JP2008053160A - Photoelectric sensor, sheet-like member detector and reflecting member for photoelectric sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a photoelectric sensor having high accuracy for position detection of a detection object, a sheet-like member detector, and a reflecting member for photoelectric sensor. <P>SOLUTION: The photoelectric sensor comprises a sensor body, a reflecting member 6 disposed in opposition to the sensor body, and a bracket 12 and a shielding plate 13 capable of changing a valid area A1 of a reflecting surface 15a of the reflecting member 6. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a photoelectric sensor, a plate-shaped member detection device, and a reflection member for a photoelectric sensor, each including a sensor main body including a light projecting unit and a light receiving unit, and a reflective member disposed to face the sensor main body.

  Conventionally, as described in, for example, Patent Document 1, a sensor main body including a light projecting element and a light receiving element and light emitted from the light projecting element disposed opposite to the sensor main body are reflected in a substantially coaxial direction to receive the light. There is a photoelectric sensor including a reflection member that receives light from an element. The photoelectric sensor detects the detection target based on a change in the amount of light received by the light receiving element due to the detection target being disposed between the sensor main body and the reflecting member.

In the case of Patent Document 1, the photoelectric sensor is used to detect the jumping out of the glass plate for liquid crystal inserted in the cassette, and the sensor main body and the reflecting member constituting the photoelectric sensor are arranged in the glass plate in the cassette. One side is arranged on one side in the direction and the other side is arranged on the other side so as to face each other. The photoelectric sensor detects the glass plate protruding to the protrusion prohibited area side so that the glass plate inserted in the cassette and the robot arm that operates to take out the glass plate from the cassette do not come into contact with each other. is doing.
Japanese Patent Laid-Open No. 10-255612 (FIG. 14)

  By the way, as described above, the sensor main body and the reflecting member are respectively arranged on both sides of the glass plate arrangement direction. Therefore, as the number of glass plates inserted into the cassette increases and the cassette becomes larger, the sensor main body and the reflecting member. The distance between and increases. For this reason, the incident position of the light from the sensor main body (light projecting element) in the reflective member is shifted due to vibration of the mounting location such as the frame on which the sensor main body and the reflective member are installed, and the amount of light received from the reflective member fluctuates. Cannot be detected stably.

  Therefore, the spot diameter (incident area) of light incident on the reflecting member is increased so that fluctuations in the amount of received light can be suppressed even if a deviation occurs in the incident position of light on the reflecting member. When the spot diameter of the light incident on the reflecting member is increased, the detection area is increased correspondingly, and the detection accuracy of the position of the glass plate by the photoelectric sensor is lowered.

  This invention is made | formed in view of such a situation, The objective is to provide the photoelectric sensor, the plate-shaped member detection apparatus, and the reflection member for photoelectric sensors with the high detection accuracy of the position of a to-be-detected body. is there.

  In order to solve the above-mentioned problem, the invention described in claim 1 is provided with a sensor main body having a light projecting means and a light receiving means, and a reflecting member disposed opposite to the sensor main body, and emitted from the light projecting means. A photoelectric sensor that reflects light by the reflecting member and receives the light by the light receiving unit, and detects a detection object disposed between the sensor body and the reflecting member based on the amount of received light. The reflection member has an attachment means for attaching to the attachment location, a reflection means having a reflection surface for reflecting light from the light projecting means toward the light receiving means, and an effective area of the reflection surface can be changed. And an effective area changing means.

  According to this configuration, since the effective area of the reflecting surface is set by the effective area changing unit, the incident light and the reflected light from the light projecting unit are limited, and the detection area of the photoelectric sensor is narrowed down. In addition, since the effective area of the reflecting surface can be changed by the effective area changing means, the detection position of the detected object can be corrected to the correct position even if the relative positions of the sensor body and the reflecting member are changed. Therefore, a photoelectric sensor with high detection accuracy of the position of the detection target can be obtained.

According to a second aspect of the present invention, in the photoelectric sensor according to the first aspect, the effective area changing unit covers a part of the reflecting surface and changes the position of the effective area on the reflecting surface.
According to this configuration, the effective area changing unit changes the effective area of the reflecting surface by changing the position of the effective area on the reflecting surface, so that the position of the detection area can be easily adjusted.

  According to a third aspect of the present invention, in the photoelectric sensor according to the first or second aspect, the effective area changing unit includes a light shielding plate that shields light emitted from the light projecting unit, and the light shielding plate includes: It has an opening smaller than the reflecting surface, and is fixed so that the position can be adjusted along the surface direction of the reflecting surface.

  According to this configuration, the effective area changing unit is configured by fixing the light shielding plate having an opening smaller than the reflecting surface so that the position can be adjusted along the surface direction of the reflecting surface. Can be configured simply. Further, since the effective area can be changed only by changing the fixed position of the effective area changing means, the effective area can be easily changed.

  The invention according to claim 4 is provided with a sensor main body having a light projecting means and a light receiving means, and a reflecting member disposed opposite to the sensor main body in the arrangement direction of the plate-like members inserted into the cassette, A plate for detecting the plate-like member disposed between the sensor main body and the reflecting member based on the amount of light received by reflecting the light emitted from the means by the reflecting member and receiving the light by the light receiving means. The reflection member includes an attachment means for attaching to the attachment location, a reflection means having a reflection surface for reflecting light from the light projecting means toward the light receiving means, and And an effective area changing means for changing the effective area of the reflecting surface.

  In the same configuration, the sensor main body and the reflecting member are disposed opposite to both sides of the glass plate inserted in the cassette in the arrangement direction to detect the jumping of the glass plate from the cassette. In this way, when detecting the jumping out of the glass plate from the cassette, the distance between the sensor main body and the reflecting member tends to be large, and even if the relative position of the sensor main body and the reflecting member is shifted due to vibration of the mounting location (frame or the like). In order to suppress fluctuations in the amount of received light, light having a large spot diameter (incident area) is emitted from the light projecting means of the sensor body. Therefore, in this case, effective area changing means that can narrow down the detection area of the photoelectric sensor and change the effective area of the reflecting surface is particularly effective.

  According to a fifth aspect of the present invention, in the plate-like member detection device according to the fourth aspect, the effective area changing means covers a part of the reflecting surface and changes the position of the effective area on the reflecting surface.

  According to this configuration, the effective area changing unit changes the effective area of the reflecting surface by changing the position of the effective area on the reflecting surface, so that the position of the detection area can be easily adjusted.

  According to a sixth aspect of the present invention, in the plate-like member detection device according to the fourth or fifth aspect, the effective area changing unit includes a light blocking plate that blocks light emitted from the light projecting unit, and the light blocking unit The plate has an opening smaller than the reflection surface, and is fixed so that the position can be adjusted along the surface direction of the reflection surface.

  According to this configuration, the effective area changing unit is configured by fixing the light shielding plate having an opening smaller than the reflecting surface so that the position can be adjusted along the surface direction of the reflecting surface. Can be configured simply. Further, since the effective area can be changed only by changing the fixed position of the effective area changing means, the effective area can be easily changed.

  The invention according to claim 7 is arranged to face the sensor body having the light projecting means and the light receiving means, and reflects the light emitted from the light projecting means so as to be received by the light receiving means. A reflection member for a photoelectric sensor, comprising: an attachment means for attaching to an attachment location; a reflection means having a reflection surface for reflecting light from the light projecting means toward the light receiving means; And an effective area changing means for changing the area.

  According to this configuration, since the effective area of the reflecting surface is set by the effective area changing unit, the incident light and the reflected light from the light projecting unit are limited, and the detection area of the photoelectric sensor is narrowed down. In addition, since the effective area of the reflecting surface can be changed by the effective area changing means, the detection position of the detected object can be corrected to the correct position even if the relative positions of the sensor body and the reflecting member are changed. Therefore, a photoelectric sensor with high detection accuracy of the position of the detection target can be obtained.

  According to an eighth aspect of the present invention, in the photoelectric sensor reflecting member according to the seventh aspect, the effective area changing means includes a light shielding plate that shields light emitted from the light projecting means, and the light shielding plate includes: , Having an opening smaller than the reflecting surface, and fixed so as to be position-adjustable along the surface direction of the reflecting surface.

  According to this configuration, the effective area changing unit is configured by fixing the light shielding plate having an opening smaller than the reflecting surface so that the position can be adjusted along the surface direction of the reflecting surface. Can be configured simply. Further, since the effective area can be changed only by changing the fixed position of the effective area changing means, the effective area can be easily changed.

  According to a ninth aspect of the present invention, in the photoelectric sensor reflecting member according to the seventh aspect, the effective area changing means includes a plurality of light shielding plates for shielding light emitted from the light projecting means, and a plurality of light shielding plates are provided. Each of the light shielding plates is fixed so that its position can be adjusted along the surface direction of the reflecting surface.

  According to this configuration, since the effective area can be changed only by changing the fixed position of the effective area changing means, it is easy to change the effective area.

  According to the present invention, it is possible to provide a photoelectric sensor, a plate-shaped member detection device, and a photoelectric sensor reflecting member with high detection accuracy of the position of the detection target.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, an embodiment of the invention will be described with reference to the drawings.
As shown in FIG. 1, a photoelectric sensor 1 as a plate-like member detection device is configured such that a large number of liquid crystal glass plates 2 are inserted along the plate surface direction and arranged in the plate thickness direction of the glass plate 2. It is provided in the vicinity of the insertion port 3a of the cassette 3, and detects a jump of a predetermined amount or more of the glass plate 2 from the insertion port 3a of the cassette 3. A frame 4 is provided around the cassette 3, and a rectangular mounting frame 4 a larger than the insertion port 3 a of the cassette 3 is provided in the vicinity of the insertion port 3 a of the cassette 3. The photoelectric sensor 1 is fixed to the center portion of the upper body 4c of the sensor frame 5 and the upper frame 4c of the mounting frame 4a, and is opposed to the sensor body 5 in the arrangement direction of the glass plates 2. The reflecting member 6 is arranged.

  The sensor body 5 includes a light projecting element 7 as light projecting means and a light receiving element 8 as light receiving means. An element configured to emit light having a wavelength suitable for detection of the glass plate 2 is used for the light projecting element 7, and the light receiving element 8 corresponds to the wavelength of light emitted by the light projecting element 7. An element is used, and light from the light projecting element 7 can be received by the light receiving element 8.

  As shown in FIGS. 2 and 3, the reflecting member 6 includes a reflector 11, a bracket 12 that constitutes an effective area changing unit, and a light shielding plate 13 that also constitutes an effective area changing unit.

  The reflector 11 includes a base 14 and a regressive mirror 15 as reflecting means. The base 14 is formed in a substantially rectangular plate shape, and mounting holes 14a (see FIG. 3) as mounting means are provided at corners on one side in the longitudinal direction. A return mirror 15 having a substantially square reflecting surface 15 a is fixed to the base 14. The reflection surface 15 a of the regressive mirror 15 reflects the light emitted from the light projecting element 7 in a direction substantially coaxial with the light so that the light receiving element 8 can receive the light.

  As shown in FIG. 3, the bracket 12 is made of a single plate material and includes a reflector fixing portion 12 a for fixing the reflector 11. A reflector mounting hole 12b corresponding to the mounting hole 14a of the reflector 11 is provided on one side in the longitudinal direction of the reflector fixing portion 12a. An upright portion 12c is formed upright at right angles. The reflector 11 and the bracket 12 are fastened and fixed to the frame 4 by screws 14b inserted through the attachment hole 14a of the reflector 11 and the reflector attachment hole 12b of the bracket 12, respectively.

  A pair of guide portions 12d extending along the longitudinal direction is formed on both side portions of the reflector fixing portion 12a. Each guide portion 12d is formed in a substantially U-shaped cross section that opens to the side opposite to the sensor body 5, and is provided with a side wall portion 12e erected at right angles from both side portions of the reflector fixing portion 12a and an outer side edge from the side wall portion 12e. A mounting portion 12f that is bent at a right angle to the side wall portion 12f and an outer portion 12g that is bent at a right angle so as to face the side wall portion 12e from the end edge portion of the mounting portion 12f. A screw hole 12h having a thread formed on the inner periphery is provided in the middle portion in the longitudinal direction of the mounting portion 12f of the guide portion 12d.

  The light shielding plate 13 is formed in a substantially rectangular shape by a single plate material made of stainless steel (SUS), and the length in the longitudinal direction is longer than the length in the same direction of the bracket 12, and the length in the short direction is that of the bracket 12. A covering portion 13a having a length substantially equal to the length in the same direction (the length between the outer portions 12g) is provided. On both sides of the covering portion 13a, there are provided wall portions 13b that come into contact with the outer side portion 12g of the guide portion 12d of the bracket 12, and the light shielding plate 13 is mounted on the placement portion 12f of the guide portion 12d. It is guided by the wall 13b and is configured to be position-adjustable along the longitudinal direction (the glass plate 2 insertion / removal direction).

  In addition, a rectangular opening 13c that is long in the lateral direction is provided at a substantially central portion in the longitudinal direction of the covering portion 13a. Incidentally, the length in the longitudinal direction of the opening 13c is set to be substantially equal to one side of the reflection surface 15a of the regression mirror 15, and the length in the short direction of the opening 13c is the reflection surface 15a of the regression mirror 15. It is set shorter than one side. Further, the length in the longitudinal direction of the covering portion 13a is such that when the light shielding plate 13 is moved from one end to the other end on the reflecting surface 15a, the portion other than the opening 13c is always covered. The length is set so as to be covered by the portion 13a.

  Further, a pair of slide holes 13d made of long holes extending in the longitudinal direction of the covering portion 13a are provided on both sides of the opening portion 13c in the covering portion 13a. A screw 16 is inserted into each slide hole 13 d and screwed into the screw hole 12 h of the bracket 12, and the light shielding plate 13 is fixed to the bracket 12. Further, when each screw 16 is slightly loosened, the light shielding plate 13 can be moved (position adjustment is possible) along the guide portion 12d of the bracket 12, and the opening portion 13c of the covering portion 13a is disposed at an arbitrary position on the reflecting surface 15a. It becomes possible. That is, the portion of the reflecting surface 15a exposed from the opening 13c of the covering portion 13a is an effective area A1 that can be reflected by the reflecting surface 15a, and the effective area A1 can be arbitrarily changed.

  By the way, also in the photoelectric sensor 1 of this Embodiment, since the distance between the sensor main body 5 and the reflecting member 6 is large, even if the relative positions of the sensor main body and the reflecting member are shifted due to the vibration of the frame 4, the amount of received light varies. So that light having a spot diameter (incident area A2) equivalent to that of the reflecting surface 15a of the return mirror 15 is emitted from the light projecting element 7 of the sensor body 5. Accordingly, the opening 13c of the light shielding plate 13, that is, the effective area A1 of the reflecting surface 15a is incident and reflected on the effective area A1 of the reflecting surface 15a because the length in the short direction is smaller than the length of one side of the reflecting surface 15a. The light from the light projecting element 7 is limited. Further, since the light shielding plate 13 is made of stainless steel (SUS), the light incident on the light shielding plate 13 is diffusely reflected (not recursively reflected). Therefore, the incident area A2 can be identified by the reflected light from the light shielding plate 13.

  In the photoelectric sensor 1 having such a configuration, light emitted from the light projecting element 7 of the sensor body 5 is reflected by the light receiving element 8 after being reflected by the effective area A1 of the reflecting surface 15a of the reflecting member 6. In this case, when the glass plate 2 does not reach the detection region between the sensor body 5 and the reflection member 6 because the protrusion of the glass plate 2 is small, the light from the light projecting element 7 in the sensor body 5 is reflected by the reflection member. 6, the reflected light from the reflecting member 6 directly enters the light receiving element 8. On the other hand, when the glass plate 2 protrudes greatly to the detection area of the sensor main body 5 and the reflecting member 6, light from the light projecting element 7 in the sensor main body 5 passes through the glass plate 2 twice on the outward path, and receives the light receiving element. 8 is incident. Therefore, when the glass plate 2 is disposed in the detection region of the sensor body 5 and the reflecting member 6, the amount of light received by the light receiving element 8 is lower than when the glass plate 2 is not disposed. Is done.

  At the time of this detection, in the present embodiment, the effective area A1 is set using the light shielding plate 13 having the opening 13c on the reflection surface 15a of the reflection member 6, and the incident light and the reflected light from the light projecting element 7 are set. Due to the limitation, the detection area of the photoelectric sensor 1 is narrowed down. Therefore, the pop-out of the glass plate 2 can be detected with high accuracy. Moreover, since the mounting position of the light shielding plate 13 on the reflecting surface 15a can be adjusted, for example, the frame 4 is distorted, the relative positions of the sensor body 5 and the reflecting member 6 are changed, and the detection position of the glass plate 2 is displaced. In addition, the detection position of the glass plate 2 can be corrected to the correct position by adjusting the position of the light shielding plate 13, that is, the opening 13c (effective region A1). Thereby, the detection accuracy of the position of the glass plate 2 is high.

Next, the operational effects of the above embodiment will be described below.
(1) Since the effective area A1 of the reflecting surface 15a is set by the bracket 12 and the light shielding plate 13, the incident light and the reflected light from the light projecting element 7 are limited, and the detection area of the photoelectric sensor 1 is narrowed down. Moreover, since the effective area A1 of the reflection surface 15a can be changed by the bracket 12 and the light shielding plate 13, the detection position of the glass plate 2 is corrected to the correct position even if the relative positions of the sensor body 5 and the reflection member 6 change. be able to. Therefore, the photoelectric sensor 1 with high detection accuracy of the position of the glass plate 2 can be obtained.

  (2) Since the effective area of the reflection surface 15a is changed by changing the position of the effective area A1 on the reflection surface 15a by the bracket 12 and the light shielding plate 13, the position of the detection area can be easily adjusted. is there.

  (3) The effective range changing means can be simply configured by the bracket 12 and the light shielding plate 13. Further, since the effective area can be changed simply by changing the fixing position of the light shielding plate 13 with respect to the bracket 12, the effective area can be easily changed.

  (4) The sensor main body 5 and the reflecting member 6 are disposed to face both sides of the glass plate 2 inserted in the cassette 3 in the arrangement direction, and the photoelectric sensor 1 detects the jumping of the glass plate 2 from the cassette 3. Thus, when detecting the jumping out of the glass plate 2 from the cassette 3, the distance between the sensor body 5 and the reflecting member 6 tends to increase depending on the number of the glass plates 2 inserted into the cassette 3. Light with a large spot diameter (incident area A2) is emitted from the light projecting element 7 of the sensor main body 5 so that fluctuations in the amount of received light can be suppressed even if the relative positions of the sensor main body 5 and the reflecting member 6 shift due to vibration. It is configured. Therefore, in this case, the bracket 12 and the light shielding plate 13 as effective area changing means capable of narrowing down the detection area of the photoelectric sensor 1 and changing the effective area of the reflecting surface 15a are particularly effective.

  (5) The light shielding plate 13 is made of stainless steel (SUS), and the light emitted toward the light shielding plate 13 is diffusely reflected (not recursively reflected). Therefore, the incident area A2 can be identified by the reflected light from the light shielding plate 13, and the optical axes of the sensor body 5 and the reflecting member 6 can be easily aligned.

In addition, you may change embodiment of this invention as follows.
In the above embodiment, the position of the effective area A1 of the reflective surface 15a can be changed by the bracket 12 and the light shielding plate 13, but the size and shape of the effective area A1 of the reflective surface 15a may be changeable. Even in this case, the detection area can be easily adjusted.

-In above-mentioned embodiment, although the guide part 12d was provided in the bracket 12 of a member different from the reflector 11, you may provide integrally in the reflector 11 side.
In the above embodiment, the effective area A1 of the reflecting surface 15a is changed by the light shielding plate 13. However, as shown in FIG. 4, for example, the sealing member 20 is bonded to the reflecting surface 15a of the reflector 11 to reflect the reflecting surface 15a. The effective area A1 may be changed. In this case, if a diffuse reflection material is used as the seal member 20, the light applied to the seal member 20 is diffused, and the light incident area A2 on the reflection surface 15a can be more easily determined than in the above embodiment. Further, as shown in FIG. 5, the first light shielding plate 31 and the second light shielding plate 32 fixed to the bracket 30 so as to be position-adjustable along the longitudinal direction of the bracket 30 (the surface direction of the reflecting surface 15a), and the short direction of the bracket 30. The effective area A3 of the reflective surface 15a may be changed by the third light-shielding plate 33 and the fourth light-shielding plate 34 fixed so as to be position-adjustable along the (surface direction of the reflective surface 15a). In this case, the position, size, and shape of the effective area A3 of the reflective surface 15a can be changed.

  -The attachment hole 14a of the reflector 11 of the said embodiment and the reflector attachment hole 12b of the bracket 12 may be made into a long hole, and the attachment position of the reflector 11 and the bracket 12 with respect to the flame | frame 4 may further be changeable.

  In the above embodiment, the photoelectric sensor 1 is used to detect the jumping out of the glass plate 2 from the cassette 3. However, for example, to detect the jumping out of a wafer (semiconductor material) from the cassette. You may apply to.

  In the above embodiment, the light shielding plate 13 is made of stainless steel (SUS), but may be made of resin, for example. Further, a diffuse reflection material may be bonded to the surface of the light shielding plate 13 (the surface facing the sensor body 5).

1 is a schematic configuration diagram illustrating a photoelectric sensor according to an embodiment. The perspective view of the reflection member of this Embodiment. The disassembled perspective view of the reflection member of this Embodiment. The front view of the reflection member of another example. The perspective view of the reflection member of another example.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Photoelectric sensor as plate-shaped member detection apparatus, 2 ... Glass plate for liquid crystal as glass plate, 3 ... Cassette, 4 ... Frame as attachment location, 5 ... Sensor main body, 6 ... Reflecting member, 7 ... Light projection means 8 as a light receiving element, 12 as a light receiving element, 12 as a bracket constituting the effective area changing means, 13, 31 to 34 as a light shielding plate constituting the effective area changing means, 13a as a covering portion, and 13c as an opening. 14a: mounting hole as mounting means, 15: regression mirror as reflecting means, 15a: reflecting surface, A1, A3: effective area.

Claims (9)

A sensor main body having a light projecting means and a light receiving means, and a reflecting member disposed opposite to the sensor main body, and the light emitted from the light projecting means is reflected by the reflecting member and received by the light receiving means. And a photoelectric sensor for detecting a detection object disposed between the sensor body and the reflecting member based on the amount of received light,
The reflective member is
Mounting means for mounting at the mounting location;
A reflecting means having a reflecting surface for reflecting the light from the light projecting means toward the light receiving means;
A photoelectric sensor, comprising: effective area changing means for changing the effective area of the reflecting surface. The photoelectric sensor according to claim 1,
The effective area changing means covers a part of the reflection surface and changes the position of the effective area on the reflection surface. The photoelectric sensor according to claim 1 or 2,
The effective area changing means includes a light shielding plate that shields light emitted from the light projecting means,
The light-shielding plate has an opening smaller than the reflection surface, and is fixed so that the position can be adjusted along the surface direction of the reflection surface. A sensor main body having a light projecting means and a light receiving means, and a reflecting member disposed opposite to the sensor main body in the arrangement direction of the plate-like members inserted in the cassette, and reflects the light emitted from the light projecting means. A plate-like member detection device that detects a plate-like member that is reflected by a member and received by the light receiving means, and is disposed between the sensor body and the reflecting member based on the amount of light received.
The reflective member is
Mounting means for mounting at the mounting location;
A reflecting means having a reflecting surface for reflecting the light from the light projecting means toward the light receiving means;
An apparatus for detecting a plate-like member, comprising: an effective area changing means for changing an effective area of the reflecting surface. In the plate-shaped member detection apparatus according to claim 4,
The effective area changing means covers a part of the reflecting surface and changes the position of the effective area on the reflecting surface. In the plate-shaped member detection apparatus according to claim 4 or 5,
The effective area changing means includes a light shielding plate that shields light emitted from the light projecting means,
The said light-shielding plate has an opening part smaller than the said reflective surface, and is fixed so that position adjustment is possible along the surface direction of the said reflective surface, The plate-shaped member detection apparatus characterized by the above-mentioned. A photoelectric sensor reflection member for opposingly facing a sensor main body having a light projecting means and a light receiving means, for reflecting light emitted from the light projecting means and receiving the light by the light receiving means,
Mounting means for mounting at the mounting location;
A reflecting means having a reflecting surface for reflecting the light from the light projecting means toward the light receiving means;
A reflection member for a photoelectric sensor, comprising: an effective area changing unit capable of changing an effective area of the reflecting surface. In the reflective member for photoelectric sensors according to claim 7,
The effective area changing means includes a light shielding plate that shields light emitted from the light projecting means,
The said light-shielding plate has an opening part smaller than the said reflective surface, and is fixed so that position adjustment is possible along the surface direction of the said reflective surface, The reflective member for photoelectric sensors characterized by the above-mentioned. In the reflective member for photoelectric sensors according to claim 7,
The effective area changing means includes a plurality of light shielding plates for shielding light emitted from the light projecting means,
The plurality of light shielding plates are fixed so that their positions can be adjusted along the surface direction of the reflecting surface, respectively.

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