JP2006272854A - Method and device for forming frame data, and writing method and device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To form frame data under simpler control in an exposure device for forming an image on the exposure surface by moving a spatial optical modulator in the scanning direction and inputting frame data sequentially to the spatial optical modulator depending on its movement in the scanning direction. <P>SOLUTION: When the pixel data of frame data belongs across the first split exposure image data in a first memory 61a and the second split exposure image data in a second memory 61b, dummy areas are provided in the first and second memories 61a and 61b, respectively. In the first memory 61a, the dummy area is read out following to read out of the first split exposure image data and a first dummy writing point data group is acquired. In the second memory 61b, the second split exposure image data is read out following to read out of the dummy area and a second dummy writing point data group is acquired. The frame data is formed by taking logical sum of the first dummy writing point data group and the second dummy writing point data group. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a frame data creation method for creating frame data used when forming an image by moving a drawing point forming unit such as a spatial light modulator relative to a drawing surface in a predetermined scanning direction, and The present invention relates to an apparatus and a drawing method and apparatus for performing drawing using frame data created using the frame data creating method and apparatus.

  Conventionally, various drawing apparatuses for forming a desired two-dimensional pattern represented by image data on a drawing surface are known.

  As a drawing apparatus as described above, for example, a spatial light modulator such as a digital micromirror device (hereinafter referred to as DMD) is used, and exposure is performed by modulating a light beam by the spatial light modulator according to image data. Various exposure apparatuses have been proposed. The DMD is configured by arranging a large number of minute micromirrors two-dimensionally in a memory cell (SRAM array) on a semiconductor substrate such as silicon. Then, by controlling the electrostatic force due to the electric charge accumulated in the memory cell, the angle of the reflecting surface can be changed by tilting the micromirror, and a drawing point is formed at a desired position by changing the angle of the reflecting surface. Thus, an image can be formed.

  As an exposure apparatus using the DMD as described above, for example, the DMD is moved relative to the exposure surface in a predetermined scanning direction, and the memory cell of the DMD is moved according to the movement in the scanning direction. An exposure apparatus for inputting a frame data composed of a large number of drawing point data corresponding to a large number of micromirrors, and forming a desired image on an exposure surface by sequentially forming drawing point groups corresponding to DMD micromirrors in time series. Has been proposed.

  In general, the DMD micromirrors are arranged so that the arrangement direction of each row and the arrangement direction of each column are orthogonal to each other. An image formed on the exposure surface is formed by inclining such a DMD by a predetermined angle with respect to the scanning direction and performing exposure as described above, thereby narrowing the interval between the scanning lines scanned by the micromirror. An exposure apparatus with improved resolution is also proposed (see Patent Document 1).

 Here, when performing exposure using the exposure apparatus as described above, it is necessary to sequentially input frame data to the DMD in accordance with the relative movement of the DMD in the scanning direction as described above. Therefore, it is necessary to create frame data corresponding to the position of the DMD with respect to the exposure surface in advance before exposure.

Therefore, for example, image data representing an image to be exposed on the exposure surface is temporarily stored in a memory such as a DRAM, and pixel data corresponding to each micromirror of the DMD is sequentially stored from the memory for each position of the DMD with respect to the exposure surface. By reading, each drawing point data input to each micromirror of the DMD is acquired, and each frame data is created from the acquired drawing point data.
Japanese Patent Laid-Open No. 2004-9595

  However, for example, when the capacity of the image data is about several gigabytes and is very large, the maximum storage capacity of the DRAM is currently about 1 gigabyte. Therefore, the image data is divided and the divided image data is divided. Must be stored in a plurality of DRAMs. For example, in the case where drawing point data belonging to one frame data is stored across two DRAMs, it is necessary to create one frame data by properly connecting the boundary portions. In order to achieve this, there is a case where very complicated control must be performed in the control unit that controls reading of drawing point data from each DRAM.

  Specifically, for example, when creating frame data of an exposure apparatus that performs exposure by inclining the DMD by a predetermined angle with respect to the scanning direction, each drawing point data of a drawing point data group corresponding to one micromirror line May be stored across two DRAMs as described above. In order to read out such a drawing point data group, each of the drawing point data groups is conventionally controlled by each control unit that controls each DRAM. It is necessary to specify the address for specifying the drawing point data, and to synchronize the partial drawing point data groups read from the respective DRAMs, so that the read timings must be synchronized with each other. Complex control was necessary.

  In view of the above circumstances, the present invention acquires drawing point data by simple control even when drawing point data belonging to one frame data is stored across two storage units as described above. It is an object of the present invention to provide a frame data generation method and apparatus capable of generating frame data and a drawing method and apparatus using the frame data generation method and the like.

  In the first frame data creation method of the present invention, a drawing point forming unit having a plurality of drawing elements that form drawing points on a drawing surface is moved relative to the drawing surface in a predetermined scanning direction, and The frame is composed of a plurality of drawing point data corresponding to the drawing elements in accordance with the movement in the scanning direction, and the drawing point group is sequentially input to form the drawing point group in time series, thereby forming an image on the drawing surface. A frame data creation method for creating frame data used for forming a frame data, wherein a plurality of drawing point data is acquired based on image data representing the image to create frame data. Generate a plurality of divided image data corresponding to a plurality of divided images obtained by dividing the image, store the divided image data in a plurality of storage units, respectively, and perform adjacent division A predetermined storage area is provided at the boundary between the adjacent divided image data in the two storage units in which image data is stored, and each drawing point data of the frame data belongs to the adjacent divided image data. In this case, after reading the one divided image data from the storage unit in which one of the two divided image data is stored, the predetermined storage area is read to obtain the first drawing point data group. In addition, after reading the predetermined storage area from the storage unit in which the other divided image data is stored, the other divided image data is read to obtain the second drawing point data group, and the first drawing point is obtained. The frame data is created based on the data group and the second drawing point data group.

  In the second frame data creation method of the present invention, a drawing point forming unit having a plurality of drawing elements for forming drawing points on the drawing surface is moved relative to the drawing surface in a predetermined scanning direction, and The frame is composed of a plurality of drawing point data corresponding to the drawing elements in accordance with the movement in the scanning direction, and the drawing point group is sequentially input to form the drawing point group in time series, thereby forming an image on the drawing surface. A frame data creation method for creating frame data used in forming a frame data, wherein a plurality of drawing point data is acquired based on image data representing an image to create frame data. A plurality of divided image data corresponding to the plurality of divided images is generated, and each of the divided image data is stored in a plurality of storage units, and adjacent divided image data is stored. In each of the two storage units in which is stored, a clear area is provided at the boundary between the adjacent divided image data, and each drawing point data of the frame data belongs to the adjacent divided image data. Frame data is created based on a logical sum of data read from each.

  In the third frame data creation method of the present invention, a drawing point forming unit having a plurality of drawing elements for forming drawing points on the drawing surface is moved relative to the drawing surface in a predetermined scanning direction, and The frame is composed of a plurality of drawing point data corresponding to the drawing elements in accordance with the movement in the scanning direction, and the drawing point group is sequentially input to form the drawing point group in time series, thereby forming an image on the drawing surface. A frame data creation method for creating frame data used for forming a frame data, wherein a plurality of drawing point data is acquired based on image data representing the image to create frame data. Generates a plurality of divided image data corresponding to a plurality of divided images obtained by dividing the image in the scanning direction, and stores the divided image data in a plurality of storage units, respectively. In addition, the partial image data on the downstream side of the upstream divided image data among the adjacent divided image data is stored in the storage unit storing the downstream divided image data, and each of the frame data When the drawing point data belongs to each of the adjacent divided image data, the partial image data is read from the storage unit storing the downstream divided image data, and then the downstream divided image data is read. It is characterized by creating frame data.

  The drawing method of the present invention acquires each frame data using the frame data creation method, moves the drawing point forming portion relative to the drawing surface in the scanning direction, and moves in the scanning direction. Accordingly, each frame data is sequentially input to the drawing point forming unit to form a drawing point group in time series, and an image is formed on the drawing surface.

  The first frame data creation device of the present invention moves a drawing point forming unit having a plurality of drawing elements that form drawing points on a drawing surface relative to the drawing surface in a predetermined scanning direction, The frame is composed of a plurality of drawing point data corresponding to the drawing elements in accordance with the movement in the scanning direction, and the drawing point group is sequentially input to form the drawing point group in time series, thereby forming an image on the drawing surface. A frame data creation device for creating frame data used for forming a frame data, comprising a frame data creation unit for obtaining a plurality of drawing point data based on image data representing the image and creating frame data In the frame data creation device, a plurality of storage units each storing a plurality of divided image data corresponding to a plurality of divided images obtained by dividing the image, and adjacent divisions A storage control unit for providing a predetermined storage area at the boundary between the adjacent divided image data in two storage units for storing image data, wherein the frame data creation unit includes each drawing point data of the frame data However, in the case of belonging to each of the adjacent divided image data, a predetermined storage area is read after reading the one divided image data from the storage unit in which one of the two divided image data is stored. The first drawing point data group is acquired, and a predetermined storage area is read from the storage unit storing the downstream divided image data, and then the other divided image data is read to obtain the second drawing point data. A group is acquired, and frame data is created based on the first drawing point data group and the second drawing point data group.

  The second frame data creation device of the present invention moves a drawing point forming unit having a plurality of drawing elements that form drawing points on the drawing surface relative to the drawing surface in a predetermined scanning direction, The frame is composed of a plurality of drawing point data corresponding to the drawing elements in accordance with the movement in the scanning direction, and the drawing point group is sequentially input to form the drawing point group in time series, thereby forming an image on the drawing surface. A frame data creation device for creating frame data used for forming a frame, comprising a frame data creation unit for obtaining a plurality of drawing point data based on image data representing an image and creating frame data In the data creation device, a plurality of storage units each storing a plurality of divided image data corresponding to a plurality of divided images obtained by dividing an image, and adjacent divided image data A storage control unit that provides a clear area at the boundary portion between the adjacent divided image data in the two storage units in which the image data is stored. In the case of belonging to each of the divided image data, the frame data is created based on the logical sum of the data read from each of the storage units.

  The third frame data creation device of the present invention moves a drawing point forming unit having a plurality of drawing elements that form drawing points on the drawing surface relative to the drawing surface in a predetermined scanning direction, The frame is composed of a plurality of drawing point data corresponding to the drawing elements in accordance with the movement in the scanning direction, and the drawing point group is sequentially input to form the drawing point group in time series, thereby forming an image on the drawing surface. A frame data creation device for creating frame data used for forming a frame data, comprising a frame data creation unit for obtaining a plurality of drawing point data based on image data representing the image and creating frame data In the frame data creation device, a plurality of storage units respectively storing a plurality of divided image data corresponding to a plurality of divided images obtained by dividing the image in the scanning direction A storage control unit for storing a part of the downstream partial image data in the upstream divided image data of the adjacent divided image data in a storage unit in which the downstream divided image data is stored, When each drawing point data of the frame data belongs to the adjacent divided image data, the frame data creation unit reads the partial image data from the storage unit storing the downstream divided image data, and then The frame data is created by reading downstream divided image data.

  The drawing apparatus of the present invention draws the above-described frame data creation device, a drawing point forming unit that forms a drawing point group composed of a plurality of drawing points on the drawing surface based on the input frame data, and a drawing point forming unit Moving means that moves relative to the surface in a predetermined scanning direction, and frame data created by the frame data creation device in accordance with the movement in the scanning direction by the moving means are sequentially input to the drawing point forming unit for drawing. Image forming control means for forming a predetermined image on the drawing surface by sequentially forming drawing point groups in time series in the point forming unit is provided.

  Here, the “clear area” is an area where data of 0 value is stored, or an area where all read data is controlled to a value of 0, that is, a value of 0 as a result. It means the area where only can be obtained.

  According to the first frame data generation method and apparatus of the present invention, a plurality of divided image data corresponding to a plurality of divided images is generated, and each of the divided image data is stored in a plurality of storage units, and adjacent divided In a case where a predetermined storage area is provided at the boundary between the adjacent divided image data in the two storage units storing the image data, and each drawing point data of the frame data belongs to the adjacent divided image data, respectively. After reading the one divided image data from the storage unit in which one of the two storage units is stored, the predetermined storage area is read to obtain the first drawing point data group, In the storage unit storing the other divided image data, after reading the predetermined storage area, the other divided image data is read and the second drawing point data is read. Since the group is acquired and the frame data is created based on the first drawing point data group and the second drawing point data group, only two memories are stored without performing complicated control as in the prior art. By performing simple control of reading out the data of each part, it is possible to acquire the drawing point data stored across the two storage units and create the frame data.

  The second frame data creation method and apparatus of the present invention can provide the same effects as those of the first frame data creation method and apparatus of the present invention.

  According to the third frame data creation method and apparatus of the present invention, a plurality of divided image data corresponding to a plurality of divided images is generated, and each of the divided image data is stored in a plurality of storage units and adjacent to each other. The partial image data on the downstream side of the divided image data on the upstream side of the divided image data is stored in the storage unit in which the divided image data on the downstream side is stored, and each drawing point data of the frame data is In the case of belonging to adjacent divided image data, frame data is created by reading out the partial image data from the storage unit storing the downstream divided image data and then reading out the downstream divided image data. Therefore, the partial image data and the divided image data stored in one storage unit are simply read without performing complicated control as in the prior art. By performing a simple control that issues can create frame data respectively acquired by the drawing point data stored across two memory portions.

  The effects of the drawing method and apparatus of the present invention are the same as the effects of the first to third frame data creation methods and apparatuses.

  Hereinafter, an exposure apparatus using the first embodiment of the frame data creation method and apparatus of the present invention will be described in detail with reference to the drawings.

  An exposure apparatus using the first embodiment of the present invention is an exposure apparatus using a DMD as a drawing point forming unit in the present invention, and has a feature in a method of creating frame data input to the DMD. First, the overall configuration of the exposure apparatus will be described. FIG. 1 is a perspective view showing a schematic configuration of an exposure apparatus 10 using the first embodiment of the present invention.

  As shown in FIG. 1, the exposure apparatus 10 includes a flat moving stage 14 that holds the photosensitive material 12 by adsorbing to the surface. Two guides 20 extending along the stage moving direction are installed on the upper surface of the thick plate-like installation table 18 supported by the four legs 16. The stage 14 is arranged so that the longitudinal direction thereof faces the stage moving direction, and is supported by the guide 20 so as to be reciprocally movable.

  A U-shaped gate 22 is provided at the center of the installation table 18 so as to straddle the moving path of the moving stage 14. Each end of the U-shaped gate 22 is fixed to both side surfaces of the installation base 18. A scanner 24 is provided on one side of the gate 22 and a plurality of (for example, two) sensors 26 for detecting the front and rear ends of the photosensitive material 12 are provided on the other side. The scanner 24 and the sensor 26 are respectively attached to the gate 22 and fixedly arranged above the moving path of the moving stage 14. The scanner 24 and the sensor 26 are connected to an overall control unit (described later) that controls them.

As shown in FIGS. 2 and 3B, the scanner 24 includes ten exposure heads 30 arranged in a matrix of 2 rows and 5 columns. In the following, when individual exposure heads arranged in the m-th row and the n-th column are shown, they are expressed as an exposure head 30 _mn .

Each exposure head 30 includes a DMD 36 that is a spatial light modulation element. In the DMD 36, a plurality of micromirror arrays in which micromirrors as drawing elements are arranged in a row are arranged in parallel, and the arrangement direction of the micromirror arrays forms a predetermined inclination angle θ with the scanning direction. It is attached to the exposure head 30. Therefore, the exposure area 32 by each exposure head 30 is a rectangular area inclined with respect to the scanning direction, as shown in FIGS. 2 and 3B. In the following, when an exposure area by individual exposure heads arranged in the m-th row and the n-th column is indicated, it is expressed as an exposure area 32 _mn .

  On the light incident side of the DMD 36, a fiber array light source (not shown) in which light emitting points of the optical fibers are arranged in a line along a direction corresponding to the long side direction of the exposure area 32, and laser light emitted from the fiber array light source And a condensing lens system (not shown) for condensing on the DMD 36 by correcting the collimated light so that the light quantity distribution of the collimated laser beam is uniform.

  An imaging lens system (not shown) that images the laser light reflected by the DMD 36 on the drawing surface of the photosensitive material 120 is disposed on the light reflection side of the DMD 36.

As shown in FIG. 3A, as the stage 14 moves, a strip-shaped exposed region 34 is formed on the photosensitive material 12 for each exposure head 30, and each of the strip-shaped exposed regions 34 is formed. However, each of the exposure heads 30 in each row arranged in a line so as to partially overlap the adjacent exposed region 34 is arranged at a predetermined interval in the arrangement direction. Therefore, can not be exposed portion between the exposure area _{32 11} in the first row and the exposure area _{32 12,} it can be exposed by the second row of the exposure area _{32 21.}

  As shown in FIG. 4, the DMD 36 has a micromirror 58 supported by a support on an SRAM array (memory cell) 56, and has a large number (for example, a pitch of 13.68 μm, 1024 × 768). ) Micromirrors 58 are configured in a two-dimensional array in a perpendicular direction. As described above, a silicon gate CMOS SRAM array 56 manufactured in a normal semiconductor memory manufacturing line is disposed directly below the micromirror 58 via a support including a hinge and a yoke.

  When a digital signal as a control signal is written in the SRAM array 56 of the DMD 36, a control voltage corresponding to the digital signal is applied to an electrode portion (not shown) provided for each micromirror 58, and the control voltage The micromirror 58 supported by the support column by the electrostatic force generated by the application is tilted within a range of ± α degrees (for example, ± 10 degrees) with the diagonal line as the center. FIG. 5A shows a state in which the micromirror 58 is tilted to + α degrees in the on state, and FIG. 5B shows a state in which the micromirror 58 is tilted to −α degrees in the off state. The light B incident on the micromirror 58 when the micromirror 58 is on is reflected toward the photosensitive material 12, and the light B incident on the micromirror 58 when the micromirror 58 is off is The light is reflected toward the light absorbing material other than the photosensitive material 12. Then, the light B reflected by one micromirror 58 is irradiated onto the photosensitive material 12, whereby one drawing point constituting an image to be exposed is exposed on the photosensitive material 12.

  In the exposure apparatus 10, as described above, the DMD 36 uses the exposure head 30 so that the arrangement direction of the micromirror array 36a forms a predetermined inclination angle θ (where 0 ° <θ <90 °) with the scanning direction. The pitch of the exposure trajectory of each micromirror 58 can be made narrower than the arrangement pitch of the micromirrors 58 (see FIG. 6).

  Next, the electrical configuration of the exposure apparatus 10 will be described.

  As shown in FIG. 7, the exposure apparatus 10 stores exposure image data that stores exposure image data output from an image data output apparatus 70 that outputs exposure image data representing an exposure target image exposed on the photosensitive material 12. Means 61, a frame data creation unit 62 for creating frame data based on the exposure image data stored in the exposure image data storage means 61, and a control signal to the DMD 36 based on the frame data output from the frame data creation unit 62 The DMD controller 63 for outputting the image and the overall control unit 60 for controlling the entire exposure apparatus. The overall control unit 60 controls the operations of the stage driving device 80 and the fiber array light source 90 that drive the stage 14.

  As shown in FIG. 8, the exposure image data storage means 61 includes a first memory 61a and a second memory 61b. The first memory 61a stores first divided exposure image data corresponding to the partial exposure target image in the upstream half of the exposure target image exposed to the photosensitive material 12, and the second memory 61b. The second divided exposure image data corresponding to the partial exposure target image in the downstream half of the exposure target image exposed to the photosensitive material 12 is stored. The overall control unit 60 divides the exposure image data output from the image data output device 70 into the first divided exposure image data and the second divided exposure data, and the respective divided exposure image data. As described above, the storage control unit 60a that controls to store in the first memory 61a and the second memory 61b is provided.

  Then, the storage control unit 60a stores the first divided exposure image data in the first memory 61a and the second divided exposure image data in the second memory 61b as described above. As shown in FIG. 8, a dummy area is provided in the storage area of the memory corresponding to the boundary portion between the first divided exposure image data and the second divided exposure image data. The dummy area stores 0 data. The exposure image data is binary data, and is configured as 1 for points to be exposed and 0 for points that are not exposed. Then, the first divided exposure image data and the second divided image data stored in the first memory 61a and the second memory 61b as described above are read out by the frame data creating unit 62 and frame data is read out. Is created.

  FIG. 9 is a schematic diagram showing the correspondence between each pixel data d of each divided exposure image data D stored in each memory and each micromirror 58 to which each pixel data d is input. Circles 1 to 24 in FIG. 9 schematically show the micromirrors 58 of the DMD 36. In the present embodiment, as shown in FIG. 9, it is assumed that the resolution of the exposure image data D is higher than the resolution of the micro mirror 58 of the DMD 36.

  The frame data creation unit 62 creates one frame data by sequentially reading the pixel data d corresponding to the circles 1 to 24 in FIG. 9 from the memory, and then sequentially creates the circles 1 to 24 one pixel at a time in the scanning direction. Each time the data is shifted, the frame data corresponding to the position of the DMD 36 with respect to the photosensitive material 12 is created by sequentially reading out the pixel data d corresponding to the circles 1 to 24, respectively. The operation of the frame data creation unit 62 will be described in detail later.

  As the first memory 61a and the second memory 61b, for example, a DRAM can be used, but a DDR memory capable of high-speed reading is preferably used.

  Next, the operation of the exposure apparatus 10 will be described in detail.

  First, in an image data output device 70 such as a computer, exposure image data corresponding to an exposure target image exposed on the photosensitive material 12 is created, and the exposure image data is output to the exposure device 10.

  Then, the exposure image data input to the exposure apparatus 10 is divided into the first divided exposure image data and the second divided exposure image data by the storage control unit 60a as described above, and the first memory 61a and the second divided exposure image data, respectively. A dummy area is provided and stored in the second memory 61b.

  Here, FIG. 10 shows a schematic diagram in which the frame data read out by the frame data creation unit 62 is represented by arrows.

  First, when all the pixel data of the frame data to be read out belong to the first divided exposure image data stored in the first memory 61a, the frame data creation unit 62, as shown in FIG. By sequentially reading the pixel data of the first divided exposure image data stored in the memory 61a as described above, the drawing point data is acquired and each frame data is created.

  Then, the frame data creation unit 62 belongs to the first divided exposure image data stored in the first memory 61a with a part of the pixel data of the read frame data, and the pixel data other than the part includes the second pixel data. When belonging to the second divided exposure image data stored in the memory 61b, that is, when the pixel data of the frame data is stored across the first memory 61a and the second memory 61b, As shown in FIG. 11, in the first memory 61a, after the partial pixel data in the first divided exposure image data is read, zero data in the dummy area corresponding to the pixel data other than the partial pixel data is read. read out. Then, in the second memory 61b, after reading 0 data of the dummy area corresponding to the partial pixel data, pixel data other than the partial in the second divided exposure image data is read.

  More specifically, for example, pixel data corresponding to circles 1 to 21 in FIG. 9 belong to the first divided exposure image data, and pixel data corresponding to circles 22 to 24 is the second divided exposure image data. The frame data creation unit 62 reads out the pixel data corresponding to the circles 1 to 21 in the first divided exposure image data from the first memory 61a, and then to the circles 22 to 24. Read 0 data in the corresponding dummy area. Then, after reading 0 data in the dummy area corresponding to the circles 1 to 21 from the second memory 61b, pixel data corresponding to the circles 22 to 24 in the second divided exposure image data is read.

  Then, as shown in FIG. 12, the first data composed of the pixel data corresponding to the circles 1 to 21 and the 0 data corresponding to the circles 22 to 24 read from the first memory 61a as described above. The dummy drawing point data group is stored in the first buffer 62a in the frame data creation unit 62, and the 0 data and the circle 22 corresponding to the circles 1 to 21 read from the second memory 61b as described above. A second dummy drawing point group including pixel data corresponding to the circle 24 is stored in the second buffer 62b. Then, the frame data creation unit 62 reads the data stored in the first buffer 62a and the second buffer 62b one by one in synchronization, and calculates the logical sum (or) of the read data. As a result, the drawing point data corresponding to the circles 1 to 24 is acquired and frame data is created.

  Next, when all the pixel data of the frame data to be read belong to the second divided exposure image data stored in the second memory 61b, the frame data creation unit 62, as shown in FIG. By sequentially reading out the pixel data of the second divided exposure image data stored in the second memory 61b as described above, drawing point data is acquired and each frame data is created.

  The frame data creation unit 62 creates all frame data by sequentially reading out pixel data from the first memory 61a and the second memory 62b as described above.

  In addition, as described above, a plurality of pixel data read from the first memory 61a and the second memory 62b may be directly acquired as drawing point data to create frame data. The acquired drawing point data may be subjected to predetermined processing, for example, various adjustment processing for improving image quality, and the frame data may be generated.

  Then, the frame data creation unit 65 sequentially outputs the respective frame data created as described above to the DMD controller 66, and the DMD controller 66 generates a control signal corresponding to the input frame data. The frame data as described above is created for each DMD 36 of each exposure head 30, and a control signal is generated for each DMD 36.

  Then, a control signal for each exposure head 30 is generated as described above, and a stage drive control signal is output from the overall control unit 60 to the stage drive device 80. The stage drive device 80 responds to the stage drive control signal. The moving stage 14 is moved along the guide 20 in the stage moving direction at a desired speed. When the leading end of the photosensitive material 12 is detected by the sensor 26 attached to the gate 22 when the moving stage 14 passes under the gate 22, a control signal is output from the DMD controller 65 to the DMD 36 of each exposure head 30. Then, drawing for each exposure head 30 is started.

  Then, the photosensitive material 12 moves at a constant speed together with the moving stage 14, and the photosensitive material 12 is scanned in the direction opposite to the stage moving direction by the scanner 24, and a strip-shaped exposed region 34 is formed for each exposure head 30.

  As described above, when the scanning of the photosensitive material 12 by the scanner 24 is completed and the rear end of the photosensitive material 12 is detected by the sensor 26, the moving stage 14 is gated along the guide 20 by the stage driving device 72. After returning to the origin on the most upstream side of 22 and installing a new photosensitive material 12, it again moves along the guide 20 from the upstream side of the gate 22 to the downstream side at a constant speed.

  According to the exposure apparatus using the first embodiment of the present invention, the pixel data of the frame data is stored in the first divided exposure image data stored in the first memory 61a and the second memory 61b. When the data belongs to the second divided exposure image data, dummy regions are provided in the first and second memories 61a and 61b as described above, and the first memory 61a has a first area. After reading the divided exposure image data, the dummy area is read to obtain the first dummy drawing point data group, and the second memory 61b reads the dummy area and then reads the second divided exposure image data. The second dummy drawing point data group is acquired and the frame data is created based on the first dummy drawing point data group and the second dummy drawing point data group. Therefore, by performing simple control of simply reading out data from two memories without performing complicated control as in the prior art, each pixel data stored across the two memories is obtained and a frame is obtained. Data can be created. In the first embodiment, the first divided exposure image data and the second divided exposure image data together with the dummy area composed of 0 data are respectively stored in the first memory 61a and the second memory 61b. However, it is not always necessary to provide a storage area consisting of 0 data, and a predetermined storage area (clear area) consisting of other pixel data may be provided. In that case, for example, for each of the first drawing point data group and each second drawing point data group sequentially read from the first memory 61a and the second memory 61b, the first divided exposure is performed. The pixel data read from the image data and the second divided exposure image data is valid, and the pixel data read from the predetermined storage area is subjected to a masking process that is forced to 0, The frame data may be acquired by calculating the logical sum of the first drawing point data group and the second drawing point data group that have been subjected to the masking process. In addition, what is necessary is just to set the mask for performing the said mask process for every 1st drawing point data and every 2nd drawing point data. Then, for example, the number of frame data to be read out is counted, masks corresponding to the counted number are sequentially selected, and the first drawing point data group and the second drawing point data group are selected using the selected mask. Mask processing may be performed sequentially.

  In the first embodiment, the exposure target image exposed to the photosensitive material 12 is divided in the scanning direction, and the first divided exposure image data and the second divided exposure image data corresponding to the divided partial exposure target image are divided. The method for creating frame data when the divided exposure image data is stored in the two memories has been described. However, the method is not limited to the case of dividing in the scanning direction. Even when the first divided exposure image data and the second divided exposure image data corresponding to the divided partial exposure target images are stored in two memories, the frame data generation method of the present invention can be used. it can. Even in such a case, in two memories in which adjacent divided exposure image data is stored, a predetermined storage area such as a dummy area is provided at the boundary between the adjacent divided exposure image data, and pixel data belonging to the frame data is When each of the adjacent divided image data belongs, the predetermined storage area is read after reading the one divided image data from the memory in which one of the two divided exposure image data is stored. The first drawing point data group is acquired, and after reading the predetermined storage area from the memory in which the other divided image data is stored, the other divided image data is read to obtain the second drawing point data group. The frame data is obtained in the same manner as described above based on the first drawing point data group and the second drawing point data group. It may be set to.

  Next, an exposure apparatus using the second embodiment of the frame data creation method and apparatus of the present invention will be described in detail.

  An exposure apparatus using the second embodiment of the present invention has substantially the same configuration as the exposure apparatus using the first embodiment, but the exposure apparatus using the first embodiment is the same as the exposure apparatus using the first embodiment. The data stored in the first memory 61a and the second memory 61b and the reading method are different.

  In the exposure apparatus using the second embodiment, as shown in FIG. 14, the first divided exposure image data is stored in the first memory 61a, and the second divided exposure is stored in the second memory 61b. Image data and partial exposure image data which is a part of the first divided exposure image data are stored. This partial exposure image data is the first divided exposure image data on the downstream side of the first divided exposure image data.

  More specifically, for example, pixel data stored in the storage area between the row Ls and the row Le shown in FIG. 15 is read as partial exposure image data, and the read partial exposure image data is the second exposure image data. Is stored in the storage area immediately before the storage area in which the second divided exposure image data is stored. The row Le is the last row in the storage area in which the first divided area image data is stored in the first memory 61a.

  Then, the frame data creation unit 62 of the second embodiment first determines that the pixel data of the read frame data belongs to the first divided exposure image data stored in the first memory 61a. As in the first embodiment, each frame data is created by sequentially reading out the pixel data of the first divided exposure image data stored in the first memory 61a.

  Then, after the last pixel data corresponding to the circle 24 is read from the first divided exposure image data, the frame data creation unit 62 reads the pixel data of the circles 1 to 24 in FIG. After that, reading of the partial exposure image data of the second memory 61b is started.

  Specifically, the frame data creation unit 62 reads out the last pixel data corresponding to the circle 24 as described above, and then, as shown in FIG. 16, the partial exposure image data stored in the second memory 61b. After the pixel data corresponding to circles 1 to 23 are read out, the pixel data corresponding to the circles 24 in the second divided exposure image data is read out. At this time, as shown in FIG. 16, reading of the frame data is started from the second line of the partial exposure image data. That is, the frame data read at this time is the frame data next to the last frame data read from the first memory 61a.

  Then, each time the circles 1 to 24 are sequentially shifted by one pixel in the scanning direction, the pixel data corresponding to the circles 1 to 24 are sequentially read out from the partial exposure image data and the second divided exposure image data, respectively. Frame data is created.

  The exposure operation after the frame data is created is the same as that of the exposure apparatus using the first embodiment.

  According to the exposure apparatus using the second embodiment of the present invention, the pixel data of the frame data is stored in the first divided exposure image data stored in the first memory 61a and the second memory 61b. If the image data belongs to the second divided exposure image data, the partial exposure image data in the first divided exposure image data is stored in the second memory 61b as described above, and the second memory 61b. Since the second divided exposure image data is read out after reading out the partial exposure image data in FIG. 1, the partial exposure image stored in the second memory 61b is simply stored without performing complicated control as in the prior art. By performing simple control of reading out the data and the divided exposure image data, the pixel data stored across the two memories are respectively acquired to obtain the frame data It is possible to create.

  In the above-described embodiment, the exposure apparatus including the DMD as the spatial light modulation element has been described. However, in addition to the reflective spatial light modulation element, a transmissive spatial light modulation element can also be used.

  In the above embodiment, a so-called flood bed type exposure apparatus has been described as an example. However, a so-called outer drum type exposure apparatus having a drum around which a photosensitive material is wound may be used.

  Further, the photosensitive material 12 to be exposed in the above embodiment may be a printed circuit board or a display filter. The shape of the photosensitive material 12 may be a sheet shape or a long shape (flexible substrate or the like).

  The drawing method and apparatus according to the present invention can also be applied to drawing control in an ink jet printer or the like. For example, the drawing point by ink ejection can be controlled by the same method as in the present invention. In other words, the drawing element in the present invention can be considered by replacing it with an element that strikes a drawing point by ink ejection or the like.

The perspective view which shows the external appearance of the exposure apparatus using 1st Embodiment of the frame data preparation method and apparatus of this invention 1 is a perspective view showing the configuration of a scanner of the exposure apparatus shown in FIG. A plan view showing exposed areas formed on the photosensitive material (A), a diagram showing an arrangement of exposure areas by each exposure head (B) 1 is a partially enlarged view showing the configuration of the DMD of the exposure apparatus of FIG. A perspective view for explaining the operation of the DMD The figure which shows the exposure locus | trajectory of each micromirror of DMD 1 is a block diagram showing an electrical configuration of the exposure apparatus shown in FIG. The figure which shows the structure of the image data storage means shown in FIG. Diagram for explaining the operation of the frame data creation unit Diagram for explaining the operation of the frame data creation unit Diagram for explaining the operation of the frame data creation unit Diagram for explaining the operation of the frame data creation unit Diagram for explaining the operation of the frame data creation unit The figure for demonstrating the effect | action of 2nd Embodiment of the frame data creation method and apparatus of this invention The figure for demonstrating the effect | action of 2nd Embodiment of the frame data creation method and apparatus of this invention The figure for demonstrating the effect | action of 2nd Embodiment of the frame data creation method and apparatus of this invention

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Exposure apparatus 12 Photosensitive material 14 Moving stage 24 Scanner 30 Exposure head 36 DMD (drawing point formation part)
36a Micromirror array (drawing element group)
56 SRAM array 58 Micromirror (drawing element)
60 Overall control unit (image formation control means)
61a First memory (storage unit)
61b Second memory (storage unit)
60a Storage control unit 62 Frame data creation unit 80 Stage drive device (moving means)

Claims (8)

A drawing point forming unit having a plurality of drawing elements for forming drawing points on the drawing surface is moved relative to the drawing surface in a predetermined scanning direction, and the drawing is performed in accordance with the movement in the scanning direction. The frame data composed of a plurality of drawing point data corresponding to the elements is sequentially input to the drawing point forming unit, and the drawing point group is sequentially formed in time series to form the image on the drawing surface. A frame data creation method for creating frame data, wherein the frame data is created by acquiring the plurality of drawing point data based on image data representing the image,
Generating a plurality of divided image data corresponding to a plurality of divided images obtained by dividing the image;
Each of the divided image data is stored in a plurality of storage units,
In each of the two storage units in which the adjacent divided image data is stored, a predetermined storage area is provided at each boundary portion of the adjacent divided image data,
When each drawing point data of the frame data belongs to the adjacent divided image data,
After reading the one divided image data from the storage unit in which one of the two storage units is stored, the predetermined storage area is read to obtain the first drawing point data group, and After reading the predetermined storage area from the storage unit storing the other divided image data, the second divided image data is read to obtain a second drawing point data group,
A frame data creation method, wherein the frame data is created based on the first drawing point data group and the second drawing point data group. A drawing point forming unit having a plurality of drawing elements for forming drawing points on the drawing surface is moved relative to the drawing surface in a predetermined scanning direction, and the drawing is performed in accordance with the movement in the scanning direction. The frame data composed of a plurality of drawing point data corresponding to the elements is sequentially input to the drawing point forming unit, and the drawing point group is sequentially formed in time series to form the image on the drawing surface. A frame data creation method for creating frame data, wherein the frame data is created by acquiring the plurality of drawing point data based on image data representing the image,
Generating a plurality of divided image data corresponding to a plurality of divided images obtained by dividing the image;
Each of the divided image data is stored in a plurality of storage units,
In each of the two storage units in which the adjacent divided image data is stored, a clear area is provided at each boundary portion of the adjacent divided image data,
When each drawing point data of the frame data belongs to the adjacent divided image data,
A frame data creation method, wherein the frame data is created based on a logical sum of data read from each of the storage units. A drawing point forming unit having a plurality of drawing elements for forming drawing points on the drawing surface is moved relative to the drawing surface in a predetermined scanning direction, and the drawing is performed in accordance with the movement in the scanning direction. The frame data composed of a plurality of drawing point data corresponding to the elements is sequentially input to the drawing point forming unit, and the drawing point group is sequentially formed in time series to form the image on the drawing surface. A frame data creation method for creating frame data, wherein the frame data is created by acquiring the plurality of drawing point data based on image data representing the image,
Generating a plurality of divided image data corresponding to a plurality of divided images obtained by dividing the image in the scanning direction;
Each of the divided image data is stored in a plurality of storage units, and
A partial image data on the downstream side in the upstream divided image data of the adjacent divided image data is stored in a storage unit in which the downstream divided image data is stored,
When each drawing point data of the frame data belongs to the adjacent divided image data,
A frame data creation method, wherein the frame data is created by reading the partial image data from the storage unit storing the downstream divided image data and then reading the downstream divided image data. Each frame data is acquired using the frame data creation method according to any one of claims 1 to 3,
The drawing point forming unit is moved relative to the drawing surface in the scanning direction, and each frame data is sequentially input to the drawing point forming unit in accordance with the movement in the scanning direction. A drawing method comprising forming a group in time series and forming the image on the drawing surface. A drawing point forming unit having a plurality of drawing elements for forming drawing points on the drawing surface is moved relative to the drawing surface in a predetermined scanning direction, and the drawing is performed in accordance with the movement in the scanning direction. The frame data composed of a plurality of drawing point data corresponding to the elements is sequentially input to the drawing point forming unit, and the drawing point group is sequentially formed in time series to form the image on the drawing surface. A frame data creation device for creating frame data, comprising: a frame data creation unit that obtains the plurality of drawing point data based on image data representing the image and creates the frame data ,
A plurality of storage units respectively storing a plurality of divided image data corresponding to a plurality of divided images obtained by dividing the image;
A storage control unit that respectively provides a predetermined storage area at a boundary part of the adjacent divided image data in the two storage units in which the adjacent divided image data is stored;
In the frame data creation unit, when each drawing point data of the frame data belongs to the adjacent divided image data, in the storage unit in which one of the two storage units is stored, After reading the one divided image data, the predetermined storage area is read to obtain the first drawing point data group, and the predetermined storage area is read in the storage unit storing the other divided image data. After that, the other divided image data is read to obtain a second drawing point data group, and the frame data is created based on the first drawing point data group and the second drawing point data group. A frame data creation device characterized by being. A drawing point forming unit having a plurality of drawing elements for forming drawing points on the drawing surface is moved relative to the drawing surface in a predetermined scanning direction, and the drawing is performed in accordance with the movement in the scanning direction. The frame data composed of a plurality of drawing point data corresponding to the elements is sequentially input to the drawing point forming unit, and the drawing point group is sequentially formed in time series to form the image on the drawing surface. A frame data creation device for creating frame data, comprising: a frame data creation unit that obtains the plurality of drawing point data based on image data representing the image and creates the frame data ,
A plurality of storage units respectively storing a plurality of divided image data corresponding to a plurality of divided images obtained by dividing the image;
A storage control unit that provides a clear area at each boundary portion of the adjacent divided image data in the two storage units in which the adjacent divided image data is stored;
The frame data creation unit creates the frame data based on the logical sum of the data read from each of the storage units when each drawing point data of the frame data belongs to the adjacent divided image data. A frame data creation device characterized by that. A drawing point forming unit having a plurality of drawing elements for forming drawing points on the drawing surface is moved relative to the drawing surface in a predetermined scanning direction, and the drawing is performed in accordance with the movement in the scanning direction. The frame data composed of a plurality of drawing point data corresponding to the elements is sequentially input to the drawing point forming unit, and the drawing point group is sequentially formed in time series to form the image on the drawing surface. A frame data creation device for creating frame data, comprising: a frame data creation unit that obtains the plurality of drawing point data based on image data representing the image and creates the frame data ,
A plurality of storage units respectively storing a plurality of divided image data corresponding to a plurality of divided images obtained by dividing the image in the scanning direction;
A storage control unit that stores a part of the downstream partial image data in the upstream divided image data of the adjacent divided image data in a storage unit in which the downstream divided image data is stored;
The frame data creation unit reads the partial image data from the storage unit storing the downstream divided image data when each drawing point data of the frame data belongs to the adjacent divided image data. After that, the frame data is created by reading out the downstream divided image data and creating the frame data. The frame data creation device according to any one of claims 5 to 7,
A drawing point forming unit that forms a drawing point group including a plurality of drawing points on the drawing surface based on the input frame data;
Moving means for moving the drawing point forming portion relative to the drawing surface in a predetermined scanning direction;
The frame data created in the frame data creation device is sequentially input to the drawing point forming unit according to the movement in the scanning direction by the moving means, and the drawing point group is sequentially formed in the drawing point forming unit in time series. An image forming apparatus comprising: an image forming control unit configured to form the predetermined image on the drawing surface.

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