JP2007019079A - Exposure equipment - Google Patents

Abstract

An exposure apparatus capable of finely exposing a curved portion of an exposure pattern.
In an exposure apparatus, mirrors having variable angles are arranged side by side in a vertical direction and a DMD that can independently control the angles of the mirrors, and an exposure pattern is controlled by the mirrors by independently controlling the angles of the mirrors. And a pinhole 7 having an area smaller than that of the mirror is formed at a position corresponding to the mirror, and a part of the projection light from each mirror is allowed to pass through the pinhole 7. And a pinhole array 6 for finely exposing the exposure pattern with the passing light.
[Selection] Figure 1

Description

  The present invention relates to an exposure apparatus, and more particularly to an exposure apparatus used in a lithography process of a semiconductor substrate.

  In recent years, as an exposure apparatus used in the photolithography process, an exposure apparatus using an LCD (Liquid Crystal Display) or a DMD (Digital Micro-mirror device) that displays an exposure pattern by ON / OFF control of light has been proposed ( Patent Document 1).

  Here, in an exposure apparatus using an LCD, DMD, or the like, it has been required to perform finer exposure, particularly in the curved portion of the exposure pattern. For example, DMD displays an exposure pattern with rectangular mirror elements laid out in a lattice pattern, so there is a problem that the edge of the curved portion of the exposure pattern becomes uneven, and it is desired to expose this as a smooth curve as much as possible. There was a request.

  In view of this, there has been proposed an exposure apparatus that finely exposes a curved portion of an exposure pattern by reducing and projecting the displayed exposure pattern using lenses having different magnifications.

Further, there has been proposed an exposure apparatus that performs exposure while moving the stage that supports the exposure substrate in small increments in the horizontal direction so that the edge of the curved portion of the exposure pattern does not become uneven.
JP 2004-012899 A

  However, in the method in which the projection lens is a lens with different magnifications, it is necessary to prepare a plurality of types of lenses, and it is necessary to replace the lens each time, so that the manufacturing cost increases and the manufacturing process becomes complicated. There was a problem.

  In addition, the method of moving the stage that supports the exposure substrate has a problem in that it is necessary to move the stage in small steps so that the edge of the curved portion of the exposure pattern does not become uneven, and high control is required. It was.

  An object of the present invention is to provide an exposure apparatus that can more smoothly expose a curved portion by finely exposing an exposure pattern easily.

  In order to solve the above-mentioned problems, an invention according to claim 1 is an exposure apparatus, comprising: DMDs having variable angle mirrors arranged side by side and capable of independently controlling the angles of the mirrors; and each of the mirrors. Control means for independently controlling the angle and displaying an exposure pattern by the mirror, and a pinhole having a smaller area than the mirror are formed at positions corresponding to the mirror, and each pinhole is provided with a pinhole. And a pinhole array that allows a part of the projected light to pass through and finely exposes the exposure pattern with the passed light.

  A second aspect of the present invention is the exposure apparatus according to the first aspect, wherein the pinhole array is movable in a direction parallel to the DMD, and the pinhole array is moved in a desired curved shape. Accordingly, the light passing through the pinhole exposes the substrate in a curved shape.

  According to a third aspect of the present invention, there is provided an exposure apparatus comprising: a DMD in which angle-variable mirrors are arranged side by side and each angle of the mirror can be independently controlled; and each angle of the mirror is independently controlled. Control means for displaying an exposure pattern by the mirror, an LCD in which segments having smaller areas than the mirror are arranged side by side, and a predetermined segment among the segments corresponding to the mirror for displaying the exposure pattern is from the DMD. And an LCD controller that controls to apply a voltage so as to transmit a part of the projected light and finely expose the exposure pattern by the transmitted light.

  According to the first aspect of the present invention, since a part of the projection light from the mirror provided in the DMD passes through the pinhole having a smaller area than the mirror, it is possible to perform fine exposure with the transmitted light. As a result, the unevenness at the edge of the curved portion of the exposure pattern is reduced compared to the case where exposure is performed by irradiating the projection light from the DMD mirror at the same magnification, and exposure can be performed as a smoother curve. Become.

  According to invention of Claim 2, the position of a pinhole can be moved relatively with respect to DMD by moving a pinhole array. Thus, it becomes possible to perform exposure in a desired continuous curved shape within the range of the size of the mirror by the projection light passing through each pinhole.

  According to the invention described in claim 3, by exposing the projection light from the mirror provided in the DMD from a predetermined segment in the LCD, the exposure pattern displayed on the DMD mirror can be projected and exposed more finely. It becomes possible. Thereby, the unevenness | corrugation in the edge part of the curve part of an exposure pattern becomes small, and it becomes possible to expose as a smoother curve.

(First embodiment)
FIG. 1 is a schematic block diagram of an exposure apparatus 1 according to the first embodiment of the present invention.

  The exposure apparatus 1 of the present embodiment includes a semiconductor laser (LD) 2 as a light source. Further, a light emitting diode (LED) or the like can be used as the light source.

  Further, a rod lens 3 for diffusing the incident laser beam and a collimator lens 4 for emitting the incident laser beam as a parallel light beam are provided in the optical path of the laser beam emitted from the semiconductor laser 2.

  Further, the exposure apparatus 1 according to the present embodiment is a DMD (Digital Microscope) that is a spatial light modulation unit that modulates the laser light emitted from the semiconductor laser 2 according to pattern information and displays an optical image as an exposure pattern display unit. -mirror Device) 5.

  The DMD 5 is formed as a single panel by laying fine mirror elements on a semiconductor element in a lattice pattern, and each mirror independently changes the tilt angle, whereby laser light from the semiconductor laser 2 is obtained. Can be turned on / off. The shape of the mirror provided in the DMD 5 of the present embodiment is approximately square, and the size is 13 μm × 13 μm.

  A pinhole array 6 is provided in the optical path of the laser light projected from the DMD 5. The pinhole array 6 is composed of a plate-like member such as an aluminum plate, and a plurality of pinholes 7 are formed at positions substantially corresponding to the respective mirrors of the DMD 5 as shown in FIG. The shape of the pinhole 7 is substantially square, and the length of one side is about 1/10 of the mirror provided in the DMD 5. That is, the size of the pinhole 7 of this embodiment is 1.3 μm × 1.3 μm.

With such a configuration, a part of the laser light reflected by the mirror passes through one pinhole 7 as a laser light whose one side of the cross-sectional shape is about 1/10 of the length of the mirror. Yes. Thereby, compared with the case where the laser beam projected from DMD5 is irradiated at equal magnification, it is possible to perform exposure with a finer exposure pattern.

  A projection lens 8 is provided in the optical path of the laser light that has passed through the pinhole array 6, and an optical image by the laser light that has passed through the pinhole array 6 is placed on a stage 9 (see FIG. 3) provided in the exposure apparatus 1. An image is formed on the supported substrate 10.

  Next, FIG. 3 shows a functional configuration of the exposure apparatus 1 of the present embodiment.

  As shown in FIG. 3, the exposure apparatus 1 of this embodiment includes a control device 11.

  The control device 11 includes a control unit 12. The control unit 12 drives each component of the exposure apparatus 1 by developing a processing program recorded in the ROM on the RAM and executing the processing program by the CPU. It comes to control.

In addition, the control device 11 includes an input unit 13 including a keyboard or a mouse, and the user can input an instruction regarding an exposure pattern. It is also possible to load a recording medium such as a disk in a recording medium loading section (not shown) provided in the control device 11 and read information on the exposure pattern from the recording medium.

  In addition, the control device 11 includes a storage unit 14 made of a semiconductor memory or the like, and the storage unit 14 has a recording area for recording information relating to an exposure pattern input from the input unit 13. The storage unit 14 may be, for example, a built-in memory such as a flash memory, a removable memory card or a memory stick, or a magnetic recording medium such as a hard disk or a floppy (registered trademark) disk. Good.

  As shown in FIG. 3, a controller 15 that controls the semiconductor laser 2 and the DMD 5 and a pinhole array driving unit 16 are electrically connected to the control device 11.

  The controller 15 turns on the semiconductor laser 2 to irradiate the DMD 5 with laser light, and controls the tilt angle of the mirror of the DMD 5 based on an instruction signal from the control unit 12. Thereby, the projection of the light of the mirror corresponding to a predetermined exposure pattern is turned ON, and various exposure patterns can be displayed.

  The pinhole array driving unit 16 moves the pinhole array 6 in a direction parallel to the substrate 10, thereby moving the laser light that has passed through the pinhole array 6 within the range of the size of the mirror provided in the DMD 5. Thus, exposure can be performed so as to obtain a desired curve.

  Next, the operation of the exposure apparatus 1 according to this embodiment will be described.

The storage unit 14 of the control device 11 stores the exposure pattern previously input by the user using the input unit 13 or the exposure pattern read from the recording medium using the input unit 13.

  Further, the user supports the substrate 10 on the stage 9 of the exposure apparatus 1.

  When the exposure is started, the control unit 12 reads a predetermined exposure pattern corresponding to the purpose from the storage unit 14 based on an instruction signal from the input unit 13 or the like. Then, the read exposure pattern is transmitted to the controller 15.

  Subsequently, the controller 15 emits laser light from the semiconductor laser 2. Laser light emitted from the semiconductor laser 2 is diffused by the rod lens 3, converted into a parallel light beam by the collimator lens 4, and then applied to a mirror provided in the DMD 5.

  When the mirror of DMD 5 is irradiated with laser light, controller 15 changes the tilt angle of the mirror of DMD 5 according to a predetermined exposure pattern. That is, the mirror tilt angle is controlled so that the projection of the light of the mirror corresponding to the exposed portion of the substrate 10 among the mirrors spread in a lattice shape is turned on. When the exposure pattern is displayed on the DMD 5 in this way, the laser light reflected by each mirror of the DMD 5 enters the pinhole array 6.

  Part of the laser light incident on the pinhole array 6 passes through one pinhole 7 as laser light having a side dimension of about 1/10 of the cross-sectional shape. Thereby, it becomes possible to perform exposure with a finer exposure pattern as compared with the case where the laser beam projected from the DMD 5 is irradiated at the same magnification.

  At this time, the pinhole array driving unit 16 moves the pinhole array 6 in a direction parallel to the substrate 10 so that the laser beam that has passed through the pinhole array 6 is within the range of the size of the mirror provided in the DMD 5. Each is moved and exposed so that it may become a desired curve.

  The laser light that has passed through the pinhole array 6 enters the projection lens 8, and the projection lens 8 forms an image of the incident laser light on the substrate 10 supported by the stage 9.

  As described above, according to the exposure apparatus 1 according to the present embodiment, a part of the laser light reflected by the mirror included in the DMD 5 passes through a pinhole having a smaller area than the mirror, so that the finer light is transmitted by the passing light. It becomes possible to perform exposure. Thereby, compared with the case where exposure is performed by irradiating projection light from the mirror of DMD 5 at the same magnification, the unevenness at the edge of the curved portion of the exposure pattern is reduced, and exposure can be performed as a smoother curve. Become.

  Further, by moving the pinhole array 6, the position of the pinhole can be moved relative to the DMD 5. Thus, it becomes possible to perform exposure in a desired continuous curved shape within the range of the size of the mirror by the projection light passing through each pinhole.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIGS. In addition, the same code | symbol is attached | subjected to the same part as 1st Embodiment, the description is abbreviate | omitted, and a different structure part from 1st Embodiment is demonstrated.

  FIG. 4 is a schematic block diagram of an exposure apparatus 1 according to the second embodiment of the present invention.

  The exposure apparatus 1 of this embodiment includes a plurality of semiconductor lasers 2 as light sources. A diffractive optical element 17 for controlling the direction of the laser light is provided in the optical path of the laser light emitted from the semiconductor laser 2 so that the laser light is incident on the rod lens 3. ing.

  Moreover, the point provided with the collimator lens 4, DMD5 as an exposure pattern display means, and the projection lens 8 is the same as that of 1st Embodiment.

  Further, in the present embodiment, a transmissive liquid crystal display 18 is provided at a position close to the projection lens 8 in the optical path of the laser light projected from the DMD 5.

  As shown in FIG. 5, the liquid crystal display 18 includes segments 19 filled with liquid crystal arranged vertically and horizontally, and controls the voltage applied to each segment 19 to project from the DMD 5. The transmission of the output light of the laser light to be controlled can be controlled.

  The size of the segment 19 is 4 μm × 4 μm, and nine segments 19 correspond to the size of one mirror included in the DMD 5. That is, as shown in FIG. 5, by controlling the applied voltage so that laser light is transmitted from a predetermined segment 19 according to the exposure pattern among the nine segments 19, the exposure pattern displayed by the mirror of the DMD 5 can be further improved. It is possible to expose with fine projection.

  Further, by controlling the transmission of the laser light through the nine segments 19, the liquid crystal display 18 or the stage 9 (see FIG. 6) is moved in a direction parallel to the substrate 10, and one mirror of the DMD 5 is provided. It is possible to draw a desired curve within the range of the size.

  Next, FIG. 6 shows a functional configuration of the exposure apparatus 1 of the present embodiment.

  As shown in FIG. 6, the controller 11 provided in the exposure apparatus 1 of the present embodiment is the same as that of the first embodiment in that a controller 15 that controls the DMD 5 is electrically connected.

  Furthermore, a liquid crystal display control unit 20 that controls the liquid crystal display 18 is electrically connected to the control device 11 of the present embodiment.

  The liquid crystal display control unit 20 controls the transmission of the laser light projected from the DMD 5 by applying a voltage to the segment 19 included in the liquid crystal display 18. Thereby, it is possible to control the applied voltage so that the laser beam is transmitted from the predetermined segment 19 according to the exposure pattern.

  Next, the operation of the exposure apparatus 1 will be described.

  When laser light is emitted from the semiconductor laser 2 by the start of exposure, the diffractive optical element 17 causes the laser light to enter the rod lens 3. Subsequently, the light emitted from the rod lens 3 is transmitted through the collimator lens 4 to become a parallel light beam, and is irradiated to the DMD 5.

  Subsequently, the controller 15 controls the tilt angle of the mirror so that projection of the light of the mirror corresponding to the exposed portion of the substrate 10 is turned on, and displays the exposure pattern in the DMD 5.

  On the other hand, the liquid crystal display controller 20 controls the voltage applied to the liquid crystal display 18 so that the laser light is transmitted from the predetermined segment 19 according to the exposure pattern.

  Next, when the exposure pattern is displayed on the DMD 5, the laser light reflected by each mirror of the DMD 5 enters the liquid crystal display 18.

  When the laser light is incident on the liquid crystal display 18, the laser light is transmitted from the predetermined segment 19 according to the exposure pattern. As a result, the exposure pattern displayed by the mirror of DMD 5 can be projected more finely and exposed.

The laser light transmitted through the liquid crystal display 18 enters the projection lens 8, and the projection lens 8 forms an image of the incident laser light on the substrate 10 supported by the stage 9.

  As described above, according to the exposure apparatus 1 of the present embodiment, the exposure pattern displayed on the mirror of the DMD 5 is transmitted by transmitting the projection light from the mirror included in the DMD 5 from the predetermined segment 19 in the liquid crystal display 18. It becomes possible to project with finer exposure. Thereby, the unevenness | corrugation in the edge part of the curve part of an exposure pattern becomes small, and it becomes possible to expose as a smoother curve.

  As described above in detail, according to the exposure apparatus of the present invention, it is possible to provide an exposure apparatus that can expose a curved portion more smoothly by simply finely exposing an exposure pattern.

1 is a schematic block diagram of an exposure apparatus according to a first embodiment of the present invention. 1 is a plan view of a pinhole array according to a first embodiment of the present invention. 1 is a block diagram showing a functional configuration of an exposure apparatus according to a first embodiment of the present invention. It is a schematic block diagram of the exposure apparatus which concerns on the 2nd Embodiment of this invention. It is a top view of the liquid crystal display which concerns on the 2nd Embodiment of this invention. It is a block diagram which shows the functional structure of the exposure apparatus which concerns on the 2nd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Exposure apparatus 2 Semiconductor laser 3 Rod lens 4 Collimator lens 5 DMD
6 pinhole array 7 pinhole 8 projection lens 9 stage 10 substrate 11 controller 12 controller 13 input unit 14 storage unit 15 controller 16 pinhole array drive unit 17 diffractive optical element 18 liquid crystal display 19 segment 20 liquid crystal display controller

Claims (3)

  DMD having variable angle mirrors arranged side by side and capable of independently controlling the angles of the mirrors, control means for controlling the angles of the mirrors independently and displaying an exposure pattern by the mirrors, and the mirrors A pinhole having a smaller area is formed at a position corresponding to the mirror, and a part of the projection light from each mirror is passed through the pinhole, and the exposure pattern is refined by the passing light. An exposure apparatus comprising: a pinhole array to be exposed.   The pinhole array is movable in a direction parallel to the DMD. By moving the pinhole array in a desired curved shape, the light passing through the pinhole exposes the substrate in a curved shape. The exposure apparatus according to claim 1.   DMD having variable angle mirrors arranged side by side and capable of independently controlling the angles of the mirrors, control means for controlling the angles of the mirrors independently and displaying an exposure pattern by the mirrors, and the mirrors A voltage is applied such that a predetermined segment of the segment corresponding to the LCD that includes smaller-sized segments arranged side by side in parallel with the mirror that displays the exposure pattern transmits a part of the projection light from the DMD. And an LCD controller that controls the exposure pattern to be finely exposed by the transmitted light.

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