JP2008040020A - Layout pattern generator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize a layout pattern generation apparatus capable of preparing a template freely and easily.
A layout pattern generation device according to the present invention generates a plurality of layout patterns having different sizes and shapes from a main GUI 11 to which graphic information described using variables and the number of variables are input, and a template graphic. Layout pattern generation GUIs 13a to 13c to which parameter values and arrangement information to be applied to variables are input, and layout patterns for generating layout pattern generation GUIs 13a to 13c based on the graphic information and the number of variables input by the main GUI 11 A generation GUI creation unit 12 and a layout pattern generation unit 14 that generates layout pattern data 15a to 15c including a plurality of layout patterns based on parameter values and arrangement information are included.
[Selection] Figure 1

Description

  The present invention relates to a layout pattern generation apparatus, and more particularly to a layout pattern generation apparatus used for resist shape evaluation / verification by lithography simulation.

  In order to perform resist shape evaluation / verification by lithography simulation, it is necessary to prepare a large number of similar layout patterns in which the length of the side of the layout pattern serving as a template and the interval between the sides are changed little by little. Various methods and tools for automatically generating such layout patterns have been developed. For example, “Patent Document 1” uses a layout pattern template as shown in FIG. 13 and an analysis condition input GUI (Graphical User Interface) as shown in FIG. The pattern is generated automatically. That is, when the template number of the layout pattern of FIG. 13 is 1, the analysis condition input GUI of FIG. 14 sets how the dimensions of W, L, and S of template number 1 are changed. In the example of FIG. 14, W changes to 1.1, 1.2, 1.3,..., 2.0 and 10 types, and L and S also change to 10 types, respectively. Therefore, in this case, there are 10 × 10 × 10 = 1000 combinations of changes, and this number of layout patterns is automatically generated.

However, in such a conventional layout pattern generation apparatus, it is difficult for a layout pattern creator to freely and easily prepare a desired template and automatically generate a large number of layout patterns in a short time. The important point of the template is how to change its shape and the dimensions of the part. Unless the template can be prepared freely and easily, it is easy to automatically generate a large number of layout patterns. It is hard to say. Therefore, for example, in “Patent Document 1”, a template preparation method is not clearly described, and there is a problem that a layout pattern creator requires enormous effort and time to generate a desired layout pattern. .
JP 2003-203849 A

  The present invention provides a layout pattern generation apparatus capable of preparing a template freely and easily.

  According to one aspect of the present invention, a first input item into which graphic information of a template graphic described using variables is input, and a second input into which the number of variables used in the graphic information is input. An item, a first GUI (Graphical User Interface) having the first and second input items, and a plurality of layout patterns having different sizes and shapes are generated from the template graphic, and applied to the variables. A third input item to which a parameter value is input; a fourth input item to which arrangement information for repeatedly arranging the plurality of layout patterns in the row and column directions; and the third and fourth inputs. The second GUI is created based on the second GUI including an item, the graphic information input in the first GUI, and the number of variables. A layout pattern comprising: a UI creation unit; and a data generation unit configured to generate layout pattern data including the plurality of layout patterns based on the parameter value and the arrangement information input in the second GUI. A generating device is provided.

  According to the present invention, a desired template can be prepared freely and easily, and a large number of layout patterns can be automatically generated in a short time.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a diagram showing a configuration of a GUI in a layout pattern generation apparatus according to an embodiment of the present invention. Here, the layout pattern generation GUI and the part related to its creation are mainly shown.

  The layout pattern generation apparatus according to the embodiment of the present invention includes a layout pattern generation GUI generation unit 12 having a main GUI 11 and a layout pattern generation unit 14 having layout pattern generation GUIs 13a to 13c.

  The layout pattern generation GUI creation unit 12 creates layout pattern generation GUIs 13 a to 13 c based on information input from the main GUI 11. The layout pattern generation unit 14 generates layout pattern data 15a to 15c based on the parameter values input by the layout pattern generation GUIs 13a to 13c, respectively.

FIG. 2 is an image diagram showing an example of the main GUI 11 in the layout pattern generation apparatus according to the embodiment of the present invention.
The main GUI 11 of the layout pattern generation apparatus according to the embodiment of the present invention includes an input item 21 to which the number of variables to be used is input, an input item 22 to which graphic information corresponding to a desired template graphic is input, and layout pattern generation A creation button 23 for instructing creation of the GUIs 13a to 13c is provided.

  In the input item 22, graphic information of a desired template graphic that the layout pattern creator wants to generate is input. In the graphic information, as shown in FIG. 2, one closed graphic is represented by []. That is, the vertex coordinates of the figure are represented by (X coordinate, Y coordinate), and the X coordinate and the Y coordinate are described by relative positions from the previous vertex coordinates.

  For example, if it is desired to move right by 0.1 from the X coordinate of the previous vertex, it is described as +0.1. The first vertex coordinate of one closed figure is a relative position from the origin of the drawing area (lower left of the area), and the last vertex is automatically connected to the first vertex.

  Here, the coordinates are expressed in virtual units. Conversion to a specific unit of length is appropriately performed when the layout pattern data 15a to 15c are actually generated.

  The number of variables used in the graphic information of the input item 22 is input to the input item 21. In the case of FIG. 2, three variables, var1 to var3, can be used in the graphic information.

  The creation button 23 is a button for instructing start of creation of the layout pattern generation GUIs 13 a to 13 c based on the information input in the input items 21 and 22.

  FIG. 3 is an image diagram showing an example of a template figure in the layout pattern generation apparatus according to the embodiment of the present invention. Here, the template figure based on the figure information of FIG. 2 was shown as an example.

  The template figure in the layout pattern generation apparatus according to the embodiment of the present invention has a configuration in which two rectangles 32 and 33 having a length var1 and a width var2 are arranged with their long sides facing each other, as shown in FIG. Yes.

  The rectangle 32 has graphic information by sequentially describing each vertex in the clockwise direction starting from the lower left vertex 302. That is, the vertex 302 is (+0.1, +0.1), the vertex 303 is (+0, + var1), the vertex 304 is (+ var2, +0), and the vertex 305 is (+0, −var1).

  The coordinates of the vertex 302, which is the starting point, are described as relative coordinates from the origin 31 (indicated by “図” in FIG. 3) of this template. Thus, by describing the vertex coordinates of the graphic information as relative coordinates from the previous vertex, it is possible to flexibly describe the shape and size of the graphic freely.

  Similarly, in the rectangle 33, the vertex 306 is (+ var3, +0.1), the vertex 307 is (+0, + var1), the vertex 308 is (+ var2, +0), and the vertex 309 is (+0, −var1). Here, by using the variable var3 as the X coordinate of the vertex 306 which is the start point, the interval between the two rectangles 32 and 33 can be changed as shown in FIG.

  FIG. 4 is an image diagram showing an example of a layout pattern generation GUI in the layout pattern generation apparatus according to the embodiment of the present invention. Here, the layout pattern generation GUI 13a generated by the layout pattern generation GUI generation unit 12 based on the information input by the main GUI 11 shown in FIG. 2 is shown.

  The layout pattern generation GUI 13a in the layout pattern generation apparatus according to the embodiment of the present invention includes three input items 41a to 41c to which parameter values of variables var1 to var3 are input, and an input item 42 to which the order of variables is input. Input items 43 and 44 to which the area width and area height of the layout pattern to be input are input, a selection button 45 for specifying the area arrangement method, an input item 46 to which the number of rows or columns to be input is input, and the layout A generation button 47 for instructing pattern generation is provided.

  Parameter values corresponding to var1 to var3 are input to the input items 41a to 41c, respectively. With this parameter value, a plurality of layout patterns having different sizes and shapes are generated from the template figure.

  For example, when “0.5, 1.0, 1.5” is input as a parameter value to the input item 41a, the variable var1 changes according to these values, and different layout patterns are generated. In the case of FIG. 4, since three types of parameter values are specified for var1, and two types of parameter values are specified for var2 and var3, a total of 3 × 2 × 2 = 12 different layout patterns are generated.

  In the input item 42, an order in which each parameter value is applied to a plurality of variables is input. For example, as shown in FIG. 4, in the case of “var3, var2, var1”, first, var3 changes according to the input parameter value, then var2 changes, and var1 changes.

  More specifically, first, var1 = 0.5 and var2 = 0.1 are fixed, and var3 is changed to 0.3 and 0.4. Next, var2 is changed to 0.2, and var3 is changed again to 0.3 and 0.4. Further, similarly, var1 is also changed, and the changes of var3 and var2 are repeated each time.

  In the input items 43 and 44, the area width and area height of the generated layout pattern are input, respectively. Since the size of the template figure generated by the parameter value changes, the area width and area height input here determine the repetitive pitch when arranging a plurality of layout patterns.

  The selection button 45 and the input item 46 determine an arrangement method when arranging a plurality of generated layout patterns. That is, when the fixed number of rows is selected by the selection button 45, the number of rows of the layout pattern is fixed according to the value of the input item 46, and when the fixed number of columns is selected by the selection button 45, the input item 46 is selected. The number of layout pattern arrangement columns is fixed according to the value of. In the case of FIG. 4, since the fixed number of columns is selected, the layout pattern to be arranged is arranged by repeating three rows with four columns.

  The generation button 47 is a button for instructing the generation start of the layout pattern data 15a based on the parameter values and arrangement information input in the input items 41a to 41c and 42 to 46.

  FIG. 5 is an image diagram showing an example of a layout pattern arrangement generated by the layout pattern generation apparatus according to the embodiment of the present invention. Here, the arrangement of the layout pattern data 15a generated by the layout pattern generation unit 14 is shown based on the parameter values and arrangement information input by the layout pattern generation GUI 13a shown in FIG.

  As shown in FIG. 5, the template pattern shown in FIG. 3 is transformed according to the parameter values shown in FIG. It is arranged in 4 rows.

  As shown in the area numbers 501 to 512 shown in FIG. 5, the layout pattern is first arranged from the lower left in the X direction (the right direction in FIG. 5), and then in the Y direction (the paper surface in FIG. 5). It is arranged in the upward direction.)

  This is because the fixed number of columns of 4 columns is set in the layout pattern generation GUI 13a of FIG.

  () In each area indicates how the layout pattern arranged in that area is deformed by a parameter value applied to a variable. For example, the layout pattern arranged in the region 501 indicates that the variable of graphic information is generated by applying var1 = 0.5, var2 = 0.1, var3 = 0.3, respectively. .

  FIG. 6 is an image diagram showing an example of a layout pattern generated by the layout pattern generation apparatus according to the embodiment of the present invention. Here, an image of a layout pattern generated in the area 501 in FIG. 5 is shown.

  As shown in FIG. 6, the layout pattern generated in the area 501 has an interval of two rectangles having a height of 0.5 and a width of 0.1 in an area having a height of 2.0 and a width of 2.0. It is arranged at 0.1.

FIG. 7 is an image diagram showing another example of the main GUI 11 in the layout pattern generation apparatus according to the embodiment of the present invention.
The components of the main GUI 11 are the same as those in FIG. The difference from FIG. 2 is that the number of variables used in the graphic information is “4” and the template graphic is one closed graphic of H type.

  FIG. 8 is an image diagram showing another example of the template figure in the layout pattern generation apparatus according to the embodiment of the present invention. Here, the template figure based on the figure information of FIG. 7 is shown.

  The H-shaped graphic 82 is described as graphic information by sequentially describing each vertex in the clockwise direction starting from the lower left vertex 802. That is, the vertex 802 is (+0.1, +0.1), the vertex 803 is (+0, + var1), the vertex 804 is (+ var2, +0), the vertex 805 is (+0, −var3), and the vertex 806 is (+ var4, +0) ), Vertex 807 is (+0, + var3), vertex 808 is (+ var2, +0), vertex 809 is (+0, −var1), vertex 810 is (−var2, +0), vertex 811 is (+0, + var3), vertex 812 is (−var4, +0), and the vertex 813 is (+0, −var3).

  The coordinates of the vertex 802 that is the start point are described as relative coordinates from the origin 81 (indicated by “◎” in FIG. 8) of this template.

  FIG. 9 is an image diagram showing another example of the layout pattern generation GUI in the layout pattern generation apparatus according to the embodiment of the present invention. Here, the layout pattern generation GUI 13b generated by the layout pattern generation GUI generation unit 12 based on the information input by the main GUI 11 shown in FIG. 7 is shown.

  Each component of the layout pattern generation GUI 13b is the same as that of the layout pattern generation GUI 13a shown in FIG. The difference from the layout pattern generation GUI 13a is that there are four variables (input items 91a to 91d) according to the number of variables input to the input item 21 of the main GUI 11, and the order of variables in the input item 92. "Var3, var4, var2, var1" is specified, the fixed number of lines is selected by the selection button 95, and "6" is specified as the number of lines by the input item 96. is there.

  Parameter values corresponding to var1 to var4 are input to the input items 91a to 91d, respectively. In the case of FIG. 9, since three types of parameter values are specified for var1, two types for var2 and var3, and three types for var4, a total of 3 × 2 × 2 × 3 = 36 different layout patterns Is generated.

  Since the selection button 95 is selected to fix the number of columns and “6” is designated in the input item 96, the layout pattern to be arranged is repeatedly arranged in six columns with six rows.

  FIG. 10 is an image diagram showing another example of the layout pattern arrangement generated by the layout pattern generation apparatus according to the embodiment of the present invention. Here, the arrangement of the layout pattern data 15b generated by the layout pattern generation unit 14 is shown based on the parameter values and arrangement information input by the layout pattern generation GUI 13b shown in FIG.

  In the layout pattern 15b, as shown in FIG. 10, the template figure shown in FIG. 8 is deformed according to the parameter values shown in FIG. 9 and arranged in 6 rows and 6 columns.

  As shown in the area numbers 101 to 136 shown in FIG. 10, the layout pattern is arranged in the Y direction (upward on the paper in FIG. 10) from the lower left, and then in the X direction (on the paper in FIG. 10). It is arranged in the right direction.)

  This is because the fixed number of lines of 6 lines is set in the layout pattern generation GUI 13b of FIG.

  () In each area indicates how the layout pattern arranged in that area is deformed by a parameter value applied to a variable. For example, the layout pattern arranged in the area 101 is generated by applying var1 = 0.5, var2 = 0.1, var3 = 0.1, var4 = 0.5 to the variables of the graphic information, respectively. It shows that there is.

  FIG. 11 is an image diagram showing another example of the layout pattern generated by the layout pattern generation apparatus according to the embodiment of the present invention. Here, an image of a layout pattern generated in the area 101 in FIG. 10 is shown.

  As shown in FIG. 11, the layout pattern generated in the region 101 has a height of 2.0, a width of 2.0, a height of 0.5, a width of 0.7, and protrusions on both sides. An H-shaped figure having a length of 0.1 and a width of 0.1 is arranged.

  The layout pattern generation GUI 13 c can also be created by describing a desired template figure in the main GUI 11 by the layout pattern creator. In this manner, layout pattern generation GUIs 13a to 13c for inputting parameter values to the variables are created by inputting desired graphic information in the description using the variables in the main GUI 11.

Next, an operation flow of the layout pattern generation apparatus having the above-described configuration will be described.
FIG. 12 is a flowchart showing the operation of the layout pattern generation apparatus according to the embodiment of the present invention. Here, the part mainly related to the creation of the layout pattern generation GUIs 13a to 13c is shown.

  The operation of the layout pattern generation apparatus according to the embodiment of the present invention includes a step (ST121) in which information necessary for creating the layout pattern generation GUIs 13a to 13c is input, and a step (ST122) in which the layout pattern generation GUIs 13a to 13c are created. The step of inputting parameter values necessary for layout pattern generation (ST123), the step of confirming the validity of the input parameter values (ST124), and layout pattern data 15a to 15c are generated based on the parameter values. Step (ST125) is provided.

  In ST121, the graphic information of the template graphic described using the variables and the number of variables used in the graphic information are input to the main GUI 11 of the layout pattern generation GUI creating unit 12.

  In ST122, the layout pattern generation GUI creation unit 12 creates layout pattern generation GUIs 13a to 13c based on the graphic information and the number of variables input in ST121.

  In ST123, parameter values applied to variables used in the graphic information and layout pattern arrangement information to be generated are input to the layout pattern generation GUIs 13a to 13c created in ST122.

  In ST124, the validity of the parameter value input in ST123 is confirmed. Here, it is confirmed whether the vertex of the figure does not protrude from the area set by the layout pattern generation GUIs 13a to 13c, or whether there is an illegal figure such as a twisted figure. A warning message is displayed if it is protruding or contains an illegal figure.

  In ST125, based on the parameter value and arrangement information input in ST123, the layout pattern generation unit 14 generates layout pattern data 15a to 15c.

  According to the above embodiment, a desired template figure can be prepared freely and easily, and a large number of layout patterns can be automatically generated in a short time.

  Moreover, according to the said Example, since graphic information is described by the relative position with the previous vertex, input of graphic information can be performed flexibly and simply.

  Furthermore, according to the above embodiment, since the order of changing the values of the variables in the graphic information can be designated, the layout pattern to be generated can be freely set.

  Furthermore, according to the above embodiment, the width and height of the generation area of each layout pattern and the arrangement method of the generation area (fixed number of rows or fixed number of columns and fixed number thereof) can be specified. Arrangement can be freely set.

The figure which shows the structure of GUI in the layout pattern production | generation apparatus concerning the Example of this invention. FIG. 3 is an image diagram showing an example of a main GUI 11 in the layout pattern generation apparatus according to the embodiment of the present invention. The image figure which shows an example of the template figure in the layout pattern production | generation apparatus concerning the Example of this invention. FIG. 3 is an image diagram showing an example of a layout pattern generation GUI in the layout pattern generation apparatus according to the embodiment of the present invention. FIG. 4 is an image diagram showing an example of a layout pattern arrangement generated by the layout pattern generation apparatus according to the embodiment of the present invention. The image figure which shows an example of the layout pattern produced | generated by the layout pattern production | generation apparatus concerning the Example of this invention. The image figure which shows another example of main GUI11 in the layout pattern production | generation apparatus concerning the Example of this invention. The image figure which shows another example of the template figure in the layout pattern production | generation apparatus concerning the Example of this invention. The image figure which shows another example of the layout pattern generation GUI in the layout pattern generation apparatus concerning the Example of this invention. The image figure which shows another example of the layout pattern arrangement | positioning which the layout pattern generation apparatus concerning the Example of this invention produces | generates. The image figure which shows another example of the layout pattern produced | generated by the layout pattern production | generation apparatus concerning the Example of this invention. The flowchart which shows operation | movement of the layout pattern production | generation apparatus concerning the Example of this invention. The image figure which shows the template of the conventional layout pattern. The image figure which shows the conventional analysis condition input GUI.

Explanation of symbols

11 Main GUI
12 Layout pattern generation GUI creation units 13a to 13c Layout pattern generation GUI
14 Layout pattern generators 15a to 15c Layout pattern data

Claims (5)

A first input item into which graphic information of a template graphic described using a variable is input;
A second input item in which the number of variables used in the graphic information is input;
A first graphical user interface (GUI) comprising the first and second input items;
A third input item in which a parameter value applied to the variable is input to generate a plurality of layout patterns having different sizes and shapes from the template graphic;
A fourth input item to which arrangement information for repeatedly arranging the plurality of layout patterns in the row and column directions is input;
A second GUI comprising the third and fourth input items;
GUI creation means for creating the second GUI based on the graphic information and the number of variables input in the first GUI;
A layout pattern generation apparatus comprising: data generation means for generating layout pattern data composed of the plurality of layout patterns based on the parameter value and the arrangement information input by the second GUI.   The graphic information is expressed by sequentially specifying the vertices of a closed graphic surrounded by a plurality of line segments along each side, and the coordinates of the vertex are described by a relative position from the previous vertex. The layout pattern generation apparatus according to claim 1, wherein:   The arrangement information changes when the variable is changed by each parameter value input by the second GUI when an integer value of 2 or more is input as the number of the variables by the first GUI. The layout pattern generation apparatus according to claim 1, wherein the layout pattern generation apparatus has an order of variables to be executed.   The arrangement information includes information on the width and height of the layout pattern generation region for determining a repetition pitch in the row and column directions of the layout pattern data generated by the data generation means. The layout pattern generation apparatus according to claim 1.   The layout pattern generation apparatus according to claim 1, wherein the arrangement information includes the number of repetitions in the row or column direction of the layout pattern data generated by the data generation unit.

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