JP2008051754A - Substrate inspecting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make a substrate inspection device compact and to install the substrate inspection device in a smaller space even in the case where a plurality of the substrate inspection devices are used. <P>SOLUTION: The substrate inspection device 1 has an integrated constitution that a substrate holding mechanism for holding a printed circuit board P to move the same, an imaging mechanism for imaging the substrate P, a controller 63 for judging quality from image data, a liquid crystal display panel 4 for displaying an inspection result, etc. are incorporated in a base from 10 and covered with a casing Ca from outside. Further, the inlet and outlet port 6 of the substrate P and the inspection part (the imaging position of the substrate P due to an imaging unit 50) of the substrate P are arranged in front and rear directions and a liquid crystal display panel 4 is arranged to the almost intermediate part between the inlet and outlet port 6 and an inspection position so as to be directed to the front side of the substrate inspection device. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a board inspection apparatus for inspecting a mounting state or the like of a component mounted on a board such as a printed board.

  As a board inspection device that inspects the mounting status of components mounted on a printed circuit board, it has traditionally been installed on the desktop for stand-alone outlines, in which the printed circuit board is individually inspected manually by an operator, separately from the inline type. There is known an inspection apparatus of a desktop type).

For example, Patent Document 1 proposes one of this type of desktop inspection apparatus. This inspection apparatus is composed of a test unit for setting a printed circuit board and a main unit for processing such as pass / fail judgment. When an operator sets the printed circuit board to the test unit and performs a start operation, the set unit is set. The printed board is transported from the position into the test unit, the surface of the board is photographed, and the image data is transferred to the main unit. Then, based on the image data, the main unit performs processing such as pass / fail judgment and the result is displayed on the monitor.
JP 2002-181730 A

  Since a certain amount of time is required for the inspection of the board as described above, it is usually necessary to install a plurality of table-top inspection devices in a row and perform inspection with a time difference between each inspection device. The inspection is carried out efficiently under the workers of Therefore, the inspection apparatus is compact, and it is advantageous that a plurality of inspection apparatuses can be arranged in a smaller space because an operator's movement range is small.

  However, in what is disclosed in Patent Document 1, the inspection apparatus is composed of two independent units, a test unit and a main unit, and the main unit is composed of a desktop personal computer. It is impossible to expect the inspection apparatus to be arranged compactly in a small space.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to downsize a substrate inspection apparatus so that it can be installed in a smaller space even when a plurality of inspection apparatuses are used.

  In order to solve the above-described problems, the present invention provides an inspection unit that inspects a substrate, a substrate transfer that holds a substrate to be inspected, and transfers the substrate between a predetermined substrate loading / unloading unit and an inspection unit by the inspection unit And a display means for displaying an inspection result. In the substrate inspection apparatus, the respective means are integrated into a common frame member, and the front side when the operator's standing position side is the apparatus front side. The substrate loading / unloading portion and the inspection portion are sequentially arranged in the front-rear direction, and the display means is provided at a substantially intermediate portion between the substrate loading / unloading portion and the inspection portion in a state of being directed to the front side of the apparatus (claim). Item 1).

  According to such a substrate inspection apparatus, since each of the above-mentioned means constituting the apparatus is integrated and integrated in a common frame member, the apparatus is more compact than a conventional apparatus in which a plurality of units are separated. Is done. In particular, since the display means is provided at a substantially intermediate portion between the substrate insertion / removal portion and the inspection portion arranged in the front-rear direction, and the protrusion of the display means to the side is suppressed, the apparatus is in the width direction (perpendicular to the front-rear direction) Direction).

  The display means may be assembled by providing a gate-shaped frame that spans the substrate transport means and the like in the width direction (direction orthogonal to the front-rear direction of the apparatus), and the display means may be directly assembled thereto. If a beam extending in the front-rear direction and supported in a cantilever state is provided as a frame member and supported in a cantilevered state, and the display means is assembled at the tip thereof (Claim 2), the internal space of the apparatus It is possible to arrange the display means in a portion between the substrate loading / unloading portion and the inspection portion while effectively utilizing the above.

  In this case, for example, the substrate transport means transports the substrate in a state where the surface to be inspected is supported upward, and the inspection means images the surface to be inspected from above by an imaging device provided in the inspection section. In this case, it is preferable that the display means is arranged in a state of being arranged in front of the imaging device (Claim 3).

  According to this configuration, since the display unit and the imaging device are arranged in the front-rear direction, it is advantageous for downsizing the device in the vertical direction. In addition, in the description of the claims, “a state in which the imaging device is arranged in front of the imaging device” means that, for example, when the imaging device is movable, the display unit and the imaging device are arranged in front and rear, including the movable region. It means to include the state.

  In each of the above-mentioned devices, it is preferable that the display means is provided so as to be tiltable.

  According to this configuration, when a plurality of devices are used side by side, workability can be improved by directing the display means of each device in a specific direction, for example, a direction that is more easily visible from the standing position of the operator. .

  In each of the above devices, it is preferable that the width of the device, which is a dimension in a direction orthogonal to the front-rear direction of the device, is tapered from the rear side of the device toward the front side (Claim 5).

  According to such a configuration, by installing a plurality of devices in contact with each other, it is possible to install a plurality of devices compactly in a fan-shaped arrangement with the operator at the center.

  When the width of the apparatus is tapered in this way, one of the side surfaces facing in the width direction is provided in parallel with the front-rear direction, and the other side surface is provided with respect to the front-rear direction. May be provided so as to be inclined, that is, the entire device may be asymmetric in plan view. Moreover, the width | variety of the apparatus of the front-end part in the said front-back direction may be tapered, and the width | variety of an apparatus may be formed in the back side rather than the said front-end part substantially constant.

  According to the substrate inspection apparatus of the present invention, the substrate transfer means, the inspection means, and the display means are integrated and integrated into a common frame member, so that the entire apparatus becomes compact. In particular, the substrate loading / unloading portion and the inspection portion are arranged in the front-rear direction, and the display means is provided at a substantially middle portion thereof, so that the protrusion of the display means to the side is suppressed. Therefore, even when a plurality of devices are installed side by side, the devices can be placed close together and installed compactly.

  A preferred embodiment of the present invention will be described with reference to the drawings.

  1 and 2 schematically show a substrate inspection apparatus according to the present invention. FIG. 1 is a perspective view and FIG. 2 is a plan view showing the substrate inspection apparatus.

  The substrate inspection apparatus 1 (hereinafter abbreviated as inspection apparatus 1) has a box shape as a whole, and includes a rear part 2A and a front part 2B extending forward from a lower part of the front end as shown in FIG. It has a letter-like appearance. The external shape of such an inspection apparatus 1 is formed by a casing Ca that is fixed to the base frame 10 and the like which will be described later. The casing Ca is actually composed of several parts, but in the following description, for convenience, the parts are handled as a casing Ca without distinguishing each part.

  The front portion 2B of the inspection apparatus 1 is provided with a substrate P loading / unloading opening 6 (a substrate loading / unloading portion according to the present invention) that opens upward. The entrance / exit 6 includes an opening formed in the casing Ca, and is provided at the center in the width direction of the inspection apparatus 1 (the center in the left-right direction in FIG. 2).

  A liquid crystal display panel 4 (corresponding to the display means according to the present invention) is disposed above the rear end of the outlet / inlet 6 and on the front surface of the rear portion 2A. The liquid crystal display panel 4 is a so-called touch panel type liquid crystal display. Various information such as inspection results are displayed on the liquid crystal display panel 4, and the operator touches the monitor display with the fingertip to the inspection apparatus 1. On the other hand, various operation inputs can be performed.

  The liquid crystal display panel 4 is oriented toward the front side of the apparatus, that is, the worker's standing position side (lower side in FIG. 2), and slightly offset from the center of the inspection apparatus 1 to one side in the width direction (right side in FIG. 2). Has been placed. A maintenance door 9 is provided in a portion of the front portion 2B aligned with the liquid crystal display panel 4. The door 9 is configured such that a part of the casing Ca can be opened and closed, and an operator accesses the inside of the inspection apparatus 1 by opening the door 9 as necessary to replace a check pen 56 described later. In addition, maintenance of the imaging unit 50 can be performed.

  1 and 2, reference numeral 3 denotes a handle for hand carry, which is formed of a recess formed in the casing Ca and is provided on the left and right side surfaces of the rear side portion 2A. Reference numeral 8 denotes an emergency stop button, which is arranged on the side of the entrance / exit 6 in the front portion 2B.

  In addition, as shown in these drawings, the inspection apparatus 1 has a width that is tapered from the rear side to the front side. Specifically, by providing one side surface (the left side surface in FIG. 2) of the front portion 2B among the side surfaces of the inspection apparatus 1 constituted by the casing Ca so as to be inclined by a predetermined angle α with respect to the front-rear direction. The width of the inspection device 1 is tapered. This is a device for improving workability by installing a plurality of inspection apparatuses 1 in a compact manner, which will be described in detail later.

  3 and 4 show a specific internal configuration of the inspection apparatus 1, FIG. 3 shows the inspection apparatus 1 in a longitudinal section, and FIG.

  As shown in these drawings, the inspection apparatus 1 has a base frame 10. The base frame 10 includes a base part 12 having an inclined surface 12a that slopes upward from the front side toward the rear side (from left to right in FIGS. 3 and 4), and both left and right ends of the base part 12. And a side wall portion 14 that stands up from each other, and is integrally formed by casting such as aluminum die casting.

  The base frame 10 holds a substrate to be inspected P and moves the substrate P along the inclined surface 12a (corresponding to the substrate transfer means according to the present invention), and the substrate holding mechanism. An image pickup mechanism for picking up an image of the substrate P to be inspected held on the substrate and a marking mechanism for putting a check (mark) on the substrate P as necessary are assembled.

  The substrate holding mechanism is fixed to the inclined surface 12a of the base 12 and moves the slider 22 in the front-rear direction and along the inclined surface 12a (hereinafter, this direction is referred to as the Y-axis direction). The linear motor type single-axis robot 20 and a table 30 assembled to the slider 22 are configured.

  The table 30 holds the substrate P, holds the substrate P in a state where the surface to be inspected, here, the component mounting surface faces upward, and is substantially parallel to the inclined surface 12a. It is movable in the Y-axis direction over a home position (position shown in FIG. 3) facing the entrance / exit 6 and an imaging position by an imaging unit 50 described later. In this embodiment, the part where the substrate P is imaged by the imaging unit 50 corresponds to the inspection unit of the present invention.

  The table 30 includes a plate 32 fixed to the slider 22 and a pair of front and rear substrate holding frames 36 and 38 (front frame) that are assembled to the plate 32 and extend in the left-right direction (hereinafter, this direction is referred to as the X-axis direction). 36, referred to as a rear frame 38), and the substrate P to be inspected is held by the frames 36, 38. Specifically, a movable portion 39 that is displaceable in the Y-axis direction and is urged forward by an elastic member such as a compression coil spring is provided on the rear frame 38 of both the frames 36 and 38. Stepped substrate receiving portions are respectively formed in portions facing the front frame 36. Then, when the front and rear edges of the substrate P are placed on these substrate receiving portions and the substrate P is fitted between the front frame 36 and the movable portion 39, the substrate P is supported by both the frames 36 and 38 by the elastic force of a compression coil spring or the like. In other words, the substrate P is held on the table 30 in a state where the substrate P is positioned in the Y-axis direction with the front frame 36 as a reference. Further, a positioning plate 36a is provided at one end of the front frame 36, and the substrate P is positioned in the X-axis direction by bringing one end (one end in the left-right direction) of the substrate P into contact with the plate 36a. The table 30 is held in a state.

  The distance between the frames 36 and 38 is variable according to the substrate size. Specifically, an end plate 34 is fixed to the rear end of the plate 32, and a pair of left and right guide bars 35 parallel to each other are fixed across the end plate 34 and the front frame 36. The rear frame 38 is slidably attached to the guide bars 35, and a lock means (not shown) for locking the rear frame 38 at an arbitrary position with respect to the guide bars 35 is provided. It has been. That is, the rear frame 38 is slid with the front frame 36 as a reference, and the rear frame 38 is locked at a desired position by the locking means, whereby the distance between the frames 36 and 38 can be changed.

  The imaging mechanism includes a single-axis robot 40 that moves the slider 42 in the X-axis direction, an imaging unit 50 (corresponding to the imaging apparatus according to the present invention) assembled to the slider 42 of the single-axis robot 40, a marking unit 55, and the like. It consists of and.

  The single-axis robot 40 is a linear motor type single-axis robot similar to the single-axis robot 20 constituting the substrate holding mechanism, and is fixed to the base frame 10 in a state where the single-axis robot 40 is horizontally mounted across the both side wall portions 14. ing.

  The imaging unit 50 includes a camera 52 including an area sensor such as a CCD or CMOS image sensor, an illumination device 54, and the like, and the surface of the substrate P to be inspected held on the table 30 is above the surface. And it is comprised so that it may image from the direction orthogonal to the said surface.

  The marking unit 55 includes a check pen 56 for describing a mark, and a drive mechanism that drives the check pen 56 forward and backward, and the check pen 56 is held on the table 30 by the drive mechanism. It is configured to drive forward and backward over an operating position (a position indicated by a two-dot chain line in FIG. 3) that makes contact with P and a retreat position (a position indicated by a solid line in FIG. 3) that retreats upward from this position. Although not shown in detail, a so-called ball screw mechanism or the like that moves the check pen 56 forward and backward in one axial direction by rotating the ball screw shaft by a motor, for example, is applied as the drive mechanism.

  As shown in FIGS. 3 and 4, the marking unit 55 is fixed to the imaging unit 50 via a connecting arm 58. As a result, it moves in the Y-axis direction integrally with the imaging unit 50. One end of the movable region of the marking unit 55 (the upper end in FIG. 4; the position indicated by the two-dot chain line in the same figure) is the home position, and at this position, the marking unit 55 is just on the door 9 described above. It comes to correspond. That is, the operator can easily replace the check pen 56 by opening the door 9 with the marking unit 55 placed at the home position as described above.

  Inside the inspection apparatus 1, a beam 19 extending further in the front-rear direction is provided above the base frame 10.

  As shown in FIG. 5, the beam 19 is fixed to a pair of front and rear portal subframes 16 and 18 fixed over both side wall portions 14 of the base frame 10. Then, by assembling the liquid crystal display panel 4 at the tip of the beam 19, as shown in FIG. 3, the liquid crystal display panel 4 takes the imaging position of the substrate P by the imaging unit 50 and the entrance / exit 6 in the front-rear direction. And is disposed in front of the imaging unit 50. In the present embodiment, the base frame 10, the sub frames 16, 18 and the beam 19 correspond to the frame member of the present invention.

  The liquid crystal display panel 4 is supported so as to be tiltable with respect to the beam 19. Specifically, a joint 46 that can be rotated around a horizontal axis 45 (an axis extending in the X-axis direction) is connected to the front end of the beam 19, and the liquid crystal display panel 4 is assembled to the joint 46, thereby liquid crystal. The display panel 4 is supported at the tip of the beam 19 in a state in which the posture can be changed in the vertical direction (tilt is possible). Here, the tilt direction of the liquid crystal display panel 4 is only the vertical direction, but in addition, the liquid crystal display panel 4 may be tiltable in the horizontal direction. Further, it may be tiltable in any direction.

  As shown in FIG. 3, a driver 66 for the single-axis robot 40 of the imaging mechanism is disposed in a space above the movable area of the table 30 and behind the imaging unit 50 or the like. Specifically, a pair of left and right side plates 67 are fixed to the side wall portions 14 of the base frame 10, and a support plate 68 is horizontally mounted between the side plates 67, and the driver 66 is fixed on the support plate 68. Yes.

  On the other hand, a control unit 60 is disposed on the inner bottom of the inspection apparatus 1. That is, as shown in FIG. 6, the base portion 12 in the base frame 10 is provided with a recess 15 that opens downward and rearward to provide a wedge-shaped space 15. The control unit 60 is disposed in the front.

  The control unit 60 includes a driver 62 for the single-axis robot 20 of the substrate holding mechanism, a controller 63 that centrally controls the inspection apparatus 1, a cooling fan 64, and the like. Are integrally fixed to an under cover 65 covering the rim. Then, as shown in the figure, the under cover 65 is assembled to the base frame 10 from below, so that the control unit 60 is arranged in the space 15 of the base frame 10 as described above.

  The controller 63 is composed of a CPU that executes logical operations, a ROM that stores various programs for controlling the CPU, a RAM that temporarily stores various data during operation of the apparatus, an HDD, and the like. The controller 63 is electrically connected to the liquid crystal display panel 4, the single-axis robots 20 and 40, the camera 52, the drivers 62 and 66, and the like. When the substrate P is inspected, the driving of the single-axis robots 20 and 40 and the imaging unit 50 is controlled by the controller 63 so as to execute the inspection of the substrate P in accordance with an operation program stored in advance. The controller 63 performs the pass / fail judgment processing of the substrate P based on the above and the display control of the inspection result on the liquid crystal display panel 4. That is, in the inspection apparatus 1, the imaging mechanism, the controller 63, and the like correspond to inspection means according to the present invention.

  In the inspection apparatus 1 configured as described above, the substrate P is inspected as follows.

  First, in this inspection apparatus 1, after starting, the apparatus 1 is kept in a standby state until a test is started. In the standby state, the table 30 and the image pickup unit 50 are set at their home positions, and a predetermined menu screen is displayed on the liquid crystal display panel 4.

  In this standby state, when the operator sets the inspected substrate P on the table 30 and touches the liquid crystal display panel 4 and selects the “inspection start” item from the menu screen, the inspection of the substrate P is started. The The substrate P is set on the table 30 with the surface to be inspected (component mounting surface) facing upward and between the substrate holding frames 36 and 38 with the substrate P abutting against the positioning plate 36a as described above. This is done by fitting the substrate P into the substrate.

  When the inspection is started, the table 30 is moved in the Y-axis direction by the operation of the single-axis robot 20 and the imaging unit 50 is moved in the X-axis direction by the operation of the single-axis robot 40. The substrate P is relatively positioned, and the substrate P is imaged by the camera 52 under illumination light from the illumination device 54. In addition, such imaging of the board | substrate P by the imaging unit 50 is performed for every area programmed beforehand, for example. That is, the surface to be inspected of the substrate P is divided into a plurality of imaging areas in advance according to various conditions such as the size of the substrate P and the mounting density of components, and the table 30 and the imaging unit 50 are relatively moved during the inspection. Accordingly, imaging is performed for each area while the imaging unit 50 is sequentially positioned at a position facing each area according to a preset order.

  When imaging of all areas of the board P is completed, the controller 63 determines whether the component mounting state is good or not based on the image data, and the result (inspection result) is displayed on the liquid crystal display panel 4.

  Further, when the marking unit 55 is activated, a mark corresponding to the determination result is entered in a predetermined check column provided on the substrate P. Specifically, as the table 30 and the imaging unit 50 move relative to each other, the marking unit 55 is arranged at a position facing a predetermined check field of the substrate P, and the check pen 56 is driven in this state to enter the check field. A predetermined mark is entered.

  When the marking is completed, the table 30 is reset to the home position, and the operator removes the substrate P from the table 30 through the loading / unloading port 6 to complete the inspection of the substrate P. After the inspection is completed, “good” and “no” indications of the inspection result are continuously displayed on the liquid crystal display panel 4 and a message for prompting the next substrate insertion is displayed.

  Since inspection of the substrate P as described above requires a certain amount of time, usually, a plurality of the inspection apparatuses 1 are installed side by side, and the inspection of the substrate P is performed with a time difference between the inspection apparatuses 1. Thus, the inspection of the substrate P is efficiently advanced by one worker. In this case, in the inspection apparatus 1 described above, a plurality of inspection apparatuses 1 (5 in the illustrated example) can be arranged side by side as shown in FIG. That is, in the inspection apparatus 1, the width of the front portion 2 </ b> B is tapered as the one side surface of the front portion 2 </ b> B is inclined with respect to the front-rear direction as described above. Therefore, by arranging a plurality of inspection devices 1 side by side in a state where the inclined side surface portions are in contact with each other, as shown in the figure, the plurality of inspection devices 1 are arranged in a fan shape with the operator as the center. can do.

  According to the inspection apparatus 1 as described above, the substrate holding mechanism that holds and moves the substrate P, the imaging mechanism that images the substrate P, the controller 63 that determines pass / fail based on the image data, and the inspection result are displayed. Since the liquid crystal display panel 4 and the like for performing various operations are integrated and integrated in a common base frame 10, the inspection apparatus is separated from a plurality of separate units (test unit, main unit) as in the prior art. The inspection apparatus 1 can be made more compact as compared with a structure in which the main unit is composed of a desktop personal computer. In particular, in the inspection apparatus 1, the liquid crystal display panel 4 is provided at a substantially intermediate portion between the inspection portion, that is, the portion where the substrate P is imaged by the imaging unit 50 and the entrance / exit 6 through which the substrate P is taken in and out. Since the panel 4 is configured so that it is difficult to project to the side of the apparatus (width direction), the apparatus 1 itself is not only compacted in the width direction, but also when a plurality of inspection apparatuses 1 are installed side by side. Can be installed compactly in a state where they are in contact with each other.

  Even in the case where the apparatuses are installed in a state where they are in contact with each other, the inspection apparatus 1 has a plurality of inspection apparatuses 1 in a fan shape by forming the width of the front portion 2B as described above. Therefore, a plurality of inspection apparatuses 1 can be arranged more compactly with the operator as the center. For this reason, it is possible to make the worker's access distance to each inspection device 1 substantially uniform, and for example, the inspection work can be performed more efficiently than when the inspection devices 1 are arranged side by side and straight. There is a merit that

  The inspection apparatus 1 described above is an example of a preferred embodiment of the inspection apparatus 1 according to the present invention, and the specific configuration thereof can be appropriately changed without departing from the gist of the present invention.

  For example, in the inspection apparatus 1 of the above embodiment, as shown in FIG. 3, the liquid crystal display panel 4 is arranged on the front side of the imaging unit 50, but the liquid crystal display panel 4 is arranged on the upper side of the imaging unit 50. It may be. Specifically, the liquid crystal display panel 4 may be disposed above the beam 19. However, when the inspection apparatus 1 is downsized in the vertical direction, it is advantageous to adopt the configuration of the embodiment.

  In the above-described embodiment, the liquid crystal display panel 4 is assembled at the tip of the beam 19 extending in the front-rear direction. For example, a portal frame is provided on the front side of the imaging unit 50 so as to straddle the substrate holding mechanism. The liquid crystal display panel 4 may be assembled. However, according to the configuration in which the liquid crystal display panel 4 is assembled to the tip of the beam 19 as in the embodiment, the internal space of the inspection apparatus 1 can be effectively used compared to the case where the portal frame as described above is provided. There is a merit that it becomes possible.

  Moreover, in the inspection apparatus 1 of the said embodiment, although the side part of one side among the front side parts 2B becomes a left-right asymmetric structure inclined with respect to the front-back direction, both side parts of the front side part 2B are inclined. The left-right symmetric structure may be sufficient. According to this structure, as shown in FIG. 7, the curvature of the said arrangement | sequence when arranging the some test | inspection apparatus 1 in a fan shape can be enlarged.

  In the inspection device 1 of the embodiment, only the front portion 2B is inclined among the side portions of the inspection device 1, but of course, an inclined surface that extends from the rear portion 2A to the front portion 2B. The structure which becomes may be sufficient. In this case, the left-right symmetric structure in which both side surface portions of the inspection apparatus 1 are inclined may be used as described above. According to such a configuration, when a plurality of inspection apparatuses 1 are arranged in a fan shape as shown in FIG. 7, adjacent ones can be brought into close contact with each other without a gap. However, in the case of this configuration, since the inclined portion of the side surface portion of the inspection apparatus 1 is increased, the internal space of the inspection apparatus 1 is considered to be narrower than that of the embodiment. For example, it is preferable to make the inclined portion of the side surface portion as small as possible.

  Further, in the inspection apparatus 1 of the embodiment, the substrate holding mechanism is configured such that the table 30 moves in a direction inclined with respect to the horizontal plane (Y-axis direction). Of course, the substrate holding mechanism is configured to move in the horizontal direction. May be. In the embodiment, the substrate P is set on the table 30 so that the surface to be inspected of the substrate P faces upward, and the surface to be inspected is imaged from above the substrate P by the imaging unit 50. For example, the substrate holding mechanism is set so that the substrate P is set on the table 30 so that the surface to be inspected is directed to the side (left or right in FIG. 4), and the imaged unit 50 images the surface to be inspected from the side. In addition, an imaging mechanism may be configured.

  Further, in the embodiment, in order to image an arbitrary position of the substrate P by the imaging unit 50, the table 30 is moved in the Y-axis direction and the imaging unit 50 is moved in the X-axis direction, and these mutual movements are performed on the substrate P. However, as a matter of course, only one side of the substrate P or the imaging unit 50 is stationary in the X axis direction and the Y axis direction. It is good also as a structure to which it moves.

It is a perspective view which shows the board | substrate inspection apparatus which concerns on this invention. It is a top view which shows a board | substrate inspection apparatus. It is a longitudinal cross-sectional view which shows the internal structure of a board | substrate inspection apparatus. It is a plane sectional view which shows the internal structure of a board | substrate inspection apparatus. It is the figure which extracted the part which supports a liquid crystal display panel among FIG. It is sectional drawing of the base frame which shows the assembly | attachment structure of a control unit. It is a top view which shows the state which arranged the some board | substrate inspection apparatus in the fan shape.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Board | substrate inspection apparatus 2A Rear side part 2B Front side part 4 Liquid crystal display panel 6 Entrance / exit 10 Base frame P Printed circuit board Ca Casing

Claims (5)

Inspection means for inspecting the substrate, substrate transport means for holding the substrate to be inspected, transporting the substrate between a predetermined substrate loading / unloading section and the inspection section by the inspection means, and display means for displaying the inspection results; In a board inspection apparatus equipped with
Each means is integrated into a common frame member, and when the operator's standing position side is the front side of the apparatus, the substrate loading / unloading section and the inspection section are arranged in the front-rear direction sequentially from the front side. The substrate inspection apparatus is characterized in that the display means is provided at a substantially middle portion between the inspection section and the inspection section in a state of being directed toward the front side of the apparatus. The board inspection apparatus according to claim 1,
The substrate inspection apparatus, wherein the display means is assembled as a frame member at a front end of a beam that extends in the front-rear direction above the inspection unit and is supported in a cantilever state. The substrate inspection apparatus according to claim 2,
The substrate transport means transports the substrate with the surface to be inspected supported upward,
The inspection means images the surface to be inspected from above by an imaging device provided in the inspection unit,
The substrate inspection apparatus, wherein the display means is arranged in a state of being arranged in front of the imaging apparatus. In the board | substrate inspection apparatus in any one of Claims 1 thru | or 3,
The substrate inspection apparatus, wherein the display means is provided so as to be tiltable. In the board | substrate inspection apparatus in any one of Claims 1 thru | or 4,
An apparatus for inspecting a substrate, characterized in that the width of the apparatus having dimensions in a direction orthogonal to the front-rear direction is tapered from the rear side of the apparatus toward the front side.

Images