JP2007115941A - Gallium nitride compound semiconductor and light emitting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gallium nitride compound semiconductor in which an electrode having low contact resistance with respect to a gallium nitride compound semiconductor, no change in characteristics over time, and high light reflectivity, and high luminous efficiency and high reliability A light-emitting element is provided.
A gallium nitride compound semiconductor 20 has a first metal layer 21 containing Ta, a second metal layer 22 made of any one of Ag, Al, and Rh, Ni, Ti, Nb, and An electrode is formed by sequentially laminating a third metal layer 23 made of any one of Mo and a fourth metal layer 24 containing Au.
[Selection] Figure 2

Description

The present invention relates to a gallium nitride-based compound semiconductor (In _x Al _y Ga _1-xy N; 0 ≦ x, y ≦ 1, x + y ≦ 1), and a light-emitting element formed by stacking the semiconductors. The present invention relates to an electrode having an electrode with low contact resistance, high light reflectance, and small change in characteristics with time.

Gallium nitride compound semiconductor (In _x Al _y Ga _1-xy N; 0 ≦ x, y ≦ 1, x + y ≦ 1) forms a mixed crystal of AlN, InN, etc. and AlGaN, InGaN, InGaAlN, etc. it can. Such a mixed crystal can change the band gap by selecting its composition, can emit light from the visible light region to the ultraviolet light region, and is a light emitting element such as a light emitting diode (LED) or a semiconductor laser. It has been studied as a material for this, and a part of it has been put into practical use.

  FIG. 1 is a cross-sectional view showing a conventional light emitting device using a gallium nitride compound semiconductor and electrodes formed thereon. In this light emitting element, for example, an n-type semiconductor layer 12, a light emitting layer (active layer) 13, and a p-type semiconductor layer 14 are sequentially stacked on a sapphire substrate 10 via a buffer layer 11 to form an n-type electrode 15. Further, a part of the p-type semiconductor layer 14 is removed by etching, and a part of the n-type semiconductor layer 12 is exposed. The p-type electrode 16 includes a transparent electrode 16 formed on one main surface (upper surface in FIG. 1) of the p-type semiconductor layer 14 in order to extract light emitted from the light-emitting layer 13 to the p-type semiconductor layer 14 side. Further, a pad electrode 17 for wire bonding is formed on a part of the transparent electrode.

  As the p-type electrode 16 made of a transparent electrode, for example, a structure in which a nickel (Ni) layer and a gold (Au) layer are stacked has been proposed (see Patent Document 1).

Patent Document 2 proposes a p-type electrode composed of a laminate of a tantalum (Ta) layer and a titanium (Ti) layer, and a contact resistivity of 6 × 10 ⁻⁵ Ωcm ² is obtained. Yes.

1 has a configuration in which the p-type electrode 16 is transparent to the generated light in order to mainly extract light generated in the light-emitting layer 13 from the p-type semiconductor layer 14 side. It is also possible to form the p-type electrode 16 from a light-reflective material and reflect the light generated in the light emitting layer 13 by the p-type electrode 16 and take it out from the sapphire substrate 10 side. In this case, the p-type electrode 16 and the n-type electrode 15 are electrically connected to a wiring conductor or the like of an external mounting substrate to mount the light-emitting element.
JP-A-5-291621 JP 2000-82843 A

  An electrode formed on a gallium nitride compound semiconductor layer cannot obtain a low contact resistance simply by forming a metal layer on the gallium nitride compound semiconductor layer to form an electrode. However, since the contact resistance of the p-type electrode 16 is higher than the contact resistance of the n-type electrode 15 even after heat treatment, the current spread in the p-type semiconductor layer 14 is poor, and the vicinity of the pad electrode 17 There was a problem that the uniformity of light emission was poor, such as light emission was only seen in

  Further, when the contact resistance is high, there is a problem that a large voltage drop occurs between the electrode and the gallium nitride compound semiconductor layer, causing an increase in operating voltage of the light emitting element and a decrease in light emission efficiency.

Further, even in a p-type electrode having a structure in which a nickel (Ni) layer and a gold (Au) layer are stacked as disclosed in Patent Document 1, the contact resistivity with the p-type semiconductor layer is 1 × 10 ⁻² to 1 It is about × 10 ⁻³ Ωcm ^2, which is two orders of magnitude higher than the contact resistivity of 1 × 10 ⁻⁵ to 1 × 10 ⁻⁶ Ωcm ² between the n-type electrode and the n-type semiconductor layer.

Further, the p-type electrode composed of a tantalum (Ta) layer and a titanium (Ti) layer disclosed in Patent Document 2 has a contact resistance as low as 6 × 10 ⁻⁵ Ωcm ² , but it is in the open air. There was a problem that the contact resistance gradually increased and the contact resistivity changed with time. For example, in a lighting fixture using such a light emitting element, the characteristics at the time of use are worse than the initial characteristics, and the characteristics are deteriorated during use, so that the product variation becomes large.

  Accordingly, the present invention has been completed in view of the above-mentioned problems in the prior art, and its purpose is to have low contact resistance with a gallium nitride compound semiconductor, no change in characteristics over time, and light reflection. It is an object to provide a gallium nitride-based compound semiconductor using an electrode with high properties and a light-emitting element with high emission efficiency and high reliability.

  The gallium nitride compound semiconductor of the present invention has a first metal layer containing Ta, a second metal layer made of any one of Ag, Al and Rh, Ni, Ti, Nb and Mo on the surface. An electrode is formed by sequentially laminating a third metal layer made of any of the above and a fourth metal layer containing Au.

  The light emitting device of the present invention includes a first conductive semiconductor layer made of a gallium nitride compound semiconductor, a light emitting layer made of a gallium nitride compound semiconductor, and a second conductive semiconductor layer made of a gallium nitride compound semiconductor on a substrate. And a semiconductor layer in which these layers are stacked in this order is formed, a second conductivity type electrode formed on the second conductivity type semiconductor layer, and a part of the second conductivity type semiconductor layer In the light emitting device provided with the first conductivity type electrode formed on the exposed portion of the first conductivity type semiconductor layer formed by removing the first conductivity type semiconductor layer to the first conductivity type semiconductor layer, the first and second conductivity types At least one of the electrodes is composed of a first metal layer composed of a layer containing Ta, a second metal layer composed of any one of Ag, Al, and Rh, and any one of Ni, Ti, Nb, and Mo. Third metal layer And a fourth metal layer containing Au is characterized by comprising sequentially laminated.

  The gallium nitride compound semiconductor of the present invention has a first metal layer containing Ta, a second metal layer made of any one of Ag, Al and Rh, Ni, Ti, Nb and Mo on the surface. Since the electrode is formed by sequentially laminating the third metal layer made of any of the above and the fourth metal layer containing Au, the first metal layer is lower than the gallium nitride compound semiconductor. It mainly functions as a contact layer for obtaining contact resistance, and the second metal layer mainly functions as a reflective layer that reflects light generated in the light emitting layer toward the inner side of the gallium nitride compound semiconductor, The metal layer mainly functions as a diffusion prevention layer for preventing the diffusion of elements of the fourth metal layer, and the fourth metal layer further includes solder, conductor bumps, etc. on the wiring conductor of the external mounting circuit board. When connecting electrodes via solder or conductor Mainly functions as a connection layer to enhance the adhesion between the pump and the like.

By making the first metal layer a Ta layer and the second metal layer a layer made of any one of Ag, Al, and Rh, the Ta layer has a low contact resistance value with respect to the gallium nitride compound semiconductor. Obtainable. In addition, the reaction between Ta, which forms the first metal layer, and any one of Ag, Al, and Rh, which forms the second metal layer, does not proceed extremely even at high temperatures. For example, when a Ti layer is used for the first metal layer, Ti and Ag may react to form a reaction layer such as Ti ₂ Ag or TiAg, and a Ni layer is used for the first metal layer. In some cases, a solid solution or alloy may be formed. When such a reaction layer is formed, there is a concern that the reflectance is lowered, such as a reflectance different from the original reflectance of Ag.

  However, as in the present invention, Ta and Ag, Al, and Rh are low in reactivity even at high temperatures. Therefore, the first and the first are also used during the heat treatment of the electrodes and during the solder reflow when the light emitting element is mounted on the package. The reaction between the two metal layers is suppressed, light reflectivity close to the reflectivity of pure Ag, pure Al, and pure Rh can be obtained even after the manufacturing process, and high luminous efficiency can be obtained as a light emitting element.

  As described above, by having the first metal layer containing Ta and the second metal layer made of any one of Ag, Al, and Rh, an electrode having both low contact resistance and high light reflectivity is obtained. be able to.

  Furthermore, by making the third metal layer a layer made of any one of Ni, Ti, Nb, and Mo, it is possible to suppress the diffusion of Au contained in the fourth metal layer. During the alloying heat treatment of the electrode and the heat treatment for solder connection when mounted on the package, the Au contained in the fourth metal layer is likely to diffuse, and the diffusion causes rough surface of the electrode, deterioration of contact resistance, and reflectance. Cause a decline. Further, not only Au contained in the fourth metal layer but also diffusion of components contained in solder at the time of mounting, for example, Au or Sn contained in Au—Sn alloy solder or the like causes the same problem. Therefore, by making the third metal layer a layer made of any one of Ni, Ti, Nb, and Mo, diffusion of Au and Sn can be suppressed, and deterioration of light emission characteristics due to a process such as heat treatment can be prevented. It becomes possible to prevent.

  In addition, Ag, Al, particularly Ag, which is the second metal layer, is likely to migrate due to heat treatment, leading to deterioration of contact resistance and surface flatness. Therefore, since Ni, Ti, Nb, and Mo forming the third metal layer react with Ag and Al forming the second metal layer, a reaction layer is formed between the second and third metal layers. Then, migration does not proceed more than the formation of the reaction layer, and the above deterioration can be suppressed. Here, when the reaction layer is formed, the light reflection characteristic which is the main function of the second metal layer may be deteriorated, but the second metal layer is sufficiently thicker than the third metal layer. In this case, even if the reaction layer is formed, the formation range is very small at the interface between the second and third metal layers. Moreover, since the light generated in the light emitting layer is incident from the direction of the first metal layer, the reaction layer does not cause a decrease in reflectance.

  By forming the fourth metal layer containing Au as the uppermost layer, the adhesion with the Au-Sn alloy solder used for electrical connection during mounting on the package is improved, and the light emitting element is firmly fixed to the package. It becomes possible to do. Thereby, the yield improvement at the time of mounting of a light emitting element can be achieved.

Furthermore, since the uppermost layer is the fourth metal layer containing Au, the oxidation of the electrode can be effectively suppressed. A conventional electrode having a structure in which a Ta layer and a Ti layer are laminated has a problem in that contact resistance gradually increases due to being left in the outside air, and a change with time in the contact resistivity is observed. This is because when Ta is left in the outside air, Ta and Ti react with oxygen in the outside air to form oxides such as Ta ₂ O ₅ and TiO ₂ having high resistance, thereby increasing the contact resistance. At the same time, this oxidation is considered to be a change with time. Therefore, by using the fourth metal layer containing Au as the uppermost layer as in the present invention, it is possible to suppress the change in contact resistance with time without causing the above-described oxidation.

  The light emitting device of the present invention includes a first conductive semiconductor layer made of a gallium nitride compound semiconductor, a light emitting layer made of a gallium nitride compound semiconductor, and a second conductive semiconductor layer made of a gallium nitride compound semiconductor on a substrate. In addition, a semiconductor layer in which these layers are stacked in this order is formed, and a second conductivity type electrode formed on the two conductivity type semiconductor layer and a part of the second conductivity type semiconductor layer are defined as the first. In the light emitting device provided with the first conductivity type electrode formed on the exposed portion of the first conductivity type semiconductor layer removed to the conductivity type semiconductor layer, at least one of the first and second conductivity type electrodes is A first metal layer comprising a layer containing Ta, a second metal layer comprising any one of Ag, Al and Rh, a third metal layer comprising any one of Ni, Ti, Nb and Mo; And a fourth containing Au Since the metal layers are sequentially laminated, a light emitting device with high luminous efficiency that can effectively extract light because of low voltage drop at the electrode due to low electrode contact resistance and high light reflectance. Obtainable.

  Embodiments of a light emitting device using a gallium nitride compound semiconductor according to the present invention will be described below in detail with reference to the accompanying drawings.

  FIG. 2 is a cross-sectional view of an electrode formed on the gallium nitride compound semiconductor of the present invention. A first metal layer 21, a second metal layer 22, a third metal layer 23, and a fourth metal layer 24 are sequentially stacked on the gallium nitride compound semiconductor 20.

  The gallium nitride compound semiconductor 20 of the present invention has a first metal layer 21 containing Ta, a second metal layer 22 made of any one of Ag, Al and Rh, Ni, Ti, Nb and Mo on the surface. In this configuration, an electrode is formed by sequentially laminating a third metal layer 23 made of any of the above and a fourth metal layer 24 containing Au.

The gallium nitride-based compound semiconductor 20 of the present invention is represented by the chemical formula In _x Al _y Ga _1-xy N (0 ≦ x, y ≦ 1, x + y ≦ 1). Is a composition of gallium nitride (GaN), indium gallium nitride (InGaN), aluminum gallium nitride (AlGaN), or the like.

  The first metal layer 21 is a layer containing Ta, and may be composed of Ta alone. The first metal layer 21 may be configured in combination with other metal layers or may be mixed with other elements. By mixing other elements, the adhesion of the first metal layer 21 can be improved. Usually, the contact resistance is reduced by heat treatment after electrode formation. In this treatment, a temperature of 800 ° C. is necessary for the conventional laminate of Ta layer and Ti layer, but 800 ° C. or less in the present invention. Lower contact resistance can be obtained by lower temperature treatment.

  As another metal layer exhibiting the above effects, melting points of Ag, Al, and Rh constituting the second metal layer 22 to be laminated next (Ag: 962 ° C., Al: 661 ° C., Rh: 1963 ° C.) A metal layer having a lower melting point is preferable. Specifically, a low melting point metal layer such as an indium (In) layer or a thallium (Tl) layer is preferable.

  Further, Ta is a relatively hard metal, but low melting point metals such as In and Tl are softer than Ta and thus have an effect of relaxing stress, and can prevent electrode peeling.

  In addition, since the first metal layer 21 needs to transmit light, the thickness is preferably a thickness that does not decrease the light transmittance. For example, the thickness for obtaining a transmittance of 80% or more for light with a wavelength of 395 nm is 5 nm or less, and more preferably 3 nm or less.

  The second metal layer 22 is made of any one of Ag, Al, and Rh. The second metal layer 22 is made of a single substance of Ag, Al, or Rh, but an element such as Nd or Bi may be mixed in the layer. By mixing such an element, the heat resistance is further improved, and migration of Ag or the like that occurs during heat treatment for electrode formation or heat treatment for solder connection when mounted on a package can be suppressed. .

  Further, since the thickness of the second metal layer 22 needs to reflect light, for example, the thickness for obtaining a reflectance of 90% or more with respect to light having a wavelength of 395 nm is 70 nm or more. Although preferable, it is preferably 100 nm or more.

  The third metal layer 23 is made of any one of Ni, Ti, Nb, and Mo. The third metal layer 23 has a function of preventing the diffusion of Au contained in the fourth metal layer 24. For this purpose, Ni and Ti can be particularly preferably used. In particular, Ti is preferable because it prevents not only the diffusion of Au but also the diffusion of Sn, which is often contained in solder (Au—Sn alloy solder or the like) when mounted on a package. In addition, when Nb or Mo is used, the surface flatness is excellent even if the heat treatment after electrode formation is performed. Therefore, the third metal layer 23 may be configured by combining and stacking these metal layers.

  The thickness of the third metal layer 23 is preferably 10 nm or more for the purpose of suppressing the diffusion of Au in the fourth metal layer 24, more preferably 20 nm or more, and effectively the Au layer. Diffusion can be suppressed.

  The fourth metal layer 24 is made of a layer containing Au. The fourth metal layer 24 has a thickness of 10 nm or more in order to ensure adhesion with an Au—Sn alloy solder used for mounting on the package and to obtain surface flatness. preferable. Although there is no particular upper limit, Au is a noble metal. If the thickness is increased, the material cost increases, and as a result, the cost of the light-emitting element itself increases. Therefore, the thickness is preferably 50 nm or less.

  Examples of the method for forming the electrode having the above structure include a vacuum vapor deposition method and a sputtering method using an electron beam and resistance heating, but the film forming method is not particularly limited.

  FIG. 3 is a cross-sectional view of a light-emitting element using the gallium nitride compound semiconductor of the present invention.

  The light emitting device of the present invention comprises a first conductive type (n-type) semiconductor layer 32 made of a gallium nitride compound semiconductor, a light emitting layer 33 made of a gallium nitride compound semiconductor, and a gallium nitride compound semiconductor on a substrate 30. A semiconductor layer including the second conductivity type (p-type) semiconductor layer 34 and stacked in this order is formed, and a p-type electrode 36 formed on the p-type semiconductor layer 34, p In a light emitting device provided with an n-type electrode 35 formed on an exposed portion of the n-type semiconductor layer 32 obtained by removing a part of the n-type semiconductor layer 34 up to the n-type semiconductor layer 32, the n-type and p-type electrodes At least one of 35 and 36 is a first metal layer made of a layer containing Ta, a second metal layer made of any one of Ag, Al and Rh, and one of Ni, Ti, Nb and Mo 3rd gold consisting of Layer, and a fourth metal layer containing Au are stacked in this order comprising configuration.

  That is, the light-emitting element of the present invention shown in FIG. 3 is formed by sequentially stacking an n-type semiconductor layer 32, a light-emitting layer 33, and a p-type semiconductor layer 34 via a buffer layer 31 on a substrate 30. Further, in order to expose a part of the n-type semiconductor layer 32, a part of the p-type semiconductor layer 34 and the light emitting layer 33 are removed, and an ohmic contact with the n-type semiconductor layer 32 is formed on the exposed surface of the n-type semiconductor layer 32. An n-type electrode 35 is formed, and a p-type electrode 36 in ohmic contact with the p-type semiconductor layer 34 is formed on the surface of the p-type semiconductor layer 34.

  As a method for growing a semiconductor layer including the n-type semiconductor layer 32, the light emitting layer 33, and the p-type semiconductor layer 34, a metal organic vapor phase epitaxy (MOVPE) method is used. In addition, a molecular beam epitaxy (MBE) method or a hydride gas is used. Examples thereof include a phase growth (HVPE) method and a pulsed laser deposition (PLD) method.

  The n-type electrode 35 and the p-type electrode 36 are formed on the same main surface side of the semiconductor layer, and both are made of light-reflective electrodes. The light generated in the light emitting layer 33 is reflected by the p-type electrode 36 and extracted from the substrate 30 side. Further, part of the light that has returned without being extracted from the substrate 30 side is reflected again by the n-type electrode 35 and the p-type electrode 36 and is extracted from the substrate 30 side. In this case, a so-called flip chip mounting light emitting element capable of mounting a light emitting element by electrically connecting the p-type electrode 36 and the n-type electrode 35 to a wiring conductor or the like of an external mounting substrate, Become.

In the present embodiment, the substrate 30 is preferably transparent to light emitted from the light emitting layer 33, for example, ultraviolet light to near ultraviolet light having a wavelength of 365 nm to 420 nm, and sapphire (Al ₂ O ₃ ), silicon carbide ( SiC), gallium nitride (GaN), zinc oxide (ZnO), and the like. Further, even an opaque substrate such as zirconium diboride (ZrB ₂ ) which is a diboride single crystal represented by the chemical formula XB ₂ (where X includes at least one of Ti and Zr). In this case, it is possible to form a flip chip light emitting element by forming the light emitting element after forming electrodes and removing the substrate 30. Further, after the substrate 30 is removed, a transparent protective layer made of a resin or the like that is transparent to the wavelength of the emitted light may be formed on the light emitting side surface of the semiconductor layer.

  The buffer layer 31 may be made of gallium nitride (GaN), aluminum nitride (AlN), gallium aluminum nitride (AlGaN) which is a mixed crystal thereof, or the like. The formation temperature in that case is 400 to 800 degreeC. However, it is not always necessary to form the gallium nitride compound semiconductor and the substrate 30 when the lattice constant and thermal expansion coefficient are close to each other. GaN, AlN, and AlGaN are grown directly on the substrate at a high temperature of about 1000 ° C. to 1500 ° C. Also good.

  After the buffer layer 31 is formed, the temperature is raised to 800 ° C. to 1100 ° C., and the n-type semiconductor layer 32 is subsequently formed. Although a GaN layer is grown as the n-type semiconductor layer 32 in FIG. 3, it may be made of AlGaN, InGaN or the like, which is a mixed crystal composition of AlN and indium nitride (InN).

  Further, Si or the like is added to the n-type semiconductor layer 32 as an impurity element, but an AlGaN layer or an InGaN layer may be further formed thereon. A part of the n-type semiconductor layer 32 made of the GaN layer is exposed, and an n-type electrode 35 is formed on the surface of the exposed part.

The light-emitting layer 33 has a multi-quantum well structure (MQW) in which a quantum well structure including a barrier layer having a wide forbidden band and a well layer having a narrow forbidden band is regularly stacked a plurality of times. (Not shown). The structure is appropriately selected from InN, GaN, AlN and mixed crystals thereof according to the emission wavelength. For example, the well layer is an InGaN layer, the barrier layer is a GaN layer, or the well layer is In _x Ga _{( A combination of 1-x)} N layer and a barrier layer of In _y Ga _(1-y) N layer (where x> y) is possible.

  The temperature at which the light emitting layer 33 is formed is 700 ° C. to 900 ° C., although it depends on the composition of indium (In). The thickness of each layer constituting the light emitting layer 33 is 5 to 15 nm for the barrier layer and 3 to 10 nm for the well layer. Further, the number of repetitions of the quantum well structure is preferably 3 to 5 times, but is particularly limited. It is not a thing.

  Further, the p-type semiconductor layer 34 formed thereon is composed of a plurality of layers such as an AlGaN layer, a GaN layer, and an InGaN layer (not shown). As the p-type impurity element added to the p-type semiconductor layer 34, magnesium (Mg), zinc (Zn), or the like is used.

  An n-type electrode 35 and a p-type electrode 36 made of the first to fourth metal layers are formed on the surface of the semiconductor layer in which the layers made of the gallium nitride compound semiconductor as described above are stacked. The n-type electrode 35 and the p-type electrode 36 may have different configurations, but preferably have the same configuration. Ta that forms the first metal layer has a work function of 4.25 eV, and GaN has a work function of 4.2 eV. Therefore, a sufficiently low contact resistance can be obtained even for the n-type semiconductor layer 32. it can.

  Since the n-type electrode 35 and the p-type electrode 36 are composed of the same electrodes of the present invention as described above, the n-type electrode 35 and the p-type electrode 36 can be formed at the same time. The manufacturing process can be simplified.

  Alternatively, the p-type electrode 36 may be an electrode having the configuration of the present invention, and the n-type electrode 35 may be a separate configuration by sequentially laminating a Ti layer, an Al layer, a Ni layer, and an Au layer. That is, at least one of the n-type electrode 35 and the p-type electrode 36 has the configuration of the present invention.

  Then, a substrate (mother substrate) on which a large number of semiconductor layers to be light emitting elements are formed is divided into light emitting elements using a scriber or the like, and Au—Sn is used as a wiring conductor of a package made of ceramics, metal, resin, or the like. By connecting the n-type electrode 35 and the p-type electrode 36 of the light-emitting element with solder made of an alloy or the like, and sealing with a transparent resin containing a phosphor, a light-emitting device or a lighting device can be obtained. The light emitting element may be mounted on a package or the like after the light emitting element is fixed to a submount made of Si or the like and then fixed in the package.

  With the structure of the present invention as described above, in a light-emitting element using a gallium nitride compound semiconductor, an electrode having low contact resistance, no change in characteristics over time, and high light reflectivity can be used. Further, by using a light emitting element in which the electrode is formed, it is possible to improve light emission efficiency and reliability.

  Note that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention.

It is sectional drawing of the light emitting element using the conventional gallium nitride type compound semiconductor. 1 is a cross-sectional view of an electrode on which a gallium nitride compound semiconductor is formed, showing an example of an embodiment of the gallium nitride compound semiconductor of the present invention. It is sectional drawing which shows one example of embodiment about the light emitting element of this invention.

Explanation of symbols

10: substrate 12: n-type semiconductor layer 13: light-emitting layer 14: p-type semiconductor layer 15: n-type electrode 16: p-type electrode 20: gallium nitride compound semiconductor 21: first metal layer 22: second metal layer 23: third metal layer 24: fourth metal layer 30: substrate 32: n-type semiconductor layer 33: light-emitting layer 34: p-type semiconductor layer 35: n-type electrode 36: p-type electrode

Claims (2)

  A first metal layer containing Ta, a second metal layer made of any of Ag, Al and Rh, a third metal layer made of any of Ni, Ti, Nb and Mo on the surface; And a fourth metal layer containing Au, and an electrode formed by sequentially laminating the same is formed. The substrate includes a first conductive semiconductor layer made of a gallium nitride compound semiconductor, a light emitting layer made of a gallium nitride compound semiconductor, and a second conductive semiconductor layer made of a gallium nitride compound semiconductor. A semiconductor layer in which layers are stacked is formed, a second conductivity type electrode formed on the second conductivity type semiconductor layer, and a part of the second conductivity type semiconductor layer as the first conductivity type semiconductor. In the light emitting device provided with the first conductivity type electrode formed on the exposed portion of the first conductivity type semiconductor layer that is removed up to the layer, at least one of the first and second conductivity type electrodes is Ta A first metal layer made of a layer containing, a second metal layer made of any one of Ag, Al and Rh, a third metal layer made of any of Ni, Ti, Nb and Mo, and 4th including Au Emitting element, wherein a metal layer is formed by sequentially stacking.

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