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JP2007038049A - Method for treating fluorine in mixed acid - Google Patents

Method for treating fluorine in mixed acid Download PDF

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JP2007038049A
JP2007038049A JP2005222249A JP2005222249A JP2007038049A JP 2007038049 A JP2007038049 A JP 2007038049A JP 2005222249 A JP2005222249 A JP 2005222249A JP 2005222249 A JP2005222249 A JP 2005222249A JP 2007038049 A JP2007038049 A JP 2007038049A
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fluorine
mixed acid
acid
water
tank
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Yuji Wada
祐司 和田
Kunihito Imamura
邦仁 今村
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NEC Facilities Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To convert hardly treatable fluorine generated in a process for producing a mixed acid by mixing hydrofluoric acid and sulfuric acid into a treatable form with a well-known treatment method using a calcium salt or the like. <P>SOLUTION: The mixed acid produced by mixing hydrofluoric acid and sulfuric acid is loaded with water having 10% to 2,500% of the volume of the mixed acid. Next, the mixed acid after the adjustment is loaded with the calcium salt to carry out solid-liquid separation and treated water is obtained. As described above, the concentration of hardly treatable fluorine is diluted, thereby enabling conversion into the treatable form with the well-known treatment method using the calcium salt or the like. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、ガラスのエッチング工程などで使用される、フッ化水素酸(フッ酸)及び硫酸の混合液(混酸)中のフッ素を処理する方法に関する。   The present invention relates to a method for treating fluorine in a mixed solution (mixed acid) of hydrofluoric acid (hydrofluoric acid) and sulfuric acid used in a glass etching process or the like.

フッ素は半導体製造業や化学工業などの分野で大量に使用されている物質である。しかし、フッ素は人体に対して有害な物質であり、フッ素を多量に摂取すると、斑状歯、骨硬化症、骨軟化症などの慢性フッ素中毒症が発現するため、水質汚濁防止法によって、排水基準が8mg/L(L:リットル、以下同じ。)と定められている。また、自治体によっては、国の基準に厳しい上乗せ基準が設けられている。   Fluorine is a substance that is used in large quantities in fields such as the semiconductor manufacturing industry and the chemical industry. However, since fluorine is a harmful substance to the human body, ingestion of a large amount of fluorine causes chronic fluorine poisoning such as patchy teeth, osteosclerosis, and osteomalacia. Is 8 mg / L (L: liter, the same shall apply hereinafter). In addition, some local governments have strict standards added to national standards.

従来、フッ素含有排水を処理する方法として、フッ素含有排水に消石灰・塩化カルシウムなどのカルシウム塩を加え、フッ素を難溶性のフッ化カルシウムとして固液分離する方法(特許文献1)や、硫酸バンドやポリ塩化アルミニウム(PAC)などのアルミニウム塩を加え、中性付近に調整して生成する水酸化アルミニウムにフッ素を吸着させ、固液分離する方法(特許文献2)などが知られている。   Conventionally, as a method of treating fluorine-containing wastewater, a method of adding a calcium salt such as slaked lime / calcium chloride to fluorine-containing wastewater to separate the solid and liquid as fluorine with poorly soluble calcium fluoride (Patent Document 1), There is known a method (Patent Document 2), in which an aluminum salt such as polyaluminum chloride (PAC) is added, and fluorine is adsorbed to aluminum hydroxide produced by adjusting to near neutrality to separate the solid and liquid.

カルシウム塩による処理は、主に高濃度の排水を処理するのに用いられるが、薬剤を多く添加しても10〜20mg/Lまでの処理が限界である。従って、その後段において、アルミニウム塩による処理を行って放流するか、またはカルシウム塩による処理水と、フッ素を含まない他系統の排水とを混合してから放流するのが一般的である。   The treatment with calcium salt is mainly used to treat high-concentration wastewater, but treatment up to 10 to 20 mg / L is the limit even if a lot of chemicals are added. Therefore, in a subsequent stage, it is generally discharged after being treated with an aluminum salt, or after being mixed with treated water with calcium salt and waste water from other systems not containing fluorine.

ところで、上記カルシウム塩、及びアルミニウム塩を用いた方法によって処理できるフッ素は、原則としてフッ化物イオン(F)の形態のフッ素である。例えばフッ素化合物の中で工業的に最も多く使用されているフッ酸(HF)は、水溶液中ではHとFに解離するため、上記方法によって処理することができる。また、フッ素が金属類と結合して錯体を形成し、フッ化物イオンとして存在していない場合であっても、その結合力が弱い場合は処理することができる。そのような例として、フッ素とケイ素が結合した珪フッ化物イオン(SiF 2−)の排水が挙げられる。 By the way, the fluorine which can be processed by the method using the calcium salt and the aluminum salt is, in principle, fluorine in the form of fluoride ions (F ). For example, hydrofluoric acid (HF), which is most frequently used industrially among fluorine compounds, dissociates into H + and F in an aqueous solution, and thus can be treated by the above method. Further, even when fluorine binds to metals to form a complex and does not exist as fluoride ions, it can be treated if the binding force is weak. As such an example, drainage of silicofluoride ions (SiF 6 2− ) in which fluorine and silicon are bonded can be mentioned.

一方、フッ素と強固に結合し、上述の方法では処理できなくなる物質としてホウ素が挙げられる。ホウ素とフッ素が結合すると、ホウフッ化物(BF )を形成するが、その結合力は非常に強く、何らかの方法で分解しない限り上述の方法で処理することはできない。分解方法としては、アルミニウム塩を分解剤として添加し、pHを分解に適する5以下に調整し、かつ加熱するなどの方法で行われるのが一般的である。
特開平9−174063号公報 特開2000−1313号公報
On the other hand, boron is mentioned as a substance that binds strongly to fluorine and cannot be treated by the above-described method. When boron and fluorine are bonded to each other, borofluoride (BF 4 ) is formed. However, the bonding force is very strong and it cannot be processed by the above-described method unless it is decomposed by some method. As a decomposition method, an aluminum salt is generally added as a decomposition agent, the pH is adjusted to 5 or less suitable for decomposition, and heating is generally performed.
Japanese Patent Laid-Open No. 9-174063 JP 2000-1313 A

フッ酸はガラスを溶解させる性質を持つため、板ガラスやクリスタルガラスなどの表面処理、すなわちエッチング処理剤として広く利用されている。フッ酸単独で使用されることは少なく、表面の仕上がり状態などの理由により、フッ酸と硫酸との混合液(混酸)の状態で使用される。フッ酸と硫酸を混合すると、その混合液の温度が上昇し、また白煙を生じる。   Since hydrofluoric acid has the property of dissolving glass, it is widely used as a surface treatment for plate glass or crystal glass, that is, as an etching treatment agent. It is rare to use hydrofluoric acid alone, and it is used in the form of a mixture of hydrofluoric acid and sulfuric acid (mixed acid) for reasons such as the surface finish. When hydrofluoric acid and sulfuric acid are mixed, the temperature of the mixture increases and white smoke is generated.

エッチング後はガラス表面に付着した混酸を洗い流す目的で、大量の水を使用して洗浄される。従って、濃厚な混酸廃液がエッチング工程から排出され、また、希薄なフッ素を含む洗浄水が洗浄工程から排出される。   After the etching, a large amount of water is used to wash away the mixed acid adhering to the glass surface. Accordingly, a concentrated mixed acid waste liquid is discharged from the etching process, and cleaning water containing diluted fluorine is discharged from the cleaning process.

ところで、フッ酸と硫酸からなる混酸中のフッ素の処理は、フッ素と強力に結合する物質は存在しないであろうとの理由から、排水は直接、上述したカルシウム塩、又はアルミニウム塩を用いた処理が行われている。   By the way, in the treatment of fluorine in a mixed acid composed of hydrofluoric acid and sulfuric acid, there is no substance that strongly binds to fluorine, and therefore, the wastewater is treated directly with the above-described calcium salt or aluminum salt. Has been done.

本発明者らは、フッ素を排出する多くの業種の処理性を詳細に比較検討した結果、以下の事実を見出した。
(1)ガラス加工業に代表される、フッ酸と硫酸の混酸を使用している工場排水のフッ素処理性は、他の業種と比較して非常に悪い。
(2)処理性が悪い理由は、フッ酸と硫酸を混合して混酸を製造する工程で、何らかの化学反応が起こることにより、フッ素の一部がフッ化物イオン以外の形態に変化しているためであると考えられる。
(3)この難処理性のフッ素とは、フッ酸と硫酸が強力に結合して形態が変化したものなのか、それとも硫酸がフッ酸に対して何らかの作用を及ぼし、フッ素単体で形態が変化したもののいずれであるかは不明である。しかし、フッ素含有排水の処理の中で、最も処理困難な部類に位置づけられるホウフッ化物よりも安定である。
The inventors of the present invention have found the following facts as a result of a detailed comparison and examination of the processability of many industries that emit fluorine.
(1) The fluoridation property of factory effluents using mixed acid of hydrofluoric acid and sulfuric acid, represented by the glass processing industry, is very poor compared to other industries.
(2) The reason why the processability is poor is that in the process of producing a mixed acid by mixing hydrofluoric acid and sulfuric acid, some chemical reaction occurs, so that a part of fluorine is changed to a form other than fluoride ions. It is thought that.
(3) This difficult-to-process fluorine is a form in which hydrofluoric acid and sulfuric acid are strongly combined to change their form, or sulfuric acid has some effect on hydrofluoric acid, and its form has changed by itself. It is unclear which one it is. However, it is more stable than borofluoride, which is positioned as the most difficult category in the treatment of fluorine-containing wastewater.

本発明の目的は、過去に存在が知られていなかった難処理性のフッ素、すなわちフッ酸と硫酸を混合して混酸を製造する過程で生成する難処理性のフッ素を、カルシウム塩やアルミニウム塩により処理できる形態に変換する方法を提供することにある。   It is an object of the present invention to form a difficult-to-process fluorine that has not been known in the past, that is, a difficult-to-process fluorine produced in the process of producing a mixed acid by mixing hydrofluoric acid and sulfuric acid with a calcium salt or an aluminum salt. It is to provide a method of converting into a form that can be processed by the above.

本発明者らは、フッ酸と硫酸の混酸について鋭意検討を進めた結果、以下の3つの点を知見した。
(1)エッチング工程から直接排出される濃厚な混酸廃液に、混酸容積の10%〜2500%の濃度調整用水を加えると、難処理性フッ素は速やかに処理可能な形態に転換されること。
(2)エッチング工程から直接排出される濃厚な混酸を槽に取込み、その槽を開放状態にしたままで前記混酸を静置することにより、難処理性フッ素は緩やかに処理可能な形態に転換していくこと。しかし、一方で、前記槽を密閉状態で保持した場合は、フッ素が難処理性のまま変化しないこと。
(3)一方、エッチング工程から直接排出される濃厚な混酸に濃度調整用水を加えて、フッ素濃度を5重量%以下に調整すると、難処理性フッ素は密閉状態・開放状態に関わらず、長時間保管することにより、緩やかに処理可能な形態に転換していくこと。
As a result of diligent studies on a mixed acid of hydrofluoric acid and sulfuric acid, the present inventors have found the following three points.
(1) When water for adjusting the concentration of 10% to 2500% of the mixed acid volume is added to the concentrated mixed acid waste liquid that is directly discharged from the etching process, the difficult-to-process fluorine is quickly converted into a form that can be processed.
(2) Taking the rich mixed acid directly discharged from the etching process into the tank, and leaving the mixed acid in the open state, the difficult-to-process fluorine is converted into a form that can be treated slowly. Follow it. However, on the other hand, when the tank is held in a sealed state, fluorine remains difficult to process.
(3) On the other hand, adding concentration-adjusting water to the concentrated mixed acid directly discharged from the etching process to adjust the fluorine concentration to 5% by weight or less will result in difficult-to-treat fluorine for a long time regardless of whether it is sealed or open. By storing it, it will be converted into a form that can be processed gently.

上記(1)は、廃液としての濃厚な混酸に濃度調整用水を加えて最適な濃度範囲に調整するだけで、速やかに処理可能なフッ素(フッ化物イオン形態のフッ素)に変化することを意味している。また、濃度調整用水を多く入れすぎると、フッ素は難処理性のまま変化しないため、最適な濃度範囲が存在することを意味している。   The above (1) means that by changing the concentration range to an optimum concentration range by adding concentration adjustment water to the concentrated mixed acid as the waste liquid, it changes to fluorine (fluorine ion form fluorine) that can be processed quickly. ing. In addition, if too much water for concentration adjustment is added, fluorine does not change with difficulty in processing, which means that an optimum concentration range exists.

上記(2),(3)は、廃液としての混酸を長時間静置することによって処理可能なフッ素の形態(フッ化物イオン形態)に転換させることができること、さらにフッ素濃度によって転換可能な方法が異なることを意味している。フッ素濃度が高い場合は、廃液としての混酸を解放状態で静置した場合にのみ、ゆっくり処理可能フッ素な形態(フッ化物イオン形態)に変化して行くこと、またフッ素濃度が5重量%以下の希薄な状態では、開放状態・密閉状態の如何に拘らず混酸を静置することにより、ゆっくり処理可能なフッ素の形態(フッ化物イオン形態)に変化して行くことを意味している。   The above (2) and (3) can be converted into a form of fluoride (fluoride ion form) that can be treated by leaving the mixed acid as a waste liquid for a long time, and a method that can be converted according to the fluorine concentration. Means different. When the fluorine concentration is high, it will change to a fluorine form (fluoride ion form) that can be treated slowly only when the mixed acid as waste liquid is left in a released state, and the fluorine concentration is 5% by weight or less. In the dilute state, it means that the mixed acid is allowed to stand regardless of whether it is in an open state or a sealed state, and then changes into a fluorine form (fluoride ion form) that can be processed slowly.

以上の知見に基づいて本発明はなされたものであり、本発明に係るフッ素含有排水の処理方法は、少なくともフッ酸及び硫酸からなる混酸中のフッ素を処理する方法であって、前記混酸に、混酸容積の10%〜2500%の水を加水する第一工程と、前記第一工程を経た混酸に、カルシウム塩を加えて固液分離する第二工程を含むことを特徴とするものである。また、前記フッ素濃度が調整された混酸を静置したのち、前記静置した混酸に使用済の洗浄水を添加するようにしてもよい。   The present invention has been made on the basis of the above findings, the fluorine-containing wastewater treatment method according to the present invention is a method of treating fluorine in a mixed acid comprising at least hydrofluoric acid and sulfuric acid, It includes a first step of adding 10% to 2500% of the mixed acid volume of water and a second step of solid-liquid separation by adding calcium salt to the mixed acid obtained through the first step. In addition, after the mixed acid having the adjusted fluorine concentration is allowed to stand, used washing water may be added to the left standing mixed acid.

また、本発明に係るフッ素含有排水の処理方法は、少なくともフッ酸及び硫酸から成る混酸中のフッ素を処理する方法であって、前記混酸を槽内に取込み、前記槽を開放状態に保持して前記混酸を静置する第一工程と、前記第一工程を経た混酸に、カルシウム塩を加えて固液分離する第二工程を含む構成としてもよい。   The method for treating fluorine-containing wastewater according to the present invention is a method for treating fluorine in a mixed acid comprising at least hydrofluoric acid and sulfuric acid, taking the mixed acid into a tank, and maintaining the tank in an open state. It is good also as a structure including the 2nd process of adding a calcium salt to the mixed acid which passed through the said 1st process, and solid-liquid-separating the said 1st process which leaves the said mixed acid.

また、本発明に係るフッ素含有排水の処理方法は、少なくともフッ酸及び硫酸から成る混酸中のフッ素を処理する方法であって、前記混酸に濃度調整用水を加えてフッ素濃度を5重量%未満に調整する第一工程と、前記第一工程を経た混酸に、カルシウム塩を加えて固液分離する第二工程を含む構成としてもよい。   Further, the method for treating fluorine-containing wastewater according to the present invention is a method for treating fluorine in a mixed acid comprising at least hydrofluoric acid and sulfuric acid, and the concentration of fluorine is reduced to less than 5% by adding concentration adjusting water to the mixed acid. It is good also as a structure including the 1st process to adjust and the 2nd process of adding a calcium salt to the mixed acid which passed through the said 1st process, and carrying out solid-liquid separation.

本発明のフッ素含有排水の処理方法によれば、従来存在が知られていなかった、フッ酸と硫酸を混合することにより生成する難処理性フッ素を、カルシウム塩やアルミニウム塩を使用した公知の処理方法で処理できる形態に転換させることができるという利点がある。   According to the method for treating fluorine-containing wastewater of the present invention, a conventionally known treatment using calcium salt or aluminum salt, which has not been conventionally known, is difficult-to-treat fluorine produced by mixing hydrofluoric acid and sulfuric acid. There is an advantage that it can be converted into a form that can be processed by the method.

また、本発明のフッ素含有排水の処理方法によれば、従来処理できなかった難処理性フッ素の処理が可能になることにより、他系統の排水を用いて希釈した後、放流せざるを得なかった事業場においても、希釈水量を大幅に削減し、または希釈水を必要とすることなく、排水基準以下まで処理できる利点がある。   In addition, according to the method for treating fluorine-containing wastewater of the present invention, it becomes possible to treat difficult-to-process fluorine that could not be treated in the past, and therefore, after dilution with wastewater from other systems, it must be discharged. Even in business establishments, there is an advantage that the amount of diluted water can be significantly reduced or treated to below the wastewater standard without requiring diluted water.

以下、本発明の実施の形態を、図面を用いて更に詳細に説明する。   Hereinafter, embodiments of the present invention will be described in more detail with reference to the drawings.

(実施形態1)図1は、本発明の実施形態1に係るフッ素含有排水の処理方法を実施するための装置構成図である。 (Embodiment 1) FIG. 1 is an apparatus configuration diagram for carrying out a method for treating fluorine-containing wastewater according to Embodiment 1 of the present invention.

図1に示すように、硫酸とフッ酸は、それぞれ専用のタンク1,2に貯留されており、それぞれのタンク1,2から適量の硫酸とフッ酸を混酸調製槽3に移送し、混酸調製槽3内で混合して混酸を生成する。工場4には、混酸調製槽3から混酸が供給されるとともに、洗浄用水が供給される。   As shown in FIG. 1, sulfuric acid and hydrofluoric acid are respectively stored in dedicated tanks 1 and 2, and appropriate amounts of sulfuric acid and hydrofluoric acid are transferred from the tanks 1 and 2 to the mixed acid preparation tank 3 to prepare mixed acid. Mixing in the tank 3 produces mixed acid. The factory 4 is supplied with mixed acid from the mixed acid preparation tank 3 and with cleaning water.

工場4からの濃厚液である混酸はフッ素形態転換槽5に回収され、洗浄水は反応槽6に回収される。前記反応槽6には凝集槽7及び沈殿槽8が順に接続されている。   The mixed acid which is a concentrated liquid from the factory 4 is recovered in the fluorine conversion tank 5 and the washing water is recovered in the reaction tank 6. A coagulation tank 7 and a precipitation tank 8 are connected to the reaction tank 6 in this order.

先ず、濃厚液の混酸が回収されたフッ素形態転換槽5内において、第一工程が実行される。前記第一工程において、ガラス加工工場4のエッチング工程などから直接排出される廃液としての濃厚な混酸に対して、混酸容積の10%〜2500%の水を加えることにより、フッ素濃度を調整する。前記濃厚な混酸に対する解離処理により、難処理性フッ素は、カルシウム塩及びアルミニウム塩を使用した公知の処理方法で処理可能な形態、少なくともフッ化物イオン形態のフッ素として解離する。前記希釈された混酸を後段の反応槽6に移し替える。   First, the first step is performed in the fluorine form conversion tank 5 in which the concentrated mixed acid is recovered. In the first step, the fluorine concentration is adjusted by adding 10% to 2500% of the mixed acid volume to the rich mixed acid as the waste liquid discharged directly from the etching step of the glass processing factory 4 or the like. By the dissociation treatment with respect to the rich mixed acid, the hardly-treatable fluorine is dissociated as fluorine in a form that can be treated by a known treatment method using a calcium salt and an aluminum salt, at least a fluoride ion form. The diluted mixed acid is transferred to the subsequent reaction tank 6.

次に、反応槽6〜沈殿槽8を用いて第二工程が実行される。具体的に説明すると、先ず、希釈された混酸が注入された反応槽6内にカルシウム塩を投入する。このカルシウム塩の投入により、反応槽6では、カルシウムとフッ素が反応してフッ化カルシウムの粒子(フッ化物イオン形態)を生成する。   Next, the second step is performed using the reaction tank 6 to the precipitation tank 8. More specifically, first, a calcium salt is charged into the reaction tank 6 into which the diluted mixed acid has been injected. By the introduction of the calcium salt, calcium and fluorine react in the reaction tank 6 to generate calcium fluoride particles (fluoride ion form).

次いで、反応槽6内で生成された粒子を後段の凝集槽7に移し替え、凝集槽7内の前記粒子に凝集剤を添加する。前記凝集剤が添加された前記粒子は凝集して、粗大化したフロックを形成して沈降性を有する。   Next, the particles generated in the reaction vessel 6 are transferred to the subsequent agglomeration vessel 7, and an aggregating agent is added to the particles in the agglomeration vessel 7. The particles to which the flocculant is added agglomerate to form coarse flocs and have sedimentation properties.

次いで、凝集槽7内で凝集した前記粒子を後段の沈殿槽8に移し替えて、沈殿槽8内において、粒子の粗大化したフロックを沈殿させるとともに、その清澄な上澄水が処理水として得る。   Next, the particles aggregated in the coagulation tank 7 are transferred to the subsequent precipitation tank 8, and in the precipitation tank 8, coarse particles of particles are precipitated, and the clear supernatant water is obtained as treated water.

工場4から排出される廃液としての洗浄水はフッ素を少量含むので、これを反応槽6に回収し、フッ素形態転換槽5からの希釈混酸とともに処理することが望ましい。この場合、フッ素形態転換槽5で希釈された混酸を反応槽6内にて静置した後、工場4から排出される廃液としての洗浄水を反応槽6内の希釈混酸に添加することが望ましい。また、工場4から排出される洗浄水の一部は、フッ素形態転換槽5で行われる希釈処理を行う際の濃度調整用の水に利用することもできる。   Since the washing water discharged from the factory 4 as waste liquid contains a small amount of fluorine, it is desirable to collect this in the reaction tank 6 and treat it with the diluted mixed acid from the fluorine form conversion tank 5. In this case, after the mixed acid diluted in the fluorine conversion tank 5 is allowed to stand in the reaction tank 6, it is desirable to add wash water as waste liquid discharged from the factory 4 to the diluted mixed acid in the reaction tank 6. . A part of the washing water discharged from the factory 4 can also be used as concentration adjusting water when performing the dilution treatment performed in the fluorine form conversion tank 5.

(実施形態2)図2は、本発明の実施形態2に係るフッ素含有排水の処理方法を実施するための装置構成図である。図2の装置構成は図1と同じ構成になっている。 (Embodiment 2) FIG. 2 is an apparatus configuration diagram for carrying out a method for treating fluorine-containing wastewater according to Embodiment 2 of the present invention. The apparatus configuration of FIG. 2 is the same as that of FIG.

図2において、工場4から排出される濃厚液である混酸(廃液)はフッ素形態転換槽5に回収され、廃液としての洗浄水は反応槽6に回収される点は実施形態1と同様である。   In FIG. 2, the mixed acid (waste liquid), which is a concentrated liquid discharged from the factory 4, is collected in the fluorine form conversion tank 5, and the washing water as the waste liquid is collected in the reaction tank 6 as in the first embodiment. .

実施形態2においては、ガラス加工工場4のエッチング工程などから直接排出される濃厚な混酸をフッ素形態転換槽5に回収し、フッ素形態転換槽5を密閉せずに開放状態にして、回収した濃厚な混酸をフッ素形態転換槽5内に時間を掛けて静置する(第一工程)。フッ素形態転換槽5内に時間を掛けて静置することにより、濃厚な混酸に含まれる難処理性フッ素は、カルシウム塩及びアルミニウム塩を使用した公知の処理方法で処理可能な形態(フッ化物イオン形態)に変化する。このように、フッ素形態転換槽5内に時間を掛けて静置された混酸は、設定時間を経過した後にフッ素形態転換槽5から反応槽6内に移し替えられる。フッ素形態転換槽5内に濃厚な混酸を保持する時間は、1時間以上であることが望ましい。   In Embodiment 2, the concentrated mixed acid directly discharged from the etching process or the like of the glass processing factory 4 is collected in the fluorine form conversion tank 5, the fluorine form conversion tank 5 is opened without being sealed, and the collected rich is collected. The mixed acid is allowed to stand in the fluorine conversion tank 5 for a long time (first step). Refractory fluorine contained in a concentrated mixed acid can be treated by a known treatment method using a calcium salt and an aluminum salt (fluoride ions) by leaving the fluorine form conversion tank 5 to stand for a long time. Form). Thus, the mixed acid that has been allowed to stand in the fluorine form conversion tank 5 for a long time is transferred from the fluorine form conversion tank 5 to the reaction tank 6 after the set time has elapsed. The time for keeping the rich mixed acid in the fluorine form conversion tank 5 is preferably 1 hour or more.

次に、反応槽6〜沈殿槽8を用いて第二工程が実行される。具体的に説明すると、先ず、希釈された混酸が注入された反応槽6内にカルシウム塩を投入する。このカルシウム塩の投入により、反応槽6では、カルシウムとフッ素が反応してフッ化カルシウムの粒子(フッ化物イオン形態)を生成する。   Next, the second step is performed using the reaction tank 6 to the precipitation tank 8. More specifically, first, a calcium salt is charged into the reaction tank 6 into which the diluted mixed acid has been injected. By the introduction of the calcium salt, calcium and fluorine react in the reaction tank 6 to generate calcium fluoride particles (fluoride ion form).

次いで、反応槽6内で生成された粒子を次段の凝集槽7に移し替え、凝集槽7内の前記粒子に凝集剤を添加する。前記凝集剤が添加された前記粒子は凝集して、粗大化したフロックを形成して沈降性を有する。   Next, the particles generated in the reaction tank 6 are transferred to the next aggregation tank 7, and an aggregating agent is added to the particles in the aggregation tank 7. The particles to which the flocculant is added agglomerate to form coarse flocs and have sedimentation properties.

次いで、凝集槽7内で凝集した前記粒子を次段の沈殿槽8に移し替えて、沈殿槽8内において、粒子の粗大化したフロックを沈殿させるとともに、その清澄な上澄水が処理水として得る。   Next, the particles aggregated in the coagulation tank 7 are transferred to the subsequent precipitation tank 8, and in the precipitation tank 8, coarse particles of the flocs are precipitated, and the clear supernatant water is obtained as treated water. .

工場4から排出される洗浄水(廃液)はフッ素を少量含むので、反応槽6に回収し、フッ素形態転換槽5からの濃厚液の混酸とともに処理することが望ましい。   Since the washing water (waste liquid) discharged from the factory 4 contains a small amount of fluorine, it is desirable to collect it in the reaction tank 6 and treat it with the concentrated mixed acid from the fluorine form conversion tank 5.

(実施形態3)図3は、本発明の実施形態3に係るフッ素含有排水の処理方法を実施するための装置構成図である。図3の装置構成は図1と同じ構成になっている。 (Embodiment 3) FIG. 3 is an apparatus configuration diagram for carrying out a method for treating fluorine-containing wastewater according to Embodiment 3 of the present invention. The apparatus configuration of FIG. 3 is the same as that of FIG.

図3において、工場4から排出される濃厚液である混酸(廃液)はフッ素形態転換槽5に回収され、廃液としての洗浄水は反応槽6に回収される。前記反応槽6には凝集槽7及び沈殿槽8が順に接続されている。   In FIG. 3, the mixed acid (waste liquid), which is a concentrated liquid discharged from the factory 4, is collected in the fluorine form conversion tank 5, and the washing water as the waste liquid is collected in the reaction tank 6. A coagulation tank 7 and a precipitation tank 8 are connected to the reaction tank 6 in this order.

先ず、濃厚液の混酸が回収されたフッ素形態転換槽5内において、第一工程が実行される。前記第一工程において、ガラス加工工場4のエッチング工程などから直接排出される濃厚な混酸(廃液)に水を加えて、混酸の含有率を5重量%以下に調整する。前記濃厚な混酸の希釈処理により、難処理性フッ素は、カルシウム塩及びアルミニウム塩を使用した公知の処理方法で処理可能な形態(フッ化物イオン形態)に変化する。混酸の含有率を5重量%以下に調整した後であれば、フッ素形態転換槽5を密閉し、或いは解放した状態でも、難処理性フッ素は、カルシウム塩及びアルミニウム塩を使用した公知の処理方法で処理可能な形態(フッ化物イオン形態)に変化する。前記希釈された混酸を後段の反応槽6に移し替える。   First, the first step is performed in the fluorine form conversion tank 5 in which the concentrated mixed acid is recovered. In said 1st process, water is added to the rich mixed acid (waste liquid) directly discharged | emitted from the etching process of the glass processing factory 4, etc., and the mixed acid content rate is adjusted to 5 weight% or less. By the dilution treatment of the rich mixed acid, the hardly-treatable fluorine changes into a form (fluoride ion form) that can be treated by a known treatment method using a calcium salt and an aluminum salt. If the content of the mixed acid is adjusted to 5% by weight or less, even if the fluorine conversion tank 5 is sealed or released, the difficult-to-process fluorine is a known processing method using a calcium salt and an aluminum salt. To a form that can be treated with (fluoride ion form). The diluted mixed acid is transferred to the subsequent reaction tank 6.

次に、反応槽6〜沈殿槽8を用いて第二工程が実行される。具体的に説明すると、希釈された混酸が注入された反応槽6内にカルシウム塩を投入する。このカルシウム塩の投入により、反応槽6では、カルシウムとフッ素が反応してフッ化カルシウムの粒子(フッ化物イオン形態)を生成する。   Next, the second step is performed using the reaction tank 6 to the precipitation tank 8. More specifically, a calcium salt is introduced into the reaction tank 6 into which the diluted mixed acid has been injected. By the introduction of the calcium salt, calcium and fluorine react in the reaction tank 6 to generate calcium fluoride particles (fluoride ion form).

次いで、反応槽6内で生成された粒子を後段の凝集槽7に移し替え、凝集槽7内の前記粒子に凝集剤を添加する。前記凝集剤が添加された前記粒子は凝集して、粗大化したフロックを形成して沈降性を有する。   Next, the particles generated in the reaction vessel 6 are transferred to the subsequent agglomeration vessel 7, and an aggregating agent is added to the particles in the agglomeration vessel 7. The particles to which the flocculant is added agglomerate to form coarse flocs and have sedimentation properties.

次いで、凝集槽7内で凝集した前記粒子を後段の沈殿槽8に移し替えて、沈殿槽8内において、粒子の粗大化したフロックを沈殿させるとともに、その清澄な上澄水が処理水として得る。   Next, the particles aggregated in the coagulation tank 7 are transferred to the subsequent precipitation tank 8, and in the precipitation tank 8, coarse particles of particles are precipitated, and the clear supernatant water is obtained as treated water.

工場4から排出される洗浄水(廃液)はフッ素を少量含むので、反応槽6に回収し、フッ素形態転換槽5からの希釈混酸とともに処理することが望ましい。また、工場4から排出される洗浄水の一部は、フッ素形態転換槽5で行われる希釈処理を行う際の濃度調整用の水に利用することもできる。   Since the washing water (waste liquid) discharged from the factory 4 contains a small amount of fluorine, it is desirable to collect it in the reaction tank 6 and treat it with the diluted mixed acid from the fluorine form conversion tank 5. A part of the washing water discharged from the factory 4 can also be used as concentration adjusting water when performing the dilution treatment performed in the fluorine form conversion tank 5.

図1,図2及び図3に示す本発明の実施形態に用いられるカルシウム塩の種類に特に制限はなく、水酸化カルシウム(消石灰),塩化カルシウム,酸化カルシウム(生石灰),炭酸カルシウム,硫酸カルシウムなどをカルシウム塩として用いることができる。安全性や価格の観点からすると、カルシウム塩として消石灰や塩化カルシウムを用いることが最適である。   The type of calcium salt used in the embodiment of the present invention shown in FIGS. 1, 2 and 3 is not particularly limited, and calcium hydroxide (slaked lime), calcium chloride, calcium oxide (quick lime), calcium carbonate, calcium sulfate, etc. Can be used as a calcium salt. From the viewpoint of safety and price, it is optimal to use slaked lime or calcium chloride as the calcium salt.

実施形態における反応槽6,凝集槽7及び沈殿槽8を用いて行われる処理に用いられる固液分離装置は、一般的な排水処理に用いられる装置を制限なく使用することができ、沈殿分離装置の他、フィルタープレスやベルトプレス等のろ過脱水装置、膜分離装置等を利用することができる。   In the embodiment, the solid-liquid separation apparatus used for the treatment performed using the reaction tank 6, the coagulation tank 7 and the precipitation tank 8 can use an apparatus used for general waste water treatment without limitation, and the precipitation separation apparatus. In addition, filter dehydration devices such as filter presses and belt presses, membrane separation devices, and the like can be used.

フッ素形態転換槽5内にて処理されたフッ素成分を、公知の処理方法で処理する際に用いるアルミニウム塩の種類に特に制限はなく、硫酸アルミニウム(硫酸バンド),ポリ塩化アルミニウム(PAC),塩化アルミニウム,水酸化アルミニウム,アルミン酸ナトリウム(アルミン酸ソーダ)等をアルミニウム塩として用いることができる。   There are no particular restrictions on the type of aluminum salt used when the fluorine component treated in the fluorine form conversion tank 5 is treated by a known treatment method. Aluminum sulfate (sulfate band), polyaluminum chloride (PAC), chloride Aluminum, aluminum hydroxide, sodium aluminate (sodium aluminate) or the like can be used as the aluminum salt.

次に、本発明の実施例を示して更に詳細に説明する。実施例に用いた試薬類は、全て特級試薬を用い、混酸の濃度調整などに使用した水には、純水もしくは水道水を用いた。また、混酸,原水,処理水のフッ素濃度の測定は、JISK0102 34.1に規定されている工場排水試験方法に基づいて実施した。   Next, examples of the present invention will be shown and described in detail. The reagents used in the examples were all special grade reagents, and pure water or tap water was used as the water used for adjusting the concentration of the mixed acid. Moreover, the measurement of the fluorine concentration of mixed acid, raw water, and treated water was performed based on the factory drainage test method defined in JISK0102 34.1.

(実施例1)
先ず、フッ酸と硫酸の混合により難処理性のフッ素が生成することを確認する実験を行った。硫酸としては98重量%を用い、フッ酸としては46重量%の特級試薬を用いて、容積比10:8で混合して混酸を調整した。混酸中のフッ素濃度は14重量%、硫酸イオン濃度は67重量%であった。
Example 1
First, an experiment was conducted to confirm that difficult-to-process fluorine was produced by mixing hydrofluoric acid and sulfuric acid. A mixed acid was prepared by mixing 98% by weight as sulfuric acid and 46% by weight of a special grade reagent as hydrofluoric acid and mixing at a volume ratio of 10: 8. The fluorine concentration in the mixed acid was 14% by weight, and the sulfate ion concentration was 67% by weight.

その後、ガラス加工工程での洗浄水による混酸の希釈を想定し、混酸の50倍(容積比)の純水を混酸に加えて処理前の原水とした。原水のフッ素濃度は4000mg/L、硫酸イオン濃度は19500mg/Lであった。   Then, assuming dilution of the mixed acid with the washing water in the glass processing step, pure water 50 times (volume ratio) of the mixed acid was added to the mixed acid to obtain raw water before treatment. The raw water fluorine concentration was 4000 mg / L, and the sulfate ion concentration was 19500 mg / L.

原水に消石灰をpH12以上になるまで加え、1時間撹拌したのち、高分子凝集剤を添加して凝集させ、清澄な上澄水(処理水)を得た。処理水のフッ素濃度は310mg/Lであった。   Slaked lime was added to the raw water until the pH reached 12 or more, and after stirring for 1 hour, a polymer flocculant was added and agglomerated to obtain clear supernatant water (treated water). The fluorine concentration of the treated water was 310 mg / L.

(比較例1)
実施例1の原水と同等のフッ素濃度、硫酸イオン濃度の溶液を、フッ化ナトリウム、硫酸ナトリウムの特級試薬を溶解させて調製した。このフッ素・硫酸イオン混合溶液に、実施例1と同様の方法で、同量の消石灰を加えて処理したところ、処理水のフッ素濃度は12mg/Lであった。
(Comparative Example 1)
A solution having a fluorine concentration and a sulfate ion concentration equivalent to the raw water of Example 1 was prepared by dissolving a special grade reagent of sodium fluoride and sodium sulfate. When the same amount of slaked lime was added to the fluorine / sulfate ion mixed solution in the same manner as in Example 1, the fluorine concentration of the treated water was 12 mg / L.

実施例1と比較例1とでは、フッ素濃度・硫酸イオン濃度が同じ溶液を、同様の方法で処理しているにも関わらず、処理水のフッ素濃度は大きく異なっている。従って、フッ酸と硫酸を混合する工程で、フッ素の一部が処理し難い形態に変化していることになる。   In Example 1 and Comparative Example 1, the fluorine concentration of the treated water is greatly different even though the solutions having the same fluorine concentration and sulfate ion concentration are treated by the same method. Therefore, in the process of mixing hydrofluoric acid and sulfuric acid, a part of the fluorine is changed to a form that is difficult to treat.

(実施例2)
図1に示す装置構成図に基づいた処理実験を行った。混酸の調製には、96%の硫酸と46%フッ酸を用い、混合比率9:1で一定とした。混合後のフッ素濃度は3.1重量%である。
(Example 2)
A processing experiment based on the device configuration diagram shown in FIG. 1 was conducted. For the preparation of the mixed acid, 96% sulfuric acid and 46% hydrofluoric acid were used, and the mixture ratio was kept constant at 9: 1. The fluorine concentration after mixing is 3.1% by weight.

次に、図1における第一工程として、前記調整した混酸に水道水を添加した。水道水の量は混酸容量の10%〜3000%の範囲とした。その後、1時間静置した後、ガラスエッチング工程での洗浄水を想定して水道水を加えて希釈し、最終的な希釈倍率を50倍で一定としたものを原水とした。その後、原水に消石灰をpH12以上になるまで加え、1時間撹拌したのち、高分子凝集剤を添加して凝集させ、清澄な上澄水(処理水)を得た。処理したフッ素濃度の結果は図4に示す通りであった。   Next, tap water was added to the adjusted mixed acid as the first step in FIG. The amount of tap water was in the range of 10% to 3000% of the mixed acid capacity. Then, after leaving still for 1 hour, the tap water was added and diluted assuming the washing water in a glass etching process, and what made the final dilution rate constant by 50 times was used as raw water. Thereafter, slaked lime was added to the raw water until the pH reached 12 or more, and after stirring for 1 hour, a polymer flocculant was added and aggregated to obtain clear supernatant water (treated water). The result of the treated fluorine concentration was as shown in FIG.

図4に示す通り、第一工程を経ることなく、混酸に洗浄水を50倍量加えてから処理した場合(図4のNo.1)は、96mg/Lまでしか処理されなかった。これに対して、希釈処理工程において、混酸の同容量の水道水を加え、1時間静置する工程を経た後、洗浄水を加えてから処理した場合(図4のNo.4)は3.1mg/Lと大幅に改善することが分かる。また図4の結果(No.2〜No.9)は、解離工程における水道水の添加量には最適な範囲が存在することも示しており、混酸の30倍容量以上を加えると、逆に悪化することから、最適な水の添加量は、混酸容積の10%〜2500%であり、好ましくは50〜500%であることが分かる。   As shown in FIG. 4, when the treatment was performed after adding 50 times the washing water to the mixed acid without passing through the first step (No. 1 in FIG. 4), the treatment was performed only up to 96 mg / L. On the other hand, in the dilution treatment step, tap water having the same volume of mixed acid is added, the mixture is allowed to stand for 1 hour, and then treated with washing water (No. 4 in FIG. 4). It turns out that it improves significantly with 1 mg / L. In addition, the results (No. 2 to No. 9) in FIG. 4 also show that there is an optimum range for the amount of tap water added in the dissociation process, and conversely when adding more than 30 times the volume of the mixed acid. Since it deteriorates, it turns out that the optimal addition amount of water is 10 to 2500% of the mixed acid volume, and preferably 50 to 500%.

(実施例3)
図2に示す装置構成図に基づいた処理実験を行った。混酸の調製には、96%の硫酸と46%フッ酸を用い、混合比率10:8で一定とした。混合後のフッ素濃度は14重量%であった。
(Example 3)
A processing experiment based on the device configuration diagram shown in FIG. 2 was performed. For the preparation of the mixed acid, 96% sulfuric acid and 46% hydrofluoric acid were used, and the mixture ratio was kept constant at 10: 8. The fluorine concentration after mixing was 14% by weight.

次に、その混酸を容積100mLのポリビンに50mLずつ入れたものを2種類用意し、一方のポリビンを開放状態、もう一方のポリビンを密閉状態で、それぞれ混酸を静置した。図2に示した第一工程は、槽5を開放状態にして、混酸(廃液)を静置していることを示している。   Next, two types of mixed acid containing 50 mL each in a 100 mL capacity polybin were prepared, and the mixed acid was allowed to stand in a state where one of the polybins was opened and the other one was sealed. The 1st process shown in FIG. 2 has shown that the tank 5 was made into the open state and mixed acid (waste liquid) was left still.

その後、それぞれ一定時間経過後の混酸を採取した後、水道水(洗浄水)を混酸の50倍容量加えて原水とした。原水に消石灰をpH12以上になるまで加え、1時間撹拌したのち、高分子凝集剤を添加して凝集させ、清澄な上澄水(処理水)を得た。処理水フッ素濃度は図5の通りとなり、ポリビンの開放状態で静置した混酸のみの処理性が向上していること、また処理性は数十時間以上をかけ、ゆっくり改善していることが分かる。その処理時間は24時間以上であり、約120時間を超えると、あまり処理性に変化がないことが分った。   Thereafter, the mixed acid was collected after a certain period of time, and tap water (washing water) was added 50 times the volume of the mixed acid to obtain raw water. Slaked lime was added to the raw water until the pH reached 12 or more, and after stirring for 1 hour, a polymer flocculant was added and agglomerated to obtain clear supernatant water (treated water). The treated water fluorine concentration is as shown in FIG. 5, and it can be seen that the treatment performance of only the mixed acid left in the open state of the polybin is improved, and the treatment performance is slowly improved over several tens of hours. . It was found that the treatment time was 24 hours or more, and when the treatment time exceeded about 120 hours, there was not much change in the processability.

(実施例4)
図3に示す装置構成図に基づいた処理実験を行った。混酸の調製には、96%の硫酸と46%フッ酸を用い、混合比率10:8で一定とした。混合後のフッ素濃度は14重量%となる。この混酸に対し、水道水(洗浄水)を混酸の50倍容量加えた後、容積100mLのポリビンに50mLずつ入れたものを2種類用意し、一方を開放状態で、もう一方を密閉状態で静置した。なお、水道水を加えた後の混酸のフッ素濃度は4300mg/L(5重量%未満)であった。
Example 4
A processing experiment based on the device configuration diagram shown in FIG. 3 was performed. For the preparation of the mixed acid, 96% sulfuric acid and 46% hydrofluoric acid were used, and the mixture ratio was kept constant at 10: 8. The fluorine concentration after mixing is 14% by weight. To this mixed acid, tap water (washing water) is added 50 times the volume of the mixed acid, then two types of 50 mL each in a 100 mL volume plastic bottle are prepared. One is open and the other is sealed and static. I put it. In addition, the fluorine concentration of the mixed acid after adding tap water was 4300 mg / L (less than 5% by weight).

その後、それぞれ一定時間経過後の混酸を採取したものを原水とした。その原水に消石灰をpH12以上になるまで加え、1時間撹拌したのち、高分子凝集剤を添加して凝集させ、清澄な上澄水(処理水)を得た。処理水フッ素濃度は図6の通りとなり、密閉保管、開放保管に関わらず、数日以上をかけて、ゆっくりと処理性が向上していることが分かる。   Thereafter, the raw water was obtained by collecting the mixed acid after a certain period of time. Slaked lime was added to the raw water until the pH reached 12 or more, and after stirring for 1 hour, a polymer flocculant was added and agglomerated to obtain clear supernatant water (treated water). The treated water fluorine concentration is as shown in FIG. 6, and it can be seen that the processability is slowly improved over several days regardless of sealed storage or open storage.

以上説明したように本発明のフッ素含有排水の処理方法によれば、従来存在が知られていなかった、フッ酸と硫酸を混合することにより生成する難処理性フッ素を、カルシウム塩やアルミニウム塩を使用した公知の処理方法で処理できる形態に転換させることができる。   As described above, according to the method for treating fluorine-containing wastewater of the present invention, a hardly-treatable fluorine produced by mixing hydrofluoric acid and sulfuric acid, which has not been conventionally known, is converted into calcium salt or aluminum salt. It can convert into the form which can be processed with the well-known processing method used.

図1は、本発明の実施形態1に係るフッ素含有排水の処理方法を実施するための装置構成図である。FIG. 1 is an apparatus configuration diagram for carrying out a method for treating fluorine-containing wastewater according to Embodiment 1 of the present invention. 図2は、本発明の実施形態2に係るフッ素含有排水の処理方法を実施するための装置構成図である。FIG. 2 is an apparatus configuration diagram for implementing the fluorine-containing wastewater treatment method according to Embodiment 2 of the present invention. 図3は、本発明の実施形態3に係るフッ素含有排水の処理方法を実施するための装置構成図である。FIG. 3 is an apparatus configuration diagram for carrying out the fluorine-containing wastewater treatment method according to Embodiment 3 of the present invention. 図4は、本発明の実施例2における処理実験の結果を示す表である。FIG. 4 is a table showing the results of processing experiments in Example 2 of the present invention. 図5は、本発明の実施例3において、混酸を処理するまでに、開放状態で静置した場合と、密閉状態で静置した場合の、静置時間と処理性との関係を示す特性図である。FIG. 5 is a characteristic diagram showing the relationship between the standing time and the processability when left in an open state and left in a sealed state before processing the mixed acid in Example 3 of the present invention. It is. 図6は、本発明の実施例4において、混酸に水を加え、フッ素濃度5重量%に調整してから処理を開始するまでの静置時間と、処理性との関係を示す特性図である。FIG. 6 is a characteristic diagram showing the relationship between the standing time from the addition of water to a mixed acid to adjust the fluorine concentration to 5% by weight until the treatment is started and the processability in Example 4 of the present invention. .

Claims (4)

少なくともフッ酸及び硫酸から成る混酸中のフッ素を処理する方法であって、
前記混酸に、混酸容積の10%〜2500%の水を加水する第一工程と、
前記第一工程を経た混酸に、カルシウム塩を加えて固液分離する第二工程を含むことを特徴とするフッ素含有排水の処理方法。
A method for treating fluorine in a mixed acid comprising at least hydrofluoric acid and sulfuric acid,
A first step of adding 10% to 2500% of water of the mixed acid volume to the mixed acid;
A method for treating fluorine-containing wastewater, comprising a second step in which a calcium salt is added to the mixed acid that has undergone the first step to perform solid-liquid separation.
前記フッ素濃度が調整された混酸を静置したのち、前記静置した混酸に使用済の洗浄水を添加することを特徴とする請求項1に記載のフッ素含有排水の処理方法。   The method for treating fluorine-containing wastewater according to claim 1, wherein after the mixed acid having the adjusted fluorine concentration is allowed to stand, used washing water is added to the left standing mixed acid. 少なくともフッ酸及び硫酸から成る混酸中のフッ素を処理する方法であって、
前記混酸を槽内に取込み、前記槽を開放状態に保持して前記混酸を静置する第一工程と、
前記第一工程を経た混酸に、カルシウム塩を加えて固液分離する第二工程を含むことを特徴とするフッ素含有排水の処理方法。
A method for treating fluorine in a mixed acid comprising at least hydrofluoric acid and sulfuric acid,
Taking the mixed acid into the tank, holding the tank in an open state, and allowing the mixed acid to stand; and
A method for treating fluorine-containing wastewater, comprising a second step in which a calcium salt is added to the mixed acid that has undergone the first step to perform solid-liquid separation.
少なくともフッ酸及び硫酸から成る混酸中のフッ素を処理する方法であって、
前記混酸に濃度調整用水を加えてフッ素濃度を5重量%未満に調整する第一工程と、
前記第一工程を経た混酸に、カルシウム塩を加えて固液分離する第二工程を含むことを特徴とするフッ素含有排水の処理方法。
A method for treating fluorine in a mixed acid comprising at least hydrofluoric acid and sulfuric acid,
A first step of adjusting the fluorine concentration to less than 5% by weight by adding concentration adjusting water to the mixed acid;
A method for treating fluorine-containing wastewater, comprising a second step in which a calcium salt is added to the mixed acid that has undergone the first step to perform solid-liquid separation.
JP2005222249A 2005-07-29 2005-07-29 Method for treating fluorine in mixed acid Pending JP2007038049A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010158633A (en) * 2009-01-09 2010-07-22 Sumitomo Metal Mining Co Ltd Method for separating fluorine from fluorine-containing waste water
CN112551660A (en) * 2020-12-02 2021-03-26 温州冰锡环保科技有限公司 A processing apparatus for printed wiring board printing ink waste water

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002136965A (en) * 2000-11-07 2002-05-14 Ube Material Industries Ltd Treating method of waste water
JP2002316171A (en) * 2001-04-18 2002-10-29 Sony Corp Treatment method for fluorine-containing wastewater

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002136965A (en) * 2000-11-07 2002-05-14 Ube Material Industries Ltd Treating method of waste water
JP2002316171A (en) * 2001-04-18 2002-10-29 Sony Corp Treatment method for fluorine-containing wastewater

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010158633A (en) * 2009-01-09 2010-07-22 Sumitomo Metal Mining Co Ltd Method for separating fluorine from fluorine-containing waste water
CN112551660A (en) * 2020-12-02 2021-03-26 温州冰锡环保科技有限公司 A processing apparatus for printed wiring board printing ink waste water
CN112551660B (en) * 2020-12-02 2023-12-15 渭南大东印刷包装机械有限公司 A processing apparatus for printed wiring board ink waste water

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