JP2006260767A - Method for manufacturing head slider support - Google Patents

Abstract

The present invention relates to a method for manufacturing a head slider support, and an object thereof is to stably form a wiring pattern.
A wiring pattern of a load beam is formed by performing a pattern forming step. In the pattern forming step 110, photosensitive polyimide is applied on a stainless steel plate, an insulating film is formed by a photolithography technique, a copper thin film is formed thereon by plating or the like, and the copper thin film is made of, for example, copper by a photolithography technique. Next, a photosensitive polyimide is applied again, and a protective film and an auxiliary film are formed by a photolithography technique.
[Selection] Figure 16

Description

  The present invention relates to a method of manufacturing a head slider support constituting a part of a magnetic head support mechanism in a magnetic disk device.

  A magnetic head slider mounted with a magnetic head is attached to the tip of the load beam, and is in a floating state with respect to the magnetic disk during recording and reproduction.

  In recent years, improvement in HDI (Head Disc Interface) characteristics, which is a kind of reliability of magnetic disk devices, has been demanded.

  For this purpose, it is effective to reduce the size of the magnetic head slider and to reduce the spring load for urging the slider toward the magnetic disk.

  When the magnetic head slider is reduced in size, the following matters occur.

  (1) As the slider becomes smaller, the size of the support spring that holds it must also be reduced. This is in order to maintain the following characteristic of the head with respect to the waviness of the disk and to maintain the flying stability of the head.

  When the spring load is reduced, the following matters occur.

   (2) The flying rigidity of the head is reduced by reducing the spring load.

  In addition, the assembly error increases due to the small parts such as the slider and the support spring.

  For this reason, the head slider support that supports the magnetic head slider as a part of the magnetic head support mechanism is required to have a configuration that can sufficiently ensure the flying stability of the magnetic head slider.

  In general, the magnetic head support mechanism includes a load beam, a gimbal fixed to the load beam, and a magnetic head slider fixed to the gimbal.

  In this configuration, as the part size is reduced, assembly (positioning) becomes difficult. When there is an assembly error, the magnetic head slider floats unbalanced (inclined obliquely). This not only impairs the reliability of the flying head, but also adversely affects the R / W characteristics, and consequently lowers the reliability of the magnetic disk device.

  Therefore, in order to eliminate the cause of unbalanced flying of the slider due to poor assembly (positioning) accuracy of the head support mechanism, a configuration in which a support spring (conventional load beam and gimbal) is integrated and assembly is not required is disclosed in JP-A-3 -189976.

  FIG. 33 shows the magnetic head support mechanism 1 disclosed in the above publication.

  Reference numeral 2 denotes a magnetic disk, 3 denotes an actuator unit, and 4 denotes a load beam (also referred to as a flexure).

  Reference numeral 5 denotes a gimbal portion, which is formed on the load beam 4 itself by forming substantially U-shaped openings (through holes) 6 and 7 in the load beam 4.

  The gimbal portion 5 includes a double-supported beam 8 extending in a direction crossing the load beam 4 and tongue portions 9 and 10 projecting in a tongue shape on both sides from the center of the beam 8.

  The back surface of the magnetic head slider 11 is grooved in the width direction of the load beam, and is fixed over the tongue portions 9 and 10.

The magnetic head slider 11 rotates in the pitching direction as indicated by an arrow 12 as the beam 8 is twisted, and rotates in the rolling direction as indicated by an arrow 13 when the beam 8 is bent.
JP-A-3-189976

  In order to ensure the flying stability of a small magnetic head slider, it is necessary to reduce the rotational rigidity of the gimbal portion.

  Moreover, since the load beam 4 requires rigidity, the thickness t of the load beam 4 cannot be reduced.

  In order to reduce the rotational rigidity of the gimbal portion 5 having the above structure without reducing the thickness t of the load beam 4, the length l of the beam 8 must be increased.

  Increasing the length l of the beam 8 causes the following problems.

  (1) The resonance point of the bending and torsional vibration of the beam 8 is greatly lowered. Thereby, the flying height of the magnetic head slider 11 is likely to fluctuate.

  (2) The width W of the load beam 4 is widened, and the resonance point of vibration of the load beam 4 itself is lowered. As a result, the flying of the magnetic head slider 11 tends to become unstable.

  That is, in the case of the conventional support spring structure in which the load beam and the gimbal are integrated, it is very difficult to realize a structure in which only the rotational rigidity is reduced without dropping the resonance point of the gimbal portion.

  Further, due to the decrease in flying rigidity accompanying the downsizing of the slider and the reduction of the spring load, the influence of the rigidity of the lead wire connected to the head cannot be ignored. That is, due to the influence of the rigidity of the lead wire on the slider, the slider is inclined and floats depending on how the rigidity is applied. In particular, when a magnetoresistive head (MR head) is used as a reproducing head, four lead wires that are twice as large as a recording / reproducing head are required in order to be combined with an inductive recording head. It becomes more susceptible to the influence of lead wire rigidity. This not only impairs the reliability of the flying head, but also adversely affects the R / W characteristics, thereby reducing the reliability of the magnetic disk device.

  SUMMARY An advantage of some aspects of the invention is that it provides a method for manufacturing a head slider support that achieves improved flying stability of a magnetic head slider.

The invention of claim 1 is a method of manufacturing a head slider support having a wiring pattern on a sheet-like head slider support,
Forming an insulating layer on the head slider support;
A conductive layer is formed on the insulating layer and patterned to form a wiring pattern,
On the head slider support, a head slider having a first terminal portion on the end face is mounted so that the first terminal portion faces the second terminal portion at the end of the wiring pattern at a right angle,
A conductor ball is press-contacted so as to straddle between the first terminal portion and the second terminal portion.

  According to the first aspect of the present invention, an insulating layer is formed on the head slider support, and a conductive layer is formed on the insulating layer and patterned, so that a fine wiring pattern can be stably formed. It becomes.

  The best mode for carrying out the invention will be described below.

  FIG. 1 shows the magnetic head support mechanism 20 in an inverted state. The magnetic head support mechanism 20 has a load beam 21 according to the first embodiment of the present invention.

  An example in which this magnetic head support mechanism 20 is applied to a 3.5-inch type magnetic disk device 220 is shown in FIG.

  The magnetic disk device 220 has a structure in which a magnetic disk 222 having a diameter of 3.5 inches, a head positioning actuator 223, and the like are incorporated in an enclosure 221.

  A load beam 21 made of stainless steel is fixed to the arm portion 22 of the actuator.

  The base portion side of the load beam 21 is an elastic portion 23 that is R-bent, and the distal end side of the elastic portion 23 is a rigid portion 24. The elastic portion 23 applies a load in a direction to contact the magnetic disk 221 to a magnetic head slider 35 described later. The thickness of the load beam is uniform as a whole and is about 1/3 of the load beam of the general-purpose 3380 type (IBM) head support mechanism, for example, about 25 μm.

  Here, the width W1 of the load beam 21 is as small as possible (4 mm or less is desirable). This is because the resonance point of vibration of the load beam 21 is not lowered unnecessarily.

  Reference numeral 25 denotes a gimbal portion which is formed on the load beam 21 itself.

  The gimbal portion 25 is formed with a pair of U-shaped openings 26 and 27 in the load beam 21 so as to face each other in the longitudinal direction of the load beam 21, and slit-like openings 28 and 27 along both sides of the load beam 21. 29 is formed so as to be left behind.

  The gimbal portion 25 includes a magnetic head slider fixing portion 30, a pair of first beam portions 31 and 32, and a pair of second beam portions 33 and 34.

  The magnetic head slider fixing unit 30 is large enough to fix the magnetic head slider 35, for example, a dimension a corresponding to the planar outer dimensions (a = 2 mm, b = 1.6 mm) of the magnetic head slider 35. Xb. However, if the adhesive strength is sufficient, a size smaller than this is acceptable.

  As the magnetic head slider 35, it is desirable to use a slider having a light load structure, for example, a slider disclosed in Japanese Patent Laid-Open No. 4-228157 by the present applicant. The back surface of the slider opposite to the air bearing surface is a flat surface, and the back surface is bonded and fixed to the fixing portion 30 with an adhesive. In this case, the centers of the slider and the fixed portion are made to coincide.

  The first beam portions 31 and 32 pass through the center (also the center of the slider) 36 of the fixed portion 30 and cross the fixed portion 30 perpendicular to the load beam longitudinal center line 37 (in the load beam width direction). A line) extends outward from both sides of the fixed portion 30.

  The length of the first beam portions 31 and 32 is l1.

  The second beam portions 33, 34 respectively extend from the tips of the first beam portions 31, 32 to the both sides perpendicular to the first beam portions 31, 32 in parallel with the line 37. On the side, points 40, 41, 42, and 43 are connected to a portion of the load beam 21 around the gimbal portion 25. In other words, the second beam portions 33 and 34 extend from the portions 40 to 43 around the gimbal portion 25 in the load beam 21.

  The second beam portions 33 and 34 have a doubly-supported beam shape, and the length from the central portion where both ends of the first beam portions 31 and 32 are connected to both ends is l2.

  The second beam portion 33 and the first beam portion 31 constitute a T-shaped beam 39A. Similarly, the second beam portion 34 and the first beam portion 32 constitute a T-shaped beam 39B. And the whole forms an H-shaped beam.

  The fixed portion 30, the first beam portions 31 and 32, and the second beam portions 33 and 34 are all formed by a part of the load beam 21.

  Here, the length l1 of the first beam portions 31 and 32 is restricted by the width W1 of the load beam 21. Here, if the width W1 is increased, the bending and torsional resonance points of the load beam 21 are lowered, and the flying characteristics of the slider are deteriorated. Therefore, the width W1 cannot be increased. However, in the present embodiment, the length 2 × 12 of the second beam portions 33 and 34 can be increased without being restricted by the width W1 of the load beam 21.

  Therefore, the second beam portions 33 and 34 are formed long, and the relationship between the dimensions l2 and l1 is l2> l1.

  The T-shape has a flat shape in which the length of the arm portion is longer than the length of the leg portion.

  Considering the case where undulation or dust is attached to the rotating magnetic disk, the magnetic head slider 35 has the T-shaped first beam portions 31 and 32 and the second beam portions 33 and 34. It turns in the pitching direction as shown by the arrow 44 with bending. At this time, the first beam portions 31 and 32 of the gimbal are accompanied by a torsional deformation, and the second beam portions 33 and 34 are further accompanied by a bending deformation.

  Further, as shown by an arrow 45, the lens also rotates in the rolling direction. At this time, the first beam portions 31 and 32 of the gimbal are subjected to bending deformations in opposite directions, and the second beam portions 33 and 34 are also subjected to bending deformations in opposite directions.

  The resonance mode of the primary bending is shown in FIG. The deformation at the elastic portion of the load beam root portion is seen, and at the same time, the first beam portions 31 and 32 and the second beam portions 33 and 34 of the gimbal portion are both deformed with bending deformation in the same direction. I understand.

  The resonance mode of the primary torsion is shown in FIG. The elastic part of the load beam root part is twisted and deformed with different left and right heights. The gimbal portion is deformed so that the beam on the right side in the figure is convex upward, and the beam on the opposite side is deformed so as to be convex downward, indicating a torsion mode. Here, for example, if the relationship between the dimensions l2 and l1 is designed so that l2 / l1 is 3 to 4 times, the rotational rigidity in both the pitching and rolling directions of the slider becomes sufficiently soft.

  The magnetic head slider 35 includes a composite magnetic head 48 in which an MR head for reproduction and an inductive head for recording are integrated on an end face 47 on the rear side in the relative scanning direction 46 with respect to the magnetic disk 221, and Four terminal portions 100A to 100D are formed.

  As shown in FIGS. 5 and 6, one ends of lead wires 15 </ b> A to 15 </ b> D having a diameter of 30 μm are connected to the terminal portions 100 </ b> A to 100 </ b> D.

  The four lead wires 15A to 15D connected to the terminal portions 100A to 100D are routed to the side opposite to the side on which the magnetic head slider 35 is fixed. And fixed by an adhesive 16.

  Thereafter, the lead wires 15 </ b> A to 15 </ b> D extend toward the base side of the load beam 21 along the longitudinal center line 37 of the load beam 21, and are fixed by the adhesive 16 at two locations on the load beam 21.

  Reference numeral 17-1 denotes a first fixed point, 17-2 denotes a second fixed point, and 17-3 denotes a third fixed point.

  Since the first fixed point 17-1 moves integrally with the magnetic head slider 35, it is necessary to consider the rigidity of the lead wire that is drawn from the terminal portions 100A to 100D and reaches the first fixed point 17-1. No extra length is required in the lead wire, and no extra length is provided.

  Further, the distance from the first fixed point 17-1 to the second fixed point 17-2 is long, and the rigidity of the lead wire in this part hardly affects the rotational rigidity of the gimbal.

The magnetic head support mechanism 20 configured as described above has the following features.
(1) In particular, it has a T-shaped beam portion, and the rotational rigidity of the gimbal portion 25 is considerably small due to the characteristics of the beam shape.
(2) Since the gimbal portion 25 is supported at the four locations 40 to 43, the resonance point of vibration of the gimbal portion 25 is high even if the second beam portions 33 and 34 are long.
(3) Since the width W1 of the tip of the load beam 21 can be reduced, the resonance point of vibration of the load beam 21 is high.
(4) Due to the above (1), (2), (3), the flying stability of the magnetic head slider 35 is good.
(5) Since the length 11 of the first beam portions 31 and 32 is short and is formed in the same plane, the strength against the force received at the time of contact start / stop is strong, and the first beam portions 31 and 32 are shear fractured. Hard to do.
(6) The rigidity of the lead wires 15A to 15D does not affect the rotational rigidity of the gimbal portion 25.

  As described above, the gimbal portion 25 has an integral gimbal structure having a pair of T-shaped beams (overall H-shaped beams) symmetrically with respect to the center of the slider fixing portion. A high resonance point is realized. Specifically, the rotational rigidity is, for example, about 1/3 or less of the above-described 3380 type head support mechanism, but the resonance point is approximately the same as that of the head support mechanism.

  As a result, even when a small slider with low flying rigidity is mounted, the slider can be stably levitated.

表１，表２は２ｍｍの長さのスライダを搭載した本実施例のヘッド支持機構と、従来から用いられている３３８０タイプのヘッド支持機構（３．２ｍｍの長さのスライダを搭載）との特性比較を示す。

Tables 1 and 2 show the head support mechanism of the present embodiment on which a slider having a length of 2 mm is mounted, and the 3380 type head support mechanism (with a slider having a length of 3.2 mm) which has been conventionally used A characteristic comparison is shown.

  In order to match the equivalent mass ratio (support spring equivalent mass / slider mass), the overall length of the support mechanism of this embodiment is shortened (10 mm), which is approximately ½ or less of the 3380 type. The thickness of the load beam (25 μm) is almost 1/3 of the 3380 type.

  Table 1 shows comparative data obtained by simulating the pitch and roll rigidity of the gimbal portion, the vertical rigidity of the load beam, the pitch rigidity and roll rigidity of the 3380 type gimbal, and the vertical rigidity of the load beam by a computer in this embodiment.

  From this table, it can be seen that the rotational rigidity of 1/3 or less of the conventional 3380 type gimbal can be obtained by optimally designing the groove width and length of the gimbal portion.

  Table 2 shows a comparison of the resonance frequencies of the two by computer simulation, and similar data are obtained.

  As described above, it can be seen that the magnetic head support mechanism of this embodiment has characteristics of low rigidity and high resonance frequency.

  Next, other embodiments will be described. In the drawings, the same reference numerals are given to the portions corresponding to the components shown in FIG.

  The magnetic head support mechanism 50 in FIG. 7 has a gimbal portion 51.

  The gimbal part 51 has a direction in which the gimbal part 25 of FIG.

  T-shaped beams 52 and 53 are arranged in the longitudinal direction of the load beam 21.

  8 has a gimbal portion 61. The magnetic head support mechanism 60 shown in FIG.

  An angle α of the second beam portions 33A and 34A with respect to the first beam portions 31 and 32 is an acute angle.

  Accordingly, the length 2 × l2a of the second beam portions 33A and 34A is longer than the length 2 × l2 of the second beam portions 33 and 34 in FIG. 1 without increasing the width W1 of the load beam 21. .

  In addition, the width of the tip of the load beam portion can be reduced.

  Thereby, the rotational rigidity of the gimbal part 61 is low compared with the gimbal part 25 of FIG.

  Therefore, the magnetic head slider 35 floats more stably than the apparatus of FIG.

  The magnetic head support mechanism 70 in FIG. 9 has a gimbal portion 71.

  The magnetic head slider 35A has flanges 72 and 73 on both sides.

  The magnetic head slider fixing portion 30A of the gimbal portion 71 has an opening 74 having a size corresponding to the magnetic head slider 35A and has a frame shape. Reference numeral 76 denotes a frame portion.

  As shown in FIG. 9, the magnetic head slider 35 </ b> A is fitted into the opening 74, and the flange portions 72 and 73 are bonded to the frame portion 76 (75 indicates the bonding portion), and is fixed to the fixing portion 30 </ b> A. It is.

  The center of gravity G of the magnetic head slider 35A is positioned in the height direction, generally on the surface of the load beam 21, as shown in FIG.

  For this reason, the magnetic head slider 35A is moved with a force applied to the position of the center of gravity G during seek. For this reason, unnecessary rotating force around the center of gravity G does not occur in the magnetic head slider 35A, that is, the mass unbalance of the magnetic head slider 35A is reduced, and the magnetic head slider 35A is kept stable flying during a seek operation or the like. .

  In addition, the height of the magnetic head assembly is reduced. As a result, the stacking interval of the magnetic disks can be reduced, and more disks can be mounted per unit height, so that the volume storage density of the apparatus and thus the storage capacity can be increased.

  In the magnetic head support mechanism 80 of FIG. 11, the magnetic head slider 35 </ b> B has a flange 81 over the entire circumference.

  The magnetic head slider 35B is fitted into the opening 74, and the flange 81 is fixed by being bonded to the magnetic head slider fixing portion 30A.

  That is, unlike the fourth embodiment, the magnetic head slider 35B is bonded and fixed to the fixed portion 30A on the entire circumference. For this reason, adhesive force increases and reliability improves.

  FIG. 12 shows a magnetic head support mechanism 90.

  As shown in FIG. 13, this mechanism 90 eliminates the influence of the rigidity of the lead wire that affects the flying of the low flying rigidity slider. For example, when four lead wires are connected between the slider and the load beam (see FIG. 5), if each lead wire has a diameter of 30 μm and a lead wire extra length (free length) of 1 mm, The rotational rigidity of the gimbal portion is about 5 times that in the case where no lead wire is wired, which impairs the flying stability of the slider.

  Reference numerals 91, 92, 93, and 94 are copper wiring patterns obtained by patterning, for example, a copper thin film formed by plating by photolithography, and the center of the lower surface of the load beam 21 extends in the longitudinal direction of the load beam 21. The thickness is about 5 μm and the width is about 50 μm. The thickness and width are determined by the resistance value of the conductor pattern and the capacity of the load beam.

  Reference numerals 95 </ b> A to 95 </ b> D denote copper terminal portions, which are provided on the base side of the load beam 21.

  Reference numerals 96 </ b> A to 96 </ b> D denote copper terminal portions that are provided at the end portion 30 a of the magnetic head slider fixing portion 30 of the gimbal portion 25.

  The terminal portions 95A to 95D and 96A to 96D are, for example, plated with Au, thereby preventing Cu from being exposed and improving bonding characteristics.

  One ends of the wiring patterns 91, 92, 93, and 94 extend to the terminal portions 95A, 95B, 95C, and 95D, respectively.

  The other end sides of the two wiring patterns 91 and 92, which are half of the four wiring patterns 91 to 94, extend along the second beam portion 33A and the first beam portion 31, and are connected to the terminals. 96A, 96B.

  The other end sides of the remaining two wiring patterns 93 and 94 extend along the second beam portion 34A and the first beam portion 32 and reach the terminals 96C and 96D.

  As shown in FIG. 14, the wiring patterns 91, 92, 93, 94 are insulated from the load beam 21 by an insulating film 97, and the surface is covered with a protective film 98.

  Both the insulating film 97 and the protective film 98 are made of photosensitive polyimide, and are formed by coating. A thickness of about 5 μm is sufficient. The insulating film 97 and the protective film 98 are patterned by a photolithography technique. The thickness of this insulating film is determined by the capacitance between the conductor pattern (made of Cu) and the load beam (made of Al).

  Polyimide has heat resistance that can withstand annealing described later. Moreover, since polyimide has photosensitivity, patterning is easy. Furthermore, since the polyimide films 97 and 98 have corrosion resistance, they are very reliable.

  The terminal portions 95A to 95D and 96A to 96D are not covered with the protective film 98 and are easily corroded. Therefore, in order to prevent corrosion, the surfaces of the terminals 95A to 95D and 96A to 96D are covered with an Au film (not shown) having a thickness of about 1 μm formed by plating or vapor deposition.

  As shown in FIG. 15, the magnetic head slider 35 is bonded and fixed to the fixed portion 30 with an adhesive, and the terminals of the magnetic head 48 formed on the terminal portions 96 </ b> A to 96 </ b> D and the end surface 47 of the magnetic head slider 35. The parts 100A to 100D are arranged at an angle of 90 ° and are connected by Au balls 101A to 101D, respectively.

  The Au balls 101A to 101D are formed by, for example, a gold ball bonder.

  Further, the terminal portions 96A to 96D and the terminal portions 100A to 100D are positioned as shown in FIG. 15 so as to be easily connected by Au balls 101A to 101D.

  The terminal portions 100A to 100D have an elongated shape in the height direction of the head slider 35 and are fixed to the head slider 35 and the fixing portion 30 so that the Au balls 101A to 101D are easily pressed. It arrange | positions so that the part 96A-96D may be opposed.

  Note that the wiring patterns 91 to 94 extend to the head slider 35 while bypassing the fixing hole 102C and the jig mounting holes 102B and 102B used when the load beam is screwed to the arm portion 22, respectively. Exist.

  In FIGS. 12 and 13, reference numerals 103A to 103D and 104A to 104D denote dummy patterns, which are formed symmetrically with the detour portions formed on the outer periphery of the jig mounting holes 102A and 102B in the wiring patterns 91 to 94. It is.

  The dummy patterns 103A to 103D and 104A to 104D are also provided with an insulating film 97 and a protective film 98 as in the wiring patterns 91 to 94.

  The dummy patterns 103A to 103D and 104A to 104D are provided to balance the mechanical strength in the width direction of the load beam 21.

  106 and 107 are auxiliary films, which are formed in a strip shape along the left and right ends of the load beam 21.

  The auxiliary films 106 and 107 are provided in order to receive a clamping force between this portion and the portions of the wiring patterns 91 to 94 when the load beam 21 is clamped during bending, which will be described later. That is, it is provided so that the clamping force is applied only to the portions of the wiring patterns 91 to 94 and the wiring patterns 91 to 94 are not damaged.

  In FIGS. 12 and 13, reference numeral 108 denotes a convex pattern, which has a function of preventing the adhesive from flowing out of the fixed portion when the slider is bonded, and the slider does not tilt depending on the thickness of the wiring pattern at the time of bonding. In other words, it is provided to have the same function as the dummy pattern, and is formed of the same plated copper thin film as the wiring pattern. A protective film 98 is also provided on the convex pattern 108. The adhesive is applied on the step portion between the wiring pattern and the convex pattern.

  The load beam 21 is manufactured by the process shown in FIG.

  First, the pattern formation process 110 is performed.

  Here, photosensitive polyimide is coated on a stainless steel plate, an insulating film 97 is formed by photolithography technology, a copper thin film is formed thereon by plating or the like, and this copper thin film is formed by, for example, copper wiring by photolithography technology. Patterns 91 to 94 are formed, and further, photosensitive polyimide is applied again, and a protective film 98 and auxiliary films 106 and 107 are formed by photolithography. The Cu film can be formed by vapor deposition in addition to the plating method. Polyimide is formed by spin coating by coating, and then patterned and etched. A thin film such as a Cr film can be interposed between the insulating film and the Cu film and between the Cu film and the protective film in order to improve adhesion and reliability.

  Next, an etching step 111 is performed to form openings 26 to 29 and holes 102 </ b> A to 102 </ b> C in a stainless steel plate to form the outer shape of the gimbal portion 25 and the load beam 21.

  As a result, as shown in FIG. 17, the load beams 202 before punching are arranged in a matrix on the stainless steel plate 201.

  Next, a bending step 112 is performed, and both sides of the stainless steel plate are bent to form the ribs 21a. This operation is performed by a press and can be performed for each stainless steel plate.

  Finally, an annealing step 113 is performed and heated to about 400 ° C. to remove internal stress.

  Furthermore, by performing slider bonding and Au bonding in this state, it is possible to completely automate the process and cost.

  The load beam 21 can be manufactured without an annealing process.

  In this case, as shown in FIG. 18, after performing the pattern forming step 110 and the etching step 111, slider bonding and Au bonding are performed in this state, and then the bending step 112 is performed to form the rib 21a. .

  As shown in FIG. 19, when the recording / reproducing inductive heads 48A and 48B are used as the magnetic head, the magnetic head slider 35 has two terminal portions 100A and 100B. As for the gimbal portion 25, the two wiring patterns 91A and 92A are provided so as to extend only to the beam portions 32 and 34A on one side of the gimbal portion, and 2 on the other beam portions 31 and 33A on the opposite side. The dummy patterns 210 and 211 of the book are formed so as to balance the left and right mechanical strength of the gimbal portion.

The magnetic head support mechanism 90 configured as described above has the following features.
(1) Since the arrangement patterns 91 to 94 are directly formed on the load beam 21, there is no routing of the lead wire, and the tube for passing the lead wire is not fixed to the load beam 21. The unbalance force due to the rigidity of the tube is completely eliminated from the slider. Accordingly, the flying of the magnetic head slider 35 is stabilized.
(2) By providing the dummy patterns 103A to 103D and 104A to 104D, the rotational rigidity of the load beam 21 does not have directionality. Thereby, the flying of the magnetic head slider 35 is stabilized.
(3) The crimping connection using the Au balls 101A to 101D makes it possible to automate the assembly.

  In each of the above embodiments, the beam portion may be curved.

  Next, an embodiment of a head support mechanism effective when applied to a smaller magnetic disk device will be described.

  FIG. 20 shows a state in which the magnetic head support mechanism 230 is turned upside down. The magnetic head support mechanism 230 has a load beam 235 according to the seventh embodiment of the present invention. An example in which the magnetic head support mechanism 230 is applied to a 1.8 inch type magnetic disk device 231 is shown in FIG.

  The magnetic disk device 231 includes a magnetic disk 233 having a diameter of 1.8 inches, a head positioning actuator 234 mounted with two sets of magnetic head support mechanisms, etc. in an enclosure 232 having the same outer dimensions as the IC memory card. Is built in and is considerably smaller than the magnetic disk device 220 of FIG.

  Along with the miniaturization of the magnetic disk device 231, the magnetic head slider 35C has been reduced in size, and its planar outer dimension a × b is 1.0 mm × 0.8 mm, which is the volume of the magnetic head slider 35 in FIG. As small as about 1/4.

  As described above, when the magnetic head slider 35C has a small size, the magnetic head support mechanism has a lower rigidity than the magnetic head support mechanism 30 shown in FIG. Are required to have considerably smaller properties.

  20, the load beam 235 is made of stainless steel, and the base side is fixed to the arm portion 236 of the actuator 234 (see FIG. 21).

  The load beam 235 has a width W2 of about 2 mm, a length L of about 9 mm, and a thickness t of about 25 μm. The load beam 235 is about 1/2 as small in volume as the load beam 21 in FIG.

  Since the size of the load beam 235 is small, a resonance frequency such as bending described later is high.

  The load beam 235 is a sheet-like piece, and is a flat thin plate piece that is not subjected to bending. For this reason, there is no problem of bending error that impairs the flying stability of the magnetic head slider.

  The load beam 235 includes a load beam main body portion 237 and a tip end side gimbal portion 238.

  The gimbal portion 238 is formed to remain in the load beam 235 itself by providing a substantially U-shaped opening (through hole) 239 in the load beam 235.

  The gimbal part 238 includes a magnetic head slider fixing part 240, a second beam part 241, a third beam part 242, a connecting part 243, and a first beam part 244.

  The magnetic head slider fixing part 240 has a size corresponding to the magnetic head slider 35C.

  The second and third beam portions 241 and 242 extend from both ends in the width direction of the tip of the load beam main body portion 237, and extend on both sides of the magnetic head slider fixing portion 240 toward the tip of the load beam. ing.

  The connecting portion 243 extends in the width direction of the load beam 235 and connects the distal end side of the first beam portion 241 and the distal end side of the first beam portion 242.

  The first beam portion 244 extends from the center of the connecting portion 243 toward the load beam main body portion 237 and has a magnetic head slider fixing portion 240 at the tip. Thus, since the magnetic head slider fixing part is connected to the load beam main body part via the first beam part, the connecting part, and the second and third beam parts, the rotational rigidity is small due to the bending of these beam parts. .

  The load beam main body 237 has holes 245, 246, 247 for attaching jigs and a pair of slits 248, 249.

  The openings 239, holes 245, 246, 247 and slits 248, 249 are formed by etching.

  In the load beam 235, as shown in FIG. 12, terminal portions 95A to 95D, 96A to 96D, and wiring patterns 91 to 94 are formed symmetrically with respect to the longitudinal center of the load beam 235. .

  The magnetic head slider 35C is bonded and fixed to the fixing portion 240, and the terminal portions 96A to 96D and the terminal portions 100A to 100D are connected by Au balls as shown in FIG.

  As shown in FIGS. 22A and 22B, the distal end side of the arm portion 236 is bent in an inverted V shape so as to be raised and lowered once, and has an obliquely upward portion 236a and an obliquely downward portion 236b. .

  The load beam 235 is fixed to the lower surface of the obliquely downward portion 236b of the arm portion 236, extends obliquely downward, and is inclined at an angle θ with respect to the horizontal.

  In the magnetic disk device 231, two sets of magnetic head support mechanisms 230 are arranged so as to sandwich one magnetic disk 233, and the magnetic head support mechanism 235 is shown in FIG. 23 when the magnetic disk 233 is not rotated. The magnetic head slider 35C is brought into contact with the magnetic disk 233. At this time, the load beam main body portion 237 is forcibly bent and elastically deformed, and the magnetic head is caused by the elastic force accumulated in the load beam main body portion 237. A load F1 for urging the slider toward the magnetic disk 233 is obtained.

  Since the arm portion 236 is bent in an inverted V shape, the tip end 236c of the arm portion 236 and the magnetic disk 233 are compared with the case where the arm portion 236 is simply bent obliquely downward as shown by a two-dot chain line in FIG. A wide gap 250 can be secured between them.

  Next, the moment that the load beam 235 acts on the magnetic head slider 35C will be considered.

  As shown in FIG. 24, since the load beam main body portion 237 and the third beam portion 244 are bent, a moment acts on the magnetic head slider 35C with respect to the center 251 where the flying force acts.

  The load beam main body portion 237 and the second and third beam portions 241 and 242 act with a counterclockwise moment M1.

  The first beam portion 244 acts a clockwise moment M2.

  The dimensions of each part of the load beam 235 are appropriately determined (for example, the total length is 9 mm, the gimbal part is 2.5 mm, the load beam main body part is 5.7 mm, and the width is 2 mm), and the above moments M1 and M2 are balanced. Yes.

  Also by this, the magnetic head slider 35C floats stably.

Next, pitching and rolling of the magnetic head slider 35C will be described with reference to FIG.
(1) Pitching The magnetic head slider 35C rotates in the pitching direction indicated by the arrow 44 with the bending of the first beam portion 244, the second and third beam portions 241, 242, and further the load beam main body portion 237. Move. At this time, all the beams warp in an arc shape, and in addition to the bending of the gimbal portion 238, the load beam main body portion 237 is bent.

For this reason, pitch rigidity becomes small enough.
(2) Rolling The magnetic head slider 35 </ b> C is mainly rolled by the arrow 45, with the second and third beam portions 241 and 242 being bent in the opposite directions in the vertical direction and the torsion of the load beam main body portion 237. Rotate in the direction.

  At this time, in addition to the bending of the gimbal portion 238, the load beam main body portion 237 is twisted.

  For this reason, roll rigidity is also small enough.

Next, primary bending and primary twisting of the load beam 235 of the magnetic head support mechanism 230 when waviness or dust is attached to the rotating magnetic disk will be described.
(1) Primary bending As shown in FIG. 25, the load beam 235 is bent and deformed.

  That is, the load beam main body portion 237 and the third, first, and second beam portions 241, 242, and 244 of the gimbal portion 238 are bent to be in the state shown in FIG.

The load beam 235 is thus made entirely flexible, but the resonance frequency of the primary bending is high against its low rigidity.
(2) Primary torsion The load beam 235 is torsionally deformed as shown in FIG.

  That is, in addition to the gimbal portion 238, the load beam main body portion 237 is deformed.

  Therefore, the load beam 235 is made flexible as described above, but the resonance frequency of the primary torsion is high against its low rigidity.

表３，表４は、本実施例の磁気ヘッド支持機構２３０と、図１の第１実施例の磁気ヘッド支持機構３０との特性比較を示す。

Tables 3 and 4 show a characteristic comparison between the magnetic head support mechanism 230 of the present embodiment and the magnetic head support mechanism 30 of the first embodiment of FIG.

  Table 3 shows the pitch rigidity, roll rigidity, and vertical rigidity of the load beam 235 in this embodiment obtained by computer simulation in comparison with those in the first embodiment.

  From Table 3, it can be seen that the pitch rigidity and roll rigidity are as low as about 1/4 of that of the first embodiment.

  Table 4 shows the resonance frequency in this example obtained by computer simulation in comparison with that in the first example.

  From Table 4, it can be seen that the primary bending resonance frequency, the primary torsional resonance frequency, and the in-plane resonance frequency are still sufficiently high.

  From Tables 3 and 4, the magnetic head support mechanism 230 of the present embodiment has a high resonance frequency similar to that of the magnetic head support mechanism 30 of the first embodiment, and has a significantly lower rigidity than the mechanism 30. It can be seen that the characteristics are obtained.

  Accordingly, the small-sized magnetic head slider 35C is kept sufficiently stable in the flying state.

  As a modification of the load beam, by bending the base side of the load beam main body 237, the load beam can be supported in the same manner as in FIG. 1 and the load F1 in FIG. 23 can be applied.

  In this case, only the outer portions 255 and 256 of the slits 248 and 249 are bent. For this reason, unnecessary stress does not act on the wiring patterns 91 to 94 positioned between the slits 248 and 249.

  Next, a modified example of the gimbal portion 238 of the load beam 235 will be described.

  A gimbal portion 238-1 in FIG. 27 has a first beam portion 244-1 having a large width A and an opening 239-1 having a large dimension B.

  The lengths of the second and third beam portions 241-1 and 242-1 are long.

  The gimbal portion 238-2 in FIG. 28 has second and third beam portions 241-2 and 242-2 with a small width dimension C.

  The gimbal part 238-3 in FIG. 29 has second and third beam parts 241-3 and 242-3 having a large width dimension D.

  The gimbal portion 238-4 in FIG. 30 has a configuration in which the center of the tip of the magnetic head slider fixing portion 240 and the tip of the load beam main body portion 237 are connected by a fourth beam portion 260.

  Although the fourth beam can prevent deformation of the magnetic head slider fixing portion, the rotational rigidity is also increased. Therefore, it is desirable that the length of the fourth beam be increased if the width is decreased.

  The gimbal part 238-5 in FIG. 31 has arc-shaped second and third beam parts 241-5 and 242-5.

  Further, as shown in FIG. 32, a bent connecting plate 261 may be prepared, and fixed to the arm portion 236A, and the load beam 235 may be fixed to the connecting plate 261.

  According to this configuration, the arm portion 236A can be dispensed with.

  In the first to sixth embodiments, the load of the load beam spring portion is provided with an R bend to obtain the load of the magnetic head slider. However, as in the seventh embodiment, the spring portion is left flat and the arm portion is kept flat. The mounting structure may be adopted.

It is the figure which looked at the magnetic head support mechanism which has the load beam which becomes 1st Example of this invention from the lower surface side. FIG. 2 is a plan view of a 3.5 inch magnetic disk device to which the magnetic head support mechanism of FIG. 1 is applied. It is a figure which shows the primary bending state of a load beam. It is a figure which shows the primary twist state of a load beam. It is the perspective view which looked at the magnetic head support mechanism of FIG. 1 from the upper surface side. FIG. 3 is a side view of the magnetic head support mechanism of FIG. 2. It is a figure which shows the magnetic head support mechanism which has the load beam which becomes 2nd Example of this invention. It is a figure which shows the magnetic head support mechanism which has the load beam which becomes 3rd Example of this invention. It is a figure which shows the magnetic head support mechanism which has a load beam which becomes 4th Example of this invention. FIG. 10 is a side view of the mechanism of FIG. 9. It is a figure which shows the magnetic head support mechanism which has the load beam which becomes 5th Example of this invention. It is a figure which shows the magnetic head support mechanism which has a load beam which becomes 6th Example of this invention. It is a figure which expands and shows the part by the side of the front end of a load beam in FIG. It is sectional drawing which follows the XIV-XIV line | wire in FIG. It is a figure which shows the connection state of the terminal part of a magnetic head slider, and the terminal part on a fixing | fixed part. It is a figure which shows the manufacturing process of the load beam in FIG. 12 which becomes one Example of this invention. It is a figure which shows a state when an etching process is completed in FIG. It is a figure which shows another manufacturing process of a load beam. It is a figure which shows the modification of this invention. It is a figure which shows the magnetic head support mechanism which has the load beam which becomes 7th Example of this invention. FIG. 21 is a plan view of a 1.8 inch magnetic disk device to which the magnetic head support mechanism of FIG. 20 is applied. It is a figure which shows the magnetic head support mechanism of FIG. It is a figure which shows a state when a magnetic head support mechanism is integrated in a magnetic disk apparatus. It is a figure which exaggerates and shows the state of FIG. It is a figure which shows the state of the primary bending of a load beam. It is a figure which shows the state of the primary twist of a road game. It is a figure which shows the 1st modification of the gimbal part of a load beam. It is a figure which shows the 2nd modification of the gimbal part of a load beam. It is a figure which shows the 3rd modification of the gimbal part of a load beam. It is a figure which shows the 4th modification of the gimbal part of a load beam. It is a figure which shows the 5th modification of the gimbal part of a load beam. It is a figure which shows the modification of 7th Example of this invention. It is a figure which shows an example of the conventional magnetic head support mechanism.

Explanation of symbols

15A to 15D Lead wire 16 Adhesive 17A First fixing point 17B Second fixing point 17C Third fixing point 20, 50, 60, 80, 90 Magnetic head support device 21 Load beam 22 Actuator arm portion 23 Elastic portion 24 Rigid part 25, 51, 61, 71 Gimbal part 26, 27 U-shaped opening 28, 29 Slit-like opening 30, 30A Magnetic head slider fixing part 31, 32 First beam part 33, 34 Second beam part 35, 35A, 35B, 35C Magnetic head slider 36 Center of magnetic head slider fixed portion 37 Load beam longitudinal center line 38 Transverse line 39A, 39B, 52, 53 T-shaped beam 40-43 Connection point 44, 45 Arrow 47 End face 48 Magnetic field Head 72, 73, 81 鍔 part 74 Opening 75 Bonding part 76 Frame part 91, 92, 93, 94 Arrangement Patterns 95A to 95D, 96A to 96D, 100A to 100D Terminal portion 97 Insulating film 98 Protective film 101A to 101D Au balls 102A, 102B, 102C Holes 103A to 103D, 104A to 104D Dummy pattern 106, 107 Auxiliary film 108 Convex pattern 201 Stainless steel plate 202 Arm before punching 210, 211 Dummy pattern 220 3.5 inch magnetic disk device 221 3.5 inch magnetic disk 223 Head positioning actuator 230 Magnetic head support mechanism 231 Magnetic disk device 232 Enclosure 233 1.8 inch magnetic Disk 234 Head positioning actuator 235 Load beam 236 Arm part 236a Slope upward part 236b Slope downward part 236c Tip part 237 Low Beam body part 238 Gimbal part 239 U-shaped opening 240 Magnetic head slider fixing part 241 Second beam part 242 Third beam part 243 Joint part 244 First beam part 245, 246, 247 Hole 248, 249 Slit 250 Gap 251 Levitation force action center 255, 256 Outside portion of slits 248, 249 260 Fourth beam portion 261 Connecting plate

Claims (1)

A method of manufacturing a head slider support having a wiring pattern on a sheet-like head slider support,
Forming an insulating layer on the head slider support;
A conductive layer is formed on the insulating layer and patterned to form a wiring pattern,
On the head slider support, a head slider having a first terminal portion on the end face is mounted so that the first terminal portion faces the second terminal portion at the end of the wiring pattern at a right angle,
A method of manufacturing a head slider support, comprising: contacting a conductor ball so as to straddle between the first terminal portion and the second terminal portion.

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