JP2008053138A - Thick film conductor forming composition, method of forming thick film conductor using the same, and thick film conductor obtained - Google Patents
Thick film conductor forming composition, method of forming thick film conductor using the same, and thick film conductor obtained Download PDFInfo
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Abstract
【課題】電子部品に端子電極用厚膜導体を形成する際に、素子同士の焼結接着を防ぎ、かつ素子の特性を損なうことがない厚膜導体形成用組成物、それを用いた厚膜導体の形成方法、および得られる厚膜導体の提供。
【解決手段】高い導電率を有する導電粉末(a1)と、導電粉末(a1)よりも導電率が低い導電粉末(a2)からなる導電粉末(A)、酸化物粉末(B)、及び有機ビヒクル(C)を含有する厚膜導体形成用組成物において、導電粉末(a2)は、平均粒径が7μm以上であり、かつ、導電粉末(a2)の含有量が、導電粉末(a1)100重量部に対して、4.0〜8.0重量部であることを特徴とする厚膜導体形成用組成物などによって提供。
【選択図】なしThick film conductor forming composition that prevents sintering adhesion between elements and does not impair element characteristics when forming a thick film conductor for a terminal electrode on an electronic component, and a thick film using the same A method for forming a conductor, and a thick film conductor obtained.
A conductive powder (A) comprising a conductive powder (a1) having a high conductivity and a conductive powder (a2) having a lower conductivity than the conductive powder (a1), an oxide powder (B), and an organic vehicle In the composition for forming a thick film conductor containing (C), the conductive powder (a2) has an average particle diameter of 7 μm or more, and the content of the conductive powder (a2) is 100 weights of the conductive powder (a1). Provided by the thick film conductor forming composition, etc., which is 4.0 to 8.0 parts by weight with respect to parts.
[Selection figure] None
Description
本発明は、厚膜導体形成用組成物、それを用いた厚膜導体の形成方法、および得られる厚膜導体に関し、さらに詳しくは、電子部品に端子電極用厚膜導体を形成する際に、素子同士の焼結接着を防ぎ、かつ素子の特性を損なうことがない厚膜導体形成用組成物、それを用いた厚膜導体の形成方法、および得られる厚膜導体に関する。 The present invention relates to a composition for forming a thick film conductor, a method for forming a thick film conductor using the same, and a thick film conductor to be obtained. More specifically, when forming a thick film conductor for a terminal electrode on an electronic component, The present invention relates to a composition for forming a thick film conductor that prevents sintering adhesion between elements and does not impair the characteristics of the element, a method for forming a thick film conductor using the same, and a thick film conductor obtained.
厚膜技術を用いて導体膜を形成する場合、導電率の高い導電粉末を酸化物粉末などとともに三本ロール等を用いて有機ビヒクル中に分散させて得られる厚膜導体形成用組成物を使用する。一般には、この厚膜導体形成用組成物をセラミック基材にスクリーン印刷、またはローラー転写、ディップ等により所定の形状に塗布し、500〜900℃で焼成してセラミック基板上に導電膜を形成することが行われている。
厚膜導体形成用組成物は、導電粉末、酸化物粉末、有機ビヒクルから構成される。酸化物粉末としては、軟化点の制御が容易で、酸等に対して化学的な耐久性が強く軟化点が400℃〜800℃の酸化物、例えば硼珪酸鉛、アルミ硼珪酸鉛、硼珪酸亜鉛、硼珪酸ビスマス等が厚膜導体形成時の焼成温度に応じて用いられている
When forming a conductor film using thick film technology, use a composition for forming a thick film conductor obtained by dispersing conductive powder with high conductivity in an organic vehicle using three rolls together with oxide powder, etc. To do. In general, this thick film conductor forming composition is applied to a ceramic substrate in a predetermined shape by screen printing, roller transfer, dipping or the like, and baked at 500 to 900 ° C. to form a conductive film on the ceramic substrate. Things have been done.
The composition for forming a thick film conductor is composed of a conductive powder, an oxide powder, and an organic vehicle. As the oxide powder, the softening point can be easily controlled, the chemical resistance to acid etc. is strong, and the softening point is an oxide having a softening point of 400 ° C. to 800 ° C., for example, lead borosilicate, lead aluminum borosilicate, borosilicate Zinc, bismuth borosilicate, etc. are used depending on the firing temperature when forming thick film conductors
昨今、環境汚染を防止するという観点から、鉛を含有しない厚膜導体形成用組成物が流通してきている。そのため導電粉末としては、粒径が10μm以下で導電率の高いAg、Au、Pd、Ptなどの金属粉末が用いられており、近年ではコストダウンを目的にAgを主成分とするもの、例えば、Ag金属、Ag−Pd、Ag−Ptなどが一般的に使用されている。 Recently, from the viewpoint of preventing environmental pollution, a composition for forming a thick film conductor not containing lead has been distributed. Therefore, as the conductive powder, metal powders such as Ag, Au, Pd, and Pt having a particle size of 10 μm or less and high conductivity are used, and in recent years, those containing Ag as a main component for the purpose of cost reduction, for example, Ag metal, Ag-Pd, Ag-Pt, etc. are generally used.
ところで、角柱型素子、円柱型素子、円盤型素子などの電子部品には、導電部として厚膜導体を形成する場合が多い。例えば、セラミック等を素体とした積層コンデンサーやバリスターの両端に厚膜導体を外部電極として形成して、チップコンデンサーやチップバリスターが製造されている。
鉛を含有しない厚膜導体形成用組成物が主流となるに伴い、角柱型素子、円柱型素子、円盤型素子状のコンデンサー、抵抗器、バリスター、サーミスター、インダクター等の製造工程で、部品をランダムに並べて焼成する際、素子同士の端子電極用導体が接触している部分で、焼結接着してしまう問題が発生している。焼結接着をおこした場合、接着が強い個所は整列機などの非接触の力では分離出来ず、機械的な力により分離しているという状況である。ところが、機械的な力で分離しようとすると剥離部分に欠損が生じ、歩留まりを悪化させる要因となっていた。
By the way, in electronic components such as prismatic elements, cylindrical elements, and disk elements, a thick film conductor is often formed as a conductive portion. For example, chip capacitors and chip varistors are manufactured by forming thick film conductors as external electrodes at both ends of a multilayer capacitor or varistor made of ceramic or the like.
As the composition for forming thick film conductors that do not contain lead becomes mainstream, components such as prismatic elements, cylindrical elements, disk-shaped capacitors, resistors, varistors, thermistors, inductors, etc. When the elements are arranged and fired at random, there is a problem in that the terminal electrode conductors of the elements are in contact with each other at the portion where they are in contact with each other. In the case of sintering bonding, a portion where the bonding is strong cannot be separated by a non-contact force such as an aligner but is separated by a mechanical force. However, when the separation is performed by mechanical force, a defect occurs in the peeled portion, which is a factor that deteriorates the yield.
このような素子同士の焼結による接着を防ぐ方法の一つとして、整列焼成やセラミックの粉体をまぶす方法が採用されている。整列焼成は、自動機あるいは手動により行われるが、ズレが生じ易いだけでなく、処理量が少なく時間も掛かり歩留まりを悪化させてしまう。また、セラミック粉末をまぶす方法は、処理量を低下させず時間も掛からないので歩留まりを悪化させることはないが、焼結過程で導体に接着してしまい分離出来なくなり、焼結面に斑を発生させる要因ともなっていた。 As one of the methods for preventing such adhesion between elements due to sintering, a method of aligning firing or coating with ceramic powder is employed. Although the alignment firing is performed by an automatic machine or manually, not only is misalignment easily caused, but also the processing amount is small and it takes time, and the yield is deteriorated. Also, the method of dusting with ceramic powder does not reduce the throughput and does not take time, so it does not deteriorate the yield, but it adheres to the conductor during the sintering process and cannot be separated, causing spots on the sintered surface It was also a factor.
かかる問題に対して、導電粉末の成分として樹状金属粉を添加することで、電極膜の表面を粗面化して、素子同士の焼成結着を防ぐことが提案されている(例えば、特許文献1参照)。しかし、樹状金属粉を添加すると、厚膜導体形成組成物中で金属粉の分散性を害し、3本ロールミルで製造すると樹状金属粉が圧延され粗大フレーク状粉末となり、スクリーン目詰まり等の不具合を生じてしまう。 In order to solve this problem, it has been proposed to add a dendritic metal powder as a component of the conductive powder to roughen the surface of the electrode film and prevent the fired binding between the elements (for example, Patent Documents). 1). However, when the dendritic metal powder is added, the dispersibility of the metal powder is impaired in the thick film conductor forming composition, and when manufactured with a three-roll mill, the dendritic metal powder is rolled into a coarse flaky powder, such as screen clogging. It will cause problems.
このような状況下、導電粉末中に樹状金属粉を添加することなく、素子同士の焼成結着を容易に防ぐことができる実用的な厚膜導体形成用組成物が切望されている。
本発明の課題は、前記した従来技術の問題点に鑑み、電子部品に端子電極用厚膜導体を形成する際に、素子同士の焼結接着を防ぎ、かつ素子の特性を損なうことがない厚膜導体形成用組成物、それを用いた厚膜導体の形成方法、および得られる厚膜導体を提供することにある。 In view of the above-mentioned problems of the prior art, the object of the present invention is to prevent the adhesion of elements to each other when forming a thick film conductor for terminal electrodes on an electronic component, and to prevent the element characteristics from being impaired. It is in providing the composition for membrane conductor formation, the formation method of a thick film conductor using the same, and the thick film conductor obtained.
本発明者は、上記課題を解決するために鋭意研究を重ね、導電粉末、酸化物粉末、及び有機ビヒクルを混合してなる厚膜導体形成用組成物(以下、ペーストともいう)において、導電粉末として、従来から用いられているAgなどの金属粉末に、それよりも導電率が低くて粒径の大きい金属粉末を特定量含有させることで、電子部品をランダムに並べて焼成して素子に端子電極用厚膜導体を形成する際、得られる焼成膜の特性を維持しながら、素子同士の焼結接着を防ぐことができ、仮に素子同士が焼結接着した場合でも、比較的簡単に素子を分離できるようになることを見出して、本発明を完成するに至った。 In order to solve the above-mentioned problems, the present inventor has conducted extensive research, and in a composition for forming a thick film conductor (hereinafter also referred to as a paste) obtained by mixing a conductive powder, an oxide powder, and an organic vehicle, the conductive powder As described above, by adding a specific amount of metal powder having a lower conductivity and a larger particle size to a conventionally used metal powder such as Ag, electronic components are randomly arranged and baked to form a terminal electrode on the device. When forming thick film conductors, it is possible to prevent sintering adhesion between elements while maintaining the characteristics of the fired film obtained, and even if elements are sintered to each other, the elements can be separated relatively easily The inventors have found that it is possible to complete the present invention.
すなわち、本発明の第1の発明によれば、高い導電率を有する導電粉末(a1)と、導電粉末(a1)よりも導電率が低い導電粉末(a2)からなる導電粉末(A)、酸化物粉末(B)、及び有機ビヒクル(C)を含有する厚膜導体形成用組成物において、導電粉末(a2)は、平均粒径が7μm以上であり、かつ、導電粉末(a2)の含有量が、導電粉末(a1)100重量部に対して、4.0〜8.0重量部であることを特徴とする厚膜導体形成用組成物が提供される。 That is, according to the first invention of the present invention, a conductive powder (A) comprising a conductive powder (a1) having a high conductivity and a conductive powder (a2) having a conductivity lower than that of the conductive powder (a1). In the composition for forming a thick film conductor containing the product powder (B) and the organic vehicle (C), the conductive powder (a2) has an average particle size of 7 μm or more, and the content of the conductive powder (a2) However, it is 4.0-8.0 weight part with respect to 100 weight part of electrically conductive powder (a1), The composition for thick film conductor formation characterized by the above-mentioned is provided.
また、本発明の第2の発明によれば、第1の発明において、導電粉末(a1)が、Ag、Au、Cu、Pd、又はPtから選ばれる少なくとも1種の金属粉末であることを特徴とする厚膜導体形成用組成物が提供される。
また、本発明の第3の発明によれば、第1又は2の発明において、導電粉末(a1)の融点が、1100℃以下であることを特徴とする厚膜導体形成用組成物が提供される。
さらに、本発明の第4の発明によれば、第1〜3のいずれかの発明において、導電粉末(a1)の平均粒径が、1〜7μmであることを特徴とする厚膜導体形成用組成物が提供される。
According to the second invention of the present invention, in the first invention, the conductive powder (a1) is at least one metal powder selected from Ag, Au, Cu, Pd, or Pt. A thick film conductor forming composition is provided.
According to a third aspect of the present invention, there is provided a thick film conductor-forming composition characterized in that, in the first or second aspect, the conductive powder (a1) has a melting point of 1100 ° C. or lower. The
Furthermore, according to the fourth invention of the present invention, in any one of the first to third inventions, the conductive powder (a1) has an average particle diameter of 1 to 7 μm. A composition is provided.
一方、本発明の第5の発明によれば、第1の発明において、導電粉末(a2)が、Ni、W、又はMoから選ばれる少なくとも1種の金属粉末であることを特徴とする厚膜導体形成用組成物が提供される。
また、本発明の第6の発明によれば、第5の発明において、導電粉末(a2)の融点が、1300℃以上であることを特徴とする厚膜導体形成用組成物が提供される。
また、本発明の第7の発明によれば、第1、5又は6の発明において、導電粉末(a2)の平均粒径が、7〜13μmであることを特徴とする厚膜導体形成用組成物が提供される。
さらに、本発明の第8の発明によれば、第1の発明において、各成分の含有量は、厚膜導体形成用組成物100重量部に対して、導電粉末(A)が45.0〜90.0重量部、酸化物粉末(B)が0.2〜15.0重量部、有機ビヒクル(C)が8.0〜55.0重量部であることを特徴とする厚膜導体形成用組成物が提供される。
On the other hand, according to the fifth invention of the present invention, in the first invention, the conductive powder (a2) is at least one metal powder selected from Ni, W, or Mo. A conductor-forming composition is provided.
According to a sixth aspect of the present invention, there is provided the thick film conductor forming composition according to the fifth aspect, wherein the conductive powder (a2) has a melting point of 1300 ° C. or higher.
According to the seventh invention of the present invention, in the first, fifth or sixth invention, the conductive powder (a2) has an average particle size of 7 to 13 μm, and the thick film conductor forming composition is characterized in that Things are provided.
Furthermore, according to the eighth invention of the present invention, in the first invention, the content of each component is such that the conductive powder (A) is 45.0 to 100 parts by weight of the thick film conductor-forming composition. 90.0 parts by weight, 0.2 to 15.0 parts by weight of oxide powder (B), and 8.0 to 55.0 parts by weight of organic vehicle (C) A composition is provided.
一方、本発明の第9の発明によれば、第1〜8のいずれかの発明に係る厚膜導体形成用組成物を、電子部品の素子に塗布し、その後、500〜900℃で焼成して、素子に端子電極用導電膜を形成することを特徴とする厚膜導体の形成方法が提供される。 On the other hand, according to the ninth invention of the present invention, the composition for forming a thick film conductor according to any one of the first to eighth inventions is applied to an element of an electronic component, and then fired at 500 to 900 ° C. Thus, there is provided a method for forming a thick film conductor, wherein a conductive film for a terminal electrode is formed on an element.
一方、本発明の第10の発明によれば、第9の発明に係る方法によって得られ、導電粉末(a2)の少なくとも一部が端子電極用導電膜の表面から突出してなる厚膜導体が提供される。
また、本発明の第11の発明によれば、第10の発明において、端子電極用導電膜の膜厚が、10〜20μmであることを特徴とする厚膜導体が提供される。
On the other hand, according to the tenth aspect of the present invention, there is provided a thick film conductor obtained by the method according to the ninth aspect, wherein at least a part of the conductive powder (a2) protrudes from the surface of the conductive film for terminal electrodes. Is done.
According to an eleventh aspect of the present invention, there is provided the thick film conductor according to the tenth aspect, wherein the terminal electrode conductive film has a thickness of 10 to 20 μm.
本発明の厚膜導体形成用組成物によれば、従来の技術では困難であった素子の端子電極用導電膜となる導体同士の焼結接着を防止できるだけでなく、面積抵抗値、はんだ濡れ性、接着強度を維持できる。これにより、歩留まりを向上させ、生産コストを削減でき、なおかつ優れた品質を有する製品を製造できるから、その工業的価値はきわめて大きい。 According to the composition for forming a thick film conductor of the present invention, it is possible not only to prevent sintering adhesion between conductors which are conductive films for terminal electrodes of an element, which has been difficult with the prior art, but also to have a sheet resistance and solder wettability. The adhesive strength can be maintained. As a result, the yield can be improved, the production cost can be reduced, and a product having excellent quality can be manufactured. Therefore, its industrial value is extremely large.
1.厚膜導体形成用組成物
本発明の厚膜導体形成用組成物は、高い導電率を有する導電粉末(a1)と、導電粉末(a1)よりも導電率が低い導電粉末(a2)からなる導電粉末(A)、酸化物粉末(B)、及び有機ビヒクル(C)を含有する厚膜導体形成用組成物において、導電粉末(a2)は、平均粒径が7μm以上であり、かつ、導電粉末(a2)の含有量が、導電粉末(a1)100重量部に対して、4.0〜8.0重量部であることを特徴とする。
1. Thick film conductor forming composition The thick film conductor forming composition of the present invention comprises a conductive powder (a1) having a high conductivity and a conductive powder (a2) having a lower conductivity than the conductive powder (a1). In the composition for forming a thick film conductor containing the powder (A), the oxide powder (B), and the organic vehicle (C), the conductive powder (a2) has an average particle size of 7 μm or more, and the conductive powder The content of (a2) is 4.0 to 8.0 parts by weight with respect to 100 parts by weight of the conductive powder (a1).
A 導電粉末
本発明において、導電粉末(A)は、高い導電率を有する導電粉末(a1)と、平均粒径が7μm以上で導電粉末(a1)よりも導電率が低く導電粉末(a2)からなる複合粉末である。
A Conductive Powder In the present invention, the conductive powder (A) is composed of a conductive powder (a1) having a high conductivity and a conductive powder (a2) having an average particle size of 7 μm or more and a lower conductivity than the conductive powder (a1). A composite powder.
導電粉末(a1)は、組成物中で分散性が良く、ペースト焼成後に緻密な膜となる高い導電率を有する金属粉末である。例えば、Ag、Au、Cu、Pd、又はPtから選ばれる少なくとも1種の金属粉末である。中でも、その融点が、1100℃以下の貴金属系材料であるAu粉末又はAg粉末のいずれかが好ましい。 The conductive powder (a1) is a metal powder having high dispersibility in the composition and having a high conductivity that becomes a dense film after paste firing. For example, it is at least one metal powder selected from Ag, Au, Cu, Pd, or Pt. Among these, Au powder or Ag powder, which is a noble metal material having a melting point of 1100 ° C. or lower, is preferable.
導電粉末(a1)の粒径は、10μm以下であればよく、平均粒径が1〜7μm、特に1〜5μmであるものが好ましい。平均粒径が、7μmを超えると焼結接着を防止できない場合がある。その形状は粒状、フレーク状でよく、特に限定されるものではないが、球状に近いほど分散性が高いことから、単分散系である球状または粒状の導電粉末を使用することが望ましい。導電粉末(a1)には、Ru、Sn、Zn等を、導電粉末(a1)100重量部に対して10重量部程度まで含むことができる。 The particle size of the conductive powder (a1) may be 10 μm or less, and the average particle size is preferably 1 to 7 μm, particularly preferably 1 to 5 μm. If the average particle size exceeds 7 μm, sintering adhesion may not be prevented. The shape may be granular or flaky, and is not particularly limited, but it is desirable to use a spherical or granular conductive powder which is a monodispersed system because the dispersibility is higher as it is closer to a sphere. The conductive powder (a1) can contain up to about 10 parts by weight of Ru, Sn, Zn or the like with respect to 100 parts by weight of the conductive powder (a1).
一方、導電粉末(a2)は、平均粒径が7μm以上で導電粉末(a1)よりも導電率が低い金属粉末である。具体的には、Ni、W、又はMoから選ばれる少なくとも1種の金属粉末である。そして、導電粉末(a2)の融点は、1300℃以上であることがより好ましい。導電粉末(a2)の粒径は、平均粒径が7μm以上と比較的大きく、より好ましくは7〜13μmである。 On the other hand, the conductive powder (a2) is a metal powder having an average particle size of 7 μm or more and lower conductivity than the conductive powder (a1). Specifically, it is at least one metal powder selected from Ni, W, or Mo. The melting point of the conductive powder (a2) is more preferably 1300 ° C. or higher. The conductive powder (a2) has a relatively large average particle diameter of 7 μm or more, more preferably 7 to 13 μm.
本発明の厚膜導体形成用組成物で、このような粒径が大きいNiなどの導電粉末(a2)を併用するのは、多数の素子を並べて焼成した場合、膜の表面はAg粉末が略平坦な面を形成しているが、Ni粉末などが焼成膜中に介在すると、Ni自身は融点が高いことから焼結しないので、表面からNi粉末などの一部が飛び出た状態となり、素子の端子電極用導電膜となる導体同士が焼結接着するのを防ぐことができるからである。 In the composition for forming a thick film conductor of the present invention, the conductive powder (a2) such as Ni having a large particle size is used in combination when a large number of elements are arranged and fired, and the surface of the film is substantially made of Ag powder. Although a flat surface is formed, if Ni powder or the like is present in the fired film, Ni itself does not sinter because of its high melting point, so a part of Ni powder or the like protrudes from the surface, and the element It is because it can prevent that the conductor used as the electrically conductive film for terminal electrodes adheres by sintering.
これは、導電粉末(a2)の融点が1300℃以上の金属ならば、Ni、W、Moに限らず、同様の結果が期待できる。平均粒径は7μm以上でなければならず、平均粒径が7μm未満の場合、焼成膜厚を10μmより厚くすると、膜に埋もれ易くなり焼結接着を制御する効果を低下させる。ただし、平均粒径が13μmを超える場合、スクリーン印刷にて塗布すると、スクリーンメッシュの目詰まりを起こし易くなり、所定の塗布形状を損ねてしまうことや、厚膜導体形成用組成物中に沈降し易くなる傾向がみられるので好ましくない。 If the melting point of the conductive powder (a2) is a metal having a temperature of 1300 ° C. or higher, the same result can be expected without being limited to Ni, W, and Mo. The average particle size must be 7 μm or more. When the average particle size is less than 7 μm, if the fired film thickness is greater than 10 μm, the film is easily buried and the effect of controlling the sintering adhesion is reduced. However, when the average particle size exceeds 13 μm, when applied by screen printing, the screen mesh is likely to be clogged, and the predetermined application shape may be damaged, or the thick film conductor forming composition may settle. Since the tendency to become easy is seen, it is not preferable.
また、導電粉末(a2)の含有量は、導電粉末(a1)100重量部に対して、4.0〜8.0重量部でなければならない。導電粉末(a2)の含有量が4重量部未満である場合、焼成膜の表面に点在させるための十分な量に達しないので、焼結接着を防ぐ効果が少ない。また、8重量部より多くなると、導電粉末(a1)の含有量が少ないことから抵抗値が高くなったり、基板と導体の接着強度が悪化したり、はんだ濡れ性が悪化する。 Moreover, content of electroconductive powder (a2) must be 4.0-8.0 weight part with respect to 100 weight part of electroconductive powder (a1). When the content of the conductive powder (a2) is less than 4 parts by weight, the amount of the conductive powder (a2) does not reach a sufficient amount for interspersing the surface of the fired film. On the other hand, if the amount is more than 8 parts by weight, the resistance value increases because the content of the conductive powder (a1) is small, the adhesive strength between the substrate and the conductor deteriorates, and the solder wettability deteriorates.
厚膜導体形成用組成物中の導電粉末(A)は、組成物100重量部に対して、45.0〜90.0重量部が望ましく、45.0〜85.0重量部が好ましい。導電粉末が45.0重量部未満の場合、焼成後の膜の状態がポーラスになり、膜強度が脆くなったり、抵抗値が高くなったりするという不具合がある。導電粉末が90.0重量部を超える場合、厚膜導体形成用組成物の流動性が悪くなりハンドリングが悪くなったり、乾燥し易くなり印刷スクリーンの目詰まりし易くなったりするという不具合がある。 The conductive powder (A) in the composition for forming a thick film conductor is desirably 45.0 to 90.0 parts by weight and preferably 45.0 to 85.0 parts by weight with respect to 100 parts by weight of the composition. When the conductive powder is less than 45.0 parts by weight, there is a problem that the state of the film after baking becomes porous, the film strength becomes brittle, and the resistance value becomes high. When the conductive powder exceeds 90.0 parts by weight, there is a problem in that the fluidity of the thick film conductor-forming composition is deteriorated and handling is deteriorated, and it is easy to dry and clogging of the printing screen.
B 酸化物粉末
本発明において、酸化物粉末は、塗布面にぬれ性を与える無機酸化物である。
B Oxide Powder In the present invention, the oxide powder is an inorganic oxide that imparts wettability to the coated surface.
このような機能を有するものであれば、種類は特に限定されず、従来から厚膜導体に広く用いられている酸化珪素、酸化アルミニウム、酸化鉛、酸化カルシウム、酸化硼素などを主成分としたガラスフリットを使用できる。この他、酸化マグネシウム、酸化バリウム、酸化ストロンチウム、酸化カドミウム、酸化スズ、酸化ビスマス、酸化ジルコニウム、酸化亜鉛、或いは酸化マンガンなどを含有してもよい。但し、本発明に係る電子部品への導体形成では、厚膜導体の焼成が500〜900℃の範囲で行われることから、この温度領域に軟化点を有する酸化物粉末でなければならない。 If it has such a function, a kind will not be specifically limited, The glass which has mainly used silicon oxide, aluminum oxide, lead oxide, calcium oxide, boron oxide etc. which are widely used for the thick film conductor conventionally. Frit can be used. In addition, magnesium oxide, barium oxide, strontium oxide, cadmium oxide, tin oxide, bismuth oxide, zirconium oxide, zinc oxide, or manganese oxide may be contained. However, in forming the conductor on the electronic component according to the present invention, since the thick film conductor is fired in the range of 500 to 900 ° C., it must be an oxide powder having a softening point in this temperature range.
具体的には、酸化物として、例えばSiO225.0〜35.0重量部、Bi2O335.0〜70.0重量部、B2O33.0〜13.0重量部、Al2O30.1〜10.0重量部にZn、アルカリ、アルカリ土類を適宜添加した硼珪酸ビスマスガラス、或いはSiO24.0〜20.0重量部、PbO(30.0〜70.0重量部)、Al2O30.1〜10.0重量部、B2O310.0〜52.0重量部にZn、アルカリ、アルカリ土類を適宜添加した硼珪酸鉛ガラス等の酸化物粉末が挙げられる。これらには、はんだ濡れ性や接着強度向上のため、Bi2O3を増量したり、CuO、ZnO、MnO2を添加したりすることができる。酸化物粉末の平均粒径は10μm以下が望ましい。平均粒径は10μmを超えると、分散性や導電性を悪化させることがある。 Specifically, as the oxide, for example, SiO 2 25.0-35.0 parts by weight, Bi 2 O 3 35.0-70.0 parts by weight, B 2 O 3 3.0-13.0 parts by weight, Bismuth borosilicate glass in which Zn, alkali or alkaline earth is appropriately added to 0.1 to 10.0 parts by weight of Al 2 O 3 , or 4.0 to 20.0 parts by weight of SiO 2 , PbO (30.0 to 70 0.0 part by weight), Al 2 O 3 0.1 to 10.0 parts by weight, B 2 O 3 10.0 to 52.0 parts by weight, Zn, alkali, and alkaline earth lead borosilicate glass appropriately added, etc. The oxide powder is mentioned. In order to improve solder wettability and adhesive strength, the amount of Bi 2 O 3 can be increased or CuO, ZnO, or MnO 2 can be added to these. The average particle size of the oxide powder is desirably 10 μm or less. When the average particle diameter exceeds 10 μm, dispersibility and conductivity may be deteriorated.
厚膜導体形成用組成物中の酸化物粉末は、組成物100重量部に対して、0.2〜15.0重量部が望ましく、0.5〜15.0重量部が好ましい。酸化物粉末が0.2重量部未満の場合、接着強度を増す効果が得られないという不具合がある。酸化物粉末が15.0重量部を超える場合、導電粉末の焼結を妨げたり、膜表面に過度に析出したりするという不具合がある。 The oxide powder in the composition for forming a thick film conductor is desirably 0.2 to 15.0 parts by weight, and preferably 0.5 to 15.0 parts by weight with respect to 100 parts by weight of the composition. When oxide powder is less than 0.2 weight part, there exists a malfunction that the effect which increases adhesive strength is not acquired. When the oxide powder exceeds 15.0 parts by weight, there is a problem that the sintering of the conductive powder is hindered or excessively deposited on the film surface.
C 有機ビヒクル
本発明において、樹脂成分と溶剤成分からなる有機ビヒクルは、導電粉末、酸化物粉末を均一に溶解し分散させる媒体であり、電子部品の素子へ塗布(印刷)し、乾燥、焼成したとき、析出した酸化物(スラグ)を分離させる機能をもつ。
C Organic vehicle In the present invention, an organic vehicle comprising a resin component and a solvent component is a medium in which conductive powder and oxide powder are uniformly dissolved and dispersed, and is applied (printed) to an element of an electronic component, dried and fired. Sometimes, it has a function of separating the deposited oxide (slag).
樹脂成分としては、従来から公知のエチルセルロース、アクリル等が使用できる。溶剤成分は、樹脂成分を溶解するとともに、導電粉末、酸化物粉末をペースト中で安定に分散させる機能をもつ成分であるが、塗布(印刷)したとき、これら粉末を均一に展延させ、焼成時までには大気中に逸散する性質をもつ必要がある。ターピネオール、ブチルカルビトールアセテート等が使用できる。 As the resin component, conventionally known ethyl cellulose, acrylic and the like can be used. The solvent component dissolves the resin component and has a function of stably dispersing the conductive powder and oxide powder in the paste. When applied (printed), the powder is uniformly spread and fired. By time, it must have the property of dissipating into the atmosphere. Terpineol, butyl carbitol acetate, etc. can be used.
厚膜導体形成用組成物中の有機ビヒクルは、組成物100重量部に対して、8.0〜55.0重量部が望ましく、10.0〜55.0重量部が好ましい。有機ビヒクルが8.0重量部未満の場合、無機成分である導電粉末や酸化物粉末の粒子を包み込む事ができず、組成物としての流動性を欠き、品質が不安定になるばかりか、分離するという不具合がある。有機ビヒクルが55.0重量部を超える場合、長期保存後に無機成分と分離してしまうという不具合がある。 The organic vehicle in the composition for forming a thick film conductor is desirably 8.0 to 55.0 parts by weight and preferably 10.0 to 55.0 parts by weight with respect to 100 parts by weight of the composition. If the organic vehicle is less than 8.0 parts by weight, the particles of the conductive powder and oxide powder, which are inorganic components, cannot be encapsulated, and the fluidity of the composition is lacking, resulting in unstable quality and separation. There is a problem of doing. When the organic vehicle exceeds 55.0 parts by weight, there is a problem that it is separated from inorganic components after long-term storage.
2.厚膜導体の形成方法
本発明の厚膜導体の形成方法は、上記厚膜導体形成用組成物を、電子部品の素子に塗布し、その後、500〜900℃で焼成して、素子に端子電極用導電膜を形成することを特徴とする。
2. Method for Forming Thick Film Conductor A method for forming a thick film conductor according to the present invention comprises applying the composition for forming a thick film conductor to an element of an electronic component, and then firing at 500 to 900 ° C. to form a terminal electrode on the element. A conductive film is formed.
すなわち、上記の厚膜導体形成用組成物を電子部品の端子電極となる箇所に10〜50μm、好ましくは15〜40μmの膜厚で塗布若しくは印刷し、100〜150℃で乾燥させてから、焼成炉に入れ、500〜900℃で熱処理して厚膜導体を形成する。例えば、対象個所にペーストをスクリーン印刷し、ピーク温度120℃において、3〜8分間、赤外線乾燥機で乾燥させ、ピーク温度800〜900℃において、5〜15分間、トンネル型ベルト焼成炉などで熱処理すればよい。
焼成温度が500℃未満では有機ビヒクルが十分に焼失しないだけでなく、Niなどの導電粉末(a2)が焼成膜の表面から突出しないことがあり、900℃を超えると電子部品の特性に悪影響が出る場合があるので好ましくない。
That is, the above thick film conductor forming composition is applied or printed at a thickness of 10 to 50 μm, preferably 15 to 40 μm, on a portion to be a terminal electrode of an electronic component, dried at 100 to 150 ° C., and then fired. A thick film conductor is formed by heat treatment at 500 to 900 ° C. in a furnace. For example, the paste is screen-printed at the target location, dried with an infrared dryer at a peak temperature of 120 ° C. for 3 to 8 minutes, and heat-treated in a tunnel type belt firing furnace at a peak temperature of 800 to 900 ° C. for 5 to 15 minutes. do it.
When the firing temperature is less than 500 ° C., not only the organic vehicle is not sufficiently burned out, but also the conductive powder (a2) such as Ni may not protrude from the surface of the fired film. Since it may come out, it is not preferable.
3.厚膜導体
本発明の厚膜導体は、上記の方法によって得られ、導電粉末(a2)の少なくとも一部が端子電極用導電膜の表面から突出してなる厚膜導体である。その膜厚は、10〜20μmであることが好ましい。
3. Thick Film Conductor The thick film conductor of the present invention is a thick film conductor obtained by the above method, wherein at least a part of the conductive powder (a2) protrudes from the surface of the terminal electrode conductive film. The film thickness is preferably 10 to 20 μm.
本発明では、導電粉末(A)が、高い導電率を有する導電粉末(a1)と、平均粒径が7μm以上かつ導電粉末(a1)よりも導電率が低い導電粉末(a2)からなり、しかも、導電粉末(a2)の含有量が、導電粉末(a1)100重量部に対して、4.0〜8.0重量部である厚膜導体形成用組成物を使用するため、導電粉末(a2)の少なくとも一部が端子電極用導電膜の表面から突出となる。これにより、多数の素子を並べて焼成した場合、互いに接触しあって接着しても、素子の導電膜(厚膜導体)同士が導電粉末(a2)によって点接触した電子部品となるので分離しやすい。 In the present invention, the conductive powder (A) comprises a conductive powder (a1) having a high conductivity and a conductive powder (a2) having an average particle diameter of 7 μm or more and a lower conductivity than the conductive powder (a1). Since the composition for forming a thick film conductor in which the content of the conductive powder (a2) is 4.0 to 8.0 parts by weight with respect to 100 parts by weight of the conductive powder (a1), the conductive powder (a2 ) Protrudes from the surface of the terminal electrode conductive film. As a result, when a large number of elements are baked side by side, even if they are in contact with each other and bonded, the conductive films (thick film conductors) of the elements become electronic parts that are point-contacted by the conductive powder (a2), so that they are easily separated .
以下に、本発明の実施例、比較例を示すが、本発明は、これらの実施例によって何ら限定されるものではない。
なお、厚膜導体形成用組成物の性能は、次の方法で測定し評価した。
Examples of the present invention and comparative examples are shown below, but the present invention is not limited to these examples.
The performance of the thick film conductor forming composition was measured and evaluated by the following method.
1)接着強度測定は、厚膜導体形成用組成物によって得られた厚膜導体の2.0×2.0mmパッド上に、直径0.65mmφのSnめっき銅線を3.0重量部Ag−0.5重量部Cu―96.5重量部Sn組成の鉛フリーはんだにて、はんだ付けした後、垂直方向に引っ張り、剥離した時点の引張り力を測定した。接着強度測定値は50N以上あれば十分な強度があると判断される。
2)面積抵抗値は、厚膜導体形成用組成物によって得られた厚膜導体の0.6×60.0mmラインの抵抗値を測定し換算した。面積抵抗測定値は4.0mΩ以下であれば良好であると判断される。
3)はんだ濡れは、厚膜導体形成用組成物によって得られた厚膜導体の10.0×10.0mmパッドを245℃に保持した3.0重量部Ag−0.5重量部Cu―96.5重量部Sn組成の鉛フリーはんだ浴に5秒浸漬し、外観を観察した。
4)導体膜の焼結接着は、乾燥後の20.0×20.0mmパッド同士を重ね合わせ、その上に同形状のアルミナ基板を4枚重ね、約10gの荷重を掛け前記のピーク温度800℃で9分間、トータル30分間のベルト炉で焼成し、焼結接着の有無に関して確認した。
5)ライフは、厚膜導体形成用組成物作製後120日後の状態を、分離、凝集等の観点で確認した。
6)なお、導電粉末や酸化物粉末、無機酸化物の粒度を確認するには、公知の粒度解析計(例えば「マイクロトラック」登録商標)を用いた。平均粒径はD50を示し、これは累積粒度分布における粒径のメジアン値である。
1) Adhesive strength measurement was carried out by adding 3.0 parts by weight of Ag-plated copper wire having a diameter of 0.65 mm on a 2.0 × 2.0 mm pad of a thick film conductor obtained by the composition for forming a thick film conductor. After soldering with a lead-free solder having a composition of 0.5 parts by weight of Cu-96.5 parts by weight of Sn, the tensile force at the time of pulling in the vertical direction and peeling was measured. If the measured adhesive strength is 50 N or more, it is judged that there is sufficient strength.
2) The area resistance value was converted by measuring the resistance value of a 0.6 × 60.0 mm line of the thick film conductor obtained by the thick film conductor forming composition. If the measured area resistance is 4.0 mΩ or less, it is judged to be good.
3) Solder wetting is 3.0 parts by weight Ag-0.5 part by weight Cu-96 in which a 10.0 × 10.0 mm pad of the thick film conductor obtained by the thick film conductor forming composition is held at 245 ° C. .5 parts by weight was immersed in a lead-free solder bath having a Sn composition for 5 seconds, and the appearance was observed.
4) Sintering adhesion of the conductor film is performed by stacking the 20.0 × 20.0 mm pads after drying, stacking four alumina substrates of the same shape on top of each other, applying a load of about 10 g and applying the peak temperature of 800 It was baked in a belt furnace for 9 minutes at 0 ° C. for a total of 30 minutes, and the presence or absence of sintered adhesion was confirmed.
5) Life confirmed the state 120 days after preparation of the composition for forming a thick film conductor from the viewpoints of separation, aggregation, and the like.
6) In order to confirm the particle size of the conductive powder, oxide powder, and inorganic oxide, a known particle size analyzer (for example, “Microtrack” registered trademark) was used. The average particle diameter indicates a D 50, which is the median value of the particle size in cumulative particle size distribution.
一方、組成物の成分として、次のものを用いた。
(A)導電粉末
導電粉末(a1):平均粒径1.2μmの粒状Ag粉末と、偏平方向平均長5μmのフレーク状Ag粉末とを2:1で混合した金属粉末。
導電粉末(a2):平均粒径5μm、10μm、17μmのNi粉末(それぞれ、Ni−a、Ni−b、Ni−cという)、平均粒径10μmのW粉末(W−aという)、および平均粒径10μmのMo粉末(Mo−aという)の各金属粉末。
(B)酸化物粉末
SiO230.0重量部、Bi2O355.0重量部、B2O38.0重量部、Al2O34.0重量部、CoO(1.0重量部)、K2O(1.0重量部)、Li2O(20重量部)からなる平均粒径3μmの硼珪酸ビスマス酸化物粉末に、Zn、アルカリ、アルカリ土類を適宜添加した硼珪酸ビスマスガラス。
(C)有機ビヒクル
樹脂成分:分子量120000のエチルセルロース3.0重量部を、溶剤成分:ターピネオール97.0重量部で溶かした溶液。
On the other hand, the following were used as components of the composition.
(A) Conductive powder Conductive powder (a1): Metal powder obtained by mixing granular Ag powder having an average particle diameter of 1.2 μm and flaky Ag powder having an average length in the flat direction of 5 μm at a ratio of 2: 1.
Conductive powder (a2): Ni powder having an average particle diameter of 5 μm, 10 μm, and 17 μm (referred to as Ni-a, Ni-b, and Ni-c, respectively), W powder having an average particle diameter of 10 μm (referred to as Wa), and average Each metal powder of Mo powder (referred to as Mo-a) having a particle size of 10 μm.
(B) oxide powder SiO 2 30.0 parts by weight, Bi 2 O 3 55.0 parts by weight, B 2 O 3 8.0 parts by weight, Al 2 O 3 4.0 parts by weight, CoO (1.0 wt Part), K 2 O (1.0 part by weight), Li 2 O (20 parts by weight) borosilicate having an average particle diameter of 3 μm and appropriately added Zn, alkali, and alkaline earth. Bismuth glass.
(C) Organic vehicle Resin component: A solution obtained by dissolving 3.0 parts by weight of ethyl cellulose having a molecular weight of 120,000 in 97.0 parts by weight of solvent component: terpineol.
[実施例1]
導電粉末、酸化物粉末を有機ビヒクルに添加して、三本ロールミルにて分散混練し、本発明の厚膜導体形成用組成物を作製した。表1に示したようにAg粉末を100.0重量部、硼珪酸ビスマスガラスを1.0重量部、Bi2O3を8.0重量部、Ni−b粉末を4.0重量部配合している。
この厚膜導体形成用組成物を96%アルミナ基板上にスクリーン印刷し、150℃で乾燥した。乾燥した基板をピーク温度800℃で9分間、トータル30分間のベルト炉で焼成し、所定のパターンの厚膜導体膜を形成し上記記載の方法で厚膜導体を得た。得られたパターンは2.0×2.0mmパッド、0.6×60.0mmライン、10.0×10.0mmパッド、20.0×20.0mmパッドである。
この厚膜導体の膜厚、面積抵抗値、はんだ濡れ性、接着強度、導体同士の焼結接着について得られた結果を表1に示した。面積抵抗値は4.0mΩ以下で、導体同士の焼結接着はなく、はんだ濡れ性も良好で、接着強度も50N以上であった。
[Example 1]
Conductive powder and oxide powder were added to an organic vehicle and dispersed and kneaded with a three-roll mill to produce the thick film conductor forming composition of the present invention. As shown in Table 1, 100.0 parts by weight of Ag powder, 1.0 part by weight of bismuth borosilicate glass, 8.0 parts by weight of Bi 2 O 3 and 4.0 parts by weight of Ni-b powder were blended. ing.
This thick film conductor forming composition was screen printed on a 96% alumina substrate and dried at 150 ° C. The dried substrate was baked in a belt furnace for 9 minutes at a peak temperature of 800 ° C. for a total of 30 minutes to form a thick film conductor film having a predetermined pattern, and a thick film conductor was obtained by the method described above. The resulting pattern is a 2.0 × 2.0 mm pad, 0.6 × 60.0 mm line, 10.0 × 10.0 mm pad, 20.0 × 20.0 mm pad.
Table 1 shows the results obtained for the film thickness, sheet resistance value, solder wettability, adhesive strength, and sintered adhesion between the conductors of this thick film conductor. The sheet resistance value was 4.0 mΩ or less, there was no sintered adhesion between the conductors, the solder wettability was good, and the adhesive strength was 50 N or more.
[実施例2]
Ni−b粉末の含有量を8.0重量部とした以外は、実施例1と同様にして厚膜導体形成用組成物を調製し、上記の方法で厚膜導体を得た。この厚膜導体の膜厚、面積抵抗値、はんだ濡れ性、接着強度、導体同士の焼結接着について測定、評価し、結果を表1に示した。
面積抵抗値は4.0mΩ以下で、導体同士の焼結接着はなく、はんだ濡れ性も良好で、接着強度も50N以上であった。
[Example 2]
A thick film conductor-forming composition was prepared in the same manner as in Example 1 except that the Ni-b powder content was 8.0 parts by weight, and a thick film conductor was obtained by the above method. The film thickness, sheet resistance value, solder wettability, adhesive strength, and sintered adhesion between conductors were measured and evaluated, and the results are shown in Table 1.
The sheet resistance value was 4.0 mΩ or less, there was no sintered adhesion between the conductors, the solder wettability was good, and the adhesive strength was 50 N or more.
[実施例3]
Ni−b粉末の代わりにW−a粉末を4.0重量部用いた以外は、実施例1と同様にして厚膜導体形成用組成物を調製し、上記の方法で厚膜導体を得た。この厚膜導体の膜厚、面積抵抗値、はんだ濡れ性、接着強度、導体同士の焼結接着について測定、評価し、結果を表1に示した。
面積抵抗値は4.0mΩ以下で、導体同士の焼結接着はなく、はんだ濡れ性も良好で、接着強度も50N以上であった。
[Example 3]
A thick film conductor forming composition was prepared in the same manner as in Example 1 except that 4.0 parts by weight of Wa powder was used instead of Ni-b powder, and a thick film conductor was obtained by the above method. . The film thickness, sheet resistance value, solder wettability, adhesive strength, and sintered adhesion between conductors were measured and evaluated, and the results are shown in Table 1.
The sheet resistance value was 4.0 mΩ or less, there was no sintered adhesion between the conductors, the solder wettability was good, and the adhesive strength was 50 N or more.
[実施例4]
Ni−b粉末の代わりにMo−a粉末を4.0重量部用いた以外は、実施例1と同様にして厚膜導体形成用組成物を調製し、上記の方法で厚膜導体を得た。この厚膜導体の膜厚、面積抵抗値、はんだ濡れ性、接着強度、導体同士の焼結接着について測定、評価し、結果を表1に示した。
面積抵抗値は4.0mΩ以下で、導体同士の焼結接着はなく、はんだ濡れ性も良好で、接着強度も50N以上であった。
[Example 4]
A thick film conductor-forming composition was prepared in the same manner as in Example 1 except that 4.0 parts by weight of Mo-a powder was used instead of Ni-b powder, and a thick film conductor was obtained by the above method. . The film thickness, sheet resistance value, solder wettability, adhesive strength, and sintered adhesion between conductors were measured and evaluated, and the results are shown in Table 1.
The sheet resistance value was 4.0 mΩ or less, there was no sintered adhesion between the conductors, the solder wettability was good, and the adhesive strength was 50 N or more.
[実施例5]
Ni−b粉末の代わりに平均粒径が大きいNi−c粉末を4.0重量部用いた以外は、実施例1と同様にして厚膜導体形成用組成物を調製し、上記の方法で厚膜導体を得た。この厚膜導体の膜厚、面積抵抗値、はんだ濡れ性、接着強度、導体同士の焼結接着について測定、評価し、結果を表1に示した。面積抵抗値は4.0mΩ以上、はんだ濡れは一部濡れていないが実用上問題とならないレベルであった。接着強度は25N以下であった。導体同士の焼結接着はなかった。
[Example 5]
A thick film conductor-forming composition was prepared in the same manner as in Example 1 except that 4.0 parts by weight of Ni-c powder having a large average particle size was used instead of Ni-b powder, and the thickness was increased by the above method. A membrane conductor was obtained. The film thickness, sheet resistance value, solder wettability, adhesive strength, and sintered adhesion between conductors were measured and evaluated, and the results are shown in Table 1. The sheet resistance value was 4.0 mΩ or more, and the solder wetting was not partially wet but at a level that would not cause a problem in practice. The adhesive strength was 25N or less. There was no sintered adhesion between the conductors.
[比較例1]
導電粉末としてAg粉末のみを用い、Ni―b粉末を配合しなかった以外は、実施例1と同様にして厚膜導体形成用組成物を調製し、上記の方法で厚膜導体を得た。この厚膜導体の膜厚、面積抵抗値、はんだ濡れ性、接着強度、導体同士の焼結接着について測定、評価し、結果を表1に示した。
面積抵抗値は4.0mΩ以下、はんだ濡れ性は良好で、接着強度も50N以上であったが、導体同士の焼結接着が強く分離出来なかった。
[Comparative Example 1]
A thick film conductor-forming composition was prepared in the same manner as in Example 1 except that only the Ag powder was used as the conductive powder and no Ni-b powder was blended, and a thick film conductor was obtained by the above method. The film thickness, sheet resistance value, solder wettability, adhesive strength, and sintered adhesion between conductors were measured and evaluated, and the results are shown in Table 1.
The sheet resistance value was 4.0 mΩ or less, the solder wettability was good, and the adhesive strength was 50 N or more, but the sintered adhesion between the conductors was strong and could not be separated.
[比較例2]
Ni−b粉末の代わりに平均粒径が小さいNi−a粉末を8.0重量部用いた以外は、実施例1と同様にして厚膜導体形成用組成物を調製し、上記の方法で厚膜導体を得た。この厚膜導体の膜厚、面積抵抗値、はんだ濡れ性、接着強度、導体同士の焼結接着について測定、評価し、結果を表1に示した。面積抵抗値は4.0mΩ以上、はんだ濡れは一部濡れていないが実用上問題とならないレベルであった。接着強度は50N以下であった。導体同士の焼結接着はしており、分離しにくかった。
[Comparative Example 2]
A thick film conductor-forming composition was prepared in the same manner as in Example 1 except that 8.0 parts by weight of Ni-a powder having a small average particle size was used instead of Ni-b powder, and the thickness was increased by the above method. A membrane conductor was obtained. The film thickness, sheet resistance value, solder wettability, adhesive strength, and sintered adhesion between conductors were measured and evaluated, and the results are shown in Table 1. The sheet resistance value was 4.0 mΩ or more, and the solder wetting was not partially wet but at a level that would not cause a problem in practice. The adhesive strength was 50 N or less. The conductors were sinter-bonded and difficult to separate.
[比較例3]
Ni−b粉末の配合量を2.0重量部に減らした以外は、実施例1と同様にして厚膜導体形成用組成物を調製し、上記記載の方法で厚膜導体を得た。この厚膜導体の膜厚、面積抵抗値、はんだ濡れ性、接着強度、導体同士の焼結接着について測定、評価し、結果を表1に示した。
面積抵抗値は4.0mΩ以下、はんだ濡れ性は良好で、接着強度も50N以上であったが、導体同士の焼結接着が強く分離出来なかった。
[Comparative Example 3]
A thick film conductor forming composition was prepared in the same manner as in Example 1 except that the blending amount of the Ni-b powder was reduced to 2.0 parts by weight, and a thick film conductor was obtained by the method described above. The film thickness, sheet resistance value, solder wettability, adhesive strength, and sintered adhesion between conductors were measured and evaluated, and the results are shown in Table 1.
The sheet resistance value was 4.0 mΩ or less, the solder wettability was good, and the adhesive strength was 50 N or more, but the sintered adhesion between the conductors was strong and could not be separated.
[比較例4]
Ni−b粉末の配合量を10.0重量部に増やした以外は、実施例1と同様にして厚膜導体形成用組成物を調製し、上記記載の方法で厚膜導体を得た。この厚膜導体の膜厚、面積抵抗値、はんだ濡れ性、接着強度、導体同士の焼結接着について測定、評価し、結果を表1に示した。
面積抵抗値は4.0mΩ以上、はんだ濡れ性も悪く、接着強度も25N以下であった。導体同士の焼結接着はなかった。
[Comparative Example 4]
A thick film conductor-forming composition was prepared in the same manner as in Example 1 except that the amount of Ni-b powder was increased to 10.0 parts by weight, and a thick film conductor was obtained by the method described above. The film thickness, sheet resistance value, solder wettability, adhesive strength, and sintered adhesion between conductors were measured and evaluated, and the results are shown in Table 1.
The sheet resistance value was 4.0 mΩ or more, the solder wettability was poor, and the adhesive strength was 25 N or less. There was no sintered adhesion between the conductors.
「評価」
実施例1,2によって、導電粉末として、Ag粉末にNi−b粉末を配合することで、面積抵抗値、はんだ濡れ性、接着強度などの特性を低下させずに導体同士の焼結接着を防ぐ効果があることが分かる。実施例3、実施例4は実施例1のNi粉末の形状・含有量を維持したまま、W粉末、Mo粉末に置換した場合であるが、同等な効果が得られた。実施例5では、実施例1で効果があったNi粉末の粒径を大きくしたが、導体同士の焼結接着を防ぐ効果はあるものの、面積抵抗値、はんだ濡れ性、接着強度が若干悪化した。
"Evaluation"
According to Examples 1 and 2, by adding Ni-b powder to Ag powder as conductive powder, sintering adhesion between conductors is prevented without degrading characteristics such as sheet resistance, solder wettability, and adhesive strength. It turns out that there is an effect. Although Example 3 and Example 4 were the cases where it replaced with W powder and Mo powder, maintaining the shape and content of Ni powder of Example 1, the equivalent effect was acquired. In Example 5, the particle size of the Ni powder that was effective in Example 1 was increased, but although there was an effect of preventing sintering adhesion between conductors, the sheet resistance value, solder wettability, and adhesive strength were slightly deteriorated. .
比較例1は、従来の組成であり、Ag以外の導電粉末を含まない厚膜導体形成用組成物である。比較例2は、実施例2よりも粒径が小さいNi粉末を用いたため、はんだ濡れ性および接着強度を悪化させ、導体同士の焼結接着にも大きな効果がなかった。比較例3からNi−b粉末が少なすぎると、導体同士の焼結接着に効果が現れないことが分かる。比較例4からNi−b粉末が多すぎると、導体同士の焼結接着を防ぐ効果はあるが、面積抵抗値は大きくなり、はんだ濡れ性は悪くなり、接着強度も悪くなることが分かる。 Comparative Example 1 is a composition for forming a thick film conductor having a conventional composition and containing no conductive powder other than Ag. In Comparative Example 2, since Ni powder having a smaller particle diameter than that in Example 2 was used, the solder wettability and the adhesive strength were deteriorated, and there was no great effect on the sintering adhesion between the conductors. From Comparative Example 3, it can be seen that if the Ni-b powder is too small, no effect appears in the sintering adhesion between the conductors. It can be seen from Comparative Example 4 that if the Ni-b powder is too much, there is an effect of preventing the sintered adhesion between the conductors, but the sheet resistance value becomes large, the solder wettability is deteriorated, and the adhesive strength is also deteriorated.
Claims (11)
導電粉末(a2)は、平均粒径が7μm以上であり、かつ、導電粉末(a2)の含有量が、導電粉末(a1)100重量部に対して、4.0〜8.0重量部であることを特徴とする厚膜導体形成用組成物。 A conductive powder (A) comprising a conductive powder (a1) having a high conductivity and a conductive powder (a2) having a conductivity lower than that of the conductive powder (a1), an oxide powder (B), and an organic vehicle (C). In the composition for forming a thick film conductor,
The conductive powder (a2) has an average particle size of 7 μm or more, and the content of the conductive powder (a2) is 4.0 to 8.0 parts by weight with respect to 100 parts by weight of the conductive powder (a1). A composition for forming a thick film conductor.
項1に記載の厚膜導体形成用組成物。 The melting point of conductive powder (a2) is 1300 degreeC or more, The composition for thick film conductor formation of Claim 5 characterized by the above-mentioned.
Item 2. The thick film conductor forming composition according to Item 1.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR20200009020A (en) * | 2017-05-26 | 2020-01-29 | 스미토모 긴조쿠 고잔 가부시키가이샤 | A composition for forming a conductor, a manufacturing method thereof, a conductor, a manufacturing method thereof, and a chip resistor |
| CN111192732A (en) * | 2020-03-12 | 2020-05-22 | 上海双腾电子电器有限公司 | A kind of thick film platinum palladium silver resistance sheet and its manufacturing method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| KR20200009020A (en) * | 2017-05-26 | 2020-01-29 | 스미토모 긴조쿠 고잔 가부시키가이샤 | A composition for forming a conductor, a manufacturing method thereof, a conductor, a manufacturing method thereof, and a chip resistor |
| KR102569071B1 (en) * | 2017-05-26 | 2023-08-21 | 스미토모 긴조쿠 고잔 가부시키가이샤 | Conductor-forming composition and its manufacturing method, conductor and its manufacturing method, chip resistor |
| CN111192732A (en) * | 2020-03-12 | 2020-05-22 | 上海双腾电子电器有限公司 | A kind of thick film platinum palladium silver resistance sheet and its manufacturing method |
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