JP2007035700A - Irradiation device and irradiation application device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an irradiation apparatus and an irradiation application apparatus having a simple configuration capable of simultaneously irradiating an object with a plurality of irradiation lights or continuous irradiation lights.
An irradiation apparatus includes a light source 1, an imaging optical system 2 including a first lens group L1 to a third lens group L3, a conical prism (A) 3, and a conical prism (B) 4. The light beam emitted from the light source 1 is collected by the imaging optical system 2 and incident on the side surface of the conical prism (A) 3, and the light beam is deflected in a plurality of directions by the conical prism (A) 3. Further, after the light beam is incident on the bottom surface portion of the conical prism (B) 4 with the conical prism (A) 3 and the bottom surface portion facing each other, the light beam is totally reflected on the side surface portion of the conical prism (B) 4. Then, the light beam is emitted from the opposing side surface portions. Thereby, irradiation light is continuously given to the inner wall of the cylindrical object 5 to be irradiated.
[Selection] Figure 1

Description

  The present invention relates to an irradiation apparatus and an irradiation application apparatus that irradiate light to a plurality of points or continuous portions simultaneously using a single light source.

  In recent years, application of laser technology in various fields, such as using a high-power laser light source, for example, marking on a plate using laser focused heat, or fixing an object using welding action by laser focused heat There have been many. In particular, with regard to the fixation of objects, in order to meet the requirements for shortening the fixing work time and improving the positioning accuracy of the fixed object, laser irradiation is performed simultaneously on a plurality of welding points, and the welding fixing work is performed in parallel with the laser irradiation. There are increasing technical demands to do.

  On the other hand, when irradiating light on the inner wall of an object, for example, when processing a cylindrical object, it is common to deflect the light emitted from the light source with a flat reflector or the like, but irradiate the entire inner wall of the object. In this case, it is necessary to rotate the flat reflector. Further, when it is desired to simultaneously irradiate the entire circumference of the inner wall of the object by reflecting the light beam emitted from the light source with a conical mirror, there is the following method. That is, the light path is divided and reflected in the 360 ° direction by causing the light beam to be substantially coincident with the apex of the conical mirror and for the light beam to be incident on the side surface of the conical mirror approximately equally. There is also a method.

  FIG. 12 is a diagram showing a schematic configuration of an irradiation apparatus using a conical mirror according to a conventional example, in which (a) is a schematic cross-sectional view and (b) is a schematic top view.

  In FIG. 12, the irradiation apparatus includes a light source 101, an imaging optical system 102 having a plurality of lenses 111 and 112, a conical mirror 103, a pedestal 104 that fixes the conical mirror 103, and a support member 105 that supports the pedestal 104. ing.

  In the irradiation apparatus, the light emitted from the light source 101 is incident on the conical mirror 103 by the imaging optical system 102 and is reflected by the conical mirror 103 to irradiate the inner wall of the cylindrical irradiated object 106. In this case, when irradiating the inner wall of the irradiated object 106 with the irradiation light reflected by the conical mirror 103, the support member 105 supporting the pedestal 104 to which the conical mirror 103 is fixed causes vignetting of the irradiation light. (Irradiation vignetting area shown by broken lines in the figure).

  Conventionally, as a method of obtaining a plurality of irradiation points (point images) at the same time when a light beam is irradiated from a light source, a method using a so-called multilaser that prepares as many light sources as the number of irradiation points is generally used. . On the other hand, as a method of obtaining a plurality of irradiation points at the same time when a light beam is irradiated from a single light source, for example, a method of branching a light beam emitted from the light source by an optical fiber, a beam splitter emitted from a light source Various methods such as a method of dividing by a half mirror have been proposed.

Furthermore, regarding a technique for irradiating a ring-shaped ring by continuously connecting a plurality of irradiation points, a blood vessel anastomosis apparatus for medical devices (see, for example, Patent Document 1), an X-ray condensing optical system using a conical prism. An apparatus (for example, see Patent Document 2) has been proposed.
Japanese Patent Laid-Open No. 61-31142 JP-A-9-26500

  However, the irradiation apparatus using the conical mirror shown in the conventional example has a problem in that the accuracy of arrangement of the conical mirror that causes uneven light distribution becomes severe. Furthermore, since the support member for supporting the pedestal to which the conical mirror is fixed is provided, the support member causes vignetting of irradiation light, and it is impossible to obtain ideal irradiation light for the irradiated object. There is.

  The technique described in the above-mentioned patent document is based on the premise that light emitted from a light source is guided by an optical fiber or the like, and does not disclose a method for guiding light to a conical prism. Further, in the technique described in the above-mentioned patent document, a method for precisely adjusting the irradiation position of irradiation light on an irradiated object and achieving a desired irradiation state is proposed as in the embodiment of the present invention described later. It has not been.

  The objective of this invention is providing the irradiation apparatus and irradiation application apparatus of a simple structure which can irradiate a target object with several irradiation light or continuous irradiation light simultaneously.

  In order to achieve the above-described object, the irradiation apparatus of the present invention includes a condensing unit that condenses the light emitted from the light source, and a conical shape, and the light emitted from the condensing unit is incident on the side surface. A first prism disposed so as to be emitted from the bottom surface portion and deflecting light rays incident from the light collecting means in a plurality of directions; and a cone-shaped light ray emitted from the first prism. A second prism that is arranged so as to enter the bottom surface and exit from the side surface, and after the light incident from the bottom surface is reflected by the side surface, the second prism exits from the side surface opposite to the reflected side surface. It is characterized by comprising.

  According to the present invention, the light beam incident from the condensing means is deflected in a plurality of directions by the first prism, the light beam is totally reflected by the side surface portion of the second prism, and then emitted from the opposite side surface portion. Therefore, it is possible to realize an irradiation apparatus having a simple configuration that can simultaneously irradiate an object with a plurality of irradiation lights or continuous irradiation lights.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]
FIG. 1 is a diagram showing an arrangement of an irradiation optical system that generates ring-shaped irradiation light and an optical path in a meridional section in an irradiation apparatus using a conical prism according to a first embodiment of the present invention. FIG. 2 is a diagram illustrating an enlarged state of the third lens group and the conical prism of the imaging optical system of the irradiation apparatus.

  1 and 2, the irradiation apparatus includes a light source 1, numerical image data shown in numerical examples described later, an imaging optical system 2 including a first lens group L1 to a third lens group L3, and numerical values described later. A conical prism (A) 3 and a conical prism (B) 4 having shape / material data and optical axis position data are provided.

  The irradiation device emits light beams emitted from a single light source 1 continuously around the optical axis by using a conical prism (A) 3 and a conical prism (B) 4, so that the optical axis and The inner wall of the irradiated object 5 having a cylindrical shape arranged so as to be substantially parallel is irradiated. The conical prism (B) 4 is set to a vertex angle that totally reflects the light incident from the bottom surface on the side surface and transmits the light totally reflected on the side surface. The irradiated object 5 has an inner diameter of 52 mm.

  In the irradiation apparatus according to the present embodiment, an effective light beam of a light source 1 (single wavelength laser light) is incident on an imaging optical system 2, and two conical prisms (A) 3 and a conical prism (B) 4 are used. In order to secure an inner optical path and to secure an irradiation point suitable for various sizes of irradiated objects, the following configuration is adopted.

  In the imaging optical system 2, the light beam is refracted into substantially afocal near-parallel light by the first lens unit L1 having a positive refractive power as a whole. Further, the near-parallel light is converged by the second lens unit L2 having a positive refractive power for providing a condensing function. Furthermore, the third lens unit L3 having negative refractive power extends the focal length of the entire imaging optical system 2 and ensures a long working distance.

  Further, the light beam emitted from the imaging optical system 2 to the conical prism (A) 3 and the conical prism (B) 4 disposed on the imaging surface side of the imaging optical system 2 is contracted to a small diameter. Thus, the conical prism (A) 3 and the conical prism (B) 4 are reduced in size. Furthermore, by shortening the lengths of the lenses of the first lens unit L1, the second lens unit L2, and the third lens unit L3 and correcting aberrations, the imaging optical system 2 is optically arranged as a telephoto system. The imaging optical system 2 capable of achieving the above is achieved.

  The conical prism (A) 3 is arranged on the imaging surface side of the imaging optical system 2, and the vertex and the center point of the bottom surface are aligned on the optical axis with the vertex facing the light source. Arranged in a state. Thereby, the light rays incident on the side surface of the conical prism (A) 3 are separated concentrically and emitted from the bottom surface of the conical prism (A) 3. The conical prism (B) 4 is disposed in a state where the conical prism (A) 3 and the bottom surface are opposed to each other, and the center point and apex of the bottom surface are illuminated with the bottom surface facing the light source. It is arranged in a state of matching on the axis.

  When the light beam emitted from the light source 1 and condensed by the imaging optical system 2 enters the side surface portion of the conical prism (A) 3, the light beam is deflected in a plurality of directions by the conical prism (A) 3. Further, when light rays enter the bottom surface of the conical prism (B) 4 with the conical prism (A) 3 and the bottom surface facing each other, the conical prism is set by setting the vertex angle of the conical prism (B) 4. (B) After the light beam is totally reflected at the side surface portion 4, the light is emitted from the opposite side surface portion. Thereby, irradiation light can be continuously given to the inner wall of the cylindrical object to be irradiated 5.

  In the present embodiment, a continuous irradiation shape generated by irradiation of a light beam on an irradiated object, for example, an irradiation shape such as a ring shape, is configured by an infinite number of (a plurality of) irradiation points.

  In this embodiment, the relative position on the optical axis between the conical prism (A) 3 and the conical prism (B) 4 (the air interval between the conical prism (A) 3 and the conical prism (B) 4). It is comprised so that can be changed.

  FIG. 3 shows the light condensing position by moving the conical prism (B) 4 on the optical axis so as to be close to the conical prism (A) 3 in the irradiation optical system of the irradiation apparatus of FIG. It is a figure which shows the state which gave.

  In FIG. 3, the conical prism (B) 4 is moved on the optical axis so as to be close to the conical prism (A) 3 from the position of FIG. 1 by a moving mechanism (not shown) provided in the irradiation device. The state is shown (see “D” in the numerical example described later. D = 10 mm → D = 1 mm). Thereby, an irradiation position is changed. The total reflection part of the light beam in the conical prism (B) 4 is moved further toward the apex of the conical prism (A) 3. As a result, the light beam emitted from the conical prism (B) 4 generates an image point on the position farther from the optical axis in the direction orthogonal to the optical axis, that is, on the inner wall of the irradiated object 15. . The inner diameter of the irradiated object 15 is 64 mm.

  In the present embodiment, the prism is moved by fixing the light source side prism (A) on the optical axis and moving only the prism (B) on the optical axis. The reason for this is that, when the light beam is split at the prism (A), unevenness in the amount of light of the light beam branched due to the relative misalignment between the imaging optical system and the prism (A) and the deviation in the deflection direction are minimized. For this reason, in the present embodiment, the prism (A) is fixed on the optical axis so that the positional accuracy with the imaging optical system can be improved.

  However, if there is no problem as described above, the prisms (A) and (B) may be moved on the optical axis in the same manner, and the prism (A) and the prism may be moved by moving at least one of the prisms on the optical axis. The irradiation position change may be performed by giving the relative position change of (B).

  FIG. 4 is a diagram three-dimensionally showing the state of the irradiation light beam in the irradiation apparatus of FIG.

  FIG. 4 shows a state in which the light beam emitted from the conical prism (B) 4 is irradiated on the inner wall of the cylindrical object to be irradiated.

  The irradiation device according to the present embodiment uses a conical prism to give ring-shaped irradiation light to the inner wall of an object to be irradiated. It is possible to obtain a plurality of irradiation points simultaneously from the light source. An irradiation apparatus using a polygonal pyramid prism (a quadrangular pyramid prism, a hexagonal pyramid prism) will be described in the second and third embodiments.

  Next, numerical examples will be described. Numerical examples are (1) numerical data of the imaging optical system 2 of the irradiation device, (2) shape / material data of the conical prism, and position data on the optical axis in the arrangement of FIG. 1, and (3) conical prism. 4 is position data on the optical axis in the arrangement of FIG. Surface numbers 1 to 10 are provided on the surfaces (first surface to tenth surface) of each lens constituting the first lens group L1, the second lens group L2, and the third lens group L3 of the imaging optical system 2. Correspond.

(1) Numerical data of imaging optical system 2 Use wavelength 930nm
Distance from light source to first surface of first lens unit L1 of imaging optical system 2: 57.6 mm
Surface number Curvature radius Surface spacing Nd Vd N (930nm)
1 -99.210 6.0 1.516330 64.14 1.508074
2 -40.007 1.7
3 179.443 6.0 1.516330 64.14 1.508074
4 -85.125 13.8
5 85.152 6.0 1.516330 64.14 1.508074
6 -179.443 1.7
7 40.007 6.0 1.516330 64.14 1.508074
8 99.210 30.0
9 -24.605 3.0 1.516330 64.14 1.508074
10 66.014
Effective diameter of the first surface of the first lens unit L1 of the imaging optical system 2: φ25
(2) Conical prism shape / material data and position data on the optical axis in the arrangement shown in FIG. 1 Conical prism (A): Circular shape with a bottom of φ10mm
: Material Nd = 1.516330 Vd = 64.14 N (930nm) = 1.508
Conical prism (B): Circular shape with a bottom of φ16mm
: Material Nd = 1.696797 Vd = 55.53 N (930nm) = 1.684
Position on the optical axis A = 2mm
B = 5mm
C = 2mm
D = 10mm
E = 2mm
F = 13.8mm
(3) Position data on the optical axis in the arrangement of the conical prism in FIG. 3 The shape / material data of the conical prism (A) and the conical prism (B) are the same as the numerical values shown in the above (2). The description is omitted.

Position on the optical axis A = 2mm
B = 5mm
C = 2mm
D = 1mm
E = 2mm
F = 13.8mm
As described above, according to the present embodiment, the light beam emitted from the light source 1 is deflected in a plurality of directions by the conical prism (A) 3, and further incident on the bottom surface of the conical prism (B) 4, The light beam is totally reflected by the side surface portion of the conical prism (B) 4 and then emitted from the opposite side surface portion. As a result, it is possible to realize an irradiation apparatus having a simple configuration capable of irradiating continuous irradiation light on the inner wall of a cylindrical object to be irradiated.

[Second Embodiment]
The second embodiment of the present invention is different from the above-described first embodiment in that a quadrangular pyramid prism is used instead of the conical prism. Since the other elements of the present embodiment are the same as the corresponding ones of the first embodiment (FIG. 1) described above, description thereof is omitted.

  FIG. 5 is a diagram showing an arrangement of irradiation optical systems that generate irradiation light at four locations simultaneously in the irradiation apparatus using the quadrangular pyramid prism according to the present embodiment, and an optical path in a meridian section.

  In FIG. 5, the irradiation apparatus includes a light source 1, an imaging optical system 2 including a first lens group L <b> 1 to a third lens group L <b> 3, a quadrangular pyramid having shape / material data and optical axis position data shown in numerical examples described later. A prism (A) 13 and a quadrangular pyramid prism (B) 14 are provided.

  The irradiating device uses a quadrangular pyramid prism (A) 13 and a quadrangular pyramid prism (B) 14 having a base of a regular quadrilateral shape for a light beam emitted from a single light source 1, and a cross section perpendicular to the optical axis. A point image is formed by irradiating the four inner walls of the irradiated object 25 having a rectangular box shape. The quadrangular pyramid prism (B) 14 is set to a vertex angle that totally reflects the light incident from the bottom surface on the side surface and transmits the light totally reflected on the side surface. The dimension from the optical axis to the inner wall of the irradiated object 25 is 24.0 mm.

  The imaging optical system 2 is the same as that shown in FIG. As in the case of the conical prism, the quadrangular pyramid prism (A) 13 and the quadrangular pyramid prism (B) 14 are arranged so that the bottom surface portions face each other, and the center point of each bottom surface portion and each Are arranged so that their vertices coincide with the optical axis. Further, the quadrangular pyramid prism (A) 13 and the quadrangular pyramid prism (B) 14 are arranged so that their bottom surface portions are parallel to each other. As a result, the side surface portion of the quadrangular pyramid prism (A) 13 and the side surface portion of the quadrangular pyramid prism (B) 14 facing each other across the optical axis are substantially parallel.

  When the light beam emitted from the light source 1 and condensed by the imaging optical system 2 enters the side surface portion of the quadrangular pyramid prism (A) 13, the light beam is separated into four directions and the bottom surface of the quadrangular pyramid prism (A) 13. It is injected from the part. Further, when the light beam is incident on the bottom surface portion of the quadrangular pyramid prism (B) 14 that faces the quadrangular pyramid prism (A) 13 and the bottom surface portion, the light beam is totally reflected at the side surface portion of the quadrangular pyramid prism (B) 14. After that, the light is emitted as a light beam that is substantially perpendicular to the optical axis from the opposing side surface portions. Four irradiation points having the same number of angles as those of the quadrangular pyramid prism are obtained by the light rays emitted from the side surfaces of the quadrangular pyramid prism (B) 14. As a result, light is irradiated to each of four irradiation surfaces (inner wall surfaces) parallel to the optical axis of the irradiated object 25.

  In the present embodiment, four irradiation points having the same number as that of the quadrangular pyramid prism are obtained. However, when it is desired to increase the number of irradiation points, the bottom surface portion has more even angles. A large number of irradiation points can be obtained by using a polygonal pyramid prism. That is, when a polygonal pyramid prism is used, irradiation points having the same number of angles as the polygonal pyramid prism can be obtained. Of the polygonal pyramid prisms, a hexagonal pyramid prism will be described in a third embodiment.

  In the present embodiment, the relative positions on the optical axis of the quadrangular pyramid prism (A) 13 and the quadrangular pyramid prism (B) 14 (the quadrangular pyramid prism (A) 13 and the quadrangular pyramid prism (B) 14). The air interval) can be changed.

  Furthermore, it may be assumed that precise alignment of a plurality of irradiation points is desired simultaneously at the time of welding work or processing work using, for example, laser light using the irradiation apparatus. Therefore, in the present embodiment, as described above, by changing the relative positions on the optical axis of the quadrangular pyramid prism (A) 13 and the quadrangular pyramid prism (B) 14, the spread amount of the divided light beams can be reduced. It is possible to adjust. As a result, the irradiation position can be changed with a simple mechanical structure of the irradiation apparatus, which is advantageous for improving the mechanical accuracy of the irradiation apparatus and improving workability. There are advantages.

  FIG. 6 shows a change in the light collection position by moving the quadrangular pyramid prism (B) on the optical axis so as to be close to the quadrangular pyramid prism (A) in the irradiation optical system of the irradiation apparatus of FIG. It is a figure which shows the state which gave.

  In FIG. 6, the rectangular prism (B) 14 is moved on the optical axis so as to be close to the quadrangular pyramid prism (A) 13 from the position shown in FIG. 1 by a moving mechanism (not shown) provided in the irradiation apparatus. Shows the state. Thereby, an irradiation position is changed. The total reflection portion of the light beam in the quadrangular pyramid prism (B) 14 is moved in the apex direction of the quadrangular pyramid prism (A) 13. As a result, the light beam emitted from the quadrangular pyramid prism (B) 14 generates an image point on the position farther from the optical axis in the direction orthogonal to the optical axis, that is, on the inner wall of the irradiated object 35. Yes. The dimension from the optical axis to the inner wall of the irradiated object 35 is 28.0 mm.

  FIG. 7 is a diagram three-dimensionally showing the state of the irradiation light beam in the irradiation apparatus of FIG.

  FIG. 7 shows a state in which the light beam emitted from the quadrangular pyramid prism (B) 14 is irradiated on the inner wall of the object to be irradiated having a box shape.

  Next, numerical examples will be described. Numerical examples are (1) shape / material data of a quadrangular pyramid prism and position data on the optical axis in the arrangement of FIG. 5, and (2) position data on the optical axis in the arrangement of FIG. 6 of the quadrangular pyramid prism.

(1) Shape / material data of a quadrangular pyramid prism and position data on the optical axis in the arrangement shown in FIG. 5 Quadrangular pyramid prism (A): a square whose bottom is 10 mm on a side.
: Material Nd = 1.516330 Vd = 64.14 N (930nm) = 1.508
Square pyramid prism (B): A square whose bottom is 12mm on a side
: Material Nd = 1.696797 Vd = 55.53 N (930nm) = 1.684
Position on the optical axis A = 2mm
B = 5mm
C = 2mm
D = 5mm
E = 2mm
F = 10.5mm
(2) Position data on the optical axis in the arrangement of the quadrangular pyramid prism in FIG. 6 The shape / material data of the quadrangular pyramid prism (A) and the quadrangular pyramid prism (B) are the same as the values shown in (1) above. Therefore, the description is omitted.

Position on the optical axis A = 2mm
B = 5mm
C = 2mm
D = 1.5mm
E = 2mm
F = 10.5mm
As described above, according to the present embodiment, the light beam emitted from the light source 1 is deflected in a plurality of directions by the quadrangular pyramid prism (A) 13 and further incident on the bottom surface of the quadrangular pyramid prism (B) 14. The light beam is totally reflected by the side surface portion of the quadrangular pyramid prism (B) 14 and then emitted from the opposite side surface portion. As a result, it is possible to realize an irradiation apparatus having a simple configuration capable of simultaneously irradiating a plurality of irradiation lights on the inner wall of a box-shaped object to be irradiated.

[Third Embodiment]
The third embodiment of the present invention is different from the above-described first embodiment in that a hexagonal pyramid prism is used instead of the conical prism. Since the other elements of the present embodiment are the same as the corresponding ones of the first embodiment (FIG. 1) described above, description thereof is omitted.

  FIG. 8 is a diagram showing the arrangement of the irradiation optical system that generates irradiation light at six locations simultaneously in the irradiation device using the hexagonal pyramid prism according to the present embodiment and the optical path in the meridional section, (B) is a figure which shows the state from which an irradiation position changes to an optical axis direction by the change of the relative position on an optical axis in a hexagonal pyramidal prism (A) and a hexagonal pyramidal prism (B).

  In FIG. 8, the irradiation apparatus is a hexagonal pyramid having a light source 1, an imaging optical system 2 composed of a first lens unit L1 to a third lens unit L3, shape / material data and optical axis position data shown in numerical examples described later. A type prism (A) 23 and a hexagonal pyramid type prism (B) 24 are provided.

  The irradiation device uses a hexagonal pyramid prism (A) 23 and a hexagonal pyramid prism (B) 24 having a base having a regular hexagonal shape for a light beam emitted from a single light source 1, and a cross section perpendicular to the optical axis. A point image is formed by irradiating the six inner walls of the irradiated object 45 having a hexagonal shape. The hexagonal pyramid prism (B) 24 is set to a vertex angle that totally reflects the light incident from the bottom surface and transmits the light totally reflected by the side surface. The dimension from the optical axis to the inner wall of the irradiated object 45 is 34.0 mm.

  The imaging optical system 2 is the same as that shown in FIG. The hexagonal pyramidal prism (A) 23 and the hexagonal pyramidal prism (B) 24 are arranged in a state where the bottom surface portions face each other, as in the case of the conical prism, and the center point of each bottom surface portion and each of the center points. Are arranged so that their vertices coincide with the optical axis. Further, the hexagonal pyramidal prism (A) and the hexagonal pyramidal prism (B) 24 are arranged so that the bottom surface portions are parallel to each other. Thereby, the side part of the hexagonal pyramidal prism (A) 23 and the side part of the hexagonal pyramidal prism (B) 24 facing each other across the optical axis are substantially parallel.

  When the light beam emitted from the light source 1 and condensed by the imaging optical system 2 enters the side surface of the hexagonal pyramid prism (A) 23, the light beam is separated into six directions, and the bottom surface of the hexagonal pyramid prism (A) 23 is obtained. It is injected from the part. Further, when the light beam is incident on the bottom surface of the hexagonal pyramid prism (B) 24 with the hexagonal pyramid prism (A) 23 facing the bottom surface, the light beam is totally reflected at the side surface of the hexagonal pyramid prism (B) 24. After that, the light is emitted as a light beam that is substantially perpendicular to the optical axis from the opposing side surface portions. Six irradiation points having the same number of angles as the hexagonal pyramid prism are obtained by the light rays emitted from the side surfaces of the hexagonal pyramid prism (B) 24. As a result, light rays are respectively irradiated onto the six irradiation surfaces (inner wall surfaces) parallel to the optical axis of the irradiated object 45.

  8B, the hexagonal pyramid prism (B) 24 is moved closer to the hexagonal pyramid prism (A) 23 from the state of FIG. 8A by a moving mechanism (not shown) provided in the irradiation apparatus. In this way, a state where the optical axis is moved is shown. Thereby, an irradiation position is changed.

  FIG. 9 is a view three-dimensionally showing the state of the irradiation light beam in the irradiation apparatus of FIG.

  FIG. 9 shows a state in which the light beam emitted from the hexagonal pyramid prism (B) 24 is irradiated on the inner wall of the irradiated object having a hexagonal cross section.

  Next, numerical examples will be described. Numerical examples are hexagonal pyramid prism shape / material data and optical axis position data in the arrangement of FIG.

Hexagonal pyramid prism (A): Regular hexagon with a base of 5.7735mm on one side
: Material Nd = 1.516330 Vd = 64.14 N (930nm) = 1.508
Hexagonal pyramid prism (B): regular hexagonal base with a side of 6.9282mm
: Material Nd = 1.696797 Vd = 55.53 N (930nm) = 1.684
Position on the optical axis A = 2mm
B = 5mm
C = 2mm
D = 6 mm (FIG. 8A), D = 1 mm (FIG. 8B)
E = 2mm
F = 10.5mm
As described above, according to the present embodiment, the light beam emitted from the light source 1 is deflected in a plurality of directions by the hexagonal pyramid prism (A) 23 and further incident on the bottom surface of the hexagonal pyramid prism (B) 24. The light beam is totally reflected by the side surface portion of the hexagonal pyramidal prism (B) 24 and then emitted from the opposite side surface portion. As a result, it is possible to realize an irradiation apparatus having a simple configuration capable of simultaneously irradiating a plurality of irradiation lights on the inner wall of the irradiated object having a hexagonal cross section.

[Fourth Embodiment]
The fourth embodiment of the present invention is a prism in which the apex portion of the conical prism (A) and the conical prism (B) is a planar shape parallel to the bottom surface portion as compared with the first embodiment described above. (This embodiment is referred to as a vertex-removal prism). Since the other elements of the present embodiment are the same as the corresponding ones of the first embodiment (FIG. 1) described above, description thereof is omitted.

  FIG. 10 is a diagram illustrating an arrangement of an irradiation optical system that performs positioning by irradiating a guide light to a reference position in an irradiation apparatus using the apex removing prism according to the present embodiment, and an optical path in a meridian section. FIG. 11 is a diagram illustrating an enlarged state of the third lens group and the apex removing prism in the imaging optical system of the irradiation apparatus.

  10 and 11, the irradiation apparatus includes a light source 1, an imaging optical system 2 including a first lens unit L1 to a third lens unit L3, shape / material data and optical axis position data shown in numerical examples described later. A vertex removing prism (A) 33 and a vertex removing prism (B) 34. In the figure, reference numeral 35 denotes a pedestal for an irradiated object, and 36 denotes a stage capable of three-dimensional (XYZ) movement.

  The irradiation device irradiates the inner wall of the irradiated object 55 having a cylindrical shape with the light emitted from the single light source 1 by using the vertex removal prism (A) 33 and the vertex removal prism (B) 34. To do. The vertex removal prism (B) 34 is set to a state that totally reflects the light beam incident from the vertex removal prism (A) 33.

  The imaging optical system 2 is the same as that shown in FIG. The vertex removal prism (A) 33 and the vertex removal prism (B) 34 are arranged in such a manner that the bottom surface portions face each other, as in the case of the conical prism, and the center point of each bottom surface portion. And the center point of each vertex is arranged so as to coincide with the optical axis.

  When the light beam emitted from the light source 1 and condensed by the imaging optical system 2 enters the side surface portion of the vertex portion removing prism (A) 33, the light beam is deflected in a plurality of directions by the vertex portion removing prism (A) 33. Is done. Further, when the light beam is incident on the bottom surface portion of the vertex portion removing prism (B) 34 with the bottom surface portion facing the vertex portion removing prism (A) 33, the light beam is incident on the side surface portion of the vertex portion removing prism (B) 34. After being totally reflected, it is emitted from the opposing side surface portions. Thereby, irradiation light is continuously given to the inner wall of the cylindrical irradiated object 35.

  Next, laser irradiation processing using the irradiation apparatus will be described. For example, when processing is performed by irradiating the inner wall of a cylindrical object to be irradiated with laser light, it is difficult to directly confirm the irradiation position with the naked eye. For this reason, instead of checking the irradiation position with the naked eye, it may be desired to irradiate the irradiation light to the irradiation reference position and easily adjust the irradiation position.

  Therefore, as shown in FIG. 10 above, light can pass through the surfaces of the apex-removing prism (A) 33 and apex-removing prism (B) 34, and guide light can be applied to the apex surface. And the relative distance between the focal position of the guide light and the irradiated object is adjusted. This makes it possible to easily and accurately adjust the relative position between the irradiated object and the irradiation optical system in the direction orthogonal to the optical axis. Further, the stage 36 is moved in the direction of the optical axis while monitoring the degree of collection of the guide light. As a result, the position of the irradiated object in the optical axis direction can be adjusted simultaneously.

  In this embodiment, the apex portions of the apex-removing prism (A) 33 and apex-removing prism (B) 34 are planar, but the present invention is not limited to this. The apex of the apex-removing prism (A) 33 and apex-removing prism (B) 34 in order to extend the degree of freedom of the focusing position (imaging position) of the guide light and control the imaging performance of the guide light The shape of the part may be a curved surface shape such as a concave shape or a convex shape.

  Next, numerical examples will be described. Numerical examples are the shape / material data of the apex-removing prism and the position data on the optical axis in the arrangement of FIG.

Vertex removal prism (A): Circular shape with a top surface of φ2mm and a bottom surface of φ10mm
: Material Nd = 1.516330 Vd = 64.14 N (930nm) = 1.508
Vertex removal prism (B): Circular shape with a top surface of φ2mm and a bottom surface of φ16mm
: Material Nd = 1.696797 Vd = 55.53 N (930nm) = 1.684
Position on the optical axis A = 4mm
B = 4mm
C = 2mm
D = 9mm
E = 2mm
F = 12.1mm
As described above, according to the present embodiment, the light beam emitted from the light source 1 is deflected in a plurality of directions by the vertex portion removing prism (A) 33, and further, the bottom surface portion of the vertex portion removing prism (B) 34. Then, the light beam is totally reflected by the side surface portion of the apex-removing prism (B) 34 and then emitted from the opposite side surface portion. As a result, it is possible to realize an irradiation apparatus having a simple configuration capable of irradiating continuous irradiation light on the inner wall of a cylindrical object to be irradiated.

[Other embodiments]
In the first to fourth embodiments, the prism (B) is used in order to simplify the mechanism and to suppress the relative decentration of the prism (A) having the function of branching the optical path and the imaging optical system as much as possible. ) Only on the optical axis. However, the present invention is not limited to this. The prism (B) may be fixed on the optical axis and only the prism (A) may be moved. Both the prism (A) and the prism (B) are moved on the optical axis, and the relative distances of a plurality of light beams divided by the movement. May be adjusted.

  In the first to fourth embodiments, the configuration of the irradiation device and the case where the inner wall of the object is processed by the condensed heat when the irradiation light beam is condensed by the irradiation device have been described. The application is not limited to the field. A processing device that processes the surface of the object by the condensed heat when the irradiation light is condensed, a welding device that welds the objects by the condensed heat when the irradiation light is condensed, and the reference point is indicated by the irradiation light Therefore, the present invention can be applied to various devices such as a positioning device that performs optical positioning and an illumination device that illuminates a plurality of locations simultaneously.

It is a figure which shows the arrangement | positioning of the irradiation optical system which produces | generates the ring-shaped irradiation light in the irradiation apparatus using the conical prism which concerns on the 1st Embodiment of this invention, and the optical path in a meridian cross section. It is a figure which shows the state which expanded the 3rd lens group and conical prism of the imaging optical system of the irradiation apparatus of FIG. The figure which shows the state which gave the change to the condensing position of a light beam by moving on the optical axis so that a conical prism (B) may adjoin to the conical prism (A) in the irradiation optical system of the irradiation apparatus of FIG. It is. It is the figure which showed the state of the irradiated light in the irradiation apparatus of FIG. 1 three-dimensionally. It is a figure which shows the arrangement | positioning of the irradiation optical system which produces | generates irradiation light at four places simultaneously in the irradiation apparatus using the quadrangular pyramid type prism which concerns on the 2nd Embodiment of this invention, and the optical path in a meridian section. In the irradiation optical system of the irradiation apparatus of FIG. 5, a state in which the light beam condensing position is changed by moving the quadrangular pyramid prism (B) on the optical axis so as to be close to the quadrangular pyramid prism (A). FIG. It is the figure which showed the state of the irradiated light in the irradiation apparatus of FIG. 6 three-dimensionally. It is a figure which shows the arrangement | positioning of the irradiation optical system which produces | generates irradiation light at six places simultaneously in the irradiation apparatus using the hexagonal pyramid prism which concerns on the 3rd Embodiment of this invention, and the optical path in a meridian cross section, (a) (B) is a figure which shows the state from which an irradiation position changes to an optical axis direction by the change of the relative position on an optical axis in a hexagonal pyramid prism (A) and a hexagonal pyramid prism (B). It is the figure which showed the state of the irradiated light in the irradiation apparatus of Fig.8 (a) three-dimensionally. It is a figure which shows the arrangement | positioning of the irradiation optical system which positions by irradiating a guide light to the reference position in the irradiation apparatus using the vertex part removal type prism which concerns on the 4th Embodiment of this invention, and the optical path in a meridian cross section. . It is a figure which shows the state which expanded the 3rd lens group and vertex part removal type | mold prism of the imaging optical system of the irradiation apparatus of FIG. It is a figure which shows schematic structure of the irradiation apparatus using the conical mirror which concerns on a prior art example, (a) is a schematic sectional drawing, (b) is a schematic top view.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Light source 2 Imaging optical system (condensing means)
3 Conical prism (first prism)
4 Conical prism (second prism)
13 Square pyramid prism (first prism)
14 Quadrangular pyramid prism (second prism)
23 Hexagonal prism (first prism)
24 Hexagonal prism (second prism)
33. Vertex removal prism (first prism)
34. Vertex removal prism (second prism)

Claims (10)

Condensing means for condensing the light emitted from the light source;
A first light source having a conical shape and arranged so that a light beam emitted from the light collecting unit is incident on a side surface portion and emitted from a bottom surface portion, and deflects the light beam incident from the light collecting device in a plurality of directions. The prism of
The light beam emitted from the first prism is incident on the bottom surface part and is disposed so as to exit from the side surface part, and the light beam incident from the bottom surface part is reflected by the side surface part. An irradiation apparatus comprising: a reflected side surface portion; and a second prism that exits from the opposite side surface portion.   The vertex angle of the second prism is set so that the light beam incident from the bottom surface portion is reflected by the side surface portion and then emitted from the side surface portion facing the reflected side surface portion. The irradiation apparatus according to claim 1. A moving means for moving at least one of the first prism and the second prism in the optical axis direction;
The irradiation apparatus according to claim 1, wherein the irradiation position is changed by changing a relative position of the first prism and the second prism in the optical axis direction by the moving unit.   The irradiation position is changed by making the first prism fixed in the optical axis direction and moving the second prism in the optical axis direction by the moving means. Irradiation device.   3. The irradiation apparatus according to claim 1, wherein the first prism and the second prism have a conical shape, and a light beam applied to the object has an annular shape.   The first prism and the second prism have a polygonal pyramid shape having even bases, and the number of rays emitted from the side surface of the second prism is the same as the number of angles of the polygonal pyramid. The irradiation apparatus according to claim 1 or 2, wherein   The shapes of the apex portions of the first prism and the second prism include a planar shape capable of transmitting light rays and parallel to the bottom surface portion, and a curved surface shape capable of transmitting light rays and including a concave surface or a convex surface. 3. The irradiation apparatus according to claim 1, wherein the irradiation apparatus is selected from a group.   The irradiation apparatus according to claim 1, wherein the light source is a single wavelength laser beam.   An irradiation application apparatus comprising the irradiation apparatus according to claim 1.   The irradiation application device is a processing device that processes an object by the condensed heat when the irradiation light is condensed, a welding device that welds the objects by the condensed heat when the irradiation light is condensed, and a reference point. 10. The irradiation application device according to claim 9, wherein the irradiation application device is selected from a group including a positioning device that performs optical positioning by indicating an irradiation beam and an illumination device that simultaneously illuminates a plurality of locations.

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