JP2007276049A - Method for manufacturing array-shaped metal mold and scan processing equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To minimize the pitch error or shape error of the individual array element of an array-shaped metal mold, and to process it with a high degree of accuracy. <P>SOLUTION: In processing of a plurality of array elements 211 relative to a work 200 to be the array-shaped metal mold 210, one array element 211 in the middle of the array is processed firstly, and an eccentric error and a shape error from an ideal shape relative to the whole of the array-shaped metal mole 210 are measured and processed data are corrected so that the eccentric error and the shape error become less than or equal to an allowable value. Then, all of the other array elements 211 are processed based on the corrected processed data. Consequently, the shape error of the individual array element 211 falls within the allowable value, and the array pitch error can be maintained at the positioning accuracy level of a processing machine. Thus, the array-shaped metal mold 210 with the highly accurate array element 211 can be manufactured. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an array-shaped mold manufacturing method and a scanning processing apparatus. For example, an array in which high-precision elements are arranged regardless of the shape of a spherical surface, an axially symmetric aspheric surface, a non-axisymmetric aspherical surface (free-form surface), or the like. The present invention relates to a technique for processing an array-shaped mold for molding a shape element.

In recent years, lens array elements are used in various fields such as fly-eye elements used for obtaining uniform illumination.
As a technique for manufacturing an array-shaped mold for molding such a lens array element, a technique disclosed in Patent Document 1 has been conventionally known.

  That is, a rail-shaped positioning jig is disposed on the rotating main shaft, and a workpiece is sandwiched between the positioning jigs. In the workpiece, positioning grooves for detecting the array processing position are formed in advance corresponding to the positions where the plurality of array elements are to be formed.

  Then, this positioning groove is detected by a groove position detector, and the position is sequentially adjusted so that the center of the array element to be formed coincides with the center of the rotation main shaft, and the rotation main shaft is rotated to obtain a spherical surface or an axisymmetric aspheric surface. Process the shape.

  However, in the prior art of Patent Document 1, it is necessary to machine a positioning groove for determining the machining position of each element in advance. That is, a machining positioning error when machining the positioning groove exists in the positioning groove. Therefore, even if the processing position error from the positioning groove is ± 1 μm by the conventional processing method, there is a concern that the accumulated error becomes ± 1 μm or more.

  Further, in the processing method disclosed in Patent Document 1, since processing is performed by pressing a tool against a workpiece on which the rotation main shaft is fixed, only a spherical surface or an axisymmetric aspheric surface is processed as the shape of each array element. I can't.

  Furthermore, since the workpiece and the positioning jig are installed on the rotating spindle in an unbalanced manner, when the rotating spindle rotates, it can be a cause of vibration. This is very disadvantageous when processing a workpiece with high accuracy.

As is apparent from the above, the conventional technique has a technical problem that there is a limit to processing the pitch error and shape of each array element with high accuracy.
Furthermore, there is a technical problem that array elements other than spherical surfaces or axisymmetric aspheric surfaces cannot be processed as individual array element shapes, and array elements having various shapes cannot be processed.
JP 2003-89001 A

An object of the present invention is to process array elements with high accuracy by minimizing pitch errors and shape errors of individual array elements of an array-shaped mold.
Another object of the present invention is to process array elements with high accuracy by minimizing pitch errors and shape errors of array elements of various shapes, without restricting the processing shape of individual array elements of the array shape mold. There is to do.

  Another object of the present invention is to obtain a highly accurate array element by correcting an error in forming an array element formed by an array-shaped mold.

A first aspect of the present invention is a method of manufacturing an array-shaped mold using a scanning type processing apparatus that performs processing by moving a processing tool and a workpiece relative to each other.
A first step of forming one of a plurality of array elements to be formed for the workpiece as a mold material;
A second step of measuring a relative position error of the array element with respect to the workpiece and a shape error indicating a deviation from an ideal shape of the array element;
A third step of processing all the array elements such that the relative position error and the shape error are cancelled;
The manufacturing method of the array shape metal mold | die containing is provided.

A second aspect of the present invention is a method for manufacturing an array-shaped mold using a scanning type processing apparatus that performs processing by relatively moving a processing tool and a workpiece,
A first step of producing an array-shaped mold by forming a plurality of array elements for the workpiece as a mold material;
A second step of forming an array-shaped element using the array-shaped mold;
A third step of measuring a shape error indicating a deviation from an ideal shape of the array-shaped element;
A fourth step of performing correction processing of the array element of the array-shaped mold so that the shape error is canceled;
The manufacturing method of the array shape metal mold | die containing is provided.

A third aspect of the present invention is a scanning processing apparatus that performs processing by controlling a linear motion shaft and a rotational shaft of two or more axes at the same time and relatively moving a processing tool and a workpiece,
Numerical control means for numerically controlling the locus of the machining tool;
Holding means for holding the workpiece to be an array-shaped mold;
A machining tool for machining a plurality of array elements on the workpiece held by the holding means;
A trajectory of the machining tool is calculated from the ideal shape of the array element and the shape of the machining tool, and a corrected machining amount is calculated from an error amount between the ideal shape and a measurement result of the workpiece after machining. Computing means for recalculating the trajectory;
Is provided.

A fourth aspect of the present invention is a scanning processing apparatus that performs processing by controlling a linear motion axis and a rotational axis of two or more axes simultaneously to relatively move a processing tool and a workpiece,
Numerical control means for numerically controlling the locus of the machining tool;
Holding means for holding the workpiece to be an array-shaped mold;
A machining tool for machining a plurality of array elements on the workpiece held by the holding means;
The locus of the machining tool is calculated from the ideal shape of the array element and the shape of the machining tool, and corrected from an error amount indicating deviation from the ideal shape of the array shape element formed by the array shape mold after machining. A calculation means for calculating a machining amount and recalculating the locus of the machining tool;
Is provided.

According to the present invention, an array element can be processed with high accuracy by minimizing a pitch error and a shape error of each array element of the array-shaped mold.
In addition, the array elements can be processed with high accuracy while minimizing the pitch error and the shape error of the array elements having various shapes without restricting the processing shapes of the individual array elements of the array shape mold.

  In addition, it is possible to obtain a highly accurate array element by correcting an error in forming an array element formed by the array-shaped mold.

The above-described aspect of the present invention operates as follows as an example.
Step S11: The array element shape and the tool shape are input to the arithmetic unit, and the tool trajectory is calculated.
Step S12: A workpiece is attached to the workpiece holding means, and the array element located at the center of the array-shaped mold is scanned by moving the machining tool relative to the tool trajectory calculated in step S11.

Step S13: The array element center coordinates with respect to the outer periphery of the workpiece and the array element shape are measured.
Step S14: The eccentricity error, which is the measurement result in step S13, is corrected by moving the workpiece machining origin, and the shape error is corrected by inputting the error amount to the arithmetic unit and recalculating the tool path. .

Step S15: Using the workpiece machining origin set in step S14, all the array elements of the array mold are scanned using the tool trajectory recalculated in step S14.
According to this aspect of the present invention, all the other array elements are processed so as to cancel the relative position error and the shape error measured in one processing of the plurality of array elements. Although the pitch error of each array element depends on the positioning accuracy of the processing machine, the pitch error of each array element can be suppressed to 0.1 μm or less by using a processing machine having a positioning accuracy of 0.1 μm or less. it can.

  Since each array element is processed by scanning, various array element shapes such as a spherical surface, an axially symmetric aspherical surface, and an axially asymmetrical aspherical surface are generated without causing error factors such as blurring due to the rotation of the workpiece. Machining can be realized with high accuracy while suppressing the occurrence of pitch errors.

Moreover, the other viewpoint of this invention acts as follows as an example.
Step S21: Measurement of the center position error, the height error, and the shape error of each array element is performed on the element in which the array shape is molded using the array shape mold.

  Step S22: The error of the center position of each array element, which is the result of measurement in step S21, is caused by the shrinkage of the molding material at the time of molding, and varies depending on the molding material and molding conditions. It is a value that is reproduced if they are the same. The error in the height of each array element measured in step S21 is a warpage of the array-shaped element that occurs during molding. One of the causes of this warp is that when the shapes of the front surface and the back surface are different, the surface having a larger mass is more contracted. For example, when the surface is an array shape and the back surface is a plane, warpage occurs in a convex shape having the highest center position of the array shape. Similar to the pitch error, the value varies depending on the molding material, molding conditions, and shape, but is reproduced when the molding material, molding conditions, and shape are the same. The shape error of each array element measured in step S21 may be deformed due to the influence of the gate shape and the like, particularly when resin molding is performed. This shape error is also a value that is reproduced if the molding material and molding conditions are the same as other errors.

  Step S23: An array shape mold for correcting an error amount generated during molding, that is, an error between pitches, a warp, and a shape error is processed again. The inter-pitch error is corrected as a value obtained by adding a contraction amount to the pitch. The warp is corrected by changing the cut amount of each array element so as to have a shape opposite to the warp shape. The shape error is corrected by inputting the error amount to the arithmetic unit and recalculating the tool trajectory.

Step S24: The correction in step S23 is performed, and the tool is scanned to perform processing.
According to another aspect of the present invention, it is possible to easily create an array-shaped mold in which deformation of an array-shaped mold generated during molding or an array-shaped element to be molded is corrected, and a highly accurate array shape An element can be obtained.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
(Embodiment 1)
FIG. 1 is a conceptual diagram showing an example of the configuration of a scanning processing apparatus for implementing an array-shaped mold manufacturing method according to an embodiment of the present invention, and FIG. 2 is a side view showing an example of its internal configuration. It is.

  The scanning processing apparatus 100 according to the first embodiment includes a processing mechanism unit 110, a numerical control device 120 as numerical control means, an on-machine measuring device 140, and an arithmetic device 130 as arithmetic means.

The machining mechanism 110 is provided with a machining table 111, a spindle 112, a machining tool 113, and an on-machine measuring device 140.
A workpiece 200 as a mold material to be an array-shaped mold 210 is fixed to the processing table 111 via a Yatoi base 160 and a mounting base 150 as a holding means.

The machining mechanism unit 110 includes XYZ movement axes, and the axis movement is controlled by the numerical controller 120. The workpiece 200 is fixed to the Z-axis end surface (processing table 111). A spindle 112 is fixed on the XY axis, and a machining tool 113 having a spherical tip is attached to the spindle 112, and the machining tool 113 can be rotated by the rotation of the spindle 112.

  Then, by combining the displacement in the Z-axis direction of the machining table 111 and the scanning displacement in the XY-axis direction of the machining tool 113 supported by the spindle 112, a plurality of array elements 211 having an arbitrary shape are formed on the workpiece 200. Then, an array-shaped mold 210 is manufactured.

FIG. 3A is a plan view showing a workpiece attachment state in the scanning processing apparatus 100 of the first embodiment.
FIG. 3B is a side view showing a workpiece attachment state in the scanning processing apparatus 100 of the first embodiment.

FIG. 3C is a side view showing a workpiece attachment state in the scanning machining apparatus 100 of the first embodiment.
In the case of the first embodiment, a plurality of array elements 211 are arranged on the workpiece 200 in a honeycomb shape at a predetermined pitch px and pitch py. The individual array elements 211 have, for example, a spherical surface with a radius SR.

In the case of the first embodiment, as an example, the workpiece 200 is supported by the processing table 111 downward in the vertical direction.
The processing mechanism unit 110 according to the first embodiment is an ultra-precise processing machine that uses an object with a resolution of 0.3 nm (nanometer) on the linear axis scale, and the positioning accuracy is 0.1 μm or less. The above is merely an example, and any configuration may be used as long as the machining tool 113 and the workpiece 200 can relatively simultaneously control two or more axes and can move three axes. The machining tool 113 is not limited to a rotary tool. A fixed byte may be used.

The arithmetic device 130 can read and record the current coordinate values 121 of the XYZ axes of the machining mechanism unit 110 from the numerical control device 120. Further, the arithmetic unit 130 can read and record the measurement value 142 of the on-machine measuring device 140.

  Further, the arithmetic unit 130 calculates a tool trajectory for machining the ideal shape data 211a from the input ideal shape data 211a and the machining tool shape data 113a, creates an NC program 131, and transfers it to the numerical controller 120. I can do it. Further, by analyzing the measured value 142 measured by the on-machine measuring device 140 for the machined workpiece 200, an error between the machined shape of the workpiece 200 and the ideal shape data 211a is calculated, and the tool locus for correcting the error is regenerated. The NC program 132 can be recreated by calculation.

  The numerical control device 120 can machine the workpiece 200 into an arbitrary shape by the machining tool 113 by controlling each axis of the machining mechanism unit 110 according to the NC program 131 and the NC program 132. The configuration of the processing mechanism unit 110 is also an example, and the on-machine measuring device 140 may exist outside the machine.

  The operation of the first embodiment will be described. FIG. 4 is a plan view showing an example of an attachment state of the workpiece 200 in the first embodiment. FIG. 5 is a side view seen from the direction of arrow AA in FIG. FIG. 6 is a flowchart showing an example of the operation of the first embodiment.

  FIG. 7 is a perspective view showing an example of a locus during machining of the machining tool in the first embodiment. 8, 9, 10, and 11 are conceptual diagrams illustrating an example of a method for measuring the array element 211 in the first embodiment. 12 and 13 are diagrams showing an example of the shape measurement result of the array element 211 in the first embodiment.

The operation of the first embodiment will be described with reference to FIG.
The array element shape and tool shape of the workpiece are input to the arithmetic device 130, the tool path data shown in FIG. 7 is calculated, and an NC program is created. Thereafter, the NC program is transferred to the numerical controller 120 (step 301).

The workpiece 200 is fixed to the mounting base 150 with bolts 152 (step 302).
As shown in FIG. 4, a Yatoi base 160 is attached to the Z-axis end surface (processing table 111) of the processing mechanism unit 110. The Yatoi base 160 can be positioned in the rotational direction around the Z axis with respect to the processing table 111 by the rotational positioning base 166 and the rotational positioning screw 167.

  The mounting base 150 is brought into close contact with the Yatoi base 160 so as to contact the positioning block 162 and the positioning pin 161, and the fixing wedge 164 is sandwiched between the fixing block 163 and the mounting base 150 as shown in FIG. The fixing bolt 168 is contracted so as to be in contact with the taper portion 165 of the fixing wedge 164 and fixed. As indicated by the arrows F1 and F2 in FIG. 5, in this fixing method, force acts in the horizontal direction (arrow F1) pressed against the positioning block 162 or the positioning pin 161 and the vertical direction (arrow F2) pressed against the Yatoi base 160. The positioning block 162, the positioning pin 161, and the Yato base 160 are in close contact with each other.

Since the contact portion between the positioning pin 161 and the mounting base 150 is in line contact (line contact), the contact surface 162a of the positioning block 162 serves as a reference for the rotation direction of the workpiece 200. Here, when the material of the fixed wedge 164 is softer than the material of the mounting base 150 and the fixed block 163, for example, brass or the like, the repeated mounting accuracy becomes higher. In addition, since the fixing bolt 164 is attached, if the fixing bolt 168 is excessively contracted, the Yatoi base 160 may be broken. Therefore, the tightening torque of the fixing bolt 168 is made constant by a torque wrench. Once fixed, the Yatoi base 160 is appropriately rotated using the rotation positioning screw 167 so that the X-axis reference plane 203 is parallel to the X-axis.

Further, the machining tool 113 is attached to the spindle 112.
Using the NC program 131 created at step 301, one array element 211 at the center of the workpiece 200 is processed (step 303).

  After processing one array element 211 located at the center, the on-machine measuring device 140 is used to perform eccentricity measurement (step 304) and shape measurement (step 305) of the array element 211.

Here, in the first embodiment, as shown in FIG. 8, the center point of the outer peripheral reference surface 201 of the workpiece 200 is set as the eccentric origin G0, and the upper surface of the workpiece 200 is set as the reference plane 202.
That is, as shown in FIG. 9, the stylus 141 of the on-machine measuring device 140 is brought into contact with a plurality of locations on the outer peripheral reference surface 201, and the center point of the outer peripheral reference surface 201 is set as the origin G0 in space. Further, the stylus 141 is brought into contact with the reference plane 202, and the reference plane 202 is set as a reference plane in space. The reference axis is the same as the X axis of the processing mechanism unit 110.

FIG. 9 shows the relationship between the center coordinate C of the array element 211 and the reference plane 202 in a state where the workpiece 200 is fixed vertically to the mounting base 150.
Further, as shown in FIG. 10, the stylus 141 is scanned on the processing surface of the array element 211, and the measurement result is fitted to the ideal shape data 211a.

  In the case of the first embodiment, as illustrated in FIG. 11, if a spherical shape is processed as the processing shape of the array element 211, the center coordinates C (x, y, z) of the sphere can be obtained. . The projected coordinates of the center coordinates of the sphere onto the reference plane are the eccentricity Δc (Δx, Δy).

  Also, as shown in FIGS. 12 and 13, the deviation between the value measured by scanning the machining inner surface of the central array element 211 with the stylus 141 and the ideal shape data 211 a becomes the shape error Δs of the array element 211.

It is determined whether or not the measured eccentricity Δc falls within the allowable eccentricity value (step 306).
If it is outside the allowable eccentricity, the machining origin is shifted by the amount of eccentricity Δc (step 307).

It is determined whether or not the measured shape error Δs falls within the allowable shape error value (step 308).
If the shape error Δs is equal to or larger than the shape error allowable value, the machining locus of the machining tool 113 is recalculated using the shape obtained by inverting the error amount in the Z-axis direction as the correction amount, and the NC program 132 is recreated (step 309). Returning to step 303, machining is performed by the re-created NC program 132.

  Steps 303 to 309 are repeated until the eccentricity Δc and the shape error Δs of the central array element 211 are within the allowable values in the determinations of step 306 and step 308.

When the eccentric amount Δc and the shape error Δs of the center array element 211 are within the allowable values, all the array elements 211 other than the center are processed (step 310).
According to the first embodiment, for example, by machining data (NC program 132) obtained by correcting the eccentricity amount Δc and the shape error Δs obtained by repeating machining and error measurement of one array element 211 at the center of the array. Since the processing of the other array elements 211 is performed, there is no cumulative error of the array accuracy, and the pitch px of the plurality of array elements 211 constituting the array mold 210 and the pitch error of the pitch py are determined by the positioning of the processing mechanism unit 110. Accuracy, that is, 0.1 μm or less.

Further, in all the array elements 211, the shape error Δs is within an allowable value.
Further, since the processing of the individual array elements 211 is performed by scanning with the processing tool 113, even when the spherical surface is processed, even if there is an asymmetry component such as asphalt in the shape error, the correction processing can be easily performed. It can be carried out.

As a result, it is possible to obtain an array-shaped mold 210 having a highly accurate shape and arrangement pitch of the plurality of array elements 211.
(Embodiment 2)
In the second embodiment, an example will be described in which the measurement result of the array-shaped element 220 actually formed by the array-shaped mold 210 is reflected in processing on the array element 211 of the array-shaped mold 210.

Since the configuration of the scanning processing apparatus 100 used for processing is the same as that of the first embodiment, description thereof is omitted.
The operation of the second embodiment will be described with reference to FIGS.

FIG. 14 is a flowchart showing an example of the processing method according to the second embodiment. FIG. 15 is a cross-sectional view showing an example of an array-shaped element molded by the array-shaped mold 210.
When the array-shaped element 220 is formed by performing glass molding or resin molding using the array-shaped mold 210 that has not been corrected, the glass mold molding causes deformation Δw such as warpage due to the distribution of the density of the glass. . This can be avoided to some extent by simulation or the like, but cannot be completely avoided. In the case of resin molding, deformation may occur due to uneven cooling of the gate or the like.

  Therefore, in the second embodiment, for example, after the array-shaped mold 210 is manufactured by the method as described in the first embodiment (step 401), the array-shaped element 210 is used to manufacture the array-shaped element 220. Trial molding is performed (step 402).

The array-shaped element 220 includes a plurality of array elements 221 corresponding to the shapes of the plurality of array elements 211 of the array-shaped mold 210.
The array shape element 220 thus molded is subjected to overall shape measurement by an external measuring device (not shown) (step 403). In this shape measurement, the difference in the actually measured shape from the ideal shape of the array element 211 is recorded as the total error amount. Further, the shape of each array element 221 is measured, and the difference from the ideal shape is recorded as an element shape error amount. Further, the amount of eccentricity from the reference point of each array element 221 is measured, and the difference from the ideal value is recorded as the element eccentricity.

It is determined whether or not the error amounts of the array shape element 220 and the array element 221 fall within the allowable values (step 404). If all the error amounts are within the reference value, the processing is terminated.
If the element shape error amount is outside the allowable value in step 404, the element shape error amount is input to the calculation device 130, and the tool trajectory for performing correction machining is recalculated (step 405). Thereafter, the NC program 132 for correction machining is recreated.

If the eccentricity of the array element 221 is outside the allowable value, the processing origin of each array element 221 is shifted in the XY axis direction by the error amount. If the total error amount is out of tolerance,
The processing origin of each array element is shifted in the Z-axis direction by the error amount of each element (step 406).

Thus, after setting the correction of each error of the array shape element 220 and the array element 221, all the array elements 211 of the array shape mold 210 are processed (step 407).
Then, returning to step 402, the array-shaped element 220 is molded by the corrected array-shaped mold 210.

  The processing of step 402 to step 407 is repeated until it is determined in step 404 that the error of each part of the array shape element 220 and the array element 221 obtained by molding falls within the allowable value.

  As described above, according to the second embodiment, even when deformation is caused by molding using the array-shaped mold 210, the overall shape of the array-shaped element 220, the shape of the individual array elements 221, and the eccentricity. Since the shape of the array element 211 of the array-shaped mold 210 can be easily corrected in response to a molding error such as the above, an array-shaped element 220 having a highly accurate shape and arrangement of the individual array elements 221 is obtained. I can do it.

  As is clear from the above description, according to each of the above-described embodiments of the present invention, a plurality of array elements 211 made up of, for example, a spherical or axially symmetric aspherical shape and an axially asymmetrical aspherical shape are arranged. With respect to the array-shaped mold 210, the pitch and eccentricity between the individual array elements 211 and the array elements 211 can be processed with high accuracy.

  Furthermore, even when the array-shaped element 220 obtained by molding using the array-shaped mold 210 is deformed, the array-shaped mold 210 with the corrected deformation amount can be easily created, An accurate array-shaped element 220 can be obtained.

  Needless to say, the present invention is not limited to the configuration exemplified in the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

It is a conceptual diagram which shows an example of a structure of the scanning processing apparatus which enforces the manufacturing method of the array shape metal mold | die which is one embodiment of this invention. It is a side view which shows an example of the internal structure. It is a top view which shows the attachment state of the workpiece | work in the scanning processing apparatus which is one embodiment of this invention. It is a side view which shows the attachment state of the workpiece | work in the scanning processing apparatus which is one embodiment of this invention. It is a side view which shows the attachment state of the workpiece | work in the scanning processing apparatus which is one embodiment of this invention. It is a top view which shows an example of the attachment state of the workpiece | work in the scanning processing apparatus which is one embodiment of this invention. It is the side view seen from the direction of arrow AA in FIG. It is a flowchart which shows an example of an effect | action of the scanning processing apparatus which is one embodiment of this invention. It is a perspective view which shows an example of the locus | trajectory at the time of the process of the processing tool in the scanning processing apparatus which is one embodiment of this invention. It is a conceptual diagram which shows an example of the measuring method of the array element in the scanning processing apparatus which is one embodiment of this invention. It is a conceptual diagram which shows an example of the measuring method of the array element in the scanning processing apparatus which is one embodiment of this invention. It is a conceptual diagram which shows an example of the measuring method of the array element in the scanning processing apparatus which is one embodiment of this invention. It is a conceptual diagram which shows an example of the measuring method of the array element in the scanning processing apparatus which is one embodiment of this invention. It is a diagram which shows an example of the shape measurement result of the array element in the scanning processing apparatus which is one embodiment of this invention. It is a diagram which shows an example of the shape measurement result of the array element in the scanning processing apparatus which is one embodiment of this invention. It is a flowchart which shows an example of the processing method in the scanning processing apparatus which is other embodiment of this invention. It is sectional drawing which shows an example of the array-shaped element shape | molded by the array-shaped metal mold | die by the scanning processing apparatus which is other embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Scanning device 110 Processing mechanism part 111 Processing table 112 Spindle 113 Processing tool 113a Processing tool shape data 120 Numerical control device 121 Current coordinate value 130 Calculation device 131 NC program 132 NC program 140 On-machine measuring device 141 Stylus 142 Measurement value 150 Attachment Pedestal 151 Tapered portion 152 Bolt 160 Yatoi base 161 Positioning pin 162 Positioning block 162a Contact surface 163 Fixed block 164 Fixed wedge 165 Tapered portion 166 Rotating positioning base 167 Rotating positioning screw 168 Fixing bolt 200 Work 201 Outer peripheral reference surface 202 Reference plane 203 Axis reference surface 210 Array shape mold 211 Array element 211a Ideal shape data 220 Array shape element 221 Array element px Pitch py Pitch Δc Eccentricity Δs Shape error Δw Deformation

Claims (9)

An array-shaped mold manufacturing method using a scanning type processing apparatus that performs processing by relatively moving a processing tool and a workpiece,
A first step of forming one of a plurality of array elements to be formed for the workpiece as a mold material;
A second step of measuring a relative position error of the array element with respect to the workpiece and a shape error indicating a deviation from an ideal shape of the array element;
A third step of processing all the array elements such that the relative position error and the shape error are cancelled;
The manufacturing method of the array shape metal mold | die characterized by including. In the manufacturing method of the array shape metal mold according to claim 1,
In the first step, the processing of one array element located at the array center of the plurality of array elements is performed,
In the second step, the relative position error and shape error of the array element are measured. In the manufacturing method of the array shape metal mold according to claim 1,
The shape of each of the array elements is a spherical surface, an axially symmetric aspherical surface, or an axially asymmetrical aspherical surface. An array-shaped mold manufacturing method using a scanning type processing apparatus that performs processing by relatively moving a processing tool and a workpiece,
A first step of producing an array-shaped mold by forming a plurality of array elements for the workpiece as a mold material;
A second step of forming an array-shaped element using the array-shaped mold;
A third step of measuring a shape error indicating a deviation from an ideal shape of the array-shaped element;
A fourth step of performing correction processing of the array element of the array-shaped mold so that the shape error is canceled;
The manufacturing method of the array shape metal mold | die characterized by including. In the manufacturing method of the array shape metal mold according to claim 4,
In the third step, the deformation due to warpage and shrinkage of the molded array-shaped element is measured as the shape error,
In the fourth step, the warpage and the shrinkage are corrected by changing a cutting depth of the processing tool in processing of the individual array elements. A scanning processing apparatus that performs processing by controlling a linear motion axis and a rotational axis of two or more axes simultaneously to relatively move a processing tool and a workpiece,
Numerical control means for numerically controlling the locus of the machining tool;
Holding means for holding the workpiece to be an array-shaped mold;
A machining tool for machining a plurality of array elements on the workpiece held by the holding means;
A trajectory of the machining tool is calculated from the ideal shape of the array element and the shape of the machining tool, and a corrected machining amount is calculated from an error amount between the ideal shape and a measurement result of the workpiece after machining. Computing means for recalculating the trajectory;
The scanning processing apparatus characterized by including. In the scanning processing apparatus of Claim 6,
The measurement result is that of the one array element that is positioned at the array center of the plurality of array elements and is first formed on the workpiece, and the relative position error of the array element with respect to the workpiece, and the array element A scanning processing apparatus characterized by including a shape error indicating deviation from the ideal shape. A scanning processing apparatus that performs processing by controlling a linear motion axis and a rotational axis of two or more axes simultaneously to relatively move a processing tool and a workpiece,
Numerical control means for numerically controlling the locus of the machining tool;
Holding means for holding the workpiece to be an array-shaped mold;
A machining tool for machining a plurality of array elements on the workpiece held by the holding means;
The locus of the machining tool is calculated from the ideal shape of the array element and the shape of the machining tool, and corrected from an error amount indicating deviation from the ideal shape of the array shape element formed by the array shape mold after machining. A calculation means for calculating a machining amount and recalculating the locus of the machining tool;
The scanning processing apparatus characterized by including. The scanning processing apparatus according to claim 8, wherein
The error amount includes a deformation due to warpage and shrinkage of the array-shaped element.