JP2007002295A - Coiling type vacuum film deposition system, and coiling type vacuum film deposition method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To increase the adhesion with the main roller even in the case a metallic base material film is used. <P>SOLUTION: In this invention, a metallic base material film 20 is continuously supplied in an evacuated atmosphere, and, as the base material film 20 is tightly stuck to the main roller for cooling or heating via an elastic layer 21, and the base material film 20 is film-deposited. The elastic layer 21 is formed of a hardened layer of a rubber sheet or liquid rubber formed on the surface of the main roller 5, and the adhesion and thermal conductivity between the base material film 20 and the main roller 5 are secured. In this way, the adhesion of the base material film 20 to the main roller 5 is increased, the thermal deformation of the base material film 20 is evaded, and stable film deposition treatment is made possible. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a take-up vacuum film forming apparatus and a winding film that perform a predetermined film formation on a film while continuously feeding the base film in a reduced-pressure atmosphere and bringing the base film into close contact with a cooling or heating main roller. The present invention relates to a take-type vacuum film forming method.

  Conventionally, after a long base film continuously drawn from the unwinding roller is wound around the main roller for cooling or heating, the base film is formed by a sputtering source disposed opposite to the main roller. A vacuum film forming apparatus of a type that is wound up by a winding roller is known (see Patent Document 1 below).

  In this type of take-up vacuum film forming apparatus, in order to prevent thermal deformation of the base film during film formation, the base film is brought into close contact with the peripheral surface of the main roller and cooled or heated while being formed. Like to do. The surface of the main roller is subjected to metal plating, ceramic plating, or the like, and a plastic film, a metal film, or the like is used as the base film.

JP-A-4-136167

  However, when the base film is a metal film, there is almost no elongation compared to the case of a plastic film, so it is difficult to make uniform contact with the main roller, and since most of the main rollers are made of metal, there is an effect of adhesion due to static electricity. There is a problem that it cannot be expected, slips on the surface of the main roller, and is likely to meander.

  As described above, in the conventional roll-up vacuum film forming apparatus, it is difficult to make the metal base film adhere to the surface of the main roller, and uneven contact between the base film and the main roller is likely to occur. There is a problem that a temperature difference occurs between the non-contact part and the contact part, and the base material is thermally deformed.

  The present invention has been made in view of the above-described problems, and provides a take-up vacuum film forming apparatus and a take-up vacuum film forming method that can improve adhesion to a main roller even when a metal base film is used. The task is to do.

  The above-described problems include a vacuum chamber, an unwinding unit that is disposed inside the vacuum chamber and continuously unwinds the base film, a winding unit that winds the base film unwound from the unwinding unit, A winding provided with a main roller disposed between the unwinding portion and the winding portion for cooling or heating the base film, and a film forming source disposed opposite to the main roller to form the base film. In the take-up type vacuum film forming apparatus, the problem is solved by a take-up type vacuum film forming apparatus characterized in that an elastic layer in close contact with the base film is formed on the surface of the main roller.

  Further, the above problem is characterized in that the metal film is continuously fed out in a reduced-pressure atmosphere, and the metal film is formed while the metal film is closely attached to a cooling or heating main roller through an elastic layer. This is solved by a winding type vacuum film forming method.

  In the present invention, an elastic layer is formed on the surface of the main roller, and the adhesion between the main roller and the base film is enhanced via the elastic layer. Thereby, the contact nonuniformity between a base film and a main roller can be eliminated, and the heat deformation etc. of a base film can be prevented.

  The elastic layer can be formed of a rubber sheet, particularly a rubber material having heat resistance such as silicone rubber. The thickness of the rubber sheet is appropriately set according to the diameter of the main roller, the rotation speed, the material of the base film (heat resistant temperature), and the like. In general, the thicker the elastic layer, the higher the adhesion with the base film, but the higher the thermal resistance. Further, the thinner the elastic layer, the lower the thermal resistance, but the adhesiveness decreases. Preferably, the thickness of the elastic layer is in the range of 0.1 mm to 4 mm.

  The base film is preferably a metal film, but a plastic film is also applicable. As the metal film, stainless steel foil, copper foil, aluminum foil or the like can be used. Further, the main roller can be used not only for cooling the base film but also for preheating the base film.

  As described above, according to the present invention, the adhesion between the base film and the main roller can be improved, so that the intended cooling action or heating action of the base film by the main roller can be appropriately performed. Can do. In addition, since a stable film formation process on the base film is possible, productivity can be improved.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 shows a schematic configuration of a winding type vacuum film forming apparatus according to an embodiment of the present invention. The take-up vacuum film forming apparatus 1 of the present embodiment includes a vacuum chamber 2, an unwinding roller (unwinding unit) 3 for continuously unwinding the base film 20, and a base unrolled from the unwinding roller 3. A winding roller (winding unit) 4 for winding the material film 20, a main roller 5 for cooling the base film 20, and a film forming source 6 for forming the base film 20 are provided.

  The main roller 5 is disposed between the unwinding roller 3 and the winding roller 4. The main roller 5 is made of metal, has a structure in which a refrigerant or a heating medium can be circulated therein, and has a function of maintaining the base film 20 wound around the main roller 5 at a predetermined temperature. Auxiliary rollers 7 and 8 are disposed between the unwinding roller 3 and the main roller 5, and auxiliary rollers 9 and 10 are disposed between the main roller 5 and the winding roller 4.

  In the present embodiment, the film forming source 6 is composed of a plurality of sputter targets 6A, 6B, 6C arranged to face the main roller 5. The film forming source 6 is not limited to a sputtering target, and may be an evaporation source for vacuum deposition.

  The inside of the vacuum chamber 2 is partitioned into a transfer chamber 12 and a film forming chamber 13 by a partition wall 11 attached in the vicinity of the main roller 5. In the transfer chamber 12, the unwinding roller 3, the winding roller 4, the auxiliary rollers 7 to 10 and the upper half of the main roller 5 are located. In the film forming chamber 13, the lower half of the main roller 5 and the film forming are formed. Source 6 is located. The transfer chamber 12 and the film forming chamber 13 can be evacuated independently of each other.

  The base film 20 is made of a metal film such as a stainless foil, a copper foil, or an aluminum foil having a thickness of 20 μm to 50 μm, for example. The base film 20 is continuously fed out from the unwinding roller 3, sent to the main roller 5 through the auxiliary roller 7 and the auxiliary roller 8, and in the film forming chamber 13 while being wound around the main roller 5. A membrane is performed. The formed base film 20 is wound around the winding roller 4 via the auxiliary roller 9 and the auxiliary roller 10.

  In general, when the base film is a metal film, there is almost no elongation compared to the case of a plastic film, so that adhesion unevenness is likely to occur, and meandering is likely to occur due to slip. For this reason, it is difficult to make the base film adhere to the surface of the main roller, and contact unevenness between the base film and the main roller occurs, and heat loss (thermal deformation) easily occurs at the non-contact portion.

  Therefore, in the present embodiment, as schematically shown in FIGS. 2 and 3, an elastic layer 21 is formed on the surface (circumferential surface) of the main roller 5, and the base film 20 is formed via the elastic layer 21. The main roller 5 is closely attached. Thereby, the base film 20 has improved adhesion to the main roller 5 and the occurrence of contact unevenness is suppressed. As a result, the temperature of the base film 20 can be made uniform, and thermal deformation during film formation is avoided.

  In the present embodiment, the elastic layer 21 is made of a heat-resistant rubber material such as silicone or fluorine. The elastic layer 21 has a certain heat transfer characteristic between the main roller 5 and the base film 20. The thermal conductivity of the elastic layer 21 is preferably about 1 to 5 W / m · K, and may be higher.

  The heat conductivity of the elastic layer 21 can be controlled by the formation thickness of the elastic layer 21, and is preferably about 0.1 to 4 mm, for example. When the formation thickness is less than 0.1 mm, a predetermined cushioning property cannot be obtained, and it becomes difficult to ensure adhesion with the base film. On the other hand, when the formation thickness exceeds 4 mm, the cushioning property is improved, but the heat transfer property is lowered. The hardness of the elastic layer 21 is preferably in the range of, for example, 12 to 80 ° (12 to 80 JISA).

  The elastic layer 21 can be formed by winding a rubber sheet around the surface of the main roller 5. Alternatively, liquid rubber may be applied to the surface of the main roller 5 and then cured before use.

  In the winding type vacuum vapor deposition apparatus 1 of the present embodiment configured as described above, the base film 20 is continuously fed out from the unwinding roller 3, and the base film 20 is passed through the elastic layer 21 to the main roller. Since the base film is formed while being in close contact with the base 5, the adhesiveness between the base film 20 and the main roller 5 can be improved, and thus the base film 20 can be stably cooled. Thus, the desired film formation process can be performed while avoiding thermal deformation of the base film. In addition, since a stable film formation process on the base film is possible, productivity can be improved.

  On the other hand, the winding type vacuum film forming apparatus 1 of the present embodiment can perform not only the cooling process of the base film 20 but also the heating process with the main roller 5. In this case, for example, it is suitable for the preheat treatment of the base film 20 when forming a film by a plasma CVD method.

  The embodiment of the present invention has been described above. Of course, the present invention is not limited to this, and various modifications can be made based on the technical idea of the present invention.

  For example, in the embodiment described above, a metal film is used as the base film 20, but the present invention can be similarly applied to a plastic film.

  In the above embodiment, silicone rubber or the like is applied as the elastic layer 21. However, it is also possible to use a heat conductive sheet in which metal fine particles are mixed in an elastic material.

1 is a schematic configuration diagram of a take-up vacuum film forming apparatus 1 according to an embodiment of the present invention. 3 is an enlarged view showing details of a main roller 5. FIG. 4 is a cross-sectional view of a main part showing a contact state between a main roller 5 and a base film 20. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Winding type vacuum film-forming apparatus 2 Vacuum chamber 3 Unwinding roller 4 Winding roller 5 Main roller 6 Film-forming source 7-10 Auxiliary roller 11 Partition wall 12 Transfer chamber 13 Film-forming chamber 20 Base film 21 Elastic layer

Claims (8)

A vacuum chamber, an unwinding unit that is disposed inside the vacuum chamber and continuously unwinds the base film, a winding unit that winds the base film unwound from the unwinding unit, the unwinding unit, and the unwinding unit Winding-type vacuum film-forming comprising a main roller that is disposed between the winding unit and cools or heats the base film, and a film-forming source that is disposed opposite to the main roller and forms the base film In the device
A winding type vacuum film-forming apparatus, wherein an elastic layer in close contact with the base film is formed on a surface of the main roller.   The winding type vacuum film forming apparatus according to claim 1, wherein the elastic layer is a rubber sheet wound around the main roller.   The winding type vacuum film forming apparatus according to claim 1, wherein the elastic layer is a cured body of liquid rubber applied to the surface of the main roller.   The winding type vacuum film forming apparatus according to claim 2, wherein the rubber sheet is a silicone rubber sheet.   The winding type vacuum film forming apparatus according to claim 1, wherein the base film is a metal film.   The winding type vacuum film forming apparatus according to claim 1, wherein the elastic layer has a thermal conductivity of 1 W / m · K or more.   The winding type vacuum film forming apparatus according to claim 2, wherein the rubber sheet has heat resistance. Winding-type vacuum film formation characterized in that a metal film is continuously fed out in a reduced-pressure atmosphere, and the metal film is formed on the metal film while being in close contact with a cooling or heating main roller via an elastic layer. Method.

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