JP2007285945A

JP2007285945A - Infrared microscope

Info

Publication number: JP2007285945A
Application number: JP2006115097A
Authority: JP
Inventors: Yoshiaki Soga; 順顕曽我; Jun Koshobu; 純小勝負
Original assignee: Jasco Corp
Current assignee: Jasco Corp
Priority date: 2006-04-19
Filing date: 2006-04-19
Publication date: 2007-11-01
Anticipated expiration: 2026-04-19
Also published as: JP4713391B2

Abstract

【課題】簡単な構成で、試料像とアパーチャ像を同時に観察できる赤外顕微鏡を提供する。
【解決手段】試料測定部位に赤外光を照射する赤外光照射手段１２と、試料からの光を集光する顕微手段１４と、試料測定部位以外からの光を遮断するアパーチャ１６と、アパーチャ１６を介して試料からの赤外光を検出する赤外光検出手段１８と、アパーチャ１６を介して試料に可視光を照射し、試料上にアパーチャ像を投影するアパーチャ照射用光源２０と、試料測定部位近傍に可視光を照射する試料照明用光源２２と、試料からの可視光を検出し、アパーチャ像が投影された試料像を観察する試料画像観察手段２６と、顕微手段１４とアパーチャ１６との間の光路上に設置され、試料からの可視光を試料画像観察手段２６へ、試料からの赤外光をアパーチャ１６へ導光する観測用ビームスプリッタ２４と、を備えた赤外顕微鏡。
【選択図】図１An infrared microscope capable of simultaneously observing a sample image and an aperture image with a simple configuration.
An infrared light irradiation means for irradiating a sample measurement site with infrared light, a microscope for collecting light from the sample, an aperture for blocking light from other than the sample measurement site, and an aperture Infrared light detecting means 18 for detecting infrared light from the sample through 16, an aperture irradiation light source 20 for irradiating the sample with visible light through the aperture 16 and projecting an aperture image on the sample, and the sample A sample illumination light source 22 that irradiates visible light in the vicinity of the measurement site; a sample image observation means 26 that detects visible light from the sample and observes the sample image on which the aperture image is projected; a microscope means 14 and an aperture 16; And an observation beam splitter 24 that guides visible light from the sample to the sample image observation means 26 and guides infrared light from the sample to the aperture 16.
[Selection] Figure 1

Description

本発明は、赤外顕微鏡、特にその測定部位観察機構の改良に関する。 The present invention relates to an infrared microscope, and more particularly to an improvement of a measurement site observation mechanism.

赤外顕微鏡は、例えば固体表面に付着した有機物等の分子構造等を調べる目的で使用される。つまり、試料の特定の微小部位に赤外光を照射し、試料からの反射もしくは透過スペクトルを顕微手段を介して測定することで分析を行っている。
測定範囲の制限は、試料からの反射光／透過光を集光する対物鏡の結像位置にアパーチャを配置し、測定範囲以外からの光を遮断することで行う。しかし、アパーチャを設けることで、試料を観察するための視野も同様に制限される。そのため、試料上の特定の微小部位を設定するのが困難であるという問題があった。 The infrared microscope is used for the purpose of examining the molecular structure of an organic substance or the like attached to a solid surface, for example. That is, the analysis is performed by irradiating a specific minute part of the sample with infrared light and measuring the reflection or transmission spectrum from the sample through a microscopic means.
The measurement range is limited by disposing the aperture at the imaging position of the objective mirror that collects the reflected / transmitted light from the sample and blocking light from outside the measurement range. However, by providing the aperture, the field of view for observing the sample is similarly limited. Therefore, there is a problem that it is difficult to set a specific minute part on the sample.

この問題を回避するため、特許文献１には試料像光をアパーチャ通過前に採取し、採取した試料像光とアパーチャ像とを光学的に合成するといった技術が記載されている。具体的にはビームスプリッタをアパーチャと顕微手段との間に設置し、このビームスプリッタにより試料像光を取り出す。さらに、アパーチャの後段（対物鏡とは反対側）にアパーチャ照射用の光源が別途設置され、この光源から出射した光はアパーチャを通過した後、先のビームスプリッタにより反射される。ビームスプリッタにより反射された光は試料に向わず、別途設置した平面鏡に向かい、そこにアパーチャ像を形成する。この平面鏡にて反射されたアパーチャ像光は再度ビームスプリッタに戻り、試料像光とアパーチャ像光とが光学的に合成される。この合成像を観察することで試料の広い領域の像とアパーチャの像とを同時に観察することができる。
実開平５−９０３５０号公報 In order to avoid this problem, Patent Document 1 describes a technique in which sample image light is collected before passing through the aperture, and the collected sample image light and aperture image are optically combined. Specifically, a beam splitter is installed between the aperture and the microscopic means, and the sample image light is taken out by this beam splitter. Further, a light source for aperture irradiation is separately installed at the subsequent stage of the aperture (on the side opposite to the objective mirror), and the light emitted from this light source passes through the aperture and is reflected by the previous beam splitter. The light reflected by the beam splitter is not directed to the sample, but is directed to a separately installed plane mirror to form an aperture image there. The aperture image light reflected by the plane mirror returns to the beam splitter again, and the sample image light and the aperture image light are optically combined. By observing this composite image, an image of a wide area of the sample and an image of the aperture can be observed simultaneously.
Japanese Utility Model Publication No. 5-90350

しかし、特許文献１に記載された方法では、アパーチャ像と試料光像とを光学的に合成するための光学素子、例えば上で述べた例での平面鏡、が余分に必要となり、構造が複雑になるという問題があった。また、アパーチャ像光が試料像光と光学的に合成しているため、アパーチャ像が重ね合わされた部分において、試料像がやや不鮮明になるという問題もあった。
本発明は上記課題に鑑みなされたものであり、その目的は、簡単な構成で、試料像とアパーチャ像を同時に観察することが可能な赤外顕微鏡を提供することにある。 However, the method described in Patent Document 1 requires an extra optical element for optically combining the aperture image and the sample light image, for example, the plane mirror in the above-described example, and the structure is complicated. There was a problem of becoming. Further, since the aperture image light is optically combined with the sample image light, there is also a problem that the sample image becomes slightly unclear in the portion where the aperture images are superimposed.
The present invention has been made in view of the above problems, and an object thereof is to provide an infrared microscope capable of simultaneously observing a sample image and an aperture image with a simple configuration.

上記目的を達成するため、本発明にかかる赤外顕微鏡は、試料の測定部位に赤外光を照射する赤外光照射手段と、前記試料からの透過光もしくは反射光を集光する顕微手段と、前記顕微手段にて集光された赤外光のうち測定部位以外からの光を遮断するアパーチャと、前記アパーチャを介して前記試料の測定部位からの赤外透過光もしくは赤外反射光を検出する赤外光検出手段と、前記アパーチャ及び顕微手段を介して試料に可視光を照射し、試料上にアパーチャ像を投影するアパーチャ照射用光源と、前記試料の測定部位近傍に可視光を照射する試料照明用光源と、前記試料からの可視反射光および／または可視透過光を前記顕微手段を介して観察し、前記試料照明用光源により照明された試料像およびアパーチャ照射用光源からの照明により試料上に投影されたアパーチャ像を観察する試料画像観察手段と、前記顕微手段と前記アパーチャとの間の光路上に設置され、試料からの可視光を前記試料画像観察手段へ、前記試料からの赤外光を前記アパーチャへ導光する観測用ビームスプリッタと、を備えたことを特徴とする。 In order to achieve the above object, an infrared microscope according to the present invention comprises an infrared light irradiating means for irradiating a measurement region of a sample with infrared light, and a microscope means for condensing transmitted light or reflected light from the sample. An aperture that blocks light from other than the measurement site out of the infrared light collected by the microscopic means, and infrared transmitted light or infrared reflected light from the measurement site of the sample is detected via the aperture Irradiates the sample with visible light through the infrared light detection means, the aperture and the microscope means, projects an aperture image onto the sample, and irradiates the sample with a visible light near the measurement site. A sample illumination light source and visible reflected light and / or visible transmitted light from the sample are observed through the microscopic means, and illumination from the sample image and aperture illumination light source illuminated by the sample illumination light source A sample image observing means for observing the aperture image projected on the sample; and an optical path between the microscope means and the aperture; and visible light from the sample from the sample to the sample image observing means. And an observation beam splitter for guiding the infrared light to the aperture.

上記の赤外顕微鏡において、前記観察用ビームスプリッタは赤外光を反射し、可視光を反射光と透過光の二光束に分離するものであり、前記観察用ビームスプリッタは、前記アパーチャ照射用光源からの可視光を試料へ、試料からの可視光を前記試料画像観察手段へ、前記試料からの赤外光を前記アパーチャへ導光することが好適である。 In the above infrared microscope, the observation beam splitter reflects infrared light and separates visible light into two beams of reflected light and transmitted light, and the observation beam splitter is the light source for aperture irradiation. It is preferable to guide the visible light from the sample to the sample, the visible light from the sample to the sample image observation means, and the infrared light from the sample to the aperture.

上記の赤外顕微鏡において、前記赤外光照射手段および前記試料照明用光源と試料との間の光路上に設置された照明用ビームスプリッタを備え、前記照射用ビームスプリッタは赤外光を反射し、可視光を透過するもの、もしくは赤外光を透過し、可視光を反射するものであって、前記照明用ビームスプリッタにより、前記赤外光照射手段からの赤外光および前記試料照明用光源からの可視光を、試料へ向う光路上に導光することが好適である。
上記の赤外顕微鏡において、前記アパーチャと前記アパーチャ照射用光源との間の光路上に設置されたアパーチャ照射用ビームスプリッタを備え、前記アパーチャ照射用ビームスプリッタは赤外光を反射し、可視光を透過するもの、もしくは赤外光を透過し、可視光を反射するものであって、前アパーチャ照射用ビームスプリッタによって、前記アパーチャを通過した試料からの赤外光を前記赤外光検出手段に導光し、前記アパーチャ照射用光源からの可視光を前記アパーチャへと導光することが好適である。 The infrared microscope includes an illumination beam splitter installed on an optical path between the infrared light irradiation unit and the sample illumination light source and the sample, and the irradiation beam splitter reflects infrared light. , One that transmits visible light, or one that transmits infrared light and reflects visible light, the infrared beam from the infrared light irradiation means and the light source for sample illumination by the illumination beam splitter It is preferable to guide the visible light from the light path to the sample.
In the above infrared microscope, an aperture irradiation beam splitter is provided on an optical path between the aperture and the aperture irradiation light source, the aperture irradiation beam splitter reflects infrared light, and transmits visible light. Transmits light or transmits infrared light and reflects visible light, and the infrared light from the sample that has passed through the aperture is guided to the infrared light detection means by a beam splitter for front aperture irradiation. It is preferable that the visible light from the light source for aperture irradiation is guided to the aperture.

上記の赤外顕微鏡において、前記試料画像観察手段は画像検出器で構成されており、前記試料を載置するステージと、前記顕微手段と前記ステージとの距離を変更する駆動手段と、前記画像検出器で構成された試料画像観察手段にて観察された試料像及びアパーチャ像による情報に基き、前記駆動手段を制御して焦点合わせを行なう制御手段と、を備えることが好適である。 In the above infrared microscope, the sample image observation means includes an image detector, a stage on which the sample is placed, a driving means for changing a distance between the microscope means and the stage, and the image detection And a control means for controlling the driving means to perform focusing based on information from the sample image and the aperture image observed by the sample image observing means constituted by a vessel.

本発明にかかる赤外顕微鏡によれば、アパーチャ及び顕微手段を介して試料に可視光を照射し、試料上にアパーチャ像を投影するアパーチャ照射用光源を備え、アパーチャ像が実際に投影された試料像を観察するといった構成であるため、装置構成が簡単になる。さらに、顕微手段とアパーチャとの間の光路上に設置され、試料からの可視光を前記試料画像観察手段へ導光する観測用ビームスプリッタを備えているため、赤外測定時と可視光観察時で光路を切換える必要なく、アパーチャによって制限されない広い視野での試料観察が可能となり、測定部位の設定が容易である。 According to the infrared microscope of the present invention, the sample is provided with an aperture irradiation light source that irradiates the sample with visible light through the aperture and the microscopic means, and projects the aperture image on the sample, and the aperture image is actually projected Since the configuration is such that an image is observed, the device configuration is simplified. Furthermore, since it is provided on the optical path between the microscopic means and the aperture and has an observation beam splitter that guides visible light from the sample to the sample image observation means, it is suitable for infrared measurement and visible light observation. Therefore, it is possible to observe the sample with a wide field of view that is not limited by the aperture without switching the optical path, and the measurement site can be easily set.

本発明にかかる赤外顕微鏡によれば、観察用ビームスプリッタは赤外光を反射し、可視光を反射光と透過光の二光束に分離するものであるため、顕微手段によって採取した試料からの赤外光を効率よく、赤外光検出手段へ導くことができる。
本発明にかかる赤外顕微鏡によれば、赤外光照射手段および試料照明用光源と試料との間の光路上に設置された照明用ビームスプリッタを備えているため、赤外光での測定時と可視光での観察時とで光路を機械的に切換える必要がなく、装置構成がコンパクトになる。また、赤外測定と可視観察とを同時に測定、もしくは短時間で測定と観察の切換えを行うことも可能となる。
本発明にかかる赤外顕微鏡によれば、アパーチャとアパーチャ照射用光源との間の光路上に設置されたアパーチャ照射用ビームスプリッタを備えているため、赤外光での測定時と、可視光によるアパーチャ像及び試料像の観察時とで光路を切換える必要がなく、装置構成がコンパクトになる。また、赤外測定と可視観察とを同時に測定、もしくは短時間で測定と観察の切換えを行うことも可能となる。 According to the infrared microscope of the present invention, the observation beam splitter reflects infrared light and separates visible light into two beams of reflected light and transmitted light. Infrared light can be efficiently guided to the infrared light detection means.
According to the infrared microscope of the present invention, since the infrared beam irradiation means and the beam splitter for illumination installed on the optical path between the sample illumination light source and the sample are provided, when measuring with infrared light Therefore, it is not necessary to mechanically switch the optical path between observation with visible light and the apparatus configuration becomes compact. In addition, infrared measurement and visible observation can be measured simultaneously, or measurement and observation can be switched in a short time.
The infrared microscope according to the present invention includes the aperture irradiation beam splitter installed on the optical path between the aperture and the aperture irradiation light source. There is no need to switch the optical path between the observation of the aperture image and the sample image, and the apparatus configuration becomes compact. In addition, infrared measurement and visible observation can be measured simultaneously, or measurement and observation can be switched in a short time.

本発明にかかる赤外顕微鏡によれば、試料を載置するステージと、顕微手段とステージとの距離を変更する駆動手段と、試料画像観察手段にて観察された試料像及びアパーチャ像による情報に基き、駆動手段を制御して焦点位置を合わせる制御手段と、を備えているため、精度のよい焦点合わせを行なうことができる。 According to the infrared microscope of the present invention, the information on the sample image and the aperture image observed by the stage on which the sample is placed, the driving means for changing the distance between the microscope means and the stage, and the sample image observing means. Therefore, the control means for adjusting the focal position by controlling the driving means is provided, so that accurate focusing can be performed.

以下に図面を参照して本発明の好適な実施形態について説明する。
＜透過測定＞
図１は、本発明の実施形態にかかる赤外顕微鏡の概略構成図であり、透過測定における光路を示している。図１の赤外顕微鏡１０は、赤外スペクトル測定機構として、赤外光照射手段１２と、顕微手段（対物鏡１４）と、アパーチャ１６と、赤外光検出手段１８と、を備える。赤外光照射手段１２からの赤外光は試料の測定部位に照射され、試料からの透過光は対物鏡１４によって集光される。アパーチャ１６は、試料測定部位の対物鏡１４による略結像位置に配置され、対物鏡１４にて集光された赤外光のうち測定部位以外からの光を遮断する。赤外光検出手段１８はアパーチャ１６を介して試料の測定部位からの赤外透過光を検出する。 Preferred embodiments of the present invention will be described below with reference to the drawings.
<Transmission measurement>
FIG. 1 is a schematic configuration diagram of an infrared microscope according to an embodiment of the present invention, and shows an optical path in transmission measurement. The infrared microscope 10 of FIG. 1 includes an infrared light irradiation means 12, a microscope means (objective mirror 14), an aperture 16, and an infrared light detection means 18 as an infrared spectrum measurement mechanism. Infrared light from the infrared light irradiating means 12 is applied to the measurement site of the sample, and transmitted light from the sample is collected by the objective mirror 14. The aperture 16 is disposed at a substantially image forming position of the sample measurement site by the objective mirror 14, and blocks light from other than the measurement site out of the infrared light collected by the objective mirror 14. The infrared light detection means 18 detects the infrared transmitted light from the measurement site of the sample through the aperture 16.

さらに、赤外顕微鏡１０は、試料像観察機構として、アパーチャ照射用光源２０と、試料照明用光源２２と、観察用ビームスプリッタ２４と、試料画像観察手段２６と、を備える。アパーチャ１６は対物鏡１４とアパーチャ照射用光源２０との間に配置されており、アパーチャ照射用光源２０からの可視光はアパーチャ１６、観察用ビームスプリッタ２４、対物鏡１４を介して試料面上に照射される。試料照明用光源２２は試料像を観察するため、試料の測定部位近傍に可視光を照射する。観測用ビームスプリッタ２４は、対物鏡１４とアパーチャ１６との間の光路上に設置され、試料からの可視光を試料画像観察手段２６へ、試料からの赤外光を前記アパーチャ１６へと導光する。試料画像観察手段２６では、試料からの可視光を対物鏡１４を介して検出し、試料照明用光源２２により照明された試料面と、アパーチャ照射用光源２０からの照明により試料面上に投影されたアパーチャ像とを観察する。 Further, the infrared microscope 10 includes an aperture irradiation light source 20, a sample illumination light source 22, an observation beam splitter 24, and a sample image observation unit 26 as a sample image observation mechanism. The aperture 16 is disposed between the objective mirror 14 and the aperture irradiation light source 20, and the visible light from the aperture irradiation light source 20 passes on the sample surface via the aperture 16, the observation beam splitter 24, and the objective mirror 14. Irradiated. In order to observe the sample image, the sample illumination light source 22 irradiates visible light near the measurement site of the sample. The observation beam splitter 24 is installed on an optical path between the objective mirror 14 and the aperture 16, and guides visible light from the sample to the sample image observation means 26 and infrared light from the sample to the aperture 16. To do. In the sample image observation means 26, visible light from the sample is detected via the objective mirror 14, and is projected onto the sample surface by the sample surface illuminated by the sample illumination light source 22 and illumination from the aperture illumination light source 20. Observe the aperture image.

本実施形態の赤外顕微鏡１０では、対物鏡１４とアパーチャ１６との間の光路に設置された観察用ビームスプリッタ２４により、アパーチャ像が投影された試料面像を観察する。このため、アパーチャによる視野の制限なく、全視野の試料像を観察することができ、測定部位の設定が容易となる。また、観察用ビームスプリッタ２４により、試料からの赤外光、可視光をそれぞれ赤外光検出手段１８、試料画像観察手段２６へと振り分けているため、赤外光による測定時と可視光による観察時とで光路を機械的に切換える必要がない。さらに、アパーチャ照射用光源２０を別途設け、この光源２０からの可視光をアパーチャ１６及び対物鏡１４を介して試料面に照射し、試料面上に実際にアパーチャ像を結像している。この結果、アパーチャ像と試料像とを光学的に合成する場合に比べ、必要とする光学素子が少なくて済み、装置構成も簡単になる。さらに、アパーチャ像光が試料像光と光学的に合成している場合に比べ、アパーチャ像が重ね合わされた部分において、試料像も鮮明に観察できる。 In the infrared microscope 10 of the present embodiment, the sample surface image on which the aperture image is projected is observed by the observation beam splitter 24 installed in the optical path between the objective mirror 14 and the aperture 16. For this reason, it is possible to observe the sample image of the entire field of view without restriction of the field of view by the aperture, and the measurement site can be easily set. In addition, since the observation beam splitter 24 distributes infrared light and visible light from the sample to the infrared light detection means 18 and the sample image observation means 26, respectively, measurement using infrared light and observation using visible light are performed. There is no need to switch the optical path mechanically. Further, a light source 20 for aperture irradiation is separately provided, and the sample surface is irradiated with visible light from the light source 20 via the aperture 16 and the objective mirror 14, and an aperture image is actually formed on the sample surface. As a result, less optical elements are required and the apparatus configuration is simplified compared to the case where the aperture image and the sample image are optically combined. Furthermore, compared to the case where the aperture image light is optically combined with the sample image light, the sample image can be clearly observed in the portion where the aperture image is superimposed.

以上が本実施形態の概略構成であり、以下に各部の詳細な説明を行なう。赤外光照射手段１２は、赤外光源２８と、干渉計等で構成された分光器３０とを備える。なお、ここでは分光器を光源側に配置した例を示したが、もちろん検出器側に配置した構成でもかまわない。赤外光照射手段１２からの赤外光は、照射用ビームスプリッタ３２により反射され、カセグレン鏡等で構成された集光鏡３４によって試料の測定部位に集光される。 The above is the schematic configuration of the present embodiment, and a detailed description of each part will be given below. The infrared light irradiation means 12 includes an infrared light source 28 and a spectroscope 30 configured by an interferometer or the like. Here, an example in which the spectroscope is arranged on the light source side is shown, but a configuration arranged on the detector side may of course be used. Infrared light from the infrared light irradiating means 12 is reflected by the irradiation beam splitter 32 and is condensed on the measurement site of the sample by a condensing mirror 34 composed of a Cassegrain mirror or the like.

試料からの透過赤外光は対物鏡１４（顕微手段）によって集光される。対物鏡１４はカセグレン鏡等で構成される。対物鏡１４にて集光された赤外透過光は、観察用ビームスプリッタ２４により反射されて、アパーチャ１６へと送られる。アパーチャ１６は対物鏡１４の結像位置に配置されており、測定部位以外からの透過赤外光を遮断する。アパーチャ１６を通過した赤外光はアパーチャ照射用ビームスプリッタ３６によって反射され、集光鏡３８で集光され、赤外光検出手段１８にて検出される。赤外光検出手段１８で検出した信号は、コンピュータ等で構成されたデータ処理手段４０へと送られ、所定の処理等が施される。 The transmitted infrared light from the sample is collected by the objective mirror 14 (microscopic means). The objective mirror 14 is composed of a Cassegrain mirror or the like. The infrared transmitted light collected by the objective mirror 14 is reflected by the observation beam splitter 24 and sent to the aperture 16. The aperture 16 is disposed at the imaging position of the objective mirror 14 and blocks transmitted infrared light from other than the measurement site. The infrared light that has passed through the aperture 16 is reflected by the aperture irradiation beam splitter 36, condensed by the condenser mirror 38, and detected by the infrared light detection means 18. The signal detected by the infrared light detection means 18 is sent to a data processing means 40 constituted by a computer or the like, and subjected to predetermined processing.

試料照明用光源２２は通常の可視光源によって構成される。試料照明用光源２２からの可視光は、照明用ビームスプリッタ３２を透過し、集光鏡３４によって試料の測定部位近傍に照射される。試料を透過した可視光は対物鏡１４によって集光され、観察用ビームスプリッタ２４を透過し、集光レンズ４２を介して試料画像観察手段２６によって検出される。試料画像観察手段２６は二次元画像可視ＣＣＤ検出器等で構成される。試料画像観察手段２６にて検出された試料面の画像データはデータ処理手段４０へと送られ、各種処理が行われる。なお、ここでは試料画像観察手段２６として、可視画像検出器を用いた例を示したが、ファインダ等で目視観察する構成でもよい。 The sample illumination light source 22 is constituted by a normal visible light source. Visible light from the sample illumination light source 22 passes through the illumination beam splitter 32, and is irradiated near the measurement site of the sample by the condenser mirror 34. Visible light that has passed through the sample is collected by the objective mirror 14, passes through the observation beam splitter 24, and is detected by the sample image observation means 26 via the condenser lens 42. The sample image observation means 26 is constituted by a two-dimensional image visible CCD detector or the like. The image data of the sample surface detected by the sample image observation unit 26 is sent to the data processing unit 40, and various processes are performed. Here, an example in which a visible image detector is used as the sample image observation means 26 is shown, but a configuration in which visual observation is performed with a finder or the like may be used.

アパーチャ照射用光源２０は通常の可視光源によって構成される。なお、試料面上にアパーチャ像が鮮明に投影されるように、アパーチャ照射用光源２０と試料照明用光源２２の光の色を異なったものにすることが好適である。アパーチャ照射用光源２０からの可視光は集光レンズ４４、アパーチャ照射用ビームスプリッタ３６を透過してアパーチャ１６へ向う。アパーチャ１６を通過した可視光は対物鏡１４によって試料面上に集光され、アパーチャ照射用光源２０からの光によるアパーチャ像が試料面上に投影されることになる。このアパーチャ像光は試料面で反射され、再び対物鏡１４により集光される。そして、観察用ビームスプリッタ２４を透過して、試料画像観察手段２６にて、試料を透過した試料照明用光源２２からの可視光と共に検出される。よって、試料画像観察手段２６では、図２に示すようなアパーチャ像が投影された試料像を観察することとなる。なお、アパーチャ照射用光源２０を消灯すれば、通常の試料面像の観察もできる。 The aperture irradiation light source 20 is formed of a normal visible light source. In addition, it is preferable that the light colors of the aperture irradiation light source 20 and the sample illumination light source 22 are different so that the aperture image is clearly projected on the sample surface. Visible light from the aperture irradiation light source 20 passes through the condenser lens 44 and the aperture irradiation beam splitter 36 and travels toward the aperture 16. Visible light that has passed through the aperture 16 is condensed on the sample surface by the objective mirror 14, and an aperture image by light from the aperture irradiation light source 20 is projected onto the sample surface. The aperture image light is reflected by the sample surface and is collected again by the objective mirror 14. Then, the light is transmitted through the observation beam splitter 24 and detected by the sample image observation means 26 together with the visible light from the sample illumination light source 22 that has passed through the sample. Therefore, the sample image observation means 26 observes the sample image on which the aperture image as shown in FIG. 2 is projected. If the aperture illumination light source 20 is turned off, a normal sample surface image can be observed.

観察用ビームスプリッタ２４は対物鏡１４とアパーチャ１６との間の光路上に設置される。観察用ビームスプリッタ２４は、アパーチャ照射用光源２０からアパーチャ１６を通過してきた可視光を反射して試料へ導き、逆に試料からの可視光（アパーチャ像光及び試料像光）を透過して試料画像観察手段２６へ導いている。よって、観察用ビームスプリッタ２４は可視光を反射光と透過光の二光束に一定の割合（例えば、波長４００ｎｍ〜８００ｎｍでの反射率と透過率の比（反射率／透過率）が０．１〜１０）で分離するハーフミラーとして機能する必要がある。しかし、試料からの赤外光はアパーチャ１６方向へのみ導ければよいため、赤外光に対しては反射率の高い反射鏡（例えば、波長１０００ｎｍ〜２５００ｎｍでの反射率が９５％以上）として機能することが望ましい。赤外光に対しては反射鏡として機能することで、効率良く試料からの赤外光を赤外光検出手段１８に送ることができる。以上のことから、観察用ビームスプリッタ２４は、赤外光を反射して、可視光の一部を透過、一部を反射するものであることが好適である。このようなビームスプリッタとしては、例えば、ガラス基板上にクロムと金を蒸着したものを用いればよい。なお、このようなビームスプリッタは、照明用ビームスプリッタ３２、アパーチャ照射用ビームスプリッタ３６として使用してもよい。 The observation beam splitter 24 is installed on the optical path between the objective mirror 14 and the aperture 16. The observation beam splitter 24 reflects the visible light that has passed through the aperture 16 from the aperture irradiation light source 20 and guides it to the sample, and conversely transmits the visible light (aperture image light and sample image light) from the sample. It leads to the image observation means 26. Therefore, the observation beam splitter 24 has a constant ratio of visible light to the two light fluxes of reflected light and transmitted light (for example, the ratio of reflectance to transmittance (reflectance / transmittance) at a wavelength of 400 nm to 800 nm is 0.1). 10) to function as a half mirror. However, since the infrared light from the sample only needs to be guided in the direction of the aperture 16, the reflecting mirror has a high reflectance with respect to the infrared light (for example, the reflectance at a wavelength of 1000 nm to 2500 nm is 95% or more). It is desirable to function. By functioning as a reflecting mirror for infrared light, infrared light from the sample can be efficiently sent to the infrared light detection means 18. From the above, it is preferable that the observation beam splitter 24 reflects infrared light, transmits part of visible light, and reflects part of it. As such a beam splitter, for example, a material obtained by evaporating chromium and gold on a glass substrate may be used. Such a beam splitter may be used as the illumination beam splitter 32 and the aperture irradiation beam splitter 36.

照射用ビームスプリッタ３２は赤外光照射手段１２と試料との間の光路上、かつ試料照明用光源２２と試料との間の光路上、に設置されている。照射用ビームスプリッタ３２は赤外光を反射し、可視光を透過するもの、いわゆるホットミラー等を用いればよい。照明用ビームスプリッタ３２により、赤外光照射手段１２からの赤外光および試料照明用光源２２からの可視光を、試料へ向う光路上に導光する。このため、赤外測定時と試料像観察時で光路を機械的に切換える必要がなく、装置構成が簡単になる。また、赤外測定と可視観察とを同時に行なう、もしくは短時間で測定と観察の切換えを行うことも可能となる。
なお、ここでは照明用ビームスプリッタ３２として、赤外光を反射、可視光を透過するものを用いたが、逆に赤外光を透過、可視光を反射するもの、いわゆるコールドミラー等を用いてもよい。この場合、赤外光照射手段１２と試料照明用光源２２との配置関係は逆になる。 The irradiation beam splitter 32 is installed on the optical path between the infrared light irradiation means 12 and the sample and on the optical path between the sample illumination light source 22 and the sample. The irradiation beam splitter 32 may use a so-called hot mirror or the like that reflects infrared light and transmits visible light. The illumination beam splitter 32 guides the infrared light from the infrared light irradiation means 12 and the visible light from the sample illumination light source 22 onto the optical path toward the sample. For this reason, it is not necessary to mechanically switch the optical path between the infrared measurement and the sample image observation, and the apparatus configuration is simplified. Further, infrared measurement and visible observation can be performed simultaneously, or switching between measurement and observation can be performed in a short time.
Here, as the beam splitter 32 for illumination, a beam that reflects infrared light and transmits visible light is used. Conversely, a beam that transmits infrared light and reflects visible light, a so-called cold mirror or the like is used. Also good. In this case, the arrangement relationship between the infrared light irradiation means 12 and the sample illumination light source 22 is reversed.

アパーチャ照射用ビームスプリッタ３６は、アパーチャ照射用光源２０とアパーチャ１６との間の光路上に設置される。アパーチャ照射用ビームスプリッタ３６は赤外光を反射し、可視光を透過するもの、いわゆるホットミラー等を用いればよい。アパーチャ照射用ビームスプリッタ３６によって、アパーチャ１６を通過した試料からの赤外光を赤外光検出手段１８に導光し、アパーチャ照射用光源２０からの可視光をアパーチャ１６へと導いている。この構成の結果、赤外光での測定時と、可視光によるアパーチャ像及び試料の観察時とで光路を切換える必要がなく、装置構成がコンパクトになる。また、赤外測定と可視観察とを同時に行なう、もしくは短時間で測定と観察の切換えを行うことも可能となる。
なお、ここではアパーチャ照射用ビームスプリッタ３６として、赤外光を反射、可視光を透過するものを用いたが、逆に赤外光を透過、可視光を反射するもの、いわゆるコールドミラー等を用いてもよい。この場合、アパーチャ照射用公転２０と赤外光検出手段１８との配置関係は逆になる。 The aperture irradiation beam splitter 36 is installed on the optical path between the aperture irradiation light source 20 and the aperture 16. The aperture irradiation beam splitter 36 may be a so-called hot mirror or the like that reflects infrared light and transmits visible light. The aperture irradiation beam splitter 36 guides infrared light from the sample that has passed through the aperture 16 to the infrared light detection means 18, and guides visible light from the aperture irradiation light source 20 to the aperture 16. As a result of this configuration, there is no need to switch the optical path between measurement with infrared light and observation of an aperture image and sample with visible light, resulting in a compact device configuration. Further, infrared measurement and visible observation can be performed simultaneously, or switching between measurement and observation can be performed in a short time.
Here, the aperture irradiation beam splitter 36 is one that reflects infrared light and transmits visible light, but conversely, one that transmits infrared light and reflects visible light, such as a so-called cold mirror, is used. May be. In this case, the arrangement relationship between the aperture irradiation revolution 20 and the infrared light detection means 18 is reversed.

＜焦点合わせ＞
本実施形態の赤外顕微鏡１０は、試料を載置するステージ４６と、対物鏡１４（顕微手段）とステージ４６との距離を変更する駆動手段４８と、試料画像観察手段２６にて観察された試料像及びアパーチャ像による情報に基き、駆動手段４８を制御して焦点合わせを行なう制御手段５０と、を備える。試料画像観察手段２６にて検出された試料画像データは、データ処理手段４０へと送られ、試料画像データの画像解析を行なう。制御手段５０はデータ処理手段４０に接続されており、画像解析の結果に基いて駆動手段４８を制御し、焦点合わせを行う。すなわち、データ処理手段４０では図２に示したような試料観察画像を基に、アパーチャ像とその周囲部分のコントラストを調べる。制御手段５０は、データ処理手段４０で求めたコントラストの情報を基に、駆動手段４８を制御してステージ４６と対物鏡１４との距離を変更していく。そして、上記のコントラストが最大になった位置が焦点が合った位置であると判断し、ステージ４６を停止する。 <Focus>
The infrared microscope 10 of the present embodiment was observed by a stage 46 on which a sample is placed, a driving means 48 for changing the distance between the objective mirror 14 (microscopic means) and the stage 46, and a sample image observation means 26. And a control means 50 for controlling the driving means 48 to perform focusing based on information from the sample image and the aperture image. The sample image data detected by the sample image observation unit 26 is sent to the data processing unit 40, and image analysis of the sample image data is performed. The control means 50 is connected to the data processing means 40 and controls the drive means 48 based on the result of image analysis to perform focusing. That is, the data processing means 40 examines the contrast between the aperture image and the surrounding portion based on the sample observation image as shown in FIG. The control unit 50 controls the driving unit 48 based on the contrast information obtained by the data processing unit 40 to change the distance between the stage 46 and the objective mirror 14. Then, it is determined that the position where the contrast is maximized is a focused position, and the stage 46 is stopped.

このように本実施形態にかかる赤外顕微鏡によれば、例えば試料面が一様で何の目印もないときでも、試料面上に投影したアパーチャ像を目印として焦点合わせを行うことができる。また、試料照明用光源２２とアパーチャ照射用光源２０とからの光の色が異なるように、例えば、試料照明用光源２２からの光が白色光、アパーチャ照射用光源２０からの光が有彩色光となるようにすることが好適である。こうすることによって、試料面上に投影されたアパーチャ像が鮮明になり、焦点合わせも行い易い。 As described above, according to the infrared microscope according to the present embodiment, for example, even when the sample surface is uniform and there is no mark, focusing can be performed using the aperture image projected on the sample surface as a mark. Further, for example, the light from the sample illumination light source 22 is white light, and the light from the aperture illumination light source 20 is chromatic light so that the colors of the light from the sample illumination light source 22 and the aperture illumination light source 20 are different. It is preferable that By doing so, the aperture image projected on the sample surface becomes clear and focusing is easy.

＜反射測定＞
図３は、反射測定の場合の赤外顕微鏡の光路図を示す。図１に対応する部材には符号１００を加え、詳しい説明を省略する。図３の赤外顕微鏡１１０は、赤外スペクトル測定機構として、赤外光照射手段１１２と、顕微手段（対物鏡１１４）と、アパーチャ１１６と、赤外光検出手段１１８と、を備える。さらに、試料像観察機構として、アパーチャ照射用光源１２０と、試料照明用光源１２２と、観察用ビームスプリッタ１２４と、試料画像観察手段１２６と、を備える。赤外光照射手段１１２（赤外光源１２８、分光器１３０）からの赤外光は、照射用ビームスプリッタ１３２により反射され、ミラー１５２、対物鏡１１４によって試料の測定部位に照射される。試料からの反射赤外光は対物鏡（顕微手段）１１４によって集光され、観察用ビームスプリッタ１２４にて反射され、アパーチャ１１６へと向う。アパーチャ１１６を通過した反射赤外光はアパーチャ照射用ビームスプリッタ１３６にて反射され、さらに集光鏡１３８で反射されて赤外光検出手段１１８にて検出される。検出信号は、データ処理手段１４０へと送られ、データ処理等が行なわれる。 <Reflection measurement>
FIG. 3 shows an optical path diagram of an infrared microscope in the case of reflection measurement. Components corresponding to those in FIG. 1 are denoted by reference numeral 100, and detailed description thereof is omitted. The infrared microscope 110 in FIG. 3 includes an infrared light irradiation unit 112, a microscopic unit (objective mirror 114), an aperture 116, and an infrared light detection unit 118 as an infrared spectrum measurement mechanism. Further, as a sample image observation mechanism, an aperture irradiation light source 120, a sample illumination light source 122, an observation beam splitter 124, and a sample image observation means 126 are provided. Infrared light from the infrared light irradiation means 112 (infrared light source 128, spectroscope 130) is reflected by the irradiation beam splitter 132, and is irradiated to the measurement site of the sample by the mirror 152 and the objective mirror 114. The reflected infrared light from the sample is collected by the objective mirror (microscopic means) 114, reflected by the observation beam splitter 124, and directed toward the aperture 116. The reflected infrared light that has passed through the aperture 116 is reflected by the aperture irradiation beam splitter 136, further reflected by the condenser mirror 138, and detected by the infrared light detection means 118. The detection signal is sent to the data processing means 140 for data processing and the like.

試料照明用光源１２２からの可視光は、照明用ビームスプリッタ１３２を透過し、ミラー１５２、対物鏡１１４を通って試料の測定部位近傍に照射される。試料からの反射可視光は対物鏡（顕微手段）１１４によって集光され、観察用ビームスプリッタ１２４を透過し、集光レンズ１４２を介して試料画像観察手段１２６にて検出される。そして、試料画像観察手段１２６からデータ処理手段１４０に検出信号が送られ、データ処理等が行なわれる。 Visible light from the sample illumination light source 122 passes through the illumination beam splitter 132, passes through the mirror 152 and the objective mirror 114, and is irradiated in the vicinity of the measurement site of the sample. The reflected visible light from the sample is collected by the objective mirror (microscopic means) 114, passes through the observation beam splitter 124, and is detected by the sample image observation means 126 through the condenser lens 142. Then, a detection signal is sent from the sample image observation means 126 to the data processing means 140, and data processing or the like is performed.

アパーチャ照射用光源１２０からの可視光は、集光レンズ１４４、アパーチャ照射用ビームスプリッタ１３６を透過してアパーチャ１１６へと向う。アパーチャ１１６を通過した可視光は観察用ビームスプリッタ１２４にて反射され、対物鏡１１４によって試料面上に照射される。試料面からの反射した可視光は対物鏡１１４によって集光され、観察用ビームスプリッタ１２４を通過し、集光レンズ１４２を介して試料画像観察手段１２６にて検出される。このように、図３の実施形態の赤外顕微鏡においても、図１のものと同様に、簡単な装置構成で、試料像とアパーチャ像を同時に観察することができる。 Visible light from the aperture irradiation light source 120 passes through the condenser lens 144 and the aperture irradiation beam splitter 136 and travels toward the aperture 116. Visible light that has passed through the aperture 116 is reflected by the observation beam splitter 124 and irradiated onto the sample surface by the objective mirror 114. The visible light reflected from the sample surface is collected by the objective mirror 114, passes through the observation beam splitter 124, and is detected by the sample image observation unit 126 through the condenser lens 142. As described above, also in the infrared microscope of the embodiment of FIG. 3, the sample image and the aperture image can be observed at the same time with a simple apparatus configuration as in the case of FIG.

図３の赤外顕微鏡１１０も、図１のののと同様に、試料を載置するステージ１４６と、対物鏡１１４とステージ１４６との距離を変更する駆動手段１４８と、試料画像観察手段１５０にて観察された試料面上のアパーチャ像に基き、駆動手段１４８を制御して焦点合わせを行なう制御手段１５０と、を備えている。この結果、自動的に精度のよい焦点合わせを行なうことができる。 As in the case of FIG. 1, the infrared microscope 110 of FIG. 3 also includes a stage 146 on which a sample is placed, a driving unit 148 that changes the distance between the objective mirror 114 and the stage 146, and a sample image observation unit 150. And control means 150 for controlling the driving means 148 and focusing based on the aperture image on the sample surface observed in this way. As a result, accurate focusing can be performed automatically.

本発明の実施形態にかかる赤外顕微鏡の概略構成図1 is a schematic configuration diagram of an infrared microscope according to an embodiment of the present invention. 本発明の実施形態にかかる赤外顕微鏡で観察した試料像を示した模式図The schematic diagram which showed the sample image observed with the infrared microscope concerning embodiment of this invention 本発明の実施形態にかかる赤外顕微鏡の概略構成図1 is a schematic configuration diagram of an infrared microscope according to an embodiment of the present invention.

Explanation of symbols

１０赤外顕微鏡
１２赤外光照射手段
１４顕微手段（対物鏡）
１６アパーチャ
１８赤外光検出手段
２０アパーチャ照射用光源
２２試料照明用光源
２４観察用ビームスプリッタ
２６試料画像観察手段 10 Infrared microscope 12 Infrared light irradiation means 14 Microscopic means (objective mirror)
16 Aperture 18 Infrared light detection means 20 Aperture irradiation light source 22 Sample illumination light source 24 Observation beam splitter 26 Sample image observation means

Claims

An infrared light irradiation means for irradiating the measurement site of the sample with infrared light;
A microscopic means for collecting transmitted light or reflected light from the sample;
An aperture that blocks light from other than the measurement site out of the infrared light collected by the microscopic means;
An infrared light detection means for detecting infrared transmitted light or infrared reflected light from the measurement site of the sample through the aperture;
A light source for irradiating an aperture with which the sample is irradiated with visible light through the aperture and the microscopic means, and an aperture image is projected on the sample;
A light source for sample illumination that irradiates visible light in the vicinity of the measurement site of the sample;
A sample image illuminated by the sample illumination light source and an aperture projected onto the sample by illumination from the sample illumination light source are observed through the microscope and visible reflected light and / or visible transmitted light from the sample. Sample image observation means for observing an image;
An observation beam splitter installed on an optical path between the microscopic means and the aperture, for guiding visible light from a sample to the sample image observation means, and guiding infrared light from the sample to the aperture;
An infrared microscope comprising:

The infrared microscope according to claim 1,
The observation beam splitter reflects infrared light and divides visible light into two beams of reflected light and transmitted light,
The observation beam splitter guides visible light from the aperture irradiation light source to the sample, visible light from the sample to the sample image observation means, and infrared light from the sample to the aperture. Infrared microscope.

In the infrared microscope according to claim 1 or 2,
An illumination beam splitter installed on an optical path between the infrared light irradiation means and the sample illumination light source and the sample;
The irradiation beam splitter reflects infrared light and transmits visible light, or transmits infrared light and reflects visible light, and the irradiation beam splitter emits the infrared light. An infrared microscope characterized by guiding infrared light from the means and visible light from the light source for sample illumination onto an optical path toward the sample.

In the infrared microscope according to any one of claims 1 to 3,
An aperture irradiation beam splitter installed on the optical path between the aperture and the aperture irradiation light source;
The aperture irradiation beam splitter reflects infrared light and transmits visible light, or transmits infrared light and reflects visible light. The aperture irradiation beam splitter allows the aperture irradiation to be performed on the aperture. An infrared microscope characterized in that infrared light from a passed sample is guided to the infrared light detection means, and visible light from the aperture irradiation light source is guided to the aperture.

In the infrared microscope according to any one of claims 1 to 4,
The sample image observation means is composed of an image detector,
A stage on which the sample is placed;
Driving means for changing a distance between the microscopic means and the stage;
Control means for controlling the driving means to perform focusing based on information by a sample image and an aperture image observed by the sample image observation means constituted by the image detector;
An infrared microscope comprising: