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JP2007010476A - Steel plate temperature measuring method and apparatus - Google Patents

Steel plate temperature measuring method and apparatus Download PDF

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JP2007010476A
JP2007010476A JP2005191494A JP2005191494A JP2007010476A JP 2007010476 A JP2007010476 A JP 2007010476A JP 2005191494 A JP2005191494 A JP 2005191494A JP 2005191494 A JP2005191494 A JP 2005191494A JP 2007010476 A JP2007010476 A JP 2007010476A
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emissivity
steel plate
temperature
radiance
polarized light
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Akira Torao
彰 虎尾
Hiroki Sugi
裕樹 杉
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JFE Steel Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0022Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation of moving bodies
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/59Radiation pyrometry, e.g. infrared or optical thermometry using polarisation; Details thereof
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80Calibration
    • G01J5/802Calibration by correcting for emissivity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0022Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation of moving bodies
    • G01J2005/0029Sheet

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  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for measuring the temperature of sheet steel suitable for performing online and continuous measurements on the surface temperature of sheet steel heat-treated in an annealing furnace. <P>SOLUTION: A heat-resisting material having a high emissivity in the infrared wavelength region is embedded in part of a furnace wall of the heating furnace. Radiances of a plurality of wavelengths in directions of regular reflection of radiant light from the heat-resisting material at the surface of the sheet steel are measured in each of a plurality of polarization angle components. The emissivity of the sheet steel is computed on the basis of signals of measured radiance each in the plurality of polarization angle components in the plurality of wavelengths and the surface temperature of the heat-resisting material. The surface temperature of the sheet steel is computed on the basis of this emissivity. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、連続して製造される鋼板の表面温度測定方法および装置に関し、特に焼鈍炉内で熱処理される鋼板の表面温度をオンラインで連続的に測定するのに好適な、鋼板温度計測方法と装置に関するものである。   The present invention relates to a method and an apparatus for measuring the surface temperature of a continuously manufactured steel sheet, and in particular, a steel sheet temperature measuring method suitable for continuously measuring the surface temperature of a steel sheet heat-treated in an annealing furnace online. It relates to the device.

ステンレス鋼板の結晶粒を成長させ、機械的強度等の必要とする目標の材質特性を得るために、焼鈍処理が施され、その際に鋼板表面上に形成される、主として酸化物からなるスケールを取り除くための酸洗処理が、先の焼鈍処理に引続き行われる。これらの一連の処理が連続して行われるプロセスは、一般にCAP(Cold Anealing and Pickling)ラインと呼ばれており、ステンレス製造の重要なプロセスと位置付けられている。   In order to grow the crystal grains of the stainless steel plate and obtain the desired material properties such as mechanical strength, annealing treatment is performed, and the scale mainly composed of oxide formed on the steel plate surface at that time The pickling process for removing is performed following the previous annealing process. A process in which a series of these processes is performed continuously is generally called a CAP (Cold Anealing and Pickling) line, and is positioned as an important process for producing stainless steel.

焼鈍処理では、鋼板温度の昇温パターンを適切に管理して、目標とする材質特性を得る必要があることから、焼鈍炉内での鋼板温度管理が重要である。そのために、加熱炉内での鋼板の最高到達温度(均熱温度)であるTss[℃]と、ある設定基準温度からTssへ到達するまでの時間(均熱時間)Ts[sec.]を適切に調整するように加熱炉の温度制御が実施されている。   In the annealing treatment, it is necessary to appropriately manage the temperature rising pattern of the steel plate temperature to obtain the target material characteristics, and therefore, the steel plate temperature management in the annealing furnace is important. For that purpose, Tss [° C], which is the highest temperature (soaking temperature) of the steel sheet in the heating furnace, and time (soaking time) Ts [sec.] Until it reaches Tss from a certain reference temperature The temperature control of the heating furnace is performed so as to adjust to the above.

本来は、鋼板温度を高精度に実測して、加熱炉温度制御を実施することが望ましいが、炉内では鋼板表面に酸化スケールが生成され、その生成状態が鋼板速度た炉内雰囲気、炉温などの状態によって異なるために、生成される酸化スケールの厚さが異なってくる。鋼板表面の放射率は、スケール厚さに応じて異なることから、鋼板の温度計測が困難となっていた。すなわち、放射率を予め設定する従来の放射温度計や、放射率変動に対して影響が少ないとされている2色温度計でも、正確な温度測定ができないという問題があった。   Originally, it is desirable to measure the steel plate temperature with high accuracy and control the heating furnace temperature. However, in the furnace, oxide scale is generated on the surface of the steel plate, and the generated state is the furnace atmosphere and the furnace temperature at the steel plate speed. Therefore, the thickness of the oxide scale produced varies. Since the emissivity of the steel sheet surface differs depending on the scale thickness, it has been difficult to measure the temperature of the steel sheet. That is, there is a problem that accurate temperature measurement cannot be performed even with a conventional radiation thermometer that sets the emissivity in advance or a two-color thermometer that is considered to have little influence on the emissivity fluctuation.

また、このような炉温制御による焼鈍処理では、焼鈍される鋼板の板厚や板幅等の寸法の違い、鋼板成分の違い、鋼板速度の違い等により、同じ炉温下においても生成されるスケールの厚さが異なるので、次工程で酸洗する際には、酸洗後のスケール残りの発生を無くすために鋼板の走行速度を抑制する傾向があった。そのために、生産効率を阻害することや、酸洗条件が適切でないためにスケールを残りを発生させた場合には鋼板の表面性状を損ない、品質の悪化を招き、最終製品の光沢不良を発生させる原因にもなっていた。以上のように、鋼板の材質特性を得るためばかりでなく生産効率の観点からも、鋼板温度を高精度に実測して、加熱炉温度制御を実施することが重要である。   Also, in such annealing treatment by furnace temperature control, it is generated even under the same furnace temperature due to differences in dimensions such as plate thickness and width of the steel sheet to be annealed, differences in steel sheet components, steel sheet speed, etc. Since the thicknesses of the scales were different, when pickling in the next step, there was a tendency to suppress the running speed of the steel sheet in order to eliminate the generation of scale residue after pickling. For this reason, if the production efficiency is hindered or the remaining scale is generated because the pickling conditions are not appropriate, the surface properties of the steel sheet are impaired, the quality deteriorates, and the final product has poor gloss. It was also the cause. As described above, it is important not only to obtain the material characteristics of the steel sheet but also to measure the temperature of the steel sheet with high accuracy and implement the heating furnace temperature control from the viewpoint of production efficiency.

高精度で鋼板温度を測定するためには、表面にスケールが生成されることで放射率変動が生じる場合には、放射率変動を補正することが必要となる。すなわち、放射率を適当な手段を用いて実測する方法が有用であり、これまでにも多くの方法が提案されてきている。   In order to measure the steel plate temperature with high accuracy, it is necessary to correct the emissivity fluctuation when the emissivity fluctuation occurs due to the generation of a scale on the surface. That is, a method of actually measuring the emissivity using an appropriate means is useful, and many methods have been proposed so far.

例えば特許文献1には、異なる測定条件における分光放射輝度間の関係と測定対象の放射率変化との関係式を予め求めておいて放射率を推定する方式が提案されている。測定条件は、波長や入出射(反射)角度、偏光角度成分などを異なる条件としている。   For example, Patent Literature 1 proposes a method for estimating the emissivity by obtaining in advance a relational expression between the relationship between spectral radiances under different measurement conditions and the change in emissivity of the measurement target. The measurement conditions are such that the wavelength, the incident / exit (reflection) angle, the polarization angle component, and the like are different.

また特許文献2には、同時に2つの波長での測定を行う測定方法が記載されている。まず、ステンレス鋼板の表面に生成されるスケールの厚さ変動により放射率が影響を受けないように長い波長を使用し、予めスケール厚さ変動範囲での放射率を同定しておくことで、その一定となる放射率をもとにして鋼板温度を求める方式が提案されている。また、この方式では、もう1つの波長として放射率がスケール厚さと相関のあるものを使用することで鋼板温度情報をもとにしてスケール厚さの測定も可能とするものである。   Patent Document 2 describes a measurement method for performing measurement at two wavelengths simultaneously. First, by using a long wavelength so that the emissivity is not affected by the thickness variation of the scale generated on the surface of the stainless steel plate, the emissivity in the scale thickness variation range is identified in advance. There has been proposed a method for obtaining a steel sheet temperature based on a constant emissivity. Also, in this method, the thickness of the scale can be measured based on the steel plate temperature information by using another wavelength whose emissivity is correlated with the scale thickness.

さらに、鋼板表面に外部光源から光を照射してその反射率を実測することで放射率を同定する方式も多数提案されている。   Further, many methods for identifying emissivity by irradiating light from an external light source on the steel sheet surface and actually measuring the reflectivity have been proposed.

しかしながら、上記特許文献1および特許文献2に開示された技術は、測定対象鋼板に対して垂直方向から測定するものであり、これらの方式を炉内で加熱された状態での温度測定に適用する際には、加熱炉の炉壁放射が鋼板に反射するため放射温度計に背光雑音として入り込むという問題があり、そのために、特許文献1、2では炉壁放射の反射光が放射温度計に入り込まない工夫が施されている。この方策としては通常、水冷遮光管を炉内に挿入してその遮光管を通して放射エネルギーを測定する方式が採られている。しかしながら、炉内は高温であり、遮光管自体を冷却するために何重かの冷却経路を内部にもたせる必要があり、溶接部での破断が生じやすいことから、長時間での使用時には水漏れを発生させる恐れがある。実際に水漏れを起こした場合には、炉内鋼板表面に水が付着して表面にダメージを与えることになり製品に実害を及ぼすことになって不都合である。従って、水冷遮光管の定期的なメンテナンスも必要となり、作業コストや負荷を増すことにもなるという問題も生じさせる。   However, the techniques disclosed in Patent Document 1 and Patent Document 2 measure from the direction perpendicular to the steel plate to be measured, and apply these methods to temperature measurement in a state of being heated in the furnace. In this case, there is a problem that the furnace wall radiation of the heating furnace is reflected on the steel plate, so that it enters the radiation thermometer as back light noise. For this reason, in Patent Documents 1 and 2, the reflected light of the furnace wall radiation enters the radiation thermometer. There are no ingenuity. As this measure, a method is generally adopted in which a water-cooled light shielding tube is inserted into the furnace and the radiant energy is measured through the light shielding tube. However, the inside of the furnace is hot, and it is necessary to provide several cooling paths inside to cool the light-shielding tube itself. May occur. When water leakage actually occurs, water adheres to the surface of the in-furnace steel plate and damages the surface, which is inconvenient because it causes actual damage to the product. Therefore, periodic maintenance of the water-cooled light-shielding tube is also required, which causes a problem that it increases work cost and load.

また、鋼板表面に外部光源から光を照射してその反射率を実測することで放射率を同定する方式においても、通常は同様の水冷構造が必要となるため上記と同じ問題が発生する。   Also, in the method of identifying the emissivity by irradiating the steel plate surface with light from an external light source and actually measuring the reflectance, the same problem as described above occurs because a similar water cooling structure is usually required.

以上の問題を回避する技術として、特許文献3に開示された技術がある。この技術は、炉内に擬似黒体を設置し、鋼板の自発光輝度と擬似黒体の放射エネルギーが測定対象鋼板に反射した放射エネルギーとの合計したエネルギーを特定の波長のP,S偏光成分として測定し、偏光放射輝度比から放射率を求めて鋼板温度を高精度に測定するものである。水冷遮光管を炉内に挿入する必要がないことから、測定装置のメンテナンス性も良好で実用性が高い方式であると言える。
特開平2−85730号公報 特開平9−33464号公報 特開2002−303551号公報
As a technique for avoiding the above problems, there is a technique disclosed in Patent Document 3. In this technology, a pseudo black body is installed in the furnace, and the sum of the self-luminous brightness of the steel plate and the radiant energy reflected by the pseudo black body reflected on the steel plate to be measured is the P and S polarization components of a specific wavelength. The emissivity is obtained from the polarized radiance ratio, and the steel sheet temperature is measured with high accuracy. Since it is not necessary to insert a water-cooled light-shielding tube in the furnace, it can be said that this is a system with good maintainability and high practicality.
Japanese Patent Laid-Open No. 2-85730 JP-A-9-33464 JP 2002-303551 A

しかしながら、特許文献3の技術を、ステンレス鋼板の製造プロセスに適用する際には放射率変動を補正し切れないという問題がある。すなわち、通常のステンレス製造ラインのCAPにおいては、成分や機械的特性の異なる様々なステンレス鋼板が同じプロセスを経由して製造される場合が多く、例えばCr含有量の多い代表的なステンレス鋼板であるオーステナイト系ステンレス鋼板SUS304の他に、CrとNiの成分が多いフェライト系ステンレス鋼板SUS430や他の成分元素の含有量が異なる多くの種類のステンレス鋼板が連続的に製造されている。従って、材質特性、例えば機械的な特性を目標の条件に合わせて製造するために炉内での温度条件、すなわち、先に説明した最高到達温度(均熱温度)であるTss[℃]と、ある設定基準温度からTssへ到達するまでの時間(均熱時間)Ts[sec.]などの条件がステンレス鋼板の種類に応じて異なっている。そのために、表面に生成されるスケールの成分や厚さが異なるばかりではなく、温度測定範囲も異なるのが通常である。   However, when the technique of Patent Document 3 is applied to a stainless steel plate manufacturing process, there is a problem that emissivity fluctuation cannot be corrected. In other words, in a CAP of a normal stainless steel production line, various stainless steel plates having different components and mechanical properties are often produced through the same process, for example, a typical stainless steel plate having a high Cr content. In addition to the austenitic stainless steel plate SUS304, a ferritic stainless steel plate SUS430 with a large amount of Cr and Ni and many types of stainless steel plates with different contents of other constituent elements are continuously produced. Therefore, in order to produce material characteristics such as mechanical characteristics according to the target conditions, temperature conditions in the furnace, that is, Tss [° C.] which is the highest temperature (soaking temperature) described above, Conditions such as time to reach Tss from a certain reference temperature (soaking time) Ts [sec.] Vary depending on the type of stainless steel sheet. Therefore, not only the scale components and thickness generated on the surface are different, but also the temperature measurement range is usually different.

このように特許文献3に示された技術では、多種の鋼板が製造される場合には、特定の波長のP,S偏光成分を測定し、偏光放射輝度比から放射率を求める放射率補正が十分ではなくなる問題が生ずる。すなわち、補正に使用するための予め得られている偏光放射輝度比と放射率の関係式として複数の関係が得られていないと、製造される鋼板の全てにわたって特許文献3に示された技術を適用することが困難である。   As described above, in the technique disclosed in Patent Document 3, when various types of steel plates are manufactured, emissivity correction is performed in which P and S polarization components of a specific wavelength are measured and the emissivity is obtained from the polarization radiance ratio. There is a problem that is not enough. That is, if a plurality of relations are not obtained as a relational expression of the polarization radiance ratio and emissivity obtained in advance for use in correction, the technique shown in Patent Document 3 is applied to all the steel sheets to be manufactured. It is difficult to apply.

本発明は、上記事情に鑑みてなされたもので、その目的とするところは、焼鈍炉内で熱処理される鋼板の表面温度をオンラインで連続的に測定するのに好適な、鋼板温度計測方法と装置を提供することである。   The present invention has been made in view of the above circumstances, and the object thereof is a steel plate temperature measurement method suitable for continuously measuring the surface temperature of a steel plate heat-treated in an annealing furnace online. Is to provide a device.

本発明の請求項1に係る発明は、焼鈍加熱炉に置かれた、表面にスケールが生成する鏡面性を有する鋼板の温度を測定する鋼板温度計測方法において、前記加熱炉の炉壁の一部に赤外波長領域での放射率が高い耐熱物質を埋め込み、該耐熱物質からの放射光が前記鋼板の表面で正反射する方向において、放射輝度を複数の偏光角成分において測定し、その測定した波長での複数の偏光角成分のおける各々の放射輝度信号と前記耐熱物質の表面温度とにもとづいて前記鋼板の放射率を算出し、該放射率を元にして前記鋼板の表面温度を算出することを特徴とする鋼板温度計測方法である。   The invention according to claim 1 of the present invention is a steel plate temperature measurement method for measuring a temperature of a steel plate having a specularity with a scale formed on a surface, which is placed in an annealing heating furnace, and a part of the furnace wall of the heating furnace. Embedded with a heat-resistant material having a high emissivity in the infrared wavelength region, and the radiance was measured at a plurality of polarization angle components in the direction in which the emitted light from the heat-resistant material was regularly reflected on the surface of the steel plate, The emissivity of the steel sheet is calculated based on each radiance signal of a plurality of polarization angle components at a wavelength and the surface temperature of the heat-resistant substance, and the surface temperature of the steel sheet is calculated based on the emissivity. This is a method for measuring the temperature of a steel sheet.

また本発明の請求項2に係る発明は、請求項1に記載の鋼板温度計測方法において、前記波長は2つの波長とし、かつ、前記複数の偏光角成分はP偏光およびS偏光の2つとし、2つの波長各々におけるP偏光とS偏光との放射輝度比に対する放射率の関係を予め測定対象の種類ごとに求めて、前記予め求めた関係と2つの波長で測定したP偏光とS偏光との放射輝度比にもとづいてスケール厚さ変動に応じて変化する測定対象の放射率を同定することを特徴とする鋼板温度計測方法である。   The invention according to claim 2 of the present invention is the steel plate temperature measurement method according to claim 1, wherein the wavelength is two wavelengths, and the plurality of polarization angle components are two of P-polarized light and S-polarized light. The relationship of the emissivity with respect to the radiance ratio between the P-polarized light and the S-polarized light at each of the two wavelengths is obtained in advance for each type of measurement object, and the previously obtained relationship and the P-polarized light and the S-polarized light measured at the two wavelengths are It is a steel plate temperature measuring method characterized by identifying the emissivity of the measuring object which changes according to a scale thickness fluctuation | variation based on the radiance ratio.

また本発明の請求項3に係る発明は、炉内に焼鈍加熱条件下に置かれた、表面にスケールが生成する鏡面性を有する鋼板の温度を測定する鋼板温度計測装置において、前記加熱炉の炉壁に埋め込まれた赤外波長領域での放射率が高い耐熱物質からの放射光が前記鋼板の表面で正反射する方向に配置されて、放射輝度を複数の偏光角成分について測定する放射輝度測定装置と、前記耐熱物質の表面温度を測定する温度計と、前記放射輝度測定装置で測定される波長での複数の偏光角成分における各々の放射輝度信号と前記耐熱物質の表面温度とにもとづいて前記鋼板の放射率を算出し、得られた放射率を元にして前記鋼板の表面温度を算出する演算装置とを備えることを特徴とする鋼板温度計測装置である。   The invention according to claim 3 of the present invention is a steel plate temperature measuring device for measuring a temperature of a steel plate having a specularity with a scale formed on the surface, which is placed in the furnace under annealing heating conditions. A radiance that measures the radiance of a plurality of polarization angle components in a direction in which radiant light from a heat-resistant substance with high emissivity in the infrared wavelength region embedded in the furnace wall is regularly reflected on the surface of the steel plate. Based on a measuring device, a thermometer for measuring the surface temperature of the refractory material, and each radiance signal and a surface temperature of the refractory material at a plurality of polarization angle components at wavelengths measured by the radiance measurement device. A steel plate temperature measuring device comprising: an arithmetic unit that calculates an emissivity of the steel plate and calculates a surface temperature of the steel plate based on the obtained emissivity.

また本発明の請求項4に係る発明は、請求項3に記載の鋼板温度計測装置において、前記複数の波長は2つの波長とし、かつ、前記複数の偏光角成分はP偏光およびS偏光の2つとし、2つの波長各々におけるP偏光とS偏光との放射輝度比に対する放射率の関係を予め測定対象の種類ごとに求めて、前記予め求めた関係と2つの波長で測定したP偏光とS偏光との放射輝度比にもとづいてスケール厚さ変動に応じて変化する測定対象の放射率を同定することを特徴とする鋼板温度計測装置である。   The invention according to claim 4 of the present invention is the steel sheet temperature measuring device according to claim 3, wherein the plurality of wavelengths are two wavelengths, and the plurality of polarization angle components are two of P-polarized light and S-polarized light. The relationship of emissivity with respect to the radiance ratio of P-polarized light and S-polarized light at each of the two wavelengths is obtained in advance for each type of measurement object, and the previously obtained relationship and the P-polarized light and S measured at the two wavelengths are obtained. A steel sheet temperature measuring device characterized by identifying an emissivity of a measurement object that changes in accordance with a scale thickness variation based on a radiance ratio with polarized light.

さらに本発明の請求項5に係る発明は、請求項1および請求項2に記載の鋼板温度計測方法において、前記鋼鈑は、ステンレス鋼鈑であることを特徴とする鋼板温度計測方法である。   The invention according to claim 5 of the present invention is the steel plate temperature measuring method according to claim 1 or 2, wherein the steel plate is a stainless steel plate.

本発明により、炉内でのステンレス鋼板の温度が高精度に得られることになり、従来から使用されていた炉温管理・制御による鋼板製造に代わって、実温による温度制御が可能になる。本発明を実際のCAPプロセスに適用することにより、焼鈍される鋼板の板厚や板幅等の寸法の違い、鋼板成分の違い、鋼板速度の違い等に応じて目標とする温度履歴に適した昇温パターンを実現することができるため、鋼板の走行速度を抑制する場合も少なくなり生産性が上がるばかりではなく、放射率情報から表面に生成されているスケールの状態を把握し酸洗条件を適切にすることもでき、スケールを残りの発生を抑えることで鋼板の表面性状を改善することにも繋がる。すなわち、良好な材質特性や最終製品の光沢性などの表面品質特性向上に結び付けることが可能となる。   According to the present invention, the temperature of the stainless steel plate in the furnace can be obtained with high accuracy, and temperature control based on the actual temperature can be performed instead of the steel plate manufacturing by the furnace temperature management and control conventionally used. By applying the present invention to an actual CAP process, it is suitable for the target temperature history depending on the difference in dimensions such as the thickness and width of the steel sheet to be annealed, the difference in steel sheet components, the difference in steel sheet speed, etc. Since the temperature rise pattern can be realized, not only the traveling speed of the steel sheet is reduced, the productivity increases, but also the condition of the scale generated on the surface is ascertained from the emissivity information and the pickling conditions are adjusted. It can also be made appropriate, and the surface property of the steel sheet can be improved by suppressing the remaining scale. In other words, it is possible to improve surface quality characteristics such as good material characteristics and gloss of the final product.

以下に、本発明を実施するための最良の形態について、図面を用いて詳細に説明する。図1は、本発明に係るステンレス鋼板温度計測装置の構成例を示す図である。図中、1は走行する鋼板を連続的に焼鈍するための焼鈍炉であり、ステンレス鋼板の場合は、例えばCAPプロセスと呼ばれる高温熱処理炉である。その内部は耐火物で覆われており、ラジアントチューブや直火バーナーなどの方式により内部が加熱されて高温に保持される。   The best mode for carrying out the present invention will be described below in detail with reference to the drawings. FIG. 1 is a diagram showing a configuration example of a stainless steel plate temperature measuring apparatus according to the present invention. In the figure, reference numeral 1 denotes an annealing furnace for continuously annealing a traveling steel plate. In the case of a stainless steel plate, for example, it is a high temperature heat treatment furnace called a CAP process. The inside is covered with a refractory, and the inside is heated and maintained at a high temperature by a method such as a radiant tube or a direct fire burner.

2は走行するステンレス鋼板(紙面垂直方向が走行方向で、紙面内左右方向が鋼板幅方向)であり、熱処理炉において所定の条件の昇温パターンに従って加熱される。炉内では走行を安定的に行うために、ロール3の上に沿って走行する。4は炉壁に埋め込まれた耐熱物質であり、一定の面積を持ち炉壁内面側の側面と同じ向きで配置される。5は炉外に設置される放射輝度測定装置であり、ステンレス鋼板2の走行方向に対して直交する方向(幅方向)で鋼板表面の中心位置での法線からθの角度を見込む方向に配置される。前記の耐熱物質4は、放射輝度測定装置5と鏡面対象の位置に埋め込まれて、耐熱物質の中心位置は鋼板表面の幅方向の中心位置から法線方向に対してθの角度に配置されている。   Reference numeral 2 denotes a traveling stainless steel plate (the vertical direction on the paper is the traveling direction, and the left-right direction in the paper is the steel plate width direction), and is heated in a heat treatment furnace according to a temperature rising pattern of a predetermined condition. In order to run stably in the furnace, it runs along the roll 3. Reference numeral 4 denotes a heat-resistant substance embedded in the furnace wall, which has a certain area and is arranged in the same direction as the side surface on the furnace wall inner surface side. 5 is a radiance measurement apparatus installed outside the furnace, and is arranged in a direction in which the angle of θ is estimated from the normal line at the center position of the steel sheet surface in the direction (width direction) orthogonal to the traveling direction of the stainless steel sheet 2. Is done. The refractory material 4 is embedded in the position of the radiance measuring device 5 and the mirror surface, and the center position of the refractory material is arranged at an angle θ from the center position in the width direction of the steel sheet surface with respect to the normal direction. Yes.

放射輝度測定装置5は、2つの波長でのP,S偏光輝度が同時に測定可能な構造である。この放射輝度測定装置5は、(a)ステンレス鋼板からの熱放射エネルギーと、(b)耐熱物質の熱放射エネルギーがステンレス鋼板の表面で正反射した成分のエネルギーと、(c)周囲を覆う炉内耐火物の熱放射エネルギーが鋼板表面や耐熱物質などに反射してくるエネルギーとの合計されたエネルギーを測定することになる。しかし、(c)の周囲を覆う炉内耐火物の熱放射エネルギーが鋼板表面や耐熱物質などに反射してくるエネルギーは、測定対象とする鋼板の表面が鏡面反射的な特性を持つこと、耐熱物質の放射率をできるだけ高くして(例えば放射率が0.95以上の値となる物質を選ぶ)、耐熱物質からの反射成分が小さくすることが可能になるため、放射輝度測定装置で測定されるエネルギー成分としては上記の(a)および(b)の2つと見なすことが可能となる。このように耐熱物質は放射率が高いことから擬似的な黒体として扱うことができる。   The radiance measuring device 5 has a structure capable of simultaneously measuring P and S polarized luminances at two wavelengths. The radiance measuring device 5 includes (a) thermal radiation energy from a stainless steel plate, (b) energy of a component in which the thermal radiation energy of the heat-resistant substance is regularly reflected on the surface of the stainless steel plate, and (c) a furnace that covers the surroundings. The total energy of the heat radiation energy of the inner refractory and the energy reflected from the steel plate surface or heat-resistant material is measured. However, the energy that the radiant energy of the furnace refractory covering (c) is reflected on the surface of the steel sheet or heat-resistant material is that the surface of the steel sheet to be measured has specular reflection characteristics, Energy measured by a radiance measurement device because the emissivity of the material is made as high as possible (for example, a material with an emissivity of 0.95 or more is selected), and the reflection component from the heat-resistant material can be reduced. The components can be regarded as the above two (a) and (b). Thus, the heat-resistant substance can be treated as a pseudo black body because of its high emissivity.

6は炉外に設置した放射輝度測定装置5と焼鈍炉1との間を仕切る測定窓であり、炉の内部からガスの流出を抑える役割をするものである。輝度測定を行う波長帯での光透過特性に優れた特殊なガラスなどの無機材料を利用するのが好ましい。また、測定窓の内部表面にガス成分が付着して汚染し、光透過特性を乱して光の減衰を起こすことがないように不活性ガスなどを利用してパージする。7は耐熱物質の表面温度を測定するための接触式温度計であり、表面の平均的な温度を測定するために例えば複数本の熱電対を利用することも可能である。   Reference numeral 6 denotes a measurement window that partitions between the radiance measuring device 5 installed outside the furnace and the annealing furnace 1, and serves to suppress the outflow of gas from the inside of the furnace. It is preferable to use an inorganic material such as special glass having excellent light transmission characteristics in a wavelength band for measuring luminance. Further, purge is performed using an inert gas or the like so that gas components adhere to and contaminate the inner surface of the measurement window and disturb light transmission characteristics and cause light attenuation. Reference numeral 7 denotes a contact-type thermometer for measuring the surface temperature of the heat-resistant substance. For example, a plurality of thermocouples can be used to measure the average temperature of the surface.

8は演算装置であり、放射輝度測定装置5により測定される2つの波長のP,S偏光についてステンレス鋼板からの熱放射エネルギーと耐熱物質の熱放射エネルギーのステンレス鋼板の表面で正反射した成分のエネルギーとの合計されたエネルギーの合計4つの測定値と接触式温度計7による測定値とにもとづいて、ステンレス鋼板2の表面温度を算出するためのものである。また、9は記憶装置であり、ステンレス鋼板の種類や表面スケールの厚さ、放射測定用波長などの条件によって異なる2偏光の放射輝度比と放射率との関係を記憶しておくものである。記憶装置9に記憶された情報を演算装置8に送ることで、前述した演算が行われて最終的な表面温度の値が算出され、その結果は出力装置10に出力される。また、この結果はプロセス管理用制御装置11に送られ、例えば鋼板の速度や加熱条件の設定に活かすことが可能になる。   Reference numeral 8 denotes an arithmetic unit, which is a component of specular reflection on the surface of the stainless steel plate of the thermal radiation energy from the stainless steel plate and the heat radiation energy of the heat-resistant material for P and S polarized light of two wavelengths measured by the radiance measuring device 5. The surface temperature of the stainless steel plate 2 is calculated on the basis of the total four measured values of energy and the measured value by the contact thermometer 7. Reference numeral 9 denotes a storage device that stores the relationship between the radiance ratio of two polarized light and the emissivity, which vary depending on the type of stainless steel plate, the thickness of the surface scale, the radiation measurement wavelength, and the like. By sending the information stored in the storage device 9 to the calculation device 8, the above-described calculation is performed to calculate the final surface temperature value, and the result is output to the output device 10. Further, this result is sent to the process management control device 11 and can be used for setting the speed and heating conditions of the steel sheet, for example.

以下に、本発明な係る温度計測の基本原理について詳細に説明する。
放射輝度測定装置による、ある特定波長λでの検出信号Eは、測定対象であるステンレス鋼板からの放射、炉壁に埋め込まれた耐熱物質からステンレス鋼板表面を反射される放射信号の和で、以下の(1)式のように表すことができる。
E=k{ελ(θ)Lλ、b(T1)+q(1−ελ(θ))Lλ、b(T2) }・・・・・(1)
ここで、ελ(θ)は鋼板表面法線方向に対してθ方向の測定対象の分光放射率、T1は測定対象(ステンレス鋼板)の温度、T2は炉壁に埋め込まれた耐熱物質の温度で、Lλb(T1)は温度T1の波長λにおける黒体の分光放射輝度、Lλ、b(T2)は温度T2の波長λにおける黒体の分光放射輝度である。kは物理量としての放射輝度Lλ、b(T)を放射温度計の電気出力信号に変換する係数、q(0≦q≦1)は鏡面反射的な反射の程度を表す係数である。
Below, the basic principle of the temperature measurement which concerns on this invention is demonstrated in detail.
The detection signal E at a specific wavelength λ by the radiance measuring device is the sum of radiation from the stainless steel plate to be measured and radiation signal reflected from the surface of the stainless steel plate from the heat-resistant material embedded in the furnace wall. It can be expressed as (1).
E = k {ε λ (θ) L λ, b (T 1 ) + q (1−ε λ (θ)) L λ, b (T 2 )} (1)
Where ε λ (θ) is the spectral emissivity of the object to be measured in the θ direction with respect to the normal direction of the steel sheet surface, T 1 is the temperature of the object to be measured (stainless steel sheet), and T 2 is a refractory material embedded in the furnace wall Where L λ , b (T 1 ) is the spectral radiance of the black body at the wavelength λ of the temperature T 1 , and L λ, b (T 2 ) is the spectral radiance of the black body at the wavelength λ of the temperature T 2. is there. k is a coefficient for converting radiance L λ, b (T) as a physical quantity into an electrical output signal of the radiation thermometer, and q (0 ≦ q ≦ 1) is a coefficient representing the degree of specular reflection.

p-およびs-偏光の分光方向放射率を、それぞれεp、λ(θ)、εs、λ(θ)とする。各種の係数も偏光に応じた状態に置き換えると、放射輝度測定装置の1つの波長での出力信号は、それぞれ(2)および(3)式となる。
Ep −qkpLλ、b(T2) =εp、λ(θ) kp{Lλ、b(T1)−qLλ、b(T2) }・・・・・(2)
Es −qksLλ、b(T2) =εs、λ(θ) ks{Lλ、b(T1)−qLλ、b(T2) }・・・・・(3)

対象の表面粗さが方向に依らないとき、偏光反射特性に差は生じないからqp=qs=qと見なすことができる。(2)および(3)式の右辺を整理すると、以下の(4)および(5)式を得る。
Ep −qkpLλ、b(T2) =εp、λ(θ) kp{Lλ、b(T1)−qLλ、b(T2) }・・・・・(4)
Es −qksLλ、b(T2) =εs、λ(θ) ks{Lλ、b(T1)−qLλ、b(T2) }・・・・・(5)

Ep、b(T)、Es、b(T)は、それぞれ温度Tの黒体のp-偏光放射輝度、s-偏光放射輝度の検出信号とすると、それぞれ次式のように表すことができる。
Ep、b(T)=kpLλ、b(T) ・・・・・(6)
Es、b(T)=ksLλ、b(T) ・・・・・(7)

(4)および(5)式の左辺は、qが既知のとき実測できるので、その比をとり、(4)および(5)式を利用して整理すると、(8)式のようになる。
{Ep −qEp、b(T2)}/{ Es −qEs、b(T2)}/kr=εp、λ(θ)/εs、λ(θ)=Rps・・・・・(8)
ここで、(6)および(7)式により、kr=kp/ksは、既知の一定値であり、右辺は偏光放射率比Rpsとなり、偏光放射輝度比を利用した放射率補正法の原理が炉内においても成り立つことを示している。したがって、炉内放射測温に先立ってεp、λ(θ)またはεs、λ(θ)、あるいはその合計であるελ(θ)とRpsの関係を求めておけば、炉内で実測したRpsから放射率が求められる。(8)式でRpsが求められると、Rps-ελ(θ)の特性曲線から放射率ελ(θ)が得られる。
The spectral direction emissivities of p- and s-polarized light are assumed to be ε p, λ (θ), ε s, λ (θ), respectively. When various coefficients are also replaced with the state corresponding to the polarized light, the output signals at one wavelength of the radiance measuring apparatus are expressed by equations (2) and (3), respectively.
E p −qk p L λ, b (T 2 ) = ε p, λ (θ) k p {L λ, b (T 1 ) −qL λ, b (T 2 )} (2)
E s −qk s L λ, b (T 2 ) = ε s, λ (θ) k s {L λ, b (T 1 ) −qL λ, b (T 2 )} (3)

When the surface roughness of the object does not depend on the direction, there is no difference in polarization reflection characteristics, so that it can be regarded as q p = q s = q. By arranging the right sides of the expressions (2) and (3), the following expressions (4) and (5) are obtained.
E p −qk p L λ, b (T 2 ) = ε p, λ (θ) k p {L λ, b (T 1 ) −qL λ, b (T 2 )} (4)
E s −qk s L λ, b (T 2 ) = ε s, λ (θ) k s {L λ, b (T 1 ) −qL λ, b (T 2 )} (5)

E p, b (T), E s, b (T) is blackbody of p- polarized radiation luminance of each temperature T, when the detection signal of the s- polarized light radiance, that each expressed by the following equation it can.
E p, b (T) = k p L λ, b (T) (6)
E s, b (T) = k s L λ, b (T) (7)

The left side of the equations (4) and (5) can be measured when q is known. Therefore, when the ratio is taken and arranged using the equations (4) and (5), the equation (8) is obtained.
{E p −qE p, b (T 2 )} / {E s −qE s, b (T 2 )} / k r = ε p, λ (θ) / ε s, λ (θ) = Rps ... (8)
Here, according to the equations (6) and (7), k r = k p / k s is a known constant value, the right side is the polarization emissivity ratio Rps, and the emissivity correction method using the polarization radiance ratio It is shown that the above principle holds even in the furnace. Therefore, if the relationship between ε p, λ (θ) or ε s, λ (θ), or their sum ε λ (θ) and Rps is obtained prior to in-core radiation temperature measurement, it is measured in the furnace. The emissivity is obtained from Rps. When Rps is obtained by the equation (8), the emissivity ε λ (θ) is obtained from the characteristic curve of Rps-ε λ (θ).

このようにして得られたελ(θ)の値を、放射輝度測定装置で測定される放射輝度Eの値と接触式熱電対により測定された値をもとに算出されるEb(T2)の値とを組み合わせることで以下の(9)式をもとに鋼板からの分光放射信号Eb(T1)が算出される。
Eb(T1)={ E −q(1−ελ(θ))Eb(T2)}/ ελ(θ) ・・・・・(9)
さらに温度T1(℃)は、以下の(10)式から算出される。
T1=C2/A/[lnC−ln(Eb(T1))]−B/A−273.15 ・・・・・(10)
ここで、C2はプランクの第2定数で、A,B,Cは放射輝度計に特有の定数であり、実験的に校正データを求めて決定される。
The value of the thus ε obtained λ (θ), E b ( T , which is calculated based on the value measured by contact thermocouple value of radiance E measured at radiance measuring device By combining with the value of 2 ), the spectral radiation signal E b (T 1 ) from the steel sheet is calculated based on the following equation (9).
E b (T 1 ) = {E −q (1−ε λ (θ)) E b (T 2 )} / ε λ (θ) (9)
Further, the temperature T 1 (° C.) is calculated from the following equation (10).
T 1 = C 2 / A / [ln C−ln (E b (T 1 ))] − B / A−273.15 (10)
Here, C 2 is Planck's second constant, and A, B, and C are constants specific to the radiance meter, and are determined by experimentally obtaining calibration data.

(9)式の中には鏡面反射的な反射の程度を表す係数qがあるが、屈折角度θを60°以上に浅い角度にした場合、その値は1に近いことが実験的に知られている。そこで、ここではqの値を1として温度を算出している。ただし、測定対象の特性を詳細に調べることで温度測定誤差が最も小さくなる条件を調べてqの値を調整し、その値を使用することも可能である。   In equation (9), there is a coefficient q representing the degree of specular reflection, but it is experimentally known that the value is close to 1 when the refraction angle θ is shallower than 60 °. ing. Therefore, here, the temperature is calculated by setting the value of q to 1. However, it is also possible to use the value after adjusting the value of q by examining the condition that minimizes the temperature measurement error by examining the characteristics of the measurement object in detail.

以上のように、ある特定波長での基本原理の説明を行ったが、ステンレス鋼板の種類によっては2つの波長を組み合わせて、1つの波長λ1でのRps(λ1)とその波長以下の波長λ2でのελ2(θ)との関係を利用する方が放射率推定に有効である場合がある。以下の実施例の項にて、本発明の特徴の1つである、2つの波長を選択的に使い分ける点についてその詳細を説明する。 As described above, the basic principle at a specific wavelength has been explained. Depending on the type of stainless steel plate, two wavelengths are combined, Rps (λ 1 ) at one wavelength λ 1 and a wavelength less than that wavelength. Using the relationship with ε λ2 (θ) at λ 2 may be more effective for emissivity estimation. The details of the point of selectively using two wavelengths, which is one of the features of the present invention, will be described in the section of the following embodiments.

図2は、本発明に係る偏光放射輝度測定を実現する装置例を示す図である。第一の波長として3.9μmを、第二の波長として1.55μmを使用する際に、それぞれの波長に対するP,S偏光放射輝度を同時に測定する装置の一例を示したものである。   FIG. 2 is a diagram showing an example of an apparatus for realizing polarized radiance measurement according to the present invention. When using 3.9 μm as the first wavelength and 1.55 μm as the second wavelength, an example of an apparatus that simultaneously measures the P and S polarized radiances for each wavelength is shown.

受光する放射エネルギーは、まず、21の集光レンズ系を透過して複数の受光素子に導かれる。第一のハーフミラー22により、2つの経路に分けられた光は、第二のハーフミラー23によりさらに2つの経路に分岐され、1つの経路ではP偏光を透過する素子(P偏光素子)25を透過して3.9μm用検出素子であるサーモパイル29により放射輝度が測定される。第二のハーフミラー23により分岐されたもう1つの経路を経て、S偏光を透過する素子(S偏光素子)26を透過して3.9μm用検出素子であるサーモパイル30にて放射輝度が測定される。   First, the radiant energy to be received is transmitted through 21 condenser lens systems and guided to a plurality of light receiving elements. The light divided into two paths by the first half mirror 22 is further branched into two paths by the second half mirror 23, and an element (P-polarization element) 25 that transmits P-polarized light is transmitted through one path. The radiance is measured by the thermopile 29 that is transmitted through and is a detection element for 3.9 μm. The radiance is measured by a thermopile 30 that is a detection element for 3.9 μm through another element branched by the second half mirror 23 and transmitted through an element (S-polarized element) 26 that transmits S-polarized light. .

同様にして、第一のハーフミラー22により分岐されたもう一つの経路では、1.55μmでのP,S偏光放射輝度が測定される。すなわち、第三のハーフミラー24で2つの経路に分岐され、そのうちの1つの経路ではP偏光素子27を経て1.55μm用検出素子であるInGaAs素子31にて放射輝度が測定され、分岐された2つ目の経路ではS偏光素子28を経て1.55μm用検出素子であるInGaAs素子32にて放射輝度が測定される。以上の4組の偏光素子と検出素子にて測定された放射輝度信号は、増幅処理装置33に送られて最終的な放射輝度データとして活用される。すなわち、前述の図1で示した演算装置8へ送られることになる。   Similarly, in another path branched by the first half mirror 22, the P and S polarized radiance at 1.55 μm is measured. That is, the third half mirror 24 is branched into two paths. In one of the paths, the radiance is measured by the InGaAs element 31 which is a 1.55 μm detection element via the P-polarization element 27 and branched. In the second path, the radiance is measured by the InGaAs element 32 which is a detection element for 1.55 μm through the S polarizing element 28. The radiance signals measured by the above four sets of polarizing elements and detection elements are sent to the amplification processor 33 and utilized as final radiance data. That is, it is sent to the arithmetic unit 8 shown in FIG.

以上のように、2波長、2偏光の測定を同一の装置に組み込んだ例を示したが、2つの波長での測定をそれぞれ別の装置に分担させて行うことも可能である。その場合には、測定対象表面の同一位置を測定するように、視野を合わせる必要がある。図2では測定面を合わせる光軸を規定しているが、測定波長は2つあるためにレンズの透過特性が波長により異なることを考慮する必要がある。そのために、集光レンズ21としては中心付近を1.55μmでの測定用に使用するための材質を用い、その周りを3.9μm測定用に使用するために別の材質を用いることが好ましい。また、輝度エネルギーの減衰を小さくするために各ハーフミラーや偏光素子の波長特性、帯域幅などを考慮する必要もある。また、偏光放射輝度測定の際の受光角度としては、測定対象の鏡面性を確保する意味からも60°以上が好ましく、実プロセスへの設置を考慮した場合、装置や炉内耐熱物質の設置条件、測定対象の上下方向振動の影響も考慮すると70°程度が実用上相応しい。なお、本実施例では、波長の異なる2波長の場合を示しているが、2波長が同じ、すなわち1波長でも測定が可能な場合もある。図3および図4に、擬似黒体放射率と温度推定誤差、および入射角度と温度推定誤差との関係を示した。これによれば、誤差10℃又は5℃を得るためには、放射率0.95、入射角70°以上とするのがよいと分る。   As described above, an example in which the measurement of two wavelengths and two polarizations is incorporated in the same apparatus has been described. However, it is also possible to share the measurement at two wavelengths with different apparatuses. In that case, it is necessary to match the field of view so as to measure the same position on the surface to be measured. In FIG. 2, the optical axis for matching the measurement surface is defined. However, since there are two measurement wavelengths, it is necessary to consider that the transmission characteristics of the lens differ depending on the wavelength. Therefore, it is preferable to use a material for the condensing lens 21 in the vicinity of the center for measurement at 1.55 μm, and another material for use in the vicinity of 3.9 μm for measurement. In addition, in order to reduce the attenuation of luminance energy, it is necessary to consider the wavelength characteristics and bandwidth of each half mirror or polarizing element. In addition, the light receiving angle for measuring the polarized radiance is preferably 60 ° or more from the viewpoint of ensuring the specularity of the measurement target. Considering the influence of the vertical vibration of the measurement object, about 70 ° is suitable for practical use. In this embodiment, the case of two wavelengths having different wavelengths is shown, but there are cases where the two wavelengths are the same, that is, measurement is possible even with one wavelength. FIGS. 3 and 4 show the relationship between the pseudo blackbody emissivity and the temperature estimation error, and the incident angle and the temperature estimation error. According to this, in order to obtain an error of 10 ° C. or 5 ° C., it is understood that the emissivity should be 0.95 and the incident angle should be 70 ° or more.

次に、測定されたRpsの値から放射率を求める実施例を以下に示す。ステンレス鋼板の焼鈍工程を模擬して、前述した炉内での最高到達温度(均熱温度)であるTss[℃]と、ある設定基準温度からTssへ到達するまでの時間(均熱時間)Ts[sec.]などの条件を変化させて、表面に生成されるスケールの厚さを変化させた時の偏光放射輝度を、波長として3.9μmと1.55μmの2つの条件で測定した。この時の測定角度は、法線方向に対して70°とした。   Next, an example in which the emissivity is obtained from the measured Rps value is shown below. Simulating the annealing process of stainless steel sheet, Tss [° C] which is the highest temperature (soaking temperature) in the furnace described above, and the time (soaking time) Ts from reaching a set reference temperature to Tss The polarization radiance when the thickness of the scale generated on the surface was changed by changing the conditions such as [sec.] was measured under two conditions of 3.9 μm and 1.55 μm as wavelengths. The measurement angle at this time was 70 ° with respect to the normal direction.

通常、SUS304とSUS430とでは加熱条件が異なり、前者では最高温度を1200℃程度まで、後者では900℃程度までとする。生成されるスケールの厚みを分光偏光解析装置を用いて実測したところでは、厚いケースではSUS304の場合、0.6μm程度、SUS430では0.4μm程度であった。これらの条件での放射輝度測定結果を詳細に調べたところ、実測されるRpsの値と放射輝度測定値をもとに熱電対による表面温度実測データとの演算から算出される放射率データとの対応では、以下の結論が得られた。すなわち、SUS304ではRpsの測定に3.9μmを使い、放射率との対応をとる際には1.55μmでの放射率を用いる場合の関係が明確であること、SUS430ではRpsと放射率の対応関係として両者とも1.55μmを使用することが良好な対応を得ることができることが分った。   Usually, SUS304 and SUS430 have different heating conditions. The maximum temperature is about 1200 ° C in the former and about 900 ° C in the latter. When the thickness of the generated scale was measured using a spectroscopic ellipsometer, it was about 0.6 μm in the case of SUS304 and about 0.4 μm in the case of SUS430. When the radiance measurement results under these conditions were examined in detail, the measured Rps value and the emissivity data calculated from the calculation of the surface temperature measurement data with a thermocouple based on the measured radiance value. In response, the following conclusions were obtained. In other words, SUS304 uses 3.9μm to measure Rps, and when taking correspondence with emissivity, the relationship when using emissivity at 1.55μm is clear, and SUS430 has a relationship between Rps and emissivity. In both cases, it was found that using 1.55 μm can provide a good response.

これらの実験データを、図5及び図6に示した。図5はSUS304、図6はSUS430鋼鈑の特性を表しており、両者ともほぼ直線的な単調な関係を示しており、これらの関係を1次または2次近似関数として記述することが可能である。スケール厚さが増加するのに対応してRpsの値が増加することもわかり、両者の間にも一対一の関係があることから、Rpsの実測値からスケール厚さを推定することも可能である。   These experimental data are shown in FIGS. Fig. 5 shows the characteristics of SUS304, and Fig. 6 shows the characteristics of SUS430 steel, both of which show a substantially linear monotonous relationship. These relationships can be described as a linear or quadratic approximation function. is there. It can also be seen that the Rps value increases as the scale thickness increases, and since there is a one-to-one relationship between the two, it is also possible to estimate the scale thickness from the measured Rps value. is there.

また、他の鋼種であるステンレス鋼板、例えばSUS420系などでも同様の関係が得られており、Rpsと放射率との関係曲線を若干修正することで対応することが可能である。製造ラインで走行する鋼板の種類は事前にわかるので、Rpsと放射率との関係式を選択して使用することで、多くの鋼板種類に対応した放射率推定が可能となり、従って得られた放射率を使用して高精度な温度測定ができる。また、Rpsの実測値から推定されるスケール厚さの情報を、鋼板温度情報と組み合わせることで活用すれば、鋼板が得た熱エネルギー量を間接的に推定することも可能である。すなわち、結晶粒径や製品品質特性、例えば、機械的特性(引張り強さ、伸び率等)を連続的にモニタリング可能となる。   The same relationship is also obtained with other steel types such as stainless steel plates, such as SUS420, and it can be dealt with by slightly correcting the relationship curve between Rps and emissivity. Since the types of steel plates that run on the production line can be known in advance, by selecting and using the relational expression between Rps and emissivity, it is possible to estimate the emissivity corresponding to many types of steel plates, and thus the obtained radiation The temperature can be measured with high accuracy using the rate. Moreover, if the information of the scale thickness estimated from the measured value of Rps is used in combination with the steel plate temperature information, it is also possible to indirectly estimate the amount of heat energy obtained by the steel plate. That is, the crystal grain size and product quality characteristics such as mechanical characteristics (tensile strength, elongation, etc.) can be continuously monitored.

以上は放射率の関係を事前に調べた結果について記述したが、次に本発明の構成を実際に組み上げて炉内での背光放射が充満した雰囲気を模擬し、放射輝度測定装置に対して鏡面反射位置に耐熱物質を配置して、放射率補正温度測定の性能を詳細に調べた結果について説明する。   The above describes the results of investigating the relationship of emissivity in advance.Next, the structure of the present invention was actually assembled to simulate an atmosphere filled with back-radiation in the furnace, and a mirror surface for the radiance measurement device. The results of examining the performance of emissivity correction temperature measurement in detail by placing a heat-resistant substance at the reflection position will be described.

耐熱物質の事例としては、セラミックス材料であるSiC材料を使用した。この材料は耐熱特性が優れるばかりでなく、表面は黒色であり、実測した放射率は3.9μmや1.55μmでの値として0.95以上あり、しかも長時間の使用に対してもその値が安定していることも確認されている。従って、実際の焼鈍炉内で使用するのに好適である。 表面温度は複数の熱電対を使用してそれらの値の平均値を使用した。実際に第1図に示した配置を縮小した構成で測定を行い、実測したRpsから前記のRps-放射率関係式を使用して放射率推定を行い、耐熱物質の表面温度測定値などから(9)、(10)式に基づいて、ステンレス鋼板の温度を算出した。また測定角度としては、70°とした。また、表面温度は鋼板に溶接接続した熱電対の測定値を正しいものとして算出した鋼板温度との比較を行った。   As an example of a heat-resistant substance, a SiC material, which is a ceramic material, was used. This material not only has excellent heat resistance, but also has a black surface, the measured emissivity is 0.95 or more at 3.9 μm or 1.55 μm, and the value is stable even after long-term use. It has also been confirmed. Therefore, it is suitable for use in an actual annealing furnace. As the surface temperature, a plurality of thermocouples were used and an average value of these values was used. Actually, the measurement shown in Fig. 1 was performed with a reduced configuration, and the emissivity was estimated from the measured Rps using the above Rps-emissivity relational expression. 9) The temperature of the stainless steel plate was calculated based on the equations (10). The measurement angle was 70 °. Further, the surface temperature was compared with the steel plate temperature calculated with the measured value of the thermocouple welded to the steel plate as correct.

以上の結果、様々なスケール厚さ条件、温度範囲、ステンレス鋼板の種類などを変えた場合でも、両者の差は約5℃以内に収まっており、本発明による方式、装置の妥当性が示された。通常の単一波長を使用した測定を比較のために行った結果では、垂直受光、波長0.9μmのケースでは温度測定誤差が数10℃にも達しており、本発明による放射率補正効果が十分であること、背光放射を耐熱物質で実測する方法が有効であることが示された。   As a result of the above, even when various scale thickness conditions, temperature ranges, types of stainless steel plates, etc. were changed, the difference between them was within about 5 ° C, indicating the validity of the method and apparatus according to the present invention. It was. As a result of performing a measurement using a normal single wavelength for comparison, the temperature measurement error has reached several tens of degrees Celsius in the case of vertical light reception and a wavelength of 0.9 μm, and the emissivity correction effect of the present invention is sufficient. Therefore, it was shown that the method of actually measuring the back radiation with a heat-resistant substance is effective.

実際に本発明による方法をステンレス鋼板製造のCAPプロセスに適用することが可能であり、高精度の温度測定による板温制御を実現することができる。この場合、耐熱物質としては前述のSiC板材を使用し、鋼板の反射特性などの条件から、その寸法としては高々500mm角程度の大きさで十分であることも確認されている。   Actually, the method according to the present invention can be applied to a CAP process for producing a stainless steel plate, and plate temperature control by temperature measurement with high accuracy can be realized. In this case, the above-described SiC plate material is used as the heat-resistant material, and it has been confirmed that a size of about 500 mm square is sufficient for the dimensions from the conditions such as the reflection characteristics of the steel plate.

本発明に係るステンレス鋼板温度計測装置の構成例を示す図である。It is a figure which shows the structural example of the stainless steel plate temperature measuring apparatus which concerns on this invention. 本発明に係る偏光放射輝度測定を実現する装置例を示す図である。It is a figure which shows the example of an apparatus which implement | achieves the polarized radiance measurement which concerns on this invention. 擬似黒体放射率と温度推定誤差との関係を示す図である。It is a figure which shows the relationship between a pseudo black body emissivity and a temperature estimation error. 入射角度と温度推定誤差との関係を示す図である。It is a figure which shows the relationship between an incident angle and a temperature estimation error. 偏光放射輝度比を表す指標Rpsと分光放射率εとの関係の一例(SUS304鋼板の例)を示す特性図である。It is a characteristic view which shows an example (example of a SUS304 steel plate) between the parameter | index Rps showing polarization radiance ratio, and spectral emissivity (epsilon). 偏光放射輝度比を表す指標Rpsと分光放射率εとの関係の一例(SUS430鋼板の例)を示す特性図である。It is a characteristic figure showing an example (example of a SUS430 steel plate) of relation between index Rps showing polarization radiance ratio and spectral emissivity ε.

符号の説明Explanation of symbols

1 焼鈍炉
2 ステンレス鋼板
3 ロール
4 耐熱物質
5 放射輝度測定装置
6 測定用窓
7 熱電対
8 演算装置
9 記憶装置
10 出力装置
11 プロセス管理用制御装置
21 集光レンズ系
22 ハーフミラー
23 ハーフミラー
24 ハーフミラー
25 P偏光素子
26 S偏光素子
27 P偏光素子
28 S偏光素子
29 サーモパイル
30 サーモパイル
31 InGaAs素子
32 InGaAs素子
33 増幅処理装置
1 Annealing furnace
2 Stainless steel plate
3 rolls
4 refractory materials
5 Radiance measurement device
6 Measurement window
7 Thermocouple
8 Arithmetic unit
9 Storage device
10 Output device
11 Control device for process management
21 Condensing lens system
22 half mirror
23 half mirror
24 half mirror
25 P polarizing element
26 S polarizing element
27 P polarizing element
28 S polarizing element
29 Thermopile
30 Thermopile
31 InGaAs device
32 InGaAs devices
33 Amplification processor

Claims (5)

焼鈍加熱炉に置かれた、表面にスケールが生成する鏡面性を有する鋼板の温度を測定する鋼板温度計測方法において、
前記加熱炉の炉壁の一部に赤外波長領域での放射率が高い耐熱物質を埋め込み、該耐熱物質からの放射光が前記鋼板の表面で正反射する方向において、放射輝度を複数の偏光角成分において測定し、
その測定した波長での複数の偏光角成分のおける各々の放射輝度信号と前記耐熱物質の表面温度とにもとづいて前記鋼板の放射率を算出し、
該放射率を元にして前記鋼板の表面温度を算出することを特徴とする鋼板温度計測方法。
In the steel plate temperature measurement method for measuring the temperature of a steel plate having a specularity with a scale generated on the surface, placed in an annealing furnace,
A heat resistant material having a high emissivity in the infrared wavelength region is embedded in a part of the furnace wall of the heating furnace, and the radiance is polarized in a direction in which radiant light from the heat resistant material is regularly reflected on the surface of the steel plate. Measured in the angular component,
Calculate the emissivity of the steel sheet based on each radiance signal and the surface temperature of the heat-resistant substance in a plurality of polarization angle components at the measured wavelength,
A steel sheet temperature measuring method, wherein the surface temperature of the steel sheet is calculated based on the emissivity.
請求項1に記載の鋼板温度計測方法において、
前記波長は2つの波長とし、かつ、前記複数の偏光角成分はP偏光およびS偏光の2つとし、2つの波長各々におけるP偏光とS偏光との放射輝度比に対する放射率の関係を予め測定対象の種類ごとに求めて、前記予め求めた関係と2つの波長で測定したP偏光とS偏光との放射輝度比にもとづいてスケール厚さ変動に応じて変化する測定対象の放射率を同定することを特徴とする鋼板温度計測方法。
In the steel plate temperature measuring method according to claim 1,
The wavelength is two wavelengths, and the plurality of polarization angle components are two of P-polarized light and S-polarized light, and the relationship of emissivity with respect to the radiance ratio of P-polarized light and S-polarized light at each of the two wavelengths is measured in advance. Obtained for each type of object, and identifies the emissivity of the measurement object that changes according to the scale thickness variation based on the previously obtained relationship and the radiance ratio of P-polarized light and S-polarized light measured at two wavelengths. A steel plate temperature measuring method characterized by the above.
炉内に焼鈍加熱条件下に置かれた、表面にスケールが生成する鏡面性を有する鋼板の温度を測定する鋼板温度計測装置において、
前記加熱炉の炉壁に埋め込まれた赤外波長領域での放射率が高い耐熱物質からの放射光が前記鋼板の表面で正反射する方向に配置されて、放射輝度を複数の偏光角成分について測定する放射輝度測定装置と、
前記耐熱物質の表面温度を測定する温度計と、
前記放射輝度測定装置で測定される波長での複数の偏光角成分における各々の放射輝度信号と前記耐熱物質の表面温度とにもとづいて前記鋼板の放射率を算出し、得られた放射率を元にして前記鋼板の表面温度を算出する演算装置とを備えることを特徴とする鋼板温度計測装置。
In the steel plate temperature measuring device for measuring the temperature of the steel plate having a specularity with a scale formed on the surface, placed under annealing heating conditions in the furnace,
The radiation light from the heat-resistant material having a high emissivity in the infrared wavelength region embedded in the furnace wall of the heating furnace is arranged in a direction in which it is regularly reflected on the surface of the steel sheet, and the radiance is reduced with respect to a plurality of polarization angle components. A radiance measuring device to measure,
A thermometer for measuring the surface temperature of the heat-resistant substance;
The emissivity of the steel sheet is calculated based on the radiance signal of each of a plurality of polarization angle components at the wavelength measured by the radiance measuring apparatus and the surface temperature of the heat-resistant material, and the obtained emissivity is based on the obtained emissivity. And a computing device for calculating the surface temperature of the steel plate.
請求項3に記載の鋼板温度計測装置において、
前記複数の波長は2つの波長とし、かつ、前記複数の偏光角成分はP偏光およびS偏光の2つとし、2つの波長各々におけるP偏光とS偏光との放射輝度比に対する放射率の関係を予め測定対象の種類ごとに求めて、前記予め求めた関係と2つの波長で測定したP偏光とS偏光との放射輝度比にもとづいてスケール厚さ変動に応じて変化する測定対象の放射率を同定することを特徴とする鋼板温度計測装置。
In the steel plate temperature measuring device according to claim 3,
The plurality of wavelengths are two wavelengths, and the plurality of polarization angle components are two of P-polarized light and S-polarized light, and the relationship of the emissivity with respect to the radiance ratio of P-polarized light and S-polarized light at each of the two wavelengths. The emissivity of the measurement object that changes in accordance with the change in scale thickness based on the previously obtained relationship and the radiance ratio of P-polarized light and S-polarized light measured at two wavelengths is obtained in advance for each type of measurement object. A steel plate temperature measuring device characterized by identifying.
請求項1および請求項2に記載の鋼板温度計測方法において、
前記鋼鈑は、ステンレス鋼鈑であることを特徴とする鋼板温度計測方法。
In the steel sheet temperature measuring method according to claim 1 and claim 2,
The steel sheet temperature measuring method, wherein the steel sheet is a stainless steel sheet.
JP2005191494A 2005-06-30 2005-06-30 Steel plate temperature measuring method and apparatus Pending JP2007010476A (en)

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