20 (head main body 70A) fixed to the head unit 21 described later with reference to FIG. 3 when the droplet discharge device 1 is not in operation (see FIG. 2). Capping closely with each of. By capping, it is possible to suppress the occurrence of problems such as drying of the functional liquid 40 and clogging of the discharge nozzle 72 (see FIG. 2) of the droplet discharge head 20. In addition, when the functional liquid 40 is replaced, a new functional liquid 40 is supplied by sucking and discharging the old functional liquid 40 from the droplet discharge head 20 by a suction pump (not shown). To the droplet discharge head 20. The wiping unit 57 wipes the functional liquid 40 adhering to the nozzle forming surface 71a of the nozzle forming plate 71 of the droplet discharge head 20 with a wiping cloth containing a cleaning liquid after continuous discharge of the functional liquid 40 or before capping. The nozzle forming surface 71a of the droplet discharge head 20 is brought into a clean state. The flushing unit 58 receives the functional liquid 40 discharged from the droplet discharge head 20 as flushing at the start of operation of the droplet discharge device 1 or before, during or after the processing of the workpiece 30. The discharge state is maintained satisfactorily.

  The waste liquid collection pipe 48 and the waste liquid tank 44 and the waste liquid collection pipe 49 and the waste liquid tank 45 are functional liquids discharged or sucked from the droplet discharge head 20 when the maintenance of the droplet discharge head 20 is performed in the maintenance device unit 5. 40 is recovered as waste liquid. The functional liquid 40 sucked by the capping unit 56 is collected in the waste liquid tank 44 via the waste liquid recovery pipe 48 and recovered as waste liquid. The droplets of the functional liquid 40 received by the flushing unit 58 are collected in the waste liquid tank 45 via the waste liquid recovery pipe 49 and collected as waste liquid.

  With these maintenance units, the state of the droplet discharge head 20 can be maintained and a good discharge state can be maintained when the droplet discharge apparatus 1 is not in operation or when the workpiece 30 is waiting to be exchanged. Is possible.

  The functional liquid supply unit 4 that supplies the functional liquid 40 (see FIG. 4) to the droplet discharge head 20 includes a functional liquid tank 41, a sub tank 42, and a relay tank 43 for supplying the functional liquid. A supply unit 47 and a supply pipe 46 for supplying the functional liquid 40 from the functional liquid tank 41 to the liquid droplet ejection head 20 through communication between these tanks and the liquid droplet ejection head 20 are provided. The supply pipe 46 is made of a colorless and transparent material. A supply pipe 46 that connects the functional liquid tank 41 and the sub tank 42 is connected to the supply pipe 461, a supply pipe 46 that connects the sub tank 42 and the relay tank 43 is connected to the supply pipe 462, and the relay tank 43 and the droplet discharge head 20 are connected. The supply pipe 46 is referred to as a supply pipe 463.

  Further, a pressure applying unit 60 for adjusting the internal pressure of the functional liquid tank 41 or the sub tank 42 via the functional liquid tank pressure pipe 64 or the sub tank pressure pipe 65 and supplying the functional liquid 40 to the droplet discharge head 20; It has. Furthermore, a first liquid detector 11 and a second liquid detector 12 (see FIG. 4), which are liquid detectors for detecting the type of the functional liquid 40 flowing in the supply pipe 46, are provided. The droplet discharge device 1 of the present embodiment includes six sets of the functional liquid tank 41, the sub tank 42, and the relay tank 43, and can handle six types of functional liquids in parallel. The supply of the functional liquid 40 will be described later in detail with reference to FIG.

<Droplet ejection head>
Next, the droplet discharge head 20 will be described with reference to FIG. FIG. 2 is an external perspective view of the droplet discharge head as viewed from the nozzle forming plate side. The droplet discharge head 20 is a so-called two-unit type, a liquid introduction unit 75 having two connection needles 76, 76, a two-head head substrate 77 continuous to the side of the liquid introduction unit 75, and a liquid Two pump parts 78 connected to the introduction part 75 and a nozzle forming plate 71 connected to the pump part 78 are provided. A supply pipe 463 is connected to the liquid introducing portion 75 via a pipe connecting member, and a pair of head connectors 77A and 77A are mounted on the head substrate 77, and a flexible flat cable is connected via the head connector 77A. Connected. On the other hand, the pump portion 78 and the nozzle forming plate 71 constitute a square head main body 70A.

  On the base side of the pump portion 78, that is, the base side of the head main body 70 </ b> A, a flange portion 74 is formed in a square flange shape so as to receive the liquid introduction portion 75. A pair of screw holes (internal threads) 79 for small screws for fixing the droplet discharge head 20 to the sub head holding member 83 (see FIG. 3) are formed in the flange portion 74. The droplet discharge head 20 is fixed to the sub head holding member 83 by a head set screw that passes through the sub head holding member 83 and is screwed into the screw hole 79 (see FIG. 3).

  On the nozzle forming surface 71 a of the nozzle forming plate 71, two nozzle rows 73 are formed which are formed on the nozzle forming plate 71 and are composed of discharge nozzles 72 that discharge droplets. The two nozzle rows 73 are arranged in parallel to each other, and each nozzle row 73 includes 180 (schematically illustrated) discharge nozzles 72 arranged at an equal pitch. That is, two nozzle rows 73 are symmetrically arranged on the nozzle forming surface 71a of the head body 20A with the center line therebetween.

<Head unit>
Next, the overall configuration of the head unit 21 will be described with reference to FIG. FIG. 3 is an external perspective view of the head unit. 3A is an external perspective view of the head unit as viewed from the liquid introduction part side of the attached droplet discharge head, and FIG. 3B is a nozzle of the droplet discharge head to which the head unit is attached. It is the external appearance perspective view seen from the plate side. As shown in FIG. 3, the droplet discharge head 20 is attached to the unit plate 81 of the head unit 21 via a main head holding member 82 and a sub head holding member 83. The main head holding member 82 and the sub head holding member 83 are used for positioning the droplet discharge head 20 with respect to the unit plate 81 with high accuracy and for easy attachment / detachment to / from the unit plate 81.

  One head unit 21 includes twelve droplet discharge heads 20. The twelve droplet discharge heads 20 are arranged in two rows, and in each row, the six droplet discharge heads 20 are arranged in a straight line slightly inclined with respect to the X-axis direction. A pair of reference pins 84, 84 are fixed to the unit plate 81, and the twelve droplet discharge heads 20 are positioned at appropriate positions with reference to the reference mark holes formed in the reference pins 84. It is fixed.

  The unit plate 81 is also formed with a first position restricting hole 81a, a second position restricting hole 81b, and four unit fixing holes 81c. The first position restricting hole 81 a and the second position restricting hole 81 b are used for positioning when the head unit 21 is attached to the head carriage 22. The four unit fixing holes 81c are holes through which screws for fixing the head unit 21 to the head carriage 22 pass. The X axis, Y axis, and Z axis shown in FIG. 3 are the same as the X axis, Y axis, and Z axis shown in FIG. That is, in a state where the head unit 21 is attached to the droplet discharge device 1, the nozzle row 73 (see FIG. 2) formed on the droplet discharge head 20 is configured to extend in the Y-axis direction.

  The side of the supply pipe 463 coupled to the droplet discharge head 20 of the supply pipe 463 having one end coupled to the relay tank 43 is bifurcated, and each of the branched two ends is connected to each of the two connection needles 76 and 76 by piping. It is connected via a member. As described above, the droplet discharge device 1 of this embodiment includes six sets of the functional liquid tank 41, the sub tank 42, and the relay tank 43, and handles six types of functional liquids in parallel. Can do. In order to supply six types of functional liquids to the twelve droplet discharge heads 20, for example, two supply pipes 463 are coupled to one relay tank 43, and one type of functional liquid is supplied to each of the two droplets. It is supplied to the droplet discharge head 20. The supply pipe 463a, the supply pipe 463b, the supply pipe 463c, the supply pipe 463d, the supply pipe 463e, and the supply pipe 463f are a relay tank 43a, a relay tank 43b, a relay tank 43c, a relay tank 43d, a relay tank 43e, and a relay that are not shown in the figure, respectively. It shows that it is coupled to the tank 43f.

<Functional liquid supply unit>
Next, the configuration of the functional liquid supply unit 4 will be described in more detail with reference to FIG. FIG. 4 is a schematic diagram illustrating the configuration of the functional liquid supply unit. As described above, the functional liquid supply unit 4 communicates the functional liquid tank 41, the sub tank 42, the functional liquid supply unit 47 having the relay tank 43, the tank, and the droplet discharge head 20. And a supply pipe 46 for supplying 40 from the functional liquid tank 41 to the droplet discharge head 20. In addition, a pressure applying unit 60, a first liquid detector 11, and a second liquid detector 12 are provided. The pressure applying unit 60, the first liquid detector 11, the second liquid detector 12, and a plurality of valves (not shown) for opening and closing the flow path of the functional liquid 40 are shown by dotted lines in FIG. The discharge device controller 6 is electrically connected. The functional liquid 40 reaches the sub tank 42 from the functional liquid tank 41 through the supply pipe 461, reaches the relay tank 43 from the sub tank 42 through the supply pipe 462, and further passes through the supply pipe 463 from the relay tank 43. Supplied to the droplet discharge head 20.

  The functional liquid tank 41 is a supply source for supplying the functional liquid 40 to the droplet discharge head 20 and includes a storage portion 41a for storing the functional liquid and a storage plug 41b. The storage plug 41b can be fitted into the opening of the storage unit 41a, and shuts off the inside of the storage unit 41a from the outside by fitting. One end of a functional liquid tank pressure pipe 64 coupled to the pressure applying unit 60 and one end of a supply pipe 461 communicating with the sub tank 42 are fixed to the storage plug 41b. By fitting the storage plug 41b into the opening of the storage part 41a, one end of the functional liquid tank pressure pipe 64 and one end of the supply pipe 461 are coupled to the storage part 41a. The pressure applying unit 60 adjusts the internal pressure of the storage unit 41 a through the functional liquid tank pressure pipe 64, thereby sending the functional liquid 40 to the sub tank 42 through the supply pipe 461. The replenishment of the functional liquid 40 into the functional liquid tank 41 and the filling of the new functional liquid 40 may be performed by directly replenishing or filling the functional liquid 40 into the storage section 41a, or the storage section 41a may be replaced with the functional liquid 40. It may be executed by exchanging it with another storage part 41a filled with.

  The sub tank 42 is coupled to the pressure applying unit 60 via the sub tank pressure pipe 65 so that the functional liquid 40 can be supplied to the droplet discharge head 20 via the supply pipe 462, the relay tank 43, and the supply pipe 463. One end of the supply pipe 462 is coupled. The sub tank 42 is pressure controlled and managed so that the pressure at the discharge nozzle 72 of the droplet discharge head 20 becomes an appropriate water head pressure by the pressure applying unit 60, and the functional liquid 40 is driven according to the driving of the droplet discharge head 20. At a constant pressure. As a result, dripping from the discharge nozzle 72 is prevented, and the discharge of the functional liquid 40 is intended by design.

  In addition, the sub tank 42 is configured so that a metal plate such as stainless steel or a so-called dropping lid such as a fluororesin is installed on the liquid surface of the functional liquid 40 to be stored so as to reduce an area where the liquid surface and the air are in direct contact with each other. Is preferred. Also, in the functional liquid tank 41, it is preferable to prevent the contact between the functional liquid 40 and the air in the functional liquid tank 41 before supplying the functional liquid 40 to the sub tank 42 as a tank configuration similar to the sub tank 42. . Thereby, it is possible to substantially prevent the mixture of bubbles in the functional liquid 40 and the alteration of the functional liquid 40 by suppressing the deterioration.

  The functional liquid 40 delivered from the sub tank 42 reaches the relay tank 43 via the supply pipe 462, branches from the relay tank 43 to the plurality of supply pipes 463, and is supplied to the droplet discharge head 20. The relay tank 43 is disposed in a functional liquid supply unit 47 attached to the upper surface of the head carriage 22, and a plurality of supply pipes 463 are connected thereto. In the present embodiment, as shown in FIG. 3A, two of the plurality of supply pipes 463 connected to one relay tank 43 are coupled to the droplet discharge head 20. For the supply pipe 463 that is not coupled to the droplet discharge head 20, a valve (not shown) is closed, and the functional liquid 40 does not flow from the relay tank 43 into the supply pipe 463 that is not coupled to the droplet discharge head 20. Like that.

  The first liquid detector 11 includes a light emitting element 11a and a light receiving element 11b. The light receiving element 11b receives light emitted from the light emitting element 11a and transmitted through a supply tube 461 formed of a colorless and transparent material. Is attached. The first liquid detector 11 is attached in the vicinity of the storage plug 41b so that light emitted and received can pass through the supply pipe 461 in the vicinity of the storage plug 41b. The second liquid detector 12 includes a light emitting element 12a and a light receiving element 12b. The light receiving element 12b receives the light emitted from the light emitting element 12a and transmitted through the supply tube 463 formed of a colorless and transparent material. Is attached. The second liquid detector 12 is attached in the vicinity of the branch portion of the supply pipe 463 so that the light emitted and received is transmitted through the supply pipe 463 in the vicinity of the droplet discharge head 20.

  Next, an electrical configuration for driving the droplet discharge device 1 having the above-described configuration will be described with reference to FIG. FIG. 5 is an electrical configuration block diagram showing an electrical configuration of the droplet discharge device. The droplet discharge device 1 is controlled by inputting data and control commands such as operation start and stop via the control device 90. The control device 90 includes a host computer 91 that performs arithmetic processing, and an input / output device 93 that inputs and outputs information that is input to and output from the droplet discharge device 1, and the discharge device control unit 6 via the interface 92. Connected with. The input / output device 93 includes a keyboard capable of inputting information, an external input / output device that inputs / outputs information via a recording medium, a recording unit that stores information input via the external input / output device, a monitor device, and the like It is.

  The ejection device controller 6 of the droplet ejection device 1 includes an interface 97, a CPU (Central Processing Unit) 94, a ROM (Read Only Memory) 95, and a RAM (Random Access Memory) 96. . The head driver 20d, the drive mechanism driver 40d, the pressure driver 60d, the maintenance driver 50d, and the detector interface 98 are provided. These are electrically connected to each other via a data bus 99.

  The interface 97 exchanges data with the control device 90, and the CPU 94 performs various arithmetic processes and outputs a control signal for controlling the operation of each part of the droplet discharge device 1. The RAM 96 temporarily stores control commands and print data received from the control device 90 in accordance with instructions from the CPU 94. The ROM 95 records routines for the CPU 94 to perform various arithmetic processes.

  The liquid droplet ejection head 20 is connected to the head driver 20d, and the head driver 20d drives the liquid droplet ejection head 20 according to a control signal from the CPU 94 to eject liquid droplets of the functional liquid 40. An X-axis linear motor 34, a Y-axis linear motor 24, a head rotation mechanism 22a, and a workpiece rotation mechanism 31a are connected to the drive mechanism driver 40d. The drive mechanism driver 40d drives the motor or the like in accordance with a control signal from the CPU 94 to move the droplet discharge head 20 and the workpiece 30 relative to each other so that an arbitrary position of the workpiece 30 and the droplet discharge head 20 face each other. In cooperation with the head driver 20d, the droplet of the functional liquid 40 is landed at an arbitrary position on the work 30.

  A capping unit 56, a wiping unit 57, a flushing unit 58, and a maintenance motor 53 are connected to the maintenance driver 50d. The maintenance driver 50d drives the maintenance motor 53 in accordance with a control signal from the CPU 94, and the maintenance carriage 50d moves to a position where the capping unit 56, the wiping unit 57, or the flushing unit 58 can face the droplet discharge head 20. 51 is moved. Further, the capping unit 56, the wiping unit 57, or the flushing unit 58 is driven to perform maintenance work for the droplet discharge head 20.

  A pressure applying unit 60 is connected to the pressure driver 60d. The pressure driver 60 d drives the pressure applying unit 60 in accordance with a control signal from the CPU 94 and supplies the functional liquid 40 to the droplet discharge head 20. To the detector interface 98, the light emitting element 11a and the light receiving element 11b of the first liquid detector 11 and the light emitting element 12a and the light receiving element 12b of the second liquid detector 12 are connected. The light emitting element 11a or the light emitting element 12a emits light according to the control signal transmitted from the CPU 94 via the detector interface 98, and the detection information of the light receiving element 11b or the light receiving element 12b is transmitted to the CPU 94 via the detector interface 98. Is done.

<Configuration of LCD panel>
Next, a color filter substrate of a liquid crystal display panel constituting a liquid crystal display device which is an example of a device manufactured using the liquid supply method of the present invention, and a method for manufacturing the color filter substrate will be described. First, a liquid crystal display panel will be described. FIG. 6 is a schematic view showing the structure of the liquid crystal display panel. FIG. 6A is a plan view of the liquid crystal display panel as viewed from the filter substrate side together with each component, and FIG. 6B shows the cross-sectional shape in the cross section indicated by AA in FIG. It is a schematic sectional drawing shown.

  As shown in FIGS. 6A and 6B, a liquid crystal display panel 110 includes an element substrate 101 having a TFT (Thin Film Transistor) element 103 and a pixel electrode 106b, a color filter having a counter electrode 106a and a color filter 105. A substrate 102 and a liquid crystal 108 filled in a gap between the element substrate 101 bonded by the sealant 104 and the color filter substrate 102 are provided. The element substrate 101 protrudes in a frame shape that is slightly larger than the color filter substrate 102.

  The element substrate 101 is a quartz glass substrate having a thickness of about 1.2 mm. The surface of the element substrate 101 is a pixel electrode 106b constituting a pixel and a TFT element 103 in which one of the three terminals is connected to the pixel electrode 106b. Is formed. The remaining two terminals of the TFT element 103 are connected to a data line (not shown) and a scanning line (not shown) that surround the pixel electrode 106b and are insulated from each other and arranged in a grid pattern. The data line is drawn out in the y-axis direction and connected to the data line driving circuit unit 109a at the terminal unit 116. The scanning lines are drawn out in the x-axis direction and are individually connected to two scanning line driving circuit units 109b formed in the left and right frame regions. The input side wirings of the data line driving circuit unit 109 a and the scanning line driving circuit unit 109 b are connected to the mounting terminals 111 arranged along the terminal unit 116, respectively. In the frame region opposite to the terminal portion 116, a wiring 112 that connects the two scanning line driving circuit portions 109b to each other is provided.

  The color filter substrate 102 uses a glass substrate 102a made of transparent quartz glass having a thickness of approximately 1.0 mm, and is provided with a counter electrode 106a as a common electrode. The counter electrode 106a is electrically connected to the wiring provided on the element substrate 101 side through the vertical conduction portions 114 provided at the four corners of the glass substrate 102a, and the wiring is also connected to the mounting terminal 111 provided in the terminal portion 116. It is connected. Further, the color filter substrate 102 is provided with a color filter 105 in which a color element 153 (see FIG. 8) is formed at a position facing the pixel electrode 106b.

  An alignment film 107b and an alignment film 107a are formed on the surface of the element substrate 101 facing the liquid crystal 108 and the surface of the color filter substrate 102, respectively.

  In the liquid crystal display panel 110, a relay substrate that is electrically connected to an external drive circuit is connected to the mounting terminal 111. An input signal from the external drive circuit is input to each data line drive circuit unit 109a and scan line drive circuit unit 109b, whereby the TFT element 103 is switched for each pixel electrode. As a result, display is performed by applying a drive voltage between the pixel electrode 106b and the counter electrode 106a.

  Although not shown in FIG. 6, polarizing plates are provided on the front and back surfaces of the liquid crystal display panel 110 to polarize incoming and outgoing light, respectively.

<Color filter>
Next, the color filter 105 formed on the color filter substrate 102 and the arrangement of the color elements 153 in the color filter 105 will be described. FIG. 7A is a schematic diagram schematically showing a planar structure of an embodiment of a color filter, and FIG. 7B is a schematic diagram showing a planar structure of a mother substrate on which a plurality of color filters are formed. It is a schematic diagram.

  The color filter 105 has a plurality of color element regions 152 (see FIGS. 8 and 12E) formed on a surface of a rectangular substrate such as glass or plastic in a dot pattern, in this embodiment a dot matrix. The color element 153 is formed in the color element region 152, and a protective film is further stacked thereon. FIG. 7A is a plan view of the color filter 105 with the protective film removed.

  The rectangular color filter substrate 102 on which the color filter 105 is formed is cut out from a large-area mother substrate 102A as shown in FIG. 7B, for example. More specifically, first, a pattern for one color filter 105 is formed on the surface of each of the plurality of color filter formation regions 105a set in the mother substrate 102A, and the surroundings of the color filter formation regions 105a are further formed. A groove for cutting is formed in. Further, by cutting the mother substrate 102A along these grooves, the rectangular color filter substrate 102 on which the color filter 105 is formed is formed.

<Color element array>
Next, the arrangement of the color elements 153 will be described. The color element 153 is formed by filling, for example, a rectangular color element region 152 partitioned by the partition wall 156 with a color material. The partition walls 156 are formed in a lattice pattern using a resin material that does not transmit light, and the color element regions 152 partitioned by the partition walls 156 are arranged in a dot matrix. FIG. 8 is a plan view showing an example of the arrangement of color elements. FIG. 8A shows an arrangement example of the four-color filter, and FIGS. 8B and 8C show an arrangement example of the six-color filter. As the arrangement of the color elements 153, for example, a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like are known. The stripe arrangement is an arrangement in which all the columns of the matrix are the same color elements 153. The mosaic arrangement is an arrangement in which the color is shifted by one color element 153 for each row in the horizontal direction. In the case of a three-color filter, an arbitrary three color elements 153 arranged on a vertical and horizontal straight line have three colors. It is. The delta arrangement is an arrangement in which any adjacent three color elements 153 have different colors in the case of a three-color filter by making the arrangement of the color elements 153 different.

  In the four-color filter shown in FIG. 8A, each of the color elements 153 is a color of any one of R (red), G (green), B (blue), and W (colorless and transparent). It is made of material. A set of color elements 153 each including R (red), G (green), B (blue), and W (colorless and transparent) color elements 153R, 153G, 153B, and 153W formed adjacent to each other. A pixel unit filter (hereinafter referred to as “picture element filter 154”) is formed. Full color display is performed by selectively allowing light to pass through any one or a combination of the color elements 153R, 153G, 153B, 153W in one picture element filter 154. At this time, the partition 156 formed of a resin material that does not transmit light acts as a black matrix. In the four-color filter shown in FIG. 8A, the pixel filters 154 are arranged in a stripe arrangement.

  In the 6-color filter shown in FIG. 8B, each of the color elements 153 includes R (red), G (green), B (blue), C (cyan or turquoise), M (magenta or purple-red). ), Y (yellow or yellow). Adjacently formed R (red), G (green), B (blue), C (cyan), M (magenta), and Y (yellow) color elements 153R, 153G, 153B, 153C, 153M, and 153Y A pixel element filter 157 corresponding to one picture element is formed by a set of color elements 153 including one each. The three primary colors of light, R (red), G (green), and B (blue), are arranged in a row in the horizontal direction of FIG. 8, and are complementary colors of R (red), G (green), and B (blue). C (cyan), M (magenta), and Y (yellow) are arranged so as to be adjacent to the complementary colors in the vertical direction of FIG. Full color display is performed by selectively passing light through one or a combination of the color elements 153R, 153G, 153B, 153C, 153M, and 153Y in one picture element filter 157. In the 6-color filter shown in FIG. 8B, the pixel filters 157 are arranged in a stripe. In the 6-color filter shown in FIG. 8C, the pixel filters 157 are arranged in a mosaic arrangement.

  In the 6-color filter shown in FIG. 8B or 8C, C (cyan), M (magenta), which are complementary colors of R (red), G (green), and B (blue) which are the three primary colors of light, The areas of the Y (yellow) color elements 153C, 153M, and 153Y are smaller than the areas of the R (red), G (green), and B (blue) color elements 153R, 153G, and 153B. This is because the area of the color element 153 corrects that the brightness of the output light varies even with the same light source because the light transmittance varies depending on the color element. The size of one color element 153 is, for example, 30 μm × 100 μm, or 30 μm × 60 μm and 30 μm × 20 μm. Further, the interval between the color elements 153, that is, the so-called inter-element pitch is 45 μm, for example.

<Method for manufacturing color filter substrate>
Next, the manufacturing process of the color filter substrate will be described with reference to FIGS. 9 is a flowchart showing a manufacturing process of a color filter substrate, FIG. 10 is a flowchart showing a process of forming a partition, and FIG. 11 is a flowchart showing a process of forming a color element (color element forming process). 12A to 12G are schematic cross-sectional views illustrating the manufacturing process of the color filter substrate.

  As shown in FIG. 9, the manufacturing method of the color filter substrate 102 of this embodiment is such that the surface of the glass substrate 181 (mother substrate 102A: see FIG. 7) shown in FIG. And a lyophilic process in which the part corresponding to the region where the partition wall 156 is formed on the surface of the glass substrate 181 subjected to the lyophobic process is surface-treated so as to have lyophilicity. And a process (step S2). In addition, a step of forming partition walls so as to divide the plurality of color element regions 152 on the glass substrate 181 (Step S3), and the functional liquid 40 containing different color element forming materials are discharged to the plurality of color element regions 152. A color element forming step (step S6) for forming a plurality of types of color elements 153.

  Step S1 in FIG. 9 is a lyophobic process. In step S1, as shown in FIG. 12A, a thin film 186 is formed on the surface of the glass substrate 181 to impart liquid repellency. As a method for forming the thin film 186, the thin film 186 made of a substantially monomolecular film is formed using FAS (fluorinated alkylsilane) or HMDS (hexamethyldisilane) as a liquid repellent material. More specifically, a method of forming a self-assembled film on the surface of the glass substrate 181 can be employed.

  In the self-assembled film forming method, a self-assembled film made of an organic molecular film or the like is formed on the surface of the glass substrate 181. The organic molecular film includes a functional group that can be bonded to the glass substrate 181, a functional group as a liquid repellent group that modifies the surface property (controls the surface energy) on the opposite side, and a carbon that connects these functional groups. It has a straight chain or a partially branched carbon chain, and is bonded to the glass substrate 181 and self-assembles to form a molecular film, for example, a monomolecular film.

  Here, the self-assembled film is composed of a binding functional group capable of reacting with constituent atoms such as an underlayer of the glass substrate 181 and other linear molecules, and has extremely high orientation due to the interaction of the linear molecules. It is a film formed by orienting a compound having Since this self-assembled film is formed by orienting single molecules, the film thickness can be extremely reduced, and the film is uniform at the molecular level. That is, since the same molecule is located on the surface of the film, it is possible to impart uniform and excellent liquid repellency to the surface of the film.

  By using, for example, fluoroalkylsilane as the above-mentioned highly oriented compound, each compound is oriented so that the fluoroalkyl group is located on the surface of the film, and a self-assembled film is formed. Liquid repellency is imparted. Examples of compounds that form a self-assembled film include heptadecafluoro-1,1,2,2 tetrahydrodecyltriethoxysilane, heptadecafluoro-1,1,2,2 tetrahydrodecyltrimethoxysilane, heptadecafluoro-1 , 1,2,2 tetrahydrodecyltrichlorosilane, tridecafluoro-1,1,2,2 tetrahydrooctyltriethoxysilane, tridecafluoro-1,1,2,2 tetrahydrooctyltrimethoxysilane, tridecafluoro-1 , 1,2,2 tetrahydrooctyltrichlorosilane, trifluoropropyltrimethoxysilane, and other fluoroalkylsilanes (hereinafter referred to as “FAS”). These compounds may be used alone or in combination of two or more. By using FAS, adhesion to the glass substrate 181 and good liquid repellency on the surface can be obtained.

FAS is generally represented by the structural formula RnSiX (4-n). Here, n represents an integer of 1 to 3, and X is a hydrolyzable group such as a methoxy group, an ethoxy group, or a halogen atom. R is a fluoroalkyl group, and has a structure of (CF ₃ ) (CF ₂ ) x (CH ₂ ) y (where x represents an integer of 0 to 10 and y represents an integer of 0 to 4). And when a plurality of R or X are bonded to Si, each R or X may be the same or different. The hydrolyzable group represented by X forms silanol by hydrolysis and reacts with the hydroxyl group of the base of the glass substrate 181 to bond to the glass substrate 181 through a siloxane bond. On the other hand, since the fluoroalkyl group represented by R has a fluoro group such as (CF ₂ ) on the surface, the base surface of the glass substrate 181 is modified to a surface that is difficult to wet (surface energy is low).

  A self-assembled film made of an organic molecular film or the like is placed on the glass substrate 181 by placing the raw material compound and the glass substrate 181 in the same sealed container and leaving it at room temperature for about 2 to 3 days. It is formed. Further, by holding the entire sealed container at 100 ° C., it is formed on the glass substrate 181 in about 3 hours. These are formation methods from the gas phase, but a self-assembled film can also be formed from the liquid phase. For example, a self-assembled film is formed on the glass substrate 181 by immersing the glass substrate 181 in a solution containing a raw material compound, washing, and drying. Note that before the self-assembled film is formed, it is desirable to perform pretreatment of the surface of the glass substrate 181 by irradiating the surface of the glass substrate 181 with ultraviolet light or washing with a solvent.

  Step S2 in FIG. 9 is a lyophilic process. In step S2, as shown in FIG. 12B, the surface 186a subjected to the lyophobic treatment is irradiated with laser light to impart lyophilicity. At the site irradiated with the laser beam, the siloxane bond is broken and becomes bonded with the hydroxyl group, and lyophilicity is imparted. In this case, the laser irradiation range is a region 186b where the partition wall 156 is formed as shown in FIG.

In addition, as a laser beam to irradiate, what has a wavelength band which produces heat | fever is desirable, for example, what has a wavelength band in an infrared region (0.7-10 micrometers) is suitable. As such a laser light source, for example, an Nd: YAG laser (1.064 μm), a CO ₂ laser (10.6 μm), or the like can be used. Then, the region 186b is drawn by placing the glass substrate 181 on the table by a laser irradiation apparatus equipped with these laser light sources and a table that can move relative to the laser light sources in at least the X and Y directions. A lyophilic treatment is performed by irradiating a laser beam on the surface.

  In addition, as a method for lyophilicizing the thin film 186 made of FAS or the like, a method in which a region other than the region 186b to be lyophilic is covered with a mask and irradiated with UV (ultraviolet light) can be employed.

  Step S3 in FIG. 9 is a partition wall forming process. In step S3, as shown in FIG. 12D, the partition 156 is formed using the above-described droplet discharge device 1 (see FIG. 1). A partition wall 156 is formed by discharging the functional liquid 40 containing the partition wall forming material from the droplet discharge head 20 (see FIG. 2). As described above, the droplet discharge head 20 (see FIG. 2) provided in the droplet discharge apparatus 1 can discharge a liquid material as droplets from the discharge nozzle, and the functional liquid 40 including the partition wall forming material as the liquid material. The partition material 156a is discharged to form the partition 156.

  The step of forming the partition 156 will be described in more detail with reference to FIG. FIG. 10 is a flowchart showing a process of forming a partition wall. In step S21 in FIG. 10, a supply pipe 463 (see FIG. 3A or FIG. 4) that sends the functional liquid 40 from the relay tank 43 (see FIG. 4) to the droplet discharge head 20 is connected. Of course, when it is not necessary to change the connection method between the six relay tanks 43 and the twelve droplet discharge heads 20 from the existing state, step S21 is omitted. Step S21 corresponds to a connection step of connecting the liquid supply pipe. Next, in step S22, the storage part 41a is connected to the functional liquid supply part 4 of the droplet discharge device 1 by coupling the storage plug 41b to the storage part 41a filled with the partition wall material liquid 156a. Step S22 corresponds to a connecting step of connecting a liquid supply pipe or a filling step of filling a liquid or functional liquid.

  Next, in step S23, first temporary delivery is performed in which the partition wall material liquid 156a is delivered to at least the position where the first liquid detector 11 of the supply pipe 461 faces, for example, to the sub tank 42. In order to keep the partition material liquid 156a from being delivered to the sub tank 42, for example, the first provisional delivery is performed with the valve between the sub tank 42 and the supply pipe 462 closed in advance. By performing the first temporary delivery with the valve closed in advance, it is possible to prevent the partition wall material liquid 156a from being delivered to portions other than the necessary portions. Step S23 corresponds to a trial delivery process.

  Next, in step S24, the first liquid detector 11 is used to detect the type of the partition wall material liquid 156a. More specifically, the partition material liquid 156a is obtained when the storage plug 41b is properly coupled to the liquid material sent to the supply pipe 461, that is, the storage part 41a filled with the partition material liquid 156a. The light liquid is irradiated from the light emitting element 11a, and the light receiving element 11b receives the transmitted light that has passed through the liquid, thereby measuring the light transmittance of the liquid. Step S24 corresponds to a detection step.

  Next, in step S25, it is determined whether or not the partition wall material liquid is the set partition wall material liquid 156a. More specifically, it is determined whether or not the light transmittance measured in step S24 matches the light transmittance of the partition wall material liquid 156a to be supplied which has been measured in advance. Step S25 corresponds to a liquid material determination step or a functional liquid determination step.

  If the measured light transmittance does not match the light transmittance of the partition wall material liquid 156a to be supplied (NO in step S25), the process proceeds to step S26. In step S26, the partition wall material liquid supplied to the supply pipe 461 and the sub tank 42 (liquid body determined to be different from the partition wall material liquid 156a to be supplied) is discharged. Further, the supply pipe 461 and the sub tank 42 from which the partition wall material liquid has been discharged are washed. Next, in step S27, the reservoir 41a is coupled to the reservoir 41a filled with the partition wall material liquid 156a again to reconnect the reservoir 41a to the functional liquid supply unit 4 of the droplet discharge device 1. After step S27, the process proceeds to step S23, and steps S23 to S25 are repeated. As described above, the droplet discharge device 1 of this embodiment includes six sets of the functional liquid tank 41, the sub tank 42, and the relay tank 43, and each step from step S21 to step S27 is performed. This is executed for each set of the functional liquid tank 41, the sub tank 42, and the relay tank 43.

  If the measured light transmittance matches the light transmittance of the partition wall material liquid 156a to be supplied (YES in step S25), the process proceeds to step S28. In step S <b> 28, the partition material liquid 156 a is sent beyond the supply pipe 461 and the sub tank 42 so that the droplet discharge head 20 can discharge the partition material liquid 156 a. Step S28 corresponds to the main sending process. The droplet discharge head 20 corresponds to a usable position or an arrangement portion.

  Next, in step S29, the partition material liquid 156a is discharged from the droplet discharge head 20. More specifically, positioning is performed so that the droplet discharge head 20 sequentially faces the region 186b where the partition wall 156 is formed, and the partition material liquid 156a is discharged and landed as droplets to spread wet. Needless to say, the partition material liquid 156a discharged from the droplet discharge head 20 is executed in parallel with the discharge of the partition material liquid 156a from the droplet discharge head 20 in step S29. 156a is supplied to the droplet discharge head 20. Then, the partition wall 156 is formed by drying the partition material liquid 156a that has landed and spread.

  In this case, the predetermined height of the partition wall 156 is approximately 1.5 μm, for example. When the predetermined height of the partition wall 156 cannot be obtained by one discharge and drying, a film obtained by drying the partition wall material liquid 156a is laminated by repeating the process of step S29, so that the predetermined height is reached. A partition wall 156 is formed. Note that as the partition wall material liquid 156a, a solution containing a phenolic resin or the like as a partition wall forming material can be used. The partition wall 156 having a predetermined height is formed, and the step of forming the partition wall 156 (the partition wall forming step in step S3 in FIG. 9) is completed.

Next, in step S4 of FIG. 9, the formed partition 156 is baked. Next, in step S5, as shown in FIG. 12E, a step of removing the thin film 186 (liquid repellent film) remaining on the glass substrate 181 on which the partition walls 156 are formed is performed. The thin film 186 is a monomolecular film made of FAS or the like, and can be removed by sublimation by heating the glass substrate 181 to about 300 ° C. It is also possible to lyophilicize the surface 181a of the glass substrate 181 after removal. As a method for removing the thin film 186 other than heating, UV irradiation, O ₂ plasma treatment, or the like can be employed. By heating the whole glass substrate 181, step S4 and step S5 can also be performed simultaneously. After step S5, the color element region 152 is formed as shown in FIG.

  The next step S6 is a color element forming process. In step S6, the color element 153 is formed using the above-described droplet discharge device 1 (see FIG. 1). As shown in FIG. 12 (f), the color element material liquid 153 a containing the color element forming material is applied to each of the plurality of color element regions 152 partitioned by the partition walls 156. The color element 153 is formed by ejecting as a droplet from 20 and drying. In this case, the color element material liquid 153a is discharged for each color element region 152 so that the thickness of the color element 153 after drying is substantially the same as the height of the partition wall 156 (approximately 1.5 μm). To do. Of course, the color element material liquid 153a containing a different color element material is discharged to each color element region 152 where the color elements 153 of different colors are formed. For example, in the above-described six-color filter (see FIG. 8B or 8C), the color elements 153R, 153G, 153B, 153C, 153M, and 153Y of different colors correspond to the color element regions 152 to be formed. Then, each of the six color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, and 153Ya containing different color element materials is discharged from the droplet discharge head 20. As will be described later, each of the color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, and 153Ya disposed in each color element region 152 is dried to thereby change the color elements 153R, 153G, 153B, 153C, 153M, and 153Y. Form each one.

  The process of forming the color element 153 will be described in more detail with reference to FIG. FIG. 11 is a flowchart showing a process of forming color elements. In step S31 of FIG. 11, a supply pipe 463 (see FIG. 3A or FIG. 4) for sending the functional liquid 40 from the relay tank 43 (see FIG. 4) to the droplet discharge head 20 is connected. For example, supply pipes 463R, 463G, and 650G connected to relay tanks 43R, 43G, 43B, 43C, 43M, and 43Y, respectively, in which six color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, and 153Ya are stored, respectively. 463B, 463C, 463M, and 463Y are connected to the droplet discharge head 20 that is to discharge the color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, and 153Ya, respectively. Of course, when it is not necessary to change the connection method of the six relay tanks 43 and the twelve droplet discharge heads 20 from the existing state, step S31 is omitted. Step S31 corresponds to a connection step of connecting the liquid supply pipe.

  Next, in step S32, the storage stopper 41b is coupled to the storage portion 41a filled with each of the six types of color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, and 153Ya. Reservoir portions 41a filled with six kinds of color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, 153Ya are connected to the functional liquid supply unit 4, respectively. Step S32 corresponds to a connection step of connecting the liquid supply pipe or a filling step of filling the liquid material or functional liquid.

  Next, in step S33, first provisional delivery is performed in which the color element material liquid 153a is delivered to at least the position where the first liquid detector 11 of the supply pipe 461 faces, for example, to the sub tank 42. In order to keep the color element material liquid 153a from being delivered to the sub tank 42, for example, the first provisional delivery is executed with the valve between the sub tank 42 and the supply pipe 462 closed in advance. Step S33 corresponds to a trial delivery process.

  Next, in step S34, the first liquid detector 11 is used to detect the type of the color element material liquid 153a. More specifically, the liquid material sent to the supply pipe 461 is irradiated with light from the light emitting element 11a, and the light receiving element 11b receives the transmitted light that has passed through the liquid material. Measure the transmittance. If the storage element 41a is correctly connected to the storage part 41a filled with the color element material liquid 153a, the liquid body is formed of, for example, the color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, 153Ya. It is a liquid that should be either. Step S34 corresponds to a detection step.

  Next, in step S35, it is determined whether the color element material liquid 153a is any one of the color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, and 153Ya as set. More specifically, the light transmittance measured in step S34 is the light transmittance of any one of the color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, and 153Ya to be supplied that has been measured in advance. It is determined whether or not they match. Step S35 corresponds to a liquid material determination step or a functional liquid determination step.

  If the measured light transmittance does not match the light transmittance of any of the color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, 153Ya to be supplied (NO in step S35), step Proceed to S36. In step S36, the color element material liquid supplied to the supply pipe 461 and the sub tank 42 (liquid body determined to be different from the color element material liquid 153a to be supplied) is discharged. Further, the supply pipe 461 and the sub tank 42 from which the color element material liquid has been discharged are washed.

  Next, in step S37, the connection of the storage part 41a is corrected. That is, the storage unit 41a is reconnected to the functional liquid supply unit 4 of the droplet discharge device 1 by coupling the storage plug 41b to the storage unit 41a filled with the color element material liquid 153a. After step S37, the process proceeds to step S33, and steps S33 to S35 are repeated. As described above, the droplet discharge device 1 of the present embodiment includes six sets of the functional liquid tank 41, the sub tank 42, and the relay tank 43, and each step from step S31 to step S37 is performed. This is executed for each set of the functional liquid tank 41, the sub tank 42, and the relay tank 43.

  If the measured light transmittance matches the light transmittance of the color element material liquid 153a to be supplied (YES in step S35), the process proceeds to step S38. In step S38, the second provisional delivery is performed in which the color element material liquid 153a is delivered to at least a position where the second liquid detector 12 of the supply pipe 463 faces, for example, before the droplet discharge head 20. In order to keep the color element material liquid 153a from being delivered to the front of the droplet discharge head 20, for example, the pressure application unit 60 adjusts the pressure at which the color element material liquid 153a is delivered to the sub tank 42. Step S38 corresponds to a trial delivery process.

  Next, in step S39, the second liquid detector 12 is used to detect the type of the color element material liquid 153a. More specifically, a light emitting element is applied to the liquid material sent to the supply pipe 463 connected to the droplet discharge head 20 to discharge any one of the color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, and 153Ya. By irradiating light from 12a and receiving light transmitted through the liquid material by the light receiving element 12b, the light transmittance of the liquid material is measured. The liquid material delivered to the supply pipe 463 is a liquid material that should be any one of the color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, and 153Ya. Step S39 corresponds to a detection step.

  Next, in step S40, it is determined whether or not the color element material liquid 153a is any one of the color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, and 153Ya as set. More specifically, the light transmittance measured in step S39 is the light transmittance of any one of the color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, and 153Ya to be supplied that has been measured in advance. It is determined whether or not they match. Step S40 corresponds to a liquid material determination step or a functional liquid determination step.

  If the measured light transmittance does not match the light transmittance of any of the color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, 153Ya to be supplied (NO in step S40), step Proceed to S41. In step S41, the color element material liquid supplied before the droplet discharge head 20 (the liquid material determined to be different from the color element material liquid 153a to be supplied) is discharged. Further, the supply pipe 461, the sub tank 42, the supply pipe 462, the relay tank 43, and the supply pipe 463 from which the color element material liquid has been discharged are washed.

  Next, in step S42, the connection of the supply pipe 463 is corrected. That is, the supply pipes 463R, 463R, which are respectively connected to the relay tanks 43R, 43G, 43B, 43C, 43M, 43Y in which the six color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, 153Ya are respectively stored. 463G, 463B, 463C, 463M, and 463Y are respectively connected to the droplet discharge head 20 that is to discharge any one of the color element material liquids 153Ra, 153Ga, 153Ba, 153Ca, 153Ma, and 153Ya. After step S42, the process proceeds to step S38, and steps S38 to S40 are repeated. As described above, the droplet discharge device 1 includes the twelve droplet discharge heads 20, and each step from step S 38 to step S 42 is performed for each supply pipe 463 connected to the twelve droplet discharge heads 20. Run each.

  If the measured light transmittance matches the light transmittance of the color element material liquid 153a to be supplied (YES in step S40), the process proceeds to step S43. In step S43, the color element material liquid 153a is sent to the droplet discharge head 20 so that the droplet discharge head 20 can discharge the color element material liquid 153a. Step S43 corresponds to the main sending process. The droplet discharge head 20 corresponds to a usable position or an arrangement portion.

  Next, in step S44, the color element material liquid 153a is discharged from the droplet discharge head 20. More specifically, positioning is performed so that the droplet discharge head 20 sequentially faces the color element region 152, and the color element material liquid 153 a is discharged as droplets to land on the color element region 152. A step of forming a color element 153 by landing a predetermined amount of the color element material liquid 153a on the color element region 152 (the color element forming step of step S6 in FIG. 9) is completed. Strictly speaking, the color element material liquid 153a starts drying from the moment it is ejected as droplets from the droplet ejection head 20, but by adjusting the boiling point of the solvent of the color element material liquid 153a, for example, , It can harden to the extent that it does not flow when it hits and spreads.

  Next, in step S7 of FIG. 9, the color element material liquid 153a discharged toward the color element area 152 and disposed in the color element area 152 is pre-baked by drying or baking at a low temperature (for example, 60 ° C.). Temporary solidification or temporary curing is performed by performing (temporary baking).

  Next, in step S8, the color filter substrate 102 configured as described above is inspected to determine whether there is a defect. In this inspection, for example, the partition wall 156 and the color element 153 are observed with the naked eye or a microscope. In this case, the color filter substrate 102 may be photographed and automatically inspected based on the photographed image. Here, the defect of the color element 153 means that the color element 153 is missing (so-called dot missing) or the color element 153 is formed, but the color element material liquid disposed in the color element region 152 is used. This is the case where the amount (volume) of 153a is too large or too small, or when the color element 153 is formed but foreign matter such as dust is mixed in or attached. .

  If a defect is found in the color element 153 by this inspection (NO in step S8), the color filter substrate manufacturing process is terminated. The color filter substrate 102 in which the defect is found is transferred to a separate substrate regeneration process.

  If no defect is found in the display material in the inspection (YES in step S8), the process proceeds to step S9. In step S9, the temporarily fired color element 153 is baked (fired) to completely solidify or cure the color element 153. For example, the color element 153R, 153G, 153B, 153C, 153M, and 153Y of the color filter substrate 102 is baked at a temperature of about 200 ° C. to completely solidify or cure. The temperature of the baking treatment can be determined as appropriate depending on the composition of the color element material liquid 153a. Further, it may be simply dried or aged in a different atmosphere (in nitrogen gas or in dry air) without heating to a particularly high temperature. Finally, in step S10, as shown in FIG. 12G, a transparent protective layer 187 is formed on the color element 153, and the manufacturing process of the color filter substrate is completed.

Hereinafter, effects of the first embodiment will be described. According to the first embodiment, the following effects can be obtained.
(1) In step S24 or step S34, the first liquid detector 11 is used to measure the transmittance of the transmitted partition wall material liquid 156a or color element material liquid 153a, and in step S25 or step S35, Based on the detection result, it is determined whether or not the partition wall material liquid 156a or the color element material liquid 153a is appropriate. If not, the storage unit 41a is reconnected. As a result, the reservoir 41a is filled with the inappropriate partition material liquid 156a or the color element material liquid 153a, or the reservoir 41a filled with the inappropriate partition material liquid 156a or the color element material liquid 153a is connected. As a result, it is possible to suppress the inappropriate partition material liquid 156a or the color element material liquid 153a from being supplied to the droplet discharge head 20.

  (2) In step S39, the second liquid detector 12 is used to measure the light transmittance of the transmitted color element material liquid 153a. In step S40, an appropriate color element material liquid is determined based on the detection result. If it is not appropriate, the connection of the supply pipe 463 is performed again. As a result, it is possible to suppress an inappropriate color element material liquid 153a from being supplied to the droplet discharge head 20 due to an inappropriate connection of the supply pipe 463 connecting the relay tank 43 and the droplet discharge head 20. Can do.

  (3) By providing the first liquid detector 11 in the vicinity of the functional liquid tank 41, it is possible to reduce the amount of the partition wall material liquid 156a or the color element material liquid 153a sent in the first temporary delivery in step S23 or step S33. it can.

  (4) By providing the second liquid detector 12 in the supply pipe 463 in the vicinity of the droplet discharge head 20, piping is made so that an appropriate color element material liquid 153a is sent out for each droplet discharge head 20. Can be verified.

(Second embodiment)
Next, a second embodiment, which is an embodiment of a liquid supply method, a device manufacturing method, and an organic EL light emitting device manufacturing method according to the present invention, will be described with reference to the drawings. In this embodiment, in the process of manufacturing an organic EL display device which is an example of a device, a functional liquid supply method used in the process of forming a light emitting layer and a hole transport layer which are examples of functional films will be described as an example. . Since the droplet discharge device of the present embodiment is substantially the same as the droplet discharge device described in the first embodiment, the description of the droplet discharge device is omitted.

<Configuration of organic EL display device>
First, the configuration of the organic EL display device will be described with reference to FIGS. FIG. 13 is a schematic diagram illustrating a planar configuration of the organic EL display device. FIG. 13A is a schematic front view showing an organic EL display device, and FIGS. 13B and 13C are plan views showing an arrangement example of organic EL elements. As shown in FIG. 13A, the organic EL display device 200 of this embodiment includes an element substrate 201 having a plurality of organic EL elements 207 that are light emitting elements, and a sealing substrate 209. The organic EL element 207 is a so-called color element, and the organic EL display device 200 includes three colors of organic EL elements 207, a red element 207R (red), a green element 207G (green), and a blue element 207B (blue). Have. The organic EL element 207 is disposed in the display area 206, and an image is displayed in the display area 206.

  As shown in FIGS. 13B and 13C, the three-color organic EL elements 207 on the element substrate 201 are partitioned by, for example, banks 215 formed in a lattice pattern by a non-translucent resin material. Then, the light emitting layer 217 (see FIG. 14) or the like is formed in a plurality of, for example, square regions arranged in a dot matrix. For example, the functional liquid containing the material of the hole transport layer 216 (see FIG. 14) and the light emitting layer 217 constituting the organic EL element 207 is filled in the area partitioned by the bank 215, and the solvent of the functional liquid is evaporated. By drying the functional liquid, the hole transport layer 216 and the light emitting layer 217 are formed.

  The element substrate 201 includes a plurality of switching elements 212 (see FIG. 14) as drive elements at positions corresponding to the respective organic EL elements 207. The switching element 212 is, for example, a TFT (Thin Film Transistor) element. In addition, two scanning line driving circuit portions 203 and one data line driving circuit portion 204 for driving the switching element 212 are provided in a portion that is slightly larger than the sealing substrate 209 and extends in a frame shape. A flexible relay substrate 208 for connecting the scanning line driving circuit unit 203 or the data line driving circuit unit 204 and an external driving circuit is mounted on the terminal portion 201 a of the element substrate 201. The scanning line driving circuit unit 203 and the data line driving circuit unit 204 are configured, for example, by previously forming a low-temperature polysilicon semiconductor layer on the surface of the element substrate 201.

  As the arrangement of the organic EL elements 207, for example, a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like are known. As shown in FIG. 13B, the stripe arrangement is an arrangement in which the matrix columns all become organic EL elements 207 of the same color. As shown in FIG. 13C, the mosaic arrangement is an arrangement in which the color is shifted by one organic EL element 207 for each row in the horizontal direction, and in the case of a three-color organic EL display device, on a vertical and horizontal straight line. Arbitrary three organic EL elements 207 are arranged in three colors. The delta arrangement (not shown) is an arrangement in which the organic EL elements 207 are arranged differently, and in the case of a three-color organic EL display device, any three adjacent organic EL elements 207 have different colors.

  FIG. 14 is a cross-sectional view of a main part including an organic EL element of an organic EL display device. As shown in FIG. 14, the element substrate 201 includes a glass substrate 210, a plurality of switching elements 212 formed on one surface of the glass substrate 210, and an insulating layer 211 formed so as to cover the switching elements 212. And a plurality of pixel electrodes 214 formed on the insulating layer 211 and electrically connected to the switching element 212 through the conductive layer 214a, and a bank 215 formed between the plurality of pixel electrodes 214. Further, a hole transport layer 216 formed on the pixel electrode 214 in a region partitioned by the bank 215 (hereinafter referred to as “pixel region 221”) and a layer stacked on the hole transport layer 216 are formed. The light emitting layer 217 and the counter electrode 218 provided so as to cover the light emitting layer 217 and the bank 215. In the organic EL display device 200, a sealing substrate 209 is disposed to face the counter electrode 218 of the element substrate 201, and an inert gas 220 is sealed between the counter electrode 218 and the sealing substrate 209. The hole transport layer 216, the light emitting layer 217, and the counter electrode 218 formed on the pixel electrode 214 in the region partitioned by the bank 215 correspond to the organic EL element 207.

  A red light emitting layer 217R (red), a green light emitting layer 217G (green), and a blue light emitting layer 217B (blue) are formed in the pixel region 221 to emit red light, green light, and blue light, respectively. Element 207R, green element 207G, and blue element 207B are formed. A set of organic EL elements 207 each including one red element 207R, one green element 207G, and one blue element 207B forms a picture element, which is the minimum unit constituting an image. Full color display is performed by selectively emitting any one or combination of the red element 207R, the green element 207G, and the blue element 207B in one pixel.

<Manufacture of organic EL elements>
Next, a process of forming the hole transport layer 216 and the light emitting layer 217 constituting the organic EL element 207 in the element substrate 201 of the organic EL display device 200 will be described with reference to FIGS. FIG. 15 is a flowchart showing a process for forming a hole transport layer and a light emitting layer of the element substrate, and FIGS. 16A to 16E are schematic cross-sectional views showing a process for forming the hole transport layer and the light emitting layer of the element substrate. It is. FIG. 17 is a flowchart showing a process of arranging the hole transport layer material liquid, and FIG. 18 is a flowchart showing a process of arranging the light emitting layer material liquid.

  In step S51 of FIG. 15, as shown in FIG. 16A, the bank 215 is formed on the surface of the glass substrate 210 on which the switching element 212, the insulating layer 211, the conductive layer 214a, and the pixel electrode 214 are formed. Form. The bank 215 is formed by, for example, applying a functional liquid containing the material of the bank 215 to the surface of the glass substrate 210 and drying it to form a bank film, and removing portions such as the pixel region 221 by photoetching or the like. . Next, in step S52, the glass substrate 210 on which the bank 215 is formed is cleaned.

  Next, in step S53, the glass substrate 210 on which the bank 215 is formed and cleaned is subjected to a surface treatment so that the arranged functional liquid can be easily adapted. The bottom of the pixel region 221 surrounded by the bank 215 and the side surface of the bank 215 are lyophilic with respect to the hole transport layer material liquid 560 that is a functional liquid containing the material of the hole transport layer 216. The top of the bank 215 is processed so as to be liquid repellent with respect to the hole transport layer material liquid 560. By this processing, the hole transport layer material liquid 560 disposed so as to be filled in the pixel region 221 can easily become familiar with the pixel region 221 and hardly overflow from the pixel region 221.

  Next, in step S54, the hole transport layer material liquid 560 is disposed. As shown in FIG. 16B, the hole transport layer material liquid 560 containing the material of the hole transport layer 216 in each of the plurality of pixel regions 221 formed by the bank 215 is supplied from the droplet discharge head 20 to the droplet 560a. The hole transport layer material liquid 560 is disposed in the pixel region 221.

  The step of disposing the hole transport layer material liquid 560 in the pixel region 221 to form the hole transport layer 216 will be described in more detail with reference to FIG. FIG. 17 is a flowchart showing a process of arranging the hole transport layer material liquid. In step S61 in FIG. 17, a supply pipe 463 (see FIG. 3A or FIG. 4) that sends the functional liquid 40 from the relay tank 43 (see FIG. 4) to the droplet discharge head 20 is connected. Of course, when it is not necessary to change the connection method of the six relay tanks 43 and the twelve droplet discharge heads 20 from the existing state, step S61 is omitted. Step S61 corresponds to a connection step of connecting the liquid supply pipe. Next, in step S62, the storage part 41a is connected to the functional liquid supply part 4 of the droplet discharge device 1 by coupling the storage stopper 41b to the storage part 41a filled with the hole transport layer material liquid 560. Step S62 corresponds to a connecting step of connecting a liquid supply pipe or a filling step of filling a liquid or functional liquid.

  Next, in step S63, the first provisional delivery for delivering the hole transport layer material liquid 560 to at least the position where the first liquid detector 11 of the supply pipe 461 faces, for example, to the sub tank 42 is executed. In order to limit the delivery of the hole transport layer material liquid 560 to the sub tank 42, for example, the first provisional delivery is performed with the valve between the sub tank 42 and the supply pipe 462 closed in advance. By performing the first provisional delivery with the valve closed in advance, the hole transport layer material liquid 560 is prevented from being delivered to other than the necessary portion. Step S63 corresponds to a trial delivery process.

  Next, in step S <b> 64, the type of the hole transport layer material liquid 560 is detected using the first liquid detector 11. In more detail, if the storage plug 41b is properly coupled to the reservoir 41a filled with the liquid fed to the supply pipe 461, that is, the hole transport layer material liquid 560, the hole transport is performed. The liquid material to be the layer material liquid 560 is irradiated with light from the light emitting element 11a, and the light receiving element 11b receives the transmitted light transmitted through the liquid material, thereby measuring the light transmittance of the liquid material. Step S64 corresponds to the detection step.

  Next, in step S65, it is determined whether or not the hole transport layer material liquid 560 is the hole transport layer material liquid 560 as set. More specifically, it is determined whether or not the light transmittance measured in step S64 matches the light transmittance of the hole transport layer material liquid 560 to be supplied, which has been measured in advance. Step S65 corresponds to a liquid material determination step or a functional liquid determination step.

  If the measured light transmittance does not match the light transmittance of the hole transport layer material liquid 560 to be supplied (NO in step S65), the process proceeds to step S66. In step S66, the hole transport layer material liquid supplied to the supply pipe 461 and the sub tank 42 (a liquid material determined to be different from the hole transport layer material liquid 560 to be supplied) is discharged. Further, the supply pipe 461 and the sub tank 42 from which the hole transport layer material liquid has been discharged are washed. Next, in step S67, the storage part 41a is connected to the functional liquid supply part 4 of the droplet discharge device 1 by coupling the storage stopper 41b to the storage part 41a filled with the hole transport layer material liquid 560 again. cure. After step S67, the process proceeds to step S63, and steps S63 to S65 are repeated. As described above, the droplet discharge device 1 of the present embodiment includes six sets of the functional liquid tank 41, the sub tank 42, and the relay tank 43, and each step from step S61 to step S67 is performed. This is executed for each set of the functional liquid tank 41, the sub tank 42, and the relay tank 43.

  If the light transmittance measured in step S64 matches the light transmittance of the hole transport layer material liquid 560 to be supplied (YES in step S65), the process proceeds to step S68. In step S <b> 68, the hole transport layer material liquid 560 is sent out beyond the supply pipe 461 and the sub tank 42, so that the hole transport layer material liquid 560 can be discharged from the droplet discharge head 20. Step S68 corresponds to the main sending process. The droplet discharge head 20 corresponds to a usable position or an arrangement portion.

  Next, in step S69, the hole transport layer material liquid 560 is discharged from the droplet discharge head 20. More specifically, the droplet discharge head 20 is positioned so as to sequentially face the pixel region 221 where the hole transport layer 216 is formed, and the hole transport layer material liquid 560 is formed as a droplet 560a from the droplet discharge head 20. The ink is discharged and landed on the pixel region 221. Of course, in parallel with the discharge from the droplet discharge head 20 of the hole transport layer material liquid 560 in step S69, the step of sending out the hole transport layer material liquid 560 in step S68 is executed, and the droplet discharge head 20 The hole transport layer material liquid 560 discharged from the liquid is supplied to the droplet discharge head 20. A predetermined amount of the hole transport layer material liquid 560 is landed on the pixel region 221 and the step of placing the hole transport layer material liquid 560 (the hole transport layer material liquid placement process of step S54 in FIG. 15) is completed. .

  Next, in step S55 of FIG. 15, the glass substrate 210 in which the hole transport layer material liquid 560 is disposed in the pixel region 221 is put into a reduced pressure environment, and the hole transport layer material liquid 560 is dried to transport holes. Layer 216 is formed. Strictly speaking, the hole transport layer material liquid 560 starts drying from the moment it is ejected as the droplet 560a from the droplet ejection head 20, but the boiling point of the solvent of the hole transport layer material liquid 560 is adjusted. By doing so, it can be hardened to the extent that it does not flow when it hits and spreads. After step S55 is completed, the hole transport layer 216 is formed as shown in FIG.

  Next, in step S56, the light emitting layer material liquid 570 is disposed. As shown in FIG. 16D, the light emitting layer material liquid 570 containing the material of the light emitting layer 217 in each of the plurality of pixel regions 221 in which the hole transport layer 216 is formed is supplied from the droplet discharge head 20 to the droplet 570a. The light emitting layer material liquid 570 is disposed on the hole transport layer 216 in the pixel region 221. Of course, the light emitting layer material liquid 570 containing a different light emitting layer material is discharged to each pixel region 221 where the light emitting layers 217 of different colors are formed. For example, in the above-described color display by the three color light emitting layers (see FIG. 13), the red light emitting layer 217R (red system) and the green light emitting layer 217G (green system) emit red, green, and blue light, respectively. The light emitting layer material liquid 570 containing the material of each light emitting layer 217 is discharged from the droplet discharge head 20 toward the pixel region 221 where the blue light emitting layer 217B (blue system) is to be formed.

  When the surface treatment performed in step S53 so that the hole transport layer material liquid 560 is easily adapted to the pixel region 221 and does not easily overflow from the pixel region 221 is not effective for the light emitting layer material solution 570, Before executing step S56, the same surface treatment as that executed in step S53 is executed. Of course, the processing executed in this case is a surface treatment that makes it easy for the light emitting layer material liquid 570 to become familiar with the pixel region 221 and not to overflow from the pixel region 221.

  The step of disposing the light emitting layer material liquid 570 in the pixel region 221 in order to form the light emitting layer 217 will be described in more detail with reference to FIG. FIG. 18 is a flowchart showing a process of arranging the light emitting layer material liquid. In step S81 in FIG. 18, a supply pipe 463 (see FIG. 3A or FIG. 4) that sends the functional liquid 40 from the relay tank 43 (see FIG. 4) to the droplet discharge head 20 is connected. For example, the supply pipes 463R, 463G, and 463B connected to the relay tanks 43R, 43G, and 43B in which the three types of light emitting layer material liquids 570R, 570G, and 570B are stored are respectively used as the light emitting layer material liquids 570R and 570G. , 570B are connected to the droplet discharge head 20 to be discharged. Of course, when there is no need to change the connection method of the six relay tanks 43 and the twelve droplet discharge heads 20 from the existing state, step S81 is omitted. Step S81 corresponds to a connection step of connecting the liquid supply pipe.

  Next, in step S82, the storage plug 41b is coupled to the storage unit 41a filled with each of the three types of light emitting layer material liquids 570R, 570G, and 570B, thereby allowing the functional liquid supply unit 4 of the droplet discharge device 1 to be connected. The storage portions 41a filled with the three kinds of light emitting layer material liquids 570R, 570G, and 570B are connected to each other. Step S82 corresponds to a connecting step of connecting the liquid supply pipe or a filling step of filling the liquid material or functional liquid.

  Next, in step S83, first temporary delivery is performed in which the light emitting layer material liquid 570 is delivered to at least the position where the first liquid detector 11 of the supply pipe 461 faces, for example, to the sub tank 42. In order to keep the emission layer material liquid 570 from being delivered to the sub tank 42, for example, the first provisional delivery is executed in a state where the valve between the sub tank 42 and the supply pipe 462 is closed in advance. Step S83 corresponds to a trial delivery process.

  Next, in step S84, the first liquid detector 11 is used to detect the type of the light emitting layer material liquid 570. More specifically, the liquid material sent to the supply pipe 461 is irradiated with light from the light emitting element 11a, and the light receiving element 11b receives the transmitted light that has passed through the liquid material. Measure the transmittance. If the liquid stopper is correctly executed to couple the storage plug 41b to the storage part 41a filled with the light emitting layer material liquid 570, the liquid material should be, for example, one of the light emitting layer material liquids 570R, 570G, and 570B. Is the body. Step S84 corresponds to a detection step.

  Next, in step S85, it is determined whether or not the light emitting layer material liquid 570 is the light emitting layer material liquid 570R, the light emitting layer material liquid 570G, or the light emitting layer material liquid 570B as set. More specifically, the light transmittance measured in step S84 is the light transmittance of the light emitting layer material liquid 570R, the light emitting layer material liquid 570G, or the light emitting layer material liquid 570B to be supplied, which has been measured in advance. It is determined whether or not they match. Step S85 corresponds to a liquid material determination step or a functional liquid determination step.

  If the measured light transmittance does not match the light transmittance of the light emitting layer material liquid 570R, light emitting layer material liquid 570G, or light emitting layer material liquid 570B to be supplied (NO in step S85), step Proceed to S86. In step S86, the light emitting layer material liquid supplied to the supply pipe 461 and the sub tank 42 (the liquid material determined to be different from the light emitting layer material liquid 570R, the light emitting layer material liquid 570G, or the light emitting layer material liquid 570B to be supplied). ). Further, the supply pipe 461 and the sub tank 42 from which the liquid material has been discharged are washed.

  Next, in step S87, the connection of the storage part 41a is corrected. That is, the storage part 41a is connected again to the functional liquid supply part 4 of the droplet discharge device 1 by coupling the storage plug 41b to the storage part 41a filled with the light emitting layer material liquid 570 again. After step S87, the process proceeds to step S83, and steps S83 to S85 are repeated. As described above, the droplet discharge device 1 of the present embodiment includes six sets of the functional liquid tank 41, the sub tank 42, and the relay tank 43, and each step from step S81 to step S87 is performed. This is executed for each set of the functional liquid tank 41, the sub tank 42, and the relay tank 43.

  If the measured light transmittance matches the light transmittance of the light emitting layer material liquid 570 to be supplied (YES in step S85), the process proceeds to step S88. In step S88, second provisional delivery is performed in which the light emitting layer material liquid 570 is delivered to at least a position where the second liquid detector 12 of the supply pipe 463 faces, for example, before the droplet discharge head 20. In order to keep the emission layer material liquid 570 from being delivered to the front of the droplet discharge head 20, for example, the pressure application unit 60 adjusts the pressure at which the emission layer material liquid 570 is delivered in the sub tank 42. Step S88 corresponds to a trial delivery process.

  Next, in step S89, the second liquid detector 12 is used to detect the type of the light emitting layer material liquid 570. More specifically, the light-emitting layer material liquid 570 sent to the supply pipe 463 connected to the droplet discharge head 20 to discharge the light-emitting layer material liquid 570R, the light-emitting layer material liquid 570G, or the light-emitting layer material liquid 570B. The light transmittance of the liquid material is measured by irradiating light from the light emitting element 12a and receiving the transmitted light transmitted through the liquid material by the light receiving element 12b. The light emitting layer material liquid 570 delivered to the supply pipe 463 is a light emitting layer material liquid 570 that should be one of the light emitting layer material liquid 570R, the light emitting layer material liquid 570G, or the light emitting layer material liquid 570B. Step S89 corresponds to a detection step.

  Next, in step S90, it is determined whether or not the light emitting layer material liquid 570 is the light emitting layer material liquid 570R, the light emitting layer material liquid 570G, or the light emitting layer material liquid 570B as set. More specifically, the light transmittance measured in step S89 is the light transmittance of the light emitting layer material liquid 570R, the light emitting layer material liquid 570G, or the light emitting layer material liquid 570B to be supplied, which has been measured in advance. It is determined whether or not they match. Step S90 corresponds to a liquid material determination step or a functional liquid determination step.

  If the measured light transmittance does not match the light transmittance of the light emitting layer material liquid 570R, light emitting layer material liquid 570G, or light emitting layer material liquid 570B to be supplied (NO in step S90), step Proceed to S91. In step S91, it is determined that the light emitting layer material liquid 570 supplied to the front of the droplet discharge head 20 (the light emitting layer material liquid 570R, the light emitting layer material liquid 570G, or the light emitting layer material liquid 570B to be supplied is different). Liquid). Further, the supply pipe 461, the sub tank 42, the supply pipe 462, the relay tank 43, and the supply pipe 463 from which the liquid material has been discharged are washed.

  Next, in step S92, the connection of the supply pipe 463 is corrected. In other words, the supply pipes 463R, 463G, and 463B connected to the relay tanks 43R, 43G, and 43B, respectively, in which the three types of light emitting layer material liquids 570R, 570G, and 570B are stored are respectively replaced with the light emitting layer material liquid 570R. The light emitting layer material liquid 570G or the light emitting layer material liquid 570B is connected to the droplet discharge head 20 to be discharged. After step S92, the process proceeds to step S88, and steps S88 to S90 are repeated. As described above, the droplet discharge device 1 includes the twelve droplet discharge heads 20, and each step from step S 88 to step S 92 is performed for each supply pipe 463 connected to the twelve droplet discharge heads 20. Run each.

  If the measured light transmittance matches the light transmittance of the light emitting layer material liquid 570R, the light emitting layer material liquid 570G, or the light emitting layer material liquid 570B to be supplied (YES in step S90), the process proceeds to step S93. move on. In step S <b> 93, the light emitting layer material liquid 570 </ b> R, the light emitting layer material liquid 570 </ b> G, or the light emitting layer material liquid 570 </ b> B is sent out to the droplet discharge head 20 so that it can be discharged from the droplet discharge head 20. Step S93 corresponds to the main sending process. The droplet discharge head 20 corresponds to a usable position or an arrangement portion.

  Next, in step S94, the light emitting layer material liquids 570R, 570G, and 570B are ejected from the droplet ejection head 20. More specifically, positioning is performed so that the droplet discharge head 20 sequentially faces the pixel region 221, and the light emitting layer material liquid 570 is discharged from the droplet discharge head 20 as the droplet 570 a to land on the pixel region 221. . Of course, the light emitting layer material liquid 570R and the light emitting layer material liquid in step S93 are concurrently with the discharge of the light emitting layer material liquid 570R, the light emitting layer material liquid 570G, and the light emitting layer material liquid 570B from the droplet discharge head 20 in step S94. The step of delivering 570G or the light emitting layer material liquid 570B is executed, and the light emitting layer material liquid 570R, the light emitting layer material liquid 570G, or the light emitting layer material liquid 570B discharged from the liquid droplet discharge head 20 is supplied to the liquid droplet discharge head 20. Supply. A predetermined amount of the light emitting layer material liquid 570R, the light emitting layer material liquid 570G, or the light emitting layer material is provided in each pixel region 221 in which the light emitting layer material liquid 570R, the light emitting layer material liquid 570G, or the light emitting layer material liquid 570B is to be disposed. Liquid 570B is landed and the process of disposing the light emitting layer material liquid 570 (the light emitting layer material liquid disposing process of step S56 in FIG. 15) is completed.

  Next, in step S57 of FIG. 15, the glass substrate 210 in which the light emitting layer material liquid 570 is disposed in the pixel region 221 is put into a reduced pressure environment, and the light emitting layer material liquid 570 is dried to form the light emitting layer 217. Strictly speaking, the light emitting layer material liquid 570 starts drying from the moment it is ejected as droplets 570a from the droplet ejection head 20, but by adjusting the boiling point of the solvent of the light emitting layer material liquid 570, etc. It can be solidified to the extent that it does not flow when it hits and spreads. After step S57 is completed, the light emitting layer 217 is formed as shown in FIG.

  As shown in FIG. 16E, the light emitting layer 217 is formed, and the formation process of the hole transport layer 216 and the light emitting layer 217 is completed. Further, a step of forming the counter electrode 218 is executed to form the element substrate 201. Furthermore, the sealing substrate 209 is attached, and the above-described relay substrate 208 and the like are mounted to form the organic EL display device 200.

Hereinafter, effects of the second embodiment will be described. According to the second embodiment, the following effects can be obtained.
(1) In step S64 or step S84, the first liquid detector 11 is used to measure the light transmittance of the transmitted hole transport layer material liquid 560 or light emitting layer material liquid 570, and step S65 or step In S85, it is determined whether or not the hole transport layer material liquid 560 or the light emitting layer material liquid 570 is appropriate based on the detection result. If not, the connection of the storage unit 41a is performed again. As a result, the reservoir 41a is filled with the inappropriate hole transport layer material liquid 560 or the light emitting layer material liquid 570, or is filled with the inappropriate hole transport layer material liquid 560 or the light emitting layer material liquid 570. By connecting the reservoir 41a, it is possible to prevent the inappropriate hole transport layer material liquid 560 or the light emitting layer material liquid 570 from being supplied to the droplet discharge head 20.

  (2) In step S89, the second liquid detector 12 is used to measure the light transmittance of the emitted light emitting layer material liquid 570. In step S90, an appropriate light emitting layer material liquid is determined based on the detection result. If it is not appropriate, the supply pipe 463 is connected again. As a result, it is possible to prevent the inappropriate light emitting layer material liquid 570 from being supplied to the droplet discharge head 20 due to the inappropriate connection of the supply pipe 463 connecting the relay tank 43 and the droplet discharge head 20. Can do.

(Third embodiment)
Next, a third embodiment which is an embodiment of a liquid supply method, a device manufacturing method, and a wiring board manufacturing method according to the present invention will be described with reference to the drawings. In this embodiment, a method for supplying a functional liquid used in a process of forming a circuit wiring layer as an example of a functional film in a process of manufacturing a wiring board as an example of a device will be described. Since the droplet discharge device of the present embodiment is substantially the same as the droplet discharge device described in the first embodiment, the description of the droplet discharge device is omitted.

<Configuration of wiring board>
First, the configuration of the wiring board will be described with reference to FIG. FIG. 19 is a schematic plan view showing a wiring board. As shown in FIG. 19, the wiring board 300 is a circuit board on which a semiconductor device (IC) is mounted in a plane, and an input as wiring made of a conductive material arranged corresponding to the input / output electrodes (bumps) of the IC. The wiring 301, the output wiring 303, and the insulating film 307 are included. The insulating film 307 is formed inside the outer shape 306 indicated by a two-dot chain line and in a portion other than the mounting region 305 indicated by the two-dot chain line, while avoiding the input terminal portion 302 and the output terminal portion 304, The plurality of input wirings 301 and output wirings 303 are covered so that a part of each of the input wirings 301 and the output wirings 303 is exposed inside the mounting region 305. The wiring board 300 is formed in a matrix on the mother board 300A, and is taken out by dividing the mother board 300A. For the mother substrate 300A, a rigid glass substrate, a ceramic substrate, a glass epoxy resin substrate, or a flexible resin substrate can be used as an insulating substrate. As a dividing method, scribing, dicing, laser cutting, pressing, or the like is selected according to the material of the mother substrate 300A.

  In the present embodiment, the input wiring 301 and the output wiring 303 made of a conductive material and the insulating film 307 made of an insulating material are formed by the droplet discharge method using the droplet discharge apparatus 1 described in the first embodiment. To do. By using the droplet discharge method, it is possible to form a wiring or an insulating film without wasting each material. Further, since steps such as an exposure mask for forming a pattern, development, and etching are not required as compared with the photolithography method, the steps can be simplified regardless of the size of the mother substrate 300A.

<Manufacture of wiring boards>
Next, a process of forming the input wiring 301, the output wiring 303, and the insulating film 307 of the wiring board 300 will be described with reference to FIG. FIG. 20 is a flowchart showing a process for forming the input wiring, the output wiring, and the insulating film on the wiring board.

  In step S101 of FIG. 20, in the droplet discharge device 1 that discharges the conductive material liquid to form the input wiring 301 and the output wiring 303, the functional liquid 40 is transferred from the relay tank 43 (see FIG. 4) to the droplet discharge head 20. Is connected to a supply pipe 463 (see FIG. 3A or 4). Of course, if there is no need to change the connection method of the six relay tanks 43 and the twelve droplet discharge heads 20 from the existing state, step S101 is omitted. Step S101 corresponds to a connection step of connecting the liquid supply pipe. Next, in step S102, the storage part 41a is connected to the functional liquid supply part 4 of the droplet discharge device 1 by coupling the storage plug 41b to the storage part 41a filled with the conductive material liquid. Step S102 corresponds to a connecting step of connecting the liquid supply pipe or a filling step of filling the liquid or functional liquid.

  Examples of the conductive material contained in the conductive material liquid include metal fine particles containing at least one of gold, silver, copper, aluminum, palladium, and nickel, oxides thereof, and conductive polymers. Or fine particles of superconductors are used. These conductive fine particles can be used by coating the surface with an organic substance or the like in order to improve dispersibility. The particle diameter of the conductive fine particles is preferably 1 nm or more and 1.0 μm or less. If it is larger than 1.0 μm, the discharge nozzle 72 (see FIG. 2) of the droplet discharge head 20 may be clogged. On the other hand, if the thickness is smaller than 1 nm, the volume ratio of the coating agent to the conductive fine particles becomes large, and the ratio of organic substances in the obtained film becomes excessive.

  The dispersion medium is not particularly limited as long as it can disperse the conductive fine particles and does not cause aggregation. For example, in addition to water, alcohols such as methanol, ethanol, propanol, butanol, n-heptane, n-octane, decane, dodecane, tetradecane, toluene, xylene, cymene, durene, indene, dipentene, tetrahydronaphthalene, decahydro Hydrocarbon compounds such as naphthalene and cyclohexylbenzene, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol methyl ethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether, 1,2-dimethoxyethane, bis (2- Methoxyethyl) ether, ether compounds such as p-dioxane, propylene carbonate, γ- Butyrolactone, N- methyl-2-pyrrolidone, dimethylformamide, dimethyl sulfoxide, can be exemplified polar compounds such as cyclohexanone. Of these, water, alcohols, hydrocarbon compounds, and ether compounds are preferable and more preferable dispersion media in terms of fine particle dispersibility, dispersion stability, and ease of application to the droplet discharge method. Examples thereof include water and hydrocarbon compounds.

  The surface tension of the conductive fine particle dispersion is preferably in the range of 0.02 N / m to 0.07 N / m. When the functional liquid is discharged by the droplet discharge method, if the surface tension is less than 0.02 N / m, the wettability of the functional liquid to the nozzle surface increases, and thus flight bending easily occurs, and 0.07 N / m is set. If it exceeds, the shape of the meniscus at the tip of the discharge nozzle 72 will not be stable, and it will be difficult to control the discharge amount and the discharge timing. In order to adjust the surface tension, a small amount of a surface tension adjusting agent such as a fluorine-based, silicone-based, or nonionic-based material may be added to the dispersion liquid in a range that does not significantly decrease the contact angle with the mother substrate 300A. The nonionic surface tension modifier improves the wettability of the functional liquid to the mother substrate 300A, improves the leveling property of the film, and helps prevent the occurrence of fine irregularities on the film. The surface tension modifier may contain an organic compound such as alcohol, ether, ester, or ketone, if necessary.

  The viscosity of the dispersion is preferably 1 mPa · s to 50 mPa · s. When discharging the functional liquid as droplets using the droplet discharge method, if the viscosity is less than 1 mPa · s, the periphery of the discharge nozzle 72 is easily contaminated by the outflow of the functional liquid, and the viscosity is greater than 50 mPa · s. In this case, the clogging frequency in the nozzle hole of the discharge nozzle 72 increases, and it becomes difficult to smoothly discharge droplets.

  Next, in step S103, first temporary delivery is performed in which the conductive material liquid is delivered to at least the position where the first liquid detector 11 of the supply pipe 461 faces, for example, to the sub tank 42. In order to keep the conductive material liquid from being delivered to the sub tank 42, for example, the first provisional delivery is performed with the valve between the sub tank 42 and the supply pipe 462 closed in advance. By conducting the first temporary delivery with the valve closed in advance, the conductive material liquid is prevented from being delivered to parts other than the necessary parts. Step S103 corresponds to a trial delivery process.

  Next, in step S104, the first liquid detector 11 is used to detect the type of conductive material liquid. More specifically, the liquid material that has been delivered to the supply pipe 461, that is, the liquid material that should be the conductive material liquid if the storage stopper 41b is properly coupled to the storage portion 41a filled with the conductive material liquid. The body is irradiated with light from the light emitting element 11a, and the light receiving element 11b receives the transmitted light that has passed through the liquid material, thereby measuring the light transmittance of the liquid material. Step S104 corresponds to a detection step.

  Next, in step S105, it is determined whether or not the conductive material liquid is a conductive material liquid as set. More specifically, it is determined whether or not the light transmittance measured in step S104 matches the light transmittance of the conductive material liquid to be supplied that has been measured in advance. Step S105 corresponds to a liquid material determination step or a functional liquid determination step.

  If the measured light transmittance does not match the light transmittance of the conductive material liquid to be supplied (NO in step S105), the process proceeds to step S106. In step S106, the conductive material liquid supplied to the supply pipe 461 and the sub tank 42 (the liquid material determined to be different from the conductive material liquid to be supplied) is discharged. Further, the supply pipe 461 and the sub tank 42 from which the conductive material liquid has been discharged are washed.

  Next, in step S107, the storage unit 41a is reconnected to the functional liquid supply unit 4 of the droplet discharge device 1 by coupling the storage plug 41b to the storage unit 41a filled with the conductive material liquid. After step S107, the process proceeds to step S103, and steps S103 to S105 are repeated. As described above, the droplet discharge device 1 of this embodiment includes six sets of the functional liquid tank 41, the sub tank 42, and the relay tank 43, and each step from step S101 to step S107 is performed. This is executed for each set of the functional liquid tank 41, the sub tank 42, and the relay tank 43.

  If the light transmittance measured in step S104 matches the light transmittance of the conductive material liquid to be supplied (YES in step S105), the process proceeds to step S108. In step S <b> 108, the conductive material liquid is sent beyond the supply pipe 461 and the sub-tank 42, so that the conductive material liquid can be discharged from the droplet discharge head 20. Step S108 corresponds to the main sending process. The droplet discharge head 20 corresponds to a usable position or an arrangement portion.

  Next, in step S109, the conductive material liquid is discharged from the droplet discharge head 20. More specifically, the droplet discharge head 20 is positioned so as to face the region where the input wiring 301 or the output wiring 303 on the mother substrate 300A is to be formed, and the conductive material liquid is dropped from the droplet discharge head 20. And land on the region where the input wiring 301 or the output wiring 303 is to be formed. Of course, in parallel with the discharge of the conductive material liquid from the droplet discharge head 20 in step S109, the process of sending the conductive material liquid in step S108 is executed, and the conductive material liquid discharged from the droplet discharge head 20 is liquidated. It is supplied to the droplet discharge head 20. A predetermined amount of the conductive material liquid is landed on the entire area of the mother substrate 300A where the input wiring 301 or the output wiring 303 is to be formed, and the process of discharging the conductive material liquid is completed.

  Next, in step S110, the conductive material liquid that has landed on the region where the input wiring 301 or the output wiring 303 is to be formed is solidified by drying and baking to form the input wiring 301 and the output wiring 303. Examples of the drying / firing method include a batch method in which the mother substrate 300A is left in a drying furnace and then dried / fired at a predetermined temperature, and an in-line method in which the substrate passes through the drying furnace. Examples of the heat source include a heater and an infrared lamp.

  Next, in step S201, in the droplet discharge device 1 that discharges the insulating material liquid to form the insulating film 307, the supply pipe that sends the functional liquid 40 from the relay tank 43 (see FIG. 4) to the droplet discharge head 20. 463 (see FIG. 3A or 4) is connected. Of course, when it is not necessary to change the connection method of the six relay tanks 43 and the twelve droplet discharge heads 20 from the existing state, step S201 is omitted. Step S201 corresponds to a connection step of connecting the liquid supply pipe. Next, in step S202, the storage part 41a is connected to the functional liquid supply part 4 of the droplet discharge device 1 by coupling the storage plug 41b to the storage part 41a filled with the insulating material liquid. Step S202 corresponds to a connection step of connecting the liquid supply pipe or a filling step of filling the liquid material or functional liquid.

  As the insulating material contained in the insulating material liquid, for example, a polymer material such as an epoxy resin or a urethane resin having insulating properties can be used. Examples of the solvent include hydrocarbon solvents that can dissolve the above materials. The physical properties of the insulating material liquid are adjusted in accordance with the droplet discharge method as in the case of the conductive material liquid described above.

  Next, in step S203, first temporary delivery is performed in which the insulating material liquid is delivered to at least the position where the first liquid detector 11 of the supply pipe 461 faces, for example, to the sub tank 42. In order to keep the insulating material liquid from being delivered to the sub tank 42, for example, the first provisional delivery is performed with the valve between the sub tank 42 and the supply pipe 462 closed in advance. By performing the first temporary delivery with the valve closed in advance, it is possible to prevent the insulating material liquid from being delivered to parts other than necessary. Step S203 corresponds to a trial delivery process.

  Next, in step S204, the first liquid detector 11 is used to detect the type of insulating material liquid. More specifically, the liquid material that has been delivered to the supply pipe 461, that is, the predetermined insulating material liquid is obtained if the storage plug 41b is correctly coupled to the storage portion 41a filled with the insulating material liquid. The light liquid is irradiated from the light emitting element 11a, and the light receiving element 11b receives the transmitted light that has passed through the liquid, thereby measuring the light transmittance of the liquid. Step S204 corresponds to a detection step.

  Next, in step S205, it is determined whether the insulating material liquid is an insulating material liquid as set. More specifically, it is determined whether or not the light transmittance measured in step S204 matches the light transmittance of the insulating material liquid to be supplied that has been measured in advance. Step S205 corresponds to a liquid material determination step or a functional liquid determination step.

  If the measured light transmittance does not match the light transmittance of the insulating material liquid to be supplied (NO in step S205), the process proceeds to step S206. In step S206, the insulating material liquid supplied to the supply pipe 461 and the sub tank 42 (liquid body determined to be different from the insulating material liquid to be supplied) is discharged. Further, the supply pipe 461 and the sub tank 42 from which the insulating material liquid has been discharged are washed.

  Next, in step S207, the storage part 41a is reconnected to the functional liquid supply part 4 of the droplet discharge device 1 by coupling the storage stopper 41b to the storage part 41a filled with the insulating material liquid. After step S207, the process proceeds to step S203, and steps S203 to S205 are repeated. As described above, the droplet discharge device 1 of the present embodiment includes six sets of the functional liquid tank 41, the sub tank 42, and the relay tank 43, and each step from step S201 to step S207 is performed. This is executed for each set of the functional liquid tank 41, the sub tank 42, and the relay tank 43.

  If the light transmittance measured in step S204 matches the light transmittance of the insulating material liquid to be supplied (YES in step S205), the process proceeds to step S208. In step S <b> 208, the insulating material liquid is sent beyond the supply pipe 461 and the sub-tank 42 so that the insulating material liquid can be discharged from the droplet discharge head 20. Step S208 corresponds to the main sending process. The droplet discharge head 20 corresponds to a usable position or an arrangement portion.

  Next, in step S209, the insulating material liquid is discharged from the droplet discharge head 20. More specifically, positioning is performed so that the droplet discharge heads 20 are sequentially opposed to a region where the insulating film 307 is formed on the mother substrate 300A, and the insulating material liquid is discharged as droplets from the droplet discharge head 20, Landing is performed on a region where the insulating film 307 is formed. Of course, in parallel with the discharge of the insulating material liquid from the droplet discharge head 20 in step S209, the step of sending the insulating material liquid in step S208 is executed, and the insulating material liquid discharged from the droplet discharge head 20 is liquidated. It is supplied to the droplet discharge head 20. A predetermined amount of the insulating material liquid is landed on the entire region of the mother substrate 300A where the insulating film 307 is to be formed, and the step of disposing the insulating material liquid is completed.

  Next, in step S210, the insulating material liquid that has landed on the region where the insulating film 307 is to be formed is dried and solidified to form the insulating film 307. Examples of the drying method include a batch method in which the mother substrate 300A is left in a drying furnace and dried at a predetermined temperature, and an in-line method in which the mother substrate 300A is passed through the drying furnace. Examples of the heat source include a heater and an infrared lamp. Note that a photosensitive resin material can be used as the insulating material. In that case, the landed functional liquid is solidified by irradiating with ultraviolet rays or the like.

  By dividing the mother substrate 300A on which the input wiring 301, the output wiring 303, and the insulating film 307 are formed into a predetermined shape, the wiring substrate 300 is formed.

Hereinafter, effects of the third embodiment will be described. According to the third embodiment, the following effects can be obtained.
(1) In step S104 or step S204, the first liquid detector 11 is used to measure the light transmittance of the transmitted conductive material liquid or insulating material liquid. In step S105 or step S205, the detection result is obtained. Based on this, it is determined whether or not the liquid is an appropriate conductive material liquid or insulating material liquid. If the liquid is not appropriate, the storage unit 41a is reconnected. As a result, the reservoir 41a is filled with an inappropriate conductive material liquid or insulating material liquid, or the reservoir 41a filled with an inappropriate conductive material liquid or insulating material liquid is connected. It is possible to suppress an appropriate conductive material liquid or insulating material liquid from being supplied to the droplet discharge head 20.

  As mentioned above, although preferred embodiment which concerns on this invention was described referring an accompanying drawing, embodiment of this invention is not restricted to the said embodiment. The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention, and can be implemented as follows.

  (Modification 1) In the above embodiment, the first liquid detector 11 and the second liquid detector 12 are provided and the functional liquid is detected at two places. However, it is essential to provide the liquid detector at two places. is not. You may provide only in either one.

  (Modification 2) In the above-described embodiment, the first liquid detector 11 is provided in the vicinity of the functional liquid tank 41 and the second liquid detector 12 is provided in the vicinity of the droplet discharge head 20. Alternatively, it is not essential to be provided near the droplet discharge head. You may provide in the other part of a supply pipe | tube.

  (Modification 3) In the above-described embodiment, the supply pipe 46 is formed of a transparent material that transmits light. However, it is not essential that the entire supply pipe is formed of a transparent material. A configuration in which only a portion facing the detector is formed of a transparent material may be used. Or the structure which connects the pipe | tube for a detection different from a supply pipe | tube in the middle of a supply pipe | tube may be sufficient.

  (Modification 4) In the above embodiment, the first liquid detector 11 and the second liquid detector 12 are provided facing the supply pipe 46, but it is essential to detect the functional liquid in the supply pipe with the liquid detector. is not. It may be configured to detect a functional liquid in a tank such as the sub tank 42, the relay tank 43, or the functional liquid tank 41.

  (Modification 5) In the above-described embodiment, the pressure application unit 60 is provided, the function liquid is sent out by applying pressure to the function liquid, and the state of the function liquid in the droplet discharge head 20 is appropriately maintained. However, it is not essential to supply liquid under pressure. It may be a configuration and method for supplying liquid by adjusting the height of the liquid surface on the tank side for supplying the functional liquid by adjusting the height of the sub tank 42 and the like.

  (Modification 6) In the first embodiment, the color filter of the liquid crystal display device has been described. However, the color filter that can be suitably manufactured using the present invention is not limited to the color filter of the liquid crystal display device. By using the method for producing a color filter of the present invention, a color filter for an organic EL device that forms a color organic EL device in combination with a light emitting layer that emits colorless light can also be suitably produced.

  (Modification 7) In the third embodiment, the process of manufacturing the wiring board has been described. However, the metal wiring that can be preferably manufactured using the present invention is not limited to the wiring of the wiring board. By using the wiring substrate manufacturing method of the present invention, data lines and scanning lines of switching elements, circuit wirings, insulating films that insulate them from each other are suitably formed, and an element of a liquid crystal display device having them A board | substrate, the element board | substrate of an organic EL apparatus, etc. can be manufactured suitably.

  (Modification 8) In the embodiment described above, the type of the functional liquid is detected by measuring the transmittance of the transmitted light that has passed through the functional liquid such as the conductive material liquid. However, in order to detect the type of the functional liquid. It is not essential to measure the transmittance. For example, a wavelength dispersion detector that irradiates an electron beam and selects and measures an arbitrary wavelength from excited signals may be used.

FIG. 3 is an external perspective view showing a schematic configuration of a droplet discharge device. FIG. 3 is an external perspective view of the droplet discharge head as viewed from the nozzle forming plate side. FIG. 3 is an external perspective view of a head unit. The schematic diagram which shows the structure of a functional liquid supply part. FIG. 3 is an electrical configuration block diagram showing an electrical configuration of the droplet discharge device. (A) The top view which looked at the liquid crystal display panel from the filter substrate side. (B) The schematic sectional drawing which shows the cross-sectional shape in the cross section shown by AA in Fig.6 (a). (A) The schematic diagram which shows typically the planar structure of a color filter. (B) The schematic diagram which shows typically the planar structure of the mother board | substrate with which the several color filter was formed. (A) The top view which shows the example of an arrangement | sequence of 4 color filter. (B) The top view which shows the example of an arrangement | sequence of a 6 color filter. (C) The top view which shows the example of an array of 6 color filter. The flowchart which shows the manufacturing process of a color filter board | substrate. The flowchart which shows the process of forming a partition. The flowchart which shows the process of forming a color element. The schematic cross section which shows the manufacturing process of a color filter board | substrate. (A) The schematic front view which shows an organic electroluminescence display. (B) The top view which shows the example of an arrangement | sequence of an organic EL element. (C) The top view which shows the example of an arrangement | sequence of an organic EL element. Sectional drawing of the principal part containing the organic EL element of an organic EL display apparatus. The flowchart which shows the formation process of the positive hole transport layer and light emitting layer of an element substrate. The schematic cross section which shows the formation process of the positive hole transport layer and light emitting layer of an element substrate. The flowchart which shows the process of arrange | positioning a positive hole transport layer material liquid. The flowchart which shows the process of arrange | positioning a light emitting layer material liquid. The schematic plan view which shows a wiring board. The flowchart which shows the formation process of the input wiring of a wiring board, an output wiring, and an insulating film.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge apparatus, 2 ... Head mechanism part, 4 ... Functional liquid supply part, 11 ... 1st liquid detector, 12 ... 2nd liquid detector, 20 ... Droplet discharge head, 41 ... Functional liquid tank, 41a DESCRIPTION OF SYMBOLS ... Storage part, 41b ... Storage stopper, 42 ... Sub tank, 43 ... Relay tank, 46 ... Supply pipe, 60 ... Pressure application part, 102 ... Color filter substrate, 105 ... Color filter, 110 ... Liquid crystal display panel, 152 ... Color element 153 ... color element, 153a ... color element material liquid, 156 ... partition wall, 156a ... partition wall material liquid, 200 ... organic EL display device, 207 ... organic EL element, 215 ... bank, 216 ... hole transport layer, 217 ... Luminescent layer, 217B ... blue luminescent layer, 217G ... green luminescent layer, 217R ... red luminescent layer, 221 ... pixel region, 300 ... wiring substrate, 301 ... input wiring, 303 ... output wiring, 307 ... insulating film, 46 , 462, 463 ... supply pipe, 463a, 463b, 463c, 463d, 463e, 463f ... supply pipe, 560 ... hole transport layer material liquid, 570 ... light-emitting layer material liquid.

Claims (33)

A liquid supply method for supplying a plurality of types of liquid individually to a usable position,
A connecting step of connecting a liquid supply pipe for supplying each of the plurality of types of liquids from the storage tank of the liquids to the usable position;
A test delivery step of delivering the liquid material from the storage tank to the liquid supply pipe, and at least delivering the liquid material to a detection position where the type of the liquid material can be detected;
A detection step of detecting the type of the liquid material at the detection position;
Based on the detection result in the detection step, a liquid material determination step for determining whether or not the delivered liquid material is a predetermined liquid material, and
A liquid supply method comprising: a main delivery step of delivering the liquid material to the usable position based on a determination result of the liquid material determination step. A liquid supply method for supplying a plurality of types of liquid individually to a usable position,
A filling step of filling the liquid material in a storage tank for storing the liquid materials of the plurality of types of liquid materials to supply the usable position;
Trial delivery for delivering the liquid material from the storage tank to a supply pipe for supplying the liquid material to the usable position, and for delivering the liquid material to at least a detection position where the type of the liquid material can be detected. Process,
A detection step of detecting the type of the liquid material at the detection position;
Based on the detection result in the detection step, a liquid material determination step for determining whether or not the delivered liquid material is a predetermined liquid material, and
A liquid supply method comprising: a main delivery step of delivering the liquid material to the usable position based on a determination result of the liquid material determination step. A method for supplying a liquid according to claim 1 or 2,
The detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the storage tank of the liquid supply pipe Supply method. A method for supplying a liquid according to claim 1 or 2,
The detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the usable position of the liquid supply pipe. Body supply method. A method for supplying a liquid according to any one of claims 1 to 4,
A method of supplying a liquid material, wherein the type of the liquid material is detected by detecting a transmittance of light transmitted through the liquid material in the transparent portion. A method for supplying a liquid according to any one of claims 1 to 4,
A method for supplying a liquid material, wherein the type of the liquid material is detected by detecting wavelength dispersion of light reflected from the liquid material in the transparent portion. A device manufacturing method in which a functional liquid containing a material constituting a device is disposed on a substrate to form the device,
A connecting step of connecting a liquid supply pipe for supplying the functional liquid to an arrangement portion for arranging the functional liquid on the base material from the functional liquid storage tank;
A trial delivery step of delivering the functional liquid from the storage tank to the liquid supply pipe, and at least delivering the functional liquid to a detection position where the type of the functional liquid can be detected;
A detection step of detecting the type of the functional liquid at the detection position;
Based on the detection result in the detection step, a functional liquid determination step for determining whether the functional liquid that has been sent out is a predetermined functional liquid;
And a main delivery step of delivering the functional fluid to the placement section based on the determination result of the functional fluid determination step. A device manufacturing method in which a functional liquid containing a material constituting a device is disposed on a substrate to form the device,
A filling step of filling the functional liquid in a storage tank for storing the functional liquid in order to supply the functional liquid to an arrangement unit that arranges the functional liquid on the base material;
A trial delivery step of delivering the functional liquid from the storage tank to a liquid supply pipe for supplying the functional liquid to the arrangement unit, and at least delivering the functional liquid to a detection position where the type of the functional liquid can be detected. When,
A detection step of detecting the type of the functional liquid at the detection position;
Based on the detection result in the detection step, a functional liquid determination step for determining whether the functional liquid that has been sent out is a predetermined functional liquid;
And a main delivery step of delivering the functional fluid to the placement section based on the determination result of the functional fluid determination step. A device manufacturing method according to claim 7 or 8,
The detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the storage tank of the liquid supply pipe. Production method. A device manufacturing method according to claim 7 or 8,
The detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the arrangement part of the liquid supply pipe. Production method. A device manufacturing method according to any one of claims 7 to 10,
A method of manufacturing a device, wherein the type of the functional liquid is detected by detecting a transmittance of light that passes through the functional liquid in the transparent portion. A device manufacturing method according to any one of claims 7 to 10,
A device manufacturing method, wherein the type of the functional liquid is detected by detecting wavelength dispersion of light reflected from the functional liquid in the transparent portion. A method of manufacturing a wiring board, wherein a functional liquid containing a material constituting the wiring board is disposed on a base material to form the wiring board,
A connecting step of connecting a liquid supply pipe for supplying the functional liquid to an arrangement portion for arranging the functional liquid on the base material from the functional liquid storage tank;
A trial delivery step of delivering the functional liquid from the storage tank to the liquid supply pipe, and at least delivering the functional liquid to a detection position where the type of the functional liquid can be detected;
A detection step of detecting the type of the functional liquid at the detection position;
Based on the detection result in the detection step, a functional liquid determination step for determining whether the functional liquid that has been sent out is a predetermined functional liquid;
And a main delivery step of delivering the functional fluid to the placement section based on the determination result of the functional fluid determination step. A method of manufacturing a wiring board, wherein a functional liquid containing a material constituting the wiring board is disposed on a base material to form the wiring board,
A filling step of filling the functional liquid in a storage tank for storing the functional liquid in order to supply the functional liquid to an arrangement unit that arranges the functional liquid on the base material;
A trial delivery step of delivering the functional liquid from the storage tank to a liquid supply pipe for supplying the functional liquid to the arrangement unit, and at least delivering the functional liquid to a detection position where the type of the functional liquid can be detected. When,
A detection step of detecting the type of the functional liquid at the detection position;
Based on the detection result in the detection step, a functional liquid determination step for determining whether the functional liquid that has been sent out is a predetermined functional liquid;
And a main delivery step of delivering the functional fluid to the placement section based on the determination result of the functional fluid determination step. It is a manufacturing method of the wiring board according to claim 13 or 14,
The detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the storage tank of the liquid supply pipe. Manufacturing method. It is a manufacturing method of the wiring board according to claim 13 or 14,
The detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the arrangement part of the liquid supply pipe. Manufacturing method. It is a manufacturing method of the wiring board according to any one of claims 13 to 16,
A method of manufacturing a wiring board, wherein the type of the functional liquid is detected by detecting the transmittance of light that passes through the functional liquid in the transparent portion. It is a manufacturing method of the wiring board according to any one of claims 13 to 16,
A method of manufacturing a wiring board, wherein the type of the functional liquid is detected by detecting wavelength dispersion of light reflected from the functional liquid in the transparent portion. A method for manufacturing a wiring board according to any one of claims 13 to 18,
The method for manufacturing a wiring board, wherein the functional liquid is a functional liquid containing a conductive material for forming wiring. A color filter manufacturing method for forming a color filter by arranging a functional liquid containing a material constituting a color filter on a base material,
A connecting step of connecting a liquid supply pipe for supplying the functional liquid to an arrangement portion for arranging the functional liquid on the base material from the functional liquid storage tank;
A trial delivery step of delivering the functional liquid from the storage tank to the liquid supply pipe, and at least delivering the functional liquid to a detection position where the type of the functional liquid can be detected;
A detection step of detecting the type of the functional liquid at the detection position;
Based on the detection result in the detection step, a functional liquid determination step for determining whether the functional liquid that has been sent out is a predetermined functional liquid;
A color filter manufacturing method comprising: a main delivery step of delivering the functional fluid to the placement unit based on a determination result of the functional fluid determination step. A color filter manufacturing method for forming a color filter by arranging a functional liquid containing a material constituting a color filter on a base material,
A filling step of filling the functional liquid in a storage tank for storing the functional liquid in order to supply the functional liquid to an arrangement unit that arranges the functional liquid on the base material;
A trial delivery step of delivering the functional liquid from the storage tank to a liquid supply pipe for supplying the functional liquid to the arrangement unit, and at least delivering the functional liquid to a detection position where the type of the functional liquid can be detected. When,
A detection step of detecting the type of the functional liquid at the detection position;
Based on the detection result in the detection step, a functional liquid determination step for determining whether the functional liquid that has been sent out is a predetermined functional liquid;
A color filter manufacturing method comprising: a main delivery step of delivering the functional fluid to the placement unit based on a determination result of the functional fluid determination step. The method for producing a color filter according to claim 20 or 21,
The detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the storage tank of the liquid supply pipe. Manufacturing method. The method for producing a color filter according to claim 20 or 21,
The detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the arrangement part of the liquid supply pipe. Manufacturing method. A method for producing a color filter according to any one of claims 20 to 23,
A method of manufacturing a color filter, wherein the type of the functional liquid is detected by detecting the transmittance of light that passes through the functional liquid in the transparent portion. A method for producing a color filter according to any one of claims 20 to 23,
A method for producing a color filter, wherein the type of functional liquid is detected by detecting wavelength dispersion of light reflected from the functional liquid in the transparent portion. A method for producing a color filter according to any one of claims 20 to 25, wherein
The method for producing a color filter, wherein the functional liquid is a functional liquid containing a colored layer forming material for forming a colored layer of the color filter. A method for producing an organic EL device, wherein a functional liquid containing a material constituting the organic EL device is disposed on a substrate to form the organic EL device,
A connecting step of connecting a liquid supply pipe for supplying the functional liquid to an arrangement portion for arranging the functional liquid on the base material from the functional liquid storage tank;
A trial delivery step of delivering the functional liquid from the storage tank to the liquid supply pipe, and at least delivering the functional liquid to a detection position where the type of the functional liquid can be detected;
A detection step of detecting the type of the functional liquid at the detection position;
Based on the detection result in the detection step, a functional liquid determination step for determining whether the functional liquid that has been sent out is a predetermined functional liquid;
And a main delivery step of delivering the functional fluid to the placement section based on the determination result of the functional fluid determination step. A method for producing an organic EL device, wherein a functional liquid containing a material constituting the organic EL device is disposed on a substrate to form the organic EL device,
A filling step of filling the functional liquid in a storage tank for storing the functional liquid in order to supply the functional liquid to an arrangement unit that arranges the functional liquid on the base material;
A trial delivery step of delivering the functional liquid from the storage tank to a liquid supply pipe for supplying the functional liquid to the arrangement unit, and at least delivering the functional liquid to a detection position where the type of the functional liquid can be detected. When,
A detection step of detecting the type of the functional liquid at the detection position;
Based on the detection result in the detection step, a functional liquid determination step for determining whether the functional liquid that has been sent out is a predetermined functional liquid;
And a main delivery step of delivering the functional fluid to the placement section based on the determination result of the functional fluid determination step. It is a manufacturing method of the organic EL device according to claim 27 or 28,
The detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the storage tank of the liquid supply pipe. Device manufacturing method. It is a manufacturing method of the organic EL device according to claim 27 or 28,
The detection position is a transparent part formed in at least a part of the liquid supply pipe, and the transparent part is formed in the vicinity of the arrangement part of the liquid supply pipe. Device manufacturing method. It is a manufacturing method of the organic EL device according to any one of claims 27 to 30,
A method of manufacturing an organic EL device, wherein the type of the functional liquid is detected by detecting the transmittance of light transmitted through the functional liquid in the transparent portion. It is a manufacturing method of the organic EL device according to any one of claims 27 to 30,
A method of manufacturing an organic EL device, wherein the type of the functional liquid is detected by detecting wavelength dispersion of light reflected from the functional liquid in the transparent portion. A method for producing an organic EL device according to any one of claims 27 to 32, wherein
The functional liquid is a functional liquid containing a light emitting layer forming material for forming a light emitting layer of the organic EL device or a hole transport layer forming material for forming a hole transport layer. Method.

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