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JP2007013719A - Crystal oscillator - Google Patents

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JP2007013719A
JP2007013719A JP2005193008A JP2005193008A JP2007013719A JP 2007013719 A JP2007013719 A JP 2007013719A JP 2005193008 A JP2005193008 A JP 2005193008A JP 2005193008 A JP2005193008 A JP 2005193008A JP 2007013719 A JP2007013719 A JP 2007013719A
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base plate
crystal
extraction electrode
region
plate
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Japanese (ja)
Inventor
Koji Sato
光司 佐藤
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Kyocera Crystal Device Corp
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Kyocera Crystal Device Corp
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Abstract

【課題】
本発明の目的は、接合材の水晶素板との接合性を強固にしながらも、水晶素板の励振領域に加わる応力を軽減した水晶素板の支持構造を提供するものである。
【解決手段】
上記の目的を達成するため本発明は、丸板形状の水晶素板に金属電極を配置し励振領域を形成し、該金属電極から伸びる引出電極を支持、固定する水晶振動子において、前記水晶素板の外周内側に円周状の貫通溝を形成し、前記貫通溝の一部に切り欠き部を設けて引出電極領域とし、前記引出電極が前記励振領域から延びる引出電極領域まで延在し前記引出電極領域で導通と保持されることにより目的を達成する。
【選択図】 図1
【Task】
An object of the present invention is to provide a support structure for a crystal base plate that reduces the stress applied to the excitation region of the crystal base plate while strengthening the bondability of the bonding material to the crystal base plate.
[Solution]
In order to achieve the above object, the present invention provides a quartz resonator in which a metal electrode is disposed on a round quartz crystal plate, an excitation region is formed, and an extraction electrode extending from the metal electrode is supported and fixed. A circumferential through groove is formed inside the outer periphery of the plate, a notch is provided in a part of the through groove as an extraction electrode region, and the extraction electrode extends to the extraction electrode region extending from the excitation region. The object is achieved by being kept conductive in the extraction electrode region.
[Selection] Figure 1

Description

本発明は、一例として水晶素板をハーメチィック構造のベースから延びる2本の金属端子とつながるサポート板と接合材で保持した場合に、水晶素板の励振領域に加わる応力歪みを軽減した水晶素板の支持構造に関するものである。   As an example, the present invention provides a crystal base plate that reduces stress strain applied to the excitation region of the crystal base plate when the crystal base plate is held by a support plate and a bonding material connected to two metal terminals extending from the base of the hermetic structure. It is related with the support structure.

近年の急速な移動体通信市場の成長に伴い、通信機器の需要が飛躍的に増大してきている現在、通信機器においてその基準となる周波数の発生クロック源として用いられる水晶振動子は、周囲の使用環境がより過酷な条件下においても、所望の基準となる周波数信号を安定して出力することを確保することも求められている。   With the rapid growth of the mobile communication market in recent years, the demand for communication equipment has increased dramatically. At present, crystal oscillators that are used as a clock source for generating a reference frequency in communication equipment are used in the surroundings. There is also a demand for ensuring that a frequency signal serving as a desired reference is stably output even under a severer environment.

水晶素板を保持する構造の代表例として、図3に示す丸板形状を有した水晶振動子を示す。前述する水晶振動子の保持構造は水晶素板の表裏に励振電極を形成し、前記励振電極から引き回された引出電極と金属ベースから延びる2本の金属端子とつながるサポート板と接合材で接続し保持するものである。保持部はいわゆるクリップ式の構造となっていて、水晶素板の表裏を挟む格好で保持するものや、1対の平板状のサポート板で直接水晶素板を挟み込んで保持するものや、金属端子とサポート板に水晶素板を保持する箇所にスリットを形成して水晶素板を保持する格好など様々な形態がある。   As a typical example of a structure for holding a crystal base plate, a crystal resonator having a round plate shape shown in FIG. 3 is shown. The above-described quartz crystal holding structure is formed by forming excitation electrodes on the front and back sides of the quartz base plate, and connecting with a support plate connected to the extraction electrode routed from the excitation electrode and the two metal terminals extending from the metal base with a bonding material And hold it. The holding part has a so-called clip-type structure, and holds the crystal element plate in a fashionable manner, holds the crystal element plate directly between a pair of flat support plates, or a metal terminal In addition, there are various forms such as a shape in which a slit is formed at a place where the crystal base plate is held on the support plate to hold the crystal base plate.

また、励振電極から引き回された引出電極を接続する手法としては、はんだなどの比較的融点の低い金属を用いる場合と、導電性接着剤が用いられる場合とがある。   In addition, as a method of connecting the extraction electrode routed from the excitation electrode, there are a case where a metal having a relatively low melting point such as solder is used and a case where a conductive adhesive is used.

上述する丸板形状の水晶素板は、昨今では短冊形状が主流の水晶素板形態にあって、希少な存在に位置している。その背景には丸板形状の水晶素板は高安定の周波数出力を得るために特別に製造される水晶素板であるからである。昨今の水晶素板である短冊形状は大凡長辺寸法が2〜6mm、短辺が2mm以下の長方形の外形にあるのに対して、丸板形状は直径で10mm前後と短冊形状に比べて非常に大きな外形寸法を有している。また、水晶素板の板厚に関しても、高次オーバトーン発振を利用する場合が多く短冊形状の水晶素板に対して丸板形状の水晶素板は遙かに厚みを持っている。   The above-described round plate-shaped quartz base plate is in a rare presence in the shape of a mainstream quartz base plate having a strip shape in recent years. This is because the round plate-shaped quartz base plate is a quartz base plate specially manufactured to obtain a highly stable frequency output. The rectangular shape of the recent quartz base plate has a rectangular outer shape with a long side dimension of 2 to 6 mm and a short side of 2 mm or less, whereas the round plate shape has a diameter of around 10 mm compared to the rectangular shape. Have large external dimensions. As for the thickness of the quartz base plate, high-order overtone oscillation is often used, and the round-plate-shaped quartz base plate is much thicker than the strip-shaped quartz base plate.

さて、図3に示す水晶振動子の使用目的の代表例として、恒温槽型水晶発振器(OCXO:Oven Controlled Crystal Oscillator)と呼ばれる水晶発振器の内部に恒温槽を搭載して使用することで周波数出力特性を安定に保ことができる発振器の形態がある。   As a typical example of the purpose of use of the crystal resonator shown in FIG. 3, the frequency output characteristics are obtained by using a thermostat inside a crystal oscillator called an oven controlled crystal oscillator (OCXO). There is a form of an oscillator that can maintain a stable state.

上述するOCXOと呼ばれる恒温槽型水晶発振器の内部に搭載され使用される高安定な特性をもつ水晶振動子は、大まかに言って70℃〜90℃間のある1点(温度偏差±0.3℃)に保持された温度環境下で使用され、経年変化による出力周波数の変動が抑えられ、安定した周波数特性(エージング特性)を得るために、水晶振動子の水晶素板とサポート板との接合材として内部ガスの発生が少なく、かつ熱膨張変化に安定し、経時変化による影響を水晶素板に与えることが少ないAuGe(金―ゲルマニウム合金)または、耐熱性の高いポリイミド系導電ペーストなどが使用される場合が多い。   A crystal resonator having a high stability characteristic that is mounted and used in a thermostat crystal oscillator called OCXO is roughly one point between 70 ° C. and 90 ° C. (temperature deviation ± 0.3). In order to obtain stable frequency characteristics (aging characteristics), it is used in a temperature environment maintained at a temperature of (° C) and the output frequency fluctuation due to secular change is suppressed. The material used is AuGe (gold-germanium alloy) or a highly heat-resistant polyimide conductive paste that generates less internal gas, is stable against changes in thermal expansion, and has little effect on the quartz base plate. Often done.

特開平7−240656号公報Japanese Patent Laid-Open No. 7-240656 特開平11−214949号公報Japanese Patent Laid-Open No. 11-214949 特開昭60−19312号公報 なお、出願人は前記した先行技術文献情報で特定される先行技術文献以外には、本発明に関連する先行技術文献を、本件出願時までに発見するに至らなかった。In addition, the applicant has not found any prior art documents related to the present invention by the time of the filing of the application other than the prior art documents specified by the prior art document information described above. It was.

本発明の目的は、AuGe、ポリイミド系といった接合材を用い水晶素板との接合性を良好にし、サポート板から水晶素板の励振領域に加わる応力の発生を軽減する、サポート板と水晶素板との支持構造を提供することにある。
要するに、従来技術に示すエージング特性を左右する要因のひとつに、サポート板とも呼ばれる支持部からの水晶素板への応力がある。例えば、水晶素板の接合時の収縮および各材料の熱膨張率の差に伴う応力あるいは、封止工程におけるウェルドの際にウェルド圧力が水晶振動子の金属ベースを変形し、その変形に伴う応力が金属端子とサポート板を経て水晶素板へと伝わることによって、水晶素板と保持部とに左右非対称なひねりやねじりの力が支持(保持)部から水晶素板に応力が加わるなどで、水晶振動子の特性に大きな影響を及ぼし、場合によっては水晶素板が本来持つ高安定な周波数出力特性が阻害され、水晶振動子のエージング特性を著しく悪くするおそれがある。
An object of the present invention is to use a bonding material such as AuGe or polyimide to improve the bondability with a crystal element plate and reduce the generation of stress applied from the support plate to the excitation region of the crystal element plate. It is to provide a support structure.
In short, one of the factors that influence the aging characteristics shown in the prior art is the stress on the quartz base plate from the support part, also called the support plate. For example, the stress due to the difference in thermal expansion coefficient of each material and the shrinkage at the time of joining the quartz base plates, or the weld pressure deforms the metal base of the crystal unit during the welding in the sealing process, and the stress accompanying the deformation Is transmitted to the crystal base plate through the metal terminal and the support plate, so that asymmetrical twist and torsional force is applied to the crystal base plate and the holding portion from the support (holding) portion to the crystal base plate, There is a great influence on the characteristics of the crystal unit. In some cases, the high-stable frequency output characteristic inherent to the crystal base plate is hindered, and the aging characteristic of the crystal unit may be significantly deteriorated.

上記の理由のひとつには、AuGeロー材を用いて水晶素板を保持したときに、ロー材を一旦溶かし水晶素板をサポートに保持した後に冷却することで固定することになるが、ロー材が固まるときの温度分布のバラツキ、則ち熱膨張係数の違いにより水晶素板に対して内部応力が残ってしまう。
またその一方で、水晶素板にカンを被せて気密封止を行う際に、封止時の金属ベースへの応力もサポート板を介して水晶素板に伝わるため同様に水晶素板に対して内部応力が残ってしまう。
One of the reasons mentioned above is that when holding the quartz base plate using AuGe brazing material, the brazing material is temporarily melted and fixed by cooling after holding the quartz base plate on the support. The internal stress remains on the quartz base plate due to the variation in temperature distribution when the material hardens, that is, the difference in thermal expansion coefficient.
On the other hand, when sealing the quartz base plate with a can, the stress on the metal base at the time of sealing is also transmitted to the crystal base plate via the support plate. Internal stress remains.

そのため、支持部と水晶素板とを電気的かつ機械的に接合する保持部の構造によって、支持部から水晶素板に加わる応力、歪み成分を低減することが考えられるが、今日まで応力を緩和するための保持部の支持方法や接合材が提案されていたが有効な手段が見いだせないのが現状である。   Therefore, it is possible to reduce the stress and strain components applied from the support part to the crystal base plate by the structure of the holding part that electrically and mechanically joins the support part and the crystal base plate. However, the present situation is that no effective means can be found, although a supporting method and a bonding material for the holding portion for the purpose have been proposed.

そこで上述する課題を解決するために本発明は、丸板形状の水晶素板に金属電極を配置し励振領域を形成し、該金属電極から伸びる引出電極を支持、固定する水晶振動子において、前記水晶素板の外周内側に円周状の貫通溝(スリットまたは連続する貫通孔)を形成し、前記貫通溝の一部に切り欠き部を設けて引出電極領域とし、前記引出電極が前記励振領域から延びる引出電極領域まで延在し前記引出電極領域で導通と保持される水晶振動子である。また、上述する一部の切り残し位置は、水晶素板の180度あるいは、90度の位置関係に存在することを特徴とする水晶振動子である。   Therefore, in order to solve the above-described problem, the present invention provides a crystal resonator in which a metal electrode is arranged on a round plate-shaped quartz base plate to form an excitation region, and an extraction electrode extending from the metal electrode is supported and fixed. A circular through groove (slit or continuous through hole) is formed inside the outer periphery of the quartz base plate, and a notch is provided in a part of the through groove as an extraction electrode region, and the extraction electrode is the excitation region A crystal resonator extending to an extraction electrode region extending from the electrode and held conductive in the extraction electrode region. Further, the part of the uncut portion described above is a crystal resonator characterized by being present in a positional relationship of 180 degrees or 90 degrees of the quartz base plate.

要するに、水晶素板が金属ベースから延びる2本の金属端子に固定されたサポート板により支持される水晶振動子の支持構造で、支持部構造の先端に水晶素板の表裏の励振電極から引き回された引出電極領域である水晶素板の一部を接合材(例えばAuGe、はんだや導電性接着剤)を用いて接合し電気的な接続を取ることにより、水晶素板の外周内側に沿った貫通溝とで構成する引出電極領域で強固に固着して保持し、水晶素板の励振領域に対する保持部の応力の影響を受けない保持構造を実現することで課題を解決するものである。   In short, a quartz crystal substrate is supported by a support plate fixed to two metal terminals extending from a metal base, and the quartz base plate is routed from the excitation electrodes on the front and back of the quartz substrate to the tip of the support structure. A portion of the quartz base plate, which is the extracted electrode region, is joined using a bonding material (eg, AuGe, solder, or conductive adhesive) to establish an electrical connection. The problem is solved by realizing a holding structure that is firmly fixed and held in the extraction electrode region constituted by the through groove and is not affected by the stress of the holding portion with respect to the excitation region of the quartz base plate.

本発明による強固に保持することが可能な上に、水晶素板の励振領域に対しては、引出電極領域より保持時の応力を緩和することで、従来構造では成し得なかった応力緩和が実現でき、支持部から受ける水晶素板への応力を軽減し、水晶素板自体の安定した周波数特性を維持しながら、ハーメチィックベースに実装した水晶振動子の形態であっても良好で安定した周波数出力を得ることができる。その結果、製造工程の歩留まりを向上し、製造にかかるコストを低減することができる。また、水晶素板に対する内部応力を緩和することに経年変化よる応力変化現象も低減することにより、長期に亘り安定した出力周波数を得ることができる。   In addition to being able to be held firmly according to the present invention, the stress relaxation at the time of holding can be relaxed in the excitation region of the quartz base plate from the extraction electrode region, which cannot be achieved by the conventional structure. It can be realized, reducing the stress to the crystal base plate that is received from the support part, maintaining the stable frequency characteristics of the crystal base plate itself, and good and stable even in the form of a crystal resonator mounted on a hermetic base Frequency output can be obtained. As a result, the yield of the manufacturing process can be improved and the manufacturing cost can be reduced. Moreover, by reducing the stress change phenomenon due to secular change by relaxing the internal stress on the quartz base plate, a stable output frequency can be obtained over a long period of time.

以下、添付の図面に従がってこの発明の実施例を説明する。なお各図においての同一の符号は同じ対象を示すものとする。図1は本発明の水晶振動子5の支持構造の概念を示した部分断面図である。水晶素板1の表裏に励振電極7を形成し、前記励振電極7から引き回された引出電極8を金属ベース2から延びる2本の金属端子3とつながるサポート板4とを接合材によりに固着することで水晶素板1を保持し、電気的な導通を取る構造を有している。なお、図には密閉容器を構成するための蓋体やキャップは図示していない。   Embodiments of the present invention will be described below with reference to the accompanying drawings. In addition, the same code | symbol in each figure shall show the same object. FIG. 1 is a partial cross-sectional view showing the concept of the support structure of the crystal resonator 5 of the present invention. Excitation electrodes 7 are formed on the front and back of the quartz base plate 1, and an extraction electrode 8 routed from the excitation electrode 7 is fixed to a support plate 4 connected to two metal terminals 3 extending from the metal base 2 with a bonding material. By doing so, the quartz base plate 1 is held and the electrical conduction is obtained. In the figure, a lid and a cap for configuring the sealed container are not shown.

従って一例として金属ベース2はガラスとで構成するハーメチィック容器により気密構造でありながら金属ベース2を貫通する材料でできた金属端子3の先端部分に水晶素板1が固定されている。一般的には金属端子3の先端部分には水晶素板1が確実に実装できるようにサポート板4などを配置する場合がある。   Accordingly, as an example, the quartz base plate 1 is fixed to the tip portion of the metal terminal 3 made of a material that penetrates the metal base 2 while the metal base 2 is hermetically sealed by a hermetic container made of glass. In general, a support plate 4 or the like may be arranged at the tip portion of the metal terminal 3 so that the crystal base plate 1 can be reliably mounted.

要するに、丸板形状の水晶素板1に金属電極を配置し励振領域を形成し、該金属電極から伸びる引出電極を支持、固定する水晶振動子において、前記丸板形状の該引出電極は、前記水晶素板の外周内側に円周状の貫通溝6を形成し、前記貫通溝6の一部に切り欠き部9を設け、前記水晶素板の外周部と前記貫通溝6とで挟まれる前記励振領域から延びる引出電極領域を導通と保持する格好となる。   In short, in the crystal resonator in which the metal electrode is arranged on the circular plate-shaped quartz base plate 1 to form the excitation region, and the extraction electrode extending from the metal electrode is supported and fixed, the circular plate-shaped extraction electrode A circular through groove 6 is formed inside the outer periphery of the crystal base plate, a notch 9 is provided in a part of the through groove 6, and the crystal base plate is sandwiched between the outer peripheral portion of the crystal base plate and the through groove 6. Thus, the lead electrode region extending from the excitation region is kept conductive.

図1は、本発明の一例として上述する一部の切り欠き部(位置)9は、水晶素板の180度で対向する場所に引出電極領域を形成したものであり、図2は同様の考えで、水晶素板1を4点で支持する構造の水晶振動子の場合で90度で分割する位置関係に引出電極領域を形成したものである。なお、上述する貫通溝6の寸法は励振電極領域と引出電極領域とが分割できれば十分であり、その寸法を問うものでは無い。また、前述する貫通溝6の形成はエッチング処理や、サンドブラストなどの機械的な工法により実現するものである。   FIG. 1 shows an example in which a part of the notch (position) 9 described above as an example of the present invention is such that an extraction electrode region is formed at a position facing the crystal base plate at 180 degrees, and FIG. Thus, in the case of a crystal resonator having a structure in which the crystal base plate 1 is supported at four points, an extraction electrode region is formed in a positional relationship divided by 90 degrees. In addition, the dimension of the through-groove 6 described above is sufficient if the excitation electrode region and the extraction electrode region can be divided, and the size is not questioned. Further, the formation of the through groove 6 described above is realized by an etching process or a mechanical method such as sand blasting.

図2は本発明の他の実施形態である90度の分割位置関係で引出電極領域8を形成した概念図である。図1は水晶素板を垂直に支持した概念に対して、図2については、水平支持をした概念で描画している。従って図2(a)は水晶素板の平面図で、図2(b)は側面図である。水晶素板の保持位置は90度の分割位置関係に対して、180度の位置関係で接合材により保持したものである。   FIG. 2 is a conceptual diagram in which extraction electrode regions 8 are formed with a 90-degree division positional relationship according to another embodiment of the present invention. FIG. 1 is drawn with the concept of supporting the quartz base plate vertically, while FIG. 2 is drawn with the concept of supporting horizontally. Accordingly, FIG. 2A is a plan view of the quartz base plate, and FIG. 2B is a side view. The holding position of the quartz base plate is held by the bonding material with a positional relationship of 180 degrees with respect to the divided positional relationship of 90 degrees.

なお、本発明の実施例では、2点支持(180度)、4点支持(90度)の場合だけを例に挙げているが、引出電極領域8が多少でも存在すれば本発明の効果を奏することから、実質の支持点数はここに示す以外であっても構わない。但し、その場合には均等分割で引出電極領域8を形成することが望ましい。また、貫通溝6や切り欠き部9の形成方法はサンドブラスト工法の機械的手法や、エッチング処理と言った化学的工法などによって行うものである。   In the embodiment of the present invention, only the case of two-point support (180 degrees) and four-point support (90 degrees) is described as an example. However, if there are some extraction electrode regions 8, the effect of the present invention can be obtained. Since it plays, the actual number of supporting points may be other than shown here. However, in that case, it is desirable to form the extraction electrode region 8 by equal division. The through grooves 6 and the notches 9 are formed by a sandblasting mechanical method or a chemical method such as an etching process.

本発明の水晶振動子の支持構造の概念を示す部分断面図である。It is a fragmentary sectional view which shows the concept of the support structure of the crystal oscillator of this invention. 本発明の水晶振動子の支持構造の他の実施例の概念を示す部分断面図である。It is a fragmentary sectional view which shows the concept of the other Example of the support structure of the crystal oscillator of this invention. 従来例としてサポート板を用いて水晶素板を保持する形態を持った水晶振動子の部分断面図である。It is a fragmentary sectional view of a crystal oscillator with a form which holds a crystal blank using a support plate as a conventional example.

符号の説明Explanation of symbols

1・・・・水晶素板
2・・・・金属ベース
3・・・・金属端子
4・・・・サポート板
5・・・・水晶振動子
6・・・・貫通溝
7・・・・励振電極(領域)
8・・・・引出電極(領域)
9・・・・切り欠き部
DESCRIPTION OF SYMBOLS 1 ... Crystal base plate 2 ... Metal base 3 ... Metal terminal 4 ... Support plate 5 ... Crystal oscillator 6 ... Through groove 7 ... Excitation Electrode (region)
8. Extraction electrode (region)
9 ... Notch

Claims (1)

丸板形状の水晶素板に金属電極を配置し励振領域を形成し、該金属電極から伸びる引出電極を支持、固定する水晶振動子において、
前記水晶素板の外周内側に円周状の貫通溝を形成し、前記貫通溝の一部に切り欠き部を設けて引出電極領域とし、前記引出電極が前記励振領域から延びる引出電極領域まで延在し前記引出電極領域で導通と保持されていることを特徴とする水晶振動子。
In a quartz crystal unit that arranges a metal electrode on a round plate-shaped quartz base plate to form an excitation region, and supports and fixes an extraction electrode extending from the metal electrode,
A circumferential through groove is formed on the inner periphery of the quartz base plate, and a notch is provided in a part of the through groove as an extraction electrode region, and the extraction electrode extends to the extraction electrode region extending from the excitation region. A crystal resonator, wherein the crystal resonator is conductive and held in the extraction electrode region.
JP2005193008A 2005-06-30 2005-06-30 Crystal oscillator Pending JP2007013719A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8174172B2 (en) * 2005-12-21 2012-05-08 Daishinku Corporation Piezoelectric resonator plate, and piezoelectric resonator device
CN114785308A (en) * 2022-04-10 2022-07-22 合肥同晶电子有限公司 Quartz crystal packaging structure

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8174172B2 (en) * 2005-12-21 2012-05-08 Daishinku Corporation Piezoelectric resonator plate, and piezoelectric resonator device
CN114785308A (en) * 2022-04-10 2022-07-22 合肥同晶电子有限公司 Quartz crystal packaging structure
CN114785308B (en) * 2022-04-10 2022-12-20 合肥同晶电子有限公司 Quartz crystal packaging structure

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