JP2007117880A - Drawing method for droplet discharge device, droplet discharge device, method for manufacturing electro-optical device, electro-optical device, and electronic apparatus - Google Patents

Abstract

An object of the present invention is to make it possible to recognize a relative position in a sub-scanning direction between a substrate and a functional liquid droplet ejection head in each main scanning.
A functional liquid droplet ejection head 61 having a plurality of nozzles 85 is placed on a substrate W composed of an actual drawing area Wf in which a plurality of pixel areas 507a are arranged and a peripheral area Wb surrounding the four circumferences in the X-axis direction. The main scanning for ejecting and landing the functional liquid droplets from the corresponding nozzle 85 and the sub-movement for relatively moving the functional liquid droplet ejection head 61 in the Y-axis direction with respect to each pixel region 507a. In performing the drawing process by alternately repeating scanning and filling the entire area of each of the plurality of pixel areas 507a with the functional liquid, the landing of the functional liquid droplets from the nozzles 85 on the peripheral area Wb for each main scanning. At least one landing position inspection virtual pixel region 207 is received, and the functional liquid is respectively applied to each pixel region 507a and each virtual pixel region 207 in each main scan. It is allowed to discharge-landing.
[Selection] Figure 8

Description

  The present invention relates to a drawing method of a droplet discharge device for discharging and landing functional droplets on a substrate from a functional droplet discharge head to the substrate by an inkjet method, a droplet discharge device, a method for manufacturing an electro-optical device, and electro-optical The present invention relates to an apparatus and an electronic device.

Conventionally, while moving a functional liquid droplet ejection head relatively in the X-axis direction (main scanning direction) with respect to a substrate in which a plurality of pixel areas are arranged in a matrix in a row direction and a column direction orthogonal to each other, In contrast, main scanning for ejecting and landing functional liquid droplets from a plurality of corresponding nozzles and sub-scanning for relatively moving the functional liquid droplet ejection head in the Y-axis direction (sub-scanning direction) are alternately repeated. In addition, it is known that a color filter or the like of a liquid crystal display device is manufactured by a droplet discharge device that performs a drawing process so that the entire area of each pixel region is filled with a functional liquid (for example, see Patent Document 1).
Japanese Patent Laying-Open No. 2005-238821

  However, in such a droplet discharge device, even if the alignment between the functional droplet discharge head and the substrate is accurately performed before the drawing process is started, the functional droplet discharge head is mounted on the substrate by sub-scanning. When moving in the sub-scanning direction, the relative position in the sub-scanning direction between the substrate and the functional liquid droplet ejection head is determined from the accurate position due to the mechanical accuracy of the device itself and the dimensional accuracy of the pixel area on the substrate. There is a risk of shifting. If the relative position of the functional liquid droplet ejection head with respect to the substrate is not accurate, functional liquid droplets are ejected and landed between the pixel regions (banks). It causes uneven color.

  For this reason, after the drawing process is completed, by checking the landing position of the functional liquid droplet for each main scanning, the relative position in the sub scanning direction between the substrate and the functional liquid droplet ejection head in each main scanning is recognized, and the recognition result Based on the above, it is conceivable to correct the relative position for each main scan. However, in reality, it is difficult to recognize the exact landing position even if the functional liquid droplets that have landed on each pixel region or each bank are image-recognized. That is, in each pixel area, a plurality of droplets of functional droplets land from a plurality of nozzles for each main scan, so that the plurality of droplets of functional droplets overlap each other, and the functional droplets landed on the bank. Would flow into the adjacent pixel area, so accurate information on the landing position could not be obtained therefrom.

  The present invention relates to a drawing method of a droplet discharge device, a droplet discharge device, and a method of manufacturing an electro-optical device that enable recognition of the relative position in the sub-scanning direction between the substrate and the functional droplet discharge head in each main scan. An object is to provide an electro-optical device and an electronic apparatus.

  The drawing method of the liquid droplet ejection apparatus of the present invention is for a substrate comprising a real drawing area in which a plurality of pixel areas are arranged in a row direction and a column direction orthogonal to each other, and a peripheral area surrounding the four circumferences of the real drawing area. , Main scanning for ejecting and landing functional droplets from corresponding nozzles on each pixel area while moving a functional droplet ejection head having a plurality of nozzles in the X-axis direction, and functional droplet ejection In performing the drawing process so that the entire area of each of the plurality of pixel areas is filled with the functional liquid by alternately repeating sub-scanning in which the head is relatively moved in the Y-axis direction, the peripheral area is , Receiving at least one landing position inspection virtual pixel area that receives the landing of the functional liquid droplet from the nozzle, and ejecting the functional liquid droplet to each of the pixel area and each virtual pixel area in each main scan・Characterized in that it is the bullet.

  The droplet discharge device of the present invention includes a functional droplet discharge head having a plurality of nozzles, an actual drawing region in which a plurality of pixel regions are arranged in a row direction and a column direction orthogonal to each other, and four rounds of the actual drawing region. An XY moving means for moving the functional liquid droplet ejection head relative to the substrate in the X-axis direction and the Y-axis direction, a functional liquid droplet ejection head, Control means for controlling the XY moving means, and the control means moves the functional liquid droplet ejection head relative to the substrate in the X-axis direction while moving the functional liquid from the corresponding nozzle to each pixel region. By alternately repeating main scanning for ejecting and landing droplets and sub-scanning for relatively moving the functional droplet ejection head in the Y-axis direction, each of the plurality of pixel regions is filled with the functional liquid. In performing the drawing process, at least one landing position inspection virtual pixel area that accepts the landing of the functional liquid droplets from the nozzles for each main scanning is set in the peripheral area. The liquid droplets are ejected and landed on the virtual pixel area.

  According to these configurations, the functional liquid is discharged to each pixel area so that the entire area is filled with the functional liquid, whereas the landing positions can be inspected in each virtual pixel area, that is, the landing The functional liquid droplets are ejected so that the functional liquid droplets that have landed indicate the landing position. For this reason, after the drawing process is completed, the functional liquid droplets that have landed on the virtual pixel region are image-recognized, so that the landing positions of the functional liquid droplets for each main scan can be inspected. It is possible to accurately recognize the relative position in the Y-axis direction (sub-scanning direction) with the droplet discharge head. Therefore, the drawing operation can be performed accurately by correcting the relative position to an appropriate relative position for each main scan based on the recognition result.

  For each virtual pixel region, when there are a plurality of corresponding nozzles, it is preferable to eject and land the functional liquid droplets from one of the nozzles. However, the functional liquid droplets of the plurality of landed liquid droplets overlap each other. If there is not, functional droplets may be ejected and landed from two or more nozzles. Furthermore, for each virtual pixel region, it is preferable to discharge and land one shot of functional liquid droplets from each nozzle in each main scan, but since the landed functional liquid droplets do not overlap each other. If there is, two or more shots of functional liquid droplets may be discharged and landed.

  In the above droplet discharge apparatus, the XY moving unit mounts the substrate so that the column direction is parallel to the X-axis direction, and the control unit performs main scanning a plurality of times for each pixel region, It is preferable to perform the sub-scan so that the landing positions of the functional liquid droplets by the main scanning over a plurality of times are shifted from each other in the row direction within the same pixel region.

  According to this configuration, the functional liquid droplets land in the row direction without fail in each pixel region. For this reason, the whole area of each pixel region can be reliably filled with the functional liquid. In this configuration, high-level position management is required, but as described above, drawing processing that enables recognition of the relative position in the Y-axis direction (sub-scanning direction) between the substrate and the functional liquid droplet ejection head in each main scanning. Therefore, this configuration can cope with this.

  In these cases, it is preferable that the control means sets the virtual pixel area on at least one extension of one or more columns of the plurality of pixel areas.

  According to this configuration, the functional liquid droplets are landed from the common nozzle to each virtual pixel region and the pixel region arranged in the same column as the virtual pixel region. For this reason, the landing position of the functional liquid droplet from the nozzle corresponding to each pixel region can be inspected.

  In this case, it is preferable that the control unit sets the virtual pixel area on at least the extension of each column of the plurality of pixel areas.

  According to this configuration, when the functional liquid droplets land on the plurality of virtual pixel areas corresponding to the entire columns of the plurality of pixel areas, the landing positions of the functional liquid droplets are inspected for each of the entire columns of the plurality of pixel areas. can do. For this reason, even when there is a cause of a bad landing position, the cause can be analyzed based on the inspection result of the landing position for each column, and after drawing appropriate measures, drawing on the next board Processing can be performed.

  In these cases, the functional liquid droplet ejection head is constituted by connecting a plurality of color-specific ones into which the functional liquids of a plurality of colors are introduced in the X-axis direction. The functional droplet discharge heads are integrally moved in the X-axis direction and the Y-axis direction, respectively, and the control unit controls the plurality of functional droplet discharge heads for each color to form a plurality of color arrangement patterns in a plurality of pixel areas. In addition to ejecting and landing functional droplets based on each of them, a plurality of virtual pixel areas corresponding to a plurality of functional droplet ejection heads for each color are set on the extension of each column, and a plurality of virtual pixels in each column are set. It is preferable that the functional liquid droplets be ejected and landed on the pixel area following the color arrangement pattern.

  According to this configuration, according to the same color arrangement pattern as the color arrangement pattern of the multi-color stripes for the plurality of pixel regions, the functional liquid droplets are respectively supplied from the plurality of functional liquid droplet ejection heads for each color to the plurality of virtual pixel regions in each column. Land. For this reason, the relative position in the Y-axis direction with respect to the substrate in each main scan can be accurately recognized for each functional liquid droplet ejection head. That is, in addition to being able to recognize the relative position in the Y-axis direction between the substrate and each functional droplet discharge head in each main scan, the relative position in the Y-axis direction between the plurality of functional droplet discharge heads for each color (assembly accuracy) Can also be recognized.

  In this case, it is preferable that the control means sets the virtual pixel region on at least the extension of each of the plurality of pixel regions.

  According to this configuration, when the functional liquid droplets land on the plurality of virtual pixel areas corresponding to all the rows of the plurality of pixel areas, the landing positions of the functional liquid droplets are inspected for each of all the lines of the plurality of pixel areas. can do. Therefore, even when there is a cause of defective landing position, the cause can be analyzed based on the inspection result of the landing position for each line, and after appropriate measures are taken, drawing processing is performed on the next board Can be performed.

  In this case, the functional liquid droplet ejection head is configured by connecting a plurality of color-specific liquids into which the functional liquids of a plurality of colors are introduced in the X-axis direction. The functional liquid droplet ejection heads are integrally moved in the X-axis direction and the Y-axis direction, and the control unit controls the plurality of functional liquid droplet ejection heads for different colors so that the pixel areas have different colors in the column direction. Functional liquid droplets are ejected and landed based on the color pattern of the multi-color stripes, and the functional liquid is imitated according to the color pattern for a plurality of virtual pixel areas set on the extensions of all the rows of the pixel areas. It is preferable to discharge and land the droplets, respectively.

  According to this configuration, according to the same color arrangement pattern as the color arrangement pattern of the plurality of color stripes for the plurality of pixel areas, the function liquid droplets land on the plurality of virtual pixel areas in each row from the plurality of function liquid droplet ejection heads for each color. To do. For this reason, the landing position of the functional liquid droplet in the X-axis direction can be inspected for each functional liquid droplet ejection head. That is, in addition to recognizing the relative position in the X-axis direction between the substrate and each functional liquid droplet ejection head in each main scan, the relative position in the X-axis direction between the plurality of functional liquid droplet ejection heads for each color (assembly accuracy) Can also be recognized.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film forming portion is formed on a substrate using a functional liquid using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that a film forming portion made of a functional liquid is formed on a substrate using the above-described droplet discharge device.

  According to these configurations, by using a droplet discharge device that performs a drawing process that enables recognition of the relative position in the Y-axis direction (sub-scan direction) between the substrate and the functional droplet discharge head in each main scan. Based on the recognition result, it is possible to correct the relative position for each main scanning, and it is possible to manufacture a highly reliable electro-optical device. As an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described method for manufacturing the electro-optical device or the above-described electro-optical device.

  In this case, examples of the electronic device include a mobile phone and a personal computer equipped with a so-called flat panel display, and various electric products.

  Hereinafter, a droplet discharge device to which the present invention is applied will be described with reference to the accompanying drawings. The liquid droplet ejection apparatus according to the present embodiment is installed in a drawing system incorporated in an FPD production line such as a liquid crystal display device, and a functional liquid ejection head that uses special liquid such as special ink or light-emitting resin liquid. In this case, a film forming portion is formed by functional droplets of R, G and B colors on a substrate such as a color filter. Therefore, first, a substrate (workpiece) that is a functional liquid droplet ejection target (drawing target) by the liquid droplet ejection apparatus will be briefly described.

  As shown in FIG. 1, the substrate W is a transparent substrate made of quartz glass, polyimide resin, or the like. On the substrate W, a plurality of pixel regions 507a having the same shape and the same size are arranged in a matrix, that is, a filter region Wf arranged at equal pitches in a row direction (horizontal direction in the figure) and a column direction (vertical direction in the figure) orthogonal to each other. (Actual drawing area) and a peripheral area Wb (frame area) surrounding the four circumferences of the filter area Wf. Further, two substrate alignment marks Wm whose positions are recognized by the introduced droplet discharge device 1 (see FIG. 2 and the like) are formed on both long side portions of the peripheral region Wb. Although details will be described later, the substrate W is set to the droplet discharge device 1 such that the column direction of the plurality of pixel regions 507a is parallel to the X-axis direction. The substrate W may be a so-called multiple-type large substrate in which a plurality of filter regions Wf are formed with gaps.

  Each pixel region 507a is formed in a rectangular recess in plan view surrounded by a partition wall 507b (bank 503, see FIG. 11), and its long side is parallel to the row direction and its short side is parallel to the column direction. It has become. Then, when forming film forming portions (colored layers 508R, 508G, and 508B) of three colors R (red), G (green), and B (blue) with a functional droplet discharge head 61 (see FIG. 8 and the like) described later. In addition, it becomes a landing area of functional droplets (see FIG. 11). Each pixel region 507a may have a short side parallel to the row direction of the matrix and a long side parallel to the column direction.

  Although details will be described later, the portions other than the pixel region 507a, that is, the peripheral region Wb and the partition wall portion 507b (bank 503) are made of a hydrophobic (lyophobic) resin material, so that the functional liquid droplets land. Even so, the functional droplet flows into the adjacent pixel region 507a. On the other hand, the pixel region 507a (the surface of the substrate W) is made hydrophilic (lyophilic) by the surface treatment, and the landed functional liquid droplets wet and spread in the pixel region 507a.

  Then, a predetermined amount of functional liquid droplets are ejected and landed in each pixel region 507a by the liquid droplet ejection device 1 in a color arrangement pattern of three-color stripes having different colors in the column direction and the same color in the row direction (see FIG. 8). . In this case, three pixel areas 507a on which the functional liquid droplets land, that is, a pixel area 507a on which the R functional liquid droplets land, a pixel area 507a on which the G functional liquid droplets land, and a B functional liquid droplet A so-called pixel is constituted by the landed pixel region 507a. In addition, in order to improve color reproducibility, a pixel may be comprised by another combination and other number of colors. For example, C (cyan) or E (emerald) may be added to R, G, and B.

  Further, the color arrangement pattern for the plurality of pixel regions 507a may be a stripe arrangement having different colors in the row direction. Furthermore, the arbitrary three pixel regions 507a arranged in the row direction and the column direction may be in a mosaic arrangement of three colors of R, G, and B, and the plurality of pixel regions 507a is a delta arrangement in a staggered manner. May be.

  Next, the droplet discharge device according to the present invention will be described. As shown in FIGS. 2 to 4, the droplet discharge device 1 includes a drawing device 2 on which a functional droplet discharge head 61 is mounted, and maintenance means 3 attached to the drawing device 2. In addition to maintaining / recovering the function of the functional droplet discharge head 61, the drawing apparatus 2 performs a drawing process for discharging the functional liquid onto the substrate W. Further, the liquid droplet ejection apparatus 1 incorporates an operation panel 4 for inputting various data, a controller 5 (control means, see FIG. 7) for overall control of each part, and the like.

  The drawing apparatus 2 is installed on a floor and a plurality of (for example, five) carriage units 11 including a plurality of (for example, twelve) functional liquid droplet ejection heads 61 and a carriage 52 on which the functional droplet discharge heads 61 are mounted. An XY moving mechanism 12 comprising an X-axis table 13 to be moved to the right and a Y-axis table 14 disposed so as to straddle the X-axis table 13 and individually moving the five carriage units 11 in the Y-axis direction; And image recognition means 15 for recognizing W, the carriage unit 11 and the like.

  A region where the movement locus of the substrate W by the X-axis table 13 and the movement locus of the carriage unit 11 by the Y-axis table 14 intersect is a drawing area 21 where drawing processing is performed. A region outside the X-axis table 13 on the movement trajectory of the carriage unit 11 is a maintenance area 22, and a part of the maintenance means 3 is installed in the maintenance area 22. On the other hand, the area on the near side of the X-axis table 13 is a substrate carry-in / out area 23 where the substrate W is carried into and out of the droplet discharge device 1.

  The X-axis table 13 is provided on a stone surface plate 31 installed on the floor, and is connected to a suction table 32 that sucks and sets the loaded substrate W, and a lower portion of the suction table 32, and passes through the suction table 32. The substrate θ axis table 33 that finely adjusts (θ correction) the θ position of the substrate W by motor driving, the set table 34 that supports the substrate θ axis table 33, and the set table 34 that is slidable in the X axis direction. An X-axis slider 35, a pair of left and right X-axis linear motors (not shown) that extend in the X-axis direction and move the substrate W in the X-axis direction via the suction table 32, and an X-axis linear motor are provided in parallel. A pair of X-axis guide rails 36 for guiding the movement of the X-axis slider 35 and an X-axis linear scale 37 (see FIG. 7) for grasping the position of the suction table 32 are provided. When the pair of X-axis linear motors are driven, the X-axis slider 35 is moved in the X-axis direction while the pair of X-axis guide rails 36 are used as guides, and the substrate W set on the suction table 32 is moved in the X-axis direction. Moving.

  Note that a standby flushing box 98 and a pair of drawing flushing boxes 99 constituting the maintenance means 3 to be described later are provided at both the front and rear sides of the suction table 32 and the drawing area 21 side end on the set table 34, respectively.

  On the other hand, the Y-axis table 14 is supported on a pair of front and rear support stands 41 extending in the Y-axis direction. The Y-axis table 14 spans between the drawing area 21 and the maintenance area 22. Five carriage units 11 are individually moved between each unit and the upper part.

  The Y-axis table 14 is supported by supporting both of the five bridge plates 44 that vertically suspend the five carriage units 11 and the five bridge plates 44 that are not shown in the drawing so that the five bridge plates 44 are aligned in the Y-axis direction. 5 sets of Y-axis air sliders, a pair of front and rear Y-axis linear motors extending in the Y-axis direction and moving each bridge plate 44 in the Y-axis direction via each set of Y-axis air sliders, and Y-axis Two Y-axis guide rails that extend in the direction and guide the movement of the five bridge plates 44, and a Y-axis linear scale 45 (see FIG. 7) that detects the movement position of each carriage unit 11. I have. The five carriage units 11 are arranged in a staggered manner in the Y-axis direction so as to avoid mutual physical interference.

  Then, by moving each air slider, each carriage unit 11 can be moved in the Y-axis direction, and twelve functional liquid droplet ejection heads 61 mounted thereon move together in the Y-axis direction. Needless to say, it is also possible to move the five carriage units 11 in the Y-axis direction all at once.

  Each carriage unit 11 includes a head unit 51 having twelve functional liquid droplet ejection heads 61 and a carriage 52 on which the head unit 51 is mounted. Each carriage 52 holds the head unit 51 and finely adjusts the head θ axis table 53 for finely adjusting the θ position of the head unit 51 by motor driving (θ axis correction) and the vertical position of the head unit 51 by motor driving. A head Z-axis table 54 (work gap adjustment between the surface of the substrate W and a nozzle surface 83 described later) is provided. Although not shown, each carriage 52 is provided with two reference pins serving as a reference for positioning (position recognition) each carriage unit 11 on the premise of image recognition.

As shown in FIG. 5, each head unit 51 is composed of 12 functional liquid droplet ejection heads 61 and thick plates having a substantially parallelogram shape in plan view made of stainless steel or the like, and 12 functional liquid droplet ejection heads 61. And a head plate 62 for positioning the head. The head unit 51 is detachably mounted on the carriage 52 via the head plate 62. Each functional liquid droplet ejection head 61 is fixed to the head plate 62 so that the nozzle row 84 is parallel to the Y-axis direction when mounted on the carriage 52. However, the nozzle row 84 may be inclined with respect to the Y-axis direction.
In the figure, for convenience of explanation, each functional liquid droplet ejection head 61 is represented as one nozzle row 84 composed of eight nozzles 85, but actually, as will be described later. , Two nozzle rows 84 each including 180 nozzles 85 are formed.

  The twelve functional liquid droplet ejection heads 61 are divided into three groups of four head groups 63. The three functional liquid droplet ejection heads 61 in each group are connected to each other in the X axis direction and at the same position in the Y axis direction, and the functional liquids of R, G, and B colors are sequentially provided from the upper side of the same figure. Has been introduced. Then, the first and second head groups 63 counted from the left side of the drawing are arranged in units of head groups so that the plurality of nozzles 85 of the two function liquid droplet ejection heads 61 of each color are continuous in the Y-axis direction. The third group and the fourth group of head groups 63 are arranged in a staircase while being shifted in the axial direction, and the first group and the second group of head groups 63 are arranged to avoid physical interference between the functional liquid droplet ejection heads 61. The head group 63 is rearranged in the Y-axis direction and has a gap (approximately 5 heads) and is arranged in the same staircase shape as described above.

  The number and arrangement of the functional liquid droplet ejection heads 61 are not limited to this and are arbitrary. Further, the functional liquid of the same color is introduced into any of the functional liquid droplet ejection heads 61, and the R, G, and B three-color drawing processing is performed by the three liquid droplet ejection apparatuses 1 that can draw the monochromatic functional liquid. It may be. Further, although details will be described later, various functional liquids can be introduced into the functional liquid droplet ejection head 61 in addition to the functional liquids of R, G, and B colors.

  Then, by increasing or decreasing the number of carriage units 11 to be operated according to the size of the substrate W, it is possible to perform drawing processing from end to end of the substrate W at the same time. However, as described above, Since the four groups of head groups 63 are divided between the second group and the third group, it is not possible to land functional droplets on all the pixel areas 507a of the filter area Wf at the same time. (Line feed scanning) must be performed (details will be described later).

  As shown in FIG. 6, the functional liquid droplet ejection head 61 has a so-called double structure, that is, a functional liquid introduction part 71 having two connection needles 72 and two series connected to the side of the functional liquid introduction part 71. The head substrate 73 and a head main body 74 which is connected to the lower side (upper side in the figure) of the functional liquid introducing portion 71 and has an in-head flow path filled with the functional liquid therein. The connection needle 72 is connected to a functional liquid tank (not shown) that is installed on each bridge plate 44 and stores the functional liquid of each color, and the functional liquid is supplied to the flow path in the head of the functional liquid droplet ejection head 61. Supply.

  The head main body 74 has two pump parts 81 composed of piezoelectric elements and a nozzle plate 82 having a nozzle surface 83 in which two nozzle rows 84 are formed in parallel to each other. Each nozzle row 84 is configured by arranging a plurality of (for example, 180) nozzles 85 at an equal pitch (for example, 140 μm). Both nozzle rows 84 are shifted from each other by a half pitch (70 μm) in the nozzle row direction. That is, the nozzle pitch by the two nozzle rows 84 is 70 μm.

  The head substrate 73 is provided with two series of connectors 75, and each connector 75 is connected to a head driver 111 (see FIG. 7) described later by a flexible flat cable. Then, a drive waveform is applied from the controller 5 to each pump unit 71 via the head driver 111, and functional droplets are ejected from each nozzle 85.

  Although the details will be described later, the drawing apparatus 2 moves the substrate W in the X-axis direction by the X-axis table 13 and applies a plurality of nozzles corresponding to each pixel region 507a facing each functional liquid droplet ejection head 61. The main scanning for ejecting and landing functional droplets from 85 and the sub-scanning for moving the carriage unit 11 in the Y-axis direction by the Y-axis table 14 are repeated to fill the entire area of each pixel region 507a with the functional liquid. The drawing process is performed. In one main scan, the substrate W may be moved forward or backward only once, and the forward and / or backward motion may be performed a plurality of times.

  As shown in FIGS. 2 to 4, the image recognition means 15 is disposed so as to face both the front and rear sides of the substrate carry-in / out area 23, and two substrate alignment marks Wm formed on both long side portions of the substrate W, respectively. Two substrate recognition cameras 91 that recognize images respectively, and a head recognition camera 92 (see FIG. 7) that is connected to the X-axis slider 35 of the X-axis table 13 and recognizes two reference pins of each carriage 52. Have. Based on the image recognition results of these various cameras, position correction of the substrate W and each carriage unit 11 is performed.

  The maintenance means 3 is arranged in the maintenance area 22 and includes five suction units 95 that perform suction for removing the functional liquid thickened in the functional liquid droplet ejection head 61, and nozzles of the functional liquid droplet ejection head 61. Two wiping units 96 for wiping the surface 83 and a flight observation unit 97 arranged on the drawing area 21 side of the wiping unit 96 are provided.

  Further, the maintenance unit 3 includes a standby flushing box 98 disposed on the set table 34 and a pair of drawing flushing boxes 99 disposed on both front and rear sides of the suction table 32. The standby flushing box 98 is flushed (discarded) when waiting for drawing (when the substrate W is replaced, etc.), and to the substrate W of the functional liquid droplet ejection head 61 for each drawing flushing box. A large number of shots are flushed immediately before and after the discharge of functional droplets.

  Next, with reference to FIG. 7, a control system of the entire droplet discharge device 1 will be described. The control system of the droplet discharge apparatus 1 basically includes an input unit 101 having an operation panel 4 for inputting various data and various cameras of the image recognition means 15 to recognize the position of the substrate W and each carriage unit 11. A position detection unit 102 that performs the above operation, a movement detection unit 103 that includes the X-axis linear scale 37 and the Y-axis linear scale 45 to detect the position of the suction table 32 and each carriage unit 11, and the functional liquid droplet ejection head 61. , A drive unit 104 having various drivers for driving the XY moving mechanism 12 and the like, and a control unit 105 (controller 5) that comprehensively controls the droplet discharge device 1 including these units.

  The drive unit 104 includes a head driver 111 that controls the ejection of the functional liquid droplet ejection head 61 and a motor driver 112 that controls the respective motors of the XY moving mechanism 12. The head driver 111 generates and applies a predetermined drive waveform in accordance with an instruction from the control unit 105, and controls the ejection of the functional liquid droplet ejection head 61. The motor driver 112 includes an X-axis motor driver 113, a Y-axis motor driver 114, a substrate θ-axis motor driver 115, a head θ-axis motor driver 116, and a head Z-axis motor driver 117, which are instructed by the control unit 105. The X axis linear motor of the X axis table 13, the Y axis linear motor of the Y axis table 14, the drive motor of the substrate θ axis table 33, the drive motor of the head θ axis table 53, and the drive motor of the head Z axis table 54 are driven. Control.

  The control unit 105 includes a CPU 121, a ROM 122, a RAM 123, and a P-CON 124, which are connected to each other via a bus 125. The ROM 122 has a control program area for storing a control program to be processed by the CPU 121, and a control data area for storing control data for performing drawing processing and image recognition.

  The RAM 123, in addition to various register groups, a drawing data area for storing drawing data for drawing processing, an image data area for temporarily storing image data, and correction data for correcting the position of the substrate W and each carriage unit 11 Is used as various work areas for control processing.

  The P-CON 124 is configured and incorporated with a logic circuit that complements the functions of the CPU 121 and handles interface signals with peripheral circuits. For this reason, the P-CON 124 fetches image data, various commands from the input unit 101 as they are or processes them into the bus 125, and interlocks with the CPU 121 to output data and control signals output from the CPU 121 and the like to the bus 125. Is output to the drive unit 104 as it is or after being processed.

  The CPU 121 inputs various detection signals, various commands, various data, etc. via the P-CON 124 according to the control program in the ROM 122, processes various data, etc. in the RAM 123, and then drives via the P-CON 124. The entire droplet discharge device 1 is controlled by outputting various control signals to the unit 104 and the like. For example, the CPU 121 controls the functional droplet discharge head 61, the X-axis table 13, and the Y-axis table 14 to perform drawing on the substrate W under predetermined droplet discharge conditions and predetermined movement conditions.

  Here, with reference to FIG. 8 and FIG. 9, the drawing method by the droplet discharge device 1 according to the present embodiment will be described in detail. In the drawing method of the present embodiment, functional droplets are ejected and landed on each pixel region 507a so that the entire area of each pixel region 507a is filled with the functional liquid, while on the virtual pixel region 207 described later. The functional liquid droplets are ejected and landed so that the landing position can be inspected.

  In the figure, only one carriage unit 11 is described, but when drawing processing is performed on a large substrate W, the other carriage units 11 perform drawing operations in the same manner. Similarly to FIG. 5, each functional liquid droplet ejection head 61 is provided with eight nozzles 85, and each pixel region 507a corresponds to three nozzles 85. Shall.

  First, when the substrate W is introduced into the droplet discharge device 1 and set on the suction table 32, image recognition is performed by various cameras of the image recognition means 15, and position correction (alignment) of the substrate W and the carriage unit 11 is performed. (See FIGS. 2 to 4).

  Here, as described above, since the four head groups 63 are divided between the second group and the third group, the functional liquid droplets cannot be landed on all the pixel regions 507a at once. . For this reason, the filter region Wf is divided into a plurality of (for example, six) virtual divided portions Wa1 to Wa6 substantially evenly in the Y-axis direction, and the first and fourth from the left in the figure while performing sub-scanning (line feed scanning). The drawing for the virtual divided parts Wa1, Wa4, the drawing for the second and fifth virtual divided parts Wa2, Wa5, and the drawing for the third and sixth virtual divided parts Wa3, Wa6 are performed in order. It has become. At the time when the above alignment is completed, each functional liquid droplet ejection head 61 faces the first and fourth virtual divided portions Wa1 and Wa4 from the left side in the drawing.

  In addition, main scanning is performed a plurality of times (for example, six times) to discharge a predetermined amount of functional liquid to each pixel region 507a. At this time, in order to ensure that the entire area can be filled with the functional liquid, the landing positions of the functional liquid droplets by six main scans are mutually in the row direction (Y-axis direction) within the same pixel region 507a. The carriage unit 11 is moved so as to be displaced.

  Accordingly, the drawing cycle including three main scans and two sub scans is performed on the substrate W for six cycles. That is, 18 main scans are performed in one drawing process.

  In the same figure, the order of drawing on the virtual divided portions Wa1 to Wa6 in each cycle is arbitrary. Furthermore, instead of the drawing cycle format described above, after the main scanning is completed six times for the same virtual divided part (for example, Wa1, Wa4), the process proceeds to the next virtual divided part (for example, Wa2, Wa5). It may be. In this case, sub-scanning in which each carriage unit 11 is slightly moved is performed between six main scans.

  In this way, drawing processing by the functional liquid droplet ejection head 61 is performed on each pixel region 507a. That is, functional droplets are ejected and landed from the three nozzles 85 facing each pixel region 507a. On the other hand, the functional liquid droplets are not discharged from the nozzles 85 facing the partition walls 507b. In FIG. 9, in each main scan, one shot of functional liquid droplets is ejected and landed from each corresponding nozzle 85 to each pixel region 507a. 4 to 6 shots) of functional droplets are ejected and landed.

  Further, in the main scanning over a plurality of times, in addition to the ejection and landing of the functional liquid droplets on each pixel area 507a, the functional liquid droplets are ejected and landed on the peripheral area Wb. That is, the control unit 105 sets (assumes) a plurality of virtual pixel areas 207 for ejecting and landing functional droplets for landing position inspection on the peripheral area Wb. A plurality of virtual pixel areas 207 are set on the extension of all the columns of the plurality of pixel areas 507a (all on the upper side in the drawing) corresponding to the functional droplet discharge heads 61 for each color. The pixel area 207t is composed of a right virtual pixel area 207r that is set on an extension of each row (all on the right side in the figure).

  Each virtual pixel region 207 has the same shape and size as each pixel region 507a. Further, the interval between the upper virtual pixel regions 207t arranged in the same column and the interval between each upper virtual pixel region 207t and each pixel region 507a arranged in the same column are equal to the pitch between the pixel regions 507a in the column direction. In addition, the interval between each right virtual pixel region 207r and each pixel region 507a arranged in the same row is set to be equal to the pitch between the pixel regions 507a in the row direction.

  When drawing the pixel areas 507a of the first and fourth virtual division parts Wa1 and Wa4, one nozzle 85 out of the corresponding three nozzles 85 for the three upper virtual pixel areas 207t in each column. The functional liquid droplets are ejected and landed. That is, the functional liquid droplet ejection head 61 for each color is controlled so that functional liquid droplets are ejected and landed on the three upper virtual pixel regions 207t in each column according to the stripe color arrangement pattern. The same applies to the drawing of the pixel regions 507a of the second and fifth virtual divided portions Wa2 and Wa5 and the drawing of the pixel regions 507a of the third and sixth virtual divided portions Wa3 and Wa6. Of the three nozzles 85 corresponding to each virtual pixel region 207, one nozzle 85 for ejecting and landing functional droplets is appropriately changed so that the landed functional droplets are separated as much as possible. It is preferable.

  Further, when drawing the pixel regions 507a of the third and sixth virtual divided portions Wa3 and Wa6, one nozzle 85 out of the corresponding three nozzles 85 is applied to each right virtual pixel region 207r. Discharge and land functional droplets. That is, by controlling the functional droplet discharge head 61 for each color, functional droplets are ejected and landed on the plurality of right virtual pixel regions 207r according to the stripe color arrangement pattern for the plurality of pixel regions 507a.

  It should be noted that it is preferable to eject and land one shot of functional droplets from each nozzle in each main scan so that the landed functional droplets do not overlap each other in each virtual pixel region 207. Similarly, it is preferable that functional droplets be ejected and landed from one of the corresponding three nozzles 85, but two or more if the landed functional droplets do not overlap each other. Functional droplets may be discharged and landed from the nozzle 85. In this case, it is preferable to discharge from each nozzle 85 of the two nozzle rows 84.

  By performing the drawing process as described above, the entire area is filled with the functional liquid in each pixel region 507a so that the landed functional liquid droplets overlap each other. Since the surface of each pixel region 507a is lyophilic, the landed functional liquid droplets are likely to overlap (easily spread). On the other hand, in each virtual pixel region 207, the landed functional liquid droplets do not overlap each other, and the landing position can be indicated. Since each virtual pixel region 207 is lyophobic, the landed functional droplets are unlikely to overlap (i.e., difficult to spread).

  For this reason, after the drawing process is completed (for example, after a drying process for fixing a functional liquid, which will be described later), it is possible to appropriately recognize the function droplets that have landed on the virtual pixel region 207. As a result, the landing position of the functional liquid droplet for each main scanning can be inspected, and the relative position in the Y-axis direction between the substrate W and the functional liquid droplet ejection head 61 in each main scanning can be accurately recognized. Become. That is, it is possible to recognize whether each sub-scan has been performed accurately. Therefore, based on the recognition result, for example, the position data for each main scan of the carriage unit 11 is corrected and corrected to an appropriate relative position for each main scan, so that the drawing operation can be performed accurately. .

  In particular, in the present embodiment, the carriage unit 11 is sub-scanned so that the landing positions of the functional liquid droplets by the main scanning over a plurality of times are shifted from each other in the row direction (Y-axis direction) within the same pixel region 507a. Therefore, advanced position management is required, but this drawing method can cope with this.

  Note that the virtual pixel region 207 may be set at a position shifted from the row or column of the plurality of pixel regions 507a, or may be set at a corner of the peripheral region Wb. However, by setting the extension on each row, functional droplets are landed from the common nozzle 85 on each upper virtual pixel region 207t and the pixel region 507a arranged in the same column as the upper virtual pixel region 207t. For this reason, the landing position of the functional liquid droplet from the nozzle 85 corresponding to each pixel region 507a can be inspected.

  Alternatively, one upper virtual pixel region 207t may be set for each of the first to third virtual division portions Wa1 to Wa3. That is, in each main scan, a functional droplet may be landed on one upper virtual pixel region 207t. Furthermore, if the drawing lines by the plurality of nozzles 85 of the plurality of functional liquid droplet ejection heads 61 are in a so-called full line format, line feed scanning is unnecessary (setting of the virtual divided portions Wa1 to Wa6 is unnecessary). One upper virtual pixel region 207t may be set for the entire substrate W.

  However, by landing the functional liquid droplets on the plurality of upper virtual pixel areas 207t as in the present embodiment, the landing positions of the functional liquid droplets can be inspected for all the columns of the plurality of pixel areas 507a. In the present embodiment, a plurality of right virtual pixel areas 207r corresponding to all rows of the plurality of pixel areas 507a are set, and functional droplets are landed on the right virtual pixel areas 207r. The landing positions of the functional liquid droplets can be inspected for all the rows of the pixel region 507a.

  In this way, in addition to performing the drawing process that enables recognition of the relative positions of the substrate W and the functional liquid droplet ejection head 61 in the sub-scanning direction in each main scanning, all the rows of the plurality of pixel regions 507a can be performed. And the landing position of the functional droplet can be inspected for each of the entire rows. For this reason, even when there is a cause of defective landing position, it is possible to analyze the cause based on the inspection result of the landing position for each row and column, and after taking appropriate measures, the next substrate W Can be rendered.

  For example, when the landing position is shifted in the X-axis direction between the forward movement and the backward movement of the substrate W, the time from the ejection instant to the functional liquid landing is different between the forward movement and the backward movement. It is thought that this is because the flow of the apparatus atmosphere is different. In this case, correction values for position data in the X-axis table 13 are set for forward movement and / or backward movement.

  Further, when the landing position from a certain nozzle 85 is always deviated, it is considered that the flight bending due to the functional liquid adhering to the nozzle 85 is caused. In this case, the nozzle surface 83 is cleaned by the suction unit 95 and the wiping unit 96 described above. At this time, if the displacement of the landing position is not eliminated even after cleaning, it is considered that the processing accuracy of the nozzle 85 is the cause. In this case, the functional droplet discharge head 61 is replaced. Note that the flight observation unit 97 may check for the presence or absence of a flight curve.

  Further, when there is a nozzle 85 whose landing positions are randomly shifted, the meniscus of the nozzle 85 is not stable, the function liquid concentration varies, the minute liquid is mixed into the function liquid, and the like. it is conceivable that. In this case, taking measures such as drawing the inner side of each pixel region 507a in consideration of the shift amount, making the work gap as small as possible, and designing a drive waveform in which the functional liquid droplets fly stably are taken. In addition, as a drive waveform in which the functional droplets fly stably, for example, a drive waveform with less residual vibration of the previous ejection, a drive waveform with less influence of vibration of the adjacent nozzle 85, and a mist (fine mist-like shape). A drive waveform or the like where functional droplets are less likely to occur is conceivable.

  Further, when the landing positions from all the functional liquid droplet ejection heads 61 are uniformly deviated, it is conceivable that the alignment of the substrate W and each carriage unit 11 is deviated. In this case, the alignment positions of the substrate W and each carriage unit 11 are corrected.

  Furthermore, functional droplets land on the plurality of upper virtual pixel regions 207t and the plurality of right virtual pixel regions 207r from the functional droplet ejection heads 61 for the respective colors with the same color scheme as the three-color stripe color scheme. The landing positions of the functional liquid droplets in the Y-axis direction and the X-axis direction can be inspected for each functional liquid droplet ejection head 61. For this reason, the relative position (assembly accuracy) between the functional droplet discharge heads 61 for each color can be recognized.

  That is, when the landing positions from a plurality of nozzles 85 of a certain functional liquid droplet ejection head 61 are uniformly deviated and the displacement of the landing positions is not eliminated even after cleaning, the set of functional liquid droplet ejection heads 61 is set. This is probably due to the accuracy of the attachment. In this case, the functional droplet discharge head 61 is replaced. Of course, as described above, even when the functional liquid of the same color is introduced into all the functional liquid droplet ejection heads 61, the relative positions (assembly accuracy) between the functional liquid droplet ejection heads 61 are recognized in the same manner. Is possible.

  As described above, according to the droplet discharge device 1 of the present embodiment, the relative position in the sub-scanning direction between the substrate W and the functional droplet discharge head 61 in each main scan can be recognized, and a plurality of pixels can be recognized. For each of all the rows and all the columns in the region 507a, a drawing process for enabling the landing positions of the functional liquid droplets to be inspected can be performed.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 10 is a flowchart showing the manufacturing process of the color filter, and FIG. 11 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 11B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 11C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 11 (d), functional droplets are ejected by the functional droplet ejection head 28 to enter each pixel region 507a surrounded by the partition wall portion 507b. Let it land. In this case, the functional liquid droplet ejection head 28 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. 11E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 12 is a cross-sectional view of a main part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 11, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 12 are formed at a predetermined interval. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 28. Furthermore, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 28.

FIG. 13 is a cross-sectional view of an essential part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 14 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 15 is a cross-sectional view of a main part of a display region of the organic EL device (hereinafter simply referred to as a display device 600).

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 16, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 17, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by, for example, plasma treatment using oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane as a processing gas. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 28, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 32 of the droplet discharge device 1 shown in FIG. 2, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 19, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is removed from the functional liquid droplet ejection head 28 into each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 20, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 21, the second composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 21) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 22, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 28, as shown in FIG. 23, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 24, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 25 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are disposed at the bottom of the blue discharge chamber 705B and the bottom, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 32 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 28. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode forming regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 28, and corresponding. Land in the color discharge chamber 705.

Next, FIG. 26 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 27A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the above-described droplet discharge device 1 for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a plane schematic diagram of the board | substrate used as the drawing object of the droplet discharge apparatus which concerns on embodiment of this invention. It is an external appearance perspective view of a droplet discharge device. It is a top view of a droplet discharge device. It is a side view of a droplet discharge device. FIG. 3 is a schematic plan view of a head unit mounted on a droplet discharge device. It is an external perspective view of a functional liquid droplet ejection head mounted on the liquid droplet ejection apparatus. It is the block diagram explaining the control system of the droplet discharge apparatus. It is a figure explaining the drawing process of the droplet discharge apparatus with respect to a board | substrate. FIG. 9 is a partially enlarged view of the substrate on which drawing processing has been performed in FIG. 8. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge apparatus 5 ... Controller 12 ... XY moving mechanism 61 ... Functional droplet discharge head 85 ... Nozzle 207 ... Virtual pixel area 507a ... Pixel area W ... Substrate Wb ... Peripheral area Wf ... Filter area

Claims (11)

A functional liquid droplet ejection head having a plurality of nozzles on a substrate comprising a plurality of pixel regions arranged in a row direction and a column direction orthogonal to each other and a peripheral region surrounding the four circumferences of the actual drawing region. While moving relatively in the X-axis direction, main scanning for ejecting and landing functional droplets from the corresponding nozzles to the respective pixel areas, and relatively moving the functional droplet ejection head in the Y-axis direction In performing the drawing process so as to fill the entire area of each of the plurality of pixel regions with the functional liquid by alternately repeating the sub-scan to be moved,
At least one virtual pixel region for landing position inspection that accepts landing of functional droplets from the nozzle for each main scan is set in the peripheral region,
A drawing method for a droplet discharge apparatus, wherein in each main scan, functional droplets are discharged and landed on each pixel region and each virtual pixel region, respectively. A functional liquid droplet ejection head having a plurality of nozzles;
A substrate composed of an actual drawing region in which a plurality of pixel regions are arranged in a row direction and a column direction orthogonal to each other and a peripheral region surrounding the four circumferences of the actual drawing region is mounted, and the functional liquid droplet is mounted on the substrate. XY movement means for relatively moving the ejection head in the X-axis direction and the Y-axis direction,
Control means for controlling the functional liquid droplet ejection head and the XY moving means,
The control means includes
Main scanning for ejecting and landing functional droplets from the corresponding nozzles to the pixel regions while moving the functional droplet ejection head relative to the substrate in the X-axis direction, and the function In performing the drawing process so that each of the plurality of pixel regions is filled with the functional liquid by alternately repeating sub-scanning that relatively moves the droplet discharge head in the Y-axis direction,
At least one virtual pixel region for landing position inspection that accepts landing of functional droplets from the nozzle for each main scan is set in the peripheral region,
In each of the main scans, a droplet discharge device that discharges and lands functional droplets on the pixel regions and the virtual pixel region, respectively. The XY moving means mounts the substrate so that the column direction is parallel to the X-axis direction,
The control means causes each of the pixel regions to perform the main scanning a plurality of times, and the landing positions of the functional liquid droplets by the main scanning over a plurality of times are shifted from each other in the row direction within the same pixel region. The liquid droplet ejection apparatus according to claim 2, wherein the sub-scan is performed as described above.   4. The droplet discharge according to claim 2, wherein the control unit sets the virtual pixel region on at least an extension of one or more columns of the plurality of pixel regions. 5. apparatus.   5. The droplet discharge device according to claim 4, wherein the control unit sets the virtual pixel region on at least an extension of each of the plurality of pixel regions. The functional liquid droplet ejection head is constituted by connecting a plurality of color-specific ones into which a plurality of color functional liquids are introduced, in the X-axis direction,
The XY moving unit moves the plurality of functional liquid droplet ejection heads for each color integrally with respect to the substrate in the X-axis direction and the Y-axis direction,
The control means includes
The plurality of functional droplet discharge heads for each color are controlled to discharge and land the functional droplets on the plurality of pixel areas based on a plurality of color arrangement patterns,
Corresponding to the plurality of functional droplet discharge heads for each color, a plurality of the virtual pixel regions are set on the extension of each column,
6. The liquid droplet ejection apparatus according to claim 4, wherein functional liquid droplets are ejected and landed on the plurality of virtual pixel regions in each column according to the color arrangement pattern.   7. The liquid droplet ejection according to claim 2, wherein the control unit sets the virtual pixel region on at least an extension of each of the plurality of pixel regions. apparatus. The functional liquid droplet ejection head is constituted by connecting a plurality of color-specific ones into which a plurality of color functional liquids are introduced, in the X-axis direction,
The XY moving unit moves the plurality of functional liquid droplet ejection heads for each color integrally with respect to the substrate in the X-axis direction and the Y-axis direction,
The control means includes
The plurality of functional droplet discharge heads for each color are controlled to discharge and land the functional droplets on the plurality of pixel regions based on a color arrangement pattern of a plurality of color stripes having different colors in the column direction,
8. The functional liquid droplets are ejected and landed on the plurality of virtual pixel regions set on the extension of each row of the plurality of pixel regions, respectively, according to the color arrangement pattern. Droplet discharge device.   9. A method for manufacturing an electro-optical device, wherein the droplet discharge device according to claim 2 is used to form a film forming portion with functional droplets on the substrate.   An electro-optical device using the droplet discharge device according to any one of claims 2 to 8, wherein a film forming portion using functional droplets is formed on the substrate.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 9 or the electro-optical device according to claim 10.

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