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JP2008063648A - Apparatus for producing rinse water containing hydrogen peroxide, and method for producing rinse water containing hydrogen peroxide - Google Patents

Apparatus for producing rinse water containing hydrogen peroxide, and method for producing rinse water containing hydrogen peroxide Download PDF

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JP2008063648A
JP2008063648A JP2006245810A JP2006245810A JP2008063648A JP 2008063648 A JP2008063648 A JP 2008063648A JP 2006245810 A JP2006245810 A JP 2006245810A JP 2006245810 A JP2006245810 A JP 2006245810A JP 2008063648 A JP2008063648 A JP 2008063648A
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hydrogen peroxide
oxygen
cathode chamber
cathode
cleaning water
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Tetsushi Suzuki
哲史 鈴木
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Sumitomo Heavy Industries Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To efficiently produce rinse water superior in cleaning capacity containing hydrogen peroxide. <P>SOLUTION: This production method includes supplying micro-bubbles of an oxygen-containing gas, which have a very small bubble diameter and a large surface area, to a cathode chamber 4 of a diaphragm-containing electrolysis tank 3 which has a diaphragm 8 between the cathode chamber 4 and an anode chamber 5; and generating the rinse water containing hydrogen peroxide in the cathode chamber 4. The production method increases a contacting efficiency of triphasic interfaces (bubble/electrolytic solution/electrode) in a cathode 6, which is important for producing hydrogen peroxide, enhances a production efficiency of hydrogen peroxide, and can efficiently produce the rinse water containing hydrogen peroxide. Thus produced rinse water containing hydrogen peroxide includes remaining micro-bubbles which collide with a contaminant depositing on the surface of an article to be cleaned when cleaning the article to detach the contaminant more efficiently than milli-bubbles, and consequently shows superior cleaning capacity. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、過酸化水素含有洗浄水の製造装置及び製造方法に関する。   The present invention relates to a manufacturing apparatus and a manufacturing method for hydrogen peroxide-containing cleaning water.

従来、電子工業における液晶や半導体等の工業部品の洗浄、水産物や農産物等の生鮮食品の加工装置や用具等の洗浄、流動性飲食物を扱う製造ラインの洗浄、及び、医薬品製造や化粧品製造の装置やラインの洗浄には、各種の洗浄水が使用されている。例えば機械部品等では、表面に付着した油等を除去するために有機溶剤を用いた洗浄が一般に行われる。また、水溶性洗浄液としては、界面活性剤やアルカリ性添加剤等が用いられている。また、食品工業のCIP(自動洗浄システム)等においては、油脂や有機物の洗浄効果に優れたアルカリ洗浄液がよく使用される。しかしながら、有機溶剤は環境汚染の問題を引き起こす可能性があること、また、界面活性剤等の薬品を使用すると、この界面活性剤を洗い流すリンス工程が必要となり、大量のリンス水が必要になると共に、界面活性剤は有機物であるため、これを処理するための大規模な廃水処理設備が必要になる。また、アルカリ洗浄液にあっては、洗浄力に問題がある。   Conventionally, washing of industrial parts such as liquid crystal and semiconductors in the electronics industry, washing of fresh food processing equipment and tools such as marine products and agricultural products, washing of production lines handling fluid foods and drinks, pharmaceutical manufacturing and cosmetics manufacturing Various cleaning waters are used for cleaning the apparatus and the line. For example, mechanical parts are generally washed with an organic solvent to remove oil or the like adhering to the surface. Further, as the water-soluble cleaning liquid, a surfactant, an alkaline additive or the like is used. Moreover, in CIP (automatic cleaning system) etc. of food industry, the alkaline cleaning liquid excellent in the cleaning effect of fats and oils and organic substances is often used. However, organic solvents can cause environmental pollution problems, and the use of chemicals such as surfactants requires a rinsing step to wash away the surfactants, requiring a large amount of rinsing water. Since the surfactant is an organic substance, a large-scale wastewater treatment facility for treating this is required. In addition, the alkaline cleaning liquid has a problem in cleaning power.

最近、このような問題が無い洗浄水として、水溶液の電気分解によって得られるアルカリ電解水が注目されている。このアルカリ電解水の洗浄効果を高めるために、過酸化水素を含有するアルカリ電解水を使用する洗浄方法が、以下の特許文献1に記載されている。この特許文献1では、隔膜電解槽の陰極室に供給される水又は電解質水溶液中に酸素含有ガスを供給し、陰極表面で過酸化水素を生成させて、過酸化水素を含有するアルカリ電解水を得るようにしている。また、パルプ漂白等の用途に適した過酸化水素の製造方法が、以下の特許文献2に記載されている。この特許文献2では、陰極側に表面積の大きな炭素繊維材料を充填して電解を行い、数%程度の比較的高い濃度の過酸化水素含有アルカリ水を得るようにしている。
特開2001−327934号公報 特開平6−200389号公報
Recently, alkaline electrolyzed water obtained by electrolysis of an aqueous solution has attracted attention as washing water without such problems. In order to enhance the cleaning effect of the alkaline electrolyzed water, a cleaning method using alkaline electrolyzed water containing hydrogen peroxide is described in Patent Document 1 below. In Patent Document 1, oxygen-containing gas is supplied into water or an electrolyte aqueous solution supplied to a cathode chamber of a diaphragm electrolytic cell, hydrogen peroxide is generated on the cathode surface, and alkaline electrolyzed water containing hydrogen peroxide is produced. Trying to get. Moreover, the manufacturing method of hydrogen peroxide suitable for uses, such as pulp bleaching, is described in the following patent document 2. In Patent Document 2, a carbon fiber material having a large surface area is filled on the cathode side, and electrolysis is performed to obtain hydrogen peroxide-containing alkaline water having a relatively high concentration of several percent.
JP 2001-327934 A Japanese Patent Laid-Open No. 6-230309

しかしながら、上記特許文献1に記載の技術にあっては、過酸化水素の生成効率が低いという問題がある。   However, the technique described in Patent Document 1 has a problem that the generation efficiency of hydrogen peroxide is low.

また、上記特許文献2に記載の技術にあっては、炭素繊維材料の充填密度を高くすることで、装置の小型化を図りつつ陰極の表面積を大きくし過酸化水素の生成効率を高めようとすると、酸素含有気泡が充填層内で蓄積し合体して大きな気泡となりガス溜まりが生じて電気抵抗が増大するため、電解効率が著しく低下してしまうという問題がある。   In the technique described in Patent Document 2, the packing density of the carbon fiber material is increased to increase the surface area of the cathode and increase the generation efficiency of hydrogen peroxide while reducing the size of the apparatus. As a result, oxygen-containing bubbles accumulate in the packed bed and coalesce to form large bubbles, resulting in a gas pool and an increase in electrical resistance.

本発明は、このような課題を解決するために成されたものであり、洗浄性能に優れた過酸化水素含有洗浄水を効率良く生成することができる過酸化水素含有洗浄水の製造装置及び過酸化水素含有洗浄水の製造方法を提供することを目的とする。   The present invention has been made to solve the above-described problems, and provides a hydrogen peroxide-containing cleaning water production apparatus and a process that can efficiently generate hydrogen peroxide-containing cleaning water having excellent cleaning performance. It aims at providing the manufacturing method of hydrogen oxide containing washing water.

本発明による過酸化水素含有洗浄水の製造装置は、陰極室と陽極室との間に隔膜を有する有隔膜電解槽と、酸素含有ガスのマイクロバブルを発生し陰極室に供給するマイクロバブル発生装置と、を備え、陰極室で過酸化水素含有洗浄水を生成することを特徴としている。   An apparatus for producing hydrogen peroxide-containing cleaning water according to the present invention includes a diaphragm electrolytic cell having a diaphragm between a cathode chamber and an anode chamber, and a microbubble generator that generates microbubbles of oxygen-containing gas and supplies them to the cathode chamber And generating hydrogen peroxide-containing cleaning water in the cathode chamber.

本発明による過酸化水素含有洗浄水の製造方法は、陰極室と陽極室との間に隔膜を有する有隔膜電解槽の前記陰極室に、酸素含有ガスのマイクロバブルを供給し、陰極室で過酸化水素含有洗浄水を生成することを特徴としている。   According to the method for producing cleaning water containing hydrogen peroxide according to the present invention, microbubbles of oxygen-containing gas are supplied to the cathode chamber of the diaphragm cell having a diaphragm between the cathode chamber and the anode chamber, It is characterized by producing hydrogen oxide-containing cleaning water.

このような過酸化水素含有洗浄水の製造装置及び製造方法によれば、気泡径が非常に小さく、表面積が大きい酸素含有ガスのマイクロバブルが、有隔膜電解槽の陰極室に供給されるため、過酸化水素の生成に重要な陰極での三相界面(気泡/電解液/電極)の接触効率が向上し、過酸化水素の生成効率が高められる。このため、過酸化水素含有洗浄水が効率良く生成される。また、この過酸化水素含有洗浄水に残存するマイクロバブルは、ミリバブルに比して、洗浄時に被洗浄物の表面に付着している汚染物に効率良く衝突し当該汚染物を剥離するため、洗浄性能に優れる。以上より、洗浄性能に優れた過酸化水素含有洗浄水を効率良く生成できることになる。   According to such a hydrogen peroxide-containing washing water production apparatus and production method, since the microbubbles of oxygen-containing gas having a very small bubble diameter and a large surface area are supplied to the cathode chamber of the diaphragm electrolytic cell, The contact efficiency of the three-phase interface (bubble / electrolyte / electrode) at the cathode, which is important for the production of hydrogen peroxide, is improved, and the production efficiency of hydrogen peroxide is increased. For this reason, the hydrogen peroxide-containing cleaning water is efficiently generated. In addition, the microbubbles remaining in the hydrogen peroxide-containing cleaning water collide more effectively with the contaminants attached to the surface of the object to be cleaned during cleaning than the millibubbles, and the contaminants are peeled off. Excellent performance. As described above, hydrogen peroxide-containing cleaning water having excellent cleaning performance can be efficiently generated.

ここで、上記作用を好適に奏する陰極室の陰極としては、具体的には、平板状の固定電極が挙げられる。   Here, as a cathode of the cathode chamber which preferably exhibits the above-described action, specifically, a flat fixed electrode may be mentioned.

また、陰極室の陰極を、炭素材料を充填した電極を備える構成とするのが好ましい。このような構成を採用した場合、炭素材料の充填密度を高くしても、酸素含有気泡がマイクロバブルで非常に小さいため、当該酸素含有気泡が充填層内に蓄積し合体して大きな気泡となりガス溜まりが生じて電気抵抗が増大し電解効率が低下してしまうということは無い。このため、炭素材料の充填密度を高め、装置の小型化を図りつつ陰極の表面積を大きくし過酸化水素の生成効率を一層高めることができる。   In addition, the cathode of the cathode chamber is preferably provided with an electrode filled with a carbon material. When such a configuration is adopted, even if the packing density of the carbon material is increased, since the oxygen-containing bubbles are very small with micro bubbles, the oxygen-containing bubbles accumulate in the packed bed and coalesce into large bubbles. There is no case where accumulation occurs and the electric resistance increases and the electrolysis efficiency decreases. For this reason, the packing density of the carbon material can be increased, and the surface area of the cathode can be increased and the hydrogen peroxide generation efficiency can be further increased while downsizing the apparatus.

また、陽極室で生成された酸素ガスを、酸素含有ガスとしてマイクロバブル発生装置に供給する酸素ガス供給ラインを備える構成とすると、酸素含有ガスを供給する送風機やボンベ等の酸素含有ガス供給装置が不要とされ、低コスト化が図られる。   Further, when the oxygen gas generated in the anode chamber is configured to include an oxygen gas supply line that supplies the oxygen gas as an oxygen-containing gas to the microbubble generator, an oxygen-containing gas supply device such as a blower or a cylinder that supplies the oxygen-containing gas This is unnecessary and the cost can be reduced.

ここで、酸素含有ガスのマイクロバブルは、その気泡径が、0.1〜100μmとするのが好ましい。   Here, the oxygen-containing gas microbubbles preferably have a bubble diameter of 0.1 to 100 μm.

このように本発明の過酸化水素含有洗浄水の製造装置及び製造方法によれば、洗浄性能に優れた過酸化水素含有洗浄水を効率良く生成できる。   Thus, according to the manufacturing apparatus and manufacturing method of the hydrogen peroxide containing cleaning water of this invention, the hydrogen peroxide containing cleaning water excellent in cleaning performance can be produced | generated efficiently.

以下、本発明による過酸化水素含有洗浄水の製造装置、過酸化水素含有洗浄水の製造方法の好適な実施形態について図1〜図3を参照しながら説明する。図1は、第一実施形態に係る過酸化水素含有洗浄水の製造装置を示す概略構成図である。   Hereinafter, preferred embodiments of a hydrogen peroxide-containing cleaning water manufacturing apparatus and a hydrogen peroxide-containing cleaning water manufacturing method according to the present invention will be described with reference to FIGS. FIG. 1 is a schematic configuration diagram showing an apparatus for producing hydrogen peroxide-containing cleaning water according to the first embodiment.

過酸化水素含有洗浄水製造装置100は概略、有隔膜電解装置1と、マイクロバブル発生装置2と、を具備している。   The hydrogen peroxide-containing cleaning water production apparatus 100 generally includes a diaphragm membrane electrolysis apparatus 1 and a microbubble generator 2.

有隔膜電解装置1は、陰極6を有する陰極室4と陽極7を有する陽極室5とを隔膜8で隔てて成る有隔膜電解槽3を備え、陰極6と陽極7とに直流電源9を接続し、これら電極6,7に電圧を印加することで、槽内で電気分解を行うものである。   The diaphragm electrolysis apparatus 1 includes a diaphragm electrolytic cell 3 in which a cathode chamber 4 having a cathode 6 and an anode chamber 5 having an anode 7 are separated by a diaphragm 8, and a DC power source 9 is connected to the cathode 6 and the anode 7. Then, by applying a voltage to these electrodes 6 and 7, electrolysis is performed in the tank.

陰極6及び陽極7としては、例えば、板状、網状、多孔板等の平板状のものが固定電極として用いられ、互いに対向して配置される。陰極6としては、白金等の貴金属又はステンレス又はニッケル又はチタン等から形成されているのが好ましく、また、黒鉛と活性炭の焼結体から形成されているのも好ましい。また、白金又は金等の貴金属微粒子とチタンから形成される多孔質電極や、炭素又はグラファイト粉末の多孔質焼結体を用いると、後述の過酸化水素生成反応を促進する上で、特に好ましい。   As the cathode 6 and the anode 7, for example, a flat plate such as a plate, a net, or a perforated plate is used as the fixed electrode, and is arranged to face each other. The cathode 6 is preferably formed from a noble metal such as platinum, stainless steel, nickel, titanium, or the like, and is preferably formed from a sintered body of graphite and activated carbon. In addition, it is particularly preferable to use a porous electrode formed of noble metal fine particles such as platinum or gold and titanium, or a porous sintered body of carbon or graphite powder, in order to promote the hydrogen peroxide generation reaction described later.

隔膜8としては、イオン交換膜又は樹脂製の多孔質膜が用いられる。イオン交換膜は、陽イオン交換膜又は陰イオン交換膜の何れでも良いが、耐薬品性からフッ素樹脂系のイオン交換膜を用いるのが好ましい。   As the diaphragm 8, an ion exchange membrane or a resin porous membrane is used. The ion exchange membrane may be either a cation exchange membrane or an anion exchange membrane, but it is preferable to use a fluororesin ion exchange membrane in view of chemical resistance.

この有隔膜電解槽3の陰極室4には、その流入口に、電解質水溶液を導入する陰極室電解質水溶液供給ラインL1が接続されると共に、流出口に、陰極室4で生成された過酸化水素含有アルカリ電解水(詳しくは後述)を排出する過酸化水素含有アルカリ電解水排出ラインL2が接続される。一方、有隔膜電解槽3の陽極室5には、その流入口に、電解質水溶液を導入する陽極室電解質水溶液供給ラインL3が接続されると共に、流出口に、陽極室5で生成される酸素含有酸性電解水(詳しくは後述)を排出する酸性電解水排出ラインL4が接続される。   A cathode chamber electrolyte aqueous solution supply line L1 for introducing an electrolyte aqueous solution is connected to an inflow port of the cathode chamber 4 of the diaphragm membrane electrolytic cell 3, and hydrogen peroxide generated in the cathode chamber 4 is connected to an outflow port. A hydrogen peroxide-containing alkaline electrolyzed water discharge line L2 for discharging the contained alkaline electrolyzed water (described later in detail) is connected. On the other hand, the anode chamber 5 of the diaphragm electrolytic cell 3 is connected to an anode chamber electrolyte aqueous solution supply line L3 for introducing an electrolyte aqueous solution at the inlet, and contains oxygen generated in the anode chamber 5 at the outlet. An acidic electrolyzed water discharge line L4 for discharging acidic electrolyzed water (described later in detail) is connected.

マイクロバブル発生装置2は、空気又は酸素ガス(以下酸素含有ガスと呼ぶ)のマイクロバブルを発生し陰極室4に供給するためのもので、陰極室供給水槽10と、この陰極室供給水槽10に対して入口と出口が接続される循環ラインL6と、循環ラインL6の途中に設けられる剪断型ポンプP及び剪断型ノズルTと、循環ラインL6の剪断型ポンプPより上流側に接続されるガス供給装置Bと、を概略備え、上記陰極室電解質水溶液供給ラインL1により、循環ラインL6の剪断型ノズルTより下流側を陰極室4の流入口に接続して成る。   The microbubble generator 2 generates microbubbles of air or oxygen gas (hereinafter referred to as oxygen-containing gas) and supplies the microbubbles to the cathode chamber 4. The cathode chamber supply water tank 10 and the cathode chamber supply water tank 10 On the other hand, a circulation line L6 in which an inlet and an outlet are connected, a shear type pump P and a shear type nozzle T provided in the middle of the circulation line L6, and a gas supply connected to the upstream side of the shear type pump P in the circulation line L6. The apparatus B is generally provided, and the downstream side of the circulation type line L6 from the shear type nozzle T is connected to the inlet of the cathode chamber 4 by the cathode chamber electrolyte aqueous solution supply line L1.

陰極室供給水槽10は、ラインL5を介して供給される電解質水溶液を貯留するものである。   The cathode chamber supply water tank 10 stores the aqueous electrolyte solution supplied via the line L5.

ガス供給装置Bは、酸素含有ガスを循環ラインL6に供給する送風機やボンベ等を備えるものである。   The gas supply device B includes a blower, a cylinder, and the like that supply the oxygen-containing gas to the circulation line L6.

剪断型ポンプPは、例えば渦流ポンプ等の吸気ポンプであり、二相旋回流により、酸素含有ガス及び陰極室供給水槽10の電解質水溶液を吸引し循環ラインL6で循環させると共に、酸素含有ガスを剪断するものである。   The shear type pump P is, for example, an intake pump such as a vortex pump, and draws oxygen-containing gas and an aqueous electrolyte solution in the cathode chamber supply water tank 10 through a two-phase swirling flow and circulates them in the circulation line L6 and shears the oxygen-containing gas To do.

剪断型ノズルTは、例えばブレンダーやミキサー等であり、剪断型ポンプPからの酸素含有ガスを、旋回流によりさらに剪断し、酸素含有ガスのマイクロバブル(直径がマイクロメートルレベルの超微細気泡)とするものである。   The shear type nozzle T is, for example, a blender or a mixer, and further shears the oxygen-containing gas from the shear type pump P by a swirling flow to generate oxygen-containing gas microbubbles (ultrafine bubbles having a diameter of micrometer level). To do.

因みに、電気分解にあっては、陰極6の表面にカルシウム等の炭酸塩等が付着し電気抵抗が増大するため、電解質水溶液を調整する水として、カルシウム等を含まない軟水や純水を使用するのが好ましい。また、ナトリウムの炭酸塩等の析出による電気抵抗の増大を防ぐために、電解質水溶液への酸素含有ガス中の炭酸ガスを予め除去しておくことが好ましい。   Incidentally, in the electrolysis, since carbonate such as calcium adheres to the surface of the cathode 6 and the electric resistance increases, soft water or pure water not containing calcium or the like is used as water for adjusting the electrolyte aqueous solution. Is preferred. Further, in order to prevent an increase in electrical resistance due to precipitation of sodium carbonate or the like, it is preferable to previously remove the carbon dioxide in the oxygen-containing gas to the aqueous electrolyte solution.

このような構成を有する過酸化水素含有洗浄水製造装置100にあっては、マイクロバブル発生装置2において、剪断型ポンプPが駆動され、ガス供給装置Bから循環ラインL6に供給された酸素含有ガスが、陰極室供給水槽10の電解質水溶液と共に剪断型ポンプPに送られて二相旋回流により剪断され、さらに、剪断型ノズルTで旋回流により剪断されることで、酸素含有ガスのマイクロバブルが発生する。   In the hydrogen peroxide-containing cleaning water production apparatus 100 having such a configuration, the oxygen-containing gas supplied from the gas supply apparatus B to the circulation line L6 by driving the shear pump P in the microbubble generator 2. Is sent to the shear type pump P together with the electrolyte aqueous solution in the cathode chamber supply water tank 10 and sheared by the two-phase swirl flow, and further sheared by the swirl flow by the shear type nozzle T, whereby the oxygen-containing gas microbubbles are formed. appear.

このように、剪断型ポンプPと剪断型ノズルTを用い二段旋回流でマイクロバブルを生成するようにしているため、超微細な酸素含有ガスのマイクロバブルを含有した電解質水溶液が安定して得られる。   As described above, since the microbubbles are generated by the two-stage swirl flow using the shear pump P and the shear nozzle T, an electrolyte aqueous solution containing microbubbles of an ultrafine oxygen-containing gas can be stably obtained. It is done.

この酸素含有ガスのマイクロバブルを含有した電解質水溶液は、陰極室電解質水溶液供給ラインL1を介して、有隔膜電解槽3の陰極室4に供給される一方で、一部は循環ラインL6により陰極室供給水槽10に戻されて循環する。一方、陽極室5に対しては、陽極室電解質水溶液供給ラインL3を介して電解質水溶液が供給される。そして、直流電源9により電極6,7に電圧が印加されることで、有隔膜電解槽3で電気分解が行われる。   The aqueous electrolyte solution containing the oxygen-containing gas microbubbles is supplied to the cathode chamber 4 of the diaphragm electrolytic cell 3 through the cathode chamber electrolyte aqueous solution supply line L1, while a part of the cathode chamber is supplied by the circulation line L6. It returns to the supply water tank 10 and circulates. On the other hand, the aqueous electrolyte solution is supplied to the anode chamber 5 via the anode chamber electrolyte aqueous solution supply line L3. Then, a voltage is applied to the electrodes 6 and 7 by the DC power source 9, whereby electrolysis is performed in the diaphragm membrane electrolytic cell 3.

このとき、陰極室4では電解によって以下に示す反応式(1):
+2HO+2e→H+2OH ………(1)
に従って過酸化水素が発生する。
At this time, reaction formula (1) shown below by electrolysis in the cathode chamber 4:
O 2 + 2H 2 O + 2e → H 2 O 2 + 2OH (1)
Hydrogen peroxide is generated according to

陰極6の表面では、酸素含有ガスのマイクロバブル/電解液/電極の三相界面で上記反応式(1)が進行する。   On the surface of the cathode 6, the above reaction formula (1) proceeds at the three-phase interface of microbubbles of oxygen-containing gas / electrolyte / electrode.

ここで、酸素含有ガスのマイクロバブルは、多孔性セラミック等の散気板や散気球を用いて発生させた気泡(ミリバブル;直径がミリメートルレベルの気泡)に比して、より微細な気泡であり、具体的には、気泡径が0.1〜100μm(より好ましくは1〜50μm)であり、表面積が大きいため、過酸化水素の生成に重要な陰極6での三相界面の接触効率が向上し、過酸化水素の生成効率が高められる。   Here, the microbubbles of the oxygen-containing gas are finer bubbles than bubbles (millibubbles; bubbles with a diameter of millimeter level) generated using a diffuser plate or a diffuser sphere such as a porous ceramic. Specifically, since the bubble diameter is 0.1 to 100 μm (more preferably 1 to 50 μm) and the surface area is large, the contact efficiency of the three-phase interface at the cathode 6 which is important for the generation of hydrogen peroxide is improved. In addition, the generation efficiency of hydrogen peroxide is increased.

このように、マイクロバブルの気泡径を0.1〜100μmとしているのは、気泡径を0.1μmより小さくすると、このような超微細な気泡を発生させるのに複雑な装置が必要となり、装置が高価になると共に、このような超微細な気泡にしても、過酸化水素の生成効率がそれ以上高まらないからであり、又、気泡径を100μmより大きくすると、陰極6での三相界面の接触効率が低下し、過酸化水素の生成効率が低下してしまうからである。   As described above, the bubble diameter of the microbubble is set to 0.1 to 100 μm. If the bubble diameter is smaller than 0.1 μm, a complicated device is required to generate such ultrafine bubbles. This is because even if such ultrafine bubbles are used, the efficiency of hydrogen peroxide generation does not increase any more, and if the bubble diameter is larger than 100 μm, the three-phase interface at the cathode 6 will not be increased. This is because the contact efficiency is lowered and the production efficiency of hydrogen peroxide is lowered.

ここで、このような気泡径(0.1〜100μm)のマイクロバブルは、静電反発力により気泡同士が合体し難いという性質を有しているため、陰極室4にあっては、槽電圧が上昇するといったことは無く、安定した電気分解が行われる。   Here, since the microbubbles having such a bubble diameter (0.1 to 100 μm) have a property that the bubbles are difficult to coalesce due to electrostatic repulsion, the cell voltage in the cathode chamber 4 is Will not rise, and stable electrolysis will be performed.

このようにして、陰極室4では、効率良く且つ安定して過酸化水素を含有する過酸化水素含有アルカリ電解水が生成される。   In this manner, hydrogen peroxide-containing alkaline electrolyzed water containing hydrogen peroxide is generated efficiently and stably in the cathode chamber 4.

一方、陽極室5では電解によって以下に示す反応式(2):
2OH→HO+1/2O+2e ………(2)
に従って酸素ガスが発生し、酸素ガスを含有する酸素含有酸性電解水が生成される。
On the other hand, in the anode chamber 5, the following reaction formula (2) is obtained by electrolysis:
2OH → H 2 O + 1 / 2O 2 + 2e (2)
Accordingly, oxygen gas is generated, and oxygen-containing acidic electrolyzed water containing oxygen gas is generated.

そして、陰極室4で効率良く生成された過酸化水素含有アルカリ電解水は、過酸化水素含有アルカリ電解水排出ラインL2を通して、過酸化水素含有洗浄水として排出され、洗浄を要する各種の製造ラインや洗浄設備(槽)等に供給され利用される。   The hydrogen peroxide-containing alkaline electrolyzed water efficiently generated in the cathode chamber 4 is discharged as hydrogen peroxide-containing cleaning water through the hydrogen peroxide-containing alkaline electrolyzed water discharge line L2, and various production lines that require cleaning are used. It is supplied to the cleaning equipment (tank) and used.

一方、陽極室5で生成された酸素含有酸性電解水は、酸性電解水排出ラインL4を通して排出される。この酸素含有酸性電解水は、陽極室5に供給する電解質として食塩等を使用した場合には、塩素や次亜塩素酸塩等を含むため、酸化力や殺菌力のある洗浄水として利用することが可能である。   On the other hand, the oxygen-containing acidic electrolyzed water generated in the anode chamber 5 is discharged through the acidic electrolyzed water discharge line L4. This oxygen-containing acidic electrolyzed water contains chlorine, hypochlorite, etc. when salt is used as the electrolyte to be supplied to the anode chamber 5, and should be used as cleaning water having oxidizing power and sterilizing power. Is possible.

このように、本実施形態においては、気泡径が非常に小さく、表面積が大きい酸素含有ガスのマイクロバブルが、有隔膜電解槽3の陰極室4に供給されるため、過酸化水素の生成に重要な陰極6での三相界面の接触効率が向上し、過酸化水素の生成効率が高められ、過酸化水素含有洗浄水が効率良く生成される。また、この過酸化水素含有洗浄水に残存するマイクロバブルは、ミリバブルに比して、洗浄時に被洗浄物の表面に付着している汚染物に効率良く衝突し当該汚染物を剥離するため、洗浄性能に優れる。従って、本実施形態によれば、洗浄性能に優れた過酸化水素含有洗浄水を効率良く生成できる。   As described above, in the present embodiment, since the microbubbles of the oxygen-containing gas having a very small bubble diameter and a large surface area are supplied to the cathode chamber 4 of the diaphragm electrolytic cell 3, it is important for the generation of hydrogen peroxide. The contact efficiency at the three-phase interface at the negative electrode 6 is improved, the generation efficiency of hydrogen peroxide is increased, and the hydrogen peroxide-containing cleaning water is efficiently generated. In addition, the microbubbles remaining in the hydrogen peroxide-containing cleaning water collide more efficiently with the contaminants adhering to the surface of the object to be cleaned at the time of cleaning than the millibubbles. Excellent performance. Therefore, according to the present embodiment, it is possible to efficiently generate hydrogen peroxide-containing cleaning water having excellent cleaning performance.

また、過酸化水素は、汚染有機物等の酸化分解や細菌等の殺菌効果を有するため、生成された過酸化水素含有洗浄水は、単なるアルカリ電解水に比して、洗浄・殺菌をより効果的に行うことができる。また、このように過酸化水素含有洗浄水は洗浄力が高いため、高価な水酸化ナトリウム等の使用量の削減(アルカリ濃度の低減化)を図ることも可能である。   In addition, since hydrogen peroxide has the effect of oxidative decomposition of contaminated organic substances and sterilization of bacteria, the generated hydrogen peroxide-containing cleaning water is more effective for cleaning and sterilization than simple alkaline electrolyzed water. Can be done. In addition, since the hydrogen peroxide-containing cleaning water has a high detergency, it is possible to reduce the amount of expensive sodium hydroxide used (reduce the alkali concentration).

なお、マイクロバブル発生装置2にあっては、剪断型ノズルTを、陰極室供給水槽10の外部に設置しているが、陰極室供給水槽10の電解質水溶液中に設置するようにしても良い。   In the microbubble generator 2, the shear type nozzle T is installed outside the cathode chamber supply water tank 10, but may be installed in the electrolyte aqueous solution in the cathode chamber supply water tank 10.

また、マイクロバブル発生装置2としては、剪断型ポンプP及び剪断型ノズルTの組み合わせによる酸素含有ガス剪断方式の他に、例えば、加圧して酸素含有ガスを電解質水溶液に溶解した状態から、この電解質水溶液をノズル等から放出し一気に定圧状態にすることで、マイクロバブルを発生させる加圧溶解方式等を採用しても良い。   In addition to the oxygen-containing gas shearing method using a combination of the shear-type pump P and the shear-type nozzle T, the microbubble generator 2 can be used, for example, from the state in which the oxygen-containing gas is dissolved in the electrolyte aqueous solution by pressurization. A pressure dissolution method or the like that generates microbubbles by discharging the aqueous solution from a nozzle or the like and bringing it into a constant pressure state at once may be employed.

また、酸素含有ガスとして少量の空気を循環ラインL6に供給するだけで良い場合には、ガス供給装置Bを無くし、剪断型ポンプPにより大気を吸引して循環ラインL6に供給するようにしても良い。   Further, when only a small amount of air as the oxygen-containing gas needs to be supplied to the circulation line L6, the gas supply device B is eliminated, and the atmosphere is sucked by the shear pump P and supplied to the circulation line L6. good.

また、循環ラインL6により、酸素含有ガスのマイクロバブルを含有した電解質水溶液の一部を陰極室供給水槽10に戻し循環させるようにしているが、酸素含有ガスのマイクロバブルを含有した電解質水溶液の全部を、陰極室電解質水溶液供給ラインL1により、陰極室4に供給するようにしても良い。   Further, a part of the electrolyte aqueous solution containing the microbubbles of oxygen-containing gas is circulated back to the cathode chamber supply water tank 10 through the circulation line L6, but the entire electrolyte aqueous solution containing the microbubbles of oxygen-containing gas is circulated. May be supplied to the cathode chamber 4 by the cathode chamber electrolyte aqueous solution supply line L1.

図2は、本発明の第二実施形態に係る過酸化水素含有洗浄水の製造装置を示す概略構成図である。   FIG. 2 is a schematic configuration diagram showing an apparatus for producing hydrogen peroxide-containing cleaning water according to the second embodiment of the present invention.

この第二実施形態の過酸化水素含有洗浄水製造装置200が、第一実施形態の過酸化水素含有洗浄水製造装置100と違う点は、陰極6を有する有隔膜電解槽3に代えて、炭素材料を充填した陰極11を有する有隔膜電解槽13を用いた点である。   The hydrogen peroxide-containing cleaning water manufacturing apparatus 200 of the second embodiment is different from the hydrogen peroxide-containing cleaning water manufacturing apparatus 100 of the first embodiment in that instead of the diaphragm membrane electrolytic cell 3 having the cathode 6, carbon This is a point using a diaphragm membrane electrolytic cell 13 having a cathode 11 filled with a material.

ここで、陰極11は、例えば、炭素繊維フェルト又は炭素繊維クロス又は炭素繊維シート、粒状炭素材等を充填した電極である。   Here, the cathode 11 is, for example, an electrode filled with carbon fiber felt, carbon fiber cloth, carbon fiber sheet, granular carbon material, or the like.

また、この変更に伴って、陰極室4には、電源9に接続され陰極11に電流を供給するための給電体(電流供給装置)16が設けられている。この給電体16としては、例えば、炭素や導電性のニッケル、チタン等の金属を用いることができる。   Along with this change, the cathode chamber 4 is provided with a power supply body (current supply device) 16 that is connected to the power source 9 and supplies current to the cathode 11. As the power supply body 16, for example, a metal such as carbon, conductive nickel, or titanium can be used.

このような第二実施形態の過酸化水素含有洗浄水製造装置200によれば、陰極11を構成する炭素材料の充填密度を高くしても、酸素含有気泡がマイクロバブルで非常に小さいため、当該酸素含有気泡が充填層内に蓄積し合体して大きな気泡となりガス溜まりが生じて電気抵抗が増大し電解効率が低下してしまうということは無い。   According to the hydrogen peroxide-containing cleaning water manufacturing apparatus 200 of the second embodiment, even if the filling density of the carbon material constituting the cathode 11 is increased, the oxygen-containing bubbles are microbubbles and are very small. There is no case where oxygen-containing bubbles accumulate in the packed bed and coalesce to form large bubbles, resulting in gas accumulation, an increase in electrical resistance, and a reduction in electrolysis efficiency.

従って、第一実施形態の効果に加えて、陰極11を構成する炭素材料の充填密度を高め、装置の小型化を図りつつ陰極11の表面積を大きくし過酸化水素の生成効率を一層高めることができる。   Therefore, in addition to the effects of the first embodiment, it is possible to increase the packing density of the carbon material constituting the cathode 11, increase the surface area of the cathode 11 while further reducing the size of the apparatus, and further increase the generation efficiency of hydrogen peroxide. it can.

図3は、本発明の第三実施形態に係る過酸化水素含有洗浄水の製造装置を示す概略構成図である。   FIG. 3 is a schematic configuration diagram showing an apparatus for producing hydrogen peroxide-containing cleaning water according to the third embodiment of the present invention.

この第三実施形態の過酸化水素含有洗浄水製造装置300が、第二実施形態の過酸化水素含有洗浄水製造装置200と違う点は、酸性電解水排出ラインL4に、酸素含有酸性電解水を気液分離する気液分離装置12を設けると共に、マイクロバブル発生装置2に代えて、ガス供給装置Bを無くしたマイクロバブル発生装置22を用い、気液分離装置12の気体分離側とマイクロバブル発生装置22の循環ラインL6の剪断型ポンプPより上流側とを、酸素ガス供給ラインL7で接続した点である。   The hydrogen peroxide-containing cleaning water manufacturing apparatus 300 of the third embodiment is different from the hydrogen peroxide-containing cleaning water manufacturing apparatus 200 of the second embodiment in that oxygen-containing acidic electrolyzed water is supplied to the acidic electrolyzed water discharge line L4. A gas-liquid separator 12 for gas-liquid separation is provided, and a micro-bubble generator 22 without the gas supply device B is used in place of the micro-bubble generator 2, and the gas separation side of the gas-liquid separator 12 and micro-bubble generation are performed. This is the point where the upstream side of the shear line pump P of the circulation line L6 of the device 22 is connected by the oxygen gas supply line L7.

このような第三実施形態の過酸化水素含有洗浄水製造装置300によれば、酸性電解水排出ラインL4を通して排出される酸素含有酸性電解水は、気液分離装置12で、酸素ガスと酸性電解水とに気液分離され、酸素ガスは、酸素ガス供給ラインL7を通して、マイクロバブル発生装置22の循環ラインL6に供給され、マイクロバブル発生装置22において、ガス供給装置Bを用いること無く、酸素含有ガスのマイクロバブルを含有した電解質水溶液が生成される。   According to the hydrogen peroxide-containing cleaning water production apparatus 300 of the third embodiment, the oxygen-containing acidic electrolyzed water discharged through the acidic electrolyzed water discharge line L4 is oxygen gas and acidic electrolysis by the gas-liquid separator 12. The gas is separated into water and oxygen gas is supplied to the circulation line L6 of the microbubble generator 22 through the oxygen gas supply line L7. In the microbubble generator 22, oxygen is contained without using the gas supply device B. An aqueous electrolyte solution containing gas microbubbles is produced.

従って、第二実施形態の効果に加えて、ガス供給装置Bが不要とされ、低コスト化が図られる。   Therefore, in addition to the effects of the second embodiment, the gas supply device B is not required, and the cost can be reduced.

以上、本発明をその実施形態に基づき具体的に説明したが、本発明は上記実施形態に限定されるものではなく、例えば、上記第三実施形態の酸素ガス供給ラインL7を用いる構成を、第一実施形態に対して適用することも可能である。   As described above, the present invention has been specifically described based on the embodiment. However, the present invention is not limited to the above-described embodiment. For example, the configuration using the oxygen gas supply line L7 of the third embodiment is described below. It is also possible to apply to one embodiment.

本発明の第一実施形態に係る過酸化水素含有洗浄水の製造装置を示す概略構成図である。It is a schematic block diagram which shows the manufacturing apparatus of the hydrogen peroxide containing washing water which concerns on 1st embodiment of this invention. 本発明の第二実施形態に係る過酸化水素含有洗浄水の製造装置を示す概略構成図である。It is a schematic block diagram which shows the manufacturing apparatus of the hydrogen peroxide containing washing water which concerns on 2nd embodiment of this invention. 本発明の第三実施形態に係る過酸化水素含有洗浄水の製造装置を示す概略構成図である。It is a schematic block diagram which shows the manufacturing apparatus of the hydrogen peroxide containing washing water which concerns on 3rd embodiment of this invention.

符号の説明Explanation of symbols

2,22…マイクロバブル発生装置、3,13…有隔膜電解槽、4…陰極室、5…陽極室、6…陰極、8…隔膜、11…充填電極(炭素材料を充填した電極;陰極)、100,200,300…過酸化水素含有洗浄水の製造装置、L7…酸素ガス供給ライン。   DESCRIPTION OF SYMBOLS 2,22 ... Microbubble generator, 3,13 ... Separator membrane electrolytic cell, 4 ... Cathode chamber, 5 ... Anode chamber, 6 ... Cathode, 8 ... Septum, 11 ... Filling electrode (electrode filled with carbon material; cathode) , 100, 200, 300 ... hydrogen peroxide-containing cleaning water production apparatus, L7 ... oxygen gas supply line.

Claims (6)

陰極室と陽極室との間に隔膜を有する有隔膜電解槽と、
酸素含有ガスのマイクロバブルを発生し前記陰極室に供給するマイクロバブル発生装置と、を備え、
前記陰極室で過酸化水素含有洗浄水を生成することを特徴とする過酸化水素含有洗浄水の製造装置。
A diaphragm electrolytic cell having a diaphragm between the cathode chamber and the anode chamber;
A microbubble generator for generating microbubbles of oxygen-containing gas and supplying the microbubbles to the cathode chamber,
An apparatus for producing hydrogen peroxide-containing cleaning water, wherein hydrogen peroxide-containing cleaning water is generated in the cathode chamber.
前記陰極室の陰極は、平板状の固定電極であることを特徴とする請求項1記載の過酸化水素含有洗浄水の製造装置。   The apparatus for producing cleaning water containing hydrogen peroxide according to claim 1, wherein the cathode of the cathode chamber is a flat fixed electrode. 前記陰極室の陰極は、炭素材料を充填した電極を備えることを特徴とする請求項1記載の過酸化水素含有洗浄水の製造装置。   The apparatus for producing cleaning water containing hydrogen peroxide according to claim 1, wherein the cathode of the cathode chamber includes an electrode filled with a carbon material. 前記陽極室で生成された酸素ガスを、前記酸素含有ガスとして前記マイクロバブル発生装置に供給する酸素ガス供給ラインを備えたことを特徴とする請求項1〜3の何れか一項に記載の過酸化水素含有洗浄水の製造装置。   The oxygen gas supply line which supplies the oxygen gas produced | generated in the said anode chamber to the said microbubble generator as the said oxygen containing gas was provided, The excess gas as described in any one of Claims 1-3 characterized by the above-mentioned. Production equipment for cleaning water containing hydrogen oxide. 前記酸素含有ガスのマイクロバブルは、その気泡径が、0.1〜100μmであることを特徴とする請求項1〜4の何れか一項に記載の過酸化水素含有洗浄水の製造装置。   The apparatus for producing hydrogen peroxide-containing cleaning water according to claim 1, wherein the oxygen-containing gas microbubbles have a bubble diameter of 0.1 to 100 μm. 陰極室と陽極室との間に隔膜を有する有隔膜電解槽の前記陰極室に、酸素含有ガスのマイクロバブルを供給し、前記陰極室で過酸化水素含有洗浄水を生成することを特徴とする過酸化水素含有洗浄水の製造方法。   A microbubble of oxygen-containing gas is supplied to the cathode chamber of a diaphragm electrolytic cell having a diaphragm between the cathode chamber and the anode chamber, and hydrogen peroxide-containing cleaning water is generated in the cathode chamber. A method for producing hydrogen peroxide-containing cleaning water.
JP2006245810A 2006-09-11 2006-09-11 Apparatus for producing rinse water containing hydrogen peroxide, and method for producing rinse water containing hydrogen peroxide Pending JP2008063648A (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009248059A (en) * 2008-04-10 2009-10-29 Niigata Univ Simultaneously manufacturing apparatus for ozone water and hydrogen peroxide water
JP2015020940A (en) * 2013-07-22 2015-02-02 国立大学法人静岡大学 Hydrogen peroxide synthesis method
JP2016064401A (en) * 2014-09-19 2016-04-28 株式会社テックコーポレーション Electrolytic water raw material liquid, producing method of electrolytic water raw material liquid, and electrolytic water for hand washing
JP2016183804A (en) * 2015-03-26 2016-10-20 パナソニックIpマネジメント株式会社 Range hood
JP2017110279A (en) * 2015-12-18 2017-06-22 株式会社東芝 Hydrogen peroxide production device
CN107244658A (en) * 2017-05-30 2017-10-13 西北农林科技大学 A kind of method of use microorganism electrochemical system synthesis hydrogen peroxide
US11107705B2 (en) 2018-07-30 2021-08-31 Samsung Electronics Co., Ltd. Cleaning solution production systems and methods, and plasma reaction tanks

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06200389A (en) * 1993-01-05 1994-07-19 Honshu Paper Co Ltd Production of hydrogen peroxide
JP2001327934A (en) * 2000-05-23 2001-11-27 Nippon Steel Corp Cleaning device and cleaning method
JP2006142251A (en) * 2004-11-24 2006-06-08 Nitta Moore Co Microbubble generator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06200389A (en) * 1993-01-05 1994-07-19 Honshu Paper Co Ltd Production of hydrogen peroxide
JP2001327934A (en) * 2000-05-23 2001-11-27 Nippon Steel Corp Cleaning device and cleaning method
JP2006142251A (en) * 2004-11-24 2006-06-08 Nitta Moore Co Microbubble generator

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009248059A (en) * 2008-04-10 2009-10-29 Niigata Univ Simultaneously manufacturing apparatus for ozone water and hydrogen peroxide water
JP2015020940A (en) * 2013-07-22 2015-02-02 国立大学法人静岡大学 Hydrogen peroxide synthesis method
JP2016064401A (en) * 2014-09-19 2016-04-28 株式会社テックコーポレーション Electrolytic water raw material liquid, producing method of electrolytic water raw material liquid, and electrolytic water for hand washing
JP2016183804A (en) * 2015-03-26 2016-10-20 パナソニックIpマネジメント株式会社 Range hood
JP2017110279A (en) * 2015-12-18 2017-06-22 株式会社東芝 Hydrogen peroxide production device
WO2017104203A1 (en) * 2015-12-18 2017-06-22 株式会社東芝 Device for generating hydrogen peroxide
CN108474123A (en) * 2015-12-18 2018-08-31 株式会社东芝 Hydrogen peroxide generating means
US20180371628A1 (en) * 2015-12-18 2018-12-27 Kabushiki Kaisha Toshiba Device for generating hydrogen peroxide
AU2016370898B2 (en) * 2015-12-18 2019-10-10 Kabushiki Kaisha Toshiba Device for generating hydrogen peroxide
CN107244658A (en) * 2017-05-30 2017-10-13 西北农林科技大学 A kind of method of use microorganism electrochemical system synthesis hydrogen peroxide
US11107705B2 (en) 2018-07-30 2021-08-31 Samsung Electronics Co., Ltd. Cleaning solution production systems and methods, and plasma reaction tanks
US11664242B2 (en) 2018-07-30 2023-05-30 Samsung Electronics Co., Ltd. Cleaning solution production systems and methods, and plasma reaction tanks

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