JP2008041267A - Filament lamp and light irradiation type heat treatment equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a desired light irradiance distribution by independently controlling lighting states of a plurality of filaments, and to supply a large electric power and to obtain a rapid rise characteristic for each filament, and to be processed To provide a light irradiation type heat treatment apparatus capable of uniformly heating a body.
A filament lamp has a structure in which a plurality of filament bodies each made of a coiled filament and a lead are arranged in the tube axis direction inside the arc tube, and power is supplied to each filament independently. Each of the leads is arranged such that a filament connecting portion extending in the coil axis direction of the filament is inserted into the inner space of the end portion of the filament and its outer peripheral surface is in contact with the filament. The radial portion extending in the radial direction is locked in a state of being sandwiched between the coil pitches of the filament, and is connected to the filament.
[Selection] Figure 3

Description

  The present invention relates to a filament lamp and a light irradiation type heat treatment apparatus, and more particularly to a filament lamp used for heat treatment of an object to be processed and a light irradiation type heat treatment apparatus provided with the filament lamp.

  When performing various processes such as film formation, oxidation diffusion, impurity diffusion, nitridation, film stabilization, silicidation, crystallization, and ion implantation activation in the semiconductor manufacturing process, heat treatment is used. For example, rapid thermal processing (hereinafter also referred to as “RTP: Rapid Thermal Processing”) that rapidly increases or decreases the temperature of an object to be processed such as a semiconductor wafer can improve yield and quality. It is preferably used.

As a heat treatment apparatus used in RTP, for example, it is possible to irradiate light from a light source such as an incandescent lamp in which a filament is disposed inside a luminous tube made of a light transmitting material without contacting the object to be processed. A light irradiation type heat treatment apparatus that can be heated is widely used (see Patent Document 1 and Patent Document 2).
According to such a light irradiation type heat treatment apparatus, for example, the temperature of the object to be processed can be raised to a temperature of 1000 ° C. or more in several seconds to several tens of seconds, and light irradiation is stopped. Thus, the object to be processed can be rapidly cooled (cooled down).

  For example, when RTP of a semiconductor wafer is performed using such a light irradiation type heat treatment apparatus, if the temperature distribution of the semiconductor wafer becomes uneven when the semiconductor wafer is heated to 1050 ° C. or higher, the semiconductor wafer A phenomenon called “slip”, that is, defects in crystal transition may occur, resulting in a defective product. Therefore, it is necessary to perform heating, holding at high temperature, and cooling so that the temperature distribution on the entire surface of the semiconductor wafer is uniform. Has been. That is, in RTP, high-precision temperature uniformity of the workpiece is required.

Thus, for example, even when light irradiation is performed so that the irradiance is uniform with respect to a semiconductor wafer having a uniform physical property on the entire surface of the light irradiation surface, in the periphery of the semiconductor wafer, the semiconductor wafer Since heat is radiated from the side surfaces of the semiconductor wafer, the temperature of the peripheral portion of the semiconductor wafer is lowered, and the temperature distribution in the semiconductor wafer is uneven.
In order to solve such a problem, light irradiation is performed so that the irradiance on the surface of the peripheral portion of the semiconductor wafer is larger than the irradiance on the surface of the central portion of the semiconductor wafer. Compensation for temperature drop due to thermal radiation makes the temperature distribution in the semiconductor wafer uniform.

  For example, in the heat treatment apparatus disclosed in Patent Document 1, as shown in FIG. 27, a plurality of incandescent lamps 32 and 33 are vertically opposed to both upper and lower stages outside a chamber 31 made of a light transmitting material. It arrange | positions so that it may mutually cross | intersect, and it is set as the structure which irradiates light to the to-be-processed object W accommodated in the chamber 31 by the incandescent lamps 32 and 33 from both surfaces, and heats this. In this heat treatment apparatus 30, as shown in FIG. 28, the lamp outputs of the incandescent lamps L1 and L2 for heating at both ends of the upper stage are made larger than the lamp outputs of the incandescent lamp L3 for heating at the center. By setting the lamp outputs of the incandescent lamps L4 and L5 for heating at both ends of the lower stage larger than the lamp output of the incandescent lamp for heating L6 at the central part, the peripheral part WB of the workpiece W is set. It is said that it is possible to compensate for the temperature drop due to the heat radiation action, to reduce the temperature difference between the central part and the peripheral part of the object to be processed W, and to make the temperature distribution of the object to be processed W uniform.

  However, in the above-described conventional heat treatment apparatus 30, for example, as shown in FIG. 28, a specific area WA that is very small compared to the light emission length of the incandescent lamp in the object W is Even if light irradiation is performed with the light intensity corresponding to the characteristics, the region other than the specific region WA is also irradiated with the same conditions. Therefore, the temperature is set so that the specific region WA and other regions are in an appropriate temperature state. It is not possible to adjust, that is, to control only the irradiance with respect to the narrow specific area WA so that the temperature state of the workpiece W becomes uniform.

For example, a film made of a metal oxide or the like is generally formed on a surface of a semiconductor wafer by sputtering or the like, and an impurity additive is generally doped by ion implantation. The oxide film thickness and impurity ion density have a local distribution on the surface of the semiconductor wafer. Such a local distribution is not necessarily centrosymmetric with respect to the center of the semiconductor wafer. For example, with respect to the impurity ion density, the impurity ion density changes in a narrow specific region that is not centrosymmetric with respect to the center of the semiconductor wafer. Sometimes.
In such a specific area, even when light is irradiated so as to have the same irradiance as other areas, there may be a difference in the rate of temperature rise. Does not necessarily match.
Therefore, in the conventional heat treatment apparatus 30, an undesired temperature distribution occurs in the processing temperature of the object to be processed W, and it becomes difficult to impart desired physical characteristics to the object to be processed W. Problems arise.

  In addition, as shown in FIG. 29, the heat treatment apparatus disclosed in Patent Document 2 has a U-shape in the lamp house 41, and power supply devices to the filament 45 are provided at both ends of the arc tube. A first lamp unit 42 configured by arranging a plurality of double-end lamps 43 arranged in parallel and perpendicular to the paper surface, and has a linear shape disposed below the first lamp unit 42. A second lamp unit 46 configured by arranging a plurality of double-end lamps 47 in which power supply devices for the filaments are provided at both ends of the arc tube along the paper surface in a direction perpendicular to the paper surface; The workpiece W such as a semiconductor wafer placed on the support ring 48 is heated at a position below the second lamp unit 46. And in this heat processing apparatus 40, the temperature of the connection part with the support ring 48 which mounts the to-be-processed object W in which the temperature tends to become low compared with the other part in the to-be-processed object W is raised. Therefore, a mechanism for controlling the U-shaped lamp belonging to the first lamp unit 42 located above the connection portion to have a high output is provided.

In this heat treatment apparatus 40, first, the heating region of the semiconductor wafer as the workpiece W is divided into a plurality of concentric and concentric zones, and each lamp of the first lamp unit 42 and the second lamp unit 46 is divided. By combining the illuminance distributions by, and forming a composite illuminance distribution pattern that is symmetrical about the center of the semiconductor wafer, corresponding to each of the divided zones, to suppress the influence of illuminance variation of the light from the lamp In the state where the semiconductor wafer is rotated, the heat treatment according to the temperature change of each zone is performed.
According to such a heat treatment apparatus 40, it is possible to heat each zone arranged concentrically of the object to be processed W with individual illuminance, whereby the temperature state of the object to be processed W is made uniform. It is possible to make it.

  However, in the case where the specific region is not centrosymmetric with respect to the center of the semiconductor wafer, the heat treatment is performed by rotating the semiconductor wafer, and thus the above-described problem cannot be solved satisfactorily.

Further, it is considered that this heat treatment apparatus 40 may cause the following problems in practical use. Specifically, the U-shaped lamp is composed of a horizontal portion 44B and a pair of vertical portions 44A, but only the horizontal portion 44B in which the filament 45 is disposed contributes to light emission. For this reason, the individual lamps are spaced apart from each other with a non-negligible space, and it is considered that a temperature distribution is generated in a portion corresponding to the space immediately below the space.
That is, even if the illuminance distribution by the lamps of the first lamp unit 42 and the second lamp unit 46 corresponding to each zone is combined to form a central symmetric composite illuminance distribution of the semiconductor wafer, it is immediately below the space. In the corresponding part, the illuminance changes (decreases) relatively steeply, so even if heating is performed according to the temperature change of each zone, it is not possible to reduce the temperature distribution generated in the vicinity of the corresponding part immediately below the space. It is considered relatively difficult.
Furthermore, since such a heat treatment apparatus 40 tends to reduce the space (mainly in the height direction) for disposing the lamp unit as much as possible in recent years, when a lamp having a U shape is used, Since a space corresponding to the vertical portion is required, it is not preferable from the viewpoint of reducing the space.

In view of the circumstances as described above, the present inventors have proposed a filament lamp used as a light source of a light irradiation type heat treatment apparatus having the following configuration (Japanese Patent Application No. 2005-191222). reference).
FIG. 30 is an explanatory perspective view showing an outline of a configuration in an example of a filament lamp. The filament lamp 50 includes a straight tubular arc tube 51 hermetically sealed at both ends. The arc tube 51 includes a filament composed of a coiled filament and a lead for supplying power to the filament. A plurality (two in FIG. 30) of the bodies 53A and 53B are arranged side by side in the tube axis direction so that the filament extends in the tube axis direction of the arc tube 51.

One lead 56A connected to one end of the filament 54A in one filament body 53A is inserted through a through hole 62A formed in an insulator 61 made of, for example, quartz glass disposed between the filaments 54A and 54B. And is electrically connected to an external lead 58A protruding outward from the sealing portion 52A through a metal foil 57A hermetically embedded in the sealing portion 52A on one end side of the arc tube 51. The lead 55A on the other end side connected to the other end of the filament 54A in the filament body 53A is electrically connected to the external lead 58D via the metal foil 57D embedded in the sealing portion 52B on the other end side of the arc tube 51. It is connected. An insulating tube 60A is provided at a portion of the one end side lead 56A that faces the filament 54B of the other filament body 53B.
The lead 56B on one end connected to one end of the filament 54B in the other filament body 53B is electrically connected to the external lead 58B via the metal foil 57B embedded in the sealing portion 52A on the one end side of the arc tube 51. In addition, the other end lead 55B connected to the other end of the filament 54B in the other filament body 53B is inserted through a through hole 62B formed in the insulator 61 and is connected to the arc tube 51. It is electrically connected to the external lead 58C via a metal foil 57C embedded in the sealing portion 52B on the other end side. An insulating tube 60B is provided in a portion of the other end side lead 55B facing the filament 54A of one filament body 53A.
63A and 63B are power supply devices, and one power supply device 63A is connected to one filament body 53A via external leads 58A and 58D, and the other power supply device 63B is connected via external leads 58B and 58C. It is connected to the other filament body 53B, so that the filaments 54A and 54B in each filament body 53A and 53B can be individually fed.
Reference numeral 59 denotes an annular anchor arranged in parallel in the tube axis direction of the arc tube 51 at a position between the inner wall of the arc tube 51 and the insulating tubes 60A and 60B. The filaments 54A and 54B are respectively For example, it is supported not to contact the arc tube 51 by three anchors.

The filament lamp 50 has a plurality of filaments 54A and 54B in the arc tube 51, and has a structure capable of individually controlling light emission and the like of each filament 54A and 54B. When used as a heating light source in a processing apparatus, by arranging a plurality of filament lamps 50 in parallel, light is irradiated as compared with a conventional filament lamp having one filament in an arc tube. It becomes possible to arrange the filaments at a high density corresponding to the irradiated area of the object to be processed.
Therefore, according to such a light irradiation type heat treatment apparatus, it is possible to individually supply power to the plurality of filaments 54A and 54B, and to individually control light emission of the filaments 54A and 54B. Even when a specific area on the object to be processed is asymmetric with respect to the shape of the object to be processed, it is possible to irradiate the specific area with light with a desired light intensity. Even when the distribution of the degree of local temperature change on the body is asymmetric with respect to the shape of the object to be processed, the object to be processed can be heated uniformly. A uniform temperature distribution can be realized throughout.
Further, for example, when compared with a light irradiation type heat treatment apparatus using a lamp having a U-shape described in Patent Document 2, the filament lamp mounted on the light irradiation type heat treatment apparatus is made into a straight tube. Therefore, a space corresponding to the vertical portion of the U-shaped lamp is not necessary, and the heat treatment apparatus can be downsized.

JP-A-7-37833 Japanese Patent Laid-Open No. 2002-203804

In recent years, further improvements in yield and quality have been demanded, and in order to satisfy such requirements in the filament lamp 50, it is necessary to make the filament lamp 50 rise rapidly. For example, it is considered that this can be dealt with by increasing the input power per unit length to the filaments 54A and 54B more than before.
If high power is simply applied to the filaments 54A and 54B, the filaments 54A and 54B may become excessively hot and melt, so that the filament constituent material having a large wire diameter is coiled. It is necessary to configure the filaments 54A and 54B by winding, and the resistance of the filaments 54A and 54B is inversely proportional to the cross-sectional area of the filament constituent material, so that the resistance of the filaments 54A and 54B is avoided from becoming small. In order to increase the filament diameter of the thick filament constituent material, it is necessary to ensure the full length of the filament constituent material.
However, the axial lengths of the filaments 54A and 54B are limited in configuration, so that the axial lengths of the filaments 54A and 54B can be reduced to a predetermined length while using a long filament component. The winding diameter of the filaments 54A and 54B must be increased.

  For example, in the filament lamp 50 shown in FIG. 30, in order to connect the coiled filament 54A and the leads 55A and 56A, the leads 55A and 56A have an outer diameter slightly larger than the coil inner diameter of the filament 54A. Yes. Specifically, in order to prevent the filament 54A from fusing even when 4 kW of electric power is applied to the filament 54A, a filament constituent material having a wire diameter of 0.5 mm is used, and the coil of the filament 54A is used. It is necessary that the outer diameter is 4.3 mm, the inner diameter of the coil is 3.3 mm, and the outer diameters of the leads 55A and 56A are 3.5 mm. The same applies to the other filament body 53B.

  However, if the filament lamp 50 shown in FIG. 30 is configured using a lead having an outer diameter of 3.5 mm, the insulating tubes 60A and 60B covering the periphery of the leads 56A and 55B also have a large tube diameter. In addition, since the outer diameter of the arc tube 51 is limited, the insulating tubes 60A and 60B come close to the filaments 54A and 54B, and the insulating tubes 60A and 60B are in a high temperature state when lit. The leads 56A and 55B are melted by the thermal influence of the filaments 54A and 54B, and the leads 56A and 55B are exposed in the arc tube 51. There is a risk that a short circuit occurs between adjacent filaments.

  In particular, when it is used for heat treatment of an object to be processed that requires a uniform temperature distribution, it is necessary to individually supply power to a large number of filaments arranged in the arc tube. This leads to an increased risk of short circuit between adjacent filaments.

The present invention has been made based on the above circumstances, the purpose of which can obtain a desired light irradiance distribution by controlling the lighting state of a plurality of filaments independently of each other, In addition, a specific filament support structure that can reliably connect a coil-shaped filament formed by winding a filament component with a large wire diameter with a relatively large winding diameter to a small-diameter power supply lead is adopted. It is another object of the present invention to provide a filament lamp that does not cause a short circuit between adjacent filaments while having a configuration capable of supplying high power to the filament.
Another object of the present invention is to provide a light irradiation type heat treatment apparatus that includes the filament lamp and can uniformly heat the object to be processed and can be downsized.

In the filament lamp of the present invention, a plurality of filament bodies each formed by connecting a coiled filament and a lead for supplying electric power to the filament inside a straight tubular arc tube having sealing portions formed at both ends are provided. The filaments are sequentially arranged in the tube axis direction so that each filament extends in the tube axis direction of the arc tube, and each of the leads in each filament body is attached to each of the plurality of conductive members provided in the sealing portion. A filament lamp that is electrically connected to each filament and is independently fed to each filament;
Each lead has a radial portion extending in a direction orthogonal to the coil axis direction of the filament, and a filament connecting portion extending in the coil axis direction of the filament,
The filament connecting portion is inserted into the inner space at the end of the filament, the outer peripheral surface is disposed in contact with the inner surface of the filament, and the radial portion is sandwiched between the coil pitches of the filament in the radially outward direction. The filament and the lead are connected to each other so as to protrude and extend.

  In the filament lamp of the present invention, each lead has a lead body portion extending in the coil axis direction of the filament and a hook-like portion having a radial portion and a tip portion extending in the lead body portion direction, and an adjacent filament A plate-like support member in which a positioning mechanism is formed by the engaged portion with which the hook-like portion of the lead is engaged is disposed at a position between the two, and the filament is supported by the support member. Is preferably positioned relative to the arc tube.

  Moreover, in the filament lamp of this invention, the filament connection part in a lead | read | reed can be set as the structure formed by winding a part of filament material which comprises a lead in coil shape.

  Furthermore, in the filament lamp of the present invention, the filament connecting portion in the lead is formed by joining a filament connecting portion constituent material different from the lead constituent material having the radial direction portion to the radial direction portion of the lead constituent material. It can be.

  Furthermore, in the filament lamp of the present invention, the lead has an F-shaped cross-sectional shape in the axial direction in which a linear lead main body component extending in the coil axial direction of the filament coil and the filament connecting portion are integrally formed. It can be set as the structure formed by joining the shape | molded hook-shaped part structural material.

  The light irradiation type heat treatment apparatus of the present invention has a lamp unit in which a plurality of the filament lamps are arranged in parallel, and heats the object by irradiating the object with light emitted from the lamp unit. It is characterized by that.

According to the filament lamp of the present invention, basically, since each filament is independently supplied with power, the temperature of the object to be processed is reduced in a narrow region when the object to be processed is heated. Even if the distribution becomes non-uniform, the temperature in a narrow region on the object to be processed can be adjusted by adjusting the power supply to the filament located in the region. A temperature distribution can be realized.
In addition, the filament connecting portion is inserted into the inner space of the filament coil and arranged in a contact state, and the radial portion is sandwiched between the coil pitches so that the filament and the lead are connected. Since the displacement with respect to the filament axial direction and the displacement with respect to the radial direction of the filament are regulated, the wire diameter of the lead can be obtained even when connecting the filament and the lead having a large wire diameter and coil winding diameter. Can be reliably connected to each other without increasing the diameter to match the inner diameter of the filament, so that a large amount of power can be supplied to the filament, but a short circuit occurs between adjacent filaments. This can be surely prevented.
Further, even when the filament lamp is transported or used, even if an impact is applied to the connecting portion of the filament and the lead, there is no possibility that the filament will fall off the lead.

  Further, according to the filament lamp of the present invention, the plate-like support member formed with the positioning mechanism by the engaged portion to which a part of the hook-like portion of the lead is engaged is further provided. Since the displacement (movement) in the circumferential direction of the filament is regulated, the filament can be positioned more reliably, and each filament can be placed at a desired position of the arc tube with high accuracy and easily. The position of the filament body can be prevented from being displaced with time, and the desired performance can be reliably maintained over a long period of time.

According to the light irradiation type heat treatment apparatus of the present invention, by providing the lamp unit composed of a plurality of the filament lamps, the illuminance distribution on the object to be processed which is separated from the lamp unit by a predetermined distance is precisely and Therefore, even if the distribution of the degree of local temperature change in the object to be processed is asymmetric with respect to the shape of the object to be processed, The illuminance distribution on the body can be set, and the object to be processed can be heated uniformly.
In addition, due to the characteristics of each filament lamp itself, a large amount of electric power can be input to the filament, so that the yield and quality can be further improved.

<First Embodiment>
FIG. 1 is an explanatory perspective view showing an outline of a configuration of an example of a filament lamp of the present invention, and FIG. 2 is an explanatory diagram showing a simplified arrangement pattern and configuration of a plurality of filament bodies.
The filament lamp 10 includes a straight tube arc tube 11 made of a light-transmitting material such as quartz glass, which is sealed at both ends to form sealing portions 12a and 12b. A plurality of, for example, three filament bodies 14, 15, 16 are arranged in parallel in the tube axis direction of the arc tube 11, and a halogen gas is enclosed therein.

  As shown in FIG. 3, the filament body 14 includes a filament coil 14b, a power feeding lead 14a connected to the other end of the filament coil 14b, and a lead 14c connected to one end of the filament coil 14b. ing.

As shown in FIG. 4, the lead 14 a on the other end side of the filament body 14 is formed of a single wire rod, and has a linear lead main body 142 a and a direction orthogonal to the lead main body 142 a ( And a hook-shaped portion 140a having a radial portion extending in the radial direction of the filament coil to be connected.
The hook-shaped portion 140a includes a radial direction portion 143a that is bent so as to extend in a direction orthogonal to the lead body portion 142a continuously to the lead body portion 142a, and a coil shaft that continues to the radial direction portion 143a. A coil-shaped filament connecting portion 141a extending in parallel with the L-shaped portion, which is continuous with the filament connecting portion 141a, extends in a direction perpendicular to the coil axis direction, and is bent so that the tip end portion extends in the coil axis direction 144a.
The filament connecting portion 141a has an outer diameter that matches the inner diameter of the filament coil 14b.

  In addition, for convenience, the lead 14c on one end side of the filament body 14 is provided with the same reference numerals by replacing “a” with “c” in the same components as the lead 14a.

In this filament body 14, as shown in FIG. 5, the other end portion of the filament coil 14b is screwed into the radial direction portion 143a of the lead 14a so that the filament connecting portion 141a becomes the other end portion of the filament coil 14b. The outer circumferential surface of the filament coil 14b is disposed in contact with the inner surface of the filament coil 14b, and the radial portion 143a protrudes radially outward of the filament coil 14b between the coil pitches of the filament coil 14b. It is in a state of being pinched. Since the outer diameter of the filament connecting portion 141a is slightly larger than the inner diameter of the filament coil 14b and the outer diameter of the radial direction portion 143a is slightly larger than the coil pitch of the filament coil 14b, the lead 14a and the filament coil 14b are strong. Consolidation has been achieved.
Similarly, for the lead 14c, the filament connecting portion 141c is disposed in contact with the inside of the filament coil 14b, and the radial portion 143c is radially outward of the filament coil 14b between the coil pitches of the filament coil 14b. Thus, the lead 14c and the filament coil 14b are connected to each other.

  The filament coil 14b and the filament coupling portions 141a and 141c are not welded. Therefore, even when a bending or twisting force acts on the connecting portion between the filament and the lead, the filament or the lead can be prevented from being damaged.

  Also, the filament bodies 15 and 16 have the same configuration as the filament body 14, and a power supply lead 15a (connected to the filament coil 15b (16b) and the other end of the filament coil 15b (16b). 16a) and a lead 15c (16c) connected to one end of the filament coil 15b (16b).

  Further, disk-shaped support members 19a, 19b, 19c, and 19d made of an insulating material such as quartz glass that support the filament bodies 14, 15, and 16 are provided at positions between adjacent filaments inside the arc tube 11. It is provided perpendicular to the tube axis of the arc tube 11, and the filament bodies 14, 15, and 16 are supported by these support members 19a, 19b, 19c, and 19d while being positioned with respect to the arc tube 11. Yes.

As shown in FIG. 6, the support member 19 b has an opening 197 formed at a substantially central portion, and a plurality of, for example, six cutout portions constituting a positioning mechanism for positioning the filament body at the peripheral portion thereof. 191, 192, 193, 194, 195, 196 are formed at positions separated from each other in the circumferential direction. Although it is not essential to form the opening 197, by providing the opening 197 in the support member 19b, it is possible to increase the distance between the support member 19b and the filament coil 14b, and to reduce the thermal load on the support member 19b. can do.
For example, pairs of the notches 191 and 194, 192 and 195, and 193 and 196 are positioned on substantially the same imaginary line passing through the center of the support member 19b.
The other support members 19a, 19c, and 19d have the same configuration as the support member 19b.

In the filament body 14, the hook-shaped portion 140c of the lead 14c on one end side is engaged with the notch 196 of the support member 19b, and the lead main body 142c passes through the notch 193 that makes a pair with the notch 196. The filament coil 14b is attached in such a manner that the filament coil 14b extends in a direction perpendicular to the support member 19b, and the hook-like portion 140a of the lead 14a on the other end side is similarly attached to the support member 19a. Thus, the filament body 14 is supported while being positioned with respect to the arc tube 11 (see FIG. 1).
The lead 14a on the other end side of the filament body 14 is electrically connected to the external lead 18a via a metal foil 13a hermetically embedded in the sealing portion 12a on the other end side of the arc tube 11. The lead 14c on one end side extends through the tube axis of the arc tube 11 through the notch that does not contribute to the positioning of the flange portion of the lead in the support members 19c and 19d, and extends on the one end side of the arc tube 11 It is electrically connected to the external lead 18d through a metal foil 13d that is hermetically embedded in the sealing portion 12b.

The filament body 15 is a support member in which the hook-shaped portion of the lead 15a on the other end side does not contribute to the positioning of the lead 14c on one end side of the filament body 14 on the one surface side of the support member 19b that supports one end portion of the filament body 14 The lead main body portion is inserted into the notch portion 191 that is paired with the notch portion 194 and is engaged with the notch portion 194 of the 19b, so that the filament coil 15b extends in a direction perpendicular to the support member 19b. It is attached in a posture, and the hook-like portion of the lead 15c on one end side is similarly attached to the support member 19c (see FIG. 1), whereby the filament body 15 is positioned with respect to the arc tube 11 It is supported in the state.
The lead 15a on the other end side of the filament body 15 is inserted through a notch that does not contribute to the positioning of the lead-shaped portion of the support member 19a and extends along the tube axis of the arc tube 11, and the other end of the arc tube 11 It is electrically connected to the external lead 18b through a metal foil 13b that is airtightly embedded in the side sealing portion 12a. In addition, the lead 15c on one end side is inserted through a notch that does not contribute to the positioning of the hook-shaped portion of the lead in the support member 19d and extends along the tube axis of the arc tube 11, and seals on the one end side of the arc tube 11 It is electrically connected to the external lead 18e through a metal foil 13e that is airtightly embedded in the portion 12b.

As shown in FIG. 1, the filament body 16 includes a lead 15 c on one end side of the filament body 15 on the one surface side of the support member 19 c that supports the one end portion of the filament body 15. Is engaged with a notch portion of the support member 19c that does not contribute to positioning, and the lead body portion is inserted through the notch portion paired with the notch portion, so that the filament coil 16b is perpendicular to the support member 19c. It is attached in a posture extending in the direction, and the hook-like portion of the lead 16c on one end side is similarly attached to the support member 19d, whereby the filament body 16 is positioned with respect to the arc tube 11 Supported in state.
The lead 16a on the other end side of the filament body 16 is inserted into the notch 195 of the support member 19b and the notch that does not contribute to the positioning of the lead flange portion of the support member 19a, and is inserted into the tube axis of the arc tube 11. It is electrically connected to the external lead 18c through a metal foil 13c that extends along the gas pipe 11 and is hermetically embedded in the sealing portion 12a on the other end side of the arc tube 11.
The lead 16c on one end side of the filament body 16 is electrically connected to the external lead 18f via a metal foil 13f hermetically embedded in the sealing portion 12b on one end side of the arc tube 11.

In the filament lamp 10, an insulating tube made of an insulating material such as quartz is provided at a portion of the lead of the filament body facing the filament and the lead in the other filament body. By providing the insulating tube, it is possible to reliably prevent the anchor attached to the filament, which will be described later, and the lead from coming into contact with each other and being electrically short-circuited.
Specifically, as shown in FIG. 2, the lead 14 c on one end side of the filament body 14 is provided with insulating tubes 25 c and 25 e at locations facing the filament coil 15 b of the filament body 15 and the filament coil 16 b of the filament body 16. Is provided.
The lead 15c on one end side of the filament body 15 is provided with an insulating tube 25f at a location facing the filament coil 16b of the filament body 16, and the lead 15a on the other end side is provided with a filament of the filament body 14 An insulating tube 25a is provided at a location facing the coil 14b.
Further, the lead 16a on the other end side of the filament body 16 is provided with insulating tubes 25b and 25d at locations facing the filament coil 14b of the filament body 14 and the filament coil 15b of the filament body 15.

In this filament lamp 10, a plurality of annular anchors 17 arranged in parallel in the tube axis direction of the arc tube 11 are provided at a position between the inner wall of the arc tube 11 and the insulating tube, and each filament coil 14b. 15b and 16b are supported so as not to contact the arc tube 11 by, for example, two anchors.
The anchor 17 has such elasticity that a plurality of filament bodies can be easily inserted and disposed in the arc tube 11 when the filament lamp 10 is manufactured.

  The filament lamp 10 having the above configuration is connected to a power supply unit 7 including a first power supply device 7a, a second power supply device 7b, and a third power supply device 7c. Specifically, the first power supply device 7a is connected between the external leads 18a and 18d electrically connected to the filament body 14, and between the external leads 18b and 18e electrically connected to the filament body 15. The second power supply device 7c is connected, and the third power supply device 7b is connected between the external leads 18c and 18f electrically connected to the filament body 16.

  The filament lamp 10 is driven to be lit by being supplied with power from the power supply unit 7. However, since the individual feeders 7 a, 7 b, and 7 c are connected to the filament bodies 14, 15, and 16, the filament bodies 14 are connected. , 15, and 16 can individually control the lighting of the filament coils 14b, 15b, and 16b by supplying power to the filament coils 14b, 15b, and 16b.

In addition, when the power feeding devices 7a, 7b, and 7c are configured with variable power sources, the ratio of the amount of power that is fed to the filament coils 14b, 15b, and 16b can be arbitrarily set, so that the filament coils 14b, 15b , 16b can be arbitrarily set, so that the light emitted from the filament lamp 10 when the filament lamp 10 is used as a heating light source of the light irradiation type heat treatment apparatus. The irradiance distribution on the object to be processed can be adjusted to be uniform.
For example, an object to be irradiated is installed below the filament lamp 10, and the irradiance on the object to be processed immediately below the filament coil 14 b in the filament body 14 is set to be the irradiance on the object to be processed in the filament body 15 immediately below the filament coil 15 b. If it is necessary to increase the power, the power feeding device 7a, which is a variable power source, is adjusted so that the power fed from the power feeding device 7a to the filament body 14 is larger than the power fed from the power feeding device 7b to the filament body 15. That's fine.

In the above, when the filament lamp 10 is used as a heating light source of a light irradiation type heat treatment apparatus, a part of light emitted from a filament coil of one filament body is a lead or an insulating tube of another filament body. It is important to configure and arrange the filament bodies 14, 15 and 16 so that they are not blocked by.
Specifically, for example, when the light emitted from the filament coils 14b, 15b, and 16b irradiates the object to be processed installed in the lower part of FIG. 1, a part of the light emitted from the filament coil 14b is a lead. The positions of notches that function as passing portions for the leads 15a and leads 16a among the notches constituting the positioning mechanism provided in the support members 19a and 19b are determined so as not to be shielded from light by the leads 15a and 15a. Is done. Further, of the notches that are positioning portions provided on the support members 19b and 19c so that a part of the light emitted from the filament coil 15b is not shielded by the leads 14c and 16a, The position of the notch functioning as the passing part is determined. Further, of the notches that are positioning portions provided in the support members 19c and 19d so that a part of the light emitted from the filament coil 16b is not shielded by the leads 14c and 15c, the leads 14c and 15c of the leads 15c. The position of the notch functioning as the passing part is determined.
By configuring in this way, it is possible to prevent a part of the light emitted from one filament from being blocked by the lead and the insulating tube of the other filament.

According to the filament lamp 10 having the above-described configuration, basically, the filament coil 14b, 15b, 16b is configured to be supplied with power independently. Even if the temperature distribution becomes uneven in a narrow region of the body, the temperature in the narrow region on the object to be processed can be adjusted by adjusting the power supply to the filament located in the region. A uniform temperature distribution can be realized over the entire processing body.
Moreover, the filament connecting portions 141a and 141c of the leads 14a and 14c are inserted into the inner space of the filament coil 14b and arranged in contact with each other, and the hook-shaped portions 140a and 140c are sandwiched between the coil pitches. By connecting the filament coil 14b and the leads 14a and 14c, the displacement of the filament coil 14b in the axial direction and the displacement of the filament coil 14b in the radial direction are regulated. Even when the filament coil 14b having a large winding diameter is connected to the leads 14a and 14c, the leads 14a and 14c are reliably connected without increasing the wire diameter to match the inner diameter of the filament coil 14b. be able to. For example, even a filament coil having an element wire diameter of 0.5 mm and a coil winding diameter of 4.3 mm and a lead having a wire diameter of 0.8 mm can be reliably connected. The same applies to the filament coils 15b and 16b.
Accordingly, for example, a configuration in which large power of 4 kW or more can be input to the filament coils 14b, 15b, 16b, and the filament coils 14b, 15b, 16b can be rapidly started up so as to be in a desired heat generation state. However, the insulation tubes 25a, 25b, 25c, 25d, 25e, and 25f covering the outer periphery of the lead are not sufficiently melted due to the thermal influence of the filament that is in a high temperature state when the lamp is turned on. Since the filament bodies 14, 15, and 16 can be disposed in the arc tube 11 in a state where the gap is secured, it is possible to reliably prevent a short circuit from occurring between adjacent filaments.

  Further, when the filament lamp 10 is transported or used, even if an impact is applied to the filament / lead connection portion, the filament coils 14b, 15b, 16b do not fall off the lead.

Further, the filament body 14 is supported by a plate-like support member 19b on which a positioning mechanism is formed by an engaged portion including a notch portion with which the flange portion 140c of the lead 14c is engaged, and the lead 14a. Similarly, since the displacement (movement) of the filament coil 14b in the circumferential direction is further regulated by being supported by the support member 19a, the filament body 14 can be positioned more reliably.
Further, the filament bodies 15 and 16 are also supported by the support members 19b, 19c and 19d, respectively, so that the displacement (movement) in the circumferential direction of the filament coils 15b and 16b is regulated. 16 positioning can be performed more reliably.
Accordingly, the filament coils 14b, 15b, and 16b can be easily and accurately arranged at desired positions in the arc tube 11, and the positions of the filament coils 14b, 15b, and 16b are affected by the influence of gravity and the like over time. Displacement can be prevented, and the desired performance can be reliably maintained over a long period of time.
Further, even when it is necessary to replace some of the constituent members of the filament lamp due to an unexpected situation such as the filament coils 14b, 15b, 16b being disconnected, the filament coils 14b, 15b, Since 16b can be arranged with high reproducibility and high accuracy, for example, reproducibility of the irradiance distribution on the surface of the object to be processed before and after replacement of the filament body can be ensured. Processing can be performed.

In the filament lamp 10 described above, the lead in the filament body can be configured as shown in FIG. 7, for example.
The lead 14c includes a lead main body 142c, a radial portion 143c bent continuously in a direction perpendicular to the lead main body 142c, and the coil shaft continuous to the radial portion 143c. A coiled filament connecting portion 141c extending in parallel with the lead main body portion 142c, an inclined portion 145c extending in a direction perpendicular to the coil axis direction while being inclined to one end side continuously to the filament connecting portion 141c, and continuous to the inclined portion 145c. The distal end portion is formed by a flange-shaped portion 140c formed of a U-shaped portion 146c bent so as to extend in the coil axis direction, and one end edge of the radial direction portion 143c and one end edge of the U-shaped portion 146c are formed. It is assumed that they are located on the same line.

Normally, a portion of the filament coil 14b that is in contact with the outer surface of the filament coupling portion 141c has a lower heat capacity than other portions and is in a low temperature state, and emits less light than other portions.
However, since the lead 14 is configured as described above and will be described with reference to FIG. 6, the hook-shaped portion 140c is engaged with the predetermined notch portion 196 of the support member 19b and the lead main body portion 142c. Since the filament connecting portion 141c can be disposed in the opening 197 of the supporting member 19b when the filament connecting portion 141c is inserted into the notched portion 193 paired with the notched portion 196, the filament connecting portion 141c is supported by the supporting member 19b. Compared with the case where it is arranged outside the opening 197, the illuminance distribution in the axial direction of the filament lamp 10 can be made uniform.

  The filament lamp of the present invention is not limited to the filament support structure according to the first embodiment, and may have a configuration in which the filament and the lead are connected by the filament support structure described below.

[Second Embodiment]
FIG. 8 is a front view showing the configuration of the filament body in one configuration example of the filament lamp according to the second embodiment of the present invention, and FIG. 9 is an explanatory diagram showing the configuration of the leads in the filament body shown in FIG. FIG. 10A is a front view, FIG. 10B is a side view, and FIG. 10 is an enlarged cross-sectional view showing a connecting portion between the lead of the filament body and the filament.

The filament body 14 includes a filament coil 14b, a power supply lead 14a connected to the other end of the filament coil 14b, and a lead 14c connected to one end of the filament coil 14b.
The lead 14c includes a linear lead body 142c extending in the coil axis direction of the filament coil 14b, and a direction that is continuous with the lead body 142c and orthogonal to the lead body 142c (a direction orthogonal to the coil axis of the filament coil 14b). ) Extending in the axial direction) and a disk-shaped filament connecting portion 141c extending in the coil axial direction of the filament coil 14b joined to the radial direction 143c, and the distal end of the radial direction 143c is in the axial direction of the coil. It is comprised by the hook-shaped part 140c bent so that it might extend outward. Also, the lead 14a has the same configuration as the lead 14c. In FIG. 8, for convenience, the same components as those of the lead 14c are denoted by the same reference numerals by replacing “c” with “a”. .

  The filament connecting portion 141c has an outer diameter that matches the coil inner diameter of the filament coil 14b.

  The joining method of the lead constituent member in which the lead main body part 142c and the hook-like part 140c are formed of one wire rod and the filament connecting part constituent material constituting the filament connecting part 141c is not particularly limited. For example, it is performed by welding.

In this filament body 14, one end portion of the filament coil 14b is screwed into the flange portion 140c of the lead 14c, whereby the filament connecting portion 141c is inserted into the internal space of the filament coil 14b, and the outer peripheral surface is the filament. It is arranged in contact with the inner surface of the coil 14b and is sandwiched between the coil pitches of the filament coil 14b so that the radial portion of the flange 140c protrudes radially outward of the filament coil 14b. Yes. Since the outer diameter of the filament connecting portion 141c is slightly larger than the inner diameter of the filament coil 14b and the outer diameter of the radial portion 143c of the hook-shaped portion 140c is slightly larger than the coil pitch of the filament coil 14b, the lead 14c and the filament coil A strong connection with 14b has been achieved.
Similarly, for the lead 14a, the filament connecting portion 141a is disposed in contact with the inside of the filament coil 14b, and the radial portion 143a of the hook-shaped portion 140a is disposed between the coil pitches of the filament coil 14b. Thus, the lead 14a and the filament coil 14b are connected to each other.

  The filament coil 14b and the filament coupling portions 141a and 141c are not welded. Therefore, even when a bending or twisting force acts on the connecting portion between the filament and the lead, the filament coil or the lead can be prevented from being damaged.

As shown in FIG. 11, in the filament body 14, the filament connecting portion 141c is positioned in the opening 197 provided in the approximate center of the support member 19b, and the hook-like portion 140c of the lead 14c on one end side is the support member. The filament coil 14b is attached in such a manner that the filament coil 14b extends in a direction perpendicular to the support member 19b by being engaged with the two notches 193 and 196 of 19b.
Further, the hook-like portion 140a of the lead 14a on the other end side is similarly attached to the support member 19a, and thereby the filament body 14 is supported in a state of being positioned with respect to the arc tube 11 (see FIG. 1).

  In the second embodiment, since the filament connecting portion 141c inevitably extends toward the support member 19b, it is essential to provide an opening 197 in the support member 19b, as shown in FIG. The support members 19a, 19c, and 19d also have an opening at a substantially central portion.

According to the filament lamp 10 including the filament body 14 configured as described above, in addition to being able to obtain substantially the same effect as that of the filament lamp according to the first embodiment, it is possible to obtain the following effects. it can.
That is, by disposing the filament connecting portion 141c in the opening 197 of the support member 19b, a region where no light is emitted (dead zone) in the tube axis direction of the filament lamp 10 is only a length corresponding to the thickness of the support member 19b. Therefore, the adverse effect on the illuminance distribution on the object to be processed can be minimized. This is because the portion of the filament coil 14b wound around the filament connecting portion 141a does not emit light because the temperature of the filament does not rise due to heat conduction to the filament connecting portion.
Further, since the opening 197 is provided in the support member 19b, the interval between the support member 19b and the filament coil 14b can be increased, and the thermal load on the support member 19b can be reduced. There are also advantages.
In the above, the description has been given focusing on one filament body, but it goes without saying that the same effect can be achieved with other filament bodies.

  In the above, as long as the filament connecting portion has an outer shape portion having an outer diameter that matches the inner diameter of the filament coil, the outer shape is not limited to a disk shape. For example, FIG. As shown in FIG. 12, it can be configured by an annular shape having an opening at the center, or a C-shaped shape with a part of the annular shape cut out, for example, as shown in FIG.

[Third Embodiment]
FIG. 13 is a front view showing a configuration of a filament body in one configuration example of a filament lamp according to the third embodiment of the present invention, and FIG. 14 is an enlarged view showing a connecting portion between a lead and a filament in the filament body shown in FIG. It is sectional drawing.

The filament body 14 includes a filament coil 14b, a power supply lead 14a connected to the other end of the filament coil 14b, and a lead 14c connected to one end of the filament coil 14b.
The lead 14a has a linear lead main body 142a extending in the coil axis direction of the filament coil 14b, and a direction continuous to the lead main body 142a and orthogonal to the lead main body 142a (perpendicular to the coil axial direction of the filament coil 14b). ) And a rod-shaped filament connecting portion 141a extending in the coil axis direction of the filament coil 14b, and the tip end portion of the radial direction portion 143a is outside the coil axis direction. And a hook-like portion 140a bent so as to extend in the direction.
Also, the lead 14c has the same configuration as the lead 14a. In FIG. 13, for convenience, the same components as those of the lead 14a are denoted by the same reference numerals by replacing “a” with “c”. .

  As shown in FIG. 15, the filament connecting portion 141 a is a rod-like filament connecting portion constituting material 21 having an outer diameter matching the coil inner diameter of the filament coil 14 b, in which a flat portion 147 a is formed at one end by, for example, machining. However, the flat portion 147a is joined to the radial direction portion 143a of the lead constituting member 20 by welding or the like, for example. Since the filament connecting part constituent material 21 has the flat part 147a, the filament connecting part constituent material 21 can be easily joined to the radial direction part 143a.

In this filament body 14, one end portion of the filament coil 14b is screwed into the flange portion 140a of the lead 14a, whereby the filament connecting portion 141a is inserted into the internal space of the filament coil 14b, and the outer peripheral surface is the filament. It is disposed in contact with the inner surface of the coil 14b, and the radial portion 143a of the flange-shaped portion 140a is sandwiched between the coil pitches of the filament coil 14b so as to protrude outward in the radial direction of the filament coil 14b. ing. Since the outer diameter of the filament connecting portion 141a is slightly larger than the inner diameter of the filament coil 14b and the outer diameter of the radial portion 143a of the hook-shaped portion 140a is slightly larger than the coil pitch of the filament coil 14b, the lead 14a and the filament coil A strong connection with 14b has been achieved.
Similarly, for the lead 14c, the filament connecting portion 141c is inserted into the inner space of the filament coil 14b and the outer peripheral surface is disposed in contact with the inner surface of the filament coil 14b. The portion 143c is sandwiched between the coil pitches of the filament coil 14b so as to protrude outward in the radial direction of the filament coil 14b, whereby the connection between the lead 14c and the filament coil 14b is achieved.

  The filament coil 14b and the filament coupling portions 141a and 141c are not welded. Therefore, even when a bending or twisting force acts on the connecting portion between the filament coil and the lead, the filament coil or the lead can be prevented from being damaged.

  In the filament body 14, as in the second embodiment, the filament connecting portion 141a is positioned in the opening provided at the approximate center of the support member, and the flange portion 140a of the lead 14a on the other end side is the support member. The filament coil 14b is attached in such a manner that the filament coil 14b extends in a direction perpendicular to the support member 19a by being engaged with the two notches 19a, and the hook-like portion 140c of the lead 14c on one end side is supported. It is similarly attached to the member 19b, whereby the filament body 14 is supported while being positioned with respect to the arc tube 11 (see FIG. 1).

  According to the filament lamp 10 including the filament body 14 having the above configuration, substantially the same effect as that of the filament lamp according to the first embodiment can be obtained.

In the filament lamp 10 according to the third embodiment described above, as shown in FIG. 16A, the filament connecting portion constituting material 21 constituting the lead 14a in the filament body 14 is disposed on the flat portion 147a and the radial portion 143a. The groove portion 148a having a slightly narrower width than the outer diameter of the groove 148a may be configured to extend in the radial direction.
In this lead 14a, as shown in FIG. 16B, the radial direction portion 143a of the lead constituting member 20 is disposed in the groove portion 148a of the filament connecting portion constituting member 21, and at the boundary portion E between the flat portion 147a and the groove portion 148a. The radial direction part 143a and the filament connecting part constituting material 21 are joined, for example, by welding. By forming the groove portion 148a in the flat surface portion 147a of the filament connecting portion constituting material 21, the filament connecting portion 141a can be easily joined to the radial direction portion 143a.

[Fourth Embodiment]
FIGS. 17A and 17B are (A) front view and (B) explanatory view showing a lead manufacturing method showing the configuration of the leads constituting the filament body in an example of the filament lamp according to the fourth embodiment of the present invention.
The lead 14a includes a linear lead main body 142a, a radial portion 143a extending in a direction orthogonal to the lead main body 142a (a direction orthogonal to the coil axis of the filament coil 14b), and the radial direction 143a. The rod-shaped filament connecting portion 141a extending in parallel with the lead main body portion 142a is formed, and the distal end portion of the radial direction portion 143a is formed by a hook-shaped portion 140a bent so as to extend in parallel with the lead main body 142a. Yes. In the lead 14a, the base end portion of the radial portion of the flange-shaped component 23 having a F-shaped cross-section manufactured by, for example, a die method is brought into contact with one end of the lead main body component 22 In the state, the lead body part constituting material 22 and the hook-like part constituting material 23 are joined by, for example, welding, and thus can be obtained. Here, the welded portion Wp between the lead body portion constituting material 22 and the hook-like portion constituting material 23 is formed at a position sufficiently separated from the filament connecting portion 141a.

  The lead 14a and the filament coil 14b having such a configuration are connected by screwing one end portion of the filament coil into the hook-like portion 140a of the lead 14a, so that the filament connection portion 141a enters the internal space of the filament coil. The outer peripheral surface is inserted and arranged in contact with the inner surface of the filament coil, and the radial portion 143a of the flange 140a is sandwiched between the coil pitches of the filament coil so as to protrude outward in the radial direction of the filament coil. It is supposed to be in a state. Since the outer diameter of the filament connecting portion 141a is slightly larger than the inner diameter of the filament coil 14b and the outer diameter of the radial portion 143a of the hook-shaped portion 140a is slightly larger than the coil pitch of the filament coil 14b, the lead 14a and the filament coil A strong connection with 14b has been achieved.

According to the filament lamp including the filament body 14 formed by connecting the lead 14a and the filament coil having the above-described configuration, in addition to being able to obtain substantially the same effect as the filament lamp according to the first embodiment, Furthermore, the following effects can be obtained.
Due to the configuration in which two or more structural members are joined by welding to form the lead 14a, the welded portion Wp is more likely to be destroyed by thermal stress when it is at a higher temperature than in a portion that is not welded. In particular, when the lamp is lit, the filament connecting portion 141a tends to be in a high temperature state.
However, since the welded portion Wp is formed at a position sufficiently separated from the filament connecting portion 141a, it can be prevented from becoming an excessively high temperature state when the lamp is turned on, and thus is destroyed by thermal stress. Can be prevented.

[Fifth Embodiment]
18 is a front view showing a configuration of a filament body in an example of a filament lamp according to a fifth embodiment of the present invention, FIG. 19 is a side view of the filament body shown in FIG. 18, and FIG. 20 is a filament shown in FIG. It is an expanded sectional view which shows the connection part of the filament coil and lead in a body.
The filament body 14 includes a filament coil 14b, a power supply lead 14a connected to the other end of the filament coil 14b, and a lead 14c connected to one end of the filament coil 14b.

The lead 14a is formed of a single wire rod, and has a linear lead body 142a extending in the coil axis direction of the filament coil 14b and a direction perpendicular to the lead body 142a (the radial direction of the filament coil 14b). ) And a hook-shaped portion 140a having a radial portion extending.
The hook-shaped portion 140a includes a radial portion 143a that is bent so as to extend in a direction orthogonal to the lead main body portion 142a continuously to the lead main body portion 142a, and a coil of the filament coil 14b that is continuous with the radial direction 143a. A filament connecting portion 141a formed so as to extend in the axial direction, and an L-shaped portion that is continuous with the filament connecting portion 141a and extends in a direction perpendicular to the coil axis direction, and is bent so that the tip end portion extends in the coil axis direction. 144a.
The filament connecting portion 141a has an arcuate curved portion 149a having an outer diameter that matches the inner diameter of the filament coil 14b.
Also, the lead 14c has the same configuration as the lead 14a. In FIG. 18, for convenience, the same components as those of the lead 14a are denoted by the same reference numerals by replacing “a” with “c”. .

In the filament body 14, the other end portion of the filament coil 14b is screwed into the radial direction portion 143a and the L-shaped portion 144a of the flange portion 140a of the lead 14a, whereby the filament connecting portion 141a is connected to the filament coil 14b. The outer peripheral surface of the arc-shaped curved portion 149a is disposed in contact with the inner surface of the filament coil 14b, and the radial portion 143a and the L-shaped portion 144a of the flange-shaped portion 140a are disposed in the filament coil 14b. Between the coil pitches of the coil coil 14b so as to protrude outward in the radial direction, and the contact portion between the outer peripheral surface of the arc-shaped curved portion 149a and the inner peripheral surface of the filament coil 14b is formed by welding, for example. As a result, the lead 14a and the filament coil 14b are connected to each other. There has been achieved.
Similarly, for the lead 14c, the filament connecting portion 141c is disposed in contact with the inside of the filament coil 14b, and the radial portion 143c and the L-shaped portion 144c of the flange-shaped portion 140c are the coils of the filament coil 14b. Between the pitches, the filament coil 14b is sandwiched so as to protrude outward in the radial direction, whereby the connection between the lead 14c and the filament coil 14b is achieved.

  As in the second embodiment, the filament body 14 is formed in a state where the filament connecting portion 141a is positioned in the opening provided at the substantially center of the support member, and the hook-shaped portion 140a in the lead 14a has two locations on the support member 19a. The filament coil 14b is attached in such a manner that the filament coil 14b extends in a direction perpendicular to the support member 19a, and the hook-like portion 140c of the lead 14c is similarly attached to the support member 19b. Thus, the filament body 14 is supported while being positioned with respect to the arc tube 11 (see FIG. 1).

  According to the filament lamp including the filament body 14 configured as described above, substantially the same effect as that of the filament lamp according to the first embodiment can be obtained, and the arc-shaped curved portion 149a in the filament connecting portions 141a and 141c can be obtained. , 149c and the filament coil 14b are welded and joined together so that the filament coil 14b and the leads 14a and 14c are firmly connected.

As mentioned above, although embodiment of the filament lamp of this invention was described, it is not limited to the said embodiment, A various change can be added.
For example, the filament lamp according to the first to fifth embodiments has been described with a configuration in which a plate-like support member is disposed at a position between adjacent filaments. However, the filament coil has a specific support by a lead. If it is connected by a structure, as shown in FIG. 21, it can be set as the structure which does not have a supporting member. In FIG. 21, 25 is an insulating tube.
In the filament lamp having such a configuration, for example, a lead having a configuration as shown in FIGS. 22 to 24 can be used as the lead in each filament body. Specifically, the lead 14a (14c) in the filament body 14 is formed of a single filament material, and a coiled filament coupling portion 141a (141c) extending in the coil axis direction of the filament 14b to be coupled. A radial portion 143a (143c) extending in a direction orthogonal to the coil axis direction of the filament coupling portion 141a (141c) continuously to one end of the filament coupling portion 141a (141c), and the radial direction portion 143a (143c). ) And a linear lead body 142a (142c) extending in the coil axis direction of the filament connecting portion 141a (141c). In this filament body 14, the other end portion of the filament coil 14b is screwed into the radial direction portion 143a of the lead 14a, whereby the filament connecting portion 141a is inserted into the internal space at the other end portion of the filament coil 14b. And the outer peripheral surface of the filament coil 14b is disposed in contact with the inner surface of the filament coil 14b, and the radial portion 143a is sandwiched between the coil pitches of the filament coil 14b so as to protrude outward in the radial direction of the filament coil 14b. Thus, the connection between the lead 14a and the filament coil 14b is achieved.
Similarly, the connection between the lead 14c and the filament coil 14b is achieved for the lead 14c on one end side.
Also in the filament lamp provided with the filament body having such a configuration, a practically sufficient effect similar to the above can be obtained.

In the filament lamp of the present invention, the number of filament bodies is not limited, and can be appropriately changed according to the purpose. If the number of filament bodies is increased, the irradiance distribution on the object to be processed can be controlled more precisely. For example, when performing a diffusion process that requires high-precision temperature control, the number of filament bodies is 5 or more. In particular, when processing a semiconductor wafer having a large diameter of φ300 mm or more, the number is preferably 7 to 9.
Furthermore, the conductive member embedded in the sealing portion in an airtight manner is not limited to a metal foil, but may be a plate-like body, a rod-like body, or the like.

  As described above, the filament lamp of the present invention is configured such that a plurality of filament bodies arranged in the arc tube can be independently fed with each other, and a specific filament support structure is adopted, so that the filament lamp Since it is configured to be able to input a large amount of power to the body, it is extremely useful as a heating light source for light irradiation type heat treatment by configuring a lamp unit composed of a plurality of the filament lamps. Become. Hereinafter, the light irradiation type heat treatment apparatus of the present invention will be described.

<Light irradiation type heat treatment device>
25 is a front sectional view showing an outline of the configuration of an example of the light irradiation type heat treatment apparatus of the present invention, and FIG. 26 is a first lamp unit constituting the light source unit of the light irradiation type heat treatment apparatus shown in FIG. It is a top view which shows the example of an arrangement | sequence of a filament lamp in a 2nd lamp unit.
The light irradiation type heat treatment apparatus 100 includes a chamber 300 in which an internal space is partitioned vertically by a window plate 4 made of, for example, quartz to form a lamp unit accommodation space S1 and a heat treatment space S2.

A first lamp unit in which, for example, ten filament lamps 10 are arranged in parallel at a predetermined interval in the lamp unit housing space S1, with the lamp central axes positioned at the same plane level. 200A and a second lamp unit 200B in which, for example, ten filament lamps 10 are arranged in parallel at a predetermined interval with the lamp central axes positioned at the same plane level, It arrange | positions so that it may mutually oppose in the position located in a line with the direction.
The filament lamps 10 constituting the first lamp unit 200A and the filament lamps 10 constituting the second lamp unit 200B are in a state where the lamp central axes intersect each other.

Above the first lamp unit 200A, there is disposed a reflecting mirror 201 that reflects light irradiated upward from the first lamp unit 200A and the second lamp unit 200B to the workpiece W side. .
The reflecting mirror 201 is formed by coating a base material made of, for example, oxygen-free copper with gold, and the reflection cross section is selected from, for example, a part of a circle, a part of an ellipse, a part of a parabola, or a flat plate shape. Has a shape.

Each filament lamp 10 of the first lamp unit 200 </ b> A is supported by a pair of first fixing bases 650 and 651.
The first fixed bases 650 and 651 are constituted by a conductive base 66 made of a conductive member and a holding base 67 made of an insulating member such as ceramics. The holding base 67 is provided on the inner wall of the chamber 300. The conductive stand 66 is held.
When the number of filament lamps 10 constituting the first lamp unit 200A is n1, and the number of filament bodies included in the filament lamp 10 is m1, the power is supplied to all the filament bodies independently. For this, n1 × m1 pairs of first fixing bases 650 and 651 are required.

Each filament lamp 10 of the second lamp unit 200B is supported by a second fixing base (not shown), and the second fixing base includes a conductive base and a holding base in the same manner as the first fixing base. Has been.
When the number of filament lamps 10 constituting the second lamp unit 200B is n2, and the number of filament bodies of the filament lamp 10 is m2, the power is supplied to all the filaments independently. N2 × m2 sets of a pair of second fixing bases are required.

The chamber 300 is provided with a pair of power supply ports 71 and 72 to which a power supply line from a power supply device of the power supply unit 7 is connected. The number of pairs of the power supply ports 71 and 72 is determined by the filament lamp 10. And the number of filament bodies in each filament lamp 10 are set.
In this embodiment, the power supply port 71 is electrically connected to the conductive base 66 of the first lamp fixing base 650, and the conductive base 66 of the first lamp fixing base 650 is, for example, the filament coil 14b. Is electrically connected to an external lead 18a (see FIG. 1) connected via a lead 14a.
The power supply port 72 is electrically connected to the conductive base 66 of the first lamp fixing base 651. The conductive base 66 of the first lamp fixing base 651 is connected to, for example, the filament coil 14b and the lead 14c. And is electrically connected to the external lead 18d (see FIG. 1).
Thereby, the filament body 14 of one filament lamp 10 in the first lamp unit 200 </ b> A is electrically connected to the power supply device 7 a in the power supply unit 7. In addition, the other filaments 15b and 16b of the filament lamp 10 are similarly connected to the power feeding device from the other pair of power supply ports 71 and 72, respectively.
In addition, the filaments of the other filament lamps 10 constituting the first lamp unit 200A and the filaments of the filament lamps 10 constituting the second lamp unit 200B are also electrically connected to the power feeding device. A connection is made.
By adopting such a configuration, by selectively causing the filaments in each filament body to emit light, or by individually adjusting the magnitude of the power supplied to each filament body, it is possible on the workpiece W to be processed. Irradiance distribution can be set arbitrarily and with high accuracy.

The light irradiation type heat treatment apparatus 100 is provided with a cooling mechanism for cooling each filament lamp 10 when the object to be processed W is heat-treated.
Specifically, the cooling air from the cooling air unit 8 provided outside the chamber 300 is introduced into the lamp unit accommodation space S1 through the outlet 82 of the cooling air supply nozzle 81 provided in the chamber 300. The cooling air is blown onto the filament lamps 10 in the first lamp unit 200A and the second lamp unit 200B, whereby the arc tube 11 in each filament lamp 10 is cooled, and then the cooling air is heated to a high temperature by heat exchange. Is discharged to the outside from a cooling air outlet 83 formed in the chamber 300.

In such a cooling mechanism, since the sealing portions 12a and 12b of each filament lamp 10 have low heat resistance compared to other portions, the outlet 82 of the cooling air supply nozzle 81 is used to seal each filament lamp 10. It is desirable that the sealing portions 12a and 12b of each filament lamp 10 are preferentially cooled so as to face the portions 12a and 12b.
The flow of the cooling air introduced into the lamp unit housing space S1 is such that the cooling air heated to a high temperature by heat exchange does not heat each filament lamp 10 and the reflecting mirror 201 is also cooled at the same time. Is set. Further, in the case where the reflecting mirror 201 is configured to be water cooled by a water cooling mechanism (not shown), the flow of the cooling air may not be set so that the reflecting mirror 201 is also cooled at the same time.

  In the light irradiation type heating device 100, the outlet 82 of the cooling air supply nozzle 81 is also formed at a position near the window plate 4, and the window plate 4 is cooled by the cooling air from the cooling air unit 8. It is supposed to be configured. Accordingly, the temperature of the object to be processed W is affected by the undesired heating action of the object to be processed W by the heat rays that are secondarily emitted from the window plate 4 stored by the radiant heat from the object to be processed W to be heated. Degradation of temperature uniformity in the workpiece W due to redundancy of controllability (for example, overshoot such that the temperature of the workpiece is higher than the set temperature) and temperature variation of the stored window plate 4 itself Alternatively, it is possible to reliably prevent the occurrence of problems such as a decrease in the temperature drop rate of the workpiece W.

In the heat treatment space S <b> 2 in the chamber 300, a treatment table 5 to which the workpiece W is fixed is provided.
For example, when the object to be processed W is a semiconductor wafer, the processing table 5 is made of a refractory metal material such as molybdenum, tungsten, or tantalum, a ceramic material such as silicon carbide (SiC), quartz, or silicon (Si). It is preferable that the ring-shaped annular member is formed of a guard ring structure in which a step portion for supporting the semiconductor wafer is formed on the inner peripheral portion of the circular opening.
Since the processing table 5 itself is also heated to a high temperature by light irradiation, the outer peripheral edge of the semiconductor wafer that faces it is supplementarily radiated and heated, thereby causing heat radiation from the outer peripheral edge of the semiconductor wafer. The temperature drop at the peripheral edge of the semiconductor wafer is compensated.

  On the back side of the object to be processed W installed on the processing table 5, a plurality of temperature measuring units 91 made of, for example, a thermocouple or a radiation thermometer for monitoring the temperature distribution of the object to be processed W are provided. The temperature measuring units 91 are connected to the thermometer 9. Here, the number and arrangement positions of the temperature measuring units 91 are not particularly limited, and can be set according to the dimensions of the workpiece W.

The thermometer 9 calculates the temperature at the measurement point of each temperature measurement unit 91 based on the temperature information monitored by each temperature measurement unit 91 and controls the calculated temperature information via the temperature control unit 92. It has a function of sending to the unit 3.
Based on the temperature information at each measurement point on the workpiece W, the main controller 3 sends a command to the temperature controller 92 so that the temperature on the workpiece W is uniformly distributed at a predetermined temperature. It has the function to do.
The temperature control unit 92 has a function of controlling the magnitude of electric power supplied to the filament coil of each filament lamp from the power supply unit 7 based on a command from the main control unit 3.

  For example, when the temperature information obtained from the temperature control unit 92 indicates that the temperature at a certain measurement point is lower than a predetermined temperature, the main control unit 3 radiates from the filament coil that irradiates the measurement point with light. The temperature control unit 92 sends a command to the temperature control unit 92 so as to increase the amount of power supplied to the filament coil so that the light to be generated increases. The power supplied from the unit 7 to the power supply ports 71 and 72 connected to the filament coil is increased.

  Further, the main control unit 3 sends a command to the cooling air unit 8 when the filament lamp 1 is turned on in the lamp units 200A and 200B, and the cooling air unit 8 receives the arc tube 11 and the reflecting mirror based on this command. 201, cooling air is supplied so that the window plate 4 does not reach a high temperature state.

In the light irradiation type heat treatment apparatus 100, a process gas unit 800 for introducing / exhausting a process gas in accordance with the type of heat treatment into the heat treatment space S2 is connected.
For example, when a thermal oxidation process is performed, a process gas unit 800 for introducing and exhausting oxygen gas and a purge gas (for example, nitrogen gas) for purging the heat treatment space S2 is connected to the heat treatment space S2.
The process gas and purge gas from the process gas unit 800 are introduced into the heat treatment space S2 through the outlet 85 of the gas supply nozzle 84 provided in the chamber 300 and discharged to the outside through the outlet 86.

  In the light irradiation type heat treatment apparatus 100, electric power controlled to an appropriate size is supplied from the power supply unit 7 to each filament of each filament lamp of the first lamp unit 200A and the second lamp unit 200B. By being turned on, the light W emitted from each filament lamp 10 is reflected directly or by the reflecting mirror 201 and is provided in the heat treatment space S2 through the window plate 4 to be processed W. The object to be processed W is heated.

  Thus, according to the light irradiation type heat treatment apparatus 100 configured as described above, each of the first lamp unit 200A and the second lamp unit 200B constituting the light source section emits light from a plurality of filament bodies in the arc tube. By arranging a plurality of filament lamps 10 that are sequentially arranged in the longitudinal direction of the tube and that are independently fed to each filament, the axial direction of the arc tube and the direction perpendicular thereto are configured. Since the light intensity distribution can be adjusted in both directions, the irradiance distribution on the surface of the irradiated object W can be set with high accuracy.

  For example, the irradiance on this specific area can be set only in a narrow specific area whose overall length is shorter than the light emission length of the filament lamp, so it corresponds to each characteristic in this specific area and other areas Irradiance distribution can be set. For example, in the object to be processed W shown in FIG. 26, the temperature of the region (also referred to as region 1) immediately below where the filament lamp 10 </ b> A and the filament lamps 10 </ b> B to 10 </ b> C cross each other 2), or when it is known in advance that the temperature increase in the region 1 is smaller than the temperature increase in the region 2. By increasing the amount of power supplied to the filament coil corresponding to the region 1 among the filament coils included in the region 1, the temperature can be adjusted so that the temperatures of the region 1 and the region 2 become uniform. In FIG. 26, the line segment shown inside each filament lamp indicates the arrangement position of each filament coil. Therefore, the heat treatment can be performed with a uniform temperature distribution over the entire workpiece W.

  In addition, the irradiance distribution on the object to be processed W that is separated from the lamp units 200A and 200B by a predetermined distance can be precisely and arbitrarily set. It is also possible to set asymmetric with respect to the shape of the workpiece W. Therefore, even when the distribution of the degree of local temperature change in the workpiece W is asymmetric with respect to the shape of the workpiece W, the irradiance distribution on the workpiece W is set accordingly. It is possible to heat the workpiece W in a uniform temperature distribution state.

Furthermore, since the filament lamp 10 has a configuration in which the separation distance between the filaments arranged in the arc tube can be made extremely small, the influence of the separation portion between the filaments that do not emit light can be reduced, and the object to be processed Undesirable variation in the illuminance distribution above can be made extremely small.
In addition, since the space for arranging the lamp unit in the height direction of the light irradiation type heat treatment apparatus 100 can be small, the light irradiation type heat treatment apparatus 100 can be downsized.

In particular, the light irradiation type heat treatment apparatus 100 according to the present invention employs the filament lamp 10 according to the present invention in the lamp units 200A and 200B that are the light source sections, and therefore, the following effects can be achieved.
In each filament lamp, the filament connecting portion of the lead is inserted into the inner space of the filament coil and arranged in a contact state, and the hook-shaped portion is sandwiched between the coil pitches so that the filament coil and the lead are connected. By connecting, the displacement of the filament coil with respect to the axial direction and the displacement of the filament coil with respect to the radial direction are regulated. When connecting the filament coil and the lead having a large wire diameter and coil winding diameter Even so, it is possible to reliably connect the leads without increasing the lead wire diameter to match the inner diameter of the filament coil.
Therefore, the filament coil is configured so that high power can be input to the filament coil and each filament coil can be quickly started up to have a desired heat generation state. Since each filament body can be arranged in the arc tube in a state where a sufficiently large interval is secured so that the insulating tube covering the outer periphery of the lead is not melted due to thermal influence, It is possible to reliably prevent a short circuit from occurring between adjacent filament bodies.
In addition, the rate at which the light emitted from the filament coil is blocked by the lead is reduced, and the degree of adverse effects on the irradiance distribution on the surface of the object to be processed can be suppressed. This is useful when the is provided.

  Furthermore, even when a filament lamp is transported or used, even if an impact is applied to the connecting portion of the filament coil and the lead, the filament coil is not likely to fall off the lead and can be stably covered for a long period of time. The heat treatment of the treatment body can be performed.

  Furthermore, the region where the light existing between the filament coils is not radiated in the axial direction of the filament lamp by the filament being connected to the flange-like portion with the flange-like portion being sandwiched between the coil pitches of the filament. Since the (dead zone) is only the length corresponding to the thickness of the support member disposed between the filament coils, the degree of adverse effects on the illuminance distribution on the surface of the object to be processed can be reduced.

Furthermore, the lead in the filament body is supported by a plate-like support member in which a positioning mechanism is formed by an engaged portion including a notched portion with which the hook-shaped portion is engaged. Since the displacement (movement) of the filament coil in the circumferential direction is restricted by being supported by the support member, the filament body can be positioned more reliably.
Accordingly, each filament can be easily and accurately placed at a desired position in the arc tube, and the position of each filament can be prevented from being displaced with time. The performance of the can be reliably maintained.
Even when it is necessary to replace some of the components of the filament lamp due to unforeseen circumstances such as the filament breaking, it is possible to arrange each filament body in the arc tube with high reproducibility and high accuracy. Therefore, for example, the reproducibility of the irradiance distribution on the surface of the object to be processed before and after the replacement of the filament body can be ensured, and an appropriate process can be performed on the object to be processed.

FIG. 1 is an explanatory perspective view showing an outline of a configuration of an example of a filament lamp according to the first embodiment of the present invention. It is explanatory drawing which simplifies and shows the arrangement pattern and structure of a some filament body. It is a front view which shows one structural example of a filament body. It is a front view which shows one structural example of a lead | read | reed. It is an expanded sectional view which shows the connection part of the lead of a filament body, and a filament. It is a perspective view which expands and shows the connection part of a filament body and a supporting member. It is a front view which shows the other structural example of a lead | read | reed. It is a front view which shows the structure of the filament body in the structural example of the filament lamp which concerns on 2nd Embodiment of this invention. It is explanatory drawing which shows the structure of the lead | read | reed in the filament body shown in FIG. 8, Comprising: (A) Front view, (B) Side view. It is an expanded sectional view which shows the connection part of the lead of a filament body, and a filament. It is a perspective view which expands and shows the connection part of a filament body and a supporting member. It is a front view which shows the other structural example of the lead in a filament body. It is a front view which shows the structure of the filament body in the structural example of the filament lamp which concerns on 3rd Embodiment of this invention. It is an expanded sectional view which shows the connection part of the lead | read | reed and filament in the filament body shown in FIG. It is explanatory drawing which shows the preparation methods of the lead in the filament body shown in FIG. It is a figure for demonstrating the structure of the lead in the other structural example of the filament lamp which concerns on 3rd Embodiment of this invention, Comprising: (A) Explanatory drawing of a manufacturing method, (B) A hook-shaped part and a filament connection part structure It is an expanded sectional view which shows a joining state with material. It is an explanatory view showing a manufacturing method of a lead (A) showing composition of a lead which constitutes a filament body in an example of a filament lamp concerning a 4th embodiment of the present invention. It is a front view which shows the structure of the filament body in an example of the filament lamp which concerns on 5th Embodiment of this invention. It is a side view of the filament body shown in FIG. It is an expanded sectional view which shows the connection part of the filament coil and lead in the filament body shown in FIG. It is an explanatory perspective view showing an outline of composition in other examples of a filament lamp of the present invention. It is a front view which shows one structural example of the filament body in the filament lamp shown in FIG. It is a front view which shows the structural example of the lead | read | reed which comprises the filament body shown in FIG. It is an expanded sectional view which shows the connection part of a lead | read | reed and filament in the filament body shown in FIG. It is front sectional drawing which shows the outline of a structure in an example of the light irradiation type heat processing apparatus of this invention. It is a top view which shows the example of an arrangement | sequence of each filament lamp in the 1st lamp unit and 2nd lamp unit which comprise the light source part of the light irradiation type heat processing apparatus shown in FIG. It is front sectional drawing which shows the outline of a structure in an example of the conventional heat processing apparatus. It is a perspective view which shows the example of an arrangement | sequence of the lamp | ramp which comprises the light source part of the heat processing apparatus shown in FIG. It is front sectional drawing which shows the outline of the structure in the other example of the conventional heat processing apparatus. It is an explanatory perspective view showing the outline of the composition in an example of the conventional filament lamp.

Explanation of symbols

3 Main Control Unit 4 Window Plate 5 Processing Table 7 Power Supply Unit 7a First Power Supply Device 7b Second Power Supply Device 7c Third Power Supply Device 71, 72 Pair of Power Supply Ports 650, 651 Pair of First Fixing Base 66 Conductive table 67 Holding table 8 Cooling air unit 800 Process gas unit 81 Cooling air supply nozzle 82 Air outlet 83 Cooling air outlet 84 Gas supply nozzle 85 Air outlet 86 Air outlet 9 Thermometer 91 Temperature measuring unit 92 Temperature control unit 10 Filament lamp 11 Arc tube 12a, 12b Sealing part 13a, 13b, 13c, 13d, 13e, 13f Metal foil 14, 15, 16 Filament body 14a, 15a, 16a Lead 14b, 15b, 16b Filament coil 14c, 15c, 16c Lead 140a, 140c Cage-shaped part 141a, 141c Filament connection part 42a, 142c Lead body portion 143a, 143c Radial direction portion 144a, 144c L-shaped portion 145c Inclined portion 146c U-shaped portion 147a Flat portion 148a Groove portion 149a, 149c Arc-shaped curved portion 17 Anchor 18a, 18b, 18c, 18d, 18e 18f External lead 19a, 19b, 19c, 19d Support member 191, 192, 193, 194, 195, 196 Notch 197 Opening 20 Lead constituent material 21 Filament connection part constituent material 22 Lead body part constituent material 23 Gutter-shaped part constituent material Wp welded portion 25, 25a, 25b, 25c, 25d, 25e, 25f Insulating tube 100 Light irradiation type heat treatment device 200A First lamp unit 200B Second lamp unit 201 Reflector 300 Chamber S1 Lamp unit accommodation space S2 Heat treatment Sky 30 Heat treatment device 31 Chamber 32, 33 Incandescent lamp W Object to be treated WA Specific area WB Peripheral portion 40 Heat treatment device 41 Lamp house 42 First lamp unit 43 Double end lamp 44A A pair of vertical portions 44B Horizontal portion 45 Filament 47 Double end lamp 46 Second lamp unit 48 Support ring 50 Filament lamp 51 Arc tube 52A, 52B Sealing portion 53A, 53B Filament body 54A, 54B Filament 55A, 55B Other end side lead 56A, 56B One end side lead 57A, 57B, 57C, 57D Metal foil 58A, 58B, 58C, 58D External lead 59 Anchor 60A, 60B Insulating tube 61 Insulator 62A, 62B Through hole 63A, 63B Power feeding device

Claims (6)

A plurality of filament bodies each formed by connecting a coiled filament and a lead for supplying power to the filament inside a straight tubular arc tube having sealing portions formed at both ends. In order to extend in the tube axis direction, the filaments are arranged side by side in the tube axis direction, and each lead in each filament body is electrically connected to each of a plurality of conductive members provided in the sealing portion. A filament lamp that is independently fed to each filament,
Each lead has a radial portion extending in a direction orthogonal to the coil axis direction of the filament, and a filament connecting portion extending in the coil axis direction of the filament,
The filament connecting portion is inserted into the inner space at the end of the filament, the outer peripheral surface is disposed in contact with the inner surface of the filament, and the radial portion is sandwiched between the coil pitches of the filament in the radially outward direction. A filament lamp, wherein the filament lamp and the lead are connected to each other so as to protrude and extend.   Each lead has a lead body portion extending in the coil axis direction of the filament, and a hook-shaped portion having a radial portion and a tip portion extending in the lead body portion direction. A plate-like support member is provided in which a positioning mechanism is formed by an engaged portion with which a part of the hook-like portion is engaged. By being supported by this support member, the filament is against the arc tube. The filament lamp according to claim 1, wherein the filament lamp is positioned.   The filament lamp according to claim 1 or 2, wherein the filament connecting portion in the lead is formed by winding a part of a wire material constituting the lead in a coil shape.   The filament connecting portion in the lead is formed by joining a filament connecting portion constituent material different from a lead constituent material having a radial portion to the radial direction portion of the lead constituent material. Item 3. A filament lamp according to Item 2.   The lead is formed by joining a linear lead main body constituent material extending in the coil axial direction of the filament coil and a hook-like constituent material in which the filament connecting portion is integrally formed and having an F-shaped cross-sectional shape in the axial direction. The filament lamp according to claim 2, wherein the filament lamp is formed.   A lamp unit comprising a plurality of filament lamps according to claim 1 arranged in parallel, and the object to be processed is irradiated with light emitted from the lamp unit. A light irradiation type heat treatment apparatus characterized by heating.